Clock component having separate crossed blades and method for manufacturing the same

Abstract

The clock component having separated intersecting blades according to the present invention includes an assembly of superimposed first and second components. The first component includes first and second rigid sections connected by a first elastic blade. The second component includes third and fourth rigid sections connected by a second elastic blade. The first and third sections are rigidly connected to each other. The second and fourth sections are rigidly connected to each other. The first and second elastic blades extend in different directions in parallel planes and intersect without contact. A first spacer rigidly connected to or forming part of the first rigid section and a second spacer rigidly connected to or forming part of the second rigid section ensure a height gap between the first and second elastic blades. The first and second spacers are produced by etching a single substrate.

Description

Technical Field

[0001] The present invention relates to a timepiece component having separated crossed blades, such as, for example, a pendulum, a rocker, or a support for a pendulum or a rocker.

Background Art

[0002] Separated crossed blades are a particularly common type of flexible pivot that guides a movable section that rotates about a virtual axis of rotation with respect to a base intended to be fixed to a frame. The separated crossed blades connect the movable section to the base such that they cross without contacting each other while extending in two parallel planes and in different directions.

[0003] A technical difficulty encountered when manufacturing a component having separated crossed blades is to sufficiently separate the heights of the blades so that they do not contact each other during operation of the component, particularly while the user's wrist is moving. If the two blades contact each other, the accuracy of the timepiece will decrease. Furthermore, due to the impact received by the timepiece, the blades may collide and cause damage.

[0004] In the applicant's patent application WO2021 / 186333, in the case of a silicon component having separated crossed blades, it is proposed to increase the spacing between the blades by subjecting the blades to multiple oxidation-deoxygenation sequences. This solution is effective, but it changes the dimensions of the blades, and this effect must be predicted by calculation, which complicates the theoretical study of the component. Furthermore, the spacing achievable with this solution is relatively small (on the order of 10 micrometers). Another drawback is the length of the process, and the number of oxidation-deacidification sequences required is proportional to the desired increase in the blade spacing.

[0005] The applicant’s patent application WO2022 / 009102 describes another solution, which involves manufacturing a component having separated cross blades in the form of an assembly of two superimposed parts, each including one blade, one step of the base, and one step of the movable section, and separating these two parts in the height direction by two metal spacers in the base and the movable section, the spacers of the movable section being formed by the diametrical arms of the balance wheel. The drawback of this solution is that, due to manufacturing tolerances, it is difficult to obtain spacers of the same height in the base and the movable section. However, any difference in the height of the blade embedding portion can impose constraints on the blade, which can affect the precision of the component’s operation, and in the case of an oscillator, can cause chronometric variations, particularly in terms of absolute velocity, isochronism, or velocity deviation in position. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] International Patent WO2021 / 186333 [Patent Document 2] International Patent WO2022 / 009102 [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] The present invention aims to improve, at least partially, the above-mentioned drawbacks. [Means for solving the problem]

[0008] For this purpose, the present invention relates to a clock component having separate intersecting blades, comprising an assembly of superimposed first and second components, wherein the first component includes first and second rigid sections connected by a first elastic blade, and the second component includes third and fourth rigid sections connected by a second elastic blade, the first and third rigid sections being rigidly connected to each other, the second and fourth rigid sections being rigidly connected to each other, the first and second elastic blades extending in different directions in parallel planes and intersecting without contact, a first spacer rigidly connected to or forming part of the first rigid section, and a second spacer rigidly connected to or forming part of the second rigid section, ensuring a height gap between the first and second elastic blades, and the first and second spacers being produced by etching a single substrate.

[0009] According to a particular embodiment of the present invention, the first component includes a first layer of silicon, a second layer of silicon dioxide, and a third layer of silicon, which are produced by etching an SOI substrate, wherein the first layer defines the first stage of the first rigid section, the second rigid section, and the first elastic blade; the second layer defines only the second stage of the first rigid section and the second stage of the second rigid section; and the third layer defines only the third stage of the first rigid section and the third stage of the second rigid section, and together the second and third layers form the first and second spacers.

