Dynamic vibration absorber, stage device, lithography device, and method for manufacturing articles

Abstract

This technology offers advantages for quickly modifying the characteristics of dynamic absorbers. [Solution] The dynamic vibration absorber comprises a first member including an electromagnet, a second member coupled to an object to be damped, an elastic body connecting the first member and the second member, and a magnetic body arranged to be attracted by the electromagnet.

Description

Technical Field

[0001] The present invention relates to a dynamic vibration absorber, a stage device, a lithography apparatus, and an article manufacturing method.

Background Art

[0002] In a device having a movable part, for example, a lithography apparatus such as an exposure apparatus, a vehicle such as an automobile, a cooling device such as a refrigerator, etc., a dynamic vibration absorber can be used to reduce vibration. Patent Document 1 describes a vibration damping device that can be mounted on a vehicle equipped with an internal combustion engine or the like. The vibration damping device includes a housing having a substantially spherical internal space and a substantially spherical vibration member accommodated in the internal space. The inner wall of the housing and the surface layer of the vibration member are formed of an elastic material. The vibration member has a substantially spherical internal space, and the internal space of the vibration member is connected to an enclosed liquid supply device via a tube. The enclosed liquid supply device has a pump function for taking in and out a fluid with respect to the internal space of the vibration member. By increasing or decreasing the fluid in the internal space of the vibration member by the pump function, the mass of the vibrating part (the vibration member and the fluid therein) is changed, and thereby the vibration damping characteristics (the frequency range in which the vibration damping effect is exhibited) can be changed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a method of changing the mass of the vibrating part (the vibration member and the fluid therein) by increasing or decreasing the fluid in the internal space of the vibration member, since a corresponding time is required for the movement of the liquid, it is difficult to improve the responsiveness to a change command of the vibration damping characteristics.

[0005] The present invention aims to provide a technique advantageous for quickly changing the characteristics of a dynamic absorber. [Means for solving the problem]

[0006] One aspect of the present invention relates to a dynamic vibration absorber, the dynamic vibration absorber comprising a first member including an electromagnet, a second member coupled to an object to be damped, an elastic body connecting the first member and the second member, and a magnetic body arranged to be attracted by the electromagnet. [Effects of the Invention]

[0007] According to the present invention, an advantageous technique is provided for quickly changing the characteristics of a dynamic absorber. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic cross-sectional view showing the configuration of the dynamic vibration absorber of the first embodiment. [Figure 2] A schematic cross-sectional view showing the configuration of the dynamic vibration absorber of the first embodiment. [Figure 3] A schematic cross-sectional view showing the configuration of the dynamic vibration absorber of the first embodiment. [Figure 4] A schematic cross-sectional view showing the configuration of the dynamic vibration absorber of the second embodiment. [Figure 5] A schematic diagram showing the configuration of a stage device incorporating a dynamic vibration absorber according to the first or second embodiment. [Figure 6] Figure 5 illustrates the operation of the stage apparatus shown. [Figure 7] A schematic diagram showing the configuration of a lithography apparatus with an integrated stage device. [Modes for carrying out the invention]

[0009] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims. While the embodiments describe multiple features, not all of these features are essential to the invention, and the features may be combined in any way. Furthermore, in the attached drawings, identical or similar configurations are given the same reference numerals, and redundant descriptions are omitted.

[0010] Figure 1 is a schematic cross-sectional view showing the configuration of a dynamic vibration absorber DVA of the first embodiment. The dynamic vibration absorber DVA may comprise a first member 11 including an electromagnet 7, a second member 5 coupled to an object to be damped 1, an elastic body 4 connecting the first member 11 and the second member 5, and a magnetic body 3 arranged to be attracted by the electromagnet 7. Alternatively, the first member 11 may consist only of the electromagnet 7. The magnetic body 3 may include, for example, powder such as iron sand, or a plurality of plate members. The elastic body 4 may include, for example, a cylindrical portion 12 having a cylindrical shape, and the magnetic body 3 may be arranged inside the cylindrical portion 12. The elastic body 4 may be made of, for example, rubber. The cylindrical portion 12 has a first end E1 and a second end E2, the first member 11 may be arranged to close the first end E1, and the second member 5 may be arranged to close the second end E2. The first member 11 and the cylindrical portion 12 may be joined by, for example, an adhesive 6, but may also be joined by a mechanical connector such as a bolt. The second member 5 and the cylindrical portion 12 may be joined by, for example, an adhesive 6, but may also be joined by a mechanical connector such as a bolt. Typically, the first end E1 is the upper end of the cylindrical portion 12, and the second end E2 is the lower end of the cylindrical portion 12. The magnetic material 3 is placed between the first member 11 and the second member 5.

