Brush components for grinding units in workpiece grinding machines

Abstract

The liquid-proof box, which houses the cooling liquid nozzles and other components that spray cooling liquid to cool the workpiece during grinding and other processes, attached to the grinding unit having a grinding wheel for grinding the workpiece, is equipped with a function to prevent the cooling liquid from being sprayed to the outside. [Solution] An opening 111b is formed in the wall plate 111a on the side of one of the pair of clamp portions 4 and 5 that grip the workpiece 12, to accommodate at least a portion of the axial direction of the clamp portion 4. A liquid-proof brush 117 is continuously fixed around the opening 111b on the inner circumferential surface of the wall plate 111a in the circumferential direction of the opening 111b to seal the gap between the opening 111b and the circumferential surface of the clamp portion 4, and the end of the liquid-proof brush 117 on the circumferential surface side of the clamp portion 4 is brought into contact with the circumferential surface of the clamp portion 4, or is in a state where it can come into contact with it.

Description

Technical Field

[0001] The present invention relates to a brush structural material for a grinding unit having a function of preventing external ejection of a coolant for suppressing heating of a workpiece during grinding of the workpiece to be ground.

Background Art

[0002] A workpiece grinding apparatus for grinding or polishing the circumferential surface of a workpiece such as an ingot whose surface is finished in a cylindrical shape has a grindstone for grinding the workpiece and a nozzle for injecting a coolant for cooling the workpiece during grinding, etc., and is provided with a cover or a box for preventing scattering of grinding chips and the coolant generated during grinding (see Patent Documents 1 and 2).

[0003] The cover has a size (volume) that can surround at least a partial section closer to the workpiece of the workpiece and a pair of clamp parts that hold the workpiece, and an opening for inserting the clamp part is formed in the wall plate facing the axial direction of the workpiece (paragraph 0059, FIG. 3 of Patent Document 1, paragraph 0026, FIG. 1 of Patent Document 2).

[0004] Since grinding chips and coolant can scatter outside the cover from the opening of the wall plate during grinding, a flexible liquid stopper such as a brush for preventing scattering is attached to the opening (paragraph 0064, FIG. 5 of Patent Document 1, paragraph 0026, FIG. 3 of Patent Document 2).

[0005] However, in any of the above examples, since the liquid stopper is disposed outside the cover, it is difficult to keep the grinding chips and the coolant inside the cover, and there is a possibility that some of the grinding chips and the coolant may leak outside the cover.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

[0007] Furthermore, in Patent Document 1, a water jet unit that sprays water onto the surface of the workpiece (object to be processed) is arranged circumferentially around the workpiece inside the cover, forming a water film that primarily prevents grinding debris and coolant from scattering outside the cover (paragraph 0063). From this, it can be said that since the liquid-stopping material only needs to play a secondary role, and Patent Document 1 has a double effect of preventing the leakage of grinding debris, etc., with the water jet unit and the liquid-stopping material, it can also be said that placing the liquid-stopping material outside the cover can also be expected to prevent the leakage of grinding debris, etc.

[0008] However, if we focus on the fluid-stopping material placed on the outside of the cover, the fluid-stopping material is not in a state where deformation due to pressure acting from the inside to the outside of the cover is restrained (prevented), and when pressure is applied from the inside of the cover, it can deform from the inside to the outside of the cover. Therefore, in this case, the fluid-stopping material has no capacity to retain grinding debris and the like that would otherwise scatter to the outside through the opening, so it is difficult for fluid-stopping material placed on the outside of the cover to completely retain grinding debris and the like inside the cover.

[0009] In Patent Document 1, the end of the fluid-stopping material (brush) on the workpiece side is also in contact with the surface (circumferential surface) of the workpiece (paragraph 0064). However, if the pressure from inside the cover is greater than the frictional force due to the contact, the effect of preventing deformation of the fluid-stopping material toward the outside of the cover cannot be expected. Therefore, the contact state of the fluid-stopping material with the workpiece cannot be said to be effective against the scattering of grinding debris, etc.

[0010] Based on the above background, the present invention proposes a brush component for a grinding unit that can effectively prevent the scattering of grinding debris and other materials that would otherwise scatter to the outside. [Means for solving the problem]

[0011] The brush component for the grinding unit in the work grinding apparatus according to claim 1 comprises a pair of clamping parts supported on the support so as to be rotatable around the axis together with the workpiece while gripping the workpiece, which are facing each other in the longitudinal direction of the support base and approaching each other, A rotational drive device that rotates each of the pair of clamping parts that grip the workpiece together with the support part around the axis of the clamping part, A linear drive device that moves at least one of the pair of clamp portions, together with the support portion that supports that clamp portion, in a linear motion in the longitudinal direction relative to the support base, A workpiece grinding apparatus comprising a grinding unit having a grinding wheel for grinding or polishing the workpiece, which is installed on the support base so as to be able to move linearly in the longitudinal direction of the support base, An attachment to the grinding unit, which is capable of linear motion in the longitudinal direction of the support base, moves together with the grinding unit when the grinding unit moves toward one of the clamping parts, surrounding the pair of clamping parts and the workpiece held by both clamping parts. The wall plate on the side of the clamp portion is formed to have an opening that allows the grinding unit to take in at least a portion of the workpiece side of the clamp portion in the axial direction when the grinding unit moves toward the clamp portion side. A plurality of these liquid-proof brushes are arranged around the opening on the inner surface of the wall panel, filling the gap between the opening and the circumferential surface of one of the clamp portions, and continuously fixed in the circumferential direction of the opening, with the end on the circumferential surface side of one of the clamp portions in contact with or in a state where it can come into contact with the circumferential surface of one of the clamp portions. The structure comprises numerous linear members and a holder that holds the entire end of one side of these numerous linear members, the holder being fixed to the wall plate adjacent to each other in the circumferential direction of the opening, and the linear members being in contact with or overlapping with the linear members of the brush components adjacent to each other in the circumferential direction of the opening.

[0012] "A pair of clamping parts supported by the support section, facing each other in the longitudinal direction of the support base, gripping the workpiece when they are close together" means that, as shown in Figures 1 to 3, a pair of clamping parts 4 and 5 are arranged facing each other in the longitudinal direction of the support base 2 that supports the workpiece grinding device 1, gripping (clamping) the workpiece 12 in its axial direction, and each clamping part 4 and 5 is supported (held) by the support sections 6 and 7, respectively. "Longitudinal direction of the support base 2" refers to the length direction (long side direction) when the support base 2 is viewed in plan or elevation. "Axial direction of the workpiece 12" refers to the axial direction of the workpiece 12.

[0013] "A pair of clamping parts supported by a support so as to be rotatable around the axis together with the workpiece while gripping the workpiece" means that when the pair of clamping parts 4 and 5 are gripping the workpiece 12, the pair of clamping parts 4 and 5 and the workpiece 12 are rotatable around the axis together with the support parts 6 and 7. "Axis" refers to the axis of the clamping parts 4 and 5 and the support parts 6 and 7, but is also the axis of the workpiece 12. The pair of clamping parts 4 and 5 constitute the gripping device 3.

[0014] The "rotary drive device that rotates each of the pair of clamping parts that grip the workpiece together with the support parts around the axis of the clamping parts" refers to the rotation of the pair of clamping parts 4 and 5 that grip the workpiece 12, and the support parts 6 and 7 that support each of the clamping parts 4 and 5, around the axis of the clamping parts 4 and 5. The rotary drive device is a motor or the like. The rotary drive device moves one clamping part 4 (5) and the other clamping part 5 (4) together with the support parts 6 and 7 that support them, and rotates them simultaneously.

[0015] The phrase "linear drive device that causes at least one of a pair of clamping parts to move linearly in the longitudinal direction relative to the support base, together with the support part that supports that clamping part" means the following: That is, the linear drive device 8 that causes one of the pair of clamping parts 4, 5 and the support part 6, 7 that supports it to reciprocate (move linearly) in the longitudinal direction of the support base 2 may be connected to only one of the clamping parts 4, 5 (support part 6, 7), or it may be connected to both clamping parts 4, 5 (support parts 6, 7). The linear drive device 8 is connected to the clamping part 4, 5 or the support part 6, 7 directly or indirectly.

[0016] For the pair of clamping parts 4 and 5 to grip the workpiece 12, it is basically sufficient to reciprocate either one of the clamping parts 4(5) (supporting part 6(7)). However, if both clamping parts 4 and 5 (supporting parts 6 and 7) are made reciprocable, the work efficiency when gripping the workpiece 12 will be increased or fine adjustments will be possible.

