Fluid Heater

Abstract

The fluid heater is configured to increase the temperature of a process fluid flowing therethrough, the fluid heater includes a plurality of tubes for passing the process fluid through the fluid heater, and one or more heaters are disposed radially inward of the tubes and radiate thermal energy generated by the heaters outward to heat the process fluid.

Description

[Technical field]

[0001] This application claims priority to U.S. Provisional Patent Application No. 63 / 323,103, entitled "FLUID HEATER," filed March 24, 2022, the disclosure of which is incorporated herein by reference in its entirety.

[0002] The present disclosure relates generally to fluid heaters and, more particularly, to fluid heaters used in semiconductor manufacturing. [Background technology]

[0003] A fluid heater is configured to heat a fluid, such as a liquid. For example, a fluid heater can be used to heat a liquid, such as a solvent, during semiconductor manufacturing. Solvents in semiconductor manufacturing are classified into two categories: non-hazardous and hazardous. In semiconductor manufacturing, it is essential to maintain the purity of the heated fluid while appropriately applying heat to the fluid to keep it warm. Summary of the Invention [Means for solving the problem]

[0004] In one aspect of the disclosure, a fluid heater configured to increase a temperature of a process fluid includes a heater housing extending axially between a first housing end and a second housing end, a first manifold assembly disposed within the heater housing and in fluid communication with a fluid inlet of the fluid heater, a second manifold assembly disposed within the heater housing and in fluid communication with a fluid outlet of the fluid heater, a plurality of tubes extending within the heater housing between the first manifold assembly and the second manifold assembly and fluidly connecting the first manifold assembly and the second manifold assembly, and at least one heater disposed within the heater housing, the plurality of tubes being arranged radially outward of the at least one heater.

[0005] In an additional or alternative aspect of the disclosure, a fluid heater configured to increase a temperature of a process fluid includes a heater housing extending axially between a first housing end and a second housing end, a first manifold assembly disposed within the heater housing and in fluid communication with a fluid inlet of the fluid heater, a second manifold assembly disposed within the heater housing and in fluid communication with a fluid outlet of the fluid heater, a core disposed within the heater housing between the first manifold assembly and the second manifold assembly and formed by axially stacking a plurality of thermally conductive blocks, a plurality of tubes penetrating the core between the first manifold assembly and the second manifold assembly and fluidly connecting the first manifold assembly and the second manifold assembly, and at least one heater disposed within the core radially inward of the plurality of tubes.

[0006] In another additional or alternative aspect of the disclosure, a fluid heater configured to increase a temperature of a process fluid includes a heater housing extending axially between a first housing end and a second housing end, a first manifold assembly disposed within the heater housing and in fluid communication with a first fluid port defined by one of the fluid inlet and the fluid outlet, a second manifold assembly disposed within the heater housing and in fluid communication with a second fluid port defined by the other of the fluid inlet and the fluid outlet, a core disposed axially within the heater housing between the first and second manifold assemblies, a plurality of tubes extending through the core, and at least one heater disposed within the core radially inward of the plurality of tubes. The first manifold includes a first inner manifold having a first plurality of fluid openings extending therethrough, a first outer manifold having a first port opening extending therethrough in fluid communication with the first fluid port through the first port opening, and a first flow chamber formed between the first inner manifold and the first outer manifold providing fluid communication between the first port opening and the first plurality of fluid openings. A plurality of tubes extend through the core between the first plurality of fluid openings and the second manifold assembly to fluidly connect the first flow chamber and the second manifold assembly. [Brief description of the drawings]

[0007] [Figure 1A] FIG. 1A is an isometric view of a fluid heater. [Figure 1B] FIG. 1B is a cross-sectional view taken along line BB in FIG. 1A. [Diagram 2] FIG. 2 is a cross-sectional view taken along line BB of FIG. 1A with the end cap and outer housing removed. [Diagram 3] FIG. 3 is an exploded view of the fluid heater. [Figure 4] FIG. 4 is an exploded view of the fluid processing and heater portions of the fluid heater. [Diagram 5] FIG. 5 is an enlarged cross-sectional view of an end of the fluid heater. [Figure 6A] FIG. 6A is a first isometric view of an inner manifold of a manifold assembly. [Figure 6B] FIG. 6B is a second isometric view of the inner manifold of the manifold assembly. [Figure 7A] FIG. 7A is a first isometric view of an outer manifold of the manifold assembly. [Figure 7B] FIG. 7B is a second isometric view of the outer manifold of the manifold assembly. [Figure 8A] FIG. 8A is an isometric view of a first end block of the core. [Figure 8B] FIG. 8B is an isometric view of the second end block of the core. [Figure 9] FIG. 9 is a cross-sectional view of a fluid heater. [Figure 10] FIG. 10 is a cross-sectional view of a fluid heater. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] The present disclosure generally relates to fluid heaters. For example, fluid heaters of the present disclosure may be used to heat fluids utilized in semiconductor manufacturing. Such fluid heaters may be used to heat liquid solvents, among other options. Fluid heaters according to the present disclosure include separate passages for conveying a fluid through the fluid heater. The fluid heater further includes an internal heater that generates heat that is applied to the fluid. The heater is disposed inside the separate passages such that heat radiates outward from the heater to the fluid.

[0009] Components may be considered to be radially overlapping if they are located at a common axial position along the axis. A radial line extending orthogonally from the axis passes through each radially overlapping component. Components may be considered to be axially overlapping if they are located at a common radial and circumferential position relative to the axis. An axial line parallel to the axis passes through axially overlapping components. Components may be considered to be circumferentially overlapping if they are aligned about the axis, i.e., if a circle about the axis passes through the circumferentially overlapping components.

[0010] FIG. 1A is an isometric view of a fluid heater 10. FIG. 1B is a cross-sectional view of the fluid heater 10 taken along line BB in FIG. 1A. FIGS. 1A and 1B are taken together. The fluid heater 10 includes a heater housing 12, end caps 14a, 14b, legs 16, fluid ports 18a, 18b, purge ports 20, electrical ports 22, a manifold assembly 24, a core 26, insulation 28, clamps 30, tubes 32, a heater 34, and sensors 36a, 36b, and 36c (collectively referred to herein as "sensors 36"). The core 26 includes end blocks 27a, 27b, and a mid-block 27c (collectively referred to herein as "block 27" or "blocks 27").

[0011] The fluid heater 10 is configured to receive a process fluid, such as a semiconductor manufacturing liquid, from one of the fluid ports 18a and 18b and to flow the process fluid out of the other of the fluid ports 18a and 18b. The fluid heater 10 increases the temperature of the process fluid flowing between the fluid ports 18a and 18b. The fluid heater 10 may be configured to increase the temperature of any process fluid, including volatile flammable solvents. The fluid heater 10 may be utilized to heat a solvent. The fluid heater 10 may be utilized to heat isopropyl alcohol (IPA), DuPont™ Plasma Solv® EKC (e.g., EKC265, EKC830, EKC270), acetone, ethanol, toluene, methyl ethyl ketone (MEK), N-methyl-2-pyrrolidone (NMP), and the like. The fluid heater 10 may be utilized in a variety of applications, such as semiconductor manufacturing. Some examples of the fluid heater 10 may be utilized in explosive environments. For example, the fluid heater 10 may be utilized in Division I hazardous areas, Class I, Division II hazardous areas, etc. In some embodiments, the fluid heater 10 may be capable of heating the process fluid to approximately 120° C. (approximately 248° F.) when utilized in a hazardous area. In some examples, the fluid heater 10 may be capable of heating the process fluid to approximately 180° C. (approximately 356° F.) when utilized in a non-hazardous area.

[0012] The fluid heater 10 extends generally along an axis AA. The axis AA is shown along the direction that the fluid heater 10 extends. The axis AA is generally coaxial with the cylindrical body of the fluid heater 10. A radial direction R is also shown generally, it being understood that the radial direction may be any direction perpendicular to the axis AA. In the illustrated example, the heater housing 12 is coaxial with the axis AA.

[0013] The heater housing 12 surrounds the other components of the fluid heater 10. The heater housing 12 can be formed of metal, among other options. As shown, the fluid heater 10 is generally cylindrical. The heater housing 12 may be tubular. The heater housing 12 may be cylindrical and coaxially disposed about an axis AA. An end cap 14a is disposed at a first axial end of the fluid heater 10, and an end cap 14b is disposed at a second axial end of the fluid heater 10. The end caps 14a and 14b each interface with the heater housing 12 and define an outer shape of the fluid heater 10.

[0014] The fluid ports 18a and 18b are configured to allow process fluid to enter and exit the fluid heater 10. The fluid port 18a is located at a first end of the fluid heater 10. The fluid port 18a can be configured as an inlet or an outlet for the process fluid to enter or exit the fluid heater 10. The fluid port 18b is located at a second end of the fluid heater 10. The fluid port 18b can be the other of the inlet or outlet for the process fluid to enter or exit the fluid heater 10. The fluid port 18b is generally opposite the fluid port 18a, and the process fluid enters the fluid heater 10 through either the fluid port 18a or the fluid port 18b and exits the fluid heater 10 through the other of the fluid port 18a or the fluid port 18b.

[0015] In the illustrated example, fluid port 18a is configured as the inlet port of fluid ports 18a and 18b, and fluid port 18b is configured as the outlet port of fluid ports 18a and 18b. Fluid port 18a is configured to be vertically lower than fluid port 18b in the illustrated example. As will be described in more detail below, such a configuration facilitates the flow of process fluid through flow passages arranged circumferentially around core 26.