[0011] The dynamic vibration absorber DVA may include an accelerometer 8 for measuring the acceleration of the object to be damped 1, and the accelerometer 8 can be attached to the object to be damped 1. The dynamic vibration absorber DVA may also include a control unit 9 for controlling the electromagnet 7. The control unit 9 may be composed of, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), or an ASIC (Application Specific Integrated Circuit), or a general-purpose or dedicated computer with a program installed, or a combination of all or part of these. The dynamic vibration absorber DVA may include a driver 13 for driving the electromagnet 7. The control unit 9 may be configured, for example, to send a current command value to the driver 13. This current command value may be determined to suppress the vibration of the object to be damped 1. By adjusting the current command value supplied to the driver 13, the control unit 9 can adjust the magnitude of the magnetic force generated by the electromagnet 7, thereby adjusting the amount (mass) of magnetic material 3 attached to the electromagnet 7. The first member 11, which includes the electromagnet 7, and the magnetic material 3 attached to the electromagnet 7, function as a mass. The mass of the mass can be adjusted by adjusting the current command value supplied to the driver 13, thereby adjusting the characteristics of the dynamic vibration absorber DVA. The elastic material 4 functions as a spring. In other words, the dynamic vibration absorber DVA has a configuration in which a mass is coupled to the object to be damped 1 via a spring (elastic material 4).

[0012] Figures 1, 2, and 3 schematically illustrate three states in which the amount (mass) of magnetic material 3 attached to the electromagnet 7 differs from each other. Figure 1 shows the state in which the control unit 9 supplies a current command value C1 to the driver 13, and a portion of the magnetic material 3 with a mass M1, which is placed between the first member 11 and the second member 5, is attached to the electromagnet 7. Figure 2 shows the state in which the control unit 9 supplies a current command value C2 (>C1) to the driver 13, and a portion of the magnetic material 3 with a mass M2 (>M1), which is placed between the first member 11 and the second member 5, is attached to the electromagnet 7. Figure 3 shows the state in which the control unit 9 supplies a current command value C3 (>C2) to the driver 13, and a portion of the magnetic material 3 with a mass M3 (>M2), which is placed between the first member 11 and the second member 5, is attached to the electromagnet 7.

[0013] According to the first embodiment, the mass of the mass body can be adjusted by adjusting the current command value, so the characteristics of the dynamic vibration absorber DVA can be adjusted in a short time (i.e., with high responsiveness). Also, since magnetic materials generally have a higher specific gravity than fluids, the first embodiment is more advantageous for miniaturization than the method of adjusting the mass of the mass body by fluid.

[0014] The dynamic vibration absorber DVA of the second embodiment will be described below with reference to Figure 4. Matters not mentioned in relation to the dynamic vibration absorber DVA of the second embodiment may be the same as those of the first embodiment. The dynamic vibration absorber DVA may comprise a first member 11 including an electromagnet 7, a second member 5 coupled to the object to be damped 1, an elastic body 4 connecting the first member 11 and the second member 5, and a magnetic body 3 arranged to be attracted by the electromagnet 7. The magnetic body 3 may include, for example, powder such as iron sand, or a plurality of plate members. The second member 5 may include, for example, a cylindrical portion 51 having a first end E11 and a second end E12, and a closing portion 52 that closes the second end E12 of the cylindrical portion 51. The cylindrical portion 51 and the closing portion 52 may be integrally formed or may be coupled to each other by adhesive or mechanical joints. The elastic body 4 may be disposed inside the cylindrical portion 51. The elastic body 4 may be arranged to support at least a portion of the outer circumference of the first member 11. In other words, the elastic body 4 may be positioned to support the outer circumference of the first member 11 around its entire circumference. The magnetic body 3 may be positioned between the first member 11 and the closing portion 52. The elastic body 4 may be positioned inside the cylindrical portion 51 and supported by the cylindrical portion 51. The elastic body 4 may be bonded to the cylindrical portion 51 by, for example, an adhesive 6. The dynamic vibration absorber DVA may further include a lid member 15 that closes the first end E11 of the cylindrical portion 51. Typically, the first end E11 may be the upper end of the cylindrical portion 51, and the second end E12 may be the lower end of the cylindrical portion 51.

