Substrate processing apparatus, method for manufacturing semiconductor device, and program

Abstract

To provide a technique that suppresses the decrease in work efficiency during an initial position setting operation of a substrate processing apparatus.SOLUTION: The substrate processing apparatus includes: a plurality of transport sections having one or more transport shafts and for transporting substrates or containers housing substrates; an operating section capable of selecting the one or more transport shafts and setting initial positions of the transport shafts; a display section for displaying a setting status of the initial positions of the transport shafts; and a control section having a determination section that determines whether or not the setting of the initial positions of the transport shafts selected by the operating section is completed, and whether or not it is possible to set initial positions of other transport shafts parallel to the selected transport shafts, and capable of controlling notification of results determined by the determination section.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present disclosure relates to a substrate processing apparatus, a method for manufacturing a semiconductor device, and a program.

Background Art

[0002] For example, a substrate processing apparatus and a method for manufacturing a semiconductor device as disclosed in Patent Document 1 are known.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a technique for suppressing a decrease in work efficiency in the initial position setting operation of a substrate processing apparatus.

Means for Solving the Problems

[0005] According to one aspect of the present disclosure, a plurality of transport units that include one or more transport shafts and transport a substrate or a container that houses the substrate, an operation unit that selects one or more of the transport shafts and can set an initial position of the transport shaft, a display unit that displays a setting status of the initial position of the transport shaft, a determination unit that determines completion of setting of the initial position of the transport shaft selected by the operation unit and determines whether it is possible to set the initial position of another transport shaft in parallel with the selected transport shaft, and a control unit that can be controlled to notify a result determined by the determination unit are provided.

Effects of the Invention

[0006] According to the present disclosure, it is possible to suppress a decrease in work efficiency in the initial position setting operation of a substrate processing apparatus.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0008] Hereinafter, an example of an embodiment of the present disclosure will be described with reference to the drawings. In each drawing, the same or equivalent components and parts are given the same reference numerals. Also, the dimensional ratios in the drawings are exaggerated for the convenience of explanation and may be different from the actual ratios.

[0009] In the description of the present disclosure, the "operator" is not limited to a specific person. That is, the "operator" may perform the work alone or in a plurality of persons.

[0010] In the description of the present disclosure, the "transfer shaft" includes the following two meanings. First, it is an axis related to the direction of linearly moving an object to be transferred in a predetermined direction. Second, it is an axis indicating the center of the rotation axis when the object to be transferred is rotationally moved in a predetermined direction.

[0011] In addition, in the present embodiment, any device may be used for the linear motion mechanism that linearly moves the object to be transported and the rotary mechanism that rotationally moves the object to be transported.

[0012] Further, in the following description, "select" means that an operator selects any one of one or more configurations. In other words, "select" means that the operator makes the configuration targeted arbitrarily by the operator be in a state where it can be arbitrarily operated.

[0013] Further, in the following description, "can be selected" means a state in which an operator can operate a selected configuration when any one of one or more transport axes is selected by the operator. Similarly, "cannot be selected" means a state in which an operator cannot operate a selected configuration even when any one of one or more transport axes is selected by the operator.

[0014] Further, in the following description, "selectable" means a state in which an operator can shift to a state where an arbitrary operation can be performed by selecting any one of one or more configurations. Similarly, "not selectable" means a state in which an operator cannot shift to a state where an arbitrary operation can be performed for any configuration.

[0015] FIG. 1 and FIG. 2 show a substrate processing apparatus 10 according to the present embodiment. In the present embodiment, the substrate processing apparatus 10 is configured as a vertical apparatus that performs an oxidation process, a diffusion process, a CVD (Chemical Vapor Deposition) process, etc. on the substrate 2. As a substrate container (substrate carrier) that houses the substrate 2 made of, for example, silicon (Si), a FOUP (Front Opening Unified Pod; hereinafter referred to as the container 4) is used. When the container 4 is used as the substrate carrier, since the substrate 2 is transported in a sealed state, the cleanliness of the substrate 2 is improved.

[0016] (Configuration) As shown in FIGS. 1 and 2, the substrate processing apparatus 10 includes a substrate processing apparatus main body 12, an operation unit 212, a display unit 213, a control unit 200, and a plurality of transfer units.

[0017] The substrate processing apparatus 10 has a substrate processing apparatus main body 12. An loading / unloading unit 14 for loading and unloading (loading / unloading) the container 4 into and out of the substrate processing apparatus main body 12 is provided on the front wall 12a of the substrate processing apparatus main body 12. An loading / unloading port 16 for communicating the inside and outside of the substrate processing apparatus main body 12 is opened on the front wall 12a. The loading / unloading port 16 is configured to be opened and closed by an opening / closing unit 18.

[0018] The loading / unloading unit 14 includes a placement unit 20 on which the container 4 is placed, a transfer mechanism 22 for transferring (sliding) the placement unit 20 in the front-rear direction, and a turning unit 24 configured by, for example, a hinge or the like that enables the placement unit 20 and the transfer mechanism 22 to turn freely. In the present embodiment, two placement units 20 and transfer mechanisms 22 are provided side by side in the left-right direction.

[0019] By the transfer mechanism 22 transferring the placement unit 20 in the front-rear direction, the container 4 placed on the placement unit 20 travels in and out of the substrate processing apparatus main body 12 through the loading / unloading port 16. Thus, the transfer mechanism 22 transfers the placement unit 20 between the loading / unloading position and the delivery position. The loading / unloading position is outside the substrate processing apparatus main body 12 and is a position where the container 4 is transferred with an external transport device (not shown). The delivery position is inside the substrate processing apparatus main body 12 and is a position where the container 4 is transferred with a container transfer device 70 described later.

[0020] The placement unit 20 and the transfer mechanism 22 are turned forward, for example, during maintenance inspection (maintenance) inside the substrate processing apparatus main body 12.

[0021] Inside the substrate processing apparatus main body 12, at the upper rear of the loading / unloading section 14, there is provided a buffer shelf 30 used as a first storage section for storing a plurality of containers 4. The buffer shelf 30 is provided so as to separate the loading / unloading section 14 and the container transfer device 70.

[0022] The buffer shelf 30 is composed of a support plate 32 installed on the inner surface of the front wall 12a and a plurality of shelf plates 34 horizontally supported by this support plate 32. The buffer shelf 30 is configured such that a plurality of containers 4 are placed side by side in the left - right direction on each shelf plate 34.

[0023] At the lower rear inside the substrate processing apparatus main body 12, a sub - housing 40 is provided. The sub - housing 40 forms a space that is fluid - isolated from the space inside the substrate processing apparatus main body 12 by a horizontal wall 42 provided in the front - rear direction and a vertical wall 44 provided in the up - down direction.

[0024] (Transfer section) In the present embodiment, as an example, the plurality of transfer sections include a substrate transfer device 110, a container transfer device 70, a container storage shelf 50, and a jig transfer device 100. Note that the substrate transfer device 110 is an example of the substrate transfer section according to the present embodiment. Also, the container transfer device 70 is an example of the container transfer section according to the present embodiment.

