Mass spectroscope and power supply device

Abstract

To provide a mass spectroscope and a power supply device each enabling reduction of man-hours and cost of maintenance.SOLUTION: A power supply device 100 applies voltage to a quadrupole mass filter 130. The power supply device 100 comprises a main substrate 101 and a detection substrate 102. The main substrate 101 includes a detection section 80. The detection substrate 102 includes a detection section 10 and an identification section 70. The detection section 10 detects, as a detection voltage, an AC component of the voltage applied to the quadrupole mass filter 130 using a rectification element. The identification section 70 outputs identification information of the detection section 10 determined correspondingly to a configuration of the rectification element of the detection section 10. The detection section 80 detects the identification information output by the identification section 70 and gives the detected identification information to a correction section 90 correcting deviation of a voltage caused by a leakage current of the rectification element.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a mass spectrometer and a power supply device. [Background technology]

[0002] Mass spectrometers are known as analytical devices that analyze the masses of components contained in a sample. For example, in a quadrupole mass spectrometer described in Patent Document 1, various ions generated from a sample by an ion source are introduced into a quadrupole filter. A radio frequency voltage and a direct current voltage are applied to four rod electrodes of the quadrupole filter by a quadrupole power supply unit. Only ions having a specific mass-to-charge ratio selectively pass through the quadrupole filter and are detected by a detector. The mass-to-charge ratio of the ions passing through the quadrupole filter depends on the radio frequency voltage and the direct current voltage applied to each rod electrode.

[0003] In the quadrupole power supply unit, the radio frequency voltage applied to each rod electrode is converted to a detection current through a capacitor and flows through a diode in the detection unit. The detection current is converted to a DC voltage by flowing through a resistor, and the difference between the converted voltage and a target voltage is fed back. The target voltage is set corresponding to an arbitrary mass-to-charge ratio. Therefore, by sweeping the target voltage, the radio frequency voltage applied to each rod electrode can be swept to scan the mass-to-charge ratio of ions passing through the quadrupole filter.

[0004] The DC voltage is controlled so that the ratio to the radio frequency voltage is constant when the radio frequency voltage is swept. Here, the stable region in which ions can stably pass through the quadrupole filter (stable region based on the stability conditions of the solution of the Mathieu equation) is shown by the approximately triangular frame in Figures 7(a) and 7(b) of Patent Document 2. As the mass-to-charge ratio increases, the area of ​​this stable region expands while moving in the same direction as the increasing direction of the mass-to-charge ratio.

[0005] In Patent Document 2, the straight line showing the change in DC voltage with respect to the mass-to-charge ratio is changed so as to cross the same portion of the stable region that changes similarly in response to the mass-to-charge ratio, thereby maintaining the mass resolution of the quadrupole filter uniform over the entire range of mass-to-charge ratios. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2002-33075 A [Patent Document 2] Patent No. 5556890 Summary of the Invention [Problem to be solved by the invention]

[0007] When a relatively large detection current flows through the diode, the detection voltage is converted to a voltage smaller than the voltage that should be converted due to leakage current in the diode, and the voltage output from the feedback circuit is greater than the target voltage. In this case, in the range where the mass-to-charge ratio is large, the difference between the output voltage and the target voltage increases, causing a deviation in the mass-to-charge ratio. Even when the control described in Patent Document 2 is performed, in the range where the mass-to-charge ratio is large, the straight line showing the change in the DC voltage does not cross the desired portion of the stable region, resulting in a decrease in the uniformity of the mass resolution.

[0008] If the characteristics of the diodes are known, it is possible to implement a control circuit in the quadrupole power supply that corrects the mass-to-charge ratio deviation caused by the above-mentioned nonlinearity of the diodes. However, in recent years, the diodes available on the market fluctuate in a short period of time. Therefore, when it becomes necessary to replace the diodes during maintenance of the quadrupole power supply, it is not easy to obtain a substitute or compatible part. In addition, since the quadrupole power supply is expensive, if a substitute or compatible part for the diode is not available, it is necessary to replace the entire quadrupole power supply including the control circuit. As a result, the cost required for maintenance increases.

[0009] An object of the present invention is to provide a mass spectrometer and a power supply device that can reduce the maintenance effort and costs. [Means for solving the problem]

[0010] One aspect of the present invention relates to a mass spectrometer comprising a mass filter which selects ions having a mass-to-charge ratio corresponding to an applied voltage, a power supply unit having a first and second substrate and which applies a voltage to the mass filter, and a correction unit, wherein the first substrate includes a detection unit which uses a rectifying element to detect an AC component of the voltage applied to the mass filter as a detection voltage, and an identification unit which outputs identification information of the detection unit which is determined corresponding to the configuration of the rectifying element in the detection unit, the second substrate includes a detection unit which detects the identification information output by the identification unit, and the correction unit corrects for voltage deviations caused by leakage current of the rectifying element based on the identification information detected by the detection unit.

[0011] Another aspect of the present invention relates to a power supply device which applies a voltage to a mass filter which selects ions having a mass-to-charge ratio corresponding to the applied voltage, the power supply device comprising a first substrate and a second substrate, the first substrate including a detection section which uses a rectifying element to detect an AC component of the voltage applied to the mass filter as a detection voltage, and an identification section which outputs identification information of the detection section which is determined corresponding to the configuration of the rectifying element in the detection section, the second substrate including a detection section which detects the identification information output by the identification section and provides the detected identification information to a correction section which corrects voltage deviations due to leakage current of the rectifying element based on the identification information. Effect of the Invention

[0012] According to the present invention, it is possible to reduce the effort and cost required for maintaining a power supply device. [Brief description of the drawings]

