Ultrasonic sensor, ultrasonic image generating device, and ultrasonic diagnostic device

Abstract

To inhibit application of a voltage outside an allowable voltage range to a receiving circuit during ultrasonic transmission.SOLUTION: An ultrasonic sensor 1 comprises: a first voltage output part 11A which is connected to a first terminal 21a of an ultrasonic transducer 21 and outputs a transmission voltage signal oscillating between a first high voltage Vdd1 and a first low voltage Vss1 in accordance with a predetermined transmission frequency; a receiving circuit 12 which is connected to a second terminal 21b of the ultrasonic transducer 21 and detects a reception voltage signal; first switch parts SWA and SWB which perform a switch operation to supply the transmission voltage signal to the first terminal during transmission and to fix the potential of the first terminal during reception; a second voltage output part 11B which is connected to the second terminal and outputs a second high voltage Vdd2 having the same polarity as that of the power voltage of the receiving circuit and having an absolute value smaller than that of the first high voltage; and second switch parts SWC and SWD which perform a switch operation to supply the second high voltage to the second terminal during transmission and to electrically separate the second voltage output part from the second terminal during reception.SELECTED DRAWING: Figure 12

Description

[Technical field]

[0001] The present invention relates to an ultrasonic sensor, an ultrasonic image generating device, and an ultrasonic diagnostic device. [Background technology]

[0002] Conventionally, ultrasonic sensors are known that apply a transmission voltage signal to a first terminal of an ultrasonic transducer to transmit ultrasonic waves from the ultrasonic transducer to an object, and detect a received voltage signal generated at a second terminal of the ultrasonic transducer by the ultrasonic waves reflected by the object.

[0003] Patent Document 1 discloses an ultrasonic sensor in which a driver circuit (first voltage output unit) that applies a transmission voltage signal is connected to one terminal (first terminal) of an ultrasonic transducer, and a receiving circuit that detects a reception voltage signal is connected to the other terminal (second terminal) of the ultrasonic transducer. The second terminal of the ultrasonic transducer in this ultrasonic sensor is grounded via a switch. This ultrasonic sensor is configured such that, when transmitting ultrasonic waves, the switch is turned on to fix the second terminal of the ultrasonic transducer to 0 V, so that a high voltage due to the transmission voltage signal of the driver circuit is not applied to the receiving circuit. On the other hand, when receiving ultrasonic waves, the application of the transmission voltage signal from the driver circuit is stopped to fix the potential of the first terminal of the ultrasonic transducer, and the switch is turned off to electrically separate the second terminal of the ultrasonic transducer from the ground, so that the receiving circuit detects the reception voltage signal generated at the second terminal of the ultrasonic transducer. Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the ultrasonic sensor disclosed in Patent Document 1, if the switch interposed between the second terminal of the ultrasonic converter and ground is constructed by a switching element made of a semiconductor element, a voltage outside the allowable voltage range may be applied to the receiving circuit when transmitting ultrasonic waves. [Means for solving the problem]

[0005] In order to solve the above-mentioned problems, the present invention provides an ultrasonic sensor that applies a transmission voltage signal to a first terminal of an ultrasonic transducer to transmit ultrasonic waves from the ultrasonic transducer to an object, and detects a reception voltage signal generated at a second terminal of the ultrasonic transducer by the ultrasonic waves reflected by the object, the sensor comprising: a first voltage output unit that is connected to the first terminal of the ultrasonic transducer and outputs a transmission voltage signal that oscillates between a first high voltage and a first low voltage in accordance with a predetermined transmission frequency; a reception circuit that is connected to the second terminal of the ultrasonic transducer and detects the reception voltage signal generated at the second terminal; a first switching unit that supplies the transmission voltage signal output from the first voltage output unit to the first terminal during transmission, and performs a switching operation to fix the potential of the first terminal during reception; and a second high voltage that is connected to the second terminal of the ultrasonic transducer and has the same polarity as a power supply voltage of the reception circuit and an absolute value smaller than that of the first high voltage. and a second low voltage having an absolute value smaller than that of the second high voltage. a second voltage output unit that outputs the second high voltage and the second low voltage a second switching unit that supplies a signal to the second terminal and performs a switching operation to electrically separate the second voltage output unit from the second terminal during reception. and the second switching unit, during transmission, repeatedly performs an operation of supplying the second low voltage from the second voltage output unit to the second terminal during a period in which the first high voltage is applied to the first terminal, and supplying the second high voltage from the second voltage output unit to the second terminal during a period in which the first low voltage is applied to the first terminal. It is characterized by: Effect of the Invention

[0006] According to the present invention, it is possible to prevent a voltage outside the allowable voltage range from being applied to a receiving circuit when transmitting ultrasonic waves. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic configuration diagram showing an example of an ultrasonic diagnostic apparatus according to an embodiment. [Diagram 2] FIG. 2 is an explanatory diagram showing the configuration of an ultrasound probe in the ultrasound diagnostic device. [Diagram 3] FIG. 2 is an explanatory diagram illustrating a schematic diagram of one ultrasonic transducer that constitutes a transducer unit of the ultrasonic probe. [Figure 4] FIG. 2 is a schematic configuration diagram showing another example of an ultrasonic diagnostic apparatus according to an embodiment. [Diagram 5]FIG. 1 is a block diagram showing an example of an ultrasound diagnostic apparatus according to an embodiment. [Figure 6] FIG. 2 is an explanatory diagram showing an example of an array arrangement of ultrasonic transducers in the ultrasonic probe. [Figure 7] FIG. 13 is an explanatory circuit diagram of a conventional ultrasonic sensor in which a driving unit that applies a transmission signal to a first terminal of an ultrasonic transducer whose second terminal is grounded, and a receiving circuit are connected via a switching element. [Figure 8] FIG. 11 is an explanatory circuit diagram of another conventional ultrasonic sensor in which a receiving circuit is connected to a second terminal of an ultrasonic transducer having a driving unit connected to a first terminal. [Figure 9] 9(a) and 9(b) are circuit diagrams illustrating the circuit operation during transmission in the conventional ultrasonic sensor shown in FIG. 8. [Figure 10] 5A and 5B are circuit diagrams illustrating a circuit operation during transmission in an ultrasonic sensor according to an embodiment. [Figure 11] 10(a) and (b) are circuit diagrams for explaining the circuit operation during transmission when the power supply voltage of the receiving circuit of the ultrasonic sensor shown in FIG. 10(a) and (b) is set to 1.2 V. [Figure 12] FIG. 13 is an explanatory diagram illustrating a simplified circuit configuration of an ultrasonic sensor according to a modified example. [Figure 13] FIG. 2 is a circuit diagram illustrating the ultrasonic sensor. [Figure 14] FIG. 10 is an explanatory diagram showing the voltages at the first and second terminals of an ultrasonic transducer in an ultrasonic sensor when the switching of the voltage applied to the second terminal of the ultrasonic transducer is delayed relative to the switching of the voltage applied to the first terminal of the ultrasonic transducer. [Figure 15] 10 is an explanatory diagram showing switching timing of a voltage applied to a second terminal of an ultrasonic transducer in a modified example. FIG. [Figure 16] FIG. 11 is an explanatory diagram showing the voltages at the first and second terminals of an ultrasonic transducer when the switching of the voltage applied to the second terminal of the ultrasonic transducer in the ultrasonic sensor occurs simultaneously with the switching of the voltage applied to the first terminal of the ultrasonic transducer. [Figure 17] 10A and 10B are explanatory diagrams showing switching of voltages of various parts in a drive unit in a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment in which the present invention is applied to an ultrasonic sensor used as an ultrasonic probe for an ultrasonic diagnostic device will be described. The ultrasonic sensor according to the present invention is not limited to being used in an ultrasonic probe of an ultrasonic diagnostic device, but can be applied to various devices. In addition, although the present embodiment is an example in which the target is a human body, the target is not limited to a living body such as a human body. The ultrasonic sensor according to the present invention can be suitably used as an ultrasonic sensor of an ultrasonic image generating device used in a wide range of fields such as non-destructive testing, underwater exploration, and personal authentication, but can also be used as an ultrasonic sensor in devices other than ultrasonic image generating devices.

[0009] FIG. 1 is a schematic diagram showing an example of an ultrasonic diagnostic apparatus according to this embodiment. 1, an ultrasound diagnostic device 100 transmits ultrasound toward a subject 200, which is an object, and has an ultrasound probe 1 as an ultrasound sensor that receives ultrasound reflected by the subject 200. The ultrasound diagnostic device 100 also has a device main body 60 that includes a display unit 61 that visualizes and displays a signal (echo signal) from the ultrasound probe 1, and an operation unit 62 that is operated by an operator.

[0010] FIG. 2 is an explanatory diagram showing the configuration of the ultrasonic probe 1. As shown in FIG. The ultrasonic probe 1 is composed of a protective layer 2, a transducer section 20, a backing material 3, and a signal processing section .

[0011] The protective layer 2 protects the transducer section 20. It is preferable that the protective layer 2 does not cause discomfort to the subject 200 when the ultrasonic probe 1 is brought into contact with the subject 200, and has an acoustic impedance relatively close to that of the human body. For example, soft silicone rubber can be used as the protective layer 2.

[0012] The transducer unit 20 has a configuration in which ultrasonic transducers 21, which are ultrasonic converters, are arranged in a one-dimensional or two-dimensional array. In this embodiment, a configuration in which the ultrasonic transducers 21 are arranged in a two-dimensional array is adopted, and a three-dimensional ultrasonic image can be obtained. In the transducer unit 20, the signal lines of the ultrasonic transducers 21 are each connected to the signal processing unit 10.

