Intraoral scanner having a scanning reflector and method for calibrating the scanning reflector

The open-loop control method for MEMS scanners in intraoral OCT systems simplifies calibration and reduces costs by directly measuring scanning nonlinearity, improving stability and eliminating the need for additional sensors.

JP7620562B2Active Publication Date: 2025-01-23DENTAL IMAGING TECHNOLOGIES CORP
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Patent Information

Application Number
JP2021554724
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2019-03-12
Filing Date
2020-03-11
Publication Date
2025-01-23
Estimated Expiration
2040-03-11

AI Technical Summary

Technical Problem

Calibrating MEMS scanners for small, lightweight intraoral scanners in dental OCT systems is complex and costly, often requiring additional sensors and closed-loop operations that increase system complexity and cost.

Method used

An open-loop control method for MEMS scanners using an inverse system filter and a calibration target to directly measure scanning nonlinearity, eliminating the need for additional sensors and feedback signals.

Benefits of technology

Simplifies the calibration process, reduces system complexity and cost, and enhances scan stability by minimizing positional errors and vibrations, allowing for efficient operation without additional feedback.

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Abstract

An intraoral scanner (90) for use in a dental optical coherence tomography system is disclosed. The scanner has a scanning reflector that can be energized to direct a scanning beam toward a surface of a sample (S) in a raster pattern. The scanning reflector further directs a reflected beam from the sample surface toward a detector (60). The scanning reflector is calibrated to direct the scanning beam and the reflected beam in an open-loop control mode. Methods for calibrating the dental optical coherence tomography system and the scanning reflector are also disclosed.
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Description

[Technical field]

[0001] The present invention relates generally to intraoral optical coherence tomography (OCT) imaging, and more particularly to calibration for open-loop control of an electromechanical scanner device used in a compact, lightweight OCT imaging device. [Background technology]

[0002] Optical coherence tomography (OCT) is a non-invasive imaging technique that uses the principles of interference to obtain high-resolution cross-sectional images that characterize the depth structure of a sample. OCT is particularly well suited for in vivo imaging of human tissues and has shown its usefulness in a range of biochemical research and medical imaging applications in ophthalmology, dermatology, oncology and other fields, as well as in ear, nose and throat (ENT) and dental imaging.

[0003] OCT is described as a type of "photo-ultrasound" that images energy reflected from within biological tissue to obtain cross-sectional data. In an OCT imaging system, light from a broadband source, such as a superluminescent diode (SLD) or other light source, is directed along two distinct optical paths: a reference arm of known length and a sample arm that illuminates the tissue or other object under investigation. The reflected and backscattered light from the reference and sample arms are recombined in the OCT instrument to use interference effects to measure properties of structures located at and near the surface of the sample. Interference data is obtained by rapidly scanning the illumination across the sample. At each of thousands of points along the sample surface, the OCT instrument obtains an interference profile that can be used to reconstruct an A-scan with the axial depth of the material being a factor of the source coherence. In many tissue imaging applications, OCT uses a broadband illumination source to obtain image content up to a few millimeters deep.

[0004] Small, lightweight intraoral scanners for use in dental optical coherence tomography (OCT) systems require small, fast, two-dimensional (2D) scanners integrated into the intraoral scanning probe. Traditionally, galvanometers have been used in optical scanning systems to provide the scanning function. Recently, MEMS technology devices have been used in small, lightweight optical scanning systems due to their advantages in terms of size, weight, and complexity, as well as their low cost and compact size.

[0005] Calibrating MEMS scanners can be difficult, and conventional techniques for calibration can add complexity and cost to the calibration effort. For example, solutions that employ low-pass filtering can limit the bandwidth and performance of the MEMS. Additionally, the relatively high Q factor of MEMS devices adds additional complexity to the calibration and control effort of MEMS scanners. Additionally, more advanced closed-loop operation of MEMS devices often requires additional sensors to generate feedback signals. The added complexity and high cost of closed-loop operation has thus far limited the use of such MEMS scanners in small, lightweight devices. Summary of the Invention [Problem to be solved by the invention]

[0006] Therefore, there is a need in the industry for a compact, fast, two-dimensional (2D), MEMS technology intraoral scanner that addresses these and other issues, difficulties and shortcomings. [Means for solving the problem]

[0007] The present invention is broadly described, including an apparatus and a method.

