Functional imprint optical structures for optical devices

The method of forming optical device structures using a first and second device material layer with nanoimprint lithography addresses the inefficiencies of conventional manufacturing, resulting in improved efficiency and reduced costs while enhancing image quality and field of view.

JP2026517667APending Publication Date: 2026-06-02APPLIED MATERIALS INC

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
APPLIED MATERIALS INC
Filing Date
2024-08-08
Publication Date
2026-06-02

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Abstract

Embodiments of the present disclosure include apparatus and methods for optical devices. In one embodiment, a method for forming an optical device generally includes: arranging a first material device layer on a substrate; patterning a portion of the first material device layer to form a first plurality of device structures within the first material device layer; arranging a second material device layer on an unpatterned portion of the first device material layer; and patterning the second material device layer to form a second plurality of device structures arranged on the first material device layer.
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