Semiconductor equipment

JP2026097821AActive Publication Date: 2026-06-16SEMICON ENERGY LAB CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
SEMICON ENERGY LAB CO LTD
Filing Date
2026-02-06
Publication Date
2026-06-16

AI Technical Summary

Benefits of technology

【0024】 本発明の一形態によれば、酸化物半導体層が有する結晶領域をチャネル形成領域とするこ とで、半導体装置が有する回路の動作を高速化できる。また、高純度化された酸化物半導 体を用いたトランジスタで回路を構成することで、半導体装置が有する回路の動作を安定 化させることができる。また、オフ電流が1×10-13A以下に低減されていることで 、半導体装置が有する保持容量素子の削減もしくは小型化ができる。また、特性の異なる トランジスタを同一基板上に有する半導体装置を提供できる。また、当該半導体装置を簡 便な方法で作製できる。

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Abstract

One objective is to provide a semiconductor device having transistors with different characteristics, specifically transistors with excellent dynamic characteristics (on-response and frequency characteristics (called f-response)) and transistors with suppressed off-current, on the same substrate. Another objective is to provide a simple method for fabricating such a semiconductor device. [Solution] An oxide semiconductor layer that is intrinsically or substantially intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsically intrinsic intrinsically
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Claims

1. It has a multi-stage circuit, Of the aforementioned multi-stage circuits, at least one circuit has the function of supplying a first signal to the gate of a transistor in the pixel. The circuit has a first transistor to a tenth transistor, Either the source or the drain of the first transistor is always in electrical contact with the first wiring. The source or drain of the first transistor is always in electrical contact with the second wiring. Either the source or the drain of the second transistor is always in electrical contact with the third wiring. The source or drain of the second transistor is always in electrical contact with the first wiring. Either the source or drain of the third transistor is always in contact with the gate of the sixth transistor. The source or drain of the third transistor is always in electrical contact with the source or drain of the fourth transistor. The gate of the third transistor is supplied with the first power supply potential. The source or drain of the fourth transistor is always in electrical contact with the fourth wiring. The gate of the fourth transistor is always in electrical contact with the fifth wiring. Either the source or drain of the fifth transistor is always in electrical contact with the third wiring. The source or drain of the sixth transistor is always in electrical contact with the other source or drain of the fifth transistor. Either the source or drain of the seventh transistor is always in contact with the gate of the second transistor. The source or drain of the seventh transistor is always in electrical contact with the source or drain of the eighth transistor. The gate of the seventh transistor is always in electrical contact with the sixth wiring. Either the source or drain of the ninth transistor is always in contact with the gate of the fifth transistor. The first power supply potential is supplied to the source or drain of the ninth transistor, Either the source or drain of the 10th transistor is always in electrical contact with the 3rd wiring. The source or drain of the 10th transistor is always in contact with the gate of the second transistor. When the fourth wiring and the gates of the first transistor and the sixth transistor are conductive through at least the fourth transistor and the third transistor, a potential is supplied from the fourth wiring to the gates of the first transistor and the sixth transistor. The first wiring has the function of transmitting the first signal. Semiconductor equipment.

2. It has a multi-stage circuit, Of the aforementioned multi-stage circuits, at least one circuit has the function of supplying a first signal to the gate of a transistor in the pixel. The circuit has a first transistor to a tenth transistor, Either the source or the drain of the first transistor is always in electrical contact with the first wiring. The source or drain of the first transistor is always in electrical contact with the second wiring. Either the source or the drain of the second transistor is always in electrical contact with the third wiring. The source or drain of the second transistor is always in electrical contact with the first wiring. Either the source or drain of the third transistor is always in contact with the gate of the sixth transistor. The source or drain of the third transistor is always in electrical contact with the source or drain of the fourth transistor. The gate of the third transistor is supplied with the first power supply potential. The source or drain of the fourth transistor is always in electrical contact with the fourth wiring. The gate of the fourth transistor is always in electrical contact with the fifth wiring. Either the source or drain of the fifth transistor is always in electrical contact with the third wiring. The source or drain of the sixth transistor is always in electrical contact with the other source or drain of the fifth transistor. Either the source or drain of the seventh transistor is always in contact with the gate of the second transistor. The source or drain of the seventh transistor is always in electrical contact with the source or drain of the eighth transistor. The gate of the seventh transistor is always in electrical contact with the sixth wiring. Either the source or drain of the ninth transistor is always in contact with the gate of the fifth transistor. The first power supply potential is supplied to the source or drain of the ninth transistor, Either the source or drain of the 10th transistor is always in electrical contact with the 3rd wiring. The source or drain of the 10th transistor is always in contact with the gate of the second transistor. When the fourth wiring and the gates of the first transistor and the sixth transistor are conductive through at least the fourth transistor and the third transistor, a potential is supplied from the fourth wiring to the gates of the first transistor and the sixth transistor. The first wiring has the function of transmitting the first signal, The third wiring is supplied with the second power supply potential. Semiconductor equipment.

