Temperature control device
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-03-31
- Publication Date
- 2026-03-11
AI Technical Summary
Conventional temperature control devices using fluorinated liquids as circulating fluid face challenges in accurately detecting fluid leakage, which can adversely affect temperature adjustment functions.
A temperature control device equipped with a main tank, circulation flow path, circulation pump, temperature control unit, and a control unit that includes a first liquid level detection sensor and processor to detect fluid leakage by monitoring fluid levels and outputting an alarm when a predefined reference position is not reached within a set time.
Enables early detection of fluid leakage, ensuring accurate monitoring of fluid levels and preventing adverse effects on temperature control.
Smart Images
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Abstract
Description
[Technical field]
[0001] The present invention relates to a temperature adjustment device that controls the temperature of a load to a desired temperature by supplying a temperature-adjusted circulating fluid to the load. [Background technology]
[0002] A temperature control device that controls the temperature of a load to a desired temperature by supplying a temperature-controlled circulating fluid to the load is already widely known, as disclosed in Patent Document 1, for example. In this conventional temperature control device, the circulating fluid for controlling the temperature of the load is supplied from a main tank to the load through a feed flow path to control the temperature of the load, and the circulating fluid after controlling the temperature of the load is circulated back to a return flow path, where it is temperature-controlled by a heat exchanger, heater, or the like, and then stored in the main tank again. In addition, the main tank is provided with a level sensor, such as a level switch, that detects the level of the circulating fluid, and by detecting the level of the circulating fluid with the level sensor, it is possible to replenish the circulating fluid from a sub-tank to the main tank or to sound an alarm.
[0003] In a temperature control device that uses, for example, a fluorinated liquid as a circulating liquid, it is necessary to appropriately manage the amount of the circulating liquid being used, taking into consideration the impact on the environment. In particular, if the circulating liquid should leak to the outside, it may adversely affect the temperature control function of the temperature control device.
[0004] However, in the conventional temperature control device, it is not possible to accurately grasp changes in the amount of circulating fluid flowing between the load and the device, making it difficult to detect leakage of circulating fluid at an early stage. [Prior art documents] [Patent documents]
[0005] [Patent Document 1] JP 2005-106434 A Summary of the Invention [Problem to be solved by the invention]
[0006] Therefore, the technical object of the present invention is to provide a temperature control device that can accurately grasp changes in the amount of circulating fluid flowing between the load and the device, and can detect leakage of circulating fluid at an early stage. [Means for solving the problem]
[0007] In order to solve the above technical problem, a temperature control device according to the present invention is a temperature control device for controlling the temperature of a load to a predetermined set temperature, the temperature control device comprising: a main tank for storing circulating fluid for adjusting the temperature of the load; a circulation flow path for sending the circulating fluid in the main tank to the load and receiving the circulating fluid that has been temperature-adjusted for the load and sending it to the main tank; a circulation pump for sending the circulating fluid in the main tank to the load through the circulation flow path; a temperature control unit provided in the circulation flow path for controlling the temperature of the circulating fluid that has been temperature-adjusted for the load; and a control unit having a processor that executes a leakage detection process to detect leakage of the circulating fluid, the main tank comprising a first liquid level detection sensor for detecting a liquid level of the circulating fluid stored therein; and a liquid level reference position that is positioned above the first liquid level detection sensor and starts the leakage detection process, and the processor is characterized in that, when the liquid level of the main tank is detected by the first liquid level detection sensor within a first preset time in the leakage detection process, it is determined that the circulating fluid is leaking from the temperature control device and outputs a first alarm signal.
[0008] In this case, preferably, the temperature control section includes a heat exchanger that exchanges heat with the circulating fluid, and a heat exchange circuit that supplies a heat exchange medium to the heat exchanger for heat exchange with the circulating fluid. Also, preferably, the temperature adjustment device further includes a sub-tank in which the main tank is disposed inside and in which the circulating fluid is stored, and a supply pump that supplies the circulating fluid in the sub-tank to the main tank, and the liquid level reference position is defined by a communication hole that penetrates a side wall of the main tank to communicate between the inside of the main tank and the inside of the sub-tank, or by an upper edge of the side wall of the main tank.