[0015] The dynamic vibration absorber DVA may include an accelerometer 8 for measuring the acceleration of the object to be damped 1, and the accelerometer 8 can be attached to the object to be damped 1. The dynamic vibration absorber DVA may also include a control unit 9 for controlling the electromagnet 7. The control unit 9 may be composed of, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), or an ASIC (Application Specific Integrated Circuit), or a general-purpose or dedicated computer with a program installed, or a combination of all or part of these. The dynamic vibration absorber DVA may include a driver 13 for driving the electromagnet 7. The control unit 9 may be configured, for example, to send a current command value to the driver 13. This current command value may be determined to suppress the vibration of the object to be damped 1. By adjusting the current command value supplied to the driver 13, the control unit 9 can adjust the magnitude of the magnetic force generated by the electromagnet 7, thereby adjusting the amount (mass) of magnetic material 3 attached to the electromagnet 7. The first member 11, which includes the electromagnet 7, and the magnetic material 3 attached to the electromagnet 7, function as a mass. The mass of the mass can be adjusted by adjusting the current command value supplied to the driver 13, thereby adjusting the characteristics of the dynamic vibration absorber DVA. The elastic material 4 functions as a spring. In other words, the dynamic vibration absorber DVA has a configuration in which a mass is coupled to the object to be damped 1 via a spring (elastic material 4).

[0016] Figure 5 shows a simulated configuration of a stage device 20 incorporating a dynamic vibration absorber 10 of a first or second embodiment. The stage device 20 may comprise a stage 21, an actuator 22 for driving the stage 21, and a support member 23 for supporting the actuator 22. The stage device 20 may also comprise a reaction force receiving counter 30 that counteracts at least a portion of the reaction force RF acting on the support member 23 as the actuator 22 drives the stage 21 with force F, and a dynamic vibration absorber 10 attached to the support member 23. The reaction force receiving counter 30 may include a counter actuator that applies a force to the support member 23 to counteract at least a portion of the reaction force RF acting on the support member 23 as the actuator 22 drives the stage 21. The stage device 20 includes a control unit 90, which may comprise, for example, a PLD such as an FPGA, or an ASIC, or a general-purpose or dedicated computer with a program installed, or a combination of all or part thereof. The aforementioned control unit 9 may be incorporated into the control unit 90.

[0017] FIG. 6 illustrates the operation of the stage device 20. The operation shown in FIG. 6 can be controlled by the control unit 90. In step S601, the control unit 90 sets a stage drive profile for driving the stage 21. The stage drive profile may include, for example, time-series data indicating the target position of the stage 21. In step S602, the control unit 90 sets (or changes) a current command value for the electromagnet 7 of the dynamic vibration absorber DVA. In step S603, the control unit 90 starts recording the output of the accelerometer 8. In step S604, the control unit 90 drives the stage 21 according to the stage drive profile (i.e., operates the actuator 22). In step S605, the control unit 90 ends the recording of the output of the accelerometer 8. In step S606, the control unit 90 analyzes the vibration of the support member 23 based on the output of the accelerometer 8 (acceleration waveform) recorded in steps S603 to S605. This analysis may include obtaining the frequency and amplitude of the vibration of the support member 23. In step S606, the control unit 90 determines whether the vibration of the support member 23 is within the allowable range based on the analysis result in step S606. If the vibration of the support member 23 is within the allowable range, the process proceeds to step S608; otherwise, the process returns to step S602. In step S602, the control unit 90 changes the current command value for the electromagnet 7 of the dynamic vibration absorber DVA and executes steps S603 to S606 again with the changed current command value. In step S608, the control unit 90 determines the latest current command value as the current command value for the electromagnet 7 of the dynamic vibration absorber DVA. In step S609, the control unit 90 drives the stage 21 according to the stage drive profile.