[0025] Above the sub - housing 40, there is provided a container storage shelf 50 used as a second storage section for storing the containers 4.

[0026] As shown in FIGS. 1 and 2, the container storage shelf 50 is a device for storing the container 4 in which the substrate 2 is accommodated inside the substrate processing apparatus 10. The container storage shelf 50 extends in all four horizontal directions and includes a shelf plate 54 on which the container 4 is placed and a second rotation mechanism 148 for moving the shelf plate 54 in a predetermined direction. The second rotation mechanism 148 is a rotation mechanism that rotates the shelf plate 54 with the up - down direction as the rotation axis. The shelf plate 54 is configured such that when the shelf plate 54 on which the container 4 is placed rotates by the second rotation mechanism 148, up to four of the plurality of containers 4 can be placed on a single shelf plate 54.

[0027] In other words, the container storage shelf 50 is a transport unit having a total of one transport shaft that rotates and moves with the vertical direction as the rotation axis. Further, the container storage shelf 50 is an example of a shelf in the present embodiment. Further, the second rotation mechanism 148 is an example of a rotatable rotation axis in the present embodiment.

[0028] Also, the shelf board 54 is intermittently rotated by the second rotation mechanism 148, and the containers 4 placed on the shelf board 54 are sequentially sent to the front position (front side).

[0029] On the vertical wall 44 of the sub-casing 40, two substrate loading ports 60 for loading and unloading (loading and unloading) the substrate 2 into and out of the sub-casing 40 from the container 4 are provided in the vertical direction. The substrate loading port 60 is provided with a container opening / closing device 62 for attaching and detaching the lid of the container 4 to open and close the container 4. Further, on the vertical wall 44, a loading / unloading port 64 for communicating the substrate 2 inside and outside the sub-casing 40 is opened corresponding to the substrate loading port 60.

[0030] Inside the substrate processing apparatus main body 12, a container transfer device 70 for transferring the container 4 is provided between the buffer shelf 30 and the container storage shelf 50.

[0031] As shown in FIGS. 1 and 2, the container transfer device 70 is a device for transferring the container 4 in which the substrate 2 is accommodated inside the substrate processing apparatus 10. The container transfer device 70 includes a mounting table 86 on which the container 4 is placed, and a fourth linear motion mechanism 145, a fifth linear motion mechanism 146, and a sixth linear motion mechanism 147 for moving the mounting table 86 in a predetermined direction.

[0032] The fourth linear motion mechanism 145 is a linear motion mechanism that linearly moves the mounting table 86 in the front-rear direction. The fifth linear motion mechanism 146 is connected to the fourth linear motion mechanism 145 and is a linear motion mechanism that moves the mounting table 86 in the vertical direction together with the fourth linear motion mechanism 145. The sixth linear motion mechanism 147 is connected to the fifth linear motion mechanism 146 and is installed on the substrate processing apparatus main body 12, and is a linear motion mechanism that moves the mounting table 86 in the left-right direction together with the fourth linear motion mechanism 145 and the fifth linear motion mechanism 146.

[0033] In other words, the container transfer device 70 is a transfer unit having a total of three transfer shafts, namely, a transfer shaft for driving in the front-rear direction, a transfer shaft for driving in the vertical direction, and a transfer shaft for driving in the left-right direction. Further, the container transfer device 70 transfers the container 4 placed on the container storage shelf 50 in the present embodiment and places the container 4 on the container storage shelf 50. Further, the fourth linear motion mechanism 145 is an example of a vertical axis that can move in the vertical direction in the present embodiment. Further, the fifth linear motion mechanism 146 is an example of a left-right axis that can move in the left-right direction in the present embodiment.

[0034] A heater unit 90 is vertically installed at the upper rear part inside the substrate processing apparatus main body 12. Inside the heater unit 90, a process tube 92 that constitutes a processing chamber is concentrically arranged. A gas introduction pipe 94 for introducing a raw material gas, a purge gas, etc. into the process tube 92 and an exhaust pipe 96 for evacuating the inside of the process tube 92 are connected to the process tube 92.

[0035] A support jig transfer device 100 is provided below the heater unit 90 and inside the sub-cabinet 40.

[0036] As shown in FIGS. 1 and 2, the support jig transfer device 100 includes a cap 102 that extends in the horizontal direction and has a substantially disk shape, a boat 104 provided above the cap 102, and a seventh linear motion mechanism 149 that moves the boat 104 in a predetermined direction.

[0037] The cap 102 is configured to seal the lower end opening of the process tube 92 and support the boat 104 in a vertically standing state.

[0038] The boat 104 is adapted to hold a plurality of substrates 2 horizontally with their centers aligned. The boat 104 is configured to be carried into and out of the process tube 92 as the cap 102 is moved up and down by the support jig transfer device 100. The boat 104 is adapted to hold a larger number (e.g., 150) of substrates 2 compared to the number (e.g., 25) of substrates 2 accommodated in one container 4.

[0039] The seventh linear motion mechanism 149 is a linear motion mechanism for moving the boat 104 in the vertical direction. When the cap 102 and the process tube 92 are in close contact and the internal space is sealed, the internal space becomes a processing chamber where the substrate 2 is processed.

[0040] In other words, the support jig transfer device 100 is a transfer unit having a transfer shaft that is driven in the vertical direction. Also, the support jig transfer device 100 supports the substrate 2 transferred from the container 4 by the substrate transfer device 110 in the present embodiment on the boat 104, and the support jig transfer device 100 supporting the substrate 2 is carried into or out of the processing container 92 by the cap 102. Further, the seventh linear motion mechanism 149 is an example of a vertical axis that can move in the vertical direction in the present embodiment.

[0041] A substrate transfer device 110 is provided in the space within the sub-housing 40. The substrate transfer device 110 is configured to transfer the substrate 2 between the substrate loading port 60 and the boat 104.

[0042] As shown in FIGS. 1 and 2, the substrate transfer device 110 is a device for taking in and out the substrate 2 from the container 4 and transferring it to the support transfer device 100. The substrate transfer device 110 includes a base 112 installed in the substrate processing device 10, a tweezer 122 for gripping the substrate 2, a first linear motion mechanism 141, a second linear motion mechanism 143, a first rotation mechanism 142, and a third linear motion mechanism 144 for moving the tweezer 122 in a predetermined direction. The second linear motion mechanism 143 is a linear motion mechanism for linearly moving the tweezer 122 in the vertical direction. The first linear motion mechanism 141 is connected to the second linear motion mechanism 143 and the first rotation mechanism 142, and is a linear motion mechanism for moving the tweezer 122 horizontally (in the front-rear direction when the first rotation mechanism 142 is at the origin position) together with the second linear motion mechanism 143. The first rotation mechanism 142 is connected to the first linear motion mechanism 141 and the third linear motion mechanism 144, and is a rotation mechanism for rotating the tweezer 122 together with the first linear motion mechanism 141 and the second linear motion mechanism 143 with the vertical direction as the rotation axis. The third linear motion mechanism 144 is connected to the first rotation mechanism 142 and the base 112, and is a linear motion mechanism for moving the tweezer 122 in the vertical direction together with the first linear motion mechanism 141, the first rotation drive mechanism 142, and the second linear motion mechanism 143.

