Fluoride compound remover

Abstract

The object of the present invention is to provide a fluoride compound remover that removes fluoride compounds, particularly phosphoric acid trifluoride (PF3), from exhaust gas. [Solution] The above problem is solved by a fluoride compound remover containing 20-80% by weight of calcium (Ca) calculated as CaO, 10-55% by weight of iron (Fe) calculated as Fe2O3, or 30-80% by weight of manganese (Mn) calculated as MnO, where the weight percentage is based on the weight of the fluoride compound remover.

Description

[Technical Field]

[0001] The present invention relates to a fluoride compound remover and a method for producing the same.

[0002] Fluoride compounds used in semiconductor manufacturing processes and other applications need to be removed before they are released into the atmosphere.

[0003] Patent Document 1 discloses a fluorine-containing gas removal agent containing alumina and an alkaline earth metal compound.

[0004] Patent Document 2 discloses a halogenated gas treatment agent comprising calcium oxide or magnesium oxide prepared by calcining under a nitrogen atmosphere, which contains at least one compound selected from the group consisting of alkali metal chlorides, alkaline earth metal chlorides, and alkali metal fluorides. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] WO2018-230121 [Patent Document 2] JPH09-267027 [Overview of the project] [Problems that the invention aims to solve]

[0006] The object of the present invention is to provide a fluoride compound remover that can sufficiently remove fluoride compounds. [Means for solving the problem]

[0007] One embodiment contains 20-80% by weight of calcium (Ca) calculated as CaO, and 10-55% by weight of iron (Fe) calculated as Fe2O3, or 30-80% by weight of manganese (Mn) calculated as MnO, where the weight percentage is based on the weight of the fluoride compound remover.

[0008] Another embodiment is a method for producing the fluoride compound remover, comprising the steps of mixing a calcium compound with an iron compound or a manganese compound, and drying the mixture.

[0009] Another embodiment is a method for removing fluoride compounds, which includes the steps of placing the fluoride compound removal agent in a container and passing a gas containing the fluoride compound through the container.

[0010] The fluoride compound removal agent according to the present invention can effectively remove fluoride compounds.

[0011] In this specification, fluoride compound removers are also simply referred to as "remover". [Modes for carrying out the invention]

[0012] The fluoride compound remover contains Ca and either Fe or Mn. Based on the weight of the fluoride compound remover, Ca is calculated as 20-80% by weight as CaO, Fe is calculated as 10-55% by weight as Fe2O3, and Mn is calculated as 30-80% by weight as MnO.

[0013] Ca is calculated as CaO based on the weight of the fluoride compound remover, and is 22-80% by weight in one embodiment, 25-80% by weight in another embodiment, 26-80% by weight in another embodiment, 27-80% by weight in another embodiment, 28-80% by weight in another embodiment, 29-80% by weight in another embodiment, 30-80% by weight in another embodiment, 36-80% by weight in another embodiment, 38-80% by weight in another embodiment, 40-80% by weight in another embodiment, 42-80% by weight in another embodiment, 22-75% by weight in another embodiment, 25-75% by weight in another embodiment, 25-73% by weight in another embodiment, and in another embodiment In one embodiment, the weight is 25-70%; in another embodiment, 30-70%; in yet another embodiment, 25-68%; in yet another embodiment, 25-64%; in yet another embodiment, 25-60%; in yet another embodiment, 25-58%; in yet another embodiment, 22-75%; in yet another embodiment, 25-75%; in yet another embodiment, 28-73%; in yet another embodiment, 31-70%; in yet another embodiment, 34-68%; in yet another embodiment, 38-64%; in yet another embodiment, 38-52%; in yet another embodiment, 40-60%; in yet another embodiment, 42-58%; and in yet another embodiment, 45-53%.

[0014] In one embodiment, some or all of the Ca contained in the fluoride compound remover exists as calcium hydroxide. In another embodiment, all of the Ca contained in the fluoride compound remover exists as calcium hydroxide.