[0016] In the illustrated example, the fluid port 18a passes through the end cap 14a. The fluid port 18a, in this example, includes a fitting 38a that passes through the end cap 14a. In the illustrated example, the fluid port 18b passes through the end cap 14b. In this example, the fluid port 18b includes a fitting 38b that passes through the end cap 14b. The fittings 38a and 38b may be mechanically connected to the end caps 14a and 14b, respectively, such that the end caps 14a and 14b support the fittings 38a and 38b. The fittings 38a and 38b interface with the manifold assembly 24 and form a fluid connection between the manifold assembly 24 and the fitting 38 to pass the process fluid therethrough. In some examples, the fittings 38a and 38b are not fixedly connected to the manifold assembly 24. For example, fittings 38a and 38b can be threadably connected to end caps 14a and 14b to abut manifold assembly 24 with a contact seal. In some examples, sealing components such as crush seals can be placed between fittings 38a and 38b and manifold assembly 24. Fitting 38a is located at the bottom dead center position of end cap 14a and fitting 38b is located at the top dead center position of end cap 14b.

[0017] The leak sensor 37 is configured to detect a leak of the process fluid. The leak sensor 37 can be mounted proximate an inlet port of the fluid port 18a or the fluid port 18b. In the illustrated example, the leak sensor 37 is located proximate the fluid port 18a. The leak sensor 37 can be a fiber optic sensor, among other options.

[0018] The fluid heater 10 includes an electrical port 22. The electrical port 22 is formed at a second end of the fluid heater 10. The electrical port 22 passes through the end cap 14b and provides a passage for electrical wiring that can extend to the interior of the fluid heater 10. Although the electrical port 22 is shown passing through the end cap 14b, it is understood that the electrical port 22 can be located at other locations on the fluid heater 10, such as on the end cap 14b, among other options. The electrical port 22 includes a fitting 38c that is connected directly to the end cap 14b. The fitting 38c is attached to and supported by the end cap 14b. The electrical wiring passes through the fitting 38c. The fitting 38c is not in contact with the manifold assembly 24. The insulation 28 is located directly between the electrical port 22 and the fitting 38c in the illustrated example.

[0019] The fluid heater 10 includes a purge port 20. The purge port 20 provides an opening through which a purge fluid, such as an inert gas (e.g., nitrogen), can flow into and out of the interior of the fluid heater 10. The purge gas flows through the fluid heater 10 to purge oxygen from the interior of the fluid heater 10 and provide an inert environment that inhibits combustion. The purge gas can flow through the purge port 20 in one of the end caps 14a and 14b into a purge path 40 and through the other purge port 20 in the end caps 14a and 14b out of the purge path 40. In the illustrated example, an axial portion of the purge path 40 is formed radially within the heater housing 12 and radially outside the core 26. The purge path 40 is radially narrowed and does not extend into the core 26. The radial thickness of the purge path 40 along a radial line extending away from the axis AA is less than the radial thickness of the insulation 28. The radial thickness of the purge passages 40 is less than the radial thickness of the core 26. The narrowness of the purge passages 40 reduces the volume of purge gas required to effectively purge the interior of the fluid heater 10.

[0020] In the illustrated example, end cap 14a has multiple purge ports 20 formed therein and end cap 14b has a single purge port 20 formed therein. However, it will be understood that all examples are not so limited. For example, end cap 14a and end cap 14b may include the same number of purge ports 20. Also, end cap 14b may include a greater number of purge ports 20 than end cap 14a. In the illustrated example, a first one of the purge ports 20 on end cap 14b forms one of the inlets and outlets for the purge fluid, and a purge port 20 on end cap 14a forms the other of the inlets and outlets for the purge fluid to flow through purge path 40 of fluid heater 10. A second one of the purge ports 20 on end cap 14b forms a sensor port through which the pressure of the purge gas can be measured. The purge gas flowing through fluid heater 10 is configured to prevent the accumulation of flammable gases. In the illustrated example, the purge port 20 in end cap 14b is configured as an inlet port for purge gas, and the purge port 20 in end cap 14a is configured as an outlet purge port for purge gas. The purge path 40 can be configured such that the outlet purge port 20 is farther from the leg 16 than the inlet purge port 20. Since the purge gas (e.g., nitrogen gas) is lighter than air, locating the inlet purge port 20 below the outlet purge port 20 ensures the flow of the purge gas.

[0021] In the illustrated example, the purge gas flows in a different axial direction through the fluid heater 10 than the process fluid. In the illustrated example, the process fluid flows in a first axial direction along axis AA from fluid port 18a to fluid port 18b. The purge gas flows in a second axial direction, opposite the first axial direction, along axis AA from purge port 20 on end cap 14b to purge port 20 on end cap 14a.

[0022] The legs 16 are configured to support the fluid heater 10 on a support surface. In the illustrated example, the fluid heater 10 includes a pair of legs 16 disposed at first and second axial ends of the fluid heater 10, respectively. In this particular example, the legs 16 are attached to end caps 14a and 14b. In this particular example, the legs 16 are not attached to the heater housing 12. However, in various alternative examples, the legs 16 can be attached to the heater housing 12. In the illustrated example, the legs 16 can be attached to any surface of the heater housing 12. The legs 16 can be disposed on a horizontal surface such that the fluid heater 10 faces horizontally. The legs 16 can also be placed on a vertical surface such that the fluid heater 10 faces vertically.

[0023] The core 26 is disposed within the heater housing 12. The core 26 extends along an axis AA. In the illustrated example, the core 26 extends coaxially with the axis AA. The core 26 may include a cylindrical exterior shape. The core 26 includes one or more blocks 27. The blocks 27 are thermally conductive. The blocks 27 may be formed from a metal, such as aluminum, to easily transfer heat. In this particular example, multiple blocks 27 are stacked along the axis AA. In this example, the blocks 27 are coaxial with the axis AA. The blocks 27 may be formed to have a generally circular exterior surface. In various examples, the core 26 is formed by stacking the blocks 27 axially, although it is understood that some examples may include a single block 27 used to form the body of the core 26.

[0024] In the illustrated example, the core 26 is formed with end block 27a, end block 27b, and intermediate block 27. End block 27a and end block 27b are disposed at axial ends of the core 26 and form the axially most end block 27 of the core 26. Intermediate block 27c is disposed between end block 27a and end block 27b. End block 27a is disposed at a first axial end of the fluid heater 10 and is axially located between end cap 14a and intermediate block 27c. End block 27b is disposed at a second axial end of the fluid heater 10 and is axially located between end cap 14b and intermediate block 27c. Although the core 26 is shown to include intermediate block 27c, it will be understood that all examples are not so limited. For example, the core 26 can be configured such that end block 27a is disposed adjacent to end block 27b without the intervening intermediate block 27c.

[0025] The clamps 30 are disposed at least partially around the core 26. In the illustrated example, the fluid heater 10 includes a pair of clamps 30 in contact with end blocks 27a and 27b. The clamps 30 are configured to interpose at the interface between the heater housing 12 and the core 26 and axially locate the core 26 within the heater housing 12.

[0026] The insulation 28 is disposed around the core 26. The insulation 28 is disposed between the core 26 and the heater housing 12. The insulation 28 may be formed of silicone foam, among other options. In the illustrated example, the insulation 28 is formed of multiple insulating layers laminated together. In the illustrated example, a portion of the insulation 28 is axially overlapped with the core 26 and extends radially. The radially extending portions of the insulation 28 are disposed axially outward from the end blocks 27a and 27b. The radially extending portions of the insulation 28 are disposed between the manifold assembly 24 and the end caps 14a and 14b, respectively. The core 26 is disposed axially between the radially extending portions of the insulation 28. In the illustrated example, the portion of the insulation 28 that axially overlaps the core 26 is disposed axially outward from the manifold assembly 24, and the manifold assembly 24 is disposed axially between the insulation 28 in the radially extending portions thereof. The insulation 28 is also wrapped around the core 26 and radially overlaps the core 26.

[0027] A plurality of tubes 32 extend within the core 26. The plurality of tubes 32 are configured to convey a process fluid between an inlet port of the fluid ports 18a and 18b and an outlet port of the fluid ports 18a and 18b. As the process fluid flows through the tubes 32, the process fluid receives thermal energy and its temperature increases. The plurality of tubes 32 may be arranged around the axis AA. The plurality of tubes 32 may be arranged in a circular configuration. Such a circular arrangement may be coaxial with the axis AA, although not all embodiments are so limited. The tubes 32 may be arranged circumferentially around the axis AA. In some examples, the tubes 32 may be arranged in groups in an arc around the axis AA. Some examples of the fluid heater 10 include stacked tubes 32 that may be radially multi-layered, with some tubes 32 radially spaced apart from other tubes 32 (e.g., radially outward away from the axis AA or radially inward toward the axis AA). In some examples, the tubes 32 can be multi-layered, with one or more tubes 32 radially overlapping one or more other tubes 32. The tubes 32 are formed from a polymer. For example, the tubes 32 can be formed from perfluoroalkoxy (PFA) or other fluoropolymers, among other options.

[0028] The tubes 32 penetrate the blocks 27. Each of the tubes 32 of the plurality of tubes 32 can penetrate each of the blocks 27 in the axial direction. Thus, the tubes 32 can be considered to penetrate the body of the core 26 in the axial direction. In some examples, the tubes 32 can penetrate the core 26 in the axial direction at least partially to the inside of the manifold assembly 24. Thus, a portion of each of the tubes 32 can overlap the block 27 in the radial direction, but other portions of the tubes 32 do not overlap the block 27 in the radial direction. The tubes 32 can penetrate the block 27 in a straight line, and the tubes 32 overlap the block 27 in the radial direction but do not overlap the block 27 in the axial direction. Each of the tubes 32 can extend in the axial direction of the tube. The axial direction of the tube can be arranged parallel to the axis AA. The axial direction of each of the tubes can be arranged parallel to the axial direction of the other tubes.