[0013] [Figure 1]1 is a diagram showing a configuration of a mass spectrometer according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a diagram showing a configuration of the power supply device of FIG. [Diagram 3] 3 is a diagram illustrating a configuration of a detection unit in FIG. 2. [Figure 4] FIG. 13 is a diagram showing a mass spectrum measured using a detection section including one rectification section. [Diagram 5] FIG. 13 is a diagram showing the characteristics of a rectifying element used in the examples. [Figure 6] FIG. 2 is a diagram showing a mass spectrum in Example 1. [Figure 7] FIG. 1 shows a mass spectrum in Example 2. [Figure 8] FIG. 11 is a diagram showing a mass spectrum in Example 3. [Figure 9] FIG. 13 is a diagram showing a mass spectrum in Example 4. [Figure 10] FIG. 4 is a diagram illustrating a first example of an identification unit and a detection unit. [Figure 11] FIG. 11 is a diagram illustrating an example of identification information. [Figure 12] FIG. 11 is a diagram illustrating an example of correspondence information. [Figure 13] FIG. 11 is a diagram illustrating a second example of the identification unit and the detection unit. [Figure 14] FIG. 13 is a diagram illustrating a third example of the identification unit and the detection unit. [Figure 15] FIG. 4 is a diagram showing a configuration of a power supply device according to a first modified example. [Figure 16] FIG. 13 is a diagram showing a configuration of a power supply device according to a second modified example. [Figure 17] FIG. 13 is a diagram illustrating a correction unit according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] (1) Mass spectrometer configuration A mass spectrometer and a power supply unit according to an embodiment of the present invention will be described in detail below with reference to the drawings. Fig. 1 is a diagram showing the configuration of a mass spectrometer according to an embodiment of the present invention. As shown in Fig. 1, a mass spectrometer 200 includes a power supply unit 100, an ion source 110, an ion transport unit 120, a quadrupole mass filter 130, an ion detector 140, and a processing unit 150. The ion source 110, the ion transport unit 120, the quadrupole mass filter 130, and the ion detector 140 are housed in a vacuum container (not shown).

[0015] The ion source 110 includes, for example, a light source in the ultraviolet region, and generates ions of various components contained in the sample by irradiating the sample to be analyzed with pulsed light. The ion transport section 120 includes, for example, an ion lens, and focuses the ions generated by the ion source 110 and introduces them into the quadrupole mass filter 130 along an ion optical axis 201 shown by a dotted line.

[0016] The quadrupole mass filter 130 includes four rod electrodes 131 to 134. The rod electrodes 131 to 134 are arranged parallel to each other so as to be inscribed in an imaginary cylinder centered on the ion optical axis 201. Therefore, the rod electrodes 131 and 133 face each other with the ion optical axis 201 in between. The rod electrodes 132 and 134 face each other with the ion optical axis 201 in between.

[0017] The power supply unit 100 applies a sum voltage +U+Vcosωt of a DC voltage +U and a radio frequency voltage +Vcosωt to the rod electrodes 131, 133. The power supply unit 100 also applies a sum voltage -U-Vcosωt of a DC voltage -U and a radio frequency voltage -Vcosωt to the rod electrodes 132, 134. As a result, of the ions introduced into the quadrupole mass filter 130, only ions having a specific mass-to-charge ratio determined by the DC voltage U and the amplitude V of the radio frequency voltage pass through the quadrupole mass filter 130. The configuration of the power supply unit 100 will be described later.

[0018] The ion detector 140 includes, for example, a secondary electron multiplier. The ion detector 140 detects the ions that have passed through the quadrupole mass filter 130, and outputs a detection signal indicating the amount of ions detected to the processing device 150.

[0019] The processing device 150 is realized by an information processing device such as a personal computer including a CPU (Central Processing Unit) and a storage unit. The processing device 150 controls the operations of the power supply device 100, the ion transport unit 120, the quadrupole mass filter 130, and the ion detector 140. The processing device 150 also processes the detection signal output by the ion detector 140 to generate a mass spectrum indicating the relationship between the mass-to-charge ratio of the ions and the amount of detection.

[0020] (2) Power supply configuration Fig. 2 is a diagram showing the configuration of the power supply device 100 in Fig. 1. As shown in Fig. 2, the power supply device 100 includes a detection unit 10, a voltage control unit 20, a high frequency voltage generating unit 30, a DC voltage generating unit 40, an adder unit 50, a coil unit 60, a discrimination unit 70, a detection unit 80, and a correction unit 90. The detection unit 10 has a rectification unit including a rectification element. The detection unit 10 will be described in detail later.

[0021] The power supply device 100 also includes a main board 101 and a detection board 102. The detection board 102 is an example of a first board, and the main board 101 is an example of a second board. The voltage control unit 20, the high frequency voltage generating unit 30, the DC voltage generating unit 40, the adding unit 50, the detecting unit 80, and the correcting unit 90 are mounted on the main board 101. The detection unit 10 and the discrimination unit 70 are mounted on the detection board 102. The detection board 102 may be disposed near a vacuum vessel (not shown) of the mass spectrometer 200.

[0022] The voltage control unit 20, the high frequency voltage generating unit 30, the DC voltage generating unit 40 and the adding unit 50 are each composed of circuit elements such as an electric resistor, an operational amplifier or a logic circuit. The coil unit 60 is composed of a transformer, for example. In this example, the coil unit 60 is fixed to a casing (not shown) of the power supply device 100, but may be mounted on the main board 101 or the detection board 102.

[0023] 1 provides the voltage control unit 20 with a control voltage, and also receives a detection voltage from the detection unit 10 as feedback. The control voltage is a voltage for controlling the radio frequency voltage applied to the quadrupole mass filter 130 so that the radio frequency voltage coincides with an arbitrary target voltage. The detection voltage fed back by the detection unit 10 will be described later.

[0024] Voltage control unit 20 generates two systems of voltages by appropriately performing various processes such as comparison, modulation, amplification, and addition on the control voltage and the detection voltage, and supplies them to radio frequency voltage generating unit 30 and DC voltage generating unit 40. Radio frequency voltage generating unit 30 generates radio frequency voltages ±Vcosωt that are 180° out of phase with each other, based on the voltage provided by voltage control unit 20. DC voltage generating unit 40 generates DC voltages ±U that are opposite in polarity to each other, based on the voltage provided by voltage control unit 20.

[0025] The adder unit 50 generates voltages +U+Vcosωt and -U-Vcosωt by adding together the high frequency voltages ±Vcosωt generated by the high frequency voltage generating unit 30 and the DC voltages ±U generated by the DC voltage generating unit 40. The coil unit 60 amplifies the voltages ±U±Vcosωt generated by the adder unit 50. The coil unit 60 also applies the amplified voltage +U+Vcosωt from one output terminal to the rod electrodes 131, 133, and applies the amplified voltage -U-Vcosωt from the other output terminal to the rod electrodes 132, 134.

