Relay optical system and projector

Abstract

To provide a relay optical system with a small number of components and a change in a magnification, of which both sides are telecentric.SOLUTION: A relay optical system couples an enlargement side imaging plane to a reduction side imaging plane obtained by reducing the enlargement side imaging plane. The relay optical system comprises a concave first reflection surface, a convex second reflection surface, and a concave third reflection surface, in an order in which a beam passes from an enlargement side to a reduction side. An optical axis of the enlargement side imaging plane and an optical axis of the reduction side imaging plane are parallel. An incident direction in which the beam is incident on the enlargement side imaging plane is an opposite direction to the incident direction in which the beam is incident on the reduction side imaging plane. A radius of curvature of the first reflection surface is different from a radius of curvature of the third reflection surface. The first reflection surface, the second reflection surface, and the third reflection surface each have an aspherical shape. The enlargement side and the reduction side are telecentric, respectively.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a relay optical system and a projector. [Background technology]

[0002] An optical system connecting an enlarged-side image forming surface and a reduced-side image forming surface obtained by changing the magnification of the enlarged-side image forming surface is described in Patent Document 1. The first projection optical unit in this document is an optical system that is telecentric on both sides and connects a primary image forming surface and an object surface obtained by reducing the primary image forming surface. The first projection optical unit includes a first lens group having a positive power, a second lens group having a negative power, and a third lens group having a positive power. The first lens group is composed of four lenses. The second lens group is composed of an aperture stop and five lenses. The third lens group is composed of three lenses. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-330410 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the optical system of Patent Document 1, the number of lenses constituting the optical system is large, so adjusting the position of each lens is difficult when assembling the optical system. For this reason, a configuration with fewer optical elements has been desired for an optical system that is telecentric on both sides and has variable magnification.

[0005] In order to solve the above problems, the relay optical system of the present invention is a relay optical system that connects a magnification-side image forming surface and a reduction-side image forming surface that is a reduction of the magnification-side image forming surface, and is characterized in that it has, in the order in which a light ray passes from the magnification side to the reduction side, a first reflecting surface that is concave, a second reflecting surface that is convex, and a third reflecting surface that is concave, the optical axis of the magnification-side image forming surface and the optical axis of the reduction-side image forming surface are parallel, the direction of incidence of the light ray incident on the magnification-side image forming surface is opposite to the direction of incidence of the light ray incident on the reduction-side image forming surface, the radii of curvature of the first reflecting surface and the third reflecting surface are different, the first reflecting surface, the second reflecting surface, and the third reflecting surface each have an aspheric shape, and the magnification side and the reduction side are each telecentric.

[0006] The projector of the present invention is a projector including the relay optical system described above, and further includes a light source, a separation optical system including a first dichroic mirror that separates light emitted from the light source into a first color light in a first wavelength band including blue light and another color light in a wavelength band longer than the first color light and reflects the first color light in a direction perpendicular to an optical axis of the emitted light, a first light modulation element that modulates the first color light separated by the first dichroic mirror, a second light modulation element that modulates the other color light separated by the first dichroic mirror, and a second light modulation element that modulates the other color light separated by the first dichroic mirror. the first light modulation element is arranged on an enlargement-side image forming plane, the relay optical system reduces the beam width of the first color light modulated by the first light modulation element on a reduction-side image forming plane, a color synthesis prism outputs a synthesized light obtained by synthesizing the first color light whose beam width has been reduced by the relay optical system and the other color light modulated by the second light modulation element, and a projection optical system projects the synthesized light output from the color synthesis prism, wherein an effective area of ​​the first light modulation element is larger than an effective area of ​​the second light modulation element. [Brief description of the drawings]

[0007] [Figure 1] 1 is a schematic diagram of a main part of a projector that uses the relay optical system of the first embodiment. [Diagram 2] FIG. 11 is a schematic diagram of a relay optical system according to a second embodiment. [Diagram 3] FIG. 11 is a schematic diagram of a relay optical system according to a third embodiment. [Figure 4] FIG. 11 is a schematic diagram of a relay optical system according to a fourth embodiment. [Diagram 5] FIG. 13 is a schematic diagram of a relay optical system according to a fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] A relay optical system and a projector according to an embodiment of the invention will be described below with reference to the drawings.

[0009] [Embodiment 1] Fig. 1 is a schematic diagram of a main part of a projector 100 using a relay optical system 6 of embodiment 1. As shown in Fig. 1, the projector 100 includes a light source 1, an illumination optical system 2 that uniformizes the light emitted from the light source 1, a separation optical system 3 that separates the light emitted from the illumination optical system 2 into each color light, a plurality of light modulation elements 7 that modulate each color light separated by the separation optical system 3 to form a projection image, a reflection mirror 11, a relay optical system 6 that reduces the luminous flux width of the color light modulated by one of the plurality of light modulation elements 7, a color synthesis prism 8 that outputs a synthetic light obtained by synthesizing each color light modulated by the light modulation element 7, a projection optical system 9 that projects the synthetic light output from the color synthesis prism 8, and a control unit 10 that controls the light modulation element 7.

[0010] For convenience, in the following description, the three mutually orthogonal axes are referred to as the X-axis, Y-axis, and Z-axis. The direction along the first optical axis N of the separation optical system 3 is referred to as the X-axis direction. In the X-axis direction, the direction in which the output light from the illumination optical system 2 is output is referred to as the first direction X1, and the opposite direction is referred to as the second direction X2. In the Y-axis direction, the direction in which the combined light is output from the color combining prism 8 is referred to as the third direction Y1, and the opposite direction is referred to as the fourth direction Y2.

