Ultrasound examination apparatus and ultrasound examination method using the same

Abstract

The present invention provides an ultrasound examination apparatus and method that can rapidly, precisely, and extensively examine a large number of subjects. [Solution] The ultrasound inspection apparatus includes a loading module for transporting a subject into the ultrasound inspection apparatus, a boat fixture module on which the subject is placed and transported by the loading module, and which includes a boat that supports the subject and a cover that secures the subject to the boat, an ultrasound inspection module for performing an ultrasound inspection on the subject, a boat transport module for transporting the boat fixture module to the ultrasound inspection module side and transporting the boat fixture module to the outside of the ultrasound inspection module after the ultrasound inspection has been performed, a boat cover removal unit for removing the cover from the boat before the boat fixture module is transported to the ultrasound inspection module side, and a boat cover mounting unit for attaching the cover to the boat after the ultrasound inspection has been performed through the ultrasound inspection module.

Description

Technical Field

[0001] The present invention relates to an ultrasonic inspection apparatus and an ultrasonic inspection method using the same, and more particularly, to an ultrasonic inspection apparatus capable of inspecting a large number of specimens in large quantities and an ultrasonic inspection method using the same.

Background Art

[0002] Techniques for obtaining an internal image of an inspection target by utilizing a signal having a frequency in the ultrasonic wave region are widely used in the medical field for internal organs of the body and fetuses during pregnancy, and in the non-destructive testing (NDT) field for detecting internal defects without deforming manufactured products.

[0003] Exemplarily, even for semiconductor devices forming complex circuit patterns, defect detection by ultrasonic inspection can be performed. Conventionally, ultrasonic inspection can be performed for applications such as selecting only a part of completed semiconductor devices to calculate the defect ratio.

[0004] That is, detection of air-related defects such as voids, cracks, and delamination occurring during the semiconductor package manufacturing process is performed by the above-described ultrasonic inspection. However, since the existing inspection method is a sample inspection method, a mass inspection technique capable of inspecting a slightly larger number of semiconductors is required.

[0005] Also, in the case of existing ultrasonic inspection methods, there is a limit point in accurate inspection because the inside of a semiconductor package laminated in multiple layers is precisely inspected with a single probe having only a specific frequency band.

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present invention has been devised to solve the above-described problems, and an object thereof is to provide an ultrasonic inspection apparatus capable of quickly, precisely, and in large quantities inspecting a large number of specimens and an ultrasonic inspection method using the same.

[0007] However, the technical problems that the present invention aims to solve are not limited to those described above, and other problems not mentioned can be clearly understood by those skilled in the art from the description of the invention below. [Means for solving the problem]

[0008] An ultrasonic inspection apparatus according to one aspect of the present invention includes a loading module configured to transport a subject into the ultrasonic inspection apparatus; a boat fixture module on which the subject is placed and transported by the loading module, and which includes a boat that supports the subject and a cover that secures the subject to the boat; an ultrasonic inspection module configured to perform an ultrasonic inspection on the subject placed on the boat fixture module; a boat transport module configured to transport the boat fixture module to the ultrasonic inspection module side and transport the boat fixture module to the outside of the ultrasonic inspection module after an ultrasonic inspection has been performed on the subject; a boat cover removal unit configured to remove the cover from the boat before the boat fixture module is transported to the ultrasonic inspection module side; and a boat cover mounting unit configured to attach the cover to the boat after an ultrasonic inspection has been performed on the subject through the ultrasonic inspection module.

[0009] Preferably, the ultrasound module may include a first probe configured to perform ultrasound examination on the subject and a second probe configured to perform ultrasound examination on the subject in a wider frequency band than the first probe.

[0010] Preferably, the ultrasound apparatus further includes a boat block module configured to raise the subject toward the second probe when an ultrasound examination is performed on the subject by the second probe, the boat block module may be configured to raise the subject toward the second probe while being in close contact with the lower end of the boat.

[0011] Preferably, the ultrasound apparatus may further include a drying module configured to dry the subject that has been transferred to the outside of the ultrasound module.

[0012] Preferably, the ultrasonic inspection apparatus further includes an unloading module configured to transport a boat fixture module, including a boat covered by the boat cover mounting section, to the outside of the ultrasonic inspection apparatus, and when viewed from the left and right directions of the ultrasonic inspection apparatus, the ultrasonic inspection module, the boat transport module, the boat cover handling module, the block buffer on which the boat block module is placed before ultrasonic inspection is performed on the subject, and the drying module are located between the loading module and the unloading module, and when viewed from the left and right directions of the ultrasonic inspection apparatus, the ultrasonic inspection module is located closer to the loading module than the block buffer, and when viewed from the front and rear directions of the ultrasonic inspection apparatus, the ultrasonic inspection module, the drying module, and the boat cover handling module are arranged in that order inside the ultrasonic inspection apparatus, and when viewed from the left and right directions of the ultrasonic inspection apparatus, the boat cover removal section can be located closer to the loading module than the boat cover mounting section.

[0013] An ultrasonic inspection method according to one aspect of the present invention is an ultrasonic inspection method performed by an ultrasonic inspection device, comprising the steps of: transferring a boat jig module, including a boat that supports the subject, into the interior of the ultrasonic inspection device; removing a cover that secures the subject from the boat jig module; transferring the boat jig module from which the cover has been removed to the ultrasonic inspection module side; performing an ultrasonic inspection on the subject placed on the boat jig module; and attaching a cover that secures the subject to the boat jig module after the ultrasonic inspection has been performed on the subject.

[0014] Preferably, the step of performing an ultrasonic examination on a subject placed on the boat fixture module includes the step of performing an ultrasonic examination on the subject using a first probe, and the ultrasonic examination method further includes the step of drying the subject which has been moved to the outside of the ultrasonic examination module after the ultrasonic examination has been performed with the first probe, and the step of moving the boat fixture module with the cover attached to the outside of the ultrasonic examination apparatus, and the step of attaching the cover that secures the subject to the boat fixture module may be configured to attach the cover to the boat fixture module after the subject has been dried.

