Vertical articulated robot and robotic system

Abstract

The present invention provides a vertical articulated robot and robot system capable of improving detection accuracy. [Solution] The device comprises a base, a first drive mechanism connected to the base, a first arm 221 connected to the first drive mechanism and rotating around a pivot axis, a second drive mechanism connected to the first arm 221, a second arm connected to the second drive mechanism, and a motor 700 for driving the second arm. The first arm 221 has a first housing 300 connected to the first drive mechanism, a second housing 400 fixed to the first housing 300 and connected to the second drive mechanism, and an inertial sensor module 600 fixed to the first housing 300 and detecting at least one of acceleration and angular velocity in the first arm 221. The motor 700 is fixed to the second housing 400 or the second arm.

Description

Technical Field

[0001] The present invention relates to a vertical articulated robot and a robot system.

Background Art

[0002] Patent Document 1 discloses a configuration of a robot in which a first angular velocity sensor functioning as an inertial sensor is disposed on a first arm. Specifically, an inertial sensor is fixed to a housing connected to a motor or a joint.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the configuration described in Patent Document 1, since the inertial sensor is fixed to a housing connected to a motor or the like, vibrations of the motor or the like are likely to be transmitted to the inertial sensor, resulting in a problem of reduced detection accuracy.

Means for Solving the Problems

[0005] The vertical articulated robot includes a base member, a first joint connected to the base member, an arm connected to the first joint and rotating about a first rotation axis, a second joint connected to the arm, a tip member connected to the second joint, and a motor for driving the tip member. The arm includes a first housing connected to the first joint, a second housing fixed to the first housing and connected to the second joint, and an inertial sensor fixed to the first housing for detecting at least one of acceleration and angular velocity in the arm. The motor is fixed to the second housing or the tip member.

[0006] The robot system comprises the vertical articulated robot described above and a control device that performs calculations for the inertial sensor. [Brief explanation of the drawing]

[0007] [Figure 1] A schematic diagram showing the configuration of the robot system. [Figure 2] A perspective view showing the configuration of a vertical articulated robot. [Figure 3] Figure 2 is a magnified perspective view showing part A of the vertical articulated robot. [Figure 4] An exploded perspective view showing the configuration of the first arm. [Figure 5] An exploded perspective view showing the configuration of the first enclosure. [Figure 6] A perspective view showing the internal structure of the first arm. [Figure 7] A plan view showing the configuration of the first arm. [Figure 8] A perspective view showing the configuration of the first arm. [Figure 9] A perspective view showing the configuration of the first arm. [Figure 10] A side view showing the configuration of the first arm. [Figure 11] A side view showing the configuration of the first arm. [Figure 12] A side view showing the configuration of the first arm. [Figure 13] A side view showing the configuration of the first arm. [Modes for carrying out the invention]

[0008] The configuration of the vertical articulated robot 1 and the robot system 1000 will be explained below with reference to the drawings. In the following diagrams, the three mutually orthogonal axes will be described as the X-axis, Y-axis, and Z-axis. The direction along the X-axis will be called the "X direction," the direction along the Y-axis will be called the "Y direction," and the direction along the Z-axis will be called the "Z direction." The direction of the arrow is the + direction, and the direction opposite to the + direction is the - direction. Viewing from the +Z direction or -Z direction is also called a planar view or a planar perspective.

[0009] First, while referring to FIGS. 1 and 2, the configuration of the robot system 1000 will be described.

[0010] As shown in FIGS. 1 and 2, the robot system 1000 includes a vertically articulated robot 1, a robot body 2, and a controller 10 as a control device that controls the driving of the robot body 2.

[0011] The vertically articulated robot 1 is, for example, a six-axis robot having six drive axes. The vertically articulated robot 1 includes a base 21 as a base member fixed to the floor, and a robot arm 22 connected to the base 21.

[0012] The robot arm 22 includes a first arm 221 as an arm, a second arm 222 as a tip member, a third arm 223, a fourth arm 224, a fifth arm 225, and a sixth arm 226.

[0013] The first arm 221 is connected to the base 21 via a first drive mechanism 231 as a first joint. The first arm 221 rotates around a rotation axis J1 as a first rotation axis with respect to the base 21. The first arm 221 is connected to the second arm 222 via a second drive mechanism 232 as a second joint. The second arm 222 rotates around a rotation axis J2 with respect to the first arm 221.