[0011] The light source 1 is, for example, an extra-high pressure mercury lamp, a solid-state light source, etc. In this embodiment, the light source 1 emits white light as the emitted light LD.

[0012] The illumination optical system 2 includes a multi-lens 21, a polarizing beam splitter 22, a multi-lens 23, and a relay lens 24. The multi-lens 21 splits the output light LD from the light source 1 into multiple light beams. The polarizing beam splitter 22 converts the polarization direction of the output light LD output from the multi-lens 21. The multi-lens 23 focuses the output light LD output from the polarizing beam splitter 22 in the vicinity of the relay lens 24. The relay lens 24 magnifies the output light LD incident from the multi-lens 23 and outputs it toward the separation optical system 3.

[0013] The separation optical system 3 includes, in order in the first direction X1, a first dichroic mirror 31 and a second dichroic mirror 32. The first dichroic mirror 31 and the second dichroic mirror 32 are disposed along a first optical axis N of the separation optical system 3. The optical axis of the output light LD from the illumination optical system 2 coincides with the first optical axis N.

[0014] The first dichroic mirror 31 separates the output light LD into a first color light LB and another color light LC. The first dichroic mirror 31 reflects the first color light LB in a fourth direction Y2 and transmits the other color light LC in a first direction X1. The second dichroic mirror 32 separates the other color light LC into a second color light LG and a third color light LR. The second dichroic mirror 32 reflects the third color light LR in a third direction Y1 and transmits the second color light LG in a first direction X1. In this embodiment, the first color light LB is a first wavelength band including blue light. The second color light LG is a second wavelength band including green. The third color light LR is a third wavelength band including red. The first wavelength band is, for example, 420 nm to 500 nm. The second wavelength band is, for example, 500 nm to 600 nm. The third wavelength band is, for example, 600 nm to 680 nm. The wavelength band of the other color light LC is, for example, 500 nm to 680 nm.

[0015] Here, a reflecting mirror 14 is disposed in the third direction Y1 of the second dichroic mirror 32, which reflects the third color light LR separated by the second dichroic mirror 32 in the first direction X1. A reflecting mirror 15 is disposed in the first direction X1 of the second dichroic mirror 32, which reflects the second color light LG separated by the second dichroic mirror 32 in the third direction Y1. Lenses 12 are disposed between the second dichroic mirror 32 and the reflecting mirror 14, and between the second dichroic mirror 32 and the reflecting mirror 15. Lenses 13 are disposed in the first direction X1 of the reflecting mirror 14 and in the third direction Y1 of the reflecting mirror 15. The lenses 12 and 13 focus the second color light LG and the third color light LR separated by the separation optical system 3 near the light modulation element 7.

[0016] The reflecting mirror 11 is disposed in the fourth direction Y2 of the first dichroic mirror 31. The reflecting mirror 11 reflects the first color light LB separated by the first dichroic mirror 31 in the first direction X1. Here, the projector 100 includes a relay lens 19 between the reflecting mirror 11 and the first dichroic mirror 31. The relay lens 19 adjusts the imaging position of the first color light LB so that the first color light LB from the first dichroic mirror 31 is uniformly irradiated onto the first light modulation element 71. In this embodiment, the relay lens 19 is made up of one lens. Note that the relay lens 19 may be made up of a plurality of lenses.

[0017] The light modulation element 7 is a liquid crystal panel. The light modulation element 7 includes a first light modulation element 71 that modulates the first color light LB, a third light modulation element 72 that modulates the second color light LG, and a fourth light modulation element 73 that modulates the third color light LR. The first light modulation element 71, the third light modulation element 72, and the fourth light modulation element 73 each include an incident side polarizing plate 75 and an exit side polarizing plate 76. The third light modulation element 72 and the fourth light modulation element 73 correspond to the "second light modulation element" of the present invention.

[0018] The first light modulation element 71 is disposed in the first direction X1 of the first dichroic mirror 31. The optical axis N1 of the first light modulation element 71 extends in the direction along the X-axis. The optical axis N1 of the first light modulation element 71 is parallel to the first optical axis N of the separation optical system 3.

[0019] The third light modulation element 72 is disposed at a position facing the second surface 82 of the color synthesis prism 8. The fourth light modulation element 73 is disposed at a position facing the third surface 83 of the color synthesis prism 8.

[0020] The effective area of ​​the first light modulation element 71 is larger than the effective area of ​​the third light modulation element 72 and the fourth light modulation element 73. Here, the effective area refers to the area of ​​the effective display area of ​​the light modulation element. In this embodiment, the first light modulation element 71 is a liquid crystal panel having an effective display area with a diagonal dimension of 1.03 inches, and the third light modulation element 72 and the fourth light modulation element 73 are liquid crystal panels having an effective display area with a diagonal dimension of 0.67 inches.

