Information processing apparatus, substrate processing apparatus, and information processing method

Abstract

To provide technology that supports the optimization of maintenance timing performed in multiple substrate processing devices. [Solution] The information processing device includes an information acquisition unit that acquires information related to preventive maintenance from multiple substrate processing devices equipped with a preventive maintenance management function, a prediction unit that predicts the maintenance timing for each of the multiple substrate processing devices based on the information related to preventive maintenance management, and a display control unit that displays the maintenance timings of the multiple substrate processing devices in a list on an output device.

Description

Technical Field

[0001] The present disclosure relates to an information processing apparatus, a substrate processing apparatus, and an information processing method.

Background Art

[0002] For example, in a substrate processing apparatus, maintenance was performed to replace parts that need to be replaced due to lifespan or failure. A technique for predicting parts of a substrate processing apparatus to be replaced in advance using a simulation model of the substrate processing apparatus has been conventionally known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a technique for assisting in optimizing maintenance timing performed on a plurality of substrate processing apparatuses.

Means for Solving the Problems

[0005] One aspect of the present disclosure includes an information acquisition unit that acquires information related to preventive maintenance management from a plurality of substrate processing apparatuses having a preventive maintenance management function, a prediction unit that predicts maintenance timing for each of the plurality of substrate processing apparatuses based on the information related to preventive maintenance management, and a display control unit that causes an output device to display a list of the maintenance timings of the plurality of substrate processing apparatuses.

Effects of the Invention

[0006] According to the present disclosure, it is possible to provide a technique for assisting in optimizing maintenance timing performed on a plurality of substrate processing apparatuses.

Brief Description of the Drawings

[0007] [Figure 1] This is a diagram showing an example of the configuration of the substrate processing system 1 according to this embodiment. [Figure 2] This is a hardware configuration diagram of an example of Computer 500. [Figure 3] This is a functional block diagram showing an example of a worker terminal 18 according to this embodiment. [Figure 4] This is a sequence diagram of an example of a process in which the operator terminal 18 according to this embodiment displays a list of maintenance times for multiple substrate processing devices 10. [Figure 5] This is an example image of a screen 1000 that displays a list of maintenance times for multiple substrate processing devices 10. [Figure 6] This is an example image of a screen 1100 that displays a list of maintenance times for multiple substrate processing devices 10. [Figure 7] This is a functional block diagram showing an example of a worker terminal 18 according to this embodiment. [Figure 8] This is a sequence diagram of an example of a process in which the operator terminal 18 according to this embodiment displays a list of maintenance times for multiple substrate processing devices 10. [Figure 9] This is an example image of a screen 1000 that displays a list of maintenance times for multiple substrate processing devices 10. [Figure 10] This is a functional block diagram showing an example of a worker terminal 18 according to this embodiment. [Modes for carrying out the invention]

[0008] The following description of this embodiment will be given with reference to the drawings.

[0009] [First Embodiment] <System Configuration> Figure 1 is a configuration diagram of an example of a substrate processing system 1 according to this embodiment. The substrate processing system 1 shown in Figure 1 includes a substrate processing device 10, a device controller 12, a server device 16, and an operator terminal 18. The substrate processing system 1 has multiple substrate processing devices 10.

[0010] The substrate processing apparatus 10 and the apparatus controller 12 are installed in the manufacturing plant 2. The server device 16 and the worker terminal 18 may be installed in the manufacturing plant 2 or elsewhere. The worker terminal 18 is a PC (Personal Computer) or smartphone, etc., operated by a worker such as the person in charge of maintenance of the substrate processing apparatus 10 or the person in charge of planning maintenance.

[0011] The substrate processing apparatus 10, apparatus controller 12, server device 16, and worker terminal 18 in Figure 1 are connected to each other via networks N1 and N2, such as the Internet or a LAN (Local Area Network).

[0012] The substrate processing apparatus 10 is an apparatus that performs processes such as film deposition, etching, or ashing, and processes substrates such as semiconductor wafers. The substrate processing apparatus 10 is, for example, a semiconductor manufacturing apparatus, a heat treatment apparatus, or a film deposition apparatus. The substrate processing apparatus 10 is a batch type or a single-wafer type, etc. In the following, as an example, the case in which the substrate processing apparatus 10 is a batch type film deposition apparatus will be described.

[0013] The substrate processing apparatus 10 receives control commands (setpoints) from the apparatus controller 12, for example, according to a recipe, and executes the process. The substrate processing apparatus 10 is equipped with multiple sensors, such as temperature sensors, pressure sensors, and gas flow sensors, which are used for detecting abnormalities or measuring the state of the apparatus.