[0015] Fe is calculated as Fe2O3 based on the weight of the fluoride compound remover, and is 11-55% by weight in one embodiment, 13-55% by weight in another embodiment, 14-55% by weight in another embodiment, 15-55% by weight in another embodiment, 17-55% by weight in another embodiment, 19-55% by weight in another embodiment, 20-55% by weight in another embodiment, 21-55% by weight in another embodiment, 12-54% by weight in another embodiment, 25-53% by weight in another embodiment, 25-52% by weight in another embodiment, 25- In another embodiment, it is 51% by weight, in another embodiment, 22-50% by weight, in another embodiment, 23-49% by weight, in another embodiment, 25-48% by weight, in another embodiment, 27-46% by weight, in another embodiment, 28-45% by weight, in another embodiment, 29-43% by weight, in another embodiment, 30-55% by weight, in another embodiment, 30-52% by weight, in another embodiment, 30-48% by weight, in another embodiment, 30-45% by weight, in another embodiment, 31-41% by weight, in another embodiment, 32-40% by weight, and in another embodiment, 33-39% by weight.

[0016] In one embodiment, the Fe contained in the fluoride compound remover exists partially or entirely as iron hydroxide and / or iron oxide. In another embodiment, the Fe contained in the fluoride compound remover exists partially or entirely as iron hydroxide and iron oxide. In another embodiment, the Fe contained in the fluoride compound remover exists entirely as iron hydroxide and iron oxide. In another embodiment, the Fe contained in the fluoride compound remover exists entirely as iron hydroxide or iron oxide. In one embodiment, the iron hydroxide is selected from the group consisting of Fe(OH)2, Fe(OH)3 and combinations thereof. In another embodiment, the iron hydroxide includes Fe(OH)3. In another embodiment, the iron hydroxide is Fe(OH)3. In one embodiment, the iron oxide is selected from the group consisting of FeO, Fe3O4, Fe2O3 and combinations thereof. In another embodiment, the iron oxide includes Fe2O3. In another embodiment, the iron oxide is Fe2O3.

[0017] Mn, calculated as MnO, is 35 - 79 wt% based on the weight of the fluoride compound remover, 36 - 79 wt% in another embodiment, 39 - 79 wt% in another embodiment, 43 - 79 wt% in another embodiment, 45 - 79 wt% in another embodiment, 48 - 79 wt% in another embodiment, 50 - 79 wt% in another embodiment, 38 - 77 wt% in another embodiment, 36 - 69 wt% in another embodiment, 39 - 69 wt% in another embodiment, 43 - 69 wt% in another embodiment, 45 - 69 wt% in another embodiment, 45 - 64 wt% in another embodiment, 48 - 62 wt% in another embodiment, 45 - 60 wt% in another embodiment, 38 - 75 wt% in another embodiment, 38 - 74 wt% in another embodiment, 38 - 73 wt% in another embodiment, 41 - 73 wt% in another embodiment, 43 - 73 wt% in another embodiment, 45 - 73 wt% in another embodiment, 48 - 73 wt% in another embodiment, 50 - 72 wt% in another embodiment, 50 - 70 wt% in another embodiment, 50 - 67 wt% in another embodiment, 50 - 65 wt% in another embodiment, 50 - 63 wt% in another embodiment, 50 - 61 wt% in another embodiment, 50 - 59 wt% in another embodiment, 50 - 58 wt% in another embodiment, 50 - 56 wt% in another embodiment, 50 - 55 wt% in another embodiment, 50 - 54 wt% in another embodiment, 50 - 53 wt%.

[0018] In one embodiment, part or all of the Mn contained in the fluoride compound remover exists as manganese oxide. In another embodiment, all of the Mn contained in the fluoride compound remover exists as manganese oxide. In one embodiment, the manganese oxide is selected from the group consisting of MnO, Mn3O4, Mn2O3, MnO2, MnO3, Mn2O7, and combinations thereof. In another embodiment, the manganese oxide contains MnO and / or MnO2. In another embodiment, the manganese oxide is MnO2.

[0019] The above fluoride compound remover contains Ca and Fe or Mn. Those skilled in the art can add other components without substantially changing the desired properties of the fluoride compound remover. In one embodiment, the fluoride compound remover may contain additional components in addition to Ca and Fe or Mn. In one embodiment, the additional components are sulfur (S), magnesium (Mg) and silicon (Si). Based on the weight of the fluoride compound remover, calculated as oxides, in one embodiment, the additional components are 20% by weight or less, in another embodiment, 19% by weight or less, 18% by weight or less, 17% by weight or less, 16% by weight or less, 15% by weight or less, 14% by weight or less.

[0020] In one embodiment, the fluoride compound remover contains moisture. The moisture contained in the fluoride compound remover is 1 to 20% by weight, in another embodiment, 5 to 18% by weight, in another embodiment, 7 to 17% by weight, in another embodiment, 10 to 16% by weight based on the weight of the fluoride compound remover. It is known that the removal ability of a remover containing calcium increases by containing moisture.

