Method for aligning light-emitting elements and manufacturing method for display device using the same
Patent Information
- Application Number
- JP2020122315
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2019-12-06
- Filing Date
- 2020-07-16
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2040-07-16
AI Technical Summary
【0029】 一実施形態による発光素子の整列方法は、発光素子を導電パターン上に位置または配置させた後、発光素子を一方向に配向することを含む。これにより、発光素子は、基板上で均一な間隔を有し、一定の方向に配向されることができる。
Smart Images

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Abstract
Description
[Technical field]
[0001] The present invention relates to a method for aligning light emitting elements, a method for manufacturing a display device using the same, and a display device. More particularly, the present invention relates to a method for aligning light emitting elements on a substrate using conductive patterns spaced apart from each other on the substrate, a method for manufacturing a display device using the same, and a display device. [Background technology]
[0002] Display devices are becoming increasingly important with the development of multimedia, and various types of display devices such as Organic Light Emitting Displays (OLEDs) and Liquid Crystal Displays (LCDs) are being used.
[0003] The display device includes a display panel such as an organic light-emitting display panel or a liquid crystal display panel as a device for displaying an image. The display panel may include a light-emitting element as a light-emitting display panel. For example, a light-emitting diode (LED) may include an organic light-emitting diode (OLED) that uses an organic material as a fluorescent material, an inorganic light-emitting diode that uses an inorganic material as a fluorescent material, and the like.
[0004] Inorganic light-emitting diodes, which use inorganic semiconductors as fluorescent materials, have the advantage of being durable even in high-temperature environments and emitting more blue light efficiently than organic light-emitting diodes. In addition, a transfer method using dielectrophoresis (DEP) has been developed to address the manufacturing process that was pointed out as a limitation of conventional inorganic light-emitting diode elements. Therefore, research is continuing into inorganic light-emitting diodes that are more durable and efficient than organic light-emitting diodes. Summary of the Invention [Problem to be solved by the invention]
[0005] SUMMARY OF THE PRESENTLY PREFERRED EMBODIMENTS An object of the present invention is to provide a method for aligning light emitting devices having a minute size on a substrate so that the light emitting devices have a predetermined orientation.
[0006] The problem to be solved by the present invention is to provide a method for manufacturing a display device including a plurality of light-emitting elements, in which the aligned light-emitting elements are transferred onto a target substrate, and a display device in which the aligned light-emitting elements are transferred onto a target substrate.
[0007] The object of the present invention is not limited to the above-mentioned objects, and other technical objects not mentioned will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]
[0008] A method for aligning light-emitting elements according to one embodiment includes preparing a base substrate and a plurality of conductive patterns spaced apart from one another on the base substrate, spraying ink having a plurality of light-emitting elements dispersed therein onto the base substrate, disposing at least some of the light-emitting elements on the conductive patterns, and orienting one end of the plurality of light-emitting elements in a first direction.
[0009] Arranging the light-emitting elements may include applying a first alignment signal to the conductive pattern to generate a first electromagnetic field on the conductive pattern, and arranging at least some of the light-emitting elements on the conductive pattern.
[0010] The light-emitting element may include a conductive ball to which an attractive force is applied by the first electromagnetic field, and arranging the light-emitting element may include arranging the conductive ball of at least some of the light-emitting elements on the conductive pattern.
[0011] A first alignment electrode and a second alignment electrode spaced apart from each other in a first direction may be further disposed on the base substrate, and orienting the light-emitting element may include applying a second alignment signal to the first alignment electrode and the second alignment electrode to generate a second electromagnetic field on the base substrate and change a position or orientation direction of the light-emitting element.
[0012] Orienting the light emitting element may include applying a third alignment signal to the conductive pattern to generate a third electromagnetic field that is stronger than the first electromagnetic field.
[0013] In orienting the light-emitting element, one end of the light-emitting element located on the conductive pattern may be oriented in the first direction, and at least a portion of the light-emitting element not located on the conductive pattern may be disposed on the conductive pattern and one end may be oriented in the first direction.
[0014] The light emitting element may have an elongated shape, and the light emitting element may be oriented with a major axis in the first direction.
[0015] The diameter of the light emitting element may be larger than the diameter of the conductive pattern.
[0016] The multiple conductive patterns may be arranged spaced apart from each other in the first direction and a second direction intersecting the first direction, and a first interval, which is the distance between the conductive patterns spaced apart in the first direction, may be longer than the length of the major axis of the light-emitting element.
[0017] A second interval, which is a distance between the conductive patterns spaced apart in the second direction, may be shorter than a length of a major axis of the light emitting element and larger than a diameter of the light emitting element.
[0018] The light-emitting element may include a first semiconductor layer, a second semiconductor layer, and an active layer disposed therebetween, and the first semiconductor layer, the active layer, and the second semiconductor layer may be stacked in one direction perpendicular to the other direction in which the light-emitting element extends.
[0019] The conductive pattern may include a plurality of first conductive patterns spaced apart from each other in the first direction, and a plurality of second conductive patterns spaced apart from the first conductive patterns in a third direction intersecting the first direction and spaced apart from each other in the first direction.
[0020] The light-emitting element may include a first light-emitting element and a second light-emitting element, and in arranging the light-emitting element, a third electromagnetic field may be generated on the first conductive pattern, and the first light-emitting element may be located on the first conductive pattern, and a first electromagnetic field may be generated on the second conductive pattern, and the second light-emitting element may be located on the second conductive pattern.
[0021] A method for manufacturing a display device according to one embodiment includes preparing a base substrate and a plurality of conductive patterns spaced apart from one another and arranged on the base substrate, spraying ink onto the base substrate having dispersed therein a plurality of light-emitting elements each having a shape extending in one direction, generating a first electromagnetic field on the conductive pattern, positioning at least some of the light-emitting elements on the conductive pattern, generating a second electromagnetic field on the base substrate in a first direction, orienting the plurality of light-emitting elements, and transferring the plurality of light-emitting elements onto a target substrate.
[0022] The light-emitting element may include a conductive ball to which an attractive force is applied by the first electromagnetic field, and positioning the light-emitting element may involve disposing the conductive ball on the conductive pattern.
[0023] Orienting the light emitting element may include rotating the light emitting element with the second electromagnetic field so that the one direction in which the light emitting element extends is oriented toward the first direction.
[0024] The light-emitting elements may be spaced apart from one another in the first direction and in a second direction intersecting the first direction, and a length of the light-emitting elements measured in the one direction may be longer than the distance between the light-emitting elements in the second direction.
[0025] The distance between the light emitting elements in the first direction may be shorter than a length of a major axis of the light emitting elements.
[0026] A display device according to an embodiment includes a first substrate, a semiconductor layer disposed on the first substrate and including an active material layer of a driving transistor, a gate insulating layer disposed on the semiconductor layer, a first gate conductive layer disposed on the gate insulating layer and including a gate electrode of the driving transistor, a first interlayer insulating layer disposed on the first gate conductive layer, a first data conductive layer disposed on the first interlayer insulating layer and including a source / drain electrode of the driving transistor, a second interlayer insulating layer disposed on the first data conductive layer, a second data conductive layer disposed on the second interlayer insulating layer and including a first conductive wiring in contact with the source / drain electrode of the driving transistor, a first planarization layer disposed on the second data conductive layer, a first electrode and a second electrode disposed on the first planarization layer and spaced apart from each other, and a light-emitting element having both ends disposed on the first electrode and the second electrode, the light-emitting element having a shape extending in one direction, including a first electrode portion and a second electrode portion disposed on both ends in the extended one direction, and including a conductive ball disposed on the first electrode portion and in direct contact with the first electrode.
[0027] The light-emitting element may include a first semiconductor layer, a second semiconductor layer, and an active layer disposed therebetween, and the first semiconductor layer, the active layer, and the second semiconductor layer may be stacked in one direction perpendicular to the other direction in which the light-emitting element extends.
[0028] Specific details of other embodiments are included in the detailed description and drawings. Effect of the Invention
[0029] According to an embodiment, a method for aligning light emitting devices includes positioning or disposing the light emitting devices on a conductive pattern and then orienting the light emitting devices in one direction, so that the light emitting devices can be aligned in a uniform direction and at uniform intervals on the substrate.
[0030] According to an embodiment, a display device including a plurality of pixels can be manufactured using the method for aligning light emitting elements, and the display device can have light emitting elements disposed at precise positions for each pixel.
[0031] The effects of the embodiments are not limited to the above examples, and various other effects are included in the present specification. [Brief description of the drawings]
[0032] [Figure 1] FIG. 1 is a plan view of a display device according to an embodiment. [Diagram 2] 1 is a schematic plan view illustrating a pixel included in a display device according to an embodiment; [Diagram 3] 1 is an equivalent circuit diagram of a pixel included in a display device according to an embodiment; [Figure 4] 5A to 5C are schematic diagrams illustrating a manufacturing process for a display device according to an embodiment. [Diagram 5] 1 is a plan view illustrating a state in which light emitting devices according to an embodiment are aligned; [Figure 6] 1 is a flowchart illustrating an alignment method for light emitting devices according to an embodiment. [Figure 7] 1 is a plan view illustrating a process of an alignment method for light emitting devices according to an embodiment. [Figure 8] 4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 9] 1 is a schematic cross-sectional view of a light-emitting device according to an embodiment. [Figure 10] 4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 11] 4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 12] 4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 13] 4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 14]4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 15] 4A to 4C are schematic diagrams illustrating a process of an alignment method for light-emitting elements according to an embodiment. [Figure 16] 1 is a plan view illustrating a base substrate on which light emitting devices are aligned according to an embodiment; [Figure 17] FIG. 2 is a cross-sectional view showing one sub-pixel of a display device according to an embodiment. [Figure 18] 13 is a plan view illustrating a base substrate on which light emitting devices are aligned according to another embodiment. FIG. [Figure 19] 10A to 10C are schematic diagrams illustrating some steps of a method for aligning light-emitting elements according to another embodiment. [Figure 20] 10A to 10C are schematic diagrams illustrating some steps of a method for aligning light-emitting elements according to another embodiment. [Figure 21] 10A to 10C are schematic diagrams illustrating some steps of a method for aligning light-emitting elements according to another embodiment. [Figure 22] 13 is a plan view illustrating a base substrate on which light emitting devices are aligned according to another embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0033] The advantages and features of the present invention, as well as the methods for achieving them, will become clear from the detailed description of the embodiments described below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and may be realized in various different forms. The embodiments are provided merely to complete the disclosure of the present invention and to fully inform those skilled in the art of the present invention of the scope of the invention, and the present invention is defined only by the scope of the claims.