[0013] The backing material 3 is for damping unnecessary vibrations generated in the transducer portion 20 .

[0014] The signal processing unit 10 generates a transmission signal (transmission voltage signal) for transmitting ultrasonic waves from the transducer unit 20, and processes a reception signal (reception voltage signal) generated by ultrasonic waves received by the transducer unit 20. The signal processing unit 10 is connected to the device main body 60 via a cable 40.

[0015] FIG. 3 is an explanatory diagram that diagrammatically illustrates one ultrasonic transducer 21 that constitutes the transducer section 20 of the ultrasonic probe 1. As shown in FIG. 3, the ultrasonic transducer 21 is composed of a support portion 23 which is a support substrate, a PMUT (Piezoelectric Micro-Machined Ultrasonic Transducer) chip 22 formed on the upper portion of the support portion 23, a flexible substrate 24, wiring 25, a connector 27, an acoustic lens 28, etc. The ultrasonic transducer of this embodiment uses a PMUT, but other ultrasonic transducers such as a CMUT (Capacitive Micro-machined Ultrasonic Transducer) may also be used.

[0016] The PMUT chip 22 is connected to a connector 27 via wiring 25 on a flexible substrate 24. The connector 27 is connected to a circuit board that constitutes the signal processing unit 10. The support portion 23 holds the PMUT chip 22 and functions as a backing material 3.

[0017] The acoustic lens 28 may be preferably made of, for example, silicone resin, and has a function as the protective layer 2. The acoustic lens 28 is for focusing the ultrasonic waves transmitted from the PMUT chip 22 onto the measurement position of the subject 200, and has a shape (so-called dome shape) in which the center is thicker than the periphery. The acoustic lens 28 comes into close contact with the subject 200 by deforming upon contact with the subject 200, and exerts a function of refracting and converging the ultrasonic waves in a pseudo manner due to the difference in the propagation speed of the ultrasonic waves caused by the difference in thickness between the center and periphery.

[0018] The acoustic lens 28 and the PMUT chip 22 are attached to each other by an adhesive 26 serving as an adhesive layer. The adhesive 26 used to bond the acoustic lens 28 and the PMUT chip 22 is preferably a silicone resin adhesive, and is preferably a thin adhesive having a thickness of 20 μm or less.

[0019] As shown in FIG. 4, the ultrasonic diagnostic device may be configured with a display terminal 50 as a display unit, and the ultrasonic probe 1 connected to the display terminal 50 by a cable.

[0020] FIG. 5 is a block diagram showing an example of an ultrasonic diagnostic apparatus according to this embodiment. The device main body 60 is connected to the ultrasonic probe 1 via the cable 40, and transmits a transmission signal (transmission voltage signal) to the ultrasonic probe 1 via the cable 40, thereby causing the ultrasonic probe 1 to transmit ultrasonic waves. The device main body 60 also receives a reception signal (reception voltage signal) from the ultrasonic probe 1, which is generated based on the ultrasonic waves received by the ultrasonic probe 1, thereby imaging the internal state of the subject 200 as an ultrasonic image.

[0021] The device body 60 of this embodiment includes a display unit 61, an operation unit 62, a control unit 63, a signal conversion unit 64, and an image processing unit 65 as an image generating unit.

[0022] The display unit 61 is configured with a monitor device such as an LCD (Liquid Crystal Display), and displays the image generated by the image processing unit 65 .

[0023] The operation unit 62 receives, for example, an instruction operation for instructing the start of diagnosis, and an input operation for inputting information about the subject 200. The operation unit 62 is composed of, for example, an operation panel or a keyboard.

[0024] The control unit 63 controls the ultrasonic diagnostic device 100. In particular, the control unit 63 is connected to the signal processing unit 10 of the ultrasonic probe 1, and transmits timing information for generating operation timings of the driving unit 11 and the receiving circuit 12 (delay unit 14, adder 15) to the timing generation unit 13 of the signal processing unit 10 via the cable 40.

[0025] The signal conversion unit 64 receives a reception output signal (an output signal of the reception circuit 12) from the reception circuit 12 of the ultrasonic probe 1 via the cable 40. Then, the signal conversion unit 64 performs signal processing of the reception output signal using an amplifier circuit 66, a band pass filter (BPF) 67, and an A / D converter (ADC) 68, and outputs the processed signal to an image processing unit 65. Specifically, the signal conversion unit 64 amplifies the weak reception output signal using the amplifier circuit 66, then cuts low and high frequency band noise using the BPF 67, and performs A / D conversion using the ADC 68 to convert an analog signal into a digital signal, thereby outputting the reception output signal received from the ultrasonic probe 1 to the image processing unit 65 as digital data.

[0026] All or part of the signal conversion unit 64 may be included in the signal processing unit 10 of the ultrasound probe 1 .

[0027] Under the control of the control unit 63, the image processing unit 65 generates an image for ultrasonic diagnosis (ultrasound image) showing the internal state of the subject 200, using the reception output signal (digital data) received from the signal conversion unit 64.

[0028] The ultrasonic probe 1 is connected to a device body 60 via a cable 40, and is composed of a transducer unit 20 and a signal processing unit 10. As shown in Fig. 5, the signal processing unit 10 is composed of a timing generation unit 13, a driving unit 11, and a receiving circuit 12 (a delay unit 14 and an adding unit 15).

[0029] The timing generation unit 13 performs timing control of the driving unit 11 and the receiving circuit 12 (the delay unit 14 and the addition unit 15) based on timing information from the control unit 63 of the device main body 60. Specifically, the timing generation unit 13 performs timing control for the driving unit 11 so that transmission signals are applied to the ultrasonic transducers 21-1 to 21-N with a time difference according to the respective arrival distances so that ultrasonic waves transmitted from the multiple ultrasonic transducers 21-1 to 21-N arranged at different positions reach one point on the subject 200 simultaneously.

[0030] Furthermore, since there is a difference in the time it takes for the ultrasonic waves reflected by the subject 200 to reach the multiple ultrasonic transducers 21-1 to 21-N arranged at different positions, the receiving circuit 12 performs timing control to correct this. Specifically, the delay unit 14 adds a predetermined delay time to the received signal of the ultrasonic transducer having a short reach and a short arrival time. After that, the adder unit 15 adds the received signals of the multiple ultrasonic transducers 21-1 to 21-N and transmits the result as a received output signal to the signal converter 64 of the device main body 60 via the cable 40.

[0031] The ultrasonic transducers 21-1 to 21-N of this embodiment are arranged in a two-dimensional array of 192 elements (ch: channel) horizontally and 10 elements (sa: subarray) vertically, as shown in Fig. 6. In this case, the receiving circuit 12 performs delay and addition processing on 1 to 10sa receiving signals of 1920 signals from the ultrasonic transducers 21-1 to 21-1920 in each of 1 to 192ch, and aggregates them into one piece of information, and transmits them as 192 pieces of information of ch1 to 192 to the signal conversion unit 64 via the cable 40. Note that a signal amplifier may be provided in front of the delay unit 14.

[0032] In order to reduce ringing and voltage drop due to wiring between the driving unit 11 and each ultrasonic transducer 21-1 to 21-N, and to suppress a decrease in the S / N ratio due to external noise in the wiring between each ultrasonic transducer 21-1 to 21-N and the receiving circuit 12, it is preferable that the distance between the driving unit 11 and the receiving circuit 12 and each ultrasonic transducer 21-1 to 21-N is as short as possible. In order to enable high-speed communication of, for example, 10 MHz to 100 MHz for communication from the timing generation unit 13 to the driving unit 11 and the receiving circuit 12, it is preferable that the signal processing unit 10 is configured as a single integrated circuit (IC) and arranged in the immediate vicinity of the transducer unit 20.

[0033] In general, for the purpose of achieving higher resolution of ultrasonic images, there is a demand for ultrasonic sensors such as the ultrasonic probe 1 to emit ultrasonic waves at higher frequencies. However, since higher frequencies of ultrasonic waves increase the attenuation of the ultrasonic waves in the object (subject 200), it is required to transmit stronger ultrasonic waves. Therefore, it is required to apply a larger transmission signal to the ultrasonic transducer 21.

[0034] Here, in order to obtain a two-dimensional image or a three-dimensional image of an object using an ultrasonic sensor such as the ultrasonic probe 1, a delay circuit (delay unit 14) according to the distance (arrival time) from the ultrasonic transducer 21 to the object, an adder circuit (adder unit 15) that adds up the received signals of multiple ultrasonic transducers 21, and the like are required. Therefore, when ultrasonic waves are made higher frequency, it becomes necessary to speed up the circuit operations of these delay circuits, adder circuits, and the like.

[0035] For example, if the delay circuit (delay unit 14) is a sample-and-hold circuit made up of switches and capacitors, and a 10 MHz received voltage signal is sampled eight times in one period, the operating frequency will be as high as 80 Msamples / sec. If the 10 MHz sample-and-hold signal is amplified ten-fold by an adder circuit (adder unit 15), the operational amplifier used for signal amplification must have a bandwidth of 1 GHz or more, and both operate at high speed. To achieve such a high-frequency band in an integrated circuit, fine semiconductor elements are required. Since fine semiconductor elements have low voltage resistance at each node, the power supply voltage of the receiving circuit 12 (delay unit 14, adder unit 15) must be low.

