Device, method and use of a device for adjusting, assembling and / or testing an electro-optical system
The apparatus and method for producing a deactivated photoactive system improve manufacturing efficiency and quality by aligning optical and photoactive components without electrical connections, reducing costs and time through simultaneous or sequential production.
Patent Information
- Application Number
- JP2025173403
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2019-12-10
- Filing Date
- 2025-10-15
- Publication Date
- 2026-02-03
AI Technical Summary
Existing methods for manufacturing photoactive systems are costly, time-consuming, and limited in achieving high image quality due to the use of activated systems requiring electrical connections and low acquisition rates of measurement signals.
An apparatus and method that produce a deactivated photoactive system by using an imaging device and holding devices to align optical and photoactive arrangements without electrical connections, allowing simultaneous or sequential production of multiple systems through translational and rotational adjustments based on captured evaluation images.
This approach reduces production costs and time while enhancing image quality by eliminating the need for electrical contacts and hardware, enabling faster and more precise alignment of optical and photoactive components.
Smart Images

Figure 2026016463000001_ABST
Abstract
Description
[Technical Field]
[0001] The present invention relates to an apparatus, a method and the use of the apparatus for producing a photoactive system, in particular a deactivated photoactive system, for production by the apparatus and method. The present invention particularly relates to an apparatus, a method and the use of the apparatus for producing a deactivated photoactive system for a camera. [Background technology]
[0002] Photoactive systems are used, for example, in camera modules for mobile phones, driver assistance systems, cameras for home appliances, medical technology, etc. The sensors of LiDAR systems are a further example of photoactive systems. In this application, a photoactive system is understood to be in particular a functional optical system comprising one or more electro-optical converters. The increasing demands on the image quality that photoactive systems must achieve, while the miniaturization of photoactive systems, places increasingly stringent demands on the production of photoactive systems in terms of quality, time, and cost.
[0003] There are prior art devices and methods for manufacturing photoactive systems. To manufacture a photoactive system, the photoactive system must be activated. This activation requires connecting the photoactive system to one or more electrical contacts to supply power to the photoactive system and to extract one or more electrical signals as data (activated photoactive system). In such prior art devices and methods, the photoactive system itself forms a measuring means that provides the data necessary for its manufacture. The data is used, in particular, to align the optical arrangement of the photoactive system to be manufactured, e.g., one or more optical lenses, with respect to the photoactive arrangement of the photoactive system to be manufactured, e.g., a camera chip mounted on a carrier. For alignment purposes, it is known from the prior art, for example, to movably position the optical arrangement in a holding device and control it with an adjusting device according to captured data (imaged data) from the photoactive arrangement to obtain a desired image quality of a test structure with the photoactive system to be manufactured.
[0004] Such prior art apparatus and methods for manufacturing photoactive systems use activated (activated) photoactive systems as a measurement means for their own fabrication, but can be relatively expensive due to the hardware required for power supply and data transmission. In particular, connecting the photoactive arrangement to one or more electrical contacts of the prior art apparatus and methods required to fabricate the photoactive system is relatively time-consuming. Furthermore, determining the image quality of a test structure with the photoactive arrangement typically used to fabricate a photoactive system requires a relatively long time at the low frame rates typically used with the photoactive arrangement. In that regard, apparatus and methods that use the fabricated photoactive system as a measurement means are expected to require a relatively long time to fabricate the photoactive system. The image quality achievable with the fabricated photoactive system, particularly with photoactive systems fabricated for mobile terminals, is also relatively low. Therefore, the precision with which the optical arrangement is aligned with respect to the photoactive arrangement and the quality of the optical system fabricated using the prior art apparatus and methods are limited. The inventors have realised that this is due to the fact that the photoactive system that must be operated for its production has only a low acquisition rate of one or more measurement signals, and that the adjustment rate of the adjustment commands generated to move the holding device is also limited in that respect. Summary of the Invention [Problem to be solved by the invention]
[0005] It is therefore an object of the present invention to provide an apparatus, a method, and a use of the apparatus for producing a photoactive system that reduces or eliminates one or more of the aforementioned drawbacks and / or improves upon existing solutions. It is particularly an object of the present invention to provide an apparatus, a method, and a use of the apparatus for producing a photoactive system that allows for more cost-effective production of the photoactive system. It is also an object of the present invention to provide an apparatus, a method, and a use of the apparatus for producing a photoactive system that allows for the production of high-quality photoactive systems. Another object of the present invention is to provide an apparatus, a method, and a use of the apparatus for producing a photoactive system that allows for faster production of the photoactive system. [Means for solving the problem]
[0006] The object of the present invention is achieved by the device of the first aspect of the present invention and claim 1.
[0007] It should be understood that the features and steps of any apparatus of the present invention and preferred embodiments described herein are preferably designed not only to produce a single photoactive system, but also to produce multiple photoactive systems simultaneously or sequentially, independently and / or in relation to one another. In that regard, the production of a photoactive system, and in particular the preparation, assembly, and / or testing of a photoactive system, includes the production, in particular the preparation, assembly, and / or testing of a single or multiple photoactive systems. In particular, it should be understood that the photoactive system produced may have a single or multiple optical arrangements and / or a single or multiple photoactive arrangements.
[0008] An apparatus for manufacturing a photoactive system, in particular an inactive photoactive system, in particular an electro-optical system and / or an optoelectronic system for projecting and / or imaging an electro-optical system, preferably comprises an imaging device, a first holding device, and a second holding device. The imaging device comprises at least one imaging arrangement. The at least one imaging arrangement has a beam passage surface and an optical axis. The imaging arrangement is preferably designed to generate, in particular form, an electromagnetic beam that extends along the beam path and passes through the imaging arrangement on the beam passage surface. The imaging arrangement is also preferably designed to capture, in a first focal plane of the imaging arrangement, an evaluation image of the photoactive arrangement and / or a test structure of the photoactive system to be manufactured by the electromagnetic beam reflected by the photoactive arrangement. For this purpose, the electromagnetic beam emerging from the imaging arrangement on the beam passage surface is reflected by the photoactive arrangement in an operating state. The electromagnetic beam reflected by the photoactive arrangement re-enters the imaging arrangement through the beam passage surface in an operating state. The imaging arrangement is also particularly designed to capture the evaluation image focused on the first focal plane. The first holding device preferably has a first holding surface on which the optical arrangement of the photoactive system to be manufactured can be positioned for manufacturing. The second holding device preferably has a second holding surface on which the photoactive arrangement can be positioned for manufacturing. In particular, the first holding device of the first holding surface and / or the second holding device with the second holding surface are arranged to be movable relative to the imaging device. In particular, the first holding device of the first holding surface and / or the second holding device with the second holding surface are arranged to be movable relative to the imaging device in the operating state.
[0009] The first holding device preferably has a first device axis extending perpendicular to the first holding surface. The second holding device preferably has a second device axis extending perpendicular to the second holding surface. The first and / or second device axis are oriented perpendicular to a beam passage plane of one of the at least one imaging arrangement. It may also be preferred that the first and / or second device axis are oriented at an angle relative to one of the at least one imaging arrangement.
[0010] The evaluation image is in particular an image of the photoactive arrangement and / or test structure or a reflected image of the test pattern and / or adjustment marks. The test structure and / or adjustment marks are preferably checkerboard patterns, Siemens stars, crosses, H-structures or similar. In particular, the test structure may be the structure of a light source unit, such as an LED. The test structure is advantageous for manufacturing a photoactive system having a reflective photoactive arrangement. The reflective photoactive arrangement in particular has a reflective surface. The adjustment marks are in particular used to adjust the optical arrangement relative to the photoactive arrangement. The one or more adjustment marks are preferably arranged in an edge region or an outer region of the photoactive arrangement. The one or more adjustment marks are preferably arranged on a support of the photoactive arrangement. In the operating state, the one or more adjustment marks are arranged adjacent to the photoactive arrangement. In particular, the one or more adjustment marks are arranged on the first and / or second holding device. The adjustment marks are in particular physically arranged or inserted reference structures.
[0011] In particular, the test structure is a photoactive arrangement of the photoactive system to be manufactured. In this preferred embodiment, the optically functional structure of the photoactive arrangement serves as a reference for manufacturing the photoactive system. This has the advantage, in particular, that no reference to markers or other test structures is required.
[0012] The optically active systems to be manufactured include, in particular, electro-optical or optoelectronic systems. Electro-optical systems are designed to convert electronically generated data and / or electronically generated energy into optical radiation, in particular electromagnetic radiation. Optoelectronic systems are designed to convert optical radiation, in particular electromagnetic radiation, into electronic data or electrical energy. In the case of optically active systems to be manufactured, a distinction is also made between imaging systems and projection systems. Imaging systems are, for example, cameras or telescopes. Examples of projection systems include, in particular, dot pattern projections for face and / or gesture recognition in mobile devices.
[0013] The photoactive system to be manufactured is in particular a combination of a projection system (transmitting unit) and an imaging system (receiving unit). A LiDAR sensor is an example of such a photoactive system. In particular, the photoactive system to be manufactured includes two or more projection systems and / or two or more imaging systems.
[0014] Such a manufactured photoactive system, in particular a manufactured passive photoactive system, comprises in particular a photoactive arrangement and an optical arrangement. The optical arrangement may include one or more lenses. In particular, the one or more lenses may be spherical lenses and / or aspherical lenses and / or freeform lenses. Converging lenses, meniscus lenses and diverging lenses are known examples of spherical lenses. Biconvex lenses, plano-convex lenses and concave-convex lenses are examples of preferred converging lenses. Convex-concave lenses, plano-concave lenses and biconcave lenses are examples of preferred diverging lenses. The optical arrangement may in particular include a combination of several different lenses, in particular different spherical lenses and / or aspherical lenses and / or freeform lenses. In particular, the optical arrangement may be designed to focus an electromagnetic beam in one direction at an infinite or finite distance on a focal plane. The optical arrangement may also be designed to focus an electromagnetic beam in the opposite direction, preferably at an infinite or finite distance on a further focal plane. In particular, the optical arrangement may be designed as an objective lens. The optically active arrangement may in particular comprise an image sensor or camera chip and / or a printed circuit board. The optically active arrangement preferably comprises an image sensor or camera chip arranged on a carrier. In particular, the optically active arrangement may comprise, for example, a CCD chip, a CMOS chip, a VCSEL array, a SPAD array, an InGaAs chip, a microbolometer, or a similar component for capturing and / or generating electromagnetic radiation.
[0015] The manufacture of a light-active system preferably includes adjustment and / or assembly and / or testing of the light-active system. The manufacture of a light-active system particularly includes adjustment of the optical arrangement relative to the light-active arrangement and / or assembly of the optical arrangement to the light-active arrangement and / or testing of the adjusted and / or assembled light-active system. In particular, the manufacture of a light-active system includes adjustment and / or assembly and / or testing of the light-active system relative to one or more other light-active systems that have already been adjusted and / or tested. The manufacture of a light-active system particularly includes adjustment and / or assembly and / or testing of the optical arrangement of the manufactured light-active system relative to one or more further light-active systems that have already been adjusted, assembled and / or tested, in particular relative to those optical arrangements and / or light-active arrangements.
[0016] In the operating state, the adjustment includes positioning the optical arrangement opposite the optically active arrangement, moving the optical arrangement and the optically active arrangement, or moving the optical arrangement relative to the positioned optically active arrangement, or moving the optically active arrangement relative to the positioned optical arrangement. This also applies mutatis mutandis to the first and second holding devices of the apparatus. In particular, the adjustment includes a translational orientation of the optical arrangement and a rotational orientation of the optically active arrangement. It may also be preferable for the adjustment to include a rotational orientation of the optical arrangement and a translational orientation of the optically active arrangement. It may also be preferable for the adjustment to include a rotational alignment and a translational alignment of both the optical arrangement and the optically active arrangement.
[0017] During the adjustment, a first holding device having the optical arrangement to be adjusted is aligned with a second holding device having the photoactive arrangement to be adjusted, and / or vice versa. In particular, evaluation images of the photoactive system to be adjusted, belonging to each of the at least one imaging arrangement, are tested during the adjustment. In particular, the adjustment involves detecting one of the evaluation images of each of the at least one imaging arrangement. The imaging quality is, for example, the clarity of the evaluation image. The evaluation image is preferably an image of a single photoactive system to be manufactured. It may be particularly preferred that the evaluation image is a superposition of two or more images of two or more photoactive systems to be manufactured. During the adjustment, the orientation and / or position of the optical arrangement and the photoactive arrangement relative to each other is set. The adjustment is preferably performed according to the captured evaluation images of each of the at least one imaging arrangement, in particular according to the detected imaging quality of each evaluation image. The adjustment is preferably performed by mathematically evaluating the superposition of the two evaluation images. In particular, the adjustment is performed using common methods of industrial image processing or according to extracted features. Typically, images of two or more test structures are evaluated and superimposed. In particular, the adjustment is performed by a value representing the difference between the two test structures in the evaluation image created by superimposing the two images. The adjustment is performed in particular based on an evaluation of the imaging quality of each evaluation image depending on the orientation and / or position of the movably arranged first and / or second holding device relative to the imaging device stationary in the operating state. For this purpose, the orientation and / or position of the movably arranged first and / or second holding device relative to the imaging device stationary in the operating state are adjusted accordingly in the operating state, and the imaging quality of each evaluation image is determined with reference to the imaging device stationary in accordance with the adjustment of the movably arranged first and / or second holding device.
