X-ray diffraction measurement robot

Abstract

To measure a measurement object without causing interference with it.SOLUTION: Provided is an X-ray diffraction measurement device 10 being long in one direction, for emitting an X-ray toward a measurement object. The X-ray diffraction measurement device comprises: detection sensors 40 juxtaposed in a longitudinal direction of the X-ray diffraction measurement device 10 at the bottom of the X-ray diffraction measurement device 10, and detecting an X-ray diffracted by the measurement object; and rotation means 16 for rotationally moving the X-ray diffraction measurement device 10 around the longitudinal direction of the X-ray diffraction measurement device 10 as an axis of rotation so that the X-ray diffraction measurement device 10 is inclined in a lateral direction.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention 、X relates to a line diffraction measurement robot.

Background Art

[0002] Conventionally, an X-ray diffraction measurement apparatus has been known that irradiates an object to be measured with X-rays from an X-ray emitter and measures the residual stress or the like of the object to be measured based on the light reception signal of a detection sensor that receives the X-rays diffracted by the object to be measured.

[0003] Regarding this, Patent Document 1 discloses that the rotation axis when changing the tilt angle of an X-ray diffraction measurement apparatus formed in a substantially rectangular parallelepiped shape is in the short side direction of the X-ray diffraction measurement apparatus (the direction perpendicular to the paper surface of FIGS. 1 and 2 in Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the technique described in Patent Document 1, since the X-ray diffraction measurement apparatus is tilted in the longitudinal direction, depending on the shape of the object to be measured, the X-ray diffraction measurement apparatus may interfere with the object to be measured, and it may not be possible to measure the object to be measured.

[0006] FIG. 1 is a schematic view showing an example of a conventional X-ray diffraction measurement apparatus 10. Here, FIG. 1(A) is a view of the X-ray diffraction measurement apparatus 10 seen from the side of the object to be measured OB. FIG. 1(B) is a view of the X-ray diffraction measurement apparatus 10 seen from the front of the object to be measured OB. As shown in FIGS. 1(A) and 1(B), a conventional X-ray diffraction measurement apparatus 10 is inclined in the longitudinal direction (the direction of the arrow in FIG. 1(B)). That is, the rotation axis of this inclination is the short side direction of the X-ray diffraction measurement apparatus 10. For this reason, the X-ray diffraction measurement apparatus 10 may interfere with the measurement object OB (for example, a bearing), and it may not be possible to measure the measurement object (for example, the inside of the bearing).

[0007] The present invention has been made in view of such problems, and its object is to be able to measure without interfering with the measurement object X that is and to provide an X-ray diffraction measurement robot.

Means for Solving the Problems

[0008] In order to solve the above problems, an X-ray diffraction measurement apparatus according to a first aspect of the present invention is an X-ray diffraction measurement apparatus that emits X-rays toward a measurement object and has a long one direction, and is provided side by side in the longitudinal direction of the X-ray diffraction measurement apparatus on the bottom surface of the X-ray diffraction measurement apparatus, a detection sensor that detects X-rays diffracted by the measurement object, and rotation means for rotating the X-ray diffraction measurement apparatus so that the X-ray diffraction measurement apparatus is inclined in the short side direction with the longitudinal direction of the X-ray diffraction measurement apparatus as the rotation axis. Note that this rotation may include rotational movement.

[0009] Further, in a second aspect of the present invention, the detection sensor is rectangular and is provided such that the long side is along the short side direction of the X-ray diffraction measurement apparatus.

[0010] Further, in a third aspect of the present invention, the detection sensor includes an SOI (Silicon on Insulator) sensor.

[0011] Further, in a fourth aspect of the present invention, a turntable for rotationally moving the position of the detection sensor on the bottom surface is provided.

[0012] Further, in the fifth aspect of the present invention, the X-ray diffraction measurement robot according to the first aspect of the present invention includes an X-ray diffraction measurement device and a measurement means for measuring the tilt angle of the X-ray diffraction measurement device, and the rotation means rotates the turntable according to the tilt angle.

Advantages of the Invention

[0013] According to the present invention, measurement can be performed without interference with the measurement object.

Brief Description of the Drawings

[0014]

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Embodiments for Carrying Out the Invention

[0015] Hereinafter, embodiments of the present invention (hereinafter referred to as "the present embodiment") will be described with reference to the accompanying drawings. To facilitate understanding of the description, the same reference numerals are given to the same components in each drawing as much as possible, and redundant descriptions are omitted.

[0016] <Overall Configuration> FIG. 2 is a schematic diagram showing an example of the X-ray diffraction measurement robot 1 according to the present embodiment. In FIG. 2, the illustration of the X-ray diffraction measurement device 10 is simplified.