[0043] In other words, the substrate transfer device 110 is a transfer unit having a total of four transfer shafts, namely, a transfer shaft driven in the front-rear direction, two transfer shafts driven in the vertical direction, and a transfer shaft rotated with the vertical direction as the rotation axis. Further, the first rotation mechanism 142 is an example of a rotatable rotation shaft in the present embodiment. Further, the first linear motion mechanism 141 is an example of a front-rear shaft movable in the front-rear direction in the present embodiment. Further, the second linear motion mechanism 143 is an example of a vertical axis movable in the vertical direction in the present embodiment. Further, the third linear motion mechanism 144 is an example of a vertical axis movable in the vertical direction in the present embodiment.

[0044] In the following description, when referring to any one of the first linear motion mechanism 141 to the seventh linear motion mechanism 149 and the first rotation mechanism 142 or the second rotation mechanism 148, it is simply referred to as a "transfer mechanism". That is, selecting or operating any one of the transfer mechanisms refers to selecting or operating the transfer shaft of the transfer mechanism.

[0045] (Control Unit) As shown in FIG. 3, the control unit 200 includes a CPU 201 (Central Processing Unit), which is an example of a processor, and a RAM 202 (Random Access Memory) used as a temporary working area for the CPU 201. Further, when the CPU 201 executes a control program, the control unit 200 functions as a determination unit 203 to be described later. The control unit 200 also includes a storage unit 204 that stores a control program for causing the CPU 201 to function as the control unit 200, and an I / O port 205. The CPU 201, the RAM 202, the storage unit 204, and the I / O port 205 are each connected via a bus (not shown).

[0046] As described above, dedicated processors and memories for executing respective processes are allocated to the control unit 200. The CPU 201 reads a control program from the storage unit 204 and executes control over the entire substrate processing apparatus 10 handled by the control unit 200. That is, the control unit 200 in the present embodiment is also an example of a computer.

[0047] The storage unit 204 is an example of a storage device that maintains stored information even when the power supplied to each is cut off. For example, a semiconductor memory is used, but a hard disk may also be used.

[0048] Also, as shown in FIG. 3, a process control unit 220 and a transfer control unit 221 are connected to the I / O port 205.

[0049] The process control unit 220 is a control device for the substrate processing apparatus 10 to execute the processing procedure of the substrate 2. Specifically, the process control unit 220 is connected to devices such as a temperature measurement device and a pressure measurement device (not shown), and a gas control device for applying a process to the substrate 2, such as a process gas or an inert gas.

[0050] As shown in FIG. 3, the conveyance control unit 221 is a control device to which a total of nine drivers, namely, the first linear motion mechanism driver 241, the second linear motion mechanism driver 243, the third linear motion mechanism driver 244, the fourth linear motion mechanism driver 245, the fifth linear motion mechanism driver 246, the sixth linear motion mechanism driver 247, the seventh linear motion mechanism driver 249, the first rotational motion mechanism driver 242, and the second rotational motion mechanism driver 248, are connected.

[0051] Here, the linear motion mechanism driver is a control device that controls a conveyance mechanism to be controlled when the conveyance unit moves in a specific direction. From the first linear motion mechanism driver 241 to the seventh linear motion mechanism driver 249, they respectively correspond to the first linear motion mechanism 141 to the seventh linear motion mechanism 149. For example, when receiving an instruction from the control unit 200, the first linear motion mechanism driver 241 shown in FIG. 3 drives the first linear motion mechanism 141 that moves the tweezers shown in FIGS. 1 and 2 in the front-rear direction. The same applies to other linear motion mechanism drivers and rotational motion mechanism drivers.

[0052] Also, as shown in FIG. 3, an external communication unit 210, an external storage unit 211, an operation unit 212, and a display unit 213 are connected to the I / O port 205.

[0053] The external communication unit 210 is connected to a communication line and has a communication protocol for transmitting and receiving data with an external device (not shown) connected to the same communication line. The external communication unit 210 performs data communication with the external device according to an instruction from the CPU 201 in the control unit 200.

[0054] The external storage unit 211 is a device that stores various data and the like, provided separately from the storage unit 204 of the control unit 200. The specific configuration of the external storage unit 211 is not particularly limited. As an example, a storage device connected through a network such as NAS (Network Attached Storage) or a portable recording medium such as an SD memory card is used.

[0055] The operation unit 212 is a device that receives instructions from an operator and notifies the received instructions to the CPU 201 of the control unit 200. Examples thereof include buttons provided on the housing of the substrate processing apparatus 10 and an operation pendant connected to the substrate processing apparatus 10. The display unit 213 is a display device that displays information on the substrate processing apparatus 10. Examples thereof include a liquid crystal display or an organic EL (Electro Luminescence) display.

[0056] Regarding the display unit 213 and the operation unit 212, in the present embodiment, as shown in FIG. 4 described later, a touch panel that can be operated by an operator touching the screen will be described as an example. In other words, in the present embodiment, the touch panel is a device that also serves as the display unit 213 and the operation unit 212. Specific descriptions displayed on the touch panel will be described later.

[0057] Note that each component connected to the I / O port 205 is an example, and a component corresponding to the function of the substrate processing apparatus 10 is connected. Note that the component represents an execution unit that executes processing in accordance with the control of a processor such as the CPU 201 and the RAM 202.

[0058] (Display unit) As shown in FIG. 4, on the screen of the display unit 213, a conveyance axis selection area 215, an upright procedure display area 217, a work procedure display area 216, and a progress display area 218 are displayed.

[0059] As shown in FIG. 4 and FIG. 8 described later, in the transfer axis selection area 215, items AI of the transfer mechanism included in the substrate processing apparatus 10 are displayed. More specifically, in the transfer axis selection area 215, the names of the transfer mechanisms included in the substrate processing apparatus 10, which are examples of the items AI, are displayed in alignment in the vertical direction. Further, the item AI of the transfer mechanism displayed in the transfer axis selection area 215 can be selected by the operator using the touch panel. Further, the control unit 200 distinguishes the item AI selected by the operator from the item AI not selected by surrounding the selected item AI with a frame F. Further, a mark indicating the state of the transfer mechanism is attached to the item AI. In other words, the control unit 200 switches the display of the selected item AI by attaching a frame F to the selected item AI. Note that the frame F is a display for distinguishing between the selected item AI and the unselected item AI, and instead of the frame, the background of the area indicated by the frame F, that is, the area selected by the selected item AI, may be displayed differently from the unselected item AI.

[0060] For example, as shown in FIG. 4 and FIG. 8 described later, when the transfer mechanism is calibrated and the distance from the origin position in the machine coordinates of the substrate processing apparatus 10 is known, a mark C indicating the position setting completion state is attached to the transfer mechanism. Further, when the transfer mechanism has not been calibrated and the distance from the origin position in the machine coordinates of the substrate processing apparatus 10 is unknown, a mark I indicating the position setting incomplete state is attached to the transfer mechanism. Further, if the substrate processing apparatus 10 is in the middle of assembly and the transfer mechanism is not assembled to the substrate processing apparatus 10, in other words, if the line is interrupted, a mark A indicating the line cut state is attached to the transfer mechanism.