[0009] In addition, preferably, in the leak detection process, if the liquid level in the main tank is not detected by the first liquid level detection sensor within the first set time, the processor drives the supply pump for a preset second set time to supply the circulating liquid in the sub-tank to the main tank, thereby causing the liquid level of the circulating liquid in the main tank to reach the liquid level reference position and resumes the leak detection process.
[0010] In addition, preferably, the circulation flow path has a delivery flow path connected to the main tank for delivering the circulating fluid in the main tank to the load, and a return flow path for receiving the circulating fluid whose temperature has been adjusted from the load and returning it to the main tank, the delivery flow path of the circulation flow path is provided with a temperature sensor for detecting the temperature of the circulating fluid delivered from the main tank, and when the temperature adjustment device starts to operate, the processor executes a circulating fluid temperature monitoring process for monitoring whether the temperature of the circulating fluid detected by the temperature sensor satisfies a predetermined condition, and when the temperature of the circulating fluid satisfies the predetermined condition in the circulating fluid temperature monitoring process, drives the supply pump for a second preset time to supply the circulating fluid in the sub-tank to the main tank, thereby causing the level of the circulating fluid in the main tank to reach the reference level, and starts the leakage detection process. In addition, preferably, the predetermined condition is that the temperature of the circulating fluid detected by the temperature sensor is maintained at the set temperature for a third preset time.
[0011] In addition, preferably, when the temperature of the circulating fluid detected by the temperature sensor during execution of the leak detection process does not meet the set temperature, the processor stops the leak detection process and executes the circulating fluid temperature monitoring process.
[0012] In addition, preferably, the sub-tank is provided with an upper limit liquid level sensor that detects an upper limit position at which the level of the circulating fluid stored in the sub-tank does not contact the bottom of the main tank, and when the upper limit position is detected by the upper limit liquid level sensor, the processor outputs a second alarm signal, indicating that there is a risk that the circulating fluid in the sub-tank will contact the main tank. Effect of the Invention
[0013] The temperature control device of the present invention can accurately grasp changes in the amount of circulating fluid flowing between the load and the device, making it possible to provide a temperature control device that can detect leakage of circulating fluid at an early stage. [Brief description of the drawings]
[0014] [Figure 1] 1 is a circuit diagram of a temperature adjustment device according to an embodiment of the present invention, showing a state in which the circulating fluid in the main tank is at a reference liquid level position. [Diagram 2] FIG. [Diagram 3] This shows the state in which the circulating fluid in the sub-tank is supplied to the main tank and the main tank is filled with fluid. [Figure 4] This shows a state in which the level of the circulating fluid in the main tank has dropped and is detected by the level detection sensor. [Diagram 5] 13 is a flowchart of a processor for detecting leakage of circulating fluid from a flow path when the temperature adjustment device is operating. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0015] 1 to 5 show an embodiment of a temperature control device according to the present invention. In this embodiment, a load is a semiconductor manufacturing device, and a circulating liquid for cooling the load is an insulating refrigerant (e.g., a fluorinated liquid).
[0016] As shown in Figures 1 and 2, the temperature control device 1 is composed of a housing 3 that covers the outside of the temperature control device 1, a main tank 20 that stores circulating fluid L for regulating the temperature of a load 70, a circulation flow path 10 that sends the circulating fluid L in the main tank 20 to the load 70 and receives the circulating fluid L that has been temperature-regulated for the load 70 and sends it to the main tank 20, a circulation pump 23 that sends the circulating fluid L in the main tank 20 to the load 70 through the circulation flow path 10, a temperature control unit 8 that is provided in the circulation flow path 10 and controls the temperature of the circulating fluid L that has been temperature-regulated for the load 70, a sub-tank 40 in which the main tank 20 is disposed and in which the circulating fluid L is stored, a supply pump 51 that supplies the circulating fluid L in the sub-tank 40 into the main tank 20, and a control unit 60 that has a processor 61 that executes a leakage detection process that detects leakage of the circulating fluid L. In this embodiment, the temperature control unit 8 has a heat exchanger 11 that exchanges heat with the circulating liquid L, a refrigeration circuit 30 (heat exchange circuit) that supplies a refrigerant (heat exchange medium) to the heat exchanger 11 for heat exchange with the circulating liquid L, and a heater 24 that heats the circulating liquid L in the main tank 20.
