Method and device for determining adsorption

JP2025024475APending Publication Date: 2025-02-20PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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Patent Information

Application Number
JP2023128614
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-08-07
Publication Date
2025-02-20

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【0007】 本開示によれば、対象物の吸着判定をより高精度に実行できる。

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Abstract

To determine adsorption of an object more precisely.SOLUTION: A method for determining adsorption that is performed by a terminal device capable of communicating between at least one vibration sensor and a robot for adsorbing an object with an adsorption part includes the steps of: acquiring vibration data collected by the vibration sensor that is fitted to a vacuum pump connected to the adsorption part or the adsorption part; and outputting a determination result determining whether the adsorption part adsorbs an object on the basis of the vibration data.SELECTED DRAWING: Figure 1
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Description

[Technical field]

[0001] The present disclosure relates to an adsorption determination method and an adsorption determination device. [Background technology]

[0002] Patent document 1 discloses a negative pressure detection system including a suction pad, a vacuum pump for reducing the pressure inside the suction pad, a microphone for acquiring the driving sound generated by the vacuum pump, and a calculation control unit for determining the state of reduced pressure in the suction pad based on the driving sound of the vacuum pump acquired by the microphone. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-221468 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure has been devised in consideration of the above-mentioned conventional circumstances, and has an object to provide an adhesion determination method and an adhesion determination device that perform adhesion determination of an object with higher accuracy. [Means for solving the problem]

[0005] The present disclosure provides an adsorption determination method performed by a terminal device capable of communicating between at least one vibration sensor and a robot that adsorbs an object with an adsorption unit, the method acquiring vibration data collected by a vacuum pump connected to the adsorption unit or the vibration sensor attached to the adsorption unit, and outputting a determination result as to whether or not the adsorption unit is adsorbing the object based on the vibration data.

[0006] The present disclosure also provides an adsorption determination device capable of communicating between at least one vibration sensor and a robot that adsorbs an object with an adsorption unit, the adsorption determination device including: an acquisition unit that acquires vibration data collected by a vacuum pump connected to the adsorption unit or the vibration sensor attached to the adsorption unit; and a control unit that outputs a determination result as to whether or not the adsorption unit is adsorbing the object based on the vibration data. Effect of the Invention

[0007] According to the present disclosure, it is possible to perform the adsorption determination of the object with higher accuracy. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram showing an example of a use case of the robot hand system according to the first embodiment. [Diagram 2] FIG. 1 is a block diagram showing an example of an overall configuration of a robot system according to a first embodiment. [Diagram 3] A flowchart showing an example of an operation procedure of a terminal device according to the first embodiment. [Figure 4] A flowchart showing an example of an operation procedure of a terminal device according to the first embodiment. [Diagram 5] A diagram showing an example of a vibration profile [Figure 6] A diagram explaining examples of vibration data for picking results of "NG" and "OK" based on the pickup position. [Figure 7] A comparison of vibration data examples when in contact with and out of contact with the grasped object. [Figure 8] FIG. 13 is a diagram showing an example of a use case of the robot hand system according to the second embodiment. [Figure 9] FIG. 11 is a block diagram showing an example of the overall configuration of a robot system according to a second embodiment. [Figure 10] A flowchart showing an example of an operation procedure of a terminal device according to the second embodiment. [Figure 11] A flowchart showing an example of an operation procedure of a terminal device according to the second embodiment. [Figure 12] A comparison of vibration data examples when in contact with and out of contact with the grasped object. [Figure 13] A comparison of various vibration data corresponding to the contact state with the grasped object. [Figure 14] A diagram showing an example of vibration data of the suction part when subjected to external force. [Figure 15] FIG. 13 is a diagram showing an example of a use case of the robot hand system according to the third embodiment. [Figure 16] FIG. 11 is a block diagram showing an example of the overall configuration of a robot system according to a third embodiment. [Figure 17] A flowchart showing an example of an operation procedure of a terminal device according to the third embodiment. [Figure 18] A flowchart showing an example of an operation procedure of a terminal device according to the third embodiment. [Figure 19] FIG. 13 is a diagram showing an example of a use case of the robot hand system according to the fourth embodiment. [Figure 20] FIG. 13 is a block diagram showing an example of the overall configuration of a robot system according to a fourth embodiment. [Figure 21] A flowchart showing an example of an operation procedure of a terminal device according to the fourth embodiment. [Figure 22] A flowchart showing an example of an operation procedure of a terminal device according to the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] (Background to this disclosure) Conventionally, there is a negative pressure detection system that uses a microphone to pick up the driving sound of a vacuum pump that reduces the pressure inside a suction pad capable of adsorbing a workpiece (hereinafter referred to as a "grasping target") and detects the suction state of the gripping target by the suction pad based on the picked up driving sound. The negative pressure detection system performs a determination of the suction of the gripping target by the suction pad based on a comparison between the volume or frequency of the picked up driving sound of the vacuum pump and a pre-stored threshold value.

[0010] However, the driving sound picked up by a microphone placed near the vacuum pump is picked up indirectly through the air (atmosphere). Therefore, the driving sound is attenuated depending on the distance between the vacuum pump and the microphone, and the resolution of the picked up driving sound is low. In addition, the microphone is prone to picking up disturbances such as ambient noise. Therefore, it has been difficult for the negative pressure detection system to detect the suction state with high accuracy.

[0011] On the other hand, there is a method of acquiring data by providing a flow sensor in the path of the vacuum pump, but the installation is troublesome, and especially when retrofitting, it is necessary to disassemble the path before installing. In view of the above problems, the present disclosure provides an adsorption determination method and an adsorption determination device that are easy to install on a vacuum pump or the like while maintaining high detection accuracy compared to conventional microphones and flow sensors.

[0012] Hereinafter, with reference to the drawings as appropriate, each embodiment that specifically discloses the configuration and operation of the adsorption determination method and the adsorption determination device according to the present disclosure will be described in detail. However, more detailed explanation than necessary may be omitted. For example, detailed explanation of already well-known matters and duplicate explanation of substantially the same configuration may be omitted. This is to avoid the following explanation becoming unnecessarily redundant and to facilitate understanding by those skilled in the art. Note that the attached drawings and the following explanation are provided to enable those skilled in the art to fully understand the present disclosure, and are not intended to limit the subject matter described in the claims.

[0013] (Embodiment 1) First, a robot system 100 according to the first embodiment will be described with reference to Fig. 1 and Fig. 2. Fig. 1 is a diagram showing an example of a use case of a robot hand system RB according to the first embodiment. Fig. 2 is a block diagram showing an example of the overall configuration of the robot system 100 according to the first embodiment.

[0014] The robot system 100 according to the first embodiment drives the vacuum pump 24 with the robot hand system RB to adsorb and grip a gripping target Tg (an example of a target) using the adsorption unit 25, and then carries the gripping target to a predetermined position. The robot system 100 acquires vibrations of the vacuum pump 24 while the robot hand system RB is performing the task, using a first vibration sensor 31 attached to the surface of the housing of the vacuum pump 24. The robot system 100 executes a determination of the adsorption state of the gripping target Tg based on the acquired vibration data of the vacuum pump 24 using the terminal device P1.

[0015] The robot system 100 according to the first embodiment includes a terminal device P1, a robot hand system RB, an A / D conversion unit 30, and a first vibration sensor 31.

[0016] The terminal device P1 controls the robot hand system RB and determines whether the suction unit 25 suctions the gripping target Tg based on the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31. The terminal device P1 includes an input / output I / F 10, a control unit 11, a memory 12, a display unit 13, and a database DB. The database DB may be realized as an external storage medium or an external storage device separate from the terminal device P1. The gripping target Tg1 shown in FIG. 1 is, by way of example, a bottle, but is not limited thereto.

[0017] The input / output I / F 10 is configured using a communication interface circuit for transmitting and receiving data or information between the input / output I / F 20 of the robot hand system RB and the A / D conversion unit 30. The input / output I / F 10 transmits various control commands and the like output from the control unit 11 to the input / output I / F 20 or the A / D conversion unit 30. The input / output I / F 10 also outputs various data or electrical signals and the like transmitted from the input / output I / F 20 or the A / D conversion unit 30 to the control unit 11.

[0018] The control unit 11 is configured using, for example, a Central Processing Unit (hereinafter, referred to as "CPU") or a Field Programmable Gate Array (hereinafter, referred to as "FPGA"), and performs various processes and controls in cooperation with the memory 12. Specifically, the control unit 11 refers to the programs and data stored in the memory 12, and executes the programs to realize various functions such as the comparison calculation processing unit 111 and the data recording unit 112.

[0019] The control unit 11 generates a control command for controlling the robot hand system RB, and outputs the control command to the input / output I / F 10 .

[0020] The comparison calculation processing unit 111 compares the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31 with a vibration profile corresponding to the vacuum pump 24 or the gripping object Tg registered in advance, and performs a picking judgment as to whether the gripping object Tg has been gripped by the suction unit 25 and transported to a predetermined position, and performs an operation judgment as to whether the vacuum pump 24 is operating. Based on the result of the picking judgment, the comparison calculation processing unit 111 generates a notification screen for notifying a user (for example, a person who operates or manages the terminal device P1, a person who manages the work by the robot hand system RB, etc.) of the picking result, and outputs it to the display unit 13 for display.

[0021] The comparison process executed by the comparison calculation processing unit 111 may be, for example, a process of comparing the shapes of signal waveforms or the magnitude of signal levels of the vibration data and the vibration profile, or a process of comparing the magnitude of the signal level of the vibration data with a threshold value related to the magnitude of the signal level based on the vibration profile. Also, the comparison calculation processing unit 111 may be, for example, a process of comparing the acquired vibration data with ideal vibration data indicated by a learning model learned by artificial intelligence (hereinafter, referred to as "AI") learning or the like.

[0022] In addition, the notification screen may be generated to include information such as "OK" or "NG" indicating the picking result, or may be generated to include vibration data of the vacuum pump 24 used in the picking determination process corresponding to the picking result.

[0023] The data recording unit 112 stores in the database DB the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31. The data recording unit 112 may store in the database DB identification information capable of identifying the gripping object Tg, the vibration data of the vacuum pump 24, and time information at which the vibration data was acquired (collected), in association with each other.

[0024] The memory 12 has, for example, a random access memory (hereinafter, referred to as "RAM") as a work memory used when executing each process of the control unit 11, and a read only memory (hereinafter, referred to as "ROM") for storing programs and data that define the operation of the control unit 11. The RAM temporarily stores data or information generated or acquired by the control unit 11. The ROM has written therein a program that defines the operation of the control unit 11.

[0025] The display unit 13 is configured using, for example, a display such as a Liquid Crystal Display or an organic electroluminescence display, etc. The display unit 13 displays a notification screen generated and output by the comparison calculation processing unit 111.

[0026] The database DB is a so-called storage, and is configured using a storage medium such as a flash memory, a hard disk drive (hereinafter, referred to as "HDD"), a solid state drive (hereinafter, referred to as "SSD"), etc. The database DB stores a vibration profile for each vacuum pump 24 or a vibration profile for each gripping object Tg.

[0027] Moreover, the database DB stores the vibration data acquired by the first vibration sensor 31. Note that the database DB may store identification information capable of identifying the gripping target Tg, the vibration data of the vacuum pump 24, and time information at which the vibration data was acquired (collected) in association with each other, and may further store the picking result in association with each other.

[0028] The robot hand system RB (an example of a robot) drives the manipulator MN and the vacuum pump 24 based on a control command transmitted from the terminal device P1 to perform a predetermined task of suction-holding and transporting a gripping target Tg by the suction unit 25. The robot hand system RB includes an input / output I / F 20, a robot control unit 21, a memory 22, the manipulator MN, the vacuum pump 24, and the suction unit 25.

[0029] The input / output I / F 20 is configured using a communication interface circuit for transmitting and receiving data or information to and from the input / output I / F 10 of the terminal device P1. The input / output I / F 20 transmits various control commands and the like output from the robot control unit 21 to the input / output I / F 10. The input / output I / F 20 also outputs various control commands transmitted from the input / output I / F 20 to the robot control unit 21.

[0030] The robot control unit 21 is configured using, for example, a CPU or an FPGA, and performs various processes and controls in cooperation with the memory 22. Specifically, the robot control unit 21 refers to the programs and data stored in the memory 22 and executes the programs to realize operations on the grasp target Tg.

