Pyroelectric sensor array, user interface device, and human sensor

Abstract

To provide a pyroelectric sensor array capable of improving position resolution in a three dimensional space without unreasonable curvature and deformation of a member.SOLUTION: The pyroelectric sensor array 1 includes a substrate 10 having flexibility and a plurality of pyroelectric sensors 100 provided on the substrate 10. The substrate 10 includes a slit 99 provided between the plurality of pyroelectric sensors 100. The plurality of pyroelectric sensors 100 are independent from each other by the slits 99. The plurality of pyroelectric sensors 100 have a certain angle with respect to the two dimensional plane on which the substrate 10 is disposed in accordance with the curvature of a portion of the substrate 10.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a pyroelectric sensor array, a user interface device including a pyroelectric sensor array, and a human presence sensor including a pyroelectric sensor array. [Background technology]

[0002] Sensors using organic ferroelectric materials such as P(VDF / TrFE), which can be applied by coating, can be fabricated using low-temperature processes and are easy to form into films. For this reason, sensors using organic ferroelectric materials are being attempted to be used in applications such as flexible sensors or large-area sensors for wearable devices.

[0003] Sensors using organic ferroelectric materials are being considered for a variety of applications, including biosignal sensors such as pulse wave and / or mechanomyogram sensors, tactile sensors, and pyroelectric sensors.

[0004] As such, sensors using organic ferroelectric materials are a technology that is attracting attention.

[0005] As an application of pyroelectric sensors, for example, Patent Document 1 proposes a pyroelectric sensor using an organic ferroelectric material, which has high sensitivity and responsiveness and further has an improved signal-to-noise ratio.

[0006] Many cases have been reported in which pyroelectric sensors using organic ferroelectric materials are used as gesture interfaces. For example, Patent Document 2 proposes a method for detecting gestures without contact by using pyroelectric sensors arranged in an array to detect infrared rays emitted from the hand. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-155050 [Patent Document 2] Special Publication No. 2017-535892 [Patent Document 3] Japanese Patent Application Laid-Open No. 2012-108058 Summary of the Invention [Problem to be solved by the invention]

[0008] However, when multiple pyroelectric sensors are arranged on a plane to detect gesture movements, the position resolution of the pyroelectric sensors is reduced due to the influence of infrared rays emitted from the body entering the pyroelectric sensors from an oblique direction.In particular, when gesture movements become fast, erroneous judgments in gesture recognition become more pronounced.

[0009] In contrast to this, Patent Document 3 discloses that a flexible pyroelectric sensor array is curved to widen the detection range and increase the position resolution, thereby realizing accurate detection over a wide range.

[0010] Even if an attempt is made to increase the positional resolution of the pyroelectric sensor array in three-dimensional space by bending it and / or supporting it with a casing, it is difficult to fix the shape of the pyroelectric sensor array.

[0011] The present invention provides a pyroelectric sensor array that has improved position resolution in three-dimensional space without excessive bending or deformation of the substrate. [Means for solving the problem]

[0012] According to a first aspect of the present invention, there is provided a pyroelectric sensor array comprising a flexible substrate and a plurality of pyroelectric sensors provided on the substrate, the substrate including slits between the plurality of pyroelectric sensors, the plurality of pyroelectric sensors being independent of one another by the slits, and the plurality of pyroelectric sensors having a certain angle with respect to a two-dimensional plane on which the substrate is placed in accordance with a curvature of a portion of the substrate.

[0013] According to a second aspect of the present invention, there is provided a pyroelectric sensor array according to the first aspect, further comprising a support substrate including the two-dimensional plane and on which the substrate is placed, and a support provided between the support substrate and the substrate, wherein the curvature of the portion of the substrate is fixed by the support substrate and the support.

[0014] According to a third aspect of the present invention, there is provided the pyroelectric sensor array according to the second aspect, wherein the space between the substrate and the support base has a polygonal truncated pyramid shape.

[0015] According to a fourth aspect of the present invention, there is provided the pyroelectric sensor array according to the second aspect, wherein an air gap is provided between the plurality of pyroelectric sensors and the supporting substrate.

[0016] According to a fifth aspect of the present invention, there is provided a pyroelectric sensor array according to the second aspect, further comprising a circuit provided within the support.

[0017] According to a sixth aspect of the present invention, there is provided the pyroelectric sensor array according to the first aspect, wherein each of the plurality of pyroelectric sensors includes a pyroelectric layer made of an organic pyroelectric material.

[0018] According to a seventh aspect of the present invention, there is provided a pyroelectric sensor array according to the first aspect, wherein the substrate is formed from an organic pyroelectric material.

[0019] According to an eighth aspect of the present invention, there is provided a user interface device comprising the pyroelectric sensor array of any one of the first to seventh aspects, wherein the pyroelectric sensor array is configured to operate an object by a gesture.

