Organic device and display apparatus including the same

JP2024077313A5Pending Publication Date: 2025-12-04CANON KK
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Patent Information

Application Number
JP2022189341
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2022-11-28
Publication Date
2025-12-04

AI Technical Summary

Technical Problem

The electrodes in organic devices with optical resonator structures are prone to breakage due to their thin and sloped configuration, which increases resistance and susceptibility to failure.

Method used

The organic device is designed with a first electrode comprising multiple regions with varying inclinations and thicknesses, including a first region in contact with the organic layer, a second region tilted away from the substrate, a third region with a smaller tilt, and a fourth region with a greater tilt, ensuring electrical connectivity and reducing stress concentrations.

Benefits of technology

This configuration effectively suppresses electrode breakage and resistance, allowing for thinner electrodes that enhance luminous efficiency and reduce power consumption.

✦ Generated by Eureka AI based on patent content.

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Abstract

To suppress breakage of an electrode.SOLUTION: An organic device includes a reflection layer, a first electrode, an organic layer, and a second electrode in that order on a first principal surface of a substrate. The first electrode has a first region that is in contact with the organic layer, a second region that is inclined in a direction away from the substrate, a third region that has an inclination less than that of the second region with respect to the substrate, and a fourth region that is inclined in the direction away from the substrate and has an inclination greater than that of the third region with respect to the substrate. The first region and the second region, the second region and the third region, and the third region and the fourth region are in contact with each other, respectively.SELECTED DRAWING: Figure 1
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Description

[Technical field]

[0001] The present invention relates to an organic device and a display device using the same. [Background technology]

[0002] In recent years, an optical resonator structure has been used in organic electroluminescence elements (hereinafter also referred to as "organic EL elements", "organic light-emitting elements", or "organic devices"). In organic devices having an optical resonator structure, the anode (positive electrode) is a transparent electrode, and light emitted from the organic device passes through the transparent electrode, and the transmitted light is reflected by a reflective layer. The light emitted from the organic device and the reflected light interfere with each other and reinforce each other, thereby improving the luminous efficiency of the organic device. Patent Document 1 describes an organic device having an optical resonator structure. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-72282 Summary of the Invention [Problem to be solved by the invention]

[0004] In the organic device described in Patent Document 1, the electrodes formed on the inclined portions tend to become thin, which may result in breakage.

[0005] The present invention has been made in consideration of the above problems, and has an object to suppress breakage of electrodes. [Means for solving the problem]

[0006] The organic device of the present invention is an organic device having a reflective layer, a first electrode, an organic layer, and a second electrode, in that order, on a first main surface of a substrate, wherein the first electrode has a first region in contact with the organic layer, a second region inclined away from the substrate, a third region having a smaller inclination relative to the substrate than the second region, and a fourth region having a larger inclination relative to the substrate than the third region and inclined away from the substrate, and wherein the first region and the second region, the second region and the third region, and the third region and the fourth region are in contact with each other. Effect of the Invention

[0007] According to the present invention, it is possible to provide an organic device capable of suppressing breakage of electrodes. [Brief description of the drawings]

[0008] [Figure 1] 1 is a cross-sectional view of an organic device according to a first embodiment of the present invention. [Diagram 2] FIG. 1 is a plan view of an organic device according to a first embodiment of the present invention. [Diagram 3] 1 is a cross-sectional view of an organic device according to a first embodiment of the present invention. [Figure 4] 1A to 1C are diagrams illustrating a method for manufacturing an organic device according to a first embodiment of the present invention. [Diagram 5] 5A to 5C are diagrams illustrating a method for manufacturing an organic device according to a second embodiment of the present invention. [Figure 6] 11A to 11C are diagrams illustrating a method for manufacturing an organic device according to a third embodiment of the present invention. [Figure 7] FIG. 1 is a schematic diagram illustrating an example of a display device according to an embodiment of the present invention. [Figure 8] 1A is a schematic diagram illustrating an example of an imaging device according to an embodiment of the present invention, and FIG. 1B is a schematic diagram illustrating an example of an electronic device according to an embodiment of the present invention. [Figure 9] 1A is a schematic diagram illustrating an example of a display device according to an embodiment of the present invention, and FIG. 1B is a schematic diagram illustrating an example of a foldable display device. [Figure 10] 1A is a schematic diagram showing an example of an illumination device according to an embodiment of the present invention, and FIG. 1B is a schematic diagram showing an example of an automobile having a vehicle lamp according to an embodiment of the present invention. [Figure 11] 1A is a schematic diagram showing an example of a wearable device according to an embodiment of the present invention, and FIG. 1B is a schematic diagram showing an example of a wearable device according to an embodiment of the present invention, the wearable device having an imaging device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments of the present invention will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the accompanying drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] (First embodiment) An organic device 1 according to a first embodiment will be described with reference to Figures 1 to 3. Figure 1(a) is a cross-sectional view of the organic device 1 according to the first embodiment, and Figure 1(b) is a modified example of the first embodiment.

[0011] The organic device according to the present invention has a reflective layer 110, a first electrode 130, an organic layer 150, and a second electrode 140, in this order, on a first main surface of a substrate 100. In the organic device according to this embodiment, a drive circuit layer 101 and an interlayer insulating layer 102 are provided on the first main surface of the substrate 100.