[0031] The memory 22 has, for example, a RAM as a work memory used when executing each process of the robot control unit 21, and a ROM for storing programs and data that define the operation of the robot control unit 21. The RAM temporarily stores data or information generated or acquired by the robot control unit 21. The ROM has written therein a program that defines the operation of the robot control unit 21.

[0032] The manipulator MN is a multi-joint robot having a plurality of joint shafts, and is provided with a robot arm 23 at the tip side of the plurality of joint shafts. The robot arm 23 is provided with an adsorption unit 25 at the tip side. The manipulator MN moves the robot arm 23 by the robot control unit 21 to a position where the adsorption unit 25 can adsorb and grasp the grasp target Tg, thereby enabling a predetermined task to be performed on the grasp target Tg.

[0033] The vacuum pump 24 is controlled by the robot control unit 21 to suck in the air inside the suction pad 26 attached to the suction unit 25 connected through the suction circuit IC, thereby reducing the pressure inside the suction pad 26, and to release the suction state by the suction pad 26, which is in a reduced pressure or vacuum state.

[0034] The suction unit 25 includes a suction pad 26, and is attached to the tip of the robot arm 23. The suction unit 25 connects the intake circuit IC and the inside of the suction pad 26.

[0035] The suction pad 26 (an example of a suction member) is made of an elastic member such as rubber, and comes into contact with the object to be grasped Tg. When the suction pad 26 comes into contact with the object to be grasped Tg, the air inside the suction pad 26 is reduced in pressure by the vacuum pump 24 through the intake circuit IC, so that the suction pad 26 adheres to the contact surface with the object to be grasped Tg and grasps the object to be grasped Tg in a transportable manner.

[0036] The A / D conversion unit 30 converts an analog signal based on the vibration of the vacuum pump 24 output from the first vibration sensor 31 into a digital signal, and transmits the digital signal to the terminal device P1.

[0037] The first vibration sensor 31 (an example of a vibration sensor) is attached to the housing of the vacuum pump 24, and acquires vibrations caused by driving the vacuum pump 24. The first vibration sensor 31 converts the acquired vibrations of the vacuum pump 24 into an analog signal, and outputs the analog signal to the A / D conversion unit 30.

[0038] Next, an example of an operation procedure of the terminal device P1 in the first embodiment will be described with reference to Fig. 3 to Fig. 5. Fig. 3 is a flowchart showing an example of an operation procedure of the terminal device P1 in the first embodiment. Fig. 4 is a flowchart showing an example of an operation procedure of the terminal device P1 in the first embodiment. Fig. 5 is a diagram showing an example of a vibration profile PRF1.

[0039] As shown in Fig. 3, the terminal device P1 recognizes the grasp target Tg grasped by the robot hand system RB (St11). The terminal device P1 may recognize (identify) the grasp target Tg by performing image recognition processing on a captured image captured by an arbitrary camera (not shown) installed so as to be able to capture an image of the grasp target Tg. In addition, when a tag or the like is attached to the grasp target Tg, the terminal device P1 may recognize (identify) the grasp target Tg based on information read by a sensor (not shown) installed so as to be able to read the attached tag or the like.

[0040] The terminal device P1 extracts and sets a vibration profile to be used as a comparison target in picking judgment using vibration data of the vacuum pump 24 obtained when the gripping target Tg is sucked and gripped from the database DB (St12). Here, the terminal device P1 may set a vibration profile indicating a specific driving vibration obtained when the vacuum pump 24 sucks and grips the gripping target Tg, or may set a vibration profile corresponding to the vacuum pump 24 currently in use and a vibration profile corresponding to the recognized gripping target Tg, respectively.

[0041] The terminal device P1 starts collecting vibration data of the vacuum pump 24 by the first vibration sensor 31 (St13).

[0042] The terminal device P1 generates a control command to move the robot arm 23 to a position where the object to be grasped Tg can be picked up and grasped, and transmits the control command to the robot hand system RB (St14). The robot hand system RB executes drive control of the manipulator MN (i.e., the robot arm 23) based on the control command, and moves the robot arm 23 to a position where the object to be grasped Tg can be picked up and grasped. The robot hand system RB generates a movement completion notification of the robot arm 23 and transmits the notification to the terminal device P1.

[0043] The terminal device P1 generates a control command to turn on the vacuum pump 24 based on the movement completion notification of the robot arm 23 transmitted from the robot hand system RB, and transmits the control command to the robot hand system RB (St15). Based on the control command transmitted from the terminal device P1, the robot hand system RB controls the vacuum pump 24 to turn on, and sucks in the air inside the suction pad 26 to reduce the pressure.

[0044] After transmitting a control command to control the vacuum pump 24 to be ON, the terminal device P1 acquires vibration data (digital signal) of the vacuum pump 24 from the first vibration sensor 31 via the A / D conversion unit 30. The terminal device P1 compares the acquired vibration data of the vacuum pump 24 with a vibration profile corresponding to the vacuum pump 24 by the comparison calculation processing unit 111 to determine whether the vacuum pump 24 is operating normally (St16).

[0045] Specifically, the terminal device P1 judges whether the vacuum pump 24 is operating normally based on whether the acquired vibration data includes an increase (peak) in the signal level corresponding to the peak Pk11 (predetermined value) present when the vacuum pump 24 is controlled to be ON, as shown in the vibration profile PRF1. The peak Pk11 indicates vibration that occurs when the vacuum pump 24 starts to be driven when controlled to be ON. In the vibration profile PRF1 shown in Fig. 5, the horizontal axis indicates time and the vertical axis indicates the magnitude of the signal level (vibration).

[0046] When it is determined in the process of step St16 that the vacuum pump 24 is not operating normally (St16, NG), the terminal device P1 executes an operation check of the vacuum pump 24 (St17).

[0047] For example, the terminal device P1 determines that the vacuum pump 24 is not operating normally if it determines that the acquired vibration data does not contain an increase (peak) in signal level corresponding to the peak Pk11, or that the increase (peak) in signal level is smaller than the magnitude of the peak Pk11 in the vibration profile PRF1.

[0048] On the other hand, if the terminal device P1 determines in the processing of step St16 that the vacuum pump 24 is operating normally (St16, OK), it lowers the robot arm 23 to a height where the object to be grasped Tg can be adsorbed and grasped (St18), and adsorbs and grasps the object to be grasped Tg by the suction portion 25 (St19).

[0049] The terminal device P1 compares the acquired vibration data of the vacuum pump 24 with the set vibration profile by the comparison calculation processing unit 111, and determines whether the object to be grasped Tg is normally adsorbed or not (St20).

[0050] Specifically, the terminal device P1 determines whether the acquired vibration data shown in Figure 5 contains a peak Pk13 at the timing of suction and gripping of the object to be grasped Tg shown in the vibration profile PRF1, and whether or not there are attenuations Bt11 and Bt12 in the time periods before and after the peak Pk13.

[0051] The attenuation Bt11 indicates that the suction pad 26 has come into contact with the object to be grasped Tg. The signal level obtained at the attenuation Bt11 decreases as the suction pad 26 comes into contact with the object to be grasped Tg and the pressure inside the suction pad 26 is reduced.

[0052] Peak Pk13 indicates that the object to be grasped Tg is being lifted while being grasped. The signal level obtained at peak Pk13 becomes large because air tends to enter through the suction surface between the object to be grasped Tg and the suction pad 26 due to gravity acting on the object to be grasped Tg.

[0053] The attenuation Bt12 indicates that the grasped object Tg is lifted while being grasped. The signal level obtained during the attenuation Bt12 decreases as the weight applied to the suction surface between the grasped object Tg and the suction pad 26 stabilizes due to the grasped object Tg being lifted, and the pressure inside the suction pad 26 is reduced again.

[0054] As shown in FIG. 5, when the terminal device P1 determines in the processing of step St20 that there is no decrease (attenuation) in the signal level corresponding to the attenuation Bt11 in the acquired vibration data of the vacuum pump 24 (St20, NG1), it determines that the suction portion 25 is not in contact with the object to be grasped Tg, returns to the processing of step St18, and again lowers the robot arm 23 to a position where the object to be grasped Tg can be suction-grabbed.

[0055] Furthermore, when the terminal device P1 determines in the process of step St20 that there is no drop (attenuation) in the signal level corresponding to the attenuation Bt12 in the acquired vibration data of the vacuum pump 24, or there is no drop (attenuation) in the signal level of a magnitude corresponding to the attenuation Bt12 (St20, NG2), it determines that the gripping of the object to be grasped Tg has failed due to insufficient suction force caused by a shift in the suction position. The terminal device P1 generates a control command to turn off the vacuum pump 24 and transmits it to the robot hand system RB. Based on the control command transmitted from the terminal device P1, the robot hand system RB turns off the vacuum pump 24 and releases the suction state of the object to be grasped Tg (St21). After the suction state of the object to be grasped Tg is released by the robot hand system RB, the terminal device P1 returns to the process of step St14 and moves the robot arm 23 again to a position where the object to be grasped Tg can be suction-held.

[0056] Furthermore, when the terminal device P1 repeats the processing of step St20 a predetermined number of times (e.g., three, four, etc.) or more and determines that the acquired vibration data of the vacuum pump 24 does not include an increase (peak) in signal level of a magnitude corresponding to the peak Pk13 followed by a decrease (attenuation) in signal level of a magnitude corresponding to the attenuation Bt12 (St20, NG3), it determines that suction and gripping of the object to be gripped Tg has failed, generates a notification screen (not shown) notifying that the picking result is "NG", and outputs it to the display unit 13 (St22).

[0057] Furthermore, when the terminal device P1 determines in the process of step St20 that the acquired vibration data of the vacuum pump 24 includes an increase or decrease in signal level corresponding to the magnitudes of the attenuations Bt11, Bt12 and the peak Pk13 (St20, OK), the terminal device P1 generates a control command to move the robot arm 23 to a predetermined position and transmits it to the robot hand system RB. Based on the control command transmitted from the terminal device P1, the robot hand system RB moves the robot arm 23 to a predetermined position and grips and moves the gripping target Tg (St23). When the movement of the robot arm 23 is completed, the robot hand system RB generates a movement completion notification of the robot arm 23 and transmits it to the terminal device P1.

[0058] Based on the movement completion notification transmitted from the robot hand system RB, the terminal device P1 generates a control command to turn off the vacuum pump 24 and transmits it to the robot hand system RB. Based on the control command transmitted from the terminal device P1, the robot hand system RB controls the vacuum pump 24 to turn off and releases the suction state of the gripping target Tg (St24).

[0059] After the suction state of the object to be grasped Tg is released by the robot hand system RB, the terminal device P1 performs a picking judgment of the object to be grasped Tg based on a comparison between the vibration data acquired during the time period from the time when the vacuum pump 24 is controlled to be ON to the time when the vacuum pump 24 is controlled to be OFF and the vibration profile PRF1 (St25).

[0060] For example, the terminal device P1 detects an equipment abnormality in the vacuum pump 24 or in the suction path from the suction pad 26 to the vacuum pump 24 based on whether or not a peak Pk12 during a time period T11 in which the vacuum pump 24 is under ON control and the suction pad 26 is not in contact with the object to be grasped Tg is an increase (peak) in signal level corresponding to the peak Pk11.

[0061] Furthermore, for example, the terminal device P1 detects whether or not there has been a collision between the robot arm 23, the suction portion 25, or the grasped object Tg and some kind of obstacle during the transport of the grasped object Tg, or detects whether or not the grasped object Tg has fallen during the transport of the grasped object Tg, based on whether or not the difference W11 between the magnitude of the signal level during the time period T12 when the grasped object Tg is being transported and the magnitude of the signal level before the suction pad 26 comes into contact with the grasped object Tg is greater than or equal to a first threshold value.

[0062] Also, for example, the terminal device P1 determines whether the vacuum pump 24 is operating normally based on whether there is an increase (peak) in the signal level corresponding to the peak Pk14 (predetermined value) that exists when the vacuum pump 24 is controlled to be OFF. In addition, in the process of step St25, the terminal device P1 may execute at least one determination process or detection process based on a comparison between the vibration data and the vibration profile PRF1. In addition, the determination process or detection process executed in the process of step St25 may be set by the user to any determination process or detection process.

[0063] If, in the processing of step St25, the terminal device P1 determines that the picking result of the object to be grasped Tg is “OK” based on a comparison between the vibration data and the vibration profile PRF1 (St25, OK), it generates a notification screen (not shown) notifying the picking result “OK” and outputs it to the display unit 13 (St26).