[0034] When elements or layers are referred to as "on" another element or layer, this includes the case where the element or layer is directly on top of the other element or has other layers or elements interposed therebetween. Like reference numbers refer to like elements throughout the specification.
[0035] Although the terms "first", "second" and the like are used to describe various components, it is clear that these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, it is clear that the first component referred to below may be referred to as the second component within the technical concept of the present invention.
[0036] Hereinafter, embodiments will be described with reference to the accompanying drawings.
[0037] 1 is a schematic plan view of a display device according to an embodiment, and FIG 2 is a schematic plan view of a pixel included in the display device according to an embodiment.
[0038] 1 and 2, the display device 10 displays moving images and still images. The display device 10 may be any electronic device equipped with a display screen. For example, the display device 10 may be a television, notebook, monitor, billboard, IoT device, mobile phone, smartphone, tablet PC (Personal Computer), electronic watch, smart watch, watch phone, head mounted display, mobile communication terminal, electronic organizer, electronic book reader, portal multimedia player (PMP: Portable Multimedia Player), navigation device, game console, digital camera, video camera, etc. equipped with a display screen.
[0039] The display device 10 includes a display panel that provides a display screen. Examples of the display panel include an inorganic light-emitting diode display panel, an organic light-emitting display panel, a quantum dot light-emitting display panel, a plasma display panel, and a field emission display panel. In the following description, an inorganic light-emitting diode display panel is used as an example of the display panel, but the present disclosure is not limited thereto and may be applied to other display panels as long as the same technical idea can be applied.
[0040] The shape of the display device 10 can be changed in various ways. For example, the display device 10 may have a horizontally long rectangle, a vertically long rectangle, a regular square, a square with rounded corners (apexes), other polygonal shapes, a circle, or the like. The shape of the display area DPA of the display device 10 may also be the same as the overall shape of the display device 10. FIG. 1 illustrates a display device 10 and a display area DPA having a horizontally long rectangular shape.
[0041] The display device 10 may include a display area DPA and a non-display area NDA. The display area DPA is an area where a screen is displayed, and the non-display area NDA is an area where a screen is not displayed. The display area DPA is sometimes called an active area, and the non-display area NDA is sometimes called an inactive area. The display area DPA generally occupies the center of the display device 10.
[0042] A non-display area NDA is disposed around the display area DPA. The non-display area NDA may completely or partially surround the display area DPA. The display area DPA has a rectangular shape, and the non-display area NDA is disposed adjacent to the four sides of the display area DPA. The non-display area NDA forms a bezel of the display device 10. Wiring or a circuit driving unit included in the display device 10 may be disposed in the non-display area NDA, or an external device may be mounted therein.
[0043] The display area DPA may include a plurality of pixels PX. The plurality of pixels PX may be arranged in a row and column direction. The shape of each pixel PX may be, but is not limited to, a rectangle or a regular square in a plan view, and may be a rhombus with each side inclined in one direction. The pixels PX may be arranged alternately in a stripe pattern or a pentile pattern.
[0044] Also, each pixel PX may include a plurality of sub-pixels PXn. For example, one pixel PX may include a first sub-pixel PX1, a second sub-pixel PX2, and a third sub-pixel PX3. Each sub-pixel PXn includes at least one light-emitting element 500 and displays light of a specific wavelength band. The light-emitting element 500 arranged for each sub-pixel PXn may include different materials and emit light of different wavelength bands to the outside. As an example, the light-emitting element 500 of the first sub-pixel PX1 may include a material that emits a first light having a first wavelength as a central wavelength band, the light-emitting element 500 of the second sub-pixel PX2 may include a material that emits a second light having a second wavelength as a central wavelength band, and the light-emitting element 500 of the third sub-pixel PX3 may include a material that emits a third light having a third wavelength as a central wavelength band. As a result, the first sub-pixel PX1 may emit light of a first color, the second sub-pixel PX2 may emit light of a second color, and the third sub-pixel PX3 may emit light of a third color. In some embodiments, the first color light is blue light having a central wavelength band in the range of 450 nm to 495 nm, the second color light is green light having a central wavelength band in the range of 495 nm to 570 nm, and the third color light is red light having a central wavelength band in the range of 620 nm to 752 nm.
[0045] However, the present disclosure is not limited thereto. In some cases, each of the first sub-pixel PX1, the second sub-pixel PX2, and the third sub-pixel PX3 may include the same type of light-emitting element 500 and emit light of substantially the same color. In addition, although FIG. 2 illustrates an example in which the pixel PX includes three sub-pixels PXn, the present disclosure is not limited thereto, and the pixel PX may include a greater number of sub-pixels PXn.
[0046] Each pixel PX of the display device 10 further includes a pixel driving circuit. The above-mentioned wiring passes through each pixel PX or its periphery and applies a driving signal to each pixel driving circuit. The pixel driving circuit may include a transistor and a capacitor. The number of transistors and capacitors in each pixel driving circuit may be changed in various ways. In the following, the pixel driving circuit will be described using a 3T1C structure in which the pixel driving circuit includes three transistors and one capacitor as an example. However, the present disclosure is not limited thereto, and various other pixel PX structures such as a 2T1C structure, a 7T1C structure, and a 6T1C structure may be applied.
[0047] FIG. 3 is an equivalent circuit diagram of one pixel included in a display device according to an embodiment.
[0048] Referring to FIG. 3, each pixel PX of the display device according to the embodiment includes three transistors DT, SCT, SST and one storage capacitor Cst in addition to a light emitting diode EL.
[0049] The light emitting diode EL emits light in response to a current supplied via the driving transistor DT. The light emitting diode EL includes a first electrode, a second electrode, and a light emitting element 500 (see FIG. 4) disposed between them. The light emitting element 500 emits light of a specific wavelength band in response to an electrical signal transmitted from the first electrode and the second electrode, which will be described in detail later.
[0050] One end of the light emitting diode EL may be connected to a first source / drain electrode of the driving transistor DT, and the other end may be connected to a first voltage wiring VSL, which is supplied with a low potential voltage (first power supply voltage, VSS) lower than the high potential voltage (second power supply voltage, VDD) of the second voltage wiring VDL.
[0051] The driving transistor DT adjusts a current flowing from a second voltage wiring VDL to which a first power supply voltage is supplied to the light emitting diode EL according to a voltage difference between its gate electrode and source electrode. The gate electrode of the driving transistor DT is connected to a first source / drain electrode of the scan transistor SCT, the first source / drain electrode is connected to a first electrode of the light emitting diode EL, and the second source / drain electrode is connected to the second voltage wiring VDL to which a second power supply voltage VDD is applied.
[0052] The scan transistor SCT is turned on by a scan signal of the scan line SCL to connect the data line DTL and the gate electrode of the drive transistor DT, the gate electrode of the scan transistor SCT is connected to the scan line SCL, the first source / drain electrode is connected to the gate electrode of the drive transistor DT, and the second source / drain electrode is connected to the data line DTL.
[0053] The sensing transistor SST is turned on by a sensing signal of the sensing line SSL and connects the reference voltage line RVL to the first source / drain electrode of the driving transistor DT. The sensing transistor SST has a gate electrode connected to the sensing line SSL, a first source / drain electrode connected to the reference voltage line RVL, and a second source / drain electrode connected to the first source / drain electrode of the driving transistor DT.
[0054] In one embodiment, the first source / drain electrode of each of the multiple transistors (DT, SCT, SST) may be a source electrode and the second source / drain electrode may be a drain electrode, but is not limited to this and may be vice versa.
[0055] The capacitor Cst is formed between the gate electrode and the first source / drain electrode of the driving transistor DT, and stores a difference voltage between the gate voltage and the first source / drain voltage of the driving transistor DT.
[0056] Each of the multiple transistors (DT, SCT, SST) may be formed of a thin film transistor. In addition, in FIG. 3, a case where the multiple transistors (DT, SCT, SST) are formed of N-type metal oxide semiconductor field effect transistors (MOSFETs) has been described, but the present disclosure is not limited to this. That is, the multiple transistors (DT, SCT, SST) may be formed of P-type MOSFETs, or some of them may be formed of N-type MOSFETs and the other part may be formed of P-type MOSFETs.
[0057] As described above, the display device 10 includes a plurality of pixels PX arranged in the display area DPA, and each of the plurality of pixels PX may include a plurality of sub-pixels PXn arranged in one direction. For example, as shown in FIG. 2, the plurality of sub-pixels PXn may be arranged in a first direction DR1 and a second direction DR2. Similarly, the light-emitting elements 500 arranged for each sub-pixel PXn may be arranged in one direction in the display area DPA corresponding to each sub-pixel PXn. The plurality of light-emitting elements 500 are arranged in each sub-pixel PXn and are spaced apart from each other in the first direction DR1 and the second direction DR2. Such a display device 10 may be manufactured by a method of transferring the light-emitting elements 500 aligned on another substrate, rather than directly arranging the light-emitting elements 500 on a target substrate of the display device 10 during the manufacturing process.
[0058] FIG. 4 is a schematic diagram showing a manufacturing process of the display device according to one embodiment.
[0059] Referring to FIG. 4, the manufacturing method of the display device 10 according to the embodiment includes a process of transferring the light emitting elements 500 aligned on the base substrate BS onto the target substrate SUB. The light emitting elements 500 are prepared in a state of being arranged or aligned in one direction on the base substrate BS. The light emitting elements 500 aligned on the base substrate BS may be transferred onto the target substrate SUB of the display device 10 using a transfer device TD. The light emitting elements 500 arranged on the base substrate BS can be transferred onto the target substrate SUB by the operation of moving the transfer device TD in the third direction DR3 and the first direction DR1. The target substrate SUB is a substrate in which an area corresponding to the pixel PX or the sub-pixel PXn of the display device 10 is defined, and the light emitting elements 500 are transferred onto the area corresponding to the pixel PX or the sub-pixel PXn of the target substrate SUB. Although not shown in the drawing, the target substrate SUB may further include circuit elements for driving each pixel PX or sub-pixel PXn.