[0021] The relay optical system 6 connects the enlargement-side image forming surface 60A and the reduction-side image forming surface 60B obtained by reducing the enlargement-side image forming surface 60A. The first light modulation element 71 is disposed on the enlargement-side image forming surface 60A, and the relay optical system 6 reduces the light beam width of the first color light LB modulated by the first light modulation element 71 on the reduction-side image forming surface 60B. That is, the relay optical system 6 is an optical system that changes magnification. In this embodiment, the relay optical system 6 reduces the light beam width of the first color light LB modulated by the first light modulation element 71 from 1.03 inches to 0.67 inches on the reduction-side image forming surface 60B. The optical axis N1 of the first light modulation element 71 and the optical axis M1 of the enlargement-side image forming surface 60A coincide with each other. The reduction-side image forming surface 60B is disposed at a position facing the first surface 81 of the color synthesis prism 8. The air-equivalent distance between the reduction-side image forming surface 60B and the first surface 81 of the color combining prism 8 is the same as the air-equivalent distance between the third light modulation element 72 and the second surface 82 of the color combining prism 8. In addition, the air-equivalent distance between the reduction-side image forming surface 60B and the first surface 81 of the color combining prism 8 is the same as the air-equivalent distance between the fourth light modulation element 73 and the third surface 83 of the color combining prism 8.

[0022] Here, the projector 100 has a polarizing plate 5 disposed between the reduction-side imaging surface 60B and the first surface 81. The polarizing plate 5 and the exit-side polarizing plate 76 of the first light modulation element 71 transmit linearly polarized components in the same direction among the polarized components contained in the first color light LB. That is, when the exit-side polarizing plate 76 of the first light modulation element 71 transmits the S-polarized light of the first color light LB, the polarizing plate 5 transmits the S-polarized light, and when the exit-side polarizing plate 76 of the first light modulation element 71 transmits the P-polarized light of the first color light LB, the polarizing plate 5 transmits the P-polarized light.

[0023] The color synthesis prism 8 has a first surface 81 on which the first colored light LB is incident, a second surface 82 on which the second colored light LG is incident, a third surface 83 on which the third colored light LR is incident, and a fourth surface 84 from which the synthesized light LE is emitted. The first surface 81 and the third surface 83 face each other in the X-axis direction. The second surface 82 and the fourth surface face each other in the Y-axis direction. The color synthesis prism 8 emits synthesized light LE, which is obtained by combining the first colored light LB, the light flux width of which has been reduced by the relay optical system 6, the second colored light LG modulated by the third light modulation element 72, and the third colored light LR modulated by the fourth light modulation element 73, from the fourth surface 84 in the third direction Y1. Here, the beam width of the first color light LB incident on the first surface 81 of the color synthesis prism 8 is the same as the beam width of the second color light LG incident on the second surface 82 of the color synthesis prism 8 and the beam width of the third color light LR incident on the third surface 83 of the color synthesis prism 8.

[0024] The projection optical system 9 projects the combined light LE emitted from the color combining prism 8 onto a screen. The projection optical system 9 includes a plurality of lenses. The control unit 10 operates the light modulation element 7 based on an external image signal such as a video signal.

[0025] (Details of the relay optical system) 1, the relay optical system 6 has, in the order in which a light ray passes from the enlargement side to the reduction side, a first reflecting surface 61 having a concave shape, a second reflecting surface 62 having a convex shape, and a third reflecting surface 63 having a concave shape. The first reflecting surface 61 and the third reflecting surface 63 are integrally formed. The radius of curvature of the first reflecting surface 61 and the radius of curvature of the third reflecting surface 63 are different.

[0026] The first reflecting surface 61, the second reflecting surface 62, and the third reflecting surface 63 each have an aspheric shape. The first reflecting surface 61, the second reflecting surface 62, and the third reflecting surface 63 each are rotationally symmetric surfaces. The design optical axes O of the first reflecting surface 61, the second reflecting surface 62, and the third reflecting surface 63 each coincide with each other. The design optical axis O extends in the X-axis direction.

[0027] The relay optical system 6 has a first lens 64 disposed between the first reflecting surface 61 and the second reflecting surface 62 and between the second reflecting surface 62 and the third reflecting surface 63, and a second lens 65 disposed between the third reflecting surface 63 and the reduction-side image forming surface 60B. The first lens 64 and the second lens 65 are integrally formed. The radius of curvature of the first lens 64 and the radius of curvature of the second lens 65 are the same. More specifically, the radius of curvature of the lens surface 641 of the first lens 64 in the first direction X1 and the radius of curvature of the lens surface 651 of the second lens 65 in the first direction X1 are the same. Similarly, the radius of curvature of the lens surface 642 of the first lens 64 in the second direction X2 and the radius of curvature of the lens surface 652 of the second lens 65 in the second direction X2 are the same.

[0028] The lens surfaces 641 and 642 of the first lens are rotationally symmetric surfaces. The lens surfaces 651 and 652 of the second lens are rotationally symmetric surfaces. The design optical axes P of the lens surfaces 641 and 642 of the first lens and the lens surfaces 651 and 652 of the second lens coincide with each other. The design optical axis P extends in the X-axis direction and coincides with the design optical axis O.

[0029] The first color light LB modulated by the first light modulation element 71 travels in the first direction X1. The first color light LB that reaches the first reflecting surface 61 from the first light modulation element 71 is reflected by the first reflecting surface 61 in the second direction X2 and the third direction Y1. The first color light LB reflected by the first reflecting surface 61 passes through the first lens 64 and reaches the second reflecting surface 62. The first color light LB that reaches the second reflecting surface 62 is reflected by the second reflecting surface 62 in the first direction X1 and the third direction Y1. The first color light LB reflected by the second reflecting surface 62 passes through the first lens 64 and reaches the third reflecting surface 63. The first color light LB that reaches the third reflecting surface 63 is reflected by the third reflecting surface 63 in the second direction X2. The first color light LB reflected by the third reflecting surface 63 passes through the second lens 65 and reaches the reduction-side imaging surface 60B.