[0021] In one embodiment, the fluoride compound remover does not contain alkali metals. In one embodiment, alkali metals include at least lithium (Li), sodium (Na) or potassium (K). Conventionally, in a remover containing calcium hydroxide, it is known that adding an alkali metal, particularly potassium, improves the removal ability. However, since alkali metals react with carbon dioxide in the air to form water-insoluble carbonates and may reduce the removal ability, appropriate storage management from production to use is required. Therefore, not containing alkali metals can reduce the burden of storage management and provide a remover with stable removal ability. In another embodiment, the fluoride compound remover does not contain potassium.

[0022] Here, "does not contain" means that the fluoride compound remover does not substantially contain the component in question, and encompasses any configuration in which the target substance is unintentionally included, such as through contamination. In one embodiment, based on the weight of the fluoride compound remover, alkali metals are 1% by weight or less; in another embodiment, 0.5% by weight or less; in yet another embodiment, 0.2% by weight or less; in yet another embodiment, 0.1% by weight or less; in yet another embodiment, 0.05% by weight or less; and in yet another embodiment, 0.01% by weight or less.

[0023] In one embodiment, the fluoride compound is an organic fluoride compound (PFC) and / or an inorganic fluoride compound. In one embodiment, the organic fluoride compound (PFC) includes a perfluoroalkyl compound and / or a polyfluoroalkyl compound. In another embodiment, the organic fluoride compound (PFC) is selected from the group consisting of CHF3, CH2F2, CH3F, CF4, C2F6, C4F8, NF3, SF6, C3HF5 and mixtures thereof. In yet another embodiment, the fluoride compound includes an inorganic fluoride compound. In one embodiment, the inorganic fluoride compound is selected from the group consisting of phosphorus trifluoride (PF3), silicon tetrafluoride (SiF4), arsenic trifluoride (AsF3), boron trifluoride (BF3), sulfur hexafluoride (SF6), tungsten hexafluoride (WF6), molybdenum hexafluoride (MoF6), chlorine trifluoride (CIF3), silicon tetrafluoride (SiF4), nitrogen trifluoride (NF3), sulfur hexafluoride (SF6), and combinations thereof. In another embodiment, the inorganic fluoride compound includes phosphoric acid trifluoride (PF3). In yet another embodiment, the fluoride compound is phosphoric acid trifluoride (PF3). In yet another embodiment, the fluoride compound remover is a phosphoric acid trifluoride (PF3) remover.

[0024] The composition of the fluoride compound remover can be determined using methods known to those skilled in the art, such as elemental analysis by X-ray fluorescence analysis (XRF analysis). For example, it can be measured using an X-ray fluorescence spectrometer (Rigaku Corporation, model ZSX Primus II).

[0025] The specific surface area (SA) of the removal agent is, in one embodiment, 10 to 500 m².2 / g, in another embodiment, 22 to 420 m 2 / g, in another embodiment, 37 to 345 m 2 / g, in another embodiment, 51 to 280 m 2 / g, in another embodiment, 60 to 200 m 2 / g, in another embodiment, 70 to 160 m 2 / g, in another embodiment, 20 to 85 m 2 / g, in another embodiment, 25 to 68 m 2 / g, in another embodiment, 30 to 55 m 2 / g. The specific surface area can be measured by the BET (one-point) method in accordance with JIS Z8830:2013. For example, a specific surface area measuring device (Macsorb (registered trademark) HM model - 1201, MOUNTECH Co., Ltd.) can be used.

[0026] In one embodiment, the remover is porous. In one embodiment, the pore volume (PV) is, in one aspect, 0.05 to 3.0 ml / g, in another aspect, 0.08 to 2.2 ml / g, in another aspect, 0.11 to 1.8 ml / g, in another aspect, in another aspect, 0.28 to 0.8 ml / g, in another aspect, 0.35 to 0.7 ml / g, in another aspect, 0.40 to 0.6 ml / g. The pore volume can be measured, for example, with an automatic mercury porosimeter (AutoPore V9620 manufactured by Micromeritics).

[0027] The bulk density of the remover is, in one embodiment, 0.1 to 3.0 g / ml, in another embodiment, 0.3 to 2.7 g / ml, in another embodiment, 0.4 to 1.8 g / ml, in another embodiment, 0.5 to 1.3 g / ml, in another embodiment, 0.4 to 1.2 g / ml, in another embodiment, 0.6 to 0.95 g / ml.