[0010] Preferably, the second component includes a fourth layer of silicon, a fifth layer of silicon dioxide, and a sixth layer of silicon, which are formed by etching the SOI substrate, wherein the fourth layer defines only the first layer of the third rigid section and the first layer of the fourth rigid section, the fifth layer defines only the second stage of the third rigid section and the second stage of the fourth rigid section, and the sixth layer defines the third stage of the third rigid section, the third stage of the fourth rigid section, and the second elastic blade, and the fourth and fifth layers function as spacers to ensure the height spacing between the first and second elastic blades.

[0011] According to another embodiment of the present invention, the first and second spacers are components assembled between the first and second components.

[0012] The present invention also relates to a clock oscillator comprising the clock components defined above, and more particularly to a clock oscillator comprising such a clock component and balance wheel assembly.

[0013] The present invention also relates to a method for manufacturing a watch component having separated intersecting blades, comprising the step of assembling superimposed first and second components, the first component comprising a first rigid section and a second rigid section connected by a first elastic blade, the second component comprising a third rigid section and a fourth rigid section connected by a second elastic blade, the assembly being carried out such that the first and third rigid sections are rigidly connected to each other, the second and fourth rigid sections are rigidly connected to each other, and the first and second elastic blades extend in different directions in parallel planes, intersect non-contact, and are rigidly connected to or form part of the first rigid section by a first spacer and rigidly connected to or form part of the second rigid section, thereby ensuring a vertical spacing between the first and second elastic blades, wherein the first and second spacers are formed by etching a single substrate prior to the assembly step.

[0014] According to a particular embodiment, the method includes a step of manufacturing a first component by etching a first SOI substrate constituting a single substrate, prior to the assembly step, wherein the first component obtained at the end of the manufacturing step includes a first layer of silicon, a second layer of silicon dioxide, and a third layer of silicon obtained from the first SOI substrate, the first layer defining a first stage of a first rigid section, a first stage of a second rigid section, and a first elastic blade, the second layer defining only a second stage of a first rigid section, the third layer defining only a third stage of a first rigid section, and the second and third layers together form first and second spacers.

[0015] Preferably, the method according to the present invention includes a step of manufacturing a second component by etching a second SOI substrate prior to the assembly step, wherein the second component obtained at the end of the manufacturing step includes a fourth layer of silicon, a fifth layer of silicon dioxide, and a sixth layer of silicon obtained from the second SOI substrate, wherein the fourth layer defines only the first stage of the third rigid section and the first stage of the fourth rigid section, the fifth layer defines only the second stage of the third rigid section and the second stage of the fourth rigid section, and the sixth layer defines the third stage of the third rigid section, the third stage of the fourth rigid section, and the second elastic blade, and the fourth and fifth layers function as spacers to ensure the height spacing of the first and second elastic blades after the assembly step.

[0016] According to another embodiment, the first and second spacers are assembled between the first and second parts during the assembly step.

[0017] Other features and advantages of the present invention will become apparent from reading the following detailed description, which is given with reference to the accompanying drawings. [Brief explanation of the drawing]

[0018] [Figure 1] A plan view from above of a clock component according to a specific embodiment of the present invention. [Figure 2] A perspective view of the clock component shown in FIG. 1. [Figure 3] An exploded perspective view of the clock component shown in FIG. 1. [Figure 4] A perspective view of a clock oscillator including the components shown in FIGS. 1 to 3. [Figure 5] A schematic side view of an SOI substrate used in the manufacture of the clock components shown in FIGS. 1 to 3. [Figure 6] An exploded perspective view of a clock component according to another embodiment of the present invention.

Mode for Carrying Out the Invention

[0019] In all of the following, terms such as "first", "second", "third", etc. are only used to distinguish different components or sections involved, without introducing any limitation regarding the order or method in which these components or sections are arranged.