[0015] Preferably, the step of performing an ultrasonic examination on a subject placed on the boat jig module further includes the step of performing an ultrasonic examination on the subject using a second probe in a wider frequency band than the first probe, the ultrasonic examination method further includes the step of transporting a boat block module configured to raise the subject towards the second probe side to the ultrasonic examination module side, the step of connecting the boat jig module with the cover removed and the boat block module within the ultrasonic examination module, the step of drying the subject which has been transported to the outside of the ultrasonic examination module after the ultrasonic examination has been performed by the second probe, and the step of transporting the boat jig module with the cover attached to the outside of the ultrasonic examination apparatus, the step of attaching a cover for fixing the subject to the boat jig module is configured such that the cover is attached to the boat jig module after the subject has been dried, and the boat block module may be configured to raise the subject towards the second probe side while being in close contact with the lower end of the boat.

[0016] Preferably, the step of performing an ultrasonic examination on a subject placed on the boat jig module further includes the step of performing an ultrasonic examination on the subject using a second probe in a wider frequency band than the first probe, wherein the ultrasonic examination method includes the steps of transferring a boat block module configured to raise the subject toward the second probe toward the ultrasonic examination module, connecting the boat jig module with the cover removed and the boat block module within the ultrasonic examination module, and moving the boat block module outside the ultrasonic examination module after the ultrasonic examination has been performed by the second probe. The procedure further includes the steps of transporting the subject, performing an ultrasound examination on the subject using the first probe, drying the subject which has been moved to the outside of the ultrasound module after the ultrasound examination has been performed by the first probe, and transporting the boat jig module with the cover attached to the outside of the ultrasound apparatus, wherein the cover for fixing the subject is attached to the boat jig module, and the cover is attached to the boat jig module after the subject has been dried, and the boat block module may be configured to raise the subject towards the second probe while being in close contact with the lower end of the boat. [Effects of the Invention]

[0017] This embodiment of the present invention has the advantage of being able to rapidly and precisely examine a large number of subjects while minimizing the movement path of the subjects during the ultrasound examination process.

[0018] Furthermore, various other additional effects can be achieved through diverse embodiments of the present invention. These diverse effects of the present invention will be described in detail in each embodiment, and effects that are easily understood by those skilled in the art will not be described. [Brief explanation of the drawing]

[0019] The following drawings attached to this specification illustrate the preferred embodiments of the present invention and serve to further understand the technical idea of the present invention together with the detailed description of the invention to be described later. Therefore, the present invention should not be construed as being limited only to the matters described in such drawings. [Figure 1] This is a drawing showing the overall shape of an ultrasonic inspection device according to an embodiment of the present invention. [Figure 2] This is a drawing showing the overall shape of an ultrasonic inspection device according to an embodiment of the present invention. [Figure 3] This is a drawing exemplarily showing the overall ultrasonic inspection process using the ultrasonic inspection device of FIG. 1. [Figure 4] This is a schematic diagram showing the ultrasonic inspection module provided in the ultrasonic inspection device of FIG. 1. [Figure 5] This is a drawing showing the boat jig module provided in the ultrasonic inspection device of FIG. 1. [Figure 6] This is a drawing showing the boat jig module provided in the ultrasonic inspection device of FIG. 1. [Figure 7] This is a drawing showing the boat jig module provided in the ultrasonic inspection device of FIG. 1. [Figure 8] This is a drawing showing the boat jig module provided in the ultrasonic inspection device of FIG. 1. [Figure 9] [ This is a drawing showing the boat block module provided in the ultrasonic inspection device of FIG. 1. [Figure 10] This is a drawing showing the boat block module provided in the ultrasonic inspection device of FIG. 1. [Figure 11] This is a drawing showing the state where the boat jig module and the boat block module are combined. [Figure 12] This is a schematic diagram showing the state where the boat block module lifts the boat jig module. [Figure 13] This is a drawing showing various embodiments regarding the ascent / descent of the boat jig module and the boat block module. [Figure 14]These drawings illustrate various implementations of raising / lowering boat jig modules and boat block modules. [Figure 15] These drawings illustrate various implementations of raising / lowering boat jig modules and boat block modules. [Figure 16] These drawings illustrate various implementations of raising / lowering boat jig modules and boat block modules. [Figure 17] Figure 1 is a flowchart illustrating the ultrasound examination method using the ultrasound examination device. [Figure 18] Figure 1 is a flowchart illustrating the ultrasound examination method using the ultrasound examination device. [Figure 19] Figure 1 is a flowchart illustrating the ultrasound examination method using the ultrasound examination device. [Modes for carrying out the invention]

[0020] Preferred embodiments of the present invention will now be described in detail with reference to the attached drawings. Prior to this, terms and words used in this specification and claims should not be interpreted in a manner limited to their usual or dictionary meanings, but rather in a manner consistent with the technical idea of ​​the present invention, in accordance with the principle that inventors can appropriately define the concepts of terms in order to best describe their invention.

[0021] Therefore, the embodiments described herein and the configurations illustrated in the drawings represent only one of the most preferred embodiments of the present invention and do not represent the entire technical concept of the present invention. It should be understood that there are various equivalents and modifications that can substitute for them at the time of filing.

[0022] Figures 1 and 2 are drawings showing the overall shape of an ultrasonic inspection apparatus 10 according to one embodiment of the present invention, and Figure 3 is a drawing illustrating the overall ultrasonic inspection process using the ultrasonic inspection apparatus 10 of Figure 1.