[0008] According to one exemplary embodiment of the present invention, there is provided an intraoral scanner for use in a dental optical coherence tomography system, the intraoral scanner including a scanning reflector energizable to direct a scanning beam toward a surface of a raster pattern and a reflected beam from the surface toward a detector, the scanning reflector being calibrated to direct the scanning beam and the reflected beam in an open loop control mode.

[0009] Various advantages and benefits of the invention will become apparent from a reading of the following more particular description of the exemplary embodiments and are illustrated in the accompanying drawings, in which: FIG. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram illustrating swept-wavelength OCT (SS-OCT) according to an example embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic diagram illustrating a probe configured for OCT imaging and having a wavelength swept source, according to an example embodiment of the present invention. [Figure 3A] FIG. 2 is a schematic diagram illustrating a method of scanning processing for acquiring a B-scan. [Figure 3B] FIG. 1 shows an OCT scan pattern for C-scan acquisition. [Figure 4] FIG. 1 illustrates the installation of an OCT device for scanner calibration according to an example embodiment of the present invention. [Diagram 5] FIG. 4 is a logic flow diagram illustrating a calibration process according to an example embodiment of the present invention. [Figure 6] FIG. 6 is a flow diagram illustrating a control system model using an inverse system filter generated by the process of FIG. 5. [Figure 7] 5A-5C show a series of related images taken with the target of FIG. 4. [Figure 8] FIG. 1 illustrates exemplary data obtained in a calibration target measurement. [Figure 9] FIG. 2 shows an image obtained from a target. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS A detailed description of exemplary embodiments of the present invention is presented below with reference to the drawings, in which identical reference numerals identify the same components of structure or method steps in each of the several drawings.

[0012] As used in the context of this disclosure, unless expressly stated otherwise, terms such as "first," "second," etc. do not necessarily denote an order, sequence, or priority relationship, but are merely used to more clearly distinguish one step, component, or set of components from another.

[0013] MEMS reflectors are typically fabricated using semiconductor fabrication techniques and are used, for example, for beam width based beam scanning for small lightweight scanning devices, and typically have reflective surface dimensions ranging from a few hundred micrometers to a few millimeters. A variety of structural configurations are used in the implementation and operation of the reflectors, including the use of arrayed features.

[0014] Although the description herein provides examples directed to the use of intraoral OCT, it should be understood and appreciated that the configurations, methods, features, and practices described herein have more general application to any other type of OCT imaging, including maxillofacial imaging, and may be particularly advantageous for small, lightweight OCT scanning devices used in dental or medical applications.

[0015] The general term "scanner" refers to an optical system that can be energized to project a scanned light beam of broadband light that is directed through a sample arm to the tooth surface and captured as reflected and scattered light returning at the sample arm for interference measurement with light from a reference arm used for OCT imaging of the surface. According to one embodiment of the invention, the scanned light beam uses broadband near ultraviolet (BNIR) light. However, other types of broadband light can be used instead. The term "raster scanning" refers to a combination of hardware components that sequentially scan light to multiple spaced locations along the sample, as described in more detail below.

[0016] 1 shows the components of a type of OCT device, here a conventional swept-wavelength OCT (SS-OCT) device 100 using a Michelson interferometer system 20 with a programmable filter 10 that is part of a tuned laser 50. For example, for intraoral or maxillofacial OCT, the laser 50 is tunable to a range of frequencies (wavenumbers k), such as those corresponding to wavelengths between about 300 and 2000 nm. According to an exemplary embodiment of the invention, a tunable range of about 60 nm bandwidth centered at about 1300 nm is used for intraoral OCT.

[0017] 1, the output from the tunable laser 50 passes through a coupler 38 to a sample arm 40 and a reference arm 42. The sample arm 40 signal goes to a handpiece or probe 46 for measurement of a sample "S". The reference arm 42 signal is directed through the coupler 38 by the reference, which may be a mirror or light guide, to a detector 60. The detector 60 may use a pair of balanced photodetectors configured to cancel common mode noise.