[0017] "A workpiece grinding device comprising a grinding unit having a grinding wheel for grinding or polishing a workpiece, which is mounted on a support base so as to be able to move linearly in the longitudinal direction of the support base" means that the components of the workpiece grinding device 1 include a grinding unit 11 mounted on a support base 2 so as to be able to move linearly in the longitudinal direction.

[0018] The "liquid-proof box attached to the grinding unit, which moves with the grinding unit when the grinding unit moves to one clamp section that is freely movable in the longitudinal direction of the support base, and which surrounds the pair of clamp sections and the workpiece gripped by both clamp sections" means that when the grinding unit 11 moves on the support base 2 to one clamp section 4(5), the workpiece 12 and at least a portion of the pair of clamp sections 4 and 5 that grip it, on the workpiece 12 side, are surrounded within the liquid-proof box 111, which is part of the grinding unit 11. Before moving to one clamp section 4(5), the grinding unit 11 is located on the opposite side of the clamp section 4(5), on the other clamp section 5(4) side.

[0019] The statement that "an opening for taking in at least a partial section on the workpiece side in the axial direction of one clamping part is formed in the wall plate on the side of one clamping part when the grinding unit moves to the side of one clamping part" means that an opening 111b is formed in the wall plate 111a that constitutes the liquid-proof box 111 and is located on the side of one clamping part 4(5) so that the workpiece 12 and one clamping part 4(5) can enter the liquid-proof box 111 when the grinding unit 11 moves.

[0020] The statement that "a liquid-proof brush for closing the gap between the opening and the peripheral surface of one clamping part is continuously fixed in the circumferential direction of the opening around the inner peripheral surface of the wall plate" means that the liquid-proof brush 117 is continuously fixed in the circumferential direction of the opening 111b so as to fill the gap between the peripheral surface (outer peripheral surface) of the clamping part 4(5) and the opening 111b when the clamping part 4(5) is inserted through the opening 111b on the inner peripheral surface of the wall plate 111a. The "inner peripheral surface of the wall plate 111a" refers to the inner side surface of the liquid-proof box 111.

[0021] "Continuously" means that as described later, the liquid-proof brush 117 is composed of a plurality of (a plurality of) brush constituent materials 117A (Claim 1), and when looking at the opening 111b from the front as shown in FIGS. 14 and 15, the adjacent brush constituent materials 117A, 117A are arranged such that there is no gap between the linear materials 117a, 117a of the adjacent brush constituent materials 117A, 117A.

[0022] The liquid-proof brush 117 is generally plate-shaped such as a disc shape, and the edge near the opening 111b has an annular shape corresponding to the shape of the opening 111b so that one clamping part 4(5) can be inserted through from the opening 111b. The liquid-proof brush 117 is fixed to the wall plate 111a at a position on the side far from the opening 111b around the opening 111b and is continuous toward the opening 111b in the radial direction (radius direction) of the opening 111b. "Fixed" also includes being detachably fixed.

[0023] When viewed in the radial direction of the opening 111b, except for the portion of the liquid-proof brush 117 that protrudes from the opening 111b toward the clamp portion 4(5), the other portions are in a state of being in contact with or capable of contacting the inner peripheral surface of the wall plate 111a around the opening 111b as shown in FIGS. 11, FIG. 12-(c), and FIG. 16-(c). The "portion of the liquid-proof brush 117 other than the portion that protrudes from the opening 111b toward the clamp portion 4(5)" is the portion (section) where the liquid-proof brush 117 overlaps the wall plate 111a when viewing the wall plate 111a from the front inside the liquid-proof box 111. The portion of the liquid-proof brush 117 that overlaps the wall plate 111a is in a state of being in contact with or capable of contacting the inner peripheral surface of the wall plate 111a.

[0024] The "state of being in contact" means that at least a part of the above-mentioned linear member 117a, which is the portion located on the wall plate 111a side of the liquid-proof brush 117, is in contact with the inner peripheral surface of the wall plate 111a. The "state of being capable of contacting" means that when viewed in the radial direction of the opening 111b, when the pressure from the inside of the liquid-proof box 111 to the outside occurs due to the injection of the cooling liquid from the cooling liquid nozzle 113, the portion (section) of the liquid-proof brush 117 (linear member 117a) near the clamp portion 4(5) is in a state of contacting the inner peripheral surface of the wall plate 111a.

[0025] The "liquid-proof brush in which the end portion on the peripheral surface side of one clamp portion is in contact with the peripheral surface of one clamp portion" means that when viewed in the radial direction of the opening 111b, the tip portion on the clamp portion 4(5) side of the portion (section) that transitions from the portion of the liquid-proof brush 117 (linear member 117a) on the wall plate 111a side far from the opening 111b to the opening 111b side is in contact with the peripheral surface of the clamp portion 4(5).

[0026] "In contact with the circumferential surface of the clamp portion 4(5)" means that when the grinding unit 11 moves toward one of the clamp portions 4(5) and at least a portion of the axial workpiece 12 side of one of the clamp portions 4(5) is taken into the opening 111b of the wall plate 111a, the end of the liquid-proof brush 117 (linear material 117a) on the circumferential surface side of one of the clamp portions 4(5) comes into contact with the circumferential surface of one of the clamp portions 4(5), as shown in Figure 12-(c). In this case, as shown in Figure 12-(c), the end of the liquid-proof brush 117 (the tip portion of the linear material 117a) protrudes from the opening 111b toward the clamp portion 4(5).

[0027] "A liquid-proof brush in which the circumferential end of one clamping portion can come into contact with the circumferential surface of the other clamping portion" means that when at least a portion of one clamping portion 4(5) on the axial side towards the workpiece 12 is taken into the opening 111b of the wall plate 111a, the circumferential end of the liquid-proof brush 117 (linear material 117a) on the circumferential side of one clamping portion 4(5) (the tip of the linear material 117a) approaches to the extent that it comes into contact with the circumferential surface of one clamping portion 4(5). In this case, the end of the liquid-proof brush 117 (the tip of the linear material 117a) does not necessarily protrude from the opening 111b toward the clamping portion 4(5) and does not come into contact with the circumferential surface of the clamping portion 4(5).

[0028] When the end of one clamp portion 4(5) of the liquid-proof brush 117 (linear material 117a) is in contact with the circumferential surface of the clamp portion, the grinding unit 11 moves toward the clamp portion 4(5), and when at least a portion of the clamp portion 4(5) on the axial side toward the workpiece 12 is taken into the opening 111b of the wall plate 111a, the portion (section) of the liquid-proof brush 117 closer to the opening 111b continues to be in contact with the clamp portion 4(5), causing it to curve or bend as shown in Figure 12-(c). The portion (section) of the liquid-proof brush 117 closer to the opening 111b can also be said to be the end section on the circumferential side of the clamp portion 4(5).

[0029] "The portion of the liquid-proof brush 117 near the opening 111b" refers to the portion of the liquid-proof brush 117 (linear material 117a) that protrudes or is about to protrude toward the opening 111b from the portion that overlaps with the wall plate 111a, and of that portion, the end (tip portion) on the clamp portion 4(5) side is in contact with or can come into contact with the clamp portion 4(5). "The liquid-proof brush 117 is in contact with the circumferential surface of the clamp portion 4(5)" means that the liquid-proof brush 117 (linear material 117a) is sealing the gap between the circumferential surface of the clamp portion 4(5) and the opening 111b.

[0030] As described above, the portion of the liquid-proof brush 117 (linear material 117a) that overlaps with the wall plate 111a is in contact with, or can come into contact with, the inner surface of the wall plate 111a. Since the liquid-proof brush 117 is fixed to the wall plate 111a inside the liquid-proof box 111, at least the portion that overlaps with the wall plate 111a is constrained by the wall plate 111a from bending deformation outward from the liquid-proof box 111 even when pressure is applied to the liquid-proof brush 117 moving from the inside to the outside of the liquid-proof box 111, and therefore does not undergo bending deformation.

[0031] In addition, the tip portion (the tip portion of the linear material 117a) or end section of the portion of the liquid-proof brush 117 that can protrude toward the opening 111b from the portion that overlaps with the wall plate 111a is in contact with or can come into contact with the clamp portion 4(5) (Claim 1). Therefore, even if pressure is generated from the inside to the outside of the liquid-proof box 111 on the portion of the liquid-proof brush 117 that can protrude toward the opening 111b, the portion of the liquid-proof brush 117 that can protrude toward the opening 111b will not bend or deform outwards from the liquid-proof box 111 due to the pressure and will not protrude outside the liquid-proof box.