[0060] Here, the light emitting elements 500 do not have to be transferred individually by the transfer device TD, and two or more light emitting elements 500 arranged on the base substrate BS may be transferred to the target substrate SUB in the same process. In order to ensure that the light emitting elements 500 are accurately transferred to the pixels PX or sub-pixels PXn defined on the target substrate SUB, the light emitting elements 500 may be arranged in an aligned state on the base substrate BS corresponding to the pixels PX or sub-pixels PXn of the display device 10.
[0061] 5 is a plan view showing an arrangement of light emitting devices according to an embodiment of the present invention, which illustrates a state in which a plurality of light emitting devices 500 are arranged on the base substrate BS of FIG.
[0062] 5, the light-emitting elements 500 may be arranged in at least one direction on the base substrate BS. The light-emitting elements 500 are arranged in a first direction DR1 and a second direction DR2, and any light-emitting element 500 is arranged spaced apart from other adjacent light-emitting elements 500 in the first direction DR1 and the second direction DR2. The light-emitting elements 500 may be aligned in the first direction DR1 and the second direction DR2 so that the light-emitting elements 500 are arranged on the base substrate BS corresponding to each sub-pixel PXn defined on the target substrate SUB, thereby the light-emitting elements 500 are spaced apart from each other at a uniform distance or oriented in a uniform direction.
[0063] Therefore, the method for aligning the light emitting element 500 according to an embodiment may include determining the position at which the light emitting element 500 is to be disposed, and orienting the light emitting element 500 in one direction. The process of aligning the light emitting element 500 on the base substrate BS may include determining the position at which the light emitting element 500 is to be disposed, disposing the light emitting elements 500 at a uniform distance from each other, and rotating and moving the light emitting elements 500 based on this to orient them in a uniform direction.
[0064] For this reason, as shown in the drawings, a plurality of conductive patterns DP may be disposed on the base substrate BS, and a particular portion of the light emitting device 500 may be disposed on the conductive patterns DP. A method for aligning the light emitting device 500 according to an embodiment may include preparing a base substrate BS on which a plurality of conductive patterns DP are disposed at a distance from one another, and arranging the light emitting device 500 thereon. The light emitting device 500 may include a particular portion disposed on the conductive patterns DP, and the distance between the aligned light emitting devices 500 may be uniform.
[0065] In some embodiments, the light emitting element 500 may have a shape extending in one direction and may have two axes with different lengths, i.e., a major axis and a minor axis. The major axis direction of the plurality of light emitting elements 500 may be the alignment direction, and the plurality of light emitting elements 500 arranged on the base substrate BS may be aligned to have a certain alignment direction. For example, the light emitting elements 500 may be aligned such that the major axis faces the second direction DR2 with a certain portion arranged on the conductive pattern DP. The method of aligning the light emitting elements 500 according to an embodiment may include arranging the light emitting elements using the conductive pattern DP arranged on the base substrate BS such that the light emitting elements 500 are spaced apart from each other at a certain interval. The light emitting elements 500 transferred onto the target substrate SUB by a subsequent transfer process may be accurately positioned corresponding to the plurality of sub-pixels PXn.
[0066] A method for aligning the light emitting device 500 will be described in detail below with reference to other drawings.
[0067] FIG. 6 is a flowchart illustrating a method for aligning light emitting devices according to an embodiment.
[0068] Referring to FIG. 6, a method for aligning light-emitting elements 500 according to one embodiment may include preparing a base substrate BS having a plurality of conductive patterns DP formed thereon (S100), spraying ink having a plurality of light-emitting elements 500 dispersed therein onto the base substrate BS (S200), arranging the light-emitting elements 500 on the conductive pattern DP (S300), and orienting the light-emitting elements 500 in one direction (S400).
[0069] In one embodiment, the light emitting element 500 may be sprayed onto the base substrate BS using an inkjet printing method. The light emitting element 500 may have a fine size, be prepared in a dispersed state in ink ("Ink" in FIG. 8), and sprayed onto the base substrate BS. The light emitting element 500 dispersed in the ink may be aligned on the base substrate BS by determining a position where a specific portion is to be placed on the conductive pattern DP and orienting in one direction. Arranging the light emitting element 500 on the conductive pattern DP (S300) is to determine a position where the light emitting element 500 is to be placed. Then, the light emitting element 500 may be aligned by orienting the light emitting element 500 in one direction. The method of aligning the light emitting element 500 will be described in detail with reference to other drawings.
[0070] FIG. 7 is a plan view showing a process of a method for aligning light emitting elements according to an embodiment.
[0071] 7, a base substrate BS and a plurality of conductive patterns DP arranged on the base substrate BS are prepared (S100). The base substrate BS provides a space in which the conductive patterns DP are arranged and the light emitting elements 500 are arranged thereon. The material of the base substrate BS is not particularly limited as long as it can secure a space in which the light emitting elements 500 are aligned. As an example, the base substrate BS may include glass, quartz, or a polymer resin, or may be a ceramic substrate, a glass wafer, a silicon wafer, and the like.
[0072] Meanwhile, although not shown in the drawing, the base substrate BS may further be provided with a plurality of wirings and alignment electrodes (see "ED1" and "ED2" in FIG. 13) to which an electric signal can be applied. The plurality of wirings are electrically connected to the conductive pattern DP to apply an electric signal to the conductive pattern DP, and the alignment electrodes (ED1, ED2) can generate an electric field or a magnetic field on the base substrate BS. As described below, when an electric signal is applied to the conductive pattern DP, the light-emitting element 500 can move so that a portion of it is positioned on the conductive pattern DP. When an electric signal is applied to the alignment electrodes (ED1, ED2), the light-emitting element 500 can rotate or move so as to be aligned in one direction. This will be described later.
[0073] A plurality of conductive patterns DP are disposed on the base substrate BS. The conductive patterns DP may be disposed at regular intervals. For example, the conductive patterns DP may be disposed at intervals in a first direction DR1 and a second direction DR2 to form a lattice pattern on the entire base substrate BS. The drawings show a case in which the conductive patterns DP are disposed at intervals in the first direction DR1 and the second direction DR2 that intersect perpendicularly to each other, but the present disclosure is not limited thereto. In some cases, the conductive patterns DP may be disposed at intervals along a direction inclined with respect to the first direction DR1 and the second direction DR2. Also, in FIG. 7, only the conductive patterns DP disposed in a partial region of the base substrate BS are shown, but the present disclosure is not limited thereto, and the conductive patterns DP may be disposed on the entire base substrate BS. The size of the conductive patterns DP, the interval between the separated conductive patterns DP, and the like will be described later.
[0074] The conductive pattern DP includes a conductive material so that an electric signal is applied in a subsequent process. For example, the conductive pattern DP may include a metal and may be electrically connected to a plurality of wirings provided on the base substrate BS. The plurality of conductive patterns DP may be simultaneously connected to wirings to which the same electric signal is applied, but the present disclosure is not limited thereto. In some cases, some of the conductive patterns DP may be connected to wirings different from the other conductive patterns DP, and different electric signals may be applied to the conductive patterns DP.
[0075] In some embodiments, the position of the conductive pattern DP arranged on the base substrate BS may vary depending on the arrangement of the sub-pixels PXn of the display device 10 to which the light-emitting element 500 is transferred. The light-emitting element 500 is transferred onto the target substrate SUB of the display device 10 in a subsequent process, and the target substrate SUB defines an area corresponding to the pixel PX or sub-pixel PXn of the display device 10. The light-emitting element 500 is aligned on the base substrate BS so as to be transferred to the corresponding area defined on the target substrate SUB. Therefore, the conductive pattern DP may also be arranged to correspond to the area defined on the target substrate SUB. That is, in the manufacturing process of the display device 10 using the alignment method of the light-emitting element 500, the position of the conductive pattern DP arranged on the base substrate BS and the interval between the conductive patterns DP vary depending on the arrangement of the pixel PX or sub-pixel PXn of the display device 10. However, the present disclosure is not limited thereto.
[0076] Next, ink in which a plurality of light emitting elements 500 are dispersed is ejected onto the base substrate BS (S200).
[0077] FIG. 8 is a schematic diagram showing a process of a method for aligning light-emitting elements according to an embodiment.
[0078] 8, ink in which a plurality of light emitting elements 500 are dispersed is sprayed onto a base substrate BS. In one embodiment, the light emitting elements 500 may be sprayed onto the base substrate BS by an inkjet printing method. The light emitting elements 500 may not be uniform in their major axis direction on the base substrate BS, and may be randomly arranged such that the distance between the light emitting elements 500 is not uniform. Then, in a subsequent process, the light emitting elements 500 may be uniformly aligned by changing their alignment direction and position.
[0079] In some embodiments, the light emitting elements 500 sprayed by the inkjet printing method may be surface-treated or sonicated on the base substrate BS to prevent them from agglomerating together. If the light emitting elements 500 are agglomerated due to mutual attractive forces, the multiple light emitting elements 500 may not be uniformly aligned on the base substrate BS. To prevent this, the light emitting elements 500 may be prevented from agglomerating using physical methods such as dispersion by surface treatment or sonication. However, the present disclosure is not limited thereto.
[0080] The light emitting device 500 may be a light emitting diode or an LED chip including an inorganic semiconductor. In an exemplary embodiment, the light emitting device 500 may be a micro-LED chip having a shape extending in one direction and a size on the order of micrometers or nanometers. When the light emitting device 500 is an LED chip, the light emitting device 500 includes a semiconductor layer doped with impurities of any conductivity type (e.g., p-type or n-type) and emits light of a specific wavelength band upon receiving an electrical signal applied from an external power source.
[0081] Fig. 9 is a schematic cross-sectional view of a light-emitting device according to an embodiment. Fig. 9 is a cross-sectional view showing a simplified light-emitting device 500 according to an embodiment.
[0082] Referring to FIG. 9 in addition to FIG. 8, the light emitting element 500 may have a shape extending in one direction. The light emitting element 500 may include a major axis corresponding to the extending direction and a minor axis perpendicular to the major axis. As an example, the aspect ratio of the light emitting element 500 may be in the range of 1.2:1 to 100:1. The length of the major axis of the light emitting element 500 may be several micrometers to several hundred micrometers. For example, the length of the major axis of the light emitting element 500 may be in the range of 1 μm to 800 μm, or 1 μm to 500 μm. Furthermore, the length of the major axis of the light emitting element 500 may be in the range of 10 μm to 300 μm. However, the present disclosure is not limited thereto.
