Increased load ports on a factory interface having robots moving on a track

Abstract

The factory interface includes a housing, a front surface of the housing having multiple load ports, a robot having an arm and an end effector, and a floor-mounted track within the housing, the robot adapted to move horizontally along the track to multiple positions from which the arm can reach the robot's end effector into a front-opening unified pod mounted on any of the multiple load ports.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to an increased number of load ports on a factory interface having robots moving on a track.

Background Art

[0002] An electronic device manufacturing system can include a plurality of processing chambers disposed around a main frame housing having a transfer chamber, and one or more load lock chambers configured to deliver a substrate into the transfer chamber. These systems can use, for example, a transfer robot that can be housed in the transfer chamber. The transfer robot can be a selectively compliant articulated robot arm (SCARA) robot, etc., and can be adapted to transport substrates between various processing chambers and one or more load lock chambers. For example, the transfer robot can transport substrates from processing chamber to processing chamber, from load lock chamber to processing chamber, and vice versa from processing chamber to load lock chamber.

[0003] The processing of substrates in semiconductor component manufacturing is typically performed with multiple tools, where the substrates are housed in substrate carriers (e.g., front opening unified pods or FOUPs) and moved between the tools. The FOUP can be docked to an EFEM (sometimes called a "factory interface" or FI), which includes a load / unload (or FI) robot that can operate to transfer substrates between the FOUP and one or more load locks of the tool, and thus allow the substrates to pass through and be processed in the processing chamber. The load lock can typically provide a clean environment buffer for the substrates prior to transferring them to a transfer chamber that includes a pressurized vacuum environment. The design of electronic device manufacturing systems typically endeavors to reduce contaminants to which the substrates are exposed.

Summary of the Invention

[0004] Some of the embodiments described herein include a factory interface that includes a housing, a front surface of the housing having a plurality of load ports, a robot having an arm and an end effector, and a track mounted to a floor within the housing. The robot is adapted to move horizontally along the track to a plurality of positions, and the arm can reach from these plurality of positions into a front opening unified pod having the robot's end effector attached to any one of the plurality of load ports.

[0005] Other embodiments described herein include an assembly that includes a robot having an arm and an end effector. The assembly further includes a track that can be attached to the floor within a factory interface, and the robot is slidably attached to the track such that the robot can be horizontally moved along the track to a plurality of positions, and the arm can reach the end effector of the robot from these plurality of positions into a front-opening unified pod attached to any one of a plurality of load ports of the factory interface. The assembly further includes a ball screw assembly having a ball screw shaft coupled to a motor via a timing belt and a nut operatively coupled between the ball screw shaft and the robot. The ball screw assembly moves the robot horizontally along the track.

[0006] At least some embodiments described herein include a method of operating an assembly having a robot slidably attached to a track attached to the floor of a factory interface. The method can include receiving a command to identify a front-opening unified pod (FOUP) attached to a first load port of a plurality of load ports of the factory interface as a destination. The method can further include moving the robot horizontally along the track to one of a plurality of positions, and the arm of the robot reaches the end effector attached to the arm into the FOUP from that position. The method can further include reaching the end effector of the robot's arm into the FOUP through the first load port. The method can further include causing the robot's arm to either pick up a substrate from the FOUP or place the substrate in the FOUP.

[0007] According to these and other embodiments of the present disclosure, many other features are provided. Other features and embodiments of the present disclosure will become more fully apparent from the following detailed description, the claims and the accompanying drawings.

[0008] This disclosure is shown by way of example and not limitation, and like references in the figures of the accompanying drawings indicate like elements. It should be noted that different references to embodiments in the singular or "an" embodiment in this disclosure are not necessarily references to the same embodiment, and such references mean at least one.

Brief Description of the Drawings

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DETAILED DESCRIPTION OF THE INVENTION

[0010] The embodiments described herein relate to systems and methods for an increased number of load ports on a factory interface having a robot moving on a track. For example, existing systems can benefit from improved efficiency and throughput and / or improved process quality within the factory interface (``FI''). The improvement in quality can mean the transfer of substrates between the FI and the load lock without the introduction of an unacceptable number of inclusions, such as particles present in the factory interface or flowing in through gas suction from the manufacturing equipment, airborne molecular contaminants (AMC), and / or volatile organic compounds (VOC). In some embodiments, it is described that the factory interface and corresponding assembly will have at least six load ports in total with the addition of one or two additional load ports, although more than seven load ports are envisioned. Since the factory interface is longer to accommodate at least six load ports, the FI robot can be adapted to move along the track to extend the reach of the FI robot's arm to the farthest load port position from the FI robot.