[0032] As a result, the portion of the liquid-proof brush 117 that can protrude toward the opening 111b closes the gap between the circumferential surface of the clamp portion 4(5) and the opening 111b, and together with this, the scattering of grinding chips and coolant outside the liquid-proof box 111 during grinding of the workpiece 12 is substantially completely prevented.

[0033] In particular, when viewing the liquid-proof brush 117 from an elevation view from inside the liquid-proof box 111, the radial length of the portion (section) of the liquid-proof brush 117 (linear material 117a) that can protrude toward the opening 111b (the section overlapping the opening 111b) is smaller than the length of the portion (section) that overlaps with the wall plate 111a. Therefore, the bending rigidity of the protruding section (linear material 117a) is relatively greater than the bending rigidity of the section overlapping with the wall plate 111a, making it less susceptible to bending deformation. As a result, even if pressure is generated from the inside to the outside of the liquid-proof box 111, it is unlikely that only the portion (section) of the liquid-proof brush 117 that can protrude toward the opening 111b will bend and deform toward the outside of the opening 111b.

[0034] Specifically, the liquid-proof brush 117 is composed of a plurality of brush components 117A arranged circumferentially around the opening 111b, as shown in Figures 14 and 15, and each brush component 117A is composed of a large number of linear members 117a and a holder 117b that holds (restrains) the entire end of one side of the large number of linear members 117a (Claim 1).

[0035] When multiple brush components 117A are arranged around the opening 111b, the holders 117b, 117b are fixed to the wall plate 111a adjacent to each other in the circumferential direction of the opening 111b, and the linear members 117a contact each other or overlap with the linear members 117a of adjacent brush components 117A in the circumferential direction of the opening 111b (Claim 1). The adjacent brush components 117A, 117A are arranged continuously as described above, so that there are no gaps between the linear members 117a, 117a of both brush components 117A, 117A (Claim 1).

[0036] While a few linear members 117a do not have the ability to prevent grinding debris and coolant from scattering outside the opening 111b, when more than a few are assembled together, they have thickness in the thickness direction of the wall plate 111a (holder 117b) and are arranged in the circumferential direction of the opening 111b, so that the linear members 117a themselves form a wall-like shape as shown in Figure 16. The linear members 117a of adjacent brush components 117A overlap each other in the circumferential direction of the opening 111b, closing the gap between the circumferential surface of the clamp portion 4(5) and the opening 111b, while ensuring appropriate bending rigidity and elasticity that does not easily bend and deform, thus having the ability to prevent grinding debris and coolant from scattering outside the opening 111b.

[0037] "Multiple strands bundled together" means that when viewing the liquid-proof brush 117 in the thickness direction and circumferential direction, a number of linear strands 117a are bundled together such that no gaps are visible between them. Alternatively, when multiple brush components 117A are arranged around the opening 111b, and the wall plate 111a is viewed from inside the liquid-proof box 111, the linear strands 117a are densely packed together to the extent that the wall plate 111a is not visible beyond the ends of the multiple strands 117a. Specifically, this means that there are bundles of several tens or more strands in both the thickness direction and the circumferential direction of the liquid-proof brush 117. Depending on the thickness (diameter) of a single linear strand 117a, "multiple strands" specifically refers to several tens to several hundred strands.

[0038] The numerous linear members 117a are in contact with or can come into contact with the wall plate 111a during grinding of the workpiece 12, and possess appropriate bending rigidity in the thickness direction. As part of the brush components 117A, they act like a wall that prevents grinding debris and coolant from scattering outside the opening 111b.

[0039] If the linear material 117a protrudes from the opening 111b toward the clamp portion 4(5), when the grinding unit 11 moves toward one of the clamp portions 4(5) and takes the workpiece 12 and one of the clamp portions 4(5) into the liquid-proof box 111, the section on the radial side of the clamp portion 4(5) (the section overlapping the opening 111b) temporarily undergoes elastic deformation, as shown in Figure 12-(c), so as not to obstruct the insertion of the clamp portion 4(5) through the opening 111b. After the clamp portion 4 is inserted into the liquid-proof box 111, it returns to its original shape or attempts to return to its original shape, closing the gap between the opening 111b and the outer surface of the clamp portion 4(5).

[0040] The liquid-proof brush 117 is composed of a plurality of brush components 117A arranged around the opening 111b (Claim 1), and in particular, by making the widths of adjacent brush components 117A in the circumferential direction of the opening 111b different, it becomes possible to arrange the plurality of brush components 117A without gaps and regularly in the circumferential direction of the opening 111b.

[0041] For example, as shown in Figure 14, when arranging brush components 117A with a certain angle in the circumferential direction between the centerlines in the width direction of adjacent brush components 117A, 117A, we consider how to ensure that no gaps are created between the linear members 117a, 117a of adjacent brush components 117A, 117A, while maintaining a certain minimum width for the holder 117b of the brush components 117A and preventing the length of the linear members 117a from becoming too large. In the example shown in Figures 14 and 15, where 16 brush components 117A are arranged in the circumferential direction, the angle between the centerlines in the width direction of adjacent brush components 117A, 117A is 22.5 degrees, which is half of 45 degrees (360 degrees / 16).

[0042] Ensuring a certain width for the holder 117b of the brush component 117A has two purposes: to arrange multiple fasteners such as screws (bolts) 15 in the width direction to fix the holder 117b of one brush component 117A to the wall panel 111a, and to avoid having too many brush components 117A arranged around the opening 111b. Ensuring that the length of the linear material 117a does not become too large has two purposes: to prevent the bending rigidity of the assembled linear material 117a from decreasing and to make it less susceptible to bending deformation.

[0043] As shown by the dashed line in Figure 15, when the circumferential width of the opening 111b of adjacent brush components 117A, 117A is kept constant, and an angle of 22.5 degrees (half of 45 degrees) is set between the centerlines of adjacent brush components 117A, 117A in the width direction, the holders 117b, 117b of adjacent brush components 117A, 117A tend to interfere with each other, making it difficult to arrange the brush components 117A regularly without gaps. When the angle between the centerlines is 22.5 degrees, the number of brush components 117A arranged in the circumferential direction of the opening 111b becomes 16.

[0044] In this case, if the width of the holder 117b of the brush component 117A is to be maintained above a certain level, one of the holders 117b must be moved away from the center of the opening 111b. As a result, the length of the linear material 117a is increased, which reduces the bending rigidity of the many linear materials 117a, making them more susceptible to deformation by water pressure.

[0045] In contrast, as shown by the solid lines in Figure 15, by varying the circumferential width of the openings 111b of adjacent brush components 117A, 117A, it becomes possible to arrange multiple brush components 117A regularly in the circumferential direction without creating gaps between the holders 117b, 117b of adjacent brush components 117A, 117A.

[0046] In the example shown in Figure 15, when the vertical shape of the holder 117b is rectangular, by setting the width ratio of the two types of holders 117b, 117b with different widths to 10:7, it is possible to bring the ends of adjacent holders 117b, 117b near the opening 111b into contact with each other, eliminating any gaps, and to arrange them regularly around the opening 111b with a 22.5-degree angle between the centerlines in the width direction of the holders 117b, 117b.

[0047] By arranging multiple holders 117b (brush components 117A) with the ends of adjacent holders 117b, 117b near the opening 111b in contact with each other, the linear members 117a, 117a of adjacent brush components 117A, 117A can be brought into contact with each other. As the linear members 117a, 117a of adjacent brush components 117A, 117A come into contact with each other and become tightly packed, the density of the linear members 117a increases closer to the opening 111b, making it less likely for gaps to form between the linear members 117a.

[0048] As a result, the linear materials 117a, 117a of adjacent brush components 117A, 117A are in close contact with each other, ensuring shielding against grinding debris and coolant, and effectively preventing the scattering of grinding debris and other materials that would otherwise scatter from inside the liquid containment box 111 to the outside.

[0049] More specifically, the holder 117b for the brush component 117A is divided into a fixing portion 117b1 that directly or indirectly overlaps and is fixed to the wall plate 111a of the liquid-proof box 111, as shown in Figure 16, and a holding portion 117b2 that holds a number of linear members 117a. It is appropriate that the surface of the fixing portion 117b1 on the wall plate 111a side and the surface of the number of linear members 117a on the wall plate 111a side form a continuous plane (Claim 2).

