Drive unit and inspection system

Abstract

The drive system, which outputs multiple power sources, is configured to be relatively easy to handle. [Solution] The drive device according to the present invention is a drive device that can be connected to a drive object driven based on a plurality of power sources, and comprises a shaft body extending in a first direction, and a plurality of power generating units capable of generating the plurality of power sources, the plurality of power generating units being detachably mounted around the shaft body, wherein each power generating unit comprises a power unit for generating power, a sensor unit for detecting the state of the power generating unit, and a control unit for controlling the drive of the power unit and outputting the signal of the sensor unit to the outside.

Description

Technical Field

[0001] The present invention mainly relates to a driving device.

Background Art

[0002] Some driving devices output a plurality of powers for deforming a driving target (see Patent Documents 1 to 3). Such a driving device includes a plurality of power generation units capable of generating the plurality of powers respectively, and drives the driving target in a desired manner by controlling them individually.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0004] Since the structure of the above-described driving device tends to be complicated, generally, it may be required to improve it to a simpler one, thereby making handling relatively easy.

[0005] An exemplary object of the present invention is to make the configuration of a driving device that outputs a plurality of powers relatively easy to handle.

Means for Solving the Problems

[0006] One aspect of the present invention relates to a driving device, and the driving device is a driving device connectable to a driving target driven based on a plurality of powers, a shaft body extending in a first direction, A plurality of power generating units, each capable of generating the plurality of powers, comprising a plurality of power generating units detachably mounted around the shaft body, Each power generation unit is, A power unit for generating power, A sensor unit for detecting the state of the power generation unit, A control unit for controlling the drive of the power unit and outputting the signal from the sensor unit to the outside, Equipped with It is characterized by the following: [Effects of the Invention]

[0007] According to the present invention, the above-mentioned drive device can be realized with a relatively simple configuration. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic diagram showing the overall configuration of the robot system. [Figure 2] Overall perspective view of the drive unit. [Figure 3] An overall perspective view showing the drive unit with the connection mechanism removed. [Figure 4] An overall perspective view showing the power generation unit removed from the drive unit. [Figure 5] Figure 4 is a partially enlarged perspective view showing the view from below. [Figure 6] Disassembled view of the connection mechanism. [Figure 7] Disassembled view of the rotating mechanism. [Figure 8] Disassembled view of the locking mechanism. [Figure 9] System block diagram of a robot system. [Figure 10] A block diagram showing the connection configuration between power generation units. [Modes for carrying out the invention]

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential for the invention, and the plurality of features may be arbitrarily combined. Further, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals, and redundant descriptions are omitted.

[0010] <Regarding the robot system> FIG. 1 is a schematic diagram showing the overall configuration of a robot system SY according to an embodiment. The robot system SY includes a driving device 1 and a stage ST that holds the driving device 1 so as to be reciprocally movable. The driving device 1 is connected to a wire-driven manipulator OB that is a driving target. The wire-driven manipulator OB includes N movable parts 91 where N is a natural number of 2 or more (in this example, N = 3), and each movable part 91 is movable based on three types of control signals, and can change any orientation by pulling and pushing three types of wires 911a to 911c respectively. The driving device 1 can change the posture of such a wire-driven manipulator OB based on a plurality (in this example, 3×N (= 9)) of powers. A work unit (for example, a camera) not shown is attached to the tip of the wire-driven manipulator OB, whereby operations such as imaging can be realized. Such a robot system SY can be applied to a work system, an inspection system, and the like.

[0011] Here, the same applies to other figures described later. For ease of understanding, X, Y, and Z directions that intersect (substantially orthogonal) to each other are shown. The X direction corresponds to the left-right direction, the Y direction corresponds to the front-rear direction, and the Z direction corresponds to the up-down direction. The X, Y, and Z directions are merely examples for facilitating the explanation of the relative positional relationship between elements. Here, it is assumed that the X and Y directions form a horizontal plane, but they may be inclined. In the following description, for any of the X, Y, and Z directions, "+" and "-" may be added to distinguish between one side and the other side (for example, the -X side shall indicate the left side and the +X side shall indicate the right side). However, when such distinction is not particularly required, "+" and "-" shall be omitted.