[0018] The imaging quality thus determined for each evaluation image is preferably transformed into the frequency domain to determine one or more control signals for the movably arranged first and / or second holding devices. The determined imaging quality, in particular the imaging sharpness of the evaluation image, can be transformed into the frequency domain, for example, by a Fourier transform. The maximum frequency of the frequency transform corresponds to the highest imaging sharpness, in particular, for which the orientation and / or position of the movably arranged first and / or second holding devices is known. Preferably, the image with the most frequency components in the upper tested frequency domain corresponds to the image with the highest imaging sharpness, in particular, for which the orientation and / or position of the movably arranged first and / or second holding devices is known. The control signals can preferably be determined according to a value obtained from a mathematical evaluation of the superposition of the two evaluation images. In particular, the control signals can be determined according to the features thus extracted using common methods in industrial image processing. Alternatively, the control signals can be determined from the position difference of the test structure extracted from one evaluation image into one image domain.
[0019] Based on this, one or more control signals for adjusting the optical arrangement for the photoactive arrangement and / or adjustments to the further photoactive system or vice versa are preferably determined, and the control signals may be determined from values extracted in one image region from the evaluation image.
[0020] Preferably, one of the at least one imaging arrangements is arranged such that its optical axis is substantially parallel to, and preferably coaxial with, the first and / or second device axis, especially after the optical arrangement has been adjusted with respect to the photoactive arrangement. In particular, it is desirable that one of the at least one imaging arrangements is arranged such that its optical axis is substantially parallel to, and preferably coaxial with, the first and / or second device axis, especially after the two or more optical arrangements have been adjusted with respect to the two or more photoactive arrangements. Also, it is desirable that at least one further of the at least one imaging arrangements is arranged such that its optical axis is obliquely oriented with respect to the first and / or second device axis. In particular, it should be understood that each of the at least one imaging arrangements for producing a photoactive system captures a different region of the photoactive arrangement. In particular, at least one imaging arrangement, whose optical axis is oriented parallel, preferably coaxially, with the first and / or second device axis, is in the center of the photoactive arrangement, and at least one further of the at least one imaging arrangement, whose respective optical axis is oriented obliquely with respect to the first and / or second device axis, captures an end region of the photoactive arrangement, respectively. Such a preferred embodiment has the advantage, in particular, that the optical arrangement and the photoactive arrangement of the photoactive system to be manufactured are oriented with respect to each other translationally and rotationally with respect to the first and / or second holding device.
[0021] In particular, adjustments must take into account offsets required for assembly. Such offsets may be necessary, for example, to compensate for subsequent shrinkage due to bonding and / or to adjust a system set at infinity to image at a finite point. Adjustment offsets are also necessary, in particular, to focus the desired optical features of the optically active arrangement of the fabricated optically active system from a plane in which non-optical features exist but where most high-frequency components are captured. An offset may also be necessary to obtain a desired distance between two test structures in the evaluation image, taking into account, for example, parallax effects. Such offsets may also be suitable for compensating for image field curvature effects, in order to account for image sharpness gradients in the on-axis and off-axis regions of the optically active system.
[0022] It will be appreciated that the offset of the device is adjusted, in particular, by moving or adjusting the first and / or second holding device in a translational and / or rotational manner. In particular, the offset is substantially adjusted on the first and / or second holding surfaces along and / or about two independent axes. It may be preferred to move and / or adjust the offset substantially perpendicular to the first and / or second holding surfaces, in particular along a third independent axis. It is also preferred that the offset is adjusted about a third independent axis.
[0023] During assembly, the first holding device with the optical arrangement to be assembled is held in a fixed orientation and / or position relative to the second holding device with the optically active arrangement to be assembled. In particular, the optical arrangement is connected to the optically active arrangement during assembly, for example jointly connected. In particular, the optical arrangement can be connected to the optically active arrangement by a form-fit, force-fit, and / or material-fit connection during assembly. In particular, the assembly includes gluing, soldering, and / or welding to connect the optical arrangement to the optically active arrangement. The assembly preferably includes curing, in particular UV curing, of the connection.
[0024] During the test, the adjusted and / or assembled photoactive system is tested. In particular, evaluation images of the tested photoactive system, which belong to the respective imaging arrangement, are tested during the test. In particular, the testing of the respective evaluation images includes testing the imaging clarity of the respective evaluation images. In particular, the orientation and / or position of the adjusted and / or assembled optical arrangement and the photoactive arrangement relative to each other are tested during the test. The superposition of the two evaluation images is preferably evaluated using mathematical and / or image processing techniques. In particular, any differences in the positions of the first and second test structures in the evaluation images can be ascertained during the test. Such an evaluation image is generated by superposing multiple evaluation images, in particular when multiple photoactive systems are manufactured simultaneously or sequentially by the apparatus.
[0025] It should be noted that the fabricated photoactive system may be placed in either the first holding device or the second holding device during testing. The fabricated photoactive system is preferably placed for testing in the second holding device.
[0026] Operating conditions are states of the device according to the invention during operation. The operating conditions of the device according to the invention include operating conditions and preferably positioning conditions. The operating conditions may preferably include logistics conditions and / or preferably maintenance conditions. The operating conditions of the device according to the invention include in particular the manufacture of the photoactive system. In particular, the operating conditions of the device according to the invention include the adjustment and / or assembly and / or testing of the photoactive system.
[0027] In the positioning condition of the device according to the present invention, the imaging device is movably arranged. In particular, the imaging device is movably arranged in a plane parallel to the first and / or second holding surface in the positioning condition. In particular, the first and / or second holding device are stationary, and the imaging device is movably arranged in the positioning condition. In particular, the device for moving the imaging device comprises imaging drive means and / or imaging support means and / or imaging control means.
[0028] In the logistics state of the device according to the invention, the optical arrangements and the photoactive arrangements are preferably provided and supplied in respective holding devices, and the produced photoactive systems are preferably removed. Supply and / or removal may be performed piecemeal, batchwise or continuously. It may be preferable to supply several optical arrangements and / or several photoactive arrangements, in particular simultaneously. In particular, the logistics conditions also include placing the optical arrangements and the photoactive arrangements in the respective holding devices.
[0029] The maintenance conditions of the device according to the invention may in particular include conditions for maintaining and servicing the individual elements of the device according to the invention.
[0030] In particular, the individual elements, devices, units and arrangements of the apparatus according to the invention may be arranged differently relative to one another in the operational state and / or may have different functional relationships to one another, for example in the deployment state and / or in the logistics state and / or in the maintenance state.
[0031] The first and / or second holding devices are designed to hold the optical arrangement and / or the photoactive arrangement. In particular, each holding device is designed to hold and / or accommodate the optical arrangement and the photoactive arrangement in a form-fitting and / or force-fitting manner. According to a first aspect of the invention, the device can be characterized in that the first holding device is designed to accommodate the photoactive arrangement and the second holding device is designed to accommodate the optical arrangement. Each holding device may be designed in particular to accommodate a magazine with one or more optical arrangements and / or a magazine with one or more photoactive arrangements. Preferably, the first and / or second holding devices are designed as magazines for storing the optical arrangements and / or the photoactive arrangements and for producing a photoactive system. It may also be preferable to feed the optical arrangements or the photoactive arrangements individually to each holding device. In particular, each holding device is designed to feed the optical arrangement and / or the photoactive arrangement to the holding device for producing the photoactive system and to output the produced photoactive system. The magazine is preferably designed to accommodate one or more photoactive arrangements and / or one or more optical arrangements and temporarily store them for the production of photoactive systems. In particular, the first and / or second holding devices may be designed to accommodate two or more optical arrangements and / or two or more photoactive arrangements. Such first and / or second holding devices, which can accommodate two or more optical arrangements and / or two or more photoactive arrangements, in particular allow two or more photoactive systems to be produced simultaneously and / or sequentially, independently, and even in relation to one another. In particular, a functional relationship between the photoactive systems is created. In particular, multiple optical assemblies can also be assembled consecutively by moving the imaging device in a carrier unit with multiple photoactive arrangements and moving the first and / or second holding devices. Preferably, the imaging device and the first and / or second holding devices are moved in the same direction and at the same speed, i.e., stationary relative to one another.This may be preferred if the light-activated system being manufactured is part of a dual or triple camera, for example.
[0032] This is particularly preferred when manufacturing several photoactive systems, preferably a projection system and an imaging system, or especially two imaging systems, in succession.
[0033] In the operating state, the first and second holding devices are preferably arranged movably relative to the imaging device, and the imaging device is preferably stationary. This is particularly preferred when multiple photoactive systems, preferably projection systems and imaging systems, particularly LiDAR systems, preferably two or more imaging systems, for example multi-camera systems, are manufactured sequentially or simultaneously. Also, in the operating state, it may be preferred that the first holding device is arranged movably relative to the second holding device and the imaging device, and the second holding device and the imaging device are stationary. In particular, it may be preferred that the second holding device is arranged movably relative to the first holding device and the imaging device, and the first holding device and the imaging device are stationary in the operating state. The first and / or second holding devices are preferably arranged translatably along the optical axis. In particular, the first and / or second holding devices may be arranged translatably transversely to the optical axis. In particular, the first and / or second holding devices may be arranged rotatably. The first and / or second holding device are preferably arranged to be rotationally movable about two or three axes oriented perpendicular to one another. In particular, the first and / or second holding device are arranged to be movable relative to a beam passage plane of the at least one imaging arrangement. In particular, the first and / or second holding device are arranged to be translationally and / or rotationally movable relative to a beam passage plane of the at least one imaging arrangement.
[0034] The inventive device is designed to switch from the operational state to the disposition state after fabrication of a first photoactive system, and in the disposition state, shift the imaging device optically aligned with the first photoactive system to align it with a second (stationary) photoactive system to be fabricated. To fabricate the second photoactive system, the device switches back to the operational state. In particular, the inventive device is designed, after being returned to the operational state, to adjust at least one further optical arrangement and one further photoactive system, in particular at least one further optical arrangement and one further photoactive arrangement, not only relative to each other but also to an already adjusted and / or assembled photoactive system. To adjust a photoactive system that has not yet been adjusted and / or assembled to an adjusted and / or assembled photoactive system, preferably, a virtual test structure is used, which is saved from evaluation images of a test structure of an already adjusted and / or assembled photoactive system (after adjustment) or from evaluation images captured simultaneously or sequentially from the same imaging device when superimposed.
[0035] In particular, the first holding surface of the first holding device is positioned relative to the second holding surface of the second holding device such that the optical arrangement insertable in the first holding device focuses the beam path of the electromagnetic beam on a focal plane located in the optically active arrangement insertable in the second holding device, in particular, and reflects the electromagnetic beam towards a beam passage surface of the at least one imaging arrangement, the reflected electromagnetic beam passing through the beam passage surface of the at least one imaging arrangement and entering the at least one imaging arrangement.
[0036] In particular, an apparatus, arrangement, unit, element, etc. is movably arranged if the orientation and / or position of the apparatus, arrangement, unit, element, etc. is spatially variable relative to the stationary arrangement, stationary unit, stationary element, etc. An apparatus, arrangement, unit, element, etc. is stationary, in particular if the orientation and / or position of the apparatus, arrangement, unit, element, etc. is spatially unchanging. An apparatus, arrangement, unit, element, etc. is stationary, in particular if it is not movably arranged.
[0037] The image forming device preferably comprises 2, 3, 4, 5 or 6 imaging arrangements. In particular, the imaging device may comprise 6 or more imaging arrangements. In particular, it may be preferred that the imaging device comprises 7, 8, 9, 10, 11, 12 or more imaging arrangements. Each of the imaging arrangements may comprise a beam passage plane and an optical axis. The optical axis of at least one imaging arrangement is preferably arranged orthogonal to the beam passage plane. It may be preferred that a first part of at least one imaging arrangement is aligned with a first photoactive system to be manufactured, and a second part of at least one imaging arrangement is aligned with a second photoactive system to be manufactured. It may also be advantageous to design the imaging device to be movable in order to sequentially and / or simultaneously manufacture multiple photoactive systems relative to each other.
[0038] The apparatus for manufacturing an inactive photoactive system is particularly characterized in that the captured evaluation image is not captured by the photoactive system being manufactured. According to a first aspect, the apparatus of the present invention is particularly characterized in that the inactive photoactive system being manufactured, in particular the photoactive arrangement, is not connected to one or more electrical contacts in an operating state, i.e., is not supplied with power and is not designed for data transmission. The inactive photoactive system being manufactured is preferably inactivated during manufacturing. In particular, during its manufacturing, such an inactive photoactive system is not supplied with electrical energy. In particular, during its manufacturing, such an inactive photoactive system does not come into contact with electrical contacts intended for data transmission. In particular, during the manufacturing of the inactive photoactive system, signals or data from the manufactured photoactive system or photoactive arrangement, for example related to imaging clarity, are not captured in the operating state intended for manufacturing, and are used to manufacture the photoactive system, in particular to align the optical arrangement with the photoactive arrangement.