[0036] In an ultrasonic sensor such as the ultrasonic probe 1, since the attenuation of ultrasonic waves in the body increases with the increase in the frequency of ultrasonic waves, it is necessary to generate stronger ultrasonic waves, and therefore a high voltage (for example, about 40V to 200V) is required for the transmission signal (transmission voltage signal) applied to the ultrasonic transducer 21 during transmission. Therefore, it is necessary to use a semiconductor element with a high withstand voltage for the circuit to which the high voltage of the transmission signal is applied. On the other hand, during reception, the ultrasonic transducer 21 receives weak ultrasonic waves (for example, ultrasonic waves with a strength of about 1% of that during transmission) attenuated in an object such as the subject 200, so the voltage of the reception signal generated by the ultrasonic transducer 21 is small, from the order of μV to the order of mV. Therefore, even if the power supply voltage of the receiving circuit 12 is a low voltage (3V, 1.2V, etc.), the receiving circuit 12 can be operated appropriately. That is, the receiving circuit 12 of the ultrasonic sensor can be configured as a high-frequency band circuit using fine semiconductor elements.

[0037] However, when such a fine semiconductor element is used in the receiving circuit 12, since the ultrasonic transducer 21 serves both as a transmitter and a receiver, it is necessary to prevent a high voltage due to a transmission signal from being applied to the receiving circuit 12 during transmission.

[0038] FIG. 7 is a circuit diagram illustrating a conventional ultrasonic sensor in which a driving unit 11 (driver circuit, etc.) that applies a transmission signal to a first terminal 21a of an ultrasonic transducer 21 whose second terminal 21b is grounded is connected to a receiving circuit 12 via a switching element SW1. A conventional ultrasonic sensor shown in Fig. 7 is described in, for example, Patent Document 2. This ultrasonic sensor is configured such that, when transmitting ultrasonic waves, the switching element SW1 is turned off to electrically separate the receiving circuit 12 from the ultrasonic transducer 21, so that a high voltage due to a transmission signal from the driving unit 11 is not applied to the receiving circuit 12. When receiving ultrasonic waves, the application of the transmission signal from the driving unit 11 is turned off and the switching element SW1 is turned on, so that a reception signal generated at the first terminal 21a of the ultrasonic transducer 21 is detected by the receiving circuit 12.

[0039] In the conventional ultrasonic sensor shown in FIG. 7, a high voltage (e.g., 40 V) is applied to the first terminal 21a of the ultrasonic transducer 21 during transmission, so that a semiconductor element with a high withstand voltage must be used for the driving unit 11 connected to the first terminal 21a. In such a driving unit 11 using a semiconductor element with a high withstand voltage, the parasitic capacitance becomes large. Therefore, in the conventional ultrasonic sensor shown in FIG. 7, during reception, the charge generated in the ultrasonic transducer 21 flows into the parasitic capacitance in the driving unit 11, and the reception signal transmitted to the receiving circuit 12 becomes small. As a result, a problem occurs in that the reception sensitivity of the ultrasonic sensor decreases.

[0040] 7, a weak reception signal generated in the ultrasonic transducer 21 during reception is transmitted to the reception circuit 12 via the switching element SW1. Therefore, there is a problem that the S / N ratio of the reception signal transmitted to the reception circuit 12 decreases due to noise from the switching element SW1.

[0041] FIG. 8 is a circuit diagram illustrating another conventional ultrasonic sensor in which a receiving circuit 12 is connected to a second terminal 21b of an ultrasonic transducer 21 having a first terminal 21a connected to a driving unit 11. 8 is described in, for example, Patent Document 1. In this ultrasonic sensor, the second terminal 21b of the ultrasonic transducer 21 is grounded via a switch SW2.

[0042] 8, when transmitting ultrasonic waves, the switch SW2 is turned on to fix the second terminal 21b of the ultrasonic transducer 21 to 0V, so that a high voltage due to the transmission signal of the driving unit 11 is not applied to the receiving circuit 12. When receiving ultrasonic waves, the application of the transmission signal from the driving unit 11 is stopped and the switch SW3 is turned on to fix the potential of the first terminal 21a of the ultrasonic transducer 21 to 0V, and the switch SW2 is turned off to electrically separate the second terminal 21b of the ultrasonic transducer 21 from the ground. As a result, the receiving circuit 12 detects the reception signal generated at the second terminal 21b of the ultrasonic transducer 21.

[0043] 8, the receiving circuit 12 is connected to a second terminal 21b of the ultrasonic transducer 21, which is different from the first terminal 21a to which the driving unit 11 is connected. Therefore, the parasitic capacitance of the driving unit 11, which uses a semiconductor element with a high withstand voltage, is prevented from reducing the received signal transmitted to the receiving circuit 12, and a decrease in the receiving sensitivity of the ultrasonic sensor is prevented.

[0044] 8, there is no switching element between the second terminal 21b of the ultrasonic transducer 21 and the receiving circuit 12. Therefore, a weak receiving signal generated in the ultrasonic transducer 21 during reception is transmitted to the receiving circuit 12 without passing through a switching element. This also eliminates the decrease in the S / N ratio of the receiving signal caused by the switching element.

[0045] However, in the conventional ultrasonic sensor shown in FIG. 8, the second terminal 21b of the ultrasonic transducer 21 is grounded via the switch SW2. If this switch SW2 is made of a semiconductor element, there is a risk that a voltage outside the allowable voltage range will be applied to the receiving circuit 12 during transmission.

[0046] 9(a) and (b) are circuit diagrams for explaining the circuit operation during transmission in the conventional ultrasonic sensor shown in FIG. 9(a) and (b), the switch SW2 interposed between the second terminal 21b of the ultrasonic transducer 21 and the ground is composed of an n-type MOSFET (Field Effect Transistor). The driving unit 11 is composed of a CMOSFET, and is configured such that the drain terminal of a p-type MOSFET (third MOS transistor) SWA, to whose source terminal Vdd (e.g., 40 V) is applied, and the drain terminal of an n-type MOSFET (fourth MOS transistor) SWB, to whose source terminal Vss (e.g., 0 V) ​​is applied, are connected to the first terminal 21a of the ultrasonic transducer 21. The driving unit 11 outputs a transmission signal (transmission voltage signal) by repeatedly turning on and off the switching element SWA made of a p-type MOSFET and turning on and off the switching element SWB made of an n-type MOSFET according to a predetermined transmission frequency.

[0047] The ultrasonic transducer 21 can be considered as a capacitance model (more precisely, an LCR model) as shown in Figures 9(a) and (b). When transmitting ultrasonic waves, the switch SW2 made of an n-type MOSFET is kept on, and the second terminal 21b of the ultrasonic transducer 21 is grounded. Therefore, as shown in Figure 9(a), when the switching elements SWA and SWB are turned on and off, a current flows instantaneously through the ultrasonic transducer 21.

[0048] At this time, at the timing (charging) when the p-type MOSFET switching element SWA switches from off to on and the n-type MOSFET switching element SWB switches from on to off, the voltage applied to the first terminal 21a of the ultrasonic transducer 21 switches from 0V (first low voltage) to 40V (first high voltage). At this timing (charging), as shown in Fig. 9(a), an instantaneous current flows from the first terminal 21a to the second terminal 21b of the ultrasonic transducer 21, and this current flows through the switch SW2 made of an n-type MOSFET toward the ground side. The current flowing through the switch SW2 made of an n-type MOSFET slightly boosts the second terminal 21b of the ultrasonic transducer 21, but remains within the range of 0V+αV (α<1V). This voltage of 0V + αV is applied to the receiving circuit 12 connected to the second terminal 21b of the ultrasonic transducer 21, but because it has the same polarity as the power supply voltage (3V) of the receiving circuit 12 and is lower than the power supply voltage, it is within the allowable voltage range of the receiving circuit 12 and will not damage or destroy the receiving circuit 12.

[0049] On the other hand, at the timing (discharging) when the p-type MOSFET switching element SWA switches from on to off and the n-type MOSFET switching element SWB switches from off to on, the voltage applied to the first terminal 21a of the ultrasonic transducer 21 switches from 40V (first high voltage) to 0V (first low voltage). At this timing (discharging), as shown in Fig. 9(b), an instantaneous current flows from the second terminal 21b to the first terminal 21a of the ultrasonic transducer 21, and this current flows from the ground side through the switch SW2 made of an n-type MOSFET. The second terminal 21b of the ultrasonic transducer 21 is stepped down by the current flowing through the switch SW2 made of an n-type MOSFET, so that it becomes lower than 0V and reaches around 0V-0.7V at which the body diode of the switch SW2 turns on. This voltage of 0V-0.7V=-0.7V has the opposite polarity to the power supply voltage (3V) of the receiving circuit 12 and is outside the allowable voltage range of the receiving circuit 12, so there is a risk that the receiving circuit 12 may be damaged or destroyed.

[0050] 10(a) and (b) are circuit diagrams for explaining the circuit operation during transmission in the ultrasonic sensor (ultrasonic probe 1) in this embodiment. In the ultrasonic sensor of this embodiment, a second voltage output unit that outputs 3 V (second high voltage) having the same polarity as the power supply voltage (3 V) of the receiving circuit 12 and an absolute value smaller than 40 V (first high voltage) applied to the first terminal 21a of the ultrasonic transducer 21 is connected to the second terminal 21b of the ultrasonic transducer 21 via a switching element SW4 made of a p-type MOSFET as a second switching unit. The configurations of the drive unit 11 and the receiving circuit 12 are the same as those in Figs. 9(a) and (b).