[0017] The circulation flow path 10, main tank 20, circulation pump 23, temperature control unit 8, sub-tank 40, supply pump 51, and control unit 60 are housed in a single housing 3. A circulating fluid discharge port 16a and a circulating fluid return port 14a of the circulation flow path 10, and a facility water supply port 25a and a facility water discharge port 25b of the facility water supplied to the condenser 32 of the refrigeration circuit 30 are provided on a side surface of the housing 3. This allows pipes 71, 71', 72, 72' of a target device (load 70) to be temperature controlled on the user's side to be connected to these openings (ports) 16a, 14a, 25b, 25a.
[0018] A drain pan 4 for receiving leaked circulating fluid is disposed at the bottom of the housing 3, and this drain pan 4 is provided with a drain port 5 for discharging the circulating fluid accumulated in the drain pan 4 to the outside.
[0019] As described above, an insulating refrigerant such as a fluorinated liquid is used as the circulating liquid L. This insulating refrigerant (fluorinated liquid) has a property that its volume increases with an increase in temperature. For example, ethylene glycol or water can be used as the circulating liquid L. In this embodiment, the circulating liquid L in the main tank 20 is sent to the load 70 through the sending flow path 16 connecting the main tank 20 and the circulating liquid outlet 16a and the piping 71 connecting the circulating liquid outlet 16a and the inlet 70a of the load 70. The circulating liquid L after cooling the load 70 is sent to the heat exchanger 11 through the piping 71' connecting the outlet 70b of the load 70 and the circulating liquid return port 14a and the first return flow path 14 connecting the circulating liquid return port 14a and the heat exchanger 11 of the temperature control unit 8. The circulating liquid L whose temperature is controlled by the heat exchanger 11 is returned to the main tank 20 again through the second return flow path 15 connecting the heat exchanger 11 and the main tank 20. That is, the circulation flow path 10 is configured to include a delivery flow path 16, pipes 71, 71', a first return flow path 14, a heat exchanger 11, and a second return flow path 15.
[0020] The delivery flow path 16 communicates between an outlet 20a opened in the bottom wall 21 of the main tank 20 and a circulating fluid discharge port 16a, the pipe 71 communicates between the circulating fluid discharge port 16a and an inlet 70a of a load 70, and the pipe 71' communicates between the circulating fluid return port 14a and an outlet 70b of the load 70. The first return flow path 14 communicates between the circulating fluid return port 14a and a circulating fluid inlet 11a of the heat exchanger 11, and the second return flow path 15 communicates between the circulating fluid outlet 11b of the heat exchanger 11 and an inlet 20b opened in the bottom wall of the main tank 20.
[0021] A circulating fluid heat exchange passage 12 is provided in the heat exchanger 11, connected between the circulating fluid inlet 11a and the circulating fluid outlet 11b, and the first and second return passages 14 and 15 are connected to the circulating fluid heat exchange passage 12. The heat exchanger 11 is also provided with a refrigerant heat exchange passage 13 connected between the refrigerant inlet 11c and the refrigerant outlet 11d, and the refrigerant heat exchange passage 13 is connected to third and fourth circulation passages 36 and 37 of the refrigeration circuit (heat exchange circuit) 30, which will be described later. The circulating fluid flowing through the circulating fluid heat exchange passage 12 is heat exchanged with the refrigerant flowing through the refrigerant heat exchange passage 13, and is controlled to a predetermined temperature. The circulating fluid controlled to the predetermined temperature is returned to the main tank 20 from the circulating fluid outlet 11b of the heat exchanger 11 through the second return passage 15.
[0022] A flow rate sensor 14b and a temperature sensor 14c are provided in the first return flow path 14 from the upstream side to the downstream side thereof for detecting the flow rate and temperature of the circulating fluid L. These sensors 14b, 14c are electrically connected to the control unit 60. In addition, a pressure sensor 16b and a temperature sensor 16c are provided in the delivery flow path 16 from the upstream side to the downstream side thereof for detecting the pressure and temperature of the circulating fluid L. These sensors 16b, 16c are also electrically connected to the control unit 60.