[0083] The light emitting element 500 may have a structure in which a plurality of inorganic semiconductor layers are stacked. In one embodiment, the direction in which the plurality of inorganic semiconductor layers are stacked in the light emitting element 500 and the direction in which the long axis of the light emitting element 500 extends may not be parallel to each other. For example, when the light emitting element 500 has a shape extending in one direction, the inorganic semiconductor layers may be stacked in a direction perpendicular to the one direction. The plurality of semiconductor layers may have a shape extending in the long axis direction of the light emitting element 500, and may be stacked in a thickness direction perpendicular to the direction.
[0084] Specifically, the light emitting device 500 may include a lower substrate 501, a first semiconductor layer 510, a second semiconductor layer 520, an active layer 530, a first electrode unit 560, a second electrode unit 570, and an external cap 580. In addition, the light emitting device 500 according to an embodiment may include a conductive ball DB disposed on either the first electrode unit 560 or the second electrode unit 570.
[0085] The lower substrate 501 may be a growth substrate for growing the first semiconductor layer 510. As an example, the lower substrate 501 may be sapphire (Al 2 O 3 ) substrate and a transparent substrate such as glass, although the disclosure is not limited thereto, in some embodiments, the lower substrate 501 may be a conductive substrate such as GaN, SiC, ZnO, Si, GaP, GaAs, etc.
[0086] The first semiconductor layer 510 may include an n-type semiconductor. For example, when the light emitting device 500 emits light in the blue wavelength range, the first semiconductor layer 510 may include a compound represented by the chemical formula Al x Ga y In 1-x-y N, where 0≦x≦1, 0≦y≦1, 0≦x+y≦1. For example, the first semiconductor layer 510 may include one or more of AlGaInN, GaN, AlGaN, InGaN, AlN, and InN doped with an n-type dopant. The first semiconductor layer 510 is doped with an n-type dopant, and by way of example, the n-type dopant may be Si, Ge, Sn, etc. In an exemplary embodiment, the first semiconductor layer 510 may include n-GaN doped with n-type Si.
[0087] The second semiconductor layer 520 is disposed on the active layer 530, which will be described later. The second semiconductor layer 520 may include a p-type semiconductor. For example, when the light emitting device 500 emits light in the blue or green wavelength band, the second semiconductor layer 520 may include a p-type semiconductor having the chemical formula Al x Ga y In 1-x-y The second semiconductor layer 520 may include a semiconductor material represented by the formula: N, where 0≦x≦1, 0≦y≦1, 0≦x+y≦1. For example, the second semiconductor layer 520 may include one or more of AlGaInN, GaN, AlGaN, InGaN, AlN, and InN doped with a p-type dopant. The second semiconductor layer 520 is doped with a p-type dopant. By way of example, the p-type dopant may be Mg, Zn, Ca, Se, Ba, etc. In an exemplary embodiment, the second semiconductor layer 520 may include p-GaN doped with p-type Mg.
[0088] Although the drawings show the first semiconductor layer 510 and the second semiconductor layer 520 being composed of a single layer, the present disclosure is not limited thereto. In some embodiments, depending on the material of the active layer 530, the first semiconductor layer 510 and the second semiconductor layer 520 may further include more layers, for example, a clad layer or a tensile strain barrier reducing (TSBR) layer. This will be described later with reference to other drawings.
[0089] The active layer 530 is disposed between the first semiconductor layer 510 and the second semiconductor layer 520. The active layer 530 may be disposed only on a part of the first semiconductor layer 510, and a contact layer 573 of the second electrode unit 570 described later may be disposed on the first semiconductor layer 510 where the active layer 530 is not disposed. The active layer 530 may have a single or multiple quantum well structure. When the active layer 530 has a multiple quantum well structure, the active layer 530 has a structure in which quantum layers and well layers are alternately stacked. The active layer 530 can emit light by combining electron-hole pairs in response to an electric signal applied through the first semiconductor layer 510 and the second semiconductor layer 520. As an example, when the active layer 530 emits light in the blue wavelength band, the active layer 530 may include materials such as AlGaN and AlGaInN. In particular, when the active layer 530 has a multiple quantum well structure in which quantum layers and well layers are alternately stacked, the quantum layers may include materials such as AlGaN or AlGaInN, and the well layers may include materials such as GaN or AlInN. In an exemplary embodiment, the active layer 530 may include AlGaInN in the quantum layers and AlInN in the well layers. As described above, the active layer 530 can emit blue light having a central wavelength band ranging from 450 nm to 495 nm.
[0090] However, the present disclosure is not limited thereto, and the active layer 530 may have a structure in which semiconductor materials with large band gap energy and semiconductor materials with small band gap energy are alternately stacked, and may contain other III-V group semiconductor materials according to the wavelength band of the emitted light. In addition, the light emitted by the active layer 530 is not limited to light in the blue wavelength band, and may emit light in the red or green wavelength band depending on the case.
[0091] The light emitting element 500 has a shape extending in one direction, and includes a first electrode portion 560 and a second electrode portion 570 located at both ends in the extending direction. The first electrode portion 560 and the second electrode portion 570 may include an electrode layer (561, 571) disposed on the lower substrate 501, a contact layer (563, 573) provided on the first semiconductor layer 510 or the second semiconductor layer 520, and a bridge (565, 575) electrically connecting the electrode layer (561, 571) and the contact layer (563, 573). The first electrode portion 560 may include a first electrode layer 561, a first contact layer 563 provided on the second semiconductor layer 520, and a first bridge 565 connecting them, and the second electrode portion 570 may include a second electrode layer 571, a second contact layer 573 provided on the first semiconductor layer 510, and a second bridge 575 connecting them.
[0092] The first electrode layer 561 and the second electrode layer 571 may be disposed on the lower substrate 501. Although the drawing shows a case where the first electrode layer 561 and the second electrode layer 571 are disposed on both sides of the lower substrate 501, the present disclosure is not limited thereto. The first electrode layer 561 and the second electrode layer 571 may be terminals of the light-emitting element 500 and electrically connected to electrodes disposed for each subpixel PXn of the display device 10. The first electrode layer 561 and the second electrode layer 571 transmit electrical signals applied from the electrodes to the contact layers (563, 573) via bridges (565, 575) during driving of the display device 10. The first electrode layer 561 and the second electrode layer 571 are made of a single layer or multiple layers of metal. As an example, the first electrode layer 561 and the second electrode layer 571 may include metals such as Al, Ti, Cr, Ni, Au, and alloys thereof.
[0093] The first contact layer 563 may be disposed on the second semiconductor layer 520, and the second contact layer 573 may be disposed on an exposed region of the first semiconductor layer 510 where the active layer 530 is not disposed. The first contact layer 563 and the second contact layer 573 transmit an electrical signal applied via the bridge (565, 575) to the first semiconductor layer 510 and the second semiconductor layer 520. As an example, the first contact layer 563 and the second contact layer 573 may include a metal such as Al, Ti, Cr, Ni, Au, or an alloy thereof.
[0094] The first bridge 565 electrically connects the first electrode layer 561 and the first contact layer 563, and the second bridge 575 electrically connects the second electrode layer 571 and the second contact layer 573. The first bridge 565 and the second bridge 575 may include metals such as Al, Ti, Cr, Ni, and Au, and alloys thereof. However, the present disclosure is not limited thereto. In some cases, the bridges (565, 575) may be omitted from the first electrode portion 560 and the second electrode portion 570.
[0095] The light emitting device 500 may further include an insulating film surrounding the multiple semiconductor layers, although the present disclosure is not limited thereto and the insulating layer may be omitted.
[0096] The external cap 580 is disposed on the lower substrate 501 to protect the multiple semiconductor layers. The external cap 580 may include a transparent material to allow light generated in the active layer 530 to be emitted. For example, the external cap 580 may be made of glass, quartz, or a transparent polymer resin, etc. However, the present disclosure is not limited thereto.
[0097] Although not shown in the drawings, the light emitting device 500 may be filled with other materials in the region surrounded by the external cap 580, that is, the region formed between the semiconductor layer and the external cap 580. For example, a substance for changing the characteristics of light emitted from the active layer 530 may be further disposed in the region surrounded by the external cap 580. In some embodiments, the light emitting device 500 may include phosphors or quantum dots disposed in the region, and may convert the light emitted from the active layer 530 into light of another color. In some cases, the light emitting device 500 may include a scatterer disposed in the region.
[0098] The light emitting element 500 according to an embodiment may include a conductive ball DB disposed on either the first electrode layer 561 or the second electrode layer 571. In the light emitting element 500 included in the display device 10, the first electrode unit 560 or the second electrode unit 570 and the conductive ball DB are in contact with the electrodes of the display device 10. As shown in the drawing, when the conductive ball DB is disposed on the first electrode layer 561 of the first electrode unit 560, in the light emitting element 500, the conductive ball DB and the second electrode layer 571 of the second electrode unit 570 may be in direct contact with the electrodes of the display device 10. The conductive ball DB includes a conductive material, and an electric signal applied from the electrode of the display device 10 may be transmitted to the electrode unit (560, 570) of the light emitting element 500, for example, the first electrode layer 561 or the second electrode layer 571. As an example, the conductive ball DB of the light emitting element 500 may include a metal such as Al, Ti, Cr, Ni, Au, or an alloy thereof. However, the present disclosure is not limited thereto.
[0099] According to an embodiment, in a method for aligning the light emitting elements 500, when an electric signal is applied to the conductive pattern DP of the base substrate BS, an electric field or a magnetic field is formed on the conductive pattern DP. The conductive balls DB of the light emitting elements 500 are subjected to an attractive force by the electric field or the magnetic field. As shown in FIG. 8, the light emitting elements 500 dispersed in the ink may be arranged on the base substrate BS without any particular orientation. The light emitting elements 500 having a shape extending in one direction may be arranged in a state where the long axis direction is not constant and does not correspond to the conductive pattern DP of the base substrate BS. As described later, an electric signal is applied to the conductive pattern DP in order to align the light emitting elements 500, and the electric field or the magnetic field generated by the electric signal applies an attractive force to the conductive balls DB of the light emitting elements 500. When an attractive force is applied to the conductive balls DB in a state where the light emitting elements 500 are dispersed in the ink, the position of the light emitting elements 500 changes, and a part of the light emitting elements 500 may be arranged on the conductive pattern DP. This will be described in detail with reference to other drawings.