[0014] The substrate processing apparatus 10 has a preventive maintenance management function. The preventive maintenance management function outputs an alarm, for example, when the film thickness, processing time, number of processing times, etc. accumulated by the execution of the process exceed a threshold value. An operator can determine the maintenance timing of the substrate processing apparatus 10 based on the output of the alarm.

[0015] Further, the substrate processing apparatus 10 may further have an abnormality detection prediction management function and a parts management function. The abnormality detection prediction management function monitors the performance degradation over time based on information measured by a plurality of sensors provided in the substrate processing apparatus 10, for example. The abnormality detection prediction management function outputs an alarm when an abnormality is detected or predicted. An operator can determine the maintenance timing of the substrate processing apparatus 10 based on the output of the alarm. Also, the parts management function monitors the timing for replacing parts of the substrate processing apparatus 10, for example. The parts management function outputs an alarm when the film thickness, processing time, number of processing times, number of operations of the parts, etc. accumulated by the execution of the process exceed a threshold value. An operator can determine the maintenance timing of the substrate processing apparatus 10 based on the output of the alarm.

[0016] The device controller 12 receives an instruction for the substrate processing apparatus 10 from an operator. The device controller 12 has a function of a man-machine interface that provides information regarding the substrate processing apparatus 10 to the operator. The device controller 12 outputs an alarm to the operator. The device controller 12 records information regarding preventive maintenance management, information regarding abnormality detection prediction management, and information regarding parts management in a storage unit inside and outside the device. Details of the information regarding preventive maintenance management, information regarding abnormality detection prediction management, and information regarding parts management will be described later. The device controller 12 can provide the information regarding preventive maintenance management, information regarding abnormality detection prediction management, and information regarding parts management to the server device 16 or the operator terminal 18.

[0017] The device controller 12 shown in FIG. 1 is provided for each substrate processing apparatus 10, but may be provided for each of a plurality of substrate processing apparatuses 10. The device controller 12 may be provided inside the housing of the substrate processing apparatus 10, or may be provided outside the housing.

[0018] The server device 16 or the operator terminal 18 may receive information regarding preventive maintenance management, information regarding anomaly detection prediction management, and information regarding parts management from a plurality of substrate processing apparatuses 10 in one or more manufacturing plants 2 and record the information in a storage unit.

[0019] The device controller 12, the server device 16, or the operator terminal 18 displays a list of the maintenance times of the plurality of substrate processing apparatuses 10 as described below. The device controller 12, the server device 16, or the operator terminal 18 may notify an operator of the maintenance times of the plurality of substrate processing apparatuses 10 by using, for example, a mail function or a chat function. The server device 16 and the operator terminal 18 may have a function of a man-machine interface that displays information regarding the substrate processing apparatus 10 and notifies the operator.

[0020] The device controller 12, the server device 16, and the operator terminal 18 are examples of an information processing apparatus according to the present embodiment. Note that the substrate processing system 1 shown in FIG. 1 is an example, and it is needless to say that there are various system configuration examples according to applications and purposes. The classification of devices such as the device controller 12, the server device 16, and the operator terminal 18 shown in FIG. 1 is an example. For example, various configurations are possible, such as a configuration in which at least two of the device controller 12, the server device 16, and the operator terminal 18 shown in the substrate processing system 1 in FIG. 1 are integrated, or a further divided configuration.

[0021] <Hardware Configuration> The device controller 12, the server device 16, and the operator terminal 18 shown in FIG. 1 may be realized by a computer having a hardware configuration shown in FIG. 2, for example. FIG. 2 is a hardware configuration diagram of an example of a computer 500.

[0022] The computer 500 in Figure 2 includes an input device 501, an output device 502, an external interface 503, RAM (Random Access Memory) 504, ROM (Read Only Memory) 505, a CPU (Central Processing Unit) 506, a communication interface 507, and an HDD (Hard Disk Drive) 508, all of which are interconnected via bus B. The input device 501 and output device 502 may be connected and used only when necessary.

[0023] The input device 501 is a keyboard, mouse, touch panel, etc., and is used by an operator to input operation signals. The output device 502 is a display, etc., which displays the processing results from the computer 500. The communication I / F 507 is an interface that connects the computer 500 to networks N1 and N2 shown in Figure 1. The HDD 508 is an example of a non-volatile storage device that stores programs and data. The CPU 506 is an example of a processor, and may have a device such as a GPU (Graphics Processing Unit).

[0024] External I / F 503 is an interface to an external device. Computer 500 can read from recording media 503a, such as an SD (Secure Digital) memory card, via External I / F 503. External I / F 503 may also be able to write to recording media 503a, such as an SD memory card, via External I / F 503.