[0028] The shape of the fluoride compound remover is not limited. The fluoride compound remover can be in any shape as long as sufficient removal capacity and strength for fluoride compounds are obtained. In one embodiment, the fluoride compound remover may be irregular in shape, such as crushed. In another embodiment, the fluoride compound remover is selected from the group consisting of granular, cylindrical, spherical, irregular, and combinations thereof. In another embodiment, the fluoride compound remover is cylindrical. In one embodiment, the cross-section of the fluoride compound remover is selected from the group consisting of circular, elliptical, polygonal, rectangular, polylobe, and combinations thereof.

[0029] The size of the fluoride compound remover is not particularly limited. The size of the fluoride compound remover can be any size as long as it can sufficiently remove the fluoride compound and obtain sufficient strength. The diameter of the cross-section of the fluoride compound remover is 0.5 to 10.0 mm in one embodiment, 0.6 to 8.7 mm in another embodiment, 0.7 to 7.2 mm in another embodiment, 0.8 to 6.5 mm in another embodiment, 1.0 to 5.7 mm in another embodiment, 1.0 to 4.8 mm in another embodiment, 1.1 to 3.2 mm in another embodiment, and 1.2 to 2.5 mm in another embodiment. When the cross-section is elliptical or rectangular, the diameter refers to the major axis. When the cross-section is polylobe or polygonal, the diameter refers to the diameter of the circumscribed circle.

[0030] The length of the fluoride compound remover is 1.0 to 30.0 mm in one embodiment, 2.2 to 24.0 mm in another embodiment, 2.7 to 19.0 mm in another embodiment, 3.2 to 14.0 mm in another embodiment, 3.8 to 12.0 mm in another embodiment, 4.2 to 10.0 mm in another embodiment, and 5.0 to 8.0 mm in another embodiment.

[0031] If the fluoride compound remover is irregular in shape, such as in a crushed form, it can be sorted to some extent by using a sieve. In one embodiment, if the material is irregular in shape, a sieve with an opening of approximately 0.8 to 6 mm can be used.

[0032] The above-mentioned method for producing the fluoride compound remover includes the steps of mixing a calcium compound with an iron compound or a manganese compound, and drying the mixture.

[0033] In one embodiment, the calcium compound is selected from the group consisting of calcium carbonate, calcium oxide, calcium hydroxide, calcium sulfate, calcium phosphate, calcium hydride, and combinations thereof. In another embodiment, the calcium compound is selected from the group consisting of calcium carbonate, calcium oxide, calcium hydroxide, and combinations thereof. In yet another embodiment, the calcium compound includes calcium hydroxide. In yet another embodiment, the calcium compound is calcium hydroxide.

[0034] In one embodiment, the iron compound is selected from the group consisting of iron oxide, iron hydroxide, and mixtures thereof. In another embodiment, the iron compound comprises iron oxide or iron hydroxide. In yet another embodiment, the iron compound comprises iron oxide and iron hydroxide. In yet another embodiment, the iron compound is iron oxide and iron hydroxide. In yet another embodiment, the iron compound comprises iron oxide.

[0035] The calcium compound and iron compound or manganese compound are mixed with water to obtain a mixture. The amount of water can be adjusted to suit molding or depending on the type of raw material. In one embodiment, the amount of water to be mixed is 2 to 50 parts by weight per 100 parts by weight of the materials other than water.

[0036] In one embodiment, the above manufacturing method may include a step of molding the obtained mixture. In one embodiment, the manufacturing method includes a step of extruding the mixture using a matrix having holes of a desired shape before the drying step, or a step of crushing the dried mixture and molding it into an amorphous shape after the drying step. In another embodiment, the manufacturing method includes a step of extruding the mixture using a matrix having holes of a desired shape before the drying step.

[0037] In the drying process of the mixture, the drying temperature is 60 to 200°C in one embodiment, 70 to 170°C in another embodiment, and 100 to 150°C in yet another embodiment. The drying time is 5 minutes to 5 hours in one embodiment, 10 minutes to 2 hours in another embodiment, and 1 to 5 hours in yet another embodiment.

[0038] The above drying process can be carried out using a dryer. Examples of dryers include mesh belt furnaces, rotary dryers, infrared heating dryers, and hot air circulating dryers.