[0039] In that respect, the device of the present invention preferably does not include a connection for transmitting electrical energy and / or electrical signals as data from the photoactive system to be manufactured. This device is particularly characterized in that data from the photoactive system to be manufactured, in particular data from the photoactive arrangement, is not used in the operating state of the device to align the optical arrangement with respect to the photoactive arrangement. In particular, the device of the present invention is characterized in that the first or second holding device is designed to accommodate the photoactive arrangement in the operating state of the device, and that the photoactive arrangement is designed in the operating state of the device to reflect an electromagnetic beam, the reflected beam passing through a beam-passing surface of the at least one imaging arrangement into which it is detected.
[0040] In particular, the apparatus for producing an inactive photoactive system has the advantage that the inactive photoactive system to be produced does not need to be electrically contacted, which advantageously reduces the production and maintenance costs of the apparatus. Furthermore, in order to produce an inactive photoactive system, the inactive photoactive system does not need to be connected to electrical contacts, which significantly reduces the production time of the produced photoactive system.
[0041] Advantageously, no additional hardware is required to contact, control, or operate the fabricated photoactive system, which may result in significant reductions in process time and cost.
[0042] In particular, imaging devices with multiple imaging arrangements can produce photoactive systems with particularly high imaging clarity. In a particularly advantageous manner, the sensitivity of the imaging device can also be positively influenced by the double beam passing through the adjusted and / or assembled optical arrangement, since imaging errors are amplified by reflections of electromagnetic beams.
[0043] The apparatus of the present invention is based in particular on the inventors' recognition that the time required to manufacture a photoactive system using prior art apparatus is limited by the frame rate of the photoactive arrangement. The advantageous arrangement of the imaging device allows the frame rate of the imaging device to be substantially high, so that evaluation images can be captured and evaluated much faster. This allows, in a particularly advantageous manner, to reduce the manufacturing time of the manufactured photoactive system.
[0044] According to a first preferred embodiment, the first holding device is arranged between the second holding device and the imaging device. In this preferred embodiment, the device is oriented toward the structure for reflected light treatment. This preferred arrangement in this embodiment allows the photoactive system to be manufactured particularly cost-effectively and quickly. This embodiment is based in particular on an easily implementable arrangement of the imaging device and the manufactured optical and photoactive arrangement.
[0045] According to another preferred embodiment of the device, the at least one imaging arrangement and the first holding device are arranged at a first distance from each other along the optical axis, and the first holding device and the second holding device are arranged at a second distance from each other along the optical axis. If the imaging device includes multiple imaging arrangements, the first distance between the first holding device and each imaging arrangement may be different. It may be preferable that the first distance between the first holding device and each imaging arrangement is the same. The third distance is in particular the focal length of the imaging module. The focal length is in particular the distance between a main surface of the imaging module and the first focal plane.
[0046] The maximum value of the first distance is limited, in particular, by the vignetting effect. The ratio of the third distance to the second distance is at least 1:1, preferably at most 100:1. In particular, the ratio of the third distance to the second distance may be at least 0.5:1. The ratio of the third distance to the second distance is preferably about 1:1 to 10:1. In particular, the second distance substantially corresponds to the focal length of the optical arrangement of the photoactive system to be manufactured. After adjustment and / or assembly and / or testing, the first holding device is spaced apart from the second holding device, in particular so that the third focal plane of the optical arrangement is located along the optical axis in the direction of the second holding surface of the photoactive arrangement, in particular at the second holding surface of the second holding device. The photoactive arrangement preferably has a photoactive image plane, and the photoactive arrangement is preferably arranged on the second holding device such that the second holding surface is located on the photoactive image plane.
[0047] According to another preferred development of the invention, the first and / or second holding device are designed to accommodate two or more optical arrangements and / or two or more optically active arrangements, the first holding device preferably being designed to move the two or more optical arrangements rotationally and / or translationally independently of one another, and / or the second holding device preferably being designed to move the two or more optically active arrangements rotationally and / or translationally independently of one another. It may also be preferred that the device is designed to move the imaging device rotationally and / or translationally relative to the first and / or second holding device independently from the first and / or second holding device.
[0048] In this preferred embodiment, the first holding device is designed to move the optical arrangement rotationally and / or translationally, independently of one another. In particular, the first holding device may have two or more holding units for this purpose, which are arranged and / or oriented and / or driven to be rotationally and / or translationally movable independently of one another. In this preferred embodiment, the second holding device is also designed to move the optically active arrangement rotationally and / or translationally, independently of one another. In particular, the second holding device may have two or more holding units for this purpose, which are arranged and / or oriented and / or driven to be rotationally and / or translationally movable independently of one another.
[0049] Rotational movement includes rotating and / or pivoting the first and / or second holding device about three independent axes (three rotational degrees of freedom). Translational movement includes displacing and / or moving along three independent axes (three translational degrees of freedom).
[0050] This preferred embodiment has the advantage that two or more photoactive systems can be adjusted and / or assembled simultaneously or sequentially, ie sequentially, independently and in relation to one another.
[0051] It should also be understood that the imaging device may be designed to simultaneously image two or more photoactive systems, in particular two or more photoactive arrangements of the photoactive systems. In particular, an imaging device with a single imaging arrangement may be designed to simultaneously image two or more photoactive systems, in particular two or more photoactive arrangements of the photoactive systems. The imaging device, in particular a single imaging arrangement, preferably includes a converging lens as the imaging element of the imaging module. To this end, a beam source unit first illuminates the first photoactive system to be manufactured, and then illuminates the second or further photoactive systems to be manufactured. Preferably, a global illumination unit, in particular a beam source unit, is used, and each photoactive system to be manufactured can be individually illuminated by a switchable shading unit, in particular a rotatably mounted shading unit. It may also be preferable for an electromagnetic beam from a beam source arranged external to the imaging device to be coupled coaxially with the optical axis of the imaging device between the beam passage surface and the first holding surface, the latter illuminating the left and right photoactive systems alternately. It may also be preferable to alternately illuminate the first and second photoactive systems to be manufactured via optical fibers that are preferably arranged in the optical arrangement of the first and second photoactive systems to be manufactured in order to illuminate the photoactive systems to be manufactured.
[0052] This has the advantage that two or more photoactive systems to be manufactured, in particular two or more photoactive locations of the photoactive systems to be manufactured, can be detected simultaneously by an imaging device, in particular one with a single imaging location. This also has the advantage that evaluation images of two or more photoactive systems to be manufactured can be physically superimposed simultaneously on an imaging device, in particular one with a single imaging location, without the need for downstream virtual superimposition. This advantageously minimizes assembly time on the one hand and structural complexity on the other hand.
[0053] According to another preferred embodiment, the imaging device is designed to be movable in order to sequentially and / or simultaneously manufacture a plurality of photoactive systems relative to one another. One or more imaging arrangements of the imaging device are preferably designed to be movable. The imaging device, in particular at least one imaging arrangement, can be moved substantially parallel to the first and / or second holding surfaces of the first and / or second holding devices. Additionally or alternatively, the imaging device, in particular at least one imaging arrangement, is preferably arranged and / or oriented and / or driven pivotally relative to the first and / or second holding surfaces of the first and / or second holding devices.
[0054] According to a preferred development of the invention, a first part of the at least one imaging arrangement is aligned with a first photoactive system to be manufactured, and a second part of the at least one imaging arrangement is aligned with a second photoactive system to be manufactured. The first part of the at least one imaging arrangement is a first region, preferably a first sub-region of the free aperture. The second part of the at least one imaging arrangement is a second region, preferably a second sub-region of the free aperture. The free aperture is a free aperture of an imaging module and / or an imaging element of the at least one imaging arrangement, preferably a converging lens.
[0055] According to another preferred embodiment, the imaging device has two imaging arrangements, the two imaging arrangements being arranged such that their optical axes extend parallel to each other, one of the two imaging arrangements being aligned with the photoactive system to be manufactured and another of the two imaging arrangements being aligned with another photoactive system to be manufactured.
[0056] This preferred embodiment allows two photoactive systems to be manufactured and adjusted relative to each other in a preferred manner. In particular, the adjustment can be performed simultaneously and does not have to be sequential. This has the advantage of reducing the manufacturing time required to manufacture multiple photoactive systems. To adjust multiple photoactive systems, evaluation images are superimposed and compared in the imaging device.
[0057] According to another preferred embodiment of the device, the first holding surface of the first holding device is arranged substantially parallel to the beam passage plane of the at least one imaging arrangement and / or arranged non-parallel and spaced apart from the beam passage plane of at least one other of the at least one imaging arrangement. In particular, at least one, in particular a single, at least one imaging arrangement is designed so that its optical axis is oriented parallel, in particular coaxially, with the first and / or second device axis. It is also preferred that at least one of the at least one imaging arrangement is arranged so that its optical axis is oriented obliquely with respect to the first and / or second device axis. In particular, the at least one imaging arrangement is arranged so that its optical axis extends centrally in the operating state through the optical arrangements arranged in the first and / or second holding device. In particular, the at least one imaging arrangement is arranged so that its optical axis intersects the first and / or second device axis in the optical arrangement in which it is arranged in the operating state.
[0058] The single imaging arrangement having a beam-passing surface is preferably oriented substantially parallel to the first and / or second holding surfaces of the first and / or second holding devices. Its optical axis is, in particular, substantially concentric with the first and / or second device axis. Such an arrangement is particularly suitable for translational adjustment of the optical arrangement relative to the photoactive arrangement along the optical axis of the single imaging arrangement. It may also be preferred that the imaging device has one or more imaging arrangements, the beam-passing surfaces of which are arranged substantially obliquely relative to the first and / or second holding surfaces, respectively. Such a preferred arrangement is particularly suitable for rotational adjustment of the optical arrangement relative to the photoactive arrangement. The imaging arrangements arranged obliquely relative to the first and / or second holding devices are preferably arranged at an angle of at least 0 degrees and at most 90 degrees relative to the first and / or second holding surfaces. In particular, the imaging arrangements arranged obliquely relative to the first and / or second holding surfaces are positioned substantially equidistant from the first and / or second holding devices. Furthermore, the imaging arrangements arranged obliquely relative to the first and / or second holding surfaces are preferably arranged on a circular path. The circular path may have a constant or variable curvature. In particular, the circular path is an ellipse. The imaging arrangements arranged on the circular path are preferably spaced apart from one another by substantially the same distance. In particular, the imaging arrangements arranged on the circular path may be arranged at an angle of 30 degrees, 45 degrees, 60 degrees, 90 degrees, or 120 degrees relative to one another relative to the center point of the circular path. Other angles may also be preferred. In particular, the angle depends on the photoactive system to be manufactured. Preferably, the angle depends on the aperture angle, i.e., the numerical aperture of the optical arrangement of the photoactive system to be manufactured, the geometry of the photoactive arrangement of the photoactive system, and the position of the adjustment marks.
[0059] According to another preferred embodiment of the apparatus, the at least one imaging device comprises an imaging module having an optical axis on which the beam passage surface is arranged, the imaging module imaging at infinity or finite distance in the direction of the second holding surface along the optical axis including the second focal length of the second focal plane, and imaging at infinity or finite distance in the opposite direction including the first focal length of the first focal plane, and / or the at least one imaging device comprises a beam source unit for providing an electromagnetic beam for generating an evaluation image and capturing the evaluation image, and / or a beam splitter unit for deflecting at least a part of the electromagnetic beam of the beam source unit towards the photoactive system to be fabricated, and / or an image capturing unit designed to capture the evaluation image of the photoactive system to be fabricated, and / or a diffusion unit for scattering the electromagnetic beam from the beam source unit, and / or a filter unit for filtering the electromagnetic beam having a filtered wavelength, and / or a test structure device for generating a test structure on the photoactive arrangement of the photoactive system to be fabricated, which is reflected by the photoactive arrangement and captured and evaluated as an evaluation image in the imaging device. The image capturing unit is arranged on the first focal plane of the imaging module to capture an evaluation image of the photoactive system to be manufactured. This has the advantage that photoactive systems having photoactive arrangements with low contrast and / or reflective surfaces can be manufactured. Such a preferred embodiment may be particularly advantageous for signal processing.
[0060] The imaging module may include one or more imaging elements. The imaging elements may be lenses. In particular, the lenses may be spherical lenses and / or aspherical lenses and / or freeform lenses. Examples of spherical lenses include converging lenses, meniscus lenses, and diverging lenses. Biconvex lenses, plano-convex lenses, and concave-convex lenses are examples of preferred converging lenses. Convex-concave lenses, plano-concave lenses, and biconcave lenses are examples of preferred diverging lenses. The imaging module preferably includes a converging lens. The imaging module is particularly designed to convert the electromagnetic beam from the beam source unit into a parallel electromagnetic beam and to focus the reflected electromagnetic beam from the optically active arrangement as an objective lens for capturing an evaluation image on a first focal plane. The imaging module preferably includes a fixed-focus lens.