[0012] A first conductive plug 103 is provided in the interlayer insulating layer 102, and the drive circuit layer 101 and the reflective layer 110 can be connected via the first conductive plug. Specifically, a wiring layer provided in the drive circuit layer 101 and the reflective layer 110 are connected. Also, as shown in FIG. 1(b), the first conductive plug 103 may connect the drive circuit layer 101 and the first electrode 130 without the reflective layer 110.

[0013] An anti-reflection layer 111 is provided on the reflective layer 110, and a first insulating layer 120, a first electrode 130, a second insulating layer 140, an organic layer 150, and a second electrode 160 are laminated thereon in this order. A moisture-proof layer 170, a first planarization layer 180, and a color filter layer 190 may be further laminated on the second electrode 160 in this order. The organic device according to the present invention may also have a microlens.

[0014] In the organic device according to the present invention, the color filter layer 190 may be provided so as to overlap the inclined portion of the first electrode 130. In order to improve the viewing angle characteristics, the color filter layer 190 may be provided so as to overlap a part of the inclined portion of the first electrode 130. The same applies to the microlens, and the microlens may be provided so as to overlap the inclined portion of the first electrode 130, or may be provided so as to overlap a part of the inclined portion of the first electrode 130.

[0015] The substrate 100 may be a semiconductor substrate such as a silicon substrate, or a resin substrate.

[0016] The material used for the interlayer insulating layer 102, the first insulating layer 120, and the second insulating layer 140 is preferably silicon oxide, silicon oxynitride, or silicon nitride, and from the viewpoint of ease of processing, silicon oxide is more preferable.

[0017] The first conductive plug 103 is not particularly limited as long as it can electrically connect the drive circuit layer 101 and the reflective layer 110, and specific examples thereof include a conductive material such as tungsten (W). The first conductive plug 103 may also have a barrier metal such as titanium (Ti), titanium nitride (TiN), or Ti / TiN.

[0018] The reflective layer 110 is not particularly limited as long as it can reflect light, but it is preferable that the reflectance is 80% or more. Specific examples of the reflective layer 110 include highly reflective materials such as aluminum (Al), silver (Ag), and platinum (Pt), and alloys containing these highly reflective materials (such as AlCu).

[0019] The anti-reflection layer 111 is not particularly limited as long as it can suppress the reflection of light, and specific examples thereof include Ti, TiN, Ti / TiN, and the like.

[0020] The first electrode 130 is not particularly limited as long as it can transmit the light emitted from the organic layer 150 toward the substrate 100, but is preferably a transparent material. Specific examples include indium tin oxide (ITO) and indium zinc oxide (IZO).

[0021] In the organic device according to this embodiment, an electric signal is sent from the drive circuit layer 101 formed on the substrate 100 to the first electrode 130, and the organic layer 150 emits light. A part of the light emitted by the organic layer 150 is reflected by the reflective layer 110. The light emitted by the organic layer 150 and the reflected light interfere with each other and reinforce each other, so that the organic device according to the present invention can be said to have an optical resonator structure. Specifically, the light emitted by the organic layer 150 toward the second electrode 160 and the light emitted from the organic layer 150 that is reflected by the reflective layer 110 interfere with each other in the organic layer 150 and reinforce each other.

[0022] In addition, by adjusting the optical adjustment film thickness D1 described later, the light emitted by the organic layer 150 toward the second electrode 160 and the light reflected by the reflective layer 110 out of the light emitted from the organic layer 150 can be made to interfere with each other more efficiently and be reinforced. As described above, the light reinforced by interference is emitted through the color filters 190r, 190g, and 190b corresponding to each color.

[0023] In this specification, when referring to a specific color filter among the multiple color filters 190, a subscript is added after the reference number, such as color filter 190 “r”, and when either color filter is acceptable, it is simply referred to as color filter “190.” The same applies to other components.

[0024] 2 shows a plan view of the organic device 1 after the second insulating layer 140 has been formed. The organic device 1 has a plurality of pixels 200, and the reflective layer 110 and the first electrode 130 are electrically connected. The second insulating layer 140 has an opening 141 for connecting the first electrode 130 and the organic layer 150.

[0025] Fig. 3 is a cross-sectional view taken along line A-A' of the first pixel 200r in Fig. 2. In the organic device according to the present invention, in order to improve the light reflectance, it is preferable that the antireflection film 111 is not provided in the opening 141. The antireflection film 111 may be removed by photolithography or dry etching.

[0026] As described above, the reflective layer 110 and the first electrode 130 are electrically connected. As shown in Fig. 3(a), the reflective layer 110 and the first electrode 130 may be connected via a second conductive plug 121. Alternatively, as shown in Fig. 3(b), the anti-reflection layer 111 and the first electrode 130 may be in direct contact with each other, and the reflective layer 110 and the first electrode 130 may be electrically connected.

[0027] The second conductive plug 121 is not particularly limited as long as it can electrically connect the reflective layer 110 and the first electrode 130, and specifically includes a conductive material such as tungsten (W). The second conductive plug 121 may have a barrier metal such as Ti, TiN, or Ti / TiN.

[0028] The first electrode 130 of the organic device according to the present invention has the following regions: a first region S1, a second region S2, a third region S3, and a fourth region S4. The first region S1 and the second region S2, the second region S2 and the third region S3, and the third region S3 and the fourth region S4 are in contact with each other. The first electrode 130 may further have a fifth region S5 in contact with the fourth region S4.

[0029] The first region S1 has a region in contact with the organic layer 150. Specifically, the organic layer 150 and the first region S1 are in contact with each other at the opening 141. In order to ensure sufficient conductivity, the film thickness D2 of the first electrode 130 in the first region S1 is preferably 20 nm or more and 100 nm or less.

