Acid generator, salt, resin, resist composition, and method for producing resist pattern

Abstract

To provide an acid generator and a resist composition which allow a resist pattern having good line edge roughness to be produced.SOLUTION: There are provided: an acid generator containing a salt represented by formula (I) or a structural unit represented by formula (IP); and a resist composition.SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to an acid generator, a salt, a resin, a resist composition, and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes a resist composition that contains a resin that includes the following structural unit. TIFF2025048784000001.tif3441 [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-091952 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention provides a resist composition that forms a resist pattern that has a more favorable line edge roughness (LER) than a resist pattern formed with the above-mentioned resist composition.

[0005] The present invention includes the following inventions. [1] An acid generator containing a salt represented by formula (I) or a structural unit represented by formula (IP). TIFF2025048784000002.tif49107 [In formula (I) and formula (IP), R 10 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 10 is a single bond, *-O-**, *-CO-O-**, *-O-CO-**, *-O-CO-O-**, *-CO-NR 5 -**, *-NR 5 -CO-O-**, *-O-CO-NR 5-** or *-Ax-Ph-Ay-**. R 5 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R 10 represents the bonding site with the carbon atom to which it is bonded. L 11 represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X 11 represents a single bond or -CO-. X 12 is *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is R 9 represents the bonding position with. R 9 represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. ZI + represents an organic cation. [2] The acid generator according to [1], which contains a salt represented by formula (I') or a structural unit represented by formula (IP'). TIFF2025048784000003.tif5489 [In formula (I') and formula (IP'), all symbols have the same meanings as in formula (I) and formula (IP)] [3] X 10 is a single bond or a group represented by the formula (X 10 -1)~Formula(X 10 The acid generator according to [1] or [2], wherein the acid generator is a group represented by any one of the following formulas: TIFF2025048784000004.tif44162[expression(X 10 -1)~Formula(X 10-10) Medium, *, ** are binding sites, * is R 10 represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X 20 is -O- or -NR 7 - represents. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] [4] L 11 is an alkanediyl group having 1 to 12 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, -CH2- contained in the alkanediyl group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-; The acid generator according to any one of [1] to [3], wherein the cyclic hydrocarbon group may have a substituent. [5] R 9 is a polycyclic hydrocarbon group having 6 to 18 carbon atoms and having a hydroxy group, an acid labile group, or a halogen atom (-CH2- contained in the polycyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, or -SO2-), or an aromatic hydrocarbon group having 6 to 12 carbon atoms and having a hydroxy group, an acid labile group, or a halogen atom. [6] A resist composition containing the acid generator according to any one of [1] to [5]. [7] A resin containing a structural unit represented by formula (IP), The resist composition according to [6], wherein the resin containing a structural unit represented by formula (IP) further contains a structural unit represented by formula (a4-A) and / or a structural unit represented by formula (a2-D). TIFF2025048784000005.tif3687[In formula (a4-A), R 1represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may be bonded to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different. TIFF2025048784000006.tif51106[In formula (a2-D), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the multiple parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different from each other. However, 1≦nD2+nD22≦5. [8] The resist composition according to [6] or [7], further comprising a resin containing a structural unit having an acid labile group. [9] A resin containing a structural unit represented by formula (IP), The resist composition according to any one of [6] to [8], wherein the resin containing a structural unit represented by formula (IP) further contains a structural unit having an acid labile group.

[10] The resist composition according to [8] or [9], wherein the structural unit having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2025048784000007.tif44143 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or *-O-(CH2) k1 represents --CO--O--, k1 represents an integer of 1 to 7, and * represents a bonding site with --CO--. R a01 , R a4 and R a5each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1' represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. TIFF2025048784000008.tif32118[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -CO- to which they are bonded, and the -CH2- contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents an integer of any one of 1 to 5, and when na1 is 2 or more, the groups in the multiple parentheses may be the same or different. na11 represents an integer of 0 to 4. When na11 is 2 or more, multiple R a17 may be the same or different from each other. mc represents an integer from 0 to 2. TIFF2025048784000009.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 It represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3. TIFF2025048784000010.tif3681[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. Ra62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, where * represents the bonding site with Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

[11] The resist composition according to any one of [6] to

[10] , further comprising a resin containing a structural unit represented by formula (a2-A): TIFF2025048784000011.tif30128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when na2 is 2 or greater, the groups in multiple parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer from 0 to 2.

[12] Further comprising a second acid generator, The resist composition according to any one of [6] to

[11] , wherein the second acid generator includes a salt represented by formula (B1). TIFF2025048784000012.tif1394[In formula (B1), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the multiple parentheses may be the same or different. Z + represents an organic cation.

[13] (1) A step of applying the resist composition according to any one of [6] to

[12] onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the heated composition layer; A method for producing a resist pattern comprising the steps of:

[14] A salt represented by the above formula (I).

[15] The salt according to

[14] , represented by the above formula (I'):

[16] X 10 is a single bond or the above formula (X 10 -1)~Formula(X 10 The salt according to

[14] or

[15] , wherein the salt is a group represented by any one of the following formulas:

[17] L 11 is an alkanediyl group having 1 to 12 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, -CH2- contained in the alkanediyl group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-; The salt according to any one of

[14] to

[16] , wherein the cyclic hydrocarbon group may have a substituent.

[18] R 9 is a polycyclic hydrocarbon group having 6 to 18 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom (-CH2- contained in the polycyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), or an aromatic hydrocarbon group having 6 to 12 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom.

[19] A resin containing a structural unit represented by the above formula (IP). Effect of the Invention

[0006] By using the resist composition of the present invention, a resist pattern with excellent line edge roughness (LER) can be produced. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] In this specification, "(meth)acrylic monomer" means "at least one of acrylic monomer and methacrylic monomer". The expressions "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the group described in this specification, both a straight chain structure and a branched structure may be used. When -CH2- contained in a hydrocarbon group or the like is replaced with -O-, -S-, -CO- or -SO2-, the same example applies to each group, and the number of carbon atoms before the replacement is the number of carbon atoms of the hydrocarbon group or the like. "Combined group" means a group in which two or more of the exemplified groups are bonded, and the valence of these groups may be appropriately changed depending on the bond form. "Derived from" or "derived from" refers to a polymerizable C=C bond contained in the molecule becoming a -CC- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, etc., hydrogen atoms in each group at any position and number may be replaced with bonds. The number of carbon atoms in a substituent is not included in the number of carbon atoms of the substituted group. The term "base labile group" refers to a group that, when contacted with a base (e.g., trimethylamine, etc.), is eliminated as a leaving group to form a hydrophilic group (e.g., a carboxy group or a hydroxy group, etc.). In this specification, the term "solids content of a resist composition" refers to the sum of the components excluding the solvent (E), which will be described later, from the total amount of the resist composition.

[0008] [Salt represented by formula (I)] The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "carboxylate (I)" or "salt (I)"). In a salt (I), the side having a positive charge is sometimes called a "cation (I)" and the side having a negative charge is sometimes called an "anion (I)".

[0009] [Anion (I)] The anion (I) of the salt represented by formula (I) is an anion represented by formula (Ia). TIFF2025048784000013.tif4658 [In formula (Ia), all symbols have the same meaning as in formula (I)]

[0010] R 10 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 10 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 10 Examples of the alkyl group having 1 to 6 carbon atoms and containing a halogen atom include a fluorinated alkyl group having 1 to 6 carbon atoms, a chlorinated alkyl group having 1 to 6 carbon atoms, a brominated alkyl group having 1 to 6 carbon atoms, and an iodinated alkyl group having 1 to 6 carbon atoms. Specific examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, and a periodomethyl group. The alkyl group which may have one or more halogen atoms preferably has 1 to 4 carbon atoms, more preferably 1 to 3 carbon atoms, and further preferably 1 or 2 carbon atoms. R 10 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group. R 5 The alkyl group of R 10 The alkyl groups are the same as those mentioned above. 5 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. X 10 is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025048784000014.tif3449[In formula (X10), Ax is R 10 represents a bond type bonding to the carbon atom to which is bonded, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Ay is L 11 represents a bond type that bonds with, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4, and when mx is an integer of 2 or more, multiple Rx's may be the same or different. When either Ax or Ay is a single bond, the other is preferably one or more bonds selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. When either Ax or Ay is an amide bond, -CO-NR 5 A bond represented by - is preferred. Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. The bonding position of Ay in the phenylene group is preferably the m-position or p-position relative to the bonding position of Ax, and more preferably the p-position. X 10 For example, the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by *. 10 represents the bond position with the carbon atom to which L is bonded. 11 represents the bond position to which the molecule is bonded. TIFF2025048784000015.tif46170[expression(X 10 -1)~Formula(X 10-10) Medium, *, ** are binding sites, * is R bb1 represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X 20 is -O- or -NR 7 - represents. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] X 20 R in 6 The alkyl group of R 10 and R 5 Examples of the alkyl group include the alkyl group represented by the above formula (1). Expression(X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups. TIFF2025048784000016.tif87164 Among them, X 10 is the formula (X 10 -1') and formula (X 10 -3')~expression(X 10 -8') and formula (X 10 -10'), a single bond or a group represented by the formula (X 10 -1'), expression (X 10 -4'), expression (X 10 -5'), expression (X 10 -6') and formula (X 10 -10'), and more preferably a single bond, a group represented by the formula (X 10 -1'), a group represented by the formula (X 10 -5'), a group represented by the formula (X 10 -6') or formula (X 10 -10') is more preferable.

[0011] L 11Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups and alicyclic hydrocarbon groups such as an alkanetriyl group, an alkenetriyl group, an alkinetriyl group, an alkanediyl group, etc.), aromatic hydrocarbon groups, and the like, and may be a hydrocarbon group formed by combining two or more of these groups.

[0012] Examples of the alkanetriyl group include linear or branched alkanetriyl groups such as methanetriyl, ethanetriyl, propanetriyl, butanetriyl, pentanetriyl, hexanetriyl, heptanetriyl, octanetriyl, nonanetriyl, decanetriyl, undecanetriyl, dodecanetriyl, tridecanetriyl, tetradecanetriyl, pentadecanetriyl, hexadecanetriyl, and heptadecanetriyl. The terminal of the branched alkanetriyl group may be a methyl group. Examples of the alkenetriyl group include an ethenetriyl group, a propenetriyl group, an isopropenetriyl group, a butenetriyl group, an isobutenetriyl group, a tert-butenetriyl group, a pententriyl group, a hexenetriyl group, a heptentriyl group, an octenetriyl group, an isooctenetriyl group, and a nonentriyl group. Examples of the alkynetriyl group include an ethynetriyl group, a propynetriyl group, an isopropynetriyl group, a butynetriyl group, an isobutynetriyl group, a tert-butynetriyl group, a pentynetriyl group, a hexynetriyl group, an octynetriyl group, and a nonynetriyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be a methyl group. The chain hydrocarbon group may have 1 to 24 carbon atoms, preferably 3 to 12 carbon atoms, more preferably 3 to 9 carbon atoms, and further preferably 3 to 6 carbon atoms. The alicyclic hydrocarbon group may be any of monocyclic, polycyclic and spirocyclic. The trivalent alicyclic hydrocarbon group includes the groups shown below. The bonding site may be any position. TIFF2025048784000017.tif47167Specific examples of the monocyclic trivalent alicyclic hydrocarbon group include monocyclic cycloalkanetriyl groups or polycyclic cycloalkanetriyl groups such as a cyclopropanetriyl group, a cyclobutanetriyl group, a cyclopentanetriyl group, a cyclohexanetriyl group, a cycloheptanetriyl group, a cyclooctanetriyl group, and a cyclodecanetriyl group. The alicyclic hydrocarbon group may have 3 to 24 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group may be 6 to 24, preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10. Examples of the hydrocarbon group that is a combination of two or more types include a group consisting of an alicyclic hydrocarbon group and a chain hydrocarbon group, a group consisting of two chain hydrocarbon groups and an alicyclic hydrocarbon group, a group consisting of a chain hydrocarbon group and an aromatic hydrocarbon group, and a group consisting of a linear chain hydrocarbon group, an aromatic hydrocarbon group and a branched chain hydrocarbon group. In these combinations, the bonding position of each group can be arbitrary, and X10 , X 11 and X 12 The site of attachment to can be any site on either group.

[0013] L 11 The --CH2-- contained in the hydrocarbon group having 1 to 36 carbon atoms may be replaced with --O--, --S--, --CO-- or --SO2--. L 11 When the hydrocarbon group having 1 to 36 carbon atoms has a substituent, or when -CH2- contained in the hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the hydrocarbon group. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), and a sulfonyl group (a group in which -CH2- in a methylene group is replaced by -SO2-). ), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), an alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- a group in which -CH2- at any position in an alkanediyl group is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), an alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), an alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-),Examples of such groups include an alkanediylthio group (a group in which -CH- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkoxycarbonyl group include an alkoxycarbonyl group having 2 to 35 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include an alkylcarbonyl group having 2 to 36 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include an alkylcarbonyloxy group having 2 to 35 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include an alkoxycarbonyloxy group having 3 to 17 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group may be 2 to 18 or 2 to 17, and is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3. The alkoxycarbonyloxy group may have 3 to 17 carbon atoms, preferably 3 to 11 carbon atoms, and more preferably 3 to 6 carbon atoms. The alkanediyloxy group includes an alkanediyloxy group having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group, alkanediylcarbonyl group, and alkanediylcarbonyloxy group may be 2 to 18 or 1 to 17, and is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The alkylthio group includes an alkylthio group having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, etc. The number of carbon atoms in the alkylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylthio group includes an alkanediylthio group having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. The number of carbon atoms in the cycloalkoxy group and the cycloalkylalkoxy group may be 3 to 17, preferably 3 to 11, and more preferably 3 to 6. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 36 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 35 carbon atoms, such as a phenyloxy group. Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the groups shown below. -O- or -CO- in the groups shown below may be replaced by -S- or -SO2-. The bonding site may be at any position. TIFF2025048784000018.tif46168

[0014] L 11 The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. 11 Examples of halogen atoms that may be contained in L include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. 11 In the case of a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with an alkyl group, the alkyl group can be substantially a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. 11 The -CH2- in the alkanediyl group is replaced with -O-, -CO-, -S- or -SO2-, to form L 11 can substantially have a substituent such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 11 The hydrocarbon group having 1 to 36 carbon atoms may have one or more substituents.

