Liquid dispensing device, determination method, information processing device, program, substrate processing device, and article manufacturing method

Abstract

This technology provides advantages in identifying the cause of abnormalities in a body dispensing device. [Solution] The liquid dispensing device comprises a dispensing head that dispenses liquid from a plurality of nozzles, a plurality of piezoelectric elements arranged in each of the plurality of nozzles, a detection unit that detects a residual vibration signal corresponding to the distortion of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element for each of the plurality of piezoelectric elements, and a processing unit that processes the residual vibration signal detected for each of the plurality of piezoelectric elements. The processing unit performs a creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, and a determination step of determining an anomaly based on the feature map.

Description

Technical Field

[0001] The present invention relates to a liquid ejection device, a determination method, an information processing device, a program, a substrate processing device, and an article manufacturing method.

Background Art

[0002] In recent years, when manufacturing various functional elements, attempts have been made to form a pattern (patterning) or form a film by applying a material for a functional element onto a substrate using an inkjet device which is a substrate processing device. Patterning using an inkjet device has advantages such as high material use efficiency because on-demand patterning is possible, the manufacturing device can be relatively small because it is a non-vacuum process, and it can coat a large area at high speed.

[0003] By the way, there are various display methods for display devices, and in recent years, development of display devices using organic EL elements has been actively promoted. Since organic EL materials are expensive, an inkjet device with good material use efficiency and capable of coating a large area at high speed may be used.

[0004] Patterning by an inkjet device forms a pattern by ejecting a liquid from the nozzles of a discharge head. In such an inkjet device, in order to maintain productivity, a technique for measuring and maintaining the state of the discharge head is indispensable. Various methods for measuring the state of the discharge head have been proposed. For example, Patent Documents 1 and 2 describe a technique for diagnosing the state of a discharge head by applying a drive voltage to a diaphragm inside the discharge head and then diagnosing the state of the discharge head from the residual vibration generated thereafter.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

[0006] However, with conventional methods for measuring the condition of the discharge head, it was sometimes difficult to identify the cause of an abnormality, especially when multiple abnormalities occurred simultaneously.

[0007] The present invention provides an advantageous technique for identifying the cause of abnormalities in liquid dispensing devices. [Means for solving the problem]

[0008] According to one aspect of the present invention, a liquid dispensing device is provided, comprising: a dispensing head for dispensing liquid from a plurality of nozzles; a plurality of piezoelectric elements arranged in each of the plurality of nozzles; a detection unit for detecting a residual vibration signal corresponding to the distortion of the piezoelectric elements caused by pressure waves generated in conjunction with the operation of the piezoelectric elements for each of the plurality of piezoelectric elements; and a processing unit for processing the residual vibration signal detected for each of the plurality of piezoelectric elements, wherein the processing unit performs a creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles; and a determination step of determining an anomaly based on the feature map. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a technique that is advantageous in identifying the cause of abnormalities in a body dispensing device. [Brief explanation of the drawing]

[0010] [Figure 1] A diagram showing the configuration of an inkjet printer. [Figure 2] A diagram showing the tip ejection surface. [Figure 3] A diagram showing a block containing multiple chips. [Figure 4] A diagram showing an example of a liquid flow path inside a block. [Figure 5]A flowchart illustrating the nozzle abnormality detection process. [Figure 6] A figure showing examples of residual vibration waveforms and their characteristic features. [Figure 7] A diagram showing an example of a feature map. [Figure 8] A diagram illustrating the process of detecting anomalies based on feature maps. [Figure 9] A diagram showing an example of a control configuration for a discharge head. [Figure 10] A flowchart of the determination method. [Modes for carrying out the invention]

[0011] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, identical or similar configurations are given the same reference numerals, and redundant descriptions are omitted.

[0012] <First Embodiment> Referring to Figure 1, the configuration of an inkjet apparatus, which is a substrate processing apparatus, will be explained. An inkjet apparatus that can function as a substrate processing apparatus for processing substrates such as display panels and semiconductors applies material for functional elements onto a substrate to form patterns and films. However, the present invention is not limited to an inkjet apparatus. Figure 1(a) is a side view and Figure 1(b) is a top view, and for convenience only the main parts of the inkjet apparatus are shown. In the specification and drawings, as shown in Figure 1, directions are indicated in an XYZ coordinate system in which the plane parallel to the plane on which the substrate 1 is placed is the XY plane.