[0061] The beam splitter unit may preferably be a glass pane. The glass pane may be inserted, for example, at a 45-degree angle with respect to the optical axis. The beam splitter is designed to reflect a portion of the electromagnetic beam from the glass pane and transmit the remaining portion. By providing the glass pane with an appropriate partially reflective coating, the electromagnetic beam can preferably be split into two electromagnetic beams of equal intensity. Such a beam splitter unit is also known as an output mirror. The beam splitter unit may also preferably include a wedge prism, a pellicle, a biprism, and / or a pentaprism.
[0062] The beam source unit is preferably a substantially point light source. The beam source unit is preferably an LED, an optical fiber, or a coiled filament. It is particularly preferred that the beam source unit generates a monochromatic electromagnetic beam. In particular, the beam source unit is a visible light source. The beam source unit is particularly designed to couple the electromagnetic beam into the beam path of the imaging device via a beam splitter. In particular, the electromagnetic beam thus coupled leaves the imaging device via a beam passage surface, is reflected by the optically active arrangement via the beam, and re-enters the imaging device via the beam passage surface.
[0063] The diffusion unit is designed to scatter electromagnetic waves. In particular, the diffusion unit is designed to uniformly illuminate the photoactive system to be produced. The diffusion unit is preferably arranged at the focal plane B1. In particular, the device may additionally and / or alternatively have a slotted disk in the diffusion unit.
[0064] The filter unit is designed to filter electromagnetic radiation of a specific wavelength. In particular, the filter unit is preferably designed to filter only electromagnetic radiation of a narrow wavelength band. The narrow wavelength band is preferably in the range of at least 10 nm, 20 nm, 50 nm, 100 nm, or 200 nm, and at most 10 nm, 20 nm, 50 nm, 100 nm, or 200 nm. In particular, the filter unit is designed to filter long-wave electromagnetic radiation. In particular, the filter unit is designed not to filter electromagnetic radiation having wavelengths below the ultraviolet range. Such a filter unit that does not filter electromagnetic radiation of a narrow wavelength band and / or does not filter electromagnetic radiation of wavelengths below the ultraviolet range allows evaluation images to be captured with significantly higher imaging clarity. With such a filter unit, structures or test structures of the photoactive arrangement can be imaged, captured, and / or evaluated with significantly higher imaging clarity. The filter unit is preferably arranged between the beam source unit and the beam splitter unit. Additionally or alternatively, the filter unit may be disposed between the beam splitter unit and the image capturing unit.
[0065] The test structure generated by the test structure device is, in particular, a test image. The test structure device couples the test structure into the beam path of the electromagnetic beam. The test structure device is, in particular, designed to generate a test structure that images the optical arrangement of the optically active system to be manufactured on the optically active arrangement of the optically active system to be manufactured. The test structure device is preferably arranged between the beam source unit and the beam splitter unit. The test structure device is preferably arranged in the focal plane B1. In particular, the test structure device may be arranged in the focal plane of the imaging module. The diffusion unit is preferably arranged between the test structure device and the beam source unit. In particular, the diffusion unit and the test structure device are arranged in the first focal plane of the imaging module, on the side of the beam source unit behind the beam splitter. In particular, the test structure device may be formed on the surface of the diffusion unit, preferably arranged in the first focal plane of the imaging module, on the side of the beam source unit behind the beam splitter. The test structure device is preferably arranged next to the diffusion unit along the electromagnetic beam.
[0066] The light source unit and / or the imaging unit and / or the beam splitter unit preferably comprise a test structure device. It may also be preferred that the test structure device is a separate device from the imaging device. This may be particularly relevant for the manufactured photoactive system being a projection type photoactive system.
[0067] According to another preferred embodiment of the device, the imaging device includes a collimator, preferably a focusable collimator, in particular an autocollimator. Such a preferred embodiment is particularly based on a conventional design for imaging devices. In that respect, this preferred embodiment is particularly cost-effective and easy to operate.
[0068] In another preferred development of the invention, the image capturing unit comprises a camera for capturing an evaluation image of each of the at least one imaging arrangement generated by the electro-optical system to be manufactured, and / or a power electronics module for processing and transmitting each evaluation image, in particular captured by the image capturing unit, and / or an image sensor for capturing an evaluation image, in particular generated by the electro-optical system to be manufactured.
[0069] The camera includes, in particular, an image sensor arranged in an imaging plane. The image sensor is, in particular, a chip. The camera is arranged such that the imaging plane is arranged perpendicular to the optical axis. The camera can be arranged such that the imaging plane is arranged substantially non-perpendicular to the first and / or second device axis.
[0070] In particular, the imaging unit is stationary relative to the imaging module. The camera is preferably arranged relative to the imaging module such that an imaging plane having a first focal length is spaced apart from the imaging module. In particular, the camera is arranged relative to the imaging module such that the first focal plane of the imaging module is located at an imaging plane of the camera. The image sensor is preferably arranged relative to the imaging module such that an imaging plane having a first focal length is located at a distance from the imaging module. In particular, the image sensor is arranged relative to the imaging module such that the first focal plane of the imaging module is located at an imaging plane of the image sensor.
[0071] The imaging unit and the imaging module are also preferably arranged stationary relative to the second holding device, in this preferred embodiment the manufactured photoactive system can be specifically adjusted and / or assembled and / or tested by moving the first holding device.
[0072] This preferred embodiment has the particular advantage of manufacturing the photoactive system, and in particular adjusting the photoactive arrangement, without connecting the photoactive arrangement of the photoactive system to a controller for power supply and / or signal transmission.
[0073] The power electronics module may be designed in particular to capture evaluation images capturing the photoactive arrangement of the photoactive system to be manufactured. The power electronics module is preferably designed to evaluate the captured evaluation images. In particular, the power electronics module is designed to determine the imaging sharpness of the captured evaluation images. The power electronics module is also designed in particular to generate a signal for orienting the first holding device relative to the second holding device. The orienting signal is generated in particular according to each captured evaluation image. The orienting signal is in particular a control signal. The evaluation of the captured evaluation images includes in particular an evaluation of the imaging sharpness. The evaluation is preferably a modulation transfer function. For evaluating the captured evaluation images, the power electronics module preferably includes an Application Specific Integrated Circuit (ASIC) and / or a Field Programmable Gate Array (FPGA) and / or a microcontroller (PIC). The power electronics module is designed in particular to provide a control signal according to the evaluation to an adjustment device for adjusting the orientation and / or position of the first and / or second holding device relative to a beam passage plane of the at least one imaging arrangement.
[0074] The power electronics module is particularly designed to identify a difference in the position of a first test structure and a second test structure. The position of the first test structure is obtained from a simultaneously captured and / or stored evaluation image of the adjusted photoactive system. The second test structure is obtained from a captured second evaluation image of a further photoactive system yet to be manufactured. In particular, the evaluation of the evaluation image also includes an evaluation of the difference in the position of the first and second test structures. In particular, the evaluation also includes forming a vector difference between the real and / or virtual test structures in the captured evaluation image.
[0075] In the context of this application, it should be understood that a power electronics module particularly relates to high-speed signal processing and the generation of control and regulation signals for faster regulation. The autofocus unit of a single-lens reflex (SLR) camera is an example of a similar power electronics module. The power electronics module allows measurement, regulation, and control procedures to be performed quickly.
[0076] The power electronics module is preferably in signal communication with an adjustment device for adjusting the orientation and / or position of the first and / or second holding device relative to a beam passage plane of the camera and / or at least one imaging arrangement. In particular, the power electronics module may be integral with the camera.
[0077] In particular, the image capturing unit may include an autofocus module designed to evaluate the captured evaluation image and to provide a control signal in response to the evaluation to an adjustment device for adjusting the orientation and / or position of the first and / or second holding device relative to the beam passage plane of the at least one imaging arrangement.
[0078] According to another preferred embodiment, the device of the invention comprises an adjustment device for adjusting the orientation and / or position of the first holding surface of the first holding device and / or the second holding surface of the second holding device relative to the beam passage plane of the at least one imaging arrangement, the adjustment device preferably having a drive means, in particular including at least one piezoelectric drive and / or electromagnetic drive and / or parallel kinematics system.
[0079] The adjusting device is designed to adjust the orientation and position of the first and second holding devices relative to each other. In particular, the adjusting device is designed to adjust the orientation and position of the movably arranged first holding device relative to the stationary second holding device. Also, it is preferred that the adjusting device is designed to adjust the orientation and position of the stationary first holding device relative to the movably arranged second holding device. Also, it may be preferred that the adjusting device is designed to adjust the orientation and position of the movably arranged first holding device relative to the movably arranged second holding device. In particular, it may be preferred that the first holding device is arranged translatably and the second holding device is arranged rotatably, or vice versa. In particular, the adjusting devices are connected to the respective movably arranged holding devices.
[0080] In the operating state of the device, the adjusting device is designed in particular to adjust the orientation and position of the optical arrangement held by the first holding device and the photoactive arrangement held by the second holding device relative to each other. In the operating state, the second holding device is preferably arranged stationary with respect to the imaging device, and the first holding device is arranged movably with respect to the imaging device and the second holding device. In this preferred arrangement, the adjusting device is designed to adjust the orientation and position of the first holding device relative to the second holding device by moving the first holding device.
[0081] The adjustment device preferably has one or more axes. The one or more axes may be superimposed. In particular, the one or more axes are linear and / or goniometric axes. The one or more axes are preferably oriented perpendicular to one another. In particular, the adjustment device may be or include a parallel kinematics system with a movable, in particular freely movable, pivot point. In particular, the adjustment device may be or include a parallel kinematics system. In particular, the parallel kinematics system is a hexapod.
[0082] The adjustment device is also preferably designed to hold the first and / or second holding device stationary in a position and orientation, in particular such that the optical arrangement is oriented relative to the optical active arrangement such that the optical arrangement captures an evaluation image having a required imaging quality. The adjustment device is particularly designed to hold multiple optical arrangements and / or optical active arrangements for capturing one or more evaluation images.
[0083] In this preferred embodiment, the photoactive system can be manufactured in a particularly advantageous manner, quickly, accurately and cost-effectively.
[0084] In another preferred development of the invention, the device comprises a support device designed to translatably and / or rotatably support the first and / or second holding device relative to the imaging device in the operating state, and / or a drive means designed to translatably and / or rotatably drive the first and / or second holding device in the operating state.
[0085] The support device is preferably designed to support the first and / or second holding device so that they can be moved translationally and / or rotationally relative to the image-forming device. In particular, the support device and / or drive means are designed to support and / or move the holding device translationally along one, two, or three linear axes and / or rotationally around one, two, or three linear axes. The two or three linear axes are preferably oriented perpendicular to one another. In particular, the support device and / or drive means are designed so that the support device and / or drive means have up to six degrees of freedom. The support device and / or drive means may also have more than six degrees of freedom.
[0086] The support device and / or drive means are in particular designed to support and / or drive two or more optical and / or optically active arrangements arranged on the first and / or second holding device translationally and / or rotationally independently of each other.
[0087] According to another preferred embodiment, the apparatus of the present invention further comprises a bonding device designed to connect the photoactive arrangement and the optical arrangement to one another, in particular to bond them together. The bonding device is designed in particular to create a welded, soldered and / or adhesive connection between the optical arrangement and the photoactive arrangement. The bonding device is designed in particular for UV bonding. The bonding device preferably includes a UV bonding unit.
[0088] In another preferred development of the invention, the apparatus comprises an evaluation device for evaluating captured evaluation images of at least one imaging arrangement, the die evaluation device being in signal communication with the imaging device, preferably in signal communication with the image capturing unit and / or the adjustment device and / or the bonding device, and / or having a power electronics module, in particular for processing and transmitting the evaluation images captured by the image capturing units, respectively, and / or a control device for controlling the adjustment device and / or the bonding device according to the evaluation results of the captured respective evaluation images, the control device in particular including an autofocus module for automatic focus adjustment of the apparatus in an operating state.
[0089] Preferably, the evaluation unit is designed to capture each evaluation image and / or evaluate each evaluation image and / or determine one or more control signals for controlling the first and / or second holding device depending on the evaluation result of each evaluation image and / or provide one or more control signals for control purposes. In particular, evaluating each evaluation image comprises evaluating the image definition of each evaluation image. Evaluating the image definition comprises in particular transforming the evaluation image into the frequency domain and analysing the frequency domain of the evaluation image. The image definition is in particular transformed by a Fourier transform.
[0090] The evaluation unit is designed in particular to evaluate an evaluation image of the manufactured photoactive system, which is captured by the imaging device, to detect adjustment marks, in particular outside the photoactive arrangement or in edge regions of the photoactive arrangement, and to derive control commands therefrom. The evaluation unit is designed in particular to perform the step of generating illumination.
[0091] In particular, a power electronics module is designed to evaluate the respective evaluation image, the power electronics module including in particular the features, functions and other properties of the aforementioned power electronics module, which preferably includes the image capturing unit, and it may be preferable for both the image capturing unit and the evaluation unit to comprise a power electronics module.