[0015] L 11represents an alkanediyl group having 1 to 12 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent and the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group formed by combining an alkanediyl group having 1 to 12 carbon atoms with a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent and -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-.) are preferred, and an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) or an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alicyclic hydrocarbon group is -O- , -S-, -SO2- or -CO-), an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), or an alkanediyl group having 1 to 4 carbon atoms which is substituted and an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a group (provided that -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), is more preferred, an alkanediyl group having 1 to 4 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) or an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-).), a phenylene group which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and a phenylene group which may have a substituent (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and even more preferably an alkanediyl group having 1 to 4 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[0016] X 11 is preferably -CO- In other words, among the salts represented by formula (I), the carboxylate salt represented by formula (I') is preferred. TIFF2025048784000019.tif4370 [In formula (I'), all symbols have the same meaning as in formula (I)] X 12 is preferably *-CO-O-, *-O-CO- or *-O-CO-O-, and more preferably *-O- (* is R 9 represents the bonding site with the carbon atom to which it is bonded.

[0017] R 9 Examples of the hydrocarbon group having 1 to 36 carbon atoms include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The number of carbon atoms in the hydrocarbon group is preferably 1 to 30, more preferably 1 to 24, and even more preferably 1 to 18. The alkyl group may be linear or branched, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The chain hydrocarbon group has preferably 1 to 18 carbon atoms, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either a monocyclic or polycyclic ring, or a spiro ring, and examples thereof include the groups shown below. The binding site may be any position. TIFF2025048784000020.tif47169Specifically, the monocyclic alicyclic hydrocarbon group includes cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. The polycyclic alicyclic hydrocarbon group includes cycloalkyl groups such as decahydronaphthyl, adamantyl, norbornyl, spirocyclohexane-1,2'-cyclopentane, and spiroadamantane-2,3'-cyclopentane, and spiro rings having cycloalkyl groups bonded to the norbornyl or adamantyl groups via spiro. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10. Examples of groups formed by combination include a group in which an aromatic hydrocarbon group and a chain hydrocarbon group are combined (e.g., aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (e.g., alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), and a group in which an aromatic hydrocarbon group and a alicyclic hydrocarbon group are combined (e.g., aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * represents a bonding site. Here, -CH2- contained in the alkanediyl group, alkyl group, aromatic hydrocarbon group, and alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S-, or -SO2-. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In addition, in the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Any of the combined groups may be bonded to the benzene ring. R 9In the case where -CH2- in a hydrocarbon group represented by the formula (I) is replaced with -O-, -S-, -CO- or -SO2-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the haloalkyl group or the hydrocarbon group. The replaced group includes a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), an alkylcarbonyl group (a group in which -CH2- position is replaced with -CO-), alkylsulfonyl groups (groups in which -CH- at any position in an alkyl group is replaced with -SO-), alkylcarbonyloxy groups (groups in which -CH-CH- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy groups (groups in which -CH-CH-CH- at any position in an alkyl group is replaced with -O-CO-O-), cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylthio group includes an alkylthio group having 1 to 35 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 34 carbon atoms, such as butoxycarbonyloxy groups. The number of carbon atoms in the alkoxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group may be 2 to 18, preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group may be 3 to 18, preferably 3 to 12, more preferably 3 to 6, and even more preferably 3 to 4. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 35 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 35 carbon atoms, such as a benzoyloxy group. The replacement of the haloalkyl group is subject to the same substitution as that of the alkyl group. Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the groups shown below. Also included are the groups shown below in which -O- is replaced by -S- and -CO- is replaced by -SO2-. The bonding site may be any position. TIFF2025048784000021.tif46168When -CH2- in a hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the hydrocarbon group. In addition, the number may be 1 or 2 or more.

[0018] R 9 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, and the like. R 9 R is a group in which -CH2- in the hydrocarbon group is replaced with -O- or -CO-, etc. 9can substantially have as a substituent a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, or an acid labile group represented by the formula (1) or formula (2) described below. Here, the "acid labile group" refers to a group that has a leaving group and that is eliminated by contact with an acid, thereby converting the structural unit into a structural unit having a hydrophilic group (for example, a hydroxy group or a carboxy group). Examples of the halogen atom include the same groups as those mentioned above. The hydrocarbon group may have one substituent or multiple substituents. R 9 is preferably a polycyclic hydrocarbon group having 6 to 18 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom (-CH2- contained in the polycyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), or an aromatic hydrocarbon group having 6 to 12 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom, and more preferably an adamantyl group having a hydroxy group, an acid labile group or a halogen atom, a polycyclic hydrocarbon group in which an adamantyl group and an acetal ring having 4 to 8 carbon atoms and which may have a fluorine atom are bonded in a spiro form (in the acetal ring, it is preferable that a hydrogen atom contained in an alkanediyl group contained between two atoms is replaced with a fluorine atom, and it is more preferable that the hydrogen atom of the methylene group adjacent to the oxygen atom is not replaced with a fluorine atom), or a phenyl group having a hydroxy group, an acid labile group or a halogen atom.

[0019] Examples of the anion (I) include anions represented by formulae (Ia-1) to (Ia-29). In formulae (Ia-1) to (Ia-20), the CH2=CR 10 Among these, anions represented by formulae (Ia-1) to (Ia-8) and (Ia-16) to (Ia-20) are preferred. TIFF2025048784000022.tif235158

[0020] TIFF2025048784000023.tif89158

[0021] [Cation (I)] ZI + Examples of the organic cation include organic onium cation, organic sulfonium cation, organic iodonium cation, organic ammonium cation, benzothiazolium cation, and organic phosphonium cation. Among these, organic sulfonium cation and organic iodonium cation are preferred, and arylsulfonium cation or aryl iodonium cation are more preferred. Specifically, the organic cation includes cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, may be referred to as "cation (b2-1)" depending on the formula number). TIFF2025048784000024.tif83164[Formula (b2-1) to (b2-5), R b4 ~R b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b7 and R b8each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5. When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, multiple R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents an open chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the open chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 , R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. Rb13 and R b14 and R b21 and R b22 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid labile group. L b31 , L b41 ~L b43 represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4. u2 represents 0 or 1. o21, p22, q23, r24, t25 and s26 each independently represent an integer of 0 to 4. u3 represents an integer of 1 to 3, and satisfies 1≦u3+q23≦5. u4 and u5 each independently represent an integer of 0 to 3, and satisfy 0≦u4+o21≦5 and 0≦u5+p22≦5. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple R b18 are the same or different. When o21, p22, q23, s26, t25, and r24 are each 2 or more, multiple R b21 ~R b26 are the same or different. When u2, u3, u4, and u5 are each 2 or more, the groups in the parentheses are the same or different. When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16 At least one of them is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2, and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0022] The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups: TIFF2025048784000025.tif11157 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms.

[0023] Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less.

[0024] The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples of such groups include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and further preferably 1 to 4.

[0025] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, and a phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples thereof include aromatic hydrocarbon groups having a chain hydrocarbon group (such as a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a p-ethylphenyl group, a p-tert-butylphenyl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group (such as a p-cyclohexylphenyl group and a p-adamantylphenyl group). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. An example of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group is a p-methoxyphenyl group. Examples of the chain hydrocarbon group in which a hydrogen atom has been substituted with an aromatic hydrocarbon group include aralkyl groups such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group, and a naphthylethyl group.

[0026] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group.

[0027] R b4 and R b5 The ring formed by bonding to each other together with the sulfur atom to which they are bonded may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, and preferably rings having 4 to 18 carbon atoms. Examples of the ring containing a sulfur atom include 3-membered to 12-membered rings, and preferably 3-membered to 7-membered rings, and examples of such rings include the following rings. * represents a bonding site. TIFF2025048784000026.tif24142

[0028] R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. For example, it may be a thiolane-1-ium ring (tetrahydrothiophenium ring), a thiane-1-ium ring, a 1,4-oxathiane-4-ium ring, etc. R b11 and R b12The ring formed by combining with may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. The ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples of the ring include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring. R b27 ~R b29 Examples of groups containing an acid labile group include -R c30 , -CO-OR c30 Or -L c10 -CO-OR c30 A group represented by (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, R c30 represents an acid labile group. R b27 ~R b29 Examples of the acid labile group include groups represented by formula (1) or formula (2) exemplified in this specification.

[0029] Among the cations (b2-1) to (b2-5), the cation (b2-1) is preferred. Examples of the cation (b2-1) include cations represented by the formulae (b2-c-1) to (b2-c-27), (b2-c-47) to (b2-c-53), and (b2-c-59) to (b2-c-64). Examples of the cation (b2-2) include cations represented by the formulae (b2-c-28) to (b2-c-30), and (b2-c-50). Examples of the cation (b2-3) include cations represented by the formula (b2- Examples of cations (b2-4) include cations represented by formulas (b2-c-35) to (b2-c-46), (b2-c-54) to (b2-c-58), and (b2-c-65) to (b2-c-68). Examples of cations (b2-1) include cations represented by formulas (b2-c-69) to (b2-c-77). TIFF2025048784000027.tif245166

[0030] TIFF2025048784000028.tif213159

[0031] Specific examples of the salt (I) include salts of any combination of the above-mentioned cations and anions. Specific examples of the salt (I) are shown in the table below. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that the salt (I) corresponds to the anion (I). For example, salt (I-1) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (b2-c-1), salt (I-2) is a salt consisting of an anion represented by formula (Ia-2) and a cation represented by formula (b2-c-1), and salt (I-31) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (b2-c-10). TIFF2025048784000029.tif3879 [Table 1]

[0032] Among these, as the salt (I), a salt obtained by combining an anion represented by any one of formulas (Ia-1) to (Ia-8), (Ia-16) to (Ia-20), and a cation represented by any one of formulas (b2-c-1), (b2-c-10), (b2-c-13), (b2-c-14), (b2-c-18) to (b2-c-20), (b2-c-27), (b2-c-30), (b2-c-31), (b2-c-50), (b2-c-51), and (b2-c-54) to (b2-c-77) is preferable.

[0033] <Method for producing salt (I)> In the salt (I), X 12 However, *-CO-O-(* is R 9 The salt represented by formula (I1) in which R represents a bond site with R represents a bond site with R. The salt represented by formula (I1-a) and the compound represented by formula (I1-b) can be produced, for example, by reacting the salt represented by formula (I1-a) with the compound represented by formula (I1-b) in a solvent in the presence of a catalyst. TIFF2025048784000031.tif47150 (wherein all symbols have the same meanings as above.) Catalysts for this reaction include carbonyldiimidazole, triethylamine, pyridine, dimethylaminopyridine and the like. Solvents for this reaction include chloroform, acetonitrile, tetrahydrofuran, dimethylformamide, and the like. The reaction temperature is usually 5° C. to 80° C., and the reaction time is usually 0.5 hours to 24 hours.

[0034] The compound represented by formula (I1-a) includes, for example, the salts represented by the following formulas, which are readily available on the market and can also be readily produced by known methods. TIFF2025048784000032.tif34160

[0035] The salt (I1-b) can be produced, for example, by reacting a salt represented by formula (Ic) with silver oxide in a solvent, and then reacting the salt represented by formula (Id) in a solvent. TIFF2025048784000033.tif43134 (wherein all symbols have the same meanings as above.) Examples of the solvent used in this reaction include chloroform, acetonitrile, tetrahydrofuran, dimethylformamide, and ion-exchanged water. The reaction temperature is usually 5° C. to 80° C., and the reaction time is usually 0.5 hours to 24 hours.

[0036] Examples of the compound represented by formula (Ic) include compounds represented by the following formula, which are readily available on the market and can also be readily produced by known methods. TIFF2025048784000034.tif29161 Examples of the salt represented by formula (Id) include the salts represented by the following formulas, which are easily available on the market and can also be easily produced by known production methods. TIFF2025048784000035.tif36148

[0037] In the salt (I), X12 However, *-O-CO-(* is R 9 The salt represented by formula (I2) in which R represents a bond site with R represents a bond site with R, can be produced, for example, by reacting a salt represented by formula (I2-a) with a compound represented by formula (I2-b) in a solvent in the presence of a catalyst. TIFF2025048784000036.tif41127 (wherein all symbols have the same meanings as above.) Catalysts for this reaction include carbonyldiimidazole, triethylamine, pyridine, dimethylaminopyridine and the like. Solvents for this reaction include chloroform, acetonitrile, tetrahydrofuran, dimethylformamide, and the like. The reaction temperature is usually 5° C. to 80° C., and the reaction time is usually 0.5 hours to 24 hours.

[0038] Examples of the salt represented by formula (I2-a) include the salts represented by the following formulas, which are readily available on the market and can also be easily produced by known production methods. TIFF2025048784000037.tif30150

[0039] The salt (I2-b) can be produced, for example, by reacting a salt represented by formula (Ie) with silver oxide in a solvent, and then reacting the salt represented by formula (Id) in a solvent. TIFF2025048784000038.tif41121 (wherein all symbols have the same meanings as above.) Examples of the solvent used in this reaction include chloroform, acetonitrile, tetrahydrofuran, dimethylformamide, and ion-exchanged water. The reaction temperature is usually 5° C. to 80° C., and the reaction time is usually 0.5 hours to 24 hours.