[0026] The identification unit 70 outputs identification information of the detection unit 10 that is determined in accordance with the configuration of the rectifying elements of the detection unit 10. Here, the configuration of the rectifying elements means the number of rectifying sections (number of parallel connections) of the detection unit 10, or the characteristics of the rectifying elements. In this embodiment, if the product names (manufacturer and model number) of the rectifying elements are the same, the characteristics of the rectifying elements are the same. Therefore, even if the rectifying elements are the same type (e.g., high-speed diodes), if the product names of the rectifying elements are different, the characteristics of the rectifying elements will be different.

[0027] The detection unit 80 detects the identification information output by the identification unit 70. The correction unit 90 corrects the deviation between the high frequency voltage and the target voltage caused by the leakage current of the rectifying element (hereinafter referred to as the deviation of the high frequency voltage, or simply as the deviation) based on the identification information detected by the detection unit 80. In the example of FIG. 2, the correction unit 90 generates a correction voltage for canceling the deviation of the high frequency voltage, and adds the generated correction voltage to the control voltage. The details of the identification unit 70 and the detection unit 80 will be described later.

[0028] (3) Detector The detection unit 10 is connected between the output terminals of the coil unit 60, and converts the high frequency voltage output from the coil unit 60 into a detection voltage. Fig. 3 is a diagram showing the configuration of the detection unit 10 in Fig. 2. As shown in Fig. 3, the detection unit 10 includes one or more rectifier units 11, detection capacitors 12 and 13, a detection resistor 14, and a smoothing capacitor 15.

[0029] The rectifier unit 11 includes four rectifier elements D1 to D4. The rectifier elements D1 to D4 are, for example, high-speed diodes or Schottky barrier diodes. The cathode and anode of the rectifier element D1 are connected to nodes N1 and N3, respectively. The cathode and anode of the rectifier element D2 are connected to nodes N2 and N3, respectively. The cathode and anode of the rectifier element D3 are connected to nodes N4 and N1, respectively. The cathode and anode of the rectifier element D4 are connected to nodes N4 and N2, respectively.

[0030] When multiple rectification units 11 are provided in the detection unit 10, the multiple rectification units 11 are connected in parallel. Specifically, nodes N1 of the multiple rectification units 11 are connected to each other, and nodes N2 of the multiple rectification units 11 are connected to each other. In addition, nodes N3 of the multiple rectification units 11 are connected to each other, and nodes N4 of the multiple rectification units 11 are connected to each other. Nodes N3 of the multiple rectification units 11 are connected to a ground terminal.

[0031] The detection capacitors 12 and 13 are, for example, ceramic capacitors. The detection capacitor 12 is connected between one output terminal of the coil section 60 (FIG. 2) that outputs a voltage +U+Vcosωt and a node N1. The detection capacitor 13 is connected between the other output terminal of the coil section 60 that outputs a voltage -U-Vcosωt and a node N2. The detection resistor 14 and the smoothing capacitor 15 are connected in parallel with each other and are connected between the node N4 and a ground terminal.

[0032] According to the above configuration, the high frequency voltage at the output terminal of the coil unit 60 is converted into a detection current by the detection capacitor 12 or the detection capacitor 13, and is rectified by flowing through the multiple rectifier units 11. The rectified current is converted into a detection voltage by flowing through the detection resistor 14, and is fed back to the voltage control unit 20 in FIG.

[0033] 3, the detection unit 10 includes a plurality of rectification units 11, but the embodiment is not limited to this. The number of rectification units 11 provided in the detection unit 10 may be one. Basically, when the linearity of the leakage current in the rectification elements D1 to D4 is good, one rectification unit 11 is provided in the detection unit 10. The leakage current is a current that flows in the opposite direction to the rectification direction in the rectification elements D1 to D4.

[0034] The leakage current includes a DC component when a reverse voltage is applied, an AC component due to the junction capacitance between the anode and cathode, and a component due to the reverse recovery time. Good linearity means that the magnitude of the leakage current flowing through the rectifier elements D1 to D4 is approximately constant regardless of the magnitude of the detection current flowing through the rectifier elements D1 to D4. Poor linearity means that when a detection current of a predetermined value or more flows through the rectifier elements D1 to D4, the leakage current flowing through the rectifier elements D1 to D4 increases suddenly.

[0035] Fig. 4 is a diagram showing a mass spectrum measured using a detection section 10 including one rectification section 11. In Fig. 4, peaks near a plurality of specific mass-to-charge ratios are displayed in an enlarged manner. The enlargement rates of the plurality of peaks are different. The same applies to Figs. 6 to 9 described below.

[0036] The rectifier 11 of the detector 10 used to measure the mass spectrum in the upper part of Fig. 4 is composed of rectifier elements D1-D4 with relatively good leakage current linearity. In this case, each peak is separated from the other peaks without increasing the overall width of each peak. The rectifier 11 of the detector 10 used to measure the mass spectrum in the lower part of Fig. 4 is composed of rectifier elements D1-D4 with relatively poor leakage current linearity. In this case, the peak width increases in the range where the mass-to-charge ratio is large. Also, in the range where the mass-to-charge ratio is large, each peak is not separated from the other peaks.

[0037] Increasing the number of rectifiers 11 connected in parallel in the detection unit 10 improves the linearity of the leakage current of the rectifier elements D1 to D4. This makes it possible to correct the mass spectrum so that each peak is separated from the other peaks even in a range where the mass-to-charge ratio is relatively large. On the other hand, the more the number of rectifiers 11 connected in parallel is increased, the greater the deviation in the radio frequency voltage becomes. Even in this case, the deviation in the radio frequency voltage can be cancelled out by adding an appropriately determined correction voltage to the control voltage.

[0038] (4) Examples In the following Examples 1 to 4, rectifying elements D1 to D4 having different characteristics were used to correct the mass spectrum. Specifically, in Example 1, HSMS-281 manufactured by Broadcom, Inc. was used. In Example 2, BAT81S manufactured by Vishay Intertechnology, Inc. was used. In Example 3, RB706F-40 manufactured by ROHM Co., Ltd. was used. In Example 4, BAV99W manufactured by Nexperia BV was used.