[0017] As shown in FIG. 2, the X-ray diffraction measurement robot 1 includes an inclination part 8 (8A, 8B) and an X-ray diffraction measurement device 10.

[0018] The inclination part 8 is a mechanism for inclining the X-ray diffraction measurement device 10. The inclination part 8A is a mechanism for inclining the X-ray diffraction measurement device 10 in the short side direction with the longitudinal direction of the X-ray diffraction measurement device 10 as the rotation axis. Specifically, the inclination part 8A includes a motor having the longitudinal direction of the X-ray diffraction measurement device 10 as the rotation axis. Further, the inclination part 8B is a mechanism for changing the position and posture of the X-ray diffraction measurement device 10. The inclination part 8B can change the position and posture of the X-ray diffraction measurement device 10 by moving the arm of the X-ray diffraction measurement robot 1 and the inclination part 8A when the motor rotates, for example. For example, the inclination part 8B inclines the X-ray diffraction measurement device 10 in the longitudinal direction with the short side direction of the X-ray diffraction measurement device 10 as the rotation axis. Specifically, the inclination part 8B includes a motor having the short side direction of the X-ray diffraction measurement device 10 as the rotation axis.

[0019] The X-ray diffraction measurement device 10 has a function of emitting X-rays toward a measurement object and measuring the diffraction intensity of the X-rays diffracted from the measurement object. This X-ray diffraction measurement device 10 has a substantially rectangular parallelepiped shape with one direction being long. Details of this X-ray diffraction measurement device 10 will be described later.

[0020] <Hardware Configuration> FIG. 3 is a block diagram showing an example of the schematic configuration of the X-ray diffraction measurement robot 1 according to the present embodiment.

[0021] As shown in FIG. 3, the X-ray diffraction measurement robot 1 includes, for example, a control device 2, a storage device 7, an inclination unit 8, and an X-ray diffraction measurement device 10. The control device 2 is mainly configured to include a CPU (Central Processing Unit) 4 and a memory 6.

[0022] The control device 2 functions as various functional means by the CPU 4 executing a predetermined program stored in the memory 6 or the storage device 7 or the like. Details of this functional means will be described later.

[0023] The storage device 7 is composed of a hard disk or the like. The storage device 7 stores various programs, various information, and information on processing results necessary for the execution of processing in the control device 2.

[0024] <Functional Configuration> FIG. 4 is a block diagram showing an example of the functional configuration of the X-ray diffraction measurement robot 1 shown in FIG. 3.

[0025] As shown in FIG. 4, the X-ray diffraction measurement robot 1 includes, as a functional configuration, a storage means 12, a measurement means 14, and a rotation means 16. The storage means 12 is realized by one or a plurality of storage devices 7. The functional means other than the storage means 12 is realized by the control device 2 executing a program stored in the storage device 7 or the like.

[0026] The storage means 12 has a function of storing robot information 12A and the like. The robot information 12A includes various parameters such as a mass point model of the X-ray diffraction measurement robot 1, a center of gravity position, a weight, an interference region (movable region), and current information as various information of the X-ray diffraction measurement robot 1. The current information includes the current amounts of various motors that operate the inclination unit 8.

[0027] The measuring means 14 has a function of measuring the diffraction intensity of the X-rays diffracted from the object to be measured. The measuring means 14 receives, for example, the measurement result of the diffraction intensity from the X-ray diffraction measuring apparatus 10, and analyzes and measures the structure and characteristics of the object to be measured based on the measurement result. In the present embodiment, the measuring means 14 analyzes and measures the residual stress of the object to be measured based on the measurement result. Further, in the present embodiment, the measuring means 14 measures the tilt angle of the X-ray diffraction measuring apparatus 10. The measuring means 14 measures, for example, the tilt angles in the longitudinal direction and the lateral direction of the X-ray diffraction measuring apparatus 10 based on the signal output from the encoder incorporated in the motor that operates the tilt portions 8 (8A, 8B).

[0028] The rotating means 16 has a function of rotating (driving) various mechanisms provided in the X-ray diffraction measuring robot 1. For example, the rotating means 16 controls the motors that operate the tilt portion 8 and the turntable 44 described later. Specifically, the rotating means 16 rotates the X-ray diffraction measuring apparatus 10 so that the X-ray diffraction measuring apparatus 10 tilts in the lateral direction with the longitudinal direction of the X-ray diffraction measuring apparatus 10 as the rotation axis.