[0025] ROM 505 is an example of a non-volatile semiconductor memory (storage device) that stores programs and data. RAM 504 is an example of a volatile semiconductor memory (storage device) that temporarily holds programs and data. CPU 506 is an arithmetic unit that controls and realizes the overall functions of the computer 500 by reading programs and data from storage devices such as ROM 505 or HDD 508 onto RAM 504 and executing processing.

[0026] The device controller 12, server device 16, and worker terminal 18 of the substrate processing system 1 shown in Figure 1 perform various functions by executing programs on the computer 500 shown in Figure 2.

[0027] <Determination of maintenance timing by the worker> The manufacturing plant 2 shown in Figure 1 is equipped with multiple substrate processing machines 10. The preventive maintenance management function outputs an alarm when, for example, the film thickness, processing time, or number of processing cycles accumulated through process execution exceeds a threshold. Operators can determine when to perform maintenance on the substrate processing machines 10 based on the alarm output. However, if there are many substrate processing machines 10 installed in the manufacturing plant 2, maintenance may be required for multiple machines 10 at the same time. If maintenance is required for multiple substrate processing machines 10 at the same time, there is a risk that downtime will increase due to a shortage of operators.

[0028] Furthermore, the substrate processing unit 10 has multiple maintenance items. Therefore, it was difficult to predict the maintenance timing for the multiple substrate processing units 10 installed in the manufacturing plant 2. Also, if multiple substrate processing units 10 performing the same process required maintenance at the same time, there was a risk that the production capacity of that process would temporarily decrease.

[0029] In this embodiment, for example, a function is provided to predict when a threshold will be reached based on the increasing trend of cumulative values ​​such as film thickness, processing time, or number of processing cycles accumulated during process execution, and the maintenance times for multiple substrate processing machines 10 are displayed in a list on the output device 502. The operator can view the maintenance times for multiple substrate processing machines 10 displayed in the list on the output device 502 and grasp the maintenance times for multiple substrate processing machines 10 at once. Furthermore, since the operator can easily grasp the overlap of maintenance times for multiple substrate processing machines 10, they can optimize the maintenance schedule by adjusting the maintenance times to reduce the downtime of multiple substrate processing machines 10.

[0030] <Functional Configuration> The following describes an example where the information processing device that displays the maintenance schedules of multiple board processing devices 10 in a list on the output device 502 is a worker terminal 18. Note that the information processing device that displays the maintenance schedules of multiple board processing devices 10 in a list on the output device 502 may be a device controller 12 or a server device 16.

[0031] The worker terminal 18 of the substrate processing system 1 according to this embodiment is implemented using a functional block as shown in Figure 3, for example. Figure 3 is a functional block diagram showing an example of the worker terminal 18 according to this embodiment. Note that the functional block diagram in Figure 3 omits the illustration of components that are not necessary for the explanation of this embodiment.

[0032] The worker terminal 18 in Figure 3 implements an information acquisition unit 200, a prediction unit 202, a data storage unit 204, a screen data generation unit 206, an input reception unit 208, a display control unit 210, and a notification unit 212 by executing a program for the worker terminal 18.

[0033] The information acquisition unit 200 acquires information related to preventive maintenance management from multiple substrate processing devices 10 equipped with preventive maintenance management functions. Hereinafter, this information related to preventive maintenance management will be referred to as PM management information. The information acquisition unit 200 may also acquire PM management information from the device controller 12 or the server device 16. The information acquisition unit 200 records the acquired PM management information in the data storage unit 204.

[0034] The prediction unit 202 predicts the maintenance timing for each of the multiple substrate processing devices 10 based on PM management information. For example, the prediction unit 202 predicts the timing of reaching a threshold for each of the multiple substrate processing devices 10 based on the increasing trend of cumulative values ​​such as film thickness, processing time, or number of processing cycles accumulated through process execution. The operator can determine the timing of reaching the predicted threshold as the maintenance timing for the substrate processing device 10. Alternatively, the prediction unit 202 may predict the maintenance timing for each of the multiple substrate processing devices 10 and each maintenance item based on PM management information.

[0035] The input reception unit 208 receives various operations from the operator. For example, operations received from the operator include launching an application and performing various operations on the launched application. The input reception unit 208 notifies the screen data generation unit 206 and the display control unit 210 of the content of the various operations received from the operator. The input reception unit 208 may also receive additions of maintenance items from the operator, specifying the maintenance period. The operator can also manually add maintenance items that do not require prediction of maintenance periods, such as scheduled maintenance.