[0014] The third arm 223 is connected to the second arm 222 and rotates around a rotation axis J3 with respect to the second arm 222. The fourth arm 224 is connected to the third arm 223 and rotates around a rotation axis J4 with respect to the third arm 223. The fifth arm 225 is connected to the fourth arm 224 and rotates around a rotation axis J5 with respect to the fourth arm 224. The sixth arm 226 is connected to the fifth arm 225 and rotates around a rotation axis J6 with respect to the fifth arm 225. An end effector 24 is connected to the tip of the sixth arm 226.

[0015] The robot body 2 has a first drive mechanism 231, a second drive mechanism 232, a third drive mechanism 233, a fourth drive mechanism 234, a fifth drive mechanism 235, and a sixth drive mechanism 236.

[0016] The first drive mechanism 231 rotates the first arm 221 around the rotation axis J1 with respect to the base 21. The second drive mechanism 232 rotates the second arm 222 around the rotation axis J2 with respect to the first arm 221. The third drive mechanism 233 rotates the third arm 223 around the rotation axis J3 with respect to the second arm 222. The fourth drive mechanism 234 rotates the fourth arm 224 around the rotation axis J4 with respect to the third arm 223. The fifth drive mechanism 235 rotates the fifth arm 225 around the rotation axis J5 with respect to the fourth arm 224. The sixth drive mechanism 236 rotates the sixth arm 226 around the rotation axis J6 with respect to the fifth arm 225.

[0017] The first drive mechanism 231 has a hollow speed reducer and a pulley provided on the hollow input shaft of the speed reducer. The pulley is connected to a motor provided on the base via a belt. The input shaft of the speed reducer has a hollow center. A sleeve that protects the cable 630 from contact with the speed reducer passes through the hollow portion. The cable 630, which will be described later, enters from the inside of the base 21 into the inside of the first arm 221 through the sleeve in the hollow portion.

[0018] The controller 10 independently controls the drive mechanisms 231 to 236 to cause the robot body 2 to perform a predetermined operation. The controller 10 is composed of, for example, a computer and has a processor that processes information, a memory communicably connected to the processor, and an external interface. Various programs executable by the processor are stored in the memory. The processor can read and execute various programs and the like stored in the memory. Further, the controller 10 controls the arithmetic processing of the inertial sensor module 600, which will be described later.

[0019] Next, the configuration of the first arm 221 will be described while referring to FIGS. 3 and 4.

[0020] As shown in Figures 3 and 4, the first arm 221 is connected to the base 21 via the first drive mechanism 231. The first arm 221 rotates around the pivot axis J1 as described above.

[0021] As shown in Figure 4, the first arm 221 has a first housing 300 and a second housing 400.

[0022] The first housing 300 is connected to the first drive mechanism 231 and has a plate-like shape that intersects with the pivot axis J1 and extends in a direction perpendicular to it in this embodiment. The first housing 300 is fixed to the second housing 400 using, for example, pins or fixing screws. The second housing 400 is connected to the second drive mechanism 232.

[0023] The second housing 400 is placed on top of the plate-shaped first housing 300 and extends toward the second arm 222, which is the tip member. In this embodiment, it has a support portion 500 that extends upward. In this embodiment, the second housing 400 is provided with an internal space for housing the motor 700.

[0024] A sensor board 610 is fixed to the first housing 300. The inertial sensor module 600 detects at least one of the acceleration and angular velocity of the first arm 221. A pivot axis J2 is provided on the support part 500 of the second housing 400, and a motor 700 that drives the second arm 222 is fixed to it. The motor 700 is positioned in the second housing 400 in a posture in which the rotation axis of the motor 700 is parallel to the pivot axis J2. Note that the motor 700 is not limited to being fixed to the second housing 400, but may also be fixed to the second arm 222.

[0025] The inertial sensor module 600 includes a sensor board 610 and an angular velocity sensor 611 mounted on the sensor board 610, which acts as an inertial sensor for detecting the angular velocity of the first arm 221 around its vertical axis. In this embodiment, the inertial sensor is suspended from the sensor board 610 and mounted on the sensor board 610.