[0013] The inkjet device includes a substrate stage 2 that holds and moves a substrate 1 of a display panel, for example. The substrate 1 may be appropriately selected from glass substrates, plastic substrates, etc., depending on the product to be manufactured. The substrate 1 is typically a plate-shaped member, but is not limited to a specific shape as long as it can function as a substrate. For example, the substrate 1 may be a deformable film or a circular substrate. The substrate 1 on the substrate stage 2 has pixel areas 12 for arranging and forming a large number of display pixels by applying a liquid 3 (ink), which is a material for forming functional elements. A predetermined pattern related to device manufacturing is formed in the pixel areas 12. Alignment marks 13 used for positioning with the preceding process of the inkjet device are also formed around the pixel areas 12. In this specification, "ink" refers to a liquid used to form patterns or films on the substrate 1. In this specification, there are no particular limitations on the components of the ink, but for example, a liquid containing a solute and a solvent for forming an organic film can be used.

[0014] The substrate stage 2 has the function of moving in the X and Y directions while holding the substrate 1. By synchronously driving the Y-direction drive operation of the substrate stage 2 and the liquid discharge operation of the discharge head 4, a desired pattern can be formed on the substrate 1.

[0015] The ejection head 4 has a plurality of nozzles for ejecting the liquid 3. For example, when using three types of the liquid 3, as shown in FIG. 1(b), a configuration may be adopted in which a plurality of nozzles are arranged in three columns in the Y direction and different liquids can be filled for each column. Also, by arranging a plurality of nozzles in the X direction, the width of the pattern that can be formed can be changed by a single Y-direction driving operation of the substrate stage 2. For example, as shown in FIG. 1(b), if a plurality of nozzles are arranged to have a width equal to or greater than the X width of the pixel area 12, it becomes possible to form a pattern over the entire pixel area 12 by a single Y-direction driving operation of the substrate stage 2. Further, the internal flow path of the nozzle is filled with the liquid supplied from the liquid tank 6. Furthermore, inside the nozzle, a piezoelectric element (an ejection energy generating element) and a diaphragm that is displaced according to the displacement of the piezoelectric element are configured. The liquid ejection operation is performed by applying a voltage to this piezoelectric element and controlling the pressure inside the nozzle via the diaphragm.

[0016] The ejection control unit 5 can perform the ejection operation of the ejection head 4 and the abnormality determination of the nozzles. For example, the ejection control unit 5 performs an operation of ejecting the liquid based on the device pattern drawn on the substrate 1. Also, the ejection control unit 5 can function as a detection unit that detects the residual vibration signal for each of the plurality of piezoelectric elements. Further, the ejection control unit 5 can function as a processing unit that processes the residual vibration signals detected for each of the plurality of piezoelectric elements. For example, the ejection control unit 5 can measure the residual vibration of each of the plurality of nozzles and determine the state of each of the plurality of nozzles based on the measurement results.

[0017] The liquid tank 6 has a function of storing the liquid 3 and supplying the liquid 3 to the ejection head 4. For example, control is performed so that the pressure of the liquid 3 becomes constant in the ejection head 4. Also, when using a plurality of types of liquids in the inkjet device, a plurality of liquid tanks 6 may be prepared for each type of liquid.

[0018] The camera 9 measures the alignment mark 13. The height sensor 10 measures the height of the substrate 1.

[0019] The main control unit 11 comprehensively controls each component, including the substrate stage 2, camera 9, height sensor 10, and ejection control unit 5, to perform patterning on the substrate 1. For example, the main control unit 11 holds the substrate 1, which has been transported from outside the inkjet device, on the substrate stage 2. Then, the main control unit 11 has the height sensor 10 measure the height position of the substrate 1 and controls the substrate stage 2 to perform focus adjustment (alignment in the Z direction) based on the measurement result. Next, the main control unit 11 measures the alignment mark 13 using the camera 9 and controls the substrate stage 2 to align the ejection head 4 and the substrate 1 in the XY direction based on the measurement result. After alignment is complete, the main control unit 11 drives the substrate stage 2 in the Y direction in synchronization with the operation of the ejection head 4 so that a device pattern is formed on the substrate.

[0020] The dispensing control unit 5 and the main control unit 11 may be composed of, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), a general-purpose computer with a program installed, or a combination of all or part thereof. The dispensing control unit 5 and the main control unit 11 may be an information processing device located inside the liquid dispensing device, or an information processing device located outside the liquid dispensing device. The information processing device may include a processing unit, a display unit, an input unit, etc. The processing unit may be composed of, for example, a computer including a processor such as a CPU (Central Processing Unit), memory, and a GPU (Graphical Processing Unit).

[0021] In one example, multiple ejection heads 4 are arranged in the X and Y directions, and by individually controlling the ejection of ink droplets from each ejection head, ink with a desired distribution can be applied to the pixel area 12 on the substrate 1. Figure 9 shows an example of the control configuration of the ejection head 4. The ejection head 4 may include multiple nozzles 15. Each of the multiple nozzles 15 constitutes an ejection element including a piezoelectric element (ejection energy generating element). Each of the multiple nozzles 15 is connected to a driver D that drives the piezoelectric element via a flexible cable F. The driver D is connected to an ejection control unit 5 (processing unit). The ejection control unit 5 sends a command to the driver D to eject droplets from each nozzle. The driver D applies a drive signal to the piezoelectric element of the nozzle in response to the received command and executes the ejection process. The ejection control unit 5 can also send a command (recovery processing command) to the driver D to recover an abnormal nozzle among the multiple nozzles 15. In this case, the driver D applies a drive signal to the piezoelectric element of the abnormal nozzle in response to the received command and executes the recovery process. Note that the functions of the ejection control unit 5 may be realized by the main control unit 11.