[0023] The main tank 20 is open at the top, and is partitioned by a bottom wall 21 and a side wall 22, and stores circulating fluid L therein. On the other hand, the sub-tank 40 has a first end 40a and a second end 40b on both sides in the width direction, and is partitioned by a bottom wall 41, a side wall 42, and an upper wall 43, and has a larger volume than the main tank 20, and accommodates the entire main tank 20 therein and stores circulating fluid L. The main tank 20 is shifted toward the first end 40a of the sub-tank 40, and is disposed above the sub-tank 40 with a gap above the bottom wall 21 of the main tank 20. Therefore, a space 44 is formed around the main tank 20 inside the sub-tank 40. In this embodiment, the space 44 has a lower space 44a formed between the bottom wall 41 of the subtank 40 and the bottom wall 21 of the main tank 20, a lateral space 44b formed on the second end 40b side of the subtank 40, and an upper space 44c formed above the main tank 20.
[0024] The circulating fluid L is stored in the lower space 44a, the heat exchanger 11 is disposed in the lateral space 44b, and various sensors, which will be described later, are disposed in the upper space 44c.
[0025] The refrigeration circuit 30 of the temperature control unit 8 has a compressor 31 that compresses gaseous refrigerant to form a high-temperature, high-pressure gaseous refrigerant, a condenser 32 that cools the high-temperature, high-pressure gaseous refrigerant sent from the compressor 31 to form a low-temperature, high-pressure liquid refrigerant, a first expansion valve 33 that decompresses the low-temperature, high-pressure liquid refrigerant sent from the condenser 32 to form a low-temperature, low-pressure liquid refrigerant, and a heat exchanger 11 (evaporator) that heats the low-temperature, low-pressure liquid refrigerant sent from the first expansion valve 33 to form a high-temperature, low-pressure gaseous refrigerant. In this embodiment, the heat exchanger 11 is a part of the circulation flow path 10 and also a part of the refrigeration circuit 30.
[0026] The refrigeration circuit 30 has a first refrigerant flow path 34 connecting the outlet 31b of the compressor 31 and the inlet 32a of the condenser 32, a second refrigerant flow path 35 connecting the outlet 32b of the condenser 32 and the inlet 33a of the first expansion valve 33, a third refrigerant flow path 36 connecting the outlet 33b of the first expansion valve 33 and the refrigerant inlet 11c of the heat exchanger 11, and a fourth refrigerant flow path 37 connecting the refrigerant outlet 11d of the heat exchanger 11 and the inlet 31a of the compressor 31. A pressure sensor 35a, a high pressure sensor 35b, and a filter 35c are provided in the second refrigerant flow path 35 from the upstream side to the downstream side. The pressure sensor 35a and the high pressure sensor 35b are also electrically connected to the control unit 60.
[0027] Furthermore, a fifth refrigerant flow path 38 is provided between the downstream side of the first expansion valve 33 of the third refrigerant flow path 36 and the first refrigerant flow path 34, and the fifth refrigerant flow path 38 is provided with the second expansion valve 27. A sixth refrigerant flow path 39 is provided between the downstream side of the filter 35c of the second refrigerant flow path 35 and the compressor 31, and the sixth refrigerant flow path 39 is provided with the third expansion valve 28. The second expansion valve 27 can control the temperature adjustment function of the heat exchanger 11 for the refrigerant circulating liquid L, and the third expansion valve 28 can prevent the compressor 31 from overheating. The compressor 31 and the first to third expansion valves 33, 27, and 28 are also electrically connected to the control unit 60, and the control unit 60 controls the compressor 31 and the first to third expansion valves 33, 27, and 28.
[0028] In this embodiment, the condenser 32 is a water-cooled condenser disposed along the outer surface of the side wall 42 of the sub-tank 40, and includes a heat dissipation circuit 25 through which industrial water flows. The heat dissipation circuit 25 includes a facility water supply flow path 25c connecting the facility water supply port 25a and the facility water inlet 32c of the condenser 32, and a facility water discharge flow path 25d connecting the facility water discharge port 25b and the facility water outlet 32d of the condenser 32. A water control valve 25e is provided in the facility water discharge flow path 25d. The water control valve 25e is also electrically connected to the control unit 60, and the temperature of the refrigerant can be controlled by controlling the opening degree of the water control valve 25e by the control unit 60. The condenser 32 may be an air-cooled type.