[0030] The thickness D1 of the first insulating layer 120 arranged in the first region S1 is also called an optical adjustment thickness. It is preferable to adjust D1 so that the light emitted from the pixel 200 and the light reflected by the reflective layer 110 constructively interfere with each other. The organic device according to this embodiment has a plurality of pixels 200. Specifically, it has a first pixel 200r, a second pixel 200g, and a third pixel 200b. When the first pixel 200r, the second pixel 200g, and the third pixel 200b emit light of different colors, the D1 of each pixel may be different from each other. For example, when the first pixel 200r emits red (R) light, the second pixel 200g emits green (G) light, and the third pixel 200b emits blue (B) light, the D1 of each pixel decreases in the order of the first pixel 200r, the second pixel 200g, and the third pixel 200b.

[0031] The second region S2 is inclined in a direction away from the substrate 100. The inclination angle of the first electrode 130 in the second region S2 is preferably 30° or more and 50° or less. The height h2 of the inclined portion in the second region S2 is inversely proportional to D1. Specifically, h2 is low in a pixel where D1 is thick, and h2 is high in a pixel where D1 is thin. Here, h2 is expressed as the distance from the lower surface of the first electrode 130 in the first region S1 to the lower surface of the first electrode 130 arranged at the highest position in the second region S2 with respect to the vertical direction of the first main surface. Since the second region S2 has an inclined portion, it is difficult to form the first electrode 130. Therefore, the film thickness D3 of the first electrode 130 in the second region S2 is thinner than D2.

[0032] The third region S3 has a smaller inclination with respect to the substrate 100 than the second region S2. In the third region, the first electrode 130 is preferably parallel to the substrate 100 or inclined away from the substrate 100. Specifically, the inclination angle of the first electrode 130 in the third region S3 is 0° or more and 20° or less. In the organic device according to this embodiment, it is assumed that the inclination angle of the first electrode 130 in the third region S3 is 0°. The film thickness of the first electrode 130 in the third region S3 is thicker than D3. In the organic device according to this embodiment, the film thickness of the first electrode 130 in the third region S3 is approximately the same as D1.

[0033] The fourth region S4 is inclined toward the substrate 100 more than the third region S3, and is inclined in a direction away from the substrate 100. The inclination angle of the first electrode 130 in the fourth region S4 may be approximately the same as the inclination angle of the reflective layer 110 and the anti-reflective layer 111 when the anti-reflective layer 111 is removed, and the inclination angle is preferably 30° or more and 50° or less. The inclined portion h3 in the fourth region S4 may be approximately the same as the height h1 of the reflective layer 110 and the anti-reflective layer 111 when the anti-reflective layer 111 is removed. Here, h1 is represented by the distance from the lowest position of the upper surface of the reflective layer 110 to the upper surface of the anti-reflective layer 111 in the vertical direction of the first main surface. Also, h3 is represented by the distance from the lower surface of the first electrode 130 arranged at the highest position in the third region S3 to the lower surface of the first electrode 130 arranged at the highest position in the fourth region S4 in the vertical direction of the first main surface. The film thickness of the first electrode 130 in the fourth region S4 is smaller than D2, similar to D3.

[0034] The fifth region S5 has a region where the first electrode 130 and the reflective layer 110 are electrically connected. There is no particular limitation as long as the first electrode 130 and the reflective layer 110 are electrically connected, but specifically, as shown in FIG. 3(a), the first electrode 130 and the reflective layer 110 may be electrically connected by a second conductive plug 121. Also, as shown in FIG. 3(b), the first electrode 130 and the anti-reflection layer 111 may be in direct contact with each other, thereby electrically connecting the first electrode 130 and the reflective layer 110.

[0035] FIG. 3(c) shows a conventional shape when the configuration of the present invention is not applied. In the conventional shape, the first electrode 130 has a first region S1, a sixth region S6 in contact with the first region S1, and a seventh region S7 in contact with the sixth region S6. The first region S1 is the same as that described above. The sixth region S6 is inclined with respect to the substrate 100 in a direction away from the substrate 100. The seventh region S7 has a smaller inclination with respect to the substrate 100 than the sixth region S6. The seventh region S7 may be a region where the first electrode 130 and the reflective layer 110 are electrically connected. The method of electrically connecting the first electrode 130 and the reflective layer 110 is the same as the method described for the fifth region S5.

[0036] In the conventional shape, a region corresponding to the third region S3 in the present invention is not formed. Specifically, the first region S1 to the seventh region S7 are formed by one inclined portion. As described above, since the first electrode 130 is difficult to form in the region having the inclined portion, the film thickness D4 of the first electrode 130 in the sixth region S6 is thinner than the film thickness D2 of the first electrode 130 in the first region.

[0037] Therefore, since the conventional shape has a small number of inclined portions, the first electrode 130 may become high-resistance or break. In particular, when attempting to thin the first electrode 130, the conventional shape makes the first electrode 130 more likely to become high-resistance or break, since D4 is formed thinner.

[0038] In contrast, the organic device according to the present invention can suppress the first electrode 130 from increasing in resistance and breaking by providing a plurality of inclined portions between the first region S1 and the fifth region S5. In particular, even when the first electrode 130 is thinned, the first electrode 130 can be suppressed from increasing in resistance and breaking. Furthermore, the organic device according to the present invention can suppress the absorption of light by the first electrode 130 because the first electrode 130 can be thinned. For the above reasons, the organic device according to the present invention has an advantageous configuration in terms of power consumption as well.