[0064] For example, if the terminal device P1 determines that the peak Pk12 in time period T11 is not an increase (peak) in signal level corresponding to the peak Pk11, and that the difference W11 in time period T12 is greater than or equal to the first threshold value, and that there is an increase (peak) in signal level corresponding to the peak Pk14 (predetermined value) after the vacuum pump 24 is controlled to be OFF, the terminal device P1 determines that the picking result of the object to be grasped Tg is "OK."

[0065] On the other hand, if the terminal device P1 determines in the processing of step St25 that the picking result of the object to be grasped Tg is “NG” based on the comparison between the vibration data and the vibration profile PRF1 (St25, NG), it generates a notification screen (not shown) notifying the picking result of “NG” and outputs it to the display unit 13 (St27).

[0066] For example, if the terminal device P1 determines that the peak Pk12 in time period T11 is an increase (peak) in signal level corresponding to the peak Pk11, that the difference W11 in time period T12 is not greater than or equal to the first threshold value, or that there is no increase (peak) in signal level corresponding to the peak Pk14 (predetermined value) after the vacuum pump 24 is controlled to be OFF, the terminal device P1 determines that the picking result of the object to be grasped Tg is "NG."

[0067] As described above, the terminal device P1 in embodiment 1 acquires vibration data of the vacuum pump 24 using the first vibration sensor 31, and by comparing the acquired vibration data with the vibration profiles PRF1 corresponding to the vacuum pump 24 and the object to be grasped Tg, it is possible to determine (detect) not only the picking result of the object to be grasped Tg, but also whether or not there is an abnormality such as debris clogging the vacuum pump 24 or the intake circuit IC of the vacuum pump 24.

[0068] In addition, by comparing the vibration data with the vibration profile PRF1 corresponding to each of the vacuum pump 24 and the object to be grasped Tg, the terminal device P1 can more easily detect insufficient suction force to adsorb the object to be grasped Tg or a shift in the suction position, determine whether the suction portion 25 and the object to be grasped Tg are in contact, and determine whether the object to be grasped Tg has fallen during transport.

[0069] Moreover, in the robot system 100 according to the first embodiment, it is sufficient that the first vibration sensor 31 is attached to the surface of the housing of the vacuum pump 24, which improves the degree of freedom in attaching the first vibration sensor 31. The first vibration sensor 31 may be attached while the vacuum pump 24 is in operation. Furthermore, in the robot system 100, it is sufficient that the first vibration sensor 31 is attached to the surface of the housing of the vacuum pump 24, which eliminates the need to change the intake circuit IC due to the attachment of the first vibration sensor 31.

[0070] Next, vibration data acquired at each of different suction positions will be described with reference to Fig. 6. Fig. 6 is a diagram illustrating examples of vibration data for picking results "NG" and "OK" based on the suction position. Note that the grasp target Tg2 shown in Fig. 6 has, as an example, a plurality of flat portions Tg21 wider than the contact surface of the suction pad 26 on a surface that can be contacted by the suction pad 26, and a plurality of step portions Tg22 provided between the flat portions Tg21 and the flat portions Tg21.

[0071] The suction portion 25 and the object to be grasped Tg2 shown on the lower side of the paper in Figure 6 are shown in such a manner that the suction pad 26 is in contact with and adsorbs and grasps the two flat surfaces Tg21 and the step portion Tg22 provided between the two flat surfaces Tg21.

[0072] The vibration data WF21 is vibration data obtained when the suction pad 26 contacts and suctions and grips the two flat surfaces Tg21 and the step portion Tg22 provided between the two flat surfaces Tg21. In the vibration data WF21, the horizontal axis indicates time and the vertical axis indicates the magnitude of the signal level (vibration). Similarly, each vibration data in the following description indicates time on the horizontal axis and the magnitude of the signal level (vibration) on the vertical axis.

[0073] When the vacuum pump 24 is controlled to be ON while the suction pad 26 is in contact with the two flat surfaces Tg21 and the step portion Tg22 provided between the two flat surfaces Tg21, the pressure inside the suction pad 26 is insufficiently reduced due to the air flowing in from the step portion Tg22, and the suction force of the suction pad 26 is insufficient to grip the gripping object Tg. Therefore, the vibration data WF21 does not have a peak (peak Pk21 shown in the vibration data WF22) indicating that the suction pad 26 is gripping the gripping object Tg2 after the attenuation Bt21 indicating that the suction pad 26 has contacted the gripping object Tg2.

[0074] Furthermore, in the vibration data WF21, the suction pressure of the vacuum pump 24 is not reduced by the air flowing in from the step portion Tg22, so that the magnitude W21 of the signal level after the gripping object Tg2 is suction-held (i.e., the magnitude of vibration of the vacuum pump 24) is larger than the magnitude W23 of the signal level after the gripping object Tg2 is suction-held in the vibration data WF22. Therefore, the terminal device P1 can detect that the suction pad 26 is not gripping the gripping object Tg2 based on the fact that the difference W22 between the magnitude of the signal level during the time period when the gripping object Tg2 is being transported and the magnitude of the signal level before the suction pad 26 comes into contact with the gripping object Tg2 is not equal to or greater than the first threshold value.

[0075] In such a case, the terminal device P1 generates a control command to change the suction position of the suction pad 26 so that the suction pad 26 comes into contact with one of the flat portions Tg21, and transmits the control command to the robot hand system RB. The robot hand system RB changes the suction position of the suction pad 26 based on the control command transmitted from the terminal device P1. The suction part 25 and the object to be grasped Tg2 on the upper side of the page shown in Fig. 6 respectively show the suction part 25 and the object to be grasped Tg2 after the suction position of the suction pad 26 has been changed, and show a state in which the suction pad 26 comes into contact with one of the flat portions Tg21 and is suction-holding the object.

[0076] The vibration data WF22 is vibration data obtained when the suction pad 26 comes into contact with one of the flat portions Tg21 and sucks and grips it.

[0077] When the vacuum pump 24 is controlled to be ON while the suction pad 26 is in contact with one of the flat surfaces Tg21, the vacuum pump 24 reduces the pressure inside the suction pad 26, so that the robot hand system RB can suction and grip the gripping object Tg2, thereby gripping the suction pad 26. Therefore, the vibration data WF22 has an attenuation Bt22 indicating that the suction pad 26 has come into contact with the gripping object Tg2, followed by a peak Pk21 indicating that the suction pad 26 is gripping the gripping object Tg2 and an attenuation Bt23 indicating that the gripping object Tg has been gripped.

[0078] As described above, the robot system 100 according to the first embodiment can detect insufficient suction force of the suction pad 26 based on the peak Pk21, or failure to grip or drop of the gripping object Tg2 based on the attenuation Bt23, by comparing the vibration data obtained by the first vibration sensor 31 with the vibration profile corresponding to the gripping object Tg2. Furthermore, when it is determined that the suction force of the suction pad 26 based on the peak Pk21 is insufficient, the robot system 100 can automatically suck and grip the gripping object Tg2 again by changing the suction position of the suction pad 26.

[0079] Next, vibration data WF31 obtained when the suction pad 26 is in contact with the gripping object Tg and vibration data WF32 obtained when the suction pad 26 is not in contact with the gripping object Tg will be described with reference to Fig. 7. Fig. 7 is a diagram comparing examples of vibration data when the suction pad 26 is in contact with the gripping object Tg and when it is not in contact with the gripping object Tg. In the description of Fig. 7, an example of the gripping object Tg being an object having air permeability such as a cardboard box will be described.

[0080] The vibration data WF31 is vibration data obtained when the suction pad 26 and the object to be grasped Tg come into contact with each other as the robot arm 23 descends.

[0081] In the vibration data WF31, before the suction pad 26 comes into contact with the object to be grasped Tg, there is a peak Pk31 indicating that the suction pressure of the vacuum pump 24 does not decrease, followed by an attenuation Bt31 indicating that the suction pad 26 comes into contact with the object to be grasped Tg due to the descent of the robot arm 23. Here, in the vibration data when the suction pad 26 suctions and grasps the object to be grasped Tg, the suction pressure of the vacuum pump 24 decreases and the magnitude of the signal level during the conveyance of the object to be grasped Tg decreases. However, as shown in FIG. 7, in the vibration data WF31 when the object to be grasped Tg is an object having air permeability such as a cardboard box, the amount of decrease in the suction pressure of the vacuum pump 24 decreases, and therefore the magnitude W31 of the signal level during the conveyance of the object to be grasped Tg (i.e., the magnitude of the vibration of the vacuum pump 24) becomes larger compared to the case where the object to be grasped Tg that does not have air permeability is suction-held.

[0082] In such a case, the terminal device P1 can detect that the suction pad 26 is gripping the gripping object Tg based on the fact that the difference W32 between the magnitude of the signal level during the time period when the breathable gripping object Tg is being transported and the magnitude of the signal level before the suction pad 26 comes into contact with the gripping object Tg is greater than or equal to a threshold value that is smaller than the first threshold value.

[0083] The vibration data WF32 is vibration data obtained when the suction pad 26 and the object to be grasped Tg are not in contact with each other due to the downward movement of the robot arm 23.

[0084] In the vibration data WF32, since the suction pad 26 does not come into contact with the object to be grasped Tg due to the descent of the robot arm 23, there is no increase (peak) in the signal level corresponding to the peak Pk31 of the vibration data WF31 indicating that the suction pressure of the vacuum pump 24 does not decrease, and there is no decrease (attenuation) in the signal level corresponding to the attenuation Bt31 of the vibration data WF31. Also, since the suction pad 26 cannot suction and grasp the object to be grasped Tg, the suction pressure of the vacuum pump 24 becomes constant, and the magnitude W33 of the signal level corresponding to the conveyance of the object to be grasped Tg becomes large, resulting in a substantially constant signal level.

[0085] As described above, the robot system 100 according to embodiment 1 can determine whether or not the suction pad 26 has come into contact with the object to be grasped Tg due to the descent of the robot arm 23, based on a comparison between the vibration data obtained by the first vibration sensor 31 and the vibration profile corresponding to the object to be grasped Tg, even if the object to be grasped Tg is a breathable object, and based on each of the peak Pk31 and the attenuation Bt31.

[0086] In addition, the robot system 100 can determine whether the object to be grasped Tg is being transported based on the difference between the magnitude of the signal level corresponding to the time when the object to be grasped Tg is being transported, or the magnitude of the signal level during the time period when the object to be grasped Tg is being transported, and the magnitude of the signal level before the suction pad 26 comes into contact with the object to be grasped Tg.

[0087] (Embodiment 2) The robot system 100 according to the first embodiment has been described as an example in which one vibration sensor (first vibration sensor 31) is attached to the vacuum pump 24, and picking judgment of the grasp target Tg is performed using vibration data collected by this vibration sensor. The robot system 100A according to the second embodiment will be described as an example in which one of two vibration sensors (first vibration sensor 31 and second vibration sensor 32), one vibration sensor (first vibration sensor 31) is attached to the vacuum pump 24, and the other vibration sensor (second vibration sensor 32) is attached to the suction unit 25, and picking judgment of the grasp target Tg is performed using vibration data collected by each of the two vibration sensors.

[0088] The robot system 100A in the second embodiment has a similar configuration to the robot system 100 in the first embodiment. In the following description of the robot system 100A according to the second embodiment, the same components as those in the robot system 100 in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0089] A robot system 100A according to the second embodiment will be described with reference to Fig. 8 and Fig. 9. Fig. 8 is a diagram showing an example of a use case of the robot hand system RB according to the second embodiment. Fig. 9 is a block diagram showing an example of the overall configuration of the robot system 100A according to the second embodiment.

[0090] The robot system 100A according to the second embodiment acquires the vibration of the vacuum pump 24 while the robot hand system RB is performing an operation by using a first vibration sensor 31 attached to the surface of the housing of the vacuum pump 24, and acquires the vibration of the suction unit 25 while the robot hand system RB is performing an operation by using a second vibration sensor 32 attached to the surface of the suction unit 25. The robot system 100A executes a picking determination of the grasp target Tg based on the respective vibration data of the vacuum pump 24 and the suction unit 25 acquired by the terminal device P1A.

[0091] The robot system 100A according to the second embodiment includes a terminal device P1A, a robot hand system RB, an A / D conversion unit 30A, a first vibration sensor 31, and a second vibration sensor 32.

[0092] The terminal device P1A executes control of the robot hand system RB and picking judgment of the gripping target Tg based on vibration data of the vacuum pump 24 acquired by the first vibration sensor 31 and vibration data of the suction unit 25 acquired by the second vibration sensor 32. The terminal device P1A includes an input / output I / F 10A, a control unit 11A, a memory 12, a display unit 13, and a database DBA. The database DBA may be realized as an external storage medium or an external storage device separate from the terminal device P1A. The gripping target Tg1 shown in FIG. 8 is, by way of example, a bottle, but is not limited thereto.