[0092] The control unit is especially designed to determine one or more control signals for controlling the adjusting devices of the first and / or second holding device and / or to provide the adjusting devices, especially the drive means, in signal communication.
[0093] The data evaluation unit is or includes a digital data processing device, such as a personal computer, a workstation, a real-time machine controller, and / or an electronic circuit.
[0094] According to a second aspect of the present invention, the object is achieved by a method as defined in claim 13.
[0095] According to a second aspect of the invention, a method for manufacturing a photoactive system, in particular a passive photoactive system, in particular an electro-optical and / or optoelectronic system for a projection and / or imaging electro-optical system, preferably comprises the following steps: providing an apparatus according to the first aspect of the invention and / or a preferred embodiment thereof, and / or providing and arranging a photoactive arrangement on a second holding device, in particular providing and arranging two or more photoactive arrangements on the second holding device, and / or providing and arranging an optical arrangement on a first holding device, in particular providing and arranging two or more optical arrangements on the first holding device.
[0096] In a first preferred embodiment, the method for manufacturing a photoactive system comprises, inter alia, the following steps: adjusting an optical arrangement relative to the photoactive arrangement and / or assembling the adjusted optical arrangement relative to the photoactive arrangement and / or testing the assembled optical arrangement opposite the photoactive arrangement.
[0097] The adjusting step particularly comprises the steps of providing, in each at least one imaging location, an electromagnetic beam for capturing an evaluation image of the photoactive system to be manufactured, and / or capturing, in each at least one imaging location, an evaluation image of the photoactive system to be manufactured, and / or capturing, in each at least one imaging location, an evaluation image of the evaluation system to be manufactured, and / or evaluating, in each at least one imaging location, each captured evaluation image, and / or adjusting the first holding device with the optical arrangement arranged therein and / or the second holding device with the photoactive arrangement arranged therein depending on the evaluation of the captured evaluation images. It should be understood that the adjusting step is, in particular, performed iteratively.
[0098] The method particularly comprises a step of determining the imaging quality, in particular the imaging sharpness, of the captured evaluation images of the at least one imaging arrangement.
[0099] Evaluating the evaluation images includes, in particular, evaluating the imaging sharpness of the evaluation images captured by the respective imaging arrangements. The imaging sharpness is evaluated, in particular, by analyzing the modulation transfer function (MTF) of the imaging sharpness of the evaluation images captured by the respective imaging arrangements. The evaluating also preferably includes identifying and / or capturing edge regions of the photoactive arrangements. The identifying includes, in particular, recognizing one or more edges or alignment marks in the immediate vicinity of the photoactive arrangements in response to the evaluation of the evaluation images.
[0100] In particular, evaluating with an apparatus including an imaging device having two or more imaging arrangements, where a first imaging arrangement is oriented relative to the first and / or second holding device such that a beam passing plane is substantially parallel to the first and / or second holding surface, and another imaging arrangement is oriented relative to the first and / or second holding device such that its respective beam passing plane is inclined relative to the first and / or second holding surface, includes evaluating the imaging clarity by analyzing a modulation transfer function of the imaging clarity of evaluation images captured by means of the first imaging arrangement to determine one or more control signals for translationally adjusting the first and / or second holding device along one or more axes, and / or evaluating the imaging clarity by analyzing a modulation transfer function of the imaging clarity of evaluation images captured by means of the other imaging arrangement to determine one or more control signals for rotationally adjusting the first and / or second holding device about one or more axes.
[0101] The adjustment of the first holding device having the optical arrangement arranged thereon and / or the second holding device having the photoactive arrangement arranged thereon is performed in particular according to the evaluation of the determined image sharpness of each captured evaluation image. In particular, adjusting the first and / or second holding device can depend on the evaluation of multiple evaluation images captured by multiple imaging arrangements. In particular, the first and / or second holding device can be adjusted translationally along one or more axes and / or rotationally around one or more axes.
[0102] The step of adjusting the first and / or second holding device is preferably carried out in several steps. In particular, the adjustment may be an adjustment of the first or second holding device along one or more translational axes. The first and / or second holding device may also be adjusted rotationally about one or more axes.
[0103] The adjustment may be performed, in particular, depending on the imaging quality of a single evaluation image or depending on the imaging quality of each of a plurality of evaluation images. In particular, the step of rotationally adjusting the first and / or second holding device is performed according to the imaging sharpness of evaluation images captured from edge regions of the photoactive arrangement. The step of translationally adjusting is preferably performed in two spatial directions orthogonal to the first and / or second device axis of the first and / or second holding device, in particular according to the captured evaluation images, in particular according to the position of one or more reference marks, preferably not on the photoactive arrangement and / or optical arrangement or at one or more edges of the photoactive arrangement. The step of rotationally adjusting the first and / or second holding device is performed, in particular, depending on the evaluation sharpness of evaluation images captured from edge regions of the optical system to be manufactured. In particular, imaging arrangements whose beam passage plane is not parallel to the first and / or second holding surface capture evaluation images from edge regions of the photoactive arrangement. The control signal for rotationally adjusting the first and / or second holding device is derived from the difference in image quality of the evaluation image from the edge region of the photoactive arrangement. In particular, the optical arrangement and the photoactive arrangement of the manufactured photoactive system can be adjusted in the translational direction relative to each other by means of adjustment marks, preferably arranged immediately adjacent to the photoactive arrangement. Additionally or alternatively, it may be preferable to use the edges of the photoactive arrangement for this purpose. Their position and / or orientation are preferably evaluated for this purpose by evaluating each captured evaluation image by an evaluation unit and calculating and executing corrective movements. The corrective movements can be translational and / or rotational movements. The corrective movements may also include the superposition of multiple translational and / or rotational movements.
[0104] The assembling step preferably includes connecting, in particular bonding, the optical arrangement to the photoactive arrangement. The connecting step includes a form-fitting and / or force-fitting connection and / or a material-fit connection. The connecting step preferably includes bonding and curing, in particular UV curing.
[0105] The testing step preferably comprises the steps of: providing an electromagnetic beam for capturing an evaluation image of the fabricated photoactive system in each of the at least one imaging location, and / or capturing an evaluation image of the adjusted and / or assembled photoactive system in each of the at least one imaging location, and / or capturing an evaluation image in each of the at least one imaging location, and / or evaluating each captured evaluation image.
[0106] Preferably, the method for producing a photoactive system also includes moving the imaging device in order to sequentially and / or simultaneously produce a plurality of photoactive systems relative to one another. Moving the imaging device may particularly include moving the imaging device substantially parallel to the first and / or second holding surfaces of the first and / or second holding devices. Preferably, moving the imaging device may particularly include moving the imaging device substantially perpendicular to the first and / or second holding surfaces of the first and / or second holding devices. In particular, moving the imaging device may include translational and / or rotational movement of the imaging device relative to the first and / or second holding surfaces of the first and / or second holding devices.
[0107] In another preferred embodiment, capturing the evaluation image in at least one imaging arrangement comprises the steps of: positioning the optical arrangement at infinity relative to the imaging device and / or the optically active arrangement and / or positioning the optical arrangement at a setpoint position and / or a setpoint orientation relative to the imaging device and / or the optically active arrangement, in particular by setting one or more offset values the optical arrangement can be positioned at a setpoint position and / or a setpoint orientation relative to the imaging device and / or the optically active arrangement.
[0108] In another preferred development of the invention, evaluating each captured image comprises the following steps: determining a frequency response characteristic of the captured evaluation image and / or comparing the captured evaluation image with an evaluation image of a photoactive system previously adjusted and / or assembled according to the method described above, in particular where the evaluation images are captured simultaneously or successively in each at least one imaging arrangement, in particular where the comparison of simultaneously captured evaluation images is based on a physical superposition in each at least one imaging arrangement, and / or where the comparison of simultaneously or successively captured evaluation images is based on a virtual superposition in each at least one imaging arrangement, and / or where the comparison of the captured evaluation images and / or the determined frequency response characteristic of the captured evaluation image is based on a virtual superposition in each at least one imaging arrangement. comparing the response characteristic with a desired target state, and / or generating a control signal for moving the first and / or second holding device according to: comparing the captured evaluation image with a captured evaluation image of a photoactive system pre-adjusted and / or assembled according to the method described above, and / or comparing with the determined frequency response characteristic and / or determined offset, and / or if the captured evaluation image does not match the desired target state, comparing the captured evaluation image with the desired target state, and / or if the frequency response characteristic of the captured evaluation image does not match the desired target state, comparing the determined frequency response characteristic of the captured evaluation image with the desired target state.
[0109] It should be understood that in particular the method for manufacturing is carried out iteratively until the captured evaluation images and / or the determined frequency response characteristics of the captured evaluation images correspond to the desired target state. The method for adjusting the light-activated system is preferably completed when the captured evaluation images and / or the determined frequency response characteristics of the captured evaluation images correspond to the desired target state. It is particularly preferred that the step of adjusting the light-activated system is carried out again or repeatedly if the captured evaluation images and / or the determined frequency response characteristics of the captured evaluation images do not match the desired target state. In that respect, the method for adjusting the light-activated system should be understood in particular as an iterative method for adjusting the light-activated system.
[0110] The desired target state is a desired position of the optical arrangement relative to the photoactive arrangement of the photoactive system to be manufactured, in particular the position of the photoactive system to be adjusted. The desired target state is preferably a desired frequency response characteristic and / or a desired imaging clarity to be achieved by the photoactive system to be manufactured, in particular the photoactive system to be adjusted. The desired target state is preferably a target state range having an upper target state and a different lower target state. In particular, the captured evaluation image and / or the frequency response characteristic of the captured evaluation image corresponds to the desired target state when it is within the desired target state range, in particular between the upper and lower target states.
[0111] This preferred embodiment in particular includes a step of simulating one or more offset values. The one or more offset values are in particular determined, for example by an optical designer, before production of the photoactive system begins. In a particularly advantageous manner, this preferred embodiment eliminates the need for testing according to the previously described preferred embodiment. In particular, the setpoint position and / or setpoint orientation is a position and / or orientation of the first holding device with respect to the second holding device and / or with respect to the at least one imaging configuration that maximizes the imaging clarity of the evaluation image in each of the at least one imaging configuration.
[0112] According to another preferred embodiment, the method is characterized in that the photoactive arrangement of the photoactive system to be manufactured is deactivated during adjustment and / or assembly and / or testing.
[0113] According to a third aspect of the present invention, the object is achieved by a method according to claim 17.
[0114] A third aspect of the invention relates to the use of an apparatus according to one of the aforementioned preferred embodiments for manufacturing photoactive systems, in particular passive photoactive systems, electro-optical and / or optoelectronic systems for projection and / or imaging electro-optical systems, including in particular the use of an apparatus in one of the aforementioned embodiments for adjusting and / or assembling and / or testing photoactive systems. The apparatus of one of the aforementioned preferred embodiments can also be used for adjusting and / or assembling and / or testing passive photoactive systems.
[0115] For advantages, embodiments and details of these further aspects of the invention and their developments, reference is also made to the above descriptions of the respective features of the device for producing a photoactive system and of the respective other aspects.
[0116] Next, embodiments of the present invention will be described with reference to the drawings. These are not necessarily intended to depict the embodiments to scale; rather, the drawings are provided in a schematic and / or slightly distorted form when useful for explanation. For further details of technical principles not immediately apparent from the drawings, reference should be made to the relevant prior art. Consideration should be given to the fact that many modifications and changes can be made to the shape and details of variations without departing from the general concept of the present invention. The features of the present invention disclosed in the specification, drawings, and claims, separately or in any combination, may be essential to the development of the present invention. Furthermore, all combinations of at least two of the features disclosed in the description, drawings, and / or claims fall within the scope of the present invention. The general concept of the present invention is not limited to the exact shape and details of the preferred embodiments shown and described below, nor is it limited to subject matter that is limited compared to the subject matter in the claims. When a measurement range is specified, values within the specified range are also disclosed as thresholds and can be applied and claimed as desired. For ease of explanation, the same reference numerals are used below for identical or similar parts or parts having the same or similar functions. [Brief explanation of the drawings]
[0117] Further advantages, features and details of the present invention will become apparent from the following description of preferred embodiments and by reference to the drawings. [Figure 1] 1 is a schematic side view illustrating a preferred embodiment of an apparatus for manufacturing a photoactive system. [Figure 1a] 1 is a schematic side view of another preferred embodiment of an apparatus for manufacturing a photoactive system. [Figure 1b] 1 is a schematic side view of another preferred embodiment of an apparatus for manufacturing a photoactive system. [Figure 1c] Schematic diagrams of various preferred embodiments for producing two photoactive systems for alternately irradiating them. [Figure 1d]Schematic diagrams of various preferred embodiments for producing two photoactive systems for alternately irradiating them. [Figure 1e] Schematic diagrams of various preferred embodiments for producing two photoactive systems for alternately irradiating them. [Figure 1f] 1 is a schematic side view of another preferred embodiment of an apparatus for manufacturing a photoactive system. [Figure 2] FIG. 10 is a schematic side view illustrating another preferred embodiment for manufacturing a photoactive system. [Figure 3] FIG. 10 is a schematic side view illustrating another preferred embodiment for manufacturing a photoactive system. [Figure 4] FIG. 10 is a schematic side view illustrating another preferred embodiment for manufacturing a photoactive system. [Figure 5] 5 is a schematic top view of a preferred embodiment of the apparatus shown in FIG. 4 for producing a photoactive system. [Figure 6] Schematic top view showing the photoactive arrangement of the photoactive system to be fabricated. [Figure 7] 1 is a schematic flow diagram of a first preferred method for producing a photoactive system. [Figure 8] FIG. 2 is a schematic flow diagram of another preferred method for producing a photoactive system. DETAILED DESCRIPTION OF THE INVENTION
[0118] FIG. 1 is a side view illustrating a preferred embodiment of an apparatus 1 for producing a photoactive system 10. The illustrated apparatus 1 includes an imaging device 2 and first and second holding devices 3a, 3b. In this preferred embodiment, the imaging device 2 includes a single imaging arrangement 20. The imaging arrangement 20 has a beam passage plane SE, with the optical axis O oriented substantially perpendicularly. The first and second holding devices 3a, 3b have first and second holding surfaces Ha, Hb, respectively, oriented substantially parallel to the beam passage plane SE. In particular, the first holding device 3a, having the first holding surface Ha, is spaced a first distance A1 from the beam passage plane SE. The second holding device 3b, having the second holding surface Hb, is spaced a second distance A2 from the first holding surface Ha.