[0036] The screen data generation unit 206 reads maintenance timing information recorded in the data storage unit 204 based on the content of various operations received from the operator. The screen data generation unit 206 generates screen data for screens described later, such as a screen that displays a list of maintenance timings for multiple substrate processing devices 10, and transmits it to the display control unit 210. The screen data generation unit 206 may also generate screen data for a screen that displays a list of maintenance timings for multiple substrate processing devices 10 and each maintenance item, and transmit it to the display control unit 210.

[0037] The display control unit 210 displays a screen on the output device 502, such as a screen that lists the maintenance times for multiple substrate processing devices 10, according to the screen data received from the screen data generation unit 206 and the content of various operations performed by the operator notified by the input reception unit 208. The display control unit 210 may also display a screen on the output device 502 that lists the maintenance times for multiple substrate processing devices 10 and each maintenance item, according to the screen data received from the screen data generation unit 206 and the content of various operations performed by the operator notified by the input reception unit 208.

[0038] The notification unit 212 reads the maintenance timing information recorded in the data storage unit 204 and notifies the operator of the maintenance timing of the multiple substrate processing devices 10, for example, using an email function or a chat function. Alternatively, the notification unit 212 may also notify the operator of the maintenance timing of the multiple substrate processing devices 10 using a human-machine interface function.

[0039] <Processing> Figure 4 is a sequence diagram of an example of a process in which the operator terminal 18 according to this embodiment displays a list of maintenance times for multiple substrate processing devices 10.

[0040] In step S10, the information acquisition unit 200 of the worker terminal 18 acquires PM management information from multiple substrate processing devices 10. The information acquisition unit 200 also records the acquired PM management information from the multiple substrate processing devices 10 in the data storage unit 204. The process in step S10 may be performed at predetermined intervals (for example, every week), or at the timing when the prediction unit 202 predicts the maintenance timing for the multiple substrate processing devices 10.

[0041] In step S12, the prediction unit 202 of the operator terminal 18 predicts the maintenance timing for each of the multiple substrate processing devices 10 based on the PM management information stored in the data storage unit 204. The prediction unit 202 predicts the timing (e.g., date and time) for each of the multiple substrate processing devices 10 to reach a threshold based on the increasing trend of cumulative values ​​such as film thickness, processing time, or number of processing cycles accumulated by the execution of the process. The prediction unit 202 records the predicted timing for reaching the threshold for each of the multiple substrate processing devices 10 in the data storage unit 204 as maintenance timing information indicating the maintenance timing for each substrate processing device 10.

[0042] In step S14, the input receiving unit 208 of the worker terminal 18 receives from the worker the addition of maintenance items for which a maintenance period is specified, such as maintenance items for regular maintenance that do not require prediction of the maintenance period. If there is no need to add maintenance items for which a maintenance period is specified, the process in step S14 is skipped.

[0043] In step S16, the screen data generation unit 206 of the worker terminal 18 reads the maintenance timing information recorded in the data storage unit 204 and generates screen data for a screen that displays a list of maintenance timings for multiple substrate processing devices 10.

[0044] In step S18, the display control unit 210 of the worker terminal 18 displays a screen on the output device 502 that lists the maintenance times of multiple substrate processing devices 10, according to the screen data generated by the screen data generation unit 206.

[0045] Figure 5 is an illustrative image of an example screen 1000 that displays a list of maintenance times for multiple substrate processing devices 10.

[0046] Screen 1000 visualizes the maintenance timings for multiple substrate processing machines 10 predicted by the prediction unit 202. Screen 1000 shows the remaining time until the predicted maintenance time in weeks, horizontally for each of the multiple substrate processing machines 10 and maintenance item. The position of the "★" displayed on Screen 1000 indicates the remaining time until the predicted maintenance time for each of the multiple substrate processing machines 10 and maintenance item.

[0047] For example, the substrate processing device 10 labeled "Device A" on screen 1000 indicates that there is "1 week" remaining until the predicted maintenance time. Similarly, the substrate processing device 10 labeled "Device B" on screen 1000 indicates that there are "5 weeks" remaining until the predicted maintenance time. On screen 1000, the position of "★" moves to the right as time progresses. "Weeks left 0" on screen 1000 indicates the predicted time to reach the threshold for each of the multiple substrate processing devices 10 and maintenance items, based on the increasing trend of cumulative values ​​such as film thickness, processing time, or number of processing cycles accumulated through process execution.

[0048] Furthermore, screen 1000 can switch between a "Summary" display that shows the remaining period until maintenance for each of the multiple board processing units 10, and a "Maintenance Item" display that shows the remaining period until maintenance for each of the multiple board processing units 10 and each maintenance item.

