Ultrasound examination equipment and method of operating the ultrasound examination equipment

Abstract

The present invention provides an ultrasonic inspection device capable of switching between ultrasonic inspection using gas and ultrasonic inspection using liquid. [Solution] The device is configured to perform an ultrasonic examination on a subject by switching between a first ultrasonic examination, in which a gas is placed in the space between the transmitting / receiving unit 121 and the subject, and a second ultrasonic examination, in which a liquid is placed in the space, using a measuring device 12 equipped with a transmitting / receiving unit 121 that transmits and receives ultrasonic waves. The measuring device 12 used in the first ultrasonic examination and the measuring device 12 used in the second ultrasonic examination are attached to the same scanning device 11.

Description

Technical Field

[0001] The present disclosure relates to an ultrasonic inspection device and an operation method of the ultrasonic inspection device.

Background Art

[0002] Patent Document 1 describes "an ultrasonic inspection device 1 that inspects a subject E by irradiating an ultrasonic beam to the subject E through a gas, comprising a transmission probe 110 that emits an ultrasonic beam and a reception probe 120 installed on the opposite side of the transmission probe 110 with respect to the subject E, and an eccentricity adjustment unit 105 that adjusts the distance between the transmission sound axis AX1, which is the central axis of the propagation path of the ultrasonic beam emitted from the transmission probe 110, and the reception sound axis AX2, which is the central axis of the propagation path of the ultrasonic beam assumed to be emitted from the reception probe 120, to a distance greater than zero."

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] There may be a case where, after performing one of ultrasonic inspections (ultrasonic inspection using a gas) in which a gas is disposed in the space between the subject and the probe or ultrasonic inspection (ultrasonic inspection using a liquid) in which a liquid is disposed in the space, the other ultrasonic inspection is to be performed. However, for example, when using the ultrasonic inspection device described in Patent Document 1, when performing the other ultrasonic inspection after one ultrasonic inspection, the subject is moved (transported) from one ultrasonic inspection device to the other ultrasonic inspection device. Therefore, it takes time for the movement. The problem that this disclosure aims to solve is to provide an ultrasonic inspection apparatus and ultrasonic inspection method that can switch between performing ultrasonic inspection using gas and ultrasonic inspection using liquid. [Means for solving the problem]

[0005] The ultrasonic inspection apparatus of this disclosure is configured to perform ultrasonic inspection on a subject by switching between a first ultrasonic inspection in which a gas is placed in the space between the transmitting and receiving unit and the subject, and a second ultrasonic inspection in which a liquid is placed in the space, using a measuring device equipped with a transmitting and receiving unit that transmits and receives ultrasonic waves, and the measuring device used in the first ultrasonic inspection and the measuring device used in the second ultrasonic inspection are attached to the same scanning device. Other solutions will be described later in the embodiments for carrying out the invention. [Effects of the Invention]

[0006] According to this disclosure, it is possible to provide an ultrasonic inspection apparatus and an ultrasonic inspection method that can switch between performing ultrasonic inspection using gas and ultrasonic inspection using liquid. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic diagram of an ultrasound examination device viewed from the side, illustrating the procedure when performing an ultrasound examination using the transmission method. [Figure 2] This is a schematic diagram showing the view from a direction 90° different in the horizontal plane from the direction illustrated in Figure 1. [Figure 3] This is a schematic diagram of an ultrasound examination device viewed from the side, illustrating the process of performing an ultrasound examination based on the reflection method. [Figure 4] This is a diagram illustrating an identification device, showing a state where only one mechanical switch is turned on, depending on the length of the connected arm. [Figure 5] This is a diagram illustrating an identification device, showing the state where two mechanical switches are turned on according to the length of the connected arm. [Figure 6]This diagram illustrates the identification device, showing the state where the two mechanical switches are turned off because the arm is not connected. [Figure 7] This is a block diagram showing the specific hardware configuration of the control device. [Figure 8] This is an image displayed on the display device when identifying the type of transmitting / receiving unit, and it is also an image displayed on the display device before identification. [Figure 9] This is an image displayed on the display device when identifying the type of transmitting and receiving unit, and an image displayed on the display device after identification. [Figure 10] This is a block diagram of an ultrasound examination system, specifically a diagram illustrating the process for performing a first ultrasound examination. [Figure 11] This is a block diagram of an ultrasound examination system, specifically a diagram illustrating the process for performing a second ultrasound examination. [Figure 12] This is a block diagram of an ultrasound examination apparatus according to another embodiment, showing an example in which a transmitting and receiving probe is used. [Figure 13] This is a block diagram of an ultrasound inspection apparatus according to another embodiment, showing an example in which a receiving circuit, which is an example of a signal processing unit, is shared between the first ultrasound inspection and the second ultrasound inspection. [Figure 14] This is a block diagram of an ultrasound examination apparatus according to another embodiment, which uses a transmitting and receiving probe and shares a common receiving circuit, which is an example of a signal processing unit, between the first ultrasound examination and the second ultrasound examination. [Figure 15] This is a flowchart explaining how to operate an ultrasound examination device. [Modes for carrying out the invention]

[0008] The following describes embodiments for implementing this disclosure, with reference to the drawings. The following is merely an example of how to implement the invention related to this disclosure, and this disclosure is not limited to the following example. Within the description of one embodiment below, other embodiments applicable to that embodiment will also be described as appropriate. This disclosure is not limited to the following embodiment, and different embodiments can be combined or modified as appropriate without significantly impairing the effects of this disclosure. In addition, the same reference numerals will be used for the same components, and redundant explanations will be omitted. Furthermore, components having the same function will be given the same name. The illustrations are schematic, and for illustrative purposes, the actual configuration may be changed or some components may be omitted or modified between drawings without significantly impairing the effects of this disclosure. Also, the same embodiment does not necessarily need to have all the components.

[0009] Figure 1 is a schematic diagram of the ultrasonic inspection device 10 viewed from the side, illustrating the case when performing ultrasonic inspection based on the transmission method. In Figure 1, the liquid level L1 of liquid L, assuming that liquid L is placed in the water tank 16, is shown by a dashed line. The ultrasonic inspection device 10 is a device that uses the measuring device 12 described later to perform ultrasonic inspection on, for example, the inside of a subject E. The subject E is a structure such as a wafer or a laminated structure. By ultrasonic inspection, defects, voids, cracks, etc. (hereinafter collectively referred to as defects, etc.) that may exist inside the subject E can be detected (inspected) non-destructively.