[0029] The sub tank 40 is provided with a supply pump 51 that supplies the circulating fluid L in the sub tank 40 into the main tank 20. In this embodiment, the supply pump 51 is an immersion type pump that pumps up the circulating fluid L in the sub tank 40 into the main tank 20, and is disposed extending in the vertical direction in the lateral space 44b on the second end 40b side of the sub tank 40. An outlet 51a is provided at the top of the supply pump 51 for discharging the pumped up circulating fluid L in the sub tank 40 into the main tank 20. The supply pump 51 is also electrically connected to the control unit 60.
[0030] Inside the subtank 40, a total of three level switches 52, 53, and 54 are provided: one near the lower side of the upper wall 43 of the subtank 40, one near the lower side of the bottom wall 21 of the main tank 20, and one above the bottom wall 41 of the subtank 40. In this embodiment, these level switches 52, 53, and 54 are float-type level switches and are electrically connected to the control unit 60. Details of the float-type level switches will be described later. In addition, on the side wall 42 on the first end 40a side of the subtank 40, a level gauge 45 that allows the amount of the circulating fluid L in the subtank 40 to be visually confirmed from outside the housing 3, and a circulating fluid inlet 46 for refilling the subtank 40 with the circulating fluid L from outside the housing 3 are provided.
[0031] A drain pipe 47 is provided at the bottom of the side wall 42 on the first end 40a side of the sub tank 40, and a drain cock 47a is attached to the tip of the drain pipe 47. The circulating fluid L in the sub tank 40 can be discharged to the outside by opening the drain cock 47a. Of the three level switches 52, 53, and 54, the level switch 52 arranged in the vicinity of the lower part of the upper wall 43 detects the level of the circulating fluid L when the circulating fluid L in the sub tank 40 is in a substantially full state. The level switch (upper limit level sensor) 53 arranged in the vicinity of the lower part of the bottom wall 21 of the main tank 20 detects the upper limit position at which the level of the circulating fluid L stored in the sub tank 40 does not contact the bottom of the main tank 20. The level switch 54 arranged at the bottom of the sub tank 40 detects the lower limit of the circulating fluid L stored in the sub tank 40. When the three level switches 52, 53, 54 detect the level of the circulating fluid L in the subtank 40, the processor 61 issues an alarm to prompt the user to refill the subtank 40 with the circulating fluid through the circulating fluid inlet 46, or to open the drain cock 47a to drain the circulating fluid L from the subtank 40. The details of this alarm will be described later.
[0032] The main tank 20 is provided with an immersion type circulation pump 23 that sends out the circulating fluid L to the delivery flow path 16 of the circulation flow path 10. The circulation pump 23 is also electrically connected to the control unit 60. The upper wall 43 of the sub-tank 40 is provided with a heater 24 (temperature control unit 8) that heats the circulating fluid L stored in the main tank 20 from a vertical middle position to the upper part, and the upper wall 43 of the sub-tank 40 is provided with a temperature fuse 26 disposed in the upper space 44c above the main tank 20. The heater 24 and the temperature fuse 26 are also electrically connected to the control unit 60. As a result, for example, when the temperature of the air in the main tank 20 becomes higher than a predetermined temperature set in advance, the processor 61 can determine that the circulating fluid L is in an overheated state and turn off the power of the temperature adjustment device 1.
[0033] Furthermore, two level switches 55, 56 are provided on the upper wall 43 of the sub tank 40, one above the other, which are arranged at the top of the main tank 20, and these level switches 55, 56 are also electrically connected to the control unit 60. The level switches 55, 56 can detect the liquid level of the circulating fluid L in the main tank 20. The level switch 55 (first liquid level detection sensor) arranged at the upper of the two level switches 55, 56 detects the liquid level of the circulating fluid L in the main tank 20, and the processor 61 can discover that the circulating fluid L is leaking from the temperature adjustment device 1. The leakage of the circulating fluid L from the temperature adjustment device 1 will be described later. The level switch 56 is arranged below the level switch 55, and detects the lower limit of the circulating fluid L stored in the main tank 20.