[0020] Referring to FIGS. 1 to 4, a clock component 1 according to a specific embodiment of the present invention, which is intended to function as a flexible guide support for the template 2, is formed by an assembly of overlapping first and second components 3 and 4. The first component 3 includes first and second rigid sections 5 and 6 connected by a first elastic blade 7. The second component 4 includes third and fourth rigid sections 8 and 9 connected by a second elastic blade 10. The term "rigid" means that the sections 5, 6, 8, and 9 do not deform or the deformation is negligible during the operation of the component 1.

[0021] The first and third rigid sections 5, 8 are in contact with each other and are rigidly connected to each other by pins 11 clamped in the elastic assembly collets 12, 13 of the rigid sections 5, 8 or by other suitable assembly means or techniques such as welding or fusion bonding. The first and third rigid sections 5, 8 together form the base of the timepiece component 1 intended to be fixed to the fixed or movable frame of the timepiece mechanism, for example by screws passing through two aligned holes 14, 15 in the rigid sections 5, 8.

[0022] The second and fourth rigid sections 6, 9 are in contact with each other and are rigidly connected to each other by pins 16 joined to the elastic assembly collets 17, 18 of the rigid sections 6, 9 or by other suitable assembly means or techniques such as welding or fusion bonding. The second and fourth rigid sections 6, 9 together form the movable section of the timepiece component 1, which is suspended from the bases 5, 8 by the first and second elastic blades 7, 10 and is guided by these same elastic blades 7, 10 to be rotatable about the virtual axis of rotation A with respect to the bases 5, 8.

[0023] The first and second elastic blades 7, 10 extend in two different parallel planes and in two different directions so as to intersect in top view / bottom view. The intersection of the elastic blades 7, 10 in the stationary state defines the virtual axis of rotation A and is perpendicular to the above-mentioned parallel planes. In addition to suspending and guiding the movable sections 6, 9 in the rotational direction, the first and second elastic blades 7, 10 exert an elastic return torque on the movable sections 6, 9 tending to return them to the equilibrium position with respect to the bases 5, 8.

[0024] According to the present invention, each of the first and second components 3, 4 is a multi-layer integrally formed component resulting from the etching of a SOI (Silicon On Insulator) type substrate including a first silicon layer, a second silicon layer, and an intermediate silicon dioxide layer bonding the first and second silicon layers. FIG. 5 shows such a substrate 20, where the silicon layers are represented by 21 and 22 and the intermediate silicon dioxide layer is indicated by 23.

[0025] More specifically, the first component 3 includes a first silicon layer 24, a second silicon dioxide layer 25, and a third silicon layer 26, which are formed by the SOI substrate. The first layer 24 defines the first stage of the first rigid section 5, the first stage of the second rigid section 6, and the first elastic blade 7 connecting these two stages. Represented by lines in Figures 2 and 3, the second layer 25, located between the first and third layers 24 and 26, defines only the second stage of the first rigid section 5 and the second stage of the second rigid section 6. The third layer 26 defines only the third stage of the first rigid section 5 and the third stage of the second rigid section 6.

[0026] The second component 4 includes a fourth silicon layer 27, a fifth silicon dioxide layer 28, and a sixth silicon layer 29, all formed by the SOI substrate. The fourth layer 27 is in contact with the third layer 26 and defines only the first stage of the third rigid section 8 and the first stage of the fourth rigid section 9. The fifth layer 28, represented by a line in Figures 2 and 3, is located between the fourth and sixth layers 27 and 29 and defines only the second stage of the third rigid section 8 and the second stage of the fourth rigid section 9. The sixth layer 29 defines the third stage of the third rigid section 8, the third stage of the fourth rigid section 9, and the second elastic blade 10 connecting these third stages.