[0100] 10 to 12 are schematic views showing a process of a method for aligning light-emitting elements according to an embodiment.
[0101] 10 to 12, ink in which light emitting elements 500 are dispersed is ejected onto a base substrate BS to arrange the light emitting elements 500 on the conductive pattern DP (S300). According to an embodiment, arranging the light emitting elements 500 on the conductive pattern DP may include positioning at least a portion of the plurality of light emitting elements 500 on the conductive pattern DP. As an example, arranging the light emitting elements 500 on the conductive pattern DP may include applying a first alignment signal to the conductive pattern DP to form a first electromagnetic field EP1 on the conductive pattern DP and applying an attractive force to the conductive balls DB of the light emitting elements 500.
[0102] Specifically, when ink is sprayed onto the base substrate BS, the light emitting elements 500 may be positioned randomly without a specific orientation. Here, when a first alignment signal is applied to the conductive pattern DP of the base substrate BS, a first electromagnetic field EP1 is generated on the conductive pattern DP including a conductive material. The first electromagnetic field EP1 may be an electric field or a magnetic field due to the first alignment signal, but the present disclosure is not limited thereto.
[0103] The first electromagnetic field EP1 generated on the conductive pattern DP applies an attractive force to the conductive balls DB of the light-emitting elements 500 dispersed in the ink. The conductive balls DB include a conductive material and are subjected to an attractive force by the first electromagnetic field EP1 generated by the first alignment signal, and the light-emitting elements 500 dispersed in the ink with fluidity change position due to the attractive force. At least some of the light-emitting elements 500 are disposed on the conductive pattern DP, and in some embodiments, the conductive balls DB of some of the light-emitting elements 500 may be disposed on the conductive pattern DP. The attractive force by the first electric field EP1 acts weakly on other light-emitting elements 500, for example, light-emitting elements 500 far away from the conductive pattern DP, so that the conductive balls DB may not be disposed on the conductive pattern DP. Some of such light-emitting elements 500 may move so that they can be disposed in the spaces between the conductive patterns DP, or so that some regions of the light-emitting elements 500 can be positioned on the conductive pattern DP.
[0104] Here, if the diameter of the conductive pattern DP is excessively large, multiple light emitting elements 500 may be arranged on one conductive pattern DP at the same time. According to one embodiment, the diameter WD of the conductive pattern DP on the base substrate BS may be smaller than the length WB of the major axis of the light emitting element 500 and the length WA of the minor axis of the light emitting element 500. By forming the diameter WD of the conductive pattern DP smaller than the length WA of the minor axis of the light emitting element 500, it is possible to prevent multiple light emitting elements 500 from being arranged on one conductive pattern DP.
[0105] However, according to some embodiments, the diameter WD of the conductive pattern DP may be larger than the diameter of the conductive ball DB of the light-emitting element 500 ("WC" in FIG. 11) so that the light-emitting element 500 can be smoothly arranged on the conductive pattern DP. If the size of the conductive pattern DP is excessively small, the intensity of the first electromagnetic field EP1 due to the applied first alignment signal may be weak, and the movement of the light-emitting element 500 may be insufficient. Therefore, the diameter WD of the conductive pattern DP may be larger than the diameter WC of the conductive ball DB of the light-emitting element 500. However, the present disclosure is not limited thereto.
[0106] When the first electromagnetic field EP1 is generated on the conductive pattern DP, an attractive force is applied to the conductive balls DB of the light emitting elements 500 dispersed in the ink, and the light emitting elements 500 are changed in position on the base substrate BS. However, as described above, not all the light emitting elements 500 in the ink may be arranged for each conductive pattern DP, and some of the light emitting elements 500 may be located in a space separated from the conductive pattern DP, or the conductive balls DB of the light emitting elements 500 may not be arranged on the conductive pattern DP. According to an embodiment, by adjusting the distance between the conductive patterns DP, the position of the light emitting elements 500 that are not located on the conductive pattern DP can be changed when aligning the light emitting elements 500 in a subsequent process.
[0107] 13 to 15 are schematic diagrams showing steps of a method for aligning light-emitting elements according to an embodiment.
[0108] 13 to 15, when at least a portion of the light emitting elements 500 is disposed on the conductive pattern DP, the light emitting elements 500 are aligned in one direction (S400). According to an embodiment, orienting the light emitting elements 500 in one direction is to determine the alignment direction of the plurality of light emitting elements 500, and may include changing the long axis direction of the light emitting elements 500 or the direction in which one end of the light emitting elements 500 faces. As an example, orienting the light emitting elements 500 in one direction may include applying a second alignment signal to the first alignment electrode ED1 and the second alignment electrode ED2 disposed on the base substrate BS to form a second electromagnetic field EP2 on the base substrate BS to change the long axis direction of the light emitting elements 500.
[0109] Specifically, even if the light emitting element 500 is positioned on the conductive pattern DP, the long axis direction of the light emitting element 500 may be randomly oriented. Here, when a second electromagnetic field EP2 is formed in one direction on the base substrate BS, the light emitting element 500 receives a dielectrophoretic force due to the second electromagnetic field EP2, and the orientation direction, which is the direction of the long axis direction, may change.
[0110] For example, as shown in FIG. 13, a first alignment electrode ED1 and a second alignment electrode ED2 are arranged on a base substrate BS, spaced apart from each other in a second direction DR2. A plurality of conductive patterns DP are arranged between the first alignment electrode ED1 and the second alignment electrode ED2, and a light-emitting element 500 is placed or disposed thereon. When a second alignment signal is applied to the first alignment electrode ED1 and the second alignment electrode ED2, a second electromagnetic field EP2 is generated in one direction above the base substrate BS or between the first alignment electrode ED1 and the second alignment electrode ED2. In an exemplary embodiment, an AC voltage may be applied to the first alignment electrode ED1, and the second alignment electrode ED2 may be grounded. The second electromagnetic field EP2 may be generated in a direction from the first alignment electrode ED1 to the second alignment electrode ED2, i.e., in the second direction DR2. The second electromagnetic field EP2 may be an electric field or a magnetic field due to a second alignment signal, although the present disclosure is not limited thereto.
[0111] The light emitting device 500 is subjected to a dielectrophoretic force by the second electromagnetic field EP2, and the light emitting device 500 may be oriented to face the same direction as the second electromagnetic field EP2 that faces in one direction. According to an embodiment, the light emitting device 500 may have a magnetic DM formed in the same direction as the long axis direction. The light emitting device 500 may have a first electrode unit 560 and a second electrode unit 570 spaced apart in the same direction as the long axis direction, and a magnetic DM may be formed between them. As an example, the lower substrate 501 of the light emitting device 500 may include a material containing a magnetic substance, and in a manufacturing process of the light emitting device 500, a magnetic property such as ferromagnetism or paramagnetism may be imparted to the lower substrate 501, thereby forming a magnetic DM that faces the long axis direction or the direction in which the first electrode unit 560 and the second electrode unit 570 are spaced apart. As a result, the light emitting device 500 may be subjected to a dielectrophoretic force such that the long axis direction faces the same direction as the direction of the second electromagnetic field EP2. That is, in one embodiment, in the method of aligning the light emitting device 500, in the step of determining the orientation direction of the light emitting device 500, the light emitting device 500 may be oriented so that its major axis direction is the same as the direction in which the second electromagnetic field EP2 faces.
[0112] 15, in the light-emitting device 500, a magnetic DM directed in one direction may be formed between the first electrode unit 560 or the first electrode layer 561 and the second electrode unit 570 or the second electrode layer 571. Such a dipole moment may be formed by doping the first electrode layer 561 and the second electrode layer 571 of the light-emitting device 500 with impurities of different conductivity types (e.g., p-type or n-type). However, the present disclosure is not limited thereto, and the method of forming the dipole moment is not particularly limited as long as the first electrode unit 560 and the second electrode unit 570 include a conductive material and can form a dipole moment between them.
[0113] That is, as an example, the light emitting element 500 may have a magnetic DM formed in the same direction as the long axis direction from the first electrode unit 560 to the second electrode unit 570. In this case, the light emitting element 500 may be subjected to a dielectrophoretic force such that the direction of the second electromagnetic field EP2 and the direction of the magnetic DM are the same. The light emitting elements 500 having a shape extending in one direction can be aligned with each other on the conductive pattern DP by changing their positions and orientation directions due to the dielectrophoretic force.
[0114] Here, an alignment signal is applied to the conductive pattern DP, and the light emitting device 500 with the conductive ball DB disposed on the conductive pattern DP may rotate to change only the alignment direction while maintaining its position. For this purpose, according to an embodiment, determining the alignment direction of the light emitting device 500 may include applying a third alignment signal to the conductive pattern DP, and a third electromagnetic field EP3 generated by the third alignment signal may transmit an attractive force to the conductive ball DB. The third alignment signal may have a stronger intensity than the first alignment signal, and the third electromagnetic field EP3 may transmit an attractive force stronger than the first electromagnetic field EP1. Thus, the light emitting device 500 with the conductive ball DB disposed on the conductive pattern DP may change only the alignment direction by the second electromagnetic field EP2 while maintaining the position of the conductive ball DB. As shown in FIG. 14, some light emitting devices 500 may rotate around the conductive ball DB without changing the position of the conductive ball DB, and only the alignment direction may change. In some embodiments, the light-emitting element 500 may be oriented such that the second direction DR2 in which the second electromagnetic field EP2 faces and the direction in which the magnetic field DM faces are the same when the light-emitting element 500 is disposed on the conductive pattern DP.
[0115] Meanwhile, as described above, some of the light emitting elements 500 may be located partially on the conductive pattern DP or in the gap between the conductive patterns DP without the conductive balls DB being located on the conductive pattern DP. The light emitting elements 500 located partially on the conductive pattern DP are subjected to a strong attractive force by the third electromagnetic field EP3 formed on the conductive pattern DP, and are changed in position so that the conductive balls DB are located on the conductive pattern DP. At the same time, they are subjected to a dielectrophoretic force by the second electromagnetic field EP2, and some of the light emitting elements 500 may be oriented while maintaining their positions on the conductive pattern DP.