[0010] In an example of the present disclosure, ultrasonic inspection is performed, for example, by propagating ultrasonic waves through a gas G such as air, an inert gas (nitrogen, argon, etc.). The method of ultrasonic inspection using the gas G can be performed, in an example of the present disclosure, using ultrasonic waves transmitted through the specimen E, which is also called the air transmission method (for example, the air-through method). However, it may also be performed using ultrasonic waves reflected by the surface or internal defects of the specimen E, which is also called the air reflection method (for example, the air reflection method). In addition, in the present disclosure, ultrasonic inspection can also be performed by propagating ultrasonic waves through a liquid L such as water (pure water, ultrapure water, etc.), an arbitrary solvent, etc. The method of ultrasonic inspection using the liquid L can be performed by selecting transmission ultrasonic waves, which is also called the liquid transmission method (for example, the water transmission method), or reflection ultrasonic waves, which is also called the liquid reflection method (for example, the water reflection method). In an example of the present disclosure, using one ultrasonic inspection device 10, ultrasonic inspection using the gas G (for example, the air transmission method) and ultrasonic inspection using the liquid L (for example, the liquid transmission method, the liquid reflection method) can be switched and performed.

[0011] The ultrasonic inspection device 10 includes a scanning device 11 (described later; not shown in FIG. 1), a measuring device 12 including a transmission / reception unit 121 that transmits and receives ultrasonic waves, and a control device 50 (described later; not shown in FIG. 1). The ultrasonic inspection device 10 further includes a sample stage 14, a fixing member 15, a water tank 16, and an identification device 17.

[0012] The measuring device 12 is attached to the scanning device 11. The scanning device 11 includes, for example, an actuator (not shown) and moves the measuring device 12 in the xy direction (horizontal direction). Thereby, the specimen E can be scanned. The movement of the measuring device 12 in the z direction (height direction; vertical direction) can be executed by, for example, a movement mechanism (not shown), but may also be executed by the scanning device 11. The scanning device 11 is connected to the control device 50, and the driving of the scanning device 11 is executed by the control device 50.

[0013] The measuring device 12 includes a transceiver unit 121 and an arm 122. The transceiver unit 121 is, for example, a probe (described later) that transmits and receives ultrasonic waves. Specifically, the transceiver unit 121 transmits ultrasonic waves to the subject E and receives ultrasonic waves that have passed through the subject E or been reflected by the subject E. The measuring device 12 is connected to the control device 50, and the driving of the measuring device 12 is executed by the control device 50.

[0014] A space 20 is formed between the transceiver unit 121 (for example, a probe) and the subject E. By disposing a gas G such as air in the space 20, ultrasonic inspections based on the air transmission method and the air reflection method can be performed. In addition, by disposing a liquid L such as water in the space 20, ultrasonic inspections based on the liquid transmission method and the liquid reflection method can be performed. Hereinafter, the ultrasonic inspection performed by disposing the gas G in the space 20 is referred to as "first ultrasonic inspection", "ultrasonic inspection using the gas G", etc. In addition, the ultrasonic inspection performed by disposing the liquid L in the space 20 is referred to as "second ultrasonic inspection", "ultrasonic inspection using the liquid L", etc. The specific method of disposing the gas G and the liquid L in the space 20 will be described later.

[0015] The transceiver unit 121 may transmit and receive ultrasonic waves by one structure, or may separately transmit and receive ultrasonic waves using a plurality of structures. In the example of FIG. 1, the transceiver unit 121 includes a transmission probe 121a (an example of a transceiver unit and a transmission unit) that transmits ultrasonic waves and a reception probe 121b (an example of a transceiver unit and a reception unit) that receives ultrasonic waves. The transmission probe 121a includes a transmission probe 121a1 (FIG. 10) used in the first ultrasonic inspection and a transmission probe 121a2 (FIG. 11) used in the second ultrasonic inspection. The reception probe 121b includes a reception probe 121b1 (FIG. 10) used in the first ultrasonic inspection and a reception probe 121b2 (FIG. 11) used in the second ultrasonic inspection.

[0016] The transmitting probe 121a is, for example, a focusing probe that focuses the ultrasound it transmits (emits, irradiates). The receiving probe 121b is also a focusing probe that focuses the ultrasound if ultrasound is transmitted from the receiving probe 121b, but it may also be a non-focusing probe that does not focus.

[0017] The measuring device 12 comprises a first measuring device used in the first ultrasonic examination (ultrasonic examination using gas G) and a second measuring device used in the second ultrasonic examination (ultrasonic examination using liquid L). The first measuring device consists of a transmitting probe 121a1 and a receiving probe 121b1 (both in Figure 10) when based on the transmission method, and a transmitting / receiving probe (not shown) that can be used in air when based on the reflection method. The second measuring device consists of a transmitting probe 121a2 and a receiving probe 121b2 (both in Figure 11) when based on the transmission method, and a transmitting / receiving probe 121c2 (Figure 12) when based on the reflection method. In this disclosure, the transmitting probe, receiving probe, and transmitting / receiving probe may be collectively referred to simply as "probes". The probe, as a transmitting / receiving unit 121, is a structure that irradiates ultrasound onto the subject E and receives ultrasound reflected by or transmitted through the subject E. The transmitting / receiving probe 121c2 is a single probe that transmits and receives ultrasound.

[0018] Accordingly, the first measuring device 12 used in the first ultrasound examination based on the transmission method comprises a transmitting probe 121a1 (first transmitting probe) that transmits ultrasound to the subject E, and a receiving probe 121b1 (first receiving probe) which is configured separately from the transmitting probe 121a1 and receives ultrasound that has been transmitted through the subject E. The second measuring device 12 used in the second ultrasound examination based on the transmission method comprises a transmitting probe 121a2 (second transmitting probe) that transmits ultrasound to the subject E, and a receiving probe 121b2 (second receiving probe) which is configured separately from the transmitting probe 121a2 and receives ultrasound that has been transmitted through the subject E.

[0019] Furthermore, in another embodiment, the first measuring device 12 used in a first ultrasound examination based on the reflection method includes a transmitting / receiving probe (not shown) that transmits ultrasound to the subject E and receives ultrasound reflected by the subject E. The second measuring device 12 used in a second ultrasound examination based on the reflection method includes a transmitting / receiving probe 121c2 that transmits ultrasound to the subject E and receives ultrasound reflected by the subject E.

[0020] Figure 2 is a schematic diagram viewed from a direction (x direction) that is 90° different in the horizontal plane from the direction shown in Figure 1 (y direction). The transmitting probe 121a and the receiving probe 121b are positioned opposite each other with the subject E in between.