[0023] In the embodiments of the present invention, the X-axis direction shown in the drawings may represent the front-to-back direction of the ultrasonic inspection device 10 (described later), the Y-axis direction may represent the left-to-right direction of the ultrasonic inspection device 10 perpendicular to the X-axis direction on the horizontal plane (XY plane), and the Z-axis direction may represent the up-and-down direction perpendicular to both the X-axis and Y-axis directions.

[0024] Referring to Figures 1 to 3, an ultrasonic inspection apparatus 10 according to one embodiment of the present invention may include a loading module 100, a boat jig module 200, an ultrasonic inspection module 300, a boat transfer module 400, and a boat cover handling module 500.

[0025] The loading module 100 may be configured to transport the subject S into the ultrasound inspection apparatus 10. For example, the subject S may include all objects that can be inspected by irradiating the subject S with an ultrasonic signal, although the subject S may include semiconductor elements to be inspected, and may be referred to as a work. Such a subject S may be formed in a form having a certain area, but is not limited thereto. The loading module 100 may also include a container belt, but is not limited thereto.

[0026] In one embodiment, the subject S may include a power module element for an autonomous vehicle. In the case of such a power module element for an autonomous vehicle, the presence or absence of potential defective elements is directly related to the risk of accidents involving autonomous vehicles in the future, so ultrasonic defect inspection based on the ultrasonic inspection device 10 may be performed on all elements before shipment.

[0027] The boat jig module 200 may include a boat 210 and a cover 220.

[0028] The boat 210 can support the subjects S, which are placed on it and transported by the loading module 100. In this case, a single boat 210 can accommodate multiple subjects S. Such a boat 210 may have a predetermined area to accommodate a large number of subjects S.

[0029] The cover 220 can secure the subject S to the boat 210. This will be discussed in more detail in the related explanations that follow. The ultrasound inspection module 300 can perform ultrasound inspection on a subject S placed on the boat jig module 200. For example, the ultrasound inspection module (300, specifically the first probe 310 and the second probe 320 described later) can irradiate the subject S with an inspection signal having a frequency in the ultrasonic range. Accordingly, the ultrasound inspection module 300 can measure the eco signals reflected at the layered interface surfaces of the subject S.

[0030] Furthermore, an internal image of the subject S, i.e., an interface pattern image, can be generated through the ultrasonic inspection module 300. Through this, it can be determined what kind of manufacturing defects the subject S has. These manufacturing defects may include, for example, DBC (direct bonded copper) cracks, solder voids, EMC (epoxy mold compound) delamination, spacer twisting, DMC voids, and ceramic pattern delamination.

[0031] The boat transfer module 400 can transfer the boat jig module 200 to the ultrasonic inspection module 300. After the ultrasonic inspection is performed on the subject S, the boat transfer module 400 can transfer the boat jig module 200 to the outside of the ultrasonic inspection module 300. In one embodiment, the boat transfer module 400 may include a linear actuator and a servo motor.

[0032] The boat cover handling module 500 may include a boat cover removal section 510 and a boat cover mounting section 520.

[0033] The boat cover removal unit 510 can remove the cover 220 from the boat 210 before the boat jig module 200 is transferred to the ultrasonic inspection module 300. At this time, the boat cover removal unit 510 may be equipped with a gripper capable of gripping the cover 220. In one embodiment, the boat cover removal unit 510 can remove the cover 220 from the boat 210 by suction.

[0034] The boat cover mounting section 520 can be used to attach the cover 220 to the boat 210 after an ultrasound examination has been performed on the subject S via the ultrasound examination module 300. At this time, the boat cover mounting section 520 may be equipped with a gripper capable of gripping the cover 220.

[0035] On the other hand, the ultrasonic inspection apparatus 10 of the present invention may further include a control module C.

[0036] The control module C can control the driving of the loading module 100, the boat jig module 200, the ultrasonic inspection module 300, the boat transfer module 400, and the boat cover handling module 500.

[0037] Such a control module C may include a processor. For example, the processor may be implemented in the form of a CPU, GPU, AP, or a combination thereof, and may be provided with DRAM, flash memory, SSD, or other various forms of memory as needed.

[0038] This embodiment of the present invention has the advantage of being able to rapidly and precisely examine a large number of subjects S while minimizing the movement path of the subjects S during the ultrasound examination process.

[0039] Figure 4 is a schematic diagram showing the ultrasound inspection module 300 installed in the ultrasound inspection device 10 shown in Figure 1.

[0040] In one embodiment, the ultrasound module 300 may include a first probe 310 and a second probe 320.

[0041] The first probe 310 can perform an ultrasound examination on the subject S (this is called a "T-scan"). At this time, the ultrasound signal irradiated from the first probe 310 onto the subject S can penetrate the subject S.

[0042] The second probe 320 can perform ultrasound examinations on the subject S over a wider frequency band than the first probe 310 (this is called a "C-scan"). At this time, the ultrasound signal irradiated from the second probe 320 onto the subject S can be reflected from the subject S and collected again through the second probe 320.

[0043] In other words, in the embodiment of the present invention, the ultrasound examination module 300 can perform an ultrasound examination on a subject S using a first probe 310 and a second probe 320 having different frequency bands.

[0044] In the case of ultrasound probes, higher frequencies result in higher resolution but shorter focal length and transmission distance to the subject S, while lower frequencies result in lower resolution but longer focal length and transmission distance to the subject S. Therefore, there are limitations to precisely examining the inside of the subject S using only a single ultrasound probe with a specific frequency band.

[0045] On the other hand, when performing an ultrasound examination on a subject S using a first probe 310 and a second probe 320 having different frequency bands, as in the ultrasound examination module 300 of the present invention, a wider range of diverse areas inside the subject S can be examined quickly and efficiently.

[0046] In one embodiment, the subject S may be a semiconductor.