[0040] Examples of the compound represented by formula (Ie) include compounds represented by the following formula, which are readily available on the market and can also be readily produced by known methods. TIFF2025048784000039.tif30108

[0041] In the salt (I), X 12 However, *-O-CO-O-(* is R 9 The salt represented by formula (I3) in which R represents a bond site with R represents a bond site with R, can be produced, for example, by reacting a salt represented by formula (I2-a) with a compound represented by formula (I1-b) in a solvent in the presence of carbonyldiimidazole. TIFF2025048784000040.tif41140 (wherein all symbols have the same meanings as above.) Solvents for this reaction include chloroform, acetonitrile, tetrahydrofuran, dimethylformamide, and the like. The reaction temperature is usually 5° C. to 80° C., and the reaction time is usually 0.5 hours to 24 hours.

[0042] In the salt (I), X 12 However, *-O-(* is R 9 The salt represented by formula (I4) can be produced, for example, by reacting a salt represented by formula (I2-a) with a compound represented by formula (I1-b) in a solvent in the presence of sodium hydroxide. TIFF2025048784000041.tif44132 (wherein all symbols have the same meanings as above.) Solvents for this reaction include chloroform, acetonitrile, tetrahydrofuran, dimethylformamide, and the like. The reaction temperature is usually 5° C. to 80° C., and the reaction time is usually 0.5 hours to 24 hours.

[0043] [Structural unit derived from a salt represented by formula (I)] The structural unit derived from the salt represented by formula (I) is a structural unit represented by formula (IP) (hereinafter, sometimes referred to as "structural unit (IP)"). The structural unit (IP) is a CH2=CR2 group contained in the salt (I). 10 This shows the state in which the double bond is cleaved. TIFF2025048784000042.tif4482 [wherein all symbols have the same meanings as defined above.] The structural unit (IP) is CH2=CR contained in salt (I). 10 This shows the state in which the double bond is cleaved. Such a structural unit (IP) functions as an acid generator like the salt (I), and also functions as a structural unit constituting a resin.

[0044] [Resin containing a structural unit (IP) derived from a salt represented by formula (I)] The resin of the present invention is a resin containing a structural unit (IP) (hereinafter, may be referred to as "resin (Ap)"). The resin (Ap) may be a homopolymer containing one type of structural unit (IP) or a copolymer containing two or more types of structural units (IP). Resin (Ap) may also contain a structural unit other than the structural unit (IP). As described below, structural units other than the structural unit (IP) include structural units having an acid labile group (hereinafter sometimes referred to as "structural unit (a1)") and structural units other than structural units having an acid labile group. As structural units other than structural units having an acid labile group, structural units not having an acid labile group (hereinafter sometimes referred to as "structural unit (s)") and structural units known in the art may be mentioned. The content of the structural unit (IP) is, based on the total amount of the resin (Ap), 0.1 mol% or more, preferably 0.5 mol% or more, more preferably 0.8 mol% or more, and even more preferably 1 mol% or more. Also, it is 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and even more preferably 10 mol% or less. Specifically, it is 0.1 to 100 mol%, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and even more preferably 1 to 15 mol%.

[0045] In particular, when the resin (Ap) is used in a resist composition as described below, in addition to the structural unit (IP), it may contain the structural unit (a1), the structural unit (s) and / or other structural units, etc. The resin (Ap) may further contain, for example, the structural unit (a1), a structural unit represented by formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)") and / or a structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). Furthermore, as described below, when the resin (Ap) is used in a resist composition, regardless of whether it contains the structural unit (a1), it may be used in combination with a resin containing the structural unit (a1) (hereinafter sometimes referred to as "resin (A)"). Hereinafter, the resin (Ap) and / or the resin (A) may be referred to as "resin (A), etc." Each of the resin (Ap) and the resin (A) preferably further contains a structural unit other than the structural unit (a1).

[0046] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid labile group contained in the resin (A) etc. is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025048784000043.tif1988[In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, or R a1 and R a2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.] TIFF2025048784000044.tif2171[In formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form a heterocycle having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and -CH2- contained in the hydrocarbon group and the heterocycle may be replaced by -O- or -S-, and the hydrocarbon group and the heterocycle group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na′ represents 0 or 1. * denotes a binding site.]

[0047] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. R a1 , R a2 and R a3 Examples of the alkenyl group in include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site). R a1 , R a2 and R a3The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms. TIFF2025048784000045.tif10150R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon group in include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and an alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or a cycloalkylalkyl group such as a methylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 ) includes the following rings. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025048784000046.tif28139

[0048] R a1’ , R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. The alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group and the combined groups are represented by Ra1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a2’ and R a3’ When they are bonded to each other to form a heterocycle together with the carbon atom to which they are attached and X, -C(R a1’ )(R a2’ )-XR a3’ Examples of the ring include the following: * represents a binding site. TIFF2025048784000047.tif18130R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0.

[0049] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma = 0, and na = 1. As the group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group; R a3 is an adamantyl group, ma=0, and na=1. Specific examples of the group (1) include the following groups: * represents a binding site. TIFF2025048784000048.tif149165

[0050] Specific examples of the group (2) include the following groups: * represents a bonding site. TIFF2025048784000049.tif55153

[0051] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. By using a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition, the resolution of the resist pattern can be improved.

[0052] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one structural unit selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025048784000050.tif43144 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meaning as above.]

[0053] R a01 , R a4 , R a5 The halogen atom includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Ra01 , R a4 , R a5 Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or *-O-(CH2) k01 It is -CO-O- (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 and R a04 The alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof in the formula (1) are R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof in the formula (1) include R a1 , R a2 and R a3Examples of the groups include the same groups as those listed in the above. R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less. R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. Ra04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group which may have a halogen atom. m1' is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0054] Examples of the structural unit (a1-0) include a structural unit represented by any one of formulas (a1-0-1) to (a1-0-24) and R a01 and structural units in which a methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Of these, structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14) and (a1-0-19) to (a1-0-24) are preferred. TIFF2025048784000051.tif119160

[0055] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP 2010-204646 A. Among them, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are a4In the above formula (a1-1-1), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-2), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-3), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-4), a structural unit is more preferred. TIFF2025048784000052.tif38168

[0056] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which a methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025048784000053.tif92164

[0057] When the resin (A) etc. contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin (A) or the like contains the structural unit (a1-0), the content thereof is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, and even more preferably 35 mol% or more, based on the total structural units of the resin (A) or the like. Also, the content is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin (A) etc. contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, 95 mol% or less is included, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is included, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0058] An example of the structural unit (a1) having a group (2) is a structural unit represented by formula (a1-4) (hereinafter, sometimes referred to as "structural unit (a1-4)"). TIFF2025048784000054.tif32118 [In formula (a1-4), all symbols have the same meaning as defined above.]

[0059] R a1 and R a17 The halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R a01 , R a4 , R a5 Examples of the above-mentioned examples are the same as those given in the above. R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and further preferably a methoxy group. R a17 Examples of the alkoxyalkyl group in the formula (I) include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group. R a17 In the above, examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a17 Examples of the alkylcarbonyl group in include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a17In the above formula, examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a17 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0060] A a11 Examples of the alkanediyl group include branched alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,8-diyl, nonane-1,9-diyl, and decane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 6, more preferably 1 to 4, even more preferably 1 to 3, and even more preferably 1 or 2. Among them, A a11 is preferably a methylene group or an ethylene group. R a18 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a11 The alkanediyl group -CH2- is -O-, -CO- or -NR a18 When the hydrocarbon group is replaced with, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. A a11Examples of the alkanediyl group in which -CH2- is replaced by -O- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), an amino group (a group in which -CH2- in an alkanediyl group is replaced by -NR a28 -), alkoxy group (a group in which -CH2- at any position in the alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in the alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in the alkyl group is replaced with -CO-), alkylamino group (a group in which -CH2- in the alkyl group is replaced with -NR a18 -), peptide group (the -CH2-CH2- in the ethylene group is replaced by -CO-NR a18 -), alkanediyloxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -S-), an alkanediylamino group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -NR a18 These substituted groups include those exemplified in this specification, within the range permitted by the upper limit of the carbon number. The alkylamino group includes alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, and an octylamino group. The alkanediylamino group includes an alkanediylthio group having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. For example, A a11 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 The groups substituted are *-O-, *-CO-O-, *-O-CO-, *-CO-OA. a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12 -O-CO-, and *-CO-O- and *-CO-OA are particularly well known. a12 -CO-O- or *-OA a12 -CO-O-, *-CO-NR a18 - is preferred, where A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a1 represents the bonding site that bonds to the carbon atom to which A is attached. a12 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a11 The alkanediyl groups are the same as those shown in the above. A a11 is a single bond, *-CO-O- or *-CO-OA a12 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1. mc is preferably 0 or 1.

[0061] R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group consisting of a combination thereof. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2025048784000055.tif10151 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (e.g., alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, and norbornylethyl group), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36Examples of the alkyl group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms that is formed by bonding together with the -CO- to which they are bonded include the following groups. * represents a bonding site, and one of the groups is R a34 This is the binding site for TIFF2025048784000056.tif15105

[0062] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and the alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0063] -OC(R a34 )(R a35 )-OR a36 is eliminated on contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11It is preferable that at least one of them is bonded to the o-position or the m-position, and more preferable that it is bonded to the p-position. In the case of a naphthalene ring, A a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a11 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a11 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a11 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0064] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP 2010-204646 A. Preferably, the structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4) are a1 and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), and (a1-4-14), respectively. TIFF2025048784000057.tif229164

[0065] When the resin (A) contains the structural unit (a1-4), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total of all structural units in the resin (A). Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0066] An example of a structural unit derived from a (meth)acrylic monomer having the group (2) is a structural unit represented by formula (a1-5) (hereinafter, may be referred to as "structural unit (a1-5)"). TIFF2025048784000058.tif4558 [In formula (a1-5), all symbols have the same meaning as defined above.] R a8 is R a01 The same examples as those exemplified above are included.

[0067] In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Of these, it is preferred that one is -O- and the other is -S-. It is preferable that s1 is 1. s1' is preferably an integer of 0 to 2. Z a1 is preferably a single bond or --CH2--CO--O--.

[0068] Examples of the structural unit (a1-5) include structural units derived from monomers described in JP 2010-61117 A. Among them, the structural units represented by formulae (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred. TIFF2025048784000059.tif33133

[0069] When the resin (A) or the like contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on the total structural units of the resin (A) or the like. Also, the content is 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, the content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol%.

[0070] An example of the structural unit (a1) having a group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)"). TIFF2025048784000060.tif3481 [In formula (a1-6), all symbols have the same meaning as defined above.]

[0071] R a61 is R a01 The same examples as those exemplified above are included. R a61 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , Ra63 and R a64 Examples of the alkyl group in R include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and further preferably a methyl group or an ethyl group. a65 The alkyl group in the formula (I) is exemplified similarly. R a62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. R a62 and R a63 Examples of the ring formed by bonding with each other include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 When they are bonded to each other to form a ring, -C(R a62 )(R a63 )(R a64 ) includes the following groups. * represents a bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12. TIFF2025048784000061.tif33110

[0072] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. L a61 and L a62 is preferably each independently a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, and more preferably a single bond. X a62 is preferably a single bond or *-OL a61 -, and more preferably a single bond.

[0073] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and further preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and further preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0074] Examples of the structural unit (a1-6) include structural units represented by formulae (a1-6-1) to (a1-6-44), preferably structural units represented by formulae (a1-6-1) to (a1-6-9), more preferably structural units represented by formulae (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7) or (a1-6-8), and even more preferably structural units represented by formulae (a1-6-1) or (a1-6-2). a61 The structural unit in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and the structural unit in which R a61 The structural unit (a1-6) also includes a structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom. TIFF2025048784000062.tif226161

[0075] When the resin (A) contains the structural unit (a1-6), the content thereof is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on the total structural units of the resin (A). Also, the content is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0076] Further, examples of the structural unit (a1) include the following structural units. TIFF2025048784000063.tif33167

[0077] When the resin (A) etc. contains the structural units represented by the formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferred, 15 to 90 mol% is more preferred, 20 to 85 mol% is even more preferred, 20 to 70 mol% is even more preferred, and 20 to 60 mol% is particularly preferred.

[0078] Further, examples of the structural unit (a1) include the following structural units. TIFF2025048784000064.tif51121 When the resin (A) etc. contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, it is preferably 10 to 60 mol %, more preferably 15 to 55 mol %, even more preferably 20 to 50 mol %, even more preferably 20 to 45 mol %, and particularly preferably 20 to 40 mol %.

[0079] Structural unit(s) The structural unit (s) is derived from a monomer having no acid labile group (hereinafter, may be referred to as "monomer (s)"). As the monomer from which the structural unit (s) is derived, a monomer having no acid labile group known in the resist field can be used. The structural unit (s) preferably has a hydroxy group or a lactone ring. If a resin having a structural unit having a hydroxy group and no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and adhesion to the substrate can be improved. In addition to the above-mentioned structural units, the structural unit (s) may also include a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)").

[0080] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxyl, a phenolic hydroxyl group or a phenolic carboxyl group. TIFF2025048784000065.tif4095[In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. L a22 represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. na2 represents an integer of 1 to 4. When na2 is 2 or more, a plurality of L a22 may be the same or different. R a2 Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. R a2 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group.