[0020] According to a ninth aspect of the present invention, there is provided a human presence sensor comprising the pyroelectric sensor array of any one of the first to seventh aspects, wherein the pyroelectric sensor array is configured to detect human movement. [Effects of the Invention]

[0021] According to the present invention, it is possible to provide a pyroelectric sensor array that can improve the position resolution in three-dimensional space without excessive bending or deformation of the members. [Brief explanation of the drawings]

[0022] [Figure 1] FIG. 1 is a bird's-eye view showing the basic configuration of a pyroelectric sensor array according to an embodiment. [Figure 2] FIG. 2 is a plan view showing the basic configuration of the pyroelectric sensor array according to the embodiment. [Figure 3] FIG. 3 is a cross-sectional view showing the basic configuration of the pyroelectric sensor array according to the embodiment. [Figure 4] FIG. 4 is a plan view showing an example of the arrangement of channels in the pyroelectric sensor array according to the embodiment. [Figure 5] FIG. 5 is a diagram for explaining the operation of the pyroelectric sensor array according to the embodiment. [Figure 6] FIG. 6 is a diagram showing an example of the configuration of a pyroelectric sensor array of a comparative example. [Figure 7] FIG. 7 is a diagram illustrating an example of characteristics of the pyroelectric sensor array according to the embodiment. [Figure 8] FIG. 8 is a diagram illustrating an example of the characteristics of the pyroelectric sensor array according to the embodiment. [Figure 9] FIG. 9 is a cross-sectional view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 10] FIG. 10 is a cross-sectional view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 11] FIG. 11 is a cross-sectional view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 12] FIG. 12 is a cross-sectional view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 13] FIG. 13 is a plan view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 14] FIG. 14 is a plan view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 15] FIG. 15 is a plan view showing a modified example of the pyroelectric sensor array of the embodiment. [Figure 16] FIG. 16 is a cross-sectional view showing an example of a pyroelectric sensor array according to an embodiment. [Figure 17] FIG. 17 is a schematic diagram showing an application example of the pyroelectric sensor array according to the embodiment. [Figure 18] FIG. 18 is a schematic diagram showing an application example of the pyroelectric sensor array according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0023] Hereinafter, embodiments will be described with reference to the drawings. However, the drawings are schematic or conceptual, and the dimensions and proportions of each drawing are not necessarily the same as those of the actual drawing. Furthermore, even when the same parts are shown in different drawings, the dimensional relationships and proportions may be different. In particular, the following embodiments are illustrative of devices and methods for embodying the technical concept of the present invention, and the shape, structure, arrangement, etc. of the components do not specify the technical concept of the present invention. In the following description, elements having the same function and configuration are designated by the same reference numerals, and redundant description will be omitted.

[0024] <Embodiment> (1) Basic configuration The basic configuration of a pyroelectric sensor array according to an embodiment will be described with reference to FIGS.

[0025] FIG. 1 is a bird's-eye view showing an example of the structure of a pyroelectric sensor array according to an embodiment.

[0026] The pyroelectric sensor array 1 of the embodiment is a sensing device.

[0027] The pyroelectric sensor array 1 in Fig. 1 is provided on a support substrate 80. Of the main components included in the pyroelectric sensor array 1, Fig. 1 illustrates a pyroelectric film 10 and a support 70, and does not illustrate other components.

[0028] In Figure 1, the X and Y directions form a certain plane (XY plane). The X and Y directions are parallel to the certain plane. Within the plane, the X direction is perpendicular to the Y direction. The Z direction is perpendicular to the XY plane.

[0029] The pyroelectric film 10 is used for each sensor in the pyroelectric sensor array 1 and also functions as a substrate for arranging other components. A plurality of electrodes (not shown) and wiring (not shown) are provided on the upper and lower surfaces of the pyroelectric film 10. The pyroelectric film 10 is made of an organic pyroelectric material. For example, the pyroelectric film 10 may be made of polyvinylidene fluoride, P(VDF-TrFE), porous polypropylene, or the like.

[0030] The pyroelectric film 10 includes a plurality of sensor regions 11 and an outer circumferential region 19. For example, the pyroelectric film 10 has four sensor regions 11. In the pyroelectric film 10, the four sensor regions 11 are continuous with the outer circumferential region 19.

[0031] The four sensor regions 11 are separated from one another by slits 99. Each of the sensor regions 11 has a triangular planar shape when viewed from the Z direction.

[0032] One apex of each sensor region 11 is provided on the support 70. In each sensor region 11, the side opposite the apex on the support 70 is connected to the outer periphery region 19.

[0033] The outer peripheral region 19 is provided along the side of the support substrate 80. The outer peripheral region 19 has a rectangular ring-shaped planar shape when viewed from the Z direction. An inner diameter side portion of the outer peripheral region 19 is connected to a side portion of the sensor region 11.

[0034] The slits 99 are provided between adjacent sensor areas 11. The slits 99 are formed along the diagonals of a rectangular area surrounded by the outer circumferential area 19. The slits 99 have a cross shape when viewed from the Z direction. Therefore, one slit 99 includes multiple portions formed between the sensor areas 11.