[0061] Further, in the present embodiment, when the transfer mechanism cannot be selected for the reasons described later, the item AI indicating the transfer mechanism is thinly displayed as the non-selectable display D, indicating that it cannot be selected. For example, in FIG. 4, transfer mechanisms other than the first linear motion mechanism 141 are thinly displayed as the non-selectable display D.

[0062] Note that in the present embodiment, when an operator calibrates the transport mechanism, the operator may select a plurality of transport mechanisms together. The case where a plurality of transport mechanisms can be selected together and the display of the transport axis selection area 215 in that case will be described later.

[0063] In the upright procedure display area 217, a list showing the procedure from the pre - preparation for calibration of the transport axis selected in the transport axis selection area 215 to the storage of information on the initial position at the completion of calibration is displayed. Also, as shown in FIG. 4 and FIG. 8 described later, among the list of procedures, the procedure being executed is displayed with a frame F attached.

[0064] In the work procedure display area 216, for the transport mechanism selected by the operator in the transport axis selection area 215, the work procedure, which is the processing content in the procedure indicated by the frame F in the upright procedure display area 217, is displayed as a work item WI. In other words, the control unit 200 switches the display of the work item WI representing the work in progress to a display different from other work items WI by attaching a frame F to the work item AI. In other words, the control unit 200 switches the display of the work procedure according to the work in progress by attaching a frame F to the work item WI.

[0065] In the progress display area 218, the operations executed during the calibration operation shown in the operation procedure display area 216 for the transport mechanism selected by the operator in the transport axis selection area 215 are displayed. More specifically, in the progress display area 218, the control unit 200 displays the work content that has started to be executed on the transport mechanism and the work that has been completed among the procedures of the calibration operation. For example, in an example of FIG. 8, it is assumed that the operations shown in the operation procedure display area 216 for the first rotation mechanism 142, the second linear motion mechanism 143, and the third linear motion mechanism 144 have started and ended, and "fast forward execution start" and "fast forward execution end" are shown for each transport axis. Further, in an example of FIG. 8, since the work on the first rotation mechanism 142 is further progressing, "origin movement execution start" is also shown. In addition, if the work is not completed normally due to reasons such as the occurrence of an error or a timeout, it may be displayed that the operation has ended abnormally.

[0066] In addition, in the progress display area 218, when the procedure executed by the control unit 200 shifts, a new item is added and displayed. In other words, the control unit 200 switches and displays the progress of the work according to the work in progress by adding and displaying a new item in the progress display area 218.

[0067] Next, the operation of the substrate processing apparatus 10 will be described.

[0068] (Transport operation) When the container 4 is placed on the placement unit 20 at the loading / unloading position, the placement unit 20 is moved to the transfer position by the transport mechanism 22. Along with this, the container 4 is carried into the substrate processing apparatus main body 12 from the loading / unloading port 16.

[0069] The container 4 carried into the substrate processing apparatus main body 12 is transferred by the container transfer device 70 from the placement unit 20 to a predetermined position in the buffer shelf 30 or the container storage shelf 50 and temporarily stored. The containers 4 stored in the buffer shelf 30 and the container storage shelf 50 are transferred by the container transfer device 70 to a predetermined substrate loading port 60. Note that it may be directly transferred from the placement unit 20 to the substrate loading port 60.

[0070] For the container 4 transferred to the substrate loading port 60, the lid is opened by the container opening / closing device 62. In parallel with this, another container 4 is transferred to the other substrate loading port 60.

[0071] When the transfer operation of another container 4 to the lower substrate loading port 60 is performed while the opening operation of the container 4 is being performed at the upper substrate loading port 60, the waiting time due to the replacement operation of the container 4 is shortened as compared with the case where this configuration is not provided.

[0072] When the lid of the container 4 is opened at the substrate loading port 60, the substrate 2 accommodated in this container 4 is transferred (loaded) to the boat 104 by the substrate transfer device 110.

[0073] (Processing operation) The container 4 is repeatedly supplied to the substrate loading port 60, and the substrates 2 accommodated in these plurality of containers 4 are batch-processed while being held on the boat 104.

[0074] When a plurality of predetermined substrates 2 are held on the boat 104, this boat 104 is lifted by the support tool transfer device 100 and carried into the process tube 92. At this time, the cap 102 holding the boat 104 closes the lower end opening of the process tube 92, and the inside of this process tube 92 is hermetically closed.

[0075] When the processing chamber of the process tube 92 is hermetically closed, it is evacuated to a predetermined degree of vacuum by the exhaust pipe 96 and heated to a predetermined temperature by the heater unit 90. Then, a predetermined raw material gas is supplied at a predetermined flow rate through the gas introduction pipe 94. In this way, a predetermined process (for example, formation of a CVD film) is performed on the substrate 2.

[0076] When a predetermined processing time has elapsed, the boat 104 is lowered by the support carrier 100, and the boat 104 is carried out to the standby position. In parallel with the loading / unloading operation of the boat 104 into / from the process tube 92 and the processing operation, the transfer operation of the container 4 by the container carrier 70 is performed. Note that the processing time in this specification means the time for continuing the processing. The same applies in the following description.

[0077] The processed substrate 2 held on the boat 104 is transferred (unloaded) by the substrate transfer device 110 to the container 4 waiting at the substrate loading port 60. Subsequently, the lid of the container 4 is closed by the container opening / closing device 62.

[0078] The container 4 containing the processed substrate 2 is transported by the container carrier 70 to the buffer shelf 30 or the container storage shelf 50.

[0079] The transfer operation of the processed substrate 2 is performed such that the container 4 is repeatedly supplied to the substrate loading port 60, and the processed substrate 2 is accommodated from the boat 104 into these plurality of containers 4.

[0080] At this time, by performing the transfer operation of the substrate 2 from the boat 104 to one (upper or lower) substrate loading port 60 in parallel with the transfer operation of the container 4 to the other substrate loading port 60, the standby time due to the container replacement operation is shortened as compared with the case where this configuration is not provided.

[0081] The container 4 containing the processed substrate 2 is transferred by the container transfer device 70 from the buffer shelf 30 or the container storage shelf 50 to the placement unit 20 at the delivery position. Next, the placement unit 20 is transferred to the loading / unloading position by the transfer mechanism 22, and the container 4 is unloaded outside the substrate processing apparatus main body 12. Note that the container 4 containing the processed substrate 2 may be directly transferred to the placement unit 20 from the substrate loading port 60.

[0082] These operations are performed in accordance with the procedures specified in the program executed by the above-described CPU.

[0083] (Calibration Work) By the way, an operator or user who uses the substrate processing apparatus 10 may perform a calibration operation to grasp the movement amount of the transfer mechanism for the transfer units (substrate transfer device 110, container transfer device 70, container storage shelf 50, and jig transfer device 100) of the substrate processing apparatus 10. Specifically, in order to normally transfer the transfer object, the control unit 200 causes each transfer mechanism to recognize the origin position so that the actual position of the transfer object can be recognized. In the present embodiment, the origin position of each transfer mechanism is an example of the initial position in the present embodiment, and causing the control unit 200 to recognize the origin position of each transfer mechanism is an example of setting the initial position.