[0039] Here, thinning the first electrode 130 may specifically mean reducing the thickness of the first electrode 130 to 30 nm or less.

[0040] In addition, the organic device according to the present embodiment has two inclined portions, but is not limited thereto. Specifically, the organic device may have three or more inclined portions. By increasing the number of inclined portions, the height of each inclined portion decreases, so that the increase in resistance and breakage of the first electrode 130 can be further suppressed.

[0041] Hereinafter, the method for manufacturing an organic device according to this embodiment will be described with reference to Figures 4(a) to 4(k). For comparison with a conventional shape, the conventional manufacturing method is shown in Figures 4(c') to 4(j').

[0042] First, as shown in FIG. 4(a), a driving circuit layer 101 having a transistor, a capacitor, a wiring layer, and the like is formed on a first main surface of a substrate 100 by a known CMOS process. Next, an insulating film is formed to form an interlayer insulating layer 102. The interlayer insulating layer 102 may be formed by a plasma CVD method, a high density plasma method, or a combination of these manufacturing methods. After the film formation, the interlayer insulating layer 102 may be planarized by a CMP method. Then, an opening is formed at a predetermined position in the interlayer insulating layer 102. The predetermined position may be on a wiring layer provided on the driving circuit layer 101. The opening may be formed by a photolithography method, a dry etching method, or the like. A first conductive plug 103 is formed in the formed opening. An excess portion may be removed by a CMP method or an etch-back method.

[0043] Next, as shown in FIG. 4(b), a laminated metal film made of titanium (Ti), titanium nitride (TiN), and an aluminum alloy is formed on the interlayer insulating layer 102. The laminated metal film may be a reflective layer 110 and an anti-reflective film 111, and may be formed by a sputtering method. After the laminated metal film is formed, the laminated metal film is patterned into a predetermined shape by a photolithography method, a dry etching method, or a wet etching method. In this way, the reflective layer 110 and the anti-reflective film 111 connected to the first conductive plug 103 can be formed.

[0044] Next, as shown in FIG. 4(c), the anti-reflection layer 111 is removed so that the top surface of the laminated metal film becomes the reflective layer 110 on the anti-reflection layer 111, and an opening 141 is formed. At this time, the opening 141 may be formed by a photolithography method or a dry etching method. At this time, the presence of the anti-reflection film 111 improves the accuracy of the photolithography method, and a finer shape can be processed. In addition, it is preferable that the edge of the opening 141 has a tapered shape. Specifically, it is preferable that the acute angle of the angle between the reflective layer 110 and the anti-reflection film 111 is 30° or more and 50° or less. In this step, the depth of the opening (height h1 in FIG. 3(a)) is adjusted, so that the height h3 of the inclined portion in the fourth region S4 in FIG. 3(a) can be adjusted. In the conventional manufacturing method, this step is not performed. This results in the shape of FIG. 4(c').

[0045] Next, as shown in Fig. 4(d), an insulating film is formed on the reflective layer 110 and the anti-reflective film 111 to form the first insulating layer first portion 120(a). The first insulating layer first portion 120(a) may be formed by a plasma CVD method. In a conventional manufacturing method, the shape shown in Fig. 4(d') is obtained.

[0046] Next, as shown in FIG. 4(e), an opening is formed in a location that will become the first pixel 200r. The opening may be formed by photolithography, dry etching, or wet etching. This opening may be formed in a pixel where D1 is the thickest, and each of the RGB pixels may be opened at the same time as long as an optical resonator structure is established. In addition, the diameter of the opening is preferably smaller than the diameter of the opening formed in the reflective layer 110. In the conventional manufacturing method, the shape shown in FIG. 4(d') is obtained.

[0047] Next, as shown in Fig. 4(f) to (h), the formation of the first insulating layer second portion 120(b), the first insulating layer third portion 120(c), and the first insulating layer fourth portion 120(d) and the formation of the openings are repeated. By doing so, an optical resonator structure can be formed in which the optical adjustment film thicknesses D1r, D1g, and D1b in each pixel correspond to the emission color in each pixel. If the optical resonator structure can be obtained without forming all of the first insulating layer first portion 120(a) to the first insulating layer fourth portion 120(d), it is not necessary to form all of the first insulating layer first portion 120(a) to the first insulating layer fourth portion 120(d). Also, if the optical resonator structure cannot be obtained even if all of the first insulating layer first portion 120(a) to the first insulating layer fourth portion 120(d) are formed, further insulating layers may be laminated. In the conventional manufacturing method, the shape shown in Fig. 4(f') to (h') is obtained.

[0048] Next, as shown in Fig. 4(i), an opening is formed at a predetermined position of the first insulating layer 120. The opening is preferably formed on the anti-reflection film 111. A second conductive plug 121 is formed in the opening. Excess portions may be removed by a CMP method or an etch-back method.

[0049] Next, as shown in FIG. 4(j), the first electrode 130 is formed and patterned using photolithography, dry etching, or the like. At this time, the first electrode 130 may be formed with a different thickness for each pixel by repeating the film formation and pattern formation of the first electrode 130 multiple times. In the conventional manufacturing method, the anti-reflection film 111 is not etched, so the first insulating layer 120 and the first electrode 130 formed on the reflective layer 110 and the anti-reflection film 111 do not have multiple inclined portions. In addition, the height of the inclined portion is affected by the step when forming the opening of each pixel in the steps of FIG. 4(e') to (f'). Therefore, in the conventional manufacturing method, the risk of high resistance and breakage increases as the first electrode 130 becomes thinner.

