X-ray diffraction measurement system

Abstract

To provide an X-ray diffraction measurement system for imaging a diffraction ring while performing plane oscillation, which can control the size and cost of the apparatus even if the diffraction ring is imaged with a constant distance between the irradiation point and the imaging surface.SOLUTION: An X-ray diffraction measurement apparatus 1 includes a laser emitter 40 that emits parallel visible light with an optical axis identical to the optical axis of an emitted X-ray, the laser emitter provided with a half mirror that allows the passage of the emitted X-ray and reflects the visible light, so that the emitted X-ray and the visible light can be simultaneously emitted. During plane oscillation, a diffraction ring is captured by applying the X-ray to a measurement object OB only when an irradiation point of the visible light in an image captured by a camera CA deviates beyond the allowable range from a position corresponding to a set distance between the irradiation point and the imaging surface.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an X-ray diffraction measurement system including an X-ray diffraction measurement apparatus that irradiates an object to be measured with X-rays and images a diffraction ring with the X-rays diffracted by the object to be measured, and a moving apparatus that relatively moves the object to be measured with respect to the X-ray diffraction measurement apparatus, and capable of imaging the diffraction ring while performing planar rocking.

Background Art

[0002] Conventionally, an X-ray diffraction measurement apparatus is known that irradiates a measurement object with X-rays at a predetermined incident angle, images a diffraction ring with the X-rays diffracted by the measurement object, detects the shape of the imaged diffraction ring, performs analysis by the cosα method, and measures the residual stress of the measurement object. This X-ray diffraction measurement apparatus includes, for example, a device that images a diffraction ring on an imaging plate and detects the shape of the imaged diffraction ring by a reading function including a laser detection device and a laser scanning mechanism, as shown in Patent Document 1. The device shown in Patent Document 1 has a function of irradiating visible parallel light on the same optical axis as the X-rays (hereinafter referred to as emitted X-rays) emitted toward the measurement object, a function of photographing an area near the irradiation point of the visible light, and a function of detecting the distance from the X-ray irradiation point to the imaging surface of the diffraction ring (hereinafter referred to as the irradiation point-imaging surface distance) using the position of the irradiation point of the visible light on the photographed image. By using this function, the measurement location (X-ray irradiation point) of the measurement object can be set to the intended location, and the irradiation point-imaging surface distance can be set to the intended value. Further, the X-ray diffraction measurement apparatus shown in Patent Document 2 has, in addition to the device shown in Patent Document 1, a function of moving a camera that photographs an area near the irradiation point of the visible light, and a function of setting the moving position of the camera from the input irradiation point-imaging surface distance and the X-ray incident angle to a position where the reflected light of the visible light on the measurement object passes through the center of the imaging lens of the camera. By using this function, in addition to the irradiation point-imaging surface distance, the X-ray incident angle can be set to the intended value. Also, for example, there is a device that arranges a solid-state imaging device on the imaging surface and detects the shape of the diffraction ring by detecting the X-ray intensity distribution with the solid-state imaging device, as shown in the X-ray diffraction measurement apparatus shown in Patent Document 3. This X-ray diffraction measurement apparatus can simultaneously perform imaging of the diffraction ring and reading of the diffraction ring performed by the devices shown in Patent Documents 1 and 2, and can perform measurement in a short time.

[0003] When measuring the residual stress of an object to be measured using such an X-ray diffractometer, if the object to be measured is very small or the crystal grains are large, a clear diffraction ring may not be detected. Specifically, there are cases where the detected diffraction rings are discontinuous, or the X-ray intensity distribution in the radial direction of the diffraction ring becomes a curve that deviates significantly from the normal distribution curve. Even in such cases, for example, like the X-ray diffractometer shown in Patent Document 4, when performing X-ray irradiation while moving the object to be measured in a direction parallel to its surface (hereinafter referred to as planar rocking) with respect to the X-ray irradiation point and imaging the diffraction ring, a clear diffraction ring can often be obtained. Also, when there are irregularities on the surface of the object to be measured, as shown in Patent Document 4, the surface profile of the object to be measured is detected in advance, and when performing X-ray irradiation and imaging the diffraction ring, by moving the X-ray diffractometer in the height direction so that the distance between the irradiation point and the imaging plane is always a set value, accurate measurement can be performed. Further, like the X-ray diffractometer shown in Patent Document 5, by simultaneously irradiating X-rays and visible parallel light and performing control to change the height direction position of the X-ray diffractometer so that the irradiation point position on the captured image obtained by camera shooting becomes the set position, the distance between the irradiation point and the imaging plane is always a set value, and accurate measurement can be performed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Patent Document 5

[0005] However, the X-ray diffraction measurement apparatuses of Patent Document 4 and Patent Document 5 need to be provided with a mechanism for changing the position in the height direction of the apparatus and a system for controlling the mechanism. Therefore, there is a problem that the apparatus becomes large-sized and the cost of the apparatus increases. Further, when there are continuous irregularities on the measurement surface of the measurement object at short intervals, it becomes difficult to control so that the distance between the irradiation point and the imaging surface becomes constant, and there is also a problem that the X-ray incident angle changes greatly depending on the X-ray irradiation point and accurate measurement cannot be performed.

[0006] The present invention has been made to solve this problem, and an object thereof is to provide an X-ray diffraction measurement system including an X-ray diffraction measurement apparatus that irradiates a measurement object with X-rays and images a diffraction ring with the X-rays diffracted by the measurement object, and a moving apparatus that relatively moves the measurement object with respect to the X-ray diffraction measurement apparatus, and is capable of imaging the diffraction ring while performing planar rocking. Even if a control system for imaging the diffraction ring in a state where the distance between the irradiation point and the imaging surface is constant is provided, an X-ray diffraction measurement system capable of suppressing the increase in the size and cost of the apparatus is provided. Further, an object is to provide an X-ray diffraction measurement apparatus capable of performing accurate measurement even when there are continuous irregularities on the measurement surface of the measurement object at short intervals.

[0007] To achieve the above object, the features of the present invention are as follows: an X-ray emitting means for emitting X-rays toward a measurement object to be measured; when the measurement object is irradiated with X-rays by the X-ray emitting means, diffracted X-rays generated by the measurement object are received on an imaging surface that intersects perpendicularly to the optical axis of the X-rays emitted by the X-ray emitting means, and a diffracted ring imaging means for imaging a diffracted ring that is an image of the diffracted X-rays on the imaging surface; an X-ray diffractometer comprising a housing in which the X-ray emitting means and the diffracted ring imaging means are disposed; and a moving device for relatively moving the measurement object with respect to the X-ray diffractometer in a direction substantially parallel to the surface of the measurement object. In the X-ray diffraction measurement system, a visible light emitting means for emitting visible light parallel to the optical axis equal to the optical axis of the emitted X-rays that are X-rays emitted toward the measurement object, the visible light emitting means comprising a half mirror that allows the emitted X-rays to pass through and reflects the visible light on the optical path of the emitted X-rays; an imaging lens for imaging an image of a region including the irradiation point of the visible light generated when the visible light emitting means irradiates the visible light; and a camera comprising an imager disposed at a location where the image is formed by the imaging lens and outputting an imaging signal representing the imaged image. An image creating means for creating a photographed image from the imaging signal output by the imager of the camera; the measurement object is moved by the moving device, and when the X-ray emitting means emits X-rays and the visible light emitting means emits visible light, the irradiation point position of the visible light in the photographed image created by the image creating means is detected, and only when the deviation of the position of the detected visible light irradiation point from the irradiation point position of the visible light in the photographed image is within the allowable range when the distance from the X-ray irradiation point formed on the measurement object by the emitted X-rays to the imaging surface is the set value, an X-ray emission control means for causing the X-ray emitting means to emit X-rays is provided.

[0008] According to this, when an X-ray is irradiated toward a measurement object by an X-ray emitting means, a visible light parallel to the same optical axis can be irradiated by a visible light emitting means, and the irradiation point of the X-ray can be recognized as the irradiation point of the visible light regardless of the distance between the irradiation point and the imaging surface. Then, when the irradiation point of the visible light is photographed by a camera and a photographed image of the camera is created by an image creating means, the irradiation point of the visible light in the photographed image occurs at different positions depending on the distance between the irradiation point and the imaging surface. Therefore, when the measurement object is moved by a moving device, an X-ray is irradiated toward the measurement object by the X-ray emitting means, and a diffraction ring is imaged on the imaging surface by a diffraction ring imaging means (that is, when the diffraction ring is imaged while performing planar rocking), the visible light is irradiated by the visible light emitting means, and when the deviation of the irradiation point position of the visible light in the photographed image from the irradiation point position of the visible light in the photographed image when the distance between the irradiation point and the imaging surface is a set value is within the allowable range by an X-ray emission control means, if the X-ray emitting means emits an X-ray, the diffraction ring can be imaged in a state where the distance between the irradiation point and the imaging surface is substantially constant. And the X-ray emission control means can be configured by a computer device, and in terms of hardware, there is no necessary mechanism and device other than the X-ray diffractometer and the moving device for moving the measurement object, so that the enlargement of the device and the cost increase can be suppressed.

[0009] Further, another feature of the present invention is that the X-ray emission control means is such that the posture of the housing with respect to the measurement object is adjusted so that a light receiving point, which is a point where the reflected light of the visible light on the measurement object is condensed by an imaging lens and received by an image sensor, occurs in the photographed image created by the image creating means. When the measurement object is moved by a moving device and the X-ray is emitted by the X-ray emitting means and the visible light is emitted by the visible light emitting means, the position of the light receiving point in the photographed image is detected, and only when the position of the light receiving point is within a preset range in addition to the deviation of the position of the irradiation point of the visible light being within the allowable range, the X-ray emitting means emits an X-ray.

[0010] According to this, in addition to the distance between the irradiation point and the imaging surface being a set value, X-rays are irradiated and the diffraction ring is imaged only when the normal line of the location of the X-ray irradiation point on the measurement object is substantially included in the plane (hereinafter referred to as the reference plane) that includes the line of the rotation angle 0 of the optical axis of the emitted X-rays and the imaging surface and the X-ray incident angle is substantially the set value. Therefore, even when there are continuous irregularities on the surface of the measurement object at short intervals, accurate measurement can be performed.