[0084] Next, in the present disclosure, the procedure of the calibration operation for each transfer mechanism will be described with reference to FIG. 5.

[0085] (Calibration Operation Procedure) First, the CPU 201 reads a program from the storage unit 204 and starts executing the calibration operation procedure. Then, the CPU 201 proceeds to step S102.

[0086] In step S102, the CPU 201 displays an origin position setting screen on the touch panel screen as shown in FIG. 4 according to the program. Then, the CPU 201 proceeds to step S104.

[0087] Next, the CPU 201 waits in step S104 for the operator to select a transport mechanism. More specifically, the CPU 201 waits for the operator to select one of the transport mechanisms displayed in the transport axis selection area 215. When the operator selects any transport mechanism, the CPU 201 displays the procedure for setting the origin position in the selected transport mechanism in the operation procedure display area 216. That is, the procedure of step S104 is an example of a selection process of selecting, using the operation unit 212, a plurality of transport units that transport the substrate 2 or the container 4 that houses the substrate 2. Then, the CPU 201 proceeds to step S106.

[0088] Next, the CPU 201 executes the origin position setting in step S106. More specifically, the CPU 201 waits for an execution instruction to be input for the procedure displayed in the operation procedure display area 216 by the operator. Also, when an execution instruction is input, the CPU 201 moves the transport object of the selected transport mechanism to the origin position according to the program. For example, in FIG. 4, the CPU 201 moves the tweezers of the first linear motion mechanism 141 at a fast feed until the tweezers reach the origin position. When it is confirmed that the selected transport mechanism (the tweezers of the first linear motion mechanism 141 in FIG. 4) is at the origin position, the CPU 201 proceeds to step S108.

[0089] Next, the CPU 201 stores, in the storage unit 204 as origin position setting information, that the selected transport mechanism has moved to the origin position and the calibration has been completed. More specifically, the CPU 201 stores in the storage unit 204 that the selected transport mechanism has moved to the origin position and the error from the origin of the machine coordinates.

[0090] That is, the procedures from step S106 to step S108 are an example of a setting process for performing initial settings of the selected transport mechanism using the operation unit 212. After the CPU 201 completes step S108, it ends the calibration operation procedure. Although the first linear motion mechanism 141 has been described above, the same applies to other transport mechanisms (the second linear motion mechanism 143 to the seventh linear motion mechanism 149, and the first rotation mechanism 142 or the second rotation mechanism 148).

[0091] Also, the case where the selected transport mechanism moves to the origin position and the calibration operation is completed is an example of a case where the setting is normally completed in the initial position setting in the present embodiment.

[0092] By the way, among the transport mechanisms of the substrate processing apparatus 10, there are those that have a period when the above-described calibration operation should not be executed.

[0093] Specifically, in the present embodiment, when the first linear motion mechanism 141 is not at the origin position and the second linear motion mechanism 143, the third linear motion mechanism 144, or the first rotation mechanism 142 is driven, the tweezers may collide with other components (for example, the support transport device 100, etc.) and be damaged. In this case, the operator will first move the first linear motion mechanism 141 to the origin position for calibration and then calibrate the second linear motion mechanism 143, the third linear motion mechanism 144, and the first rotation mechanism 142.

[0094] Also, for example, during the assembly of the substrate processing apparatus 10, in order to check whether each transport mechanism operates normally, instead of attaching all the drive shafts, there may be a case where the transport mechanism is tested for operation with only one of the transport mechanisms assembled.

[0095] In such a case, it is preferable that the transport mechanism operable by the operator is limited to a predetermined transport mechanism. For example, in the present embodiment, the determination unit 203 configured by the program executed by the CPU 201 of the control unit 200 determines that calibration work can be performed on other transport mechanisms when the operator has completed the calibration work of the first linear motion mechanism 141. On the other hand, the determination unit 203 determines that it is impossible to execute the calibration work on other transport mechanisms when the operator has not completed the calibration work of the first linear motion mechanism 141. Note that the first linear motion mechanism 141 can be said to be a predetermined transport unit in the present embodiment.

[0096] However, when the operator is a skilled technician, in the above-described calibration procedure, there may be a case where a plurality of transport mechanisms are driven simultaneously and the origin positions of the plurality of transport mechanisms are set all at once to shorten the working time.

[0097] In such a case, it is not preferable that the transport mechanism operable by the operator is limited to one specific one and forced to be calibrated one by one.

[0098] Next, the operation of the control unit 200 in the substrate processing apparatus 10 according to the present embodiment will be described with reference to FIGS. 6 to 8.

[0099] (Initial position setting work according to the present embodiment) FIG. 6 is a correspondence table stored in the storage unit 204 according to the present embodiment, indicating that each transport mechanism can be selected simultaneously. More specifically, when an operator selects any one of the transport mechanisms in the left column in FIG. 6, the CPU 201 makes it impossible to select the transport mechanisms other than those described in the right column corresponding to the selected transport mechanism. For example, in FIG. 6, when the first rotation mechanism 142 is selected, it becomes impossible to select the other transport mechanisms except the second linear motion mechanism 143, the third linear motion mechanism 144, the seventh linear motion mechanism 149, and the second rotation mechanism 148. Also, for example, in FIG. 6, when the first linear motion mechanism 141 is selected, it becomes impossible to select the other transport mechanisms. That is, the correspondence table shown in FIG. 6 in the present embodiment is an example of the predefined parameters in the present embodiment.

[0100] More specifically, the CPU 201 notifies the display unit 213 of the availability of selection of other transport mechanisms by switching the indication of the display unit 213 together with other configurations by executing a program. The procedure executed by the control unit 200 will be described with reference to FIG. 7.

[0101] First, as shown in FIG. 7, when an operator selects any one of the transport mechanisms displayed in the transport axis selection area 215, the operation unit 212 notifies the determination unit 203 of the selected transport mechanism as sequence S202. Also, the operation unit 212 notifies the display unit 213 of the selected transport mechanism as sequence S204.

[0102] Next, the determination unit 203 determines, in sequence S206, whether there is a transport mechanism that can be selected simultaneously with the selected transport mechanism based on the correspondence table. In other words, the determination unit 203 determines, in sequence S206, whether other transport mechanisms are valid. That is, the procedure of sequence S206 is an example of a determination step for determining the completion of setting the initial position of the transport mechanism selected by the operation unit 212 in the present embodiment and for determining whether it is possible to set the initial positions of other transport mechanisms in parallel with the selected transport mechanism.

[0103] Also, in sequence S208, the display unit 213 displays the selected transport mechanism among the transport mechanisms displayed in the transport axis selection area 215 by attaching a frame F to the selected transport mechanism.

[0104] Further, in sequence S206, when there are other selectable transport mechanisms, the determination unit 203 transmits the determination result of sequence S206 to the display unit 213 in sequence S212. That is, the procedure of sequence S212 is an example of the step of notifying the determination result in the determination process in the present embodiment.

