Coriolis flowmeter, diagnostic device

Abstract

To provide a technique for properly diagnosing a Coriolis flowmeter for abnormalities.SOLUTION: A vibration measuring device 15 according to an embodiment includes: sensor tubes 52, 53; vibration pick-ups 55, 56 provided on an upstream side and a downstream side of a part vibrated by a vibrator 54 of the sensor tubes 52, 53, the vibration pick-ups outputting a signal according to relative displacement of the sensor tubes 52, 53; a flow rate operation unit 92 for measuring a mass flow rate of measurement target fluid flowing in the sensor tubes 52, 53 on the basis of signals output from the vibration pick-ups 55, 56 when the vibrator 54 vibrates the pair of sensor tubes 52, 53; and a self-diagnosis unit 97 for diagnosing the vibration measuring device 15 for abnormalities on the basis of the output state of the signals output from the vibration pick-ups 55, 56 when the vibrator 54 vibrates the pair of sensor tubes 52, 53 and the output state of the reference signal.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present disclosure relates to a Coriolis flowmeter and the like.

Background Art

[0002] For example, a Coriolis flowmeter is known that vibrates a pair of sensor tubes in directions approaching and separating from each other by excitation means, detects the relative displacement of the pair of sensor tubes with a vibration sensor, and measures the mass flow rate of the fluid to be measured flowing through the pair of sensor tubes from the relative displacement. (See Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, for example, if an abnormality such as a disconnection occurs in the coil included in the excitation means or the vibration sensor, or if an abnormality such as the detachment of a counterweight attached to the sensor tube occurs to balance the mass of the sensor tube itself, accurate measurement of the mass flow rate becomes impossible. Further, for example, even if it is found that an abnormality as described above has occurred, it is not known where the abnormality has occurred, and there may be a problem that it takes time to identify the abnormal location.

[0005] Therefore, in view of the above problems, an object is to provide a technique capable of appropriately diagnosing an abnormality in a Coriolis flowmeter.

Means for Solving the Problems

[0006] To achieve the above object, in one embodiment of the present disclosure, a pair of sensor tubes, and comprising a first coil and a first magnet, and by energizing the first coil and bringing the first coil and the first magnet close to and away from each other, An exciting unit that vibrates the pair of sensor tubes in a direction of approaching and separating from each other, Are provided on the upstream side and the downstream side of the portion of the pair of sensor tubes that is vibrated by the exciting unit, while also comprising a second coil and a second magnet A vibration sensor that outputs a signal corresponding to the relative displacement of the pair of sensor tubes, as the electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other And, A measurement unit that measures the mass flow rate of the fluid to be measured flowing in the pair of sensor tubes based on the signal output from the vibration sensor when the exciting unit vibrates the pair of sensor tubes, A diagnosis unit that diagnoses an abnormality of the Coriolis flowmeter based on the output state of the signal output from the vibration sensor when the exciting unit vibrates the pair of sensor tubes and the output state serving as a reference for the signal, are provided. occurs The reference output state includes the period of the output waveform in the time series that serves as a reference when either one of the first coil and the second coil is energized with an impulse signal. The diagnostic unit performs the diagnosis by comparing the period of the output waveform in the time series that serves as the reference with the period of the output waveform in the actual time series of the other coil when either one of the coils is energized with the impulse signal. A Coriolis flowmeter is provided. Also, in another embodiment of the present disclosure, a pair of sensor tubes, comprising a first coil and a first magnet, and an excitation unit that vibrates the pair of sensor tubes in a direction of approaching and separating from each other by energizing the first coil and bringing the first coil and the first magnet close to and away from each other, provided on the upstream side and the downstream side of the location vibrated by the excitation unit in the pair of sensor tubes, and comprising a second coil and a second magnet, and a vibration sensor that outputs, as a signal corresponding to the relative displacement of the pair of sensor tubes, the electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other, a measurement unit that measures the mass flow rate of the fluid to be measured flowing in the pair of sensor tubes based on the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes, and a diagnostic unit that performs a diagnosis regarding an abnormality of the Coriolis flowmeter based on the output state of the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes and the output state serving as a reference for the signal. The diagnostic unit energizes either one of the first coil and the second coil included in the target for each of the excitation unit and the vibration sensor, and determines the presence or absence of an abnormality in the excitation unit and the vibration sensor based on the output of the other coil when either one of the coils for each of the excitation unit and the vibration sensor is energized. When there is an abnormality in the excitation unit and the vibration sensor, the diagnostic unit identifies the location of the abnormality from among the excitation unit and the vibration sensor. A Coriolis flowmeter is provided.

[0007] Also, in another embodiment of the present disclosure, Furthermore A pair of sensor tubes, An exciting unit that vibrates the pair of sensor tubes in a direction of approaching and separating from each other, comprising a first coil and a first magnet, and by energizing the first coil to bring the first coil and the first magnet close to and away from each other, Are provided on the upstream side and the downstream side of the portion of the pair of sensor tubes that is vibrated by the exciting unit, A vibration sensor that outputs a signal corresponding to the relative displacement of the pair of sensor tubes, and further comprising a second coil and a second magnet And, as the electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other When the exciting unit vibrates the pair of sensor tubes, When the exciting unit vibrates the pair of sensor tubes, during A Coriolis flowmeter having a measurement unit that measures the mass flow rate of a fluid to be measured flowing in the pair of sensor tubes based on a signal output from the vibration sensor regarding and perform a diagnosis regarding an abnormality of the Coriolis flowmeter based on an output state of a signal output from the vibration sensor when the pair of sensor tubes are vibrated by the excitation unit and an output state serving as a reference for the signal a diagnostic device , the reference output state includes the period of the output waveform in the reference time series when one of the first coil and the second coil is energized with an impulse signal, performing the diagnosis by comparing the period of the output waveform in the reference time series with the period of the output waveform in the actual time series of the other coil when one of the coils is energized with the impulse signal. A diagnostic device is provided. Also, in still another embodiment of the present disclosure, a pair of sensor tubes, comprising a first coil and a first magnet, and by energizing the first coil to bring the first coil and the first magnet close to and away from each other, an excitation unit that vibrates the pair of sensor tubes in a direction of approaching and separating from each other, provided on the upstream side and the downstream side of the portion of the pair of sensor tubes vibrated by the excitation unit, and comprising a second coil and a second magnet, and outputting, as a signal corresponding to the relative displacement of the pair of sensor tubes, the electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other, a vibration sensor, a measuring unit that measures the mass flow rate of the fluid to be measured flowing in the pair of sensor tubes based on the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes, for a Coriolis flowmeter having a diagnostic device that performs a diagnosis regarding an abnormality of the Coriolis flowmeter based on the output state of the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes and the output state serving as a reference for the signal For each of the excitation unit and the vibration sensor, either one of the first coil and the second coil included in the target is energized, and based on the output of the other coil when either one of the coils for each of the excitation unit and the vibration sensor is energized, the presence or absence of an abnormality in the excitation unit and the vibration sensor is determined. When there is an abnormality in the excitation unit and the vibration sensor, the location of the abnormality is specified from among the excitation unit and the vibration sensor. A diagnostic device is provided. [Effect of the Invention]

[0008] According to the above-described embodiment, an abnormality of the Coriolis flowmeter can be appropriately diagnosed. [Brief Description of the Drawings]

[0009]

Figure 1

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Figure 10

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Figure 15

Figure 16

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments will be described with reference to the drawings.

[0011] [Overview of the Gas Supply Device] First, with reference to FIG. 1, an overview of the gas supply device 10 to which the vibration type measuring device 15 according to the present embodiment is applied will be described.

[0012] FIG. 1 is a diagram showing an example of the configuration of the gas supply device 10.

[0013] As shown in FIG. 1, the gas supply device 10 is installed, for example, at a gas supply station or the like that supplies a predetermined gas to the fuel tank 12 of the automobile 11. The predetermined gas is, for example, compressed natural gas (CNG: Compressed Natural Gas) obtained by compressing city gas to a predetermined pressure, high-pressure hydrogen gas, or the like.

[0014] The gas supply device 10 includes a pressure generating unit (not shown) that generates a gas compressed and pressurized to a predetermined pressure, and a dispenser unit 13 for supplying the predetermined gas compressed by the pressure generating unit to the fuel tank 12.

[0015] The dispenser unit 13 includes a gas supply path 14, a vibration type measuring device 15, a control valve 17, a pressure transmitter 18, a filling hose 19, a three-way valve 20, a pressure relief pipe 21, and a gas filling coupling 22.

[0016] The gas supply path 14 supplies the predetermined gas supplied from the pressure generating unit toward the filling hose 19 within the housing of the dispenser unit 13. In the gas supply path 14, a vibration type measuring device 15, a gas supply on-off valve 16, a control valve 17, a pressure transmitter 18, and the like are arranged in order from the upstream side. Further, a filling hose 19 is connected to the downstream end of the gas supply path 14.

[0017] The vibration type measuring device 15 (an example of a Coriolis flow meter) is a mass flow meter that measures the supply amount (mass flow rate) of the gas flowing through the gas supply path 14. Details of the vibration type measuring device 15 will be described later (see FIGS. 2 and 3).

[0018] The gas supply on-off valve 16 is, for example, an electromagnetic valve, and opens and closes the gas supply path 14 under the control of the control device 30.

[0019] The control valve 17 controls the flow rate and pressure of a predetermined gas supplied to the downstream side (the side to be filled) under the control of the control device 30. For example, the control valve 17 adjusts the valve opening degree in response to a control command from the control device 30 to control the gas supply amount supplied to the fuel tank 12.

[0020] The pressure transmitter 18 (pressure transducer) measures the pressure of a predetermined gas on the secondary side (downstream side) controlled by the control valve 17.

[0021] The filling hose 19 is provided so as to extend from the housing of the dispenser unit 13 and communicates with the gas supply path 14 in the dispenser unit 13 as described above.

[0022] The three-way valve 20 is, for example, an electromagnetic drive type driven under the control of the control device 30 and is provided at the downstream end of the filling hose 19. The three-way valve 20 includes a port a to which the filling hose 19 is connected, a port b to which the pressure release pipe 21 is connected, and a port c to which the gas filling coupling 22 is connected. When filling a predetermined gas into the vehicle 11 (fuel tank 12), the three-way valve 20 is switched to an open valve state in which the port a and the port c are communicated. Further, when performing a pressure release operation after completion of filling a predetermined gas into the vehicle 11 (fuel tank 12), the three-way valve 20 is switched so that the port b and the port c are communicated, and the pressure in the gas filling coupling 22 is reduced.

[0023] When the three-way valve 20 is switched to an open valve state in which the port a and the port c are communicated, the pressure transmitter 18 can indirectly measure the residual pressure in the fuel tank 12 by measuring the pressure in the gas supply path 14 communicated with the fuel tank 12.