[0029] The tubes 32 extend through aligned bores that extend through the block 27. Each series of aligned bores may be considered to form a tube passage through which the tubes 32 pass. The material forming the block 27 extends radially inward and outward from the plurality of tubes 32. As such, the tubes 32 are disposed radially within the thermally conductive material of the core 26 and radially outward of the thermally conductive material of the core 26.

[0030] One or more heaters 34 extend inside the core 26. The heaters 34 are electrically powered. For example, the heaters 34 can be resistive heaters, among other options. In the illustrated example, the heaters 34 extend axially partially through the core 26, but do not axially extend axially through the core 26. However, it is understood that all examples are not so limited. In the illustrated example, the heaters 34 align with and extend through bores in the block 27. Each set of aligned bores can be considered to form a heater passage 44 through which the heaters 34 extend. Although one heater 34 is shown in FIG. 1B, it is understood that the fluid heater 10 can include one or more heaters 34 inside the core 26. For example, the fluid heater 10 can include one, two, three, or more heaters 34. In the illustrated example, one or more heaters 34, up to all of the heaters 34, extend parallel along the axis AA. The heaters 34 can be evenly spaced about the axis AA. The heaters 34 can be evenly spaced from the axis AA. For example, an array of three heaters 34 can be spaced 120 degrees apart from one another about the axis AA. In the illustrated example, the heaters 34 extend into each block 27 of the core 26 to directly heat each block 27.

[0031] A sensor 36 extends within the core 26. The sensor 36 may be a thermal sensor that responds to temperature changes. For example, the sensor 36 may be configured to generate data regarding temperature. As shown in this example, the sensor 36 may extend only within one block 27. In the illustrated example, the sensor 36 is located in the end block 27b. However, in other examples, one or more sensors 36 may extend through one or more blocks 27. The sensor 36 is located in a sensor bore 56 formed within the end block 27b. The sensor bore 56 does not axially extend through the end block 27b and, in the illustrated example, is not formed in any block 27 other than the end block 27b.

[0032] The sensors 36 may output signals received by a controller (not shown) to indicate temperature. In the illustrated example, the sensors 36 include a sensor 36a configured as a power modulator (PM) sensor, a sensor 36b configured as an over-temperature (OT) sensor, and a sensor 36c configured as an over-temperature (OT) snap switch. The sensor 36a can measure temperature and provide the information to a system controller. The system controller can adjust power to the heater 34 based on the data generated by the sensor 36a. The sensor 36b is configured to generate temperature information regarding temperatures exceeding pre-set limits and can be configured to initiate a shut-off process when a temperature threshold is exceeded. The sensor 36c is configured to shut off the heater 34 when an over-temperature event is indicated by the sensor 36b.

[0033] The controller is configured to control the supply of electrical energy to the heater 34 to power the heater 34 and generate heat. The controller may have a variable set point. When the controller detects a temperature below the set point, it provides more power to the heater 34 to increase the temperature inside the core 26, and when the controller detects a temperature above the set point, it reduces or turns off energy to the heater 34 to decrease the temperature of the core 26. In some cases, multiple set points may be used with multiple different sensors 36 to take different actions depending on which set point associated with which sensor 36 is exceeded (e.g., a first upper set point for the PM sensor 36a reduces power to decrease temperature, a first lower set point for the PM sensor 36a increases power to increase temperature, and a second upper set point higher than the first upper set point for the OT sensor 36b turns off the fluid heater 10).

[0034] The blocks 27 are configurable to facilitate assembly of the fluid heater 10 and to provide modules that can be assembled together to form fluid heaters 34 having different axial lengths. In the illustrated example, the end blocks 27a and 27b located at the axial ends of the core 26 are individually configured, while the various intermediate blocks 27c are collectively configured. In the illustrated example, the end blocks 27a are configured differently from the end blocks 27b and 27c, the end blocks 27b are configured differently from the intermediate blocks 27c, and each intermediate block 27c is configured identically to the other intermediate blocks 27c. The tube passages 42 are formed by tube bores that pass axially through each block 27, and the tubes 32 pass axially through the core 26.

[0035] End block 27a includes a heater bore that extends entirely through end block 27a. End block 27b includes a heater bore that extends axially partially through end block 27b. The heater bore in end block 27b includes a closed end, and heater 34 does not extend axially through end block 27b. One end of the heater bore through end block 27b is closed. End block 27b further includes sensor bores 56 for various sensors 36 of fluid heater 10. End block 27b is open to heater 34 on a first axial side of end block 27b and closed to heater 34 on a second axial side of end block 27b. End block 27b is open to sensor 36 on a second axial side of end block 27b and closed to sensor 36 on a first axial side of end block 27b.

[0036] Intermediate block 27c connects the axial gap between end block 27a and end block 27b. It is understood that in various examples, end block 27a faces adjacent to end block 27b (which minimizes the axial length of fluid heater 10). A heater bore extends axially through each intermediate block 27c.

[0037] The manifold assemblies 24 are disposed at the first axial end and the second axial end of the fluid heater 10. The manifold assemblies 24 are configured to receive the process fluid from a first fluid port of the fluid ports 18a and 18b and to convey the process fluid to a second fluid port of the fluid ports 18a and 18b through which the process fluid flows out. Each manifold assembly 24 is connected to a plurality of tubes 32. The manifold assemblies 24 are fluidly connected to the tubes 32 to supply the process fluid to the tubes 32 or to receive the process fluid from the tubes 32. The tubes 32 extend inside the manifold assemblies 24 and can be in direct contact with the manifold assemblies 24. The plurality of tubes 32 connect with both manifold assemblies 24. The upstream manifold assembly 24 receives the process fluid from one of the fluid ports 18a and 18b and supplies the process fluid to the tubes 32. The downstream manifold assembly 24 receives the process fluid from the tube 32 and supplies the process fluid to the other of the fluid ports 18a and 18b.

[0038] One of the manifold assemblies 24 is disposed at each axial end of the core 26. The pair of manifold assemblies 24 sandwich the core 26 from both ends. In the illustrated example, the pair of manifold assemblies 24 axially sandwich the axial stack of blocks 27. The manifold assemblies 24 are disposed inside the heater housing 12. The manifold assemblies 24 are disposed directly between the end caps 14a and 14b in the axial direction. In the illustrated example, the core 26 is disposed axially between the manifold assemblies 24. The sensor 36 is disposed between the pair of manifold assemblies 24. In the illustrated example, the sensor 36 overlaps with the core 26 in the radial direction. The sensor 36 does not overlap with the manifold assemblies 24 in the radial direction. The heater 34 is disposed between the manifold assemblies 24. In the illustrated example, the heater 34 overlaps with the core 26 in the radial direction. The heater 34 does not overlap with the manifold assemblies 24 in the radial direction.

[0039] In the illustrated example, the manifold assembly 24 is formed as a ring extending around the axis AA. In the illustrated example, each manifold assembly 24 is coaxial with the axis AA, and a pair of manifold assemblies 24 are assembled in a coaxial arrangement with the axis AA. However, it is understood that not all examples are so limited. In the illustrated example, the manifold assembly 24 is formed as an annular ring extending around the axis AA. In the illustrated example, no portion of the manifold assembly 24 is disposed on the axis AA and does not axially overlap with the axis AA, but it is understood that not all examples are so limited.

[0040] Each manifold assembly 24 defines a flow chamber 46 that conveys process fluid between the fluid ports 18a and 18b associated with that manifold assembly 24 and the tubes 32. In the illustrated example, the flow chamber 46 extends annularly around the axis AA. The flow chamber 46 does not axially overlap the axis AA such that the axis AA does not pass through the wet flow chamber 46. The flow chamber 46 is disposed to surround the axis AA and, in some examples, may be disposed coaxially with the axis AA. The flow chamber 46 may be an annular chamber through which fluid flows entirely around the axis AA.

[0041] Manifold assemblies 24 each include a port opening 48 facing axially outward for fluid communication with fluid ports 18a and 18b. Fittings 38a and 38b extend into port openings 48 to face manifold assembly 24. Manifold assembly 24 includes a single fluid path (facing axially outward) in fluid communication with fluid ports 18a and 18b, and includes multiple fluid paths (facing axially inward) in fluid communication with tube 32. Flow chamber 46 can receive a single input and provide multiple outputs, or multiple inputs and provide a single output.

[0042] During operation of the fluid heater 10, assuming, for example, that fluid port 18a is an inlet and fluid port 18b is an outlet, a process fluid enters the fluid heater 10 through fluid port 18a. The process fluid enters through a port opening 48 of the upstream manifold assembly 24 into a flow chamber 46 of the upstream manifold assembly 24 adjacent to fluid port 18a. The process fluid flows inside the flow chamber 46 to the tube 32. A single inlet stream entering the flow chamber 46 of the upstream manifold assembly 24 is split into multiple outlet streams from the flow chamber 46 of the upstream manifold assembly 24. The upstream manifold assembly 24 splits the inlet stream into a number of outlet streams that is greater than the number of inlet streams. The outlet streams are provided to the tube 32. The upstream manifold assembly 24 may be considered to form a fluid distributor.

[0043] The process fluid flows through the tube 32 to the downstream manifold assembly 24. The process fluid enters the flow chamber 46 of the downstream manifold assembly 24. The process fluid flows inside the flow chamber 46 to the fluid port 18b that interfaces with the downstream manifold assembly 24 at the port opening 48 of the downstream manifold assembly 24. The process fluid exits the fluid heater 10 through the fluid port 18b. The multiple inlet streams entering the flow chamber 46 of the downstream manifold assembly 24 are combined into a single outlet stream exiting the flow chamber 46 of the downstream manifold assembly 24. The downstream manifold assembly 24 combines the multiple inlet streams into a number of outlet streams that is less than the number of inlet streams. In the illustrated example, the downstream manifold assembly 24 combines the multiple inlet streams into a single outlet stream that is provided to the fluid port 18b. The downstream manifold assembly 24 may be considered to form a fluid mixer.