[0021] In the example shown in Figure 2, the ultrasound transmitted from the transmitting probe 121a passes through the subject E and reaches the receiving probe 121b. When the ultrasound passes through the subject E, if there are defects or other issues in the ultrasound propagation path, the ultrasound intensity received by the receiving probe 121b will be weaker than if there were no defects. This allows for the detection of the presence of defects or other issues.

[0022] In the example shown in Figure 2, the transmitting probe 121a is positioned above the subject E, and the receiving probe 121b is positioned below the subject E. However, the transmitting probe 121a may also be positioned below the subject E, and the receiving probe 121b may be positioned above the subject E.

[0023] Figure 3 is a schematic diagram of the ultrasound examination apparatus 10 viewed from the side, illustrating the case when performing an ultrasound examination based on the reflection method. When performing an ultrasound examination based on the reflection method, the transmitting and receiving unit 121 provided in the measuring device 12 uses a single probe to transmit and receive ultrasound. Therefore, the transmitting and receiving unit 121 is equipped with a transmitting and receiving probe 121c that transmits ultrasound and receives ultrasound reflected by the subject E. The transmitting and receiving probe 121c includes a transmitting and receiving probe (not shown) used for the first ultrasound examination and a transmitting and receiving probe 121c2 (Figure 12) used for the second ultrasound examination. The transmitting and receiving probe 121c is positioned only on one side (the upper side in the illustrated example) when viewed from the subject E, and not on the other side (the lower side in the illustrated example). For this reason, unlike the example in Figure 1, the measuring device 12 does not have an arm 122.

[0024] In the example shown in Figure 3, a portion of the ultrasound transmitted from the transmitting / receiving probe 121c to the subject E is reflected from the upper surface of the subject E and returns to the transmitting / receiving probe 121c. The remaining ultrasound propagates inside the subject E and is reflected by defects, etc., returning to the transmitting / receiving probe 121c. Therefore, the presence and height position of defects, etc., can be detected based on the reception time of the reflected waves (the time difference of the received ultrasound).

[0025] In the example shown in Figure 3, the transmitting / receiving probe 121c is positioned above the subject E, but it may also be positioned below the subject E.

[0026] Returning to Figure 1, the measuring device 12 includes a transmitting / receiving unit 121 and an arm 122 for fixing the receiving probe 121b. The arm 122 is used in the case of ultrasound examinations based on the transmission method (first ultrasound examination and second ultrasound examination). The arm 122 is positioned to the side of the sample stage 14 so as not to come into contact with the sample stage 14 on which the subject E is placed. The upper end of the arm 122 is fixed to a fixing member 15. The transmitting probe 121a is also fixed to the fixing member 15. The receiving probe 121b is fixed to the lower end of the arm 122. Therefore, the transmitting probe 121a and the receiving probe 121b are fixed to the fixing member 15 that fixes the probes. As the scanning device 11 moves the fixing member 15, the transmitting probe 121a and the receiving probe 121b move together with the fixing member 15.

[0027] The water tank 16 is a structure located below the sample stage 14 and has a bottom surface 161. The bottom surface 161 is located below the sample stage 14. Therefore, for example, by storing liquid L (such as pure water) in the water tank 16 and immersing the subject E and the transmitting / receiving unit 121 in the liquid L, a layer of liquid L can be formed in the space 20 between the transmitting / receiving unit 121 and the subject E. This allows ultrasonic waves to be propagated in the liquid L, enabling ultrasonic testing of the subject E based on the transmission method and the reflection method. If a gas G is introduced into the water tank 16, a layer of gas G will be formed in the space 20. This allows ultrasonic waves to be propagated in the gas G, enabling ultrasonic testing of the subject E based on the transmission method and the reflection method. Therefore, in the example of this disclosure, ultrasonic testing using gas G and ultrasonic testing using liquid L can be switched and performed in the same measurement space (the internal space of the water tank 16).

[0028] In ultrasonic testing using gas G and ultrasonic testing using liquid L, the transmission method or reflection method does not need to be the same; they may be different. For example, ultrasonic testing based on the transmission method using gas G and ultrasonic testing based on the transmission method using liquid L may be switched, or ultrasonic testing based on the transmission method using gas G and ultrasonic testing based on the reflection method using liquid L may be switched.

[0029] In the illustrated example, the height of the side walls of the water tank 16 is such that the subject E and the transmitting / receiving unit 121 can be immersed in the liquid L. However, for example, a layer of liquid L can be formed in the space 20 by supplying liquid L locally (partially) to the space 20 using a liquid injection mechanism (not shown). In this case, since it is not necessary to immerse the subject E and the transmitting / receiving unit 121 in the liquid L, the height of the side walls can be such that they can receive the liquid L falling from the sample stage 14 and the subject E. Therefore, it is not necessary to make the height of the side walls of the water tank 16 such that the subject E and the transmitting / receiving unit 121 can be immersed in the liquid L.

[0030] The measuring device 12 is attached to the same scanning device 11. That is, the first measuring device (measuring device 12) used in the first ultrasound examination and the second measuring device (measuring device 12) used in the second ultrasound examination are attached to the same scanning device 11. The first measuring device is, as described above, a transmitting probe 121a1 and a receiving probe 121b1, or a transmitting and receiving probe (not shown) that can be used in the air reflection method. The second measuring device is, as described above, a transmitting probe 121a2 and a receiving probe 121b2, or a transmitting and receiving probe 121c2 (Figure 12). The same scanning device 11 as used here means that the same scanning device 11 is used regardless of the ultrasound examination method in the ultrasound examination apparatus 10 (transmission method, reflection method, whether gas G or liquid L is used, etc.), that is, the scanning device 11 used is common.

[0031] Furthermore, the ultrasonic inspection method can be selected, or switched, by replacing (changing) the measuring device 12 attached to the scanning device 11 according to whether gas G or liquid L is used, and whether transmitted ultrasonic waves or reflected ultrasonic waves are received. In addition, there is no need to replace the sample stage 14 between ultrasonic inspection using gas G and ultrasonic inspection using liquid L. That is, by appropriately replacing the measuring device 12 with the subject E placed on the sample stage 14, it is possible to perform, for example, an ultrasonic inspection with gas G placed in the space 20 (gas G interposed between the transmitting / receiving unit 121 and the subject E) and an ultrasonic inspection with liquid L placed in the space 20 (liquid L interposed between the transmitting / receiving unit 121 and the subject E) in succession on the same subject E.

[0032] However, replacing the measuring device 12 is not mandatory. That is, for example, if an ultrasonic inspection with gas G and an ultrasonic inspection with liquid L can be performed using the same (common) probe, the ultrasonic inspection with gas G and the ultrasonic inspection with liquid L can be switched and performed without replacing the measuring device 12.