[0018] A control logic processor 70 (sometimes referred to as "control processing unit CPU 70," "processor 70," or "CPU 70") is in signal communication with the tuned laser 50 and its programmable filter 10, and the detector 60. The processor 70 controls the scanning function of the probe 46 and records any calibration data required to obtain a linear response to scanning signals. The processor 70 obtains and processes the output from the detector 60. The CPU 70 is also in signal communication with a display 72 for command input and for displaying the OCT results.

[0019] It is emphasized that the system embodiment described with reference to FIG. 1 is for illustrative purposes only and shows one exemplary type of intraoral OCT architecture. The exemplary embodiments of the present disclosure may be applied to any type of intraoral OCT imager or other compact, lightweight OCT system, with any of a number of component arrangements, and in a variety of interferometric configurations and operational sequences. For example, the dental OCT system used may be a time-domain, spectral-domain, or wavelength-swept system.

[0020] The schematic diagram of FIG. 2 shows an arrangement of an OCT apparatus 100 having a probe 46 with a scanner 90 for calibration, according to one example embodiment of the invention. In the exemplary embodiment of FIG. 2, a fiber cable 76 provides a flexible optical path between the sample arm 40 of the interferometer 20 and the probe 46 components. A microelectromechanical system (MEMS) scanner 52 provides a scanning motion to direct a wavelength-swept light to a surface of a sample S, such as a tooth or calibration object, and further redirects reflected or scattered light from the sample S back to a detector 60 in the interferometer 20. One or more reflective surfaces 56, 58 are provided to fold the optical path so that light within the probe 46 can be directed outwardly toward the sample S. Within the probe 46 are objective lenses 140 and other optical components (not shown) for collection, collimation, and other functions that condition the light to and from the sample.

[0021] According to one example embodiment of the invention, raster scanning by probe 46 can use any scan pattern to provide uniform or non-uniform spacing of individual scanned surface locations. The components of interferometer 20 can be incorporated within probe 46 or may be separately packaged and connected by other connection methods, such as cables or wireless connections.

[0022] For further background, Figures 3A and 3B show an overview of the OCT scan pattern performed by the probe 46 and support components of the OCT device 100. Figure 3A shows the information obtained during each A-scan. The scan signal for each B-scan image has two linear portions in the illustrated embodiment: a scan portion 92 and a retroscan 93, during which the scanning mirror directs the sample beam from a beginning to a terminal position, and during which the scanning mirror returns to its beginning position. An interference signal 88, shown excluding the DC signal component, is acquired for the time interval for each point 82, the signal being a function of the time interval required for the sweep, and the acquired signal shows the spectral interference fringes generated by combining the light from the reference and feedback arms of the interferometer (Figure 1). A fast Fourier transform (FFT) generates a transform "T" for each A-scan. One transform signal corresponding to an A-scan is shown as an example in Figure 3A.

[0023] From the above, it will be appreciated that a large amount of data is acquired for a single B-scan sequence. In order to efficiently process this data, a Fast Fourier Transform (FFT) is used to convert the time-based signal data into corresponding frequency-based data from which image content can be more quickly generated.

[0024] In Fourier domain OCT, an A-scan corresponds to one line of spectral acquisition that produces a line of depth (z-axis) resolved OCT signals based on the reflected or scattered beam, and the B-scan data produces a two-dimensional (2D) OCT image along the corresponding scan line.

[0025] Raster scanning is used to obtain multiple B-scan data by increasing the acquisition of the raster scanner 90 in the C-scan (y-axis) direction. This is shown diagrammatically in Figure 3B, which shows how three-dimensional (3D) volume information is generated using the A-scan, B-scan, and C-scan data.

[0026] The wavelength or frequency sweep sequence used at each A-scan point 82 can be modified from the commonly used ascending or descending wavelength sequence. Any wavelength sequence can alternatively be used. In the case of selecting any wavelength, which may be useful in some particular implementations of OCT, only a portion of the available wavelengths are provided as a result of each sweep. In any wavelength sequence, each wavelength can be randomly selected in any sequence order to be used in the OCT system during one sweep. The A-scan points 82 can be uniformly spaced from each other along the x-axis, providing substantially equal x-axis distances between adjacent points 82 along any B-scan image. Alternatively, the spacing can be non-uniform. Similarly, the distance between the lines of scan points 82 for each B-scan can be uniform or non-uniform along the y-axis. The x-axis spacing can be different from the y-axis spacing. Alternatively, the x-axis and y-axis spacing along orthogonal axes of the surface being scanned can be equal.