[0030] The optical axis M1 of the enlargement-side imaging surface 60A and the optical axis M2 of the reduction-side imaging surface 60B are parallel. The incident direction of the first color light LB incident on the enlargement-side imaging surface 60A is a first direction X1. The exit direction of the first color light LB exiting from the reduction-side imaging surface 60B is a second direction X2. In other words, the incident direction of the first color light LB incident on the enlargement-side imaging surface 60A is opposite to the exit direction of the first color light LB exiting from the reduction-side imaging surface 60B.

[0031] The enlargement-side image forming surface 60A and the reduction-side image forming surface 60B are located in the first direction X1 on the same side with respect to the first surface 81 of the color synthesis prism 8. In other words, the first light modulation element 71 and the reduction-side image forming surface 60B are located in the first direction X1 on the same side with respect to the first surface 81 of the color synthesis prism 8.

[0032] The enlargement side and reduction side of the relay optical system 6 are each telecentric. The enlargement side of the relay optical system 6 is telecentric when the central ray of each light beam passing between the first reflecting surface 61 and the enlargement side image forming surface 60A is parallel to the optical axis M1 or approximately parallel to the optical axis M1. The reduction side of the relay optical system 6 is telecentric when the central ray of each light beam passing between the second lens 65 and the reduction side image forming surface 60B is parallel to the optical axis M2 or approximately parallel to the optical axis M2. In this embodiment, the angle between the central ray of each light beam and the optical axes M1 and M2 is within ±5°.

[0033] The lens data of the relay optical system 6 is as follows. Surface numbers are assigned in order from the magnification side to the reduction side. Symbols are the symbols for the magnification side image forming surface, first reflecting surface, first lens, second reflecting surface, third reflecting surface, second lens and reduction side image forming surface. An "*" attached to the lens surface number indicates that the shape is aspheric. R is the radius of curvature. D is the axial surface spacing. nd is the refractive index. νd is the Abbe number. Y is the effective radius. The units of R, D and Y are mm.

[0034] Sign Surface No. RD nd vd Mode Y 60A 0 0.00000 115.00 Refraction 69.816 61 1 -178.49209 -70.00 Reflection 84.435 64 2 -183.44420 -11.50 1.458467 67.8 Refraction 32.295 3 -21694.45400 -2.00 Refraction 26.681 62 *4 -117.32686 2.00 Reflection 27.000 64 5 -21694.45400 11.50 1.458467 67.8 Refraction 19.000 6 -183.44420 70.00 Refraction 19.000 63 *7 -144.97227 -70.00 Reflection 70.000 65 8 -183.44420 -11.50 1.458467 67.8 Refraction 57.957 9 -21694.45400 -33.00 Refraction 58.000 60B 10 0.00000 0.00 Refraction 45.735

[0035] Face number 1 4 7 Conic constant 0 2.880608E+01 0 4th order coefficient 3.919410E-08 2.088599E-06 1.337207E-08 6th order coefficient 9.070897E-12 1.546748E-09 -4.339381E-12 8th order coefficient 1.242520E-15 -1.224049E-12 8.161682E-16 10th order coefficient -6.127942E-20 6.391380E-16 -4.571229E-20

[0036] (Action and effect) The relay optical system 6 connects the enlargement side image forming surface 60A and the reduction side image forming surface 60B obtained by reducing the enlargement side image forming surface 60A. The relay optical system 6 has, in the order of passage of light rays from the enlargement side to the reduction side, a concave first reflecting surface 61, a convex second reflecting surface 62, and a concave third reflecting surface 63. The relay optical system 6 has a first lens 64 disposed between the first reflecting surface 61 and the second reflecting surface 62 and between the second reflecting surface 62 and the third reflecting surface 63, and a second lens 65 disposed between the third reflecting surface 63 and the reduction side image forming surface 60B. The relay optical system 6 is telecentric on both the enlargement side and the reduction side.

[0037] According to this embodiment, the relay optical system 6 has a reflecting surface, so the number of parts can be reduced compared to when the relay optical system is composed of only refractive lenses. Also, in this embodiment, the number of parts is small, so it is easy to adjust the positions of the optical elements when assembling the relay optical system. Compared to relay optical systems 6 that are not telecentric on both sides, the relay optical system 6 does not require strict installation accuracy when incorporating the relay optical system 6 into the projector 100, and is easy to arrange.

[0038] In this embodiment, the optical axis M1 of the enlargement-side imaging surface 60A and the optical axis M2 of the reduction-side imaging surface 60B are parallel to each other. The incident direction of the light beam on the enlargement-side imaging surface 60A is opposite to the incident direction on the reduction-side imaging surface 60B. Therefore, the relay optical system 6 can efficiently bend the optical path by 180° by using three reflecting surfaces.