[0027] Thus, the first elastic blade 7 is present only in the first layer 24, the second elastic blade 10 is present only in the sixth layer 29, and the second to fifth layers 25 to 28 function as spacers that separate the elastic blades 7 and 10 by a sufficient distance in the height direction (i.e., parallel to the virtual axis of rotation A) so that the elastic blades 7 and 10 do not come into contact with each other during the operation of component 1 or during impacts or accelerations that component 1 is subjected to. More precisely, the sections 25a and 26a of the second layer 25 and the third layer 26 located in the first rigid section 5 form a first spacer in one embedded portion of the elastic blades 7 and 10, and the sections 25b and 26b of the second layer 25 and the third layer 26 located in the second rigid section 6 form a second spacer in the other embedded portion of the elastic blades 7 and 10. Similarly, sections 27a and 28a of the fourth and fifth layers 27 and 28 located in the third rigid section 8 form a third spacer in one embedded portion of the elastic blade 7 and 10, and sections 27b and 28b of the fourth and fifth layers 27 and 28 located in the fourth rigid section 9 form a fourth spacer in the other embedded portion of the elastic blade 7 and 10.

[0028] The second layer 25 and the third layer 26, and the fourth and fifth layers 27 and 28 that form the spacers are made from an SOI substrate together with the elastic blades 7 and 10, respectively. Their thickness is the same on the base 5 and 8 sides and the movable section 6 and 9 sides, so that the two embedded portions of each elastic blade 7 and 10 are at the same height, preventing deformation of the blades parallel to the virtual rotation axis A. In this way, the separation of the elastic blades 7 and 10 by the spacers prevents deterioration of the operational accuracy of part 1.

[0029] The manufacturing of the clock component 1 can be carried out with particular precision. An SOI substrate, such as the substrate 20 shown in Figure 5, can be etched on both silicon surfaces by DRIE (Deep Reactive Ion Etching) across the entire depth of silicon layers 21 and 22 to form the first and third layers 24, 26 or the fourth and sixth layers 27, 29 of component 1, until etching is stopped by the intermediate silicon dioxide layer 23. Subsequently, immersion of the substrate in a hydrofluoric acid (HF) bath removes the intermediate silicon dioxide layer 23 if it is not protected between the two silicon layers, thereby forming the second layer 25 or the fifth layer 28 of component 1. These DRIE and wet etching techniques are well-established and precise.

[0030] The SOI substrate can be the same for both components 3 and 4. Therefore, the two components 3 and 4 can be etched simultaneously on the same SOI substrate, one next to the other, through different or identical masks. In the latter case, one of the two components 3 and 4 is returned after being separated from the substrate for assembly with the other component. Alternatively, the two components 3 and 4 can be etched on different SOI substrates and then assembled after being separated from their respective substrates.

[0031] In another modification of the present invention, only one of the two components 3 and 4 is multilayer, and the other component is manufactured by etching a single-layer silicon substrate and therefore does not have a spacer.

[0032] The second to fifth layers 25 to 28 can be hollow in the lateral region 30 of the movable sections 6, 9 in order to lighten the movable sections 6, 9 and / or improve their aerodynamic properties. Component 1 may have interaction elements 31 in its movable sections 6, 9 that are intended to cooperate with other movable components of the clock mechanism. In the illustrated example, this interaction element 31 is a radial impulse element that functions as a roller pin and is intended to cooperate with the escapement anchor. The interaction element 31 is preferably defined by the second layer 25 and the third spacer-forming layer 26, or by the fourth layer 27 and the fifth spacer-forming layer 28, or partly by the second layer 25 and the third layer 26 and partly by the fourth layer 27 and the fifth layer 28, i.e., preferably located between two parallel planes from which the elastic blades 7, 10 extend. This eliminates the need to introduce a lever arm that could cause the movable sections 6 and 9 to pitch when the interacting element 31 cooperates with the mating component. Compared to an interacting element defined by a spacer assembled between the first and second parts 3 and 4, the connection between the interacting element 31 and the elastic blades 7 and 10 is extremely rigid because there is no play or tightening to manage with a spacer.