[0039] Fig. 5 is a diagram showing the characteristics of rectifying elements D1 to D4 used in Examples 1 to 4. The horizontal axis of Fig. 5 indicates the mass-to-charge ratio, and the vertical axis indicates the deviation in radio frequency voltage. As shown in Fig. 5, in the rectifying elements D1 to D4 of Example 1, the deviation was a substantially constant value near 0 over a wide range of mass-to-charge ratios (0 to 2000). In the rectifying elements D1 to D4 of Examples 2 and 3, the deviation was a relatively small constant value in the range of mass-to-charge ratios from 0 to 1200, but the deviation increased in the range of mass-to-charge ratios of 1200 or more. In the rectifying elements D1 to D4 of Example 4, the deviation was large overall.

[0040] Fig. 6 is a diagram showing a mass spectrum in Example 1. Fig. 7 is a diagram showing a mass spectrum in Example 2. Fig. 8 is a diagram showing a mass spectrum in Example 3. Fig. 9 is a diagram showing a mass spectrum in Example 4. In each of Figs. 6 to 9, the upper part shows the mass spectrum before correction, and the lower part shows the mass spectrum after correction.

[0041] In Example 1, even when no correction is made to the mass spectrum, each peak is generally separated from the other peaks, as shown in the upper part of Figure 6. In this case, by performing correction in software to make the mass resolution uniform, a good mass spectrum can be obtained, as shown in the lower part of Figure 6.

[0042] On the other hand, in Examples 2 to 4, as shown in the upper parts of Figs. 7 to 9, each peak is not separated from the other peaks within a predetermined range of mass-to-charge ratios. In this case, in order to separate each peak from the other peaks, a detection unit 10 including a plurality of rectification units 11 connected in parallel is used for measuring the mass spectrum. Also, an appropriate correction voltage is added to the control voltage as necessary. As a result, a good corrected mass spectrum is obtained, as shown in the lower parts of Figs. 7 and 8, respectively.

[0043] The number of rectifiers 11 required to correct the mass spectrum differs depending on the characteristics of the rectifier elements D1 to D4. Furthermore, the correction voltage required to correct the mass spectrum differs depending on the number of rectifiers 11 connected or the characteristics of the rectifier elements D1 to D4. Therefore, when manufacturing the power supply device 100 of FIG. 2, a number of rectifiers 11 appropriately determined according to the characteristics of the rectifier elements D1 to D4 are mounted on the detection board 102. Furthermore, a correction voltage appropriately determined according to the number of rectifiers 11 connected or the characteristics of the rectifier elements D1 to D4 is set.

[0044] In this way, the main board 101 is manufactured in correspondence with the configuration of the rectifying elements D1-D4 in the detection board 102. However, during maintenance of the power supply device 100, it may become necessary to replace the rectifying elements D1-D4. In this case, if the rectifying elements D1-D4 having characteristics different from those of the rectifying elements D1-D4 before replacement are used as replacement rectifying elements D1-D4, the correspondence between the detection board 102 and the main board 101 will be broken. To prevent this, an identification unit 70 and a detection unit 80 are mounted on the detection board 102 and the main board 101, respectively. Details of the identification unit 70 and the detection unit 80 will be described below.

[0045] (5) Identification and detection unit (a) First Example Fig. 10 is a diagram showing a first example of the discrimination unit 70 and the detection unit 80. As shown in Fig. 10, the discrimination unit 70 includes a ground terminal 71, one or more output terminals 72, and one or more switches 73. The ground terminal 71 is an example of a first terminal, and the output terminal 72 is an example of a second terminal. The one or more switches 73 correspond to the one or more output terminals 72, respectively. Each switch 73 is connected between the corresponding output terminal 72 and the ground terminal 71.

[0046] When the detection board 102 is manufactured, one or more switches 73 are opened or closed in accordance with the configuration of the rectifying elements D1 to D4 of the detection unit 10 mounted on the detection board 102. In this case, any identification information can be easily output. The relationship between the configuration of the rectifying elements D1 to D4 and the open / closed state of the one or more switches 73 is determined in advance.

[0047] For example, when two rectifier units 11 including rectifier elements D1-D4 with a product name "X" are connected in parallel, the first and second switches 73 may be set to a closed state, and the third switch 73 may be set to an open state. When one rectifier unit 11 including rectifier elements D1-D4 with a product name "Y" is connected in parallel, the first switch 73 may be set to a closed state, and the second and third switches 73 may be set to an open state.

[0048] The detection unit 80 includes a ground terminal 81, one or more input terminals 82, and one or more operational amplifiers 83. The correction unit 90 includes a memory unit 91, a voltage determination unit 92, and a voltage generation unit 93. In this example, a CPU is mounted on the main board 101. The voltage determination unit 92 is a functional unit realized by the CPU. The voltage generation unit 93 includes a power supply unit capable of generating a DC voltage within a predetermined range. The ground terminal 81 corresponds to the ground terminal 71, and is maintained at a ground potential. The one or more input terminals 82 correspond to the one or more output terminals 72, respectively. In addition, the one or more operational amplifiers 83 are connected to the one or more input terminals 82, respectively.

[0049] The ground terminal 71 and the one or more output terminals 72 are connected to a ground terminal 81 and one or more input terminals 82 by wiring, respectively. This allows the ground terminal 71 to be maintained at ground potential. If the ground terminal 71 is directly maintained at ground potential, the ground terminal 71 does not need to be connected to the ground terminal 81. By connecting the identification unit 70 and the detection unit 80, the states of the one or more switches 73 are detected as identification information by one or more operational amplifiers 83.

[0050] Fig. 11 is a diagram showing an example of the identification information. In the example of Fig. 11, the open state of each switch 73 is marked as "0" and the closed state is marked as "1." Depending on the states of the multiple switches 73, the identification information is uniquely determined to be one of "0", "1", "2", "3", "4", etc.

[0051] For example, when the first and second switches 73 are closed and the third switch 73 is open, the identification information is "3." When the first switch 73 is closed and the second and third switches 73 are open, the identification information is "3." When the first switch 73 is closed and the second and third switches 73 are open, the identification information is "1."

[0052] The output identification information can be easily identified as a voltage by one or more operational amplifiers 83. If the number of output terminals 72 of the identification unit 70 is n, the number of types of identification information is two. n Therefore, in this example, the identification unit 70 includes a plurality of output terminals 72, but the embodiment is not limited to this. When the type of identification information is two, the identification unit 70 includes one output terminal 72.