[0026] The angular velocity sensor 611 also comprises a package and an angular velocity sensor element and a circuit element housed within the package. The angular velocity sensor element is, for example, a quartz crystal oscillator. The angular velocity sensor element has a drive arm that vibrates when a drive signal is applied, and a detection arm that vibrates in response to the Coriolis force generated by the application of angular velocity and outputs a signal of a corresponding magnitude. The circuit element also comprises, for example, a drive circuit that vibrates the drive arm of the quartz crystal oscillator by applying a drive signal, and a detection circuit that detects the angular velocity based on the signal output from the detection arm.

[0027] The inertial sensor module 600 is positioned on the first arm 221 to acquire vibration data around the first arm 221, specifically in the direction of rotation around the pivot axis J1, and to suppress vibrations of the first arm 221 based on the vibration data. Note that the inertial sensor module 600 is not limited to being positioned on the first arm 221, but may be positioned on other arms.

[0028] Furthermore, the sensor board 610 has a control circuit formed therein that controls the driving of the angular velocity sensor 611 based on commands from the controller 10. The control circuit includes a CPU (Central Processing Unit), ROM (Read Only Memory), etc., and the above functions are achieved by the CPU reading and executing programs and data stored in the ROM. The control circuit acquires a signal from the angular velocity sensor 611 and sends it to the controller 10.

[0029] The inertial sensor may be, for example, an accelerometer that detects acceleration in at least one of the X and Y axes, or a composite sensor that detects both acceleration and angular velocity. If it is a decoding sensor, the inertial sensor module 600 may be an IMU (Inertial Measurement Unit). In this embodiment, the angular velocity sensor element is a quartz crystal oscillator, but it is not limited to this, and may be, for example, a silicon MEMS that detects angular velocity based on the change in capacitance between a movable electrode and a fixed electrode.

[0030] Furthermore, when using an IMU as the inertial sensor module 600, horizontal installation is required. However, by placing it in the first housing 300, space can be secured to maintain horizontal positioning, allowing it to be effectively used for detection.

[0031] In this manner, since the inertial sensor module 600 is fixed to the first housing 300 and the motor 700 is fixed to the second housing 400 or the second arm 222, the inertial sensor module 600 and the motor 700, which is the vibration source, are not fixed to the same housing. Therefore, it is possible to suppress the direct transmission of vibrations from the motor 700 to the inertial sensor module 600, thereby reducing the effects of vibration. This improves the detection accuracy of the inertial sensor module 600.

[0032] Next, the configuration of the first enclosure 300 will be explained with reference to Figure 5.

[0033] As shown in Figure 5, the first housing 300 has a first portion 310 that is located on the side of the second housing 400, in other words, connected to the second housing 400. The first housing 300 also has a second portion 320 that supports the inertial sensor module 600.

[0034] The first part 310 is provided with a first opening 311 through which the sensor substrate 610 of the inertial sensor module 600 passes, in other words, into which the sensor substrate 610 fits. Ribs 312 are arranged around the first opening 311 to improve the rigidity of the first part 310, and in particular, around the first opening 311.

[0035] Rib 312 is provided with screw holes 313 for fixing the first part 310 and the second part 320. The second part 320 is provided with fixing screws 321, which are bolts for fastening into the screw holes 313. When the second part 320 is fixed to the first part 310 using the screw holes 313 and the fixing screws 321, the sensor substrate 610 of the second part 320 is positioned in the first opening 311 of the first part 310.

[0036] Support columns 322 are positioned at each of the four corners of the sensor substrate 610 of the second part 320. Specifically, the support columns 322 are positioned between the sensor substrate 610 and the base material 320a. That is, the sensor substrate 610 is positioned above the base material 320a, i.e., in the +Z direction, by the length of the support columns 322.

[0037] As described above, since ribs 312 are provided around the first opening 311, the rigidity around the first opening 311 can be improved. Furthermore, since the first part 310 and the second part 320 are separate components and the inertial sensor module 600 is fixed to the second part 320, vibrations from the vibration source can be prevented from being directly transmitted to the inertial sensor module 600. In addition, since the sensor substrate 610 is positioned away from the base material 320a by the four support columns 322, vibrations transmitted to the inertial sensor module 600 can be prevented.

[0038] Next, the internal structure of the first arm 221 will be described with reference to Figure 6.

[0039] As shown in Figure 6, the first arm 221 comprises a first housing 300 and a second housing 400. The first housing 300, as described above, comprises a first portion 310 and a second portion 320 positioned within the first opening 311 of the first portion 310.