[0044] In the exemplary flow path described above, the fluid port 18a forms the process fluid inlet of the fluid heater 10, and the fluid port 18b forms the process fluid outlet of the fluid heater 10. The fluid port 18a is located vertically below the fluid port 18b in the illustrated example. In some examples, the fluid port 18a may be located at the bottom dead center position of the end cap 14a, and the fluid port 18b may be located at the top dead center position of the end cap 14b. The process fluid filling the fluid heater 10 vertically lower than the process fluid exiting the fluid heater 10 facilitates degassing of the fluid heater 10 during the initial flow of the process fluid. The process fluid fills vertically upward, expelling any gas that may be present in the fluid path as the manifold assembly 24 and the tubes 32 fill with the process fluid. In some examples, the fluid port 18a may be located at the bottom dead center position of the end cap 14a, and the fluid port 18b may be located at the top dead center position of the end cap 14b. However, it will be understood that the flow may be reversed and the inlets and outlets may be reversed, e.g., fluid port 18b may form an inlet and fluid port 18b may form an outlet.

[0045] The two manifold assemblies 24 may be identical to each other or at least similar to each other as described, except that one is upstream of the other and splits the process fluid flow into multiple channels and the other joins the process fluid flow into a single channel. In operation, one of the manifold assemblies 24 receives a single input stream and outputs multiple streams to the multiple channels, and the other of the manifold assemblies 24 receives multiple streams from the multiple channels and outputs a single output stream.

[0046] Each manifold assembly 24 includes a central space 50. Although the central space 50 can be a space filled with gas only, in various embodiments, components can penetrate the central space 50. For example, wiring for the heater 34 and / or the sensor 36 can penetrate the central space 50 of the respective manifold assembly 24. In this manner, each manifold assembly 24 can be considered to define a wiring space. In the illustrated example, wiring for the heater 34 penetrates the central space 50 of the manifold assembly 24 connected to end block 27a, and wiring for the sensor 36 penetrates the central space 50 of the manifold assembly 24 connected to end block 27b.

[0047] The end blocks 27a and 27b at the ends of the axial stack may include recesses 52. Wiring may be routed through the recesses 52 to connect with the heater 34 and / or the sensor 36. The recesses 52 may be considered to form a wiring space. The recesses 52 extend axially into the interior of the body portions of the end blocks 27a and 27b, and the ends of the sensor 36 and the heater 34 are recessed from the end faces of the end blocks 27a and 27b. This configuration provides an axially compact fluid heater 10 that requires less space for installation and operation and reduces material costs. As shown, the heater 34 is accessible only through a first recess 52 formed in the end block 27a, and the sensor 36 is accessible only through a second recess 52 formed in the end block 27b at the end of the core 26 opposite the first recess 52. Having the heater 34 accessible from one axial end and the sensor 36 accessible from the other axial end reduces electromagnetic interference that may affect the sensor 36. This increases the accuracy of the data generated by and operation of the sensor 36, thereby efficiently operating the fluid heater 10.

[0048] In some examples, a potting material, such as epoxy, may be placed within recess 52 to secure wiring and other electrical components. Embedding the electrical components within the potting material electrically insulates them and protects them from shorts, dust, moisture, and the like.

[0049] In the illustrated example, the block 27 includes one or more mating portions 54. The mating portions 54 facilitate the fixing of the multiple blocks 27 to each other. The mating portions 54 also function as a seal to prevent leakage from the multiple tubes 32 from entering radially inward toward the heater 34 and / or the sensor 36. The mating portions 54 can be formed as alternating projections and recesses. The recesses of one block 27 are configured to receive the projections of an adjacent block 27. In some examples, each block 27 can include one or more recesses at one axial end and / or one or more projections at the other axial end to mate with the adjacent block 27. The one or more recesses and mating projections can extend partially or entirely around the axis AA. The one or more recesses can be formed as annular recesses, one or more arcuate recesses, or the like. The one or more projections can be formed as annular projections, one or more arcuate projections, or the like.

[0050] In the illustrated example, each of the intermediate blocks 27c includes a mating portion 54 formed at both axial ends of the intermediate block 27c. Since the end blocks 27a and 27b are adjacent to only one other block 27, they each include one mating portion 54. The mating portions 54 of the end blocks 27a and 27b are oriented axially inward toward the intermediate block 27c and contact the mating portion 54 of the intermediate block 27c. In the illustrated example, each of the protruding mating portions 54 is oriented in a first direction along the axis AA, and each of the recessed mating portions 54 is oriented in an opposite second direction along the axis AA.

[0051] The heater 34 is disposed radially inside the tubes 32. This allows heat to flow radially outward from the heater 34 to the tubes 32. The heater 34 is not disposed radially outside the tubes 32. In the illustrated example, no heating element is disposed radially outside the tubes 32. In the illustrated example, most or essentially all of the heat generated radially inside the tubes 32 is necessarily transferred to the tubes 32 on the radial outside, resulting in high thermal efficiency. If the heaters 34 are disposed radially outside the tubes 32, only a portion of the heat is transferred radially inward toward the tubes 32, approximately half or less. On the other hand, in this configuration, the heat transferred radially outward cannot reach the tubes 32, and therefore cannot heat the process fluid. As a result, thermal efficiency is poor. Since the heater 34 is disposed radially inside the tubes 32, the heat transfer to the tubes 32 is higher, and therefore the heater 34 can be operated at a lower temperature setting. This reduces the strain on the heater 34 and its surrounding components, as well as reducing the power consumption required to achieve the desired heating of the process fluid. Providing less energy to the heater 34 to achieve the same amount of heat transfer also reduces the heat radiated from the fluid heater 10, providing a safer operating environment and reducing the risk of fire.

[0052] During operation, electrical power is supplied to heater 34. Heater 34 generates heat which is conducted through thermally conductive block 27. Tube 32 passes through thermally conductive block 27 and heat is transferred through tube 32 to the process fluid. As the process fluid flows through tube 32 it is heated such that the process fluid exits fluid heater 10 at a higher temperature than the process fluid entering fluid heater 10.

[0053] The wetted portions of the fluid heater 10 are those portions that are directly exposed to and in contact with the process fluid. The wetted portions include the manifold assembly 24 and the tubes 32. The block 27 does not form a wetted portion of the fluid heater 10, so the thermally conductive material of the block 27 is not directly exposed to the process fluid. The process fluid contacts the material of the manifold assembly 24 and the material of the tubes 32. In the illustrated example, the wetted portions of the fluid heater 10 are formed from a polymer, such as PFA.

[0054] The fluid heater 10 offers important advantages. The tubes 32 are radially disposed between the heater 34 and the outer circumferential surface of the fluid heater 10, so that heat radiating radially from the heater 34 flows into the tubes 32 before flowing outside the fluid heater 10 and dissipating to the atmosphere. The tubes 32 are radially disposed outside the heater 34, allowing for efficient heating and reducing power consumption, which reduces the amount of power required to reach a desired temperature. The blocks 27 are stacked along the axis AA. To increase the axial length of the fluid heater 10, one or more intermediate blocks 27c can be disposed between the end blocks 27a and 27b. A fluid heater 34 with a longer axial length has a longer axial length of the core 26, which results in a longer axial length of the tubes 32. Thus, the process fluid has a longer residence time inside the tubes 32, which increases the heating capacity.

[0055] 2 is a cross-sectional view of the fluid paths and heating portions of fluid heater 10. Shown are manifold assemblies 24, core 26, and tubes 32 of fluid heater 10. Core 26 includes blocks 27. Blocks 27 are formed as end blocks 27a, 27b, and intermediate blocks 27c. Each manifold assembly 24 includes an inner manifold 58 and an outer manifold 60.

[0056] Core 26 forms the central portion of the fluid path and heating portion of fluid heater 10. Block 27 is formed as thermally conductive components that are axially stacked to form core 26. Block 27 does not form a wetted portion of fluid heater 10. Process fluid flows inside tubes 32 and passes through block 27, but the process fluid does not contact block 27.

[0057] A heater bore 84 is formed through each block 27 of core 26. The heater bores 84 through each block 27 are axially aligned with one another to form heater passages 44 within which heaters 34 are disposed. Heaters 34 extend into each block 27 of core 26 to heat the thermally conductive material of blocks 27.

[0058] The heater bore 84 is configured to receive and accommodate the heater 34. In the illustrated example, the end block 27a and the intermediate block 27c each include a heater bore 84 that axially extends through the intermediate block 27c and the end block 27a. The heater bore 84 of the end block 27b does not axially extend through the end block 27b. One face of the end block 27b faces outwardly away from the intermediate block 27c and axially overlaps but closes the heater passage 44. The material forming the end block 27b axially overlaps the heater passage 44.

[0059] In the illustrated example, the end block 27a includes a first number of bores (formed by heater bores 84, tube bores 84, and fastener bores 86) that axially extend through the end block 27a, and the end block 27b includes a second number of bores (formed by tube bores 84 and fastener bores 86) that axially extend through the end block 27b. The first number of bores is greater than the second number of bores. In the illustrated example, the intermediate block 27c includes a third number of bores (formed by heater bores 84, tube bores 84, and fastener bores 86) that axially extend through the intermediate block 27c. The first number of bores can be equal to the third number of bores. The third number of bores can be greater than the second number of bores. The end block 27b has fewer openings that axially extend through the end block 27b compared to the end block 27a and the intermediate block 27c. However, in the illustrated example, sensor bore 56 is formed in end block 27b but not in end block 27a or intermediate block 27c, so there are more openings extending into end block 27b than there are openings penetrating into end block 27a or intermediate block 27c.