[0012] In this embodiment, the stage ST shall hold the drive device 1 so as to be reciprocally movable in the X direction.

[0013] <Configuration Example of Drive Device> FIG. 2 is an overall perspective view of the drive device 1. The drive device 1 includes a plurality (in this example, 3×N (=9)) of power generation units 2. The plurality of power generation units 2 are positioned by pins or pin holes provided on the surface of a shaft body 3 (see FIG. 4) described later and are attached around the shaft body 3.

[0014] As shown in a partially enlarged view of FIG. 2, each power generation unit 2 includes a power unit 4, a moving body 5, a guide member 6, a drive target connection part 7, a position sensor 8, an external force detection sensor 9, and a control unit 10.

[0015] The power unit 4 is a power source that generates power (rotation), and an electric motor such as a brushless DC motor is typically used.

[0016] The moving body 5 is reciprocally movable in the X direction based on the power of the power unit 4, which is realized, for example, by a slider mechanism that engages with a ball screw shaft connected to the power unit 4.

[0017] The guide member 6 guides the drive target connection part 7 to be reciprocally movable in the X direction as the moving body 5 reciprocally moves.

[0018] The drive target connection unit 7 connects to the wire-driven manipulator OB, which is the drive target, and the wire-driven manipulator OB can be locked in place by a locking part 71 provided at its tip. With this configuration, the drive target connection unit 7 functions as a power output unit that outputs power from the power unit 4, and is capable of pushing or pulling one of the corresponding wires 911a to 911c.

[0019] The position sensor 8 can detect the position of the drive target connection part 7 relative to the power unit 4, and more specifically, the position of the moving body 5. The external force detection sensor 9 can detect the external force applied to the drive target connection part 7, and more specifically, the external force received from the wire-driven manipulator OB. The power generation unit 2 only needs to be equipped with a sensor unit capable of detecting the state of the power generation unit 2, and other sensor units may be provided in addition to / replaced by the position sensor 8 and / or the external force detection sensor 9. The state of the power generation unit 2 referred to here may be a direct state indicating the state of the individual elements of the power generation unit 2, or it may be an indirect state indicating the state of other elements related to those elements.

[0020] The control unit 10 controls the system within the power generation unit 2 in which it is installed, that is, it controls the individual drives of the elements. For example, the control unit 10 controls the drive of the power unit 4, and can typically drive the power unit 4 by PWM (Pulse Width Modulation) control. The control unit 10 can also output signals from the position sensor 8 and the external force detection sensor 9 to the outside, and can, for example, feed back the detection results of the position sensor 8 and the external force detection sensor 9 to the main control unit 85 (see Figure 9), which will be described later.

[0021] Furthermore, as shown in Figure 2, the drive unit 1 further includes a connection mechanism 11.

[0022] Figure 3 is an overall perspective view showing the state after the connection mechanism 11 has been removed from Figure 2. As will be described in detail later, the connection mechanism 11 is equipped with a gripping portion 111g, and by rotating the gripping portion 111g with the X direction as the pivot axis, the connection of the wire-driven manipulator OB inserted into the opening OP1 can be completed.

[0023] Figure 4 is an overall perspective view showing the state in which multiple power generation units 2 have been further removed from Figure 3. The drive device 1 further comprises a base 191, support column 192, support base material 193, support member 194, multiple extensions 195, mounting plate material 196, and connection detection sensor 197.

[0024] The base 191 is slidably mounted on the stage ST and is capable of reciprocating in the X direction by a known slider mechanism. The support column 192 is provided on the upper surface (+Z side surface) of the base 191 and supports the support base material 193. The support base material 193 supports the support member 194 at its -X side end and supports the mounting plate material 196 and the connection detection sensor 197 at its +X side end. The support member 194 is fixed in a vertical position so as to be able to support the shaft body 3 extending in the X direction at its -X side end. Multiple extensions 195 extend outward from the shaft body 3 and, although details will be described later, are capable of holding signal lines. The mounting plate material 196 has an opening OP2 and is fixed in a vertical position so as to be able to insert multiple power generation units 2 through the opening OP2. The connection detection sensor 197 is fixed on the +X side of the mounting plate material 196 and, although details will be described later, is capable of detecting connections by the connection mechanism 11.