[0024] The pressure release pipe 21 is used to release the pressure in the gas filling coupling 22 to the outside through the three-way valve 20.

[0025] The gas-filled coupling 22 is connected to a receptacle 40 provided at the tip of a pipeline 41 connected to the fuel tank 12 of the automobile 11, thereby enabling fuel supply from the filling hose 19 through the three-way valve 20 to the fuel tank 12.

[0026] In addition, a check valve 42 for preventing a predetermined gas from flowing back from the fuel tank 12 to the filling hose 19 side is provided in the pipeline 41 of the automobile 11.

[0027] The dispenser unit 13 includes a control device 30, button switches 31, 32, and a flow rate indicator 33.

[0028] The control device 30 performs control related to the gas supply device. The functions of the control device 30 may be realized by any hardware, or any combination of hardware and software, etc. For example, the control device 30 is mainly configured by a computer including a CPU (Central Processing Unit), a memory device such as a RAM (Random Access Memory), an auxiliary storage device such as a ROM (Read Only Memory), and an interface device for input / output with the outside. The control device 30 realizes various functions, for example, by loading various programs installed in the auxiliary storage device into the memory device and executing them on the CPU.

[0029] For example, when the button switch 31 is turned on, the control device 30 performs open control of the gas supply on-off valve 16 and switching control to the open valve state of the three-way valve 20. Then, the control device 30 performs valve opening degree control of the control valve 17 based on the flow rate measurement value measured by the vibratory measurement device 15 and the pressure measurement value measured by the pressure transmitter 18, so as to fill the fuel tank 12 with a predetermined gas adjusted to a predetermined target pressure.

[0030] In addition, the control device 30 calculates the supply amount and supply pressure of a predetermined gas supplied to the fuel tank 12, for example, based on the detection signals of the flow rate and pressure output from the vibratory measurement device 15 and the pressure transmitter 18.

[0031] Further, when the button switch 32 is turned on, for example, the control device 30 stops (ends) the operation of filling a predetermined gas into the automobile 11 (fuel tank 12) in the gas supply device 10.

[0032] The button switches 31 and 32 are used for a user (e.g., an operator, etc.) to start and stop the filling of a predetermined gas from the gas supply device 10 into the automobile 11 (fuel tank 12). A signal corresponding to the on / off state according to the input received from the user by the button switches 31 and 32 is taken into the control device 30.

[0033] The flow rate indicator 33 displays the flow rate of the predetermined gas currently supplied from the gas supply device 10 to the automobile 11 (fuel tank 12) when the filling of the predetermined gas from the gas supply device 10 to the automobile 11 (fuel tank 12) is being performed under the control of the control device 30.

[0034] When filling gas into the fuel tank 12 of the automobile 11, first, the operator removes the gas filling coupling 22 from a latching portion (not shown) of the dispenser unit 13 and couples it to the receptacle 40 of the automobile 11. Then, the operator turns on the button switch 31.

[0035] Thereby, the control device 30 opens the gas supply on-off valve 16 and the control valve 17 to increase the pressure of the gas supply path 14 upstream of the three-way valve 20 to the maximum supply pressure (target pressure). Subsequently, the control device 30 closes the gas supply on-off valve 16 and then switches the three-way valve 20 to the open state (i.e., the state where ports a and c communicate) to supply the predetermined gas filled in the gas supply path 14 downstream of the gas supply on-off valve 16 to the fuel tank 12.

[0036] Note that the pressure of the predetermined gas in the gas supply path 14 is set to a pressure value sufficiently higher than the closing force (the force for biasing the valve body) of the check valve 42 provided upstream of the fuel tank 12. Thereby, the predetermined gas can be supplied to the fuel tank 12 against the closing force of the check valve 42.

[0037] When the pressure in the gas supply path 14 downstream of the gas supply on-off valve 16 reaches equilibrium with the pressure in the fuel tank 12, the control device 30 stores the pressure measurement value measured by the pressure transmitter 18 in the memory. Then, based on the pressure measurement value, the control device 30 calculates the volume and the remaining gas amount of the fuel tank 12, and controls the valve opening degree of the control valve 17 according to a control rule (constant pressure control or constant flow control) corresponding to the volume and the remaining gas amount of the fuel tank 12.

[0038] When gas supply to the fuel tank 12 is performed and the pressure measurement value measured by the pressure transmitter 18 reaches the target pressure, the control device 30 closes the gas supply on-off valve 16 and the control valve 17, and then switches the three-way valve 20 to the depressurized state to reduce the pressure of the gas filling coupling 22. Thereby, the operator can separate the gas filling coupling 22 from the receptacle 40 of the automobile 11 with a light force.

[0039] Thereafter, the operator hooks the gas filling coupling 22 of the dispenser unit 13 to the above-described hooking portion. Then, when the button switch 32 is operated to be on, a series of gas filling operations is completed.

[0040] [Details of the Vibrating-Type Measuring Device] Next, with reference to FIGS. 2 and 3, the details of the vibrating-type measuring device 15 will be described.

[0041] FIGS. 2 and 3 are external views showing an example of the vibrating-type measuring device 15. Specifically, FIG. 2 is a front view showing an example of the vibrating-type measuring device 15, and FIG. 3 is a left side view showing an example of the vibrating-type measuring device 15.

[0042] The vibrating-type measuring device 15 can obtain the density of the fluid to be measured and the mass flow rate using the density. Therefore, the vibrating-type measuring device 15 is used as a vibrating densitometer and a Coriolis mass flow meter. Since the configurations of the vibrating densitometer and the Coriolis mass flow meter are the same, in this example, the case of using it as a Coriolis mass flow meter will be described in detail.

[0043] As shown in FIGS. 3 and 4, the vibration measurement device 15 includes a manifold 51, sensor tubes 52 and 53, a vibrator 54, vibration pickups 55 and 56, a temperature sensor 57, and a control circuit 60.

[0044] The manifold 51 is, for example, a rectangular parallelepiped-shaped metal block elongated in one axial direction (left-right direction). An inlet 51a is provided on the upper surface of one end (right end), and an outlet 51b is provided on the upper surface of the other end (left end). The in-flow side ends 52a and 53a of the measured fluid in the sensor tubes 52 and 53 communicate with the inlet 51a, and the out-flow side ends 52b and 53b of the measured fluid in the sensor tubes 52 and 53 communicate with the outlet 51b. Thus, the measured fluid flowing in from the inlet 51a passes through the sensor tubes 52 and 53 and flows out to the outside from the outlet 51b.

[0045] The sensor tubes 52 and 53 are connected to the upper surface of the manifold 51. The sensor tubes 52 and 53 each have an inverted U shape in which two pipes (ends 52a, 52b, and ends 53a, 53b) extending substantially parallel from the manifold 51 are connected by curved (arc-shaped) pipes (intermediate parts 52c and 53c) at the tips.

[0046] The vibrator 54 (an example of an excitation unit) is attached between the arc-shaped intermediate parts 52c and 53c of the sensor tubes 52 and 53. It includes an excitation coil 54a (an example of a coil) attached to the tip of the sensor tube 52 and a magnet 54b (an example of a magnet) attached to the tip of the sensor tube 53. The vibrator 54 vibrates the sensor tubes 52 and 53 in directions approaching and separating from each other under the control of the control circuit 60.

[0047] Specifically, in the vibrator 54, the magnet 54b attracts or repels against the magnetic field generated when an alternating voltage (AC signal) with positive and negative is applied to the excitation coil 54a, thereby vibrating the intermediate part 52c of the sensor tube 52 in the horizontal direction (front-rear direction). On the other hand, a force of the same magnitude acts on the sensor tube 53 as a reaction force, and the sensor tube 53 vibrates in the opposite direction.

[0048] The vibration pickup 55 (an example of a vibration sensor) measures (detects) the relative vibration state on the inflow side with respect to the sensor tubes 52 and 53. The vibration pickup 55 corresponds to, for example, a displacement detector, and detects the relative displacement on the inflow side of the sensor tubes 52 and 53 as a detection signal. The vibration pickup 55 includes a sensor coil 55a (an example of a coil) attached to the sensor tube 52 and a magnet 55b (an example of a magnet) attached to the sensor tube 53. The detection signal detected by the vibration pickup 55 (sensor coil 55a) is input to the control circuit 60.

[0049] In the vibration pickup 55, the sensor coil 55a and the magnet 55b approach and separate along with the vibration of the inflow-side sensor tubes 52 and 53. Therefore, an electromotive force generated according to the displacement amount (displacement speed) of the sensor coil 55a and the magnet 55b on the inflow side is output as a detection signal from the sensor coil 55a.

[0050] The vibration pickup 56 (an example of a vibration sensor) measures (detects) the vibration state on the outflow side of the sensor tubes 52 and 53. The vibration pickup 56 corresponds to, for example, a displacement detector, and detects the relative displacement on the outflow side of the sensor tubes 52 and 53. The vibration pickup 56 includes a sensor coil 56a attached to the sensor tube 52 and a magnet 56b attached to the sensor tube 53. The detection signal detected by the vibration pickup 56 (sensor coil 56a) is input to the control circuit 60.

[0051] Similar to the vibration pickup 55, in the vibration pickup 56, the sensor coil 56a and the magnet 56b approach and separate along with the vibration of the outflow-side sensor tubes 52 and 53. Therefore, an electromotive force generated according to the displacement amount (displacement speed) of the sensor coil 56a and the magnet 56b on the outflow side is output as a detection signal from the sensor coil 56a.

[0052] As shown in FIG. 3, the vibrator 54, the vibration pickup 55, and the vibration pickup 56 are arranged symmetrically with respect to a vertical line crossing the intermediate position between the sensor tubes 52 and 53 when viewed from the front (front). Further, the vibration pickups 55 and 56 are arranged symmetrically with the vibrator 54 as the center.

[0053] The temperature sensor 57 measures the temperature near the inflow-side ends 52a and 53a of the sensor tubes 52 and 53 or the inlet 51a of the manifold 51.

[0054] Note that the temperature sensor 57 may be omitted.

[0055] The control circuit 60 (an example of a diagnostic device) controls the vibratory measuring device 15. The functions of the control circuit 60 may be realized by any hardware, or any combination of hardware and software, etc. For example, similar to the above-described control device 30, the control circuit 60 is mainly configured by a computer including a memory device such as a CPU and a RAM, an auxiliary storage device such as a ROM, and an interface device for input / output to the outside.

[0056] [An example of the functional configuration of the control circuit] Next, with reference to FIG. 4, an example of the functional configuration of the control circuit 60 of the vibratory measuring device 15 will be described.

[0057] FIG. 4 is a functional block diagram showing an example of the functional configuration of the control circuit 60.