[0047] The first probe 310 can inspect defects in the junction between the tip of the subject S and the interposer, or between the interposer of the subject S and the substrate. Specifically, since the first probe 310 has a relatively narrow frequency band compared to the second probe 320, the focal length and transmission distance to the subject S are increased, and the ultrasonic signal irradiated from the first probe 310 onto the subject S can pass through the subject S, allowing an ultrasonic examination to be performed on the subject S.

[0048] Furthermore, the second probe 320 can inspect defects in the tip junction or inner layer inside the specimen S. In other words, since the second probe 320 has a wider frequency band than the first probe 310, it has relatively higher resolution, and more precise inspection of defects inside the specimen S can be performed.

[0049] In the case of the ultrasound examination apparatus 10 of the present invention, an ultrasound examination may be performed on the subject S using the first probe 310, followed by an ultrasound examination on the subject S using the second probe 320, or an ultrasound examination may be performed on the subject S using the second probe 320, followed by an ultrasound examination on the subject S using the first probe 310.

[0050] Alternatively, in the case of the ultrasound examination device 10, the first probe 310 and the second probe 320 can simultaneously perform an ultrasound examination on the subject S.

[0051] This implementation configuration has the advantage of allowing the appropriate use of ultrasound probes with different frequency bands depending on the type of subject S or the area of ​​subject S to be ultrasound-examined (the joint between the tip and interposer of subject S, the joint between the interposer and substrate of subject S, the chip joint inside subject S, or defects in the inner layer), thereby maximizing the ultrasound-examined efficiency for subject S.

[0052] In one embodiment, the focal length of the first probe 310 relative to the subject S may be longer than the focal length of the second probe 320 relative to the subject S.

[0053] For example, the first probe 310 can perform an ultrasound examination on the subject S in a frequency band of 10 MHz to 50 MHz.

[0054] Furthermore, the focal length of the first probe 310 relative to the subject S may be 10 mm to 20 mm.

[0055] Furthermore, the second probe 320 can perform ultrasound examinations on the subject S in a frequency band of 200 MHz to 400 MHz.

[0056] Furthermore, the focal length of the second probe 320 relative to the subject S may be 0.6 mm to 0.8 mm.

[0057] In one embodiment, the ultrasound module 300 may further include a third probe 330.

[0058] The third probe 330 can be positioned on the opposite side of the first probe 310 when viewed from above or below with respect to the subject S. The third probe 330 can generate an ultrasound image using the ultrasound signal generated by the first probe 310.

[0059] In other words, the third probe 330 can collect the ultrasonic signal that is irradiated onto the subject S from the first probe 310 and transmitted through the subject S.

[0060] In one embodiment, the aforementioned control module C is configured to control the driving of the first probe 310 and the second probe 320, and may include an AI model.

[0061] For example, the AI ​​model may be trained using unsupervised learning, but is not limited to this; it may also be trained using supervised learning or semi-persistent learning. Furthermore, the AI ​​model may consist of one or more neural network layers, each of which may contain one or more weights. The AI ​​model can perform learning / inference by performing operations between one or more weights and input data.

[0062] Specifically, the control module C can collect first ultrasound examination data obtained by performing ultrasound examinations on multiple first subjects using the first probe 310, and second ultrasound examination data obtained by performing ultrasound examinations on multiple first subjects using the second probe 320.

[0063] The control module C then sets the first ultrasound examination data and the second ultrasound examination data as input data, and learns an AI model by considering at least one of the following as a weighting factor: the type of the first subject (first factor), the manufacturing process of the first subject (second factor), the manufacturing location of the first subject (third factor), and the type of probe (first probe 310 or second probe 320) used to perform the ultrasound examination on the first subject (fourth factor). This allows the control module C to derive a defect estimation criterion for the subject S.

[0064] In other words, the control module C can derive defect estimation criteria for the subject by performing a weighted sum on the first, second, third, and fourth factors and learning the AI ​​model. Such defect estimation criteria can be seen as reflecting the influence of external factors (the first to fourth factors mentioned above) on the occurrence of defects in the subject.

[0065] Furthermore, when an ultrasound examination is performed on a second subject, which is different from the first subject, using at least one of the first probe 310 and the second probe 320, the AI ​​model can estimate defects in the second subject using the derived defect estimation criteria.

[0066] With this implementation configuration, when examining a wider range of areas inside the subject S using the first probe 310 or the second probe 320, which have different frequency bands, it is possible to derive defect estimation criteria for the subject S by considering various external factors (the first to fourth factors mentioned above) that are taken into account during the ultrasound examination process as weighted factors. This has the advantage of allowing for a more accurate determination of defects in the subject S during the ultrasound examination process.

[0067] In one embodiment, the aforementioned control module C may include an AI model.

[0068] At this time, the control module C can set the ultrasound examination area of ​​the first probe 310 and the ultrasound examination area of ​​the second probe 320 for a single subject S, taking into consideration at least one of the following: the type of subject (first factor), the manufacturing process of the subject (second factor), and the manufacturing location of the subject (third factor).

[0069] In embodiments of the present invention, external factors (the first to third factors mentioned above) during the ultrasound examination process can change the location where defects primarily occur within the subject S. When the location where defects primarily occur within the subject S changes due to these external factors (the first to third factors mentioned above), the ultrasonic frequency band of the probe for accurate defect inspection can also change.

[0070] Therefore, the control module C of the ultrasound inspection apparatus 10 of the present invention can set the ultrasound inspection area of ​​the first probe 310 and the ultrasound inspection area of ​​the second probe 320 for a single subject S in order to accurately inspect for defects inside the subject S due to external factors (the first to third factors mentioned above) during the ultrasound inspection process. At this time, the ultrasound inspection area of ​​the first probe 310 and the ultrasound inspection area of ​​the second probe 320 for the subject S may be set to overlap with each other, or they may be set not to overlap with each other.