[0116] However, the light emitting element 500 located in the gap between the conductive patterns DP may not be placed on the conductive pattern DP even if it is attracted by the third electromagnetic field EP3. In this case, the orientation direction may change as the position is continuously moved by the second electromagnetic field EP2. According to an embodiment, by adjusting the interval between the conductive patterns DP, it is possible to prevent the light emitting element 500 from being placed on the conductive pattern DP and only the orientation direction changing.
[0117] According to an embodiment, the distance between the conductive patterns DP includes intervals WP1 and WP2 that are spaced apart from each other in one direction. The first interval WP1, which is the distance in a direction perpendicular to the direction of the second electromagnetic field EP, may be shorter than the length WB of the major axis of the light-emitting element 500. For example, the conductive patterns DP may be arranged spaced apart from each other in the first direction DR1 and the second direction DR2, and some of the conductive patterns DP may be spaced apart in the first direction DR1 with the first interval WP1, and some of the conductive patterns DP may be spaced apart in the second direction DR2 with the second interval WP2. As described above, when the second electromagnetic field EP2 is generated toward the second direction DR2, the first interval WP1, which is the distance between the conductive patterns DP in the first direction DR1, may be shorter than at least the length WB of the major axis of the light-emitting element 500.
[0118] When the light emitting element 500 receives a dielectrophoretic force due to the second electromagnetic field EP2 with the conductive ball DB disposed on the conductive pattern DP, the light emitting element 500 may rotate around the conductive pattern DP and change its orientation direction. Here, the other light emitting element 500 located between the conductive pattern DP and the other conductive pattern DP spaced apart from the conductive pattern DP in the first direction DR1 may be physically contacted by the rotating light emitting element 500 and may change its position and orientation direction. The light emitting element 500 located between the conductive patterns DP may collide with the other light emitting element 500 and change its position and orientation direction, and may move to an area affected by the third electromagnetic field EP3 generated by the conductive pattern DP. In this case, the conductive ball DB of such a light emitting element 500 receives an attractive force due to the third electromagnetic field EP3 generated on the corresponding conductive pattern DP, and in some cases, the conductive ball DB of the light emitting element 500 may be disposed on the corresponding conductive pattern DP.
[0119] Here, when the distance (spacing) between the conductive patterns DP is large, there may be light-emitting elements 500 that are not physically contacted by the light-emitting elements 500 rotating around the conductive pattern DP. In this case, the light-emitting elements 500 that are not placed on any of the conductive patterns DP will remain. To prevent this, the distance (spacing) between the conductive patterns DP may be adjusted according to the length WB of the major axis and the diameter WA of the minor axis of the light-emitting elements 500, etc.
[0120] In an exemplary embodiment, a first interval WP1, which is a distance between the conductive patterns DP spaced apart in the first direction DR1, may be greater than the minor axis length WA of the light emitting element 500, or less than twice the minor axis length WA. Also, a second interval WP2, which is a distance between the conductive patterns DP spaced apart in the second direction DR2, may be greater than the major axis length WB of the light emitting element 500, or less than twice the major axis length WB.
[0121] As described above, the magnetic field DM may be formed in the same direction as the long axis direction of the light emitting element 500, and the light emitting element 500 may be oriented in the direction in which the second electromagnetic field EP2 is directed. In the light emitting element 500, a long axis length WB directed in the same direction as the direction in which the second electromagnetic field EP2 is directed and a short axis length WA perpendicular thereto are defined. The conductive patterns DP may be spaced apart at a second interval WP2 in a second direction DR2 in which the second electromagnetic field EP2 is directed, and spaced apart at a first interval WP1 in a first direction DR1 perpendicular to the direction in which the second electromagnetic field EP2 is directed. The first interval WP1 and the second interval WP2 between the conductive patterns DP may be adjusted within the above-mentioned range according to the short axis length WA and the long axis length WB of the light emitting element 500, respectively. In this case, the light emitting element 500 located between the conductive patterns DP may be arranged on the conductive pattern DP by changing the position and orientation direction due to physical contact when another light emitting element 500 arranged on the conductive pattern DP is oriented. As a result, one light emitting element 500 can be disposed on each conductive pattern DP, and the plurality of light emitting elements 500 can be aligned such that their orientation directions, which are the major axis directions, are aligned.
[0122] FIG. 16 is a plan view illustrating a base substrate on which light emitting devices are aligned according to an embodiment.
[0123] 16, a plurality of light emitting elements 500 arranged on a base substrate BS can be aligned so that they are spaced apart from each other at uniform intervals and have the same orientation direction, which is the long axis direction. As described above, the alignment method of the light emitting elements 500 according to the embodiment may include positioning the light emitting elements 500 on the conductive pattern DP arranged on the base substrate BS and determining the orientation direction of the light emitting elements 500 using the conductive pattern DP and the conductive balls DB of the light emitting elements 500 arranged on the base substrate BS.
[0124] Thereby, the light emitting elements 500 may be aligned so that they are uniformly spaced apart from each other along the conductive pattern DP and the orientation direction, which is the long axis direction, is aligned. The light emitting elements 500 may be aligned so as to be spaced apart from each other in the first direction DR1 and the second direction DR2, similar to the conductive pattern DP. The conductive patterns DP are spaced apart by a first interval WP1 and a second interval WP2, and the first interval WP1 and the second interval WP2 have a specific relationship with the long axis length WB and the short axis length WA of the light emitting elements 500. Similarly, the interval at which the light emitting elements 500 are spaced apart in the first direction DR1 and the second direction DR2 has a specific relationship with the long axis length WB and the short axis length WA of the light emitting elements 500. As an example, the interval between the light emitting elements 500 in the first direction DR1 may be shorter than the long axis length WB of the light emitting elements 500. Also, the interval between the light emitting elements 500 in the second direction DR2 may be shorter than the long axis length WB of the light emitting elements 500. However, the present disclosure is not limited thereto.
[0125] Thereafter, although not shown in the drawings, the ink sprayed onto the base substrate BS is removed to align the light emitting elements 500 on the base substrate BS. Methods for removing the ink include, but are not limited to, a drying process using heat treatment or a drying process using light irradiation.
[0126] As described above, the display device 10 including a plurality of light-emitting elements 500 can be manufactured by a process of transferring the light-emitting elements 500 aligned on the base substrate BS onto the target substrate SUB. As shown in Figs. 4 and 16, the light-emitting elements 500 are aligned on the base substrate BS, and regions corresponding to the pixels PX and sub-pixels PXn of the display device 10 are defined on the target substrate SUB. The display device 10 can be manufactured by transferring the light-emitting elements 500 from the base substrate BS to the target substrate SUB using a transfer device ("TD" in Fig. 4). Hereinafter, the display device 10 manufactured by the above-mentioned method will be described with reference to further drawings.
[0127] FIG. 17 is a cross-sectional view showing one sub-pixel of a display device according to an embodiment.
[0128] Referring to FIG. 17, the display device 10 may include a first substrate 101, a semiconductor layer disposed on the first substrate 101, a plurality of conductive layers, a plurality of insulating layers, and a light-emitting element 500. The plurality of semiconductor layers and conductive layers may constitute a circuit element of each subpixel PXn, and the other conductive layers and light-emitting element 500 may constitute a light-emitting diode EL of each subpixel PXn. Although the drawing shows a case where only the driving transistor DT and the light-emitting element 500 are disposed on the first substrate 101, the present disclosure is not limited thereto. The display device 10 may further include a greater number of components, for example, a scan transistor SCT, a sensing transistor SST, and the like. Also, in FIG. 17, the light-emitting element 500 is shown in a simplified form for convenience of explanation. In the following, only the driving transistor DT shown as being disposed on the first substrate 101 will be described. However, the configuration of the driving transistor DT may also be applied to other transistors provided in the display device 10.
[0129] The first substrate 101 may be an insulating substrate. The first substrate 101 is made of an insulating material such as glass, quartz, or polymer resin. The first substrate 101 may be a rigid substrate or a flexible substrate that is capable of bending, folding, rolling, etc.
[0130] Although not shown in the drawing, a light-shielding layer and a buffer layer may be further disposed on the first substrate 101. The light-shielding layer is made of an opaque metal material that blocks the transmission of light, thereby preventing light from being incident on the active material layer ACT of the driving transistor DT.
[0131] In addition to the light-shielding layer, a buffer layer may be disposed over the entire surface of the first substrate 101. The buffer layer can protect the transistor DT of each pixel PX from moisture that penetrates through the first substrate 101, which is susceptible to moisture permeation, and at the same time, perform the function of surface planarization. The buffer layer is made of multiple inorganic layers that are alternately stacked. For example, the buffer layer can be a silicon oxide layer (SiO x), silicon nitride layer (SiN x ), silicon oxynitride (SiON), or one or more inorganic layers may be formed in a multi-layer structure.
[0132] The active material layer ACT of the driving transistor DT may be disposed on the first substrate 101 or the buffer layer. In an exemplary embodiment, the active material layer ACT may include polycrystalline silicon, single crystal silicon, an oxide semiconductor, or the like. The polycrystalline silicon may be formed by crystallizing amorphous silicon. Examples of such crystallization methods include, but are not limited to, a rapid thermal annealing (RTA) method, a solid phase crystallization (SPC) method, an excimer laser annealing (ELA) method, a metal induced crystallization (MILC) method, and a sequential lateral solidification (SLS) method. When the active material layer ACT includes polycrystalline silicon, the active material layer ACT may include a first doping region ACTa, a second doping region ACTb, and a first channel region ACTc. The first channel region ACTc may be disposed between the first doping region ACTa and the second doping region ACTb. The first doped region ACTa and the second doped region ACTb may be regions in which a portion of the active material layer ACT is doped with an impurity.
[0133] In an exemplary embodiment, the active material layer ACT may include an oxide semiconductor. In this case, the doped regions of the active material layer ACT may each be a conductive region. The oxide semiconductor may be an oxide semiconductor containing indium (In). In some embodiments, the oxide semiconductor may be indium-tin oxide (ITO), indium-zinc oxide (IZO), indium-gallium oxide (IGO), indium-zinc-tin oxide (IZTO), indium-gallium-tin oxide (IGTO), indium-gallium-zinc-tin oxide (IGZTO), or the like. However, the present disclosure is not limited thereto.