[0039] In this embodiment, the radius of curvature of the first reflecting surface 61 is different from the radius of curvature of the third reflecting surface 63. The first reflecting surface 61, the second reflecting surface 62, and the third reflecting surface 63 each have an aspheric shape. Therefore, since the radius of curvature of the first reflecting surface 61 is different from the radius of curvature of the third reflecting surface 63, it is easy to make both sides telecentric even if the number of optical components constituting the relay optical system 6 is small. In addition, since each of the three reflecting surfaces has an aspheric shape, various aberrations occurring in the relay optical system 6 can be well corrected.

[0040] In this embodiment, the first reflecting surface 61, the second reflecting surface 62, and the third reflecting surface 63 are each a rotationally symmetric surface. This makes it easy to process the reflecting surfaces, and improves the accuracy of the reflecting surfaces. In addition, because the processing is easy, the manufacturing cost can be reduced.

[0041] In this embodiment, the design optical axes P of the first, second and third reflecting surfaces are aligned with each other. This makes it easy to assemble and adjust each reflecting surface based on the design optical axis P of each reflecting surface, thereby improving the assembly accuracy of each reflecting surface.

[0042] In this embodiment, the light reflected by the first reflecting surface 61 passes through the first lens 64 and reaches the second reflecting surface 62. The light reflected by the second reflecting surface 62 passes through the first lens and reaches the third reflecting surface. As a result, the spread and angle of the light reflected by the first reflecting surface 61 can be controlled by the first lens 64, so that the axial surface distance between the first reflecting surface 61 and the second reflecting surface 62 can be reduced. In addition, the first lens 64 can satisfactorily correct various aberrations of the light reflected by the first reflecting surface 61. Similarly, the spread and angle of the light reflected by the second reflecting surface 62 can be controlled by the first lens 64, so that the axial surface distance between the second reflecting surface 62 and the third reflecting surface 63 can be reduced. In addition, the first lens 64 can satisfactorily correct various aberrations of the light reflected by the second reflecting surface 62.

[0043] In this embodiment, the light reflected by the third reflecting surface 63 passes through the second lens 65 and reaches the reduction-side image forming surface 60B. As a result, the spread and angle of the light reflected by the third reflecting surface 63 can be controlled by the second lens 65, so that the axial surface distance between the third reflecting surface 63 and the reduction-side image forming surface 60B can be reduced. In addition, the second lens 65 can satisfactorily correct various aberrations of the light reflected by the third reflecting surface 63.

[0044] In this embodiment, the first lens 64 and the second lens 65 are integrally formed. This allows the first lens 64 and the second lens 65 to be integrated into one lens, thereby reducing the number of parts. Furthermore, in this embodiment, the radius of curvature of the first lens 64 and the radius of curvature of the second lens 65 are the same. This makes it easier to form the lens surface when the first lens 64 and the second lens 65 are integrated into one lens.

[0045] In this embodiment, the lens surface of the first lens 64 and the lens surface of the second lens 65 are each a rotationally symmetric surface. This makes it easy to process each lens surface and improves the precision of each lens surface. Furthermore, because the processing is easy, the manufacturing cost can be reduced.

[0046] In this embodiment, the design optical axis O of the lens surface of the first lens 64 and the design optical axis O of the lens surface of the second lens 65 coincide with each other. The design optical axis P of each lens and the design optical axis O of the lens surface of each lens coincide with each other. Therefore, the reference axes for assembling each reflecting surface and each lens coincide with each other, which makes it easy to assemble and adjust each reflecting surface and each lens, thereby improving the assembly accuracy of each reflecting surface.

[0047] The projector 100 of this embodiment includes a light source 1, a separation optical system 3 including a first dichroic mirror 31 that separates the output light LD emitted from the light source 1 into a first color light LB in a first wavelength band including blue light and another color light LC in a wavelength band longer than the first color light LB and reflects the first color light LB in a Y-axis direction perpendicular to the optical axis of the output light LD, a first light modulation element 71 that modulates the first color light LB separated by the first dichroic mirror 31, a second light modulation element that modulates the other color light LC separated by the first dichroic mirror 31, and a first dichroic mirror 32 that modulates the first color light LB in a Y-axis direction perpendicular to the optical axis of the output light LD. The optical system includes a reflecting mirror 11 that reflects the first color light LB separated by the reflecting mirror 31 in the X-axis direction perpendicular to the first light modulation element 71, a relay optical system 6 that arranges the first light modulation element 71 on the enlargement-side imaging surface 60A and reduces the light beam width of the first color light LB modulated by the first light modulation element 71 on the reduction-side imaging surface 60B, a color synthesis prism 8 that outputs a synthesized light LD that is a synthesis of the first color light LB whose light beam width has been reduced by the relay optical system 6 and another color light LC modulated by the second light modulation element, and a projection optical system 9 that projects the synthesized light LD output from the color synthesis prism 8. The effective area of ​​the first light modulation element 71 is larger than the effective area of ​​the second light modulation element. The optical axis N1 of the first light modulation element 71 is parallel to the optical axis M1 of the enlargement-side imaging surface 60A. The first light modulation element 71 and the reduction-side imaging surface 60B are located in the first direction X1 on the same side with respect to the first surface 81 of the color synthesis prism 8 onto which the first color light LB is incident.

[0048] According to this embodiment, the projector 100 uses the relay optical system 6 of this embodiment, so that it is possible to provide a projector 100 that has a small number of parts and is low cost.