[0011] Further, another feature of the present invention is that the X-ray emission control means allows the position deviation of the irradiation point in the captured image to be within the allowable range and the position of the light receiving point to be within a preset range. In addition, in at least one of the area of the irradiation point and the area of the light receiving point in the captured image, X-rays are emitted to the X-ray emitting means only when the deviation from the preset area is within the allowable range.

[0012] According to this, in the case of a measurement object with a large number of pits or when there are continuous irregularities with steps on the surface of the measurement object, when the X-ray irradiation point hits the location of the step of the irregularities, the X-ray irradiation is stopped. Therefore, in most areas of the X-ray irradiation point, the distance between the irradiation point and the imaging surface and the X-ray incident angle are substantially the set values, and X-rays are irradiated and the diffraction ring can be imaged only when the normal line of the location of the X-ray irradiation point on the measurement object is substantially included in the reference plane, and accurate measurement can be performed.

[0013] Further, another feature of the present invention is that when the X-ray emission control means emits X-rays to the X-ray emitting means, a movement control means is provided to reduce the movement speed of the moving device, and when the X-ray emission control means stops the emission of X-rays from the X-ray emitting means, the movement speed of the moving device is increased.

[0014] According to this, even when there are continuous irregularities on the surface of the measurement object at short intervals, the time for which X-rays are emitted can be lengthened and the time for which X-ray emission is stopped can be shortened. Therefore, the time required to image the diffraction ring can be shortened, and the measurement efficiency can be improved.

[0015] Another feature of the present invention is that it comprises time measurement means which measures and accumulates the control time performed by the X-ray emission means and the X-ray emission control means, estimated movement distance calculation means which calculates an estimate of the distance traveled by the moving device until the emission time reaches the upper limit, using the emission time and control time measured by the time measurement means, a preset upper limit of the emission time, and a preset moving speed of the moving device, and comparison means which compares the estimated distance calculated by the estimated movement distance calculation means with a preset upper limit of the movement distance by the moving device and takes action based on the comparison result.

[0016] According to this, immediately after starting to image the diffraction ring while performing the planar oscillation, the estimated movement distance calculation means calculates an estimated value of the distance, and the comparison means compares the estimated value of the distance calculated with a preset upper limit of the movement distance, and when the estimated value of the distance becomes larger than the upper limit of the movement distance, some kind of response can be taken. That is, when it is estimated that the time of X-ray emission is shorter than the time of stopping emission due to a cause such as a large degree of unevenness on the surface of the measurement object, and the distance of the planar oscillation until the image of the diffraction ring is completed will exceed the upper limit of the size of the measurement object, some kind of response can be taken immediately after the image of the diffraction ring is started, so that it is possible to avoid spending extra time on the measurement. Note that various responses can be considered as the response taken by the X-ray diffraction measurement system, such as displaying a warning on the display device, generating an alarm, or stopping the measurement. [Brief description of the drawings]

[0017]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0018] The configuration of the X-ray diffraction measurement system including the X-ray diffraction measurement apparatus of the present invention will be described with reference to FIGS. 1 to 3. Note that the X-ray diffraction measurement apparatus of the present invention is only different in that the visible light emission mechanism of the X-ray diffraction measurement apparatus shown in Patent Document 2 of the prior art documents is changed to the laser emitter 40, and other parts are the same as those of the X-ray diffraction measurement apparatus shown in Patent Document 2. Therefore, the same parts as those of the X-ray diffraction measurement apparatus shown in Patent Document 2 will be briefly described by stating that they are the same, and the different parts will be described in detail. Also, the same parts as those of the X-ray diffraction measurement apparatus shown in Patent Document 1 will be briefly described by stating that they are the same.

[0019] As shown in FIGS. 1 and 2, this X-ray diffraction measurement system is composed of an X-ray diffraction measurement apparatus 1, a computer apparatus 90, a high-voltage power supply 95, an arm-type moving apparatus (only the tip 51 is shown), and a stage moving apparatus 60. This X-ray diffraction measurement system moves the stage St of the stage moving apparatus 60 in a direction parallel to the surface of the stage St, irradiates the measurement object OB with X-rays from the X-ray diffraction measurement apparatus 1 to image a diffraction ring, reads the shape of the imaged diffraction ring, and measures characteristic values such as the residual stress of the measurement object OB from the shape. Then, when moving the stage St to image the diffraction ring, the controller 91 controls to irradiate the measurement object OB with X-rays from the X-ray diffraction measurement apparatus 1 only when it meets the determined conditions. The conditions for the X-ray irradiation are that the condition of the irradiation point - imaging surface distance is essential, but the conditions of the incident direction of the X-rays and the condition of the area of the irradiation point and the light receiving point of the visible laser light in the captured image of the camera CA described later can be selected whether to include them or not. Hereinafter, the direction perpendicular to the paper surface of FIGS. 1 and 2 will be described as the X-axis direction, the horizontal direction as the Y-axis direction, and the vertical direction as the Z-axis direction.

[0020] As shown in FIGS. 1 and 2, the X-ray diffraction measurement apparatus 1 includes, within a housing 50, an X-ray tube 10, a table 16 to which an imaging plate 15 is attached, a spindle motor 27 that rotates the table 16 and allows X-rays emitted from the X-ray tube 10 to pass through a through-hole formed in the rotation axis, a laser detection device 30 that emits laser light for reading a diffraction ring and LED light for erasing it, a camera CA that photographs the vicinity of the X-ray irradiation point, and a moving mechanism 100 that moves the laser detection device 30 in a direction parallel to the imaging plate 15. The X-ray diffraction measurement apparatus 1 also includes, within the housing 50, various circuits connected to these devices for controlling their operations and inputting detection signals. The various circuits shown by the two-dot chain line outside the housing 50 in FIG. 1 are housed within the two-dot chain line inside the housing 50. These various circuits are connected to a computer device 90 and operate according to commands input from a controller 91 of the computer device 90. The controller 91 outputs commands to the various circuits based on inputs from an input device 92 and the operation of installed programs, and inputs and stores in a memory the data output by the various circuits and the values input from the input device 92. Then, the stored data is processed to display on a display device 93 measurement results such as residual stress and photographed images of the camera CA. The X-ray diffraction measurement system also includes a high-voltage power supply 95, which outputs to the X-ray tube 10 the voltage and current for the X-ray tube 10 to emit X-rays. These configurations are the same as those of the X-ray diffraction measurement apparatus shown in Patent Document 2.

[0021] As shown in FIG. 2, the housing 50 of the X-ray diffraction measurement apparatus 1 has a structure in which the upper and lower surfaces of a rectangular parallelepiped shape are formed with inclined surfaces so as to eliminate one corner each, and the bottom surface has a step. Specifically, the housing 50 includes a first bottom wall 50a, a second bottom wall 50c, a front wall 50b, a rear wall 50e, an upper surface wall 50f, a side wall (not shown), a bottom inclined wall 50h connecting the first bottom wall 50a and the second bottom wall 50c, a connecting wall 50d provided so as to eliminate the corner where the second bottom wall 50c and the front wall 50b intersect, and an upper surface inclined wall 50g provided so as to eliminate the corner where the rear wall 50e and the upper surface wall 50f intersect. The second bottom wall 50c has a circular hole 50c1. When imaging the diffraction ring, X-rays are emitted through this circular hole 50c1, and the diffracted X-rays generated by the measurement object OB pass through this circular hole 50c1 and are received by the imaging plate 15. Further, the bottom inclined wall 50h has a long hole 50h1 having a rectangular shape whose long direction is parallel to the side wall. Since this arrangement position is the imaging direction of the camera CA, the camera CA images the vicinity of the X-ray irradiation point through the long hole 50h1. The shape of the housing 50 is the same as that of the X-ray diffraction measurement apparatus shown in Patent Document 2.

[0022] One of the side walls of the housing 50 is rotatably connected to the tip 51 of the arm-type moving device on the back side of the paper surface of FIG. 2. The direction of this rotation axis is parallel to the front wall 50b, the rear wall 50e, and the upper surface wall 50f of the X-ray diffraction measurement apparatus 1 and perpendicular to the side wall. In other words, the direction of this rotation axis is perpendicular to the reference plane (a plane including the optical axis of the emitted X-rays and the line of the rotation angle 0 of the imaging plate 15 which is the imaging surface). Thereby, by rotating the connection portion between the side wall of the tip 51 of the arm-type moving device, the X-ray incident angle with respect to the measurement object OB can be changed. Further, the arm-type moving device is a device having a plurality of joints, and the position and posture of the X-ray diffraction measurement apparatus 1 can be variously changed and fixed.

[0023] The controller 91 of the computer device 90 is an electronic control device mainly composed of a microcomputer equipped with a CPU, ROM, RAM, a mass storage device, etc. By inputting commands from the input device 92, it executes the programs stored in the mass storage device to control the operation of the X-ray diffractometer 1, performs calculations using the input digital data, and calculates characteristic values such as residual stress. In addition, the controller 91 displays the measurement conditions input from the input device 92, the operating status of the X-ray diffraction measurement system, characteristic values such as residual stress obtained as a result of the calculation, and the X-ray intensity distribution diagram of the diffraction ring, etc. on the display device 93.

[0024] The stage moving device 60 consists of a Y-axis direction moving mechanism composed of a stage St, a frame 61, a feed motor 62, a screw rod 63, and a bearing portion 64, and an X-axis direction moving mechanism composed of a frame 65, a feed motor 66, a screw rod (not shown), and a bearing portion (not shown). In the Y-axis direction moving mechanism, the stage St is sandwiched between the frames 61 and can only move in the Y-axis direction. There is a hole with a female thread cut in the Y-axis direction in the center, which mates with the screw rod 63 with a male thread cut. When the feed motor 62 rotates forward or backward, the screw rod 63 rotates forward or backward, and the stage St moves in the Y-axis direction. Also, in the X-axis direction moving mechanism, the frame 61 of the Y-axis direction moving mechanism has the same mechanism as the stage St. When the feed motor 66 rotates forward or backward, the screw rod rotates forward or backward, and the Y-axis direction moving mechanism moves in the X-axis direction. By the operation of these X-axis direction moving mechanism and Y-axis direction moving mechanism, the stage St and the measurement object OB placed on the stage St move in the X-axis direction and the Y-axis direction.