[0071] Figures 5 to 8 are diagrams showing the boat jig module 200 provided in the ultrasonic inspection device 10 of Figure 1, and Figures 9 and 10 are diagrams showing the boat block module 600 provided in the ultrasonic inspection device 10 of Figure 1.

[0072] Referring to Figures 5 to 10, the ultrasonic inspection apparatus 10 may further include a boat block module 600.

[0073] The boat block module 600 can raise the subject S towards the second probe 320 when an ultrasound examination is performed on the subject S by the second probe 320.

[0074] At this time, the boat block module 600 can raise the subject S towards the second probe 320 while remaining in close contact with the lower end of the boat 210. The detailed configuration of such a boat block module 600 will be described in detail in the related explanations that follow.

[0075] In an embodiment of the present invention, the second probe 320 has a relatively wider frequency band compared to the first probe 310. In this case, while the resolution is high, the focal length and the transmission distance to the subject S may be shorter. At this time, the boat block module 600 can compensate for the problem of the second probe 320 having a wide frequency range and a short focal length to the subject S by raising the subject S towards the second probe 320. Accordingly, the accuracy of the ultrasound examination of the subject S through the second probe 320 can be further maximized. As an example, the boat block module 600 can raise the subject S towards the second probe 320 so that the focal length of the second probe 320 relative to the subject S is adjusted to 0.6 mm to 0.8 mm.

[0076] Specifically, the boat 210 may include a plurality of protruding pins 212 and a specimen mounting section 214.

[0077] The protruding pins 212 may be configured to protrude from the boat 210. Such protruding pins 212 may be provided at a predetermined height from the boat 210. In this case, the cover 220 described above can be inserted between the protruding pins 212 to secure the subject S to the boat 210.

[0078] The specimen placement section 214 is provided between the protruding pins 212, on which the specimen S can be placed. In this case, the specimen placement section 214 may include a through-hole 214a of a predetermined area. That is, the specimen S placed on the specimen placement section 214 can be prevented from detaching from the horizontal plane (XY plane) of the boat 210 by the protruding pins 212.

[0079] Figure 11 is a diagram showing the boat jig module 200 and the boat block module 600 connected, and Figure 12 is a schematic diagram showing the boat block module 600 lifting the boat jig module 200.

[0080] Referring to Figures 11 and 12, the boat block module 600 may include a block plate 610 and a pressurized block 620.

[0081] The block plate 610 can be moved to the ultrasound module 300 side and brought into close contact with the lower end of the boat 210 when an ultrasound examination is performed on the subject S by the second probe 320. For example, the block plate 610 can be moved to the ultrasound module 300 side by the boat transfer module 400 described above.

[0082] The pressure block 620 may be formed protruding from the block plate 610. The pressure block 620 can pressurize the subject S by passing through the through hole 214a, thereby raising the subject S toward the second probe 320. At this time, the pressure block 620 can be driven to rise / fall by a separate block drive unit 630 of the boat block module 600.

[0083] In other words, in the ultrasound examination apparatus 10 of the present invention, the pressure block 620 provided on the block plate 610 can raise the subject S on the boat 210 while the block plate 610 is in close contact with the lower end 210 of the boat, so that the focal distance of the subject S relative to the second probe 320 can be adjusted more stably. Accordingly, the accuracy of the ultrasound examination of the subject S through the second probe 320 can be more stably ensured.

[0084] Furthermore, since the subject S can be raised towards the second probe 320 via the pressure block 620 to adjust the focal length of the subject S relative to the second probe 320, the second probe 320 does not need to be lowered towards the subject S during the ultrasound examination process, thus preventing collision between the protruding pin 212 and the second probe 320.

[0085] In one embodiment, the pressure block 620 can raise the subject S by the focal length of the second probe 320. For example, the pressure block 620 can raise the subject S toward the second probe 320 so that the focal length of the second probe 320 relative to the subject S is adjusted to 0.6 mm to 0.8 mm.

[0086] In one embodiment, the area of ​​the upper surface of the pressure block 620 on the horizontal plane may be smaller than the area of ​​the through hole 214a or the area of ​​the lower surface of the subject S on the horizontal plane.

[0087] In other words, by forming the upper surface area of ​​the pressure block 620 on the horizontal plane to be smaller than the area of ​​the through-hole 214a through which the pressure block 620 passes the boat 210 or the lower surface area of ​​the subject S on the horizontal plane, the pressure block 620 can be stably raised towards the subject S through the through-hole 214a without interference from the boat 210. As an example, the horizontal width of the pressure block 620 can be set to 90% to 95% of the horizontal width of the through-hole 214a.

[0088] In one embodiment, the block plate 610 may be made of a material harder than the pressure block 620. That is, since the pressure block 620 comes into contact with the subject S and pressurizes the subject S toward the second probe 320, causing it to rise, it may be made of a material less hard than the block plate 610 in order to prevent damage to the subject S.

[0089] In one embodiment, the ultrasound inspection apparatus 10 may further include a block buffer B.

[0090] The block buffer B may be provided alongside the ultrasound module 300 when viewed from the left or right direction of the ultrasound device 10. Such a block buffer B may be the space in the ultrasound device 10 where the boat block module 600 is placed before the ultrasound examination is performed on the subject S.

[0091] In one embodiment, a boat block module 600 can be positioned in the block buffer B, which is equipped with a pressure block 620 having a height and width that is matched to the type of subject being ultrasound-examined or to different sizes from each other.

[0092] Furthermore, when an ultrasound examination is performed on the subject S by the second probe 320, the control module C can control the boat block module 600, which is equipped with a pressure block 620 having a height and width that matches the type or size of the subject S currently being ultrasound-examined, to be moved to the ultrasound examination module 300.

[0093] On the other hand, the control module C can control the driving of the boat jig module 200, the ultrasonic inspection module 300, and the boat block module 600.

[0094] Figures 13 to 16 are diagrams illustrating various embodiments for raising and lowering the boat jig module 200 and the boat block module 600.