[0033] As described above, the ultrasound examination apparatus 10 is configured to use the measuring device 12 to switch between an ultrasound examination with gas G placed in the space 20 (first ultrasound examination) and a second ultrasound examination with liquid L placed in the space 20, thereby performing an ultrasound examination on the subject E (second ultrasound examination). This eliminates the need to move the subject E from one ultrasound examination apparatus to the other when performing one ultrasound examination with gas G or the other with liquid L. This reduces the effort required to move the subject E.

[0034] The term "switching" means that a single ultrasound examination device 10 can perform both a first ultrasound examination and a second ultrasound examination according to the user's selection. Therefore, when switching, it is not necessarily required that the settings of the ultrasound examination device 10 for the first ultrasound examination (for example, the electrical circuits used (transmitting circuits 51a, 51b and receiving circuits 52a, 52b, etc., described below)) and the settings of the ultrasound examination device 10 for the second ultrasound examination (same) be automatically set by, for example, the control device 50.

[0035] The identification device 17 is a device that identifies the measuring device 12 (equipped with a transmitting / receiving unit 121, an appropriate arm 122, etc.) attached to the scanning device 11. The identification device 17 is a device that identifies whether the measuring device 12 attached to the scanning device 11 is used for first ultrasound examination or second ultrasound examination. This allows the use of the appropriate measuring device 12 depending on the type of first ultrasound examination apparatus or second ultrasound examination apparatus. In addition, the first ultrasound examination apparatus or second ultrasound examination apparatus can be properly operated depending on the attached measuring device 12.

[0036] The identification device 17 is, but is not limited to, at least one of the following: a physical mechanical switch, an RFID tag, a proximity sensor, an optical sensor, a one-dimensional barcode or a two-dimensional barcode and a camera.

[0037] Figure 4 illustrates the identification device 17 and shows a state in which only one switch 171 is turned on, depending on the length of the connected arm 122. Figure 5 illustrates the identification device 17 and shows a state in which both switches 171 and 172 are turned on, depending on the length of the connected arm 122. Figure 6 illustrates the identification device 17 and shows a state in which both switches 171 and 172 are turned off, as the arm 122 is not connected. In the examples of this disclosure, switches 171 and 172, which are examples of the identification device 17, are mechanical switches. Mechanical switches are turned on, for example, by pressing (contacting) and turned off when the press is released.

[0038] The arm 122 includes, for example, an arm 122a used for a first ultrasound examination and an arm 122b used for a second ultrasound examination. The arm 122 is equipped with an identification section 122c for identifying the type of arm 122 (whether it is arm 122a or arm 122b) attached to the fixing member 15 by an identification device 17. In the examples of Figures 4 and 5, the identification section 122c is the upper end of the arm 122 and is the portion that extends vertically. The height of the identification section 122c in arm 122a (Figure 5) is higher than the height of the identification section 122c in arm 122b (Figure 4).

[0039] For example, when performing an ultrasound examination based on the transmission method using liquid L (transmission method), both the transmitting probe 121a and the receiving probe 121b are used. Therefore, an arm 122b is used to position the receiving probe 121b, for example, below the subject E. The height of the identification part 122c of the arm 122b, to which the receiving probe 121b used in the transmission method is fixed, is relatively low. For this reason, as shown in Figure 4, when the arm 122b is fixed to the fixing member 15, the arm 122b only contacts the switch 171, thereby turning only the switch 171 on, and does not contact the switch 172, so the switch 172 remains off.

[0040] Next, for example, when performing an ultrasound examination based on the transmission method using gas G (air transmission method), both the transmitting probe 121a and the receiving probe 121b are used, as explained with reference to Figure 4 above. However, the height of the identification part 122c of the arm 122a used in the air transmission method is relatively high. For this reason, as shown in Figure 5, when the arm 122a is fixed to the fixing member 15, the arm 122a comes into contact with both switches 171 and 172, thereby turning on both switches 171 and 172.

[0041] Finally, when performing an ultrasound examination based on the transmission method using gas G (air transmission method; air transmission method may also be used), the transmitting and receiving probe 121c is used, and the transmitting and receiving unit 121 is not positioned, for example, below the subject E. Therefore, the arm 122 is not fixed to the fixing member 15, as shown in Figure 6. For this reason, both switches 171 and 172 are off.

[0042] As shown in Figures 4 to 6, the on or off state of switches 171 and 172 allows for the determination of whether the substance is a gas G or a liquid L, and whether the method is reflection or transmission.

[0043] As described above, the identification device 17 detects the mounting status of the measuring device 12, specifically, for example, the mounting status of the arm 122 (which may be a transmitting / receiving unit 121, a probe, etc.) as an element of the measuring device 12 to the fixing member 15. This allows the identification device 17 to identify whether the probes (transmitting probe 121a, receiving probe 121b, and transmitting / receiving probe 121c) fixed to the fixing member 15 are used for either the first or second ultrasound examination. In this way, the ultrasound examination device 10 itself can identify the type of probe (individual information) attached, and can perform various controls using the obtained information.

[0044] Figure 7 is a block diagram showing the specific hardware configuration of the control device 50. The control device 50 is a device that controls the operation, driving, etc., of the ultrasound inspection apparatus 10, and performs at least a part of the operation method of the ultrasound inspection apparatus 10. The control device 50 is configured with, for example, a CPU (Central Processing Unit) 1001, RAM (Random Access Memory) 1002, ROM (Read Only Memory) 1003, I / F (Interface) 1004, bus 1005, etc. The CPU 1001, RAM 1002, ROM 1003, and I / F 1004 are connected, for example, via bus 1005. The control device 50 is realized when a predetermined control program (for example, the ultrasound inspection method and the operation method of the ultrasound inspection apparatus 10 of this disclosure, etc.) stored in ROM 1003 is loaded into RAM 1002 and executed by CPU 1001. Signals and information are exchanged between the control device 50 and various devices (scanning device 11, measuring device 12, identification device 17, server, personal computer, etc.) and external networks via the I / F 1004 in hardware terms.

[0045] The control device 50 switches between signal processing units 51 and 52, depending on the identification result from the identification device 17, to either the signal processing unit 51 (Figure 10) used for the first ultrasonic examination or the signal processing unit 52 (Figure 10) used for the second ultrasonic examination. The inspection conditions for ultrasonic examination (drive frequency, method of processing received signals, electrical circuits used for transmitting and receiving ultrasound, etc.) may differ depending on whether liquid L or gas G is used. Therefore, signal processing units 51 and 52 are configured to correspond to each inspection condition. By switching to the appropriate signal processing unit 51 or 52 according to the identification result, the user's effort can be reduced. In addition, incorrect switching can be avoided.