[0050] In this case, the side (back) of the fixing part 117b1 facing the wall plate 111a and the side (back) of the numerous linear members 117a facing the wall plate 111a form a continuous plane. As a result, the entire surface of the numerous linear members 117a facing the wall plate 111a is aligned in contact with the wall plate 111a, preventing or minimizing gaps between the wall plate 111a and the linear members 117a. This makes it easier to prevent grinding debris and coolant from leaking out of the opening 111b. [Effects of the Invention]

[0051] In the pair of clamps that grip the workpiece, a liquid-proof brush is fixed around the opening for receiving one of the clamps on the inner circumferential surface of the wall plate on the side of one of the clamps, sealing the gap between the opening and the circumferential surface of the clamp. The end of the liquid-proof brush on the circumferential surface side of one of the clamps is in contact with, or in a state where it can come into contact with, the circumferential surface of the clamp. As a result, even when pressure from the inside to the outside of the liquid-proof box acts on the liquid-proof brush, the bending deformation of at least the portion of the liquid-proof brush that overlaps with the wall plate can be restrained by the wall plate, thus preventing bending deformation of the liquid-proof brush.

[0052] Furthermore, because the tip (end) of the portion of the liquid-proof brush that can protrude toward the opening from the portion overlapping with the wall plate is in contact with or in a state where it can come into contact with the clamp portion, even if pressure is generated from the inside to the outside of the liquid-proof box on the portion of the liquid-proof brush that can protrude toward the opening, it is possible to avoid a situation where the portion of the liquid-proof brush that can protrude toward the opening is bent and deformed by the pressure and protrudes to the outside of the liquid-proof box. As a result, the portion of the liquid-proof brush that can protrude toward the opening closes the gap between the circumferential surface of the clamp portion and the opening, and together they effectively prevent grinding chips and coolant from scattering to the outside of the liquid-proof box during workpiece grinding. [Brief explanation of the drawing]

[0053] [Figure 1] This is a plan view showing the entire workpiece grinding machine. [Figure 2] This is an elevation view of Figure 1. [Figure 3](a) is a plan view showing the pair of clamps in Figure 1 gripping the workpiece, and (b) is a cross-sectional view of (a) along line xx. [Figure 4] This is an enlarged view of the pair of clamping parts and the workpiece portion in Figure 3-(a). [Figure 5] This is a longitudinal cross-sectional view showing one (following) clamp section, a support section that supports it, and an example of supplying pressurized fluid to operate the extension and retraction of multiple gripping members. [Figure 6] Figure 5 is an enlarged view of the follow-up clamp section. [Figure 7] This is a view from the arrow pointing along the yy line in Figure 6. [Figure 8] This is a partial cross-sectional elevation view showing how the follow-up clamp and the other (fixed) clamp grip the workpiece in the axial direction. [Figure 9] This is a plan view showing how the liquid-proof box attached to the grinding unit surrounds the workpiece, the follow-up clamp section, and the fixed clamp section. [Figure 10] (a) is a cross-sectional view along line aa in Figure 9, (b) is a cross-sectional view along line bb in (a), and (c) is a cross-sectional view along line cc in (a). [Figure 11] Figure 9 is an enlarged plan view of the liquid containment box and its surrounding area. [Figure 12] (a) is a cross-sectional view along line xx in Figure 11, (b) is a cross-sectional view along line yy in Figure 11, and (c) is a cross-sectional view showing the bending deformation of the opening side of the liquid-proof brush shown in (a) when one of the (following) clamp sections is taken into the liquid-proof box. [Figure 13] (a) is a longitudinal cross-sectional view showing the discharge of the coolant sprayed from the nozzle into the containment box, and (b) is a cross-sectional view of (a) along line xx. [Figure 14] This is a perspective view from inside the liquid containment box, showing how the liquid containment brush is fixed to the wall panel around the opening. [Figure 15] This is an elevation view showing how multiple brush components that make up a liquid-proof brush are arranged around an opening. [Figure 16](a) and (b) are elevation views showing examples of the two types of brush components shown in Figure 14, and (c) is a side view of (a) and (b). [Figure 17] This is an elevation view showing how reinforcing plates for fixing multiple brush components to a wall panel are positioned on the wall panel. [Modes for carrying out the invention]

[0054] Figures 1 and 2 show an example configuration of a work grinding device 1, which has a pair of clamping parts 4 and 5 supported by support parts (spindles) 6 and 7 that are opposed to each other in the longitudinal direction of the support base 2, grip (clamp) the workpiece 12 when they are close together, and rotate together with the workpiece 12 around its axis while gripping it. The pair of clamping parts 4 and 5 constitute a gripping device 3. The support base 2 is a three-dimensional frame-like base assembled to support the work grinding device 1.

[0055] The work grinding apparatus 1 includes, in addition to the gripping device 3, a rotary drive device that rotates each of the pair of clamping parts 4 and 5 that grip the workpiece 12 together with the support parts 6 and 7 that support them, around the respective axes of both clamping parts 4 and 5, and a linear drive device 8 that moves at least one of the clamping parts 4(5) together with the support part 6(7) that supports it in a linear motion in the longitudinal direction relative to the support base 2. Specifically, the rotary drive device consists of work rotation motors 98 and 104 attached to the movable side pressing unit 9 and the fixed side pressing unit 10, respectively, as described later.

[0056] As shown in Figure 9, the work grinding apparatus 1 is equipped with a grinding unit 11 that is mounted on a support base 2 so as to be able to move linearly in the longitudinal direction of the support base 2 and has a grinding wheel 112 for grinding or polishing the workpiece 12. The grinding unit 11 is connected to a liquid-proof box 111 that moves with the grinding unit 11 when the grinding unit 11 moves toward one of the clamp portions 4(5) which is able to move linearly in the longitudinal direction of the support base 2, and surrounds a pair of clamp portions 4, 5 and the workpiece 12 held by these clamp portions 4, 5.

[0057] As shown in Figures 1 and 9, the grinding unit 11 is positioned to move linearly along approximately the same track as the movable side pressing unit 9, which is able to move linearly in the longitudinal direction relative to the support base 2 on a plane. Furthermore, in the width direction of the support base 2, one clamp portion 4 supported by the movable side pressing unit 9 is positioned on one side of the movable side pressing unit 9, so the liquid-proof box 111 is positioned on the same side as one of the clamp portions 4 on the grinding unit 11. The liquid-proof box 111 is omitted in Figure 1.

[0058] In the illustrated example, in order to securely grip a workpiece 12 having an irregular three-dimensional end face on one side in the axial direction, one of the pair of clamping parts 4 and 5 has a clamping part 4(5) that acts as a follow-up clamping part, as shown in Figures 4 and 6, which can extend and retract from the end face of the other clamping part 5(4) toward the workpiece 12, and has a plurality of independent gripping members 41.

[0059] When the workpiece 12 is a silicon carbide single crystal (SiC) ingot, due to its manufacturing method (sublimation method), the SiC ingot may have a flat end face on one axial side while having irregularities on the other end face. Therefore, when the workpiece 12 is a SiC ingot, it is required that the end face of the ingot with these irregularities can be securely gripped.

[0060] The drawing shows an example where one clamp portion 4, which is part of the movable side pressing unit 9, behaves as a follow-up clamp portion having a gripping material 41. However, there is also a case where the other clamp portion 5, which is part of the fixed side pressing unit 10, is a follow-up clamp portion having a gripping material 41. Below, we will explain an example where one clamp portion 4 is a follow-up clamp portion and the other clamp portion 5 is a fixed clamp portion that is part of the fixed side pressing unit 10.

[0061] As shown in Figures 1 and 2, the pair of clamp sections 4 and 5 are arranged so that their axes lie on the same straight axis on the support base 2, and the linear drive device 8 is indirectly connected to at least one of the clamp sections 4 (5). In the illustrated example, the linear drive device 8 is connected to the movable side pressing unit 9, which is an integrated clamp section 4 that is a follow-up clamp section, but the linear drive device 8 may also be connected to the other clamp section 5.

[0062] In the illustrated example, one clamp (following clamp) 4 is integrated with the movable side pressing unit 9 at the support 6 that supports it, and the linear drive device 8 is connected to the movable side pressing unit 9. Therefore, when the linear drive device 8 is driven, the following clamp 4 moves linearly in the longitudinal direction of the support base 2 relative to the fixed side pressing unit 10.

[0063] In the illustrated example, the other clamp portion 5 is also integrated with the fixed-side pressing unit 10 in the support portion 7 that supports it, as will be described later. In this relationship, the other clamp portion 5 does not move linearly in the longitudinal direction of the support base 2, so below, the clamp portion that is opposite to the follow-up clamp portion 4 will be referred to as the fixed clamp portion 5. The workpiece 12 has a basically cylindrical outer surface and a circular cross-sectional shape, so the end faces of both the follow-up clamp portion 4 and the fixed clamp portion 5 are basically circular.

