Gas Supply Equipment

Abstract

We provide a gas supply device that generates a composite gas to purify nucleic acid scattering in the release space (DNA-free), performs disinfection / decontamination exposure to inactivate infectious pathogens, and has a compact mechanism for decomposing and purifying harmful gases after purification, making it suitable for the target scale. The device is equipped with a heating section that heats and vaporizes primary alcohol by electromagnetic induction heating, an air supply section that is connected to the downstream side of the heating section through a pipeline and that introduces air, and a heat reaction section that is connected to the downstream side of the air supply section through a pipeline and that oxidizes a mixture of the vaporized primary alcohol and air through contact with a porous metal catalyst that is heated by electromagnetic induction heating to generate a composite gas such as aldehyde.The device is further equipped with a vacuum ultraviolet lamp that emits ozone and oxygen radicals such as OH radicals, an ozone decomposition catalyst, and a decomposition catalyst such as platinum, and is structured to decompose and purify disinfection / decontamination exposure gases, harmful volatile organics, and odors.

Description

[Technical field]

[0001] The present invention relates to a gas supply device, and in particular to a gas supply device that generates a complex gas containing aldehyde (hereinafter referred to as decontamination gas) and performs decontamination and purification such as nucleic acid decomposition, sterilization, disinfection, and elimination of bacteria in the space into which the gas is released. [Background technology]

[0002] When reusing safety cabinets, cell culture equipment, and animal husbandry equipment installed in biohazard facilities, research facilities (including BSL-3 and BSL-4 facilities), laboratories, etc., sterilization level disinfection is required to prevent infection and purification of contamination caused by nucleic acid scattering. The main purpose is to inactivate pathogens such as bacteria and viruses, decompose DNA and RNA, and destroy pathogen eggs.

[0003] In addition to ethylene oxide gas and ozone, which are commonly used as gases for sterilizing medical instruments, etc., a sterilization system that uses a composite gas containing formaldehyde and methanol, which is generated by a catalytic reaction from methanol, has a high decontamination ability that breaks down nucleic acids into pieces, has low residual and corrosive properties, and has excellent penetration and diffusibility (Patent Document 1, etc.).

[0004] Here, the formaldehyde generated from methanol has been pointed out as being carcinogenic as well as being bactericidal. In contrast, the carcinogenicity of acetaldehyde generated from ethanol is lower than that of formaldehyde. Therefore, flexible use of ethanol is required depending on the structure of the facility, the target of sterilization and decontamination, and the purpose.

[0005] Furthermore, in addition to the types of gases generated as described above, there is also a high demand for efficient nucleic acid decomposition, sterilization, disinfection, removal of bacteria, and other decontamination in an even smaller sealed environment than a room, such as a safety cabinet or glove box, and there has also been a desire to miniaturize existing equipment such as gas supply devices. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2022-157048 A Summary of the Invention [Problem to be solved by the invention]

[0007] The present invention has been made in consideration of the above points, and provides a gas supply device that performs decontamination such as nucleic acid decomposition, sterilization, disinfection, and bacteria removal in a space by generating and releasing a composite decontamination gas containing aldehyde, and that corresponds to the scale of the target by miniaturizing the mechanism for generating aldehyde gas, or by miniaturizing the mechanism for generating aldehyde gas and the mechanism for decomposing and purifying the released gas. [Means for solving the problem]

[0008] That is, the gas supply device of the embodiment is characterized by comprising a heating unit that heats and vaporizes primary alcohol by electromagnetic induction heating, an air supply unit that is connected to a pipeline downstream of the heating unit and supplies air, and a heating reaction unit that is connected to a pipeline downstream of the air supply unit and heats a gas mixture of the vaporized primary alcohol and the supply air by electromagnetic induction heating, and generates a decontamination gas by an oxidation reaction upon contact with an oxidized porous metal catalyst.

[0009] Furthermore, in the gas supply device, the heating reaction unit may include a metallic catalyst containing unit that contains a metal catalyst, a heating cylinder unit that conducts heat to the catalyst containing unit, a protective unit that covers the periphery of the heating cylinder unit and provides thermal insulation protection, and an induction heating coil unit that is wrapped around the protective unit from around the protective unit.

[0010] Furthermore, in the gas supply device, the thermal reaction unit may include a metallic catalyst containing unit that contains a copper catalyst, a protective unit that covers the catalyst containing unit and provides thermal insulation protection, and an induction heating coil unit that is wrapped around the protective unit from around the protective unit.

[0011] Furthermore, in the gas supply device, the porous metal catalyst may be a porous copper catalyst.

[0012] Furthermore, in the gas supply device, a first gas decomposition unit that decomposes volatile organic compounds may be connected through a pipeline downstream of the thermal reaction unit.