[0049] The "Summary" display shows, for example, the earliest predicted maintenance date for each maintenance item of a particular circuit board processing unit 10, or the remaining time until the maintenance date for a representative maintenance item.

[0050] The "Maintenance Items" display shows, for example, the remaining period until the predicted maintenance time for each maintenance item of a particular circuit board processing device 10. For example, the circuit board processing device 10 labeled "Device A" on screen 1000 in Figure 5 shows that the remaining period until the maintenance time for maintenance item "a" is "1 week," and the remaining period until the maintenance time for maintenance item "b" is "4 weeks."

[0051] By viewing screen 1000 in Figure 5, the operator can adjust the maintenance schedule to coincide with the maintenance of maintenance items "a" and "b" for the substrate processing apparatus 10, which is labeled "Apparatus A" on screen 1000, as the maintenance periods for these items are approaching. Therefore, the operator can optimize the maintenance schedule to reduce the downtime of the substrate processing apparatus 10.

[0052] Furthermore, by viewing screen 1000 in Figure 5, the operator can easily understand that the maintenance periods for the substrate processing devices 10 labeled "Device B" and "Device D" on screen 1000 overlap. Therefore, the operator can optimize the maintenance schedule by, for example, advancing the maintenance period for the substrate processing device 10 labeled "Device B" on screen 1000 by "two weeks," thereby preventing the maintenance periods of multiple substrate processing devices 10 from overlapping.

[0053] The screen 1000 in Figure 5 is an example, and may be, for example, the screen 1100 in Figure 6. Figure 6 is an illustrative diagram of an example of a screen 1100 that displays a list of maintenance times for multiple substrate processing devices 10. The screen 1100 in Figure 6 shows the time when each of the multiple substrate processing devices 10 will reach a threshold, predicted from the increasing trend of the cumulative film thickness accumulated by the execution of the process. In Figure 6, an example is shown where the threshold for the cumulative film thickness is "2900 nm". Also, in Figure 6, an example is shown where the film thickness increases by "5 nm" with one process execution, and the process is executed four times a day. For example, in the screen 1100 of Figure 6, the cumulative film thickness exceeding the threshold may be visually changed using color, highlighting, shading, or borders to make it easier for the operator to grasp.

[0054] Screen 1100 displays the cumulative film thickness accumulated by the execution of the process on a weekly basis, horizontally for each of the multiple substrate processing machines 10. The "Maintenance Overlap" section on Screen 1100 also shows the number of overlapping maintenance periods on a weekly basis. For example, in the "Maintenance Overlap" section of Screen 1100 in Figure 6, it shows that the maintenance periods for three substrate processing machines 10 overlap in Weeks "7".

[0055] By referring to the "Maintenance Overlap" section on screen 1100, operators can easily identify weeks in which maintenance periods overlap. For example, if two circuit board processing units 10 can be maintained in a week, operators can easily adjust the maintenance schedule for one of the three units scheduled for maintenance in Week 7, for instance, by moving the maintenance schedule of that unit forward by one week. The "Maintenance Overlap" section on screen 1100 is an example of information regarding overlapping maintenance periods.

[0056] Furthermore, the "Process Capability" on screen 1100 represents the weekly process capability of multiple substrate processing units 10, assuming that the substrate processing unit 10 is not performing a process when it is undergoing maintenance, with 100% representing the process capability when all units are performing the process.

[0057] Therefore, the operator can optimize the maintenance schedule by adjusting the maintenance timing of multiple substrate processing machines 10 so that, for example, the "Number of overlapping maintenance" on screen 1100 does not exceed the number of substrate processing machines 10 that can be maintained in one week.

[0058] Returning to step S20 in Figure 4, the operator adjusts the maintenance schedule by referring to screen 1000 or 1100 displayed on output device 502 and inputting and saving the scheduled maintenance date.

[0059] In step S22, the notification unit 212 notifies the worker of the maintenance period (scheduled maintenance date) based on the maintenance period information recorded in the data storage unit 204. The notification in step S22 can also be made closer to the scheduled maintenance date, for example, a predetermined number of days before the scheduled maintenance date, to encourage the worker to prepare for the maintenance.

[0060] [Second Embodiment] The second embodiment is similar to the first embodiment except for a few parts, so its description has been omitted as appropriate.

[0061] Figure 7 is a functional block diagram showing an example of a worker terminal 18 according to this embodiment. The functional block diagram in Figure 7 is a configuration in which an optimization calculation unit 214 is added to the functional block diagram shown in Figure 3.