[0033] Before assembly, the first and second components 3,4 or their elastic blades 7,10 alone may be coated with a layer of silicon dioxide that serves as mechanical reinforcement and / or compensates for temperature-dependent changes in the rigidity of the elastic blades 7,10. More generally, the first and second components 3,4 may be coated with any suitable coating.

[0034] The height spacing of the elastic blades 7 and 10 obtained using the second layer 25 to the fifth layer 28 is typically at least 50 μm, preferably at least 100 μm, preferably at least 150 μm, preferably at least 200 μm, preferably at least 250 μm, and preferably at least 300 μm.

[0035] Figure 4 shows a watch oscillator including a balance wheel 2 assembled and supported by the movable sections 6, 9 of the movable component 1. The term “balance wheel” refers to any oscillating member, whatever its shape, that can function as a time base in conjunction with an elastic return member (here, elastic blades 7, 10). As a separate component, the balance wheel 2 can be made of a higher density material than that of component 1 to obtain a better quality factor and / or a smaller size in the oscillating surface. However, the oscillator can be manufactured according to the present invention having a balance wheel integrated with (i.e., etched with) a second or fourth rigid section 6, 9.

[0036] In the case of a watch oscillator, the chronometric accuracy can be avoided by arranging the spacers in the form of a second layer 25 through a fifth layer 28.

[0037] The clock component 1 can function as a flexible guide support for components other than the balance wheel, such as a rocker, or it can itself become a component that performs the functions of a rocker, lever, rack, finger, etc., through the rotationally guided movable components 6, 9.

[0038] In another embodiment of the present invention, Figure 6 shows a clock component having separate cross blades 1' which can perform the same function as clock component 1 and can be used for the same purposes as clock component 1. This includes an assembly of superimposed first component 3' and second component 4'. The first and second components 3' and 4' are each integral and have the same shape as components 3 and 4 in the previous figure, but are in a single layer. Thus, the first and second rigid sections 5' and 6' of the first component 3' are manufactured to the same thickness as the first elastic blade 7' by, for example, etching a single-layer substrate (DRIE or other) or etching one of the silicon layers of an SOI substrate to remove the other layers. Similarly, the third and fourth rigid sections 8' and 9' of the second component 4' are manufactured to the same thickness as the second elastic blade 10' by, for example, etching a single-layer substrate (DRIE, etc.) or etching one of the silicon layers of an SOI substrate to remove the other layers.

[0039] The first and second parts 3', 4', and thus the elastic blades 7', 10', are separated in the height direction by additional parts that form the first and second spacers 32, 33. The first spacer 32 is located between the first and third rigid sections 5', 8' and is rigidly connected to these sections 5', 8'. The second spacer 33 is located between the second and fourth rigid sections 6', 9' and is rigidly connected to these sections 6', 9'. The parts 3', 4', 32, 33 are assembled by pins 11', 16' clamped to the elastic assembly collets 12', 13', 17', 18', 34, 35 of the parts 3', 4', 32, 33, although they may also be assembled by other methods, such as brazing or fusion joining.

[0040] The first and second components 3' and 4' are made of, for example, silicon, quartz, silicon carbide, glass, sapphire, ruby, or diamond. These can be coated with layers of other materials, for example, a layer of silicon dioxide in the case of silicon. The first and second components 3' and 4' can also be made of metal or alloy, and are manufactured, for example, by LIGA or electroerosion.

[0041] The first and second spacers 32, 33 are obtained by etching (DRIE or other) the same substrate through different masks, and can therefore be considered to have exactly the same thickness, thereby preventing deformation of the elastic blades 7', 10' in the height direction. The substrate can be single-layer or SOI type. In the second case, only one layer of silicon is etched to form spacers 32, 33, and then the other layers are removed. The first and second spacers 32, 33 are typically made of silicon, quartz, silicon carbide, glass, sapphire, ruby, or diamond. They can be coated with layers of other materials, for example, a layer of silicon dioxide in the case of silicon. These materials can be the same as or different from the materials of the first and second parts 3', 4'.