[0058] As shown in FIG. 4, as a hardware configuration, the control circuit 60 includes a barrier circuit 70, a signal processing circuit 80, an arithmetic circuit 90, and a power supply circuit 110.

[0059] The signal processing circuit 80 includes an amplitude detection / excitation detection unit 81, an excitation control unit 82, and a temperature measurement unit 83.

[0060] The arithmetic circuit 90 includes, as functional units, a time difference arithmetic unit 91, a flow rate arithmetic unit 92, an analog output unit 93, a pulse output unit 94, a Young's modulus arithmetic unit 95, a diagnosis mode determination unit 96, a self-diagnosis unit 97, and a memory unit 98. The functions of the time difference arithmetic unit 91, the flow rate arithmetic unit 92, the analog output unit 93, the pulse output unit 94, the Young's modulus arithmetic unit 95, the diagnosis mode determination unit 96, and the self-diagnosis unit 97 are realized, for example, by loading a program installed in an auxiliary storage device into a memory device and executing it on a CPU. Further, the memory unit 98 is realized, for example, by a storage area defined in an auxiliary storage device.

[0061] Note that the function of the memory unit 98 may be realized by an external storage device of the arithmetic circuit 90.

[0062] The power supply circuit 110 controls the voltage obtained from the external power supply 100 and supplies the power supply voltage Vcc to the signal processing circuit 80 and the arithmetic circuit 90. Further, the power supply circuit 110 outputs a reset signal and a reset release signal to the arithmetic circuit 90 at a predetermined timing, thereby causing the arithmetic circuit 90 to perform flow rate arithmetic processing and the like at an appropriate timing.

[0063] The barrier circuit 70 realizes an intrinsically safe explosion-proof structure for various signals between the excitation coil 54a of the vibrator 54, the sensor coils 55a and 56a of the vibration pickups 55 and 56, the temperature sensor 57, and the like. The barrier circuit 70 includes, for example, voltage and current limiting elements such as Zener diodes and resistors.

[0064] The amplitude detection and excitation detection unit 81 detects the amplitudes of the sensor tubes 52 and 53 based on the detection signals (for example, output voltages) taken in from the sensor coils 55a and 56a. Further, the amplitude detection and excitation detection unit 81 detects whether the sensor tubes 52 and 53 have been amplified to the amplitude in the resonance state based on the detection result of the amplitude, or detects an excitation signal for controlling the amplitude in the resonance state according to the amplitude detection result and the like.

[0065] Further, the amplitude detection and excitation detection unit 81 outputs the detected excitation signal to the excitation control unit 82.

[0066] In addition, the amplitude detection and excitation detection unit 81 generates and outputs a control signal for controlling the voltage-current limiting state in the barrier circuit 70 or controlling the power supply from the power supply circuit 110 based on the detection result. Specifically, the amplitude detection and excitation detection unit 81 monitors the vibrations of the sensor tubes 52 and 53 and determines whether the amplitude has been amplified to the resonance state amplitude. As a result, when a sufficient amplitude is obtained, the amplitude detection and excitation detection unit 81 outputs a high-level (H: High) signal, and when a sufficient amplitude is not obtained, it outputs a low-level (L: Low) signal to the power supply circuit 110.

[0067] The excitation control unit 82 generates, for example, a signal for applying an alternating voltage with positive and negative polarities to the excitation coil 54a of the vibrator 54 according to the excitation signal input from the amplitude detection and excitation detection unit 81, and outputs it to the excitation coil 54a via the barrier circuit 70. Thereby, the control circuit 60 can vibrate the sensor tubes 52 and 53 through the vibrator 54.

[0068] The temperature measurement unit 83 measures the temperature from the temperature signal detected by the temperature sensor 57, and outputs the measured temperature data to the arithmetic circuit 90 (Young's modulus arithmetic unit 95).

[0069] In addition, when the temperature sensor 57 is omitted, the temperature measurement unit 83 is omitted.

[0070] The time difference calculation unit 91 measures the time difference between the signals on the inflow side and the outflow side generated by the Coriolis force based on the detection signals of the sensor coils 55a and 56a. The time difference calculation unit 91 may correct the time difference based on the Young's modulus obtained from the Young's modulus calculation unit 95. The time difference calculation unit 91 outputs the obtained time difference information to the flow rate calculation unit 92.

[0071] The flow rate calculation unit 92 (an example of the measurement unit) converts the time difference information input from the time difference calculation unit 91 into a flow rate. Further, the flow rate calculation unit 92 outputs the obtained flow rate information to the analog output unit 93, the diagnosis mode determination unit 96, the self-diagnosis unit 97, and the like. Further, the flow rate calculation unit 92 performs a flow rate calculation process in response to the input of a reset release signal from a power supply circuit 110 described later.

[0072] The analog output unit 93 generates an analog signal 111 corresponding to the instantaneous flow rate input from the flow rate calculation unit 92. Further, the analog output unit 93 outputs the instantaneous flow rate to the pulse output unit 94 and outputs the obtained analog signal as the analog signal 111 via the barrier circuit 70.

[0073] The pulse output unit 94 generates a flow rate pulse corresponding to the integrated flow rate from the instantaneous flow rate input from the analog output unit 93. Further, the pulse output unit 94 outputs the obtained flow rate pulse as a flow rate pulse signal 112 via the barrier circuit 70.

[0074] As described above, the Young's modulus calculation unit 95 calculates the Young's modulus from the temperature measured by the temperature measurement unit 83 in order to correct the time difference in the time difference calculation unit 91. Further, the Young's modulus calculation unit 95 outputs the obtained Young's modulus to the time difference calculation unit 91.

[0075] When the temperature sensor 57 and the temperature measurement unit 83 are omitted, the Young's modulus calculation unit 95 is omitted.

[0076] During flow rate measurement, the oscillator 54 is driven by the control circuit 60, and the intermediate portions 52c, 53c of the sensor tubes 52, 53 are vibrated with a period and amplitude corresponding to the vibration characteristics (natural frequency) of the sensor tubes 52, 53. Then, the sensor tubes 52, 53 have arc-shaped intermediate portions 52c, 53c that vibrate in the proximity direction and the separation direction (the front-rear direction in FIG. 3) with both ends fixed to the manifold 51 as fulcrums.

[0077] At this time, when fluid flows through the vibrating sensor tubes 52 and 53, a Coriolis force of a magnitude corresponding to the flow rate is generated. Therefore, an operation delay occurs between the inflow side and the outflow side of the sensor tube 52, and a phase difference occurs between the sensor signal of the vibration pickup 55 on the inflow side and the sensor signal of the vibration pickup 56 on the outflow side. Since the phase difference between the sensor signal on the inflow side and the sensor signal on the outflow side is proportional to the flow rate, the control circuit 60 (flow rate calculation unit 92) can calculate the flow rate based on this phase difference. That is, when the displacement of the sensor tubes 52 and 53 is detected by the vibration pickups 55 and 56, the phase difference associated with the vibration of the sensor tubes 52 and 53 is converted into a mass flow rate by the control circuit 60.

[0078] The diagnostic mode determination unit 96 (an example of a determination unit) determines whether it is possible to shift to a diagnostic mode for performing self-diagnosis of the vibration type measuring device 15. Specifically, when there is no variation in the mass flow rate of the fluid measured by the flow rate calculation unit 92 that exceeds a predetermined standard, the diagnostic mode determination unit 96 determines that it is possible to shift to the diagnostic mode. The predetermined standard is defined in advance as a very small variation value of the mass flow rate that can be determined that there is no variation in the mass flow rate of the fluid flowing through the sensor tubes 52 and 53. For example, when the fluid to be measured is not flowing through the sensor tubes 52 and 53, the diagnostic mode determination unit 96 determines that it is possible to shift to the diagnostic mode. Specifically, the diagnostic mode determination unit 96 may determine whether or not the fluid to be measured is flowing through the sensor tubes 52 and 53 based on a signal input from the control device 30 (for example, a signal indicating that it is outside the business hours of the gas supply station). Further, for example, when the mass flow rate of the fluid to be measured in the sensor tubes 52 and 53 is in a state of being zero, the diagnostic mode determination unit 96 determines that it is possible to shift to the diagnostic mode. The case where the mass flow rate is zero is a concept that includes not only the case where the measurement result of the mass flow rate is zero, but also the case where it can be determined that there is no flow in the fluid to be measured even if the measurement result of the mass flow rate is not zero, taking into account measurement errors and the like. For example, the diagnostic mode determination unit 96 determines whether or not the mass flow rate of the fluid to be measured in the sensor tubes 52 and 53 is in a state of being zero based on the flow rate information output from the flow rate calculation unit 92. Further, for example, when the state where the mass flow rate of the fluid measured by the flow rate calculation unit 92 is substantially constant continues for a certain period of time or more, the diagnostic mode determination unit 96 determines that it is possible to shift to the diagnostic mode.

[0079] Whether to shift to the diagnostic mode may be determined based on the presence or absence of a predetermined input from the user. That is, the vibration-type measuring device 15 may shift to the diagnostic mode in response to a predetermined input from the user. In this case, for example, in response to a predetermined input received by the input unit of the gas supply device 10 or a terminal device communicably connected to the gas supply device, the arithmetic circuit 90 (diagnostic mode determination unit 96) diagnoses abnormalities of the vibration-type measuring device 15. Also, as will be described later, in the self-diagnostic mode, the oscillator 54 is vibrated at a driving frequency different from the driving frequency during normal mass flow measurement. Therefore, the arithmetic circuit 90 cannot appropriately diagnose abnormalities when there are fluctuations in the mass flow rate of the fluid in the sensor tubes 52 and 53 exceeding a predetermined standard, such as when the fluid to be measured is flowing (a state where there are fluctuations in the mass flow rate of a predetermined value or more).

[0080] When it is determined by the diagnostic mode determination unit 96 that the self-diagnosis unit 97 (an example of an abnormality diagnosis unit) can shift to the diagnostic mode, the self-diagnosis unit 97 shifts the vibration-type measuring device 15 to the diagnostic mode and performs self-diagnosis regarding abnormalities of the vibration-type measuring device 15. Specifically, the self-diagnosis unit 97 vibrates the oscillator 54 (excitation coil 54a) while changing the driving frequency FS in a frequency band (hereinafter, "driving frequency band") including the driving frequency FD of the oscillator 54 (excitation coil 54a) during flow measurement (hereinafter, "measurement frequency") through the amplitude detection / excitation detection unit 81 and the excitation control unit 82. Then, the self-diagnosis unit 97 diagnoses abnormalities of the vibration-type measuring device 15 based on the output states of the detection signals of the sensor coils 55a and 56a obtained at that time. Details will be described later (see FIGS. 5 to 8).

[0081] The storage unit 98 stores various data used when the self-diagnosis unit 97 performs self-diagnosis of the vibration-type measuring device 15.