[0053] The correction voltage suitable for correcting the deviation of the high frequency voltage is determined in correspondence with the identification information. Thus, correspondence information indicating the correspondence relationship between the identification information and the correction voltage for correcting the deviation of the high frequency voltage is stored in advance in the storage unit 91. Fig. 12 is a diagram showing an example of the correspondence information. The correction voltages in Fig. 12 are identified by conducting experiments using various rectifier elements D1 to D4 during the manufacture of the power supply device 100.

[0054] The voltage determination unit 92 acquires the identification information detected by the operational amplifier 83. The voltage determination unit 92 also determines a correction voltage based on the acquired identification information and the corresponding information stored in the storage unit 91, and controls the voltage generation unit 93 to generate the determined correction voltage. In this case, the correction voltage corresponding to the configuration of the rectification elements D1 to D4 can be easily generated. The voltage generation unit 93 adds the generated correction voltage to the control voltage. This corrects the deviation of the high frequency voltage caused by the leakage current of the rectification elements D1 to D4 mounted on the detection board 102.

[0055] (b) Second Example In a first example of the identification unit 70, a switch 73 is connected between the ground terminal 71 and each output terminal 72, but the embodiment is not limited to this. Fig. 13 is a diagram showing a second example of the identification unit 70 and the detection unit 80. As shown in Fig. 13, in this example, an electric resistor 74 having an extremely small resistance value is used instead of the switch 73. The electric resistor 74 may be a jumper wire.

[0056] Specifically, in the first example, an electric resistance 74 is connected between the output terminal 72 to which the switch 73 to be closed was connected and the ground terminal 71. On the other hand, in the first example, an electric resistance 74 is not connected between the output terminal 72 to which the switch 73 to be opened was connected and the ground terminal 71. In this case, in the identification information of FIG. 11, an open state in which the electric resistance 74 is not connected is recorded as "0", and an open state in which the electric resistance 74 is connected is recorded as "1". Even in this configuration, like the first example of the identification unit 70, the identification information can be output from the identification unit 70 to the detection unit 80.

[0057] Thus, in the first or second example of the identification unit 70, the identification information is determined corresponding to the electrical connection state between the ground terminal 71 and the one or more output terminals 72. In this case, the identification information can be easily determined. Particularly, in the first example, the identification information is determined corresponding to the state of the switch 73. Therefore, by switching the state of the switch 73, any identification information can be easily output.

[0058] (c) Third Example A third example of the discrimination unit 70 and the detection unit 80 will be described below with respect to differences from the first example. FIG. 14 is a diagram showing the third example of the discrimination unit 70 and the detection unit 80. As shown in FIG. 14, the discrimination unit 70 includes one output terminal 72 instead of multiple output terminals. Furthermore, the discrimination unit 70 includes an electric resistor 75 instead of the switch 73. The electric resistor 75 is connected between the ground terminal 71 and the output terminal 72.

[0059] The detection unit 80 includes one input terminal 82 and an operational amplifier 83, not multiple ones. The ground terminal 81 is an example of a third terminal, and the input terminal 82 is an example of a fourth terminal. The detection unit 80 also includes an electric resistance 84 and a power supply unit 85. The power supply unit 85 is, for example, a DC power supply. The operational amplifier 83 is connected to the input terminal 82. The electric resistance 84 is connected between the input terminal 82 and the positive terminal of the power supply unit 85. The negative terminal of the power supply unit 85 is connected to the ground terminal 81.

[0060] The ground terminal 71 and the output terminal 72 are connected to a ground terminal 81 and an input terminal 82 by wiring, respectively. By connecting the identification unit 70 and the detection unit 80, a voltage from a power supply unit 85 is applied to the series-connected electrical resistances 75 and 84. The potential between the electrical resistances 75 and 84 is detected by an operational amplifier 83 as identification information. That is, the identification information is determined as the divided voltage of the electrical resistance 75.

[0061] In this example, the voltage of the power supply unit 85 and the resistance value of the electrical resistor 84 are constant. For example, the output voltage of the power supply unit 85 is 5V, and the resistance value of the electrical resistor 84 is 1 kΩ. On the other hand, an electrical resistor having a different resistance value depending on the configuration of the rectifying elements D1 to D4 is used as the electrical resistor 75. Therefore, the identification information is uniquely determined corresponding to the resistance value of the electrical resistor 75.

[0062] When the detection board 102 is manufactured, an electrical resistor 75 is connected between the ground terminal 71 and the output terminal 72 so as to correspond to the configuration of the rectifying elements D1 to D4 of the detection unit 10 mounted on the detection board 102. The relationship between the configuration of the rectifying elements D1 to D4 and the resistance value of the electrical resistor 75 is determined in advance.

[0063] For example, when two rectifier units 11 including rectifier elements D1-D4 with a product name "X" are connected in parallel, the electrical resistor 75 having a resistance value of 1 kΩ may be connected. In this case, the identification information is 2.5V. When one rectifier unit 11 including rectifier elements D1-D4 with a product name "Y" is connected in parallel, the electrical resistor 75 having a resistance value of 100Ω may be connected. In this case, the identification information is about 0.5V.

[0064] In this example, the desired identification information can be selected by one electrical resistor 75. Therefore, there is no need to increase the mounting area of ​​the detection board 102. This allows the power supply device 100 to be miniaturized. Note that in this example, the electrical resistor 75 may be a variable resistor whose resistance value is adjustable. In this case, it becomes easy to adjust the resistance value of the electrical resistor 75 according to the configuration of the rectifying elements D1 to D4.

[0065] The voltage determination unit 92 acquires the identification information detected by the operational amplifier 83. The voltage determination unit 92 also determines a correction voltage based on the acquired identification information and the corresponding information stored in the storage unit 91, and controls the voltage generation unit 93 to generate the determined correction voltage. The voltage generation unit 93 adds the generated correction voltage to the control voltage. This corrects the deviation of the high-frequency voltage caused by the leakage current of the rectifier elements D1 to D4 mounted on the detection board 102.

[0066] (6) Variations In this embodiment, the correction unit 90 adds the generated correction voltage to the control voltage, but the embodiment is not limited to this. FIG. 15 is a diagram showing a configuration of a power supply device 100 according to a first modified example. As shown in FIG. 15, the correction unit 90 may add the generated correction voltage to the detection voltage. FIG. 16 is a diagram showing a configuration of a power supply device 100 according to a second modified example. As shown in FIG. 16, the correction unit 90 may add the generated correction voltage to a sum voltage of the control voltage and the detection voltage. Even in these cases, the deviation of the high-frequency voltage can be easily corrected, similar to the power supply device 100 of FIG. 2.