[0046] The signal processing units 51 and 52 referred to here are functional units that perform appropriate conditions for ultrasound examination. These functional units are implemented by both software and hardware. For example, the signal processing units 51 and 52 process the signals received by the receiving probe 121b and the transmitting / receiving probe 121c, and also process (generate) signals for transmitting ultrasound from the transmitting probe 121a and the transmitting / receiving probe 121c.

[0047] However, the identification device 17 may be used to perform different processes in conjunction with or after switching the signal processing units 51 and 52. For example, the identification device 17 may be used to display on the display device 60 (described later) which measuring device 12 is being used. The control device 50 can display the identification result from the identification device 17 (for example, the medium being used (gas G or liquid L), and the inspection method (transmission method or reflection method)) on the display device 60. If the display device 60 is a lamp, it can light up the lamp corresponding to the medium being used and the inspection method.

[0048] Furthermore, while the signal processing units 51 and 52 can be executed by the control device 50 as described above, they may also be switched by the user themselves instead of the control device 50. Specifically, a user who has seen the display device 60 (lamp, etc.) can switch the signal processing units 51 and 52 to either one as appropriate according to the display result on the display device 60.

[0049] The control device 50 detects the switching of the gas G or liquid L to be placed in the space 20 by detecting that the first measuring device or the second measuring device has been switched. Detection can be performed, for example, by the identification device 17. The gas G or liquid L to be placed in the space 20 differs between the first measuring device used for the first ultrasonic examination and the second measuring device used for the second ultrasonic examination. Therefore, by detecting the switching of the first measuring device or the second measuring device, the type of fluid, which is either the gas G or the liquid L to be placed in the space 20, can be determined.

[0050] Figure 8 shows an image 61 displayed on the display device 60 when identifying the type of transmitting / receiving unit 121, and an image 61 displayed on the display device 60 before identification. Figure 9 shows an image 61 displayed on the display device 60 when identifying the type of transmitting / receiving unit 121, and an image 61 displayed on the display device 60 after identification. When the ultrasonic inspection device 10 is in operation, the display device 60 displays, for example, an image of the analysis program. Depending on the type of ultrasonic inspection (whether it is a gas G or a liquid L, whether it is a transmission method or a reflection method, etc.), the program used may differ. Therefore, for example, as shown in Figures 8 and 9, the program used for the ultrasonic inspection method identified by the identification result may be displayed according to the identification result. For example, in the case of ultrasonic inspection based on the liquid transmission method (second ultrasonic inspection), a step of supplying (injecting) liquid L into the space 20 occurs. Therefore, the button 62 (Figure 8), which could not be pressed before identification, can be pressed (Figure 9) after it is detected that the measuring device 12 used for the second ultrasonic inspection has been installed.

[0051] Furthermore, for example, the control device 50 may be configured to notify an alert via the display device 60 if a different measuring device 12 is installed, even though the user is attempting to operate the ultrasound examination device 10 in a predetermined manner according to the user's settings. The RFID identification device 17 can also notify an alert if the liquid reflection method or air reflection method is set as the operating method, even though a measuring device 12 corresponding to the liquid transmission method has been installed. In this case, along with the notification, the device may also prompt the user to change to the correct operating method or measuring device 12.

[0052] Figure 10 is a block diagram of the ultrasound inspection apparatus 10, and is a system diagram for when the first ultrasound inspection is performed. In the example shown in Figure 10 and Figure 11 below, different signal processing units 51 and 52 are used for the first ultrasound inspection and the second ultrasound inspection. In the example in Figure 10, a transmitting probe 121a1 and a receiving probe 121b1 for ultrasound inspection using gas G (first ultrasound inspection) are attached. The data processing unit 53 for generating and processing electrical signals used in the ultrasound inspection apparatus 10 and the signal processing unit 51 for the first ultrasound inspection are connected by closing switches 541 and 542. Analog signals and digital signals are converted in the data processing unit 53. On the other hand, the data processing unit 53 and the signal processing unit 52 for the second ultrasound inspection are not connected by opening switches 543 and 544. The opening and closing of switches 541, 542, 543, and 544 can be performed by the data processing unit 53 according to the type of transmitting / receiving unit 121 identified by the identification device 17.

[0053] The signal processing unit 51 includes a waveform generator 511, an amplifier 512, a filter 513, and an amplifier 514. Of these, the waveform generator 511 and amplifier 512 constitute a transmitting circuit 51a (high-voltage pulse application circuit; electrical circuit). The transmitting circuit 51a is an electrical circuit for transmitting ultrasonic waves from a transmitting probe 121a1 (or a transmitting / receiving probe). The filter 513 and amplifier 514 constitute a receiving circuit 51b (signal processing circuit). The receiving circuit 51b is an electrical circuit for inputting ultrasonic waves received by a receiving probe 121b1 (or a transmitting / receiving probe) to the data processing unit 53. Upon receiving a command from the data processing unit 53, the waveform generator 511 generates a voltage having a predetermined waveform (e.g., a pulse wave). The generated voltage is amplified by amplifier 512, and the voltage output from amplifier 512 is applied to the transmitting probe 121a1, thereby transmitting ultrasonic waves from the transmitting probe 121a1.

[0054] The transmitted ultrasound passes through the subject E and is received by the receiving probe 121b1. The electrical signal of the received ultrasound is amplified by the amplifier 514. The amplified electrical signal is then filtered by a filter 513 (e.g., a high-pass filter, low-pass filter, band-pass filter, etc.) to remove predetermined portions, and then input to the data processing unit 53.

[0055] The scanning device 11 comprises a scan controller 111, a position measuring unit 112, and a drive unit 113. The scan controller 111 drives the measuring device 12 through the drive unit 113, which includes, for example, an actuator. The drive unit 113 is a device that changes the relative position of the transmitting / receiving unit 121 with respect to the subject E by driving the measuring device 12. The position measuring unit 112 is a device that measures the scanning position, such as an encoder. The scanning position from the transmitting / receiving unit 121 is input to the scan controller 111 through the position measuring unit 112.

[0056] Figure 11 is a block diagram of the ultrasound examination apparatus 10, and is a system diagram for when a second ultrasound examination is performed. In the example in Figure 11, a transmitting probe 121a2 and a receiving probe 121b2 for the second ultrasound examination using liquid L are attached. The data processing unit 53 and the signal processing unit 52 for the second ultrasound examination are connected by closing switches 543 and 544. On the other hand, the data processing unit 53 and the signal processing unit 51 for the first ultrasound examination are not connected by opening switches 541 and 542.

