Flexible temperature probe

Abstract

Various embodiments of a flexible optical fiber temperature probe are disclosed. In one embodiment, the flexible optical fiber temperature probe includes a plurality of optical fiber elements optically connected to a temperature sensing subassembly, and a flexible jacket surrounding the plurality of optical fiber elements. The flexible jacket is fixed to the sensing subassembly so as to prevent relative movement between the flexible jacket and the sensing subassembly. The sensing subassembly, the flexible jacket, and the plurality of optical fiber elements are sized to be inserted into a channel formed in a body having one or more curved sections inside (e.g., a semiconductor chamber showerhead). The temperature sensing subassembly includes at least one sensing element, such as a thermographic phosphor element, which is positioned to be thermally connected to at least one surface or area to be measured.

Claims

1. A plurality of flexible optical fiber elements having a first end and a second end, A temperature sensing subassembly is disposed on the second end of the plurality of flexible optical fiber elements and is optically connected to the second end. A fiber optic temperature probe equipped with the following features.

2. The optical fiber temperature probe according to claim 1, further comprising a flexible jacket surrounding the plurality of optical fiber elements and fixed to the temperature sensing subassembly, wherein the flexible jacket operates to prevent relative movement between the flexible jacket and the temperature sensing subassembly.

3. The optical fiber temperature probe according to claim 2, wherein the flexible jacket comprises at least one of polymer, metal, at least one fiber, or silica.

4. The optical fiber temperature probe according to claim 3, wherein the flexible jacket includes metal and has at least one of a square lock configuration, an interlock configuration, a monocoil configuration, a gooseneck configuration, a bellows configuration, or a drag chain configuration.

5. The optical fiber temperature probe according to claim 3, wherein the flexible jacket includes a bending restriction configuration.

6. The optical fiber temperature probe according to claim 3, wherein the flexible jacket has a minimum radius of curvature of 50 mm or less.

7. The optical fiber temperature probe according to claim 1, wherein each of the plurality of flexible optical fiber elements has a minimum radius of curvature of 25 mm or less.

8. The optical fiber temperature probe according to claim 1, wherein at least a portion of the plurality of flexible optical fiber elements includes a fusion-spliced ​​flexible optical fiber bundle.

9. The optical fiber temperature probe according to claim 3, wherein the flexible jacket comprises at least one of aluminum, steel, stainless steel, titanium, nickel, gold, silver, or an alloy thereof.

10. The optical fiber temperature probe according to claim 1, further comprising a rigid tip configured to surround all or at least part of the detection subassemblies and at least part of the second ends of the plurality of flexible optical fiber elements.

11. The optical fiber temperature probe according to claim 10, wherein the rigid tip includes a rigid tip made of metal.

12. With an even harder tip, (i) The rigid tip is configured to surround all or at least part of the sensing subassembly and at least part of the second ends of the plurality of flexible optical fiber elements, (ii) The rigid tip is attached to at least a portion of the flexible jacket, The optical fiber temperature probe according to claim 2.

13. The aforementioned rigid tip has a length C and a diameter or width t', (i) The optical fiber temperature probe is configured to be inserted into and / or withdrawn from a channel having a width or diameter W and an outer radius of curvature RO, (ii) The minimum width Wmin of the channel is That's all. The optical fiber temperature probe according to claim 10.

14. The system further comprises a mount configured to engage with the opening of the channel, the mount being located at a distance of the channel length from the sensing subassembly, and the mount being fixed to the flexible jacket to prevent relative movement between the flexible jacket and the sensing subassembly. The optical fiber temperature probe according to claim 1.

15. The optical fiber temperature probe according to claim 1, wherein the detection subassembly is configured to pass through the minimum radius of a channel having one or more curved portions.

16. The aforementioned detection subassembly is A ferrule having a first end and a second end, A tip having a sensing element positioned inside, the tip being fixed to the second end of the ferrule The optical fiber temperature probe according to claim 1, further comprising the above.

17. The optical fiber temperature probe according to claim 16, wherein the tip is detachably fixed to the second end of the ferrule.

18. The optical fiber temperature probe according to claim 2, wherein the flexible jacket is fixed to the sensing subassembly by one or more of the following: friction fitting, welding, crimping, overmolding, dipping coating, injecting a sealing compound, and adhesive connection.

19. The optical fiber temperature probe according to claim 18, wherein the flexible jacket is at least partially positioned between the outer and inner portions of the sensing subassembly, and the flexible jacket is crimped to either or both of the outer and inner portions.

20. A body including a channel having at least one curved portion and terminating in a surface, Temperature probe and The temperature probe is equipped with, Multiple optical fiber elements, A detection subassembly having a first end and a second end connected to the distal portions of the plurality of optical fiber elements, A flexible jacket surrounding the plurality of optical fiber elements, wherein the flexible jacket is fixed to the detection subassembly so as to prevent relative movement between the flexible jacket and the detection subassembly. The temperature probe is located within the channel and passes through the at least one curved portion such that the sensing subassembly is thermally connected to the surface. assembly.

21. The assembly according to claim 20, wherein the flexible jacket is formed from at least one of polytetrafluoroethylene, fiber, silica, or metal.

22. A bundle of optical fiber elements having a first end and a second end, A collar having a first internal passage, wherein the collar is fixed to at least one of the first end and the second end of the optical fiber element bundle within the first internal passage. A detection subassembly including a first part and a second part The first part comprises, A second internal passage for receiving the collar, wherein the first portion of the sensing subassembly is fixed to the collar within the second internal passage, A flexible jacket surrounding the aforementioned bundle of optical fiber elements, A projection formed on the collar, wherein the projection is configured to be fixed to a part of the flexible jacket. The second part includes a detection element, Optical fiber temperature probe.

23. The optical fiber temperature probe according to claim 22, wherein the first and second parts of the detection subassembly are detachably attached.

24. The optical fiber temperature probe according to claim 22, wherein the first portion of the detection subassembly is bonded and fixed to the collar.

25. One or more flexible optical fiber elements, Multiple detection points optically connected to one or more flexible optical fiber elements Equipped with, (i) The plurality of detection points are optically connected to at least a portion of the one or more flexible optical fiber elements, (ii) At least one of the plurality of detection points is configured to detect temperature, Optical fiber temperature probe.

26. The optical fiber temperature probe according to claim 25, wherein at least one of the plurality of detection points includes at least one thermographic phosphor temperature sensing element.

27. The optical fiber temperature probe according to claim 25, wherein at least one of the plurality of detection points includes at least one FBG sensor.

28. The optical fiber temperature probe according to claim 27, wherein the at least one FBG sensor is configured to detect at least one of temperature or strain.

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