[0025] Figure 5 is a partially enlarged perspective view showing Figure 4 from a different viewpoint. A power control unit 12 is attached to the lower surface (-Z side) of the support base material 193. The power control unit 12 generates the corresponding power to be supplied to each element of the drive device 1 based on power from an external power supply 89 (see Figure 9), which will be described in detail later. For example, the power control unit 12 is connected to the control unit 10 of each power generation unit 2 by predetermined power lines and is capable of supplying power to the control unit 10.

[0026] <Example of connection mechanism configuration> Figure 6 is an exploded view of the connection mechanism 11. The connection mechanism 11 comprises an outer cylindrical member 111, a rotation mechanism 112, and a locking mechanism 113.

[0027] The outer cylindrical member 111 has an open shape (bowl shape) on the -X side so that it can accommodate the rotating mechanism 112 and the locking mechanism 113. The outer cylindrical member 111 also has an opening OP1 on the +X side through which multiple (9 in this example) connection terminals of the wire-driven manipulator OB, each receiving multiple power sources, can be inserted. The aforementioned gripping portion 111g is provided on the outer wall surface of the outer cylindrical member 111. The gripping portion 111g only needs to have a shape that allows the user to easily rotate it while gripping it; other shapes are also acceptable.

[0028] Figure 7 is an exploded view of the rotating mechanism 112. The rotating mechanism 112 comprises an internal gear 1121, a sun gear 1122, a number of planetary gears 1123 (four in this example), flat plates 1124a and 1124b, and an annular member 1125.

[0029] The internal gear 1121 and the sun gear 1122 are arranged so as to have the X direction as their central axis. The internal gear 1121 is fixed to the annular member 1125, that is, it does not rotate or rotate.

[0030] The sun gear 1122 has an opening OP3 in its center through which multiple connection terminals of the wire-driven manipulator OB are inserted. A pair of extensions 1122e extending in the X direction are provided on the outer circumference of the opening OP3, and the sun gear 1122 engages with the outer cylindrical member 111. As a result, the sun gear 1122 is rotatable in conjunction with the rotation of the outer cylindrical member 111.

[0031] Multiple planetary gears 1123 are arranged to mesh with the internal gear 1121 and the sun gear 1122 (inside the internal gear 1121 and outside the sun gear 1122). Each planetary gear 1123 is sandwiched in the X direction by plates 1124a and 1124b and is rotatably supported on each of the plates 1124a and 1124b. As shown by the dashed lines in the figure, this gear structure is fixed to the annular member 1125 using screws, pins, washers, etc. When the user rotates the outer cylindrical member 111, the sun gear 1122 rotates, and consequently, each planetary gear 1123 rotates (rotates on its own axis) while revolving (orbits) around the sun gear 1122. In addition, the flat plates 1124a and 1124b rotate around the X axis as a pivot point in accordance with the orbit of the planetary gear 1123.

[0032] Figure 8 is an exploded view of the locking mechanism 113. The locking mechanism 113 comprises an inner cylindrical member 1131, a rotating cylindrical member 1132, and an insertion member 1133.

[0033] The inner cylindrical member 1131 is capable of accommodating the rotating cylindrical member 1132 and the insertion member 1133. Furthermore, as will be described in detail later, a slit SL1 is provided on the side surface of the -X side end. The inner cylindrical member 1131, while accommodating the rotating cylindrical member 1132 and the insertion member 1133, is covered by the outer cylindrical member 111 which accommodates the rotating mechanism 112, and is fixed to the mounting plate 196 at the -X side end.

[0034] The rotating cylindrical member 1132 has a plurality (four in this example) of extensions 1132e fixed to the flat plate 1124b, and each extension 1132e is provided with a screw hole OP4 for fixing to the flat plate 1124b with a screw. In addition, some (two in this example) of the extensions 1132e are further provided with a pin PN1 that can engage with the flat plate 1124b. The rotating cylindrical member 1132 is rotatable together with the flat plate 1124b as the planetary gear 1123 revolves. Furthermore, a plate-shaped member 1134 is attached to the -X side end of the rotating cylindrical member 1132, and the rotating cylindrical member 1132 is housed in the inner cylindrical member 1131 such that the plate-shaped member 1134 passes through the slit SL1. As a result, when the rotating cylindrical member 1132 rotates, the plate-shaped member 1134 rotates along the slit SL1. Furthermore, the inner wall of the rotating cylindrical member 1132 is provided with a plurality of locking grooves TL1, each capable of engaging with a locking portion 71 provided at the tip of the drive target connection portion 7. As a result, when the rotating cylindrical member 1132 rotates, the locking portion 71 rotates and switches between a locked state and a released state, thereby locking or releasing the wire-driven manipulator OB.