[0013] Furthermore, the gas supply device may be provided with an irradiation unit that irradiates the first gas decomposition unit with vacuum ultraviolet light.

[0014] Furthermore, in the gas supply device, ozone, OH radicals, oxygen radicals, and the like may be generated from the irradiation section of the first gas decomposition section.

[0015] Furthermore, in the gas supply device, a second gas decomposition unit including a catalyst may be connected via a pipeline downstream of the first gas decomposition unit.

[0016] Furthermore, the gas supply device may be provided with a blower between the first gas decomposition section and the second gas decomposition section.

[0017] Furthermore, in the gas supply device, the second gas decomposition section may be provided with a heating section.

[0018] Furthermore, in the gas supply device, gas discharged from the second gas decomposition section may be taken into the first gas decomposition section, and then again passed through the first gas decomposition section and the second gas decomposition section in this order, thereby performing gas circulation. Effect of the Invention

[0019] According to the gas supply device of the present invention, there is provided a heating section which heats and vaporizes primary alcohol by electromagnetic induction heating, an air supply section which is connected to a pipeline downstream of the heating section and which supplies air, and a heating reaction section which is connected to a pipeline downstream of the air supply section and which heats a gas mixture of the vaporized primary alcohol and the supply air by electromagnetic induction heating and oxidizes the gas by contact with a metal catalyst having a porous structure to generate a decontamination gas by an oxidation reaction. Therefore, a composite gas containing aldehyde gas is generated to perform decontamination such as nucleic acid decomposition, sterilization, disinfection and sterilization of the release space, and the gas generating mechanism can be miniaturized to provide a gas supply device that can be adapted to the scale of the object to be decontaminated. [Brief description of the drawings]

[0020] [Figure 1] 1 is an overall side view of a gas supply device according to an embodiment; [Diagram 2] FIG. 2 is a partial cross-sectional schematic view of the vicinity of a heating unit in FIG. [Diagram 3] FIG. 11 is a partial cross-sectional schematic view of the vicinity of a heating unit according to another embodiment. [Figure 4] FIG. 2 is a schematic cross-sectional view of a thermal reaction unit of the first embodiment. [Diagram 5] FIG. 2 is a schematic cross-sectional view of a thermal reaction unit of a second embodiment. [Figure 6] (A) Photograph of the copper catalyst. (B) Photograph of stacked copper catalysts. [Figure 7] FIG. 2 is a schematic diagram of a gas supply device including a first gas decomposition unit. [Figure 8] 1 is a schematic diagram of a gas supply device including a first gas decomposition section and a second gas decomposition section. [Figure 9] FIG. 2 is a side view of an example configuration in which the first gas decomposition section and the second gas decomposition section are integrated together. [Figure 10] FIG. 10 is a perspective view of FIG. [Figure 11] FIG. 2 is a block diagram showing an example of the configuration of a gas supply device. [Figure 12] FIG. 10 is a block diagram showing an example of the configuration of the device in FIG. 9. [Figure 13] FIG. 4 is a schematic diagram illustrating the operation of a first gas decomposition section. [Figure 14]12 is a table showing an operation sequence of the example of the gas supply device of FIG. 11 . [Figure 15] FIG. 12 is a block diagram of a bag-in type gas supply device applied to a sterile isolator constituting a grade A that does not use a solenoid valve in the device configuration example of the gas supply device in FIG. 11. [Figure 16] FIG. 16 is a diagram showing the configuration of actual 3D CAD data for implementing FIG. 15. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] The gas supply device of the embodiment is used for nucleic acid decomposition, purification (realization of so-called DNA-free), sterilization, and decontamination at a sterilization level (hereinafter referred to as decontamination, etc.) in a space having a predetermined size that requires aseptic management such as a room for breeding laboratory animals, a bio-related gene manipulation facility, purification of nucleic acid (DNA-free) for reuse of facilities and equipment (equipment and materials), decontamination of nucleic acid in a sealed environment smaller than a room such as a safety cabinet, a clean bench, a glove box, etc., sterilization when replacing a HEPA filter, etc., and equipment that requires nucleic acid purification. Decontamination in the space is performed by a composite gas containing an aldehyde gas generated by the oxidation of a primary alcohol. In addition, the gas supply device is provided with a decomposition performance of volatile organic compounds (VOCs) such as a composite gas containing the generated aldehyde, and a deodorizing function.