[0134] A first gate insulating layer 102 is disposed on the semiconductor layer and the buffer layer. The first gate insulating layer 102 may include a semiconductor layer and may be disposed on the first substrate 101 or the buffer layer. The first gate insulating layer 102 may function as a gate insulating film of the driving transistor DT. The first gate insulating layer 102 may be made of an inorganic material, such as silicon oxide (SiO x ), silicon nitride (SiN x ) or may be formed in a laminated structure of these.
[0135] The first gate conductive layer is disposed on the first gate insulating layer 102. The first gate conductive layer may include a first gate electrode DT_G of the driving transistor DT. The first gate electrode DT_G is disposed so as to overlap at least a partial region of the active material layer ACT. For example, the first gate electrode DT_G may be disposed so as to overlap in the thickness direction with a first channel region ACTc of the active material layer ACT.
[0136] The first gate conductive layer may be formed of a single layer or multiple layers of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd) and copper (Cu) or an alloy thereof, although the present disclosure is not limited thereto.
[0137] A first protective layer 103 is disposed on the first gate conductive layer. The first protective layer 103 is disposed to cover the first gate conductive layer and can perform a function of protecting the first gate conductive layer. The first protective layer 103 is made of an inorganic material, such as silicon oxide (SiO x ), silicon nitride (SiN x) Alternatively, these may be formed into a laminated structure.
[0138] A first interlayer insulating layer 105 is disposed on the first protective layer 103. The first interlayer insulating layer 105 can function as an insulating film between the first protective layer 103 and another layer disposed thereon. The first interlayer insulating layer 105 is made of an inorganic material, such as silicon oxide (SiO x ), silicon nitride (SiN x ) or may be formed in a laminated structure of these.
[0139] A first data conductive layer is disposed on the first interlayer insulating layer 105. The first data conductive layer may include a first source / drain electrode DT_S and a second source / drain electrode DT_D of the driving transistor DT.
[0140] The first source / drain electrode DT_S and the second source / drain electrode DT_D of the driving transistor DT may be in contact with the first doping region ACTa and the second doping region ACTb of the active material layer ACT through contact holes penetrating the first interlayer insulating layer 105, the first protective layer 103, and the first gate insulating layer 102, respectively. Although not shown in the drawing, the first source / drain electrode DT_S of the driving transistor DT may be electrically connected to the light-shielding layer through another contact hole. Meanwhile, when either one of the first source / drain electrode DT_S and the second source / drain electrode DT_D of the driving transistor DT is a source electrode, the other electrode is a drain electrode. However, the present disclosure is not limited thereto, and when either one of the first source / drain electrode DT_S and the second source / drain electrode DT_D is a drain electrode, the other electrode may be a source electrode.
[0141] The first data conductive layer may be formed of a single layer or multiple layers of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd) and copper (Cu) or an alloy thereof, although the present disclosure is not limited thereto.
[0142] A second interlayer insulating layer 107 may be disposed on the first data conductive layer. The second interlayer insulating layer 107 is disposed on the entire surface of the first interlayer insulating layer 105, covering the first data conductive layer, and may perform a function of protecting the first data conductive layer. The second interlayer insulating layer 107 may be made of an inorganic material, such as silicon oxide (SiO x ), silicon nitride (SiN x ) or may be formed in a laminated structure of these.
[0143] A second data conductive layer is disposed on the second interlayer insulating layer 107. The second data conductive layer may include a first conductive wiring SD1. Although not shown in the drawing, the second data conductive layer may further include a first voltage wiring VSSL to which a low potential voltage (first power supply voltage, VSS) to be supplied to a common electrode 220 described later is applied, and a second voltage wiring VDDL to which a high potential voltage (second power supply voltage, VDD) to be supplied to a driving transistor DT is applied.
[0144] The first conductive wiring SD1 may be electrically connected to a first source / drain electrode DT_S of the driving transistor DT through a contact hole formed in the second interlayer insulating layer 107. The first conductive wiring SD1 also contacts a pixel electrode 210 described later, and the driving transistor DT transmits a second power supply voltage VDD applied from a second voltage wiring VDDL to the pixel electrode 210 through the first conductive wiring SD1.
[0145] The second data conductive layer may be formed of a single layer or multiple layers of any one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd) and copper (Cu) or an alloy thereof, although the present disclosure is not limited thereto.
[0146] A first planarization layer 109 is disposed on the second data conductive layer. The first planarization layer 109 includes an organic insulating material and can perform a function of surface planarization.
[0147] A first electrode and a second electrode are disposed on the first planarization layer 109. The first electrode is a pixel electrode 210, and the second electrode is a common electrode 220. The pixel electrode 210 and the common electrode 220 are disposed apart from each other. The pixel electrode 210 may be in contact with the first conductive wiring SD1 through a contact hole that penetrates the first planarization layer 109 and exposes the first conductive wiring SD1. Although not shown in the drawing, the common electrode 220 may be in contact with the first voltage wiring VSSL through a contact hole that penetrates the first planarization layer 109. As a result, the first power supply voltage VSS is applied to the common electrode 220, and the second power supply voltage VDD is applied to the pixel electrode 210 through the driving transistor DT and the first conductive wiring SD1. In an exemplary embodiment, the pixel electrode 210 is separated for each subpixel PXn, and the common electrode 220 may be an electrode commonly connected along each subpixel PXn. The pixel electrode 210 may be an anode electrode of the light emitting diode EL, and the common electrode 220 may be a cathode electrode of the light emitting diode EL, although the present disclosure is not limited thereto and vice versa.
[0148] The light emitting element 500 may be disposed on the pixel electrode 210 and the common electrode 220. For example, the first electrode unit 560 of the light emitting element 500 may be disposed on the pixel electrode 210, and the second electrode unit 570 may be disposed on the common electrode 220. According to an embodiment, the light emitting element 500 includes a conductive ball DB disposed on the first electrode unit 560 or the second electrode unit 570, and the conductive ball DB may contact the pixel electrode 210 or the common electrode 220. The drawing shows a case where the conductive ball DB is disposed on the first electrode unit 560 and contacts the pixel electrode 210. However, the present disclosure is not limited thereto, and when the conductive ball DB is disposed on the second electrode unit 570, the conductive ball DB contacts the common electrode 220, and the first electrode layer 561 of the first electrode unit 560 contacts the pixel electrode 210. Thus, in the light emitting device 500, the first electrode unit 560 may be electrically connected to the first electrode or pixel electrode 210, and the second electrode unit 570 may be electrically connected to the second electrode or common electrode 220.
[0149] The display device 10 may be manufactured through a process of transferring the light emitting elements 500 aligned using the above-mentioned alignment method of the light emitting elements 500 onto a target substrate SUB. Here, in order to uniformly align the light emitting elements 500, the alignment method of the light emitting elements 500 according to an embodiment uses a conductive pattern DP and conductive balls DB. The conductive balls DB of the light emitting elements 500 may remain on the light emitting elements 500 transferred onto the target substrate SUB. According to an embodiment, the conductive pattern DP may be disposed on at least one of the first electrode 210 and the second electrode 220. As an example, the conductive pattern DP may be formed by a process of metal deposition and patterning in the process of forming the first electrode 210 and the second electrode 220. However, the present disclosure is not limited thereto.
[0150] The conductive pattern DP is disposed on the first electrode 210 or the second electrode 220, so that in the process of disposing the light emitting element 500, the light emitting element 500 can be disposed such that the conductive ball DB corresponds to the conductive pattern DP. Thus, according to an embodiment, a method for aligning the light emitting element 500 can be used to uniformly dispose a plurality of light emitting elements 500 between the first electrode 210 and the second electrode 220. Also, as described above, the conductive ball DB and the conductive pattern DP include a conductive material. Thus, even if the conductive ball DB is disposed between the electrode portion (560, 570) of the light emitting element 500 and the pixel electrode 210 or the common electrode 220, the light emitting element 500 can receive an electric signal from the pixel electrode 210 and the common electrode 220.
[0151] Hereinafter, a method for aligning the light emitting device 500 according to another embodiment will be described.
[0152] FIG. 18 is a plan view showing a base substrate on which light emitting devices according to another embodiment are aligned.
[0153] 18, in an aligning method of light emitting devices 500 according to an embodiment, different types of light emitting devices (500a_1, 500b_1, 500c_1) can be aligned on the same base substrate BS. This embodiment differs from the embodiment shown in FIG. 4 in that the light emitting devices 500_1 include different types of light emitting devices and are aligned. Hereinafter, the differences will be mainly described, and overlapping descriptions will be omitted.
[0154] In the embodiment of FIG. 18, the light emitting element 500_1 may include different types of light emitting elements, for example, a first light emitting element 500a_1, a second light emitting element 500b_1, and a third light emitting element 500c_1. As described above, the light emitting element 500_1 may emit light of different colors depending on the type of the active layer 530. According to an embodiment, the first light emitting element 500a_1 emits light of a first color, the second light emitting element 500b_1 emits light of a second color, and the third light emitting element 500c_1 emits light of a third color. The first color may be blue light, the second color may be green light, and the third color may be red light.
[0155] When the light emitting elements 500_1 emit light of different colors, the display device 10 including them needs to arrange the different types of light emitting elements 500_1 in a predetermined pixel PX or subpixel PXn. For example, when an arbitrary pixel PX includes a first subpixel PX1 that displays light of a first color, a second subpixel PX2 that displays light of a second color, and a third subpixel PX3 that displays light of a third color, the first light emitting element 500a_1, the second light emitting element 500b_1, and the third light emitting element 500c_1 are required to be arranged in the first subpixel PX1, the second subpixel PX2, and the third subpixel PX3, respectively. Similarly, when aligning the light emitting elements 500_1 of different types, it is necessary to arrange and align the specific light emitting element 500_1 on a specific conductive pattern DP. In the alignment method of the light emitting elements 500_1 according to an embodiment, the conductive patterns DP arranged on the base substrate BS may include different conductive patterns (DP1, DP2, DP3). In the step of positioning or disposing the light emitting element 500_1 on the conductive pattern DP, different types of light emitting elements (500a_1, 500b_1, 500c_1) may be positioned or disposed on the different conductive patterns (DP1, DP2, DP3).
[0156] 19 to 21 are schematic views showing some steps of a method for aligning light-emitting elements according to another embodiment.