[0035] The insertion member 1133 has multiple (9 in this example) insertion holes OP5, through which multiple connection terminals of the wire-driven manipulator OB can be inserted.

[0036] Furthermore, the insertion member 1133 has multiple (four in this example) extensions 1133e, and is arranged such that a corresponding extension 1133e is located between two adjacent extensions 1132e in the rotating cylindrical member 1132. The insertion member 1133 is fixed inside the inner cylindrical member 1131, and the rotation range of the rotating cylindrical member 1132 is restricted by the extensions 1133e of the insertion member 1133. In summary, when the user rotates the outer cylindrical member 111 while gripping the gripping portion 111g, the sun gear 1122 rotates, and consequently, the multiple planetary gears 1123 revolve, causing the rotating cylindrical member 1132 to rotate. Then, the locking portion 71 that engages with the locking groove TL1 switches, thereby locking or releasing the wire-driven manipulator OB. At this time, the plate-shaped member 1134 rotates along the slit SL1. The connection detection sensor 197 detects the connection by the connection mechanism 11 based on the passage of the rotating plate-shaped member 1134.

[0037] The gear mechanism in the rotating mechanism 112, including the internal gear 1121, the sun gear 1122, and the multiple planetary gears 1123, should be configured such that the amount of rotation of the outer cylindrical member 111 by user operation is large, while the force (torque) required for such operation is small. Specifically, the gear ratios of the internal gear 1121, the sun gear 1122, and the multiple planetary gears 1123 should be set such that the amount of rotation of the sun gear 1122 is greater than the amount of movement of each of the multiple planetary gears 1123 during their orbits. This allows the user to confirm that they are performing the connection by the connecting mechanism 11 with relatively little force, which is advantageous for improving usability.

[0038] <Example of a robot system configuration> Figure 9 is a system block diagram showing an example configuration of the robot system SY. In this example, the robot system SY includes a stage ST, as well as an actuator unit 81, a terminal 82, an operator 83, an emergency stop device 84, and an external power supply 89.

[0039] The drive unit 1 and the wire-driven manipulator OB form part of the actuator unit 81. The actuator unit 81 further includes a work control unit 811 for driving and controlling a work unit (e.g., a camera) located distal to the movable part 91 of the wire-driven manipulator OB.

[0040] Terminal 82 is a PC (personal computer) including, for example, a display, keyboard, mouse, etc., and in this embodiment, it is connected to stage ST. Terminal 82 is connected to work control unit 811 via stage ST, and the user can also check the work content (for example, video).

[0041] The operator 83 is, for example, a joystick controller, and in this embodiment, it is connected to the stage ST. The drive control of the wire-driven manipulator OB is mainly performed based on the operation input to the operator 83.

[0042] The emergency stop device 84 is equipped with a switch that can be pressed in an emergency, and in response to the pressing of the switch, it is possible to stop the work performed by the robot system SY. In this embodiment, it is connected to the stage ST.

[0043] The stage ST comprises a main control unit 85, a movement control unit 86, and a power control unit 87.

[0044] In this example, the main control unit 85 is a dual-core processor including a first arithmetic unit 851 and a second arithmetic unit 852. The arithmetic unit 851 mainly analyzes the operation input of the operator 83 and generates signals for controlling the drive of the wire-driven manipulator OB based on the results. The arithmetic unit 852 generates signals for controlling the drive of multiple power generation units 2 based on the signals from the arithmetic unit 851. The main control unit 85 is capable of exchanging signals with the control units 10 of each power generation unit 2 shown in Figure 10 below, and the signals generated in this way are output to the control units 10 of the multiple power generation units 2.