[0011] The mere use of FI robots introduces operating parts and potential contamination. Adding the movement of FI robots along a track increases the number of moving parts and the potential exposure to lubricants and contaminants. Thus, using modifications to various structures and factory interfaces, such contaminants can be removed at the level of the track and FI robots before they can rise (or circulate) to the level of the substrate (e.g., silicon wafer) being transferred by the robot's end effector, and also before the contaminants can escape into, for example, a front-opening unified pod (FOUP) or load lock. Since the disclosed FI uses gas recirculation, contaminant removal becomes more complex than simply sucking gas from, for example, bottom vents or side vents.

[0012] Accordingly, advantages of the systems and methods realized by some embodiments of the present disclosure include the design of a factory interface using additional load ports, and thus improvements in substrate throughput and / or storage capacity, while also including, but not limited to, the reduction of contaminants generated by robots moving along a track. Other advantages will be apparent to those skilled in the art in the field of factory interface hardware, and the control design will be considered below.

[0013] Figure 1A is a perspective view of an exemplary factory interface 100 according to various embodiments. Figure 1B is a front view of the factory interface of Figure 1A according to various embodiments. Figure 1C is another perspective view of an exemplary factory interface 100 according to various embodiments. In these embodiments, the factory interface 100 (i.e., FI 100) includes a housing having a front 102 (i.e., the front face), a back 104 (i.e., the rear face), and sides 106 (i.e., the side faces). The front 102 of the FI 100 housing can be configured using a set of load ports 110. In some embodiments, the set of load ports 110 includes at least six load ports, three load ports 110A on the left side and three load ports 110B on the right side along the length of the FI 100. However, as contemplated, in other embodiments, the set of load ports 110 is increased such that, for example, it includes four load ports on each of the right and left sides, resulting in a total of eight or more load ports. A FOUP, a side storage pod (SSP), or other substrate container can be attached to any of the set of load ports 110 from which substrates are removed and / or to which substrates are delivered.

[0014] In at least some embodiments, the factory interface 100 includes an FI robot assembly 101 that includes an FI robot 120 and a track 130, with the FI robot 120 slidably mounted on the track 130. In these embodiments, the track 130 is attached (mounted) to the bottom of the factory interface 100. In different embodiments, the bottom of the factory interface 100 is either the bottom frame piece of the FI housing or, if the factory interface 100 does not have a bottom frame piece, the floor of the factory interface 100 (e.g., the factory floor). In these embodiments, the FI robot 120 is slidably mounted on the track 130 and can move horizontally along the track 130 to multiple positions, and the arm of the robot 120 can reach, from these multiple positions, an end effector attached to the arm into a FOUP (or SSP or other substrate container) attached to any one of a set of load ports 110. The track 130 can include one or more rails or guides for restricting the linear movement of the FI robot 120 back and forth, as will be discussed in detail.

[0015] As shown, in some embodiments, track 130 extends along a subset of the set of load ports 110 excluding at least the outermost load port of the set of load ports 110. Thus, track 130 enables the FI robot 120 to move generally horizontally back and forth between any of the load ports disposed in the center of the set of load ports 110. For example, the robot 120 can move along the track 130 until it is positioned at one of a plurality of positions where the arm of the robot 120 can reach the end effector of the robot 120 into a FOUP attached to any of the set of load ports 110. These plurality of positions can exclude at least the outermost two load ports of the set of load ports 110. According to this method, when the FI robot 120 is positioned at the leftmost position (shown in FIGS. 1A - 1C), the arm and end effector of the FI robot 120 can reach into each of the three left - hand load ports 110A. Similarly, when the FI robot 120 is positioned at the rightmost position, the arm and end effector of the FI robot 120 can reach into each of the three right - hand load ports 110B.

[0016] These embodiments can be extended to additional load ports such as four load ports from the center to the left and four load ports from the center to the right, or more. By making the track 130 shorter and restricting it to generally the central load port, these embodiments minimize the length of the track and thus also minimize the contaminants expected to be generated by the track 130. In other embodiments, the track 130 is made longer than shown and extends along the four central load ports, for example, to reach additional load port positions for six, seven, or more load ports.