[0057] The signal processing unit 52 includes a waveform generator 521, an amplifier 522, a filter 523, and an amplifier 524. Of these, the waveform generator 521 and amplifier 522 constitute a transmitting circuit 52a (high-voltage pulse application circuit; electrical circuit). The transmitting circuit 52a is an electrical circuit for transmitting ultrasonic waves from a transmitting probe 121a2 (or a transmitting / receiving probe). The filter 523 and amplifier 524 constitute a receiving circuit 52b (signal processing circuit). The receiving circuit 52b is an electrical circuit for inputting ultrasonic waves received by a receiving probe 121b2 (or a transmitting / receiving probe) to the data processing unit 53. Upon receiving a command from the data processing unit 53, the waveform generator 521 generates a voltage having a predetermined waveform (e.g., a pulse wave). The generated voltage is amplified by amplifier 522, and the voltage output from amplifier 522 is applied to the transmitting probe 121a2, thereby transmitting ultrasonic waves from the transmitting probe 121a2.

[0058] The transmitted ultrasound passes through the subject E and is received by the receiving probe 121b2. The electrical signal of the received ultrasound is amplified by the amplifier 524. The amplified electrical signal is then filtered by a filter 523 (e.g., a high-pass filter, low-pass filter, band-pass filter, etc.) to remove predetermined portions, and then input to the data processing unit 53.

[0059] Figure 12 is a block diagram of an ultrasound examination apparatus 10 according to another embodiment, and is a block diagram showing an example using a transmit / receive probe 121c2. For convenience, in Figure 12, the transmit / receive probe 121c2 is connected as a probe for a second ultrasound examination using liquid L. Therefore, in the example of Figure 12, a second ultrasound examination can be performed by reflecting ultrasound waves off the subject E in the liquid.

[0060] Figure 13 is a block diagram of an ultrasound examination apparatus 10 according to another embodiment, and is a block diagram showing an example in which the receiving circuits 51b and 52b, which are examples of signal processing units 51 and 52, are common to the first ultrasound examination and the second ultrasound examination. Figure 13 shows the receiving circuit 52c, which is the common receiving circuit 51b and 52b. However, the transmitting circuits 51a and 52a may also be common. In the example of Figure 13, for the sake of explanation, the transmitting probe 121a1 and receiving probe 121b1 for the first ultrasound examination and the transmitting probe 121a2 and receiving probe 121b2 for the second ultrasound examination are shown together.

[0061] In the example shown in Figure 13, the electrical signals (received signals) from receiving probe 121b1 and the electrical signals (received signals) from receiving probe 121b2 are both input to amplifier 524. The electrical signals are amplified by amplifier 524, processed by filter 523, and then input to data processing unit 53. Note that no switches are placed between filter 523 and data processing unit 53.

[0062] In the example shown in Figure 13, the receiving circuit (electrical circuit) consisting of amplifier 524 and filter 523 is shared, but the program for processing the received signal may be separate or shared. However, typically different settings and programs are used for the first ultrasound examination and the second ultrasound examination.

[0063] Regarding the switching of signal processing units 51 and 52, only one of either the transmitting circuits 51a and 52a, or the receiving circuits 51b and 52b, may be switched. For example, the transmitting circuits 51a and 52a common to both the first and second ultrasound examinations may be used (i.e., not switched), and the receiving circuit 51b used for the first ultrasound examination and the receiving circuit 52b used for the second ultrasound examination may be switched. Alternatively, as shown in Figure 13, the transmitting circuit 51a used for the first ultrasound examination and the transmitting circuit 52a used for the second ultrasound examination may be switched, and the receiving circuits 51b and 52b (receiving circuit 52c) common to both the first and second ultrasound examinations may be used. Furthermore, as shown in Figures 10 and 11 above, the transmitting circuit 51a used for the first ultrasound examination and the transmitting circuit 52a used for the second ultrasound examination may be switched, and the receiving circuit 51b used for the first ultrasound examination and the receiving circuit 52b used for the second ultrasound examination may also be switched.

[0064] Figure 14 is a block diagram of an ultrasound examination apparatus 10 according to another embodiment, which uses a transmitting / receiving probe 121c2 and shares a receiving circuit 52c, which is an example of a signal processing unit 51, 52, between the first ultrasound examination and the second ultrasound examination. In the example of Figure 14, for the sake of explanation, the transmitting probe 121a1 and receiving probe 121b1 for the first ultrasound examination and the transmitting / receiving probe c2 for the second ultrasound examination are shown together.

[0065] In the example shown in Figure 14, the received signals from both the receiving probe 121b1 and the transmitting / receiving probe 121c2 are input to the amplifier 534. The ultrasound inspection apparatus 10 can also be configured in this way.

[0066] As described above, the receiving circuits 51b and 52b are shared, but the transmitting circuits 51a and 52a, which consist of waveform generators (waveform generators 511 and 521) and amplifiers (amplifiers 512 and 522), may also be shared.

[0067] Figure 15 is a flowchart illustrating the operation method of the ultrasound inspection device 10 (hereinafter referred to as the operation method of this disclosure). The operation method of this disclosure can also be referred to as an ultrasound inspection method using the ultrasound inspection device 10, etc. The operation method of this disclosure can be performed using the ultrasound inspection device 10. Therefore, the explanation of Figure 15 will be provided with reference to Figure 1, etc., as appropriate.

[0068] The method of operation described herein involves performing either an ultrasonic inspection using gas G (first ultrasonic inspection) or an ultrasonic inspection using liquid L (second ultrasonic inspection) on a subject E that has undergone one ultrasonic inspection, followed by the other ultrasonic inspection. This allows the user to perform both the first and second ultrasonic inspections using a single ultrasonic inspection device 10. This allows the user to arbitrarily select and perform the inspection method according to conditions such as the application, material, and size of defects of the subject E. Whether to perform the first or second ultrasonic inspection can be performed, for example, by switching the corresponding transmitting and receiving unit 121. In addition, it can be performed, for example, by switching the corresponding signal processing units 51 and 52.

[0069] In the example of this disclosure, a second ultrasound examination is performed on the subject E who underwent the first ultrasound examination, after the first ultrasound examination. Since the first ultrasound examination uses gas G, it has little effect on the subject E. For example, if the subject E is a lithium-ion secondary battery, electronic component, etc., and does not have resistance to liquid L (e.g., water), then if the lithium-ion secondary battery is placed in liquid L, the lithium-ion secondary battery will become unusable afterward.