3. It has a multi-stage circuit, Of the aforementioned multi-stage circuits, at least one circuit has the function of supplying a first signal to the gate of a transistor in the pixel. The circuit has a first transistor to a tenth transistor, Either the source or the drain of the first transistor is always in electrical contact with the first wiring. The source or drain of the first transistor is always in electrical contact with the second wiring. Either the source or the drain of the second transistor is always in electrical contact with the third wiring. The source or drain of the second transistor is always in electrical contact with the first wiring. Either the source or drain of the third transistor is always in contact with the gate of the sixth transistor. The source or drain of the third transistor is always in electrical contact with the source or drain of the fourth transistor. The gate of the third transistor is supplied with the first power supply potential. The source or drain of the fourth transistor is always in electrical contact with the fourth wiring. The gate of the fourth transistor is always in electrical contact with the fifth wiring. Either the source or drain of the fifth transistor is always in electrical contact with the third wiring. The source or drain of the sixth transistor is always in electrical contact with the other source or drain of the fifth transistor. Either the source or drain of the seventh transistor is always in contact with the gate of the second transistor. The source or drain of the seventh transistor is always in electrical contact with the source or drain of the eighth transistor. The gate of the seventh transistor is always in electrical contact with the sixth wiring. Either the source or drain of the ninth transistor is always in contact with the gate of the fifth transistor. The first power supply potential is supplied to the source or drain of the ninth transistor, Either the source or drain of the 10th transistor is always in electrical contact with the 3rd wiring. The source or drain of the 10th transistor is always in contact with the gate of the second transistor. When the fourth wiring and the gates of the first transistor and the sixth transistor are conductive through at least the fourth transistor and the third transistor, a potential is supplied from the fourth wiring to the gates of the first transistor and the sixth transistor. The first wiring has the function of transmitting the first signal, The third wiring is supplied with the second power supply potential. A clock signal is supplied to the sixth wiring, A signal different from the clock signal is supplied to the gate of the eighth transistor. Semiconductor equipment.

4. It has a multi-stage circuit, Of the aforementioned multi-stage circuits, at least one circuit has the function of supplying a first signal to the gate of a transistor in the pixel. The circuit has a first transistor to a tenth transistor, Either the source or the drain of the first transistor is always in electrical contact with the first wiring. The source or drain of the first transistor is always in electrical contact with the second wiring. Either the source or the drain of the second transistor is always in electrical contact with the third wiring. The source or drain of the second transistor is always in electrical contact with the first wiring. Either the source or drain of the third transistor is always in contact with the gate of the sixth transistor. The source or drain of the third transistor is always in electrical contact with the source or drain of the fourth transistor. The gate of the third transistor is supplied with the first power supply potential. The source or drain of the fourth transistor is always in electrical contact with the fourth wiring. The gate of the fourth transistor is always in electrical contact with the fifth wiring. Either the source or drain of the fifth transistor is always in electrical contact with the third wiring. The source or drain of the sixth transistor is always in electrical contact with the other source or drain of the fifth transistor. Either the source or drain of the seventh transistor is always in contact with the gate of the second transistor. The source or drain of the seventh transistor is always in electrical contact with the source or drain of the eighth transistor. The gate of the seventh transistor is always in electrical contact with the sixth wiring. Either the source or drain of the ninth transistor is always in contact with the gate of the fifth transistor. The first power supply potential is supplied to the source or drain of the ninth transistor, Either the source or drain of the 10th transistor is always in electrical contact with the 3rd wiring. The source or drain of the 10th transistor is always in contact with the gate of the second transistor. When the fourth wiring and the gates of the first transistor and the sixth transistor are conductive through at least the fourth transistor and the third transistor, a potential is supplied from the fourth wiring to the gates of the first transistor and the sixth transistor. The first wiring has the function of transmitting the first signal, The third wiring is supplied with the second power supply potential. A period comprising: a period in which either the seventh transistor or the eighth transistor is conducting and the other is not conducting; a period in which both the seventh transistor and the eighth transistor are conducting; and a period in which both the seventh transistor and the eighth transistor are not conducting. Semiconductor equipment.

5. In any one of claims 1 to 4, The fourth wiring has the function of supplying a potential different from the first power supply potential. Semiconductor equipment.

6. In any one of claims 1 to 5, The first to tenth transistors have the same polarity. Semiconductor equipment.