[0067] (7) Effects In mass spectrometer 200 according to this embodiment, power supply device 100 applies a sum of a DC voltage and a radio frequency voltage to quadrupole mass filter 130. Ions having a mass-to-charge ratio corresponding to the applied voltage are selected by quadrupole mass filter 130. In power supply device 100, the radio frequency voltage, which is the AC component of the voltage applied to quadrupole mass filter 130, is detected as a detection voltage by detection unit 10. In addition, deviations in the radio frequency voltage caused by leakage currents in rectifier elements D1 to D4 are corrected by correction unit 90.

[0068] In the power supply device 100, the detection unit 10 is mounted on a detection board 102. Also, a detection unit 80 that detects the identification information output by the detection unit 10 is mounted on a main board 101. Therefore, when it becomes necessary to replace the rectifying elements D1 to D4 of the detection unit 10 during maintenance of the power supply device 100, it is only necessary to replace the detection board 102, and it is not necessary to replace the entire power supply device 100 including the detection board 102 and the main board 101.

[0069] Furthermore, in the case where rectifying elements D1-D4 having the same characteristics as the rectifying elements D1-D4 before replacement cannot be obtained during maintenance, rectifying elements D1-D4 having characteristics different from those of the rectifying elements D1-D4 before replacement will be used. Even in this case, it is possible to configure the rectifying elements D1-D4 so that the linearity of the leakage current is improved according to the characteristics of the rectifying elements D1-D4, for example by changing the number of connections of the rectifying unit 11.

[0070] Here, if the configuration of the rectifying elements D1 to D4 is changed, the deviation of the high frequency voltage changes. Even in this case, the identification unit 70 mounted on the detection board 102 outputs the identification information of the detection unit 10 determined in accordance with the configuration of the rectifying elements D1 to D4. Therefore, in the main board 101, the deviation of the high frequency voltage is appropriately corrected by the correction unit 90 based on the identification information corresponding to the configuration of the rectifying elements D1 to D4.

[0071] Thus, according to the above configuration, when maintaining the power supply device 100, it is not necessary to obtain rectifying elements D1-D4 having the same characteristics as the rectifying elements D1-D4 before replacement, making it easy to select replacement rectifying elements D1-D4. Also, even if the configuration of the rectifying elements D1-D4 in the detection board 102 is changed, it is not necessary to replace the main board 101 in correspondence with the configuration of the rectifying elements D1-D4. As a result, the effort and cost of maintaining the power supply device 100 can be reduced.

[0072] In this embodiment, identification information corresponding to the configurations of various available rectifier elements D1 to D4 is determined in advance when the power supply device 100 is manufactured. Therefore, when any of the rectifier elements D1 to D4 available at the time of manufacturing the power supply device 100 is mounted on the detection board 102, it is possible to correct the deviation of the high frequency voltage in accordance with the configuration of the rectifier elements D1 to D4.

[0073] On the other hand, in the maintenance of the power supply device 100, there is a possibility that new rectifier elements D1 to D4 that are not associated with identification information, such as rectifier elements D1 to D4 sold after the manufacture of the power supply device 100, are used for replacement. In such a case, a correction voltage for correcting the deviation of the high-frequency voltage suitable for the configuration of the replacement rectifier elements D1 to D4 is first identified by an experiment or the like. Then, a detection board 102 on which an identification unit 70 that outputs identification information associated with the identified correction voltage is mounted is selected as the replacement board. As a result, even when new rectifier elements D1 to D4 are used for replacement, it is possible to correct the deviation of the high-frequency voltage in accordance with the configuration of the rectifier elements D1 to D4.

[0074] (8) Other embodiments (a) In the above embodiment, the power supply device 100 includes a correction unit 90, and the correction unit 90 is mounted on the main board 101. In this case, the wiring for connecting the detection unit 80 and the correction unit 90 can be made compact. However, the embodiment is not limited to this. The correction unit 90 may be provided in the processing device 150 of FIG. 1 or the like. In this case, the power supply device 100 does not include the correction unit 90. Therefore, the correction unit 90 does not need to be mounted on the main board 101.

[0075] (b) In the above embodiment, the correction unit 90 includes a storage unit 91 and a voltage determination unit 92, but the embodiment is not limited to this. Fig. 17 is a diagram showing a correction unit 90 in another embodiment. The correction unit 90 in this embodiment will be described with respect to differences from the correction unit 90 in Fig. 14.

[0076] 17, in the present embodiment, the correction unit 90 does not include a storage unit 91, a voltage determination unit 92, and a voltage generation unit 93, and a voltage outputted as identification information by the operational amplifier 83 is used as a correction voltage.

[0077] In this embodiment as well, a correction voltage corresponding to the configuration of the rectifier elements D1 to D4 can be easily generated. This allows the deviation of the high frequency voltage corresponding to the configuration of the rectifier elements D1 to D4 to be corrected. Moreover, in this embodiment, since it is not necessary to use the storage unit 91, the voltage determination unit 92, and the voltage generation unit 93, the configuration for correcting the deviation of the high frequency voltage can be realized at relatively low cost.

[0078] In this embodiment, a calculated value of the voltage output from the operational amplifier 83 as the identification information may be used as the correction voltage. For example, the voltage output from the operational amplifier 83 may be amplified or attenuated and used as the correction voltage.

[0079] 10 or 14, the identification information is also detected as a predetermined voltage by one or more operational amplifiers 83. Therefore, when a voltage corresponding to the identification information is suitable as a correction voltage corresponding to the identification information, the identification information output from the one or more operational amplifiers 83 or its calculated value may be used as the correction voltage.

[0080] (c) In the above embodiment, node N3 of rectifier 11 is connected to a ground terminal, and node N4 of each rectifier 11 is connected to detection resistor 14 and smoothing capacitor 15, but the embodiment is not limited to this. Node N4 of each rectifier 11 may be connected to a ground terminal, and node N3 of each rectifier 11 may be connected to detection resistor 14 and smoothing capacitor 15.