[0022] During the formation or standby phase of a dot pattern using multiple nozzles 15, problems such as poor or turbulent ejection may occur due to foreign matter adhering to the flow path or near the nozzle opening, ink viscosity increase or sedimentation of ink components, electrophoretic phenomena, etc. These problems are caused by the combined action of various factors, including ejection time, flow path shape, distance from the electrode, and non-dispense time. The degree of the problem may vary from nozzle to nozzle.

[0023] A recovery unit (not shown) may be used to recover from foam buildup or severe nozzle clogging that cannot be resolved by pre-discharge. However, recovery using the recovery unit requires a long time and uses a very large amount of ink. Therefore, it is preferable that recovery using the recovery unit be performed only at timings set as part of regular maintenance. In normal operation, pre-discharge may be performed from multiple nozzles 15 as needed to restore a malfunctioning nozzle to a normal state.

[0024] The ejection failure status of each nozzle can be confirmed using a related signal (residual signal) measured after the generation of a specific pressure wave. Specifically, the ejection control unit 5 activates the piezoelectric element by applying a specific pulse signal to the piezoelectric element via the driver D. A specific pressure wave is generated in the piezoelectric element as it is activated. If the piezoelectric element is functioning correctly, the pressure wave will cause ink to drip from the nozzle. At this time, the pressure wave generated in the piezoelectric element causes distortion in the diaphragm, and an electrical signal corresponding to that distortion (residual vibration) is generated. This electrical signal is called the "residual vibration signal". The ejection control unit 5 can determine the ejection failure status of the piezoelectric element based on the waveform of the detected residual vibration signal (residual vibration waveform).

[0025] The configuration of the discharge head 4 will be described in detail with reference to Figures 2 and 3. The multiple nozzles 15 are divided into multiple groups. In this embodiment, the discharge head 4 may include multiple tips, each having multiple nozzles. Here, the multiple groups correspond to multiple tips. Figure 2 shows the discharge surface of tip 14, which is one of the multiple tips. The size of the discharge surface of tip 14 is, for example, 10 to 20 mm in the Y direction and 20 to 30 mm in the X direction. Multiple nozzles 15 are arranged on its discharge surface. The number of multiple nozzles 15 can be several hundred or more. Inside each nozzle, a diaphragm and a liquid flow path are configured.

[0026] Figure 3 shows a block 16 (extrusion head block) consisting of multiple chips. Block 16 is a component that combines multiple chips into a single unit. Multiple chips (multiple groups) are divided to form multiple nozzle rows. In the example in Figure 3, eight chips 14a to 14h are arranged in block 16. Within a single block, the arrangement of multiple nozzles 15 must be equal in the X direction. Therefore, the arrangement of the multiple chips 14a to 14h can be, for example, a staggered arrangement as shown in Figure 3. In an inkjet device, increasing the width that can be patterned in a single Y-direction drive operation of the substrate stage 2 can be achieved by increasing the number of blocks in the X direction. For example, if the size of the substrate 1 is large, exceeding 2m, it is necessary to arrange about 10 to 20 blocks 16 in the X direction to pattern it in a single stage drive. Furthermore, if multiple types of liquids are used, this can be achieved by increasing the number of blocks 16 in the Y direction according to the type used.

[0027] Next, the liquid supply path from the liquid tank 6 to the tip 14 will be described. It is desirable that the liquid pressure inside the tip be uniform across all nozzles in order to maintain a constant velocity and volume of liquid discharged from the nozzle 15. Therefore, the flow paths from the liquid tank 6 to each tip are connected in parallel.

[0028] Figure 4 shows an example of a liquid flow path inside block 16. A first flow path 17 is connected to the liquid tank 6. The flow paths from the first flow path 17 to each tip are arranged in a hierarchical manner with branched flow paths. The branched flow path includes a second flow path 27 that branches off from the first flow path 17 at branching point 17-1 toward tips 14a to 14d (first group) that constitute the first nozzle row of multiple tips arranged to form multiple nozzle rows. The branched flow path also includes a third flow path 28 that branches off from the first flow path 17 at branching point 17-1 toward tips 14e to 14h (second group) that constitute the second nozzle row of multiple tips. Furthermore, the branched flow path includes a fourth flow path 29 that branches off from the second flow path 27 at branching point 17-4 toward each of the tips 14a to 14d (first group). Furthermore, the branched channel includes a fifth channel 30 that branches off from the third channel 28 at branching point 17-2 toward each of the tips 14e to 14h (second group of multiple groups). The liquid discharged from tip 14 is returned to the liquid tank 6 via the liquid channel 18.