[0064] The drawing shows an example in which the linear drive device 8, which is placed on the support base 2, is composed of, for example, a motor 81 installed on the support base 2, a drive shaft 82 and a ball screw 85 for converting the rotational force of the motor 81 into linear motion and transmitting it to the movable side clamping unit 9. However, the linear drive device 8 is a mechanism that transmits power as linear motion of the movable side clamping unit 9 (one of the clamping parts (following clamping part) 4), and the mechanism (configuration) and installation position are not limited, and devices other than those using a ball screw can also be used.

[0065] As shown in the drawings, the fixed-side pressing unit 10, which is installed on the support base 2 adjacent to the width direction of the support base 2, is fixed to the support base 2 so that it does not move linearly when the grinding unit 11, which is equipped with a grinding wheel 112 etc. as shown in Figure 10 for grinding or polishing the workpiece 12, is also fixed to the support base 2, as shown in Figures 1, 3 and 9.

[0066] The grinding unit 11 is mounted on the support base 2 so as to be able to move linearly in the longitudinal direction of the support base 2, and moves linearly when the motor 114 attached to the grinding unit 11 rotates, as shown in Figure 1. On the pair of clamp sections 4 and 5 of the grinding unit 11, as shown in Figure 10, a liquid-proof box 111 is attached, which houses the grinding wheel 112 and other components, as well as a cooling liquid nozzle 113 for spraying cooling liquid to cool the workpiece 12 during grinding, etc. The grinding wheel 112 and other components are stored inside the liquid-proof box 111, as will be described later. Details of the inside of the liquid-proof box 111 will be described later.

[0067] Because the fixed-side pressing unit 10 is fixed to the support base 2, when the workpiece 12 is gripped by the pair of clamp parts 4 and 5, the movable-side pressing unit 9, which is equipped with the follow-up clamp part 4 and the support part 6 that supports it, moves linearly (approaches) toward the fixed-side pressing unit 10 when the linear drive device 8 is driven, and the workpiece 12 is gripped by the follow-up clamp part 4 and the fixed clamp part 5.

[0068] In the example shown in Figure 1, as the motor 81 constituting the linear drive unit 8 rotates, the drive shaft 82 directly connected to the motor 81 also rotates. Simultaneously, the driven gear 84, which meshes with the drive gear 83 connected to the movable side retaining unit 9 of the drive shaft 82, rotates. A ball screw 85 is connected to the driven gear 84 parallel to the drive shaft 82, and the ball screw 85 rotates in conjunction with the rotation of the driven gear 84, causing the nut 86 screwed onto the movable side retaining unit 9 of the ball screw 85 to reciprocate (move linearly) in the axial direction relative to the ball screw 85.

[0069] The nut 86 is part of the main body 91 that constitutes the movable side pressing unit 9, and the main body 91 reciprocates (linearly) in the axial direction of the ball screw 85 simultaneously with the reciprocating motion of the nut 86. A control unit 92, which has a control device for controlling the retraction and extension of the gripping material 41 that is retractably stored in the follow-up clamp part 4, is integrated on one side in a direction perpendicular to the reciprocating direction of the main body 91, and the control unit 92 reciprocates (linearly) in the axial direction of the ball screw 85 together with the main body 91. The main body 91 of the movable side pressing unit 9 travels on parallel guides 93, 93 laid on the support base 2 parallel to the axial direction of the ball screw 85, and is guided by both guides 93, 93.

[0070] A support portion 6 is integrally connected to the control unit 92 of the movable side pressing unit 9, and a follow-up clamp portion 4 is integrally connected to the end of the support portion 6 on the fixed clamp portion 5 side. The support portion 6 is connected to the fixed clamp portion 5 side of the control unit 92. The support portion 6 and the follow-up clamp portion 4 reciprocate together with the control unit 92 when the motor 81 rotates, and when they move toward the fixed clamp portion 5 side, they grip the workpiece 12 together with the fixed clamp portion 5 which is fixedly supported by the support portion 7, which is part of the fixed side pressing unit 10.

[0071] Since the fixed-side pressing unit 10, to which the fixed clamp portion 5 is attached, is fixed to the support base 2, when gripping the workpiece 12, the movable-side pressing unit 9 moves toward the fixed-side pressing unit 10, so that the follow-up clamp portion 4 and the fixed clamp portion 5 grip the workpiece 12.

[0072] As shown in Figure 4, the drawing illustrates an example where a SiC ingot is used as the workpiece 12, with one end face having an irregular three-dimensional shape and the other end face forming a flat surface perpendicular to the axis. The irregular three-dimensional end face of the workpiece 12 faces the follow-up clamp section 4, and the flat end face faces the fixed clamp section 5. In this relationship, the end face of the fixed clamp section 5 on the follow-up clamp section 4 side is a flat surface perpendicular to the axis of the workpiece 12. Insertion of the workpiece 12 between the follow-up clamp section 4 and the fixed clamp section 5 is operated by a loader unit, which will be described later.

[0073] As described above, the follow-up clamp section 4 has multiple gripping members 41 that can extend and retract from the end face on the fixed clamp section 5 side. As shown in Figures 4 and 6, the multiple gripping members 41 are housed in a storage section 42 formed within the follow-up clamp section 4, allowing them to extend and retract independently from the end face of the follow-up clamp section 4. When gripping a workpiece 12, the tips of the multiple gripping members 41 on the workpiece 12 side protrude from the end face of the follow-up clamp section 4, and when the tip surfaces of the gripping members 41 grip the workpiece 12 in the axial direction between them and the end face of the fixed clamp section 5, as shown in Figure 4, the axial tip surfaces of all the gripping members 41 grip the workpiece 12 together with the end face of the fixed clamp section 5.

[0074] The workpiece 12 is held by a loader unit (not shown) that loads the workpiece 12 into and out of a pair of clamping sections 4 and 5, and is inserted between the end faces of both clamping sections 4 and 5, which are spaced apart. However, in order to avoid any impact on the grinding surface caused by the workpiece 12 being directly held by the loader unit, a support material 12A is attached to the end face of the workpiece 12 on the fixed clamping section 5 side using an adhesive or the like, as shown in Figure 4, so that it can be directly held by the loader unit.

[0075] In this case, the workpiece 12 is held by the loader unit on the circumferential surface of the supported material 12A integrated with it, and is moved toward the fixed clamp portion 5 until the end face of the supported material 12A toward the fixed clamp portion 5 makes surface contact with the end face of the fixed clamp portion 5. The end face of the fixed clamp portion 5 makes surface contact with the end face of the supported material 12A, and in contact with the workpiece 12 due to the movement of the following clamp portion 4 toward the fixed clamp portion 5, a uniform compressive force is applied in the axial direction of the workpiece 12, gripping the workpiece 12 with a constant compressive force.

[0076] When the end face of the supported material 12A on the side of the fixed clamp portion 5 comes into contact with the end face of the fixed clamp portion 5, the end face of the air blower pipe 102 for blowing cleaning air, shown in Figure 8, located inside the control unit 101 of the fixed-side pressing unit 10 to which the support portion 7 supporting the fixed clamp portion 5 is connected, on the workpiece 12 side, reacts as a sensor dog. At the same time, a sensor 103 installed behind the control unit 101 (on the opposite side of the fixed clamp portion 5) detects the contact of the workpiece 12 (supported material 12A) with the end face of the fixed clamp portion 5, thereby stopping the movement of the workpiece 12 toward the fixed clamp portion 5 by the loader unit. The end face of the air blower pipe 102 on the workpiece 12 side comes into contact with the projection 12A1 shown in Figure 4, which is formed on or protrudes from the end face of the supported material 12A on the side of the fixed clamp portion 5.

[0077] The loader unit is positioned to the side of the fixed clamping unit 10 opposite the grinding unit 11, so as to be able to reciprocate (move linearly) in the axial direction of the fixed clamping section 5. The loader unit may also be supported by a support base 2. While holding the workpiece 12, the loader unit moves the workpiece 12 between the follow-up clamping section 4 and the fixed clamping section 5 by the linear motion of the support base 2 in the longitudinal and width directions, and stops when the flat end face of the workpiece 12 aligns with the end face position of the fixed clamping section 5. At this time, the axis of the workpiece 12 and the axes of the follow-up clamping section 4 and the fixed clamping section 5 are parallel.