[0051] In the ultrasonic sensor of this embodiment, when transmitting ultrasonic waves, the switching element SW4 is maintained on, and 3 V (second high voltage) output from the second voltage output unit is supplied to the second terminal 21b of the ultrasonic transducer 21. Note that the second voltage output unit of this embodiment is the same power source as the receiving circuit 12 and outputs 3 V, which is the same as the power supply voltage of the receiving circuit 12, but is not limited thereto, and may output a voltage different from the power supply voltage of the receiving circuit 12, as long as it outputs a high voltage of the same polarity as the power supply voltage of the receiving circuit 12 and does not exceed the absolute value of the power supply voltage of the receiving circuit 12.

[0052] At the timing (discharging) when the p-type MOSFET switching element SWA switches from on to off and the n-type MOSFET switching element SWB switches from off to on, the voltage applied to the first terminal 21a of the ultrasonic transducer 21 switches from 40V (first high voltage) to 0V (first low voltage). At this timing (discharging), as shown in FIG. 10(b), an instantaneous current flows from the second terminal 21b to the first terminal 21a of the ultrasonic transducer 21, and this current flows through the switching element SW4 made of a p-type MOSFET. The current flowing through the switching element SW4 made of a p-type MOSFET slightly drops the voltage of the second terminal 21b of the ultrasonic transducer 21 from 3V, but does not drop below 0V. In addition, since this is equal to or lower than the power supply voltage (3V) of the receiving circuit 12, it is within the allowable voltage range of the receiving circuit 12. Therefore, the receiving circuit 12 is not damaged or destroyed.

[0053] At the timing (charging) when the p-type MOSFET switching element SWA switches from off to on and the n-type MOSFET switching element SWB switches from on to off, the voltage applied to the first terminal 21a of the ultrasonic transducer 21 switches from 0V (first low voltage) to 40V (first high voltage). At this timing (charging), as shown in Fig. 10(a), an instantaneous current flows from the first terminal 21a to the second terminal 21b of the ultrasonic transducer 21, and this current flows through the switching element SW4 made of a p-type MOSFET. Due to the current flowing through the switching element SW4 made of a p-type MOSFET, the second terminal 21b of the ultrasonic transducer 21 reaches approximately 3V+0.7V at which the body diode of the switch SW2 turns on. This voltage of 3V+0.7V=3.7V exceeds the power supply voltage (3V) of the receiving circuit 12, but is within the allowable voltage range of the receiving circuit 12 (usually 4.2V or less, which is 1.4 times the power supply voltage (3V)). Therefore, it will not damage or destroy the receiving circuit 12.

[0054] [Modifications] Next, a modified example of the circuit configuration of the ultrasonic sensor (ultrasonic probe 1) in this embodiment will be described. In order to speed up the circuit operation of the receiving circuit 12 in order to accommodate higher ultrasonic frequencies, the receiving circuit 12 must be constructed using fine semiconductor elements, and the power supply voltage must be reduced accordingly. In this modification, the power supply voltage of the receiving circuit 12 is set to 1.2 V, which is lower than the 3 V in the above embodiment.

[0055] 11(a) and (b) are circuit diagrams for explaining the circuit operation during transmission when the power supply voltage of the receiving circuit 12 of the ultrasonic sensor (ultrasonic probe 1) shown in FIG. 10(a) and (b) is set to 1.2 V. FIG. 12 is an explanatory diagram showing a simplified circuit configuration of an ultrasonic sensor (ultrasonic probe 1) in this modified example. 11(b), when a momentary current flows from the second terminal 21b to the first terminal 21a of the ultrasonic transducer 21 (during discharge), the second terminal 21b of the ultrasonic transducer 21 is slightly stepped down from 1.2V. Therefore, the receiving circuit 12 is not damaged or destroyed.

[0056] 11(a), when an instantaneous current flows from the first terminal 21a to the second terminal 21b of the ultrasonic transducer 21 (during charging), the second terminal 21b of the ultrasonic transducer 21 reaches approximately 1.2V+0.7V at which the body diode of the switch SW2 turns on. This voltage of 1.2V+0.7V=1·9V exceeds the allowable voltage range of 1.68V, which is 1.4 times the power supply voltage (1.2V) of the receiving circuit 12, and so there is a risk of damaging or destroying the receiving circuit 12.

[0057] FIG. 13 is a circuit explanatory diagram showing an ultrasonic sensor (ultrasonic probe 1) in this modified example. In the driving unit 11 in this modified example, the configuration of the first voltage output unit and first switching unit (hereinafter referred to as the "first driving unit 11A") that outputs a transmission signal to the first terminal 21a of the ultrasonic transducer 21 is similar to that in Figures 9 to 11, in that the drain terminal of a p-type MOSFET (third MOS transistor) SWA to whose source terminal Vdd1 (first high voltage = 40 V) is applied, and the drain terminal of an n-type MOSFET (fourth MOS transistor) SWB to whose source terminal Vss1 (second low voltage = 0 V) ​​is applied are connected to the first terminal 21a of the ultrasonic transducer 21.

[0058] On the other hand, in the driving unit 11 of this modified example, the configuration of the second voltage output unit and second switching unit for supplying voltage to the second terminal 21b of the ultrasonic transducer 21 (hereinafter referred to as the "second driving unit 11B") is configured such that the drain terminal of a p-type MOSFET (first MOS transistor) SWC to whose source terminal Vdd2 (second high voltage = 1.2 V) is applied, and the drain terminal of an n-type MOSFET (second MOS transistor) SWD to whose source terminal Vss2 (ground voltage which is a second low voltage = 0 V) ​​is applied are connected to the second terminal 21b of the ultrasonic transducer 21.

[0059] In this modification, the operation switching between transmitting and receiving ultrasonic waves is performed by the operation switching signal rc. Specifically, when the operation switching signal rc is at L level, the ultrasonic wave transmission operation is performed, and when the operation switching signal rc is at H level, the ultrasonic wave reception operation is performed.

[0060] Specifically, when transmitting ultrasonic waves, a transmission pulse signal in corresponding to a predetermined transmission frequency sent from the timing generating unit 13 is input to the driving unit 11. Since the operation switching signal rc is at H level, the transmission pulse signal in input to the driving unit 11 is input as is to the second driving unit 11B as the second transmission pulse signal in. The second transmission pulse signal in input to the second driving unit 11B is input via delay circuits 18C and 18D to the gate terminal pg2 of the switching element SWC made of a p-type MOSFET and the gate terminal ng2 of the switching element SWD made of an n-type MOSFET.

[0061] On the other hand, the transmission pulse signal in input to the driver 11 is inverted by an inverter (NOT circuit) 16 to become a first transmission pulse signal inb, which is input to the first driver 11A. The first transmission pulse signal inb input to the first driver 11A is then input via level shift circuits 17a, 17b and delay circuits 18A, 18B to the gate terminal pg1 of the switching element SWA made of a p-type MOSFET and the gate terminal ng1 of the switching element SWB made of an n-type MOSFET.

[0062] The level shift circuits 17a and 17b are configured so that, for example, when the transmission pulse signal in is a voltage signal that repeatedly oscillates between 1.2 V and 0 V, the first level shift circuit 17a outputs a voltage signal that repeatedly oscillates between 5 V and 0 V, and the second level shift circuit 17b outputs a voltage signal that repeatedly oscillates between 40 V and 35 V.

[0063] Moreover, the delay circuits 18A to 18D delay the change timing only when the input signal changes from H level to L level or from L level to H level. As a specific example, the delay circuit 18A delays the change timing by 10 ns when the input signal changes from H level to L level. The delay circuit 18B delays the change timing by 10 ns when the input signal changes from L level to H level. The delay circuit 18C delays the change timing by 5 ns when the input signal changes from H level to L level. The delay circuit 18D delays the change timing by 5 ns when the input signal changes from L level to H level.

[0064] In this modification, when transmitting ultrasonic waves, when the transmission pulse signal in is at H level, the first transmission pulse signal inb at L level is input to the first drive unit 11A, and the gate terminals pg1, ng1 of the switching elements SWA, SWB become L level. At this time, the switching element SWA made of a p-type MOSFET is turned on, and the switching element SWB made of an n-type MOSFET is turned off, so that Vdd1 (=40 V) is applied to the first terminal 21a of the ultrasonic transducer 21.

[0065] Furthermore, when the transmission pulse signal in is at L level, the first driving unit 11A receives the first transmission pulse signal inb at H level, and the gate terminals pg1, ng1 of the switching elements SWA, SWB become H level. At this time, the switching element SWA made of a p-type MOSFET is turned off, and the switching element SWB made of an n-type MOSFET is turned on, so that Vss1 (=0V) is applied to the first terminal 21a of the ultrasonic transducer 21.

[0066] Therefore, a transmission voltage signal oscillating between 40 V and 0 V is applied to the first terminal 21a of the ultrasonic transducer 21 in response to switching between H level and L level of the transmission pulse signal in according to a predetermined transmission frequency.

[0067] On the other hand, in this modification, when the transmission pulse signal in is at H level during transmission of ultrasonic waves, the second transmission pulse signal in at H level is input to the second drive unit 11B, and the gate terminals pg2, ng2 of the switching elements SWC, SWD become H level. At this time, the switching element SWC made of a p-type MOSFET is turned off, and the switching element SWD made of an n-type MOSFET is turned on, so that Vss2 (=0V) is applied to the second terminal 21b of the ultrasonic transducer 21.