[0025] In addition to the mechanism parts described above, the stage moving device 60 includes feed motor control circuits 67 and 69 and position detection circuits 68 and 70. When commands are input from the controller 91 to these circuits, the stage St moves in the X-axis direction and the Y-axis direction. When a movement position command is input from the controller 91 to the feed motor control circuits 67 and 69, the feed motor control circuits 67 and 69 output drive signals to the feed motors 62 and 66 until the movement position input from the position detection circuits 68 and 70 reaches the commanded movement position. Also, when a movement direction and movement speed command are input from the controller 91 to the feed motor control circuits 67 and 69, the feed motor control circuits 67 and 69 output drive signals to the feed motors 62 and 66 such that the number of pulses per unit time of the pulse train signals input from the encoders 62a and 66a built in the feed motors 62 and 66 becomes the number of pulses corresponding to the commanded movement speed. Further, the position detection circuits 68 and 70 integrate and count the number of pulses of the pulse train signals input from the encoders 62a and 66a, convert them into a movement distance, and output the movement distance as a movement position. Thereby, the stage St moves to the position specified by the controller 91 and moves at the speed specified in the direction specified by the controller 91. Also, when the X-ray diffraction measurement system is powered on, an origin movement command is input from the controller 91 to the feed motor control circuits 67 and 69 and the position detection circuits 68 and 70, and the feed motor control circuits 67 and 69 output drive signals for the stage St to move toward the feed motors 62 and 66. Then, when the stage St moves to the movement limit position and the pulse train signal from the encoders 62a and 66a stops, the position detection circuits 68 and 70 reset the integrated count to 0 and output a signal to stop the drive signal to the feed motor control circuits 67 and 69. Thereafter, the position detection circuits 68 and 70 output the movement distance with the movement limit position as the origin as the movement position.

[0026] As shown in FIGS. 1 and 2, the X-ray tube 10 is fixed at the upper part within the housing 50. This fixing is performed after positioning by fitting the side surface of the X-ray tube 10 into a groove formed in a part of the cylindrical side surface formed on the plate-like plate 26. Further, the plate-like plate 26 is fixed to the housing 50 together with the moving mechanism 100 that fixes it, and the central axis of the X-ray tube 10 is substantially parallel to the upper surface wall 50f and the side surface wall. When the X-ray tube 10 receives a high voltage supply from the high voltage power supply 95, it emits X-rays from the circular emission port 11 on the side surface. As shown in FIG. 3, a through hole 26a is formed in the plate-like plate 26 at a position corresponding to the emission port 11, and the emitted X-rays pass through the through hole 26a and proceed. When a command is input from the controller 91 to the X-ray control circuit 71 shown in FIG. 1, it controls the drive current and drive voltage supplied from the high voltage power supply 95 to the X-ray tube 10 so that X-rays of a certain intensity are emitted from the X-ray tube 10. Further, the X-ray tube 10 is provided with a cooling device (not shown), and the X-ray control circuit 71 also controls the drive signal supplied to this cooling device. These configurations are the same as those of the X-ray diffraction measurement device shown in Patent Document 2.

[0027] As shown in Fig. 2, the moving mechanism 100 is integrated with the plate-shaped plate 26 and has a mechanism for moving the moving stage 101 in the central axis direction of the X-ray tube 10. There is a convex portion on the side opposite to the paper surface of the moving stage 101, and this convex portion is fitted into a groove formed in a block 109 fixed to the plate-shaped plate 26 and a plate-shaped guide 105 fixed to the block 110. The moving stage 101 has a screw rod 103 with a male thread inserted into a hole with a female thread formed therein. The screw rod 103 is connected to a feed motor 102 and a bearing portion 104, and when the feed motor 102 rotates, it moves in the direction of the groove formed in the plate-shaped guide 105 (the central axis direction of the X-ray tube 10). A connection block 106 is fixed to the lower part of the moving stage 101. The connection block 106 fixes a fixed block 107, and the fixed block 107 fixes a laser detection device 30 at the upper part and a camera CA at the lower part. Therefore, when the moving stage 101 moves, the laser detection device 30 and the camera CA also move in the same direction. These configurations are the same as those of the X-ray diffraction measurement device shown in Patent Document 2.

[0028] An encoder 102a is incorporated in the feed motor 102. When the feed motor 102 rotates, the encoder 102a outputs a pulse train signal to the position detection circuit 72 and the feed motor control circuit 73 shown in FIG. 1. The position detection circuit 72 and the feed motor control circuit 73 operate according to commands from the controller 91. The position detection circuit 72 counts the input pulse train signal and outputs the movement position, which is the movement distance with the movement limit position as the origin, to the feed motor control circuit 73 and the controller 91. Further, when the movement position is input from the controller 91, the feed motor control circuit 73 outputs a drive signal to the feed motor 102 until the movement position input from the position detection circuit 72 becomes equal to the movement position input from the controller 91. Furthermore, when the movement direction and the movement speed are input from the controller 91, the feed motor control circuit 73 outputs a drive signal such that the number of pulses per unit time of the input pulse train signal becomes the number of pulses corresponding to the input movement speed. Due to these functions of the position detection circuit 72 and the feed motor control circuit 73, the laser detection device 30 and the camera CA move to the position specified by the controller 91 and move at the specified speed in the direction specified by the controller 91. These configurations and functions are the same as those of the X-ray diffraction measurement device shown in Patent Document 2.

[0029] As shown in FIG. 3, the motor fixing block 111 is fixed to the block 110 fixed to the plate-like plate 26 and the block 112. A triangular block 48 is fixed to the surface on the plate-like plate 26 side so as to face the through-hole 26a. Therefore, the X-rays emitted from the emission port 11 of the X-ray tube 10 and passing through the through-hole 26a of the plate-like plate 26 travel in the direction of the triangular block 48. The triangular block 48 has a shape obtained by cutting a cube at an angle of 45°. A through-hole 48b is formed from the inclined surface toward the lower surface so that, in other words, the optical axis and the central axis of the X-rays emitted from the X-ray tube 10 coincide. Further, a through-hole 48a is formed in the triangular block 48 so that the central axis is perpendicular to the central axis of the through-hole 48b from the lateral surface, and a hole where the through-hole 48b and the through-hole 48a intersect is formed in the inclined surface of the triangular block 48. A square thin half mirror 49 is fitted at the location where the two through-holes of the triangular block 48 intersect. The half mirror 49 is formed of a material that transmits most X-rays and reflects most visible light. This material is, for example, polyimide. As a result, most of the X-rays that pass through the through-hole 26a and enter the triangular block 48 pass through the half mirror 49, pass through the through-hole 48b, and enter the through-hole 21a formed in the motor fixing block 111. Further, as will be described later, visible laser light whose central axis coincides with the central axis of the through-hole 48a enters the through-hole 48a. Most of the visible laser light that enters the through-hole 48a is reflected by the half mirror 49 and, like the X-rays, passes through the through-hole 48b and enters the through-hole 21a.

[0030] The central axis of the through-hole 21a coincides with the optical axis of the X-rays emitted from the X-ray tube 10 and the central axes of the through-holes 26a and 48b, together with each of the through-holes through which the X-rays described later pass. The X-rays and the laser light incident on the through-hole 21a pass through the through-hole 28a of the passage member 28 fixed to the tip of the through-hole 27b formed in the spindle motor 27 fixed to the motor fixing block 111. A through-hole 27a1 is formed in the output shaft 27a of the spindle motor 27, and the through-hole 27b is connected after being aligned with the through-hole 27a1 in the central axis. Therefore, the X-rays and the laser light that have passed through the through-hole 28a pass through the through-hole 27b and the through-hole 27a1. The table 16 is disk-shaped, and the through-hole 16a formed in its central axis is fixed to the output shaft 27a so as to be aligned with the through-hole 27a1 of the output shaft 27a of the spindle motor 27. The table 16 has a protruding portion 17 that protrudes downward from the central portion of the lower surface around the central axis, and a thread is formed on the outer peripheral surface of the protruding portion 17. The imaging plate 15 is attached to the lower surface of the table 16 so that the through-hole 15a fits into the protruding portion 17, and the imaging plate 15 is fixed to the table 16 by screwing a nut-shaped fixture 18 onto the outer peripheral surface of the protruding portion 17. These structures are the same as those of the X-ray diffraction measurement apparatus shown in Patent Document 2.

[0031] The through-hole 27a1 is also formed in the protrusion 17, and the through-hole 17a is formed so as to be aligned with the through-hole 16a. The fixture 18 is formed with a through-hole 18a. Therefore, the X-rays and the laser light that have passed through the through-hole 27b and the through-hole 27a1 pass through the through-hole 16a, the through-hole 17a, and the through-hole 18a, and become substantially parallel X-rays and laser light, which are emitted from the circular hole 50c1 of the housing 50. The structure in which the X-rays emitted from the X-ray tube 10 pass through the through-hole group and are emitted is the same as the X-ray diffractometer shown in Patent Document 2, except that there are the triangular block 48 and the half mirror 49. However, in the present embodiment, a visible laser light is emitted simultaneously with the X-rays, and the X-rays are passed through the half mirror 49 and the visible laser light is reflected, so that the visible laser light can be emitted on the same optical axis as the emitted X-rays. As a result, the irradiation point of the emitted X-rays irradiated on the measurement object OB can be recognized as the irradiation point of the visible light. Then, when the measurement object OB is irradiated with X-rays, diffracted X-rays are generated. The diffracted X-rays pass through the circular hole 50c1 and are received by the imaging plate 15, and diffraction rings are imaged on the imaging plate 15 at locations where the intensity of the diffracted X-rays becomes strong.