[0050] In contrast, in the organic device according to the present invention, the anti-reflection film 111 is etched in the process of FIG. 4(c), so that the first insulating layer 120 and the first electrode 130 formed on the reflective layer 110 and the anti-reflection film 111 have a plurality of inclined portions. Therefore, the height of each inclined portion can be reduced. As a result, the organic device according to the present invention can suppress the risk of the first electrode 130 becoming high-resistance or breaking.

[0051] Furthermore, in the organic device according to the present invention, when the first electrode 130 is thinned, the risk of the first electrode 130 becoming high in resistance or breaking can be suppressed.

[0052] Finally, as shown in FIG. 4( k ), the organic device 1 is completed by forming from the opening 141 to the color filter 190 using a known method.

[0053] Second embodiment The organic device 1 of the second embodiment will be described with reference to Fig. 5. Fig. 5 shows a method for manufacturing the organic device 1 of the second embodiment.

[0054] In the second embodiment, the organic device 1 has a plurality of pixels 200, and only some of the pixels are provided with a plurality of inclined portions. In other words, the organic device 1 further has a plurality of pixels, each of which is a first pixel and a second pixel. The first electrode of the first pixel has a first region S1, a second region S2, a third region S3, and a fourth region S4, and the first electrode of the second pixel has a first region S1, a sixth region S6, and a seventh region S7. In this embodiment, the pixels to be provided with a plurality of inclined portions are not particularly limited, but may be only pixels having a thin optical adjustment film thickness D1 and a maximum height h1. This is because the higher the height h1, the more likely the first electrode 130 is to break. The anti-reflection film 111 may be patterned on pixels other than the pixel having the thickest optical adjustment film thickness D1 and the minimum height h1.

[0055] In the organic device 1 of the second embodiment, as shown in FIG. 5(a), a pattern of an anti-reflection film 111 is formed only in pixels where a plurality of inclined portions are to be formed.

[0056] Next, as shown in Figures 4(d) to (i) above, by repeating the deposition of the first insulating layer 120 and the formation of the openings, a shape having multiple inclined portions is formed only in specified pixels, as shown in Figure 5(b).

[0057] Like the organic device 1 of the second embodiment, only pixels in which there is concern about breakage of the first electrode 130 due to thinning of the first electrode 130 have the configuration of the present invention, thereby making it possible to improve the aperture ratio of the pixel.

[0058] Third embodiment The organic device 1 of the third embodiment will be described with reference to Fig. 6. Fig. 6 shows a flow of a method for manufacturing the organic device 1 of the third embodiment.

[0059] In the third embodiment, a plurality of inclined portions can be formed without forming a pattern on the antireflection film 111. In the third embodiment, the antireflection film 111 is formed in a rectangular shape.

[0060] First, as shown in FIG. 6(a), a reflective layer 110 and an anti-reflective layer 111 are formed in the same manner as in FIGS. 4(a) and 4(b).

[0061] Next, as shown in Figure 6(b), without patterning the anti-reflection film 111, the deposition of the first insulating layer 120 and the formation of openings are repeated in a manner similar to that shown in Figures 4(d') to (h'), thereby obtaining the shape shown in Figure 6(b).

[0062] Next, as shown in Fig. 6(c), a resist is formed in the opening 141 and on the first insulating layer fourth portion 120(d) located at the highest position by photolithography. At this time, it is not necessary to fill the opening 141 with resist, and the resist may be formed so that the corner of the inclined portion is exposed, as shown in Fig. 6(c). In addition, it is not necessary to form the resist so as to cover the entire first insulating layer fourth portion 120(d) located at the highest position, and the resist may be formed so as to cover a part of it.

[0063] Finally, etching is performed by dry etching to obtain a shape in which each pixel has multiple inclined portions as shown in FIG. 6(d).

[0064] In the organic device according to this embodiment, h3 can be adjusted by changing the resist shape and etching conditions, so h3 can be adjusted more easily than in the organic devices according to the first and second embodiments.

[0065] (Application example) 7 is a schematic diagram showing an example of a display device according to the present embodiment. The display device 1000 may have a touch panel 1003, a display panel 1005, a frame 1006, a circuit board 1007, and a battery 1008 between an upper cover 1001 and a lower cover 1009. Flexible printed circuits FPCs 1002 and 1004 are connected to the touch panel 1003 and the display panel 1005, respectively. The display panel 1005 may have an organic device according to the present invention. A transistor is printed on the circuit board 1007. The battery 1008 may not be provided if the display device is not a portable device, and may be provided in a different position even if the display device is a portable device.

[0066] The display device according to this embodiment may have color filters having red, green, and blue colors, the red, green, and blue colors being arranged in a delta arrangement.

[0067] The display device according to the present embodiment may be used in a display unit of an imaging device having an imaging element that receives light. The imaging device may have a display unit that displays information acquired by the imaging element. The display unit may be a display unit exposed to the outside of the imaging device, or may be a display unit disposed within a viewfinder. The imaging device may be a digital camera or a digital video camera.

[0068] 8(a) is a schematic diagram showing an example of an imaging device according to this embodiment. The imaging device 1100 may have a viewfinder 1101, a rear display 1102, an operation unit 1103, and a housing 1104. The viewfinder 1101 and the rear display 1102 may have an organic device according to the present invention. In this case, the display device may display not only an image to be captured, but also environmental information, imaging instructions, and the like. The environmental information may include the intensity of external light, the direction of external light, the moving speed of the subject, the possibility that the subject will be blocked by an obstruction, and the like.