[0035] The support 70 is disposed on the central region of the support substrate 80. The arrangement of the support 70 creates a step between the upper surface of the support 70 and the surface of the support substrate 80. The support 70 is a hexahedron such as a rectangular parallelepiped or a cube. The upper surface of the support 70 in the Z direction is connected to the tops of the multiple sensor regions 11. The material of the support 70 is, for example, plastic resin.

[0036] Each sensor region 11 is sandwiched between two electrodes (not shown). In each sensor region 11, a pyroelectric sensor 100 is formed by the pyroelectric film 10 sandwiched between the two electrodes.

[0037] A plurality of pyroelectric sensors 100 formed using one pyroelectric film 10 function as sensor elements independent of each other due to slits 99 provided in the pyroelectric film (substrate) 10.

[0038] Each of the pyroelectric sensors 100 (sensor regions 11) is curved (inclined) at a certain angle relative to the surface of the support substrate 80 due to a step caused by the arrangement of the support 70.

[0039] Fig. 2 is a plan view showing an example of the structure of a pyroelectric sensor array according to an embodiment. Fig. 3 is a cross-sectional view showing an example of the structure of a pyroelectric sensor array according to an embodiment. Fig. 3 shows a cross section of the pyroelectric sensor array taken along line A-A' in Fig. 2.

[0040] As shown in FIGS. 2 and 3, the pyroelectric sensor array 1 further includes a plurality of electrodes 30 (30A, 30B, 30C, 30D) and an electrode 40.

[0041] A plurality of electrodes 30 are provided on the surface of the pyroelectric film 10 in the Z direction. The electrodes 30 are in close contact (bonded) with the surface of the pyroelectric film 20. Hereinafter, the electrodes 30 will be referred to as upper electrodes 30. The material of the upper electrode 30 is, for example, silver (a more specific example is silver paste), molybdenum, aluminum, chromium, titanium, PEDOT:PSS, or the like.

[0042] One upper electrode 30 is provided on the surface of one sensor region 11 so as to correspond to one sensor region 11. The upper electrode 30 has a trapezoidal planar shape when viewed from the Z direction. For example, the area of ​​one upper electrode 30 is smaller than the area of ​​one sensor region 11. A conductive adhesive layer (or adhesive) may be provided between the upper electrode 30 and the pyroelectric film 10.

[0043] The electrode 40 is provided under the rear surface of the pyroelectric film 10. The lower electrode 40 is in close contact (bonded) with the rear surface of the pyroelectric film 10. Hereinafter, the electrode 40 will be referred to as the lower electrode 40. The material of the lower electrode 40 is, for example, silver (silver paste), molybdenum, aluminum, chromium, titanium, PEDOT:PSS, or the like.

[0044] One lower electrode 40 is provided for multiple pyroelectric sensors 100. The lower electrode 40 is shared across multiple sensor regions 11 (and pyroelectric sensors 100) via an electrode portion (wiring) provided under the back surface of the outer peripheral region 19. A conductive adhesive layer or adhesive may be provided between the lower electrode 40 and the pyroelectric film 10.

[0045] Alternatively, one upper electrode 30 may be provided in common to a plurality of sensor regions 11, and a plurality of lower electrodes 40 may be provided for each sensor region 11.

[0046] The support 70 is bonded to the support base material 80 by an adhesive layer (or adhesive agent) 91A. The material of the support base material 80 is, for example, a plastic resin.

[0047] In the pyroelectric film 10, an adhesive layer (or adhesive) 92 is provided between the top of the sensor region 11 and the support 70. This bonds the pyroelectric film 10 to the support 70. In the pyroelectric film 10, an adhesive layer (or adhesive) 91B is provided between the outer circumferential region 19 and the support substrate 80 via the lower electrode 40. This bonds the pyroelectric film 10 to the support substrate 80. The pyroelectric film 10 is fixed to the support 70 and the support substrate 80. This maintains the shape of the pyroelectric film 10. For example, the pyroelectric sensor array 1 has a convex cross-sectional shape.

[0048] The material of the adhesive layers 91A, 91B, and 92 is not particularly limited, and may be, for example, an acrylic material or a urethane material.

[0049] A laminate 100 consisting of a sensor region 11 sandwiched between two electrodes 30 and 40 mainly functions as a pyroelectric sensor 100 (100A, 100B, 100C, 100D). The pyroelectric sensor array 1 includes four pyroelectric sensors 100A, 100B, 100C, and 100D. The set of four pyroelectric sensors 100A, . . . , 100D has a rectangular layout when viewed from the Z direction.

[0050] In the pyroelectric sensor array 1 of this embodiment, the support 70 is disposed between the pyroelectric film 10 and the support substrate 80, so that the surface of the pyroelectric film 10 (the surface on which infrared rays are incident) is inclined with respect to the surface of the support substrate 80. The inclination angle θ of the pyroelectric film 10 with respect to the surface of the support substrate 80 (the upper or side surface of the support 70) is, for example, 1 degree or more and 80 degrees or less. More preferably, the inclination angle θ of the pyroelectric film 10 is 15 degrees or more and 60 degrees or less.