[0045] The movement control unit 86 controls the drive of the slider mechanism that moves the drive unit 1 back and forth relative to the stage ST. The amount of movement of the drive unit 1 is determined according to communication instructions from the main control unit 85.

[0046] The power control unit 87 generates the corresponding power to be supplied to each element of the stage ST, including the main control unit 85 and the movement control unit 86, based on the power of the external power supply 89. The power control unit 87 also generates the power to be supplied to the power control unit 12.

[0047] As described above (see Figure 1), the wire-driven manipulator OB has N movable parts 91 (N=3 in this example), and each movable part 91 moves based on three types of control signals for pushing and pulling three types of wires 911a to 911c, respectively. The drive device 1 can change the posture of such a wire-driven manipulator OB based on multiple (3 × N (=9) in this example) power sources, and is equipped with multiple (9 in this example) power generation units 2 accordingly.

[0048] Here, the multiple power generation units 2 are divided into N groups corresponding to the N movable parts 91, and each group corresponding to a movable part 91 contains three power generation units 2. These N groups, with N=3, are shown in Figure 9 as the first group G1, the second group G2, and the third group G3.

[0049] Figure 10 is a block diagram showing the connection configuration between power generation units 2 for group G1 (the same connection configuration applies to groups G2 and G3). The three power generation units 2 included in group G1 are designated as power generation units 2a, 2b, and 2c for distinction. Power generation units 2a, 2b, and 2c all have similar configurations, but their signal line connection configurations differ from one another.

[0050] The signal lines are connected at the terminal connection section 10iо. The terminal connection section 10iо may be located on the circuit board forming the control unit 10 and integrated with the control unit 10, or it may be a separate component. In this example, the terminal connection section 10iо is... Input / output terminals SIGiо, SIGiо', and SIGiо'' Input terminals EN1i, EN2i, and EN3i, and, Output terminals EN2o', EN3o', and EN1o' Includes.

[0051] Each of the input / output terminals SIGiо, SIGiо', and SIGiо'' is capable of inputting and outputting signals (transmitting signals bidirectionally). The inputs and outputs are the signal groups, or data or information (referred to as "instruction signals" in the following explanation) that form the basis of the three types of control signals used to push and pull the three types of wires 911a to 911c, respectively. Regarding the power generation unit 2a, the input / output terminal SIGiо of the terminal connection section 10iо is connected to the main control unit 85, and the input / output terminal SIGiо'' is connected to the control unit 10. On the other hand, the input / output terminal SIGiо' is connected to the input / output terminal SIGiо of the terminal connection section 10iо of the power generation unit 2b. Furthermore, with respect to the power generation unit 2b, the input / output terminal SIGiо'' is connected to the control unit 10, and the input / output terminal SIGiо' is connected to the input / output terminal SIGiо of the terminal connection section 10iо of the power generation unit 2c. Furthermore, for the power generation unit 2c, the input / output terminal SIGiо'' is connected to the control unit 10, while the input / output terminal SIGiо' is left open.

[0052] Input terminals EN1i, EN2i, and EN3i are each capable of receiving signals. The inputs are enable signals that indicate whether or not an operation can be performed. Output terminal EN1o'' is capable of outputting the enable signal input to input terminal EN1i. Output terminals EN2o' and EN3o' are capable of outputting the enable signals input to input terminals EN2i and EN3i, respectively. Regarding the power generation unit 2a, the input terminals EN1i, EN2i, and EN3i of the terminal connection section 10io are connected to the main control unit 85, and the output terminal EN1o'' is connected to the control unit 10. On the other hand, the output terminal EN2o' is connected to the input terminal EN1i of the terminal connection section 10io of the power generation unit 2b, and the output terminal EN3o' is connected to the input terminal EN2i of the terminal connection section 10io of the power generation unit 2b. Furthermore, with respect to the power generation unit 2b, the output terminal EN1o'' of the terminal connection section 10io is connected to the control unit 10, while the input terminal EN3i and output terminal EN3o' are left open. On the other hand, the output terminal EN2o' is connected to the input terminal EN1i of the terminal connection section 10io of the power generation unit 2c. Furthermore, with respect to the power generation unit 2c, the output terminal EN1o'' of the terminal connection section 10io is connected to the control unit 10, while the input terminals EN2i and EN3i, and the output terminals EN2o' and EN3o' are left open.