[0105] Then, in sequence S214, the display unit 213 makes other transport mechanisms other than the other selectable transport mechanisms transmitted from the determination unit 203 in sequence S212 non-selectable. More specifically, as shown in the transport axis selection area 215 in FIG. 8, in sequence S214, the display unit 213 dims the display of other transport mechanisms other than the selectable transport mechanisms as the non-selectable display D.

[0106] Note that when the determination unit 203 determines in sequence S206 that other transport mechanisms are not valid, it does not execute sequence S212. In other words, when sequence S212 is not executed, the display of all other transport mechanisms other than the selectable transport mechanisms is dimmed. That is, the determination unit 203 does not perform sequence S212 and does not transmit to the display unit 213 about other selectable transport mechanisms, which is another example of the step of notifying the determination result in the determination process in the present embodiment.

[0107] The control unit 200 in the present embodiment calibrates a plurality of transport units having a plurality of transport mechanisms by the CPU 201 executing the above series of procedures. Since the above series of procedures can be executed for any of the transport mechanisms of the substrate processing apparatus 10, it can be said that all of the plurality of transport mechanisms are initially set by the above selection procedure.

[0108] (Processing step) In the substrate processing apparatus 10 according to the present embodiment, the substrate 2 is processed using the transport unit in which the transport mechanism has been calibrated by the above-described calibration operation. More specifically, after the operator completes the calibration operation of all the transport mechanisms and inputs the operation to the operation unit 212, the control unit 200 executes the above-described transport operation and processing operation to process the substrate 2 and manufacture the semiconductor device.

[0109] According to the present embodiment, one or more of the following effects can be obtained.

[0110] (Actions and effects) Before starting the substrate processing apparatus 10, the initial positions of the respective transport mechanisms of the plurality of transport units are set in advance. Also, if the order of setting the initial positions of the transport mechanisms of the plurality of transport units is incorrect, the substrate processing apparatus 10 may not operate normally.

[0111] Here, in the substrate processing apparatus 10 according to the present embodiment, by looking at the transport mechanism displayed on the display unit 213, one or more transport mechanisms for which the initial position can be set can be selected by the operation unit 212, so the burden on the operator can be reduced. Also, even if the operator erroneously selects a transport mechanism for which the initial position can be set, the determination unit 203 determines whether the setting of the initial position of the selected transport mechanism is valid or invalid, and the control unit 200 controls to perform the initial setting of the transport mechanism only for the drive shafts determined to be valid. If it is determined to be invalid, it notifies that the setting of the initial position of the selected transport mechanism is invalid, so it is possible to suppress the occurrence of inconveniences during the initial position setting operation.

[0112] Further, according to the substrate processing apparatus 10 according to the present embodiment, by checking whether the initial position is set for a predetermined transport mechanism before operating other transport mechanisms, it is possible to avoid collisions between the transport units and improve the safety of the operation.

[0113] Further, according to the substrate processing apparatus 10 according to the present embodiment, for the selected axis, other selectable axes are set, and it is easy to check other axes that can be selected for the axis selected with reference to the parameters. Further, the parameters are editable, and depending on the device configuration, it is possible to set selectable axes.

[0114] Each transfer unit has various transfer devices, and each transfer device has a plurality of transfer mechanisms.

[0115] Here, according to the substrate processing apparatus 10 according to the present embodiment, it is possible to collectively display the initial settings of each axis of various transfer devices and set the initial positions of a plurality of drive axes in parallel, thereby reducing the burden on the operator and avoiding setting omissions of the drive axes.

[0116] Further, according to the substrate processing apparatus 10 according to the present embodiment, each transfer unit has a plurality of transfer mechanisms, and by enabling the setting of the initial positions of the plurality of transfer mechanisms on the display unit 213, it is possible to reduce the burden on the operator and avoid setting omissions.

[0117] Further, according to the substrate processing apparatus 10 according to the present embodiment, it is possible to select a plurality of transfer mechanisms capable of setting the initial position, which can contribute to improving the work efficiency during device setup.

[0118] Further, according to the substrate processing apparatus 10 according to the present embodiment, when a specific axis is selected, it is possible to select other axes that can be set in parallel with reference to the parameters. And by selecting a plurality of other axes as well, it is possible to change each selected axis and execute the initial setting.

[0119] Therefore, according to the substrate processing apparatus 10 according to the present embodiment, by setting the initial positions of a plurality of axes in parallel, it is possible to contribute to reducing the man-hours for the initial setting of the axes.

[0120] Here, the substrate transfer device 110 also sets its initial position as the transfer unit. According to the substrate processing apparatus 10 according to the present embodiment, since the initial position can be set in parallel with other transfer mechanisms, it can contribute to the improvement of work efficiency. Further, since it is the setting of the initial positions of a plurality of transfer mechanisms within the range where the determination unit 203 has confirmed safety, problems such as collisions between the transfer mechanisms can be avoided.

[0121] Here, the container transfer device 70 also sets its initial position as the transfer unit. Since the initial position can be set in parallel with other transfer mechanisms, it can contribute to the improvement of work efficiency. Further, since it is the setting of the initial positions of a plurality of transfer mechanisms within the range where the determination unit 203 has confirmed safety, problems such as collisions between the transfer mechanisms can be avoided.

[0122] Further, according to the substrate processing apparatus 10 according to the present embodiment, the transfer mechanism is clarified, and an operator can easily confirm the transfer mechanism.

[0123] Further, according to the substrate processing apparatus 10 according to the present embodiment, the transfer mechanism can be selected, and an operator can easily set the initial position of the transfer mechanism.

[0124] Further, according to the substrate processing apparatus 10 according to the present embodiment, the selected transfer mechanism is clarified and can be easily confirmed.

[0125] Further, according to the substrate processing apparatus 10 according to the present embodiment, by writing the work procedure in the work procedure display area 216, the flow of work becomes clear, and even an inexperienced operator can confirm the work.

[0126] Further, according to the substrate processing apparatus 10 according to the present embodiment, by clarifying the work being executed, it becomes easy for an operator to confirm, and even an inexperienced operator can confirm the work.

[0127] Moreover, according to the substrate processing apparatus 10 according to the present embodiment, by displaying the detailed information in the currently executing operation, the detailed flow of the operation becomes clear. Moreover, according to the substrate processing apparatus 10 according to the present embodiment, when a plurality of transfer mechanisms are selected, the status of each transfer mechanism can be confirmed.

[0128] Moreover, according to the substrate processing apparatus 10 according to the present embodiment, by checking the state of the transfer mechanism, it becomes clear which transfer mechanism's initial position is to be set.

[0129] Moreover, according to the substrate processing apparatus 10 according to the present embodiment, by clarifying the transfer mechanism that cannot set the initial position, it can contribute to reducing incorrect operations.

[0130] Moreover, according to the substrate processing apparatus 10 according to the present embodiment, by storing the setting information of the transfer mechanism that has ended normally in the storage unit 204, it is possible to avoid omission of saving the setting information at the time of normal termination by the operator.