[0049] According to this embodiment, since the effective area of ​​the first light modulation element 71 is larger than that of the second light modulation element, the illuminance irradiated on the first light modulation element 71 can be made smaller than that on the second light modulation element. This makes it possible to prevent the liquid crystal of the first light modulation element 71 from being deteriorated by light even if the light source 1 is made brighter.

[0050] In addition, since the relay optical system 6 can reduce the beam width of the first color light LB modulated by the first light modulation element 71 at the reduction-side imaging surface 60B, the beam widths of each color light incident on the color synthesis prism 8 can be made the same size even if the effective area of ​​the first light modulation element 71 is larger than the effective area of ​​the third light modulation element 72.

[0051] In addition, the relay optical system 6 bends the first color light LB incident on the enlargement-side imaging surface 60A by 180 degrees and emits the first color light LB from the reduction-side imaging surface 60B, so the entire projector can be made more compact than when the relay optical system 6 does not bend the first color light LB.

[0052] [Embodiment 2] Fig. 2 is a schematic diagram of a relay optical system 6A of embodiment 2. As shown in Fig. 2, in the relay optical system 6A of embodiment 2, the first lens 64 and the second lens 65 may be independent members. Note that the relay optical system 6A of embodiment 2 can have the same configuration as the relay optical system 6 of embodiment 1, except that the first lens 64 and the second lens 65 are independent members.

[0053] [Embodiment 3] Fig. 3 is a schematic diagram of a relay optical system 6B of embodiment 3. As shown in Fig. 3, the relay optical system 6B of embodiment 3 may include only a first lens 64 without including a second lens 65. Note that the relay optical system 6B of embodiment 3 may have the same configuration as the relay optical system 6 of embodiment 1, except that it does not include the second lens 65.

[0054] [Embodiment 4] Fig. 4 is a schematic diagram of a relay optical system 6C of embodiment 4. As shown in Fig. 4, the relay optical system 6C of embodiment 4 may include only a second lens 65 without including a first lens 64. Note that the relay optical system 6C of embodiment 4 may have the same configuration as the relay optical system 6 of embodiment 1, except that it does not include the first lens 64.

[0055] [Embodiment 5] Fig. 5 is a schematic diagram of a relay optical system 6D of the fifth embodiment. As shown in Fig. 5, in the relay optical system 6D, the first reflecting surface 61 and the third reflecting surface 63 may be independent members. The relay optical system 6D of the fifth embodiment may have the same configuration as the relay optical system 6 of the first embodiment, except that the first reflecting surface 61 and the third reflecting surface 63 are independent members. The configuration in which the first reflecting surface 61 and the third reflecting surface 63 are independent members can be applied to the second to fourth embodiments.

[0056] [Other embodiments] In the above embodiment, the lens surface of the first lens 64 may have an aspheric shape. The first lens 64 may also have a free-form surface shape. In this way, the first lens 64 can more effectively correct various aberrations occurring in the relay optical system 6.

[0057] In the above embodiment, the lens surface of the second lens 65 may have an aspheric shape. Also, the second lens 65 may have a free curved surface shape. In this way, the second lens 65 can more effectively correct various aberrations occurring in the relay optical system 6.

[0058] The relay optical system 6 does not necessarily have to include either the first lens 64 or the second lens 65. In other words, the relay optical system 6 may be composed of only the first reflecting surface 61, the second reflecting surface 62, and the third reflecting surface 63.

[0059] The relay optical system 6 of the above embodiment is not limited to being used in a projector, but can be used in devices such as an exposure machine or a stepper that uses an optical system that connects an enlargement-side image forming surface and a reduction-side image forming surface that is a reduced version of the enlargement-side image forming surface.

[0060] [Summary of this disclosure] The following is a summary of this disclosure.

[0061] (Appendix 1) In a relay optical system that connects a magnification-side image-forming surface and a reduction-side image-forming surface that is a reduced version of the magnification-side image-forming surface, a first reflecting surface having a concave shape, a second reflecting surface having a convex shape, and a third reflecting surface having a concave shape, in that order of passage of a light ray from the enlargement side to the reduction side; the optical axis of the enlargement-side image-forming surface and the optical axis of the reduction-side image-forming surface are parallel to each other; a direction of incidence of a light ray incident on the enlargement-side image-forming surface is opposite to a direction of incidence of a light ray incident on the reduction-side image-forming surface, The radius of curvature of the first reflecting surface and the radius of curvature of the third reflecting surface are different, the first reflecting surface, the second reflecting surface, and the third reflecting surface each have an aspheric shape; A relay optical system, wherein the enlargement side and the reduction side are each telecentric.

[0062] As a result, since the relay optical system has a reflective surface, the number of parts can be reduced compared to when the relay optical system is composed of only refractive lenses. Since the relay optical system has a small number of parts, it is easy to adjust the positions of the optical elements when assembling the relay optical system. Since both sides of the relay optical system are telecentric, the installation precision required when incorporating the relay optical system into an apparatus is not as strict as when both sides of the relay optical system are not telecentric, and the arrangement is easy.

[0063] The relay optical system can efficiently bend the optical path by 180 degrees using three reflecting surfaces. Each of the three reflecting surfaces has an aspheric shape, so various aberrations that occur in the relay optical system can be effectively corrected.

[0064] (Appendix 2) 2. The relay optical system described in claim 1, wherein the first reflecting surface, the second reflecting surface, and the third reflecting surface are each a rotationally symmetric surface.