[0029] Next, we will explain the causes of abnormalities that can be detected by the residual vibration waveform of the nozzle, and how to recover from them.

[0030] One of the causes of the malfunction is the introduction of air bubbles into the liquid flow path. When air bubbles are introduced into the liquid, they can accumulate in areas where the flow within the flow path tends to stagnate. For example, if the bubbles accumulate near a nozzle, the effect will be limited to that nozzle and its surroundings. On the other hand, if the bubbles accumulate upstream in the flow path, the effect can extend to all nozzles downstream. For example, in the liquid flow path shown in Figure 4, if bubbles accumulate between branching points 17-2 and 17-3, it will affect the nozzles in tips 14g and 14h.

[0031] One method for recovering air bubbles that have entered the liquid flow path is to use a degassing filter. By passing liquid 3 through a degassing filter, the air bubbles contained in liquid 3 can be removed. In an inkjet device, the degassing filter is placed in the circulation path of liquid 3. In addition, increasing the circulation flow rate of liquid 3 can shorten the recovery time of liquid 3 that has become contaminated with air bubbles.

[0032] Another cause of the malfunction is the adhesion of foreign matter to the nozzle opening. This occurs when the liquid 3 discharged from the nozzle 15 floats as a mist in the space between the discharge head 4 and the substrate 1, and adheres to the nozzle opening. The frequency of these occurrences varies depending on how often the nozzle is used and the airflow environment between the discharge head 4 and the substrate 1.

[0033] As a means of removing foreign matter adhering to the nozzle opening, for example, there are methods such as wiping the nozzle surface with a wiper or moving a suction pump to the nozzle surface to suck up the foreign matter. In an inkjet device, in order to achieve this, the ejection head 4 is equipped with a mechanism that can be driven in the Z direction (Z drive mechanism). This Z drive mechanism makes it possible to create a space between the ejection head 4 and the substrate stage 2, making it possible to move the wiper or suction pump to the nozzle surface.

[0034] Another contributing factor to the malfunction is a change in liquid concentration. The liquid flow path is not a completely sealed structure; for example, the liquid is exposed to the outside air through the nozzle opening, causing water to escape and the concentration to increase. If the liquid is constantly circulating from the liquid tank 6 to the discharge head 4, the effects of changes in liquid concentration can extend to the entire nozzle connected to the liquid tank.

[0035] One way to compensate for the effects of changes in liquid concentration is to adjust the voltage that drives the diaphragm in the nozzle. When the concentration of liquid 3 increases, its viscosity increases, and the velocity of the droplets discharged from nozzle 15 slows down. On the other hand, the velocity of the droplets changes depending on the driving voltage applied to the nozzle's diaphragm. Therefore, even if the viscosity of the liquid changes, it is possible to eliminate the effect by correcting the driving voltage of the diaphragm.

[0036] Other contributing factors to the malfunction include fluctuations in liquid flow rate and pressure. Inkjet printers are designed to maintain a constant liquid pressure in the liquid tank 6 to keep the liquid pressure inside the ejection head chip constant, and to ensure uniform pressure loss from the liquid tank to each nozzle. Therefore, if a malfunction occurs in the pressure control of the liquid tank 6, the liquid pressure inside all ejection head chips will be affected. In addition, if a malfunction such as tube deterioration occurs in the liquid flow path from the liquid tank 6 to each nozzle, the nozzles downstream are particularly susceptible to the same problem.

[0037] So far, I have given examples of four factors that can cause abnormalities, but these are not the only factors that can cause abnormalities.

[0038] Since the various factors causing the abnormalities described above are independent of each other, it is possible for an inkjet device to experience an abnormal state where multiple factors occur simultaneously. When multiple factors occur simultaneously, their effects are added together in the residual vibration waveform, making it difficult to identify the cause of the abnormality.

[0039] Figure 5 is a flowchart showing the nozzle abnormality detection process in the embodiment.

[0040] In S101, the discharge control unit 5 measures the residual vibration waveform. The discharge control unit 5 applies a drive voltage to the piezoelectric elements configured in each nozzle of the discharge head 4, and then releases the drive voltage. After the drive voltage is released, the inside of the nozzle attempts to return to the state before the drive voltage was applied. The vibration of the diaphragm at this time is measured. Figure 6 shows an example of the residual vibration waveform and its characteristics. The residual vibration waveform shown in Figure 6 is a standard waveform that indicates a nozzle capable of stable discharge, and if a vibration waveform equivalent to this is obtained, the nozzle is judged to be in a normal state. As the nozzle's discharge malfunction progresses, the characteristics of this waveform change.