[0131] Moreover, the method for manufacturing a semiconductor device according to the present embodiment includes a selection step of selecting, using an operation unit 212, a plurality of transfer units that include one or a plurality of transfer mechanisms and transfer a substrate 2 or a container 4 that houses the substrate 2; a setting step of performing an initial setting of the selected transfer mechanism using the operation unit 212; a determination of completion of setting the initial position of the transfer mechanism selected by the operation unit 212; a determination step of determining whether it is possible to set the initial position of another transfer mechanism in parallel with the selected transfer mechanism; a step of notifying the determination result in the determination step; and a processing step of transferring the substrate 2 by the transfer unit initially set in the selection step and performing processing on the substrate 2.

[0132] According to the method for manufacturing a semiconductor device according to the present embodiment, it is possible to suppress a decrease in work efficiency in the initial position setting operation of the substrate processing apparatus 10.

[0133] Further, the program according to this embodiment includes one or more transport mechanisms, and a selection procedure for selecting a plurality of transport units that transport the substrate 2 or the container 4 that houses the substrate 2 using the operation unit 212, a setting procedure for performing initial settings of the selected transport mechanism using the operation unit 212, a determination of completion of setting the initial position of the transport mechanism selected by the operation unit 212, a determination procedure for determining whether it is possible to perform the initial position setting of another transport mechanism in parallel with the selected transport mechanism, a procedure for notifying the determination result in the determination procedure, and a processing procedure for transporting the substrate 2 by the transport unit initially set by the selection procedure and performing processing on the substrate 2, and causes the control unit 200 to execute them.

[0134] According to the program according to this embodiment, it is possible to suppress a decrease in work efficiency in the initial position setting operation of the substrate processing apparatus 10.

[0135] [Modification Example] In the above description, the determination by the determination unit 203 of whether it is possible to set the initial position of another transport mechanism was determined based on whether the setting to the initial position was completed for a predetermined transport mechanism, but the technology according to the present disclosure is not limited to this. For example, the determination unit 203 may determine whether the setting to the initial position is completed based on an input by the operator to the operation unit 212.

[0136] Also, in the above description, the determination of whether it is possible to set the initial position of the transport mechanism was determined based on a predefined parameter and the state of the selected transport mechanism, but the technology according to the present disclosure is not limited to this. For example, the determination unit 203 may determine whether the setting to the initial position is completed based on an input by the operator to the operation unit 212.

[0137] Also, in the above description, the plurality of transport units were said to include the container transport device 70, the container storage shelf 50, the substrate transport device 110, and the support transport device 100, but the technology according to the present disclosure is not limited to this. For example, if the substrate processing apparatus 10 is capable of transporting the substrate 2, any of the above transport devices may be omitted.

[0138] Also, in the above description, the operation unit 212 was capable of selecting a plurality of transport mechanisms, but the technology according to the present disclosure is not limited thereto. For example, the operation unit 212 may only accept the selection of one transport mechanism at a time.

[0139] Also, in the above description, the control unit 200 was capable of controlling the initial position setting operation for the selected plurality of transport mechanisms to be performed in parallel, but the technology according to the present disclosure is not limited thereto. For example, the control unit 200 may execute the initial position setting operation for the selected plurality of transport mechanisms not in parallel but sequentially for each transport mechanism.

[0140] Also, in the above description, the transport unit was said to include a substrate transport unit for transporting the substrate 2, but the technology according to the present disclosure is not limited thereto. For example, the substrate transport unit may not be included in the transport unit.

[0141] Also, in the above description, the transport unit was said to include a container transport unit for transporting the container 4, but the technology according to the present disclosure is not limited thereto. For example, the container transport unit may not be included in the transport unit.

[0142] Also, in the above description, the display unit 213 was said to have a transport axis selection area 215 capable of arranging and displaying a plurality of items AI, but the technology according to the present disclosure is not limited thereto. For example, the display unit 213 may be a plurality of lamps, and the transport unit may correspond to each lamp.

[0143] Also, in the above description, it was said that the item AI of the transport mechanism was displayed on the display unit 213, but the technology according to the present disclosure is not limited thereto. For example, the display unit 213 may not have a screen display, and the transport mechanism may be indicated by the lighting and extinguishing of lamps.

[0144] Also, in the above description, it has been stated that when the item AI is operated, the transport mechanism corresponding to the item AI is selected. However, the technology according to the present disclosure is not limited to this. For example, the display unit 213 and the operation unit 212 may be separate, and even if the item AI of the display unit 213 is operated, the transport mechanism may not be selected.

[0145] Also, in the above description, it has been stated that the control unit 200 makes the display of the item AI of the selected transport mechanism different from the display of the item AI of the unselected transport mechanism. However, the technology according to the present disclosure is not limited to this. For example, the control unit 200 may keep the display of the item AI of the selected transport mechanism and the display of the item AI of the unselected transport mechanism the same.

[0146] Also, in the above description, it has been stated that the control unit 200 arranges and displays the work item WI indicating the initial position setting work procedure of the selected transport mechanism in the work procedure display area 216. However, the technology according to the present disclosure is not limited to this. For example, the control unit 200 may not display the work item WI indicating the initial position setting work procedure of the transport mechanism in the work procedure display area 216. Also, the control unit 200 may display the work items WI of all the transport mechanisms, not limited to the selected transport mechanism, in the work procedure display area 216.

[0147] Also, in the above description, it has been stated that the control unit 200 switches the display of the work item WI being executed in the work procedure display area 216 to a different display according to the work being executed. However, the technology according to the present disclosure is not limited to this. For example, the control unit 200 may keep the display of the work item WI of the selected transport mechanism and the display of the work item WI of the unselected transport mechanism the same.

[0148] Also, in the above description, it has been stated that the control unit 200 switches and displays the work progress status according to the work being executed. However, the technology according to the present disclosure is not limited to this. For example, the control unit 200 may not display the work progress status on the screen.

[0149] Also, in the above description, the display unit 213 was described as being able to display a line disconnection state, a position setting incomplete state, and a position setting complete state. However, the technology according to the present disclosure is not limited to this. For example, the display unit 213 does not necessarily need to display a line disconnection state, a position setting incomplete state, and a position setting complete state. Also, it may be in a mode where it does not display any of the states.

[0150] Also, in the above description, the control unit 200 was described as making the selection of a conveyance mechanism unavailable when the line of any conveyance mechanism is interrupted. However, the technology according to the present disclosure is not limited to this. For example, the control unit 200 may be made selectable without switching the screen display even when the line of the conveyance mechanism is interrupted.

[0151] Also, in the above description, the operation unit 212 was described as being controllable to store the information of the initial position in the storage unit 204 when the setting is normally completed in the setting of the initial position. However, the technology according to the present disclosure is not limited to this. For example, the setting of the initial position may be in a mode where the control unit 200 automatically stores it in the storage unit 204 without the operation unit 212 receiving the operator's operation.

[0152] Also, in the above description, the program was stored in the storage unit 204. However, the method of providing the program according to the present disclosure is not limited to this. For example, the program may be recorded on a computer-readable recording medium and provided together with the recording medium.

[0153] Regarding these modified examples as well, it is possible to suppress a decrease in work efficiency in the initial position setting operation of the substrate processing apparatus 10.

