Image for displaying processed data

Abstract

As shown in the reference image Figure 2, the search criteria setting window (1) is expanded to set the search criteria for the search items, a past process performed on the wafer is searched, the desired process is selected from the search results list (2), and the data of the selected process is displayed in a graph (3) or map (4). The graph (3) may, for example, display the temperature change of the wafer with respect to the processing time, and may also display data (8) for a specific time. The map (4) may, for example, display a color-coded temperature map on the wafer along with a color sample (5).

Images