[0082] Furthermore, the functional configurations related to the diagnostic mode of the vibration measurement device 15, that is, the functions of the diagnostic mode determination unit 96, the self-diagnosis unit 97, and the storage unit 98, may be transferred to an information processing device (an example of a diagnostic device) outside the vibration measurement device 15, such as a control device 30 (an example of a diagnostic device), an external server device, or a terminal device that can communicate with the gas supply device 10.

[0083] [An Example of Control Processing Related to the Diagnostic Mode] Next, with reference to FIGS. 5 to 8, an example of control processing related to the diagnostic mode by the control circuit 60 will be described.

[0084] FIG. 5 is a flowchart schematically showing an example of control processing related to self-diagnosis. FIG. 6 is a diagram showing an example of the waveform (reference waveform) of the amplitude voltage of the detection signals of the vibration pickups 55, 56 (sensor coils 55a, 56a) at the time of normal storage. FIG. 7 is a diagram showing an example of the waveform of the amplitude voltage of the vibration pickups 55, 56 (sensor coils 55a, 56a) at the time of abnormality. FIG. 8 is a diagram showing another example of the waveform of the amplitude voltage of the vibration pickups 55, 56 (sensor coils 55a, 56a) at the time of abnormality.

[0085] The flowchart of FIG. 5 may be repeatedly executed at a predetermined control cycle, for example, in a state where no abnormality alert described later is output.

[0086] As shown in FIG. 5, in step S102, the diagnostic mode determination unit 96 determines whether it is possible to shift to the self-diagnosis mode. If the diagnostic mode determination unit 96 can shift to the self-diagnosis mode, it proceeds to step S104, and if it cannot shift to the self-diagnosis mode, it proceeds to step S122.

[0087] In step S104, the self-diagnosis unit 97 sets initial values for the drive frequency FS of the vibrator 54 (excitation coil 54a) and the counter i. Specifically, the self-diagnosis unit 97 sets the initial value of the drive frequency FS to a value obtained by subtracting a predetermined value α from the measurement frequency FD. Also, the self-diagnosis unit 97 sets the initial value of the counter i to "0" (zero). Hereinafter, the drive frequency FS at the time of the counter i is referred to as "drive frequency FS i ". There may be cases where the value of the counter i when the drive frequency FS is a value obtained by adding the aforementioned predetermined value α to the measurement frequency FD (FS = FD + α) is referred to as a predetermined number m. Also, in this example, the predetermined number m is an even number.

[0088] When the process of step S104 is completed, the arithmetic circuit 90 proceeds to step S106.

[0089] In step S106, the self-diagnosis unit 97 applies a sine-wave voltage of the drive frequency FS to the excitation coil 54a via the amplitude detection / excitation detection unit 81 and the excitation control unit 82.

[0090] When the process of step S106 is completed, the arithmetic circuit 90 proceeds to step S108.

[0091] In step S108, the self-diagnosis unit 97 obtains detection signals corresponding to the amplitude voltages SA i , SB i from the sensor coils 55a, 56a via the barrier circuit 70 and stores them in the storage unit 98.

[0092] When the process of step S108 is completed, the arithmetic circuit 90 proceeds to step S110.

[0093] In step S110, the self-diagnosis unit 97 determines whether the drive frequency FS is a value obtained by adding the predetermined value α to the measurement frequency FD. If this determination condition is not satisfied, the self-diagnosis unit 97 proceeds to step S112, and if the determination condition is satisfied, it proceeds to step S114.

[0094] In step S112, the self-diagnosis unit 97 sets the drive frequency FS to the current drive frequency FS plus a predetermined value β (<α) (FS = FS + β), and increments the counter i by 1 (i = i + 1).

[0095] Incidentally, the predetermined value β may be a fixed value or a variable value. Specifically, the predetermined value β is such that when the counter i is half of a predetermined number m, the drive frequency FS i becomes the measurement frequency FD (FS m / 2 = FD) and is set in advance. Also, the predetermined value β is defined in advance such that the drive frequencies FS i are symmetrically arranged before and after around the drive frequency FS i when the counter i is half of the predetermined number m.

[0096] When the process of step S112 is completed, the arithmetic circuit 90 returns to step S104 and repeats the processes of steps S104 to S110.

[0097] As a result, through the processes of steps S104 to S112, the self-diagnosis unit 97 obtains the amplitude voltages SA i for each drive frequency FS in increments of the predetermined value β within a drive frequency band whose width is twice the predetermined value α centered on the measurement frequency FD i , SB i .

[0098] Incidentally, the range (drive frequency band) of the drive frequency FS for self-diagnosis of the vibratory measurement device 15 may be varied according to the mass flow rate of the fluid in the sensor tubes 52, 53. Specifically, a map, relational expression, table, etc. representing the relationship between the mass flow rate of the fluid in the sensor tubes 52, 53 and the drive frequency band for self-diagnosis may be prepared in advance. Then, based on the mass flow rate of the fluid to be measured measured by the flow rate arithmetic unit 92, the drive frequency band for self-diagnosis may be determined from these maps, etc.

[0099] In step S114, the self-diagnosis unit 97 uses the amplitude voltages SA i , SB iCompare the shape of the waveform in the above-described drive frequency band of [[ID=]], with the shape of the waveform in the above-described drive frequency band of the amplitude voltages SA0 and SB0 of the reference sensor coils 55a and 56a. The waveforms in the above-described drive frequency band of the amplitude voltages SA0 and SB0 of the reference sensor coils 55a and 56a correspond to the waveforms in the drive frequency band of the amplitude voltages of the sensor coils 55a and 56a during normal operation of the vibration measuring device 15 including the vibrator 54 and the vibration pickups 55 and 56. The waveforms in the above-described drive frequency band of the amplitude voltages SA0 and SB0 of the reference sensor coils 55a and 56a are, for example, the waveforms in the above-described drive frequency band of the amplitude voltages of the sensor coils 55a and 56a when the vibration measuring device 15 is new (i.e., at the time of factory shipment).

[0100] For example, as shown in FIG. 6, during normal operation of the vibration measuring device 15, the waveform of the amplitude voltage of the sensor coils 55a and 56a is maximum when the drive frequency FS is equal to the measurement frequency FD, and has a shape that is approximately symmetric before and after with respect to the measurement frequency FD as a reference.

[0101] On the other hand, as shown in FIG. 7, during abnormal operation of the vibration measuring device 15, the waveform of the amplitude voltage of the sensor coils 55a and 56a may deviate significantly from the symmetric shape before and after with respect to the measurement frequency FD as a reference. For example, when an abnormality occurs in the sensor tubes 52 and 53, such as the dropout of the counterweight, the vibration state of the sensor tubes 52 and 53 changes.

[0102] Therefore, when the symmetry (hereinafter simply referred to as "symmetry") before and after with respect to the measurement frequency FD of the waveform in the above-described drive frequency band of the amplitude voltages SA i , SB i is relatively low, the self-diagnosis unit 97 can determine that there is an abnormality in the vibration measuring device 15. Specifically, when the following equation (1) holds, the self-diagnosis unit 97 may determine that the symmetry of the waveform in the above-described drive frequency band of the amplitude voltage SA i is relatively high and the deviation from the normal waveform is relatively small. On the other hand, when the following equation (1) does not hold, the self-diagnosis unit 97 determines that the amplitude voltage SA iThe symmetry of the waveform in the above-described drive frequency band may be determined to be relatively low, and the deviation from the normal waveform may be determined to be relatively large. Similarly, when the following equation (2) holds, the self-diagnosis unit 97 determines that the amplitude voltage SB i has relatively high symmetry of the waveform in the above-described drive frequency band, and the deviation from the normal waveform may be determined to be relatively small. On the other hand, when the following equation (2) does not hold, the self-diagnosis unit 97 determines that the amplitude voltage SB i has relatively low symmetry of the waveform in the above-described drive frequency band, and the deviation from the normal waveform may be determined to be relatively large.

[0103] [Number]

[0104] Here, the predetermined value γ (>0) is a conformity value defined in advance.

[0105] When the process of step S114 is completed, the arithmetic circuit 90 proceeds to step S116.

[0106] In step S116, the self-diagnosis unit 97 determines whether at least one of the waveforms of the acquired amplitude voltages SA i , SB i is relatively greatly deviated from the normal state. That is, the self-diagnosis unit 97 determines whether at least one of the above equations (1) and (2) does not hold. When the waveforms of the acquired amplitude voltages SA i , SB i both have relatively small deviations from the normal waveform, the process proceeds to step S118. On the other hand, when at least one is relatively greatly deviated from the normal state, the self-diagnosis unit 97 determines that there is an abnormality in the vibratory measuring device 15 and proceeds to step S124.

[0107] In step S118, the self-diagnosis unit 97 determines the amplitude voltages SA i , SB iCompare the output value (output magnitude) of the waveform in the above-described drive frequency band with the output value (output magnitude) of the waveform of the reference sensor coils 55a and 56a in the above-described drive frequency band of the amplitude voltages SA0 and SB0.

[0108] For example, as shown in FIG. 8, when the vibration measurement device 15 is abnormal, the waveforms of the amplitude voltages of the sensor coils 55a and 56a may have output values (voltage values) that are somewhat smaller than those in the normal state (the broken line in the figure). For example, when the sensor coils 55a and 56a deteriorate, a change occurs in the output state (voltage amplitude) of the sensor coils 55a and 56a.

[0109] Therefore, when the output value of the waveform of the amplitude voltages SA i , SB i in the above-described drive frequency band is reduced to some extent compared to the output values of the waveforms of the amplitude voltages SA0 and SB0 in the normal state, it can be determined that there is an abnormality in the vibration measurement device 15. Specifically, when the following formula (3) holds, the self-diagnosis unit 97 may determine that the output value of the waveform of the amplitude voltage SA i in the above-described drive frequency band is within a relatively small deviation from the output value of the normal waveform. On the other hand, when the following formula (3) does not hold, the self-diagnosis unit 97 may determine that the output value of the waveform of the amplitude voltage SA i in the above-described drive frequency band is relatively largely deviated from the output value of the normal waveform. Similarly, when the following formula (4) holds, the self-diagnosis unit 97 may determine that the output value of the waveform of the amplitude voltage SB i in the above-described drive frequency band is within a relatively small deviation from the output value of the normal waveform. On the other hand, when the following formula (4) does not hold, the self-diagnosis unit 97 may determine that the output value of the waveform of the amplitude voltage SB i in the above-described drive frequency band is relatively largely deviated from the output value of the normal waveform.

[0110]

Equation

[0111] Here, a predetermined value δ (>0) is a conformity value defined in advance.