[0022] The primary alcohol used as the raw material is methanol or ethanol. In primary alcohols with a larger molecular weight than methanol or ethanol, the ability to decontaminate the composite gas containing aldehydes generated by the oxidation reaction is lower than that of formaldehyde and acetaldehyde. The raw materials methanol and ethanol may be mixed together or used alone. In the case of formaldehyde generated from methanol, from the viewpoint of carcinogenicity, it is necessary that no people are present during decontamination of safety cabinets, glove boxes, etc., and that decontamination is performed unmanned in facilities and areas such as BSL-3 and BSL-4 where they are installed, and that dedicated equipment is used. In addition, when decontaminating spaces where workers are expected to enter and exit, such as experimental animal breeding rooms and pharmaceutical factories, safety management is ensured to avoid exposure to harmful substances after decontamination by prohibiting people from entering and exiting. In addition, depending on the purpose, it is possible to use decontamination gas containing acetaldehyde derived from ethanol. Of course, these are not used uniformly, and conditions such as the required performance for purification of nucleic acids and decontamination of pathogens, and the volume of the target space are taken into account.

[0023] 1 is an overall side view of a gas supply device 1 of one embodiment. The gas supply device 1 includes, in order from the bottom of the page, a heating section 10 (reference numeral 10A in FIG. 2 and reference numeral 10B in FIG. 3 described later), an air supply section 30, and a thermal reaction section 50. A raw material supply section 2 for a primary alcohol as a raw material is formed at an end of the heating section 10, and a reaction gas release section 3 for releasing a generated reaction gas is formed at an end of the thermal reaction section 50. The path of the primary alcohol in the heating section 10, the air supply section 30, and the thermal reaction section 50 is formed as a main pipe section 5.

[0024] The heating unit 10, the air supply unit 30, and the thermal reaction unit 50 are made of stainless steel for corrosion resistance against the reaction gas, etc. Furthermore, a supply tank (not shown) for supplying primary alcohol to the gas supply device 1, and an air pump (not shown) for supplying air are appropriately provided. In addition, the gas supply device 1 is housed in a housing or the like (not shown).

[0025] The heating unit 10 heats the primary alcohol by electromagnetic induction heating (IH), vaporizes it, expands it, and releases it from the nozzle. The air supply unit 30 is connected to a pipeline downstream of the heating unit 10, and air (oxygen) for oxidizing the primary alcohol is mixed with the vaporized primary alcohol and convects through the pipeline. The heating reaction unit 50 is connected to a pipeline downstream of the air supply unit 30, and a decontamination gas is generated by an oxidation-reduction reaction due to contact between the electromagnetic induction heated metal catalyst and the mixed gas of air and primary alcohol convecting through the pipeline. The control of the heating unit may be stopped after a certain amount of reaction heat is obtained. The system has a feature that the continuous generation of aldehyde gas is maintained only by controlling the mixture concentration of the primary alcohol and air.

[0026] The heating section 10, the air supply section 30, and the thermal reaction section 50 that constitute the gas supply device 1 are each separable, and the flange section 6 of the heating section 10 and the flange section 7 of the air supply section 30 are fastened together with bolts. A sealing gasket 4 is interposed between the flange sections 6 and 7. Furthermore, the flange section 8 of the air supply section 30 and the flange section 9 of the thermal reaction section 50 are fastened together with bolts. A sealing packing (O-ring or gasket) 17 (see FIG. 2) is interposed between the flange sections 8 and 9 for sealing. The connection section with the thermal reaction section 50 may have a heat-insulating structure.

[0027] For the heating unit 10 constituting the gas supply device 1, a partial cross-sectional schematic diagram is specifically referred to in Fig. 2. In Fig. 2, the heating unit 10 will be described as 10A. In Fig. 3, a heating unit having a different form from the heating unit 10A will be described as 10B.

[0028] In the heating section 10A, the primary alcohol supplied from a supply tank (not shown) that supplies the primary alcohol to the gas supply device 1 flows from the raw material supply section 2 into the internal flow path of the heating section main body 11 in the heating section 10A. A steel pipe 13 made of stainless steel such as SUS304 is arranged around the heating section main body 11, and holding flanges 14 are arranged on both ends of the steel pipe 13. An induction heating coil 12 is wound around the steel pipe 13. When the induction heating coil 12 is energized, the steel pipe 13 is heated by an induced current generated in the coil. Thus, the primary alcohol is heated and vaporized while passing through the internal flow path of the heating section main body 11. A scrubbing brush-shaped diffusion member 11k made of a metal such as SUS304 is provided inside the heating section main body 11, which further promotes the vaporization of the primary alcohol when it passes through the heating section main body 11.

[0029] A thermocouple 18 is attached to the internal flow path of the heating unit main body 11 to measure the temperature. An orifice 15 that narrows the flow path is provided in the internal flow path near the flange portion 6 at the end portion of the heating unit 10A, and the flow rate of the primary alcohol that has evaporated (gasified) and expanded is increased. The primary alcohol is sprayed from the orifice 15 by the pressure of the expanded gas. In addition, a diffusion mesh 16 is interposed between the flange portions 8 and 9. The purpose of the diffusion mesh 16 is to diffuse the primary alcohol, whose flow rate has increased after passing through the orifice 15, into the tube.