[0029] FIG. 5 is a schematic view showing an example of the X-ray diffraction measuring apparatus 10 in the present embodiment. Here, FIG. 5(A) is a view of the X-ray diffraction measuring apparatus 10 seen from the side of the object to be measured OB. Further, FIG. 5(B) is a view of the X-ray diffraction measuring apparatus 10 seen from the front of the object to be measured OB.

[0030] As shown in FIGS. 5(A) and 5(B), the X-ray diffraction measuring apparatus 10 in the present embodiment rotates so as to tilt in the lateral direction (the direction of the arrow in FIG. 5(B)). That is, the rotation axis of this tilt is the longitudinal direction of the X-ray diffraction measuring apparatus 10. For this reason, the X-ray diffraction measuring apparatus 10 can measure the measurement target (for example, the inside of the bearing) without interfering with the object to be measured OB (for example, the bearing).

[0031] <Details of the X-ray diffraction measuring apparatus 10> The X-ray diffraction measurement apparatus 10 according to this embodiment has a function of emitting X-rays toward a measurement object (measurement target) and measuring the diffraction intensity of the X-rays diffracted from the measurement object. Examples of the measurement object include gears, shafts, etc. in addition to bearings. Here, the tilt angle of the X-ray diffraction measurement apparatus 10 is changed by a tilt portion 8 controlled by a rotation means 16. For example, the rotation axis when the tilt portion 8A changes the tilt angle of the X-ray diffraction measurement apparatus 10 is the longitudinal direction of the X-ray diffraction measurement apparatus 10. Therefore, the X-ray diffraction measurement apparatus 10 tilts in the short-side direction. Then, the measurement means 14 analyzes and measures the residual stress of the measurement object based on, for example, the shape data of the diffraction ring measured by the X-ray diffraction measurement apparatus 10 (detection sensor 40) at different tilt angles.

[0032] FIG. 6 is a diagram showing an example of a partial configuration of the X-ray diffraction measurement apparatus 10 according to this embodiment. Further, FIG. 7 is an exploded view of the X-ray diffraction measurement apparatus 10 shown in FIG. 6.

[0033] As shown in FIGS. 6 and 7, the X-ray diffraction measurement apparatus 10 includes, for example, an X-ray tube 20, a collimator 22, a first cooling channel 24 as the other channel, a substrate 26, a cooling member 28, and an insulating member 30.

[0034] The X-ray tube 20 has a function as an X-ray emitter that generates X-rays and emits the generated X-rays toward the measurement object. This X-ray tube 20 is placed on the cooling member 28.

[0035] The collimator 22 is attached to the surface of the cooling member 28 opposite to the insulating member 30, extends toward the substrate 26 side, and has a function of adjusting the X-ray emission range by the X-ray tube 20. The tip of this collimator 22 protrudes downward from the substrate 26.

[0036] In the first cooling channel 24, cooling water sucked up by a pump (not shown) circulates. Thereby, the first cooling channel 24 cools the X-ray tube 20.

[0037] On one side of the substrate 26 (the lower surface in FIGS. 6 and 7), two detection sensors 40 for detecting X-rays diffracted by the object to be measured are provided side by side. As the detection sensor 40, it is preferable that a sensor unit for detecting X-rays diffracted by the object to be measured and a circuit unit for converting the detected X-rays into an electrical signal are integrated. Examples of such a detection sensor 40 include an SOI (Silicon on Insulator) sensor.

[0038] FIG. 8 is a bottom view of the X-ray diffraction measurement apparatus 10 shown in FIG. 6.

[0039] As shown in FIG. 8, the detection sensors 40 are provided side by side in the longitudinal direction (width direction) of the X-ray diffraction measurement apparatus 10 on the bottom surface (one side of the substrate 26) of the X-ray diffraction measurement apparatus 10 which is substantially rectangular. Further, a collimator 22 protrudes between the two detection sensors 40. Also, on one side of the substrate 26, a connector 42 or the like for transmitting the electrical signal converted by the detection sensor 40 to the measuring means 14 is provided. In the present embodiment, the detection sensor 40 detects X-rays diffracted by the object to be measured in a state where the X-ray diffraction measurement apparatus 10 is inclined in the short side direction with the longitudinal direction of the X-ray diffraction measurement apparatus 10 as the rotation axis by the inclined portion 8 (8A). Also, the detection sensor 40 is rectangular and is provided such that the long side is along the short side direction of the X-ray diffraction measurement apparatus 10 (the vertical direction when the X-ray diffraction measurement apparatus 10 is inclined in the short side direction). Note that the two detection sensors 40 are arranged side by side to form a substantially square shape. In this way, by providing the long side of the detection sensor 40 along the short side direction of the X-ray diffraction measurement apparatus 10 and arranging two detection sensors 40 side by side in the longitudinal direction of the X-ray diffraction measurement apparatus 10, when the X-ray diffraction measurement apparatus 10 is inclined in the short side direction to make X-rays incident, it is possible to suppress the variation in the diffraction ring thickness (peak width) in the vertical direction and the decrease in the peak determination accuracy (measurement accuracy).