[0078] The loader unit interposes the workpiece 12 between the tracking clamp 4 and the fixed clamp 5, then slightly moves the workpiece 12 to make fine adjustments toward the fixed clamp 5, and stops the workpiece 12 when it makes surface contact with the end face of the fixed clamp 5, upon receiving a command from the sensor 103. If there is any obstruction to the gripping of the workpiece 12 by the tracking clamp 4 and the fixed clamp 5, the loader unit releases the workpiece 12 from its stopping position.

[0079] After the workpiece 12 is stopped, the movable side clamping unit 9 moves toward the workpiece 12 side (towards the fixed side clamping unit 10 side) by the operation of the linear drive device 8. When the detection material 43, which is fixed to the end face of the follow-up clamp section 4 on the workpiece 12 side as shown in Figures 6 and 7, comes into contact with any part of the irregularly shaped end face of the workpiece 12, the sensor 94, which is installed behind the movable side clamping unit 9 (opposite side of the follow-up clamp section 4) as shown in Figures 2 and 5, detects the contact of the detection material 43 with the workpiece 12 and stops the movable side clamping unit 9 (linear drive device 8).

[0080] Here, the fixing position of the detection material 43 to the end face of the follow-up clamp 4 is adjusted so that the tip surface of the detection material 43 on the end face of the follow-up clamp 4, rather than any of the gripping materials 41 protruding from the end face of the follow-up clamp 4 on the workpiece 12 side, can reliably contact the end face of the workpiece 12 when the follow-up clamp 4 moves toward the workpiece 12.

[0081] Specifically, as shown in Figure 6, when the entire gripping member 41 is immersed in the storage section 42 of the follow-up clamp section 4, the tip surface of the detection member 43 on the workpiece 12 side is adjusted to be located closer to the workpiece 12 than the tip surface of the entire gripping member 41 on the workpiece 12 side, when viewed in a direction perpendicular to the axial direction of the follow-up clamp section 4. The detection member 43 is fixed to the end face of the follow-up clamp section 4 in this adjusted position.

[0082] In Figure 6, the tip surface of the uppermost gripping member 41 is shown to coincide with the tip surface of the detection member 43, but in the immersed state, the gripping member 41 is stored inside the storage section 42 as shown by the dashed line. Note that in Figures 6 and 7, the detection member 43 is positioned at the center of the end face of the follow-up clamp section 4, but it is not always necessary to position the detection member 43 at the center of the end face.

[0083] The end face of the workpiece 12 on the side of the follow-up clamp 4 may have an irregular three-dimensional shape, as shown in Figure 4. Multiple independent gripping members 41 are housed in the storage section 42 of the follow-up clamp 4 so as to be able to move in and out in the axial direction of the follow-up clamp 4, while each gripping member 41 follows this irregular, arbitrary three-dimensional shape, and so as to be able to contact and press the end face of the workpiece 12.

[0084] Each gripping member 41 protrudes from the end face of the follow-up clamp section 4 on the workpiece 12 side (fixed clamp section 5 side) toward the workpiece 12 when gripping the workpiece 12. At the point where the end face of each gripping member 41 on the workpiece 12 side contacts the end face of the workpiece 12, it receives a reaction force from the workpiece 12 and the protrusion from the follow-up clamp section 4 stops. In this stopped state, each gripping member 41 receives the hydraulic pressure described later, and a constant compressive force acts on the workpiece 12 from each gripping member 41. The sum of the compressive forces acting on the workpiece 12 from all the gripping members 41 is the reaction force acting on the workpiece 12 from the paired fixed clamp section 5, and this reaction force becomes the compressive force when the fixed clamp section 5 grips the workpiece 12.

[0085] In particular, to accommodate cases where the end face of the workpiece 12 on the side of the follow-up clamp 4 has a slightly uneven shape, it is desirable that the end of the gripping material 41 on the workpiece 12 side tapers from the support 6 side to the workpiece 12 side, as shown in Figures 4 and 6. Specifically, the end of the gripping material 41 on the workpiece 12 side has a shape in which the cross-sectional area perpendicular to the axis of the gripping material 41 decreases or gradually decreases from the support 6 side that supports the follow-up clamp 4 to the workpiece 12 side.

[0086] Because the tip of the gripping member 41 is tapered, even when the end face of the workpiece 12 has a finely uneven shape as shown in Figure 4, each gripping member 41 can make contact with the end face of the workpiece 12 at a substantially point or near-point surface. Therefore, it is possible to grip the workpiece 12 accurately and stably without moving (shifting) the workpiece 12 even slightly in the direction perpendicular to the axis.

[0087] Furthermore, when the workpiece 12 is gripped by the entire gripping material 41 of the follow-up clamp section 4, in order to prevent the detection material 43 from being involved in gripping the workpiece 12, in other words, to prevent the detection material 43 from hindering gripping by the gripping material 41, the protruding length of the detection material 43 is adjusted so that when the entire gripping material 41 is protruding, the tip surface of the entire gripping material 41 on the workpiece 12 side is positioned closer to the workpiece 12 than the detection material 43.

[0088] When the gripping material 41 is extended, the tip surface of the gripping material 41 on the workpiece 12 side is positioned closer to the workpiece 12 than the tip surface of the detection material 43 on the workpiece 12 side. This prevents any part of the tip surface of the detection material 43 from contacting the end face of the workpiece 12 before any part of the tip surface of the gripping material 41. This is possible as long as the center of the end face of the workpiece 12 on the side of the follow-up clamp 4 does not have a three-dimensional shape that is extremely convex toward the follow-up clamp 4. When the workpiece 12 is gripped by the gripping material 41, the detection material 43 does not contact the workpiece 12 before the gripping material 41, thereby preventing malfunctions caused by the detection material 43 contacting the workpiece 12.

[0089] As shown in Figures 5, 6, and 8, a pressurized fluid supply pipe 95 is located inside the control unit 92 of the movable side pressing unit 9 to supply pressurized fluid for controlling the extension and retraction of each gripping member 41. Pressurized fluid such as pressurized oil is supplied to the pressurized fluid supply pipe 95 from a tank 99 by a hydraulic pump 96 through a control valve 97 such as a solenoid valve, as shown in Figure 5. As shown in Figure 6, the pressurized fluid supply pipe 95 branches into storage sections 42 that house each gripping member 41 within the follow-up clamp section 4, and equal pressurized fluid is supplied to each of the storage sections 42 that house each gripping member 41, thereby applying equal hydraulic pressure or other fluid pressure to the axial back surface of each gripping member 41.

[0090] In Figure 6, the dashed line representing the gripping member 41 indicates the protruding and retracted positions of the gripping member 41, and the difference between these positions indicates the possible stroke of the gripping member 41. Basically, all gripping members 41 are not subjected to hydraulic pressure from the pressurized fluid, allowing them to move freely in the axial direction. They are retracted into the storage section 42 of the follow-up clamp section 4, and their tip surfaces are kept from protruding beyond the sensing member 43. This retracted state can also be maintained by using a restoring force, for example, by interposing some kind of spring, such as a coil spring, around each gripping member 41.

[0091] When the detection material 43 comes into contact with the end face of the workpiece 12 and the sensor 94 detects this, pressurized fluid is supplied from the tank 99 to each storage section 42 through the pressurized fluid supply pipe 95, and each gripping material 41 protrudes according to the shape of the end face of the workpiece 12 and stops when it comes into contact with the end face of the workpiece 12. In the stopped state, each gripping material 41 receives the pressure necessary for holding from the pressurized fluid in the storage section 42, and continues to grip the workpiece 12 together with the fixed clamp section 5 with a constant compressive force. When gripping the workpiece 12, the compressive forces acting on the workpiece 12 from the follow-up clamp section 4 and the fixed clamp section 5 are balanced, so the sum of the compressive forces from all gripping materials 41 is equal to the compressive force from the fixed clamp section 5.

[0092] Furthermore, in order to apply a uniform compressive force in the axial direction to the end face of the workpiece 12 from multiple points when all gripping members 41 grip the workpiece 12, it is reasonable to arrange the multiple gripping members 41 evenly distributed in the circumferential direction at positions equal to the radial distance from the center of the end face of the follow-up clamping section 4, as shown in Figure 7. In the drawing, four rod-shaped (pin-shaped) gripping members 41 are arranged, but the number is arbitrary; if the gripping members 41 are rod-shaped, at least three are sufficient. If the gripping members 41 are curved or bent plate-shaped, at least two are sufficient.