[0030] In the heating section 10B of FIG. 3, the primary alcohol supplied from a supply tank (not shown) that supplies the primary alcohol to the gas supply device 1 flows from the raw material supply section 2 into the internal flow path of the heating section main body 11 in the heating section 10B. Inside the heating section main body 11, a diffusion member 11k (a bundle-shaped surface area expanding material such as SUS304) is arranged, around which a magnetic steel pipe is arranged, and holding flanges 14 are arranged at both ends of the steel pipe 11p and the heat insulating material 13. An induction heating coil 12 is wound around the heat insulating material 13. When the induction heating coil 12 is energized, the steel pipe 11p between the heating section main body 11 and the heat insulating material 13 is heated by the induced current generated in the coil. Thus, the primary alcohol is heated and vaporized while passing through the internal flow path of the heating section main body 11. An orifice 15 that narrows the flow path is provided in the internal flow path near the flange portion 6 at the end portion of the heating section 10B, and the flow rate of the vaporized and expanded (gasified) primary alcohol is increased. Similarly, the diffusion mesh 16 allows the primary alcohol, which has passed through the orifice 15 and has an increased flow rate, to be diffused into the tube.

[0031] The use of the heating unit 10A in Fig. 2 and the heating unit 10B in Fig. 3 mainly depends on the size of the installation location of the gas supply device 1. When it is not easy to ensure the height of the installation location, the heating unit 10A in Fig. 2 is preferable, and when it is not easy to ensure the width of the installation location, the heating unit 10B in Fig. 3 is preferable. The primary alcohol vaporization performance is the same in either heating unit.

[0032] The air supply unit 30 takes in air (oxygen) from outside the gas supply device 1. The evaporated (gasified) and expanded primary alcohol and the taken-in air are mixed in the pipes inside the air supply unit 30. If the amount of air (oxygen) is sufficient, the efficiency of the oxidation reaction in the thermal reaction unit 50 is improved. The air supply unit 30 is provided in the gas supply device 1 for forced intake.

[0033] The structure of the thermal reaction unit 50 disclosed in FIG. 1 is shown as a schematic cross-sectional view in FIG. 4 and FIG. 5. The thermal reaction unit 50X in FIG. 4 includes, from the center side, a catalyst storage unit 51, a heating cylinder unit 52, a protection unit 53, and an induction heating coil unit 55 at the outermost side. The catalyst storage unit 51 stores a metal catalyst 59, is a cylindrical body made of austenitic stainless steel such as SUS304, and has no magnetism. The catalyst storage unit 51 can be made of copper or aluminum. Since the catalyst storage unit 51 is a metal that has no magnetism, the heating cylinder unit 52 made of a magnetic metal is disposed on the outside of the catalyst storage unit 51. The heating cylinder unit 52 is a cylindrical body made of ferritic stainless steel such as SUS430, and has magnetism. The heating cylinder unit 52 can be a plated iron plate or the like.

[0034] The heating cylinder section 52 generates heat due to an induced current when electricity is applied to the induction heating coil section 55, and the heat is transferred to the metallic catalyst housing section 51 to raise the temperature of the metal catalyst 59 inside the catalyst housing section 51. In order to prevent thermal damage to the induction heating coil section 55 itself due to the heat generated by the heating cylinder section 52, a protective section 53 is provided that covers the periphery of the heating cylinder section 52 to insulate and protect it. The induction heating coil section 55 is then wound around the protective section 53 from the periphery thereof. Therefore, a known insulating material is used for the protective section 53.

[0035] The catalyst housing section 51 houses the metal catalyst 59 and also serves as a reaction site for the oxidation of vaporized primary alcohol, i.e., the generation of a compound gas containing aldehyde gas. Therefore, since it is susceptible to oxidation corrosion, austenitic stainless steel such as SUS304 is preferably used. However, since SUS304 is not magnetic and cannot be induction heated as it is, a heating cylinder section 52 made of magnetic ferritic stainless steel is further provided to enable the heating of the metal catalyst 59.

[0036] The thermal reaction unit 50Y in Fig. 5 comprises, from the center, a catalyst housing unit 51 housing a metal catalyst 59, a protective unit 53, and an induction heating coil unit 55 at the outermost part. The thermal reaction unit 50Y differs from the thermal reaction unit 50X described above in that the catalyst housing unit 51 is formed as a cylindrical body made of ferritic stainless steel and has magnetic properties. This allows induction heating of the catalyst housing unit 51 itself. The functions of the protective unit 53 and the induction heating coil unit 55 are the same as those of the thermal reaction unit 50X described above.

[0037] The deterioration of the metal corrosion performance of the catalyst containing part 51 of the thermal reaction part 50Y can be dealt with by shortening the replacement period of the catalyst containing part 51 or by forming a glass coating such as enamel on the surface of the catalyst containing part 51. In the thermal reaction part 50Y, the heating cylinder part 52 can be omitted, the number of components is reduced, and the device can be further miniaturized.