[0027] According to an exemplary embodiment, the nonlinearity of the MEMS-based intraoral scanner is measured directly from the OCT signal obtained by scanning a calibration target configured to verify stability and control the scan spacing. Once the behavior of the scanning components is properly characterized, no additional sensors are required to measure the scan position. This configuration simplifies the calibration process and eliminates inherent position errors that may be caused by such sensors.

[0028] To account for tolerance errors and performance differences that may occur in scanning, and to support the components used for scanning and sensing, the MEMS technology intraoral scanner may be calibrated in place within the handpiece or probe 46. Once successfully calibrated, the MEMS mirror may operate in an open-loop mode, i.e., no sensing or other feedback is required to control the beam scanning motion. The scanner's control system may minimize overshoot and vibration and extend the bandwidth to its resonant frequency.

[0029] The simplified schematic diagram of FIG. 4 shows an OCT device 100 set up for scanner calibration according to an exemplary embodiment of the present disclosure. The OCT device 100 may be a system manufactured according to the pattern of FIG. 1 or may be other types of OCT systems. According to an exemplary embodiment, the MEMS technology intraoral scanner 90 in the handpiece or probe 46 uses an open-loop control method that utilizes an inverse system filter to improve scanning stability and applies the calibration method described. The calibration method of the present invention allows for open-loop operation. The scanner calibration method described herein tunes the scanner parameters to give the best performance. The scanner driver circuit does not require additional feedback signals during operation, greatly simplifying the scanner and dental OCT system and reducing the overall system cost and complexity.

[0030] As shown in FIG. 4, a grid target 200 is used to provide a reference for the calibration method. The grid target 200 is formed as an array of linear features formed on a flat surface, with paired reflective / scattering and light absorbing features repeated across the surface. In the exemplary embodiment shown in FIG. 4, parallel extending reflective and absorbing linear features are alternated to provide a grid pattern. The parallel direction of the linear features may be orthogonal to the scanning direction. The highest resolution measurements are obtained with calibration target features orthogonal to the scanning direction. In practice, the linear features are preferably within a few degrees orthogonal to the scanning direction. The reflective linear features diffusely reflect the incident light from the probe 46. The alternating features may have a periodic distribution of uniform dimensions, as shown in part (b) of FIG. 7, or may be non-periodic.

[0031] Overall, the power ratio between the light from the reflective / scattering features and the light measured from the absorbing features should be sufficient so that the sensing components associated with the probe 46 can clearly and unambiguously distinguish the reflective and absorbing features of the calibration target from one another in the beam of returned light obtained from the calibration target surface. What is needed is a clear contrast between the alternating features that is sensed by the OCT system. Thus, with a sensitive detector, the relative difference in the light measured from the reflective and light absorbing features can be small. In practice, it is preferable to use a less expensive detector and a distinctive target 200 feature.

[0032] For example, according to an exemplary embodiment of the present invention, reflective linear features in the grating pattern can reflect or scatter more than half of the incident scanning light, such as reflecting or scattering more than 60% of the incident scanner beam in an exemplary design. Similarly, absorptive features in the grating pattern can absorb more than half of the incident scanning light, such as absorbing more than 60% of the incident scanning light in one exemplary embodiment. Reflected light from the calibration pattern is directed back along the sample path from the probe 46 to the OCT circuitry for image reconstruction and generating logic to compensate for scanner inaccuracies.

[0033] The feature dimensions and spacing are sized to measure the response and resolution of the OCT system. According to an exemplary embodiment, the feature spacing is at twice the system resolution, so for an OCT system with a 10 μm resolution, the reflective feature spacing is 20 μm.