[0051] A gap AG is formed between the pyroelectric film 10 and the support substrate 80. For example, in the pyroelectric sensor 100, it is preferable that the heat capacity of the pyroelectric material is low. The gap AG reduces the heat capacity of the pyroelectric film 10 of the pyroelectric sensor 100. Therefore, the gap AG on the back side of the pyroelectric sensor 100 improves the characteristics of the pyroelectric sensor 100.

[0052] By providing the support 70 that fixes the central portion of the pyroelectric film 10, the height of the central portion of the pyroelectric film 10 is higher than the height of the peripheral portion of the pyroelectric film 10. The height of each portion of the pyroelectric film 10 corresponds to its position in the Z direction relative to the surface of the support substrate 80.

[0053] Due to the inclination (curvature) of the pyroelectric film 10, the height of the center side of the pyroelectric sensor 100 is higher than the height of the outer periphery side of the pyroelectric sensor 100. The height of the pyroelectric sensor 100 gradually increases from the outer periphery side toward the center of the pyroelectric film.

[0054] Due to the inclination of the pyroelectric film 10, the infrared incident surface (sensor surface) of each pyroelectric sensor 100 faces the outer periphery of the pyroelectric film 10. This makes it easier for the pyroelectric sensor 100 to receive infrared rays incident from an oblique direction.

[0055] The space surrounded by the back surface of the pyroelectric film 10 and the front surface of the support substrate 80 has a polygonal pyramid shape. For example, the pyroelectric sensor array 1 having the structure shown in Figures 1 to 3 has a quadrangular pyramid-shaped space between the pyroelectric film 10 and the support substrate 80, with the support 70 at the center.

[0056] It should be noted that a member such as a support may be provided in the space between the inclined portion (sensor region 11) of the pyroelectric film 10 and the support substrate 80.

[0057] (2)Characteristics The characteristics of the pyroelectric sensor array 1 of this embodiment will be described with reference to FIGS.

[0058] (2-1) Pyroelectric sensor array channel setting The channels set in the pyroelectric sensor array 1 of this embodiment will be described with reference to FIG.

[0059] Each of the pyroelectric sensors 100 functions as an independent channel for detecting a gesture motion in the pyroelectric sensor array 1 of this embodiment.

[0060] Pyroelectric sensor 100A is set to channel CH1. Pyroelectric sensor 100B is set to channel CH2. Pyroelectric sensor 100C is set to channel CH3. Pyroelectric sensor 100D is set to channel CH4.

[0061] The pyroelectric sensors 100A and 100C aligned in the X direction mainly contribute to detecting gesture movements in the horizontal direction, while the pyroelectric sensors 100B and 100D aligned in the Y direction mainly contribute to detecting gesture movements in the vertical direction.

[0062] (2-2) Gestures A gesture operation in the pyroelectric sensor array 1 of this embodiment will be described with reference to FIG.

[0063] In the gestures (a), (b), (c), and (d) of Figure 5, a hand movement in one direction in space is shown. A hand movement in one direction in space is also called a slash. In Figure 5, a gesture using the right hand is shown.

[0064] The gesture motion in (a) of FIG. 5 is a motion in which a hand (object) moves from the left side of the paper to the right side (hereinafter also referred to as a right slash). The gesture motion in (b) of FIG. 5 is a motion in which a hand moves from the right side of the paper to the left side (hereinafter also referred to as a left slash). The gesture motion in (c) of FIG. 5 is a motion in which a hand moves from the bottom side of the paper to the top side (hereinafter also referred to as an up slash). The gesture motion in (d) of FIG. 5 is a motion in which a hand moves from the top side of the paper to the bottom side (hereinafter also referred to as a down slash).

[0065] The pyroelectric sensor array 1 of this embodiment can detect the movement of an object, such as various gesture movements shown in FIG. 5, from the change in the intensity of infrared light according to the movement of the object.

[0066] The right slash (FIG. 5(a)) is detected by the displacement of infrared light in response to the movement of the hand along the direction from channel CH2 to channel CH4 via channel CH1 and / or channel CH3.

[0067] The left slash (FIG. 5(b)) is detected by the displacement of infrared light in response to the movement of the hand along the direction from channel CH4 to channel CH2 via channel CH1 and / or channel CH3.

[0068] The upper slash (FIG. 5(c)) is detected by the displacement of infrared light in response to the movement of the hand along the direction from channel CH1 to channel CH3 via channel CH2 and / or channel CH4.

[0069] The downward slash (FIG. 5(d)) is detected by the displacement of infrared light in response to the movement of the hand along the direction from channel CH3 to channel CH1 via channel CH2 and / or channel CH4.

[0070] The gesture may be performed using the left hand, or may be performed by a part of the body other than the hand, or by an object other than a body part.

