Image for displaying processed data

Abstract

As shown in the reference image Figure 2, the search conditions for the search item (7) are set in the search condition setting window (1) to search for past processing performed on wafers, etc., and the desired processing is selected from the search result list (2). The data of the selected processing is then displayed in a graph (3) or map (4). The graph (3) may, for example, display the temperature change of the wafer with respect to processing time, and may display data for a specific time. The map (4) may, for example, display a color-coded temperature map on the wafer together with a color sample (5).

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