[0034] 5 shows a logic flow diagram illustrating a calibration process S500 according to an exemplary embodiment of the present disclosure. In an initial modeling step S510, the control system of the scanner is modeled using Equation 1 below.

number

[0035] The high quality factor of MEMS technology intraoral scanners can lead to system instability, especially when the system frequency is close to the natural frequency ωn of the MEMS circuit. To compensate and provide improved stability, an inverse system filter is applied in tuning step S520 as shown in the sequence of Figure 5. An inverse filter command step S522 generates and applies an inverse filter configured to improve scanner stability and designed according to Equation 2 below.

number

[0036] A value for ω1 may be chosen that is greater than the natural frequency. By applying an inverse filter, the input drive signal to the scanner is the output from the inverse filter. Conceptually, if the system is modeled correctly, the mirror angle output will track the voltage input very closely.

[0037] However, in practice, the resonant or natural frequency ω_n^2 of the MEMS mirror often varies from one MEMS technology scanner to another. Even if ω_n^2 is pre-calibrated for a particular scanner, it may not perform satisfactorily due to several factors, such as environmental temperature and humidity changes, driver settings, and electrical characteristics of connecting cables and connectors. To minimize the influence of such factors, an offline calibration method is performed prior to online operation. The purpose of this calibration method is to minimize the scanner nonlinearity by tuning the value ω_n^2, which is defined as follows:

number

[0038] Figure 6 is a flow diagram showing a control system model that uses the inverse system filter generated by the process given in Figure 5. The input to the scanner is a drive signal that allows open-loop control of the mirror angle, eliminating the need for a control loop with a supporting scanner position sensor.

[0039] To measure the scanning trajectory, a target 200 of Figure 4 is used. In response to the absorption of laser energy, an intensity image is obtained by reconstruction of the OCT signal.

[0040] Each part of FIG. 7 shows a series of related images acquired using the target 200 of FIG. 4. Part (a) of FIG. 7 shows a portion of a B-scan image formed as a series of A-scan images of the grid feature. After the volume image is obtained, the intensity values ​​along the Z-axis direction are averaged to obtain an intensity image of the grid feature in the XY plane, as shown in part (b) of FIG. 7. The data is then further averaged along the Y-axis direction to obtain a one-dimensional (1D) view along the scan direction, as shown in part (c) of FIG. 7. This averaging process can significantly reduce noise in the image. Then, the positions of peaks and valleys are detected along the scan direction, and the highlighted points in part (c) of FIG. 7 are identified. A linear fitting is applied along the scan direction, as shown in part (d) of FIG. 7. The final nonlinearity of the scanner is calculated in terms of the RMS of the fitting error. As can be seen from part (d) of FIG. 7, a significant amount of ringing effect can occur in the trajectory.

[0041] Figure 8 shows an example of the data obtained by measuring the target. The RMS of the fitting error at different frequencies is shown in part (a) of Figure 8. The beam trajectory along the x-axis at the optimal natural frequency is shown in part (b) of Figure 8. The optimal natural frequency ω n is 1.3KHz.

[0042] Referring to the series of figures in FIG. 8, a comparison of the trajectories between 1.2KHz and 1.3KHz natural frequencies in part (a) shows that the higher frequency gives better linearity. The scanner nonlinearity is reduced by a factor of three. The linear fitting errors for natural frequencies 1.2KHz and 1.3KHz are shown in parts (c) and (d) of FIG. 8, with different scales for the values ​​on the vertical axis. When the natural frequency of 1.3KHz is used in the model, the peak value of the fitting error is also reduced by about a factor of three. In the images acquired from the calibration grating target 200, the lines are more evenly distributed at the optimal natural frequency of 1.3KHz, as shown in part (a) of FIG. 9 for 1.2KHz and part (b) of FIG. 9 for 1.3KHz, respectively.

[0043] After optimizing the system model, software instructions can be generated with values ​​tuned for online operation. The open-loop control mode can then be applied during online operation. Therefore, no additional sensors are required for control or feedback on the scan. In this way, operating in an open-loop manner makes the system easier to design and operate. The calibration method described herein only requires a grid target, so it can be easily performed periodically and when environmental conditions or hardware setups change.