[0071] (2-3) Experiment The experimental results of the pyroelectric sensor array 1 of this embodiment will be described with reference to FIGS.

[0072] FIG. 6 is a plan view showing an example of the configuration of a pyroelectric sensor array 1Z of the comparative example. As shown in FIG. 6, the pyroelectric sensor array 1Z of the comparative example includes four pyroelectric sensors 100A, 100B, 100C, and 100D. The pyroelectric sensor array 1Z of the comparative example does not include a support between the pyroelectric film 10Z and a supporting substrate (not shown). In each pyroelectric sensor 100, the pyroelectric film 10Z is in contact with the surface of the supporting substrate without being tilted. In the comparative example, the pyroelectric film 10Z is flat.

[0073] 7 and 8 show experimental results for the pyroelectric sensor array 1 of this embodiment. FIG. 7 shows an overall image of the detection results of each gesture motion (slash) in the pyroelectric sensor array 1 of this embodiment and the pyroelectric sensor array 1Z of the comparative example. FIG. 7(a) shows the detection results of the pyroelectric sensor array 1 of this embodiment, and FIG. 7(b) shows the detection results of the pyroelectric sensor array 1Z of the comparative example. FIG. 8 shows details (enlarged view of the time axis) of the detection results of each gesture motion in the pyroelectric sensor array 1 of this embodiment and the pyroelectric sensor array 1Z of the comparative example. FIG. 8(a) shows details of the detection results of the pyroelectric sensor array 1 of this embodiment, and FIG. 8(b) shows the detection results of the pyroelectric sensor array 1Z of the comparative example.

[0074] As shown in FIGS. 7(a) and 7(b), the pyroelectric sensor array 1 of this embodiment and the pyroelectric sensor array 1Z of the comparative example can detect various types of slashes using a plurality of pyroelectric sensors 100.

[0075] Compared to the pyroelectric sensor array 1Z of the comparative example, the pyroelectric sensor array 1 of this embodiment acquires detection results with different signal waveforms at different detection times for each channel (pyroelectric sensor 100). As a result, the pyroelectric sensor array 1 of this embodiment can increase the dispersion of signals detected by each channel compared to the pyroelectric sensor array 1Z of the comparative example.

[0076] As shown in FIG. 8(b), in the pyroelectric sensor array 1Z of the comparative example, the overlap of the signal waveforms detected in each channel is large.

[0077] In contrast, as described above, in the pyroelectric sensor array 1 of this embodiment, the pyroelectric sensors 100 are sufficiently separated by the slits 99 and the support 70. As a result, as shown in Fig. 8(a) , in the pyroelectric sensor array 1 of this embodiment, the signals detected in each channel are widely dispersed in response to the gesture movement.

[0078] Therefore, the pyroelectric sensor array 1 of this embodiment can improve the accuracy of detecting gesture movements.

[0079] (3) Variations Modifications of the pyroelectric sensor array 1 of this embodiment will be described with reference to FIGS.

[0080] FIG. 9 is a cross-sectional view showing an example of a modified example of the pyroelectric sensor array 1 of this embodiment.

[0081] In the modification of FIG. 9, the substrate 50 is formed from a material different from that of the pyroelectric film 10X.

[0082] The substrate 50 is provided below the pyroelectric film 10X. The material of the substrate 50 is, for example, polyimide, polyethylene terephthalate, polyurethane, epoxy resin, polystyrene, or polyester.

[0083] The peripheral portion of substrate 50 is provided on support base 80 via an adhesive layer (or adhesive) 91B. Substrate 50 is bonded to support base 80 by adhesive layer 91B. The central portion of substrate 50 is provided on support 70 via an adhesive layer (or adhesive) 92. Substrate 50 is bonded to support 70 by adhesive layer 92. Substrate 50 is inclined due to a step caused by support 70.

[0084] The lower electrode 40 is provided on the surface of the substrate 50 .

[0085] The pyroelectric film 10X is provided on the lower electrode 40 above the surface of the substrate 50. For example, the central end of the pyroelectric film 10X covers the side surface of the lower electrode 40. For example, the central end of the pyroelectric film 10X contacts the surface of the substrate 50. The pyroelectric film 10X is curved (inclined) due to a step caused by the support 70.

[0086] The upper electrode 30 is provided on the surface of the pyroelectric film 10X. For example, the upper electrode 30 covers only the inclined portion (region) of the pyroelectric film 10X. In this case, the outer peripheral portion (outer peripheral region 19) of the pyroelectric film 10X is exposed.

[0087] 9, the pyroelectric sensor 100 including the pyroelectric film 10X sandwiched between the two electrodes 30, 40 is provided on the surface of the substrate 50.

[0088] FIG. 10 is a cross-sectional view showing an example of a modified example of the pyroelectric sensor array 1 of this embodiment.

[0089] As in the modified example of FIG. 10, the pyroelectric film 10 may be fixed (bonded) to the support 70 with an adhesive tape 95.