[0018] FIG. 7 schematically shows the configuration of a lithography apparatus 100 incorporating the stage device 20. In one aspect, the lithography apparatus 100 is configured to transfer a pattern onto a substrate 141, and the lithography apparatus 100 may include a stage device 20 configured to drive the substrate 141. In another aspect, the lithography apparatus 100 is configured to transfer the pattern of the original plate 121 onto the substrate 141, and the lithography apparatus 100 may include a stage device 20 configured to drive the original plate 121.

[0019] The lithography apparatus 100 can be used in a method of manufacturing an article such as a semiconductor device or a display device. Such a method of manufacturing an article can include a transfer step of transferring a pattern onto a substrate by the lithography apparatus, and a processing step of obtaining an article by processing the substrate that has undergone the transfer step. The processing step can include, for example, a film forming step, an etching step, a heat treatment step, a dicing step, a sealing step, and the like.

[0020] This specification and the drawings include the following disclosure. (Item 1) A first member including an electromagnet, A second member coupled to the vibration damping object, An elastic body that couples the first member and the second member, A magnetic body disposed to be attracted by the electromagnet, A dynamic vibration absorber characterized by comprising the above. (Item 2) The elastic body includes a cylindrical portion, The magnetic body is disposed inside the cylindrical portion, The dynamic vibration absorber according to Item 1, characterized by the above. (Item 3) The cylindrical portion has a first end and a second end, The first member is disposed so as to close the first end, The second member is disposed so as to close the second end, The dynamic vibration absorber according to Item 2, characterized by the above. (Item 4) The magnetic body is disposed between the first member and the second member, The dynamic vibration absorber according to Item 3, characterized by the above. (Item 5) The first end is the upper end of the cylindrical portion, and the second end is the lower end of the cylindrical portion, The dynamic vibration absorber according to Item 4, characterized by the above. (Item 6) The second member includes a cylindrical portion having a first end and a second end, and a closing portion that closes the second end of the cylindrical portion. The elastic body is arranged inside the cylindrical portion. A dynamic vibration absorber as described in item 1, characterized by the features described herein. (Item 7) The elastic body is arranged to support at least a portion of the outer periphery of the first member. A dynamic vibration absorber as described in item 6, characterized by the features described therein. (Item 8) The elastic body is arranged to support the outer circumference of the first member over its entire circumference. A dynamic vibration absorber as described in item 6, characterized by the features described therein. (Item 9) The elastic body is positioned inside the cylindrical portion and supported by the cylindrical portion. A dynamic vibration absorber as described in any one of items 6 to 8, characterized by the features described herein. (Item 10) The magnetic material is disposed between the first member and the closing portion. A dynamic vibration absorber as described in item 6, characterized by the features described therein. (Item 11) The system further includes a lid member that closes the first end of the cylindrical portion. A dynamic vibration absorber according to any one of items 6 to 10, characterized by the features described herein. (Item 12) The first end is the upper end of the cylindrical portion, and the second end is the lower end of the cylindrical portion. A dynamic vibration absorber according to any one of items 6 to 11, characterized by the features described herein. (Item 13) The aforementioned magnetic material includes powder, A dynamic vibration absorber according to any one of items 1 to 12, characterized by the features described herein. (Item 14) The magnetic material includes a plurality of plate members, A dynamic vibration absorber according to any one of items 1 to 12, characterized by the features described herein. (Item 15) The system further comprises a control unit for controlling the electromagnet. A dynamic vibration absorber according to any one of items 1 to 14, characterized by the features described herein. (Item 16) The system further includes an accelerometer for measuring the acceleration of the object to be vibration-damped, The control unit controls the electromagnet based on the output of the accelerometer. A dynamic vibration absorber as described in item 15, characterized by the features described herein. (Item 17) The stage and, An actuator that drives the aforementioned stage, A support member that supports the actuator, A reaction force receiving counter that cancels out at least a portion of the reaction force acting on the support member by driving the stage, A dynamic vibration absorber described in any one of items 1 to 15 attached to the support member, A stage device characterized by being equipped with the following features. (Item 18) A lithography apparatus for transferring patterns onto a substrate, A lithography apparatus characterized by comprising a stage device according to item 17, configured to drive the aforementioned substrate. (Item 19) A lithography apparatus for transferring the pattern of an original plate onto a substrate, A lithography apparatus characterized by comprising a stage device according to item 17, configured to drive the original plate. (Item 20) A transfer process in which a pattern is transferred to a substrate using the lithography apparatus described in item 18, A processing step to obtain an article by processing the substrate that has undergone the transfer step, A method for manufacturing articles, characterized by including the following: (Item 21) A transfer process in which a pattern is transferred to a substrate using the lithography apparatus described in item 19, A processing step to obtain an article by processing the substrate that has undergone the transfer step, A method for manufacturing articles, characterized by including the following: (others) The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention. [Explanation of Symbols]