[0039] A method for removing fluoride compounds includes the steps of placing the removal agent in a container and passing a gas containing the fluoride compound through the container.

[0040] In one embodiment, the container includes a fixed bed, a mobile bed, a fluidized bed, and a combination thereof for the removal agent. In another embodiment, the container includes a fixed bed for the removal agent. In one embodiment, the removal agent placed in the container can be a fixed bed, a mobile bed, a fluidized bed, or a combination thereof. In another embodiment, the removal agent placed in the container is a fixed bed.

[0041] For example, if the remover has dried out before use, water can be added to the remover before placing it in the container. In one embodiment, the process includes adding water to the remover. In one embodiment, the means for adding water is a spray.

[0042] In one embodiment, the removal agent placed inside the container can be a fixed bed, a moving bed, a fluidized bed, or a combination thereof. In another embodiment, the removal agent placed inside the container is a fixed bed.

[0043] In one embodiment, the container is a reaction vessel. In another embodiment, the container is a SUS reaction vessel, in yet another, a cylindrical reaction vessel, and in yet another, a cylindrical SUS reaction vessel. In one embodiment, the container has an inlet and an outlet for passing gas. In one embodiment, there may be multiple containers, and they can be connected by connecting the outlet of one container to the inlet of another. In one embodiment, the container has an inlet and an outlet for passing gas. In one embodiment, there may be multiple containers, and they can be connected by connecting the outlet of one container to the inlet of another container.

[0044] The concentration of the fluoride compound in the gas passed through the container containing the removal agent is 0.01 to 10 volume percent in one embodiment, 0.05 to 8 volume percent in another embodiment, 0.1 to 5 volume percent in another embodiment, 0.4 to 3 volume percent in another embodiment, 0.8 to 2.5 volume percent in another embodiment, 0.8 to 1.9 volume percent in another embodiment, and 0.8 to 1.5 volume percent in another embodiment.

[0045] In the process of passing a gas containing a fluoride compound through the container, the space velocity (GHSV) of the gas is, in one embodiment, 100 to 1000 h. -1 In another embodiment, 110-850h -1 In another embodiment, 120-650h -1 In another embodiment, 150-550h -1 In another embodiment, 180-250h -1 That is the case.

[0046] The temperature at which the gas and the removal agent are brought into contact is 10-70°C in one embodiment, 15-55°C in another embodiment, and 20-40°C in yet another embodiment. The temperature inside the container can be adjusted to obtain the desired temperature. In another embodiment, it is also possible to pass the gas through at room temperature without adjusting the temperature inside the container.

[0047] The pressure at which the gas and the removal agent are brought into contact is 500-2000 hPa in one embodiment, 600-1600 hPa in another embodiment, 700-1400 hPa in yet another embodiment, and 900-1300 hPa in yet another embodiment. The pressure inside the container can be adjusted to obtain the desired pressure. In another embodiment, it is also possible to pass the gas through at atmospheric pressure without adjusting the pressure inside the container.

[0048] In one embodiment, the removal agent can remove fluoride compounds from gas without supplying water from outside the reaction system. In one embodiment, this method for removing fluoride compounds from gas can be applied as a gas purification process, such as treating fluoride compound-containing gases in semiconductor manufacturing processes or exhaust gas treatment in chemical plants. [Examples]

[0049] Iron powder and calcium hydroxide powder were weighed and mixed using a kneader while adding water to obtain a mixture. The iron powder composition was Fe2O3:64%, SO3:15%, CaO:15%, MgO:4.0%, and MnO:2%. The mixture was molded into a cylindrical shape (cross-sectional diameter approximately 1.6 mm, length approximately 6 mm) using an extruder. The resulting molded body was dried in an electric dryer maintained at 120°C for 2 hours to obtain a remover. The composition of each remover obtained was analyzed using an X-ray fluorescence spectrometer (XRF, Rigaku Corporation, model ZSX Primus II). The results of the composition calculations as oxides of each component are shown in Table 1.

[0050] measurement The specific surface area (SA) of the removal agent was measured using a specific surface area analyzer (Macsorb® HMmodel-1201, MOUNTECH Co.Ltd.) based on nitrogen gas adsorption at liquid nitrogen temperature using the BET (single-point) method in accordance with JIS Z 8830:2013. The pore volume (PV) of the removal agent was measured using an automated mercury porosimeter (AutoPore V9620, Micromeritics). The measurement results for the specific surface area (SA) and pore volume (PV) are shown in Table 1.