[0081] (d) In the above embodiment, the rectifier 11 includes four rectifier elements D1 to D4 that form a full-wave rectifier circuit, but the embodiment is not limited to this. The rectifier 11 may include one rectifier element that forms a half-wave rectifier circuit.

[0082] (e) In the above embodiment, the deviation of the high frequency voltage (AC voltage) caused by the leakage current of the rectifier elements D1 to D4 is corrected, but the embodiment is not limited to this. The deviation of the high frequency voltage caused by the leakage current of the rectifier elements D1 to D4 may be corrected by a DC voltage.

[0083] In this configuration, correspondence information indicating the correspondence relationship between the identification information and the correction voltage for correcting the deviation of the high frequency voltage may be stored in advance. This allows the voltage determination unit 92 to determine the correction voltage based on the acquired identification information and the correspondence information stored in the storage unit 91, and control the voltage generation unit 93 to generate the determined correction voltage.

[0084] (9) Description It will be appreciated by those skilled in the art that the above exemplary embodiments are illustrative of the following aspects.

[0085] (Item 1) A mass spectrometer according to one aspect of the present invention comprises: a mass filter for selecting ions having a mass to charge ratio corresponding to an applied voltage; a power supply device having a first substrate and a second substrate, the power supply device applying a voltage to the mass filter; A correction unit, the first substrate includes a detection unit that uses a rectifying element to detect an AC component of a voltage applied to the mass filter as a detection voltage, and an identification unit that outputs identification information of the detection unit that is determined in accordance with the configuration of the rectifying element of the detection unit; the second substrate includes a detection unit that detects the identification information output by the identification unit, The correction unit may correct a voltage deviation caused by a leakage current of the rectifying element, based on the identification information detected by the detection unit.

[0086] In this mass spectrometer, a voltage is applied to the mass filter by the power supply. Ions having a mass-to-charge ratio corresponding to the applied voltage are selected by the mass filter. In the power supply, the AC component of the voltage applied to the mass filter is detected as a detection voltage by a detection section. Furthermore, a voltage deviation caused by leakage current of the rectifier element is corrected by a correction section.

[0087] In the power supply device, the detector is included in the first substrate. Also, a detector that detects the identification information output by the detector is included in the second substrate. Therefore, when the rectifier element of the detector needs to be replaced during maintenance of the mass spectrometer, only the first substrate needs to be replaced, and there is no need to replace the entire power supply device including the first substrate and the second substrate.

[0088] In addition, in the case where a rectifying element having the same characteristics as the rectifying element before replacement cannot be obtained during maintenance, a rectifying element having different characteristics from the rectifying element before replacement will be used. Even in this case, it is possible to configure the rectifying elements so that the linearity of the leakage current is improved according to the characteristics of the rectifying elements, for example by changing the number of rectifying elements.

[0089] Here, if the configuration of the rectifier element is changed, the voltage deviation changes. Even in this case, the identification unit included in the first substrate outputs identification information of the detector that is determined in accordance with the configuration of the rectifier element. Therefore, in the second substrate, the correction unit appropriately corrects the voltage deviation based on the identification information that corresponds to the configuration of the rectifier element.

[0090] Thus, according to the above configuration, when performing maintenance on a mass spectrometer, it is not necessary to obtain a rectifying element having the same characteristics as the rectifying element before replacement, making it easy to select a replacement rectifying element. Also, even if the configuration of the rectifying element on the first substrate is changed, it is not necessary to replace the second substrate in correspondence with the configuration of the rectifying element. As a result, the effort and cost of maintaining the mass spectrometer can be reduced.

[0091] (2) In the mass spectrometer according to (1), The identification unit is A first terminal; one or more second terminals; The identification information may be determined corresponding to an electrical connection state between the first terminal and the one or more second terminals.

[0092] In this case, the identification information can be easily determined.

[0093] (Item 3) In the mass spectrometer according to item 2, the identification unit further includes a switch connected between the first terminal and the one or more second terminals, The identification information may be determined in accordance with an open / closed state of the switch.

[0094] In this case, any desired identification information can be easily output, and the output identification information can be easily specified.

[0095] (Item 4) In the mass spectrometer according to item 1, The identification unit is A first terminal; A second terminal; a first electrical resistor connected between the first terminal and the second terminal; The identification information may be determined corresponding to a resistance value of the first electrical resistor.

[0096] In this case, the identification information can be easily determined. Also, even if there are many types of identification information, there is no need to provide many elements on the first substrate, so the first substrate is prevented from becoming large. This allows the power supply device to be made smaller.

[0097] (Item 5) In the mass spectrometer according to item 4, The detection unit is a third terminal corresponding to the first terminal; and a fourth terminal corresponding to the second terminal; and The device may include a power supply unit and a second electrical resistor connected between the third terminal and the fourth terminal, and the identification information may be determined corresponding to a voltage division of the first electrical resistor.

[0098] In this case, the output identification information can be easily identified.

[0099] (Item 6) In the mass spectrometer according to any one of items 1 to 5, The correction unit is a storage unit that stores in advance correspondence information indicating a correspondence relationship between the identification information and a correction voltage for correcting a voltage deviation; a voltage determination unit that determines a correction voltage based on the correspondence information stored in the storage unit; The power supply may further include a voltage generating unit that generates the correction voltage determined by the voltage determining unit.

[0100] In this case, a correction voltage corresponding to the configuration of the rectifying element can be easily generated, thereby correcting the voltage deviation corresponding to the configuration of the rectifying element.

[0101] (Item 7) In the mass spectrometer according to item 6, The correction section may be provided on the second substrate.

[0102] In this case, the wiring for connecting the detection unit and the correction unit can be made compact.

[0103] (Item 8) In the mass spectrometer according to item 6, a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The voltage generating section may add the generated correction voltage to the control voltage.

[0104] In this case, the voltage deviation can be easily corrected.

[0105] (Item 9) In the mass spectrometer according to item 6, The voltage generating section may add the generated correction voltage to the detection voltage.

[0106] In this case, the voltage deviation can be easily corrected.

[0107] (Item 10) The mass spectrometer according to item 6, a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The voltage generating section may add the generated correction voltage to a sum voltage of the control voltage and the detection voltage.

[0108] In this case, the voltage deviation can be easily corrected.

[0109] (Item 11) The mass spectrometer according to any one of items 1 to 5, The correction section may generate the identification information or a calculated value of the identification information as a correction voltage.