[0154] In the above-described aspect, an example of forming a film using a batch-type substrate processing apparatus that processes a plurality of substrates at once has been described. The present disclosure is not limited to the above-described aspect, and can be preferably applied, for example, even when forming a film using a single-wafer type substrate processing apparatus that processes one or several substrates at once. Further, in the above-described aspect, an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace has been described. The present disclosure is not limited to the above-described aspect, and can be preferably applied even when forming a film using a substrate processing apparatus having a cold-wall type processing furnace.

[0155] Even when using these substrate processing apparatuses, each process can be performed under the same processing procedures and processing conditions as in the above-described aspect and modified examples, and the same effects as in the above-described aspect and modified examples can be obtained.

[0156] [Other Modified Examples] In the above-described embodiment, the case where the substrate processing apparatus 10 constitutes a batch-type vertical CVD apparatus has been described, but the present disclosure is not limited thereto, and it can be applied to all semiconductor manufacturing apparatuses such as a batch-type vertical diffusion apparatus.

[0157] Further, although the case where the container 4 is used as the substrate storage container of the substrate 2 has been described, the present disclosure is not limited thereto, and a cassette having no opening / closing cap may be used. When using a cassette as the substrate storage container, the installation of the container opening / closing device 62 can be omitted.

[0158] An inlet section for loading a substrate into the substrate processing apparatus main body 12 and an outlet section for unloading a substrate outside the substrate processing apparatus main body 12 may be provided separately, and a transfer mechanism 22 may be provided in at least one of them.

[0159] The substrate loading port 60 is not limited to the upper and lower two stages, and may be provided in only one stage, or may be provided in three or more stages such as the upper, middle, and lower three stages.

Description of Reference Numerals

[0160] 2 Substrate 4 Container 10 Substrate processing apparatus 50 Container storage rack (transport section) 70 Container transport device (transport section) 100 Support tool transport device (transport section) 110 Substrate transport device (transport section) 200 Control unit 203 Judgment unit 212 Operation unit 213 Display unit

Claims

1. A substrate processing apparatus comprising: a plurality of transfer units configured to transfer a substrate or a container accommodating the substrate, the plurality of transfer units including one or more transfer shafts; an operation unit configured to select one or more of the transfer shafts and set an initial position of the selected transfer shaft; a display unit configured to display a setting status of the initial position of the transfer shaft; a determination unit configured to determine whether setting of the initial position of the transfer shaft selected by the operation unit is completed and determine whether it is possible to set the initial position of another transfer shaft in parallel with the selected transfer shaft, and a control unit configured to be capable of controlling to notify a result determined by the determination unit; a substrate processing apparatus.

2. In the substrate processing apparatus according to claim 1, the determination by the determination unit as to whether it is possible to set the initial position of the other transfer shaft is made based on whether setting to the initial position has been completed for the transfer shaft determined in advance. The substrate processing apparatus according to claim 1.

3. In the determination unit, the determination as to whether it is possible to set the initial position of the transfer shaft is made based on a predefined parameter and a state of the selected transfer shaft. The substrate processing apparatus according to claim 1.

4. The plurality of transfer units include: a container transfer device configured to transfer the container placed on a shelf or place the container on the shelf; a container storage shelf in which the container is stored by the container transfer device; a substrate transfer device configured to extract a substrate from the container transferred by the container transfer device or accommodate the substrate in the container; and a support transfer device configured to move the substrate received from the substrate transfer device into a processing container. The substrate processing apparatus according to claim 1.

5. At least one of the plurality of transfer shafts of the transfer unit is a left - right shaft movable in the left - right direction, a front - rear shaft movable in the front - rear direction, a vertical shaft movable in the up - down direction, or a rotatable shaft. The substrate processing apparatus according to claim 1.

6. The operation unit is capable of selecting a plurality of the transfer shafts. The substrate processing apparatus according to claim 1.

7. The control unit is capable of controlling to perform the initial position setting operation for a plurality of selected transfer shafts in parallel. The substrate processing apparatus according to claim 6.

8. The transfer unit includes a substrate transfer unit configured to transfer the substrate. The substrate processing apparatus according to claim 1.

9. The transfer unit includes a container transfer unit configured to transfer the container. The substrate processing apparatus according to claim 1.

10. The display unit displays items of the transfer shafts. The substrate processing apparatus according to claim 1.

11. When the item is operated, the transfer shaft corresponding to the item is selected. The substrate processing apparatus according to claim 10.

12. The display unit has a conveyance axis selection area capable of arranging and displaying a plurality of the items, The control unit makes the display of the item of the selected conveyance axis different from the display of the item of the non-selected conveyance axis. The substrate processing apparatus according to claim 11.

13. The display unit further has a work procedure display area showing the initial position setting work procedure of the selected conveyance axis, The control unit arranges and displays, in the work procedure display area, work items indicating the initial position setting work of the conveyance axis selected in the conveyance axis selection area. The substrate processing apparatus according to claim 12.

14. The control unit switches the display of the work item being executed, which is displayed in the work procedure display area, to a display different from other work items according to the work being executed. The substrate processing apparatus according to claim 13.

15. The display unit further has a progress display area for displaying the progress of the work being executed, The control unit switches and displays the work progress according to the work being executed. The substrate processing apparatus according to claim 13.

16. The display unit can display a line disconnection state indicating that the line of the conveyance axis has been interrupted, a position setting incomplete state indicating that the initial position of the conveyance axis is incomplete, or a position setting complete state indicating that the position setting completion state of the conveyance axis is complete. The substrate processing apparatus according to claim 1.

17. When the line of any of the conveyance axes is interrupted, the control unit makes the selection of that conveyance axis impossible. The substrate processing apparatus according to claim 16.

18. It further has a storage unit for storing information on the initial position, When the setting of the initial position is normally completed in the operation unit, the operation unit can be controlled to store the information on the initial position in the storage unit. The substrate processing apparatus according to claim 1.

19. A selection step of selecting, using an operation unit, a plurality of conveyance units that include one or more conveyance axes and convey a substrate or a container accommodating the substrate; A setting step of performing an initial setting of the selected conveyance axis using the operation unit; A determination step of determining whether the initial position setting of the conveyance axis selected by the operation unit is completed and determining whether it is possible to perform the initial position setting of other conveyance axes in parallel with the selected conveyance axis; A step of notifying the determination result in the determination step. A processing step of transporting the substrate by the transport unit initially set by the selection step and performing processing on the substrate; A method for manufacturing a semiconductor device having the same.

20. A selection procedure for selecting, using an operation unit, a plurality of transport units each having one or more transport axes and transporting a substrate or a container accommodating the substrate; A setting procedure for performing initial setting of the selected transport axis using the operation unit; A determination procedure for determining completion of setting of the initial position of the transport axis selected by the operation unit and determining whether it is possible to perform setting of the initial position of another transport axis in parallel with the selected transport axis; A procedure for notifying the determination result in the determination procedure; A processing procedure for transporting the substrate by the transport unit initially set by the selection procedure and performing processing on the substrate; A program causing a computer to execute the program on a substrate processing apparatus.

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