[0070] On the other hand, liquid L allows for a higher frequency of transmitted ultrasound than gas G, resulting in higher detection accuracy for defects (especially minute defects). Therefore, ultrasonic inspection using liquid L (second ultrasonic inspection) has the advantage of superior detection accuracy compared to ultrasonic inspection using gas G (first ultrasonic inspection). For example, if a defect is found when a sample E is ultrasonically inspected in gas G, the sample E can then be subjected to a detailed ultrasonic inspection in liquid L. Based on the detailed inspection results of the sample E in liquid L, the manufacturing process of the sample E can be reviewed, allowing for changes to a manufacturing process that prevents defects from occurring and improving the yield of the sample E.

[0071] The specific operating method is described below. The operating method of this disclosure includes steps S1 to S11 in this order. Therefore, in the example of Figure 15, the second ultrasound examination is performed after the first ultrasound examination, but the first ultrasound examination may be performed after the second ultrasound examination. Also, in the example of Figure 15, air is used as the gas G and a water tank 16 with an open top is used, so the step of placing the gas G in the space 20 is not explicitly shown. However, if a gas G other than air is placed in the space 20, the step of placing the gas G in the space 20 may be performed between steps S3 and S4 described below.

[0072] In step S1, first, a measuring device 12 for ultrasonic testing using gas G, i.e., for first ultrasonic testing, is attached to the fixing member 15. The measuring device 12 comprises, for example, a transmitting and receiving unit 121 and an appropriate arm 122. Installation is performed, for example, by the user's manual labor, but may also be performed mechanically using any mounting device (not shown).

[0073] In step S2, the attached measuring device 12 is identified using the identification device 17. This identification determines, for example, whether the attached measuring device 12 is for first ultrasound examination or second ultrasound examination, and whether it is for transmission or reflection ultrasound. The identification result is input to the data processing unit 53.

[0074] In step S3, the control device 50 (data processing unit 53) switches to the electrical circuit and program corresponding to the measuring device 12 for the first ultrasound examination, i.e., the signal processing unit 51. This makes the ultrasound examination device 10 ready to perform the first ultrasound examination.

[0075] In step S4, the distance between the transmitting / receiving unit 121 and the subject E is adjusted. The adjustment can be made, for example, by adjusting the distance so that the focal point of the transmitted ultrasound is located inside the subject E. The adjustment can be performed, for example, manually by the user, but it may also be performed automatically by a machine depending on the strength of the received electrical signal, etc.

[0076] As described above, in the example of this disclosure, the transmitting probe 121a1, the receiving probe 121b1, and the arm 122 move together as a single unit. However, the arm 122 may be provided with a device (not shown) for adjusting the height position of the transmitting probe 121a. For example, by adjusting the height position of the transmitting probe 121a1 (e.g., vertical movement), the distance between the transmitting probe 121a1 and the subject E can be adjusted.

[0077] A drive device (not shown) may be provided to allow the transmitting probe 121a1 and the receiving probe 121b1 to move up and down independently. In this case, the distance between the transmitting probe 121a1 and the receiving probe 121b1 and the subject E can be adjusted by adjusting the height position of both the transmitting probe 121a1 and the receiving probe 121b1 using the drive device. Alternatively, the distance between the transmitting / receiving unit 121 and the subject E may be adjusted by adjusting the height position of the subject E by moving the subject E or the sample stage 14 up and down.

[0078] In the transmission method, the height (z-direction) position of one or both of the transmitting probe 121a1 and the receiving probe 121b1 is adjusted. On the other hand, in the reflection method, the height position of the integrated transmitting and receiving probe 121c is adjusted. Typically, due to the difference in refractive index when ultrasound is incident on the subject E, the distance is adjusted to be different for ultrasound examinations using gas G and ultrasound examinations using liquid L.

[0079] In step S5, the first ultrasound examination is performed using gas G. The first ultrasound examination can be performed, for example, according to the system diagram shown in Figure 10 above.

[0080] In step S6, the already installed measuring device 12 is removed, and in its place, a transmitting probe 121a2 and a receiving probe 121b2 for ultrasound examination using liquid L, i.e., a second ultrasound examination, are installed.

[0081] In step S6, after the first ultrasound examination, the measuring device 12 is switched from the measuring device 12 for the first ultrasound examination to the measuring device 12 for the second ultrasound examination. Specifically, after the first ultrasound examination is performed using the transmitting probe 121a1 (first transmitting probe) and the receiving probe 121b1 (first receiving probe), the measuring device 12 is switched from the transmitting probe 121a1 and the receiving probe 121b1 to the transmitting probe 121a2 (second transmitting probe) and the receiving probe 121b2 (second receiving probe) for the second ultrasound examination. In another embodiment, in the case of the liquid reflection method, after performing a first ultrasound examination using the transmitting probe 121a1 and the receiving probe 121b1, the measuring device 12 switches from the transmitting probe 121a1 and the receiving probe 121b1 to the transmitting and receiving probe 121c2 for the second ultrasound examination.

[0082] In step S7, the measuring device 12 is identified in the same manner as in step S2 above. In step S8, similar to step S3, the control device 50 (data processing unit 53) switches to the electrical circuit and program for the second ultrasound examination, i.e., the signal processing unit 52. This makes the ultrasound examination device 10 ready to perform the second ultrasound examination.

[0083] In step S9, liquid L is placed in space 20. This can be done, for example, by filling a water tank 16 with liquid L such as water and immersing the subject E and measuring device 12 in the liquid L. If the subject E is sensitive to water, the test may be performed by partially forming a layer (liquid film) of liquid L between the subject E and the measuring device 12.

[0084] In step S10, the distance between the transmitting / receiving unit 121 and the subject E is adjusted in the same manner as in step S4. However, the medium through which the ultrasound waves propagate (gas G or liquid L) differs between the first ultrasound examination and the second ultrasound examination. Therefore, in step S10, which uses liquid L, the distance adjustment is performed independently of step S4, which uses gas G. As a result of this independent distance adjustment, the distances in step S10 and step 4 are likely to be different, but they may end up being the same.

[0085] In this way, when switching between the measuring device 12 (first measuring device) used for the first ultrasound examination and the measuring device 12 (second measuring device) used for the second ultrasound examination, the ultrasound transmission and reception distance set for the first and second ultrasound examinations is set by adjusting the distance between the transmitting / receiving unit 121 and the subject E. As a result, ultrasound can be appropriately transmitted to and received from the subject E in both the first and second ultrasound examinations, and defects can be detected.

