Substrate processing apparatus and method for detecting conditions inside a processing container

The substrate processing apparatus addresses the challenge of detecting internal conditions in processing containers by using an imaging unit to monitor loading/unloading ports and spaces, preventing substrate collisions and fluid leaks, thus improving processing safety and efficiency.

JP2026099158APending Publication Date: 2026-06-18TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2024-12-06
Publication Date
2026-06-18

AI Technical Summary

Technical Problem

Existing substrate processing systems face challenges in accurately detecting the internal conditions of processing containers, particularly during loading and unloading, which can lead to substrate damage due to collisions with residual substrates.

Method used

A substrate processing apparatus equipped with a processing container, a lid body, and an imaging unit that allows imaging of the loading/unloading port and processing space without obstructing the view, enabling detection of conditions within the container, including the presence of residual substrates and sealing member abnormalities.

Benefits of technology

The apparatus effectively detects the presence of residual substrates and sealing member issues, reducing the risk of substrate damage and fluid leakage, thereby enhancing processing efficiency and safety.

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Abstract

The conditions inside the processing container are appropriately detected. [Solution] The substrate processing apparatus comprises a processing container, a lid, and an imaging unit. The processing container has a processing space capable of accommodating a substrate and an input / output port through which substrates are loaded into and out of the processing space. The lid is configured to be able to close the input / output port of the processing container. The imaging unit captures an imaging region including the input / output port and the processing space inside the processing container exposed from the input / output port, when the input / output port is not closed by the lid.
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