[0081] A a21Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, and the like. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, and decane-1,9-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. A a21 is preferably a methylene group or an ethylene group. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 As described above, examples of the group substituted for - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediylamino group, etc. These substituted groups include the same as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Among them, A a21 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 The groups substituted are *-O-, *-CO-O-, *-O-CO-, *-CO-OA. a22 -CO-O-, *-O-CO-A a22-O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, and *-CO-O- and *-CO-OA are particularly well known. a22 -CO-O- or *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 represents the bonding site that bonds to the carbon atom to which A is attached. a22 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a21 The alkanediyl groups are the same as those shown in the above. A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0082] L a21 The hydrocarbon group in the formula (I) is a hydrocarbon group having a valence of (na2+1), and examples of such cyclic hydrocarbon groups include chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be groups formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). L a21 Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentyl group. L a21 Examples of the alkanediyl group include A a21 The alkanediyl groups are the same as those shown in the above. L a21Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Examples of the alkanol groups include a methane pentaylene group, an ethane pentaylene group, a propane pentaylene group, a butane pentaylene group, a pentane pentaylene group, and a hexane pentaylene group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. L a21 The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic divalent alicyclic hydrocarbon group in the formula (I) include the following alicyclic hydrocarbon groups. The binding site may be any position. TIFF2025048784000066.tif46168 For example, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms, more preferably 3 to 18, even more preferably 3 to 16, still more preferably 3 to 12, still more preferably 6 to 12, and particularly preferably 6 to 10. L a21 Examples of the divalent aromatic hydrocarbon group in include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, a phenanthrenetetrayl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, still more preferably 6 to 12, and still more preferably 6 to 10. Examples of groups that combine two or more of these groups include a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group, a group that combines an aromatic hydrocarbon group with a chain hydrocarbon group, a group that combines an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any of the groups is A a21 and L a22 may be bound to L a21 The alkanediyl group of L may be replaced by -O- or -CO-. a21 In the case where the alkanediyl group is replaced by -O- or -CO-, for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms; X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-; * represents X a2 It is preferable that the bond is a bond with Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by - S-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in the alkyl group is replaced with -O-CO-), alkylsulfonyl group (a group in which -CH2- at any position in the alkyl group is replaced with -SO2-), alkylcarbonyl group (a group in which -CH2- at any position in the alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in the alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (alkyl group in which -CH2-CH2-CH2- at any position in the group is replaced with -O-CO-O-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O- an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced with -SO2-),Examples of such groups include an alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group that combines two or more of these groups. Further examples include groups in which one or more hydrogen atoms of these groups are replaced with a bonding site. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. The alkylthio group includes an alkylthio group having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 3 to 11, more preferably 3 to 6, and even more preferably 3 to 4. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. The alkanediyloxy group includes an alkanediyloxy group having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkanediylthio group includes an alkanediylthio group having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and even more preferably 1 to 3.

[0083] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 27 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0084] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include the following groups. Also included are the following groups in which -O- is replaced with -S- and -CO- is replaced with -SO2-. The bonding site may be any position. TIFF2025048784000067.tif47169 Examples of the combined group in which -CH2- is replaced by -O-, -S-, -CO- or -SO2- include the following groups: The binding site may be any position. TIFF2025048784000068.tif26164L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21The hydrocarbon group in the formula (I) can have a halogen atom as a substituent, and thus can substantially have a substituent such as a haloalkyl group. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, and a perfluorobutyl group. A haloalkyl group having 1 to 4 carbon atoms is preferable, and a haloalkyl group having 1 to 3 carbon atoms is more preferable. L a21 The hydrocarbon group of L a21 can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. L a21 The hydrocarbon group of the formula (I) is a group in which -CH2- is replaced by -O- or -CO-. a21 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. L a21 The substituent that the hydrocarbon group in the formula (I) may have is preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and further preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group.

[0085] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, and dodecane-1,12-diyl group. Examples of the alkyl group include alkanediyl group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. L a22 may have one fluorine atom or two or more fluorine atoms. L a22 The -CH2- in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and these replaced groups are within the range permitted by the upper limit of the carbon number of L a21 Examples of the above-mentioned examples are the same as those given above. na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 In the case where R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units. a2 A structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2), similar to the structural unit shown below. TIFF2025048784000069.tif67169

[0086] When a resist pattern is produced from the resist composition of the present invention, when a high energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) is used as an exposure light source, the structural unit (a2) having a phenolic hydroxyl group is preferable, and the structural unit (a2-A) described below is more preferable. When an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) having an alcoholic hydroxyl group is preferable, and the structural unit (a2-1) described below is more preferable. The structural unit (a2) may contain one type alone or two or more types.

[0087] In the structural unit (a2), L a21 In the case where is a cyclic hydrocarbon group, an example of the structural unit having a phenolic hydroxy group or a carboxy group is a structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025048784000070.tif30128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the multiple parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer from 0 to 2.

[0088] R a2 and R a27 As the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom, R a2 The same can be mentioned. R in formula (a2-A) a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group.

[0089] A a21 Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, and the like. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, and decane-1,9-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. A a21is preferably a methylene group or an ethylene group. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 The alkanediyl group -CH2- is -O-, -CO- or -NR a28 When the hydrocarbon group is replaced with, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the hydrocarbon group. A a21 Examples of the alkanediyl group in which -CH2- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediylamino group, etc. These replaced groups include the same groups exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Among them, A a21 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 The groups substituted are *-O-, *-CO-O-, *-O-CO-, *-CO-OA. a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, and *-CO-O- and *-CO-OA are particularly well known. a22 -CO-O- or *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 represents the bonding site that bonds to the carbon atom to which A is attached. a22 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a21 The alkanediyl groups are the same as those shown in the above. A a21 is a single bond, *-CO-O- or *-CO-OA a22-CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0090] R a27 Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 The alkylcarbonyloxy group includes an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 may be 1, 2, 3 or 4, with 1, 2 or 3 being preferred, and 1 or 2 being more preferred. na22 is preferably 0, 1 or 2, and more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH is a benzene ring, A a21 It is preferable that at least one of them is bonded to the m-position or p-position, and more preferable that it is bonded to the m-position. In the case of a naphthalene ring, A a21 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a21 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a21 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0091] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and R in the structural unit (a2-A) a2and the like, in which the methyl group corresponding to the following formula (I) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025048784000071.tif107170

[0092] TIFF2025048784000072.tif83166 When the structural unit (a2-A) is contained in the resin (A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on the total structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) is derived from a compound represented by formula (a2-A') (hereinafter, may be referred to as "compound (a2-A')"). TIFF2025048784000073.tif30121 [In formula (a2-A'), the symbols have the same meanings as above.] The compound (a2-A') may be a commercially available product or may be produced by a known method. The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing the compound (a2-A'). Alternatively, for example, the structural unit (a1-4) can be polymerized, followed by treatment with an acid such as p-toluenesulfonic acid, to incorporate the structural unit (a2-A) into the resin (A). Alternatively, the structural unit (a2-A) can be polymerized, followed by treatment with an alkali such as tetramethylammonium hydroxide, to incorporate the structural unit (a2-A) into the resin (A).

[0093] Examples of the structural unit (a2) having an alcoholic hydroxy group include a structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025048784000074.tif45100[In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as formula (a2-A). L a25 is -O- or *-O-(CH2) k2 represents --CO--O--, and k2 represents an integer of 1 to 7. * represents the bonding position with --CO--. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other. nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, multiple R a27 may be the same or different. L a25 is preferably -O-, -O-(CH2) f1 It is -CO-O- (wherein f1 represents an integer of 1 to 4), and more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and further preferably 0 or 1. nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, and further preferably 0 or 1.

[0094] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R a2 In particular, structural units represented by any one of formulae (a2-B-1) to (a2-B-5) and formulae (a2-C-1) to (a2-C-9) are preferred. TIFF2025048784000075.tif80164 When the resin (A) contains the structural unit (a2-B) or the formula (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (A). Also, 45 mol% or less is mentioned, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, 1 to 45 mol% is mentioned, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol% or 2 to 20 mol%, and even more preferably 1 to 10 mol% or 2 to 10 mol%.

[0095] TIFF2025048784000076.tif51106[In formula (a2-D), R a2 and A a21 have the same meaning as in formula (a2). R a27 has the same meaning as formula (a2-A). R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 4. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different. R a21 and R a22 Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like. R a21 and R a22As the alkyl group, a trifluoromethyl group is preferable. L a24 Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group. L a24 is preferably a single bond or a methylene group.

[0096] The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)"). TIFF2025048784000077.tif51108[In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0097] Examples of the structural unit (a2-D) include the structural units shown below. TIFF2025048784000078.tif62167

[0098] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulae (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, the structural units represented by formulae (a2-D-1) to (a2-D-8) are preferred, the structural units represented by formulae (a2-D-1) to (a2-D-4) are more preferred, and the structural unit represented by formula (a2-D-1) is even more preferred.

[0099] When the resin (A) contains the structural unit (a2-D), the content thereof is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0100] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0101] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3) or formula (a3-4). One of these may be contained alone, or two or more of them may be contained. TIFF2025048784000079.tif48155[In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or *-O-(CH2) k3 It represents a group represented by -CO-O- (k3 represents an integer of any of 1 to 7). L a7 , -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same or different.]

[0102] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) include R a01 , R a4 , Ra5 Examples of the above-mentioned examples are the same as those given above. L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. L a4 , L a5 and L a6 are each independently preferably -O- or *-O-(CH2) k3 In the -CO-O- group, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and further preferably an oxygen atom. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH2—CO—O— or —O—C2H4—CO—O—. R a18 , R a19 , R a20 and R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group, or a methyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1. w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2025048784000080.tif3848 (in the formula, R a24 , L a7 has the same meaning as above.)

[0103] Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any one of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural unit, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom is preferred. TIFF2025048784000081.tif108164

[0104] When the resin (A) or the like contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% based on the total structural units of the resin (A) or the like. Also, 70 mol% or less is mentioned, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 70 mol% is mentioned, preferably 1 to 65 mol%, more preferably 1 to 60 mol%, and even more preferably 3 to 60 mol%. The content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3) or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). It is also preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 50 mol%, and even more preferably 5 to 50 mol%.

[0105] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2025048784000082.tif3355[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a halogen atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0106] R 42 Examples of the saturated hydrocarbon group represented by the formula (I) include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a dodecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group, and branched alkyl groups such as an isopropyl group and an isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups, such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups, such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* represents a bonding site): TIFF2025048784000083.tif10146 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl groups, and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the saturated hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42 Examples of the saturated hydrocarbon group in which -CH2- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group combining two or more of these groups. Examples of these replaced groups include the same groups exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0107] The structural unit (a4) is R 42 is preferably a saturated hydrocarbon group having a fluorine atom, and R 42 However, examples of the structural unit (a4) which is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter may be referred to as structural unit (a4-1)), a structural unit represented by formula (a4-2) (hereinafter may be referred to as structural unit (a4-2)), and a structural unit represented by formula (a4-3) (hereinafter may be referred to as structural unit (a4-3)). The structural unit represented by formula (a4-1) is a structural unit shown below. TIFF2025048784000084.tif4764[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom.

[0108] L 41 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group. L 42fExamples of the alkanediyl group having a fluorine atom in the formula (I) include linear alkanediyl groups having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula may be 1 or more, and is preferably 2 or more. L42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0109] L 42f Examples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42f Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0110] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group, or an ethylene group, and even more preferably a single bond or a methylene group. L 42fis preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0111] The structural unit (a4-1) may be any of the structural units shown below and R in the structural unit (a4-1) in the structural unit shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025048784000085.tif98160The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025048784000086.tif5575[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom. 43f and R 43f The maximum total carbon number is 21.

[0112] L 43f and R 43f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of saturated hydrocarbon groups in the formula are L 43f and R 43f As long as the upper limit of the total number of carbon atoms in42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups.

[0113] L 43f The saturated hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by the formula (L43f-1). TIFF2025048784000087.tif13119 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, ** is -O-CO-R 43f This is the binding site for

[0114] L in the group represented by formula (L43f-1) 45f , L 46f and L 47f Examples of the divalent saturated hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a divalent saturated hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group, etc. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, etc. It is preferred that s is 0.

[0115] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for TIFF2025048784000088.tif47140

[0116] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B). TIFF2025048784000089.tif71102 [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f It represents the binding site with R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom. R 43fA The saturated hydrocarbon group represented by R in formula (a4) is as large as possible within the upper limit of the number of carbon atoms. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB The saturated hydrocarbon group represented by R in formula (a4) is as large as possible within the upper limit of the number of carbon atoms. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. A 43f is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group, or a combination thereof, more preferably a divalent chain saturated hydrocarbon group which has a fluorine atom, and further preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms. R 43fBThe saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group which may have a fluorine atom, an alicyclic saturated hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4- More preferred are fluorinated alkyl groups such as an octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, and a perfluorooctyl group; a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, and a perfluoroadamantylmethyl group. In formula (a4-2B), *-A 43f -X 43 -R 43fB An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group). TIFF2025048784000090.tif15170

[0117] The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025048784000091.tif99167

[0118] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025048784000092.tif111163

[0119] The structural unit (a4) also includes a structural unit represented by formula (a4-3). TIFF2025048784000093.tif5577[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f each independently represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 44f each independently represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom. 44f and R 44f The total number of carbon atoms in each is limited to 21.

[0120] L 44f and R 44f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of saturated hydrocarbon groups in the formula are L 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups. L 44fis preferably an alkanediyl group having 1 to 13 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and is preferably -(CH2)1-, -(CH2) j2 -O-(CH2) j3 -or-(CH2) j4 -CO-O-(CH2) j5 - (j1 to j5 each independently represent an integer of 1 to 6), and more preferably an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom or an alicyclic saturated hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, further preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

[0121] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025048784000094.tif85166

[0122] The structural unit (a4) also includes a structural unit represented by the formula (a4-A). TIFF2025048784000095.tif3687[In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may be bonded to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the multiple parentheses may be the same or different.]

[0123] R 1 Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0124] L 1 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may be groups combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include chain hydrocarbon groups such as alkanediyl groups. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0125] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site may be any position. TIFF2025048784000096.tif45163For example, alicyclic hydrocarbon groups such as a cycloalkanediyl group are included. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. Examples of such groups include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group, and polycyclic alicyclic hydrocarbon groups such as spiro rings having cycloalkanediyl groups bonded to a norbornyl group or an adamantyl group via spiro bonds. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms.