[0053] With this connection configuration, the instruction signal sig1 from the main control unit 85 is sequentially forwarded to the control units 10 of the power generation units 2a, 2b, and 2c. Along with the instruction signal sig1, the main control unit 85 outputs enable signals en1, en2, and en3, indicating which of the power generation units 2a, 2b, and 2c should be made to perform the operation. For example, when enable signal en1 is at an H level (high level), it indicates that power generation unit 2a should perform the operation, and when it is at an L level (low level), it indicates that the operation should be suppressed. Enable signals en2 and en3 correspond to power generation units 2b and 2c, respectively, and operate at the same logic level as enable signal en1.

[0054] For example, when an instruction signal sig1, an H-level enable signal en1, and L-level enable signals en2 and en3 are output, the power generation unit 2a generates a control signal for pushing and pulling the wire 911a based on the instruction signal sig1. Similarly, when the instruction signal sig1, the H-level enable signal en2, and the L-level enable signals en1 and en3 are output, the power generation unit 2b generates a control signal for pushing and pulling the wire 911b based on the instruction signal sig1. Furthermore, when the instruction signal sig1, the H-level enable signal en3, and the L-level enable signals en1 and en2 are output, the power generation unit 2c generates a control signal for pushing and pulling the wire 911c based on the instruction signal sig1.

[0055] Furthermore, the control units 10 of the power generation units 2a, 2b, and 2c can output the detection results of the position sensor 8 and the external force detection sensor 9 as part of the response signal to the instruction signal sig1, and feed this back to the main control unit 85. In this case, for example, when the enable signal en1 is at the H level and the enable signals en2 and en3 are at the L level, the detection result from the power generation unit 2a will be fed back to the main control unit 85 as the response signal from the power generation unit 2a.

[0056] This connection configuration makes it possible to have the same configuration for each power generation unit 2a to 2c, and for example, each of the power generation units 2a to 2c can be easily replaced with power generation unit 2. Furthermore, this connection configuration can be implemented relatively easily by adjusting the connection between the power generation units 2a to 2c and the main control unit 85, for example by preparing a dedicated connection cable (or signal line) in advance. This connection configuration is referred to as a daisy-chain connection.

[0057] The connecting cables, which enable daisy-chaining, can be wrapped around and held by, for example, the corresponding extensions 195. Each extension 195 only needs to have a shape that can hold the connecting cable; in this embodiment, it is roughly T-shaped (see, for example, Figures 4-5), but it may have other shapes. This allows the user to replace some or all of the power generation units 2a-2c by simply removing the connecting cable from the power generation unit 2 to be replaced, then installing the new power generation unit 2 and inserting the connecting cable. Furthermore, when replacing two or more power generation units 2, the replacement can be done one at a time, preventing confusion of the connecting cables.

[0058] According to this embodiment, a drive device 1 capable of individually controlling the multiple powers generated by multiple power generation units 2 can be realized with a relatively simple configuration. Consequently, handling of the drive device 1, such as assembly, disassembly, and maintenance, can be made relatively easy.

[0059] In the embodiments, individual elements are named using expressions based on their primary function, but the functions described in the embodiments may also be secondary functions, and the expressions are not strictly limited to these. Furthermore, these expressions can be replaced with similar expressions. In the same vein, the expression "unit" can be replaced with "tool," "component," "member," "structure," "assembly," etc. Alternatively, these terms may be omitted or included.

[0060] Furthermore, the two or more elements exemplified as selectable in the embodiment are not strictly limited to those examples and may be combined arbitrarily. For example, each of the two or more exemplified elements may be additionally selected or substituted for others. For example, when arbitrarily combining two elements A and B, it may be expressed as "A and / or B" or "at least one of A and B" to indicate that it is either A only, B only, or both A and B.