[0034] 1 and 2, a communication hole 22a is provided in the upper part of the side wall 22 of the main tank 20 on the side of the first end 40a of the sub tank 40. This communication hole 22a penetrates the side wall 22 and communicates with a gap 48 formed between the side wall 22 of the main tank 20 and the opposing side wall 42 of the sub tank 40. This gap 48 extends in the vertical direction and communicates with the circulating fluid inlet 46 and the lower space 44a. Therefore, the circulating fluid L discharged from the communication hole 22a is returned into the sub tank 40 through the gap 48. This communication hole 22a makes it possible to maintain the liquid level of the circulating fluid L in the main tank 20 at the same position as the position of the communication hole 22a.
[0035] Hereinafter, the position of the communication hole 22a relative to the main tank 20 will be referred to as the "liquid level reference position Ps." In this embodiment, since the communication hole 22a has an opening that extends in the vertical direction, the liquid level reference position Ps is determined to be the position of the lower end of the communication hole 22a. This liquid level reference position Ps becomes the reference position when starting to detect leakage of the circulating fluid L from the temperature adjustment device 1. The liquid level reference position Ps may be determined to be the upper edge of the side wall 22 of the main tank 20. In this case, the communication hole 22a is not necessary.
[0036] The level switch 55 is disposed at a position having a predetermined distance h downward from the liquid level reference position Ps. This predetermined distance h is determined, for example, in consideration of the amount of circulating fluid L leaking from the temperature adjustment device 1 per unit time.
[0037] As described above, these level switches 52-56 are, for example, float-type level switches. Since the level switches 52-56 have the same structure, only the level switch 55 will be described below. The float-type level switch 55 has a magnet installed on the inner surface of the float 55a, and a reed switch arranged in the stem 55b that movably supports the float 55a. When the float 55a moves up and down relative to the stem 55b, the magnetic field from the magnet turns the reed switch ON and OFF. The stem 55b is provided with stoppers (not shown) on both the top and bottom of the float 55a to limit the up and down movement of the float 55a. The level switch 56 is disposed below the level switch 55 and detects the lower limit of the circulating fluid L stored in the main tank 20.
[0038] Next, the control unit 60 having the processor 61 that executes a leakage detection process for detecting leakage of the circulating fluid L will be described.
[0039] As shown in FIG. 1 and FIG. 5, when the operation of the temperature adjustment device 1 is started, the processor 61 executes a circulating fluid temperature monitoring process for monitoring whether the temperature of the circulating fluid L in the main tank 20 detected by the temperature sensor 16c satisfies a predetermined condition (step 1). In this embodiment, the predetermined condition is that the state in which the temperature of the circulating fluid L detected by the temperature sensor 16c is maintained at a preset temperature continues for a preset predetermined time (a third predetermined time, for example, 3 hours). In the circulating fluid temperature monitoring process, when the detected temperature of the circulating fluid L does not satisfy the set temperature, step 1 is repeated. When the temperature of the circulating fluid L does not satisfy the set temperature, the processor 61 may control the temperature of the refrigerant flowing through the heat exchanger 11 in the refrigeration circuit 30 to control the temperature of the circulating fluid L, or may control the temperature of the circulating fluid L in the main tank 20 by the heater 24. The set temperature may be set with a predetermined tolerance.
[0040] When the circulating fluid L satisfies a predetermined condition in the circulating fluid temperature monitoring process, the processor 61 proceeds to step 2 and starts detecting the level of the circulating fluid L by the level switch 55. The processor 61 then drives the supply pump 51 for a preset time (a second set time, for example, 4 seconds) to supply the circulating fluid in the sub-tank 40 to the main tank 20 (step 3). As a result, for example, the level of the circulating fluid L in the main tank 20 is displaced upward from the state in which the level of the circulating fluid L is detected by the level switch 55 (see FIG. 3) to reach the liquid level reference position Ps (see FIG. 4). Note that even if the circulating fluid L supplied to the main tank 20 during the drive of the supply pump 51 attempts to exceed the liquid level reference position Ps, the circulating fluid L flows out of the communication hole 22a into the sub-tank 40, so that the liquid level of the circulating fluid L in the main tank 20 can be maintained at the liquid level reference position Ps.
[0041] Then, the processor 61 initializes a timer that measures elapsed time in synchronization with the end of the supply of the circulating fluid L by the supply pump 51 (step 4), and starts the leak detection process (steps 5-7).