[0051] The amount of PF3 gas removed by the above-mentioned removal agent was measured as follows. 20 ml of the removal agent was filled into a cylindrical SUS reactor (inner diameter 2.1 cm, height 500 mm) with an inlet at the top and an outlet at the bottom, and used as a fixed bed (bulk density: 0.75 g / ml). The removal agent used was sprayed with water and left for one day. The moisture content was approximately 14%. Nitrogen gas was introduced into the inlet of the reaction vessel at atmospheric pressure, room temperature (approximately 25°C), and space velocity (GHSV) 200 h. -1 The nitrogen gas was flowed as shown below. After 30 minutes, the nitrogen gas was switched to feed gas. The feed gas was nitrogen gas containing 1.0 volume% PF3. The exhaust gas from the outlet of the reaction vessel was measured using a suction-type gas detector (CDS-7, gas detection unit PS-7, Shin-Cosmos Electric Co., Ltd.), and the feed gas was continued to flow until 1 ppm of PF3 was detected. The time from when the feed gas was started to when PF3 was detected in the exhaust gas from the reactor outlet was measured and defined as the PF3 gas treatment time. The PF3 gas treatment time and the amount of PF3 gas removed calculated from GHSV are shown in Table 1.

[0052] [Table 1]

[0053] result The amount of PF3 gas removed was higher with the removal agent containing both calcium oxide and iron oxide (Examples 1-3) than with the removal agent that did not contain iron oxide (Comparative Example 1), but it was lower with the removal agent containing 14.6% by weight of calcium oxide and 59.1% by weight of iron oxide (Comparative Example 2).

[0054] Next, the amount of PF3 gas removed was investigated using a removal agent containing manganese (Mn) instead of iron (Fe). The removal agent was prepared in the same manner as in Example 1, except that the composition was as shown in Table 2. Manganese oxide powder (98% purity) with manganese oxide as the main component was used as the raw material for manganese. The composition calculated as an oxide, the specific surface area (SA), the pore volume (PV), and the amount of PF3 gas removed (L / kg) of the obtained removal agent were measured in the same manner as in Example 1. The results are shown in Table 2.

[0055] [Table 2]

[0056] result The amount of PF3 gas removed was also high with removal agents containing 51% and 72% by weight of MnO (Examples 4 and 5).

[0057] Further embodiments are as follows, and these embodiments can be combined in any number, as long as they do not contradict each other logically or technically.

[0058] Embodiment 1. A fluoride compound remover comprising 20 to 80% by weight of calcium (Ca) calculated as CaO, and 10 to 55% by weight of iron (Fe) calculated as Fe2O3, or 30 to 80% by weight of manganese (Mn) calculated as MnO, where the weight percentage is based on the weight of the fluoride compound remover.

[0059] Embodiment 2. The fluoride compound remover of Embodiment 1, wherein calcium (Ca) is partially or entirely present as calcium hydroxide.

[0060] Embodiment 3. A fluoride compound remover of Embodiment 1 or 2, wherein iron (Fe) is partially or entirely present as iron hydroxide and / or iron oxide, and manganese (Mn) is partially or entirely present as manganese oxide.

[0061] Embodiment 4. A fluoride compound remover according to any of Embodiments 1 to 3, containing 22 to 80% by weight of calcium (Ca) calculated as CaO.

[0062] Embodiment 5. A fluoride compound remover according to any of Embodiments 1 to 4, containing 25 to 80% by weight of calcium (Ca) calculated as CaO.

[0063] Embodiment 6. A fluoride compound remover according to any of Embodiments 1 to 4, containing 30 to 80% by weight of calcium (Ca) calculated as CaO.

[0064] Embodiment 7. A fluoride compound remover according to any of Embodiments 1 to 6, containing 20 to 55% by weight of iron (Fe) calculated as Fe2O3.

[0065] Embodiment 8. A fluoride compound remover according to any of Embodiments 1 to 6, containing 25 to 48% by weight of iron (Fe) calculated as Fe2O3.

[0066] Embodiment 9. A fluoride compound remover according to any of Embodiments 1 to 8, comprising 35 to 79% by weight of manganese (Mn) calculated as MnO.

[0067] Embodiment 10. A fluoride compound remover according to any of Embodiments 1 to 8, comprising 45 to 73% by weight of manganese (Mn) calculated as MnO.