[0090] The adhesive tape 95 includes an adhesive layer 951 and a film 952. The adhesive layer 951 is applied onto the film 952. The adhesive layer 951 is provided between the surface of the support 70 and the film 952. The adhesive layer 951 bonds the film 952 to the support 70.

[0091] The central end of the pyroelectric film 10 is sandwiched between the film 952 and the support 70 .

[0092] As a result, in the modified example of FIG. 10, the pyroelectric film 10 is fixed to the support 70.

[0093] FIG. 11 is a cross-sectional view showing an example of a modified example of the pyroelectric sensor array 1 of this embodiment.

[0094] As in the modification of FIG. 11, the pyroelectric film 10 may be fixed by an adhesive 93 applied to the surface of the pyroelectric film 10 and the surface of the support 7.

[0095] The adhesive 93 is provided on the pyroelectric film 10 and the support 70 so as to span the pyroelectric film 10 and the support 70. The material of the adhesive 93 is not particularly limited, and is, for example, an acrylic material or an epoxy material.

[0096] As a result, in the modified example of FIG. 11, the pyroelectric film 10 is fixed to the support 70.

[0097] FIG. 12 is a cross-sectional view showing an example of a modified example of the pyroelectric sensor array 1 of this embodiment.

[0098] As shown in FIG. 12, the pyroelectric sensor array 1 may have a concave cross-sectional shape.

[0099] 12, the support 71 is provided on a support substrate 80 along the outer peripheral region 19 of the pyroelectric film 10. The support 71 has, for example, a rectangular cylindrical shape when viewed from the Z direction.

[0100] The outer peripheral region 19 of the pyroelectric film 10 is bonded to the upper surface of the support 71 by an adhesive layer 92Z. The top of the sensor region 11 of the pyroelectric film 10 is bonded to the surface of the support substrate 80 by an adhesive layer 91X, via the lower electrode 40. The support 71 is bonded to the support substrate 80 by an adhesive layer 91Z.

[0101] The height of the central portion of the pyroelectric film 10 is lower than the height of the outer periphery (outer periphery region 19) of the pyroelectric film 10.

[0102] The pyroelectric sensors 100 are inclined so that the height of the pyroelectric sensors 100 gradually decreases from the outer periphery toward the center of the pyroelectric film 10. As a result, in the structural example of FIG. 12 , the infrared incident surface of each pyroelectric sensor 100 faces the center of the pyroelectric film 10.

[0103] FIG. 13 is a plan view showing an example of a modified example of the pyroelectric sensor array 1 of the embodiment.

[0104] When the pyroelectric sensor array 1 includes four pyroelectric sensors 100A, . . . , 100D, the four pyroelectric sensors 100A, . . . , 100D may be arranged as shown in Fig. 13. The four pyroelectric sensors 100A, . . . , 100D are arranged in a grid pattern. Each pyroelectric sensor 100 has a square or rectangular planar shape when viewed from the Z direction.

[0105] The pyroelectric film 10A includes four sensor regions 12A, 12B, 12C, and 12D and an outer circumferential region 19. In the pyroelectric film 10A, the four sensor regions 12A, ..., 12D are connected to the outer circumferential region 19. The four sensor regions 12A, ..., 12D are divided by slits 99. Each of the sensor regions 12A, ..., 12D has a rectangular planar shape when viewed from the Z direction.

[0106] The slit 99 is provided in the pyroelectric film 10A so as to extend in a direction perpendicular to the sides of the rectangle surrounded by the outer peripheral region 19. The slit 99 has a cross shape when viewed from the Z direction.

[0107] Four upper electrodes 31A, 31B, 31C, and 31D are provided on the surfaces of the corresponding sensor regions 12A, 12B, 12C, and 12D, respectively. A common lower electrode (not shown) is provided under the rear surface of each of the sensor regions 12A, 12B, 12C, and 12D.

[0108] By fixing the pyroelectric film 10A by the support 70, the infrared ray incident surfaces of the pyroelectric sensors 100A, . . . , 100D are curved (inclined).

[0109] FIG. 14 is a plan view showing an example of a modified example of the pyroelectric sensor array 1 of the embodiment.

[0110] 14, the pyroelectric sensor array 1 may include three pyroelectric sensors 100A, 100B, and 100C. In the example of Fig. 14, the set of the three pyroelectric sensors 100A, 100B, and 100C has a triangular layout when viewed from the Z direction.

[0111] The pyroelectric film 10B includes three sensor regions 13A, 13B, and 13C and an outer circumferential region 19. In the pyroelectric film 10B, the three sensor regions 13A, 13B, and 13C are connected to the outer circumferential region 19. In the pyroelectric film 10B, the three sensor regions 13A, 13B, and 13C are divided by slits 99. The slits 99 are formed radially within the pyroelectric film 10B, extending from the center of a triangle toward the vertices of the triangle. Each of the sensor regions 13A, 13B, and 13C has a triangular planar shape when viewed from the Z direction.

