Charged particle beam devices and membrane composites usable therein

JP2026520215APending Publication Date: 2026-06-22エアセム·テクノロジーズ·リミテッド
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
エアセム·テクノロジーズ·リミテッド
Filing Date
2024-05-09
Publication Date
2026-06-22

AI Technical Summary

Technical Problem

Existing charged particle beam devices, such as scanning electron microscopes, face challenges in analyzing samples in non-vacuum environments due to issues with membrane composites that are easily torn or have a limited field of view, making it difficult to maintain a vacuum environment while allowing analysis at atmospheric pressure.

Method used

A charged particle beam device with a membrane composite that includes a pressure-sealed membrane, a support membrane layer, and a retaining frame, designed to withstand pressure differences and allow electron and X-ray transmission, featuring a circular opening for increased mechanical strength and field of view.

Benefits of technology

The improved membrane composite enhances mechanical strength and expands the field of view, enabling effective sample analysis in non-vacuum environments by maintaining a vacuum within the device while allowing interaction with atmospheric pressure samples.

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Abstract

The charged particle beam device comprises a charged particle beam source located in a first pressure environment, a sample support unit operating to support a sample located in a second pressure environment, wherein the second pressure environment has a higher pressure than the first pressure environment, and a membrane complex separating the first pressure environment from the second pressure environment. The membrane complex comprises a pressure-sealed membrane substantially permeable to a charged particle beam from the charged particle beam source, a support membrane layer having a circular aperture formed thereon to which the pressure-sealed membrane is joined, and a holding frame having a second aperture larger than and covering the circular aperture. The charged particle beam device may further comprise an electron detection subcomplex. The electron detection subcomplex comprises at least one shaping metal wire for detecting electrons resulting from the interaction between the charged particle beam and the sample.
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