[0086] In step S11, a second ultrasound examination is performed using liquid L. Thus, after filling the space 20 with liquid L between the transmitting / receiving unit 121 and the subject E, and adjusting the distance between the transmitting / receiving unit 121 and the subject E, the second ultrasound examination is performed. This allows for the detection of defects and other issues using liquid L. [Explanation of Symbols]

[0087] 10. Ultrasound examination equipment 11 Scanning device 111 Scan Controller 112 Position measurement unit 113 Drive unit 12 Measuring device (1st measuring device, 2nd measuring device) 121 Transmitter / Receiver 1211 Transmitter / Receiver 121a Transmitting Probe 121a1 Transmitting probe (1st transmitting probe) 121a2 Transmitting probe (Second transmitting probe) 121b Receiving probe 121b1 Receiving probe (1st receiving probe) 121b2 Receiving probe (2nd receiving probe) 121c Transceiver Probe 121c2 Transceiver Probe 122 Arm 122a Arm 122b Arm 122c identification part 14 Sample stage 15 Fixing member 16 Aquariums 161 Base 17 Identification device 171 Switch 172 switches 20 space 50 Control device 51 Signal Processing Unit 511 Waveform Generator 512 Amplifier 513 Filter 514 Amplifier 52 Signal Processing Unit 521 Waveform Generator 522 Amplifier 523 Filter 524 Amplifier 53 Data Processing Unit 534 Amplifier 541 Switch 542 switches 543 Switch 544 switches 60 Display device 61 images AX1 sound axis AX2 sound axis E Subject G gas G L Liquid L

Claims

1. A measuring device equipped with a transmitting and receiving unit that transmits and receives ultrasound waves is configured to perform an ultrasound examination on a subject by switching between a first ultrasound examination in which gas is placed in the space between the transmitting and receiving unit and the subject, and a second ultrasound examination in which liquid is placed in the space. The measuring device used in the first ultrasound examination and the measuring device used in the second ultrasound examination are mounted on the same scanning device. An ultrasonic inspection device characterized by the following features.

2. An ultrasonic inspection apparatus according to claim 1, The measuring device comprises a first measuring device used in the first ultrasound examination and a second measuring device used in the second ultrasound examination. The system includes a control device that detects the switching of gases or liquids placed in the space by detecting that the first measuring device or the second measuring device has been switched. An ultrasonic inspection device characterized by the following features.

3. An ultrasonic inspection apparatus according to claim 1, The device includes an identification device for identifying the aforementioned measuring device, The identification device identifies whether the measuring device attached to the scanning device is used for the first ultrasound examination or for the second ultrasound examination. An ultrasonic inspection device characterized by the following features.

4. An ultrasonic inspection apparatus according to claim 3, The control device includes a signal processing unit that switches to either the signal processing unit used for the first ultrasound examination or the signal processing unit used for the second ultrasound examination, depending on the identification result from the identification device. An ultrasonic inspection device characterized by the following features.

5. An ultrasonic inspection apparatus according to claim 1, A sample stand on which the subject is placed, The transmitting and receiving unit includes a probe that irradiates the subject with ultrasound and receives ultrasound reflected by or transmitted through the subject, A fixing member for fixing the probe, The system includes an identification device that detects the mounting status of the measuring device to identify whether the probe fixed to the fixing member is used for the first ultrasound examination or the second ultrasound examination. An ultrasonic inspection device characterized by the following features.

6. An ultrasonic inspection apparatus according to claim 5, Furthermore, the sample stage is equipped with a water tank located below it. An ultrasonic inspection device characterized by the following features.

7. A method for operating the ultrasound inspection apparatus described in claim 1, After either the first or second ultrasound examination, the other ultrasound examination is performed on the subject who underwent the first ultrasound examination. A method for operating an ultrasound examination apparatus, characterized by the following features.

8. A method for operating an ultrasonic inspection apparatus according to claim 7, After the first ultrasound examination, the second ultrasound examination is performed on the subject who underwent the first ultrasound examination. A method for operating an ultrasound examination apparatus, characterized by the following features.

9. A method for operating an ultrasonic inspection apparatus according to claim 7, The measuring device comprises a first measuring device used for the first ultrasound examination and a second measuring device used for the second ultrasound examination. When switching between the first measuring device and the second measuring device, the transmission and reception distance of the ultrasound waves set for the first and second ultrasound examinations is determined by adjusting the distance between the transmitting / receiving unit and the subject. A method for operating an ultrasound examination apparatus, characterized by the following features.

10. A method for operating an ultrasonic inspection apparatus according to claim 7, After the first ultrasound examination, the measuring device is switched from the measuring device for the first ultrasound examination to the measuring device for the second ultrasound examination. After filling the space with the liquid between the transmitting / receiving unit and the subject and adjusting the distance between the transmitting / receiving unit and the subject, the second ultrasound examination is performed. A method for operating an ultrasound examination apparatus, characterized by the following features.

11. A method for operating an ultrasonic inspection apparatus according to claim 7, The first measuring device used in the first ultrasound examination comprises a transmitting probe that transmits ultrasound to the subject, and a receiving probe that is configured separately from the transmitting probe and receives ultrasound that has passed through the subject. The second measuring device used in the second ultrasound examination comprises a transmitting and receiving probe that transmits ultrasound to the subject and receives ultrasound reflected by the subject, After performing the first ultrasound examination using the transmitting probe and the receiving probe, the measuring device is switched from the transmitting probe and the receiving probe to the transmitting and receiving probe, After filling the space with the liquid between the transmitting / receiving unit and the subject and adjusting the distance between the transmitting / receiving unit and the subject, the second ultrasound examination is performed. A method for operating an ultrasound examination apparatus, characterized by the following features.

12. A method for operating an ultrasonic inspection apparatus according to claim 7, The first measuring device used in the first ultrasound examination comprises a first transmitting probe that transmits ultrasound to the subject, and a first receiving probe, which is configured separately from the first transmitting probe and receives ultrasound that has passed through the subject. The second measuring device used in the second ultrasound examination comprises a second transmitting probe that transmits ultrasound to the subject, and a second receiving probe, which is configured separately from the second transmitting probe and receives ultrasound that has passed through the subject. After performing the first ultrasound examination using the first transmitting probe and the first receiving probe, the measuring device is switched from the first transmitting probe and the first receiving probe to the second transmitting probe and the second receiving probe. After filling the space with the liquid between the transmitting / receiving unit and the subject and adjusting the distance between the transmitting / receiving unit and the subject, the second ultrasound examination is performed. A method for operating an ultrasound examination apparatus, characterized by the following features.

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