[0112] The end portion on the central side of each of the sensor areas 13A, 13B, and 13C is fixed to a support 70. The outer peripheral area 19 is fixed to a support substrate (not shown).

[0113] Three upper electrodes 32A, 32B, and 32C are provided on the surfaces of the corresponding sensor regions 13A, 13B, and 13C, respectively. A common lower electrode (not shown) is provided under the rear surface of each of the sensor regions 13A, 13B, and 13C.

[0114] By fixing the pyroelectric film 10B by the support 70, the infrared ray incident surfaces of the pyroelectric sensors 100A, 100B, and 100C are curved (inclined).

[0115] FIG. 15 is a plan view showing an example of a modified example of the pyroelectric sensor array 1 of the embodiment.

[0116] 15, the pyroelectric sensor array 1 may include eight pyroelectric sensors 100A, 100B, 100C, 100D, 100E, 100F, 100G, and 100H. In the example of Fig. 15, the set of eight pyroelectric sensors 100A, ..., 100H has an octagonal layout when viewed from the Z direction.

[0117] The pyroelectric film 10C includes eight sensor regions 14A, 14B, 14C, 14D, 14E, 14F, 14G, and 14H and an outer circumferential region 19. In the pyroelectric film 10C, the eight sensor regions 14A, ..., 14H are divided by slits 99. The slits 99 are formed radially from the center of the octagon toward each vertex. In the pyroelectric film 10C, the sensor regions 14A, ..., 14H are connected to the outer circumferential region 19. Each of the sensor regions 14A, ..., 14H has a triangular planar shape when viewed from the Z direction.

[0118] The ends of the sensor areas 14A, . . . , 14H on the central side are fixed to a support 70. The outer peripheral area 19 is fixed to a support substrate (not shown).

[0119] Eight upper electrodes 33A, 33B, 33C, 33D, 33E, 33F, 33G, and 33H are provided on the surfaces of the corresponding sensor regions 14A, . . . , 14H, respectively. A common lower electrode (not shown) is provided under the rear surface of each of the sensor regions 14A, . . . , 14H.

[0120] By fixing the pyroelectric film 10C by the support 70, the infrared ray incident surfaces of the pyroelectric sensors 100A, . . . , 100H are curved (inclined).

[0121] The pyroelectric sensor array 1 may have a circular planar shape when viewed from the Z direction.

[0122] The pyroelectric sensor array 1 of the modified examples shown in FIGS. 9 to 15 can achieve the same effects as the pyroelectric sensor array 1 shown in FIGS.

[0123] (4) Example An example of the pyroelectric sensor array 1 of this embodiment will be described with reference to FIG.

[0124] The pyroelectric sensor array 1 of the embodiment may further include a housing 60 , a filter 61 and a lens 62 .

[0125] The housing 60 encloses the pyroelectric film 10 on which the plurality of pyroelectric sensors 100 are provided, the support 70, and the support substrate 80. The housing 60 protects the plurality of pyroelectric sensors 100 fixed to the support 70 and the support substrate 80.

[0126] The filter 61 is attached to the housing 60 so as to overlap with an opening provided in the housing 60. The filter 61 is disposed above the plurality of pyroelectric sensors 100 so as to overlap with the plurality of pyroelectric sensors 100 in the Z direction. The filter 61 is an infrared filter. For example, the filter 61 is designed to easily transmit infrared rays with wavelengths around 9 μm to 10 μm, which corresponds to human body temperature (approximately 36°C).

[0127] The lens 62 is provided on the filter 61. The lens 62 collects infrared rays supplied to the pyroelectric sensor 100 from outside the housing 60.

[0128] A circuit 69 may be provided inside the support 70. For example, the circuit 69 is configured to perform various calculation processes on signals detected by each pyroelectric sensor 100 and to control the operation of the pyroelectric sensor 100. Electronic components such as capacitors may also be provided inside the support 70.

[0129] As described above, the pyroelectric sensor array 1 of the embodiment is provided.

[0130] (5) Application Examples An application example of the pyroelectric sensor array 1 of this embodiment will be described with reference to FIGS.

[0131] FIG. 17 is a diagram showing an application example of the pyroelectric sensor array 1 of this embodiment.

[0132] As shown in FIG. 17, the pyroelectric sensor array 1 of this embodiment is used in a user interface device 1000.

[0133] A user interface device 1000 including a pyroelectric sensor array 1 is connected to a display device 1100 by wired or wireless communication.

[0134] The user interface device 1000 receives a non-contact input (gesture movement) by a user through the pyroelectric sensor array 1.

[0135] An object 1101 displayed on the display device 1100 is manipulated in response to the gesture motion detected by the pyroelectric sensor array 1. For example, the position of the object 1101 is shifted or rotated by an input to the user interface device 1000 resulting from the detected gesture motion.

[0136] The user interface device including the pyroelectric sensor array 1 of this embodiment may be attached to the display device 1100 as an operation unit 1102 such as a slider.