[0112] Furthermore, the maximum values SA MAX , SB MAX are the maximum values of the amplitude voltages SA i , SB i respectively. Also, the maximum values SA0 MAX , SB MAX are the maximum values of the amplitude voltages SA0, SB0 respectively. The data of the maximum values SA0 MAX , SB MAX is stored in the storage unit 98, and the self-diagnosis unit 97 can perform the process of step S118 by referring to the data in the storage unit 98. For example, the data of the maximum values SA0 MAX , SB MAX may be acquired at the time of factory shipment, specifically, at the time of inspection before factory shipment, and stored (registered) in the storage unit 98 in advance.

[0113] When the process of step S118 is completed, the arithmetic circuit 90 proceeds to step S120.

[0114] In step S120, the self-diagnosis unit 97 determines whether at least one of the output values of the waveforms of the acquired amplitude voltages SA i , SB i significantly deviates from the output value during normal operation. That is, the self-diagnosis unit 97 determines whether at least one of the above formulas (3) and (4) does not hold. When the output values of the waveforms of the acquired amplitude voltages SA i , SB i both have relatively small deviations from the output value during normal operation, the self-diagnosis unit 97 determines that there is no abnormality in the vibratory measuring device 15 and proceeds to step S122. On the other hand, when at least one significantly deviates from the normal state, the self-diagnosis unit 97 determines that there is an abnormality in the vibratory measuring device 15 and proceeds to step S124.

[0115] Further, when at least one of the formulas (3) and (4) does not hold, the self-diagnosis unit 97 may specify (estimate) the location of the abnormality depending on whether only one of them does not hold or both of them do not hold. For example, when only one of the formulas (3) and (4) does not hold, it may be estimated that there is an abnormality in the vibration pickup 55, 56 (sensor coils 55a, 56a) for which the amplitude voltage corresponding to the non-holding formula (3) or formula (4) is acquired. On the other hand, when both of the formulas (3) and (4) do not hold, it may be estimated that there is an abnormality in the vibrator 54 (excitation coil 54a). This is because it is considered that the possibility of both the vibration pickups 55, 56 (sensor coils 55a, 56a) being abnormal is low.

[0116] In step S122, the arithmetic circuit 90 shifts to a measurement mode for measuring the mass flow rate of the fluid to be measured.

[0117] When the process of step S122 is completed, the process of this flowchart is terminated.

[0118] On the other hand, in step S124, the self-diagnosis unit 97 outputs an alert indicating that there is an abnormality in the vibratory measuring device 15 to the outside (for example, the control device 30). Thereby, when receiving the abnormality alert, the control device 30 can notify the operator, the maintenance person, etc. of the abnormality of the vibratory measuring device 15 through the flow rate indicator 33, the warning lamp, etc.

[0119] When the process of step S124 is completed, the arithmetic circuit 90 terminates the process of this flowchart.

[0120] Furthermore, the self-diagnosis unit 97 may not only determine the presence or absence of an abnormality in the vibration measuring device 15, but also identify (estimate) the location of the abnormality in the vibration measuring device 15 based on whether the condition in step S116 is satisfied or the condition in step S120 is satisfied. Specifically, when the condition in step S116 is satisfied, the abnormal location may be identified as the sensor tubes 52 and 53, and when the condition in step S120 is satisfied, the abnormal location may be identified as at least one of the vibrator 54 and the vibration pickups 55 and 56. In this case, even when the condition in step S116 is satisfied, the flowchart may be modified so that it is further determined whether the condition in step S120 is satisfied. This is because there is a possibility that both an abnormality in the sensor tubes 52 and 53 and an abnormality in the vibrator 54 and the vibration pickups 55 and 56 occur simultaneously. Also, when the condition in step S120 is satisfied, as described above, it may be further identified (estimated) whether there is an abnormality in the vibrator 54 or in either one of the vibration pickups 55 and 56.

[0121] Thus, in this example, the self-diagnosis unit 97 can determine the presence or absence of an abnormality in the vibration measuring device 15 by comparing the acquired amplitude voltages SA i , SB i of the sensor coils 55a and 56a with the amplitude voltages SA0 and SB0 of the sensor coils 55a and 56a at normal times used as references.

[0122] Furthermore, in this example, similar to the case of other examples described later, the presence or absence of an abnormality in the vibration measuring device 15 may be determined based on the reverberation vibration waveform in time series of the sensor coils 55a and 56a when an impulse signal is applied to the excitation coil 54a. Also, in this example, similar to the case of other examples described later, instead of the excitation coil 54a, a predetermined signal may be applied to either one of the sensor coils 55a and 56a, and the presence or absence of an abnormality in the vibration measuring device 15 may be determined based on the output states of the remaining two coils at that time.

[0123] [Another Example of the Functional Configuration of the Control Circuit] Next, with reference to FIG. 9, another example of the functional configuration of the control circuit 60 of the vibration measurement device 15 will be described. Hereinafter, the description will focus on the parts different from the above-described example (FIG. 4).

[0124] FIG. 9 is a functional block diagram showing another example of the functional configuration of the control circuit 60.

[0125] In this example, it is different from the above-described example in that the control circuit 60 is configured to be able to vibrate the sensor tubes 52 and 53 by outputting an excitation signal to either one of the sensor coils 55a and 56a. Further, in this example, it is different from the above-described example in that when the control circuit 60 outputs an excitation signal to either one of the sensor coils 55a and 56a to vibrate the sensor tubes 52 and 53, the output voltage of the excitation coil 54a accompanying the vibration of the sensor tubes 52 and 53 can be detected.

[0126] Similar to the case of the above-described example, the excitation control unit 82 generates a signal for vibrating the sensor tubes 52 and 53 by the vibrator 54 according to the excitation signal input from the amplitude detection / excitation detection unit 81 in the measurement mode, and outputs it to the excitation coil 54a via the barrier circuit 70.

[0127] Also, in the diagnosis mode, the excitation control unit 82 generates a predetermined signal (for example, an impulse signal described later) and outputs it to any one of the excitation coil 54a, the sensor coil 55a, and the sensor coil 56a through the barrier circuit 70.

[0128] When the self-diagnosis unit 97 is determined by the diagnosis mode determination unit 96 to be able to shift to the diagnosis mode as in the above example, the vibration measurement device 15 is shifted to the diagnosis mode to perform self-diagnosis regarding abnormalities of the vibration measurement device 15. Specifically, the self-diagnosis unit 97 applies a predetermined signal (for example, an impulse signal) to each of the excitation coil 54a, the sensor coil 55a, and the sensor coil 56a in an arbitrary order through the excitation control unit 82. Then, the self-diagnosis unit 97 performs diagnosis regarding abnormalities of the vibration measurement device 15 based on the output states of the remaining two coils when a predetermined signal is applied to each of the excitation coil 54a, the sensor coil 55a, and the sensor coil 56a. Details will be described later (see FIGS. 10 to 16).

[0129] [Another Example of Control Processing Regarding Diagnosis Mode] Next, with reference to FIGS. 10 to 16, another example of control processing regarding the diagnosis mode by the control circuit 60 will be described.

[0130] FIG. 10 is a main flowchart schematically showing another example of control processing regarding self-diagnosis. FIGS. 11 and 12 are sub-flowcharts schematically showing another example of control processing regarding self-diagnosis. Specifically, FIGS. 11 and 12 are flowcharts showing specific examples of the output abnormality determination processing described later. FIG. 13 is a diagram showing an example of the output waveform of the output target coil in time series when an impulse signal is applied to the coil to be applied during normal operation of the vibration measurement device 15. FIG. 14 is a diagram showing an example of the waveform of the output (voltage) of the output target coil in time series when an impulse signal is applied to the coil to be applied during an abnormal operation of the vibration measurement device 15. FIG. 15 is a diagram showing another example of the waveform of the output (voltage) of the output target coil in time series when an impulse signal is applied to the coil to be applied during an abnormal operation of the vibration measurement device 15. FIG. 16 is a diagram explaining an example of a method for specifying an abnormal location of the vibration measurement device 15.

[0131] In addition, in FIGS. 10 and 16, the sensor coil 55a and the sensor coil 56a are expressed as "sensor coil A" and "sensor coil B" for convenience.

[0132] The flowchart of FIG. 10 may be repeatedly executed at a predetermined control cycle, for example, in a state where the abnormality alert described later is not output.

[0133] As shown in FIG. 10, since step S202 is the same as the process of step S102 in the flowchart of FIG. 5, a detailed description thereof will be omitted.

[0134] In step S202, when the diagnosis mode determination unit 96 can shift to the self-diagnosis mode, it proceeds to step S204, and when it cannot shift to the self-diagnosis mode, it proceeds to step S220.

[0135] In step S204, the self-diagnosis unit 97 performs a process of determining the presence or absence of an abnormality regarding the output of the sensor coil 55a when a predetermined signal is applied to the excitation coil 54a (hereinafter, "output abnormality determination process").

[0136] When the process of step S204 is completed, the arithmetic circuit 90 proceeds to step S206.

[0137] In step S206, the self-diagnosis unit 97 performs an output abnormality determination process regarding the output of the sensor coil 56a when a predetermined signal is applied to the excitation coil 54a.

[0138] When the process of step S206 is completed, the arithmetic circuit 90 proceeds to step S208.

[0139] In step S208, the self-diagnosis unit 97 performs an output abnormality determination process regarding the output of the excitation coil 54a when a predetermined signal is applied to the sensor coil 55a.

[0140] When the process of step S208 is completed, the arithmetic circuit 90 proceeds to step S210.

[0141] In step S210, the self-diagnosis unit 97 performs an output abnormality determination process regarding the output of the sensor coil 56a when a predetermined signal is applied to the sensor coil 55a.

[0142] When the process of step S210 is completed, the arithmetic circuit 90 proceeds to step S212.

[0143] In step S212, the self-diagnosis unit 97 performs an output abnormality determination process regarding the output of the excitation coil 54a when a predetermined signal is applied to the sensor coil 56a.

[0144] When the process of step S212 is completed, the arithmetic circuit 90 proceeds to step S214.

[0145] In step S214, the self-diagnosis unit 97 performs an output abnormality determination process regarding the output of the sensor coil 55a when a predetermined signal is applied to the sensor coil 56a.

[0146] When the process of step S214 is completed, the arithmetic circuit 90 proceeds to step S216.

[0147] Here, the output abnormality determination process (FIGS. 11 and 12) will be specifically described.

[0148] As shown in FIG. 11, in step S302, the self-diagnosis unit 97 sets the counters i and s to the initial values "0" respectively (k = 0, s = 0).

[0149] When step S302 is completed, the arithmetic circuit 90 proceeds to step S304.

[0150] In step S304, the self-diagnosis unit 97 applies an impulse signal to the coil to be applied. The coil to be applied corresponds to the excitation coil 54a in steps S204 and S206, corresponds to the sensor coil 55a in steps S208 and S210, and corresponds to the sensor coil 56a in steps S212 and S214.