[0068] On the other hand, when the transmission pulse signal in is at L level, the second transmission pulse signal in at L level is input to the second drive unit 11B, and the gate terminals pg2, ng2 of the switching elements SWC, SWD are at L level. At this time, the switching element SWC made of a p-type MOSFET is turned on, and the switching element SWD made of an n-type MOSFET is turned off, so that Vdd2 (=1.2 V) is applied to the second terminal 21b of the ultrasonic transducer 21.

[0069] Therefore, a voltage signal oscillating between 0V and 1.2V is applied to the second terminal 21b of the ultrasonic transducer 21 in response to switching between H level and L level of the transmission pulse signal in according to a predetermined transmission frequency.

[0070] As described above, in this modification, when transmitting ultrasonic waves, the supply of Vdd2 (=1.2V) to the second terminal 21b is turned off during the period when Vdd1 (=40V) is applied to the first terminal 21a, and turned on during the period when Vss1 (=0V) is applied to the first terminal 21a. This allows a voltage signal (a voltage signal that oscillates between 0V and 1.2V) that is an inverted signal of the transmission voltage signal (a voltage signal that oscillates between 40V and 0V) applied to the first terminal 21a of the ultrasonic transducer 21 to be applied to the second terminal 21b of the ultrasonic transducer 21.

[0071] In this case, when the voltage applied to the first terminal 21a of the ultrasonic transducer 21 is switched from 40V (first high voltage) to 0V (first low voltage) (40V→0V), the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is switched from a state in which 1.2V (second high voltage) is not supplied (i.e., a state in which 0V (second low voltage) is applied) to a state in which 1.2V (second high voltage) is supplied (a state in which 1.2V (second high voltage) is applied) (0V→1.2V). At this timing (40V→0V), as shown in FIG. 13, a current I2 flows instantaneously through the ultrasonic transducer 21, and this current I2 flows through the body diode of the switching element SWD made of an n-type MOSFET of the second driving unit 11B, thereby lowering the potential of the second terminal 21b of the ultrasonic transducer 21 by about 0.7V.

[0072] At this time, in this modified example, the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is switched from 0 V (second low voltage) to 1.2 V (second high voltage) (0 V → 1.2 V), so that the potential of the second terminal 21b of the ultrasonic transducer 21 rises from 0 V. As a result, even if the potential of the second terminal 21b of the ultrasonic transducer 21 is pulled down by the current I2, the second terminal 21b of the ultrasonic transducer 21 can be prevented from becoming a negative potential, and a negative voltage outside the allowable voltage range (a voltage of opposite polarity to the power supply voltage of the receiving circuit 12) is prevented from being applied to the receiving circuit 12.

[0073] In this modification, when the voltage applied to the first terminal 21a of the ultrasonic transducer 21 is switched from 0V (first low voltage) to 40V (first high voltage) (0V→40V), the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is switched from a state in which 1.2V (second high voltage) is supplied (a state in which 1.2V (second high voltage) is applied) to a state in which 1.2V (second high voltage) is supplied (i.e., a state in which 0V (second low voltage) is applied) (1.2V→0V). At this time, at this timing (0V→40V), as shown in FIG. 13, a current I1 flows instantaneously through the ultrasonic transducer 21, and this current I1 flows through the body diode of the switching element SWC made of a p-type MOSFET of the second driving unit 11B, thereby raising the potential of the second terminal 21b of the ultrasonic transducer 21 by about 0.7V.

[0074] At this time, in this modified example, the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is switched from 1.2 V (second high voltage) to 0 V (second low voltage) (1.2 → 0 V), so that the potential of the second terminal 21b of the ultrasonic transducer 21 drops from 1.2 V (second high voltage). As a result, even if the potential of the second terminal 21b of the ultrasonic transducer 21 rises due to the current I1, the potential of the second terminal 21b of the ultrasonic transducer 21 is prevented from rising significantly (by about 0.7 V) from 1.2 V, and can be kept at a potential of approximately 1.2 V (second high voltage) or less.

[0075] Therefore, according to this modified example, even in the case of a receiving circuit 12 that uses fine semiconductor elements and has a low power supply voltage (1.2 V), it is possible to prevent an overvoltage that exceeds the allowable voltage range from being applied to the receiving circuit 12, thereby preventing damage or destruction of the receiving circuit 12.

[0076] Here, when transmitting ultrasonic waves, if the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is delayed relative to the switching of the voltage applied to the first terminal 21a of the ultrasonic transducer 21, a voltage outside the allowable voltage range may be applied to the receiving circuit.

[0077] FIG. 14 is an explanatory diagram showing the voltages at the first terminal 21a and the second terminal 21b of the ultrasonic transducer 21 when the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is delayed relative to the switching of the voltage applied to the first terminal 21a of the ultrasonic transducer 21. When the voltage applied to the first terminal 21a of the ultrasonic transducer 21 is switched from 0V (first low voltage) to 40V (first high voltage) (0V→40V), that is, when the output logical value of the first terminal 21a in Fig. 14 changes from L level to H level, a current I1 flows through the ultrasonic transducer 21 instantaneously immediately thereafter, and the potential of the second terminal 21b of the ultrasonic transducer 21 is raised by about 0.7V, as shown in Fig. 14. At this time, since the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is delayed (since the output logical value of the second terminal 21b is still at H level as shown in Fig. 14), 1.2V (second high voltage) is applied to the second terminal 21b of the ultrasonic transducer 21. As a result, the potential of the second terminal 21b of the ultrasonic transducer 21 is raised from 1.2V by about 0.7V, and a voltage of 1.2V+0.7V=1.9V is applied to the receiving circuit 12. This exceeds the allowable voltage range of 1.68V, which is 1.4 times the power supply voltage (1.2V) of the receiving circuit 12, and there is a risk that the receiving circuit 12 may be damaged or destroyed.

[0078] Similarly, when the voltage applied to the first terminal 21a of the ultrasonic transducer 21 is switched from 40V (first high voltage) to 0V (first low voltage) (40V→0V), that is, when the output logical value of the first terminal 21a in FIG. 14 changes from H level to L level, a current I2 flows through the ultrasonic transducer 21 instantaneously immediately thereafter, and the potential of the second terminal 21b of the ultrasonic transducer 21 is lowered by about 0.7V. At this time, since the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is delayed (because the output logical value of the second terminal 21b is still at L level as shown in FIG. 14), 0V (second low voltage) is applied to the second terminal 21b of the ultrasonic transducer 21. Therefore, the potential of the second terminal 21b of the ultrasonic transducer 21 is lowered from 0V by about 0.7V, and a voltage of 0V-0.7V=-0.7V is applied to the receiving circuit 12. Therefore, a voltage of opposite polarity to the power supply voltage (1.2 V) of the receiving circuit 12 (a voltage outside the allowable voltage range) is applied to the receiving circuit 12, which may damage or destroy the receiving circuit 12.

[0079] FIG. 15 is an explanatory diagram showing the switching timing of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 in this modified example. In this modified example, the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is switched before the voltage applied to the first terminal 21a of the ultrasonic transducer 21 is switched.

[0080] In this modification, when the voltage applied to the first terminal 21a of the ultrasonic transducer 21 is switched from 0V (first low voltage) to 40V (first high voltage) (0V→40V), that is, when the output logical value of the first terminal 21a in FIG. 15 is changed from L level to H level, the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is already switched from 1.2V (second high voltage) to 0V (second low voltage) (after the output logical value of the second terminal 21b has already switched from H level to L level as shown in FIG. 15). Therefore, the voltage of the second terminal 21b of the ultrasonic transducer 21 has already dropped from 1.2V to 0V, and even if the current I1 flows through the ultrasonic transducer 21, the potential of the second terminal 21b of the ultrasonic transducer 21 does not exceed 1.2V as shown in FIG. 15. Therefore, a voltage exceeding the allowable voltage range is not applied to the receiving circuit 12, and damage or destruction of the receiving circuit 12 is suppressed.

[0081] Similarly, in this modified example, when the voltage applied to the first terminal 21a of the ultrasonic transducer 21 during transmission of ultrasonic waves is switched from 40V (first high voltage) to 0V (first low voltage) (40V→0V), that is, when the output logical value of the first terminal 21a in FIG. 15 is changed from H level to L level, the voltage applied to the second terminal 21b of the ultrasonic transducer 21 has already been switched from 0V (second low voltage) to 1.2V (second high voltage) (after the output logical value of the second terminal 21b has already been switched from L level to H level as shown in FIG. 15). Therefore, the voltage of the second terminal 21b of the ultrasonic transducer 21 has already been boosted from 0V to 1.2V, and even if the current I2 flows through the ultrasonic transducer 21, the potential of the second terminal 21b of the ultrasonic transducer 21 does not fall below 0V as shown in FIG. 15. Therefore, a voltage outside the allowable voltage range is not applied to the receiving circuit 12, and damage or destruction of the receiving circuit 12 is suppressed.

[0082] In this modification, such a transmission operation causes a transmission voltage signal that oscillates between approximately Vss1 (=0V)-0.7V=-0.7V and Vdd1 (=40V)+0.7V=40.7V to be applied to the first terminal 21a of the ultrasonic transducer 21. For example, as shown in FIG. 15, during the period when the second terminal switches from L level to H level and the first terminal switches from H level to L level, the output voltage of the second voltage output unit changes first. Therefore, the body diode of the p-type MOSFET is likely to be turned on, and a voltage of approximately 40.7V may be applied to the switching element SWA and the switching element SWB of the first voltage output unit. However, since the voltage of 40.7V is within the allowable voltage range of these switching elements SWA and SWB (usually 56V or less, which is 1.4 times the power supply voltage (40V)), the switching elements SWA and SWB, which have such a high withstand voltage, are not damaged.