[0093] The input / output I / F 10A is configured using a communication interface circuit for transmitting and receiving data or information between the input / output I / F 20 of the robot hand system RB and the A / D conversion unit 30A. The input / output I / F 10A transmits various control commands and the like output from the control unit 11A to the input / output I / F 20 or the A / D conversion unit 30A. The input / output I / F 10A also outputs various data or electrical signals and the like transmitted from the input / output I / F 20 or the A / D conversion unit 30A to the control unit 11A.

[0094] The control unit 11A is configured using, for example, a CPU or an FPGA, and performs various processes and controls in cooperation with the memory 12. Specifically, the control unit 11A refers to the programs and data stored in the memory 12 and executes the programs to realize various functions such as the comparison calculation processing unit 111A and the data recording unit 112A.

[0095] The control unit 11A generates a control command for controlling the robot hand system RB, and outputs it to the input / output I / F 10A.

[0096] The comparison calculation processing unit 111A performs picking and placing judgment as to whether the object to be grasped Tg has been adsorbed and grasped by the adsorption unit 25 and transported to a predetermined position, and performs operation judgment as to whether the vacuum pump 24 is operating, based on the comparison of the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31 with a vibration profile corresponding to the vacuum pump 24 or the object to be grasped Tg registered in advance, or based on the vibration data of the adsorption unit 25 acquired by the second vibration sensor 32. The comparison calculation processing unit 111A generates a notification screen for notifying the user of the picking result based on the results of the picking and placing judgment, outputs the notification screen to the display unit 13, and causes it to be displayed.

[0097] The comparison process executed by the comparison calculation processing unit 111A may be, for example, a process of comparing the shapes of the signal waveforms or the magnitude of the signal levels of the vibration data and the vibration profile, or a process of comparing the magnitude of the signal level of the vibration data with a threshold value related to the magnitude of the signal level based on the vibration profile. Also, the comparison calculation processing unit 111A may be, for example, a process of comparing the acquired vibration data with ideal vibration data indicated by a learning model learned by AI learning or the like.

[0098] The data recording unit 112A associates the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31 with the vibration data of the suction unit 25 acquired by the second vibration sensor 32, and stores them in the database DBA. The data recording unit 112A may associate identification information capable of identifying the gripping target Tg, the vibration data of the vacuum pump 24, the vibration data of the suction unit 25, and time information at which the vibration data was acquired (collected), and store them in the database DBA.

[0099] The database DBA is a so-called storage, and is configured using a storage medium such as a flash memory, a HDD, an SSD, etc. The database DBA stores a vibration profile for each vacuum pump 24 or a vibration profile for each gripping object Tg.

[0100] The database DBA also stores vibration data of the vacuum pump 24 and vibration data of the suction unit 25. The database DBA may store identification information capable of identifying the gripping target Tg, the vibration data of the vacuum pump 24, and time information at which the vibration data was acquired (collected) in association with each other, and may further store a picking result in association with each other.

[0101] The A / D conversion unit 30A converts an analog signal based on the vibration of the vacuum pump 24 output from the first vibration sensor 31 into a digital signal and transmits it to the terminal device P1A. The A / D conversion unit 30A also converts an analog signal based on the vibration of the suction unit 25 output from the second vibration sensor 32 into a digital signal and transmits it to the terminal device P1A.

[0102] The second vibration sensor 32 (an example of a vibration sensor) is attached to the suction part 25 and acquires vibrations of the suction part 25. The second vibration sensor 32 converts the acquired vibrations of the suction part 25 into an analog signal and outputs it to the A / D conversion part 30A.

[0103] Next, an example of an operation procedure of the terminal device P1A in the second embodiment will be described with reference to Fig. 10 to Fig. 12. Fig. 10 is a flowchart showing an example of an operation procedure of the terminal device P1A in the second embodiment. Fig. 11 is a flowchart showing an example of an operation procedure of the terminal device P1A in the second embodiment. Fig. 12 is a diagram comparing examples of vibration data when in contact with and out of contact with a grasp target Tg.

[0104] In the example of the operation procedure of the terminal device P1A shown in FIG. 10, the processes of steps St11 to St12 and steps St14 to St18 are similar to the processes of steps St11 to St12 and steps St14 to St18 shown in FIG. 3, and therefore the description thereof will be omitted.

[0105] The terminal device P1A starts collecting vibration data of the vacuum pump 24 by the first vibration sensor 31 and vibration data of the suction unit 25 by the second vibration sensor 32 (St13A). Note that the start of vibration data collection here may be started when the user attaches the first vibration sensor 31 to the housing surface of the vacuum pump 24 and the second vibration sensor 32 to the suction unit 25.

[0106] The terminal device P1A determines whether or not the suction pad 26 and the grasp target Tg have come into contact with each other based on the vibration data of the suction part 25 acquired by the second vibration sensor 32 (St31). Specifically, the terminal device P1A determines whether or not the signal level of the acquired vibration data WF41 of the suction part 25 is equal to or higher than the second threshold value Th2.

[0107] For example, the terminal device P1A determines whether or not there is a change in signal level equal to or greater than the second threshold value Th2, based on the acquired vibration data WF41 or vibration data WF42 of the suction portion 25. The vibration data WF41 shown in Fig. 12 indicates vibration data obtained when the suction pad 26 does not come into contact with the object to be grasped Tg and is unable to suction and hold the object to be grasped Tg. The vibration data WF42 indicates vibration data obtained when the suction pad 26 comes into contact with the object to be grasped Tg and suction-holds the object to be grasped Tg.

[0108] 12 includes a peak Pk41A corresponding to the vibration when the robot arm 23 descends in order to suction and grasp the gripping target Tg, a peak Pk42A corresponding to the vibration when the robot arm 23 ascends, a peak Pk43A corresponding to the vibration when the robot arm 23 descends in order to place (place) the gripping target Tg after the transport of the gripping target Tg, and a peak Pk44A corresponding to the vibration when the robot arm 23 ascends. In addition, since the vibration data WF41 is vibration data when the gripping target Tg is not being gripped and sucked, the vibration level in the time period T41 during the transport of the gripping target Tg is approximately the same as the vibration levels before the robot arm 23 descends in order to suction and grasp the gripping target Tg, and after the transport of the gripping target Tg and after the robot arm 23 ascends in order to place (place) the gripping target Tg.

[0109] 12 includes a peak Pk41B corresponding to vibration when the robot arm 23 descends in order to suction and grip the gripping target Tg, a peak Pk42B corresponding to vibration when the robot arm 23 ascends, and a peak Pk43B corresponding to vibration when the robot arm 23 descends in order to place (place) the gripping target Tg after the gripping target Tg is transported, and a peak Pk44B corresponding to vibration when the robot arm 23 ascends. The suction unit 25 grips and suctions the gripping target Tg, and vibration during transportation occurs in accordance with the weight of the gripping target Tg.

[0110] Therefore, the vibration level of the vibration data WF42 during time period T43 when the object to be grasped Tg is being transported is greater than the vibration levels of time period T41 before the robot arm 23 descends to adsorb and grasp the object to be grasped Tg, and time period T44 after the robot arm 23 ascends after the object to be grasped Tg is transported and to place the object to be grasped Tg.

[0111] When the terminal device P1A determines in the processing of step St31 that the suction pad 26 and the grasp target Tg have come into contact with each other (St31, OK), the terminal device P1A suction-holds the grasp target Tg with the suction pad 26 (St32). Specifically, when the terminal device P1A determines, based on the vibration data WF42 of the suction unit 25, that a peak Pk45 present after a peak Pk41B corresponding to the vibration when the robot arm 23 descends and a peak Pk46 present before a peak Pk42B corresponding to the vibration when the robot arm 23 ascends each have a magnitude equal to or greater than the second threshold value Th2, the terminal device P1A determines that the suction pad 26 and the grasp target Tg have come into contact with each other.

[0112] On the other hand, when the terminal device P1A determines in the process of step St31 that the suction pad 26 and the grasp target Tg are not in contact with each other (St31, NG), the terminal device P1A returns to the process of step St18, generates a control command to further lower the robot arm 23, and transmits the control command to the robot hand system RB. Specifically, when the terminal device P1A determines, based on the vibration data WF41 of the suction part 25, that the signal level after the peak Pk41A corresponding to the vibration when the robot arm 23 is lowered and the signal level before the peak Pk42A corresponding to the vibration when the robot arm 23 is raised are each less than the second threshold value Th2, the terminal device P1A determines that the suction pad 26 and the grasp target Tg are not in contact with each other.

[0113] In FIG. 11, the terminal device P1A compares the acquired vibration data of the vacuum pump 24 with the set vibration profile by the comparison calculation processing unit 111A to determine whether the object to be grasped Tg is being adsorbed normally (St33).

[0114] When the terminal device P1A determines in the process of step St33 that the vibration data of the vacuum pump 24 does not have a drop (attenuation) in the signal level corresponding to the attenuation Bt12 or that the signal level does not have a drop (attenuation) of a magnitude corresponding to the attenuation Bt12 (St33, NG1), the terminal device P1A determines that the gripping of the object to be gripped Tg has failed due to insufficient suction force caused by a shift in the suction position. The terminal device P1A generates a control command to turn off the vacuum pump 24 and transmits it to the robot hand system RB. The robot hand system RB turns off the vacuum pump 24 based on the control command transmitted from the terminal device P1A, and releases the suction state of the object to be gripped Tg (St34). After the suction state of the object to be gripped Tg is released by the robot hand system RB, the terminal device P1A returns to the process of step St14 and moves the robot arm 23 again to a position where the object to be gripped Tg can be suction-held.

[0115] Furthermore, if the terminal device P1A repeats the processing of step St33 a predetermined number of times (e.g., three, four, etc.) or more and determines that there is no decrease (attenuation) in the signal level corresponding to the attenuation Bt12 after an increase (peak) in the signal level corresponding to the peak Pk13 (St33, NG2), it determines that the suction gripping of the object to be gripped Tg has failed, generates a notification screen (not shown) notifying that the picking result is "NG", and outputs it to the display unit 13 (St35).

[0116] Furthermore, when the terminal device P1A determines in the process of step St33 that the acquired vibration data of the vacuum pump 24 includes an increase or decrease in signal level corresponding to the magnitudes of the attenuations Bt11, Bt12 and the peak Pk13 (St33, OK), the terminal device P1A generates a control command to move the robot arm 23 to a predetermined position and transmits it to the robot hand system RB. Based on the control command transmitted from the terminal device P1A, the robot hand system RB moves the robot arm 23 to a predetermined position and grips and moves the gripping target Tg (St36). When the movement of the robot arm 23 is completed, the robot hand system RB generates a movement completion notification of the robot arm 23 and transmits it to the terminal device P1A.

[0117] Based on the movement completion notification transmitted from the robot hand system RB, the terminal device P1A acquires the vibration data WF42 of the suction part 25 collected by the second vibration sensor 32. Based on the acquired vibration data of the suction part 25, the terminal device P1A determines whether or not an external force is applied to the suction part 25 while transporting the grasp target Tg (St37).

[0118] Specifically, when the terminal device P1A determines that the magnitude of the signal level in the vibration data WF42 of the suction part 25 during a time period T43 in which the gripping target Tg is being transported after a peak Pk42B corresponding to the vibration when the robot arm 23 rises is equal to or greater than a predetermined value, the terminal device P1A determines that an external force has been applied to the suction part 25. Here, the terminal device P1A may store the vibration data in which it has been determined that an external force has been applied to the suction part 25 in the database DBA as history information indicating that an external force has been applied to the suction part 25.

[0119] The terminal device P1A generates a control command to turn off the vacuum pump 24 and transmits it to the robot hand system RB. The robot hand system RB turns off the vacuum pump 24 based on the control command transmitted from the terminal device P1A, and releases the suction state of the gripping target Tg (St38).

[0120] After the robot hand system RB releases the suction state of the gripping target Tg, the terminal device P1A executes a picking determination of the gripping target Tg based on a comparison between the vibration data of the vacuum pump 24 acquired during a time period including the timing when the vacuum pump 24 is controlled to be turned ON and the timing when the vacuum pump 24 is controlled to be turned OFF, and the vibration profile PRF1 (St39). Note that the picking determination process of the gripping target Tg in the process of step St39 is similar to the picking determination process of the gripping target Tg in the process of step St24 described in FIG. 4, and therefore a description thereof will be omitted here.