[0040] In the second section 320, an inertial sensor module 600 is fixed such that the angular velocity sensor 611 is below the sensor substrate 610. Above the sensor substrate 610, a cover 620 is positioned to cover the sensor substrate 610.

[0041] Cables 630, such as power lines and signal lines, are arranged inside the robot body 2, specifically, for example, from inside the base 21 to inside the first arm 221. The cover 620 is provided to prevent the cables 630 from coming into contact with the sensor board 610 when they are moved in conjunction with the operation of the robot body 2.

[0042] As described above, the cover 620 is positioned to cover the sensor substrate 610, so that cables 630 and other components arranged around the sensor substrate 610 do not come into contact with the sensor substrate 610, i.e., the inertial sensor module 600, particularly the angular velocity sensor 611. Therefore, the detection accuracy of the inertial sensor module 600 can be improved. In addition, since the inertial sensor module 600 is fixed so that the angular velocity sensor 611 is below the sensor substrate 610, cables 630 and other components do not come into contact with the angular velocity sensor 611.

[0043] Next, the configuration of the first arm 221 will be described with reference to Figures 7 to 11. Figure 7 is a plan view of the first arm 221, including the transparent portion as seen from above. Figures 8 and 9 are perspective views showing the internal structure of the first arm 221, mainly the support portion 500. Figures 10 and 11 are cross-sectional views showing the internal structure of the first arm 221, mainly the first housing 300 and the second housing 400.

[0044] As shown in Figures 8 and 9, the first arm 221 comprises a first housing 300 and a second housing 400. The second housing 400 has a support portion 500, which has two support portions 510 and 520 (see Figure 3) that sandwich the first housing 300 and the second housing 400. A motor 700 that drives the second arm 222 is located inside the second housing 400.

[0045] As described above, the first arm 221 is connected to the second drive mechanism 232 (see Figure 2). The second drive mechanism 232 has a reduction gear and a pulley provided on the input shaft of the reduction gear. The pulley of the second drive mechanism 232 and the motor 700 are connected via a belt 530 (see Figure 3). The belt 530 is located within the support portion 500.

[0046] Thus, although vibrations are likely to occur because the second drive mechanism 232 and the motor 700 are connected via the belt 530, the inertial sensor module 600 is fixed to the first housing 300, and the inertial sensor module 600 is not directly connected to the vibration source (the motor 700 and belt 530, which are the vibration sources), so the transmission of vibrations to the inertial sensor module 600 can be suppressed.

[0047] As shown in Figures 7, 10, and 11, the first arm 221 has a first housing 300 and a second housing 400. The first arm 221 is connected to the base 21 via a first drive mechanism 231. As described above, the first drive mechanism 231 rotates the first arm 221 around the pivot axis J1 relative to the base 21.

[0048] The motor 700 is positioned inside the second housing 400 on the axis of the pivot axis J1. Because the motor 700 is positioned on the axis of the pivot axis J1 in this way, the inertia of the motor 700, i.e., the effect of the moment of inertia, can be reduced when it rotates around the pivot axis J1. Therefore, the transmission of vibrations to the inertial sensor module 600 can be suppressed.

[0049] The first arm 221 has two support parts 500, specifically a first support part 510 and a second support part 520. As shown in Figure 7, the inertial sensor module 600 and the sensor substrate 610 are positioned between the first support part 510 and the second support part 520 (see Figure 3) in a plan view.

[0050] Specifically, as shown in Figures 5 and 7, the first housing 300 has a protruding portion 310a that extends outward from the portion that overlaps with the first drive mechanism 231 in a plan view, specifically protruding in the -X direction. The inertial sensor module 600 and the sensor substrate 610 are located on the protruding portion 310a. In other words, the inertial sensor module 600 is positioned so as not to overlap with the motor 700 and the two support portions 500 in the up, down, left, and right directions, i.e., the X, Y, and Z directions. To put it another way, the inertial sensor module 600 is not positioned directly below the motor 700, which is the source of vibration.

[0051] In this way, since the inertial sensor module 600 is positioned between the two support parts 510 and 520 and on the protruding part 310a of the first housing 300, it is possible to separate the inertial sensor module 600 from vibration sources, specifically the motor 700 and the belt 530, thereby suppressing the transmission of vibrations to the inertial sensor module 600.