[0060] In the illustrated example, a seal 62 is disposed at the interface between each block 27. The seal 62 is disposed at the connection between adjacent blocks 27. The seal 62 is disposed radially between the tube 32 that carries the process fluid through the core 26 and the electrical components (e.g., heater 34 and sensor 36) of the fluid heater 10. The seal 62 is disposed radially to prevent the flow of the process fluid that may leak into the electrical components. The seal 62 prevents the flow of the flammable process fluid even if it leaks radially inward toward the heater 34, which may be at a higher temperature than the tube 32 and reach a temperature that may cause the process fluid to burn. The seal 62 can be formed as a crush seal, among other options. In the illustrated example, the seal 62 is disposed at the mating portion 54 between adjacent blocks 27. For example, the seal 62 can be disposed inside the mating portion 54 formed as a recess and interface with the mating portion 54 formed as a protrusion.

[0061] In the illustrated example, each manifold assembly 24 is formed from two pieces. In this example, each manifold assembly 24 is formed from an inner manifold 58 and an outer manifold 60. The relative orientation of inner and outer is with respect to the core 26, with the inner manifold 58 being disposed axially inwardly closer to the core 26 than the outer manifold 60. Each of the inner manifold 58 and the outer manifold 60 is annular in the illustrated example. Each manifold assembly 24 is formed by axially assembling the outer manifold 60 with the inner manifold 58. The inner manifold 58 and the outer manifold 60 are connected at a fluid-tight interface. In the illustrated example, the inner manifold 58 may be considered to form an inner ring and the outer manifold 60 to form an outer ring.

[0062] The two manifold assemblies 24 are identical to one another, but are inverted and mountable to the core 26 such that both inner manifolds 58 face axially inward toward the core 26. In some examples, the inlet manifold assembly 24 may be positioned as a mirror image of the outlet manifold assembly 24. In some examples, the inlet manifold assembly 24 may be positioned as a mirror image of the outlet manifold assembly 24 rotated about axis AA. In the example shown, the two manifold assemblies 24 are mirror images, with one manifold rotated 180 degrees relative to the other manifold assembly 24.

[0063] The flow chamber 46 is formed between the inner manifold 58 and the outer manifold 60. The flow chamber 46 splits or joins the process fluid flowing between one port opening 48 of the outer manifold 60, which is fluidly connected to either the fluid ports 18a or 18b, and a plurality of fluid openings 64 of the inner manifold 58, which are respectively connected to the plurality of tubes 32. Although the outer manifold 60 is shown as including one port opening 48, in various other embodiments, the outer manifold 60 may include multiple port openings 48. However, the number of port openings 48 of the outer manifold 60 is less than the number of fluid openings 64 of the inner manifold 58. The port openings 48 and the fluid openings 64 may be considered to form the fluid openings of the manifold assembly 24.

[0064] The tubes 32 extend between and fluidly connect the flow chambers 46 of the manifold assembly 24. Each block 27 includes a plurality of tube bores 82 extending axially therein. The tube bores 82 extend axially through each block 27. The blocks 27 are aligned about the axis AA such that the tube bores 82 passing through each block 27 are aligned with the tube bores 82 passing through the other blocks 27 to form the tube passages 42. The tube passages 42 open at both axial ends of the core 26. The tubes 32 pass through the tube passages 42 to connect to the inner manifold 58 of the manifold assembly 24. Because the plurality of tubes 32 pass through the core 26, the process fluid does not contact the block 27. The material of the tubes 32 is disposed between the block 27 and the process fluid to isolate the process fluid from the material of the block 27. In this manner, high purity tubing 32, such as tubing 32 formed from PFA, can be used to contact the process fluid, allowing the material of block 27 to be selected based on heat capacity and conductance considerations without concern for degradation of the purity of the process fluid due to contact with the material of block 27.

[0065] In some examples, the surface of the block 27 can be treated to add a blocking layer on the material of the block 27. The blocking layer is configured to inhibit ions of the metallic material forming the block 27 from transferring to the process fluid flowing inside the tube 32. For example, the block 27 can be treated to add a layer of silicon-based material. The blocking layer is disposed inside at least the tube bore 82 of each block 27. In this manner, the blocking layer is disposed between the tube 32 and the material of the block 27. The blocking layer can be formed on the entire surface of the block 27. For example, the blocking layer can be formed on the surface of the tube bore 82, the surface of the heater bore 84, the axial surface of the block 27, the radially outer surface of the block 27, the sensor bore 56, etc. The blocking layer can be formed as a coating. The blocking layer can be formed on the block 27 by a chemical vapor deposition process.

[0066] The process fluid enters the upstream manifold assembly 24 through the port openings 48 in the upstream manifold assembly 24. The process fluid flows through the flow chambers 46 in the upstream manifold assembly 24 and directly from the upstream manifold assembly 24 into the tubes 32. The process fluid flows through the tubes 32 and directly from the tubes 32 into the flow chambers 46 in the downstream manifold assembly 24. The process fluid exits the downstream manifold assembly 24 through the port openings 48 in the downstream manifold assembly 24.

[0067] Figure 3 is an exploded view of fluid heater 10. Figure 4 is an exploded view of the fluid handling and heating portions of fluid heater 10. Figures 3 and 4 are taken together. Fluid heater 10 includes heater housing 12, end caps 14a, 14b, legs 16, fluid ports 18a, 18b, purge ports 20, electrical ports 22, manifold assembly 24, core 26, insulation 28, clamps 30, tubes 32, heater 34, sensor 36, and core connector 66. Core 26 includes block 27.

[0068] Heater housing 12 encloses the other components of fluid heater 10. End caps 14a, 14b are disposed at axial ends of heater housing 12. End caps 14a, 14b are connectable to heater housing 12 by a number of fasteners 68. Legs 16 support fluid heater 10 on a surface. In the illustrated example, legs 16 are connected to end caps 14a, 14b by fasteners 68 or the like.

[0069] A thermal insulation material 28 is disposed around the core 26. The thermal insulation material 28 is configured to insulate the core 26 and thereby retain heat inside the core 26, thereby more efficiently heating the process fluid flowing through the core 26. As shown, the thermal insulation material 28 is formed of multiple layers stacked radially outward from the core 26. In the illustrated example, the thermal insulation material 28 is formed in three parts, with two end parts 28a each having at least one layer that radially and axially overlaps the core 26, and a central part 28b of the thermal insulation material wraps around the core 26 and radially overlaps the core 26. In the illustrated example, the central part 28b of the thermal insulation material does not axially overlap the core 26.

[0070] The clamps 30 mate with the exterior surface of the core 26. The clamps 30 interface with the blocks 27 (e.g., end blocks 27a and 27b) and are configured to axially retain the core 26 within the heater housing 12. Each clamp 30 is axially disposed between a central portion 28b of the insulation and one of the ends 28a of the insulation. In the illustrated example, the clamps 30 are positioned to axially overlap one or more layers of the insulation 28.

[0071] A core 26 is disposed within the heater housing 12. The core 26 is disposed radially inward of the heater housing 12 and the insulation 28. The core 26 is formed by an axial stack of blocks 27. A heater 34 is disposed within the core 26. The heater 34 extends within the blocks 27. A sensor 36 is supported by the core 26. One or more sensors 36 can extend within the core 26, such as within one or more of the blocks 27.

[0072] The blocks 27 are secured together by core connectors 66. The core connectors 66 pass through each block 27 of the core 26. The core connectors 66 are configured to axially secure the stacks of blocks 27 together. The core connectors 66 may be considered to form an axial clamp. In the illustrated example, the core connectors 66 include a rod 70 and a stud 72. The rod 70 extends axially through the blocks 27. The studs 72 are configured to attach to each of the axial ends of the rod 70. In some examples, the rod 70 may include a threaded end configured to threadably engage with the threads of the studs 72 to secure the axial stacks of blocks 27 together.

[0073] The manifold assembly 24 is attached to the axial end of the core 26. In the illustrated example, the first manifold assembly 24 is provided at a first axial end of the core 26, and the second manifold assembly 24 is provided at a second axial end of the core 26. The inner manifold 58 of the manifold assembly 24 is disposed adjacent to the core 26. The outer manifold 60 of the manifold assembly 24 is connected to the inner manifold 58. Each of the fluid ports 18a and 18b is in contact with the outer manifold 60 of the manifold assembly 24 and is in fluid communication with the manifold assembly 24. The manifold assembly 24, including the inner manifold 58 and the outer manifold 60, can be formed from a polymer, such as those forms described above. As described above, this allows contact between the process fluid and metal to be avoided, thereby maintaining the purity of the process fluid. It should be noted that the process fluid can flow through the fluid heater 10 without contacting metal parts. Contact between the solvent and metals and various other types of materials should be avoided to prevent the solvent from reacting with the materials, etc., to produce impurities.

[0074] The leak sensor 37 is disposed proximate to the fluid port 18a. The sensor housing 39 houses the detection components of the leak sensor 37. For example, the sensor housing 39 can house the fiber optic detection components of the leak sensor 37. The sensor housing 39 prevents the light diffusing tip of the fiber optic sensor from contacting the insulation 28, allowing for the location of the detection components to detect process fluid leaks.

[0075] The tubes 32 pass axially through the core 26. The axial length of each tube 32 can be longer than the axial length of the core 26. A longer portion of the tubes 32 protrudes axially from each end of the core 26 and can be connected to an inner manifold 58 of each manifold assembly 24. The tubes 32 are connected to the manifold assemblies 24 such that the process fluid does not directly contact the block 27. The process fluid flows through the core 26 but does not directly contact the core 26. Instead, the process fluid flows inside the tubes 32 that pass through the interior of the core 26 and contacts the tubes 32.