[0069] The imaging device 1100 may further include an optical section (not shown). The optical section may include a single lens or multiple lenses, which form an image on an imaging element housed in a housing 1104. The focus of the multiple lenses can be adjusted by adjusting their relative positions. This operation can also be performed automatically. The imaging device may be called a photoelectric conversion device. The photoelectric conversion device may include an imaging method that does not capture images sequentially, but detects the difference from the previous image, cuts out an image from an image that is always recorded, and the like.

[0070] FIG. 8(b) is a schematic diagram showing an example of an electronic device according to this embodiment. The electronic device 1200 has a display unit 1201, an operation unit 1202, and a housing 1203. The housing 1203 may have a circuit, a printed circuit board having the circuit, a battery, and a communication unit. The operation unit 1202 may be a button or a touch panel type reaction unit. The operation unit 1202 may be a biometric recognition unit that recognizes a fingerprint and performs unlocking or the like. An electronic device having a communication unit can also be called a communication device. The electronic device may further have a camera function by including a lens and an image sensor. An image captured by the camera function is displayed on the display unit 1201. Examples of the electronic device include a smartphone and a notebook computer.

[0071] Fig. 9 is a schematic diagram showing an example of a display device according to this embodiment. Fig. 9(a) shows a display device such as a television monitor or a PC monitor. The display device 1300 has a housing 1301 and a display unit 1302. The organic device according to the present invention may be used in the display unit 1302.

[0072] The display device 1300 may further include a base 1303 that supports the housing 1301 and the display unit 1302. The base 1303 is not limited to the form shown in Fig. 9(a). The lower side of the housing 1301 may also serve as the base.

[0073] The housing 1301 and the display unit 1302 may be curved. The radius of curvature may be 5000 mm or more and 6000 mm or less.

[0074] FIG. 9(b) is a schematic diagram showing another example of the display device according to the present embodiment. The display device 1310 in FIG. 9(b) is configured to be bendable, and is a so-called foldable display device. The display device 1310 has a first display unit 1311, a second display unit 1312, a housing 1313, and a bending point 1314. The first display unit 1311 and the second display unit may have an organic device according to the present invention. The first display unit 1311 and the second display unit 1312 may be a single display unit without a joint. The first display unit 1311 and the second display unit 1312 can be separated at the bending point. The first display unit 1311 and the second display unit 1312 may display different images, or the first display unit 1311 and the second display unit 1312 may display one image.

[0075] FIG. 10(a) is a schematic diagram showing an example of the lighting device according to the present embodiment. The lighting device 1400 may have a housing 1401, a light source 1402, and a circuit board 1403. The light source 1402 may have an organic device according to the present invention. The lighting device 1400 may have an optical film 1404 to improve the color rendering of the light source. The lighting device 1400 may also have a light diffusion section 1405 to effectively diffuse the light of the light source. By having the light diffusion section 1405, the lighting device 1400 can deliver light to a wide range. The optical film 1404 and the light diffusion section 1405 may be provided on the light emission side of the lighting device. If necessary, a cover may be provided on the outermost part.

[0076] The lighting device is, for example, a device that illuminates a room. The lighting device may emit white light, neutral white light, or any other color from blue to red. It may have a dimming circuit that adjusts the light intensity. The lighting device may have a power supply circuit. The power supply circuit may be a circuit that converts AC voltage to DC voltage. Moreover, white light has a color temperature of 4200K, and neutral white light has a color temperature of 5000K. The lighting device may have a color filter.

[0077] The lighting device according to this embodiment may also have a heat dissipation section, which dissipates heat from within the device to the outside and is made of metal or ceramic with high thermal conductivity.

[0078] Fig. 10(b) is a schematic diagram of an automobile, which is an example of a moving body according to this embodiment. The automobile has tail lamps, which are an example of a lamp. The automobile 1500 may have tail lamps 1501, and may be a mobile phone in which the tail lamps are turned on when the brakes are applied. The automobile 1500 may have a body 1503 and windows 1502 attached thereto.

[0079] A tail lamp 1501 may include an organic device according to the present invention. The tail lamp may include a protective member for protecting the light source. The protective member may be made of any material as long as it has a certain degree of strength and is transparent, but is preferably made of polycarbonate or the like. Polycarbonate may be mixed with a furandicarboxylic acid derivative, an acrylonitrile derivative, or the like.

[0080] The moving body according to the present embodiment may be an automobile, a ship, an aircraft, a drone, etc. The moving body may have a body and a lamp provided on the body. The lamp may emit light so that the position of the body can be known.

[0081] The electronic device or the display device can be applied to a system that can be attached as a wearable device such as smart glasses, a head-mounted display, or a smart contact lens. The electronic device may have an imaging device capable of photoelectrically converting visible light and a display device capable of emitting visible light.

[0082] FIG. 11 is a schematic diagram showing an example of glasses (smart glasses) according to this embodiment. Glasses 1600 (smart glasses) will be described with reference to FIG. 11(a). The glasses 1600 have a display unit on the rear side of a lens 1601. The display unit may have an organic device according to the present invention. Furthermore, an imaging device 1602 such as a CMOS sensor or a SPAD may be provided on the front side of the lens 1601.