[0121] If, in the processing of step St39, the terminal device P1A determines that the picking result of the object to be grasped Tg is "OK" based on a comparison between the vibration data and the vibration profile PRF1 (St39, OK), it generates a notification screen (not shown) notifying the picking result "OK" and the place result, which is the transport result of the object to be grasped Tg, "OK", and outputs it to the display unit 13 (St40).

[0122] On the other hand, if the terminal device P1A determines in the processing of step St39 that the picking result of the object to be grasped Tg is “NG” based on a comparison between the vibration data and the vibration profile PRF1 (St39, NG), it generates a notification screen (not shown) notifying the picking result “NG” and the placing result “NG” and outputs it to the display unit 13 (St41).

[0123] Here, if the terminal device P1A determines that the picking result of the grasped object Tg is “NG” (St39, NG), it may infer the reason why the picking result is “NG” and the placing result is “NG” based on the vibration data of the suction unit 25, generate a notification screen notifying the inferred result, and output it to the display unit 13.

[0124] Furthermore, instead of performing the process of estimating the cause of the picking result "NG" and the placing result "NG", the terminal device P1A may store the picking result "NG" and the placing result "NG" in the database DBA in association with the vibration data of the vacuum pump 24 and the vibration data of the suction unit 25. This allows the terminal device P1A to assist the user in identifying the cause of the picking result "NG" and the placing result "NG" using the vibration data of the vacuum pump 24 and the vibration data of the suction unit 25, respectively.

[0125] For example, if the terminal device P1A determines in the processing of step St37 that an external force has been applied to the suction unit 25, it may infer that the application of the external force to the suction unit 25 is the cause of the picking result "NG" and the placing result "NG".

[0126] Furthermore, for example, if the terminal device P1A determines in the processing of step St37 that an external force has been applied to the suction portion 25 and also determines that the magnitude of the signal level during time period T43 when the object to be grasped Tg is being transported has changed to a magnitude corresponding to the signal level during time period T42 before the robot arm 23 descends in step St18, it may infer that the falling of the object to be grasped Tg due to the external force is the cause of the picking result "NG" and the placing result "NG".

[0127] Furthermore, for example, if the terminal device P1A determines based on the vibration data WF42 of the suction section 25 that there is no peak Pk48 corresponding to the vibration when the object to be grasped Tg is placed before the peak Pk44B corresponding to the vibration when the robot arm 23 rises, or that the signal level in the time period T44 after the peak Pk44B is of a magnitude corresponding to the signal level in the time period T43 when the object to be grasped Tg is being transported, the terminal device P1A may infer that the picking result "NG" and the placing result "NG" are caused by the vacuum pump 24 being unable to release the suction state of the suction pad 26.

[0128] As described above, the terminal device P1A in the second embodiment can perform a more accurate contact determination between the suction pad 26 and the gripping object Tg and can more accurately determine whether an external force has been applied to the suction pad 25 while transporting the gripping object Tg by acquiring vibration data of the suction part 25 with the second vibration sensor 32. In other words, by acquiring and recording the vibration data of the suction part 25 with the second vibration sensor 32, the terminal device P1A can estimate or identify the cause of the picking result "NG" and the placing result "NG" and can support the user in identifying the cause of the picking result "NG" and the placing result "NG" compared to using only the vibration data of the vacuum pump 24.

[0129] Next, a difference in vibration data of the suction unit 25 due to a difference in the amount of descent of the robot arm 23 for suction-grasping the gripping target Tg will be described with reference to Fig. 13. Fig. 13 is a diagram for comparing various vibration data corresponding to the contact state with the gripping target Tg. Note that the amount of descent of each robot arm 23 shown in Fig. 13 is an example and is not limited to this.

[0130] The vibration data WF51 shown in "Case A" is vibration data of the suction part 25 collected by the second vibration sensor 32 when the amount of descent (=Offset) of the robot arm 23 for suctioning and gripping the gripping target Tg is set to 5 mm. Note that the suction pad 26 in "Case A" is not in contact with the gripping target Tg due to an insufficient amount of descent of the robot arm 23.

[0131] The vibration data WF52 shown in "Case B" is vibration data of the suction part 25 collected by the second vibration sensor 32 when the amount of descent (=Offset) of the robot arm 23 for suctioning and gripping the gripping target Tg is set to 10 mm. Note that the suction pad 26 in "Case B" is not in contact with the gripping target Tg due to an insufficient amount of descent of the robot arm 23.

[0132] The vibration data WF53 shown in "Case C" is vibration data of the suction part 25 collected by the second vibration sensor 32 when the lowering amount (=Offset) of the robot arm 23 for suction gripping the gripping target Tg is set to 15 mm. Note that the suction pad 26 in "Case C" is in contact with the gripping target Tg due to a sufficient lowering of the robot arm 23.

[0133] The vibration data WF54 shown in "Case D" is vibration data of the suction part 25 collected by the second vibration sensor 32 when the lowering amount (=Offset) of the robot arm 23 for suction gripping the gripping target Tg is set to 17.5 mm. Note that the suction pad 26 in "Case D" is in contact with the gripping target Tg due to a sufficient lowering of the robot arm 23.

[0134] The vibration data WF55 shown in "Case E" is vibration data of the suction part 25 collected by the second vibration sensor 32 when the lowering amount (=Offset) of the robot arm 23 for suction gripping the gripping target Tg is set to 20 mm. Note that the suction pad 26 in "Case E" is in contact with the gripping target Tg due to a sufficient lowering of the robot arm 23.

[0135] As a result, the terminal device P1A can determine with higher accuracy whether or not the suction pad 26 has come into contact with the object to be grasped Tg based on the difference between the signal level corresponding to the vibration when the robot arm 23 descends and the signal level corresponding to the vibration when the suction pad 26 comes into contact with the object to be grasped Tg after the robot arm 23 descends or before the robot arm 23 rises.

[0136] Next, the vibration data WF53A when an external force is applied to the suction part 25 will be described with reference to Fig. 14. Fig. 14 is a diagram showing an example of the vibration data WF53A of the suction part 25 when an external force is applied. The vibration data WF53A shown in Fig. 14 is the vibration data of the suction part 25 in "Case C" shown in Fig. 13.

[0137] After the suction unit 25 suctions and grips the gripping target Tg, the suction unit 25 or the gripping target Tg is subjected to a total of three external forces (collisions with obstacles) at 11 seconds, 19 seconds, and 27 seconds while the suction unit 25 is transporting the gripping target Tg to a predetermined position. In this case, the vibration data WF53A collected by the second vibration sensor 32 includes a peak Pk51 corresponding to the vibration based on the first external force at 11 seconds, a peak Pk52 corresponding to the vibration based on the second external force at 19 seconds, and a peak Pk53 corresponding to the vibration based on the third external force at 27 seconds.

[0138] Each of the peaks Pk51A, Pk53A, and Pk55A indicates a signal level corresponding to the vibration when the robot arm 23 descends before the gripping target Tg is gripped by suction. Each of the peaks Pk51B, Pk53B, and Pk55B indicates a signal level corresponding to the vibration when the robot arm 23 ascends after the gripping target Tg is gripped by suction.

[0139] Each of the peaks Pk52A, Pk54A, and Pk56A indicates a signal level before the object to be grasped Tg is placed at a predetermined position and corresponds to the vibration when the robot arm 23 descends. Each of the peaks Pk52B, Pk54B, and Pk56B indicates a signal level after the object to be grasped Tg is placed at a predetermined position and corresponds to the vibration when the robot arm 23 ascends.

[0140] Each of time periods T51, T52, and T53 shown in FIG. 14 indicates a time period during which the suction pad 26 suction-holds the gripping target Tg.

[0141] Peaks Pk51, Pk52, and Pk53 indicate signal levels corresponding to the vibrations of the external force received by the suction portion 25 at 11 seconds, 19 seconds, and 27 seconds, respectively.

[0142] As a result, the terminal device P1A can determine whether or not an external force has been applied to the suction unit 25 based on the magnitude of the signal level in time periods T51, T52, and T53 when the suction pad 26 is suction-holding the gripping object Tg. The terminal device P1A may also determine whether or not an external force has been applied to the suction unit 25 based on the magnitude of the signal level in each of the time periods between peaks Pk51B and Pk52A, between peaks Pk53B and Pk54A, and between peaks Pk55B and Pk56A when the suction unit 25 is transporting the gripping object Tg.

[0143] In addition, the terminal device P1A may determine whether or not an external force has been applied to the suction portion 25 based on whether the magnitude of the signal level is greater than or equal to a predetermined value, or may record in advance a vibration profile of the suction portion 25 during transportation of the object to be grasped Tg, and determine whether or not an external force has been applied to the suction portion 25 based on a comparison between the recorded vibration profile of the suction portion 25 and the vibration data of the suction portion 25 collected by the second vibration sensor 32.

[0144] (Embodiment 3) The robot system 100 according to the first embodiment has been described as an example in which one vibration sensor (first vibration sensor 31) is attached to the vacuum pump 24, and picking judgment of the gripping target Tg is performed using vibration data collected by this vibration sensor. The robot system 100B according to the third embodiment will be described as an example in which one vibration sensor (second vibration sensor 32) is attached to the suction unit 25, and picking judgment of the gripping target Tg is performed using vibration data collected by this vibration sensor.

[0145] The robot system 100B in the third embodiment has a similar configuration to the robot systems 100 and 100A in the first and second embodiments. In the following description of the robot system 100B according to the second embodiment, the same components as those in the robot systems 100 and 100A in the first and second embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0146] A robot system 100B according to the third embodiment will be described with reference to Fig. 15 and Fig. 16. Fig. 15 is a diagram showing an example of a use case of the robot hand system RB according to the third embodiment. Fig. 16 is a block diagram showing an example of the overall configuration of the robot system 100B according to the third embodiment.

[0147] The robot system 100B according to the third embodiment acquires vibrations of the suction part 25 while a task is being performed by the robot hand system RB, using a second vibration sensor 32 attached to the surface of the suction part 25. The robot system 100B executes picking determination of the grasp target Tg based on the acquired vibration data of the suction part 25 using the terminal device P1B.

[0148] The robot system 100B according to the third embodiment includes a terminal device P1B, a robot hand system RB, an A / D conversion unit 30B, and a second vibration sensor 32.

[0149] The terminal device P1B executes control of the robot hand system RB and picking judgment of the gripping target Tg based on the vibration data of the suction unit 25 acquired by the second vibration sensor 32. The terminal device P1B includes an input / output I / F 10B, a control unit 11B, a memory 12, a display unit 13, and a database DBB. The database DBB may be realized as an external storage medium or an external storage device separate from the terminal device P1B. The gripping target Tg1 shown in FIG. 15 is, by way of example, a bottle, but is not limited thereto.

[0150] The input / output I / F 10B is configured using a communication interface circuit for transmitting and receiving data or information between the input / output I / F 20 of the robot hand system RB and the A / D conversion unit 30B. The input / output I / F 10B transmits various control commands and the like output from the control unit 11B to the input / output I / F 20 or the A / D conversion unit 30B. The input / output I / F 10B also outputs various data or electrical signals and the like transmitted from the input / output I / F 20 or the A / D conversion unit 30B to the control unit 11B.

[0151] The control unit 11B is configured using, for example, a CPU or an FPGA, and performs various processes and controls in cooperation with the memory 12. Specifically, the control unit 11B refers to the programs and data stored in the memory 12 and executes the programs to realize various functions of the comparison calculation processing unit 111B and the data recording unit 112B.

[0152] The control unit 11B generates a control command for controlling the robot hand system RB, and outputs it to the input / output I / F 10B.

[0153] The comparison calculation processing unit 111B executes a picking judgment and a placing judgment as to whether or not the gripping target Tg has been gripped by the suction unit 25 and transported to a predetermined position, based on the vibration data of the suction unit 25 acquired by the second vibration sensor 32. Based on the results of the picking judgment and the placing judgment, the comparison calculation processing unit 111B generates a notification screen for notifying the user of the picking result, outputs it to the display unit 13, and causes it to be displayed.

[0154] The judgment process executed by the comparison calculation processing unit 111B may be, for example, a process of comparing the magnitude of the signal level of the vibration data of the suction part 25 with a threshold value regarding the magnitude of the signal level, or a process of comparing the acquired vibration data of the suction part 25 with ideal vibration data of the suction part 25 indicated by a learning model learned by AI learning or the like.