[0110] In this case, a correction voltage corresponding to the configuration of the rectifying element can be easily generated, thereby correcting a voltage deviation corresponding to the configuration of the rectifying element. Also, the configuration for correcting the voltage deviation can be realized relatively inexpensively.

[0111] (Item 12) In the mass spectrometer according to item 11, a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The correction section may add the generated correction voltage to the control voltage.

[0112] In this case, the voltage deviation can be easily corrected.

[0113] (Item 13) In the mass spectrometer according to item 11, The correction section may add the generated correction voltage to the detection voltage.

[0114] In this case, the voltage deviation can be easily corrected.

[0115] (Item 14) In the mass spectrometer according to item 11, a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The correction section may add the generated correction voltage to a sum voltage of the control voltage and the detection voltage.

[0116] In this case, the voltage deviation can be easily corrected.

[0117] (15) The power supply unit is 1. A power supply for applying a voltage to a mass filter which selects ions having a mass to charge ratio corresponding to the applied voltage, comprising: A first substrate; a second substrate; the first substrate includes a detection unit that uses a rectifying element to detect an AC component of a voltage applied to the mass filter as a detection voltage, and an identification unit that outputs identification information of the detection unit that is determined in accordance with the configuration of the rectifying element of the detection unit; The second substrate may include a detection unit that detects the identification information output by the identification unit and provides the detected identification information to a correction unit that corrects voltage deviations caused by leakage current of the rectifying element based on the identification information.

[0118] According to this power supply device, since there is no need to obtain a rectifier element having the same characteristics as the rectifier element before replacement during maintenance, it is easy to select a replacement rectifier element. Also, even if the configuration of the rectifier element on the first board is changed, there is no need to replace the second board in correspondence with the configuration of the rectifier element. As a result, the effort and cost of maintaining the power supply device can be reduced. [Explanation of symbols]

[0119] 10...detection section, 11...rectification section, 12, 13...detection capacitor, 14...detection resistor, 15...smoothing capacitor, 20...voltage control section, 30...high frequency voltage generation section, 40...DC voltage generation section, 50...addition section, 60...coil section, 70...identification section, 71, 81...ground terminal, 72...output terminal, 73...switch, 74, 75, 84...electrical resistance, 80...detection section, 82...input terminal, 83...operational amplifier, 85 ...Power supply unit, 90...Correction unit, 91...Memory unit, 92...Voltage determination unit, 93...Voltage generation unit, 100...Power supply unit, 101...Main board, 102...Detection board, 110...Ion source, 120...Ion transport unit, 130...Quadrupole mass filter, 131-134...Electrodes, 140...Ion detector, 150...Processing device, 200...Mass analyzer, 201...Ion optical axis, D1-D4...Rectification elements, N1-N4...Nodes

Claims

1. a mass filter for selecting ions having a mass to charge ratio corresponding to an applied voltage; a power supply device having a first substrate and a second substrate, the power supply device applying a voltage to the mass filter; A correction unit, the first substrate includes a detection unit that uses a rectifying element to detect an AC component of a voltage applied to the mass filter as a detection voltage, and an identification unit that outputs identification information of the detection unit that is determined in accordance with the configuration of the rectifying element of the detection unit, the second substrate includes a detection unit that detects the identification information output by the identification unit, The correction unit corrects a voltage deviation caused by a leakage current of the rectifying element based on the identification information detected by the detection unit.

2. The identification unit is A first terminal; one or more second terminals; The mass spectrometer according to claim 1 , wherein the identification information is determined in accordance with an electrical connection state between the first terminal and the one or more second terminals.

3. the identification unit further includes a switch connected between the first terminal and the one or more second terminals, 3. The mass spectrometer according to claim 2, wherein the identification information is determined in accordance with an open / closed state of the switch.

4. The identification unit is A first terminal; A second terminal; a first electrical resistor connected between the first terminal and the second terminal; 2. The mass spectrometer according to claim 1, wherein the identification information is determined in accordance with a resistance value of the first electrical resistor.

5. The detection unit is a third terminal corresponding to the first terminal; and a fourth terminal corresponding to the second terminal; and 5. The mass spectrometer according to claim 4, further comprising a power supply section and a second electrical resistor connected between the third terminal and the fourth terminal, and the identification information is determined corresponding to a voltage division of the first electrical resistor.

6. The correction unit is a storage unit that stores in advance correspondence information indicating a correspondence relationship between the identification information and a correction voltage for correcting a voltage deviation; a voltage determination unit that determines a correction voltage based on the correspondence information stored in the storage unit; 6. The mass spectrometer according to claim 1, further comprising: a voltage generating section that generates the correction voltage determined by the voltage determining section.

7. The mass spectrometer according to claim 6 , wherein the correction section is provided on the second substrate.

8. a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The mass spectrometer according to claim 6 , wherein the voltage generating section adds the generated correction voltage to the control voltage.

9. The mass spectrometer according to claim 6 , wherein the voltage generating section adds the generated correction voltage to the detection voltage.

10. a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The mass spectrometer according to claim 6 , wherein the voltage generating section adds the generated correction voltage to a sum voltage of the control voltage and the detection voltage.

11. 6. The mass spectrometer according to claim 1, wherein the correction section generates the identification information or a calculated value of the identification information as a correction voltage.

12. a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The mass spectrometer according to claim 11 , wherein the correction section adds the generated correction voltage to the control voltage.

13. The mass spectrometer according to claim 11 , wherein the correction section adds the generated correction voltage to the detection voltage.

14. a control voltage for controlling a voltage applied to the mass filter is input to the second substrate; The mass spectrometer according to claim 11 , wherein the correction section adds the generated correction voltage to a sum voltage of the control voltage and the detection voltage.

15. 1. A power supply for applying a voltage to a mass filter which selects ions having a mass to charge ratio corresponding to the applied voltage, comprising: A first substrate; a second substrate; the first substrate includes a detection unit that uses a rectifying element to detect an AC component of a voltage applied to the mass filter as a detection voltage, and an identification unit that outputs identification information of the detection unit that is determined in accordance with the configuration of the rectifying element of the detection unit, The second substrate includes a detection unit that detects the identification information output by the identification unit and provides the detected identification information to a correction unit that corrects voltage deviations caused by leakage current of the rectifying element based on the identification information.

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