[0119] FIG. 1 shows the device 1 in an operating state. In the operating state, the photoactive arrangement 11 of the photoactive system 10 to be manufactured and the optical arrangement 12 of the photoactive system 10 are already placed in the respective holding devices 3a, 3b. The optical arrangement 12 is positioned at infinity relative to the imaging device 2 and images the photoactive arrangement 11 at infinity. In an upstream process, the photoactive arrangement 11 and the optical arrangement 12 are added to the respective holding devices 3a, 3b in the logistics state of the device 1. To manufacture an inactive photoactive system, in particular, the optical arrangement 12 and the photoactive arrangement are not in contact with one or more electrical contacts for power supply and / or data transmission in the operating state. In a preferred embodiment, as schematically shown in FIG. 1, the optical arrangement 12 is placed in the first holding device 3a, and the photoactive arrangement 11 is placed in the second holding device 3b. Both the first and second holding devices 3a, 3b are designed to hold the optical arrangement 12 and / or the photoactive arrangement 11. In operation, the optical arrangement 12 and / or the optically active arrangement 11 are force-fit and / or form-fit arranged and accommodated in the respective holding devices 3 a, 3 b, which may for example comprise clamp jaw grippers and / or vacuum grippers for holding the optical arrangement 12 and the optically active arrangement 11 in the respective holding devices 3 a, 3 b.
[0120] The imaging arrangement 20 of the device 1, shown schematically in Fig. 1, comprises an imaging module 21 arranged substantially coaxially with the optical axis O on the beam passage plane SE. In this preferred embodiment, the imaging module 21 is a converging lens. In the preferred embodiment shown in Fig. 1, the imaging module 21 is designed to image an infinite electromagnetic beam along the optical axis O in the direction of the first and second holding surfaces Ha, Hb. In the opposite direction, away from the first and second holding surfaces Ha, Hb, the imaging module 21 is designed to image a finite electromagnetic beam along the optical axis O on a first focal plane B1 of the imaging module 21.
[0121] In this embodiment, the optical arrangement 12 of the optically active system 10 to be manufactured is a converging lens, and the optically active arrangement 11 of the optically active system 10 to be manufactured is an image sensor arranged on a support. The first and second holding devices 3a, 3b are particularly designed so that in the operating state, the converging lens 12 and the image sensor 11 arranged on the respective holding devices 3a, 3b are substantially arranged and held on the respective holding planes Ha, Hb. In particular, the converging lens is designed to converge the electromagnetic beam emitted from the imaging arrangement 20 onto a third focal plane B3 in the direction of the second holding plane Hb. In particular, the image sensor of the optically active arrangement 11 is arranged and oriented on the second holding plane Hb. In order to manufacture a photoactive system in an operating state, the first holding device 3a having the converging lens 12 arranged therein and the second holding device 3b having the photoactive arrangement 12 arranged therein are preferably oriented with respect to each other so that the second distance A2 is substantially equal to the focal length of the converging lens 12 of the photoactive system 10 to be manufactured, i.e. so that the third focal plane B3 of the converging lens 12 at the image sensor of the photoactive arrangement 11 is in the second holding plane Hb.
[0122] The imaging arrangement 20, shown diagrammatically in FIG. 1, is designed to generate an electromagnetic beam. The electromagnetic beam leaves the imaging arrangement 20 via an imaging module 21 arranged in a beam passage plane SE. The imaging module 21 of the imaging arrangement 20 is designed to image the electromagnetic beam at infinity. The imaging arrangement 20 is also designed to focus the electromagnetic beam, which is reflected by the image sensor of the optically active arrangement 11 and converged at infinity in the direction of the beam passage plane SE by the converging lens 12, in order to focus an evaluation image by the imaging module 21 in a first focal plane B1 and capture the evaluation image. Depending on the image quality of the captured evaluation image, the first holding device 3a with the converging lens 12 is adjusted in its orientation and position in relation to the second holding device 3b with the image sensor of the optically active arrangement 11 arranged therein.
[0123] To adjust the focusing lens relative to the image sensor, the first holding device 3a of the apparatus 1 shown schematically in FIG. 1 is movably arranged relative to the imaging device 2 and the second holding device 3b, which are stationary. In particular, the first holding device 3a is translatable along an optical axis O and rotatable about the optical axis O. The first holding device 3a is also translatable along two other axes (not shown) and rotatable about two other axes, which are orthogonal to the optical axis O. The orientation and / or position of the focusing lens relative to the image sensor can be adjusted by translating the first holding device 3a along one of three axes and / or by rotatably moving the first holding device 3a about one of the three axes. When the desired image quality is achieved in the orientation and / or position of the optically active arrangement 11 relative to the optical arrangement 12, the device 1 is designed to hold the first holding device 3a stationary in that orientation and / or position relative to the second holding device 3b for assembly purposes, i.e. for connecting the optical arrangement 12 to the optically active arrangement 11.
[0124] Figures 1a to 1f show a preferred embodiment of the device. The preferred embodiment of the device shown in Figures 1a to 1f is based on the embodiment of the device shown in Figure 1. Unlike the embodiment shown in Figure 1, the embodiment shown in Figures 1a to 1f has two first holding devices 3a and two second holding devices 3b. The device shown in Figures 1a to 1f is designed to produce two photoactive systems.
[0125] The apparatus 1 shown in FIG. 1a has a movable imaging device 2. The imaging device 2 is movable substantially parallel to the first and / or second holding surfaces Ha, Hb of the first and / or second holding devices 3a, 3b. The photoactive system 10 shown on the left side of FIG. 1a is first manufactured. Once the left-side photoactive system is manufactured, the imaging device 2 moves from its left-side position (continuous line) to its right-side position (dashed line) to manufacture a second photoactive system 10 relative to the already manufactured first photoactive system shown on the left side of FIG. 1a. For this purpose, an image stored by the already manufactured photoactive system 10 is virtually superimposed on an image of the photoactive system 10 yet to be manufactured, and the still-to-be-manufactured photoactive system is adjusted accordingly via the first and / or second holding devices 3a, 3b.
[0126] The imaging device 2 shown in Figure 1a, and in particular at least one imaging arrangement 20 of the imaging device 2, can be orbitally pivoted (swiveled) with respect to the fabricated photoactive system 10. In the right-hand position (dotted line) of Figure 1a, the pivoted imaging arrangement 20 is shown schematically.
[0127] The device 1 shown in FIG. 1b is designed so that two fabricated photoactive systems can be simultaneously captured by the imaging device. The imaging arrangement 20 of the imaging device 2 is movable, in particular pivotable. FIG. 1b schematically shows (dotted lines) the orbital pivot position of one of the two imaging arrangements 20 of the imaging device 2. Of course, it may be preferable for the second imaging arrangement 20 of the imaging device 2 to also be pivotable. In this preferred embodiment, there is no need to move the imaging device 2 as in the embodiment shown in FIG. 1a; instead, the first photoactive system (left side of FIG. 1b) is fabricated first, and then the second photoactive system (right side of FIG. 1b) is imaged. To this end, a first portion of at least one imaging arrangement 20 is aligned with the first photoactive system to be fabricated, and a second portion of at least one imaging arrangement 20 is aligned with the second photoactive system to be fabricated. The first and second parts of at least one imaging arrangement 20 correspond in particular to first and second sub-areas of the free aperture of the imaging module 21 of the respective imaging arrangement 20, in particular to the first and second sub-areas of the free aperture of an imaging arrangement 20 designed as a converging lens.
[0128] To produce a photoactive system with the device 1 shown in Fig. 1b, the left and right photoactive systems are alternately illuminated, and an image of the already adjusted and / or assembled left photoactive system and an image of the still-to-be-produced right photoactive system are superimposed, in particular physically, on the imaging device, and the photoactive system to be adjusted and / or assembled is adjusted accordingly via the first and / or second holding device 3a, 3b. The imaging arrangement 20 of such an imaging device 2 preferably comprises a converging lens as the imaging element 21.
[0129] As an example, based on an imaging device 2 with a single imaging arrangement 20, Figures 1c-1e show different preferred embodiments for alternately illuminating the first photoactive system (left side of the figure) and the second photoactive system (right side of the figure). This illumination concept is also applicable to devices 1 with two or more imaging arrangements 20, imaging devices 1, for example as shown schematically in Figure 1b.
[0130] FIG. 1c shows a preferred schematic embodiment of the device 1 having a rotatably mounted shading unit 13a, which alternately shields the left and right photoactive systems from the electromagnetic beam generated by the beam source unit 22 (not shown in FIG. 1c). FIG. 1d shows a preferred schematic embodiment of the device 1 in which a beam source 13b is disposed outside the imaging device 1, and its electromagnetic beam z is coaxially coupled between the beam passage surface SE and the first holding surface Ha to alternately illuminate the left and right photoactive systems. FIG. 1d shows a preferred schematic embodiment of the device 1 in which the left and right photoactive systems are alternately illuminated by an optical fiber 13c, with light from the optical fiber preferably being coupled into the optical arrangement 12 of the photoactive system 10 to be manufactured.
[0131] The device 1 shown in FIG. 1f is designed to simultaneously capture two fabricated photoactive systems 10. To this end, the imaging device 2 in the device shown in this preferred embodiment has two imaging arrangements 20. In this preferred embodiment, the two imaging arrangements 20 are arranged substantially parallel to each other. In particular, the two imaging arrangements 20 of the imaging device 2 are arranged so that the optical axes O of the two imaging arrangements 20 are oriented substantially parallel to each other. The device shown in FIG. 1c includes two imaging arrangements 20, and the optical axes O are oriented substantially perpendicular to the first and / or second holding surfaces. It should be understood that it may also be preferable for the two imaging arrangements with optical axes O to be tilted with respect to the first and / or second holding surfaces Ha and Hb. In this tilted orientation of the two imaging arrangements 20, their optical axes O are oriented parallel to each other. FIG. 1f is a diagram (dotted line) schematically illustrating the pivot position of the imaging device 2.
[0132] In the device 1 shown in Fig. 1f, it is in particular possible to simultaneously produce two photoactive systems, but it is also possible to produce more than two photoactive systems by means of a device 1 comprising more than two imaging arrangements 20 and more than two first and second holding devices 3a, 3b.
[0133] To manufacture two or more photoactive systems, an image of the photoactive system to be manufactured is captured. To manufacture a photoactive system yet to be manufactured and / or assembled, the image of the photoactive system yet to be manufactured is virtually superimposed with an image of the photoactive system already manufactured. Orientation of the first and / or second holding device relative to the photoactive system yet to be manufactured and / or assembled, in particular the photoactive system already manufactured, is performed simultaneously. This has the advantage that images do not need to be stored, saving manufacturing time.
[0134] FIG. 2 shows another preferred embodiment of an apparatus 1 for producing a photoactive system. This preferred embodiment of the apparatus 1 is based on the preferred embodiment of the apparatus 1 shown schematically in FIG. 1, in which the imaging arrangement 20 is focused by an imaging module at infinity in the direction of the first or second holding plane Ha, Hb. Unlike the apparatus 1 shown schematically in FIG. 1, the apparatus 1 shown schematically in FIG. 2 includes an imaging arrangement 20 with an imaging module 21 that focuses a second focal plane B2 at finite distance in the direction of the first or second holding plane Ha, Hb. The apparatus 1 shown schematically in FIG. 2 is particularly suitable for producing a photoactive system having an optical arrangement 12 that, in an operative state, is arranged on a first holding device and focuses an electromagnetic beam reflected by the photoactive arrangement 11 toward the beam passage plane SE onto a focal plane. In this apparatus 1, the first holding device 3a with the optical arrangement 12 arranged thereon in an operative state is arranged with respect to the imaging arrangement so that the focal plane of the optical arrangement in the direction of the beam passage plane SE corresponds to the second focal plane B2. The preferred embodiment shown schematically in Figure 2 also includes a test structure arrangement 25. Such an embodiment is particularly suitable for producing photoactive systems 10 that include low contrast or reflective photoactive arrangements 11. Generally, in the preferred embodiment shown, the electromagnetic beam is preferably split for illumination and for operation with a test structure (not shown).