[0017] In various embodiments, FI 100 includes a gas recirculation system that includes a pressurized plenum 118 (or plenum 118 for simplicity) in the top region of the FI 100 housing. This pressurized plenum 118 can include a fan (or other forced gas source) that initiates and drives the gas flow of the gas recirculation system, and the initiation and driving of the gas flow includes forcing the gas downward through the housing and drawing the gas back through FI 100 to the pressurized plenum 118. By recirculating the gas within the housing, FI 100 avoids continuous gas suction from the manufacturing environment external to FI 100. However, the gas recirculation system, on the other hand, increases the risk of contaminants from the FI robot 120 and the track 130, particularly contaminants from the moving parts that return onto the substrate passing through FI 100 by the FI robot 120, circulating.

[0018] In some embodiments, the gas recirculation system can force gas in the form of ambient air, clean dry air (CDA), nitrogen, or other inert gas downward from the plenum 118 through the height of the FI 100 and recirculate the gas back to the pressurized plenum 118 via a set of return ducts 114 (see also FIG. 3). The set of return ducts 114 can include a return duct 114A inside the factory interface 100, for example, as part of the framework between individual load ports 110 or adjacent to the framework between individual load ports 110. The set of return ducts 114 can further include return ducts 114B at individual inner corners along the height of the housing of the FI 100. Thus, this set of return ducts 114 generally runs from top to bottom, and the fan and gas circulation force the return gas to finally return through the return ducts 114. The plenum 118 can also include a multi-layer filter for filtering out chemicals, organic substances, and particles, which will be considered in more detail with reference to FIG. 3. In various embodiments, the FI 100 includes a drive box 125 that surrounds the track 130 and the FI robot 120, and at least a part of the drive box 125 is part of or integral with the track plenum, which will be considered in detail with reference to FIG. 2A.

[0019] In at least some embodiments, the factory interface 100 further includes a first door 116A attached to a first side of the housing for selectively covering the pressurized plenum 118, and a second door 126A attached to the first side of the housing for selectively covering the space 128 occupied by the robot 120 and the track 130. In at least some embodiments, the factory interface 100 further includes a third door 116B attached to a second side of the housing for selectively covering the pressurized plenum 118, and a fourth door 126B attached to the second side of the housing for selectively covering the space 128 occupied by the robot 120 and the track 130. The second door 126A and the fourth door 126B can be selectively (e.g., independently) opened, while the first door 116A and the third door 116B are maintained in a closed state, allowing access to the moving parts (e.g., the robot 120, the track 130, and associated components) while the pressurized plenum is protected from moisture and contaminants (e.g., for maintenance or repair). Further, the gas recirculation can continue to function as normal, continuously filtering out particles during maintenance or repair.

[0020] In the illustrated embodiment, FI 100 further includes a controller 150 (FIG. 1A) that can be coupled to the FI robot 120 using a mechanism associated with the track 130 (e.g., guiding horizontal movement) and also using different aspects of the gas recirculation system. Signals from the controller 150 can result in the operation of various components of the FI robot 120 and / or the adjustment of the gas recirculation system. Various sensors, such as position encoders, gas contaminant sensors, etc., can provide an appropriate feedback mechanism for one or more of the components, and this feedback mechanism can also respond to user input. The controller 150 can include an appropriate processor, memory, and electronic components that receive inputs from various sensors and control one or more valves, actuators, vents, etc. to control the environmental conditions within the small loop of FI 100 in which the FI robot 120 operates, as will be described in detail below.

[0021] FIG. 1D is a perspective view of a factory interface 100 according to an embodiment that can remove two intermediate posts 144A and 144B, similar to the FI robot assembly 101 disclosed herein. As contemplated, the factory interface 100 can further include a FOUP 90 (or SSP, etc.) attached to an individual load port of a set of load ports 110. In at least some embodiments, the two intermediate posts 144A and 144B (or another set of posts that define at least some of the plurality of load ports of the set of load ports 110) are removable. Further, the FI robot assembly 101, including at least the robot 120 and the drive box 125, can also be removed (e.g., pulled out and / or lifted by a crane) when the two intermediate posts 144A and 144B are removed. The removability of the FI robot assembly 101 can facilitate cleaning and maintenance or replacement associated with the FI robot assembly 101.

[0022] Figure 2A is a perspective view of an FI robot assembly 201 having an FI robot 120 that moves horizontally on a track 130 according to an embodiment. In some situations, the components of the FI robot assembly 201 can be assembled to an existing factory interface 100. In various embodiments, the FI robot assembly 201 includes an FI robot 120, a drive box 125, a track 130, track plenums 202, and one or more gas lines 212. The FI robot 120 can include a motor assembly 210, an arm assembly 203 (or simply "arm") and an end effector 205. The motor assembly 210 can control the arm assembly 203 to use the end effector 205 to perform reach-and-pick and reach-and-drop operations to move substrates from one location to another, such as from a FOUP (e.g., FOUP 90) to a load lock or from a load lock to a FOUP or a side storage pod.