[0083] The glasses 1600 further include a control device 1603. The control device 1603 functions as a power source that supplies power to the image capture device 1602 and the display unit. The control device 1603 also controls the operations of the image capture device 1602 and the display unit. The lens 1601 is formed with an optical system for collecting light from the image capture device 1602 and the display unit.

[0084] The glasses 1610 (smart glasses) will be described with reference to FIG. 11(b). The glasses 1610 have a control device 1612, and the control device 1612 is provided with a display device having an organic device according to the present invention. The control device 1612 may further have an imaging device corresponding to the imaging device 1602. An optical system for projecting light emitted from the control device 1612 is formed in the lens 1611, and an image is projected onto the lens 1611. The control device 1612 functions as a power source for supplying power to the imaging device and the display device, and controls the operation of the imaging device and the display device. The control device may have a line of sight detection unit that detects the line of sight of the vehicle in which the glasses are mounted. Infrared light may be used for the detection of the line of sight. The infrared light emitting unit emits infrared light to the eyeball of a user gazing at a display image. Of the emitted infrared light, the imaging unit having a light receiving element detects the reflected light from the eyeball, thereby obtaining an image of the eyeball. By having a reduction means for reducing the light from the infrared light emitting unit to the display unit in a planar view, the deterioration of image quality is reduced.

[0085] The control device 1612 detects the user's line of sight with respect to the displayed image from the captured image of the eyeball obtained by capturing infrared light. Any known method can be applied to the line of sight detection using the captured image of the eyeball. As an example, a line of sight detection method can be used based on the Purkinje image formed by the reflection of irradiated light on the cornea.

[0086] More specifically, the gaze detection process is based on the pupil-corneal reflex method. Using the pupil-corneal reflex method, a gaze vector that represents the direction (rotation angle) of the eyeball is generated based on the pupil image and Purkinje image included in the captured image of the eyeball, thereby detecting the user's gaze.

[0087] A display device according to an embodiment of the present invention may have an imaging device having a light receiving element, and may control a display image on the display device based on information about a user's line of sight from the imaging device.

[0088] Specifically, the display device determines a first field of view area to which the user gazes and a second field of view area other than the first field of view area based on the line-of-sight information. The first field of view area and the second field of view area may be determined by a control device of the display device, or may be received from an external control device. In the display area of ​​the display device, the display resolution of the first field of view area may be controlled to be higher than the display resolution of the second field of view area. In other words, the resolution of the second field of view area may be lower than that of the first field of view area.

[0089] AI may be used to determine the first display area or the display area with high priority. The AI ​​may be a model configured to estimate the angle of the line of sight and the distance to the object at the end of the line of sight from the image of the eyeball, using the image of the eyeball and the direction in which the eyeball in the image was actually looking as teacher data. The AI ​​may be included in the display device, the imaging device, or an external device. When the external device has AI, it can be preferably applied to smart glasses further including an imaging device that captures images of the outside. The smart glasses can display captured external information in real time.

[0090] As described above, the organic device according to the present invention can suppress breakage of the electrodes. Also, it is possible to suppress high resistance of the electrodes. Furthermore, it goes without saying that the present invention is not limited to the above-mentioned embodiments, and the above-mentioned embodiments can be appropriately modified and combined without departing from the gist of the present invention.

[0091] The present invention can also have the following configuration.

[0092] (Configuration 1) An organic device having, in this order, a reflective layer, a first electrode, an organic layer, and a second electrode on a first main surface of a substrate, the first electrode has a first region in contact with the organic layer, a second region inclined in a direction away from the substrate, a third region having a smaller inclination with respect to the substrate than the second region, and a fourth region having a larger inclination with respect to the substrate than the third region and inclined in a direction away from the substrate; An organic device, wherein the first region and the second region, the second region and the third region, and the third region and the fourth region are in contact with each other.

[0093] (Configuration 2) The organic device described in configuration 1, characterized in that the distance between the third region and the first main surface in a direction perpendicular to the first main surface is greater than the distance between the first region and the first main surface in the direction perpendicular to the first main surface.

[0094] (Configuration 3) 3. The organic device of claim 1, wherein in the third region, the first electrode is parallel to the substrate.

[0095] (Configuration 4) 3. The organic device of claim 1, wherein in the third region, the first electrode is inclined in a direction away from the substrate.

[0096] (Configuration 5) the first electrode has a fifth region in contact with the fourth region, 5. The organic device according to claim 1, wherein the fifth region is electrically connected to the reflective layer.

[0097] (Configuration 6) the organic device includes a plurality of pixels including a first pixel and a second pixel, and an insulating layer between the reflective layer and the first electrode; The organic device of any one of configurations 1 to 5, characterized in that in the first region of the first electrode of the first pixel, the thickness of the insulating layer in the vertical direction of the first main surface is different from the thickness of the insulating layer in the vertical direction of the first main surface of the first region of the first electrode of the second pixel.

[0098] (Configuration 7) When the distance from a lower surface of the first electrode in the first region to a lower surface of the first electrode disposed at the highest position in the second region in a direction perpendicular to the first main surface is defined as a height of the second region, 7. The organic device of configuration 6, wherein a height of the second region of the first pixel is different from a height of the second region of the second pixel.

[0099] (Configuration 8) 8. The organic device according to claim 1, wherein the first electrode is a transparent electrode.

[0100] (Configuration 9) the organic device further comprises a plurality of pixels, the pixels being a first pixel and a second pixel; the first electrode of the first pixel has the first region, the second region, the third region, and the fourth region, and the first electrode of the second pixel has the first region, a sixth region inclined in a direction away from the substrate, and a seventh region inclined with respect to the substrate at a smaller angle than the sixth region; 9. The organic device of any one of configurations 1 to 8, wherein the sixth region and the seventh region are in contact with each other.