[0083] In the period between when the second terminal switches from H level to L level and when the first terminal switches from L level to H level, the output voltage of the second voltage output unit changes first, so the body diode of the n-type MOSFET is likely to turn on. In this case, a voltage of about -0.7V may be applied to the switching element SWA and switching element SWB of the first voltage output unit, but the switching elements SWA and SWB, which have a high withstand voltage, will not be damaged.

[0084] In addition, even if the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is switched simultaneously with the voltage applied to the first terminal 21a of the ultrasonic transducer 21, as shown in Fig. 16, it is possible to prevent a voltage outside the allowable voltage range from being applied to the receiving circuit 12, and to suppress damage or destruction of the receiving circuit 12. However, even in such a simultaneous configuration, some factor may cause a situation in which the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is delayed from the switching of the voltage applied to the first terminal 21a of the ultrasonic transducer 21. In this case, a voltage outside the allowable voltage range may be applied to the receiving circuit 12, which may damage or destroy the receiving circuit 12.

[0085] As in this modification, if the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 is set before the switching of the voltage applied to the first terminal 21a of the ultrasonic transducer 21, even if some of the above-mentioned factors occur, it is possible to prevent the switching of the voltage applied to the second terminal 21b of the ultrasonic transducer 21 from being delayed compared to the switching of the voltage applied to the first terminal 21a of the ultrasonic transducer 21. Therefore, it is possible to stably prevent a voltage outside the allowable voltage range from being applied to the receiving circuit 12, and it is possible to more safely prevent the receiving circuit 12 from being damaged or destroyed.

[0086] FIG. 17 is an explanatory diagram showing how the voltages of the various parts of the drive unit 11 are switched in this modified example. 17 shows the relationship between the first transmission pulse signal inb and the second transmission pulse signal in, the gate terminal pg1 of the switching element SWA and the gate terminal ng1 of the switching element SWB in the first drive unit 11A, the gate terminal pg2 of the switching element SWC and the gate terminal ng2 of the switching element SWD in the second drive unit 11B, and the voltages of the first terminal 21a and the second terminal 21b of the ultrasonic transducer 21. For simplicity of explanation, in FIG. 17, the delay times of the inverter 16 and the level shift circuits 17a and 17b are set to zero.

[0087] In the first drive unit 11A, the delay circuits 18A and 18B provide a 10 ns delay control during which both of the two switching elements SWA and SWB are simultaneously turned off. Similarly, in the second drive unit 11B, the delay circuits 18C and 18D provide a 5 ns delay control during which both of the two switching elements SWC and SWD are simultaneously turned off. Due to this difference in delay control time, in this modification, the voltage of the second terminal 21b to which the voltage is applied from the second drive unit 11B starts to generate a potential change that inverts the output logical value 5 ns earlier than the voltage of the first terminal 21a to which the voltage is applied from the first drive unit 11A.

[0088] In this modification, when receiving ultrasonic waves, one of the switching elements SWA and SWB of the first driving unit 11A is maintained on, and the potential of the first terminal 21a of the ultrasonic transducer 21 is fixed to Vdd1 (=40V) or Vss1 (=0V). In the example of FIG. 13, since the operation switching signal rc is at H level, the potential of the first terminal 21a of the ultrasonic transducer 21 is fixed to Vss1 (=0V) regardless of the transmission pulse signal in. On the other hand, since the operation switching signal rc is at H level, both of the switching elements SWA and SWB of the second driving unit 11B are maintained off regardless of the transmission pulse signal in. The second terminal 21b of the ultrasonic transducer 21 is actually held at a predetermined potential via a high resistance, and the reception signal generated at the second terminal 21b of the ultrasonic transducer 21 is detected by the receiving circuit 12.

[0089] The above description is merely an example, and each of the following aspects provides unique effects. [First aspect] The first aspect is an ultrasonic sensor (e.g., ultrasonic probe 1) that applies a transmission voltage signal to a first terminal 21a of an ultrasonic converter (e.g., ultrasonic transducer 21) to transmit ultrasonic waves from the ultrasonic converter to an object (e.g., subject 200) and detects a reception voltage signal generated at a second terminal 21b of the ultrasonic converter by the ultrasonic waves reflected by the object, the sensor including a first voltage output unit (e.g., drive unit 11, first drive unit 11A) that is connected to the first terminal of the ultrasonic converter and outputs a transmission voltage signal that oscillates between a first high voltage (e.g., 40V, Vdd1) and a first low voltage (e.g., 0V, Vss1) according to a predetermined transmission frequency, and a reception circuit 12 that is connected to the second terminal of the ultrasonic converter and detects the reception voltage signal generated at the second terminal. a first switching unit (e.g., switching elements SWA, SWB) which performs a switching operation to supply the transmission voltage signal output from the first voltage output unit to the first terminal during transmission and fix the potential of the first terminal during reception; a second voltage output unit which is connected to the second terminal of the ultrasonic converter and outputs a second high voltage (e.g., 3 V, 1.2 V, Vdd2) having the same polarity as the power supply voltage of the receiving circuit (e.g., 3 V, 1.2 V) and having an absolute value smaller than that of the first high voltage; and a second switching unit (e.g., switching elements SW4, SWC, SWD) which supplies the second high voltage output from the second voltage output unit to the second terminal during transmission and performs a switching operation to electrically separate the second voltage output unit from the second terminal during reception. Conventionally, there is known an ultrasonic sensor in which a driver circuit (first voltage output unit) that applies a transmission voltage signal to a first terminal of an ultrasonic transducer whose second terminal is grounded, and a receiving circuit are connected via a switching element (Patent Document 2). This ultrasonic sensor is configured such that, when transmitting ultrasonic waves, the switching element is turned off to electrically separate the receiving circuit from the ultrasonic transducer, so that a high voltage due to the transmission voltage signal of the driver circuit is not applied to the receiving circuit. When receiving ultrasonic waves, the application of the transmission voltage signal from the driver circuit is turned off and the switching element is turned on, and the receiving circuit detects the receiving voltage signal generated at the second terminal of the ultrasonic transducer. In an ultrasonic sensor, in order to apply a high voltage (first high voltage) to the first terminal of the ultrasonic transducer during transmission, it is necessary to use a semiconductor element with a high withstand voltage in the driver circuit (first voltage output section) connected to the first terminal. In a driver circuit using a semiconductor element with such a high withstand voltage, the parasitic capacitance becomes large. Therefore, in an ultrasonic sensor in which a receiving circuit is connected to the first terminal of the ultrasonic transducer via a switching element, the charge generated in the ultrasonic transducer during reception flows into the parasitic capacitance in the driver circuit, and the received voltage signal transmitted to the receiving circuit becomes small. As a result, a problem occurs in that the receiving sensitivity of the ultrasonic sensor decreases. In addition, in an ultrasonic sensor in which a receiving circuit is connected to the first terminal of an ultrasonic transducer via a switching element, a weak receiving voltage signal generated in the ultrasonic transducer during reception is transmitted to the receiving circuit via the switching element, which causes a problem that the S / N ratio of the receiving voltage signal transmitted to the receiving circuit is reduced due to noise from the switching element. In contrast, the ultrasonic sensor of this embodiment employs a configuration in which a receiving circuit is connected to a second terminal of an ultrasonic converter having a first terminal connected to a first voltage output unit, similar to the ultrasonic sensor disclosed in the above-mentioned Patent Document 1. Therefore, it is possible to prevent the received voltage signal transmitted to the receiving circuit from being reduced due to the parasitic capacitance of the first voltage output unit and the first switching unit, which use semiconductor elements with high withstand voltage, and thus to prevent a decrease in the receiving sensitivity of the ultrasonic sensor. Moreover, in the ultrasonic sensor of this embodiment, similar to the ultrasonic sensor disclosed in the above-mentioned Patent Document 1, there is no switching element between the second terminal of the ultrasonic converter and the receiving circuit. Therefore, the weak receiving voltage signal generated in the ultrasonic converter during reception is transmitted to the receiving circuit without passing through the switching element. Therefore, it is possible to eliminate the decrease in the S / N ratio of the receiving voltage signal caused by the switching element. However, in the ultrasonic sensor disclosed in the above-mentioned Patent Document 1, the second terminal of the ultrasonic converter is grounded via a switch. If this switch is constructed of a semiconductor element, there is a risk that a voltage outside the allowable voltage range will be applied to the receiving circuit during transmission. To explain in detail, since the ultrasonic transducer can generally be considered as a capacitance model (more precisely, an LCR model), when the voltage applied to the first terminal of the ultrasonic transducer switches from 0V (first low voltage with a small absolute value) to 40V (first high voltage with a large absolute value) (when charging) and when the voltage switches from 40V (first high voltage) to 0V (first low voltage) (when discharging), a current flows instantaneously through the ultrasonic transducer. At this time, for example, if the switch is composed of an n-type MOS transistor semiconductor element, even if an instantaneous current flows when the voltage applied to the first terminal of the ultrasonic transducer switches from 0V to 40V (when charging), the potential of the second terminal of the ultrasonic transducer falls within the range of Vss (0V) + αV. However, when the voltage switches from 40V to 0V (when discharging), the instantaneous current flows, and the potential of the second terminal of the ultrasonic transducer becomes lower than Vss (0V), and reaches approximately -0.7V at which the body diode turns on. As a result, a negative voltage (a voltage of opposite polarity to the power supply voltage of the receiving circuit) that is outside the allowable voltage range is applied to the receiving circuit. Therefore, in this embodiment, a second voltage output unit that outputs a second high voltage having the same polarity as the power supply voltage of the receiving circuit and a smaller absolute value than the high voltage (first high voltage of the first voltage output unit) applied to the first terminal of the ultrasonic converter is connected to the second terminal of the ultrasonic converter. Then, at the time of transmission, the second high voltage output from the second voltage output unit is supplied to the second terminal of the ultrasonic converter by the second switching unit. In this case, even if a momentary current flows at the timing (at the time of discharge) when the voltage applied to the first terminal of the ultrasonic converter switches from the first high voltage to the first low voltage, the potential of the second terminal of the ultrasonic converter becomes a potential that is lower by about αV (α<1V) than the second high voltage. Therefore, by setting the absolute value of the second high voltage to αV or more, it is possible to prevent a negative voltage (a voltage of the opposite polarity to the power supply voltage of the receiving circuit) that is outside the allowable voltage range from being applied to the receiving circuit at the time of transmission. However, at the timing (during charging) when the voltage applied to the first terminal of the ultrasonic converter switches from the first low voltage to the first high voltage, an instantaneous current flows, causing the potential of the second terminal of the ultrasonic converter to rise from the second high voltage by about 0.7 V, and this voltage is applied to the receiving circuit. At this time, if the voltage that is about 0.7 V higher than the second high voltage exceeds the allowable voltage range of the receiving circuit (for example, a voltage 1.4 times the power supply voltage of the receiving circuit), the receiving circuit may be destroyed. Therefore, it is preferable to set the second high voltage to αV or higher in a range in which the voltage that is about 0.7 V higher than the second high voltage does not exceed the allowable voltage range of the receiving circuit. In particular, the larger the absolute value of the second high voltage, the smaller the difference with the first high voltage becomes, and the smaller the transmission voltage signal applied to the ultrasonic transducer becomes, so it is preferable to set the second high voltage as small as possible.