[0041] In S102, the discharge control unit 5 detects the characteristics (feature quantities) of the residual vibration waveform. Specific examples of these characteristics include, for example, at least one of the amplitude, period, and damping rate, as shown in Figure 6.

[0042] In S103, the discharge control unit 5 creates a feature map showing the distribution of features of the residual vibration signal based on the characteristics detected in S102. Figure 7 shows an example of the feature map of block 16 shown in Figure 3. For simplicity of explanation, Figure 7 shows an example of only one block. In reality, the feature map is created for all nozzles that make up the discharge head 4.

[0043] In Figure 7, the horizontal axis represents the X-coordinate and the vertical axis represents the Y-coordinate, which are the same as the coordinates of the block shown in Figure 3. The feature quantities detected in S102 based on the coordinate information of each nozzle are arranged in this coordinate system. The nozzle coordinate information may be derived from mechanical design information or obtained through measurements using a camera or similar device. This data is stored in advance, for example, in the memory of the discharge control unit 5.

[0044] Here, we will explain an example focusing on amplitude as a characteristic (feature). Let Aact(n,m) be the characteristic (amplitude) detected by S102 for a nozzle with X coordinate n and Y coordinate m. Let Aref(n,m) be the normal amplitude of the nozzle. In this case, the difference between the two (Aact(n,m)-Aref(n,m)) is entered into the corresponding coordinate in the residual vibration distribution (feature map). The normal amplitude is obtained, for example, from data measured after the ejection performance of ejection head 4 has been confirmed, or from data measured when the inkjet device as a whole satisfies the desired performance. By performing this difference calculation process for all nozzles, the residual vibration distribution (feature map) is created.

[0045] In the explanation above, we described an example focusing on amplitude as a characteristic, but the characteristics are not limited to amplitude alone. For example, in addition to amplitude, period and attenuation rate may also be detected, and distributions for amplitude, period, and attenuation rate may be created, and anomaly detection processing may be performed based on these.

[0046] In S104, the discharge control unit 5 performs signal processing on the residual vibration distribution created in S103. Then, in S105, the discharge control unit 5 performs abnormality determination processing based on the results of the signal processing in S104. In one example, in S104, the discharge control unit 5 calculates the following values. • The average value (first mean) of the features of all groups (tips) in the feature map. • The average value of the features for each nozzle row in multiple nozzle rows (second mean). • The average value (third mean) of the features for each chip (group) across multiple chips (multiple groups). In S105, an abnormality is determined based on these values ​​calculated in S104.

[0047] In S104, for example, considering the characteristic that abnormal conditions detectable from residual vibration waveforms correlate with the liquid flow path, a process may be performed to separate the change in feature quantities for each flow path. This process of separating the change in feature quantities for each flow path can be performed by calculating the deviation from the mean value. For example, the second mean value and the third mean value may be calculated based on the deviation relative to the first mean value and the second mean value, respectively. Figure 8 is a diagram showing the residual vibration distribution separated by the change in characteristics for each liquid flow path.

[0048] Figure 8(a) shows the common component of all nozzles in the feature map obtained in S103 (Figure 7), i.e., the average value (first mean) of the features of all nozzles. Region 19-1 in Figure 8(a) shows the common component of all nozzles.

[0049] Subsequently, the discharge control unit 5 calculates a second mean value, which is the average value of the feature quantities for each nozzle row in the multiple nozzle rows. The second mean value may also be the average of the deviations from the first mean value (Figure 8(a)) for each feature quantity in the feature map (Figure 7). In this case, the average of the deviations of the multiple nozzles constituting the first multiple groups (corresponding to tips 14a to 14d) in the first nozzle row, and the average of the deviations of the multiple nozzles constituting the second multiple groups (corresponding to tips 14e to 14h) in the second nozzle row are calculated as the second mean value. Figure 8(b) is a map showing the calculated second mean values ​​for region 19-2 and region 19-3.

[0050] Next, the discharge control unit 5 calculates a third mean value, which is the average value of the feature quantities for each tip. For example, the discharge control unit 5 obtains a deviation by subtracting the average value of the characteristics of all nozzles shown in Figure 8(a) from the residual vibration distribution (Figure 7) obtained in S103. Then, the discharge control unit 5 further obtains a deviation by subtracting the common component (average) for each nozzle row shown in Figure 8(b). After that, the discharge control unit takes the average of the deviations for each tip. Figure 8(c) shows the average (third mean value) for each tip obtained in this way, and regions 19-4 to 19-11 show the residual vibration distribution with the common component for each tip extracted.

[0051] Figure 8(d) shows the final deviation of each feature from the first to third mean values ​​obtained above (feature maps with feature variations separated).