[0032] An encoder 27c is incorporated in the spindle motor 27. When the spindle motor 27 rotates, the encoder 27c outputs a pulse train signal to the spindle motor control circuit 74 and the rotation angle detection circuit 75 shown in FIG. 1. Further, each time the spindle motor 27 makes one rotation, the encoder 27c outputs an index signal to the controller 91 and the rotation angle detection circuit 75. When the rotation speed is input from the controller 91 to the spindle motor control circuit 74, the spindle motor control circuit 74 outputs a drive signal to the spindle motor 27 so that the number of pulses per unit time of the pulse train signal input from the encoder 27c corresponds to the number of pulses of the input rotation speed. The rotation angle detection circuit 75 counts the number of pulses of the input pulse train signal, calculates the rotation angle from the count value, and outputs it to the controller 91. When an index signal is input, the count value is reset to "0". This is the position of the rotation angle 0°. The functions of the spindle motor 27, the spindle motor control circuit 74, and the rotation angle detection circuit 75 are the same as those of the X-ray diffraction measurement apparatus of Patent Document 2.

[0033] As shown in FIGS. 1 and 2, the central axis direction of the X-ray tube 10 is parallel to the imaging plate 15. As described above, since the laser detection device 30 moves in the central axis direction of the X-ray tube 10, the laser detection device 30 moves in a direction parallel to the imaging plate 15. When the laser detection device 30 moves from the position shown in FIG. 2 to the right side of the figure, the laser light emitted from the laser detection device 30 irradiates the imaging plate 15, and this irradiation point moves in the radial direction of the imaging plate 15 due to the movement of the laser detection device 30. The movement line of the laser light on the imaging plate 15 passes through the center of the imaging plate 15, and the position of the laser detection device 30 on the fixed block 107 is adjusted. Further, the position of the laser detection device 30 is adjusted so that the focus of the laser light emitted from the objective lens of the laser detection device 30 coincides with the imaging plate 15. These structures are the same as those of the X-ray diffraction measurement apparatus of Patent Document 2.

[0034] The position on the imaging plate 15 at a rotation angle of 0° is the position where the laser light from the laser detection device 30 is irradiated when the encoder 27c outputs an index signal during diffraction ring reading. Since this position exists at each radial position of the imaging plate 15, it is a line. And before imaging the diffraction ring on the imaging plate 15 by irradiating the measurement object OB with X-rays, the rotation angle of the table 16 is set to 0° by the command output from the controller 91 to the spindle motor control circuit 74 and the rotation angle detection circuit 75. Therefore, at the time of diffraction ring imaging, the line at a rotation angle of 0° of the imaging plate 15 is the line where the laser light from the laser detection device 30 is irradiated when the laser detection device 30 is moved to the right side in FIG. 2. The optical axis of the emitted X-rays intersects the line at a rotation angle of 0° on the imaging plate 15, and as described above, the plane formed by the optical axis of the emitted X-rays and the line at a rotation angle of 0° is defined as the reference plane. The reference plane is the YZ plane in FIG. 2.

[0035] The structure of the laser detection device 30 is the same as that of Patent Document 1. Laser light is irradiated onto the imaging plate 15, and the intensity of the diffracted X-rays at the laser light irradiation position is detected from the intensity of the light emitted by the imaging plate 15. When irradiating the laser light and rotating the spindle motor 27, and moving the laser detection device 30 by the moving mechanism 100, the irradiation point of the laser light on the imaging plate 15 moves in a spiral shape, and the intensity of the diffracted X-rays at each position of the imaging plate 15 can be detected. At this time, at the same timing when the laser detection device 30 detects the intensity of the diffracted X-rays, the rotation angle is detected by the rotation angle detection circuit 75 and the moving position is detected by the position detection circuit 72. If these data groups are input to the controller 91 and the moving position is converted into the radial position, these data groups are the intensity distribution data of the diffracted X-rays (reading data of the diffraction ring) on the imaging plate 15. The laser detection control circuit 77 shown in FIG. 1 is a circuit that combines a plurality of circuits for controlling the laser detection device 30 and a plurality of circuits for inputting signals from the laser detection device 30 and outputting data, as shown in FIG. 1 of Patent Document 1. The laser detection control circuit 77 performs controls such as laser light emission, intensity control of the emitted laser light, and focusing control of the laser light irradiation point on the imaging plate 15 on the laser detection device 30 according to a command input from the controller 91, and outputs the instantaneous value data of the signal corresponding to the diffracted X-ray intensity input from the laser detection device 30 to the controller 91. These functions of the laser detection control circuit 77 are the same as those of the X-ray diffraction measurement device of Patent Document 2. In addition, an LED light source is provided in the laser detection device 30. When LED light is irradiated from the LED light source onto the imaging plate 15, the captured diffraction ring is erased. When a command is input from the controller 91 to the LED drive circuit 84, the LED drive circuit 84 outputs a drive signal for the LED light source to emit LED light of a predetermined intensity. This function of the laser detection device 30 and the LED drive circuit 84 is also the same as that of the X-ray diffraction measurement device of Patent Document 2.

[0036] As shown in FIG. 3, the motor fixing block 111 has a laser emitter 40 on the surface facing the plate-like plate 26, and the tips of the semi-circular belts 47-1 and 47-2 are attached by tightening them to the motor fixing block 111 with bolts, and emits visible laser light toward the triangular block 48. The laser emitter 40 is composed of a cylindrical frame 41, a laser light source 42, a disc-shaped block 43, a cylindrical block 44, a collimating lens 45, and a lens frame 46. The laser light emitted from the laser light source 42 is made parallel by the collimating lens 45, and parallel laser light is emitted. And, as described above, the optical axis of this laser light coincides with the central axis of the through hole 48a of the triangular block 48, and is emitted from the X-ray diffractometer 1 with the same optical axis as the optical axis of the emitted X-ray by being reflected by the half mirror 49. The laser light source 42 is fixed to the cylindrical block 44, and the cylindrical block 44 is fixed inside the cylindrical frame 41, so it is attached inside the frame 41. A disc-shaped block 43 having a hole 43a formed at the end of the frame 41 near the laser light source 42 is fixed. When the cylindrical block 44 is fixed inside the frame 41, the position of the laser light source 42 can be determined by pressing the laser light source 42, and wiring can be performed to the laser light source 42 through the hole 43a. The collimating lens 45 is fixed to the hole 46a of the lens frame 46, and the lens frame 46 is fixed inside the frame 41, so it is fixed to the other end of the frame 41. A drive signal for emitting laser light having an intensity set from the laser drive circuit 85 shown in FIG. 1 is input to the laser light source 42. The laser drive circuit 85 outputs a drive signal when an operation command is input from the controller 91. Therefore, when the controller 91 outputs an operation command to the laser drive circuit 85 and the X-ray control circuit 71, the emitted X-ray and the visible laser light are emitted from the circular hole 50c1 of the X-ray diffractometer 1 with the same optical axis.

[0037] As shown in FIG. 2, the fixed block 107 of the moving mechanism 100 has a convex portion 108 on its lower surface. A cylindrical hole 108a is formed in this convex portion 108, and a cylindrical camera CA is fixed in the cylindrical hole 108a. The camera CA has a structure in which a cylindrical portion with an imaging lens attached is attached to a cylindrical frame with an imager attached to the bottom surface. By fixing the frame to the hole 108a, the camera CA is fixed to the convex portion 108. The optical axis of the imaging lens of the camera CA is incident on the imager substantially perpendicularly and is included in the reference plane (the plane including the optical axis of the outgoing X-ray and the line with a rotation angle of 0). Since the moving direction of the fixed block 107 by the moving mechanism 100 is parallel to the line with a rotation angle of 0, the optical axis of the imaging lens is included in the reference plane at all the moving positions of the camera CA. These structures are the same as those of the X-ray diffraction measurement apparatus of Patent Document 2. Further, when the irradiation point - imaging surface distance and the X-ray incident angle are set in the camera CA by the input from the input device 92 to the controller 91, the controller 91 outputs a command to the feed motor control circuit 73, and the moving position is set. The moving position is such that when a visible laser beam is irradiated at the set irradiation point - imaging surface distance and X-ray incident angle and the normal line of the measurement object OB at the X-ray irradiation point is included in the reference plane, the reflected light of the laser beam at the measurement object OB passes through the center of the imaging lens of the camera CA. A relationship table between the irradiation point - imaging surface distance and the X-ray incident angle and the moving position of the camera CA is stored in the controller 91. When the irradiation point - imaging surface distance and the X-ray incident angle are input, the controller 91 calculates the moving position of the camera CA from the relationship table and outputs it to the feed motor control circuit 73. This function is also the same as that of the X-ray diffraction measurement apparatus of Patent Document 2.

[0038] Camera CA is a digital camera. The imager is composed of a CCD photoreceptor or a CMOS photoreceptor, and outputs a signal with an intensity corresponding to the light reception intensity of each imaging element to the sensor signal extraction circuit 87. The sensor signal extraction circuit 87 outputs the signal intensity data of each imaging element of the imager to the controller 91 together with data indicating the position of each imaging element (i.e., the pixel position) or in the order of pixel positions. The controller 91 creates a captured image from the input data and displays it on the screen of the display device 93. At this time, independently of the captured image, the controller 91 also displays cross lines that equally divide the captured image into four parts centered on a point on the captured image corresponding to the point where the optical axis of the imaging lens of the camera CA intersects the imager. Also, when the moving position of the camera CA is set as described above, a cross mark is displayed independently of the captured image at a point on the captured image corresponding to the location where the line connecting the X-ray irradiation point, which has the set irradiation point - imaging surface distance, and the center of the imaging lens of the camera CA intersects the imager. When the laser emitter 40 emits visible laser light, an irradiation point of the laser light and a light reception point, which is the point where the laser light is reflected by the measurement object OB, condensed by the imaging lens of the camera CA, and received by the imager, appear in the captured image. This cross mark is the point at which the irradiation point and the light reception point on the captured image should be aligned in order to obtain the set irradiation point - imaging surface distance and X-ray incident angle. The functions of the camera CA, the sensor signal extraction circuit 87, and the controller 91 are the same as those of the X-ray diffraction measurement apparatus shown in Patent Document 2. Further, the controller 91 executes a program installed later to detect the positions of the irradiation point and the light reception point of the visible laser light in the captured image, and performs control to output a command for X-ray emission and a command for emission stop to the X-ray control circuit 71 based on the detected positions. This control will be described in detail later.