[0038] By using an induction heating method like the thermal reaction units 50X and 50Y, it becomes easy to control the start and stop of the thermal reaction and the increase and decrease of the heating temperature by turning on and off the current and increasing and decreasing the amount of current when the current is turned on. A control microcomputer (not shown) is mounted in the gas supply device 1, and the amount of primary alcohol supplied, the amount of air supplied, the heating temperature, the operating time, etc. are controlled according to the equipment to be decontaminated and the work to be performed. In the gas supply device 1, the heating units 10 (10A, 10B) and the thermal reaction units 50 (50X, 50Y) can be combined in any suitable way and can be replaced according to the required processing capacity, operating time, etc.

[0039] The metal catalyst 59 filled in the heat reaction section 50 (50X, 50Y) of the gas supply device 1 is preferably a copper catalyst having a porous structure. Of course, metals having catalytic properties such as nickel, manganese, and platinum other than copper can be used as the catalyst. In the embodiment, as shown in the photograph of FIG. 6, a copper catalyst having an amorphous porous structure made of foamed metal is used. The metal catalyst 59 may be a structure in which a redox reaction catalyst is supported on a support material having a ceramic honeycomb or metal honeycomb structure, making it easier to quantify the amount of catalyst and pressure loss. The photograph of FIG. 6(A) shows an enlarged view of the copper catalyst, and FIG. 6(B) shows a stack of multiple copper catalysts. The copper catalyst is a porous structure in which the shells generated by roughly crushing copper spheres are appropriately aggregated to ensure air permeability. By adopting this structure, the surface area of ​​the metal catalyst 59 (copper catalyst) in the catalyst storage section 51 is increased, reducing the pressure loss, and the efficiency of generating reaction gas by oxidation of primary alcohol is improved, making it possible to reduce the size. The copper foam metal of the embodiment can be produced by a known method, and there is no particular limitation.

[0040] In addition, a porous honeycomb structure is used for the metal catalyst. Structures with little pressure loss, such as a bundle of metal tubes, a composite of ceramics with hollows such as through holes carrying a metal that exhibits catalytic activity, such as copper, can also be used.

[0041] The composite gas (reactive decontamination gas) containing aldehyde generated by the reaction with the metal catalyst (copper catalyst) under heating conditions when passing through the thermal reaction section 50 (50X, 50Y) is discharged from the reactive gas discharge section 3 to the outside of the gas supply device 1 (see FIG. 1). After the space decontamination in the facility by the aldehyde gas (mainly acetaldehyde, but also a mixture of formaldehyde) generated and discharged by the gas supply device 1 is performed for a predetermined time, it is necessary to remove the reactive decontamination gas itself remaining in the facility. In other words, by the time the workers in the facility start work, the harmful components of the released reactive decontamination gas containing aldehyde must be reduced to a specified amount or less to protect the workers from gas exposure.

[0042] From this point of view, the gas supply device 1 is further provided with a mechanism for decomposing a composite reactive decontamination gas containing aldehyde (i.e., volatile organic compounds (VOCs) and decomposed gas). Therefore, as shown in the schematic diagram of FIG. 7 (gas decomposition device of the first embodiment), the gas supply device 1 of the embodiment is provided with a first gas decomposition section 60, a decomposition catalyst section 65, and a blower 80 in this order. Also, as shown in the schematic diagram of FIG. 8 (gas decomposition device of the second embodiment), the first gas decomposition section 60, the decomposition catalyst section 65, and the blower 80 are further provided with a second gas decomposition section 70 in this order (the diagram is an example of a pipe connection). The arrangement is such that, from the upstream side as shown in FIG. 7, the first gas decomposition section 60, the decomposition catalyst section 65, and the blower 80 are connected in this order, and also, as shown in FIG. 8, the first gas decomposition section 60, the decomposition catalyst section 65, and the blower 80 are connected in this order to the second gas decomposition section 70. Gas supply device 1, first gas decomposition section 60, and second gas decomposition section 70 have different applications and are therefore separate devices in principle. From the viewpoint of compressing the volume of the device configuration, gas supply device 1, first gas decomposition section 60, and second gas decomposition section 70 may be configured as an integrated unit. First gas decomposition section 60 and second gas decomposition section 70 may be separated from gas supply device 1 and operated independently.

[0043] As shown in the schematic diagram of FIG. 7 (FIG. 8), the first gas decomposition section 60 is connected through a pipeline to the downstream side of the thermal reaction section 50 (50X, 50Y) (downstream side of the reaction gas discharge section 3). The first gas decomposition section 60 is equipped with an irradiation section 61 that irradiates vacuum ultraviolet rays. An excimer lamp 61 is mainly used for the irradiation section 61, and ultraviolet rays in the short wavelength region of 200 nm or less, in this embodiment, a wavelength of 172 nm or the like are irradiated, and volatile organic compounds are decomposed together with ozone by the emitted OH radicals, oxygen radicals, etc., and the decomposition catalyst section 65 located downstream. Of course, other light sources can be used as long as they can irradiate ultraviolet rays in the short wavelength region of 172 nm or the like.