[0021] 1: Object to be damped, 2: Magnetic material, 4: Elastic material, 7: Electromagnet, 8: Accelerometer, 11: First member, 12: Second member, DVA: Dynamic vibration absorber

Claims

1. A first component including an electromagnet, A second member that is coupled to the object to be damped, An elastic body connecting the first member and the second member, A magnetic body arranged to be attracted by the electromagnet, A dynamic vibration absorber characterized by being equipped with the following features.

2. The elastic body includes a cylindrical portion, The magnetic material is arranged inside the cylindrical portion. The dynamic vibration absorber according to feature 1.

3. The cylindrical portion has a first end and a second end, The first member is arranged to close the first end, The second member is arranged to close the second end, The dynamic vibration absorber according to feature 2.

4. The magnetic material is disposed between the first member and the second member. The dynamic vibration absorber according to feature 3.

5. The first end is the upper end of the cylindrical portion, and the second end is the lower end of the cylindrical portion. The dynamic vibration absorber according to feature 4.

6. The second member includes a cylindrical portion having a first end and a second end, and a closing portion that closes the second end of the cylindrical portion. The elastic body is arranged inside the cylindrical portion. The dynamic vibration absorber according to feature 1.

7. The elastic body is arranged to support at least a portion of the outer periphery of the first member. The dynamic vibration absorber according to feature 6.

8. The elastic body is arranged to support the outer circumference of the first member over its entire circumference. The dynamic vibration absorber according to feature 6.

9. The elastic body is positioned inside the cylindrical portion and supported by the cylindrical portion. The dynamic vibration absorber according to feature 6.

10. The magnetic material is disposed between the first member and the closing portion. The dynamic vibration absorber according to feature 6.

11. The system further includes a lid member that closes the first end of the cylindrical portion. The dynamic vibration absorber according to feature 6.

12. The first end is the upper end of the cylindrical portion, and the second end is the lower end of the cylindrical portion. The dynamic vibration absorber according to feature 6.

13. The aforementioned magnetic material includes powder, The dynamic vibration absorber according to feature 1.

14. The magnetic material includes a plurality of plate members, The dynamic vibration absorber according to feature 1.

15. The system further comprises a control unit for controlling the electromagnet. The dynamic vibration absorber according to feature 1.

16. The system further includes an accelerometer for measuring the acceleration of the object to be damped, The control unit controls the electromagnet based on the output of the accelerometer. The dynamic vibration absorber according to claim 15, characterized in that it is a dynamic vibration absorber.

17. The stage and, An actuator that drives the aforementioned stage, A support member that supports the actuator, A reaction force receiving counter that cancels out at least a portion of the reaction force acting on the support member by driving the stage, A dynamic vibration absorber according to any one of claims 1 to 15, attached to the support member, A stage device characterized by being equipped with the following features.

18. A lithography apparatus for transferring patterns onto a substrate, A lithography apparatus comprising a stage device according to claim 17, configured to drive the aforementioned substrate.

19. A lithography apparatus for transferring the pattern of an original plate onto a substrate, A lithography apparatus comprising a stage device according to claim 17, configured to drive the original plate.

20. A transfer step of transferring a pattern onto a substrate using the lithography apparatus described in claim 18, A processing step to obtain an article by processing the substrate that has undergone the transfer step, A method for manufacturing articles, characterized by including the following:

21. A transfer step of transferring a pattern onto a substrate using the lithography apparatus described in claim 19, A processing step to obtain an article by processing the substrate that has undergone the transfer step, A method for manufacturing articles, characterized by including the following:

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