[0076] 5 is an enlarged cross-sectional view of a portion of fluid heater 10. Shown are manifold assembly 24, core 26, fluid ports 18b, heater 34, sensor 36, clamp 30, and insulation 28. Manifold assembly 24 includes inner manifold 58 and outer manifold 60. Portions of end block 27b and mid block 27c of core 26 are shown.

[0077] The manifold assembly 24 is attached to the core 26. In the illustrated example, an inner manifold 58 is in contact with the core 26. The fluid ports 18a are fluidly connected to the manifold assembly 24. In the illustrated example, an outer manifold 60 is in contact with the fluid ports 18a. The outer manifold 60 is connected to the inner manifold 58 to form the manifold assembly 24.

[0078] The flow chamber 46 is formed within the manifold assembly 24 between the inner manifold 58 and the outer manifold 60. The inner manifold 58 and the outer manifold 60 are connected to one another to define the flow chamber 46. In the illustrated example, the inner manifold 58 and the outer manifold 60 are joined at an inner connection 74 and an outer connection 76. The inner connection 74 is formed by a tongue-in-groove connection. In the illustrated example, the outer manifold 60 includes a protrusion that extends into a groove formed in the inner manifold 58. Both the protrusion and the groove can extend in an annular manner all around the axis AA. The inner manifold 58 can be mechanically fused to the outer manifold 60 at the inner connection 74. For example, the inner manifold 58 and the outer manifold 60 can each be formed from the same or similar fluid-transporting material (e.g., a polymer such as PFA) as the tube 32. For example, at least the fluid connection portions of the inner manifold 58 and the outer manifold 60 may be formed from PFA, among other options. A mechanical fusion may be formed by melting the materials of the inner manifold 58 and the outer manifold 60 together at the inner connection 74. The outer connection 76 may be the mating interface. The inner manifold 58 and the outer manifold 60 may be mechanically fused at the outer connection 76, such as by welding, among other fastening techniques.

[0079] A plurality of fluid openings 64 are formed through the inner manifold 58. Each fluid opening 64 is associated with one of the plurality of tubes 32. The fluid openings 64 provide a passageway for process fluid to enter or exit the tubes 32. The fluid openings 64 provide a passageway for the tubes 32 to extend therethrough.

[0080] A recess 52 is formed in the end block 27b. The recess 52 extends inwardly from an axial end face of the end block 27b. A sensor bore 56 opens into the recess 52. As shown, a potting material 78 is disposed within the recess 52 to help secure and seal the electrical connection to the sensor 36 or heater 34 at the opposite end of the fluid heater 10.

[0081] 5 shows the interface between end block 27b and intermediate block 27c. The mating portion 54b of end block 27b is formed as a protrusion, and the mating portion 54a of intermediate block 27c is formed as a recess. The protrusion forming mating portion 54b of end block 27b extends into the recess 52 forming mating portion 54a of intermediate block 27c, thereby positioning and aligning the blocks 27 relative to one another.

[0082] In the illustrated example, end block 27b includes a flange 80 that protrudes from an outer surface of end block 27b. Flange 80 extends radially outward away from axis AA. Flange 80 is configured to interface with clamp 30 and provides a location for clamp 30 to mate with core 26. Flange 80 may be formed as an annular ring that extends completely around the outer surface of end block 27a. However, it is understood that flange 80 may be formed in any configuration for interface with clamp 30. For example, flange 80 may be formed as a series of separate projections, a single projection, an arcuate array of projections, etc. Clamp 30 mates with flange 80 and heater housing 12 to axially position core 26 within heater housing 12.

[0083] Fastener bores 86 extend through the blocks 27. The fastener bores 86 through each block 27 align with the fastener bores 86 of the other blocks 27 to form fastener passages through the core 26. The rods 70 of the core connectors 66 extend through the aligned fastener bores 86 and axially clamp the blocks 27 together to form the core 26.

[0084] Figure 6A is a first isometric view of the inner manifold 58. Figure 6B is a second isometric view of the inner manifold 58. Figures 6A and 6B are taken together. The inner manifold 58 includes fluid openings 64, a ring body 88, an inner surface 90, an outer surface 92, an inner step 94a, an outer step 96a, a boss 98, an inner disk 100, and a disk opening 102.

[0085] The inner manifold 58 is configured to form a part of the manifold assembly 24. The inner manifold 58 at least partially defines the flow chamber 46. The inner manifold 58 abuts a block 27 (e.g., one of end blocks 27a and 27b) to allow the manifold assembly 24 to be attached to the core 26.

[0086] The ring body 88 forms the body of the inner manifold 58. The ring body 88 is configured to extend around the axis AA with the inner manifold 58 assembled to the fluid heater 10. The inner disk 100 is disposed radially within the ring body 88. The inner disk 100 is configured to be removed from the inner manifold 58 prior to assembly of the inner manifold 58 to the fluid heater 10. A disk opening 102 extends through the inner disk 100. The disk opening 102 provides a location for aligning the inner manifold 58 during manufacturing. Removal of the inner disk 100 facilitates installation of the heater 34 and / or sensor 36 through mounting openings 104 in the inner manifold 58. The mounting opening 104 is a central opening through the inner manifold 58 formed by removing the inner disk 100. The heater 34 and / or sensor 36 can be mounted through the mounting opening 104 and wiring for electrical components can pass through the mounting opening 104 .

[0087] Ring body 88 is configured to interface with outer manifold 60 to form manifold assembly 24 and is configured to interface with blocks 27 (e.g., end blocks 27a and 27b) to mount manifold assembly 24 to core 26. Inner surface 90 forms the axial face of inner manifold 58 and is oriented axially inwardly, facing core 26.

[0088] The receiving bore 106 extends into the inner portion 110. The receiving bore 106 is a bore into which a portion of the core connector 66 can extend when the manifold assembly 24 is attached to the core 26. For example, the rod 70 and / or the stud 72 of the core connector 66 can extend into and be at least partially disposed within the receiving bore 106. In the illustrated example, the receiving bore 106 does not extend axially through the inner manifold 58.

[0089] The outer surface 92 forms an axial face of the inner manifold 58 that faces axially outward from the core 26. The outer surface 92 faces axially toward the outer manifold 60. The outer surface 92 at least partially defines the flow chamber 46. The outer surface 92 is at least partially exposed to the process fluid flowing within the flow chamber 46.

[0090] In the illustrated example, a boss 98 is formed on the outer surface 92. The boss 98 projects axially from a base that forms the outer surface 92. The boss 98 projects axially away from its base. The boss 98 is configured to project into the flow chamber 46 relative to its base. In the illustrated example, a plurality of bosses 98 are formed on the outer surface 92. In the illustrated example, the inner manifold 58 includes two arcuate bosses 98, each partially curved around the axis AA. However, it is understood that the inner manifold 58 may include any desired number of bosses 98 (e.g., 0, 1, 2, 3, 4, or more).

[0091] The fluid openings 64 extend axially through the inner manifold 58. In the illustrated example, each of the fluid openings 64 includes a first opening formed in the inner surface 90 and a second opening formed in the outer surface 92. In the illustrated example, each of the second openings is formed in the boss 98, with each of the second openings spaced axially outward from a base of the outer surface 92.

[0092] Each of the fluid openings 64 is configured to receive one of the tubes 32 that extends through the core 26. The tubes 32 may protrude axially through the fluid openings 64. In some examples, the tubes 32 protrude into a second opening formed in the outer surface 92.

[0093] As shown, the plurality of fluid openings 64 are arranged around an axis AA in a circular array about the axis, although in this embodiment the array of tubes 32 does not form a complete circle, but rather a number of semicircular segments.

[0094] In the illustrated example, the fluid openings 64 and the tubes 32 may be considered to be arranged in a plurality of subarrays. In the illustrated example, the fluid openings 64, and therefore the tubes 32, are arranged in a first circumferential subarray and a second circumferential subarray that are arranged in an arc around the axis AA. In such an example, each circumferential subarray of the fluid openings 64 is associated with a single boss 98. Each of the circumferential subarrays extends partially around the axis AA. In the illustrated example, the fluid openings 64 and the tubes 32 are arranged in a first radial subarray and a second radial subarray. The radial subarrays are arranged at different radial distances from the axis AA. In the illustrated example, the fluid openings 64 and the tubes 32 of the first radial subarray are radially displaced from the fluid openings 64 and the tubes 32 of the second radial subarray. The radially arranged and stacked fluid openings 64 and tubes 32 provide a compact configuration of the fluid heater 10 for efficient heating of the process fluid.

[0095] The tubes 32 can be secured to the inner manifold 58. The tubes 32 can be secured to the inner manifold 58 to provide an integrated assembly that prevents leakage of any process fluid between the tubes 32 and the inner manifold 58. For example, the tubes 32 can be fused to the inner manifold 58. For example, the tubes 32 can be fused to the inner manifold 58 by melting the PFA material of the tubes 32 and melting the PFA material of the inner manifold 58 at the interface where the tubes 32 and the inner manifold 58 are fused to one another.

[0096] The inner step 94a is formed on the outer surface 92 of the inner manifold 58. The inner step 94a is configured to contact the inner step 94b of the outer manifold 60 when the inner manifold 58 and the outer manifold 60 are attached together. The inner step 94a is disposed between the axis AA and the fluid opening 64 in the radial direction. In the illustrated example, the inner step 94a is formed as an annular groove. In the illustrated example, the inner step 94a extends over the entire circumferential direction of the axis AA. The inner step 94a extends toward the inside of the outer surface 92 and toward the inner surface 90. The inner step 94a does not penetrate the inner manifold 58 in the axial direction.