[0044] In addition, ozone, ·OH radicals, and oxygen radicals are generated by the irradiation of ultraviolet rays by the irradiation unit (excimer lamp) 61 from oxygen in the air. The generated ozone also exerts a decontamination effect on viruses and bacteria, and the volatile organic compounds (VOCs) (gases to be decomposed) are mixed and contacted by the ozone, ·OH radicals, oxygen radicals, and an ozone decomposition catalyst (decomposition catalyst unit 65) connected through a pipe downstream, and the volatile organic compounds are decomposed into carbon dioxide and moisture by oxidation accompanying contact with the ozone, ·OH radicals, and oxygen radicals. The generated ozone is decomposed into oxygen. A decomposition catalyst unit 65 is connected through a pipe downstream of the first gas decomposition unit 60, and the gas passing through the first gas decomposition unit 60 flows into the decomposition catalyst unit 65. The decomposition catalyst unit 65 is, for example, a catalyst such as manganese dioxide, and the volatile organic compounds that were not decomposed in the first gas decomposition unit 60 are further decomposed in the decomposition catalyst unit 65. Additionally, ozone generated by irradiation from irradiation unit (excimer lamp) 61 is decomposed into oxygen in decomposition catalyst unit 65. Air that has passed through first gas decomposition unit 60 and decomposition catalyst unit 65 is released from blower 80. Then, the air is taken in again from the first gas decomposition unit 60 side and circulated through first gas decomposition unit 60 and decomposition catalyst unit 65, so that the concentration of volatile organic compounds gradually decreases. Note that first gas decomposition unit 60 and decomposition catalyst unit 65 may be directly connected through a pipeline, or decomposition catalyst unit 65 may be configured to be disposed downstream of first gas decomposition unit 60.

[0045] The gas decomposition apparatus of the first embodiment in FIG. 7 is a combination of a first gas decomposition section 60 and a decomposition catalyst section 65. In the gas decomposition apparatus of the second embodiment, a second gas decomposition section 70 for further decomposing volatile organic compounds is added downstream of the combination of the first gas decomposition section 60 and the decomposition catalyst section 65 and connected through a pipeline. The gas decomposition apparatus of the first embodiment relies solely on the decomposition capacity of the first gas decomposition section 60 and the decomposition catalyst section 65, and is intended for small-scale facilities with a small processing volume, facilities intended for decomposing low-concentration volatile organic compounds, and the like. In contrast, the gas decomposition apparatus of the second embodiment in FIG. 8 further includes a second gas decomposition section 70 to improve the decomposition capacity of volatile organic compounds. Therefore, the gas decomposition apparatus of the second embodiment is intended for large-scale facilities with a large processing volume, facilities intended for decomposing relatively high-concentration volatile organic compounds, and the like.

[0046] The gas decomposition device of the second embodiment further includes a second gas decomposition section 70 from the viewpoint of improving the decomposition ability of volatile organic compounds. The second gas decomposition section 70 includes a catalyst that exhibits decomposition performance of volatile organic compounds. For example, a nickel catalyst or a platinum catalyst is included. In the embodiment, a platinum catalyst 71 is included. In order to efficiently decompose volatile organic compounds such as aldehyde gas by the platinum catalyst 71, the second gas decomposition section 70 includes a heating section that heats the platinum catalyst 71 or the volatile organic compounds (VOCs) (gases to be decomposed). The heating section heats to a temperature that allows the catalyst such as the platinum catalyst 71 to exhibit its catalytic function. In addition, the heating section heats to a temperature required for decomposing the volatile organic compounds (VOCs) (gases to be decomposed). For the heating section, electromagnetic induction heating (IH) using the induction heating coil section 72 described later is preferably adopted from the viewpoint of miniaturization.

[0047] The relationship between platinum catalyst 71 and the heating section is the same as that disclosed and described in detail in Figures 4 and 5. A blower such as a sirocco fan is used as blower 80 and is appropriately connected to a pipeline, and is used to send air to second gas decomposition section 70 and to circulate the air that has passed through second gas decomposition section 70 (platinum catalyst 71 therein) into the equipment.