[0155] The data recording unit 112B stores in the database DBB the vibration data of the suction unit 25 acquired by the second vibration sensor 32. The data recording unit 112B may store in the database DBB identification information capable of identifying the grasp target Tg, the vibration data of the suction unit 25, and time information at which the vibration data was acquired (collected), in association with each other.

[0156] The database DBB is a so-called storage, and is configured using a storage medium such as a flash memory, HDD, or SSD. The database DBB stores the vibration data of the suction unit 25 acquired by the second vibration sensor 32 for each gripping object Tg. The database DBB may store identification information for identifying the gripping object Tg, the vibration data of the vacuum pump 24, and time information when the vibration data was acquired (collected) in association with each other, and may also store the picking result in association with each other.

[0157] The A / D conversion unit 30B converts the analog signal based on the vibration of the suction part 25 output from the second vibration sensor 32 into a digital signal, and transmits the digital signal to the terminal device P1B.

[0158] Next, an example of an operation procedure of the terminal device P1B in the third embodiment will be described with reference to Fig. 17 and Fig. 18. Fig. 17 is a flowchart showing an example of an operation procedure of the terminal device P1B in the third embodiment. Fig. 18 is a flowchart showing an example of an operation procedure of the terminal device P1B in the third embodiment.

[0159] In the example of the operation procedure of the terminal device P1B shown in FIG. 17, the processes of step St11 and steps St14 to St18 are similar to those of step St11 and steps St14 to St18 shown in FIG. 3, and therefore the description thereof will be omitted.

[0160] The terminal device P1B starts collecting vibration data of the suction part 25 by the second vibration sensor 32 (St13B). Note that the start of vibration data collection here may be started when the second vibration sensor 32 is attached to the suction part 25 by the user.

[0161] The terminal device P1B determines whether or not the suction pad 26 has come into contact with the grasp target Tg based on the vibration data of the suction part 25 acquired by the second vibration sensor 32 (St51). Specifically, the terminal device P1B determines whether or not the suction pad 26 has come into contact with the grasp target Tg by comparing a preregistered vibration profile with the vibration data WF acquired by the second vibration sensor 32, or by determining whether or not the signal level of the acquired vibration data WF41 (see FIG. 12) of the suction part 25 is equal to or higher than a second threshold value Th2 (see FIG. 12).

[0162] For example, the terminal device P1B determines whether or not there is a change in signal level equal to or greater than the second threshold value Th2, based on the acquired vibration data WF41 (see FIG. 12) or vibration data WF42 (see FIG. 12) of the suction part 25.

[0163] If the terminal device P1B determines in the processing of step St51 that the suction pad 26 and the object to be grasped Tg have come into contact with each other (St51, OK), the terminal device P1B further determines the suction state of the object to be grasped Tg based on the vibration data of the suction portion 25 (St52).

[0164] On the other hand, when the terminal device P1B determines in the process of step St51 that the suction pad 26 and the grasp target Tg are not in contact with each other (St51, NG), the terminal device P1B returns to the process of step St18, generates a control command to further lower the robot arm 23, and transmits the control command to the robot hand system RB. Specifically, when the terminal device P1B determines, based on the vibration data WF41 of the suction part 25, that the signal level after the peak Pk41A corresponding to the vibration when the robot arm 23 is lowered and the signal level before the peak Pk42A corresponding to the vibration when the robot arm 23 is raised are each less than the second threshold value Th2, the terminal device P1B determines that the suction pad 26 and the grasp target Tg are not in contact with each other.

[0165] When the terminal device P1B determines in the processing of step St52 based on the vibration data of the suction unit 25 that the suction pad 26 is adsorbed to the grasp target Tg (St52, OK), it drives the robot arm 23 to transport the grasp target Tg adsorbed and gripped by the suction pad 26 to a predetermined position (St53). Specifically, when the terminal device P1B determines based on the vibration data WF42 of the suction unit 25 that the peak Pk46 existing before the peak Pk42B corresponding to the vibration when the robot arm 23 rises has a magnitude equal to or greater than the second threshold value Th2, it determines that the suction pad 26 is adsorbed to the grasp target Tg.

[0166] On the other hand, when the terminal device P1B determines in the processing of step St52 based on the vibration data of the suction unit 25 that the suction pad 26 is not adsorbed to the grasp target Tg (St52, NG), it determines that suction gripping of the grasp target Tg has failed, generates a notification screen (not shown) notifying that the picking result is "NG", and outputs it to the display unit 13 (St54). Specifically, when the terminal device P1B determines based on the vibration data WF42 of the suction unit 25 that the peak Pk46 existing before the peak Pk42B corresponding to the vibration when the robot arm 23 rises is not equal to or greater than the second threshold value Th2, it determines that the suction pad 26 is not adsorbed to the grasp target Tg.

[0167] Based on the movement completion notification transmitted from the robot hand system RB, the terminal device P1B acquires the vibration data WF42 of the suction part 25 collected by the second vibration sensor 32. Based on the acquired vibration data of the suction part 25, the terminal device P1B determines whether or not an external force is applied to the suction part 25 while transporting the grasp target Tg (St55).

[0168] When the terminal device P1B determines in the process of step St55 that no external force is being applied to the suction unit 25 during transport of the grasp target Tg (St55, no external force), the terminal device P1B generates a control command to turn off the vacuum pump 24 and transmits it to the robot hand system RB. Based on the control command transmitted from the terminal device P1B, the robot hand system RB controls the vacuum pump 24 to turn off and releases the suction state of the grasp target Tg (St56).

[0169] On the other hand, when the terminal device P1B determines in the process of step St55 that an external force has been applied to the suction part 25 during the transportation of the gripping target Tg (St55, external force present), the terminal device P1B re-determines the suction state of the gripping target Tg based on the vibration data of the suction part 25 acquired by the second vibration sensor 32 (St57). Specifically, when the terminal device P1B determines that the magnitude of the signal level in the time period T43 during which the gripping target Tg is being transported is equal to or greater than a predetermined value after the peak Pk42B corresponding to the vibration when the robot arm 23 rises in the vibration data WF42 of the suction part 25 (see FIG. 12), the terminal device P1B determines that an external force has been applied to the suction part 25, and when the terminal device P1B determines that the magnitude of the signal level in the time period T43 is not equal to or greater than the predetermined value, the terminal device P1B determines that an external force is not being applied to the suction part 25.

[0170] In the process of step St57, when it is determined that the suction pad 26 is suctioned to the grasp target Tg based on the vibration data of the suction unit 25 (St57, OK), the terminal device P1 proceeds to the process of step St56.

[0171] On the other hand, if, in the processing of step St57, the terminal device P1 determines based on the vibration data of the suction unit 25 that the suction pad 26 is not adsorbed to the object to be grasped Tg (St57, NG), it determines that the picking result of the object to be grasped Tg is "NG", generates a notification screen (not shown) notifying the picking result "NG" and the placing result "NG", and outputs it to the display unit 13 (St58).

[0172] The terminal device P1 determines whether or not the vacuum pump 24 has released the suction state of the suction pad 26, based on the vibration data of the suction unit 25 (St59). Specifically, when the terminal device P1B determines, based on the vibration data WF42 of the suction unit 25, that the vibration level of the peak Pk48 before the peak Pk44B corresponding to the vibration when the robot arm 23 rises after placing the gripping target Tg is less than or equal to the second threshold value Th2, it determines that the suction pad 26 has released the gripping target Tg.

[0173] If the terminal device P1 determines in the processing of step St59 that the vacuum pump 24 has released the suction state of the suction pad 26 (St59, OK), it generates a notification screen (not shown) notifying the picking result and the placement result of the grasped object Tg of "OK" and outputs it to the display unit 13 (St60).

[0174] On the other hand, if the terminal device P1 determines in the processing of step St59 that the vacuum pump 24 has not released the suction state of the suction pad 26 (St59, NG), it generates a notification screen (not shown) notifying the picking and placing result of "NG" and outputs it to the display unit 13 (St58).

[0175] As described above, the terminal device P1B in the third embodiment can determine the contact state between the suction pad 26 and the grasp target Tg, the suction state of the grasp target Tg by the suction pad 26, and the presence or absence of an external force applied to the suction unit 25 by acquiring vibration data of the suction unit 25 with the second vibration sensor 32. In other words, the terminal device P1B can estimate or identify the cause of the picking result "NG" and the placing result "NG" and support the user in identifying the cause of the picking result "NG" and the placing result "NG" by acquiring and recording the vibration data of the suction unit 25 with the second vibration sensor 32.

[0176] (Embodiment 4) The robot system 100 according to the first embodiment has been described as an example in which one vibration sensor (first vibration sensor 31) is attached to the vacuum pump 24, and picking judgment of the grasp target Tg is performed using vibration data collected by this vibration sensor. The robot system 100C according to the fourth embodiment will be described as an example in which one vibration sensor (first vibration sensor 31) is attached to the vacuum pump 24, and a camera 27 capable of capturing an image of at least a part of the grasp target Tg is attached near the suction unit 25, and picking judgment of the grasp target Tg is performed using vibration data collected by the vibration sensor.

[0177] The robot system 100C in the fourth embodiment has a similar configuration to the robot systems 100 to 100B in the first to third embodiments. In the following description of the robot system 100C in the fourth embodiment, the same components as those in the robot systems 100 to 100B in the first to third embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0178] A robot system 100C according to the fourth embodiment will be described with reference to Fig. 19 and Fig. 20. Fig. 19 is a diagram showing an example of a use case of the robot hand system RBC according to the fourth embodiment. Fig. 20 is a block diagram showing an example of the overall configuration of the robot system 100C according to the fourth embodiment.

[0179] The robot system 100C according to the fourth embodiment acquires vibrations of the suction part 25 while a task is being performed by the robot hand system RBC using a second vibration sensor 32 attached to the surface of the suction part 25. The robot system 100B executes picking determination of the grasp target Tg based on the acquired vibration data of the suction part 25 using a terminal device P1C.

[0180] The robot system 100C according to the fourth embodiment drives the vacuum pump 24 by the robot hand system RBC, adsorbs and grips the object to be grasped Tg using the suction unit 25, and then carries it to a predetermined position. The robot system 100C acquires the vibration of the vacuum pump 24 while the robot hand system RBC is performing the operation, using a first vibration sensor 31 attached to the housing surface of the vacuum pump 24. The robot system 100C also captures an image of the object to be grasped by suction and gripped by the suction pad 26, using a camera 27 installed near the suction unit 25 (above the suction unit 25 in the example shown in FIG. 19). The robot system 100C executes a picking judgment of the object to be grasped Tg based on the vibration data of the vacuum pump 24 acquired by the terminal device P1, and records the picking judgment result and the captured image captured by the camera 27 in association with each other.

[0181] The robot system 100C according to the fourth embodiment includes a terminal device P1C, a robot hand system RBC, an A / D conversion unit 30, and a first vibration sensor 31.

[0182] The terminal device P1C controls the robot hand system RBC and determines whether the suction unit 25 suctions the gripping target Tg based on the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31. The terminal device P1C includes an input / output I / F 10C, a control unit 11C, a memory 12, a display unit 13, and a database DBC. The database DBC may be realized as an external storage medium or an external storage device separate from the terminal device P1C. The gripping target Tg1 shown in FIG. 19 is, by way of example, a bottle, but is not limited thereto.

[0183] The input / output I / F 10C is configured using a communication interface circuit for transmitting and receiving data or information between the input / output I / F 20C of the robot hand system RBC and the A / D conversion unit 30C. The input / output I / F 10C transmits various control commands and the like output from the control unit 11C to the input / output I / F 20C or the A / D conversion unit 30C. The input / output I / F 10C also outputs various data or electrical signals and the like transmitted from the input / output I / F 20C or the A / D conversion unit 30C to the control unit 11C.

[0184] The control unit 11C is configured using, for example, a CPU or an FPGA, and performs various processes and controls in cooperation with the memory 12. Specifically, the control unit 11C refers to the programs and data stored in the memory 12 and executes the programs to realize various functions of the comparison calculation processing unit 111C, the data recording unit 112C, and the like.

[0185] The control unit 11C generates a control command for controlling the robot hand system RBC, and outputs the control command to the input / output I / F 10C.