[0039] The feature of this embodiment lies in that when irradiating the object to be measured OB with X-rays while performing planar rocking and imaging a diffraction ring on the imaging plate 15, the emission and stop of the X-rays are controlled based on the positions and other characteristics of the irradiation point and the light-receiving point in the captured image by the camera CA. This control is performed by executing a program installed in the controller 91. Hereinafter, in the process of explaining the method of performing X-ray diffraction measurement by planar rocking of the object to be measured OB using the X-ray diffraction measurement system including the X-ray diffraction measurement apparatus 1 configured as described above, the program will be explained.

[0040] First, the operator turns on the power to activate the X-ray diffraction measurement system, sets the object to be measured OB on the stage moving device 60, and inputs the XY-direction position or the moving direction in the X-axis direction or the moving direction in the Y-axis direction from the input device 92, so that the stage St is approximately positioned such that the X-ray irradiation point (the irradiation point of the laser beam) is at the intended position. Next, the operator inputs the intended irradiation point - imaging surface distance and the X-ray incident angle. At this time, it is also possible to set only the irradiation point - imaging surface distance and keep the X-ray incident angle at a preset reference value. When the input is made, the controller 91 calculates the moving position of the camera CA from a relation table stored in advance and outputs it to the feed motor control circuit 73, and the camera CA reaches the set position. Next, the operator inputs a command for position and attitude adjustment from the input device 92. Thereby, the controller 91 outputs commands to the laser drive circuit 85 and the sensor signal extraction circuit 87, visible laser light irradiates the object to be measured OB, and a captured image and a cross mark are displayed on the display device 93. The operator operates the arm-type moving device to adjust the position and attitude of the X-ray diffraction measurement apparatus 1 so that the X-ray irradiation point (the irradiation point of the laser beam) is at the intended position (the start position of planar rocking), and the irradiation point and the light-receiving point coincide with the cross marks of the cross in the captured image.

[0041] At this time, if only the distance between the irradiation point and the imaging surface is set and the X-ray incident angle remains at the preset reference value Θs, visible laser light is irradiated as set. If the normal line of the measurement object OB is included in the reference plane, the irradiation point and the light receiving point will occur at the center of the captured image. This is because, as shown in FIG. 4, the reference value Θs of the X-ray incident angle is set to half of the angle at which the optical axis of the imaging lens of the camera CA and the optical axis of the emitted X-rays intersect. Therefore, if visible laser light is irradiated as set and the normal line of the measurement object OB is included in the reference plane, the reflected light from the measurement object OB coincides with the optical axis of the imaging lens. Thus, the cross mark of the cross in the captured image that aligns the irradiation point and the light receiving point is the same as the cross line that equally divides the captured image into four. On the other hand, when both the distance between the irradiation point and the imaging surface and the X-ray incident angle are set, if visible laser light is irradiated as set and the normal line of the measurement object OB is included in the reference plane, the irradiation point and the light receiving point will occur at positions shifted from the center of the captured image. This is because, as shown in FIG. 5, when the X-ray incident angle Θ1 is set to a value different from the reference value Θs, even if visible laser light is irradiated as set and the normal line of the measurement object OB is included in the reference plane, the reflected light from the measurement object OB does not coincide with the optical axis of the imaging lens. Therefore, the cross mark of the cross for aligning the irradiation point and the light receiving point in the captured image is displayed separately from the cross line that equally divides the image into four.

[0042] When the adjustment of the position and orientation of the X-ray diffractometer 1 is completed, the operator inputs a command indicating the completion of the position and orientation adjustment from the input device 92 to terminate the laser light irradiation and the display of the captured image by the camera CA, and then inputs the conditions for planar rocking. First, the operator inputs the direction of planar rocking (the X-axis direction or the Y-axis direction in FIG. 2) and the speed of planar rocking, and inputs what other conditions to include as the conditions for irradiating X-rays during planar rocking, in addition to the distance between the irradiation point and the imaging surface (the position of the irradiation point on the captured image). The conditions to be input include the incident direction of the X-rays (the position of the light-receiving point on the captured image) and the areas of the irradiation point and the light-receiving point. The incident direction of the X-rays is the combined value of the X-ray incident angle and the deviation angle from the reference plane of the normal line of the measurement object OB. The operator determines and inputs the conditions to be included based on the state of the surface of the measurement object OB, the required measurement accuracy, and the time required for the measurement. Next, if the operator wants to set the moving speed during the X-ray irradiation stop to be higher than that during X-ray irradiation during planar rocking, the operator also inputs that moving speed. Next, the operator inputs the upper limit value of the moving distance in planar rocking. This is to prevent the moving distance due to planar rocking from exceeding the upper limit value such as the length of the measurement object OB before the X-ray irradiation time reaches the preset X-ray irradiation time for diffraction ring imaging.

[0043] Next, the operator inputs a measurement start command from the input device 92. Thereby, the controller 91 rotates the spindle motor 27 at a low speed, sets the imaging plate 15 to the state of a rotation angle of 0, and then starts the programs of the flow shown in FIG. 6 and the program of the flow shown in FIG. 7. Also, each time the captured image data is input, a program for detecting the irradiation point position, the light receiving point position, and the areas of the irradiation point and the light receiving point is started. Hereinafter, the description will be made along the flow shown in FIG. 6. When the measurement start command is input from the input device 92, the controller 91 starts the program at step S1 and sets n, which is a numerical value for discriminating between during X-ray emission and during X-ray emission stop, to 1 at step S2. n means that 0 is during X-ray emission and 1 is during X-ray emission stop. Next, at step S3, the integration time A, which is the X-ray irradiation time, is reset to 0, and at step S4, the moving position T1 output by the circuit corresponding to the moving direction of the planar swing among the position detection circuits 68 and 70 is taken into the memory. Next, at step S5, a movement command and a movement speed are output to the circuit corresponding to the moving direction of the planar swing among the feed motor control circuits 67 and 69. The movement speed at this time is the movement speed during X-ray irradiation and is smaller than the movement speed during X-ray emission stop. Thereby, the stage St starts moving at the movement speed set in the moving direction set by the previous input from the input device 92. Next, at step S6, a command is output to the laser drive circuit 85 to start laser light irradiation, and at step S7, a command is output to the sensor signal extraction circuit 87 to start causing the captured image data of the camera CA to be output to the controller 91. As described above, since the controller 91 starts a program for detecting the irradiation point position, the light receiving point position, and the areas of the irradiation point and the light receiving point each time the captured image data is input, the data of the irradiation point position, the light receiving point position, and the areas of the irradiation point and the light receiving point are acquired at substantially the same timing as when the captured image data of the camera CA is input. Steps S8 to S12 are a flow for waiting until the captured image data is input, and during the waiting, it is also determined whether the X-ray irradiation time and the moving distance exceed the upper limit values. This determination will be described later.When the captured image data is input, it is determined as YES in step S8 and proceeds to step S13. In steps S13 to S17, it is determined whether the obtained irradiation point position, light receiving point position, and the value of the area between the irradiation point and the light receiving point are within the allowable range.

[0044] However, as described above, under the conditions of irradiating X-rays, the distance between the irradiation point and the imaging surface (the irradiation point position on the captured image) is essential, but it is possible to select whether to include the incident direction of the X-rays (the light receiving point position on the captured image) and the area between the irradiation point and the light receiving point in the conditions. Therefore, except for determining whether the irradiation point position is within the allowable range in step S13, the determination is made after determining whether it is included in the conditions. And when all are within the allowable range, the processes of steps S18 to S23 are performed. When even one is outside the allowable range, the processes of steps S24 to S29 are performed. Steps S18 to S23 are processes for emitting X-rays. As described above, n is a numerical value that identifies between X-ray emission and X-ray emission stop as 0 and 1, and since it is 0 when the program starts, it is determined as YES in step S18 and proceeds to step S19. In step S19, a command is output to the X-ray control circuit 71 and the object to be measured OB is irradiated with X-rays, and diffraction rings start to be captured on the imaging plate 15. Next, in step S20, the measurement of the integration time A, which is the X-ray irradiation time, is started. In steps S21 and S22, when the moving speed during X-ray irradiation is made greater than the moving speed during X-ray emission stop when the measurement conditions were input previously, the low moving speed, which is the moving speed during X-ray irradiation, is output to the feed motor control circuit 67 or 69. However, since the moving speed is the low moving speed when the program starts, the moving speed does not change. Next, in step S23, n, which identifies between X-ray emission and X-ray emission stop, is set to 0 (during X-ray emission) and returns to step S8. Thereafter, in the processes of steps S13 to S17, even if it is determined that all are within the allowable range, if n is 0, it is determined as No in step S18 and returns to step S8. Therefore, the X-ray irradiation, integration time A measurement, and movement at a low speed, which are the processes performed in steps S18 to S23 for the first time, continue as they are.

[0045] Also, in the processes of step S18 to step S23, if there is even one outside the allowable range, the processes of step S24 to step S29 are performed. However, since n for identifying during X-ray emission and during X-ray emission stop is 1 (during X-ray emission stop) at the start of the program, if there is even one outside the allowable range at the start of the program, it is determined as No in step S24 and returns to step S8, so the initial state continues as it is. And, after all are within the allowable range in the processes of step S13 to step S17 and the processes of step S18 to step S23 are performed, since n becomes 0 (during X-ray emission), it is determined as YES in step S24 and the processes of step S25 to step S29 are performed. This process is a process of stopping X-ray irradiation, stopping integration time A measurement, switching to a high moving speed, and setting n to 1 (during X-ray emission stop). Thereafter, in the processes of step S18 to step S23, if there is even one outside the allowable range, it is determined as No in step S24 and returns to step S8, so this state continues. And, when all are within the allowable range in the processes of step S13 to step S17, as described above, in the processes of step S18 to step S23, X-ray irradiation, integration time A measurement, and switching to a low moving speed occur. In this way, in the processes of step S13 to step S17, depending on whether the irradiation point position on the captured image, the light receiving point position on the captured image, and the area of the irradiation point and the light receiving point are all within the allowable range, switching between X-ray irradiation, integration time A measurement, and low-speed movement and X-ray irradiation stop, integration time A measurement stop, and high-speed movement is performed. Note that, as described above, it is possible to select whether to include the switching of the light receiving point position, the area of the irradiation point and the light receiving point, and the moving speed on the captured image in the X-ray irradiation conditions.