[0044] According to an alternative exemplary embodiment, target 200 is provided to an OCT user for on-site calibration. Support firmware may be provided for self-calibration or calibration check and adjustment functions performed by the end user, such as by displaying and entering commands using display 72 (FIG. 1). Using target 200 in this manner allows for periodic recalibration by the end user, such as once a month.

[0045] The present invention has been described in detail with particular reference to exemplary embodiments as currently understood, but it will be understood that variations and modifications can be made within the spirit and scope of the invention. For example, control logic processor 70 can be any of several types of logic processing devices, including a computer or computer workstation, a dedicated host processor, a microprocessor, a logic array, or other device that executes stored program logic instructions. The presently disclosed exemplary embodiments are therefore considered in all respects to be illustrative and not restrictive. The scope of the invention is indicated by the appended claims, and all changes that come within the range of equivalence thereto are intended to be embraced therein.

[0046] Consistent with at least one exemplary embodiment, an exemplary method / apparatus may employ a computer program including stored instructions that operate on image data accessed from an electronic memory. As will be appreciated by those skilled in the image processing arts, the computer programs of the exemplary embodiments herein may be utilized by any suitable general-purpose computer system, such as a personal computer or workstation. However, many other types of computer systems may be used to execute the computer programs of the described exemplary embodiments, including, for example, an arrangement of one or more networked processors.

[0047] The computer program for executing the method of the particular exemplary embodiment described herein may be stored in a computer-readable storage medium. The medium may include, for example, a magnetic storage medium such as a magnetic disk or tape, such as a hard drive or a removable device, an optical storage medium such as an optical disk or tape, a machine-readable optical encoding, a solid-state electronic storage device such as a random access memory (RAM) or a read-only memory (ROM), or other physical device or medium employed to store a computer program. The computer program for executing the exemplary method of the described embodiment may also be stored in a computer-readable storage medium connected to the image processing device via the Internet or other network or communication medium. Those skilled in the art will further readily recognize that the equivalent of such a computer program product may be constructed in hardware.

[0048] It should be noted that the term "memory" in the context of this application, equivalent to "computer-accessible memory", can refer to any type of temporary or more permanent data storage workspace that is used to store and manipulate image data and is accessible to a computer system, including, for example, a database. Memory can be non-volatile, for example, using long-term storage media such as magnetic or optical storage. Memory can also be of an even more volatile nature, using electronic circuitry such as random access memory (RAM) used as a temporary buffer or workspace for a microprocessor or other control logic processor device. For example, display data is typically stored in a temporary storage buffer that is directly associated with the display device and is periodically updated as needed to provide the display data. As the term memory is used herein, this temporary storage buffer can also be considered a memory. Memory is also used as a data workspace for performing operations such as calculations and storing their intermediate and final results. Computer-accessible memory can be of the volatile, non-volatile, or hybrid volatile and non-volatile variety.

[0049] It is understood that the computer program products of the exemplary embodiments herein may utilize various image manipulation algorithms and / or processes that are known. Furthermore, it will be understood that the exemplary computer program product embodiments of the present specification may embody algorithms and / or processes useful for implementation that are not specifically shown or described herein. Such algorithms and processes may include conventional utilities that are within the ordinary skill of the image processing art. Additional aspects of such algorithms and systems, as well as hardware and / or software for generating and otherwise processing images or for cooperating with the computer program products of the present application, may be selected from such algorithms, systems, hardware, components and elements not specifically shown or described herein, but that are known in the art.

[0050] Exemplary embodiments according to the present application can include various features described herein (individually or in combination).

[0051] While the present invention has been illustrated with respect to one or more implementations, changes and / or modifications can be made to the illustrated examples without departing from the spirit and scope of the appended claims. In addition, while a particular feature of the present invention may be disclosed herein with respect to only one of several implementations / exemplary embodiments, such feature can be combined with one or more other features of other implementations / exemplary embodiments as may be desirable and advantageous for any given or specific function. The term "a" or "at least one" is used to mean that one or more of the listed items may be selected. The term "about" indicates that the listed value can be somewhat modified as long as such modification does not result in non-compliance of the process or structure to the illustrated example embodiment. Other embodiments of the present invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with the true scope and spirit of the invention being indicated by the following claims.