[0151] When the process of step S304 is completed, the arithmetic circuit 90 proceeds to step S306.

[0152] In step S306, the self-diagnosis unit 97 obtains the voltage SV of the coil to be output via the barrier circuit 70 s , and the elapsed time ST from the application of the impulse signal s . The voltage SV of the coil to be output s corresponds to the residual vibration generated in the sensor tubes 52 and 53 due to the application of the impulse signal to the coil to be applied. The coil to be output corresponds to the sensor coil 55a in steps S204 and S214, the sensor coil 56a in steps S206 and S210, and the excitation coil 54a in steps S208 and S212

[0153] When the process of step S306 is completed, the arithmetic circuit 90 proceeds to step S308

[0154] In step S308, the self-diagnosis unit 97 determines whether the counter s is "0". If the counter s is not "0", the self-diagnosis unit 97 proceeds to step S310, and if the counter s is "0", the self-diagnosis unit 97 proceeds to step S312

[0155] In step S310, the self-diagnosis unit 97 determines whether the value obtained by subtracting the previously obtained voltage SV s from the currently obtained voltage SV s-1 is greater than 0. That is, the self-diagnosis unit 97 determines whether the voltage of the coil to be output is increasing. If the voltage of the coil to be output is increasing, the self-diagnosis unit 97 proceeds to step S312, and if it is not increasing, the self-diagnosis unit 97 proceeds to step S316

[0156] In step S312, the self-diagnosis unit 97 updates the positive peak value (hereinafter, "peak voltage") PV k of the voltage of the coil to be output and the elapsed time (hereinafter, "peak time") PT k with the currently obtained voltage SV s and the elapsed time ST s respectively (PV k =SV s , PT k =ST s) As a result, with the voltage of the coil to be output increasing, the peak voltage PV k and the peak time PT k are updated with the latest voltage SV s and the elapsed time ST s , and when the voltage of the coil to be output stops increasing, the update is stopped. Therefore, the self-diagnosis unit 97 can appropriately acquire the peak voltage PV k and the peak time PT k in the reverberation vibration of the sensor tubes 52 and 53.

[0157] When the process of step S312 is completed, the arithmetic circuit 90 proceeds to step S314.

[0158] In step S314, increment the counter s by "1" (s = s + 1).

[0159] When the process of step S314 is completed, the arithmetic circuit 90 returns to step S306.

[0160] On the other hand, in step S316, the self-diagnosis unit 97 increments the counter k by "1" (k = k + 1).

[0161] When the process of step S316 is completed, the arithmetic circuit 90 proceeds to step S318.

[0162] In step S318, the self-diagnosis unit 97 determines whether the counter k is greater than a predetermined value n. The predetermined value n is a positive integer. When the counter k is not greater than the predetermined value n, the self-diagnosis unit 97 proceeds to step S320, and when the counter k is greater than the predetermined value n, it proceeds to step S326 (see FIG. 12). As a result, the self-diagnosis unit 97 can acquire the peak voltage PV j and the peak time PT j from the 0th to the nth and store them in the storage unit 98.

[0163] In step S320, the self-diagnosis unit 97 increments the counter s by "1" (s = s + 1).

[0164] When the process of step S320 is completed, the arithmetic circuit 90 proceeds to step S322.

[0165] In step S322, the self-diagnosis unit 97 obtains the voltage SV of the coil to be output and the elapsed time ST from the application of the impulse signal via the barrier circuit 70. s and the elapsed time ST from the application of the impulse signal s is obtained.

[0166] When the process of step S322 is completed, the arithmetic circuit 90 proceeds to step S324.

[0167] In step S324, the self-diagnosis unit 97 determines whether the value obtained by subtracting the previously obtained voltage SV from the currently obtained voltage SV is greater than 0. That is, the self-diagnosis unit 97 determines whether the voltage of the coil to be output is increasing. If the voltage of the coil to be output is not increasing, the self-diagnosis unit 97 returns to step S320, and if it is increasing, it returns to step S306. Thereby, the self-diagnosis unit 97 can start the process (steps S306 to S314) for obtaining the positive peak value at the timing when the voltage of the coil to be output starts to increase after reaching the negative peak value. s from the previously obtained voltage SV s-1 is determined. That is, the self-diagnosis unit 97 determines whether the voltage of the coil to be output is increasing. If the voltage of the coil to be output is not increasing, the self-diagnosis unit 97 returns to step S320, and if it is increasing, it returns to step S306. Thereby, the self-diagnosis unit 97 can start the process (steps S306 to S314) for obtaining the positive peak value at the timing when the voltage of the coil to be output starts to increase after reaching the negative peak value.

[0168] On the other hand, in step S326, the self-diagnosis unit 97 sets the counter j, the amplitude abnormality counter C1, and the period abnormality counter C2 to the initial values "0", respectively.

[0169] In step S328, the self-diagnosis unit 97 compares the j-th peak voltage PV j obtained in this flowchart with the j-th peak voltage PVc jIt compares with the following. The reference reverberation vibration waveform corresponds to the waveform of the output (voltage) of the coil to be output when an impulse signal is applied to the coil to be applied during normal operation of the vibration type measuring device 15. The reference reverberation vibration waveform is, for example, the waveform of the voltage of the coil to be output when an impulse signal is applied to the coil to be applied at the time of a new product (that is, at the time of factory shipment) of the vibration type measuring device 15.

[0170] For example, as shown in FIG. 13, during normal operation of the vibration type measuring device 15, the amplitude of the voltage of the reverberation vibration of the coil to be output when an impulse signal is applied to the coil to be applied (peak voltage PVc j ) becomes relatively large.

[0171] On the other hand, as shown in FIG. 14, during abnormal operation of the vibration type measuring device 15, the amplitude of the voltage of the reverberation vibration of the coil to be output when an impulse signal is applied to the coil to be applied (peak voltage PV j ) may become relatively small. This is because when deterioration occurs in the coil to be applied or the coil to be output, a change occurs in the output state (voltage amplitude) of the coil to be output.

[0172] Therefore, when the peak voltage PV j acquired (measured) in this flowchart is somewhat lower than the peak voltage PVc j of the reference reverberation vibration waveform, the self-diagnosis unit 97 can determine that there is an abnormality in the vibration type measuring device 15. Specifically, when the following formula (5) holds, the self-diagnosis unit 97 determines that the peak voltage PV j measured in this flowchart is relatively small compared to the peak voltage PVc j of the reference reverberation vibration waveform and may be determined to be normal. On the other hand, when the following formula (5) does not hold, the self-diagnosis unit 97 determines that the peak voltage PV j measured in this flowchart has a relatively large decrease compared to the peak voltage PVc j of the reference reverberation vibration waveform and may be determined to be abnormal.

[0173]

Number

[0174] Here, a predetermined value ε (0 < ε < 1) is a pre-specified conformity value.

[0175] When the process of step S328 is completed, the arithmetic circuit 90 proceeds to step S330.

[0176] In step S330, the self-diagnosis unit 97 determines whether the measured peak voltage PV j is abnormal. Specifically, the self-diagnosis unit 97 determines whether the above formula (5) does not hold. When the above formula (5) does not hold and the peak voltage PV j is abnormal, it proceeds to step S332. When the above formula (5) holds and the peak voltage PV j is normal, it proceeds to step S334.

[0177] In step S332, the self-diagnosis unit 97 increments the amplitude abnormality counter C1 by "1".

[0178] When the process of step S332 is completed, the arithmetic circuit 90 proceeds to step S334.

[0179] In step S334, the j-th peak voltage PV j obtained in this flowchart is compared with the most recent output period of the j-th peak voltage PVc j of the reference reverberation vibration waveform. The most recent output period of the j-th peak voltage PV j corresponds to the elapsed time between the (j - 1)-th peak voltage PV j-1 and the j-th peak voltage PV j and is obtained by subtracting the peak time PT j from the peak time PT j-1 . Similarly, the most recent output period of the j-th peak voltage PVc j corresponds to the elapsed time between the (j - 1)-th peak voltage PVc j-1from the j-th peak voltage PVc j corresponds to the elapsed time until, and is the peak time PTc j from to the peak time PTc j-1 is obtained by subtracting.

[0180] For example, as shown in FIG. 13, when the vibration type measuring device 15 is normal and an impulse signal is applied to the coil to be applied, the output cycle of the residual vibration of the coil to be output is relatively long.

[0181] On the other hand, as shown in FIG. 15, when the vibration type measuring device 15 is abnormal, the output cycle of the residual vibration of the coil to be output when an impulse signal is applied to the coil to be applied may be relatively short. For example, when an abnormality occurs in the sensor tubes 52 and 53, such as the dropout of the counterweight, a change occurs in the vibration state of the sensor tubes 52 and 53.

[0182] Therefore, when the output cycle of the residual vibration waveform acquired (measured) in this flowchart by the self-diagnosis unit 97 is shorter than the output cycle of the residual vibration waveform serving as a reference to some extent, it can be determined that there is an abnormality in the vibration type measuring device 15. Specifically, when the following formula (6) holds, the output cycle of the measured residual vibration waveform is not much shorter than the output cycle of the residual vibration waveform serving as a reference, and it may be determined to be normal. On the other hand, when the following formula (6) does not hold, the output cycle of the measured residual vibration waveform is shorter than the output cycle of the residual vibration waveform serving as a reference to some extent, and it may be determined to be abnormal.

[0183]

Equation

[0184] Here, the predetermined value δ (>0) is a conformity value defined in advance.

[0185] In addition, data regarding the residual vibration waveform serving as a reference, that is, the peak voltage PVc jData related to the peak voltage PVc and the peak time PTc is stored in the storage unit 98. For example, the peak voltage PVc j Data related to the peak voltage PVc and the peak time PTc may be acquired at the time of factory shipment, specifically, at the time of inspection during factory shipment, and stored (registered) in advance in the storage unit 98.

[0186] When the process of step S334 is completed, the arithmetic circuit 90 proceeds to step S336.

[0187] In step S336, the self-diagnosis unit 97 determines whether the most recent output cycle of the measured peak voltage PV j is abnormal. Specifically, the self-diagnosis unit 97 determines whether the above-mentioned formula (6) is not satisfied. If the above-mentioned formula (6) is not satisfied and there is an abnormality in the output cycle, the self-diagnosis unit 97 proceeds to step S338. If the above-mentioned formula (6) is satisfied and there is no abnormality in the output cycle, the self-diagnosis unit 97 proceeds to step S340.

[0188] In step S338, the self-diagnosis unit 97 increments the cycle abnormality counter C2 by "1" (C2 = C2 + 1).

[0189] When the process of step S338 is completed, the arithmetic circuit 90 proceeds to step S340.