[0126] Examples of groups that combine two or more types include a group that combines an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any group is X 11 may be bound to Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such an alkyl group include a group in which a hydroxyl group is bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), and a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group- etc.). * is X 11 It represents the binding site with

[0127] L 1 -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When --CH2-- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms is replaced with --O--, --S--, --SO2-- or --CO--, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the aliphatic hydrocarbon group. Examples of groups in which -CH- in an aliphatic hydrocarbon group is replaced with -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group (, a thio group, a sulfonyl group (, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group (, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, and groups in which two or more of these groups are combined. Examples of these replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as exemplified in this specification, within the upper limit of the number of carbon atoms permitted.

[0128] L 1 The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the haloalkyl group having 1 to 4 carbon atoms include a fluorinated alkyl group having 1 to 4 carbon atoms, a chlorinated alkyl group having 1 to 4 carbon atoms, a brominated alkyl group having 1 to 4 carbon atoms, and an iodinated alkyl group having 1 to 4 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 4 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. When -CH2- in the alkyl group is replaced with -O- or -CO-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. These replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. The alkoxy group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, further preferably 1 to 4 carbon atoms, and further preferably 1 to 3 carbon atoms. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. L 1 The substituent that the aliphatic hydrocarbon group in the formula (I) may have is preferably a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and further preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group. L 1 is R 3When the alkyl group does not form an alicyclic hydrocarbon group with the alkyl group, it is preferably a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-). and more preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent, an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and even more preferably a chain hydrocarbon group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 6 to 12 carbon atoms, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 6 to 12 carbon atoms, or a group formed by combining an alicyclic hydrocarbon group having 6 to 12 carbon atoms, a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 6 to 12 carbon atoms.

[0129] R 2Examples of the fluorinated alkyl group having 1 to 8 carbon atoms in the formula (I) include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl group, Examples of the fluorinated alkyl group include -2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, and perfluorooctyl group. The number of carbon atoms of the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3. R 3 The fluorinated alkyl group having 1 to 6 carbon atoms in R is as long as the upper limit of the carbon number allows. 2 The same examples of the fluorinated alkyl groups having 1 to 6 carbon atoms as those given as examples of the fluorinated alkyl groups above are also included. R 2 is R 3 When is a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R2 is R 3 When is a hydrogen atom, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 5 carbon atoms, and even more preferably a fluorinated alkyl group having 3 to 5 carbon atoms. R 3 L 1 When R is bonded to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, 3 L 1 Examples of the group formed by bonding with include groups represented by the following formulas: In the following formulas, * and ** represent bonding sites, and one of the two ** represents a bonding site with a hydroxy group and the other represents a bonding site with R 2 represents the binding site with L 1A , L 1 It is a part of a hydrocarbon group and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. TIFF2025048784000097.tif25130R 3 is preferably a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0130] Examples of the structural unit (a4-A) include the following structural units. In these structural units, R 1 and R 1 Specific examples of the structural unit (a4-A) include structural units in which a hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group or an alkyl group. TIFF2025048784000098.tif249146

[0131] When the resin (A) etc. has the structural unit (a4), the content thereof is preferably 1 to 97 mol %, more preferably 2 to 95 mol %, and even more preferably 3 to 90 mol %, based on all structural units in the resin (A) etc.

[0132] <Structural unit (a5)> The non-leaving hydrocarbon group contained in the structural unit (a5) may be a group containing a linear, branched or cyclic hydrocarbon group. Among these, the structural unit (a5) is preferably a group containing an alicyclic hydrocarbon group. An example of the structural unit (a5) is a structural unit represented by the formula (a5-1). TIFF2025048784000099.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.]

[0133] R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group, a norbornyl group, and the like. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a 2-ethylhexyl group. An example of the alicyclic hydrocarbon group having a substituent is a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably an adamantyl group, a norbornyl group, or a cyclohexyl group. L 55Examples of the divalent saturated hydrocarbon group in include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, and a divalent chain saturated hydrocarbon group is preferred. Examples of the divalent chain saturated hydrocarbon group include alkanediyl groups such as a methylene group, an ethylene group, a propanediyl group, a butanediyl group, and a pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantanediyl and norbornanediyl. L 55 Examples of the divalent saturated hydrocarbon group represented by formula (L1-1) to formula (L1-4) include groups represented by formula (L1-2) to (L1-4). In the following formulae, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025048784000100.tif18165[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents L x1 ) which represents the binding site with L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less. L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, and more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, and more preferably a cyclohexanediyl group or an adamantanediyl group. Examples of the group represented by formula (L1-1) include the divalent groups shown below. TIFF2025048784000101.tif37148 Examples of the group represented by formula (L1-2) include the divalent groups shown below. TIFF2025048784000102.tif23130 Examples of the group represented by formula (L1-3) include the divalent groups shown below. TIFF2025048784000103.tif16147 Examples of the group represented by formula (L1-4) include the divalent groups shown below. TIFF2025048784000104.tif13167L 55 is preferably a single bond or a group represented by formula (L1-1).

[0134] The structural unit (a5-1) may be any of the structural units shown below and R in the structural unit (a5-1) in the structural unit shown below. 51 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025048784000105.tif111150 When the resin (A) or the like contains the structural unit (a5), the content thereof is preferably from 1 to 30 mol %, more preferably from 2 to 20 mol %, and even more preferably from 3 to 15 mol %, based on all structural units in the resin (A) or the like.

[0135] <Structural unit (a6)> The structural unit (a6) is a structural unit having a -SO2- group, and preferably has the -SO2- group in a side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, may have a branched structure having a -SO2- group, or may have a cyclic structure (monocyclic and polycyclic structure) having a -SO2- group. A structural unit having a cyclic structure having a -SO2- group is preferred, and a structural unit having a cyclic structure (sultone ring) containing -SO2-O- is more preferred. The sultone ring may be represented by the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and the formula (T 1 The bonding site can be any position. The sultone ring may be monocyclic, but is preferably polycyclic. A polycyclic sultone ring refers to a bridged ring containing -SO2-O- as an atomic group constituting the ring, and is represented by the formula (T 1 -1) and the formula (T 1 The sultone ring is represented by the formula (T 1 As in the ring represented by formula (2), the atomic group constituting the ring may further contain a heteroatom in addition to -SO2-O-. Examples of the heteroatom include an oxygen atom, a sulfur atom, or a nitrogen atom, and an oxygen atom is preferred. TIFF2025048784000106.tif3286 The sultone ring may have a substituent. Examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms. Examples of halogen atoms include fluorine, chlorine, bromine and iodine atoms. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, and preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl and naphthylethyl groups. Examples of the alkoxycarbonyl group include groups in which an alkoxy group, such as a methoxycarbonyl group or an ethoxycarbonyl group, is bonded to a carbonyl group, and preferably, an alkoxycarbonyl group having 6 or less carbon atoms is used, and more preferably, a methoxycarbonyl group is used. Alkylcarbonyl groups include acetyl, propionyl and butyryl groups. From the viewpoint of ease of production of the monomer from which the structural unit (a6) is derived, a sultone ring having no substituent is preferred. The sultone ring is preferably a ring represented by the following formula (T1'). TIFF2025048784000107.tif3271[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. The binding site is at any position.] X 11 is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R 41 Examples of the substituent include the same ones as the substituents on the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxyl group is preferred. ma is preferably 0 or 1, and more preferably 0. Examples of the ring represented by formula (T1') include the following rings. The binding site may be any position. Among them, the binding site is preferably the 1st or 3rd position. TIFF2025048784000108.tif47147

[0136] The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group, such as a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, or a methacryloylthio group. Among these, the monomer from which the structural unit (a6) is derived is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer.

[0137] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025048784000109.tif4963[In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. A xx is an oxygen atom, -N(R c )- or a sulfur atom. A x represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group is -O-, -CO- or -N(R d )- may also be replaced. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. R c and R d each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] R x Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. R x Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group. An alkyl group having 1 to 4 carbon atoms is preferred, and a methyl group or an ethyl group is more preferred. R xExamples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and may be a combination of two or more of these groups. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, linear alkanediyl groups such as a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic divalent alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples of the polycyclic divalent alicyclic saturated hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. A x The bonding position of to the sultone ring may be any position, but is preferably the 1-position.

[0138] Examples of the structural unit (a6-0) include the following structural units. TIFF2025048784000110.tif93150

[0139] Of these, structural units represented by formulae (a6-1), (a6-2), (a6-6), (a6-7), (a6-8) and (a6-12) are preferred, and structural units represented by formulae (a6-1), (a6-2), (a6-7) and (a6-8) are more preferred. When the resin (A) etc. has the structural unit (a6), its content is preferably 1 to 50 mol %, more preferably 2 to 40 mol %, and even more preferably 3 to 30 mol %, based on all structural units in the resin (A) etc.

[0140] <Structural unit (a7)> The resin may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter, may be referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include structural units described in JP 2016-79235 A, and are preferably structural units having a sulfonate group or carboxylate group and an organic cation in a side chain, or a structural unit having a sulfonio group and an organic anion in a side chain. The structural unit having a sulfonate group or carboxylate group and an organic cation in the side chain is preferably a structural unit represented by formula (a7-A). TIFF2025048784000111.tif26123[In formula (a7-A), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. Xa71 is a single bond, *-O-**, *-CO-O-**, *-O-CO-**, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-**. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R a7 represents the bonding site with the carbon atom to which it is bonded. L a71 and L a72 each independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents L a71 It represents the binding site with na7 represents an integer of 0 to 2. When na7 is 2, the groups in the parentheses may be the same or different. RA - represents a sulfonate anion or a carboxyl anion. Z.A. + represents an organic cation.

[0141] R a7 and R a71 Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R a7Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0142] X a71 is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025048784000112.tif3251[In formula (X10), Ax is R a7 represents a bond type bonded to the carbon atom to which is bonded, and represents one type of bond selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Ay is L a71 and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4, and when mx is an integer of 2 or more, multiple Rx's may be the same or different. When either Ax or Ay is a single bond, the other is preferably one or more bonds selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. When either Ax or Ay is an amide bond, -CO-NR a71 A bond represented by - is preferred. The bonding position of Ay in the phenylene group is preferably the m-position or p-position relative to the bonding position of Ax, and more preferably the p-position. Among these, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. X a71 Examples of the substituent include a single bond and a substituent represented by the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by * -R a7 represents the bonding site with the carbon atom to which L is bonded. a71 It represents the binding site with X 20 is -O- or -NR a71 - represents. TIFF2025048784000113.tif43161 formula (X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups. TIFF2025048784000114.tif87162 Among them, X a71 is a single bond and the formula (X 10 -1'), expression (X 10 -3')~expression(X 10 -9'), which is preferably a single bond or a group represented by the formula (X 10 -1'), expression (X 10 -4'), expression (X 10 -5'), expression (X 10 -6') and formula (X 10-9'), a single bond, a group represented by the formula (X 10 -1'), a group represented by the formula (X 10 -5'), a group represented by the formula (X 10 -6') or formula (X 10 -9') is more preferable.

[0143] L a71 The hydrocarbon group is a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form X. a71 and X a72 Also, L a72 The hydrocarbon group is a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form X. a72 and R.A. - Examples of such groups include groups that bond to the L a71 and L a72 Examples of the chain hydrocarbon group include a group in which one hydrogen atom has been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The chain hydrocarbon group preferably has 1 to 20 carbon atoms, more preferably 1 to 18 carbon atoms, and even more preferably 1 to 10 carbon atoms. L a71 and L a72Examples of the alicyclic hydrocarbon group include a group in which one hydrogen atom has been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cycloheptyl group, a cyclohexyl group, a cyclopentyl group, and a cyclooctyl group. L a71 and L a72 Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a bridged structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are bonded by a spiro bond. Examples of the cycloalkyl group having a bridged structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are bonded by a spiro bond include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include the following formula: TIFF2025048784000115.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the alicyclic hydrocarbon group preferably has 6 to 18 carbon atoms, and more preferably 7 to 12. L a71 and L a72 The aromatic hydrocarbon group may be a group in which one hydrogen atom has been removed from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and further preferably 6 to 10. L a71 and La72 When --CH2-- in the hydrocarbon group is replaced with --O--, --CO--, --S-- or --SO2--, the number of carbon atoms before the replacement is regarded as the number of carbon atoms in the hydrocarbon group. L a71 and L a72 Among the hydrocarbon groups, examples of groups in which -CH- in a chain hydrocarbon group is replaced with -O-, -CO-, -S- or -SO- include a hydroxy group, a carboxy group, a thiol group, a carbonyl group, an oxy group (, a thio group, a sulfonyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group (, an alkanediylcarbonyloxy group, etc. These substituted groups include the same as the groups exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L a71 and L a72 Among the above hydrocarbon groups, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2- include groups containing a cyclic ether, cyclic ketone, cyclic ester (lactone), cyclic thioether, cyclic acetal, and cyclic sulfonate ester (sultone) structure. Specific examples include alicyclic hydrocarbon groups represented by the following formula. The bonding position of the alicyclic hydrocarbon groups listed in the following formula may be any position. TIFF2025048784000116.tif46146L a71 and L a72 Among these hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. L a71 and L a72Examples of the group in which two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group are combined include a group in which the chain hydrocarbon group and the alicyclic hydrocarbon group are combined, a group in which the chain hydrocarbon group and the aromatic hydrocarbon group are combined, a group in which the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined, and a group in which the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined. The group in which the alicyclic hydrocarbon group and the aromatic hydrocarbon group are combined may be a condensed ring. L a71 and L a72 The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a71 and L a72 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. a71 and L a72 The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L a71 and L a72 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. na7 is preferably 0 or 1. ZA in formula (a7-A) + Examples of the cation include the same as the cation in the salt represented by formula (B1) etc.