[0052] In S105, the discharge control unit 5 performs an abnormality determination process based on the results of the signal processing in S104. For example, it performs an error determination process by comparing the characteristics shown in distributions 19-1 to 19-11 and Figure 8(d) with a pre-set threshold value. The threshold value may be a value set for each distribution to be compared, or it may be a common value.

[0053] If the overall average value (first average value) shown in region 19-1 exceeds the first threshold, it is determined that there is a pressure control abnormality in liquid tank 6, or an abnormality in the flow path (first flow path) between liquid tank 6 and branch point 17-1, or an abnormality in the concentration of liquid 3.

[0054] Consider the case where the average value (second average value) of the feature quantities of multiple nozzles constituting the first group of tips 14a to 14d in region 19-2 (first nozzle row) of Figure 8(b) exceeds a predetermined threshold (second threshold). In this case, the discharge control unit 5 determines that there is an abnormality in the flow path (second flow path) between branching point 17-1 and branching point 17-4.

[0055] Furthermore, consider the case where the average value (second average value) of the feature quantities of multiple nozzles constituting the tips 14e~14h (second group) in region 19-3 (second nozzle row) of Figure 8(b) exceeds the second threshold. In this case, the discharge control unit 5 determines that there is an abnormality in the flow path (third flow path) between branching point 17-1 and branching point 17-2.

[0056] Next, consider a case where, among the first multiple groups constituting the first nozzle row (corresponding to regions 19-4, 19-6, 19-8, and 19-10), there is a group where the average value (third mean) of the feature quantities (or deviations) within the group exceeds the third threshold. In this case, the discharge control unit 5 determines that there is an abnormality in the liquid input section to that group, or an abnormality downstream of branching point 17-4 (fourth flow path).

[0057] Furthermore, consider a case where, among the second multiple groups constituting the second nozzle row (corresponding to regions 19-5, 19-7, 19-9, and 19-11), there is a group where the average value (third mean value) of the feature quantities (or deviations) within the group exceeds the third threshold. In this case, the discharge control unit 5 determines that there is an abnormality in the liquid input section to that group, or an abnormality downstream of branching point 17-2 (fifth flow path).

[0058] In the feature map (or map showing deviations) shown in Figure 8(d), if there is a group where the feature (or deviation) exceeds the fourth threshold, the discharge control unit 5 determines that there is an abnormality in the flow path inside that group, or an abnormality due to foreign matter adhering to the nozzle of that group. Abnormalities in the flow path include the mixing of air bubbles into the liquid flow path, the mixing of foreign matter, and pressure loss fluctuations due to aging deterioration of tubes, etc.

[0059] Figure 10 shows a flowchart of the determination method executed by the processor (e.g., the discharge control unit 5) of the information processing device that determines abnormalities in the liquid discharge device. In S201 (acquisition process), the processor acquires a residual vibration signal for each of the multiple piezoelectric elements, corresponding to the strain of the piezoelectric element caused by the pressure wave generated as the piezoelectric element operates. In S202 (creation process), the processor creates a feature map showing the distribution of feature quantities of residual vibration signals across multiple nozzles. In S203 (the judgment process), the processor performs anomaly detection based on the feature map. In S204 (output process), the processor outputs the data of the abnormality detection result to, for example, a liquid dispensing device.

[0060] <Embodiment of Article Manufacturing Method> The article manufacturing method in the embodiment of the present invention is suitable for manufacturing articles such as display panels for organic ELs, microdevices such as semiconductor devices, and elements having fine structures. The article manufacturing method of this embodiment includes a first step of discharging a liquid onto a substrate using the above-mentioned liquid discharging apparatus to form a discharged liquid film, a second step of drying the substrate on which the discharged liquid film has been formed to form a dried film, and a third step of manufacturing an article from the substrate on which the dried film has been formed. Furthermore, such an article manufacturing method includes other well-known steps (such as firing, cooling, washing, oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The article manufacturing method of this embodiment is advantageous over conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0061] (Other embodiments) The present invention can also be realized by supplying a program that implements one or more of the functions of the above-described embodiments to a system or device via a network or storage medium, and by a process in which one or more processors in the computer of that system or device read and execute the program. It can also be realized by a circuit (e.g., an ASIC) that implements one or more functions.