[0190] In step S340, the self-diagnosis unit 340 determines whether the counter j is a predetermined value n. If the counter j is not the predetermined value n, the self-diagnosis unit 340 proceeds to step S342. If the counter j is the predetermined value n, the self-diagnosis unit 340 proceeds to step S344.

[0191] In step S342, the self-diagnosis unit 97 increments the counter j by "1" (j = j + 1).

[0192] When the process of step S342 is completed, the arithmetic circuit 90 returns to step S328.

[0193] On the other hand, in step S344, the self-diagnosis unit 97 determines whether the amplitude abnormality counter C1 is smaller than a predetermined threshold value C1th and whether the period abnormality counter C2 is smaller than a predetermined threshold value C2th. When the condition is satisfied, the self-diagnosis unit 97 proceeds to step S346; when the condition is not satisfied, the self-diagnosis unit 97 proceeds to step S348. The threshold value C1th is a conformity value defined in advance for determining whether the amplitude of the reverberation vibration waveform measured in this flowchart is abnormal. The threshold value C2th is a conformity value defined in advance for determining whether the period of the reverberation vibration waveform measured in this flowchart is abnormal.

[0194] In step S346, the self-diagnosis unit 97 determines that the reverberation vibration waveform of the coil to be output measured in this flowchart is normal.

[0195] When the process of step S346 is completed, the arithmetic circuit 90 ends the process of this flowchart.

[0196] On the other hand, in step S348, the self-diagnosis unit 97 determines whether the amplitude abnormality counter C1 is greater than or equal to the threshold value C1th and whether the period abnormality counter C2 is greater than or equal to the threshold value C2th. When the condition is satisfied, the self-diagnosis unit 97 proceeds to step S350; when the condition is not satisfied, the self-diagnosis unit 97 proceeds to step S352.

[0197] In step S350, the self-diagnosis unit 97 determines that there are abnormalities in both the amplitude and the period of the reverberation vibration waveform of the coil to be output measured in this flowchart, namely, "amplitude abnormality" and "period abnormality".

[0198] When the process of step S350 is completed, the arithmetic circuit 90 ends the process of this flowchart.

[0199] On the other hand, in step S352, the self-diagnosis unit 97 determines whether the amplitude anomaly counter C1 is equal to or greater than the threshold value C1th. When the amplitude anomaly counter C1 is equal to or greater than the threshold value C1th, the self-diagnosis unit 97 proceeds to step S354. When the amplitude anomaly counter C1 is less than the threshold value C1th, that is, when the period anomaly counter C2 is equal to or greater than the threshold value C2th, the self-diagnosis unit 97 proceeds to step S356.

[0200] In step S354, the self-diagnosis unit 97 determines that there is an "amplitude anomaly" in the amplitude of the reverberation vibration waveform of the coil to be output measured in this flowchart.

[0201] When the process of step S354 is completed, the arithmetic circuit 90 ends the process of this flowchart.

[0202] On the other hand, in step S356, the self-diagnosis unit 97 determines that there is a "period anomaly" in the period of the reverberation vibration waveform of the coil to be output measured in this flowchart.

[0203] When the process of step S356 is completed, the arithmetic circuit 90 ends the process of this flowchart.

[0204] Returning to FIG. 10, in step S216, the self-diagnosis unit 97 determines whether there is an abnormality in the reverberation vibration waveform of the coil to be output in the output abnormality determination process in the previous stage (steps S204, S206, S208, S210, S212, S214). When the self-diagnosis unit 97 determines that there is an abnormality in the reverberation vibration waveform of the coil to be output in the previous output abnormality determination process, the self-diagnosis unit 97 proceeds to step S218. When there is no abnormality, the self-diagnosis unit 97 proceeds to step S220.

[0205] In step S218, the self-diagnosis unit 97 outputs an alert indicating that there is an abnormality in the vibration measuring device 15 to the outside (for example, the control device 30). At this time, the self-diagnosis unit 97 may identify the abnormal location based on the determination results output in each of the previous output abnormality determination processes, and output an alert including information regarding the abnormal location. Thereby, when receiving the abnormality alert, the control device 30 can notify the operator, the maintenance person, etc. of the abnormal location of the vibration measuring device 15 through the flow rate indicator 33, the warning lamp, etc.

[0206] For example, as shown in FIG. 16, when the determination result of the output abnormality determination process in which the excitation coil 54a is included in the application target or the output target indicates "amplitude abnormality" and the other determination results indicate "amplitude normal", the self-diagnosis unit 97 may identify (estimate) the abnormal location as the excitation coil 54a.

[0207] Further, when the determination result of the output abnormality determination process in which the sensor coil 55a is included in the application target or the output target indicates "amplitude abnormality" and the other determination results indicate "amplitude normal", the self-diagnosis unit 97 may identify (estimate) the abnormal location as the sensor coil 55a.

[0208] Further, when the determination result of the output abnormality determination process in which the sensor coil 56a is included in the application target or the output target indicates "amplitude abnormality" and the other determination results indicate "amplitude normal", the self-diagnosis unit 97 may identify (estimate) the abnormal location as the sensor coil 56a.

[0209] Further, when there is a determination result of "amplitude abnormality" in a combination different from the above among all the output abnormality determination processes, the self-diagnosis unit 97 may identify (estimate) that the abnormal location is at least one of the excitation coil 54a, the sensor coils 55a and 56a.

[0210] Further, when the number of processes determined as "period abnormality" among all the output abnormality determination processes is equal to or more than a predetermined number Nth (an integer of 1 or more and 6 or less), the self-diagnosis unit 97 may identify (estimate) that there is an abnormality in the sensor tubes 52 and 53.

[0211] Thus, in this example, the self-diagnosis unit 97 can obtain the outputs of the remaining two coils not only when a voltage is applied to the excitation coil 54a, but also when a voltage is applied to each of the sensor coils 55a and 56a. Then, based on the output states of the remaining two coils when a voltage is applied to each of the excitation coil 54a and the sensor coils 55a and 56a, the self-diagnosis unit 97 can identify not only the presence or absence of an abnormality, but also the location of the abnormality among the excitation coil 54a and the sensor coils 55a and 56a.

[0212] Note that, in this example, similar to the case of the above example, the output abnormality determination process may be performed using the output state of the coil to be output, which is associated with the vibration of the sensor tubes 52 and 53 when a sine wave is applied to the coil to be applied at a predetermined drive frequency band.

[0213] [Operation] Next, the operation of the vibratory measurement device 15 according to the present embodiment will be described.

[0214] The vibratory measurement device 15 resonates each of the sensor tubes 52 and 53 based on the same drive signal, causing a relative displacement due to the inertial force of the fluid. Therefore, for example, when an abnormality such as a disconnection occurs in the excitation coil 54a or the sensor coils 55a and 56a included in the vibrator 54 or the vibration pickups 55 and 56, or when an abnormality such as the dropout of a counterweight occurs in the sensor tubes 52 and 53, if there is a variation in the mass flow rate flowing through the sensor tubes 52 and 53, it may not be possible to determine whether the relative displacement obtained as a measurement result by the drive signal used for measuring the mass flow rate is due to the inertial force of the fluid or due to an abnormality occurring in the vibrator 54, the vibration pickups 55 and 56, or the sensor tubes 52 and 53.

[0215] In addition, if the vibration measurement device 15 is housed inside the housing of the dispenser unit 13, it will be a very time-consuming task to take it out during maintenance. Therefore, the frequency of taking out the vibration measurement device 15 from inside the housing of the dispenser unit 13 for maintenance is relatively low. As a result, if the presence or absence of an abnormality in the vibration measurement device 15 cannot be determined on-board, an abnormality may suddenly occur in the vibration measurement device 15 while the gas supply device 10 is operating, which may have a significant impact on the operation of the gas supply device 10.

[0216] In contrast, in this embodiment, it includes a pair of sensor tubes 52, 53, a vibrator 54, vibration pickups 55, 56, a measurement unit, and a self-diagnosis unit 97. Specifically, the vibrator 54 vibrates the pair of sensor tubes 52, 53 in directions approaching and separating from each other. Also, the vibration pickups 55, 56 are provided on the upstream side and the downstream side of the locations where the pair of sensor tubes 52, 53 are vibrated by the vibrator 54, and output signals corresponding to the relative displacement of the pair of sensor tubes 52, 53. Further, the measurement unit measures the mass flow rate of the fluid to be measured flowing in the pair of sensor tubes 52, 53 based on the detection signals output from the vibration pickups 55, 56 when the vibrator 54 vibrates the pair of sensor tubes 52, 53. And the self-diagnosis unit 97 diagnoses abnormalities related to the Coriolis flowmeter based on the output state of the detection signals output from the vibration pickups 55, 56 when the vibrator 54 vibrates the pair of sensor tubes 52, 53 and the output state serving as a reference for the signals.

[0217] Thereby, the vibration measurement device 15 can appropriately diagnose its own abnormalities. Also, since it can perform on-board diagnosis of abnormalities, it is possible to suppress the occurrence of a situation where an abnormality suddenly occurs in the vibration measurement device 15 while the gas supply device 10 is operating, which may have a significant impact on the operation of the gas supply device 10.

[0218] In addition, in the present embodiment, the vibratory measurement device 15 may include a diagnosis mode determination unit 96. Specifically, the diagnosis mode determination unit 96 may determine whether there is a variation in the mass flow rate of the fluid measured by the flow rate calculation unit 92 that exceeds a predetermined standard. Then, when the self-diagnosis unit 97 determines that there is no variation in the mass flow rate exceeding the predetermined standard by the diagnosis mode determination unit 96, the self-diagnosis unit 97 may perform a diagnosis regarding an abnormality of the vibratory measurement device 15.

[0219] Thereby, the vibratory measurement device 15 can appropriately perform a diagnosis regarding its own abnormality by using a state in which there is almost no variation in the mass flow rate of the fluid in the pair of sensor tubes 52 and 53 (a state in which the mass flow rate is stable, such as when the variation in the mass flow rate is constant).

[0220] In addition, in the present embodiment, the self-diagnosis unit 97 may perform a diagnosis regarding an abnormality of the vibratory measurement device 15 by vibrating the pair of sensor tubes 52 and 53 in a predetermined driving frequency band including a driving frequency different from the driving frequency when the pair of sensor tubes 52 and 53 are vibrated by the vibrator 54 when the mass flow rate of the fluid to be measured is measured by the flow rate calculation unit 92.

[0221] Thereby, the vibratory measurement device 15 can easily determine a change due to an abnormality by using a driving frequency different from that used when measuring the mass flow rate of the fluid to be measured, and as a result, can improve the accuracy of the diagnosis regarding the abnormality.

