Film forming device

Abstract

The present invention provides a film deposition apparatus that effectively and uniformly distributes the concentration of mist sprayed onto a substrate in the longitudinal direction of the slit. [Solution] A film-forming apparatus for supplying mist to the surface of an object and forming a film of material substances contained in the mist on the surface of the object comprises a mist generating unit for generating the mist, an inlet for introducing the mist generated in the mist generating unit into a space, and a mist supply unit having a supply port for supplying the mist from the space to the surface of the object. The supply port includes a supply port where a first direction and a second direction intersect, and is provided at a different position from the inlet in the first direction within a first predetermined plane through which the mist passes.

Claims

[Claim 1] A film-forming apparatus for supplying mist to the surface of an object and forming a film of the material substance contained in the mist on the surface of the object, The mist generating unit that generates the aforementioned mist, An inlet for introducing the mist generated in the mist generating unit into the space, The mist supply unit has a supply port for supplying the mist from the space to the surface of the object, The film deposition apparatus includes a supply port where a first direction and a second direction intersect, and is provided at a different position from the inlet in the first direction within a first predetermined plane through which the mist passes.

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