[0095] The aforementioned control module C can control the boat 210 to descend away from the second probe 320 when an ultrasound examination is performed on the subject S by the second probe 320, and can also control the pressurization block 620 to pressurize the subject S and move it upward toward the second probe 320 (Figure 13).

[0096] Furthermore, the control module C can also control the block plate 610 to rise towards the second probe 320 while the block plate 610 is in close contact with the lower end of the boat 210 (Figure 14).

[0097] Furthermore, the control module C controls the boat 210 to descend so that it moves away from the second probe 320, and controls the block plate 610 to rise towards the second probe 320, thereby controlling the downward movement of the boat 210 and the upward movement of the block plate 610 until the block plate 610 is in close contact with the lower end of the boat 210 (Figure 15).

[0098] Furthermore, the control module C can control the subject S to rise towards the second probe 320 by pressurizing only the pressurizing block 620 (Figure 16).

[0099] Referring again to Figures 1 to 3, the ultrasonic inspection apparatus 10 may further include a drying module 700.

[0100] The drying module 700 can dry the subject S that has been transferred to the outside of the ultrasound module 300. For example, the drying module 700 may include, but is not limited to, an air knife.

[0101] Specifically, the drying module 700 may include a first drying section 710 and a second drying section 720. In this case, the first drying section 710 can dry the subject S, which has been moved to the outside of the ultrasound examination module 300, by discharging low-temperature air. The second drying section 720 can dry the subject S, which has been moved to the outside of the ultrasound examination module 300, by discharging air that is hotter than that of the first drying section 710.

[0102] In one embodiment, when viewed from the left-right direction (Y-axis direction) of the ultrasonic inspection device 10, the first drying section 710 can be positioned closer to the loading module 100 than the second drying section 720.

[0103] In one embodiment, the ultrasound inspection apparatus 10 may further include an unloading module 800.

[0104] The unloading module 800 can transport the boat fixture module 200, including the boat 210 with the cover 220 attached by the boat cover mounting section 520, to the outside of the ultrasonic inspection device 10. The unloading module 800 may include, but is not limited to, a container belt.

[0105] On the other hand, in the ultrasonic inspection apparatus 10 according to an embodiment of the present invention, when viewed from the left-right direction (Y-axis direction) of the ultrasonic inspection apparatus 10, the ultrasonic inspection module 300, the boat transfer module 400, the boat cover handling module 500, the block buffer B on which the boat block module 600 is placed before ultrasonic inspection is performed on the subject S, and the drying module 700 can be located between the loading module 100 and the unloading module 800.

[0106] Furthermore, in the ultrasonic inspection apparatus 10 according to an embodiment of the present invention, when viewed from the left-right direction (Y-axis direction) of the ultrasonic inspection apparatus 10, the ultrasonic inspection module 300 can be positioned closer to the loading module 100 than the block buffer B.

[0107] Furthermore, when viewed from the front-to-back direction (X-axis direction) of the ultrasound inspection device 10, the ultrasound inspection module 300, the drying module 700, and the boat cover handling module 500 can be arranged in that order inside the ultrasound inspection device 10. Accordingly, after the ultrasound inspection of the subject S is performed, the drying operation of the subject S by the drying module 700 can be carried out immediately. In addition, the removal of the cover S from the boat 210 before the ultrasound inspection of the subject S and the installation of the cover S onto the boat 210 after the ultrasound inspection of the subject S can be easily carried out.

[0108] Furthermore, in the ultrasonic inspection apparatus 10 according to an embodiment of the present invention, when viewed from the left-right direction (Y-axis direction) of the ultrasonic inspection apparatus 10, the boat cover removal section 510 can be positioned closer to the loading module 100 than the boat cover mounting section 520.

[0109] At this time, when viewed from the front-to-back direction (X-axis direction) of the ultrasonic inspection device 10, the ultrasonic inspection module 300, the first drying section 710, and the boat cover removal section 510 may be arranged in that order inside the ultrasonic inspection device 10. Furthermore, when viewed from the front-to-back direction (X-axis direction) of the ultrasonic inspection device 10, the block buffer B, the second drying section 720, and the boat cover mounting section 520 may be arranged in that order inside the ultrasonic inspection device 10.

[0110] Figures 17 to 19 are flowcharts showing an ultrasound examination method using the ultrasound examination device 10 shown in Figure 1.

[0111] Referring to Figure 17, the ultrasound examination method may include the following steps S11 to S17. Such an ultrasound examination method shown in Figure 17 may mean that the ultrasound examination is performed using the first probe 310 described above.

[0112] In step S11, the boat fixture module 200, which includes the boat 210 supporting the subject S, can be moved into the ultrasonic inspection device 10.

[0113] In step S12, the cover 220 that secures the subject S can be removed from the boat jig module 200.

[0114] In step S13, the boat jig module 200 with the cover 220 removed can be transferred to the ultrasonic inspection module 300.

[0115] In step S14, an ultrasound examination can be performed on the subject S placed on the boat jig module 200. Specifically, in step S14, an ultrasound examination can be performed on the subject S using the first probe 310.

[0116] In step S15, the subject S, which has been transferred to the outside of the ultrasound module 300 after the ultrasound examination has been performed by the first probe 310, can be dried.

[0117] In step S16, after the ultrasound examination is performed on the subject S, the cover 220 for fixing the subject S can be attached to the boat jig module 200. At this time, the cover 220 for fixing the subject S can be attached to the boat jig module 200 after the subject S has been dried.

[0118] In step S17, the boat jig module 200 with the cover 220 attached can be moved to the outside of the ultrasonic inspection device 10.

[0119] Referring to Figure 18, the ultrasound examination method may include the following steps S21 to S29. Such an ultrasound examination method shown in Figure 18 may mean that the ultrasound examination is performed using the second probe 320 described above.