[0222] Also, in this embodiment, the vibrator 54 and the vibration pickups 55 and 56 may each include a coil and a magnet. Specifically, the vibrator 54 may vibrate the pair of sensor tubes 52 and 53 by energizing its coil (excitation coil 54a) and bringing the coil and the magnet (magnet 54b) close to and away from each other. Further, the vibration pickups 55 and 56 may output, as a detection signal, the electromotive force generated in the coil when the coil (sensor coils 55a and 56a) and the magnet (magnets 55b and 56b) approach and separate from each other. And the self-diagnosis unit 97 may perform diagnosis based on the output state of the detection signal output from the other coil and the reference output state of the detection signal when the pair of sensor tubes 52 and 53 are vibrated by energizing either one of the coils of the vibrator 54 and the vibration pickups 55 and 56.

[0223] Thereby, the vibration measuring device 15 can specifically perform diagnosis regarding its own abnormality.

[0224] Also, in this embodiment, the vibration measuring device 15 may include a storage unit 98. Specifically, the storage unit 98 may store data representing the reference output state of the other coil when either one of the coils of the vibrator 54 and the vibration pickups 55 and 56 is energized. And the self-diagnosis unit 97 may perform diagnosis regarding the abnormality of the vibration measuring device 15 by comparing the above-described reference output state with the actual output state of the other coil.

[0225] Thereby, the vibration measuring device 15 can specifically perform diagnosis regarding its own abnormality.

[0226] Further, in the present embodiment, the reference output state described above may include a reference output waveform when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized in a predetermined drive frequency band. Then, the self-diagnosis unit 97 may diagnose an abnormality of the vibration measurement device 15 by comparing the reference output waveform with the actual output waveform of the other coil when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized in a predetermined drive frequency band.

[0227] Thereby, the vibration measurement device 15 can specifically diagnose its own abnormality by comparing the reference output waveform with the actual output waveform.

[0228] Further, in the present embodiment, the reference output state described above may include a reference output value when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized in a predetermined drive frequency band. Then, the self-diagnosis unit 97 may diagnose its own abnormality by comparing the reference output value with the actual output value when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized in a predetermined drive frequency band.

[0229] Thereby, the vibration measurement device 15 can specifically diagnose its own abnormality by comparing the reference output value with the actual output value.

[0230] Further, in the present embodiment, the reference output state described above may include the amplitude of the output waveform in the time series of the reference when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized with an impulse signal. Then, the self-diagnosis unit 97 may diagnose an abnormality of the vibration measurement device 15 by comparing the amplitude of the output waveform in the time series of the reference with the actual amplitude of the output waveform in the time series of the other coil when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized with an impulse signal.

[0231] As a result, the vibration measurement device 15 can specifically diagnose its own abnormality by comparing the amplitude of the output waveform in the reference time series with the amplitude of the output waveform in the actual time series.

[0232] Also, in the present embodiment, the above-described reference output state may include the period of the output waveform in the reference time series when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized with an impulse signal. Then, the self-diagnosis unit 97 may diagnose the abnormality of the vibration measurement device 15 by comparing the period of the output waveform in the reference time series with the period of the output waveform in the actual time series when either the oscillator 54 or one of the coils of the vibration pickups 55 and 56 is energized with an impulse signal.

[0233] As a result, the vibration measurement device 15 can specifically diagnose its own abnormality by comparing the period of the output waveform in the reference time series with the period of the output waveform in the actual time series.

[0234] Also, in the present embodiment, the self-diagnosis unit 97 energizes the coils of the oscillator 54 and the vibration pickups 55 and 56, and based on the output of the other coil when the coils of the oscillator 54 and the vibration pickups 55 and 56 are energized, determines the presence or absence of abnormality in the oscillator 54 and the vibration pickups 55 and 56, and when there is an abnormality in the oscillator 54 and the vibration pickups 55 and 56, may specify the location of the abnormality among the oscillator 54 and the vibration pickups 55 and 56.

[0235] As a result, when there is an abnormality in the oscillator 54 and the vibration pickups 55 and 56, the vibration measurement device 15 can specify the location of the abnormality among them.

[0236] [Modification / Change] Although the embodiments have been described in detail above, the present disclosure is not limited to such specific embodiments, and various modifications and changes are possible within the scope of the gist described in the claims.

[0237] For example, in the above-described embodiment, a diagnostic method for an abnormality of a Coriolis flowmeter (vibrating measurement device 15) having two sensor tubes 52 and 53 has been described. However, a similar method may be applied to the diagnosis of an abnormality of a Coriolis flowmeter having one or three or more sensor tubes.

Explanation of Signs

[0238] 10 Gas supply device 13 Dispenser unit 14 Gas supply path 15 Vibrating measurement device (Coriolis flowmeter) 16 Gas supply on-off valve 17 Control valve 18 Pressure transmitter 19 Filling hose 20 Three-way valve 21 Depressurization pipeline 22 Gas filling coupling 30 Control device (diagnostic device) 31 Button switch 32 Button switch 33 Flow rate indicator 51 Manifold 51a Inlet 51b Outlet 52 Sensor tube 52a End 52b End 52c Middle part 53 Sensor tube 53a End 53b End 53c Middle part 54 Vibrator (excitation unit) 54a Excitation coil (coil) 54b Magnet (magnet) 55 Vibration pickup (vibration sensor) 55a Sensor coil (coil) 55b Magnet (magnet) 56 Vibration pickup (vibration sensor) 56a Sensor coil (coil) 56b Magnet 57 Temperature Sensor 60 Control Circuit (Diagnostic Device) 70 Barrier Circuit 80 Signal Processing Circuit 81 Amplitude Detection and Excitation Detection Unit 82 Excitation Control Unit 83 Temperature Measurement Unit 90 Arithmetic Circuit 91 Time Difference Arithmetic Unit 92 Flow Rate Arithmetic Unit (Measurement Unit) 93 Analog Output Unit 94 Pulse Output Unit 95 Young's Modulus Arithmetic Unit 96 Diagnostic Mode Determination Unit (Determination Unit) 97 Self-Diagnosis Unit (Diagnostic Unit) 98 Memory Unit

Claims

1. A pair of sensor tubes, including a first coil and a first magnet, and by energizing the first coil and bringing the first coil and the first magnet close to and away from each other, an excitation unit that vibrates the pair of sensor tubes in a direction of approaching and separating from each other, provided on the upstream side and the downstream side of the portion of the pair of sensor tubes that is vibrated by the excitation unit, and including a second coil and a second magnet, and as a signal corresponding to the relative displacement of the pair of sensor tubes, an electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other is output as a vibration sensor, a measurement unit that measures the mass flow rate of the fluid to be measured flowing in the pair of sensor tubes based on the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes, a diagnosis unit that diagnoses an abnormality of the Coriolis flowmeter based on the output state of the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes and the output state serving as a reference for the signal, The output state serving as the reference includes the period of the output waveform in the time series serving as the reference when either one of the first coil and the second coil is energized with an impulse signal, The diagnosis unit performs the diagnosis by comparing the period of the output waveform in the time series serving as the reference with the period of the output waveform in the actual time series of the other coil when either one of the coils is energized with the impulse signal. A Coriolis flowmeter.

2. A pair of sensor tubes, including a first coil and a first magnet, and by energizing the first coil and bringing the first coil and the first magnet close to and away from each other, an excitation unit that vibrates the pair of sensor tubes in a direction of approaching and separating from each other, Provided on the upstream side and the downstream side of the portion excited by the excitation unit in the pair of sensor tubes, including a second coil and a second magnet, as a signal corresponding to the relative displacement of the pair of sensor tubes, a vibration sensor that outputs an electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other, A measurement unit that measures the mass flow rate of the fluid to be measured flowing in the pair of sensor tubes based on the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes; A diagnosis unit that diagnoses abnormalities related to the Coriolis flowmeter based on the output state of the signal output from the vibration sensor when the excitation unit vibrates the pair of sensor tubes and the output state serving as a reference for the signal. For each of the excitation unit and the vibration sensor, the diagnosis unit energizes either one of the first coil and the second coil included in the target, and based on the output of the other coil when either one of the coils of each of the excitation unit and the vibration sensor is energized, determines the presence or absence of abnormalities in the excitation unit and the vibration sensor, and when there are abnormalities in the excitation unit and the vibration sensor, identifies the location of the abnormality among the excitation unit and the vibration sensor. Coriolis flowmeter.

3. A pair of sensor tubes; An excitation unit including a first coil and a first magnet, which vibrates the pair of sensor tubes in a direction of approaching and separating from each other by energizing the first coil and causing the first coil and the first magnet to approach and separate from each other; Provided on the upstream side and the downstream side of the portion excited by the excitation unit in the pair of sensor tubes, including a second coil and a second magnet, as a signal corresponding to the relative displacement of the pair of sensor tubes, a vibration sensor that outputs an electromotive force generated in the second coil when the second coil and the second magnet approach and separate from each other, A Coriolis flowmeter having a measurement unit that measures the mass flow rate of a fluid to be measured flowing in the pair of sensor tubes based on a signal output from the vibration sensor when the pair of sensor tubes are vibrated by the excitation unit. A diagnostic device that diagnoses an abnormality of the Coriolis flowmeter based on an output state of a signal output from the vibration sensor when the pair of sensor tubes are vibrated by the excitation unit and an output state serving as a reference for the signal. The reference output state includes a period of an output waveform in a reference time series when either one of the first coil and the second coil is energized with an impulse signal. The diagnosis is performed by comparing the period of the output waveform in the reference time series serving as the reference with the period of the output waveform in the actual time series of the other coil when either one of the coils is energized with the impulse signal. Diagnostic device.

4. A pair of sensor tubes, An excitation unit including a first coil and a first magnet, and vibrating the pair of sensor tubes in a direction of approaching and separating from each other by energizing the first coil and bringing the first coil and the first magnet close to and away from each other. A vibration sensor provided on the upstream side and the downstream side of a portion of the pair of sensor tubes excited by the excitation unit, including a second coil and a second magnet, and outputting an electromotive force generated in the second coil by the second coil and the second magnet approaching and separating from each other as a signal corresponding to the relative displacement of the pair of sensor tubes. A Coriolis flowmeter having a measurement unit that measures the mass flow rate of a fluid to be measured flowing in the pair of sensor tubes based on a signal output from the vibration sensor when the pair of sensor tubes are vibrated by the excitation unit. A diagnostic device that diagnoses an abnormality of the Coriolis flowmeter based on an output state of a signal output from the vibration sensor when the pair of sensor tubes are vibrated by the excitation unit and an output state serving as a reference for the signal. For each of the excitation unit and the vibration sensor, either one of the first coil and the second coil included in the target is energized, and based on the output of the other coil when either one of the coils for each of the excitation unit and the vibration sensor is energized, the presence or absence of an abnormality in the excitation unit and the vibration sensor is determined. When there is an abnormality in the excitation unit and the vibration sensor, the location of the abnormality is specified from among the excitation unit and the vibration sensor. Diagnostic device.

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