[0062] The disclosures herein include at least the following technologies: (Item 1) A dispensing head that dispenses liquid from multiple nozzles, A plurality of piezoelectric elements are arranged in each of the plurality of nozzles, A detection unit detects a residual vibration signal corresponding to the strain of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements. The system includes a processing unit that processes the residual vibration signal detected for each of the plurality of piezoelectric elements, The aforementioned processing unit, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, A determination step that determines anomalies based on the aforementioned feature map, A liquid dispensing device characterized by performing the following. (Item 2) The aforementioned multiple nozzles are divided into multiple groups, The aforementioned multiple groups are divided to constitute multiple nozzle rows, In the determination step, the processing unit determines whether an anomaly exists based on a first mean value, which is the average value of the features of all groups in the feature map; a second mean value, which is the average value of the features of each nozzle row in the plurality of nozzle rows; and a third mean value, which is the average value of the features of each group in the plurality of groups. A liquid dispensing device as described in item 1, characterized by the features described herein. (Item 3) A liquid tank for storing liquids, A first flow path connected to the liquid tank, The system further includes branch channels that branch hierarchically from the first channel toward each of the aforementioned multiple groups, In the determination step, the processing unit determines that if the first average value exceeds the first threshold value, there is an abnormality in the liquid tank, or an abnormality in the first flow path, or an abnormality in the liquid supplied from the liquid tank. A liquid dispensing device according to item 2, characterized in that it is a liquid dispensing device. (Item 4) The branched channel includes a second channel that branches from the first channel toward a first plurality of groups constituting a first nozzle row among the plurality of nozzle rows, and a third channel that branches from the first channel toward a second plurality of groups constituting a second nozzle row among the plurality of nozzle rows. In the determination step, the processing unit determines that there is an abnormality in the second flow path if the second average value in the first nozzle row exceeds the second threshold, and determines that there is an abnormality in the third flow path if the second average value in the second nozzle row exceeds the second threshold. A liquid dispensing device as described in item 3, characterized by the above. (Item 5) The branched channel includes a fourth channel branching from the second channel toward each of the first plurality of groups, and a fifth channel branching from the third channel toward each of the second plurality of groups. In the determination step, the processing unit determines that if there is a group among the first plurality of groups whose third average value exceeds the third threshold, there is an abnormality in the liquid input section to that group or an abnormality in the fourth flow path, and if there is a group among the second plurality of groups whose third average value exceeds the third threshold, there is an abnormality in the liquid input section to that group or an abnormality in the fifth flow path. A liquid dispensing device as described in item 4, characterized by the features described herein. (Item 6) In the determination step, if there is a group where the feature quantity exceeds the fourth threshold, the processing unit determines that this is due to an abnormality in the flow path inside the group or an abnormality due to foreign matter adhering to the nozzle of the group. A liquid dispensing device as described in item 5, characterized by the features described herein. (Item 7) The liquid dispensing device according to item 6, characterized in that the second mean and the third mean are calculated based on deviations relative to the first mean and the second mean, respectively, and the feature quantity compared with the fourth threshold is calculated based on deviations relative to the third mean. (Item 8) The liquid dispensing device according to any one of items 1 to 7, characterized in that the aforementioned feature quantity includes at least one of the amplitude, period, and attenuation rate of the residual vibration signal. (Item 9) A method for determining an abnormality in a liquid dispensing device having a dispensing head that dispenses liquid from multiple nozzles and multiple piezoelectric elements arranged in each of the multiple nozzles, A detection step of detecting a residual vibration signal corresponding to the strain of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, A determination step that determines anomalies based on the aforementioned feature map, A determination method characterized by having the following. (Item 10) An information processing device for determining abnormalities in a liquid dispensing device having a dispensing head that dispenses liquid from multiple nozzles and multiple piezoelectric elements arranged in each of the multiple nozzles, It has a processor, The aforementioned processor, An acquisition step of acquiring a residual vibration signal corresponding to the distortion of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, A determination step that performs an anomaly determination based on the feature map, An output process that outputs data of the result of the abnormality determination, An information processing device characterized by performing the following. (Item 11) A processor in an information processing device for determining abnormalities in a liquid dispensing device having a dispensing head that dispenses liquid from multiple nozzles and multiple piezoelectric elements arranged in each of the multiple nozzles, An acquisition step of acquiring a residual vibration signal corresponding to the strain of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, An output step which involves determining anomalies based on the feature map and outputting data of the result of the determination, A program characterized by causing the execution of a specific action. (Item 12) A substrate processing apparatus for processing substrates, A stage that holds and moves the substrate, A liquid dispensing device according to any one of items 1 to 8, which dispenses liquid onto the substrate held by the aforementioned stage, A substrate processing apparatus characterized by including (Item 13) A step of discharging liquid onto a substrate using the substrate processing apparatus described in item 12, A process of processing the substrate from which the liquid has been discharged, A method for manufacturing an article, characterized by including a processed substrate and manufacturing an article from the processed substrate.

[0063] The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of symbols]

[0064] 1: Substrate, 2: Substrate stage, 4: Discharge head, 5: Discharge control unit, 6: Liquid tank, 11: Main control unit

Claims

1. A dispensing head that dispenses liquid from multiple nozzles, A plurality of piezoelectric elements are arranged in each of the plurality of nozzles, A detection unit detects a residual vibration signal corresponding to the strain of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements. The system includes a processing unit that processes the residual vibration signal detected for each of the plurality of piezoelectric elements, The aforementioned processing unit, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, A determination step that determines anomalies based on the aforementioned feature map, A liquid dispensing device characterized by performing the following.