[0135] A further preferred embodiment of the device 1, shown diagrammatically in FIG. 3, comprises an imaging device 2, first and second holding devices 3a, 3b, an adjustment device 4, an evaluation device 5, a support device 6 and a joining device .
[0136] A preferred embodiment of an apparatus 1 for producing a photoactive system 10, shown schematically in FIG. 3, includes an imaging device 2 having two identical imaging arrangements 20. The first imaging arrangement 20 is arranged according to the imaging arrangement 20 of the preferred embodiment of the apparatus 1 shown schematically in FIG. 1. In particular, first and second holding devices 3a, 3b having first and second holding surfaces Ha, Hb are arranged according to the preferred embodiment shown schematically in FIG. 1. The second imaging arrangement 20 of the imaging device 2 is arranged obliquely with respect to the first imaging arrangement 20, in particular with respect to the first and / or second holding surfaces Ha, Hb of the respective holding devices 3a, 3b. The two imaging arrangements 20 comprise an imaging module 21, a beam source unit 22, a beam splitter unit 23, and an image capturing unit 24. The image capturing unit 24 comprises a camera 24a, power electronics 24b, and an image sensor 24c.
[0137] In this preferred embodiment, the beam source unit 22 is a point source of an electromagnetic beam of visible light. In this preferred embodiment, the beam source unit 22 can also emit invisible light. In operation, the electromagnetic beam generated by the beam source unit 22 impinges on the beam splitter unit 23. A diffusion unit 26 for scattering the electromagnetic beam is arranged between the beam splitter 23 and the beam source unit 22. The beam splitter unit 23 is arranged between the imaging module 21 and the image capturing unit 24. The beam splitter unit 23 deflects a portion of the electromagnetic beam toward the imaging module 21. The electromagnetic beam generated by the beam source unit 22 and deflected by the beam splitter unit 23 exits the imaging arrangement 20 via the imaging module 21, which is arranged in the beam passage plane SE. In a currently preferred embodiment of the apparatus 1, the imaging module 21 is designed to focus the electromagnetic beam exiting the imaging arrangement to infinity. The optical arrangement 12 of the photoactive system to be fabricated focuses an infinitely focused electromagnetic beam onto the photoactive arrangement, as previously described for the preferred embodiment of the device 1 shown schematically in FIG.
[0138] The imaging module 21 of the imaging arrangement 20 is also designed to focus the electromagnetic beam reflected by the optically active arrangement 12 in operation onto a first focal plane B1. In a preferred embodiment of the device 1, as schematically shown in FIG. 2, the image capturing unit 24 of the imaging arrangement is arranged with respect to the imaging module 21 such that the image sensor 24c of the image capturing unit 24 is located in the first focal plane B1 of the imaging module 21. The image sensor 24c of the imaging unit 24 captures an evaluation image of the electromagnetic beam reflected by the optically active arrangement 11. A filter unit 27 for filtering electromagnetic beams of specific wavelengths is provided between the beam splitter unit 23 and the image capturing unit. In particular, the filter unit 27 preferably allows only electromagnetic beams of short wavelengths, in particular beams of a narrow wavelength band, to pass toward the image capturing unit. This advantageously increases the imaging clarity or contrast of the respective evaluation image. The power electronics module 24b may be designed, in particular, to determine the imaging quality of the captured evaluation image and, depending on the determined imaging quality, provide one or more control signals for controlling the adjustment device 4. The power electronics module 24b may preferably be coupled in direct signal communication with a conditioning device (not shown). In particular, the power electronics module 24b may use conventional autofocus functionality of the image capturing unit 24 to calculate and provide control signals to the conditioning device 4.
[0139] In a preferred embodiment of the apparatus 1, as shown schematically in FIG. 3, the evaluation device 5 includes an integrated electronic circuit 5a and a control unit 5b. The power electronics module 24b is designed to determine the imaging quality of the captured evaluation image and, depending on the determined imaging quality, provide one or more control signals for controlling the adjustment device 4. The control unit is designed to transmit one or more control signals to the adjustment device 4, which is connected in signal communication with the adjustment device 4. The adjustment device 4 includes a driving means 4a, which preferably includes one or more piezoelectric or electromagnetic actuators. In this preferred embodiment, other actuators would preferably be possible additionally or alternatively. The driving means 4a drives the first holding device 3a in response to the one or more control signals. In response to the control signal, the orientation and / or position of the first holding device 3a is changed with respect to the second holding device 3b until the evaluation image of the photoactive arrangement 11 of the photoactive system 10 to be manufactured is adjusted such that the desired image quality is determined with respect to the optical arrangement 12 of the photoactive system 10 to be manufactured.
[0140] In order to adjust the first holding device 3a with respect to the second holding device 3b, a preferred embodiment of the apparatus 1, shown schematically in Fig. 3, includes a support device designed to support the first holding device 3a in an operating state so that the first holding device 3a can move the optical arrangement translationally along three mutually orthogonally oriented axes and rotationally about said three axes. For adjustment purposes, it may be preferred that the first holding device 3a is translationally adjustable and the second holding device is rotationally adjustable, or vice versa. It may also be preferred that both holding devices 3a, 3b have up to six degrees of freedom.
[0141] The joining device is designed to assemble the tuned light active system 10. In particular, the joining device is designed to join optical arrangement 12 of the tuned light active system 10 to optical active arrangement 11 of the tuned light active system 10 in an operational state.
[0142] A preferred embodiment of the apparatus 1, shown schematically in a side view in Fig. 4 and in a top view in Fig. 5, comprises an imaging device 2 having four identical imaging arrangements 20. The first imaging arrangement 20 is arranged according to the imaging arrangement 20 of the preferred embodiment of the apparatus 1 shown schematically in Fig. 1. In particular, the first and second holding devices 3a, 3b having first and second holding surfaces Ha, Hb are arranged according to the preferred embodiment shown schematically in Fig. 1. The other three imaging arrangements 20 are arranged obliquely with respect to the first imaging arrangement 20, preferably on a circular path (dashed / dotted line in Fig. 5).
[0143] FIG. 6 is a schematic top view showing the photoactive arrangement 11 of the photoactive system 10 to be manufactured. The photoactive arrangement shown in FIG. 6 is manufactured by the apparatus 1 according to FIGS. 4 and 5. The top view of the photoactive arrangement 11 also shows a schematic third focal plane B3 assigned to the imaging arrangement 20 of the apparatus shown in FIGS. 4 and 5, respectively. Each third focal plane B3 is an imaging capture area of each of the four imaging arrangements 20, which is captured to generate a respective evaluation image and its evaluation. The crosses placed in the imaging capture areas are adjustment marks physically inserted immediately adjacent to the photoactive arrangement.
[0144] The device 1, as shown schematically in FIGS. 4 to 6, allows the photoactive arrangement 11 to be adjusted with respect to the optical arrangement 12. To this end, a coarse adjustment can first be performed at the center of the photoactive arrangement 11, perpendicular to the focal plane B3 shown in FIG. 6. Coarse focusing then coarsely adjusts the distance between the photoactive arrangement 11 and the optical arrangement 12. Based on the three adjustment marks, the photoactive arrangement 11 is translationally oriented with respect to the optical arrangement 12 along two axes. The photoactive arrangement 11 can then be oriented about two orthogonal axes in the focal plane B3. To this end, the imaging sharpness in the edge regions of the photoactive arrangement 11 is preferably captured, and the photoactive arrangement is adjusted, i.e., rotated about said two axes, until the imaging sharpness in the edge regions is at least similar, and preferably substantially identical. In particular, the objective of the adjustment is to achieve symmetry of the modulation transfer functions of the respective edge regions. It may also be preferable to perform the two aforementioned steps in reverse order. In this case, it may be preferable to perform a fine adjustment. When fine-tuning, in this embodiment, modulation transfer functions are determined for the four imaging regions, and the values of the modulation transfer functions are fine-tuned according to preference. During fine-tuning, it may be preferable for the photoactive arrangement 11 to be adjusted with respect to the optical arrangement 12 so that the imaging sharpness of the imaging arrangement 20 is maximized for the central imaging capture region. However, it may also be preferable for the photoactive arrangement 11 to be fine-tuned with respect to the optical arrangement 12 so that the imaging sharpness of one or more imaging arrangements 20 capturing one of the edge regions of the photoactive arrangement 11 is maximized.
[0145] FIG. 7 is a schematic flow diagram of a first preferred embodiment of a method 100 for manufacturing a photoactive system 10. This preferred embodiment of the method 100 is particularly suitable for manufacturing an inactive photoactive system 10. The preferred embodiment includes a step 101 of providing an apparatus 1 for manufacturing the photoactive system 10, such as one of the preferred embodiments of the apparatus 1 schematically shown in FIGS. 1-6 above. The preferred embodiment of the method 100 includes a further step of providing and arranging 102 a photoactive arrangement 12 in a second holding device 3b. The preferred embodiment of the method 100 includes a further step of providing and arranging 103 an optical arrangement 12 in a first holding device 3a. This preferred embodiment provides the photoactive arrangement 11 and the optical arrangement 12 of the photoactive system 10 to be manufactured to the apparatus 1. To this end, the photoactive arrangement 11 and the optical arrangement 12 are provided to the respective holding devices 3a, 3b. The flow diagram shown schematically in FIG. 7 illustrates the logistics of the apparatus 1.
[0146] The flow diagram shown schematically in Figure 8 illustrates another preferred embodiment of a method 100. The preferred embodiment of the method 100 is based on the preferred embodiment of the method 100 shown in Figure 7. In addition to the step 101 of providing an apparatus 1 for manufacturing a photoactive system 10, the step 102 of providing and arranging a photoactive arrangement 12 in a second holding device 3b, and the step 103 of providing and arranging the optical arrangement 12 in a first holding device 3a, the method in the preferred embodiment shown schematically in Figure 8 comprises a step 110 of adjusting the optical arrangement with respect to the photoactive arrangement, and / or a step 120 of assembling the adjusted optical arrangement with respect to the photoactive arrangement, and / or a step 130 of testing the assembled optical arrangement with respect to the photoactive arrangement.
[0147] The adjustment step 110 may include one or more substeps. A first preferred substep in the adjustment step 110 is providing an electromagnetic beam 111 for capturing an evaluation image of the photoactive arrangement 11 of the photoactive system 10 to be fabricated or of a test structure. Another optional substep in the adjustment 110 is capturing an evaluation image 112 of the photoactive arrangement 11 of the photoactive system 10 to be fabricated in a beam passage plane (SE) of the at least one imaging arrangement 20. A step in the adjustment method 110 may include capturing an evaluation image 113 in the beam passage plane SE of the at least one imaging arrangement 20. In particular, the adjustment method 110 includes evaluating the captured evaluation image 114. Finally, a fifth preferred substep in the adjustment 110 is moving 115 the first holding device 3 a having the optical arrangement 12 disposed therein and / or the second holding device 3 b having the photoactive arrangement 11 disposed therein in response to the evaluation of the captured evaluation image. The adjustment step 110 is preferably performed iteratively.
[0148] The assembly step 120 includes, in particular, connecting the optical arrangement 12 to the optically active arrangement 11 of the manufactured optically active system 10. In particular, when carrying out the assembly step 120 or the adjustment step, it may be necessary to take into account shrinkage of connections etc. during assembly by providing an offset that compensates for shrinkage. Shrinkage of connections is due, for example, to heat input during soldering or welding or gluing. In the case of gluing, such shrinkage occurs, for example, during the phase transition of the adhesive used for gluing from a liquid to a solid aggregate state.
[0149] The testing step 130 may include one or more optional sub-steps. The testing step 130 may in particular include providing 111 an electromagnetic beam to capture an evaluation image of the photoactive arrangement 11 of the manufactured photoactive system 10. The testing 130 may also include capturing 112 an evaluation image of the photoactive arrangement 11 of the adjusted and / or assembled photoactive system 10 or of a test structure on the beam passage plane SE of the at least one imaging arrangement 20. The testing 130 may also include capturing 113 an evaluation image of the at least one imaging arrangement 20. In particular, the testing preferably includes as a sub-step evaluating 114 the captured evaluation image.
[0150] The step 114 of evaluating each captured evaluation image comprises, in particular, the following steps: determining a frequency response characteristic of the captured evaluation image and / or comparing the captured evaluation image with an evaluation image of a photoactive system that has already been adjusted and / or assembled according to the method described above, in particular the evaluation images being captured simultaneously or sequentially in each at least one image processing arrangement 20, the comparison of the simultaneously captured evaluation images being based on a physical superposition in each at least one imaging arrangement 20 and / or in particular the comparison of the simultaneously or sequentially captured evaluation images being based on a virtual superposition in each at least one imaging arrangement 20, and / or comparing the captured evaluation image and / or the determined frequency response characteristic of the captured evaluation image with a desired target condition.