[0046] When visually showing the processes from step S13 to step S29, as shown in the captured images of FIGS. 4 and 5, when the irradiation point P is inside the allowable frame LMP, the light-receiving point P is inside the allowable frame LMR, and there are no large chips at the irradiation point P and the light-receiving point P, the measurement object OB is irradiated with X-rays. And when the irradiation point P is outside the allowable frame LMP, the light-receiving point R is outside the allowable frame LMR, or there are large chips at the irradiation point P and the light-receiving point P, the measurement object OB is not irradiated with X-rays. This means that when the distance between the irradiation point and the imaging surface is outside the allowable range, or the deviation of the X-ray incident angle or the normal of the measurement object OB at the X-ray irradiation point from the reference plane is outside the allowable range, or when the X-ray irradiation point hits a stepped portion, the measurement object OB is not irradiated with X-rays. Thereby, with the distance between the irradiation point and the imaging surface and the X-ray incident angle being substantially constant, the deviation of the normal of the measurement object OB at the X-ray irradiation point from the reference plane being within the allowable range, and the area of the X-ray irradiation point being in a substantially planar state, a diffraction ring is imaged on the imaging plate 15. Note that, to repeat, it is possible to select whether or not to include the conditions of the position of the light-receiving point R and the areas of the irradiation point P and the light-receiving point R.

[0047] As shown in FIGS. 4 and 5, there is a difference in size between the irradiation point P and the light-receiving point R. This difference is due to the difference between the case where the scattered light generated at the irradiation point enters the imaging lens of the camera CA and forms an image in the imager, and the case where the reflected light from the irradiation point enters the imaging lens, is condensed in front of the imager, and then is received after being slightly diffused. Therefore, the sizes of the irradiation point P and the light-receiving point R for each distance between the irradiation point and the imaging surface are stored in the memory of the controller 91. If a set value of the distance between the irradiation point and the imaging surface is input from the input device 92 before the measurement, the controller 91 can identify and detect the position of the bright portion in the captured image as the irradiation point P and the light-receiving point R. When the difference in size between the irradiation point P and the light-receiving point R is small, at the manufacturing stage of the laser emitter 40, the emitted laser light can be slightly diffused or converged from parallel so that a clear difference in size occurs between the irradiation point P and the light-receiving point R.

[0048] Also, as can be understood by assuming a case where the distance between the irradiation point and the imaging surface is reduced in FIGS. 4 and 5, when the distance between the irradiation point and the imaging surface is reduced, the tip of the fixed block 107 approaches the center of the imaging plate 15, and the fixed block 107 obstructs the diffraction X-rays from being received by the imaging plate 15. As a result, a part of the diffraction ring imaged on the imaging plate 15 will be missing. However, if the widths of the laser detection device 30 and the fixed block 107 in the X-axis direction in FIG. 2 are reduced, this missing part is small, so it hardly affects the measurement accuracy of the residual stress and the like obtained as the measurement result.

[0049] When the controller 91 repeats the processes from step S8 to step S29, the object to be measured OB is intermittently irradiated with X-rays, and the integrated time A, which is the X-ray irradiation time, increases in value. When the preset upper limit value is reached, it is determined as YES in step S9 and the process proceeds to step S31. In the processes from step S31 to step S34, the X-ray irradiation, the laser beam irradiation, the output of the shooting signal of the camera CA, and the movement of the stage St stop, and the program ends in step S35. Also, even if the integrated time A does not reach the upper limit value, when the movement distance of the stage St reaches the upper limit value set before the measurement, since |T2 - T1|, which is the difference between the movement position T1 captured in step S4 and the movement position T2 captured in step S10, reaches the upper limit value, it is determined as YES in step S11. In step S30, the display device 93 displays "Measurement impossible", and the process proceeds to step S31. Then, in steps S31 to S34, the same processes as those described above are performed, and the program ends in step S35. Also, during the measurement, if the operator inputs "Measurement stop" from the input device 92, it is determined as YES in step S12 and the process proceeds to step S31. In steps S31 to S34, the same processes as those described above are performed, and the program ends in step S35.

[0050] Controller 91 starts the program of the flow shown in FIG. 7 simultaneously with the program of the flow shown in FIG. 6. The program of the flow shown in FIG. 7 displays on the display device 93 the ratio of the time during which X-ray irradiation has been performed since the start of measurement, the estimated moving distance until the end of X-ray irradiation (the end of imaging of the diffraction ring), and the current moving distance. When the estimated moving distance exceeds the upper limit value of the moving distance, it is a program that displays a warning. Hereinafter, it will be described along the flow shown in FIG. 7. When a measurement start command is input from the input device 92, the controller 91 starts the program at step S51 and sets m, which means the number of times of calculating and determining the numerical values described later, to 1 at step S52. Next, at step S53, the integration time B, which is the measurement time, is reset to 0, and at step S54, the measurement of the integration time B is started and the time is displayed on the display device 93. Next, at step S55, by repeatedly making a NO determination, it waits until the integration time B reaches ΔT. When the integration time B reaches ΔT, it proceeds to step S56, calculates the ratio (integration time A / integration time B) of the time during which X-ray emission is being performed, and displays it on the display device 93. Next, at step S57, the estimated moving distance is calculated by calculating (low moving speed × integration time A + high moving speed × integration time B) and displayed on the display device 93. Next, at step S58, it is determined whether the estimated moving distance exceeds the upper limit value of the moving distance. If it does not exceed, it is determined as YES and proceeds to step S60. If it exceeds, it is determined as NO and at step S59, a warning indicating that the current moving distance exceeds the upper limit value is displayed on the display device 93 and it proceeds to step S60. When the operator confirms that a warning is displayed on the display device 93, the operator selects and performs an appropriate response. The response methods are either to continue the measurement and check whether the ratio of the time during which X-ray emission is being performed improves, or to input "measurement stop" from the input device 92 to stop the measurement. As a result, it becomes possible to stop the measurement earlier than when it is determined as YES at step S11 of the program of the flow in FIG. 6 because the moving distance exceeds the upper limit value and the display device 93 displays "measurement impossible" and the measurement is stopped.

[0051] Next, at step S60, the controller 91 displays on the display device 93 the difference between the moving position T2, which is the current moving distance, and the moving position T1. Next, at step S61, it is determined whether the integration time A has not reached the upper limit value. At step S62, it is determined whether the current moving distance has not reached the upper limit value. At step S63, it is determined that "measurement stop" has not been input. At step S64, m is incremented and the process returns to step S55. Therefore, by the processes from step S56 to step S64, the display device 93 displays the ratio of the time during which X-ray emission is occurring, the estimated moving distance until the end of X-ray irradiation, and the current moving distance. When the estimated moving distance exceeds the upper limit value of the moving distance, a warning is also displayed. When returning to step S55, it waits until the integration time B becomes 2ΔT and then proceeds to step S56. The same processes as described above are performed at steps S56 to S64 and then it returns to step S55. Next, it waits until the integration time B becomes 3ΔT and the same processes as described above are performed. In this way, for ΔT, 2ΔT, 3ΔT ···, each time the integration time B elapses by ΔT, the display device 93 displays the ratio of the time during which X-ray emission is occurring, the estimated moving distance until the end of X-ray irradiation, and the current moving distance. When the estimated moving distance exceeds the upper limit value of the moving distance, a warning is displayed. Then, when the integration time A, which is the X-ray irradiation time, reaches the upper limit value, or the current moving distance |T2 - T1| reaches the upper limit value, or "measurement stop" is input, a YES determination is made in any of steps S61 to S63 and the process proceeds to step S65 and the program ends.

[0052] When the programs of the flows in FIGS. 6 and 7 end, the program for detecting the irradiation point position, the light receiving point position, and the areas of the irradiation point and the light receiving point also ends each time the captured image data is input, and the controller 91 activates another program to continue the measurement. This is the reading of the diffraction ring, the erasure of the diffraction ring, and the calculation of characteristic values such as residual stress when the integration time A reaches the upper limit value and the programs of the flows in FIGS. 6 and 7 end, and the erasure of the diffraction ring when the moving distance reaches the upper limit value and when "measurement stop" is input and the process ends. The operations of the controller 91 and each circuit of the X-ray diffraction measuring apparatus 1 in these steps are the same as those of the X-ray diffraction measurement system shown in Patent Document 2. Then, when the calculation of characteristic values such as residual stress ends, the controller 91 displays on the display device 93 the characteristic values such as residual stress, the measurement conditions such as the distance between the irradiation point and the imaging surface and the X-ray incident angle, and a map based on the diffracted X-ray intensity at each location of the diffraction ring. Further, the data of the irradiation point position on the captured image acquired at regular time intervals may be converted into the distance between the irradiation point and the imaging surface, and the surface profile of the measurement object OB on the line of the planar rocking may be calculated and displayed. When the measurement is completed, the operator removes the measurement object OB from the stage St, places another measurement object OB, and performs the same operation as described above to perform the next measurement.

[0053] When the diffraction ring is imaged while the measurement object OB having a complex surface profile is being planar rocked using the above-described X-ray diffraction measurement system, FIG. 8 shows the location where the X-ray is irradiated. FIG. 8(A) shows the case where there are continuous pits with steps on the surface of the measurement object OB. In this case, in the input from the input device 92 before the measurement, in addition to the position of the irradiation point in the captured image, the conditions of the areas of the irradiation point and the light receiving point are added, and then the X-ray diffraction measurement is started. When this is done, as shown in FIG. 8(A), when the emitted X-ray (visible laser light) hits the stepped portion, large notches occur in the circular shapes of the irradiation point and the light receiving point in the captured image, and since the area changes greatly, the X-ray irradiation is stopped. Also, in the pit portion, the deviation from the set position of the irradiation point position on the captured image becomes large, so the X-ray irradiation remains stopped. Therefore, as shown by M in the figure, the location where the X-ray is irradiated is only the portion of the surface without pits.