[0093] When multiple gripping members 41 grip the end face of the workpiece 12, the pressure of the pressurized fluid is adjusted so that the appropriate hydraulic pressure necessary for gripping acts on each gripping member 41. When the gripping of the workpiece 12 by the multiple gripping members 41 is released after grinding of the circumferential surface of the workpiece 12 is completed, the pressurized fluid is returned to the tank 99 from the pressurized fluid supply pipe 95 by the release of the hydraulic pump 96, the pressure that was acting on the back of each gripping member 41 is released, and the follow-up clamp section 4 retracts from the workpiece 12.

[0094] Each gripping member 41 is free to move axially when the hydraulic pressure is released. However, by interposing a spring around the gripping member 41 as described above, the gripping member 41 can be automatically retracted (restored) into the storage section 42 when the hydraulic pressure is released. The restoring force (biasing force) of the spring is set to be smaller than the force due to the hydraulic pressure acting on the back of each gripping member 41.

[0095] When the workpiece 12 is gripped by the tracking clamp section 4 and the fixed clamp section 5, the grinding unit 11 shown in Figures 1, 3, and 9 moves linearly along its longitudinal direction on the support base 2 due to the rotation of the motor 114, which is a linear drive device connected to it. Specifically, as the motor 114 rotates, the ball screw 115 moves linearly in conjunction with its rotation, and at the same time, the grinding unit 11, which has a nut screwed onto the ball screw 115 as an integrated component, moves in the direction of the reciprocating motion of the movable side pressing unit 9.

[0096] With the fixed clamp section 5 and the follow-up clamp section 4 enclosed within the liquid-proof box 111 located on the clamp sections 4 and 5 of the grinding unit 11, the support sections 6 and 7 are rotated around their axes by the workpiece rotation motors 98 and 104, which are rotational drive devices attached to the rear sides of the movable side pressing unit 9 and the fixed side pressing unit 10 as shown in Figures 1 and 2, respectively, causing the follow-up clamp section 4 and the fixed clamp section 5 to rotate together with the workpiece 12. The drive shafts of the workpiece rotation motors 98 and 104 are connected to each other within the movable side pressing unit 9 and the fixed side pressing unit 10, and the workpiece rotation motors 98 and 104 are synchronized so that they rotate simultaneously at a constant speed.

[0097] As the workpiece 12 rotates around its axis together with the support parts 6 and 7, the grinding or polishing of the circumferential surface of the workpiece 12 is performed by the grinding wheel 112 described above. When grinding the circumferential surface of the workpiece 12, the grinding wheel 112 is rotated in the opposite direction to the rotation of the workpiece 12. In Figures 9 and 10, 116 shows a notched grinding wheel for forming a groove in the axial direction of the workpiece 12 when the rotation of the workpiece 12 is stopped.

[0098] As the grinding unit 11 moves toward the movable side holding unit 9, the fixed clamp 5, the workpiece 12, and the follow-up clamp 4 are taken inside the liquid-proof box 111 attached to the grinding unit 11 and surrounded by the liquid-proof box 111. With the fixed clamp 5, the workpiece 12, and the follow-up clamp 4 surrounded by the liquid-proof box 111, the grinding wheel 112 mounted inside the liquid-proof box 111 as shown in Figure 10 rotates and contacts the circumferential surface of the rotating workpiece 12, thereby grinding the circumferential surface of the workpiece 12. At this time, the workpiece 12 is kept below a certain temperature by the coolant sprayed from the coolant nozzle 113.

[0099] The liquid-proof box 111 is formed in a box shape from a wall plate 111a through which one clamping part, the follow-up clamping part 4(5), is inserted, a wall plate 111c through which the other clamping part, the fixed clamping part 5(4), is inserted, and side plates 111e, 111e that connect wall plates 111a and 111c and have surfaces parallel to the direction of movement of the grinding unit 11. The bottom of the liquid-proof box 111 is open as described later. Wall plate 111a is located on the follow-up clamping part 4(5) side, and wall plate 111c is located on the fixed clamping part 5(4) side.

[0100] As shown in Figure 10-(b), the wall plate 111a on the follow-up clamp portion 4(5) side of the liquid containment box 111 has an opening 111b that corresponds to the cross-sectional shape of the follow-up clamp portion 4, allowing at least a portion of the axial direction of the follow-up clamp portion 4 to be taken into the liquid containment box 111 when the grinding unit 11 moves toward the movable side pressing unit 9. The wall plate 111c on the fixed clamp portion 5(4) side has an opening 111d that corresponds to the cross-sectional shape of the fixed clamp portion 5, allowing at least a portion of the axial direction of the fixed clamp portion 5 to be taken into the liquid containment box 111, as shown in Figure 10-(a).

[0101] Around the opening 111b on the inner surface of the wall plate 111a, a liquid-blocking brush 117 is installed (fixed) to prevent the coolant from the coolant nozzle 113 from being ejected outside the liquid-blocking box 111 when the follow-up clamp 4 is inserted into the liquid-blocking box 111 through the opening 111b. A liquid-blocking brush 117 may also be installed around the opening 111d on the inner surface of the wall plate 111c. However, when the workpiece 12 is being ground by the grinding wheel 112 positioned closer to the wall plate 111c, the coolant sprayed from the coolant nozzle 113 closer to the wall plate 111c, as shown in Figure 10-(a), is unlikely to be ejected from the opening 111d due to the direction of rotation of the grinding wheel 112, so a liquid-blocking brush 117 is not necessarily required.

[0102] As shown in Figure 10-(a), the coolant from the coolant nozzle 113 near the wall plate 111a is mainly sprayed when the workpiece 12 is stopped from rotating and the notched grinding wheel 116 is used to form grooves in the axial direction of the workpiece 12. In this context, the liquid containment brush 117 serves to prevent the coolant sprayed from the coolant nozzle 113 near the wall plate 111a from being ejected outside the liquid containment box 111.

[0103] More specifically, because the notched grinding wheel 116 is located closer to the wall plate 111a (closer to the follow-up clamp section 4) inside the liquid containment box 111, the coolant nozzle 113 for the notched grinding wheel 116 is also positioned closer to the wall plate 111a. Therefore, the liquid containment brush 117 mainly serves to prevent the coolant sprayed from the coolant nozzle 113 during grinding by the notched grinding wheel 116 from being ejected outside the liquid containment box 111. When the cross-section shown in Figure 10-(a) is viewed in the plane shown in Figures 3-(a) and 9, the notched grinding wheel 116 rotates clockwise.

[0104] As shown in Figure 13, the bottom of the liquid containment box 111 is open, and the coolant sprayed from the coolant nozzle 113 and grinding debris fall to the bottom of the liquid containment box 111 through a drain port 118 integrated at the bottom of the liquid containment box 111. The coolant and other materials that fall from the liquid containment box 111 are discharged through a drain channel 13 located below the work grinding device 1 to a drain channel 14 laid on the outside of the work grinding device 1.

[0105] As shown in Figure 14, when the liquid-proof brush 117 is fixed around the opening 111b on the inner circumferential surface of the wall plate 111a, the circumferential end of the follow-up clamp portion (one clamp portion) 4(5) is in contact with or in a state where it can come into contact with the circumferential surface of the follow-up clamp portion 4(5), substantially blocking the gap between the opening 111b and the circumferential surface of the follow-up clamp portion 4(5).

[0106] Specifically, the liquid-proof brush 117 is composed of multiple brush components 117A arranged circumferentially around the opening 111b of the wall plate 111a, as shown in Figure 14. Each brush component 117A consists of a large number of linear members 117a and a holder 117b that holds the entire end of one side of the large number of linear members 117a, as shown in Figure 16.

[0107] The holder 117b is mainly made of synthetic resin, hard rubber, metal, etc. The linear material 117a is made of synthetic resin, synthetic fiber, animal hair, etc., with a thickness of about 0.something mm to several mm. The entire end of one side of numerous linear materials 117a is inserted into grooves or holes formed on the linear material 117a side of the holder 117b, and is held and integrated with the holder 117b by being clamped in the thickness direction of the holder 117b, welded, or filled with adhesive.

[0108] The holders 117b for multiple brush components 117A are fixed to the wall plate 111a, for example, in a detachable manner, adjacent to each other in the circumferential direction of the opening 111b. When each brush component 117A is fixed to the wall plate 111a, the linear members 117a of the brush components 117A are in contact with or overlapping with the linear members 117a of adjacent brush components 117A in the circumferential direction of the opening 111b.

[0109] The holder 117b for the brush component 117A is further divided into two parts, as shown in Figure 16: a fixing part 117b1 that overlaps and is fixed to the wall plate 111a of the liquid-proof box 111, and a holding part 117b2 that holds a large number of linear members 117a. The ends of the large number of linear members 117a on the holding part 117b2 side are gathered together and held in the holding part 117b2 in an integrated state. Multiple through holes 117b3 are formed in the width direction of the fixing part 117b1 for joining to the wall plate 111a with screws (bolts) 15 or the like.