[0048] By carrying out the air supply and circulation as indicated by the dashed arrows in Figs. 7 and 8 for a predetermined time, the decomposition of volatile organic compounds such as reactive gases in the equipment is promoted, and the purification of the air progresses. In addition, sensors for measuring the concentration of volatile organic compounds and ozone concentration may be provided as appropriate. Furthermore, by monitoring the ozone concentration during the operation of the first gas decomposition unit 60, when the ozone concentration starts to increase, it can be used as a guide for detection that the volatile organic compounds such as reactive gases to be decomposed have almost disappeared. The first gas decomposition unit 60 and the decomposition catalyst unit 65 in Figs. 7 and 8 are not only connected by a pipe, but also by circulating the above-mentioned active oxygen and the like together with the residual gas through a circulation duct or the like (not shown) after being released from the first gas decomposition unit 60 and coming into contact with the residual gas (object to be decontaminated) and being sucked into the decomposition catalyst unit 65.

[0049] In addition, as a second type of gas decomposition device and method of use, when volatile organic compounds (VOCs) such as reactive gases remain in the facility at a high concentration, the decomposition of the volatile organic compounds is accelerated by the second gas decomposition unit 70, and after the concentration is reduced to a certain extent, the decomposition of low-concentration volatile organic compounds is promoted by the combination of the first gas decomposition unit 60 and the decomposition catalyst unit 65. Due to the difference in the action mechanism that contributes to the decomposition of volatile organic compounds, the configuration is such that they are used according to the concentration. The second gas decomposition unit 70 tends to be less effective in the low concentration range. However, by combining the first gas decomposition unit 60 and the decomposition catalyst unit 65, the light irradiation and the remaining low-concentration volatile organic compounds are mixed with ozone, OH radicals, and oxygen radicals, and are decomposed by the decomposition catalyst unit 65. In this way, decomposition processing that depends on the circulation capacity is possible.

[0050] The side view of FIG. 9 and the perspective view of FIG. 10 particularly show the configuration of the first gas decomposition section 60 and the second gas decomposition section 70 of the gas decomposition device of the second embodiment. In this embodiment, the first gas decomposition section 60 to the second gas decomposition section 70 (the first gas decomposition section 60, the decomposition catalyst section 65, the blower 80, and the second gas decomposition section 70) are integrated into one device. An excimer lamp is provided as the irradiation section 61 in the center of the first gas decomposition section 60. A decomposition catalyst section 65 that holds manganese dioxide and the like is provided behind the irradiation section 61 (at the back of the page). The gas to be decomposed flows in the order of the irradiation section 61 and the decomposition catalyst section 65. The blower 80 is connected to the first gas decomposition section 60. A sirocco fan is used for the blower 80. The direction in which the irradiation section 61 is installed may be arbitrary. When installing the irradiation unit 61, the installation direction, effective distance, and light contact time of the irradiation unit 61 are appropriately adjusted.

[0051] Second gas decomposition section 70 is connected downstream of blower 80 (sirocco fan). Second gas decomposition section 70 contains thermally conductive platinum catalyst 71 and further contains a metal to be heated (such as a scrubbing brush made of SUS304 metal), and is provided with induction heating coil section 72 around them. Platinum catalyst 71 (metal to be heated) is heated by the operation of induction heating coil section 72. Thermocouple 73 is provided as appropriate to detect the temperature of second gas decomposition section 70.

[0052] As can be seen from the figure, the integrated first gas decomposition section 60 and second gas decomposition section 70 are assembled with each component being small. Therefore, it is possible to miniaturize the device configuration connected to the gas supply device 1. In addition, the device configuration of the gas supply device 1 itself is small, which is a good example of portability. Therefore, the barrier to introduction into small-scale facilities requiring decontamination, etc. is small. In addition, by preparing multiple units, it is possible to flexibly respond to the size of the facility to be decontaminated.

[0053] The block diagram of Fig. 11 shows an example of the device configuration of the gas supply device disclosed and explained in each of Figs. 1 to 10. In the figure, the "decontamination gas generator" corresponds to the gas supply device 1, the "residual gas decomposer" corresponds to the first gas decomposition section 60, and the "decontamination gas decomposer" corresponds to the second gas decomposition section 70. Also shown are examples of piping connections and arrangements of each element. For reference, a table of the operation sequence for the device configuration example of the gas supply device disclosed in Fig. 11 is attached (see Fig. 14).

[0054] 12 shows an example of the device configuration and the relationship between first gas decomposition section 60 and second gas decomposition section 70. Of course, the detailed structures and arrangements of first gas decomposition section 60 and second gas decomposition section 70 are not limited to those shown in the figure.

[0055] The schematic diagram of Fig. 13 shows a first gas decomposition section 60 and its associated equipment. As described above, the first gas decomposition section 60 is provided with an excimer lamp 61, and is energized (applied) by a control power supply 64. A gas inlet 62 is provided on the upstream side of the first gas decomposition section 60, and a gas outlet 63 is provided on the downstream side. Volatile organic compounds (VOCs) (gases to be decomposed) and the like flow into the first gas decomposition section 60 from the gas inlet 62. When the excimer lamp 61 is energized, ozone, OH radicals, and the like are generated from oxygen in the air, and in addition to the release of ozone, OH radicals, and the like from the gas outlet 63, the decomposition of the gas to be decomposed by the ozone, OH radicals, and the like is promoted.