[0144] In formula (a7-A), L a71 and L a72 When the hydrocarbon group is a saturated hydrocarbon group, in the formula (a7-B) described later, b7 The divalent linking group may include the same groups as those exemplified above. Examples of the structural unit represented by formula (a7-A) include a structural unit represented by formula (a7-A1). TIFF2025048784000117.tif30138[In formula (a7-A1), R a7 , X a71 , L a71 , X a72 , na7, R.A. - and Z.A. + has the same meaning as above. z7 represents an integer of 0 to 6. Q a7 , Q b7 , R z71 and R z72 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms; when z7 is 2 or more, z71 and R z72 may be the same or different.] Q a7 , Q b7 , R z71 and R z72 As the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in R a7 Examples of the groups include the same groups as those exemplified in the above.

[0145] Examples of the structural unit represented by formula (a7-A) include the following structural units, R a7 Examples of the structural units include those in which the group corresponding to the methyl group in the above formula (I) is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom) or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.), and the structural units described in WO 2012 / 050015. + represents an organic cation. TIFF2025048784000118.tif244163

[0146] TIFF2025048784000119.tif130157

[0147] The structural unit having a sulfonio group and an organic anion in a side chain is preferably a structural unit represented by formula (a7-B). TIFF2025048784000120.tif28104[In formula (a7-B), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent; R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are attached. A - represents an organic anion. R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a7-A) include the same halogen atom and the alkyl group which may have a halogen atom as in the formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by the formula (I) include a phenylene group and a naphthylene group. R b72 and R b73 Examples of the hydrocarbon group represented by the formula (I) include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups formed by combining these groups include those similar to those described above. A b7 Examples of the divalent linking group represented by the formula (I) include divalent saturated hydrocarbon groups having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S- or -CO-. Examples of the divalent saturated hydrocarbon group include divalent chain saturated hydrocarbon groups such as linear or branched alkanediyl groups, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations of these are also possible. Specifically, straight-chain alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, and dodecane-1,12-diyl group; divalent monocyclic alicyclic saturated hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group; and divalent polycyclic alicyclic saturated hydrocarbon groups, such as polycyclic cycloalkanediyl groups, such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. Examples of saturated hydrocarbon groups in which -CH2- has been replaced with -O-, -S-, or -CO- include the following divalent groups. However, the number of carbon atoms before the -CH2- in the saturated hydrocarbon group is replaced with -O-, -S-, or -CO- is 17 or less. In the following formulas, * and ** represent binding sites, * represents R b71 It represents the binding site with TIFF2025048784000121.tif123161[where, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0148] The structural unit containing a cation in formula (a7-B) includes the structural units represented by the following formula: a7 Examples of such structural units include those in which a group corresponding to the methyl group in the above formula (I) is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.). TIFF2025048784000122.tif72164

[0149] A - Examples of the organic anion represented by the formula (I) include a sulfonate anion, a sulfonylimide anion, a sulfonylmethide anion, and a carboxylate anion. - The organic anion represented by the formula (I) is preferably a sulfonate anion, and the sulfonate anion is more preferably the same as the anion exemplified for the acid generator (B). Examples of the sulfonylimide anion, sulfonylmethide anion, and carboxylate anion include the same anions exemplified for the acid generator (B) described below.

[0150] Examples of the structural unit represented by formula (a7-B) include structural units represented below. TIFF2025048784000123.tif95157 When the resin (A) contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more kinds. The total content of the structural unit (a7) is preferably 1 to 30 mol%, more preferably 1 to 25 mol%, even more preferably 2 to 20 mol%, still more preferably 3 to 15 mol%, and even more preferably 3 to 10 mol%, based on the total structural units of the resin (A1).

[0151] The resin (A) is preferably a resin containing the structural unit (a1). In particular, the resin (Ap) is more preferably a resin consisting of the structural unit (IP) and the structural unit represented by the formula (a4-A) and / or the structural unit represented by the formula (a2-D), a resin consisting of the structural unit (IP), the structural unit (a1) and the structural unit (s), i.e., a copolymer of the salt (I) and the monomer (a4-A) and / or the structural unit represented by the monomer (a2-B), or a copolymer of the salt (I), the monomer (a1) and the monomer (s). The resin (A) not containing the structural unit (IP) is preferably a resin consisting of the structural unit (a1) and the structural unit (s). The structural unit (a1) is preferably at least one selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group), more preferably at least two, and even more preferably at least two selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). The structural unit (s) is preferably at least one selected from the group consisting of the structural unit (a2) and the structural unit (a3). The structural unit (a2) is preferably the structural unit (a2-1) or the structural unit (a2-A). The structural unit (a3) ​​is preferably at least one selected from the group consisting of the structural unit represented by the formula (a3-1), the structural unit represented by the formula (a3-2), and the structural unit represented by the formula (a3-4).

[0152] Each structural unit constituting the resin (A) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using a monomer that leads to these structural units. The content of each structural unit contained in the resin (A) can be adjusted by the amount of monomer used for polymerization. The weight average molecular weight of the resin (A) and the resin (Ap) is preferably 2,000 or more (more preferably 2,500 or more, even more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, even more preferably 15,000 or less), but may contain an oligomer having a weight average molecular weight smaller than this. In this specification, the weight average molecular weight is a value determined by gel permeation chromatography under the conditions described in the Examples. The structural unit (IP) may constitute a dimer, a trimer, or a compound having a weight average molecular weight of less than 2,000.

[0153] [Acid Generator] The acid generator of the present invention is an acid generator containing a salt (I) or a structural unit (IP). The structural unit (IP) can be contained as a compound or resin in which a plurality of units are polymerized. The salt (I) or the structural unit (IP) of the present invention can act as an acid generator in a resist composition. When the salt (I) is used as an acid generator in a resist composition, the acid generator may contain only one type or two or more types of salts (I). When the structural unit (IP) is used as an acid generator in a resist composition, a compound or resin containing the structural unit (IP) may be used alone or in combination of two or more types. The acid generator of the present invention may contain both the salt (I) and the structural unit (IP). As described below, the acid generator of the present invention may further contain an acid generator other than the salt (I) that is known in the resist field (a second acid generator, hereinafter sometimes referred to as "acid generator (B)") and / or an acid generator other than the salt (I) that is known in the resist field. The acid generator (B) may be used alone or in combination of two or more kinds. When the acid generator of the present invention contains an acid generator (B) or the like, the ratio of the contents of the salt (I) to the acid generator (B) or the like (mass ratio; salt (I):acid generator (B)) is usually 1:99 to 100:0, preferably 1:99 to 99:1, more preferably 2:98 to 98:2, even more preferably 5:95 to 95:5, still more preferably 10:90 to 90:10, still more preferably 15:85 to 85:15, and particularly preferably 40:60 to 60:40. The ratio of the contents of the structural unit (IP) and the acid generator (B) (mass ratio, structural unit (IP):acid generator (B)) is usually 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, even more preferably 10:90 to 90:10, still more preferably 15:85 to 85:15, and particularly preferably 40:60 to 60:40. [Carboxylic Acid Generator] Among the salts of the present invention, the salt represented by formula (I') is a carboxylate, and the salt represented by formula (I') and a compound or resin containing a structural unit derived from the carboxylate can act as a carboxylic acid generator. TIFF2025048784000124.tif5489 [In formula (I') and formula (IP'), all symbols have the same meanings as in formula (I) and formula (IP)]

[0154] [Resist Composition] The resist composition of the present invention contains an acid generator. The acid generator here may be a salt (I) or a structural unit (IP), or may be a resin (Ap) containing a structural unit (IP). That is, the resist composition of the present invention may contain an acid generator containing the structural unit (IP) of the present invention or the salt (I) of the present invention, and may contain both the salt (I) and the structural unit (IP). The structural unit (IP) may be in the form of either a compound or a resin. In other words, the resist composition of the present invention may contain a resin (Ap) and a salt (I) as an acid generator. The resist composition of the present invention preferably further comprises a resin. The resin preferably comprises a resin containing a structural unit (a1) having an acid labile group (hereinafter referred to as resin (A)). That is, (a) comprising a salt (I) and a resin (A), (b) a resin (Ap) containing a structural unit (IP) and a structural unit (a1) having an acid labile group; (c) It is preferable to contain a resin (Ap) containing the structural unit (IP) and a resin (A). In particular, it is preferable to be a resist composition containing the above (b) and the above (c). The resist composition of the present invention may contain two or more types of resins (A) and / or resins (Ap). The resist composition of the present invention preferably further contains an acid generator (a second acid generator, hereinafter sometimes referred to as "acid generator (B)"), a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)") that are known in the resist field. The resist composition of the present invention may further contain a resin other than the above-mentioned resins.

[0155] <Carboxylic acid generator> The content of the salt (I) of the present invention is preferably about 0.001 to 15 mass%, more preferably about 0.001 to 10 mass%, even more preferably about 0.001 to 8 mass%, and even more preferably about 0.005 to 7 mass%, based on the solid content of the resist composition. The content of the resin (Ap) of the present invention is preferably from 80 to 99% by mass, and more preferably from 90 to 99% by mass, based on the solid content of the resist composition.

[0156] <Resins other than Resin (A)> The resist composition of the present invention may contain a resin other than the resin (A) in combination. Examples of resins other than resin (Ap) and resin (A) include resin (AX) having the same structural units as resin (A) except that it does not contain the structural unit (a1) in the above-mentioned resin (A), and a resin containing structural unit (a4) and / or structural unit (a5) (however, it does not contain structural unit (IP) and structural unit (a1); hereinafter, this may be referred to as "resin (X)"). Resin (AX) may be a resin containing structural unit (a2), and preferably a resin containing structural unit (a2-A). In resin (AX), the content of structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, and even more preferably 15 mol% or more, based on the total of all structural units of resin (AX). Also, it is preferably 80 mol% or less, and more preferably 70 mol% or less. Examples of structural units that may be further contained in the resin (X) include the structural unit (a2), the structural unit (a3), and structural units derived from other known monomers. Among these, the resin (X) is preferably a resin consisting only of the structural unit (a4) and / or the structural unit (a5), and more preferably a resin consisting only of the structural unit (a4). When the resin (X) contains the structural unit (a4), the content of the structural unit (a4) in the resin (X) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, based on the total of all structural units in the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) in the total of all structural units in the resin (X) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more. Also, it may be 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it may be 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, even more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Also, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) may be 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and even more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Furthermore, it may be 100 mol% or less. Specifically, it may be 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and even more preferably 80 to 100 mol%.

[0157] Each structural unit constituting the resin (AX) and the resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using a monomer that derives these structural units. The content of each structural unit contained in the resin (AX) and the resin (X) can be adjusted by the amount of the monomer used for polymerization. The weight average molecular weight of resin (AX) and resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less). The method for measuring the weight average molecular weight of resin (AX) and resin (X) is the same as that of resin (A) etc., but they may contain oligomers having a weight average molecular weight smaller than that.

[0158] When the resist composition of the present invention contains resin (X), the content thereof is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, even more preferably 1 to 40 parts by mass, still more preferably 1 to 30 parts by mass, and particularly preferably 1 to 8 parts by mass, per 100 parts by mass of the total of resin (A) and resin (Ap).

[0159] The total content of the resin (A) and the resin (Ap) in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The total content of the resin (A) and the resin (Ap) is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. When a resin other than the resin (A) is contained, the total content of the resin (A) and the resin other than the resin (A) is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The solid content of the resist composition and the resin content therein can be measured by a known analytical means such as liquid chromatography or gas chromatography.

[0160] <Acid Generator (B)> The acid generator (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), and the like. Examples of ionic compounds include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of anions of onium salts include sulfonate anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylate anion. The compound (B) may be a part of a structural unit of a resin contained in the resist composition of the present invention, like the structural unit (a7) described below.

[0161] As the acid generator (B), compounds that generate an acid when exposed to radiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, and European Patent No. 126,712, can be used. Compounds produced by known methods may also be used. The compound (B) may be an acid generator having an acid labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that serves as an acid labile group.