[0061] Some of the features illustrated in the embodiments are as follows: [Item 1] A drive device (1) that can be connected to a drive object driven based on multiple power sources, A shaft (3) extending in the first direction (X direction), A plurality of power generating units capable of generating the plurality of powers, comprising a plurality of power generating units (2) detachably mounted around the shaft body, Each power generation unit is, A power unit (4) for generating power, Sensor units (8, 9) for detecting the state of the power generation unit, A control unit (10) for controlling the drive of the power unit and outputting the signal from the sensor unit to the outside, Equipped with A drive device characterized by the following features. [Item 2] Each of the aforementioned power generation units further comprises a power output unit (7) for outputting the power generated by the power unit, The sensor unit includes an external force detection sensor (9) for detecting an external force applied to the power output unit. The drive device according to item 1, characterized in that it is a drive device according to item 1. [Item 3] The power output unit is movable relative to the power unit. The sensor unit includes a position sensor (8) for detecting the position of the power output unit relative to the power unit. A drive device according to item 1 or item 2, characterized by the above. [Item 4] The system further includes a connection mechanism (11) for connecting the plurality of power generating units to the drive target, The connection mechanism comprises an internal gear (1121) with the first direction as its central axis, a sun gear (1122) with the first direction as its central axis and having an opening in its center, and a plurality of planetary gears (1123) arranged between the internal gear and the sun gear and meshing with them. The drive target is connected to the plurality of power generating units by passing through the opening of the sun gear, and the connection is fixed as the sun gear rotates about the first direction as its central axis. A drive device according to any one of items 1 to 3, characterized by the above. [Item 5] The gear ratios of the internal gear, the sun gear, and the plurality of planetary gears are set such that the amount of rotation of the sun gear is greater than the amount of movement of each of the plurality of planetary gears. The drive device according to item 4, characterized by the following: [Item 6] The system further includes a connection detection sensor (197) for detecting the connection made by the connection mechanism, The connection mechanism further includes a plate-shaped member (1134) that rotates as the sun gear rotates about the first direction as its central axis, The connection detection sensor detects the connection based on the passage of the plate-shaped member. A drive device according to item 4 or item 5, characterized by the above. [Item 7] A support member (194) that supports the shaft body at one end (-X side end), A plurality of extensions extending outward from the support member to correspond to the plurality of power generation units, each of which is capable of holding a signal line connected to the control unit (195), It also has A drive device according to any one of items 1 to 6, characterized by the following: [Item 8] A drive device (1) described in any one of items 1 to 7, A stage (ST) that holds the drive device so that it can reciprocate in the first direction, Equipped with An inspection system (SY) characterized by the following. [Item 9] When N is a natural number greater than or equal to 2, The drive target comprises N movable parts, Each movable part moves based on three types of control signals. The number of the aforementioned power generation units is 3 × N. The inspection system described in item 8, characterized by the features described above. [Item 10] The stage includes a main control unit (85) that exchanges signals with each of the control units of the plurality of power generation units. The aforementioned multiple power generation units are divided into N groups, and each group includes 3 power generation units. For each group, the main control unit controls the three power generation units. The inspection system according to item 9, characterized by the features described herein. [Item 11] When the three power generation units are designated as the first power generation unit (2a), the second power generation unit (2b), and the third power generation unit (2c), The main control unit outputs instruction signals for the first to third power generation units to the control unit of the first power generation unit. The control unit of the first power generation unit outputs the instruction signal received from the main control unit to the control unit of the second power generation unit. The control unit of the second power generation unit outputs the instruction signal received from the control unit of the first power generation unit to the control unit of the third power generation unit. The inspection system according to item 10, characterized by the features described above. [Item 12] The control unit of the third power generation unit outputs the signal from the sensor unit of the third power generation unit to the control unit of the second power generation unit. The control unit of the second power generation unit outputs to the control unit of the first power generation unit the signal from the sensor unit of the third power generation unit, which it has received from the control unit of the third power generation unit, and the signal from the sensor unit of the second power generation unit. The control unit of the first power generation unit outputs to the main control unit the signals from the sensor units of the second and third power generation units, which it has received from the control unit of the second power generation unit, and the signals from the sensor unit of the first power generation unit. The inspection system according to item 11, characterized by the features described above. [Item 13] The inspection system is a robot system (SY) whose target is a wire-driven manipulator capable of changing its posture based on the multiple power sources. The inspection system according to item 12, characterized by the features described above.