[0052] Furthermore, as shown in Figures 9 and 11, the first arm 221 is connected to the first drive mechanism 231. The first housing 300 has a cylindrical flange portion 231a extending along the pivot axis J1. In other words, the first housing 300 has a flange portion 231a between itself and the base 21. The flange portion 231a is connected to the output side of the hollow reduction gear of the first drive mechanism 231, which is located on the base 21.

[0053] As described above, since the first housing 300 is connected to the base 21 via the flange portion 231a, the first housing 300 and the base 21 can be separated by the length H1 of the flange portion 231a (see Figure 11). Therefore, interference between the first housing 300 and the base 21 can be suppressed, and noise due to interference can be suppressed from being transmitted to the inertial sensor module 600.

[0054] Next, the maintenance method for the inertial sensor module 600 and the sensor board 610 will be explained with reference to Figures 12 and 13.

[0055] As shown in Figure 12, the first arm 221 has a first housing 300 and a second housing 400. The second housing 400 has a cover 410 positioned above the sensor substrate 610, i.e., on the side opposite to the second portion of the sensor substrate 610, in a portion that overlaps with the sensor substrate 610 in a plan view. The cover 410 is detachably attached via fixing members such as screws.

[0056] As shown in Figure 13, the second housing 400 has a cover support portion 420 with a second opening 421 positioned below the cover 410. The second opening 421 is located in an area that overlaps with the inertial sensor module 600 and the sensor substrate 610 in a plan view.

[0057] As described above, since the first arm 221 is provided with a second opening 421, the inertial sensor module 600 and the sensor board 610 can be maintained from the outside without disassembling the first arm 221, i.e., the first housing 300 or the second housing 400. In addition to maintenance, since the second opening 421 is covered by the cover 410, the reduction in rigidity is suppressed and the intrusion of foreign objects can be prevented.

[0058] As described above, the vertical articulated robot 1 of this embodiment comprises a base 21, a first drive mechanism 231 connected to the base 21, a first arm 221 connected to the first drive mechanism 231 and rotating around a pivot axis J1, a second drive mechanism 232 connected to the first arm 221, a second arm 222 connected to the second drive mechanism 232, and a motor 700 that drives the second arm 222. The first arm 221 has a first housing 300 connected to the first drive mechanism 231, a second housing 400 fixed to the first housing 300 and connected to the second drive mechanism 232, and an inertial sensor module 600 fixed to the first housing 300 and detecting at least one of acceleration and angular velocity in the first arm 221. The motor 700 is fixed to the second housing 400 or the second arm 222.

[0059] In this configuration, the inertial sensor module 600 is fixed to the first housing 300, and the motor 700 is fixed to the second housing 400 or the second arm 222. Therefore, the inertial sensor module 600 and the motor 700, which is the vibration source, are not fixed to the same housing. Thus, it is possible to suppress the direct transmission of vibrations from the motor 700 to the inertial sensor module 600, thereby reducing the effects of vibration. This improves the detection accuracy of the inertial sensor module 600.

[0060] Furthermore, by dividing the first arm 221 into the first housing 300 and the second housing 400, vibrations transmitted to the inertial sensor module 600 can be suppressed. Therefore, it is not necessary to provide vibration suppression members such as vibration-damping rubber between the first housing 300 and the second housing 400, and the configuration can be simplified. However, vibration-damping rubber or the like may be placed between the first housing 300 and the second housing 400.

[0061] Furthermore, in the vertical articulated robot 1 of this embodiment, it is preferable that the second drive mechanism 232 and the motor 700 are connected via a belt 530. With this configuration, although vibration is likely to occur because the second drive mechanism 232 and the motor 700 are connected via a belt 530, the inertial sensor module 600 is fixed to the first housing 300 and the inertial sensor module 600 is not directly connected to the vibration source, so the transmission of vibration to the inertial sensor module 600 can be suppressed.

[0062] Furthermore, in the vertical articulated robot 1 of this embodiment, it is preferable that the first housing 300 has a first part 310 connected to the second housing 400 and a second part 320 to which the inertial sensor module 600 is fixed. With this configuration, the first housing 300 is divided into a first part 310 and a second part 320, and the inertial sensor module 600 is arranged in the second part 320, so it is possible to further suppress the direct transmission of vibrations from the vibration source and improve the detection accuracy of the inertial sensor module 600.