[0062] The optimization calculation unit 214 optimizes the maintenance timing for each of the multiple substrate processing devices 10 and maintenance items predicted by the prediction unit 202 in order to reduce the downtime of the multiple substrate processing devices 10.

[0063] For example, the optimization calculation unit 214 adjusts the maintenance schedules of multiple substrate processing machines 10 so that their maintenance schedules do not overlap, and optimizes the maintenance schedule proposed to the operator. In addition, the optimization calculation unit 214 adjusts the maintenance items of identical substrate processing machines 10 with similar maintenance schedules to be performed together, and optimizes the maintenance schedule proposed to the operator.

[0064] Figure 8 is a sequence diagram of an example of a process in which the operator terminal 18 according to this embodiment displays a list of maintenance times for multiple substrate processing devices 10. The sequence diagram in Figure 8 is the same as the sequence diagram in Figure 4, except for a few parts, so the explanation will be omitted as appropriate.

[0065] The processes in steps S30 to S34 are the same as those in steps S10 to S14 in Figure 4, so their explanation will be omitted.

[0066] In step S36, the optimization calculation unit 214 of the worker terminal 18 reads the maintenance timing information recorded in the data storage unit 204. The optimization calculation unit 214 optimizes the maintenance timing of the multiple board processing devices 10 and maintenance items proposed to the worker in order to reduce the downtime of the multiple board processing devices 10. The optimized maintenance timing is added to the maintenance timing information recorded in the data storage unit 204.

[0067] In step S38, the screen data generation unit 206 of the worker terminal 18 reads the maintenance timing information recorded in the data storage unit 204 and generates screen data for a screen that displays a list of maintenance timings for multiple substrate processing devices 10.

[0068] In step S40, the display control unit 210 of the worker terminal 18 displays a screen on the output device 502 that lists the maintenance times of multiple substrate processing devices 10, according to the screen data generated by the screen data generation unit 206.

[0069] Figure 9 is an illustrative image of an example of a screen 1000 that displays a list of maintenance times for multiple substrate processing devices 10. Note that the screen 1000 in Figure 9 is the same as the screen 1000 in Figure 5, with some exceptions, so explanations will be omitted as appropriate.

[0070] Screen 1000 visualizes the maintenance timings for multiple substrate processing devices 10 predicted by the prediction unit 202, and the proposed maintenance timings for the multiple substrate processing devices 10 and maintenance items optimized by the optimization calculation unit 214.

[0071] Screen 1000 displays the remaining time until the predicted maintenance date in weeks, horizontally for each of the multiple PCB processing units 10 and maintenance items. The position of the "★" displayed on Screen 1000 indicates the remaining time until the predicted maintenance date for each of the multiple PCB processing units 10 and maintenance items.

[0072] Furthermore, the position of the "◎" displayed on screen 1000 indicates the suggested maintenance timing for multiple substrate processing devices 10 and maintenance items, which have been optimized by the optimization calculation unit 214.

[0073] For example, in the screen 1000 of Figure 9, the maintenance periods for the substrate processing equipment 10 labeled "Equipment B" and "Equipment D" overlap. In the screen 1000 of Figure 9, an optimized maintenance period is suggested by displaying "◎" two weeks earlier than the position of "★" which indicates the maintenance period for the substrate processing equipment 10 labeled "Equipment B".

[0074] For example, in the screen 1000 of Figure 9, an optimized maintenance schedule is suggested by displaying "◎" three weeks earlier than the position of "★" indicating the maintenance period for maintenance item "b" of the substrate processing apparatus 10, which is labeled "Apparatus A," so that the maintenance periods for maintenance items "a" and "b" of the substrate processing apparatus 10 are performed together.

[0075] Therefore, by viewing screen 1000 in Figure 9, the operator can easily understand the optimization of maintenance timing to reduce downtime of the substrate processing apparatus 10.

[0076] Returning to step S42 in Figure 8, the operator adjusts the maintenance schedule by referring to screen 1000 displayed on output device 502 and inputting and saving the scheduled maintenance date.

[0077] In step S44, the notification unit 212 notifies the worker of the maintenance period (scheduled maintenance date) based on the maintenance period information recorded in the data storage unit 204. The notification in step S44 can also be made closer to the scheduled maintenance date, for example, a predetermined number of days before the scheduled maintenance date, to encourage the worker to prepare for the maintenance.

[0078] Furthermore, the optimization process for determining the maintenance timing by the optimization calculation unit 214 shown in step S36 may be performed using a machine learning model that has already learned which maintenance items should be maintained at the same time, utilizing machine learning such as deep learning. For example, the machine learning model learns the correspondence between the estimated maintenance time and work preparation category for each maintenance item and information on whether maintenance should be performed at the same time. The work preparation category may be, for example, cooling the processing container of the substrate processing apparatus 10, opening the loading area, or stopping the pump.