[0157] 19 to 21, the base substrate BS may include a plurality of conductive patterns (DP1, DP2, DP3) to which a first alignment signal is applied individually from each other. The plurality of first conductive patterns DP1, second conductive patterns DP2, and third conductive patterns DP3 are respectively arranged at a distance from each other in the second direction DR2. The first conductive pattern DP1 and the second conductive pattern DP2 are spaced apart from each other in the first direction DR1, and the second conductive pattern DP2 and the third conductive pattern DP3 are also spaced apart from each other in the first direction DR1. That is, the base substrate BS has the same type of conductive patterns (DP1, DP2, DP3) arranged at a distance from each other in the second direction DR2 to form a linear pattern. The different types of conductive patterns (DP1, DP2, DP3) may be arranged at a distance from each other in the first direction DR1 and alternately repeated.
[0158] As described above, the base substrate BS is provided with wiring for applying the first alignment signal and the third alignment signal to the conductive patterns (DP1, DP2, DP3). Unlike the embodiment shown in FIG. 10, different conductive patterns, for example, the first conductive pattern DP1, the second conductive pattern DP2, and the third conductive pattern DP3, may be electrically connected to different wirings and may have alignment signals applied to them individually. In this way, the method for aligning the light emitting device 500 according to the embodiment can align different types of light emitting devices 500 individually.
[0159] 19, the ink in which the first light emitting element 500a_1 is dispersed is sprayed onto the base substrate BS, and the first alignment signal is applied only to the first conductive pattern DP1. As a result, the conductive ball DB of the first light emitting element 500a_1 sprayed onto the base substrate BS is attracted by the first electromagnetic field EP1 generated by the first conductive pattern DP1, and the first light emitting element 500a_1 can be positioned on the first conductive pattern DP1.
[0160] Next, as shown in Fig. 20, the ink in which the second light emitting element 500b_1 is dispersed is sprayed onto the base substrate BS, and a first alignment signal is applied to the second conductive pattern DP2, and a third alignment signal is applied to the first conductive pattern DP1. As a result, the conductive ball DB of the second light emitting element 500b_1 is attracted by the first electromagnetic field EP1 generated by the second conductive pattern DP2, and the second light emitting element 500b_1 can be disposed on the second conductive pattern DP2. Meanwhile, since the third alignment signal having a stronger intensity than the first alignment signal is applied to the first conductive pattern DP1, a third electromagnetic field EP3 having a stronger intensity than the first electromagnetic field EP1 is generated on the first conductive pattern DP1. Therefore, the first light emitting element 500a_1 disposed on the first conductive pattern DP1 can maintain its position on the first conductive pattern DP1 even when the first electromagnetic field EP1 is generated by the second conductive pattern DP2. Also, since no alignment signal is applied to the third conductive pattern DP3, the light emitting element is not positioned there.
[0161] 21, the ink (Ink) in which the third light-emitting element 500c_1 is dispersed is ejected onto the base substrate BS, and a first alignment signal is applied to the third conductive pattern DP3, and a third alignment signal is applied to the first conductive pattern DP1 and the second conductive pattern DP2. As a result, the first light-emitting element 500a_1 is disposed or positioned on the first conductive pattern DP1, the second light-emitting element 500b_1 is disposed or positioned on the second conductive pattern DP2, and the third light-emitting element 500c_1 is disposed or positioned on the third conductive pattern DP3. The explanation for this is the same as that described above.
[0162] Thereafter, although not shown in the drawings, a second electromagnetic field EP2 can be generated using alignment electrodes (ED1, ED2) arranged on the base substrate BS to align the first light emitting element 500a_1, the second light emitting element 500b_1, and the third light emitting element 500c_1. According to an embodiment, different light emitting elements can be aligned at desired positions using conductive patterns (DP1, DP2, DP3) to which alignment signals are applied individually.
[0163] Meanwhile, the conductive pattern DP arranged on the base substrate BS may be arranged corresponding to the shape of an area defined on the target substrate SUB to which the light emitting elements 500 are transferred. For example, when the light emitting elements 500 are arranged on the target substrate SUB not in the first direction DR1 and the second direction DR2 but in a direction inclined thereto, the conductive pattern DP arranged on the base substrate BS may also be arranged at a position corresponding to this structure.
[0164] FIG. 22 is a plan view showing a base substrate on which light emitting devices according to another embodiment are aligned.
[0165] Referring to FIG. 22, according to an embodiment, the conductive patterns DP on the base substrate BS_2 do not necessarily have to be arranged in a first direction DR1 and a second direction DR2 perpendicular thereto. As shown in the drawing, a plurality of conductive patterns DP may be arranged at a distance in one direction and another direction intersecting the one direction but not perpendicular thereto. Thus, the light emitting elements 500 aligned on the conductive patterns DP can also be aligned in one direction and another direction intersecting the one direction but not perpendicular thereto. In this case, a display device 10 having an arrangement of the pixels PX and the sub-pixels PXn different from that of FIG. 2 can be manufactured using the method for aligning the light emitting elements 500 according to an embodiment. The rest of the description is the same as that described above, and thus a detailed description will be omitted.
[0166] Although the embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention can be embodied in other specific forms without changing the technical idea or essential features of the present invention. Therefore, it should be understood that the above embodiments are illustrative in all respects and are not limiting. [Explanation of symbols]
[0167] 10:Display device 101: First substrate 210: pixel electrode 220: Common electrode 500: Light emitting element DP: Conductive pattern DB: Conductive ball
Claims
1. preparing a base substrate, a plurality of conductive patterns disposed on the base substrate and spaced apart from each other, and a first alignment electrode and a second alignment electrode disposed on the base substrate and spaced apart from each other in a first direction; Ink is ejected onto the base substrate, in which a plurality of light emitting elements are dispersed, and a first alignment signal is applied onto the plurality of conductive patterns to arrange at least a portion of the light emitting elements on the conductive patterns; applying a second alignment signal to the first alignment electrode and the second alignment electrode to orient one ends of the plurality of light emitting elements in a first direction; Including, The conductive patterns are disposed spaced apart from one another in the first direction and in a second direction intersecting the first direction.
2. 2. The method of aligning a light-emitting element according to claim 1, wherein arranging the light-emitting element comprises applying the first alignment signal to the conductive pattern to generate a first electromagnetic field on the conductive pattern, and arranging at least some of the light-emitting elements on the conductive pattern.
3. The light emitting device includes a conductive ball to which an attractive force is applied by the first electromagnetic field, The method for arranging light-emitting elements according to claim 2 , wherein the arranging of the light-emitting elements includes arranging the conductive balls of the at least some of the light-emitting elements on the conductive pattern.
4. The method for aligning a light-emitting element described in claim 2, wherein orienting the light-emitting element includes applying the second alignment signal to the first alignment electrode and the second alignment electrode to generate a second electromagnetic field on the base substrate and changing the position or orientation direction of the light-emitting element.
5. 5. The method of claim 4, wherein orienting the light emitting element comprises applying a third alignment signal to the conductive pattern to generate a third electromagnetic field stronger than the first electromagnetic field.
6. Orienting the light emitting device comprises: the one end of the light emitting device located on the conductive pattern is oriented in the first direction, The method of claim 4 , wherein at least a portion of the light-emitting element not located on the conductive pattern is disposed on the conductive pattern, with one end oriented in the first direction.
7. The method of claim 1 , wherein the light emitting element has a shape elongated in one direction, and the light emitting element has a major axis in the first direction.
8. The method for aligning light-emitting elements according to claim 7 , wherein the lengths of the major and minor axes of the light-emitting elements are greater than a diameter of the conductive pattern.
9. The method of claim 7 , wherein a first interval, which is a distance between the conductive patterns spaced apart in the first direction, is longer than a length of a major axis of the light emitting device.
10. The method of claim 9 , wherein a second interval, which is a distance between the conductive patterns spaced apart in the second direction, is shorter than a length of a major axis of the light emitting device and is greater than a diameter of the light emitting device.
11. 8. The method of aligning a light-emitting element according to claim 7, wherein the light-emitting element includes a first semiconductor layer, a second semiconductor layer, and an active layer disposed therebetween, and the first semiconductor layer, the active layer, and the second semiconductor layer are stacked in another direction perpendicular to the one direction in which the light-emitting element extends.
12. The conductive pattern includes a plurality of first conductive patterns spaced apart from each other in the first direction; 2 . The method of claim 1 , further comprising: a plurality of second conductive patterns spaced apart from the first conductive pattern in a third direction intersecting the first direction and spaced apart from each other in the first direction.
13. The light emitting element includes a first light emitting element and a second light emitting element, In disposing the light emitting element, 13. The method of claim 12, wherein a third electromagnetic field is generated on the first conductive pattern such that the first light-emitting element is positioned on the first conductive pattern, and a first electromagnetic field is generated on the second conductive pattern such that the second light-emitting element is positioned on the second conductive pattern.
14. providing a base substrate and a plurality of conductive patterns disposed on the base substrate and spaced apart from one another; Ink in which a plurality of light emitting elements each having a shape extending in one direction is dispersed is ejected onto the base substrate, and a first electromagnetic field is generated on the conductive pattern to position at least a portion of the light emitting elements on the conductive pattern; generating a second electromagnetic field on the base substrate in a first direction, the second electromagnetic field being different from the first electromagnetic field, to orient the plurality of light-emitting elements; transferring the plurality of light emitting devices onto a target substrate; The method for manufacturing a display device, wherein the plurality of conductive patterns are arranged spaced apart from each other in the first direction and a second direction intersecting the first direction.
15. The light emitting device includes a conductive ball to which an attractive force is applied by the first electromagnetic field, The method for manufacturing a display device according to claim 14 , wherein determining the position of the light emitting element comprises arranging the conductive ball on the conductive pattern.
16. The light emitting element is oriented such that the one direction in which the light emitting element extends is aligned with the first direction. The method of claim 15 , further comprising rotating the light emitting element so that the light emitting element is oriented in the first direction by the second electromagnetic field.
17. The light emitting devices are spaced apart from each other in the first direction and the second direction, The method of claim 14 , wherein a length of the light emitting element measured in the one direction is longer than a distance between the light emitting elements in the second direction.
18. The method of claim 17 , wherein a distance between the light-emitting elements in the first direction is shorter than a length of a major axis of the light-emitting elements.
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