[0068] Embodiment 11. A fluoride compound remover according to any of Embodiments 1 to 10, which does not contain potassium (K).

[0069] Embodiment 12. A fluoride compound remover according to Embodiments 1 to 11, which does not contain alkali metals.

[0070] Embodiment 13. A fluoride compound remover according to Embodiments 1 to 12, which is a trifluoride phosphoric acid (PF3) remover.

[0071] Embodiment 14. A fluoride compound remover comprising 30-70% by weight of calcium (Ca) calculated as CaO, and 30-55% by weight of iron (Fe) calculated as Fe2O3, or 48-62% by weight of manganese (Mn) calculated as MnO, where the weight percentage is based on the weight of the fluoride compound remover.

[0072] Embodiment 15. A fluoride compound remover comprising 30 to 80% by weight of calcium (Ca) calculated as CaO, and 20 to 55% by weight of iron (Fe) calculated as Fe2O3, where the weight percentage is based on the weight of the fluoride compound remover.

[0073] Embodiment 16. A fluoride compound remover comprising 30 to 70% by weight of calcium (Ca) calculated as CaO, and 30 to 55% by weight of iron (Fe) calculated as Fe2O3, where the weight percentage is based on the weight of the fluoride compound remover.

[0074] Embodiment 17. A fluoride compound remover comprising 38-52% by weight of calcium (Ca) calculated as CaO and 48-62% by weight of manganese (Mn) calculated as MnO, where the weight percentage is based on the weight of the fluoride compound remover.

[0075] Embodiment 18. A method for producing the fluoride compound remover of Embodiment 1, comprising the steps of mixing a calcium compound and an iron compound or a manganese compound, and drying the mixture.

[0076] Embodiment 19. A method for removing a fluoride compound, comprising the steps of placing the fluoride compound removal agent of Embodiment 1 into a container, and passing a gas containing the fluoride compound through the container.

[0077] Embodiment 20. The method of Embodiment 19, wherein the fluoride compound is trifluorinated phosphoric acid (PF3).

[0078] Embodiment 21. A trifluorinated phosphoric acid (PF3) remover comprising 20 to 80% by weight of calcium (Ca) calculated as CaO, and 10 to 55% by weight of iron (Fe) calculated as Fe2O3, or 30 to 80% by weight of manganese (Mn) calculated as MnO, where the weight percentage is based on the weight of the trifluorinated phosphoric acid (PF3) remover.

[0079] Embodiment 22. A method for producing the PF3 remover of Embodiment 21, comprising the steps of mixing a calcium compound and an iron compound or a manganese compound, and drying the mixture.

[0080] Embodiment 23. A method for removing PF3, comprising the steps of placing the PF3 removal agent of Embodiment 21 in a container, and passing a gas containing PF3 through the container.

Claims

1. Calculated as CaO, 20-80% by weight of calcium (Ca), and Fe ２ O ３ A fluoride compound remover containing 10 to 55% by weight of iron (Fe) calculated as or 30 to 80% by weight of manganese (MnO), where the weight percentage is based on the weight of the fluoride compound remover.

2. The fluoride compound remover according to claim 1, wherein calcium (Ca) is present in part or entirely as calcium hydroxide.

3. The fluoride compound remover according to claim 1, wherein iron (Fe) is present in part or all as iron hydroxide and / or iron oxide, and manganese (Mn) is present in part or all as manganese oxide.

4. A fluoride compound remover according to claim 1, comprising 30 to 80% by weight of calcium (Ca) calculated as CaO.

5. Fe ２ O ３ A fluoride compound remover according to claim 1, comprising 20 to 55% by weight of iron (Fe) as calculated.

6. A fluoride compound remover according to claim 1, comprising 35 to 79% by weight of manganese (Mn) calculated as MnO.

7. A fluoride compound remover according to claim 1, which does not contain potassium (K).

8. Phosphate trifluoride (PF ３ A fluorine compound remover according to claim 1, which is a remover.

9. A method for producing a fluoride compound remover according to claim 1, comprising the steps of mixing a calcium compound and an iron compound or a manganese compound, and drying the mixture.

10. A method for removing a fluoride compound, comprising the steps of placing the fluoride compound removal agent of claim 1 inside a container, and passing a gas containing the fluoride compound through the container.

11. The above fluoride compound is trifluoride phosphoric acid (PF ３ The method of claim 10, which is as follows.

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