[0162] A preferred embodiment of the acid generator (B) is a salt represented by formula (B1) (hereinafter may be referred to as "acid generator (B1)") or a salt represented by formula (B2) (hereinafter may be referred to as "acid generator (B2)"). TIFF2025048784000125.tif1394[In formula (B1), L b1represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the multiple parentheses may be the same or different. Z1 + represents an organic cation. L b1 The (nb1+1)-valent hydrocarbon group is a group obtained by removing nb1 hydrogen atoms from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, to form a ring structure. b2 Examples of such groups include groups that bond to the The hydrocarbon group preferably has 1-48 carbon atoms, more preferably 1-42 carbon atoms, even more preferably 1-36 carbon atoms, even more preferably 1-30 carbon atoms, and even more preferably 1-24 carbon atoms. Examples of the chain hydrocarbon group include a group in which nb1 hydrogen atoms have been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group in which nb1 hydrogen atoms have been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are condensed, and cycloalkyl groups in which two rings are bonded by a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded by a spiro bond include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, alicyclic hydrocarbon groups represented by the following formulas are included. TIFF2025048784000126.tif26168When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8.When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. The aromatic hydrocarbon group may be an aryl group having nb1 hydrogen atoms removed therefrom, such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, or a fluorenyl group. More specifically, aromatic hydrocarbon groups represented by the following formulas are included. TIFF2025048784000127.tif1285The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When --CH2-- in the hydrocarbon group is replaced with --O--, --CO--, --S-- or --SO2--, the number of carbon atoms before the replacement is regarded as the number of carbon atoms in the hydrocarbon group. L b1Among the hydrocarbon groups in which -CH2- in a chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, there may be mentioned a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (an alkyl group in which -CH2- Examples of the substituted groups include -CH- at any position in the alkyl group, which is replaced with -CO-), alkylcarbonyloxy groups (wherein -CH-CH- at any position in the alkyl group is replaced with -CO-O-), alkanediyloxy groups (wherein -CH- at any position in the alkanediyl group is replaced with -O-), alkanediyloxycarbonyl groups (wherein -CH-CH- at any position in the alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl groups (wherein -CH- at any position in the alkanediyl group is replaced with -CO-), and alkanediylcarbonyloxy groups (wherein -CH-CH- at any position in the alkanediyl group is replaced with -CO-). Examples of the substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L b1 Among these hydrocarbon groups, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2- include cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, and cyclic sultones. Specific examples include alicyclic hydrocarbon groups represented by the following formulas. The bonding position of the alicyclic hydrocarbon groups represented by the following formulas may be any position. TIFF2025048784000128.tif49165L b1Among these hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. Examples of the group that combines two or more groups selected from the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group include a group that combines the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group, a group that combines the above-mentioned chain hydrocarbon group with the above-mentioned aromatic hydrocarbon group, a group that combines the above-mentioned alicyclic hydrocarbon group with the above-mentioned aromatic hydrocarbon group, a group that combines the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group with the above-mentioned aromatic hydrocarbon group, and ... the above-mentioned combined groups. The group that combines the alicyclic hydrocarbon group with the aromatic hydrocarbon group may be a condensed ring. L b2 The divalent hydrocarbon group is a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, or a group combining two or more of these groups, and is formed by removing one hydrogen atom to form one or more Y b1 Examples of such groups include groups that bond to the L b2 The divalent chain hydrocarbon group, the divalent alicyclic hydrocarbon group, the divalent aromatic hydrocarbon group, and the divalent group consisting of two or more of these groups are each, within the range permitted by the number of carbon atoms, L b1 Examples of the alkyl group include groups in which one hydrogen atom has been removed from the chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups exemplified above, and groups in which two or more of these groups have been combined. L b1 and L b2 The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L b1 and L b2 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L b1 and L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a combination of an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrogen group and aromatic hydrocarbon group of b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified in 1. When the alicyclic hydrocarbon groups and aromatic hydrocarbon groups do not have a substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 The substituents that the methyl group in Y may have include a halogen atom, a cyano group, a hydroxyl group, and a nitro group. b1 Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, or a nitro group (-CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-). b1 The number of carbon atoms in the hydrocarbon group that may be contained in the cyclic hydrocarbon group of Y b1 The number of cyclic hydrocarbon groups is not included in the number of hydrocarbon groups. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group may have as a substituent include linear hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the linear hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the carbon number, b1 Examples of the linear hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group obtained by combining two or more of these groups are given as examples of the linear hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group obtained by combining two or more of these groups. b1Examples of the group in which -CH2- in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group may have as a substituent are replaced with -O-, -S-, -CO- or -SO2-, within the range permitted by the upper limit of the number of carbon atoms, and include the same groups as those exemplified as the group in which -CH2- in the hydrocarbon group of Lb1 is replaced with -O-, -S-, -CO- or -SO2-. b1 The hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group may have as a substituent may constitute a protecting group or leaving group (acid labile group or base labile group) generally used in the art.

[0163] The anion contained in the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-1) or an anion represented by formula (B1-2). TIFF2025048784000129.tif30121[In formula (B1-1), L b2 and Y b1 has the same meaning as in formula (B1). Q b1 , Q b2 , Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the multiple parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb2 represents an integer of 1 to 3. When nb2 is 2 or more, the groups in the parentheses may be the same or different.] Q b1 , Q b2 , Q b3and Q b4 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each preferably independently a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably an integer of 0 to 3, and is preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0164] L b3 As the hydrocarbon group in the formula (B1), within the range permitted by the upper limit of the number of carbon atoms, b1 The same hydrocarbon groups as those exemplified above are included. In formula (B1-1), L b3is preferably a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -S-), and a group combining two or more of these groups, and more preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1). In addition, when the chain hydrocarbon group is replaced by -O- or -CO-, the number of -CH2- contained in the chain hydrocarbon group replaced by -O- or -CO- is preferably 1 to 4, and it is preferable that one -CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO-O-. TIFF2025048784000130.tif1581[In formula (Lb3-1), nb2 has the same meaning as in formula (B1-1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent binding sites, * represents X 1 represents the binding site for In formula (Lb3-1), L b31 As long as the chain hydrocarbon group has the upper limit of the number of carbon atoms, L b1Examples of the chain hydrocarbon groups include the same chain hydrocarbon groups as those exemplified in the chain hydrocarbon groups 1. In formula (Lb3-1), W b3 The alicyclic and aromatic hydrocarbon groups of L are as long as the upper limit of the carbon number permits. b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are given below. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group may have and W b1 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are b1 The substituents which the hydrocarbon group may have include the same groups as those exemplified above. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b1 The alicyclic hydrocarbon group and aromatic hydrocarbon group of are preferably the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below. In the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below, * and ** represent a bonding site, * represents X 1 Or L b31 represents a bonding site with L, and ** represents a hydrogen atom, a substituent, or L b2 At least one ** represents a binding site for L b2 represents a bonding site with the alicyclic hydrocarbon group. In the alicyclic hydrocarbon groups represented below, -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-. When -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-, it is preferable that an ether ring, an ester ring (lactone), a carbonate ring, a sultone ring or an acetal ring is formed. TIFF2025048784000131.tif37168In formula (B1-1), L b2is preferably a single bond or an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and b21 -X 2 -L b22 -**(L b21 and L b22 one of X represents an alkanediyl group having at least 1 to 6 carbon atoms, and the other represents a single bond or an alkanediyl group having 1 to 6 carbon atoms; 2 represents -O-, -CO-O-, -O-CO-, or -O-CO-O-; * and ** represent binding sites; ** represents Y b1 where L b21 , X 2 and L b22 The total number of carbon atoms is 12 or less. In formula (B1-A1), Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is preferably a group represented by the following formulae (Y1) to (Y36). In formulae (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, R represents an alkyl group having 1 to 4 carbon atoms. Yc is a hydrogen atom or Y b1 represents a substituent that the cyclic hydrocarbon group may have, and * represents L b2The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents, although these are not specifically shown in the following formulae. TIFF2025048784000132.tif83166

[0165] The anion contained in the salt represented by formula (B1-1) is preferably an anion represented by formula (B1-A1-1) to formula (B1-A1-85) (hereinafter, may be referred to as "anion (B1-A1-1)" depending on the formula number), and more preferably an anion represented by any of formulas (B1-A1-1) to (B1-A1-4), (B1-A1-9), (B1-A1-10), (B1-A1-24) to (B1-A1-33), (B1-A1-36) to (B1-A1-40), and (B1-A1-47) to (B1-A1-85). TIFF2025048784000133.tif216160

[0166] TIFF2025048784000134.tif249152

[0167] TIFF2025048784000135.tif254164

[0168] Here, R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 L is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 has the same meaning as above. Specific examples of the anion in the salt represented by formula (B1-1) include the anions described in JP-A-2010-204646.

[0169] Preferred anions contained in the salt represented by formula (B1) include the anions represented by formulas (B1a-1) to (B1a-70). Among them, the anions represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) are preferred. TIFF2025048784000136.tif185163

[0170] TIFF2025048784000137.tif252166

[0171] TIFF2025048784000138.tif99156

[0172] The anion represented by formula (B1-2) is represented by the following formula. TIFF2025048784000139.tif2396[In formula (B1-2), L b2 and Y b1 has the same meaning as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced with -O- or -CO-. nb4 represents an integer of 1 to 5. When nb4 is 2 or more, the groups in the multiple parentheses may be the same or different. nb3 represents an integer of 0 to 4, and when nb3 is 2 or more, a plurality of R b1 They may be the same or different. However, 1≦nb4+nb3≦5 is satisfied.

[0173] In formula (B1-2), L b2 Hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group include, within the upper limit of the carbon number, L in formula (B1). b2 Examples of hydrocarbon groups and Yb1 Examples of the cyclic hydrocarbon group are the same as those of L. b2 Hydrocarbon radical, Y b1 The substituents which the methyl group and the cyclic hydrocarbon group may have are also defined as follows: b2 Hydrocarbon radical, Y b1 Examples of the substituent that the methyl group and the cyclic hydrocarbon group may have include the same as those mentioned above. In formula (B1-A2), L b2 represents preferably a chain hydrocarbon group having 1 to 12 carbon atoms, in which -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and more preferably *-CO-OL b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, in which -CH2- may be replaced by -O- or -CO-, and * is SO3 - represents the bonding site with the phenyl group to which L is bonded. b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. In formula (B1-A2), Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and further preferably Y in formula (B1-A1) b1 Or L b1 Specifically, the groups represented by the above formulae (Y1) to (Y36) are preferred, and the groups represented by the above formulae (Y1) to (Y19) are more preferred.

[0174] In formula (B1-2), n4b is preferably an integer of 1 to 4, more preferably an integer of 1 to 3, still more preferably 1 or 2, and even more preferably 2. When n4b is 1 or 2, -L b2 -Y b1 The bond position of SO3 - It is preferable that the structure be the following structure in which the m-position of the benzene ring is substituted with respect to the bonding position of the above. TIFF2025048784000140.tif28107[In the above formula, L b2 , Y b1 , R b1 , nb3 has the same meaning as in formula (B1-2). In formula (B1-2), when n4b is 2 or more, multiple L b2 and Y b1 It is preferable that each of them represents the same group.

[0175] R b1 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group in which -CH2- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, etc. Specific examples of these are the same as those mentioned above. R b1are each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group, or a methyl group. nb3 is an integer of 0 to 4 (i.e., nb3-1 represents an integer of 0 to 3), preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 More preferably, nb3 is a fluorine atom or an iodine atom. When nb3 is 2, R b1 It is preferable that one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms. b1 It is more preferable that one of them is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0176] Examples of the anion (B1-2) include the following anions. Among them, the anions represented by the formulas (B2a-1) to (B2a-20) are preferred, and the anions represented by the formulas (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. TIFF2025048784000141.tif102153

[0177] TIFF2025048784000142.tif13104[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, in which -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-, and two -L b2’ -Y b1’ Together, A 1 may form a ring comprising: nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom, and when nb5 is 3, A 1 represents a carbon atom. The groups in the brackets may be the same or different. In formula (B2), L b2 ' and Y b1 Examples of L′ in formula (B1-A1) are b2 and Y b1 The same groups as those shown in the above are included. In formula (B2), L b2’ is a single bond, *-L b23 -X 2 -or*-L b23 -X 2 -W 2 -X 3 -(L b23 represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom; X 2 and X 3 each independently represents -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-; W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.) is preferable. In formula (B2), Y b1’is preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or a phenyl group which may have a substituent, and is more preferably a trifluoromethyl group or a group represented by Formulae (Y1) to (Y36) in Formula (B1-A1). nb5 is preferably 2 or 3. In formula (B2), two L b2’ -Y b1’ Together, A 1 When a ring containing the formula (B2') is formed, examples of the anion include an anion represented by the formula (B2'). TIFF2025048784000143.tif21112[In formula (B2'), A 1 , Y b1 ', L b2 'nb5 has the same meaning as in formula (B2). W b4 represents a disulfonylimide ring or disulfonylmethide ring having 3 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced with a fluorine atom.

[0178] Examples of the anion represented by formula (B2) include the following: Among these, the anions represented by formulae (Ba3-1) and (Ba3-2) are preferred. TIFF2025048784000144.tif175164 In another embodiment of the acid generator (B), an anion in which the sulfonate anion in the salt represented by formula (B1) is replaced with a carboxylate anion is also preferably used as the acid generator (B). Examples of the carboxylate anion include the following. TIFF2025048784000145.tif41156

[0179] Z1 + and Z2 + As the organic cation, ZI in formula (I) etc.+ The organic cations mentioned above are also examples of the organic cations mentioned above.

[0180] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, which can be combined arbitrarily. The acid generator (B) is preferably an anion represented by any one of formulas (B1a-1) to (B1a-3), (B1a-7) to (B1a-19), and (B1a-22) to (B1a-70), or an anion represented by any one of formulas (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), and (B1-a3-1) to (B1-a3-20) and a cation (b2-1), a cation (b2-2), a cation (b2-3), a cation (b2-4), or a cation (b2-5).

[0181] The acid generator (B) is preferably one represented by formula (B1-1) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28). Among them, those containing an arylsulfonium cation are preferred, and those represented by formula (B1-1) to formula (B1-3), formula (B1-5) to formula (B1-7), formula (B1-11) to formula (B1-14), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28) are particularly preferred. TIFF2025048784000146.tif247168

[0182] TIFF2025048784000147.tif242160

[0183] TIFF2025048784000148.tif254168

[0184] TIFF2025048784000149.tif254160

[0185] TIFF2025048784000150.tif249163

[0186] TIFF2025048784000151.tif250150

[0187] TIFF2025048784000152.tif186159

[0188] In the resist composition of the present invention, the content of the acid generator (B) is, for example, 0.1% by mass or more and 99.9% by mass or less, preferably 1% by mass or more and 45% by mass or less, more preferably 1% by mass or more and 40% by mass or less, and even more preferably 3% by mass or more and 35% by mass or less, based on the solid content of the resist composition. When the resist composition of the present invention contains the acid generator (B) and a resin (A) described below, the content of the acid generator (B) is, for 100 parts by mass of the resin (A), preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more and 40 parts by mass or less, and even more preferably 3 parts by mass or more and 35 parts by mass or less. In the resist composition of the present invention, when a resin (A) described below is contained, the total content of the salt (I), acid generator (B), etc. is preferably 1 part by mass or more (more preferably 3 parts by mass or more) and preferably 55 parts by mass or less (more preferably 50 parts by mass or less, and even more preferably 45 parts by mass or less) per 100 parts by mass of the resin (A).

[0189] <Solvent (E)> The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more and 99% by mass or less. The content of the solvent (E) can be measured by a known analytical method such as liquid chromatography or gas chromatography.

[0190] Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate, and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone; cyclic esters such as γ-butyrolactone; and the like. One type of the solvent (E) may be used alone, or two or more types may be used.

[0191] <Quencher (C)> Examples of the quencher (C) include salts that generate an acid having a lower acidity than the acid generated from the acid generator (acid generator (B)), and basic nitrogen-containing organic compounds. The content of the quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, still more preferably about 0.1 to 8% by mass, and still more preferably about 0.1 to 7% by mass, based on the solid content of the resist composition.