[0186] The comparison calculation processing unit 111C compares the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31 with a vibration profile corresponding to the vacuum pump 24 or the gripping object Tg registered in advance, and performs a picking judgment as to whether the gripping object Tg has been sucked and gripped by the suction unit 25 and transported to a predetermined position, and performs an operation judgment as to whether the vacuum pump 24 is operating. The comparison calculation processing unit 111C generates a notification screen for notifying the user of the picking result based on the picking judgment result and the captured image captured by the camera 27, and outputs it to the display unit 13 to display it.

[0187] The comparison process executed by the comparison calculation processing unit 111C may be, for example, a process of comparing the shapes of the signal waveforms or the magnitude of the signal levels of the vibration data and the vibration profile, or a process of comparing the magnitude of the signal level of the vibration data with a threshold value related to the magnitude of the signal level based on the vibration profile. Also, the comparison calculation processing unit 111C may be, for example, a process of comparing the acquired vibration data with ideal vibration data indicated by a learning model learned by AI learning or the like.

[0188] In addition, the notification screen may be generated to include information such as "OK" or "NG" indicating the picking result, or may be generated to include vibration data of the vacuum pump 24 used in the picking determination process corresponding to the picking result.

[0189] The data recording unit 112C associates the vibration data of the vacuum pump 24 acquired by the first vibration sensor 31 with the captured image captured during collection of this vibration data, and stores them in the database DBC for each picking result.

[0190] Specifically, the data recording unit 112C associates the vibration data of the vacuum pump 24, whose picking result has been determined to be "OK" by the comparison calculation processing unit 111C, with the captured image captured during collection of the vibration data, and stores the associated data in the first result database DB11. The data recording unit 112C also associates the vibration data of the vacuum pump 24, whose picking result has been determined to be "NG" by the comparison calculation processing unit 111C, with the captured image captured during collection of the vibration data, and stores the associated data in the second result database DB12.

[0191] The data recording unit 112C may store in the database DBC, in association with the identification information capable of identifying the gripping target Tg, the vibration data of the vacuum pump 24, the captured image captured during collection of the vibration data, and the time information when the vibration data was acquired (collected). When the data recording unit 112C further acquires vibration data of the suction unit 25 by the second vibration sensor 32, the data recording unit 112C further associates the vibration data of the suction unit 25 with the identification information and stores the vibration data in the database DBC.

[0192] The database DBC is a so-called storage, and is configured using a storage medium such as a flash memory, a HDD, an SSD, etc. The database DBC stores a vibration profile for each vacuum pump 24 or a vibration profile for each gripping object Tg.

[0193] The first result database DB11 stores, for each grasp object Tg, the vibration data acquired by the first vibration sensor 31 for which the picking result is determined to be "OK" by the comparison calculation processing unit 111C, in association with the captured image.

[0194] The second result database DB12 stores, for each grasp target Tg, the vibration data acquired by the first vibration sensor 31 and the captured image in association with each other when the picking result is determined to be "NG" by the comparison calculation processing unit 111C.

[0195] The robot hand system RBC (an example of a robot) drives the manipulator MN, the vacuum pump 24, and the camera 27 based on a control command transmitted from the terminal device P1C to perform a predetermined task including suction and gripping of the gripping target Tg by the suction unit 25. The robot hand system RBC includes an input / output I / F 20C, a robot control unit 21C, a memory 22, the manipulator MN, the vacuum pump 24, the suction unit 25, and the camera 27.

[0196] The input / output I / F 20C is configured using a communication interface circuit for transmitting and receiving data or information to and from the input / output I / F 10C of the terminal device P1C. The input / output I / F 20C transmits various control commands and the like output from the robot control unit 21C to the input / output I / F 10C. The input / output I / F 20C also outputs various control commands transmitted from the input / output I / F 20C to the robot control unit 21C.

[0197] The robot control unit 21C is configured using, for example, a CPU or an FPGA, and performs various processes and controls in cooperation with the memory 22. Specifically, the robot control unit 21C refers to the programs and data stored in the memory 22 and executes the programs to realize operations on the grasp target Tg.

[0198] The camera 27 is controlled by the robot control unit 21C to capture at least a part of the gripping target Tg. The camera 27 is configured to have at least a lens (not shown) and an image sensor (not shown). The image sensor is a solid-state image sensor such as a Charged-Coupled Device (CCD) or a Complementary Metal-Oxide-Semiconductor (CMOS), and converts an optical image formed on an imaging surface into an electrical signal and outputs the signal to the robot control unit 21C.

[0199] The A / D conversion unit 30C converts the analog signal based on the vibration of the vacuum pump 24 output from the first vibration sensor 31 into a digital signal, and transmits the digital signal to the terminal device P1C.

[0200] Next, an example of an operation procedure of the terminal device P1C in the fourth embodiment will be described with reference to Fig. 21 and Fig. 22. Fig. 21 is a flowchart showing an example of an operation procedure of the terminal device P1C in the fourth embodiment. Fig. 22 is a flowchart showing an example of an operation procedure of the terminal device P1C in the fourth embodiment.

[0201] In the example of the operation procedure of the terminal device P1C shown in Figures 21 and 22, the processing of steps St11 to St21 and steps St23 to St27 is similar to the processing of steps St11 to St21 and steps St23 to St27 shown in Figures 3 and 4, so the explanation will be omitted.

[0202] The terminal device P1C starts lowering the robot arm 23 to a height where the object to be grasped Tg can be sucked and grasped (St18), generates a control command for capturing an image of the object to be grasped Tg by the camera 27, and transmits the control command to the robot hand system RBC. The robot hand system RBC captures an image of the object to be grasped Tg by the camera 27 based on the control command transmitted from the terminal device P1C (St71). The robot hand system RBC transmits the captured image captured by the camera 27 to the terminal device P1C.

[0203] The timing of capturing an image of the grasp target Tg by the camera 27 may be any timing between the timing when the robot arm 23 starts to descend and the timing when the grasp target Tg is adsorbed and grasped by the adsorption unit 25. The camera 27 may also capture an image of the grasp target Tg in any time period between the timing when the robot arm 23 starts to descend and the timing when the grasp target Tg is adsorbed and grasped by the adsorption unit 25, and transmit the captured image to the terminal device P1C.

[0204] When the terminal device P1C determines that there is no decrease (attenuation) in the signal level corresponding to the attenuation Bt12 after an increase (peak) in the signal level corresponding to the peak Pk13 after repeating the process of step St20 a predetermined number of times (e.g., three times, four times, etc.) (St20, NG3), the terminal device P1C generates a control command to image the object to be grasped Tg again and transmits it to the robot hand system RBC. Based on the control command transmitted from the terminal device P1C, the robot hand system RBC images the object to be grasped Tg by the camera 27 and transmits it to the terminal device P1C. The terminal device P1C acquires the captured image transmitted from the robot hand system RBC (St72), associates the acquired captured image with information indicating that the picking result is "NG", and stores (registers) it in the second result database DB12 of the database DBC (St73).

[0205] Furthermore, when the terminal device P1C determines in the process of step St20 that the acquired vibration data of the vacuum pump 24 has an increase or decrease in signal level corresponding to the attenuations Bt11, Bt12 and the peak Pk13 (St20, OK), the terminal device P1C generates a control command to capture an image of the grasped object Tg again and transmits it to the robot hand system RBC. Based on the control command transmitted from the terminal device P1C, the robot hand system RBC captures an image of the grasped object Tg by the camera 27 and transmits it to the terminal device P1C. The terminal device P1C acquires the captured image transmitted from the robot hand system RBC (St74). The terminal device P1C associates the acquired captured image with information indicating that the picking result is "OK" and stores (registers) it in the first result database DB11 of the database DBC (St75).

[0206] As described above, the terminal device P1C in the fourth embodiment can assist in clarifying the cause of a picking result of "NG" by correlating the captured images of the object to be grasped Tg captured at any timing between the timing when the robot arm 23 starts to descend and the timing when the suction pad 26 comes into contact with the object to be grasped Tg and suction-holds the object to be grasped Tg with the captured images and recording the picking result in the database DBC. For example, based on the captured images of the object to be grasped Tg whose picking result is determined to be "NG", the user can identify that the cause of the picking result of "NG" is the material of the surface of the object to be grasped Tg, or a deviation in the suction position or suction height of the object to be grasped Tg, or the like.

[0207] Note that the relationship between the peak or attenuation of the signal level indicated by the various vibration data examples described in this disclosure and the judgment results ("OK" or "NG") of the various judgment processes based on the vibration data examples is merely an example and is not limited thereto. The relationship between the peak or attenuation of the signal level indicated by the vibration data and the judgment results of the various judgment processes is determined by the relationship between the actual suction unit 25 and the grasped object Tg. Therefore, it goes without saying that the judgment results of the various judgment processes described below based on the vibration data examples described in detail in this disclosure are merely an example, and depending on the relationship between the actual suction unit 25 and the grasped object Tg, the judgment results of the various judgment processes described below may be reversed.

[0208] As described above, the terminal devices P1 to P1C according to embodiments 1 to 4 are capable of communicating between at least one vibration sensor (i.e., either the first vibration sensor 31 or the second vibration sensor 32) and a robot hand system RB, RBC (an example of a robot) that adsorbs an object to be grasped (an example of an object) with the suction unit 25, acquire vibration data collected by the vacuum pump 24 connected to the suction unit 25 or a vibration sensor attached to the suction unit 25, and output a judgment result (i.e., a picking judgment result) that judges whether or not the suction unit 25 is adsorbing the object to be grasped Tg based on the vibration data.

[0209] As a result, the terminal devices P1 to P1C in the first to fourth embodiments can obtain vibration data of the vacuum pump 24 by the first vibration sensor 31 or vibration data of the suction unit 25 by the second vibration sensor 32, and can perform picking judgment of whether the gripping target Tg has been suction-gripped with high accuracy based on the obtained vibration data. Also, the terminal devices P1 to P1C can more easily detect insufficient suction force for suctioning the gripping target Tg or a shift in the suction position, judge whether the suction unit 25 and the gripping target Tg are in contact, and judge whether the gripping target Tg has fallen during transport, based on the vibration data of the vacuum pump 24 or the vibration data of the suction unit 25. Furthermore, since the terminal devices P1 to P1C only require that the first vibration sensor 31 be attached to the housing surface of the vacuum pump 24, or the second vibration sensor 32 be attached to the suction portion 25, the freedom of attachment of the first vibration sensor 31 or the second vibration sensor 32 can be improved, and there is no need to change the intake circuit IC due to the attachment of the first vibration sensor 31 or the second vibration sensor 32.

[0210] Furthermore, the terminal devices P1 and P1C in the first and fourth embodiments acquire vibration data of the vacuum pump 24 collected by a first vibration sensor 31 (an example of a vibration sensor) attached to the vacuum pump 24, and determine whether the suction unit 25 is suctioning the object to be grasped Tg based on the vibration data of the vacuum pump 24. As a result, the terminal devices P1 and P1C in the first and fourth embodiments can determine (detect) whether there is an abnormality such as dust clogging on the vacuum pump 24 or on the intake circuit IC of the vacuum pump 24, as well as the picking determination of the object to be grasped Tg, based on the vibration data of the vacuum pump 24. Furthermore, the terminal device P1 can more easily detect the insufficient suction force or the deviation of the suction position for suctioning the object to be grasped Tg, determine whether the suction unit 25 and the object to be grasped Tg are in contact with each other, and determine whether the object to be grasped Tg has fallen during transportation.

[0211] Moreover, the suction unit 25 in the terminal device P1C in the fourth embodiment includes a camera 27 capable of capturing an image of the object to be picked up Tg, acquires an image captured by the camera 27, and records the captured image in the database DBC in association with a judgment result based on vibration data. As a result, the terminal device P1C in the fourth embodiment can record in the database DBC a captured image of the object to be picked up Tg, the suction state or the grip state of the object to be picked up Tg, etc., when the picking result is "OK", and a captured image of the object to be picked up Tg, the suction state or the grip state of the object to be picked up Tg, etc., when the picking result is "NG". Thus, when the picking result is "NG", the terminal device P1C can support the user in identifying the cause of the picking result being "NG" based on the captured image recorded in the database DBC.

[0212] Furthermore, the terminal devices P1A and P1B in the second and third embodiments acquire vibration data of the suction unit 25 collected by the second vibration sensor 32 (one example of a vibration sensor) attached to the suction unit 25, and determine whether or not the suction unit 25 is suctioning the gripping target Tg based on the vibration data of the suction unit 25. As a result, the terminal devices P1A and P1B in the second and third embodiments can perform a more accurate contact determination between the suction pad 26 and the gripping target Tg by acquiring the vibration data of the suction unit 25 by the second vibration sensor 32, and can more accurately determine whether or not an external force has been applied to the suction unit 25 while transporting the gripping target Tg. In other words, the terminal device P1A can estimate or identify the cause of the picking result "NG" and the placing result "NG" and support the user in identifying the cause of the picking result "NG" and the placing result "NG" by acquiring and recording the vibration data of the suction unit 25, compared to using only the vibration data of the vacuum pump 24.