[0090] [Second aspect] A second aspect is the first aspect, characterized in that the second high voltage is substantially the same as a power supply voltage of the receiving circuit. According to this aspect, the configuration can be simplified compared to a case in which the second high voltage output from the second voltage output section is different from the power supply voltage of the receiving circuit. In addition, in this aspect, as described above, the second terminal of the ultrasonic converter to which the receiving circuit is connected is connected to the second voltage output unit and the second switching unit. Therefore, if the parasitic capacitance of the semiconductor element of the second voltage output unit and the second switching unit is large, the electric charge generated in the ultrasonic converter during reception may flow into the parasitic capacitance of the second voltage output unit and the second switching unit, causing the receiving voltage signal transmitted to the receiving circuit to become smaller, resulting in a problem of a decrease in the receiving sensitivity of the ultrasonic sensor. According to this aspect, it is also possible to solve this problem as follows. In recent years, ultrasonic sensors are required to operate at higher frequencies, and accordingly, there is a demand for faster circuit operation of the receiving circuit. When an integrated circuit that operates in a high frequency band is adopted as the receiving circuit to speed up the circuit operation, a fine semiconductor element is used for the receiving circuit. Since the withstand voltage of each node of the fine semiconductor element is low, the power supply voltage of the receiving circuit is low. Therefore, in this embodiment, when realizing a higher frequency of the ultrasonic sensor, the second high voltage applied to the second terminal of the ultrasonic converter is a voltage as small as the power supply voltage of the receiving circuit using the fine semiconductor element. If the second high voltage applied to the second terminal of the ultrasonic converter is as small as the power supply voltage of the receiving circuit, fine semiconductor elements can also be used for the second voltage output unit and the second switching unit that use the second high voltage. As a result, the parasitic capacitance of the second voltage output unit and the second switching unit is reduced, and the problem of the reception sensitivity of the ultrasonic sensor decreasing is solved.

[0091] [Third aspect] A third aspect is characterized in that, in the first or second aspect, the second voltage output unit also outputs a second low voltage having an absolute value smaller than the second high voltage, and the second switching unit, during transmission, repeatedly performs the operation of supplying the second low voltage from the second voltage output unit to the second terminal during a period in which the first high voltage is applied to the first terminal, and supplying the second high voltage from the second voltage output unit to the second terminal during a period in which the first low voltage is applied to the first terminal. In this embodiment, a voltage signal that is an inverted signal of the transmission voltage signal (a voltage signal that oscillates between a first high voltage and a first low voltage) applied to the first terminal of the ultrasonic transducer can be applied to the second terminal of the ultrasonic transducer. In this case, when the voltage applied to the first terminal of the ultrasonic transducer switches from the first high voltage to the first low voltage (H→L), the voltage applied to the second terminal of the ultrasonic transducer switches from the second low voltage to the second high voltage (L→H). As described above, a current flows through the ultrasonic transducer instantaneously at the timing (H→L) when the first high voltage switches to the first low voltage, thereby lowering the potential of the second terminal of the ultrasonic transducer by about 0.7 V. At this time, in this embodiment, since the voltage applied to the second terminal of the ultrasonic transducer switches from the second low voltage to the second high voltage (L→H), it is possible to prevent the second terminal of the ultrasonic transducer from becoming a negative potential, and a negative voltage (a voltage of the opposite polarity to the power supply voltage of the receiving circuit) is not applied to the receiving circuit. In addition, in this embodiment, when the voltage applied to the first terminal of the ultrasonic converter is switched from the first low voltage to the first high voltage (L→H), the voltage applied to the second terminal of the ultrasonic converter is switched from the second high voltage to the second low voltage (H→L). At this time, even at the timing (L→H) when the voltage is switched from the first low voltage to the first high voltage, a current flows through the ultrasonic converter instantaneously, and the potential of the second terminal of the ultrasonic converter is raised by about 0.7 V. At this time, in this embodiment, since the voltage applied to the second terminal of the ultrasonic converter is switched from the second high voltage to the second low voltage (H→L), the potential of the second terminal of the ultrasonic converter drops from the second high voltage. Therefore, it is possible to prevent the potential of the second terminal of the ultrasonic converter from rising by about 0.7 V from the second high voltage, and it can be kept at a potential equal to or lower than the second high voltage. Therefore, even in a receiving circuit with a low power supply voltage that employs a fine semiconductor element, it is possible to suppress the application of an overvoltage that exceeds the allowable voltage range to the receiving circuit.

[0092] [Fourth aspect] A fourth aspect is characterized in that, in the third aspect, the second switching unit, during transmission, turns on the supply of the second low voltage output from the second voltage output unit to the second terminal before the period in which the first high voltage is applied to the first terminal starts, and turns on the supply of the second high voltage output from the second voltage output unit to the second terminal before the period in which the first low voltage is applied to the first terminal starts. During transmission, when the voltage applied to the first terminal of the ultrasonic transducer switches from a first high voltage to a first low voltage (H → L), a current flows instantaneously through the ultrasonic transducer, which pulls down the potential of the second terminal of the ultrasonic transducer by about 0.7 V. At this time, the voltage applied to the second terminal of the ultrasonic transducer switches from a second low voltage to a second high voltage (L → H), but if there is a delay in this switching, the second terminal of the ultrasonic transducer may become negative potential, and a negative voltage (a voltage of opposite polarity to the power supply voltage of the receiving circuit) may be applied to the receiving circuit. In this embodiment, during transmission, the supply of the second high voltage output from the second voltage output unit to the second terminal is turned on before the period (H→L) in which the first low voltage is applied to the first terminal starts, so that it is possible to stably prevent the switching from the second low voltage to the second high voltage from being delayed during the period (H→L). Therefore, it is possible to more reliably prevent a negative voltage (a voltage of opposite polarity to the power supply voltage of the receiving circuit) from being applied to the receiving circuit. Similarly, when the voltage applied to the first terminal of the ultrasonic transducer switches from the first low voltage to the first high voltage (L → H) during transmission, a current flows instantaneously through the ultrasonic transducer, which raises the potential of the second terminal of the ultrasonic transducer by about 0.7 V. At this time, the voltage applied to the second terminal of the ultrasonic transducer switches from the second high voltage to the second low voltage (H → L), but if this switching is delayed, the potential of the second terminal of the ultrasonic transducer will be raised from the second high voltage by about 0.7 V, and there is a risk that an overvoltage exceeding the allowable voltage range will be applied to a receiving circuit with a low power supply voltage that employs fine semiconductor elements. In this embodiment, during transmission, the supply of the second low voltage output from the second voltage output unit to the second terminal is turned on before the period (L→H) in which the first high voltage is applied to the first terminal starts, so that it is possible to stably prevent the switching from the second high voltage to the second low voltage from being delayed during the period (L→H). Therefore, it is possible to more reliably prevent an overvoltage that exceeds the allowable voltage range from being applied to the receiving circuit.

[0093] [Fifth aspect] A fifth aspect is a configuration in which, in any one of the first to fourth aspects, the second switching unit includes a configuration in which one drain / source terminal of a first MOS transistor (e.g., switching element SWC) having the second voltage output unit connected to the second terminal of the ultrasonic converter and the other drain / source terminal of a second MOS transistor (e.g., switching element SWD) having one drain / source terminal to which a ground voltage is applied are connected, and the second switching unit applies a gate voltage to each gate terminal pg2, ng2 to turn on the first MOS transistor and the second MOS transistor, respectively, during transmission, and applies a gate voltage to each gate terminal to turn off the first MOS transistor and the second MOS transistor, respectively, during reception. According to this, a fine semiconductor element can be used for the second switching section, and the parasitic capacitance of the second switching section can be reduced, thereby solving the problem of reduced reception sensitivity of the ultrasonic sensor.