[0040] Returning to FIGS. 6 and 7, the cooling member 28 is provided on the other surface side (the X-ray tube 20 side) of the substrate 26 opposite to one surface thereof, and a second cooling channel 32 for flowing cooling water as one of the flow channels is formed therein, and has a function of cooling the substrate 26. The cooling water sucked up by a pump (not shown) circulates through the second cooling channel 32. Thereby, the second cooling channel 32 cools the cooling member 28, and thus cools the detection sensor 40 of the substrate 26 via the insulating member 30. In other words, the heat of the detection sensor 40 moves to the cooling member 28 via the substrate 26 and the insulating member 30 to cool the detection sensor 40.

[0041] The insulating member 30 is sandwiched between the substrate 26 and the cooling member 28 and contacts the substrate 26 and the cooling member 28, and has electrical insulation and thermal conductivity. Examples of such an insulating member 30 include a silicon sheet. The insulating member 30 and the substrate 26 are provided with through holes 30A and 26A through which the collimator 22 protrudes.

[0042] FIG. 9 is a partially enlarged bottom view showing a modified example of the X-ray diffractometer 10 in the present embodiment.

[0043] As shown in FIG. 9, the two detection sensors 40 are rotatably provided by a turntable 44 provided on the bottom surface of the X-ray diffractometer 10 (one surface of the substrate 26) about a rotation axis perpendicular to the bottom surface (in the direction of the arrow). That is, the turntable 44 rotationally moves the positions of the two detection sensors 40 provided on the bottom surface side of the X-ray diffractometer 10 on the bottom surface. The amount of rotation of the turntable 44 is controlled by the rotation means 16. For example, the rotation means 16 rotates the turntable 44 to finely adjust the position of the detection sensor 40 to suppress a decrease in the measurement accuracy of the X-rays diffracted by the measurement object. The turntable 44 is provided with a hole for the collimator 22 to protrude between the two detection sensors 40. Here, the rotation means 16 rotates the turntable 44 and rotationally moves the position of the detection sensor 40 according to the inclination angle of the X-ray diffractometer 10 measured by the measurement means 14. For example, when the X-ray diffractometer 10 is inclined in the longitudinal direction with the short side direction of the X-ray diffractometer 10 as the rotation axis, the rotation means 16 rotates the turntable 44 so that the positions of the two detection sensors 40 are aligned in the short side direction of the X-ray diffractometer 10. That is, the rotation means 16 rotationally moves the long side of the detection sensor 40 so that it follows the longitudinal direction (the vertical direction of the inclination) of the X-ray diffractometer 10. Further, for example, when the X-ray diffractometer 10 is inclined in the short side direction with the longitudinal direction of the X-ray diffractometer 10 as the rotation axis, the rotation means 16 rotates the turntable 44 so that the positions of the two detection sensors 40 are aligned in the longitudinal direction of the X-ray diffractometer 10. That is, the rotation means 16 rotationally moves the long side of the detection sensor 40 so that it follows the short side direction (the vertical direction of the inclination) of the X-ray diffractometer 10. Thereby, it is possible to suppress the diffraction ring thickness (peak width) from varying in the vertical direction and the peak determination accuracy (measurement accuracy) from decreasing.

[0044] <Effect> As described above, in the present embodiment, the X-ray diffractometer 10 that emits X-rays toward the measurement object and has a long one direction is provided with detection sensors 40 arranged side by side in the longitudinal direction on the bottom surface of the X-ray diffractometer 10 to detect the X-rays diffracted by the measurement object, and rotation means 16 that rotates the X-ray diffractometer 10 so that the X-ray diffractometer 10 is inclined in the short side direction with the longitudinal direction of the X-ray diffractometer 10 as the rotation axis. Note that this rotation may include rotational movement.

[0045] According to this configuration, while rotating the X-ray diffractometer 10 so that the X-ray diffractometer 10 is inclined in the short side direction with the longitudinal direction of the X-ray diffractometer 10 as the rotation axis, it is possible to detect the X-rays diffracted by the measurement object, so that the measurement of the measurement object can be performed without the X-ray diffractometer 10 interfering with the measurement object. Further, since the detection sensors 40 are arranged side by side in the longitudinal direction on the bottom surface of the X-ray diffractometer 10, it is possible to suppress a decrease in measurement accuracy.