Claims

1. 1. An intraoral scanner for use in a dental optical coherence tomography system, comprising: a scanning reflector energizable to direct the scanning beam towards the surface, said scanning reflector further directing the reflected beam from said surface towards a detector; the scanning reflector is calibrated to direct the scanning beam and the reflected beam in an open loop control mode by operating the scanning reflector at a tuned natural frequency; The intra-oral scanner, wherein the scanning reflector further comprises an inverse system filter configured to improve stability of the scanning reflector.

2. 10. The intra-oral scanner of claim 1, wherein the scanning reflector is a micro-electromechanical system (MEMS) device.

3. 10. The intra-oral scanner of claim 1, wherein the detector is in signal communication with a processor programmed to execute instructions for calibration based on changes in the reflected beam from a sample target.

4. 4. The intraoral scanner of claim 3, wherein the scanner nonlinearity is calculated based on a linear fitting error of a measured scanning trajectory determined based on an optical coherence tomography image of a scanned calibration target.

5. 5. The intra-oral scanner of claim 4, wherein the scanning reflector is configured to operate at a natural frequency that is tuned based on the calculated scanner nonlinearity.

6. 1. A dental optical coherence tomography system, comprising:

1. An intraoral probe comprising: (a) a micro-electro-mechanical scanning reflector that is energizable to direct a scanning beam toward a sample surface and that redirects reflected light from the scanned sample surface toward a detector; (b) control logic in signal communication with the detector and configured to provide a drive signal to the scanning reflector that directs the scanning beam toward spaced locations along the sample surface based on a tuned natural frequency of the scanning reflector determined from an optical coherence tomography image of a calibration pattern previously sensed by the detector, the calibration pattern having an alternating sequence of reflective and absorbing linear features; and A dental optical coherence tomography system comprising an intraoral probe having

7. 7. The dental optical coherence tomography system of claim 6, wherein the pattern of alternating features has a periodic distribution.

8. 7. The dental optical coherence tomography system of claim 6, wherein the control logic is further conditioned by an inverse system filter generated to improve scan stability.

9. 7. The dental optical coherence tomography system of claim 6, wherein the control logic is further adjusted by tuning a natural frequency of the micro-electro-mechanical scanning reflector to reduce nonlinearity.

10. 7. The dental optical coherence tomography system of claim 6, wherein the raster drive signal provides open-loop control of the scanning reflector.

11. 7. The dental optical coherence tomography system of claim 6, wherein the probe further comprises a time domain dental optical coherence tomography system.

12. 7. The dental optical coherence tomography system of claim 6, wherein the probe further comprises a spectral domain dental optical coherence tomography system.

13. 7. The dental optical coherence tomography system of claim 6, wherein the probe further comprises a wavelength-swept dental optical coherence tomography system.

14. 1. A method for calibrating a scanning reflector in a dental optical coherence tomography system, the method comprising: scanning light along a calibration target having a plurality of linear features, the features of the target arranged in pairs, the features of each pair alternating between light absorbing features and reflective or scattering features; optimizing a cost function defined by a linear fitting error of the measured scanning trajectory determined based on an optical coherence tomography image of the scanned calibration target; Including, The method, wherein optimizing the cost function further comprises minimizing scanner nonlinearities by tuning one or more scanning reflector parameters based on a natural frequency of the scanning reflector.

15. 15. The method of claim 14, further comprising manipulating the scanning reflector based on natural frequencies determined in optimizing the cost function.

16. 15. The method of claim 14, wherein scanning with the optical coherence tomography system provides time domain dental optical coherence tomography.

17. 15. The method of claim 14, wherein scanning with the optical coherence tomography system provides spectral domain dental optical coherence tomography.

18. 15. The method of claim 14, wherein scanning with the optical coherence tomography system provides swept-wavelength dental optical coherence tomography.

19. The method of claim 14 , wherein alternating features of the calibration target extend parallel to one another.

20. 7. The dental optical coherence tomography system of claim 6, wherein the alternating reflective and absorbing linear features are linear in a direction perpendicular to the scan direction.

21. 7. The dental optical coherence tomography system of claim 6, wherein the spacing between the alternating linear features is twice the resolution of the dental optical coherence tomography system.

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