IMS analysis device

Abstract

The present invention provides an IMS analyzer that can correct the peak position of the target component based on the position of the primary ion peak (RIP), even when analyzing a sample gas containing a high concentration of the target component. [Solution] The IMS analyzer of the present invention comprises an electron emission element, a detector, an analysis chamber housing the electron emission element and the detector, and a first gas injection unit, wherein the analysis chamber has a first region between the electron emission element and the detector, where a portion of the total amount of ions directly or indirectly generated by electrons emitted from the electron emission element moves toward the detector, and a second region where another portion of the total amount of ions moves toward the detector, the first region and the second region are isolated from each other, and the first gas injection unit is provided to inject a sample gas into the first region.

Claims

1. The system comprises an electron emission element, a detector, an analysis chamber housing the electron emission element and the detector, and a first gas injection unit. The analysis chamber has, between the electron emission element and the detector, a first region in which a portion of the total amount of ions directly or indirectly generated by electrons emitted from the electron emission element moves toward the detector, and a second region in which another portion of the total amount of ions moves toward the detector. The first and second regions are isolated from each other. An IMS analyzer characterized in that the first gas injection unit is provided to inject a sample gas into a first region.

2. The system further includes an isolation member that separates the first region and the second region. The IMS analyzer according to claim 1, wherein the isolation member is arranged to extend in a direction toward the detector from the electron emission element.

3. The IMS analyzer according to claim 1, further comprising an electrostatic gate electrode disposed between the electron emission element and the detector.

4. The IMS analyzer according to claim 1, further comprising a mesh electrode disposed between the electron emission element and the first and second regions.

5. The analysis chamber has an ionization region in which ions are generated directly or indirectly by electrons emitted from the electron emission element. The first region is located between the ionization region and the detector and is in communication with the ionization region. The IMS analyzer according to claim 1, wherein the second region is located between the ionization region and the detector and communicates with the ionization region.

6. Further equipped with a second gas injection section, The IMS analyzer according to claim 5, wherein the second gas injection unit is provided for injecting an ionizable gas into the ionization region.

7. The analysis chamber further comprises an exhaust section provided to discharge the gas inside the chamber, The IMS analyzer according to any one of claims 1 to 6, wherein the exhaust unit is arranged to discharge gas around the electron emission element.

8. The IMS analyzer according to claim 2, wherein the isolation member is movable or deformable to change the volume of the first region and the volume of the second region.

9. The IMS analyzer according to any one of claims 1 to 6, wherein the first gas injection unit has a valve provided to switch between a flow path for injecting the sample gas into a first region and a flow path for injecting the sample gas into both the first and second regions.

10. The analysis chamber further comprises a third gas injection unit provided for injecting drift gas, The IMS analyzer according to claim 3, wherein the third gas injection section is arranged such that the drift gas flows from the detector toward the electrostatic gate electrode.

11. It further comprises multiple electric field forming electrodes and a control unit, The analysis chamber has a drift region positioned between the electrostatic gate electrode and the detector. The control unit is provided to apply voltage to a plurality of electric field forming electrodes so that an electric field is formed in the drift region. The IMS analyzer according to claim 3, wherein the detector and the control unit are provided to measure the current waveform of a current that flows when ions generated in the region between the electron emission element and the electrostatic gate electrode pass through the drift region and reach the detector.

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