[0046] In addition, in this embodiment, the detection sensor 40 is rectangular and is provided such that its long side extends along the short side direction of the X-ray diffractometer 10.

[0047] According to this configuration, since the long side of the detection sensor 40 is provided along the short side direction of the X-ray diffractometer 10 (the vertical direction when the X-ray diffractometer 10 is inclined in the short side direction), it is possible to suppress a decrease in measurement accuracy.

[0048] In addition, in this embodiment, the detection sensor 40 includes an SOI (Silicon on Insulator) sensor.

[0049] According to this configuration, it is possible to integrate a sensor unit that detects X-rays diffracted by the measurement object and a circuit unit that converts the detected X-rays into an electrical signal, and perform small and highly accurate detection.

[0050] In addition, in this embodiment, a turntable 44 for rotationally moving the position of the detection sensor 40 on the bottom surface is provided.

[0051] According to this configuration, since the position of the detection sensor 40 can be rotationally moved on the bottom surface of the X-ray diffractometer 10, it is possible to suppress a decrease in measurement accuracy.

[0052] In addition, in this embodiment, the X-ray diffraction measurement robot 1 includes an X-ray diffractometer 10 and a measuring means 14 for measuring the tilt angle of the X-ray diffractometer 10, and the rotating means 16 rotates the turntable 44 according to the tilt angle.

[0053] According to this configuration, since the position of the detection sensor 40 can be rotationally moved according to the tilt angle of the X-ray diffractometer 10, it is possible to suppress a decrease in measurement accuracy while reducing the user's effort.

[0054] <Modification example> Note that the present invention is not limited to the above-described embodiments. That is, modifications appropriately made by those skilled in the art to the above-described embodiments are also included in the scope of the present invention as long as they have the features of the present invention. Further, each element included in the above-described embodiments and the modification examples described later can be combined as long as it is technically possible, and combinations thereof are also included in the scope of the present invention as long as they include the features of the present invention.

[0055] For example, in the above-described embodiment, the case where two detection sensors 40 are arranged side by side on the bottom surface of the X-ray diffractometer 10 has been described, but three or more detection sensors 40 may be arranged. For example, four detection sensors 40 may be arranged side by side on the bottom surface of the X-ray diffractometer 10 in the vertical, horizontal, upper, lower, left, and right directions and arranged in a substantially square shape.

[0056] Further, in the above-described embodiment, the case where the turntable 44 rotates by the rotating means 16 has been described, but it may be configured to be rotatable and stationary manually by the user. Thereby, the position of the detection sensor 40 can be finely adjusted.

[0057] Further, in the above-described embodiment, the case where the rotating means 16 rotates the turntable 44 according to the inclination angle of the X-ray diffractometer 10 measured by the measuring means 14 has been described, but the turntable 44 may be rotated according to the positional relationship with the measurement object. For example, the rotating means 16 may rotate the turntable 44 according to the distance and angle between the X-ray diffractometer 10 and the measurement object.

Explanation of Reference Numerals

[0058] 1... X-ray diffraction measurement robot, 8(8A, 8B)... inclination part, 10... X-ray diffractometer, 14... measuring means, 16... rotating means, 40... detection sensor, 44... turntable

Claims

1. An X-ray diffraction measurement robot having an X-ray diffraction measurement device that emits X-rays toward an object to be measured and has a long one-way direction, A detection sensor provided on the bottom surface of the X-ray diffraction measurement device for detecting X-rays diffracted by the object to be measured, A motor preset with the longitudinal direction of the X-ray diffraction measurement device as the rotation axis, Rotating means for rotating the X-ray diffraction measurement device by controlling the motor so that the X-ray diffraction measurement device inclines in the short side direction, An X-ray diffraction measurement robot comprising the above.

2. The detection sensor is provided side by side in the longitudinal direction of the X-ray diffraction measurement device on the bottom surface, is rectangular, and is provided such that the long side is along the short side direction of the X-ray diffraction measurement device. The X-ray diffraction measurement robot according to claim 1.

3. The detection sensor includes an SOI (Silicon on Insulator) sensor. The X-ray diffraction measurement robot according to claim 2.

4. A turntable for rotating and moving the position of the detection sensor on the bottom surface. The X-ray diffraction measurement robot according to claim 1, comprising the above.

5. Measuring means for measuring the inclination angle of the X-ray diffraction measurement device, comprising, The rotating means rotates the turntable according to the inclination angle. The X-ray diffraction measurement robot according to claim 4.

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