[0213] Furthermore, the terminal device P1A in the second embodiment acquires vibration data of the vacuum pump 24 and vibration data of the suction part 25 from a plurality of vibration sensors (i.e., the first vibration sensor 31 and the second vibration sensor 32) attached to the vacuum pump 24 and the suction part 25, respectively, and determines whether or not the suction part 25 is suctioning the object to be grasped Tg, based on the vibration data of the vacuum pump 24 and the vibration data of the suction part 25. As a result, the terminal device P1A in the second embodiment can determine (detect) whether or not there is an abnormality, such as a failure of the vacuum pump 24 itself or clogging of the intake circuit IC of the vacuum pump 24, based on the vibration data of the vacuum pump 24 collected by the first vibration sensor 31, and can acquire the vibration data of the suction part 25 collected by the second vibration sensor 32, thereby more accurately determining contact between the suction pad 26 and the object to be grasped Tg, picking, and the presence or absence of an external force during transportation.

[0214] Furthermore, the terminal devices P1 and P1C in the first and fourth embodiments determine whether the suction unit 25 has suctioned and gripped the gripping object Tg, based on the vibration data of the vacuum pump 24 collected by the first vibration sensor 31 and the vibration data (one example of a vibration profile) of the vacuum pump 24 corresponding to the gripping object Tg collected in advance. This allows the terminal devices P1 and P1C in the first and fourth embodiments to more accurately perform a picking determination as to whether the gripping object Tg has been suctioned and gripped, based on the acquired first vibration data and the vibration profile indicating the specific driving vibration obtained when the vacuum pump 24 suctions and grips the gripping object Tg.

[0215] Furthermore, the terminal devices P1 and P1C in the first and fourth embodiments detect an abnormality in the vacuum pump 24 based on the vibration data. This allows the terminal devices P1 and P1C in the first and fourth embodiments to more accurately determine whether or not there is an operational abnormality in the vacuum pump 24 based on the acquired first vibration data and a vibration profile indicating a drive vibration specific to the vacuum pump 24 in use.

[0216] Furthermore, when the terminal devices P1 and P1C in the first and fourth embodiments determine that the suction unit 25 has not suctioned the object to be grasped Tg, the terminal devices P1 and P1C further determine, based on the vibration data, whether or not the suction pad 26 (an example of a suction member) provided on the suction unit 25 for suctioning the object to be grasped Tg has come into contact with the object to be grasped Tg, and when the terminal devices P1 and P1C determine that the suction pad 26 has not come into contact with the object to be grasped Tg, the terminal devices P1 and P1C generate a control command for changing the suction height of the suction pad 26 for suctioning the object to be grasped Tg and transmit the control command to the robot. This allows the terminal devices P1 and P1C in the first and fourth embodiments to request the robot hand system RB to re-execute the suction gripping process of the object to be grasped Tg.

[0217] Furthermore, when the terminal devices P1, P1C in the first and fourth embodiments determine that the suction unit 25 has not suctioned the object to be grasped Tg, the terminal devices P1, P1C further determine based on the vibration data whether or not the suction pad 26 provided in the suction unit 25 for suctioning the object to be grasped Tg has come into contact with the object to be grasped Tg, and when the terminal devices P1, P1C determine that the suction pad 26 has come into contact with the object to be grasped Tg, the terminal devices P1, P1C generate a control command for changing the suction position for suctioning the object to be grasped Tg and transmit the control command to the robot hand system RB, RBC. As a result, the terminal devices P1, P1C in the first and fourth embodiments change the suction position and re-execute the suction gripping process of the object to be grasped Tg, thereby more reliably suctioning and gripping the object to be grasped Tg.

[0218] Furthermore, when the terminal devices P1 and P1C in the first and fourth embodiments determine that the suction unit 25 has not adsorbed the object to be grasped Tg, the terminal devices P1 and P1C repeatedly determine whether the suction unit 25 has adsorbed the object to be grasped Tg based on the vibration data, and when the terminal devices P1 and P1C determine that the suction unit 25 has not adsorbed the object to be grasped Tg a predetermined number of times or more, the terminal devices P1 and P1C generate and output a determination result indicating that the suction of the object to be grasped Tg has failed. As a result, when the terminal devices P1 and P1C determine that the picking result is "NG" a predetermined number of times or more, the terminal devices P1 and P1C can determine that the object to be grasped cannot be adsorbed and grasped, and notify the user that the picking result is "NG". Thus, the terminal devices P1 and P1C can more effectively suppress a decrease in the efficiency of a predetermined task performed by the robot hand system RB.

[0219] Furthermore, when the terminal device P1B in the third embodiment determines, based on the vibration data of the suction unit 25, that the suction unit 25 has not suctioned the grasp target Tg, the terminal device P1B further determines, based on the vibration data of the suction unit 25, whether or not the suction pad 26 provided on the suction unit 25 and suctioning the grasp target Tg has come into contact with the grasp target Tg. This allows the terminal device P1B in the third embodiment to more accurately perform contact determination as to whether or not the suction pad 26 has come into contact with the grasp target Tg by using the second vibration data.

[0220] Furthermore, the terminal devices P1A and P1B in the second and third embodiments acquire vibration data of the suction part 25 from the timing at which it is determined that the suction part 25 is suctioning the grasp target Tg to the timing at which the grasp target Tg is transported to a predetermined transport position by the robot hand system RB and the vacuum pump 24 is turned off, and detect whether or not an external force is applied to the suction part 25 during transport based on the vibration data of the suction part 25. This allows the terminal devices P1A and P1B in the second and third embodiments to more accurately determine whether or not an external force is applied to the suction part 25 during transport of the grasp target Tg.

[0221] As described above, the terminal devices P1 to P1C according to embodiments 1 to 4 are capable of communicating between at least one vibration sensor (i.e., either the first vibration sensor 31 or the second vibration sensor 32) and a robot hand system RB, RBC (an example of a robot) that adsorbs a grasped object (an example of an object) with the suction unit 25, and are equipped with input / output I / Fs 10 to 10C (an example of an acquisition unit) that acquire vibration data collected by the vacuum pump 24 connected to the suction unit 25 or a vibration sensor attached to the suction unit 25, and control units 11 to 11C that output a judgment result (i.e., a picking judgment result) that judges whether or not the suction unit 25 is adsorbing the grasped object Tg based on the vibration data.

[0222] As a result, the terminal devices P1 to P1C in the first to fourth embodiments can obtain vibration data of the vacuum pump 24 by the first vibration sensor 31 or vibration data of the suction unit 25 by the second vibration sensor 32, and can perform picking judgment of whether the gripping target Tg has been suction-gripped with high accuracy based on the obtained vibration data. Also, the terminal devices P1 to P1C can more easily detect insufficient suction force for suctioning the gripping target Tg or a shift in the suction position, judge whether the suction unit 25 and the gripping target Tg are in contact, and judge whether the gripping target Tg has fallen during transport, based on the vibration data of the vacuum pump 24 or the vibration data of the suction unit 25. Furthermore, since the terminal devices P1 to P1C only require that the first vibration sensor 31 be attached to the housing surface of the vacuum pump 24, or the second vibration sensor 32 be attached to the suction portion 25, the freedom of attachment of the first vibration sensor 31 or the second vibration sensor 32 can be improved, and there is no need to change the intake circuit IC due to the attachment of the first vibration sensor 31 or the second vibration sensor 32.

[0223] Although various embodiments have been described above with reference to the accompanying drawings, the present disclosure is not limited to such examples. It is clear that a person skilled in the art can conceive of various modifications, corrections, substitutions, additions, deletions, and equivalents within the scope of the claims, and it is understood that these also belong to the technical scope of the present disclosure. In addition, the components in the various embodiments described above may be arbitrarily combined within the scope of the invention. [Industrial Applicability]

[0224] The present disclosure is useful as providing an adsorption determination method and an adsorption determination device that perform adsorption determination of an object with higher accuracy. [Explanation of symbols]

[0225] 10,10A,10B,10C,20,20C input / output I / F 11, 11A, 11B, 11C Control section 12,22 Memory 13 Display section 21, 21C Robot control unit 23 Robot Arm 24 Vacuum Pump 25 Adsorption part 26 Suction Pad 27 Camera 30,30A,30B,30C A / D conversion section 31 First vibration sensor 32 Second vibration sensor 100, 100A, 100B, 100C Robot System DB,DBA,DBB,DBC Database P1, P1A, P1B, P1C terminal equipment RB, RBC Robot Hand System Tg,Tg1,Tg2 Grasped object

Claims

1. at least one vibration sensor; A method for determining whether or not an object is to be attracted to a robot by a suction unit, the method comprising the steps of: acquiring vibration data collected by a vacuum pump connected to the suction unit or the vibration sensor attached to the suction unit; outputting a determination result indicating whether or not the suction unit is suctioning the object based on the vibration data; Adsorption determination method.

2. acquiring vibration data of the vacuum pump collected by the vibration sensor attached to the vacuum pump; determining whether the suction unit is suctioning the object based on vibration data of the vacuum pump; The method for determining adhesion according to claim 1 .

3. The suction unit includes a camera capable of capturing an image of the object, Acquire a captured image captured by the camera; the determination result based on the vibration data and the captured image are recorded in a database in association with each other. The method for determining adhesion according to claim 1 .

4. acquiring vibration data of the suction part collected by the vibration sensor attached to the suction part; determining whether the suction unit is suctioning the object based on the vibration data of the suction unit; The method for determining adhesion according to claim 1 .

5. acquiring vibration data of the vacuum pump and vibration data of the suction unit from a plurality of vibration sensors attached to the vacuum pump and the suction unit, respectively; determining whether the suction unit is suctioning the object based on vibration data of the vacuum pump and vibration data of the suction unit; The method for determining adhesion according to claim 1 .

6. determining whether or not the suction unit is suctioning the object based on vibration data of the vacuum pump collected by the vibration sensor and vibration data of the vacuum pump corresponding to the object collected in advance; The method for determining adhesion according to claim 2 .

7. detecting an abnormality in the vacuum pump based on the vibration data; The method for determining adhesion according to claim 1 .

8. when it is determined that the suction unit has not suctioned the object, it is further determined, based on the vibration data, whether or not the object has come into contact with an suction member that is provided in the suction unit and that suctions the object; when it is determined that the attraction member and the object are not in contact with each other, a control command for changing an attraction height of the attraction member that attracts the object is generated and transmitted to the robot; The method for determining adhesion according to claim 1 .

9. when it is determined that the suction unit has not suctioned the object, it is further determined, based on the vibration data, whether or not the object has come into contact with an suction member that is provided in the suction unit and that suctions the object; when it is determined that the attraction member and the object are in contact with each other, a control command for changing an attraction position at which the object is attracted is generated and transmitted to the robot; The method for determining adhesion according to claim 1 .

10. when it is determined that the suction unit has not suctioned the object, repeatedly determining whether or not the suction unit has suctioned the object based on the vibration data; generating and outputting a determination result indicating that the suction unit has failed to suction the object when the number of times that the suction unit has determined that the object has not been suctioned is equal to or greater than a predetermined number of times; The method for determining adhesion according to claim 1 .

11. when it is determined based on the vibration data of the suction unit that the suction unit has not suctioned the object, it is further determined based on the vibration data of the suction unit whether or not the object has come into contact with an suction member that is provided on the suction unit and that suctions the object. The method for determining adhesion according to claim 4 or 5.

12. acquiring vibration data of the suction unit during a period from a timing when it is determined that the suction unit is suctioning the object to a timing when the object is transported to a predetermined transport position by the robot and the vacuum pump is turned off; detecting whether or not an external force is applied to the suction part during the transport based on the vibration data of the suction part; The method for determining adhesion according to claim 4 or 5.

13. at least one vibration sensor; An adhesion determination device capable of communicating with a robot that adheres to an object by an adhesion unit, an acquisition unit that acquires vibration data collected by a vacuum pump connected to the suction unit or the vibration sensor attached to the suction unit; and a control unit that outputs a determination result of whether or not the suction unit is suctioning the object based on the vibration data. Adsorption determination device.

Citation Information

Patent Citations

  • Negative pressure detection system

    JP2015221468A