[0065] This makes it easier to process the reflecting surface, improves the accuracy of the reflecting surface, and reduces manufacturing costs.

[0066] (Appendix 3) 3. The relay optical system according to claim 2, wherein the first reflecting surface, the second reflecting surface, and the third reflecting surface have respective designed optical axes that coincide with each other.

[0067] This makes it easy to assemble and adjust each reflecting surface based on the design optical axis of each reflecting surface, thereby improving the assembly precision of each reflecting surface.

[0068] (Appendix 4) a first lens disposed between the first reflecting surface and the second reflecting surface and between the second reflecting surface and the third reflecting surface; The light reflected by the first reflecting surface passes through the first lens and reaches the second reflecting surface, 4. The relay optical system according to claim 1, wherein the light reflected by the second reflecting surface passes through the first lens and reaches the third reflecting surface.

[0069] As a result, the spread and angle of the light beam reflected by the first reflecting surface can be controlled by the first lens, so that the axial surface distance between the first reflecting surface and the second reflecting surface can be reduced. In addition, the first lens can satisfactorily correct various aberrations of the light beam reflected by the first reflecting surface. Similarly, the spread and angle of the light beam reflected by the second reflecting surface can be controlled by the first lens, so that the axial surface distance between the second reflecting surface and the third reflecting surface can be reduced. In addition, the first lens can satisfactorily correct various aberrations of the light beam reflected by the second reflecting surface.

[0070] (Appendix 5) a second lens disposed between the third reflecting surface and the reduction-side image forming surface; 4. The relay optical system according to claim 1, wherein the light reflected by the third reflecting surface passes through the second lens and reaches the reduction-side image forming surface.

[0071] As a result, the spread and angle of the light reflected by the third reflecting surface can be controlled by the second lens, so that the on-axis surface distance between the third reflecting surface and the reduction-side image forming surface can be reduced. Also, the second lens can effectively correct various aberrations of the light reflected by the third reflecting surface.

[0072] (Appendix 6) a first lens disposed between the first reflecting surface and the second reflecting surface and between the second reflecting surface and the third reflecting surface, and a second lens disposed between the third reflecting surface and the reduction-side image-forming surface, The light reflected by the first reflecting surface passes through the first lens and reaches the second reflecting surface, The light reflected by the second reflecting surface passes through the first lens and reaches the third reflecting surface, 4. The relay optical system according to claim 1, wherein the light reflected by the third reflecting surface passes through the second lens and reaches the reduction-side image forming surface.

[0073] As a result, the spread and angle of the light beam reflected by the first reflecting surface can be controlled by the first lens, so that the axial surface distance between the first reflecting surface and the second reflecting surface can be reduced. In addition, the first lens can satisfactorily correct various aberrations of the light beam reflected by the first reflecting surface. Similarly, the spread and angle of the light beam reflected by the second reflecting surface can be controlled by the first lens, so that the axial surface distance between the second reflecting surface and the third reflecting surface can be reduced. In addition, the first lens can satisfactorily correct various aberrations of the light beam reflected by the second reflecting surface. Furthermore, the spread and angle of the light beam reflected by the third reflecting surface can be controlled by the second lens, so that the axial surface distance between the third reflecting surface and the reduction-side image forming surface can be reduced. In addition, the second lens can satisfactorily correct various aberrations of the light beam reflected by the third reflecting surface.

[0074] (Appendix 7) The relay optical system described in appendix 6, wherein the first lens and the second lens are integrally formed.

[0075] This allows the first lens and the second lens to be integrated into one lens, thereby reducing the number of parts.

[0076] (Appendix 8) 8. The relay optical system described in claim 7, wherein the radius of curvature of the first lens and the radius of curvature of the second lens are the same.

[0077] This makes it easier to form the lens surface when the first lens and the second lens are integrated into one lens.

[0078] (Appendix 9) 9. The relay optical system according to claim 6, wherein a lens surface of the first lens and a lens surface of the second lens are each a rotationally symmetric surface.

[0079] This makes it easier to process each lens surface, improves the precision of each lens surface, and reduces manufacturing costs.

[0080] (Appendix 10) The relay optical system described in Appendix 9, wherein the design optical axes of the lens surface of the first lens and the lens surface of the second lens are aligned with each other.

[0081] This makes it easy to assemble and adjust each lens based on the designed optical axis of each lens surface, thereby improving the assembly precision of each lens.

[0082] (Appendix 11) A projector including the relay optical system according to any one of claims 1 to 10, A light source; a separation optical system that separates light emitted from the light source into a first color light in a first wavelength band including blue light and another color light in a wavelength band longer than the first color light, and that includes a first dichroic mirror that reflects the first color light in a direction perpendicular to an optical axis of the emitted light; a first light modulation element that modulates the first color light separated by the first dichroic mirror; a second light modulation element that modulates the other color light separated by the first dichroic mirror; a reflecting mirror that reflects the first color light separated by the first dichroic mirror toward the first light modulation element in a direction perpendicular to the first color light; the relay optical system, in which the first light modulation element is disposed on an enlargement-side image forming plane, and which reduces a light beam width of the first color light modulated by the first light modulation element on a reduction-side image forming plane; a color combining prism that outputs a combined light obtained by combining the first color light whose luminous flux width has been reduced by the relay optical system and the other color light modulated by the second light modulation element; a projection optical system that projects the combined light emitted from the color combining prism; having A projector, wherein an effective area of ​​the first light modulation element is larger than an effective area of ​​the second light modulation element.