2. The aforementioned multiple nozzles are divided into multiple groups, The aforementioned multiple groups are divided to constitute multiple nozzle rows, In the determination step, the processing unit determines whether an anomaly exists based on a first mean value, which is the average value of the features of all groups in the feature map; a second mean value, which is the average value of the features of each nozzle row in the plurality of nozzle rows; and a third mean value, which is the average value of the features of each group in the plurality of groups. The liquid dispensing device according to feature 1.

3. A liquid tank for storing liquids, A first flow path connected to the liquid tank, The system further includes branching channels that branch hierarchically from the first channel toward each of the aforementioned multiple groups, In the determination step, the processing unit determines that if the first average value exceeds the first threshold value, there is an abnormality in the liquid tank, or an abnormality in the first flow path, or an abnormality in the liquid supplied from the liquid tank. The liquid dispensing device according to feature 2.

4. The branched channel includes a second channel that branches off from the first channel toward a first plurality of groups constituting a first nozzle row among the plurality of nozzle rows, and a third channel that branches off from the first channel toward a second plurality of groups constituting a second nozzle row among the plurality of nozzle rows. In the determination step, the processing unit determines that there is an abnormality in the second flow path if the second average value in the first nozzle row exceeds the second threshold, and determines that there is an abnormality in the third flow path if the second average value in the second nozzle row exceeds the second threshold. The liquid dispensing device according to feature 3.

5. The branched channel includes a fourth channel that branches off from the second channel toward each of the first plurality of groups, and a fifth channel that branches off from the third channel toward each of the second plurality of groups. In the determination step, the processing unit determines that if there is a group among the first plurality of groups whose third average value exceeds the third threshold, there is an abnormality in the liquid input section to that group or an abnormality in the fourth flow path, and if there is a group among the second plurality of groups whose third average value exceeds the third threshold, there is an abnormality in the liquid input section to that group or an abnormality in the fifth flow path. The liquid dispensing device according to feature 4.

6. In the determination step, if there is a group where the feature quantity exceeds the fourth threshold, the processing unit determines that this is due to an abnormality in the flow path inside the group or an abnormality due to foreign matter adhering to the nozzle of the group. The liquid dispensing device according to feature 5.

7. The liquid dispensing device according to claim 6, characterized in that the second mean and the third mean are calculated based on deviations with respect to the first mean and the second mean, respectively, and the feature quantity compared with the fourth threshold is calculated based on deviations with respect to the third mean.

8. The liquid dispensing apparatus according to claim 1, characterized in that the aforementioned feature quantity includes at least one of the amplitude, period, and attenuation rate of the residual vibration signal.

9. A method for determining an abnormality in a liquid dispensing device having a dispensing head that dispenses liquid from multiple nozzles and multiple piezoelectric elements arranged in each of the multiple nozzles, A detection step of detecting a residual vibration signal corresponding to the strain of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, A determination step that determines anomalies based on the aforementioned feature map, A determination method characterized by having the following.

10. An information processing device for determining abnormalities in a liquid dispensing device having a dispensing head that dispenses liquid from multiple nozzles and multiple piezoelectric elements arranged in each of the multiple nozzles, It has a processor, The aforementioned processor, An acquisition step of acquiring a residual vibration signal corresponding to the distortion of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, A determination step that performs an anomaly determination based on the feature map, An output process that outputs data of the result of the abnormality determination, An information processing device characterized by performing the following.

11. A processor in an information processing device for determining abnormalities in a liquid dispensing device having a dispensing head that dispenses liquid from multiple nozzles and multiple piezoelectric elements arranged in each of the multiple nozzles, An acquisition step of acquiring a residual vibration signal corresponding to the strain of the piezoelectric element caused by the pressure wave generated in conjunction with the operation of the piezoelectric element, for each of the plurality of piezoelectric elements, A creation step of creating a feature map showing the distribution of feature quantities of the residual vibration signal in the plurality of nozzles, An output step which involves determining anomalies based on the feature map and outputting data of the result of the determination, A program characterized by causing the execution of a specific action.

12. A substrate processing apparatus for processing substrates, A stage that holds and moves the substrate, A liquid dispensing device according to any one of claims 1 to 8, which dispenses liquid onto the substrate held by the stage, A substrate processing apparatus characterized by including

13. A first step of forming a liquid film on a substrate by discharging a liquid onto a substrate using the substrate processing apparatus described in claim 12, A second step involves drying the substrate on which the liquid film has been formed to form a dried film, A third step of manufacturing an article from the substrate on which the dried film has been formed, A method for manufacturing articles, characterized by having the following features.

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