[0101] (Configuration 10) An imaging element that receives light, and a display unit that displays an image captured by the imaging element, 10. A photoelectric conversion device, wherein the organic device according to any one of configurations 1 to 9 is the display section.

[0102] (Configuration 11) 10. A display device comprising: a display unit having the organic device according to any one of configurations 1 to 9; and a housing in which the display unit is provided.

[0103] (Configuration 12) 10. An electronic device comprising: a display unit having the organic device according to any one of structures 1 to 9; a housing in which the display unit is provided; and a communication unit provided in the housing for communicating with an external device.

[0104] (Configuration 13) 10. A lighting device comprising: a light source having the organic device according to any one of configurations 1 to 9; and a housing in which the light source is provided.

[0105] (Configuration 14) A moving body comprising: a lighting fixture having the organic device according to any one of configurations 1 to 9; and a body on which the lighting fixture is provided.

[0106] (Configuration 15) A wearable device comprising: a display unit having the organic device according to any one of configurations 1 to 9; an optical system for concentrating light from the display unit; and a control device for controlling the operation of the display unit. [Explanation of symbols]

[0107] 100 Substrates 101 Drive circuit layer 102 Interlayer insulation layer 103 First conductive plug 110 Reflective layer 111 Anti-reflection layer 120 First insulating layer 120a: First insulating layer first portion 120b First insulating layer second portion 120c 1st insulation layer 3rd part 120d First insulating layer fourth portion 121 Second conductive plug 130 1st electrode 140 Second insulating layer 141 Opening 150 Organic layer 160 2nd electrode 170 Moisture barrier 180 1st planarization layer 190 Color Filter 190r Red color filter 190g Green color filter 190b Blue color filter 200r 1st pixel 200g 2nd pixel 200b 3rd pixel

Claims

1. An organic device having a reflective layer, a first electrode, an organic layer, and a second electrode in this order on a first main surface of a substrate, the first electrode has a first region in contact with the organic layer, a second region inclined in a direction away from the substrate, a third region inclined with respect to the substrate less than the second region, and a fourth region inclined with respect to the substrate more than the third region and inclined in a direction away from the substrate; An organic device, wherein the first region and the second region, the second region and the third region, and the third region and the fourth region are in contact with each other.

2. The organic device has a plurality of pixels, each of the pixels having a first pixel and a second pixel; 2. The organic device according to claim 1, wherein the distance between the reflective layer and the first electrode in the direction perpendicular to the first main surface in the first region of the first electrode of the first pixel is different from the distance between the reflective layer and the first electrode in the direction perpendicular to the first main surface in the first region of the first electrode of the second pixel.

3. An organic device as described in claim 1, characterized in that the organic layer is in contact with the first electrode in the first region, and is not in contact with the first electrode in the second region, the third region, and the fourth region.

4. 2. The organic device according to claim 1, wherein a distance between the third region and the first main surface in a direction perpendicular to the first main surface is greater than a distance between the first region and the first main surface in a direction perpendicular to the first main surface.

5. 2. The organic device according to claim 1, wherein in the third region, the first electrode is parallel to the substrate.

6. 2. The organic device according to claim 1, wherein in the third region, the first electrode is inclined in a direction away from the substrate.

7. the first electrode has a fifth region in contact with the fourth region, The organic device according to claim 1 , wherein the fifth region is electrically connected to the reflective layer.

8. the organic device includes a plurality of pixels including a first pixel and a second pixel, and an insulating layer between the reflective layer and the first electrode; 2. The organic device according to claim 1, wherein the thickness of the insulating layer in the direction perpendicular to the first main surface in the first region of the first electrode of the first pixel is different from the thickness of the insulating layer in the direction perpendicular to the first main surface in the first region of the first electrode of the second pixel.

9. When the distance from a lower surface of the first electrode in the first region to a lower surface of the first electrode arranged at the highest position in the second region in a direction perpendicular to the first main surface is defined as a height of the second region, 9. The organic device of claim 8, wherein the height of the second region of the first pixel is different from the height of the second region of the second pixel.

10. The organic device according to claim 1 , wherein the first electrode is a transparent electrode.

11. the organic device further includes a plurality of pixels each including a first pixel and a second pixel; the first electrode of the first pixel has the first region, the second region, the third region, and the fourth region, and the first electrode of the second pixel has the first region, a sixth region inclined in a direction away from the substrate, and a seventh region inclined with respect to the substrate at a smaller angle than the sixth region; The organic device according to claim 1 , wherein the sixth region and the seventh region are in contact with each other.

12. an imaging element that receives light; and a display unit that displays an image captured by the imaging element; A photoelectric conversion device, wherein the organic device according to claim 1 is the display unit.

13. A display device comprising: a display unit having the organic device according to claim 1; and a housing in which the display unit is provided.

14. 12. An electronic device comprising: a display unit having the organic device according to claim 1; a housing in which the display unit is provided; and a communication unit provided in the housing for communicating with an external device.

15. A lighting device comprising: a light source having the organic device according to claim 1 ; and a housing in which the light source is provided.

16. A moving body comprising: a lighting fixture having the organic device according to claim 1; and a body on which the lighting fixture is provided.

17. A wearable device comprising: a display unit having the organic device according to claim 1; an optical system for concentrating light from the display unit; and a control device for controlling the operation of the display unit.