[0097] The outer step 96a is formed on the outer surface 92 of the inner manifold 58. The outer step 96a is configured to contact the outer step 96b of the outer manifold 60 when the inner manifold 58 and the outer manifold 60 are attached together. The outer step 96a is disposed radially between the fluid opening 64 and the outer edge 108 of the inner manifold 58. The outer step 96a is disposed radially outward of the inner step 94a. The fluid opening 64 is disposed radially between the inner step 94a and the outer step 96a. The outer step 96a is formed as an annular surface facing axially away from the core 26. In the illustrated example, the outer step 96a extends in the circumferential direction so as to completely surround the axis AA. In some examples, the outer step 96a may be a flat surface disposed in a plane perpendicular to the axis AA.

[0098] Figure 7A is a first isometric view of the outer manifold. Figure 7B is a second isometric view of the outer manifold 60. Figures 7A and 7B are taken together. The outer manifold 60 includes port openings 48, inner step 94b, outer step 96b, inner section 110, outer section 112, flow grooves 114, and a central opening 116.

[0099] The outer manifold 60 is configured to interface with the inner manifold 58 to form the manifold assembly 24. The inner portion 110 of the outer manifold 60 is configured to face axially inward, toward the core 26. The outer portion of the outer manifold 60 is configured to face axially outward, away from the core 26.

[0100] The inner portion 110 is at least partially exposed to the process fluid flowing through the manifold assembly 24. The inner portion 110 at least partially defines the flow chamber 46 through the manifold assembly 24. A flow groove 114 is formed in the inner portion 110. The flow groove 114 is oriented axially inwardly towards the core 26. The flow groove 114 is formed as an annular groove extending annularly all around the axis AA. The flow groove 114 opens axially inwardly towards the core 26. In the illustrated example, the flow groove 114 is a continuous annular chamber without interruptions such that the flow chamber 46 extends annularly all around the axis AA. The flow groove 114 is positioned such that the base of the flow groove 114 is positioned axially further from the inner manifold 58 than the inner connection 74 between the inner manifold 58 and the outer manifold 60, and the base of the flow groove 114 is positioned axially further from the inner manifold 58 than the outer connection 76 between the inner manifold 58 and the outer manifold 60. In the illustrated example, the flow groove 114 is formed as a U-shaped groove, although it will be understood that other configurations are possible. In some examples, the base of the flow groove 114 can be formed as a flat surface in a plane perpendicular to the axis AA.

[0101] The port openings 48 are formed through the outer manifold 60. The port openings 48 extend between the inner portion 110 and the outer portion 112. The port openings 48 are formed through the base of the flow grooves 114 in the illustrated example. The port openings 48 provide a location for the process fluid to enter the flow grooves 114 at the upstream manifold assembly 24 and to exit therefrom at the downstream manifold assembly 24. The port openings 48 may include a dual diameter on the inner surface of the port openings 48. The dual diameter allows the fittings 38a and 38b of the fluid ports 18a and 18b to extend into the larger diameter portion that extends from the outer portion 112 into the port openings 48, facilitating mating of the fittings 38a and 38b with the outer manifold 60. Meanwhile, the smaller diameter portion that extends from the inner portion 110 limits the distance that the fluid ports 18a and 18b can extend into the port openings 48. In some examples, a seal can be disposed within the port opening 48 between the exterior surfaces of the fluid ports 18a and 18b and the surfaces that define the port opening 48.

[0102] A central opening 116 is formed through the outer manifold 60. The central opening 116 provides an accessible opening to the heater 34 and / or sensor 36 for installation, replacement, maintenance, etc. The central opening 116 facilitates maintenance and assembly of the fluid heater 10. Wiring for electrical components can pass through the central opening 116.

[0103] The inner step 94b is formed on the inner portion 110 of the outer manifold 60. The inner step 94b is configured to contact the inner step 94a of the inner manifold 58 when the inner manifold 58 and the outer manifold 60 are attached together. The inner step 94b is disposed radially between the axis AA and the port opening 48. In the illustrated example, the inner step 94b is formed as an annular protrusion. The inner step 94b can be considered to form an axially extending flange. In the illustrated example, the inner step 94b extends entirely around the axis AA. The inner step 94b extends axially away from the inner portion 110. In the illustrated example, the inner step 94b is configured to extend inside the groove that forms the inner step 94a. However, it will be understood that inner step 94b can be formed as a groove extending within inner surface 90, and inner step 94a can be formed as a protrusion configured to extend within the groove of inner step 94b.

[0104] The outer step 96b is formed on the inner surface 90 of the outer manifold 60. The outer step 96b is configured to contact the outer step 96a of the inner manifold 58 when the inner manifold 58 and the outer manifold 60 are attached together. The outer step 96b is disposed radially between the port opening 48 and the outer edge 108b of the outer manifold 60. The outer step 96b is disposed radially outward of the inner step 94a. The port opening 48 is disposed radially between the inner step 94b and the outer step 96b. The outer step 96b is formed as an annular surface oriented in the axial direction toward the core 26. In the illustrated example, the outer step 96b extends entirely in the circumferential direction about the axis AA. The outer step 96b may be formed as a flat surface disposed in a plane perpendicular to the axis AA.

[0105] FIG 8A is an isometric view of end block 27a. FIG 8B is an isometric view of end block 27b. FIG 8A and FIG 8B are taken together. Tube bores 82, heater bores 84, fastener bores 86, block body 122, block face 124a, and block face 124b of each end block 27a and end block 27b are shown. End block 27a includes mating portion 54a. End block 27b includes mating portion 54b.

[0106] End block 27a and end block 27b are configured as the axially closest blocks 27 of core 26 of fluid heater 10. End block 27a and end block 27b can be fitted directly together to form a minimum length core 26. Intermediate block 27c can be attached between end block 27a and end block 27b to form a core 26 with a longer axial length.

[0107] The block faces 124a of the end blocks 27a and 27b are configured to face axially outward relative to the core 26. The block face 124a of the end block 27a is configured to face away from the block face 124a of the end block 27b. Similarly, the block face 124a of the end block 27b is configured to face away from the block face 124a of the end block 27a. The block faces 124b of the end blocks 27a and 27b are configured to face each other and face axially inward. In an example in which the intermediate block 27c is present, the block faces 124a are oriented in a direction away from the intermediate block 27c in the axial direction. In an example in which the intermediate block 27c is not present, the block faces 124b are oriented in an axially inward direction toward the intermediate block 27c.

[0108] The tube bores 82 extend axially through each end block 27a and end block 27b. The protrusions 118 extend axially outward from the block face 124a. In the illustrated example, the tube bores 82 are formed through the protrusions 118. The end blocks 27a and end blocks 27b may include the same number of protrusions 118 as the tube bores 82. The protrusions 118 are configured to contact the inner manifold 58 of the manifold assembly 24 attached to the end blocks 27a and end block 27b. In the illustrated example, the protrusions 118 are configured to extend into the fluid openings 64 of the inner manifold 58 and be at least partially disposed within the fluid openings 64. The protrusions 118 extend into the fluid openings 64 through openings in the inner surface 90 of the inner manifold 58. The tubes 32 protrude from the protrusions 118 into the fluid openings 64 to mate with the inner manifold 58. The projections 118 that extend into the inner manifold 58 are not disposed into the material forming the block 27, minimizing the length of the tubes 32 that are not supported by that material. The projections 118 can be formed as cylindrical projections, among other options.

[0109] The heater bore 84 is formed inside the end block 27a and the end block 27b. In the illustrated example, the heater bore 84 of the end block 27b does not axially pass through the end block 27b. In the illustrated example, the heater bore 84 of the end block 27a passes axially through the end block 27a, the heater 34 passes axially through the heater bore 84 of the end block 27a, and the heater 34 passes axially through the end block 27a. The heater bore 84 of the end block 27b is closed such that the heater 34 terminates inside the heater bore 84 of the end block 27b.

[0110] Fastener bores 86 extend axially through end blocks 27a and 27b. The fastener bores 86 provide openings through which core connectors 66 extend through blocks 27 to axially clamp blocks 27 together to form core 26. In the illustrated example, each end block 27a and 27b includes multiple fastener bores 86. In the illustrated example, two fastener bores 86 are spaced 180° apart.

[0111] Flanges 80 project radially outward from the radially outer surfaces of end blocks 27a and 27b. Flanges 80 abut clamp 30 and are configured to provide a location for clamp 30 to mate with core 26.

[0112] The intermediate block 27c (FIGS. 2B to 5) can be configured similarly to the end blocks 27a and 27b, except that the first axial surface of the intermediate block 27c is configured as the block surface 124b (including the mating portion 54a) of the end block 27a, and the second axial surface of the intermediate block 27c is configured as the block surface 124b (including the mating portion 54b) of the end block 27b. Furthermore, the intermediate block 27c does not include a flange 80 in the illustrated example. The first axial surface of the intermediate block 27c can have an interface with the block surface 124b of the end block 27b or with the second axial surface of the adjacent intermediate block 27c. The second axial surface of the intermediate block 27c can have an interface with the block surface 124b of the end block 27a or with the first axial surface of the adjacent intermediate block 27c. The heater bore 84 and the tube bore 82 of the intermediate block 27c extend axially through the intermediate block 27c.

[0113] 9 is an isometric cross-sectional view of a fluid heater 10' that has a reduced length compared to fluid heater 10. Fluid heater 10' is substantially similar to fluid heater 10 (best shown in FIGS. 1A, 1B, 3, and 4), except that fluid heater 10' has a shorter axial length than fluid heater 10.