[0110] The ends of the numerous linear materials 117a on the holding portion 117b2 side are bonded or otherwise integrated with each other as described above, and are then pressed or bonded in the thickness direction to the holding portion 117b2, thereby integrating with and holding the holding portion 117b2.

[0111] As shown in Figure 16-(c), the surface of the fixing part 117b1 on the wall plate 111a side and the surfaces of the numerous linear members 117a on the wall plate 111a side form a continuous plane so that no gap is created between the wall plate 111a and the linear members 117a, or at least the gap is minimized, and the entire surface of the wall plate 111a side of the numerous linear members 117a is aligned in contact with the wall plate 111a. By having the entire surface of the wall plate 111a side of the linear members 117a in contact with the wall plate 111a, leakage of grinding chips and coolant outside the opening 111b is more easily prevented.

[0112] Figure 15 shows an example of the arrangement of brush components 117A when two types of brush components 117A, 117A, as shown in Figures 16-(a) and (b), with different widths of the holder 117b, are arranged adjacent to each other in the circumferential direction of the opening 111b.

[0113] In the example in Figure 15, the holder 117b is given a certain width, while also considering that the length of the linear material 117a does not become too large. The widths of the two types of brush components 117A, 117A and the angle between the centerlines in the width direction of adjacent brush components 117A, 117A are adjusted to arrange the two types of brush components 117A, 117A around the opening 111b. In this example, the angle between the centerlines in the width direction of adjacent brush components 117A, 117A is 22.5 degrees, but the angle is arbitrary. When the angle between the centerlines is 22.5 degrees, the number of brush components 117A that make up the liquid-proof brush 117 is 16.

[0114] As shown in Figure 16, the brush component 117A has a form in which numerous linear members 117a protrude from the lower end of a holding portion 117b2 having a certain width and thickness, in the direction of the centerline in the width direction, and individually the numerous linear members 117a are arranged substantially parallel to the centerline in the width direction of the holding portion 117b2. When the brush components 117A are arranged adjacent to each other in the width direction as shown in Figure 15, the linear members 117a of adjacent brush components 117A, 117A or overlap.

[0115] In the examples shown in Figures 14 to 16, the holder 117b is rectangular on the vertical surface of the brush component 117A, but the holder 117b may also be formed in a strip-like fan shape. When the holder 117b is rectangular, as shown in Figure 15, there may be no gap (space) between adjacent brush components 117A, the holder 117b of 117A, and the ends of the linear material 117a side of 117b, or there may be a small gap.

[0116] The linear material 117a on the back side (wall panel 111a side) of the brush component 117A is basically aligned with the back side of the fixing part 117b1 as shown in Figure 16-(c) in order to eliminate the gap between the back side of the brush component 117A and the wall panel 111a, but this is not always necessary. When the linear material 117a on the back side is aligned with the back side of the fixing part 117b1, when the brush component 117A is joined to the wall panel 111a, the linear material 117a on the back side comes into contact with the wall panel 111a, closing the gap between the brush component 117A and the wall panel 111a.

[0117] As shown in Figure 15, the linear members 117a on both sides of the holding portion 117b2 in the width direction tend to tilt toward the center of the holding portion 117b2 in the width direction as they approach the opening 111b, and tend to bend toward the center of the width direction as they approach the opening 111b. Consequently, the density of the linear members 117a increases toward the opening 111b, causing the linear members 117a to function in a way that makes it difficult for grinding debris and coolant to pass through, or even to block them.

[0118] When fixing the brush component 117A to the wall panel 111a, in order to ensure the stability of the fixed state of the brush component 117A, as shown in Figure 17, a reinforcing plate 111f is directly or indirectly superimposed on the wall panel 111a to reinforce the wall panel 111a if the wall panel 111a is thin, and together with the holding portion 117b2 of the brush component 117A, it is joined to the wall panel 111a by screws 15 as shown in Figure 14.

[0119] The reinforcing plate 111f shown in Figure 17 is formed in the shape of a divided ring for fixing the two brush components 117A of different widths shown in Figures 16-(a) and (b). However, the circumference of the reinforcing plate 111f is arbitrary, and it may also be formed in the shape of a ring. An insertion hole 111f1 is formed in the reinforcing plate 111f at a position corresponding to the insertion hole 117b3 of the fixing portion 117b1.

[0120] The reinforcing plate 111f shown in Figure 17 is used to fix the fixing portions 117b1 of two adjacent brush components 117A. In this relationship, the spacing between the insertion holes 111f1, 111f1 of the reinforcing plate 111f corresponds to the spacing between the insertion holes 117b3, 117b3 formed in the fixing portions 117b1, 117b1 of the two types of brush components 117A shown in Figures 16-(a) and (b). [Explanation of Symbols]

[0121] 1...Work grinding machine, 2...Support stand, 3...gripping device, 4... One clamp section (following clamp section), 41... Gripping material, 42... Storage section, 43... Detection material, 5...the other clamping part (fixing clamping part), 6... (the support part of one of the clamps), 7... (the support part of the other clamp part), 8... Linear drive unit, 81... Motor, 82... Drive shaft, 83... Drive gear, 84... Driven gear, 85... Ball screw, 86... Nut 9...Movable side retaining unit, 91...Main body, 92...Control unit, 93...Guide, 94...Sensor, 95...Pressurized fluid supply pipe, 96...Hydraulic pump, 97...Control valve, 98...Workpiece rotation motor (rotary drive device), 99...Tank, 10... Fixed side pressing unit, 101... Control unit, 102... Air blower pipe, 103... Sensor, 104... Workpiece rotation motor (rotation drive device), 11... Grinding unit, 111... Liquid-proof box, 111a... Wall panel, 111b... Opening, 111c... Wall panel, 111d... Opening, 111e... Side panel, 111f... Reinforcement plate, 111f1... Through hole, 112... Grinding wheel, 113... Cooling nozzle, 114...motor, 115... Ball screw, 116... Notch grinding wheel, 117... Liquid-proof brush, 117A... Brush component, 117a... Wire-shaped material, 117b... Holder, 117b1... Fixing part, 117b2... Holding part, 117b3... Through hole, 118……Drain port, 12...Work, 12A...Supported material, 12A1...Protrusion, 13... Drainage channel, 14... Drainage ditch, 15... screw.

Claims

1. A pair of clamping parts, supported on the support portion, are positioned opposite each other in the longitudinal direction of the support base, gripping the workpiece when they are close together, and rotatable together with the workpiece around its axis while gripping it. A rotational drive device that rotates each of the pair of clamping parts that grip the workpiece together with the support part around the axis of the clamping part, A linear drive device that moves at least one of the pair of clamp portions, together with the support portion that supports that clamp portion, in a linear motion in the longitudinal direction relative to the support base, A workpiece grinding apparatus comprising a grinding unit having a grinding wheel for grinding or polishing the workpiece, which is mounted on the support base so as to be able to move linearly in the longitudinal direction of the support base, An attachment to the grinding unit, which is capable of linear motion in the longitudinal direction of the support base, moves together with the grinding unit when the grinding unit moves toward one of the clamping parts, surrounding the pair of clamping parts and the workpiece held by both clamping parts. The wall plate on the side of the clamp portion is formed to have an opening that allows the grinding unit to take in at least a portion of the workpiece side of the clamp portion in the axial direction when the grinding unit moves toward the clamp portion side. A plurality of these liquid-proof brushes are arranged around the opening on the inner surface of the wall panel, filling the gap between the opening and the circumferential surface of one of the clamp portions, and continuously fixed in the circumferential direction of the opening, with the end on the circumferential surface side of one of the clamp portions in contact with or in a state where it can come into contact with the circumferential surface of one of the clamp portions. A brush component for a grinding unit in a workpiece grinding apparatus, characterized in that it comprises a large number of linear materials and a holder that holds all ends on one side of the large number of linear materials, the holders are fixed to the wall plate adjacent to each other in the circumferential direction of the opening, and the linear materials are in contact with or overlap with the linear materials of the brush components adjacent to each other in the circumferential direction of the opening.

2. The holder is divided into a fixing portion that overlaps and is fixed to the wall plate of the liquid-proof box, and a holding portion that holds the numerous linear materials, and the surface of the fixing portion on the wall plate side and the surface of the numerous linear materials on the wall plate side form a continuous plane, characterized in that the brush component for the grinding unit in the work grinding apparatus according to claim 1.

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