[0137] FIG. 18 is a diagram showing another application example of the pyroelectric sensor array 1 of this embodiment.

[0138] 18, the pyroelectric sensor array 1 of this embodiment is used in a human presence sensor 2000. The human presence sensor 2000 is attached to, for example, a ceiling 2100 (or a wall) of a building.

[0139] As a result, the presence and movement of a person (object) 2001 is detected in a space (for example, a room) in which the human sensor 2000 is installed.

[0140] (6) Summary The pyroelectric sensor array 1 of the embodiment includes a support substrate 80, a support 70 provided on the support substrate 80, and a pyroelectric film 10 connected to the support 70 and the support substrate 80. Slits 99 are provided in the pyroelectric film 10. The pyroelectric film 10 includes a plurality of sensor regions 11 divided by the slits 99. In the pyroelectric film 10, the plurality of sensor regions 11 are curved (inclined) by the support 70. In the pyroelectric sensor array 1 of the present embodiment, a pyroelectric sensor 100 is provided in the curved sensor region 11.

[0141] This makes it possible for the pyroelectric sensor array 1 of this embodiment to avoid excessive bending and deformation of the pyroelectric film 10 and the substrate (base material 80).

[0142] The pyroelectric sensor array 1 of this embodiment can expand the detection range of the multiple pyroelectric sensors 100 by curving the pyroelectric sensors 100. Furthermore, the pyroelectric sensor array 1 of this embodiment can reduce overlap of the infrared light incident surfaces of the multiple pyroelectric sensors 100 by separating the multiple pyroelectric sensors 100 with slits 99. As a result, the pyroelectric sensor array 1 of this embodiment can increase the positional resolution of an object detected by the pyroelectric sensor array.

[0143] As described above, the pyroelectric sensor array 1 of this embodiment can improve the position resolution in three-dimensional space without excessive bending or deformation of the members that make up the pyroelectric sensor array.

[0144] The present invention is not limited to the above-described embodiments, and various modifications can be made in the implementation stage without departing from the spirit of the invention. Furthermore, the embodiments may be implemented in appropriate combinations, in which case the combined effects can be obtained. Furthermore, the above-described embodiments include various inventions, and various inventions can be extracted by combining selected elements from the disclosed elements. For example, if the problem can be solved and the desired effect can be obtained even if some elements are deleted from all elements shown in the embodiments, the configuration from which these elements are deleted can be extracted as an invention. [Explanation of symbols]

[0145] 1...pyroelectric sensor array, 10, 10X, 10A, 10B, 10C...pyroelectric film, 11A, 11B, 11C, 11D, 12A, 12B, 12C, 12D, 13A, 13B, 13C, 14A, 14B, 14C, 14D, 14E, 14F, 14G, 14H...sensor area, 19...peripheral area, 30A, 30B, 30C, 30D, 31A, 31B, 31C, 31D, 32A, 32B, 32C, 33A, 33B, 33C, 33D, 33E, 33F, 33G, 33H...upper electrode, 40...lower electrode, 50 ...substrate, 60...housing, 61...filter, 62...lens, 70, 71...support, 80...support base material, 91A, 91B, 91X, 91Z, 92, 92Z, 951...adhesive layer, 93...adhesive, 95...adhesive tape, 952...film, 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H...pyroelectric sensor, 1000...user interface device, 1100...display device, 1101...object, 1102...operation unit, 2000...human presence sensor, 2001...person

Claims

1. a flexible substrate; a plurality of pyroelectric sensors provided on the substrate; Equipped with the substrate includes slits provided between the plurality of pyroelectric sensors; the plurality of pyroelectric sensors are isolated from one another by the slits, the plurality of pyroelectric sensors are at an angle relative to a two-dimensional plane on which the substrate is placed in accordance with a curvature of a portion of the substrate; Pyroelectric sensor array.

2. a supporting substrate including the two-dimensional plane and on which the substrate is placed; a support provided between the support base and the substrate; Further comprising: the curvature of the portion of the substrate is fixed by the supporting base and the support; The pyroelectric sensor array of claim 1 .

3. The space between the substrate and the supporting base has a polygonal truncated pyramid shape. The pyroelectric sensor array of claim 2 .

4. A gap is provided between the plurality of pyroelectric sensors and the support substrate. The pyroelectric sensor array of claim 2 .

5. A circuit provided in the support, The pyroelectric sensor array of claim 2 further comprising:

6. Each of the plurality of pyroelectric sensors includes a pyroelectric layer made of an organic pyroelectric material. The pyroelectric sensor array of claim 1 .

7. the substrate is formed from an organic pyroelectric material; The pyroelectric sensor array of claim 1 .

8. A pyroelectric sensor array according to any one of claims 1 to 7, the pyroelectric sensor array is configured to manipulate an object through a gesture; User interface devices.

9. A pyroelectric sensor array according to any one of claims 1 to 7, the pyroelectric sensor array is configured to detect human movement; Human presence sensor.

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