[0083] This makes it possible to provide a projector that has a small number of parts and is therefore low cost. [Explanation of symbols]

[0084] 1...light source, 2...illumination optical system, 3...separation optical system, 5...polarizing plate, 6, 6A, 6B, 6C, 6D...relay optical system, 7...light modulation element, 8...color synthesis prism, 9...projection optical system, 10...control unit, 11...reflection mirror, 12...lens, 13...lens, 14...reflection mirror, 15...reflection mirror, 19...relay lens, 21...multi-lens, 22...polarizing beam splitter, 23...multi-lens, 24...relay lens, 31...first dichroic mirror, 32...second dichroic mirror, 60A...magnification side image forming surface, 60B...reduction side image forming surface, 61...first reflection surface, 62...second reflection surface, 63...third reflection surface , 64...first lens, 65...second lens, 71...first light modulation element, 72...third light modulation element, 73...fourth light modulation element, 75...entrance side polarizing plate, 76...exit side polarizing plate, 81...first surface, 82...second surface, 83...third surface, 84...fourth surface, 100...projector, 641...lens surface, 642...lens surface, 651...lens surface, 652...lens surface, L1 to L10...lens, LD...exiting light, LE...combined light, LB...first color light, LG...second color light, LR...third color light, LC...other color light, N...first optical axis, M1...optical axis of enlargement side image forming surface, M2...optical axis of reduction side image forming surface, O...design optical axis, P...design optical axis.

Claims

1. In a relay optical system that connects a magnification-side image-forming surface and a reduction-side image-forming surface that is a reduced version of the magnification-side image-forming surface, a first reflecting surface having a concave shape, a second reflecting surface having a convex shape, and a third reflecting surface having a concave shape, in that order of passage of a light ray from the enlargement side to the reduction side; the optical axis of the enlargement-side image-forming surface and the optical axis of the reduction-side image-forming surface are parallel to each other; a direction of incidence of a light ray incident on the enlargement-side image-forming surface is opposite to a direction of incidence of a light ray incident on the reduction-side image-forming surface, The radius of curvature of the first reflecting surface and the radius of curvature of the third reflecting surface are different, the first reflecting surface, the second reflecting surface, and the third reflecting surface each have an aspheric shape; A relay optical system, wherein the enlargement side and the reduction side are each telecentric.

2. 2. The relay optical system according to claim 1, wherein the first reflecting surface, the second reflecting surface, and the third reflecting surface are each a rotationally symmetric surface.

3. 3. The relay optical system according to claim 2, wherein the first reflecting surface, the second reflecting surface, and the third reflecting surface have respective designed optical axes that coincide with each other.

4. a first lens disposed between the first reflecting surface and the second reflecting surface and between the second reflecting surface and the third reflecting surface; The light reflected by the first reflecting surface passes through the first lens and reaches the second reflecting surface, 4. The relay optical system according to claim 1, wherein the light reflected by the second reflecting surface passes through the first lens and reaches the third reflecting surface.

5. a second lens disposed between the third reflecting surface and the reduction-side image forming surface; 4. The relay optical system according to claim 1, wherein the light reflected by the third reflecting surface passes through the second lens and reaches the reduction-side image-forming surface.

6. a first lens disposed between the first reflecting surface and the second reflecting surface and between the second reflecting surface and the third reflecting surface, and a second lens disposed between the third reflecting surface and the reduction-side image-forming surface, The light reflected by the first reflecting surface passes through the first lens and reaches the second reflecting surface, The light reflected by the second reflecting surface passes through the first lens and reaches the third reflecting surface, 4. The relay optical system according to claim 1, wherein the light reflected by the third reflecting surface passes through the second lens and reaches the reduction-side image-forming surface.

7. 7. The relay optical system according to claim 6, wherein the first lens and the second lens are integrally formed.

8. 8. The relay optical system according to claim 7, wherein the radius of curvature of the first lens is the same as the radius of curvature of the second lens.

9. 7. The relay optical system according to claim 6, wherein the lens surface of the first lens and the lens surface of the second lens are each a rotationally symmetric surface.

10. The relay optical system according to claim 9 , wherein the lens surface of the first lens and the lens surface of the second lens have their designed optical axes coincident with each other.

11. A projector comprising the relay optical system according to claim 1 , A light source; a separation optical system that separates light emitted from the light source into a first color light in a first wavelength band including blue light and another color light in a wavelength band longer than the first color light, and that includes a first dichroic mirror that reflects the first color light in a direction perpendicular to an optical axis of the emitted light; a first light modulation element that modulates the first color light separated by the first dichroic mirror; a second light modulation element that modulates the other color light separated by the first dichroic mirror; a reflecting mirror that reflects the first color light separated by the first dichroic mirror toward the first light modulation element in a direction perpendicular to the first color light; the relay optical system, in which the first light modulation element is disposed on an enlargement-side image forming plane, and which reduces a light beam width of the first color light modulated by the first light modulation element on a reduction-side image forming plane; a color combining prism that outputs a combined light obtained by combining the first color light whose luminous flux width has been reduced by the relay optical system and the other color light modulated by the second light modulation element; a projection optical system that projects the combined light emitted from the color combining prism; having A projector, wherein an effective area of ​​the first light modulation element is larger than an effective area of ​​the second light modulation element.

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