[0120] In step S21, the boat fixture module 200, which includes the boat 210 supporting the subject S, can be moved into the ultrasonic inspection device 10.

[0121] In step S22, the cover 220 that secures the subject S can be removed from the boat jig module 200.

[0122] In step S23, the boat block module 600, which is configured to raise the subject S towards the second probe 320, can be moved towards the ultrasound examination module 300.

[0123] In step S24, the boat jig module 200 with the cover 220 removed can be transferred to the ultrasonic inspection module 300.

[0124] In step S25, the boat jig module 200 with the cover 220 removed and the boat block module 600 can be joined within the ultrasound module 300. At this time, the boat block module 600 can raise the subject S towards the second probe 320 while being in close contact with the lower end of the boat 210.

[0125] In step S26, an ultrasound examination can be performed on the subject S placed on the boat jig module 200. Specifically, in step S26, an ultrasound examination can be performed on the subject S using the second probe 320 in a wider frequency band than the first probe 310.

[0126] In step S27, the subject S, which has been transferred to the outside of the ultrasound module 300 after the ultrasound examination has been performed by the second probe 320, can be dried.

[0127] In step S28, after the ultrasound examination is performed on the subject S, the cover 220 for fixing the subject S can be attached to the boat jig module 200. At this time, when attaching the cover 220 for fixing the subject S to the boat jig module 200, the cover 220 can be attached to the boat jig module 200 after the subject S has been dried.

[0128] In step S29, the boat jig module 200 with the cover 220 attached can be moved to the outside of the ultrasonic inspection device 10.

[0129] Referring to Figure 19, the ultrasound examination method may include the following steps S31 to S41. Such an ultrasound examination method shown in Figure 19 may mean that the ultrasound examination is performed using the first probe 310 and the second probe 320 described above.

[0130] In step S31, the boat fixture module 200, which includes the boat 210 supporting the subject S, can be moved into the ultrasonic inspection device 10.

[0131] In step S32, the cover 220 that secures the subject S can be removed from the boat jig module 200.

[0132] In step S33, the boat block module 600, which is configured to raise the subject S towards the second probe 320, can be moved towards the ultrasound examination module 300.

[0133] In step S34, the boat jig module 200 with the cover 220 removed can be transferred to the ultrasonic inspection module 300.

[0134] In step S35, the boat jig module 200 with the cover 220 removed and the boat block module 600 can be joined within the ultrasound module 300. At this time, the boat block module 600 can raise the subject S towards the second probe 320 while being in close contact with the lower end of the boat 210.

[0135] In step S36, the second probe 320 can be used to perform an ultrasound examination on the subject S in a wider frequency band than the first probe 310.

[0136] In step S37, after the ultrasound examination is performed by the second probe 320, the boat block module 600 can be moved to the outside of the ultrasound module 300.

[0137] In step S38, an ultrasound examination can be performed on the subject S using the first probe 310. At this time, the step of performing an ultrasound examination on the subject S placed on the boat jig module 200 may include steps S36 and S38.

[0138] In step S39, the subject S, which has been transferred to the outside of the ultrasound module 300 after the ultrasound examination has been performed by the first probe 310, can be dried.

[0139] In step S40, after the ultrasound examination is performed on the subject S, the cover 220 for fixing the subject S can be attached to the boat jig module 200. At this time, when attaching the cover 220 for fixing the subject S to the boat jig module 200, the cover 220 can be attached to the boat jig module 200 after the subject S has been dried.

[0140] In step S41, the boat jig module 200 with the cover 220 attached can be moved to the outside of the ultrasonic inspection device 10.

[0141] As described above, although the present invention has been explained by limited embodiments and drawings, the present invention is not limited thereto, and of course, various modifications and variations are possible within the equivalent scope of the technical concept of the present invention and the claims described below by persons with ordinary skill in the art to which the present invention pertains.

[0142] On the other hand, while terms indicating direction such as up, down, left, right, front, and back are used in this invention, such terms are merely for the convenience of explanation, and it is obvious to those skilled in the art that they can change depending on the position of the object in question, the position of the observer, etc. [Explanation of Symbols]

[0143] 10: Ultrasound examination equipment 100: Loading Module 200: Boat jig module 300: Ultrasound module 400: Boat transfer module 500: Boat cover handling module 600: Boat Block Module 700: Drying Module 800: Unloading Module S: Subject B: Block buffer C: Control Module

Claims

1. In an ultrasound examination device, A loading module configured to transfer a subject into the ultrasound machine; A boat fixture module including a boat on which the subject is placed and transported by the loading module, and a cover for securing the subject to the boat; An ultrasound module configured to perform an ultrasound examination on a subject placed on the aforementioned boat jig module; A boat transfer module configured to transfer the boat jig module to the ultrasonic inspection module side, and then transfer the boat jig module to the outside of the ultrasonic inspection module after an ultrasonic inspection has been performed on the subject; and An ultrasonic inspection apparatus comprising a boat cover handling module, which includes a boat cover removal unit configured to remove the cover from the boat before the boat jig module is transferred to the ultrasonic inspection module, and a boat cover mounting unit configured to attach the cover to the boat after an ultrasonic inspection has been performed on the subject through the ultrasonic inspection module.

2. The aforementioned ultrasound examination module is A first probe configured to perform an ultrasound examination on the subject; and The ultrasound examination apparatus according to claim 1, characterized in that it includes a second probe configured to perform an ultrasound examination on the subject in a wider frequency band than the first probe.

3. The system further includes a boat block module configured to raise the subject toward the second probe when an ultrasound examination is performed on the subject by the second probe, The aforementioned boat block module is The ultrasound examination apparatus according to claim 2, characterized in that it is configured to raise the subject to the second probe side while in close contact with the lower end of the boat.