[0063] Furthermore, in the vertical articulated robot 1 of this embodiment, the first part 310 is provided with a first opening 311 into which the sensor substrate 610 is fitted, and ribs 312 are provided around the first opening 311. Preferably, the second part 320 is fixed to the first part 310 by fixing screws 321 fixed to the second part 320 being inserted into screw holes 313 provided in the ribs 312. With this configuration, since ribs 312 are provided around the first opening 311, it is possible to improve the rigidity around the first opening 311, making it more difficult for vibrations to be transmitted. In addition, since the first part 310 and the second part 320 are separated via the fixing screws 321, it is possible to suppress the transmission of vibrations from the vibration source to the inertial sensor module 600.

[0064] Furthermore, in the vertical articulated robot 1 of this embodiment, it is preferable that a cover 620 is placed on the sensor substrate 610 to cover the sensor substrate 610. With this configuration, because the cover 620 is placed, it is possible to prevent cables 630 and the like arranged around the sensor substrate 610 from coming into contact with the sensor substrate 610, specifically the inertial sensor module 600. Therefore, the detection accuracy of the inertial sensor module 600 can be improved.

[0065] Furthermore, in the vertical articulated robot 1 of this embodiment, it is preferable that the motor 700 is positioned on the axis of the rotation axis J1 of the first drive mechanism 231. With this configuration, since the motor 700 is positioned on the axis of the rotation axis J1, the inertia of the motor 700, i.e., the moment of inertia, can be reduced when it rotates around the rotation axis J1. Therefore, it is possible to suppress the transmission of vibrations to the inertial sensor module 600.

[0066] Furthermore, in the vertical articulated robot 1 of this embodiment, it is preferable that the second housing 400 has two support parts 500 that support the second arm 222, and that the inertial sensor module 600 is positioned between the two support parts 500. With this configuration, since the inertial sensor module 600 is positioned between the two support parts 500, it is possible to suppress the transmission of vibrations from the second arm 222 through the support parts 500 to the inertial sensor module 600.

[0067] Furthermore, in the vertical articulated robot 1 of this embodiment, the first housing 300 has a protruding portion 310a that protrudes outward from the portion that overlaps with the first drive mechanism 231 in a plan view, and it is preferable that the inertial sensor module 600 is arranged on the protruding portion 310a. With this configuration, since the inertial sensor module 600 is arranged on the protruding portion 310a of the first housing 300, it is possible to separate the inertial sensor module 600 from vibration sources, specifically the motor 700 and the belt 530, and the transmission of vibrations to the inertial sensor module 600 can be suppressed.

[0068] Furthermore, in the vertical articulated robot 1 of this embodiment, the first housing 300 preferably has a cylindrical flange portion 231a, and the flange portion 231a is preferably connected to the first drive mechanism 231, which is the first joint and is located on the base 21. With this configuration, since the first housing 300 is connected to the base 21 via the flange portion 231a, the first housing 300 and the base 21 can be separated by the length of the flange portion 231a. Therefore, interference between the inertial sensor module 600 located on the first housing 300 and the base 21 can be suppressed, and noise can be suppressed from being transmitted to the inertial sensor module 600.

[0069] Furthermore, in the vertical articulated robot 1 of this embodiment, it is preferable that the first arm 221 is provided with a second opening 421 in the portion that overlaps with the inertial sensor module 600 in a plan view. With this configuration, since the first arm 221 is provided with a second opening 421, the inertial sensor module 600 can be maintained from the outside without disassembling the first arm 221, i.e., the first housing 300 or the second housing 400.

[0070] Furthermore, the robot system 1000 of this embodiment comprises the vertical articulated robot 1 described above and a controller 10 that performs calculation processing for the inertial sensor module 600. This configuration makes it possible to provide a robot system 1000 that can improve the detection accuracy of the inertial sensor module 600.

[0071] The following describes some variations of the embodiments described above.

[0072] As described above, the base 21 corresponds to the root member, the first arm 221 corresponds to the arm, and the second arm 222 corresponds to the tip member. The following combinations are also possible. Furthermore, the location of the motor 700 is not limited to the second housing 400 of the first arm 221, but may also be the second arm 222. The combination of the embodiment described above is referred to as the first combination.