[0079] In the second embodiment, an example was described in which an optimized maintenance timing is proposed to the worker. However, the maintenance timings for the multiple substrate processing devices 10 and maintenance items predicted by the prediction unit 202 may be updated with the optimized maintenance timings calculated by the optimization calculation unit 214.

[0080] [Third Embodiment] The third embodiment is similar to the first or second embodiment except for a few parts, so its description will be omitted as appropriate.

[0081] Figure 10 is a functional block diagram showing an example of a worker terminal 18 according to this embodiment. The functional block diagram in Figure 10 differs from the functional block diagram in Figure 7 in that the data recorded in the data storage unit 204 is different.

[0082] The information acquisition unit 200 further acquires information related to fault detection prediction management and information related to parts management from the substrate processing apparatus 10, which is equipped with fault detection prediction management and parts management functions. Hereinafter, the information related to fault detection prediction management will be referred to as FDP management information. The information acquisition unit 200 may also acquire PM management information, FDP management information, and parts management information from the device controller 12 or server device 16. The information acquisition unit 200 records the acquired PM management information, FDP management information, and parts management information in the data storage unit 204.

[0083] The prediction unit 202 predicts the maintenance timing for each of the multiple substrate processing devices 10 based on PM management information, FDP management information, and parts management information. The prediction unit 202 not only predicts when the cumulative value of the PM management information will reach a threshold, but also predicts when the measured value of the FDP management information will reach a threshold, and when the recommended replacement timing (threshold) of the parts management information will reach. The operator can determine the predicted arrival times based on the PM management information, FDP management information, and parts management information as the maintenance timing for each maintenance item of the substrate processing device 10.

[0084] When the optimization calculation unit 214 performs the maintenance timing optimization process using machine learning, a machine learning model is used that is trained to output the following output data when the following input data is received.

[0085] The input data includes, for example, the predicted maintenance execution date, the estimated work time for each maintenance item, the work preparation category, user-defined parameters, and the selection of key maintenance items.

[0086] The predicted maintenance execution date is, for example, the predicted time when the cumulative value of PM management information reaches a threshold. The time when the cumulative value of PM management information reaches a threshold is, for example, the predicted time when the process execution reaches 1000 times.

[0087] Furthermore, the predicted maintenance execution date is, for example, a predicted value for when the recommended replacement period (threshold) in the parts management information will be reached. The recommended replacement period in the parts management information may be set by the elapsed time since the start of operation of the part, or by the number of times the part has been operated.

[0088] Furthermore, the predicted maintenance execution date is, for example, a predicted value for when the measured value of the FDP management information will reach a threshold. The time when the measured value of the FDP management information will reach a threshold is, for example, a predicted value for when the measured value will reach a monitoring band (threshold) based on the function that monitors performance degradation over time based on the measured values ​​measured by multiple sensors provided in the substrate processing apparatus 10.

[0089] The estimated work time for each maintenance item is the time required to perform that maintenance item (the estimated time required for the worker).

[0090] The work preparation category includes pre-defined, relatively time-consuming preparatory tasks necessary for performing maintenance, such as cooling the processing container of the substrate processing apparatus 10, opening the loading area, or stopping the pump. The work preparation category may be selected for each maintenance item.

[0091] User-defined parameters include, for example, device group settings, the number of devices allowed to have overlapping maintenance, and settings for items that cannot be changed. The device group settings define the scope (range) of the board processing devices 10 that perform the optimization calculation of maintenance timing. For example, the device group settings might set six of the ten board processing devices 10 (devices 1 through 6) to Group A, and the remaining four (devices 7 through 10) to Group B.

[0092] The "Allowed Number of Overlapping Maintenance Units" setting determines the maximum number of units within the same group that are allowed to have overlapping maintenance schedules. For example, the "Allowed Number of Overlapping Maintenance Units" setting allows for up to 3 overlapping maintenance schedules for board processing units 10 in group A, and up to 2 overlapping maintenance schedules for board processing units 10 in group B. The "Unchangeable Items" setting allows you to configure any maintenance items that require strict adherence to a set period as unchangeable.

[0093] The selection of a key maintenance item allows setting one maintenance item for a particular substrate processing device 10. By setting a maintenance item for a particular substrate processing device 10 as the key maintenance item, the optimization calculation unit 214 performs optimization calculations for the maintenance timing of other substrate processing devices 10 and maintenance items, using the maintenance item of that substrate processing device 10 as the axis.