[0042] When the processor 61 starts the leak detection process, it determines whether or not the temperature of the circulating fluid L detected by the temperature sensor 16c meets the set temperature (step 5). If the temperature of the circulating fluid L meets the set temperature, it continues the leak detection process and proceeds to step 6, but if the temperature of the circulating fluid L does not meet the set temperature, it stops the leak detection process and returns to step 1 to execute the circulating fluid temperature monitoring process.
[0043] If the temperature of the circulating fluid L meets the set temperature in step 5, the process proceeds to step 6, where the processor 61 determines whether or not the level of the circulating fluid L in the main tank 20 has been detected by the level switch 55. If the processor 61 determines that the level of the circulating fluid L in the main tank 20 has not been detected by the level switch 55, the process proceeds to step 7, where it determines whether or not the elapsed time since the timer was initialized has exceeded a preset first set time (e.g., one hour). If the processor 61 determines that the elapsed time is within the first set time, the process returns to step 5 and continues the leak detection process.
[0044] On the other hand, when the processor 61 determines in the leakage detection process that the level of the circulating fluid L in the main tank 20 is detected by the level switch 55 (step 6), the process proceeds to step 8 and outputs a first alarm signal, determining that the circulating fluid L is leaking from the temperature adjustment device 1. Here, when the processor 61 outputs the first alarm signal, the processor 61 can, for example, cause a display device, a speaker, or the like provided in the control unit 60 to display or output a sound to notify of the leakage of the circulating fluid L, or stop the operation of the temperature adjustment device 1.
[0045] In this way, in the leakage detection process, the level switch 55 detects a change in the level of the circulating fluid L within the first predetermined time, thereby making it possible to accurately grasp a change in the amount of circulating fluid L flowing between the load 70 and the temperature adjustment device 1. Therefore, based on the detection of the level of the circulating fluid L by the level switch 55, the processor 61 can output a first alarm signal indicating that the circulating fluid L is leaking from the temperature adjustment device 1.
[0046] Also, in step 6, when the processor 61 determines that the level of the circulating fluid L in the main tank 20 has not been detected by the level switch 55, if the time that has elapsed since the timer was initialized is not within a first set time (e.g., one hour) (step 7), the processor 61 drives the supply pump 51 for a second set time to supply the circulating fluid L in the sub-tank 40 to the main tank 20, thereby causing the level of the circulating fluid L in the main tank 20 to reach the liquid level reference position Ps, and resumes the leak detection process.
[0047] Meanwhile, when the upper limit position of the circulating fluid in the subtank 40 is detected by the level switch 55 (upper limit liquid level sensor) provided in the subtank 40 during operation of the temperature adjustment device 1, the processor 61 outputs a second alarm signal indicating that there is a risk that the circulating fluid L in the subtank 40 may come into contact with the main tank 20. This is because, when the circulating fluid L in the subtank 40 comes into contact with the main tank 20, there is a risk that heat exchange will occur between the circulating fluid L in the main tank 20 and the circulating fluid L in the main tank 20, causing a change in the temperature of the circulating fluid L in the main tank 20. In this case, the processor 61 can output a display or sound from a display device, a speaker, or the like provided in the control unit 60 to notify that the circulating fluid will come into contact with the main tank 20, or can stop the operation of the temperature adjustment device 1, as in the case of the first alarm signal.
[0048] As described above, according to the temperature control device 1, by detecting the liquid level of the circulating fluid L in the main tank 20 by the level switch 55 within a first predetermined time in the leakage detection process, it is possible to accurately grasp the change in the amount of circulating fluid L flowing between the load 70, and it is possible to provide a temperature control device 1 that is capable of detecting leakage of the circulating fluid L at an early stage.