[0054] Further, (B) of FIG. 8 shows a case where there are continuous portions with a triangular cross-sectional shape on the surface, such as bolts and screws. In this case, in the input from the input device 92 before measurement, in addition to the position of the irradiation point in the captured image, the X-ray diffraction measurement is started after adding the condition of the position of the light-receiving point. By doing so, as shown by M in (B) of FIG. 8, in a part of the surface, the deviation from the set position of the irradiation point in the captured image is within the allowable range, and the position of the light-receiving point is within the set range, so X-rays are irradiated. Even on the right slope of the triangular cross-sectional shape, there are portions where the deviation from the set position of the irradiation point is within the allowable range, but since the reflected light of the laser beam travels in completely different directions, no light-receiving point appears in the captured image and X-rays are not irradiated. Thus, even for a measurement object OB with a complex surface profile, if the conditions are set appropriately, the distance between the irradiation point and the imaging surface and the X-ray incident angle are approximately the set values, the normal line of the portion of the X-ray irradiation point on the measurement object OB to the reference plane is substantially included, and X-rays can be irradiated and the diffraction ring can be imaged only when most of the area of the X-ray irradiation point is flat. In both (A) and (B) of FIG. 8, when X-rays are irradiated, by reducing the moving speed of the planar rocking and increasing the moving speed of the planar rocking when the X-ray irradiation is stopped, the time until the diffraction ring imaging is completed can be shortened, and the X-ray diffraction measurement can be performed more efficiently.

[0055] As can be understood from the above description, in the above embodiment, an X-ray tube 10 that emits X-rays toward a target measurement object OB, and X-ray emission means including through holes 26a, 48b, 27b, 27a1, 18a, etc.; when the measurement object OB is irradiated with X-rays by the X-ray emission means, diffracted X-rays generated by the measurement object OB are received by an imaging plate 15 that intersects perpendicularly to the optical axis of the X-rays emitted by the X-ray emission means, and diffraction ring imaging means for imaging a diffraction ring that is an image of the diffracted X-rays on the imaging plate 15; an X-ray diffraction measurement apparatus 1 including a housing 50 in which the X-ray emission means and the diffraction ring imaging means are disposed inside; and a stage moving apparatus 60 for relatively moving the measurement object OB with respect to the X-ray diffraction measurement apparatus 1 in a direction substantially parallel to the surface of the measurement object OB. In the X-ray diffraction measurement system, a laser emitter 40 that emits a visible laser beam parallel to the optical axis equal to the optical axis of the emitted X-rays, which are the X-rays emitted toward the measurement object OB, the laser emitter 40 including a half mirror 49 that allows the emitted X-rays to pass through on the optical path of the emitted X-rays and reflects the visible laser beam; a imaging lens for imaging an image of a region including the irradiation point of the laser beam generated when the laser emitter 40 irradiates the visible laser beam, and an imager disposed at a location where the image is formed by the imaging lens and outputting an imaging signal representing the imaged image; image creation means including a sensor signal extraction circuit 88 for creating a photographed image from the imaging signal output by the imager of the camera CA and a program in a controller 91; when moving the measurement object OB by the stage moving apparatus 60 and emitting X-rays by the X-ray emission means and visible laser light by the laser emitter 40, detecting the irradiation point position of the laser beam in the photographed image created by the image creation means, and only when the deviation of the detected irradiation point position of the laser beam from the irradiation point position of the laser beam in the photographed image is within the allowable range when the distance from the X-ray irradiation point formed on the measurement object OB by the emitted X-rays to the imaging plate 15 is a set value, a control program in the controller 91 for causing the X-ray emission means to emit X-rays is provided.

[0056] According to this, when the object OB to be measured is irradiated with X-rays by the X-ray emitting means, the laser emitter 40 can irradiate parallel visible laser light on the same optical axis, and regardless of the distance between the irradiation point and the imaging surface, the irradiation point of the X-rays can be recognized as the irradiation point of the laser light. Then, when the irradiation point of the laser light is photographed by the camera CA and the imaging means creates a photographed image of the camera CA, the irradiation point of the laser light in the photographed image occurs at different positions depending on the distance between the irradiation point and the imaging surface. Therefore, when the object OB to be measured is moved by the stage moving device 60, the object OB to be measured is irradiated with X-rays by the X-ray emitting means, and when the diffraction ring is imaged on the imaging plate 15 by the diffraction ring imaging means (that is, when the diffraction ring is imaged while performing planar rocking), the laser emitter 40 irradiates visible laser light, and according to the control program in the controller 91, when the deviation from the irradiation point position of the laser light in the photographed image to the irradiation point position of the laser light in the photographed image when the distance between the irradiation point and the imaging surface is the set value is within the allowable range, if the X-ray emitting means emits X-rays, the diffraction ring can be imaged in a state where the distance between the irradiation point and the imaging surface is substantially constant. And the control program in the controller 91 is installed in the computer device, and in terms of hardware, there is no need for mechanisms and devices other than the X-ray diffraction measuring device 1 and the stage moving device 60 that moves the object OB to be measured, so the enlargement of the device and the cost increase can be suppressed.

[0057] In the above embodiment, the control program in the controller 91 adjusts the posture of the housing 50 with respect to the measurement object OB so that in the captured image created by the image creation means composed of the sensor signal extraction circuit 88 and the program in the controller 91, a light receiving point is generated at a point where the reflected light of the visible laser light on the measurement object OB is condensed by the imaging lens and received by the image sensor. When the measurement object OB is moved by the stage moving device 60 and X-rays are emitted by the X-ray emitting means and visible laser light is emitted by the laser emitter 40, the position of the light receiving point in the captured image is detected. Only when the deviation of the position of the irradiation point of the visible light is within the allowable range and the position of the light receiving point is within the preset range, the X-ray emitting means is made to emit X-rays.

[0058] According to this, in addition to the irradiation point - imaging surface distance being approximately the set value, the X-ray incident angle being approximately the set value, and X-rays being irradiated to capture the diffraction ring only when the normal line at the location of the X-ray irradiation point on the measurement object OB on the reference plane is substantially included. Even when there are continuous irregularities at short intervals on the surface of the measurement object OB, accurate measurement can be performed.

[0059] In the above embodiment, the control program in the controller 91 makes the X-ray emitting means emit X-rays only when the deviation of the position of the irradiation point of the laser light in the captured image is within the allowable range, the position of the light receiving point is within the preset range, and the deviation from the preset area in the area of the irradiation point and the area of the light receiving point in the captured image is within the allowable range.

[0060] According to this, in the case where there are continuous irregularities with steps on the surface of the measurement object OB, such as the measurement object OB having a large number of pits, when the X-ray irradiation point hits the location of the step of the irregularity, the X-ray irradiation is stopped. Therefore, in most areas of the X-ray irradiation point, the irradiation point - imaging surface distance and the X-ray incident angle are approximately the set values, and X-rays can be irradiated to capture the diffraction ring only when the normal line at the location of the X-ray irradiation point on the measurement object OB on the reference plane is substantially included, and accurate measurement can be performed.

[0061] Further, in the above-described embodiment, when the control program in the controller 91 causes the X-ray emitting means to emit X-rays, the moving speed of the stage moving device 60 is decreased, and when the control program in the controller 91 stops the emission of X-rays from the X-ray emitting means, the moving speed of the stage moving device 60 is increased. The moving control means includes a control program in the controller 91 and feed motor control circuits 67 and 69.

[0062] According to this, even when there are continuous irregularities on the surface of the measurement object OB at short intervals, the time during which X-rays are emitted can be lengthened, and the time during which X-ray emission is stopped can be shortened. Therefore, the time required to image the diffraction ring can be shortened, and the measurement efficiency can be improved.

[0063] Further, in the above-described embodiment, the time measuring means in the controller 91 that respectively measures the integrated time A, which is the time during which X-rays are emitted by the X-ray emitting means, and the integrated time B, which is the time during which the control program in the controller 91 performs control; a program in the controller 91 that calculates an estimated value of the distance moved by the stage moving device 60 until the integrated time A reaches the upper limit value, using the integrated time A and the integrated time B measured by the time measuring means, the preset upper limit value of the integrated time A, and the preset moving speed of the stage moving device 60; and another program in the controller 91 that compares the estimated value of the distance calculated by the program in the controller 91 with the preset upper limit value of the moving distance by the stage moving device 60 and displays a warning on the display device 93 based on the comparison result.

[0064] According to this, immediately after starting to image the diffraction ring while performing planar rocking, the program in the controller 91 calculates an estimated value of the moving distance, and another program in the controller 91 compares the estimated value of the distance calculated with a preset upper limit value of the moving distance. When the estimated value of the moving distance becomes larger than the upper limit value of the moving distance, a warning can be displayed on the display device 93. That is, when it is estimated that due to reasons such as a large degree of unevenness on the surface of the measurement object OB, the time of X-ray emission is shorter than the time of emission stop, and the distance rocked in the plane before the imaging of the diffraction ring is completed exceeds the upper limit value such as the size of the measurement object OB, a warning can be displayed on the display device 93 immediately after starting the measurement. Therefore, if the operator aborts the measurement, it is possible to avoid wasting extra time in the measurement.

[0065] Furthermore, in implementing the present invention, it is not limited to the above-described embodiment, and various modifications are possible without departing from the object of the present invention.

[0066] The X-ray diffraction measurement apparatus 1 in the above-described embodiment changes the moving position of the camera CA according to the irradiation point - imaging surface distance and the set value of the X-ray incident angle, like the X-ray diffraction measurement apparatus shown in Patent Document 2 of the prior art documents. If visible laser light is irradiated as set and the normal line at the location of the X-ray irradiation point on the measurement object OB is included in the reference plane, an irradiation point and a light receiving point of the laser light are generated in the captured image. That is, the X-ray diffraction measurement apparatus 1 is configured to be able to perform measurement by arbitrarily setting the irradiation point - imaging surface distance and the X-ray incident angle. However, even in a case where, like the X-ray diffraction measurement apparatus shown in Patent Document 2 of the prior art documents, the irradiation point - imaging surface distance and the X-ray incident angle of the X-ray diffraction measurement apparatus 1 generate an irradiation point and a light receiving point of the laser light only when they are reference values or a determined combination, it is possible to implement the present invention. In that case, the irradiation point - imaging surface distance and the X-ray incident angle may be set only to the reference values, or the position and area of the light receiving point in the captured image may not be included in the conditions.