[0094] The output data is, for example, the optimal maintenance timing (maintenance execution date) for each maintenance item of the multiple PCB processing units 10. The output data may also include a recommendation score based on the downtime of the multiple PCB processing units 10 that can be reduced by performing maintenance at the optimal timing. The screen 1000 in Figure 9 may visualize the recommendation score included in the output data for each optimized maintenance timing proposed to the operator.

[0095] According to the substrate processing system 1 of this embodiment, it is possible to provide a technology that supports the optimization of maintenance timing performed in multiple substrate processing devices 10.

[0096] Although preferred embodiments of this embodiment have been described in detail above, this embodiment is not limited to the embodiments described above, and various modifications and substitutions can be made to the embodiments described above without departing from the scope of this embodiment.

[0097] The substrate processing apparatus 10 of this disclosure is applicable to any of the following types of apparatus: Atomic Layer Deposition (ALD), Capacitively Coupled Plasma (CCP), Inductively Coupled Plasma (ICP), Radial Line Slot Antenna (RLSA), Electron Cyclotron Resonance Plasma (ECR), or Helicon Wave Plasma (HWP). The substrate processing apparatus 10 of this disclosure is also applicable to CVD (chemical vapor deposition) apparatus and oxidation / annealing apparatus.

[0098] It goes without saying that the substrate processing system 1 of this disclosure is not limited to the configuration shown in Figure 1, and there are various system configuration examples depending on the application and purpose. The substrate processing apparatus 10 of this disclosure can be applied to any of the following substrate processing apparatuses: single-wafer processing that processes substrates one by one, batch processing that processes multiple substrates at once, and semi-batch processing. Examples of processes performed by the substrate processing apparatus 10 of this disclosure include film deposition processing and etching processing. [Explanation of Symbols]

[0099] 1. Substrate Processing System 10 Substrate Processing Equipment 12. Device Controller 16 Server Devices 18. Worker terminal 200 Information acquisition department 202 Prediction Section 204 Data Storage Unit 206 Screen Data Generation Unit 208 Input Reception Section 210 Display Control Unit 212 Notification Department 214 Optimization Calculation Unit 502 Output device

Claims

1. An information acquisition unit that acquires information related to preventive maintenance management from multiple substrate processing devices equipped with preventive maintenance management functions, A prediction unit predicts the maintenance timing for each of the multiple substrate processing devices based on the information related to preventive maintenance management, A display control unit that displays the maintenance times of the plurality of substrate processing devices in a list on an output device, An information processing device having

2. The prediction unit predicts the maintenance timing for each of the multiple substrate processing devices and maintenance items based on the information related to preventive maintenance management. The display control unit causes the output device to display a list of the maintenance timings for each of the plurality of substrate processing devices and maintenance items. The information processing apparatus according to claim 1.

3. The system further includes an optimization calculation unit that optimizes the maintenance timing for each of the multiple substrate processing devices and maintenance items predicted by the prediction unit in order to reduce the downtime of the multiple substrate processing devices. The display control unit causes the optimized maintenance timings to be displayed in a list on the output device. The information processing apparatus according to claim 2.

4. The display control unit displays information regarding the overlap of maintenance periods. The information processing apparatus according to claim 1.

5. The information acquisition unit further acquires information related to anomaly detection and prediction management and information related to parts management from the plurality of substrate processing devices, which are further equipped with anomaly detection and prediction management functions and parts management functions. The prediction unit predicts the maintenance timing for each of the multiple substrate processing devices based on the information related to preventive maintenance management, the information related to anomaly detection and prediction management, and the information related to parts management. The information processing apparatus according to claim 1.

6. It further includes an input receiving unit that receives requests from workers to add maintenance items with specified maintenance times, The information processing apparatus according to claim 2.

7. The system further includes a notification unit that notifies the operator of the maintenance schedule for the plurality of substrate processing devices. The information processing apparatus according to any one of claims 1 to 6.

8. An information acquisition unit that acquires information related to preventive maintenance management from multiple substrate processing devices equipped with preventive maintenance management functions, A prediction unit predicts the maintenance timing for each of the multiple substrate processing devices based on the information related to preventive maintenance management, A display control unit that displays the maintenance times of the plurality of substrate processing devices in a list on an output device, A substrate processing apparatus having

9. An information processing method performed by an information processing device, To obtain information on preventive maintenance management from multiple substrate processing equipment equipped with preventive maintenance management functions, Based on the information regarding preventive maintenance management, the maintenance timing is predicted for each of the multiple substrate processing devices. The maintenance schedules for the aforementioned multiple substrate processing devices are displayed in a list on the output device, An information processing method having

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