[0056] In FIG. 13, when the gas to be decomposed is supplied to the first gas decomposition section 60, devices for controlling the flow rate, such as a compressor, a flow rate control valve, and a flow rate meter, are appropriately provided.

[0057] Fig. 15 shows a block diagram of a bag-in type gas supply device applied to a sterile isolator constituting grade A that does not use a solenoid valve in an example of the gas supply device configuration in relation to the gas supply device in Fig. 11. Furthermore, Fig. 16 shows a configuration diagram of actual 3D CAD data that realizes Fig. 15. [Explanation of symbols]

[0058] 1 Gas supply equipment 2 Raw material supply section 3. Reaction gas discharge section 4 Gasket 5 Main pipe section 6,7,8,9 Flange part 10,10A,10B heating section 11 Heating unit body 12 Induction heating coil 13. Insulation 14 Retaining flange 15 Orifice 16 Diffusion Mesh 17 Packing 18 Thermocouple 30 Air supply section 50, 50X, 50Y Heating reaction section 51 Catalyst housing section 52 Heating cylinder part 53 Protection Department 55 Induction heating coil section 59 Copper catalyst 60 First gas cracking section 61 Excimer Lamp 65 Cracking Catalyst Section 70 Second gas cracking section 71 Platinum catalyst 72 Induction heating coil section 73 Thermocouple 80 Blower

Claims

1. A heating unit that heats and vaporizes the primary alcohol by electromagnetic induction heating; an orifice that narrows an internal flow path at a terminal portion of the heating unit and increases a flow rate of the vaporized primary alcohol; an air supply unit that is connected through a pipeline to a downstream side of the heating unit and that supplies air; a heating reaction section that is connected to the downstream side of the air supply section through a pipeline and heats a gas mixture of vaporized primary alcohol and the supplied air by electromagnetic induction heating, and oxidizes the gas by contact with a metal catalyst having an oxidized porous structure to generate a composite reaction gas containing an aldehyde gas by an oxidation-reduction reaction; The thermal reaction section is a catalyst housing portion made of austenitic stainless steel, copper, or aluminum, which houses the metal catalyst; A heating cylinder portion for conducting heat to the catalyst containing portion; A protective part that covers the periphery of the heating cylinder part and provides thermal insulation protection; an induction heating coil portion wound around the protective portion; A gas supply device comprising:

2. A heating unit that heats and vaporizes the primary alcohol by electromagnetic induction heating; an orifice that narrows an internal flow path at a terminal portion of the heating unit and increases a flow rate of the vaporized primary alcohol; an air supply unit that is connected through a pipeline to a downstream side of the heating unit and that supplies air; a heating reaction section that is connected to the downstream side of the air supply section through a pipeline and heats a gas mixture of vaporized primary alcohol and the supplied air by electromagnetic induction heating, and oxidizes the gas by contact with a metal catalyst having an oxidized porous structure to generate a composite reaction gas containing an aldehyde gas by an oxidation-reduction reaction; The thermal reaction section is a catalyst containing portion made of ferritic stainless steel, an iron plate, or a plated iron plate, which contains the metal catalyst; A protective part that covers the catalyst containing part and provides thermal insulation protection; an induction heating coil portion wound around the protective portion; A gas supply device comprising:

3. 3. The gas supply device according to claim 1, wherein the metal catalyst having a porous structure is a copper catalyst having a porous structure.

4. 3. The gas supply device according to claim 1, further comprising a first gas decomposition section that decomposes volatile organic compounds.

5. The gas supply device according to claim 4 , further comprising an irradiation unit that irradiates the first gas decomposition unit with vacuum ultraviolet light.

6. A gas supply device as described in claim 1 or 2, provided with a diffusion mesh that diffuses the primary alcohol, the flow rate of which has increased as it passes through the orifice, into the tube.

7. A gas supply device as described in claim 5, in which ozone, OH radicals, and oxygen radicals are generated and released from the irradiation section.

8. 5. The gas supply device according to claim 4, wherein a second gas decomposition unit including a catalyst is connected downstream of the first gas decomposition unit.

9. The gas supply device according to claim 8 , further comprising a blower provided between the first gas decomposition section and the second gas decomposition section.

10. The gas supply device according to claim 8 , wherein the second gas decomposition section is provided with a heating section.

11. 9. The gas supply device according to claim 8, wherein the gas released from the second gas decomposition section is taken into the first gas decomposition section, and then passes again through the first gas decomposition section and the second gas decomposition section in that order, thereby performing gas circulation.

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