[0067] In the above-described embodiment, the camera CA is attached to the fixed block 107 together with the laser detection device 30, and the fixed block 107 is moved in the radial direction of the imaging plate 15 by the moving mechanism 100, so that the moving position of the camera CA is changed. However, as long as the camera CA moves such that the distance from the optical axis of the emitted X-rays changes, the moving mechanism of the camera CA can be of any type. For example, as shown in the modification of Patent Document 2, a moving mechanism for only the camera CA may be provided.

[0068] In the above-described embodiment, the conditions for X-ray irradiation in diffraction ring imaging are the irradiation point position in the captured image, the light receiving point position in the captured image, and the areas of the irradiation point and the light receiving point in the captured image, and it is possible to select whether to include the conditions other than the irradiation point position in the captured image. However, if the measurement object OB is limited, these conditions may be fixed. Also, it is possible to select whether to change the speed of the planar swing during X-ray irradiation and during the stop of X-ray irradiation, but this condition may also be fixed. In the above-described embodiment, the areas of the irradiation point and the light receiving point in the captured image are used, but the area of either one may be used.

[0069] In the above-described embodiment, the controller 91 calculates the estimated moving distance according to the program of the flow in FIG. 7, and when this value is greater than the upper limit value of the moving distance, a warning display is performed on the display device 93. However, various methods can be adopted for the countermeasure method when the value is greater than the upper limit value of the moving distance. For example, when the estimated moving distance is greater than the upper limit value of the moving distance for a preset time or more, the measurement may be automatically stopped, or when it is determined from the change curve of the estimated moving distance with respect to time that there is no possibility that the estimated moving distance will fall below the upper limit value of the moving distance, the measurement may be automatically stopped. Also, an alarm sound may be generated instead of or in addition to the warning display on the display device 93.

[0070] Also, in the above embodiment, the operator inputs the intended irradiation point - imaging surface distance and X-ray incident angle from the input device 92. However, if these values are stored in the memory of the controller 91, the input method can be any one. For example, the values stored in the memory in advance may be called, or the input may be made through a network line. Alternatively, when information such as the material of the measurement object OB is input, the program installed in the controller 91 may select or calculate the optimal irradiation point - imaging surface distance and X-ray incident angle and store them.

[0071] Also, in the above embodiment, the laser emitter 40 emits visible parallel laser light on the same optical axis as the emitted X-ray. However, as long as visible parallel light can be emitted on the same optical axis as the emitted X-ray, the emitted light does not have to be laser light. For example, it may be light from an SLD (superluminescent diode) light source, or LED light may be made parallel and emitted.

[0072] In the above-described embodiment, the X-ray diffraction measurement apparatus 1 is configured to image the diffraction rings on the imaging plate 15 and detect the shape of the diffraction rings by laser irradiation from the laser detection apparatus 30 and light intensity detection. However, the present invention can be realized by any X-ray diffraction measurement apparatus that can image the diffraction rings and detect the shape of the imaged diffraction rings. For example, as in Patent Document 3, an X-ray diffraction measurement apparatus including a solid-state imaging device having a plane with the same area as the imaging plate 15, and detecting the intensity distribution of diffracted X-rays in the diffraction rings based on the electrical signals output from each pixel of the solid-state imaging device during X-ray irradiation from the X-ray tube 10 can also realize the present invention. Further, an X-ray diffraction measurement apparatus that scans while detecting the position with a solid-state imaging device of a minute size and detects the intensity distribution of diffracted X-rays in the diffraction rings from the electrical signals output from each pixel of the solid-state imaging device and the scanning position of the solid-state imaging device can also realize the present invention. Also, the present invention can be realized by an X-ray diffraction measurement apparatus using a scintillation counter that detects fluorescence emitted from a scintillator with a photomultiplier tube (PMT) instead of a solid-state imaging device. Note that the phrase "imaging the diffraction rings" described in the claims also includes cases where the intensity of diffracted X-rays at each position on the plane where the diffraction rings are formed is detected, such as with a solid-state imaging device or a scintillation counter.

[0073] In the above-described embodiment, the X-ray diffraction measurement apparatus 1 is configured to image the diffraction rings and detect the shape of the imaged diffraction rings. However, the present invention can also be realized by an X-ray diffraction measurement apparatus that only images the diffraction rings on the imaging plate 15. In the case of such an apparatus, the reading of the diffraction rings is performed by removing the imaging plate 15 or the table 16 from the X-ray diffraction measurement apparatus 1 and using another apparatus.

[0074] In the above-described embodiment, the planar rocking is performed by changing the XY-direction position of the measurement object OB with respect to the X-ray diffractometer 1 by the stage moving device 60. However, alternatively, the stage moving device 60 may be eliminated, and a device for moving the X-ray diffractometer 1 in the XY direction may be provided, and the XY-direction position of the measurement object OB may be changed with respect to the X-ray diffractometer 1 by this device.

Explanation of Signs

[0075] 1…X-ray diffractometer, 10…X-ray tube, 11…exit port, 15…imaging plate, 15a, 16a, 17a, 18a, 21a, 26a, 27a1, 27b, 28a…through hole, 16…table, 17…protrusion, 18…fixture, 26…plate-like plate, 27…spindle motor, 28…passage member, 30…laser detection device, 40…laser emitter, 41…frame body, 42…laser light source, 43…disc-shaped block, 44…cylindrical block, 45…collimating lens, 46…lens frame body, 47-1, 47-2…belt, 48…triangular block, 49…half mirror, 50…housing, 50a…first bottom wall, 50c…second bottom wall, 50b…front wall, connecting wall…50d, 50e…rear wall, 50f…upper wall, upper inclined wall…50g, 50h…bottom inclined wall, 50c1…circular hole, 50h1…long hole, 51…tip of the arm-type moving device, 60…stage moving device, 61…frame body, 62…feed motor, 63…screw rod, 64…bearing portion, 65…frame body, 66…feed motor, 90…computer device, 91…controller, 92…input device, 93…display device, 95…high voltage power supply, 100…moving mechanism, 101…moving stage, 102…feed motor, 103…screw rod, 104…bearing portion, 105…guide, 106…connecting block, 107…fixed block, 108…protrusion, 109, 110…block, 111…motor fixing block, 112…block, OB…measurement object, CA…camera, St…stage

Claims

1. an X-ray emitting means for emitting X-rays toward a measurement object to be measured; when the measurement object is irradiated with X-rays by the X-ray emitting means, diffracted X-rays generated by the measurement object are received on an imaging surface that intersects perpendicularly to the optical axis of the X-rays emitted by the X-ray emitting means, and a diffraction ring imaging means for imaging a diffraction ring that is an image of the diffracted X-rays on the imaging surface; an X-ray diffraction measurement system comprising an X-ray diffraction measurement device including a housing in which the X-ray emitting means and the diffraction ring imaging means are disposed inside, and a moving device for relatively moving the measurement object with respect to the X-ray diffraction measurement device in a direction substantially parallel to the surface of the measurement object, a visible light emitting means for emitting visible light having the same optical axis as the optical axis of the emitted X-rays, which are X-rays emitted toward the measurement object, the visible light emitting means including a half mirror that allows the emitted X-rays to pass through and reflects the visible light on the optical path of the emitted X-rays; an imaging lens for imaging an image of a region including an irradiation point of visible light generated when the visible light emitting means irradiates visible light, and a camera including an image sensor disposed at a location where the image is imaged by the imaging lens and outputting an imaging signal representing the imaged image; image creation means for creating a photographed image from the imaging signal output by the image sensor of the camera; the measurement object is moved by the moving device, and when X-rays are emitted by the X-ray emitting means and visible light is emitted by the visible light emitting means, the irradiation point position of the visible light in the photographed image created by the image creation means is detected, and only when the deviation of the detected irradiation point position of the visible light from the irradiation point position of the visible light in the photographed image is within an allowable range when the distance from the X-ray irradiation point formed on the measurement object by the emitted X-rays to the imaging surface is a set value, an X-ray emission control means for causing the X-ray emitting means to emit X-rays. An X-ray diffraction measurement system characterized by comprising:

2. In the X-ray diffraction measurement system according to claim 1, The X-ray emission control means adjusts the posture of the housing with respect to the measurement object so that a light-receiving point, at which the reflected light of the measurement object of the visible light is condensed by the imaging lens and received by the image sensor, occurs in the captured image created by the image creation means. When moving the measurement object by the moving device and emitting X-rays by the X-ray emission means and visible light by the visible light emission means, the position of the light-receiving point in the captured image is detected. In addition to the deviation of the position of the irradiation point of the visible light being within the allowable range, the X-ray emission means emits X-rays only when the position of the light-receiving point is within a preset range. An X-ray diffraction measurement system characterized by this.

3. In the X-ray diffraction measurement system according to claim 2, The X-ray emission control means emits X-rays to the X-ray emission means only when, in addition to the deviation of the position of the irradiation point in the captured image being within the allowable range and the position of the light-receiving point being within a preset range, the deviation from a preset area is within the allowable range in at least one of the area of the irradiation point and the area of the light-receiving point in the captured image. An X-ray diffraction measurement system characterized by this.

4. In the X-ray diffraction measurement system according to any one of claims 1 to 3, A movement control means is provided that reduces the movement speed of the moving device when the X-ray emission control means causes the X-ray emission means to emit X-rays, and increases the movement speed of the moving device when the X-ray emission control means stops the emission of X-rays by the X-ray emission means. An X-ray diffraction measurement system characterized by this.

5. In the X-ray diffraction measurement system according to any one of claims 1 to 4, A time measurement means for integrating and measuring the emission time during which X-rays are emitted by the X-ray emission means and the control time during which the X-ray emission control means performs control, respectively; An estimated movement distance calculation means for calculating an estimated value of the distance moved by the moving device until the emission time reaches the upper limit value, using the emission time and control time measured by the time measurement means, the upper limit value of the preset emission time, and the preset movement speed of the moving device. An X-ray diffraction measurement system comprising: comparison means for comparing an estimated value of the distance calculated by the estimated movement distance calculation means with a preset upper limit value of the movement distance by the moving device, and stopping the measurement when the estimated value is greater than the upper limit value.

Images