[0042] The clock component 1' may include one or more pairs of additional spacers, in particular a second pair of spacers superimposed on spacers 32, 33, which may be the same substrate etched on or another substrate, resulting from etching the same substrate. Furthermore, the embodiments in Figures 1 to 3 can be combined with the embodiment in Figure 6. That is, the SOI substrate may have spacers formed by elastic blades, and further spacers of the type of spacers 32, 33 may be added. [Explanation of symbols]

[0043] 3. First part 4. Second part 5. First rigid section 6. Second rigid section 7. First elastic blade 8. Third rigid section 9. Fourth rigid section 24. First layer 25. Second Layer 26. The third layer 27. The fourth layer 28. The fifth layer 29. The sixth layer 10th 2nd Elastic Blade

Claims

1. A clock component having a separate cross blade (1;1') comprising an assembly of superimposed first parts (3;3') and second parts (4;4'), The first component (3; 3') includes a first rigid section (5; 5') and a second rigid section (6; 6') connected by a first elastic blade (7; 7'), The second component (4; 4') includes a third rigid section (8; 8') and a fourth rigid section (9; 9') connected by a second elastic blade (10; 10'), The first rigid section (5, 8; 5', 8') and the third rigid section (5, 8; 5', 8') are rigidly connected to each other. The second rigid section (6, 9; 6', 9') and the fourth rigid section (6, 9; 6', 9') are rigidly connected to each other. The first and second elastic blades (7, 10; 7', 10') extend in different directions within parallel planes and intersect non-contact, First spacers (25a, 26a; 32) rigidly connected to or forming part of the first rigid section (5; 5'), A clock component comprising a second spacer (25b, 26b; 33) rigidly connected to or forming part of the second rigid section (6), wherein the spacer ensures a vertical spacing between the first elastic blade (7, 10; 7', 10') and the second elastic blade (7, 10; 7', 10'), A clock component characterized in that the first spacers (25a, 26a; 32) and the second spacers (25b, 26b; 33) are obtained by etching a single substrate.

2. The first component (3) includes a first silicon layer (24), a second silicon dioxide layer (25), and a third silicon layer (26) obtained by etching the SOI substrate. The first layer (24) defines the first stage of the first rigid section (5), the first stage of the second rigid section (6), and the first elastic blade (7). The second layer (25) defines only the second stage of the first rigid section (5) and the second stage of the second rigid section (6), The third layer (26) defines only the third stage of the first rigid section (5) and the third stage of the second rigid section (6), The clock component according to claim 1, characterized in that the second layer and the third layer (25, 26) together form the first and second spacers (25a, 26a, 25b, 26b).

3. A clock component, The second component (4) includes a fourth silicon layer (27), a fifth silicon dioxide layer (28), and a sixth silicon layer (29) obtained from etching the SOI substrate. The fourth layer (27) defines only the first stage of the third rigid section (8) and the first stage of the fourth rigid section (9), The fifth layer (28) defines only the second stage of the third rigid section (8) and the second stage of the fourth rigid section (9), The sixth layer (29) defines the third stage of the third rigid section (8), the third stage of the fourth rigid section (9), and the second elastic blade (10). The clock component according to claim 2, characterized in that the fourth and fifth layers (27, 28) function as spacers (27a, 28a, 27b, 28b) that ensure the height spacing between the first and second elastic blades (7, 10).

4. The clock component according to claim 2 or 3, comprising an interaction element (31) intended to cooperate with a mating movable component, wherein the interaction element (31) is at least partially defined by the second and third layers (25, 26).

5. The clock component according to claim 1, characterized in that the first and second spacers (32, 33) are components assembled between the first component (3') and the second component (4').

6. The watch component according to claim 5, characterized in that the first and second spacers (32, 33) are made of silicon, quartz, silicon carbide, glass, sapphire, ruby, or diamond.

7. The clock component according to any one of claims 1 to 6, characterized in that the first and second components (3, 4; 3', 4') are assembled by pins (11, 16; 11', 16').