[0049] In the above-described embodiment, the temperature control unit 8 has a refrigeration circuit 30 (heat exchange circuit) that supplies the refrigerant to the heat exchanger 11 for heat exchange with the circulating liquid L, but the present invention is not limited to this. The temperature control unit 8 may have a heat exchange circuit that connects the facility water supply passage 25c and the facility water discharge passage 25d of the heat dissipation circuit 25 to the heat exchanger 11 so as to directly supply cooling water to the heat exchanger 11. [Explanation of symbols]
[0050] 1 Temperature control device 8 Temperature control unit 10 Circulation flow path 11 Heat exchanger (temperature control unit) 14 First return channel (return channel) 15 Second return flow path (return flow path) 16 Delivery Channel 16c Temperature Sensor 20 Main Tank 22 Side wall 22a Communication hole 22b Upper edge 23 Circulation Pump 24 Heater (temperature control unit) 30 Refrigeration circuit (temperature control unit, heat exchange circuit) 40 Subtank 51 Supply Pump 53 Level switch (upper limit liquid level sensor) 55 Level switch (first liquid level detection sensor) 60 Control section 61 processors 70 Load L Circulating fluid Ps liquid level reference position
Claims
1. A temperature control device for controlling a temperature of a load to a predetermined set temperature, The temperature control device is a main tank for storing a circulating fluid for adjusting the temperature of the load; a circulation flow path that delivers the circulating fluid in the main tank to the load and receives the circulating fluid whose temperature has been adjusted from the load and delivers it to the main tank; a circulation pump that sends the circulating fluid in the main tank through the circulation flow path to the load; a temperature control unit provided in the circulation flow path and configured to control a temperature of the circulating fluid that has been temperature-adjusted for the load; A control unit having a processor that executes a leak detection process to detect a leak of the circulating fluid, the main tank has a first liquid level detection sensor that detects a liquid level of the circulating liquid stored in the main tank, and a liquid level reference position that is located above the first liquid level detection sensor and that starts the leakage detection process, When the liquid level of the main tank is detected by the first liquid level detection sensor within a first set time period, the processor determines that the circulating liquid is leaking from the temperature adjustment device and outputs a first alarm signal. A temperature control device characterized by:
2. The temperature control unit includes a heat exchanger that exchanges heat with the circulating fluid, and a heat exchange circuit that supplies a heat exchange medium to the heat exchanger for heat exchange with the circulating fluid. The temperature control device according to claim 1 .
3. the temperature control device further includes a sub-tank in which the main tank is disposed and in which a circulating fluid is stored, and a supply pump that supplies the circulating fluid in the sub-tank to the main tank, the liquid level reference position is defined by a communication hole penetrating a side wall of the main tank to communicate between the inside of the main tank and the inside of the sub-tank, or by an upper edge of the side wall of the main tank. The temperature control device according to claim 1 .
4. When the liquid level of the main tank is not detected by the first liquid level detection sensor within the first set time in the leakage detection process, the processor drives the supply pump for a preset second set time to supply the circulating liquid in the sub-tank to the main tank, thereby causing the liquid level of the circulating liquid in the main tank to reach the liquid level reference position, and resumes the leakage detection process. The temperature control device according to claim 3 .
5. the circulation flow path includes a delivery flow path connected to the main tank for delivering the circulating fluid in the main tank to the load, and a return flow path for receiving the circulating fluid whose temperature has been adjusted for the load and returning it to the main tank; a temperature sensor for detecting a temperature of the circulating fluid discharged from the main tank is provided in the discharge flow path of the circulation flow path, When the operation of the temperature adjustment device is started, the processor executes a circulating fluid temperature monitoring process for monitoring whether the temperature of the circulating fluid detected by the temperature sensor satisfies a predetermined condition, and when the temperature of the circulating fluid satisfies the predetermined condition in the circulating fluid temperature monitoring process, drives the supply pump for a second preset time period to supply the circulating fluid in the sub-tank to the main tank, thereby causing the level of the circulating fluid in the main tank to reach the reference liquid level position, and starts the leakage detection process. The temperature control device according to claim 3 .
6. The predetermined condition is that the temperature of the circulating fluid detected by the temperature sensor is maintained at the set temperature for a third predetermined time period. The temperature control device according to claim 5 .
7. the processor, when the temperature of the circulating fluid detected by the temperature sensor does not satisfy the set temperature during the execution of the leak detection process, stops the leak detection process and executes the circulating fluid temperature monitoring process.
7. The temperature control device according to claim 5 or 6.
8. the sub-tank is provided with an upper limit liquid level sensor that detects an upper limit position at which the liquid level of the circulating liquid stored in the sub-tank does not contact the bottom of the main tank, when the upper limit position is detected by the upper limit liquid level sensor, the processor determines that there is a risk that the circulating liquid in the sub-tank will come into contact with the main tank and outputs a second alarm signal. The temperature control device according to claim 3 .