[0094] [Sixth aspect] A sixth aspect is characterized in that, in the fifth aspect, the first voltage output unit includes a configuration in which one drain / source terminal of a third MOS transistor (e.g., switching element SWA) having the first high voltage applied to its other drain / source terminal and one drain / source terminal of a fourth MOS transistor (e.g., switching element SWD) having the first low voltage applied to its other drain / source terminal are connected to the first terminal of the ultrasonic converter, and the transmission voltage signal is output by repeatedly turning the third MOS transistor on and off and the fourth MOS transistor off and on according to a predetermined transmission frequency. According to this aspect, the first voltage output section can be configured using a MOS transistor.

[0095] [Seventh aspect] A seventh aspect is the sixth aspect, wherein the first switching unit is composed of the third MOS transistor and the fourth MOS transistor, and during transmission, the third MOS transistor is repeatedly turned on and off and the fourth MOS transistor is turned off and on in accordance with a predetermined transmission frequency, and during reception, either one of the third MOS transistor or the fourth MOS transistor is kept on to fix the potential of the first terminal. According to this aspect, the first switching unit is constituted by the third MOS transistor and the fourth MOS transistor which constitute the first voltage output unit, so that the configuration can be simplified and made smaller than when the first switching unit is constituted separately from the first voltage output unit.

[0096] [Eighth aspect] An eighth aspect is the sixth or seventh aspect, wherein the receiving circuit includes a MOS transistor, and the thickness of the gate insulating film of the first MOS transistor and the second MOS transistor is thinner than the thickness of the gate insulating film of the third MOS transistor and the fourth MOS transistor, and is the same thickness as the gate insulating film of the MOS transistor of the receiving circuit. According to this aspect, a fine semiconductor element can be used for the second switching section, and the parasitic capacitance of the second switching section can be reduced, thereby solving the problem of reduced reception sensitivity of the ultrasonic sensor.

[0097] [Ninth aspect] A ninth aspect is any of the sixth to eighth aspects, characterized in that the gate channel lengths of the first MOS transistor and the second MOS transistor are shorter than the gate channel lengths of the third MOS transistor and the fourth MOS transistor. According to this aspect, a fine semiconductor element can be used for the second switching section, and the parasitic capacitance of the second switching section can be reduced, thereby solving the problem of reduced reception sensitivity of the ultrasonic sensor.

[0098] [Tenth aspect] A tenth aspect is characterized in that in any one of the first to ninth aspects, the ultrasonic transducer is a PMUT (Piezoelectric Micro-machined Ultrasonic Transducer) or a CMUT (Capacitive Micro-machined Ultrasonic Transducer). According to this aspect, an ultrasonic sensor having high transmission strength can be realized.

[0099] [Eleventh aspect] The eleventh aspect is characterized by having an ultrasonic sensor of any of the first to tenth aspects and an image generation unit (e.g., image processing unit 65) that generates an image based on a received voltage signal received by a receiving circuit of the ultrasonic sensor. According to this aspect, a voltage outside the allowable voltage range is prevented from being applied to the receiving circuit when transmitting ultrasound, making it possible to generate an appropriate ultrasound image.

[0100] [12th aspect] A twelfth aspect is characterized by comprising the ultrasonic sensor according to any one of the first to tenth aspects, and a display unit 61 for displaying the shape of the object. According to this aspect, a voltage outside the allowable voltage range is prevented from being applied to the receiving circuit when transmitting ultrasonic waves, and the shape of the target object can be appropriately displayed. [Explanation of symbols]

[0101] 1:Ultrasonic probe 2:Protective layer 3: Backing material 10: Signal processing section 11: Drive unit 11A: First drive unit 11B: Second drive unit 12: Receiving circuit 13: Timing generation section 14: Delay section 15: Addition section 16: Inverter 17a, 17b: Level shift circuit 18A to 18D: Delay circuit 20: Transducer section 21: Ultrasonic transducer 21a: First terminal 21b:Second terminal 22: PMUT chip 23: Support part 24: Flexible board 25: Wiring 26: Adhesive 27: Connector 28: Acoustic lens 40: Cable 50: Display terminal 60: Device body 61:Display section 62:Operation unit 63: Control section 64: Signal conversion section 65: Image processing section 66: Amplification circuit 67: BPF 68: A / D converter 100: Ultrasound diagnostic equipment 200: Subject SW1 to SW4: Switching elements SWA~SWD: Switching elements [Prior art documents] [Patent documents]

[0102] [Patent Document 1] Patent No. 6616296 [Patent Document 2] Patent No. 4991722

Claims

1. An ultrasonic sensor that applies a transmission voltage signal to a first terminal of an ultrasonic transducer to transmit ultrasonic waves from the ultrasonic transducer to an object, and detects a reception voltage signal generated at a second terminal of the ultrasonic transducer by the ultrasonic waves reflected by the object, a first voltage output unit connected to the first terminal of the ultrasonic transducer and outputting a transmission voltage signal that oscillates between a first high voltage and a first low voltage in response to a predetermined transmission frequency; a receiver circuit connected to the second terminal of the ultrasonic transducer for detecting a received voltage signal appearing at the second terminal; a first switching unit that performs a switching operation to supply the transmission voltage signal output from the first voltage output unit to the first terminal during transmission and fixes the potential of the first terminal during reception; a second voltage output unit connected to the second terminal of the ultrasonic converter, which outputs a second high voltage having the same polarity as a power supply voltage of the receiving circuit and having an absolute value smaller than that of the first high voltage, and a second low voltage having an absolute value smaller than that of the second high voltage; a second switching unit that supplies the second high voltage and the second low voltage output from the second voltage output unit to the second terminal during transmission and performs a switching operation to electrically separate the second voltage output unit from the second terminal during reception, The ultrasonic sensor is characterized in that, during transmission, the second switching unit repeatedly performs the operation of supplying the second low voltage from the second voltage output unit to the second terminal during a period in which the first high voltage is applied to the first terminal, and supplying the second high voltage from the second voltage output unit to the second terminal during a period in which the first low voltage is applied to the first terminal.

2. 2. The ultrasonic sensor according to claim 1, The ultrasonic sensor according to claim 1, wherein the second high voltage is substantially the same as a power supply voltage of the receiving circuit.

3. The ultrasonic sensor according to claim 1 or 2, The ultrasonic sensor is characterized in that, during transmission, the second switching unit turns on the supply of the second low voltage output from the second voltage output unit to the second terminal before the period in which the first high voltage is applied to the first terminal starts, and turns on the supply of the second high voltage output from the second voltage output unit to the second terminal before the period in which the first low voltage is applied to the first terminal starts.

4. 4. The ultrasonic sensor according to claim 1, The second switching unit includes a configuration in which a drain / source terminal of a first MOS transistor, one of which is connected to the second voltage output unit, and a drain / source terminal of a second MOS transistor, one of which is connected to a ground voltage, are connected to the second terminal of the ultrasonic converter; The ultrasonic sensor is characterized in that the second switching unit applies a gate voltage to each gate terminal to turn on the first MOS transistor and the second MOS transistor, respectively, during transmission, and applies a gate voltage to each gate terminal to turn off the first MOS transistor and the second MOS transistor, respectively, during reception.

5. 5. The ultrasonic sensor according to claim 4, The first voltage output unit includes a configuration in which the other drain / source terminal of a third MOS transistor, one drain / source terminal of which has the first high voltage applied to it, and the other drain / source terminal of a fourth MOS transistor, one drain / source terminal of which has the first low voltage applied to it, are connected to the first terminal of the ultrasonic converter, and the ultrasonic sensor outputs the transmission voltage signal by repeatedly turning the third MOS transistor on and off and the fourth MOS transistor off and on in accordance with a predetermined transmission frequency.

6. 6. The ultrasonic sensor according to claim 5, the first switching unit is composed of the third MOS transistor and the fourth MOS transistor, and during transmission, repeatedly turns the third MOS transistor on and off and turns the fourth MOS transistor off and on in accordance with a predetermined transmission frequency, and during reception, fixes the potential of the first terminal by maintaining one of the third MOS transistor or the fourth MOS transistor on.

7. 7. The ultrasonic sensor according to claim 5, the receiving circuit includes a MOS transistor; a gate insulating film of the first MOS transistor and the second MOS transistor having a thickness smaller than a gate insulating film of the third MOS transistor and the fourth MOS transistor, and having the same thickness as a gate insulating film of the MOS transistor of the receiving circuit.

8. 8. The ultrasonic sensor according to claim 5, 1. An ultrasonic sensor comprising: a first MOS transistor and a second MOS transistor, the gate channel lengths of which are shorter than the gate channel lengths of the third MOS transistor and the fourth MOS transistor.

9. 9. The ultrasonic sensor according to claim 1, The ultrasonic sensor is characterized in that the ultrasonic transducer is a PMUT (Piezoelectric Micro-machined Ultrasonic Transducer) or a CMUT (Capacitive Micro-machined Ultrasonic Transducer).

10. An ultrasonic sensor according to any one of claims 1 to 9; and an image generating unit that generates an image based on a reception voltage signal received by a reception circuit of the ultrasonic sensor.

11. An ultrasonic sensor according to any one of claims 1 to 9; and a display unit for displaying the shape of the object.

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