[0114] The core 26 of the fluid heater 10' is formed from end blocks 27a and 27b mounted adjacent to and in direct contact with one another. The fluid heater 10' does not include an intermediate block 27c axially between end blocks 27a and 27b. The fluid heater 10' has a shorter axial length than the fluid heater 10, thereby reducing residence time and heat transfer to the process fluid when heated by the fluid heater 10'.

[0115] FIG. 10 is an isometric view of fluid heater 10 and fluid heater 10'', which has an increased length compared to fluid heater 10'.

[0116] The core 26 of the fluid heater 10" is formed from end blocks 27a and 27b and a number of intermediate blocks 27c disposed therebetween. The fluid heater 10" includes a greater number of intermediate blocks 27c than the fluid heater 10, providing a fluid heater with a longer axial length. The fluid heater 10" has a longer axial length than the fluid heater 10, thereby increasing the residence time and heat transfer to the process fluid when heated by the fluid heater 10".

[0117] As best shown in FIGS. 1B, 9, and 10, the fluid heater 10, the fluid heater 10′, and the fluid heater 10″ have similarly configured components and the blocks 27 can be used to form the core 26 with different axial lengths to provide a fluid heater of any length. The intermediate blocks 27c are similarly configured to one another and any desired number (0, 1, 2, 3, 4, or more) of intermediate blocks 27c can be attached between the end blocks 27a and 27b to set the axial length of the core 26. In some examples, twelve or more intermediate blocks 27c are included. The axial length of the fluid heater can be changed by adding or removing intermediate blocks 27c to change the axial length of the core 26. In general, the longer the core 26, the greater the surface area along the multiple tubes 32 for providing heat to the process fluid and the larger (e.g., longer) heater 34 that can be installed to generate more thermal energy for heating the process fluid. A longer core 26 therefore corresponds to a greater thermal capacity.

[0118] Although the present invention has been described with reference to exemplary embodiments, it will be understood by those skilled in the art that various modifications can be made and equivalents can be substituted for elements of the invention without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is not intended that the invention be limited to the particular embodiments disclosed, but it is intended to include all embodiments falling within the scope of the appended claims.

Claims

1. A fluid heater configured to raise the temperature of a process fluid, A heater housing extending in the axial direction between the first housing end and the second housing end, A first manifold assembly is located inside the heater housing and is in fluid communication with the fluid inlet of the fluid heater, A second manifold assembly is located inside the heater housing and is in fluid communication with the fluid outlet of the fluid heater, A plurality of pipes extending into the heater housing between the first manifold assembly and the second manifold assembly, and fluidly connecting the first manifold assembly and the second manifold assembly, A fluid heater comprising: at least one heater disposed inside the heater housing, wherein the plurality of tubes are arranged radially outward from the at least one heater.

2. The fluid heater according to claim 1, wherein the plurality of tubes extend at least partially in a circumferential direction around the at least one heater.

3. The fluid heater according to claim 1, wherein the at least one heater is axially positioned between the first manifold assembly and the second manifold assembly.

4. The fluid heater according to claim 3, wherein the at least one heater does not radially overlap with either the first manifold assembly or the second manifold assembly.

5. The fluid heater according to claim 1, wherein the plurality of tubes are arranged in either a semicircular arrangement or a circular arrangement surrounding the axis.

6. The fluid heater according to claim 1, wherein one or both of the first manifold assembly and the second manifold assembly are each formed from at least one ring.

7. The fluid heater according to claim 6, wherein one or both of the first manifold assembly and the second manifold assembly are each formed from an inner manifold and an outer manifold assembled in the axial direction, the inner manifold and the outer manifold form an annular flow chamber between them, and at least one of the inner manifold and the outer manifold forms the at least one ring.

8. The fluid heater according to claim 7, wherein the inner manifold and the outer manifold are in contact at an inner connection portion and an outer connection portion, and the outer connection portion is located radially outward from the inner connection portion.

9. The fluid heater according to claim 8, wherein the inner connection portion is formed by a projection of one of the inner manifold and the outer manifold extending into the groove of the other of the inner manifold and the outer manifold.

10. The fluid heater according to claim 8, wherein the outer connection portion is formed at the interface where the inner manifold and the outer manifold come into contact.

11. The fluid heater according to any one of claims 6 to 10, further comprising one or more electrical components passing through the at least one ring.

12. The fluid heater according to claim 11, wherein the one or more electrical components include at least one of heater wiring connected to the at least one heater and sensor wiring connected to the at least one sensor.

13. The fluid heater according to claim 1, wherein the first manifold assembly includes a first inner manifold connected to the plurality of pipes and a first outer manifold facing the first inner manifold, and the first inner manifold and the first outer manifold define a first fluid chamber that is in fluid communication with the plurality of pipes.

14. The fluid heater according to claim 13, wherein a first fluid port is connected to the first outer manifold, and the first fluid port forms the fluid inlet.

15. The fluid heater according to claim 13, wherein the first inner manifold includes a plurality of fluid openings that penetrate the first inner manifold axially, and each of the plurality of pipes extends into the interior of each of the plurality of fluid openings.

16. The fluid heater according to claim 15, wherein the plurality of fluid openings are arranged in a first arc-shaped arrangement that partially surrounds and extends around the shaft, and a second arc-shaped arrangement that partially surrounds and extends around the shaft.

17. The fluid heater according to claim 16, wherein the first arc-shaped arrangement is spaced apart from the second arc-shaped arrangement in the circumferential direction.

18. The fluid heater according to claim 16, wherein the first arc-shaped arrangement is arranged radially outward from the second arc-shaped arrangement.

19. The fluid heater according to claim 15, wherein the plurality of fluid openings include a first subset of fluid openings arranged radially inward from a second subset of fluid openings.

20. The fluid heater according to claim 13, wherein the first outer manifold includes a first number of fluid openings configured for the flow of process fluid, and the first inner manifold includes a second number of fluid openings configured for the flow of process fluid, the second number being greater than the first number.

21. The fluid heater according to claim 20, wherein the first number is 1 and the second number is at least 20.

22. The fluid heater according to claim 21, wherein the second number is at least 60.

23. The fluid heater according to claim 1, further comprising a core extending axially inside the heater housing, wherein the plurality of tubes and the at least one heater are arranged inside the core.

24. The fluid heater according to claim 23, wherein the core is formed of a metal that transfers heat from the at least one heater to the plurality of tubes.

25. The fluid heater according to claim 24, wherein the core is formed from a plurality of blocks stacked in the axial direction, and the plurality of tubes extend through the plurality of blocks.

26. The fluid heater according to claim 25, wherein the plurality of blocks include a plurality of fitting portions that are in contact in the axial direction.

27. The fluid heater according to claim 26, wherein the plurality of fitting portions include annular projections that are received inside annular recesses.

28. The fluid heater according to claim 25, wherein the plurality of blocks include a first end block that forms the portion of the core closest in the axial direction to the first manifold assembly, and a second end block that forms the portion of the core closest in the axial direction to the second manifold assembly.

29. The fluid heater according to claim 28, wherein the plurality of blocks further include at least one intermediate block axially positioned between the first end block and the second end block.

30. The fluid heater according to claim 29, wherein the at least one intermediate block comprises a plurality of intermediate blocks.

31. The fluid heater according to claim 28, wherein the first manifold assembly is mounted on the first end block, and the second manifold assembly is mounted on the second end block.

32. The fluid heater according to any one of claims 24 to 31, wherein the core is formed of aluminum.

33. The fluid heater according to claim 1, further comprising a plurality of temperature sensors disposed inside the heater housing.

34. The fluid heater according to claim 33, wherein at least one heater is wired through one of the first manifold assembly and the second manifold assembly, and the plurality of temperature sensors are wired through the other of the first manifold assembly and the second manifold assembly.

35. The fluid heater according to claim 1, wherein the heater housing is cylindrical.

36. The fluid heater according to claim 1, wherein a purge path is formed inside the heater housing, and the purge path is located at least partially radially outward of the plurality of pipes.

37. A fluid heater configured to raise the temperature of a process fluid, A heater housing extending in the axial direction between the first housing end and the second housing end, A first manifold assembly is located inside the heater housing and is in fluid communication with the fluid inlet of the fluid heater, A second manifold assembly is located inside the heater housing and is in fluid communication with the fluid outlet of the fluid heater, Displaced inside the heater housing between the first manifold assembly and the second manifold assembly, the core is formed by stacking a plurality of thermally conductive blocks in the axial direction, A plurality of pipes that penetrate the core between the first manifold assembly and the second manifold assembly and fluidly connect the first manifold assembly and the second manifold assembly, A fluid heater comprising: at least one heater disposed inside the cores radially inward of the plurality of pipes.

38. A fluid heater configured to raise the temperature of a process fluid, A heater housing extending in the axial direction between the first housing end and the second housing end, A first manifold assembly is disposed inside the heater housing and is in fluid communication with a first fluid port formed by one of a fluid inlet and a fluid outlet, A first inner manifold through which a plurality of first fluid openings pass, A first outer manifold having a first port opening through its interior, the first outer manifold having fluid communication with the first fluid port via the first port opening, A first manifold assembly comprising: a first flow chamber formed between the first inner manifold and the first outer manifold, the first flow chamber providing fluid communication between the first port opening and the first plurality of fluid openings; A second manifold assembly is disposed inside the heater housing and is in fluid communication with a second fluid port formed by the other of the fluid inlet and the fluid outlet, Inside the heater housing, a core is axially positioned between the first manifold assembly and the second manifold assembly, A plurality of tubes that penetrate the core between the first plurality of fluid openings and the second manifold assembly, wherein the plurality of tubes fluidly connect the first flow chamber and the second manifold assembly, A fluid heater comprising: at least one heater disposed inside the cores radially inward of the plurality of pipes.

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