[0073] Specifically, the second combination consists of a first arm 221 corresponding to the base member, a second arm 222 corresponding to the arm, and a third arm 223 corresponding to the tip member. The second housing of the second arm 222 may also correspond to the location where the motor 700 is placed. The location where the motor 700 is placed may also be the third arm 223.

[0074] The third combination consists of a second arm 222 corresponding to the base member, a third arm 223 corresponding to the arm, and a fourth arm 224 corresponding to the tip member. The second housing of the third arm 223 may also be used as the location for the motor 700. The location for the motor 700 may also be the fourth arm 224.

[0075] The fourth combination consists of a third arm 223 corresponding to the base member, a fourth arm 224 corresponding to the arm, and a fifth arm 225 corresponding to the tip member. The second housing of the fourth arm 224 may also be used as the location for the motor 700. The location for the motor 700 may also be the fifth arm 225.

[0076] The fifth combination consists of a fourth arm 224 corresponding to the base member, a fifth arm 225 corresponding to the arm, and a sixth arm 226 corresponding to the tip member. The second housing of the fifth arm 225 may also be used as the location for the motor 700. The location for the motor 700 may also be the sixth arm 226. [Explanation of symbols]

[0077] 1…Vertical articulated robot, 2…Robot body, 10…Controller as control device, 21…Base as root member, 22…Robot arm, 24…End effector, 221…First arm as arm, 222…Second arm as tip member, 223…Third arm, 224…Fourth arm, 225…Fifth arm, 226…Sixth arm, 231…First drive mechanism as first joint, 231a…Flange section, 232…Second drive mechanism as second joint, 233…Third drive mechanism, 234…Fourth drive mechanism, 235…Fifth drive mechanism, 236… 6th drive mechanism, 300...1st housing, 310...1st part, 310a...protrusion, 311...1st opening, 312...rib, 313...screw hole, 320...2nd part, 320a...base material, 321...fixing screw as a bolt, 322...support column, 400...2nd housing, 410...cover, 420...cover support part, 421...2nd opening, 500...support part, 510...1st support part, 520...2nd support part, 530...belt, 600...inertial sensor module, 610...sensor board, 620...cover, 630...cable, 700...motor, 1000...robot system.

Claims

1. The base member and The first joint connected to the base member, An arm connected to the first joint and rotating around the first pivot axis, A second joint connected to the aforementioned arm, The tip member connected to the second joint, A motor that drives the aforementioned tip member, Equipped with, The aforementioned arm is The first housing connected to the first joint, A second housing is fixed to the first housing and connected to the second joint, An inertial sensor fixed to the first housing detects at least one of the acceleration and angular velocity of the arm, It has, The motor is fixed to the second housing or the end member of a vertical articulated robot.

2. A vertical articulated robot according to claim 1, A vertical articulated robot in which the second joint and the motor are connected via a belt.

3. A vertical articulated robot according to claim 1, The first housing is a vertical articulated robot having a first portion connected to the second housing and a second portion to which the inertial sensor is fixed.

4. A vertical articulated robot according to claim 3, The first part is provided with a first opening hole into which a sensor substrate is fitted. Ribs are provided around the first opening, A vertical articulated robot in which the second part is fixed to the first part by bolts fixed to the second part being inserted into screw holes provided in the ribs.

5. A vertical articulated robot according to claim 3, A vertical articulated robot in which a cover is placed on top of the sensor board to cover the sensor board.

6. A vertical articulated robot according to claim 1, The motor is positioned on the axis of the first rotation axis of the first joint in a vertical articulated robot.

7. A vertical articulated robot according to claim 1, The second housing has two support parts that support the tip member, The inertial sensor is positioned between the two support parts of the vertical articulated robot.

8. A vertical articulated robot according to claim 1, The first housing has a protruding portion that extends outward from the portion that overlaps with the first joint in a plan view, The inertial sensor is located on the protruding portion of the vertical articulated robot.

9. A vertical articulated robot according to claim 1, The first housing has a cylindrical flange portion extending along the first pivot axis, and the flange portion is connected to the first joint located on the root member, in a vertical articulated robot.

10. A vertical articulated robot according to claim 1, The arm is a vertical articulated robot in which a second opening is provided in the portion that overlaps with the inertial sensor in a plan view.

11. A vertical articulated robot according to any one of claims 1 to 10, A control device that performs calculation processing for the inertial sensor, A robotic system equipped with the following features.

Images