Optical element holding unit and drawing device

The optical element holding unit addresses the challenge of maintaining high positional accuracy by using a suction mechanism to securely hold optical elements, preventing shifts and misalignments, and ensuring precise positioning despite thermal changes.

JP2025042796APending Publication Date: 2025-03-28SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2023149939
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-09-15
Publication Date
2025-03-28

AI Technical Summary

Technical Problem

Existing optical element holding systems face challenges in maintaining high positional accuracy due to issues such as lens frame shifting, misalignment of anamorphic prisms, and displacement of optical parts due to thermal expansion differences.

Method used

The optical element holding unit includes a first member fixed with an optical element, a second member supporting the first member, a displacement mechanism for adjusting the relative position, and a suction mechanism that uses atmospheric suction to securely hold the first member to the second member, ensuring high positional accuracy.

Benefits of technology

This solution effectively maintains optical elements with high positional accuracy, preventing shifts, misalignments, and thermal-induced displacements, thereby enhancing the precision of drawing devices and other optical systems.

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Abstract

To hold an optical element with high positional accuracy.SOLUTION: A holding unit 72 for holding an optical element includes a first member 75, a second member 76, a displacement mechanism 73, and a suction mechanism 77. A microlens array 71 which is an optical element is fixed to the first member 75. The second member 76 is brought into surface contact with the first member 75, and supports the first member 75. The displacement mechanism 73 relatively displaces the first member 75 with respect to the second member 76, and adjusts a relative position of the first member 75 with respect to the second member 76. The suction mechanism 77 sucks the atmosphere in the contact part between the first member 75 and the second member 76, and thereby sucks and fixes the first member 75 whose relative position with respect to the second member 76 has been adjusted to the second member 76. Thereby, the position of the microlens array 71 can be held with high positional accuracy.SELECTED DRAWING: Figure 3
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