[0151] Step 114 of evaluating each captured evaluation image includes, inter alia, generating a control signal for moving the first and / or second holding device, inter alia, according to a comparison of the captured evaluation image with an evaluation image of a photoactive system already adjusted and / or assembled according to the method described above, and / or according to the determined frequency response characteristic, and / or according to the determined offset, and / or, if the captured evaluation image does not match the desired target state, according to a comparison of the captured evaluation image with the desired target state, and / or, if the frequency response characteristic of the captured evaluation image does not match the desired target state, according to a comparison of the determined frequency response characteristic of the captured evaluation image with the desired target state.
[0152] The method may also preferably further comprise the step of moving the imaging device 2 (not shown) to sequentially and / or simultaneously produce multiple photoactive systems 10 that are produced relative to each other. [Explanation of symbols]
[0153] 1. Apparatus for producing photoactive systems 2. Imaging device 3a / 3b First and second holding devices 4 Adjustment device 4a Driving means 5 Evaluation equipment 5a Integrated Electronic Circuits 5b Control unit 6 Support device 7 Bonding equipment 10 Photoactivation Systems 11 Photoactive configuration 12 Optical arrangement 13a Light blocking unit 13b Beam source 13c Optical Fiber 20 At least one imaging configuration 21 Imaging module 22 Beam Source Unit 23 Beam splitter unit 24 Image Capturing Unit 24a Camera 24b Power Electronics Module 24c image sensor 25 Test Pattern Devices 26 Diffusion Unit 27 Filter unit 100 Method for producing a photoactive system 101 Providing an apparatus for producing a photoreaction system 102 Providing and arranging a photoactive arrangement on the second holding device 103 Providing and arranging an optical arrangement on the first holding device 110 Adjusting the optical configuration with respect to the photoactive configuration 111 Providing a beam for capturing an evaluation image of the photoactive system being fabricated 112. Capturing evaluation images of the photoactive system generated in the beam passage plane of at least one imaging arrangement. 113. Capturing an evaluation image of the beam passage surface of at least one imaging arrangement. 114 Evaluating the captured evaluation images, and / or 115. Moving the first holding device and / or the second holding device in response to evaluation of the captured evaluation image. 120 Assembling a Coordinated Optical Arrangement in Relation to a Photoactive Arrangement 121 Connecting, especially bonding, optical arrangements to optically active arrangements 130 Testing an assembled optical arrangement in relation to a photoactive arrangement A1 / A2 1st and 2nd distance SE beam passage surface Ha / Hb first and holding surface O optical axis
Claims
1. An apparatus (1) for manufacturing a photoactive system (10), in particular a passive photoactive system (10), in particular an electro-optical and / or optoelectronic system for projection and / or imaging electro-optical systems, said apparatus comprising: An imaging device (2) having at least one imaging arrangement (20), wherein the at least one imaging arrangement (20) has a beam passage plane (SE) and an optical axis (O), and the at least one imaging arrangement (20) comprises: generating an electromagnetic beam extending along a beam path and passing through the imaging arrangement (20) in the beam passage plane (SE); capturing an evaluation image of the electromagnetic beam reflected by the optically active arrangement (11) in a first focal plane (B1) of the imaging arrangement (20); capturing the evaluation image captured at the first focal plane (B1); At least one imaging device (2) designed to a first holding device (3a) having a first holding surface (Ha) for holding the optical arrangement (12) of the photoactive system (10) to be manufactured on said first holding surface (Ha); a second holding device (3b) having a second holding surface (Hb) for holding the photoactive arrangement (11) on the second holding surface (Hb); Equipped with 10. An apparatus, characterized in that a first holding device (3a) having the first holding surface (Ha) and / or a second holding device (3a) having the second holding surface (Ha) are arranged movably with respect to the imaging device (2).
2. 2. The apparatus according to claim 1, wherein the first holding device (3a) is arranged between the second holding device (3b) and the imaging device (2).
3. the first and / or second holding device is designed to accommodate two or more optical arrangements and / or two or more optically active arrangements, said first holding device (3a) is preferably designed to rotate and / or translate two or more optical arrangements (12) independently of one another; and / or 3. Apparatus according to claim 1 or 2, wherein the second holding device (3b) is preferably designed to rotate and / or translate two or more optically active arrangements (11) independently of one another.
4. said imaging device (2) being designed to be movable for the sequential and / or simultaneous production of multiple photoactive systems produced relative to one another; and / or a first portion of at least one of the imaging arrangements is aligned with a first photoactive system to be manufactured and a second portion of at least one of the imaging arrangements is aligned with a second photoactive system to be manufactured; and / or 4. The apparatus according to claim 1, wherein the imaging device (2) has two imaging arrangements (20), the two imaging arrangements (20) being arranged such that their optical axes (O) extend parallel to each other, one of the two imaging arrangements (20) being aligned with a photoactive system to be manufactured, and the other of the two imaging arrangements (20) being aligned with another photoactive system to be manufactured.
5. 5. The apparatus according to claim 1, wherein the first holding surface (Ha) of the first holding device (3a) is arranged substantially parallel with respect to the beam passage surface (SE) of at least one of the imaging arrangements (20) and / or arranged non-parallel away from at least one other beam passage surface (SE) of at least one of the imaging arrangements (20).
6. At least one of the imaging devices (2) An imaging module (21) in which the beam passing surface (SE) is arranged and which has the optical axis (O), the imaging module (21) comprising: Imaging at infinity or finite distance in the direction of the second holding surface (Hb) along the optical axis including the second focal length of the second focal plane (B2), and / or an imaging module (21) designed to image at infinity or finite distance in the opposite direction including the first focal length of the first focal plane; and / or a beam source unit (22) for providing an electromagnetic beam for generating and capturing said evaluation image; and / or a beam splitter unit (23) for deflecting at least a portion of the electromagnetic beam of the beam source unit (22) towards the photoactive system (10) to be manufactured, and / or an image capturing unit (24) designed to capture the evaluation image of the photoactive system (10) to be manufactured, the image capturing unit (24) being positioned in the first focal plane of the imaging module (21) to capture the evaluation image of the photoactive system (10) to be manufactured; and / or a diffusion unit (26) for scattering the electromagnetic beam from the beam source unit (22), and / or a filter unit (27) for filtering the electromagnetic beam having a wavelength to be filtered, and / or a test structure device (25) for generating a test structure of the photoactive arrangement (11) of the photoactive system (10) to be manufactured; The apparatus according to any one of claims 1 to 5, comprising:
7. Apparatus according to any of the preceding claims, wherein the imaging device (2) comprises a collimator, preferably a focusable collimator, in particular an autocollimator.
8. The image capturing unit (24) a camera (24a) for capturing the evaluation image of each of at least one of the imaging locations, generated by the electro-optical system (10) to be manufactured; and / or a power electronics module (24b) for processing and transmitting each of the evaluation images captured by the image capturing unit (24), in particular; and / or In particular, an image sensor (24c) for capturing each of the evaluation images generated by the electro-optical system (10) to be manufactured. The apparatus according to any one of claims 1 to 7, comprising:
9. 9. The apparatus according to claim 1, further comprising an adjusting device (4) for adjusting the orientation and / or position of the first holding surface (Ha) of the first holding device (3a) and / or the second holding surface (Hb) of the second holding device (3b) relative to the beam passage plane (SE) of at least one of the imaging arrangements (20), the adjusting device (4) preferably comprising a drive means (4a).
10. a support device (6) designed to translationally and / or rotationally support the first holding device (3a) and / or the second holding device (3b) relative to the image-forming device (2) in an operational state, and / or drive means (4a) designed to translate and / or rotate said first holding device (3a) and / or said second holding device (3b) in an operating state; The apparatus according to any one of claims 1 to 9, comprising:
11. 11. The device according to any of the preceding claims, comprising a joining device (7) designed to connect the photoactive arrangement (11) and the optical arrangement (12) to one another, in particular to join them jointly to one another.
12. an evaluation device (5) for evaluating the captured evaluation images of at least one of the imaging arrangements, The evaluation device (5) Preferably, in signal communication with the imaging device (2), in particular with the imaging unit (24) and / or with the adjustment device (4) and / or with the joining device; and / or in particular, a power electronics module (24b) for processing and transmitting the evaluation images captured by each of the image capturing units (24); and / or In particular, it has a control unit (5b) for controlling the adjustment device (4) and / or for controlling the joining device depending on the result of evaluating each of the captured evaluation images, The device according to any of the preceding claims, wherein the control unit includes in particular an autofocus module for automating the focusing of the device in an operational state.
13. A method (100) for manufacturing a photoactive system (10), in particular a passive photoactive system (10), in particular an electro-optical and / or optoelectronic system for projection and / or imaging electro-optical systems, said method comprising the steps of: Providing (101) a device (1) according to any one of claims 1 to 10, and / or a step (102) of providing and arranging a photoactive arrangement (11) on said second holding device (3b), in particular a step (102) of providing and arranging two or more photoactive arrangements (11) on said second holding device (3b); and / or a step (103) of providing and arranging an optical arrangement (12) on said first holding device (3a), in particular a step (103) of providing and arranging two or more optical arrangements (112) on said first holding device (3b); A method comprising:
14. A step (110) of adjusting the optical arrangement (12) with respect to the photoactive arrangement (11), in particular comprising: providing (111) an electromagnetic beam for capturing an evaluation image in each of said at least one imaging location; and / or capturing (112) said evaluation images in each of said at least one imaging arrangement (20); and / or capturing (113) said evaluation image in each of said at least one imaging arrangement (20); and / or evaluating (114) each captured evaluation image; and / or a step (115) of moving the first holding device (3 a) with the optical arrangement (12) arranged therein and / or the second holding device (3 b) with the photoactive arrangement (11) arranged therein depending on the evaluation of each captured evaluation image. and / or the adjusting step (110) comprising: A step (120) of assembling the optical arrangement (12) adjusted with respect to the photoactive arrangement (11), in particular comprising: a step (121) of connecting, in particular bonding, said optical arrangement (12) to said photoactive arrangement (11); said assembling step (120) comprising: A step (130) of testing the optical arrangement (12) assembled opposite the photoactive arrangement (11), in particular - providing an electromagnetic beam (111) for capturing an evaluation image in each of said at least one imaging location; and / or capturing (112) the evaluation image of the adjusted and / or assembled photoactive system (10) in each of the at least one imaging arrangement (20); and / or capturing (113) said evaluation image in each of said at least one imaging arrangement (20); and / or Evaluating each captured evaluation image (114). a testing step (130) comprising: moving said imaging device (2) to produce a plurality of photoactive systems which are generated sequentially and / or simultaneously relative to one another; The method of claim 13 comprising:
15. The step of capturing (113) the evaluation image at at least one of the imaging locations (20) comprises: Positioning (113a) the optical arrangement (12) at infinity with respect to the imaging device (2) and / or the photoactive arrangement (11), and / or placing said optical arrangement (12) in a setpoint position and / or setpoint orientation with respect to said imaging device (2) and / or said photoactive arrangement (11); and / or Evaluating each captured evaluation image (114) includes: Determining the frequency response characteristics of the captured evaluation image; and / or 15. Comparing the captured evaluation image with a captured evaluation image of a photoactive system previously adjusted and / or assembled according to the method of claim 14, In particular, the evaluation images are captured simultaneously or sequentially in each of the at least one imaging arrangement (20), In particular, the comparison of the simultaneously captured evaluation images is based on a physical superposition in each of the at least one imaging arrangement (20), and / or In particular, the comparison of the simultaneously or sequentially acquired evaluation images is based on a virtual superposition in each of the at least one imaging arrangement (20). steps, and / or comparing the captured evaluation image and / or the determined frequency response characteristics of the captured evaluation image with a desired target condition; and / or generating a control signal for moving the first and / or second holding device, and / or according to a comparison of the captured evaluation image with a captured evaluation image and / or a determined frequency response characteristic and / or a determined offset of a photoactive system that has been pre-adjusted and / or assembled according to the method of claim 14 . if the captured evaluation image does not match a desired target state, according to a comparison of the captured evaluation image with a desired target state; and / or If the frequency response characteristics of the captured evaluation image do not match the desired target state, then, according to a comparison of the frequency response characteristics of the determined evaluation image with the desired target state, generating control signals for moving the first and / or second holding devices; 15. The method of claim 13 or 14, comprising:
16. The method (100) according to any of claims 13 to 15, wherein the photoactive arrangement (11) of the photoactive system (10) to be manufactured is inactivated during conditioning (110) and / or assembly (120) and / or testing (130).
17. Use of the device (1) according to any of claims 1 to 12 for manufacturing a photoactive system (10), in particular a passive photoactive system (10), in particular an electro-optical and / or optoelectronic system for a projection and / or imaging electro-optical system.
Citation Information
Patent Citations
Tester for solar cell
JP2010056252A
Inspection device, inspection method, and item manufacturing method
JP2018179789A
Apparatus And Method For Adjusting And / Or Calibrating A Multi-Camera Module As Well As The Use Of Such An Apparatus
US20170132774A1
Camera module adjustment device and camera module adjustment method
WO2019159427A1