[0192] The acidity of the salt that generates an acid having a lower acidity than the acid generated from the acid generator is indicated by the acid dissociation constant (pKa). The salt that generates an acid having a lower acidity than the acid generated from the acid generator is usually a salt having an acid dissociation constant of the acid generated from the salt of -3 < pKa, preferably a salt of -1 < pKa < 7, and more preferably a salt of 0 < pKa < 5. Examples of the salt that generates an acid weaker in acidity than the acid generated from the acid generator include the salt represented by the following formula, the salt represented by formula (D) described in JP 2015-147926 A (hereinafter, sometimes referred to as "weak acid inner salt (D)"), and the salts described in JP 2012-229206 A, JP 2012-6908 A, JP 2012-72109 A, JP 2011-39502 A, and JP 2011-191745 A. As the salt that generates an acid weaker in acidity than the acid generated from the acid generator, preferably, it is a salt (salt having a carboxylate anion) that generates a carboxylic acid weaker in acidity than the acid generated from the acid generator, more preferably, it is a weak acid inner salt (D), and even more preferably, among the weak acid inner salts (D), it is a diphenyliodonium salt containing a phenyl group substituted with a carboxylate anion. TIFF2025048784000153.tif95157

[0193] The weak acid inner salt (D) is preferably a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxy anion substituted for at least one of the two phenyl groups bonded to the iodonium cation, and examples of such salts include those represented by the following formula: TIFF2025048784000154.tif1695[In formula (D), R D1 and R D2 each independently represents a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group, or a halogen atom. m' and n' each independently represent an integer of 0 to 4. When m' is 2 or more, a plurality of R D1 may be the same or different, and when n' is 2 or more, a plurality of R D2 may be the same or different.] R D1 and R D2Examples of the hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups. Examples of the chain hydrocarbon group include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, and a nonyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and may be either saturated or unsaturated. Examples of the alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclononyl, and cyclododecyl, norbornyl, and adamantyl groups. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a 1-naphthyl group, a 2-naphthyl group, a 2-methylphenyl group, a 3-methylphenyl group, a 4-methylphenyl group, a 4-ethylphenyl group, a 4-propylphenyl group, a 4-isopropylphenyl group, a 4-butylphenyl group, a 4-t-butylphenyl group, a 4-hexylphenyl group, a 4-cyclohexylphenyl group, an anthryl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Groups formed by combining these groups include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, and aralkyl groups (e.g., phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, and 6-phenyl-1-hexyl group). Examples of the alkoxy group include a methoxy group and an ethoxy group. Examples of the acyl group include an acetyl group, a propanoyl group, a benzoyl group, and a cyclohexanecarbonyl group. Examples of the acyloxy group include the above-mentioned acyl group to which an oxy group (-O-) is bonded. Examples of the alkoxycarbonyl group include the above alkoxy groups bonded to a carbonyl group (-CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom. R D1 and R D2 are each independently preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group or a halogen atom. m' and n' are each preferably an integer of 0 to 2, more preferably 0. When m' is 2 or more, a plurality of R D1 may be the same or different, and when n' is 2 or more, a plurality of R D2 may be the same or different. More specifically, the following salts are included: TIFF2025048784000155.tif72165

[0194] The basic nitrogen-containing organic compound includes amines and ammonium salts. The amines include aliphatic amines and aromatic amines. The aliphatic amines include primary amines, secondary amines, and tertiary amines. Amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, Amines, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine amine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane Examples of the amines include 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridyl sulfide, 4,4'-dipyridyl disulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, and bipyridine. Preferred are aromatic amines such as diisopropylaniline, and more preferred are 2,6-diisopropylaniline. Examples of ammonium salts include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, and choline.

[0195] <Other Ingredients> The resist composition of the present invention may contain components other than the above-mentioned components (hereinafter, sometimes referred to as "other components (F)") as necessary. There are no particular limitations on the other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc., can be used.

[0196] Preparation of Resist Composition The resist composition of the present invention can be prepared by mixing a compound or resin containing a salt represented by formula (I) or a structural unit represented by formula (IP), and optionally a resin (A), an acid generator (B), a resin other than the resin (A), a solvent (E), a quencher (C), and other components (F). The order of mixing is arbitrary and is not particularly limited. The temperature during mixing can be selected from 10 to 40°C depending on the type of resin, the solubility of the resin in the solvent (E), and the like. The mixing time can be selected from 0.5 to 24 hours depending on the mixing temperature. The mixing means is not particularly limited, and stirring and mixing can be used. After mixing the components, it is preferable to filter the mixture using a filter having a pore size of about 0.003 to 0.2 μm.

[0197] <Method for Producing Resist Pattern> The method for producing a resist pattern of the present invention comprises the steps of: (1) applying the resist composition of the present invention onto a substrate; (2) A step of drying the applied composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A step of developing the composition layer after heating. The resist composition can be applied onto a substrate using a commonly used device such as a spin coater. Examples of the substrate include inorganic substrates such as silicon wafers and organic substrates having a resist film or the like formed on the surface. Before applying the resist composition, the substrate may be cleaned, and an anti-reflective film or the like may be formed on the substrate. The composition after coating is dried to remove the solvent and form a composition layer. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-baking), or by using a vacuum device. The heating temperature is preferably 50 to 200°C, and the heating time is preferably 10 to 180 seconds. The pressure during drying under reduced pressure is preferably 1 to 1.0×10 5 It is preferable that the pressure is about Pa. The obtained composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. As the exposure light source, various types can be used, such as those that emit ultraviolet laser light such as KrF excimer laser (wavelength 248 nm), ArF excimer laser (wavelength 193 nm), and F2 excimer laser (wavelength 157 nm), those that convert the wavelength of laser light from a solid laser light source (YAG or semiconductor laser, etc.) to emit harmonic laser light in the far ultraviolet or vacuum ultraviolet range, and those that irradiate electron beams or extreme ultraviolet light (EUV). In this specification, irradiation with these types of radiation may be collectively referred to as "exposure". During exposure, exposure is usually performed through a mask corresponding to the desired pattern. When the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is subjected to a heat treatment (so-called post-exposure bake) in order to promote a deprotection reaction in the acid labile group. The heating temperature is usually about 50 to 200°C, preferably about 70 to 150°C. A chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition after heating. In addition, before development, the steps of applying a resist composition, drying, exposing, and heating may be repeated on the composition layer after exposure. The composition layer after heating is usually developed using a developing device and a developer. Examples of the developing method include a dip method, a paddle method, a spray method, and a dynamic dispense method. The developing temperature is preferably, for example, 5 to 60° C., and the developing time is preferably, for example, 5 to 300 seconds. By selecting the type of developer as follows, a positive resist pattern or a negative resist pattern can be produced. When a positive resist pattern is produced from the resist composition of the present invention, an alkaline developer is used as the developer. The alkaline developer may be any of various alkaline aqueous solutions used in this field. For example, an aqueous solution of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline) may be used. The alkaline developer may contain a surfactant. After development, the resist pattern is preferably washed with ultrapure water, and then water remaining on the substrate and the pattern is removed. When producing a negative resist pattern from the resist composition of the present invention, a developer containing an organic solvent (hereinafter sometimes referred to as an "organic developer") is used as the developer. Examples of organic solvents contained in organic developers include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycol ether solvents such as propylene glycol monomethyl ether; amide solvents such as N,N-dimethylacetamide; and aromatic hydrocarbon solvents such as anisole. The content of the organic solvent in the organic developer is preferably from 90% by mass to 100% by mass, more preferably from 95% by mass to 100% by mass, and further preferably consists essentially of the organic solvent. Among them, the organic developer is preferably a developer containing butyl acetate and / or 2-heptanone. The total content of butyl acetate and 2-heptanone in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and even more preferably substantially only butyl acetate and / or 2-heptanone. The organic developer may contain a surfac...

Claims

1. An acid generator comprising a salt represented by formula (I) or a structural unit represented by formula (IP). [In formula (I) and formula (IP), R １０ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ is a single bond, *-O-**, *-CO-O-**, *-O-CO-**, *-O-CO-O-**, *-CO-NR ５ -**, *-NR ５ -CO-O-**, *-O-CO-NR ５ -** or *-Ax-Ph-Ay-**. R ５ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R １０ represents the bonding site with the carbon atom to which it is bonded. L １１ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X １１ represents a single bond or --CO--. X １２ is *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is R ９ represents the bonding position with. R ９ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. ZI ＋ represents an organic cation.

2. 2. The acid generator according to claim 1, which comprises a salt represented by formula (I') or a structural unit represented by formula (IP'). [In formula (I') and formula (IP'), all symbols have the same meanings as in formula (I) and formula (IP)]

3. X １０ is a single bond or a group represented by the formula (X １０ -1) ~Formula (X １０ 2. The acid generator according to claim 1, wherein the acid generator is a group represented by any one of the following formulas: [Formula (X １０ -1) ~ type (X １０ -10) *, ** are binding sites, * is R １０ represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２０ is -O- or -NR ７ Represents -. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

4. L １１ is an alkanediyl group having 1 to 12 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The alkanediyl group and the cyclic hydrocarbon group each contain —CH ２ - is -O-, -S-, -SO ２ may be replaced by - or -CO-, The acid generator according to claim 1 , wherein the cyclic hydrocarbon group optionally has a substituent.

5. R ９ is a polycyclic hydrocarbon group having 6 to 18 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom (the —CH ２ - is -O-, -CO-, -S- or -SO ２ 2. The acid generator according to claim 1, wherein the aryl group is a aryl group having 6 to 12 carbon atoms and which is optionally substituted with -; or a hydroxyl group, an acid labile group or a halogen atom.

6. A resist composition comprising the acid generator according to any one of claims 1 to 5.

7. Contains a resin containing a structural unit represented by formula (IP), The resist composition according to claim 6, wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit represented by formula (a4-A) and / or a structural unit represented by formula (a2-D). [In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １１ represents a single bond or *-CO-O-. １ represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may be bonded to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, and the —CH 2 - may be replaced by -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different. [In formula (a2-D), R a２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ It may be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. R ａ２１ and R ａ２２ each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. However, 1≦nD2+nD22≦5.

8. 7. The resist composition according to claim 6, further comprising a resin containing a structural unit having an acid labile group.

9. Contains a resin containing a structural unit represented by formula (IP), 7. The resist composition according to claim 6, wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit having an acid labile group.

10. The resist composition according to claim 8, wherein the structural unit having an acid labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L ａ１ and L ａ２ are each independently -O- or *-O-(CH ２ ) ｋ１ represents --CO--O--, k1 represents an integer of 1 to 7, and * represents the bonding site with --CO--. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3. [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the hydrocarbon group and the -CH 2 - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2. [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 is a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents --O-- or --S--. s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ , R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form, together with the carbon atoms to which they are attached, a ring having 3 to 20 carbon atoms. X a61 is a single bond, -CO-O-* or -CO-NR ａ６５ - represents *, * represents a bonding site with Ar, R ａ６５ represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. X a62 is a single bond, *-O-L a61 - or *-CO-OL a62 -, * represents a bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

11. The resist composition according to claim 6, further comprising a resin containing a structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ It may be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when na2 is 2 or more, the groups in the multiple parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2.

12. further comprising a second acid generator, 7. The resist composition according to claim 6, wherein the second acid generator comprises a salt represented by formula (B1). [In formula (B1), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO 2 It may be replaced by --or --CO--. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different. Z ＋ represents an organic cation.

13. (1) A step of applying the resist composition according to claim 6 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

14. A salt represented by formula (I): [In formula (I), R １０ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ is a single bond, *-O-**, *-CO-O-**, *-O-CO-**, *-O-CO-O-**, *-CO-NR ５ -**, *-NR ５ -CO-O-**, *-O-CO-NR ５ -** or *-Ax-Ph-Ay-**. R ５ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R １０ represents the bonding site with the carbon atom to which it is bonded. L １１ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X １１ represents a single bond or --CO--. X １２ is *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is R ９ represents the bonding position with. R ９ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. ZI ＋ represents an organic cation.

15. The salt according to claim 14, comprising a salt represented by formula (I'): [In formula (I'), all symbols have the same meaning as in formula (I)]

16. X １０ is a single bond or a group represented by the formula (X １０ -1) ~Formula (X １０ The salt according to claim 14, wherein the group is any one of the groups represented by any one of the following formulas: [Formula (X １０ -1) ~ type (X １０ -10) *, ** are binding sites, * is R １０ represents the bonding site with the carbon atom to which it is bonded. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２０ is -O- or -NR ７ Represents -. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

17. L １１ is an alkanediyl group having 1 to 12 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 12 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The alkanediyl group and the cyclic hydrocarbon group each contain —CH ２ - is -O-, -S-, -SO ２ may be replaced by - or -CO-, The salt according to claim 14 , wherein the cyclic hydrocarbon group optionally has a substituent.

18. R ９ is a polycyclic hydrocarbon group having 6 to 18 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom (the —CH ２ - is -O-, -CO-, -S- or -SO ２ 15. The salt according to claim 14, which is an aromatic hydrocarbon group having 6 to 12 carbon atoms and having a hydroxy group, an acid labile group or a halogen atom, wherein the aryl group is substituted with -.

19. A resin containing a structural unit represented by formula (IP): [In the formula (IP), R １０ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ is a single bond, *-O-**, *-CO-O-**, *-O-CO-**, *-O-CO-O-**, *-CO-NR ５ -**, *-NR ５ -CO-O-**, *-O-CO-NR ５ -** or *-Ax-Ph-Ay-**. R ５ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, * represents R １０ represents the bonding site with the carbon atom to which it is bonded. L １１ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. X １１ represents a single bond or --CO--. X １２ is *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is R ９ represents the bonding position with. R ９ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. ZI ＋ represents an organic cation.

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