4. The ultrasound examination apparatus according to claim 3, further comprising a drying module configured to dry the subject that has been transported to the outside of the ultrasound examination module.

5. The unloading module further includes a boat jig module, including a boat to which a cover has been attached by the boat cover mounting section, configured to transport the boat jig module to the outside of the ultrasonic inspection device. When viewed from the left and right directions of the ultrasound inspection apparatus, the ultrasound inspection module, the boat transfer module, the boat cover handling module, the block buffer on which the boat block module is placed before ultrasound inspection is performed on the subject, and the drying module are located between the loading module and the unloading module. When viewed from the left or right direction of the ultrasound inspection apparatus, the ultrasound inspection module is located closer to the loading module than the block buffer. When viewed from the front-to-back direction of the ultrasonic inspection apparatus, the ultrasonic inspection module, the drying module, and the boat cover handling module are arranged in that order inside the ultrasonic inspection apparatus. The ultrasonic inspection apparatus according to claim 4, characterized in that, when viewed from the left or right direction, the boat cover removal section is located closer to the loading module than the boat cover mounting section.

6. The aforementioned boat, A plurality of protruding pins configured to protrude from the boat; and It includes a specimen placement section provided between the aforementioned protruding pins on which the specimen is placed, The ultrasonic inspection apparatus according to claim 3, characterized in that the subject placement section includes a through-hole of a predetermined area.

7. The aforementioned boat block module is A block plate configured to be moved to the ultrasound module side and to be in close contact with the lower end of the boat when an ultrasound examination is performed on the subject by the second probe; and The ultrasonic inspection apparatus according to claim 6, characterized in that it includes a pressure block that protrudes from the block plate, passes through the through hole, and pressurizes the subject to raise the subject toward the second probe.

8. The aforementioned pressure block is The ultrasound examination apparatus according to claim 7, characterized in that it is configured to raise the subject by the focal length of the second probe.

9. The system further includes a control module configured to control the driving of the first probe and the second probe, and including an AI model. The control module is First ultrasound examination data obtained by performing ultrasound examinations on multiple first subjects using the first probe and second ultrasound examination data obtained by performing ultrasound examinations on multiple first subjects using the second probe are collected. The first ultrasound examination data and the second ultrasound examination data are set as input data, and the AI ​​model is trained by considering at least one of the following as a weighting factor: the type of the first subject, the manufacturing process of the first subject, the manufacturing location of the first subject, and the type of probe used to perform the ultrasound examination on the first subject, thereby deriving a defect estimation criterion for the subject. The aforementioned AI model is The ultrasound examination apparatus according to claim 2, characterized in that when an ultrasound examination is performed on a second subject different from the first subject using at least one of the first probe and the second probe, the apparatus is configured to estimate defects in the second subject according to the defect estimation criteria.

10. In an ultrasound examination method performed using an ultrasound examination device, A step of transferring a boat fixture module, including a boat that supports the subject, into the interior of the ultrasound examination apparatus; The step of removing the cover that secures the subject from the boat jig module; The step of transferring the boat fixture module, from which the cover has been removed, to the ultrasonic inspection module side; The step of performing an ultrasound examination on a subject placed on the boat jig module; and An ultrasonic examination method characterized by including the step of attaching a cover for fixing the subject to the boat jig module after an ultrasonic examination has been performed on the subject.

11. The step of performing an ultrasound examination on a subject placed on the aforementioned boat jig module is as follows: The procedure includes the step of performing an ultrasound examination on the subject using the first probe, The aforementioned ultrasound examination method is A step of drying the subject that has been moved outside the ultrasound module after the ultrasound examination has been performed by the first probe; and The step further includes transferring the boat fixture module with the cover attached to it to the outside of the ultrasonic inspection device, The ultrasonic inspection method according to claim 10, characterized in that, in the step of attaching the cover for fixing the subject to the boat jig module, the cover is attached to the boat jig module after the subject has been dried.

12. The step of performing an ultrasound examination on a subject placed on the aforementioned boat jig module is as follows: The procedure further includes the step of performing an ultrasound examination on a subject using a second probe in a wider frequency band than that of the first probe, The aforementioned ultrasound examination method is A step of transferring the boat block module, which is configured to raise the subject towards the second probe, towards the ultrasound examination module; The step of connecting the boat fixture module with the cover removed and the boat block module within the ultrasonic inspection module; The step of drying the subject that has been moved outside the ultrasound module after the ultrasound examination has been performed by the second probe; and The step further includes transferring the boat fixture module with the cover attached to it to the outside of the ultrasonic inspection device, In the step of attaching the cover for fixing the subject to the boat jig module, the cover is configured to be attached to the boat jig module after the subject has dried. The aforementioned boat block module is The ultrasound examination method according to claim 11, characterized in that the subject is raised toward the second probe while in close contact with the lower end of the boat.

13. The step of performing an ultrasound examination on a subject placed on the aforementioned boat jig module is as follows: The procedure further includes the step of performing an ultrasound examination on a subject using a second probe in a wider frequency band than that of the first probe, The aforementioned ultrasound examination method is A step of transferring the boat block module, which is configured to raise the subject towards the second probe, towards the ultrasound examination module; The step of connecting the boat fixture module with the cover removed and the boat block module within the ultrasonic inspection module; The step of moving the boat block module outside the ultrasound module after the ultrasound examination has been performed by the second probe; A step of performing an ultrasound examination on the subject using the first probe; A step of drying the subject that has been moved outside the ultrasound module after the ultrasound examination has been performed by the first probe; and The step further includes transferring the boat fixture module with the cover attached to it to the outside of the ultrasonic inspection device, In the step of attaching the cover for fixing the subject to the boat jig module, the cover is configured to be attached to the boat jig module after the subject has dried. The aforementioned boat block module is The ultrasound examination method according to claim 11, characterized in that the subject is raised toward the second probe while in close contact with the lower end of the boat.

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