[0062] The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of Symbols]

[0063] 1: Drive unit, 2: Power generation unit, 3: Shaft body, 4: Power unit, 8: Position sensor, 9: External force detection sensor, 10: Control unit.

Claims

1. A drive device that can be connected to a drive object driven based on multiple power sources, A shaft extending in the first direction, A plurality of power generating units, each capable of generating the plurality of powers, comprising a plurality of power generating units detachably mounted around the shaft body, Each power generation unit is A power unit for generating power, A sensor unit for detecting the state of the power generation unit, A control unit for controlling the drive of the power unit and outputting the signal from the sensor unit to the outside, Equipped with A drive device characterized by the following features.

2. Each of the aforementioned power generation units further comprises a power output unit for outputting the power generated by the power unit, The sensor unit includes an external force detection sensor for detecting an external force applied to the power output unit. The drive device according to claim 1, characterized in that it is a drive device.

3. The power output unit is movable relative to the power unit. The sensor unit includes a position sensor for detecting the position of the power output unit relative to the power unit. The drive device according to claim 2, characterized in that it is a drive device.

4. The system further comprises a connection mechanism for connecting the plurality of power generating units to the drive target, The connection mechanism comprises an internal gear with the first direction as its central axis, a sun gear with the first direction as its central axis and having an opening in its center, and a plurality of planetary gears arranged between the internal gear and the sun gear and meshing with them. The drive target is connected to the plurality of power generating units by passing through the opening of the sun gear, and this connection is fixed as the sun gear rotates about the first direction as its central axis. The drive device according to claim 1, characterized in that it is a drive device.

5. The gear ratios of the internal gear, the sun gear, and the plurality of planetary gears are set such that the amount of rotation of the sun gear is greater than the amount of movement of each of the plurality of planetary gears. The drive device according to claim 4.

6. The system further includes a connection detection sensor for detecting the connection made by the connection mechanism, The connection mechanism further includes a plate-shaped member that rotates as the sun gear rotates about the first direction as its central axis, The connection detection sensor detects the connection based on the passage of the plate-shaped member. The drive device according to claim 4.

7. A support member that supports the shaft at one end, A plurality of extensions extending outward from the support member to correspond to the plurality of power generation units, each extension capable of holding a signal line connected to the control unit, It also has The drive device according to claim 1, characterized in that it is a drive device.

8. A drive device according to any one of claims 1 to 7, A stage that holds the drive device so that it can reciprocate in the first direction, Equipped with An inspection system characterized by the following features.

9. When N is a natural number greater than or equal to 2, The drive target comprises N movable parts, Each movable part moves based on three types of control signals. The number of the aforementioned power generation units is 3 × N. The inspection system according to claim 8, characterized in that it is as described above.

10. The stage includes a main control unit that exchanges signals with each of the control units of the plurality of power generation units. The aforementioned multiple power generation units are divided into N groups, and each group includes three power generation units. For each group, the main control unit controls the three power generation units. The inspection system according to claim 9, characterized in that it is as described above.

11. When the three power generation units are designated as the first power generation unit, the second power generation unit, and the third power generation unit, The main control unit outputs instruction signals for the first to third power generation units to the control unit of the first power generation unit. The control unit of the first power generation unit outputs the instruction signal received from the main control unit to the control unit of the second power generation unit. The control unit of the second power generation unit outputs the instruction signal received from the control unit of the first power generation unit to the control unit of the third power generation unit. The inspection system according to claim 10, characterized in that it is a feature of the present invention.

12. The control unit of the third power generation unit outputs the signal from the sensor unit of the third power generation unit to the control unit of the second power generation unit. The control unit of the second power generation unit outputs to the control unit of the first power generation unit the signal from the sensor unit of the third power generation unit, which it has received from the control unit of the third power generation unit, and the signal from the sensor unit of the second power generation unit. The control unit of the first power generation unit outputs to the main control unit the signals from the sensor units of the second and third power generation units, which it has received from the control unit of the second power generation unit, and the signals from the sensor unit of the first power generation unit. The inspection system according to claim 11, characterized in that it is the same as described in claim 11.

13. The inspection system is a robot system whose target is a wire-driven manipulator capable of changing its posture based on the multiple power sources. The inspection system according to claim 12, characterized in that it is the same as described above.

Images