8. The clock component according to any one of claims 1 to 6, characterized in that the first and second components are assembled by brazing or fusion joining.

9. A clock oscillator comprising a clock component (1;1') according to any one of claims 1 to 8.

10. The oscillator for a clock according to claim 9, characterized by comprising a balance wheel (2) assembled to the clock components (1; 1').

11. A method for manufacturing a clock component having separated cross blades (1;1'), The process includes the step of assembling the superimposed first part (3;3') and second part (4;4'), The first component (3; 3') includes a first rigid section (5; 5') and a second rigid section (6; 6') connected by a first elastic blade (7; 7'), The second component (4; 4') includes a third rigid section (8; 8') and a fourth rigid section (9; 9') connected by a second elastic blade (10; 10'), The aforementioned assembly is The first rigid section (5, 8; 5', 8') and the third rigid section (5, 8; 5', 8') are rigidly connected to each other. The second rigid section (6, 9; 6', 9') and the fourth rigid section (6, 9; 6', 9') are rigidly connected to each other. The first and second elastic blades (7, 10; 7', 10') extend in different directions within parallel planes and intersect non-contact, In a method for manufacturing a clock component, the vertical spacing between the first and second elastic blades (7, 10; 7', 10') is ensured by first spacers (25a, 26a; 32) rigidly connected to or forming part of the first rigid section (5; 5') and second spacers (25b, 26b; 33) rigidly connected to or forming part of the second rigid section (6; 6'), A method for manufacturing a clock component, characterized in that the first and second spacers (25a, 26a, 25b, 26b; 32, 33) are formed by etching a single substrate before the assembly step.

12. Prior to the assembly step, the first step of manufacturing the first component (3) is performed by etching the first SOI substrate that constitutes the single substrate. The first component (3) obtained at the end of the manufacturing step includes a first silicon layer (24), a second silicon dioxide layer (25), and a third silicon layer (26) obtained from the first SOI substrate. The first layer (24) defines the first stage of the first rigid section (5), the first stage of the second rigid section (6), and the first elastic blade (7). The second layer (25) defines only the second stage of the first rigid section (5) and the second stage of the second rigid section (6), The third layer (26) defines only the third stage of the first rigid section (5) and the third stage of the second rigid section (6), The method according to claim 11, characterized in that the second and third layers (25, 26) together form the first and second spacers (25a, 26a, 25b, 26b).

13. Prior to the assembly step, the process includes the step of manufacturing the second component (4) by etching the second SOI substrate, The second component (4) obtained at the end of the above manufacturing step includes a fourth silicon layer (27), a fifth silicon dioxide layer (28), and a sixth silicon layer (29) obtained from the second SOI substrate. The fourth layer (27) defines only the first stage of the third rigid section (8) and the first stage of the fourth rigid section (9), The fifth layer (28) defines only the second stage of the third rigid section (8) and the second stage of the fourth rigid section (9), The sixth layer (29) defines the third stage of the third rigid section (8), the third stage of the fourth rigid section (9), and the second elastic blade (10). The method according to claim 12, characterized in that the fourth and fifth layers (27, 28) function as spacers (27a, 28a, 27b, 28b) that ensure the height spacing of the first and second elastic blades (7, 10) after the assembly step.

14. The method according to claim 13, characterized in that the first and second SOI substrates are a single SOI substrate.

15. The method according to claim 11, characterized in that during the assembly step, the first and second spacers (32, 33) are assembled between the first part (3') and the second part (4').

16. The method according to claim 15, characterized in that the first and second spacers (32, 33) are made of silicon, quartz, silicon carbide, glass, sapphire, ruby, or diamond.

17. The method according to any one of claims 11 to 16, characterized in that the assembly of the first and second parts (3, 4; 3', 4') is performed by pins (11, 16; 11', 16').

18. The method according to any one of claims 11 to 16, characterized in that the assembly of the first and second parts is performed by brazing or fusion joining.

19. The method according to any one of claims 11 to 18, characterized in that the clock component is an oscillator.

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