[0023] The FI robot 120 can further include one or more fans 211 incorporated into the motor assembly 201 to maintain cooling of the moving parts of the motor assembly 201, and the one or more fans 211 themselves can emit some contaminants. Thus, in some embodiments, the one or more fans 211 include chemical and particle filters at the outlets of the one or more fans 211 to provide some local filtering of contaminants generated by the one or more fans 211 and / or to be locally generated against the track plenums 202.

[0024] Referring additionally to FIGS. 2B-2E, FIG. 2B is a perspective view of the track 130 and the drive box 125 of the FI robot assembly 201 of FIG. 2A according to an embodiment. FIG. 2C is a top view of the FI robot assembly 201 of FIG. 2A according to an embodiment. FIG. 2D is a side cross-sectional view of the track 130 and the drive box 125 of the FI robot assembly 201 according to an embodiment. FIG. 2E is an end view of the FI robot assembly of FIG. 2A according to an embodiment.

[0025] As contemplated, the FI robot 120 can move horizontally along the track 130, for example, within a pair of linear guide rails 232. The track 130 can be attached to the bottom of the FI 100 using a slide table 234 (it can be attached, for example, on top of a frame piece or directly to the floor of the FI 100). The slide table 234 can include or be attached to a plurality of sliders 236 that are attached to the pair of linear guide rails 232 and adapted to slide along these linear guide rails 232. Accordingly, each of these plurality of sliders 236 can include a bearing or a set of bearings (not shown) to facilitate sliding.

[0026] In at least some embodiments, the drive box 125 of the track 130 can further include a ball screw assembly 240 (FIGS. 2C-2D) that provides controllable mechanical drive for moving the FI robot 120 along a pair of linear guide rails 232. The ball screw assembly 240 can include, for example, a ball screw shaft 242 coupled to an electric motor 252 via a timing belt 254 (or other pulley). The ball screw assembly 240 can further include a nut 246 operatively coupled between the ball screw shaft 242 and the FI robot 120. In these embodiments, the ball screw assembly 240 moves the FI robot 120 horizontally along the track 130, for example via a set of linear guide rails 232. The drive box 125 can further include a link cable 260 (FIG. 2D) that facilitates movement of the electrical cable with these electric motors 250 and nut 246 when the electric motors 250 and nut 246 are activated to move the FI robot 120 (e.g., by the controller 150). As mentioned, these moving parts contribute to the level of contaminants generated by the FI robot 120 within the FI 100.

[0027] In at least some embodiments, also referring additionally to FIG. 2A, the track plenum 202 is added as an open-topped box for isolating, harvesting, and filtering out particulate matter or other contaminants. The track plenum 202 can be tightly mounted around the track 130 to maximize the track plenum 202's ability to contain and control such particulate matter and other inclusions. In various embodiments, the controller 150 can measure (and monitor) the pressure of the track plenum 202 surrounding the FI robot 120 using, for example, a pressure sensor 216 mounted inside the track plenum 202, and the inside of the track plenum 202 can include the portion disposed within the drive box 125. If the pressure of the track plenum 202 is not sufficient, for example, the controller 150 can use the pressure sensor 216 to detect that the pressure is below a threshold pressure, i.e., not meeting the threshold pressure. When detecting such pressure, the controller 150 can respond by deactivating the robot 120 and a set of load ports 110. Additionally, or alternatively, the controller 150 can warn the operator of an error and / or an operation prevention of the FI 100 to prevent non-contamination-functional operation of the track plenum 202.

[0028] In some embodiments, the gas recirculation system is configured to include one or more gas lines 212 each including a set of gas injectors 213 to generate a gas curtain around the FI robot 120 while the FI robot 120 is moving along the track 130. The one or more gas lines 212 are shown at a particular height as an example, but can be placed higher or lower relative to the robot 120 as long as the arm assembly 203 can still move freely. In various embodiments, the movement of the FI robot 120 itself may disrupt the gas flow and stir up additional particles or contaminants within the small environment of the FI 100. The gas recirculation system can further augment using other such gas injectors within the track plenum 202 that vary the gas curtain around the FI robot 120 according to, for example, a fan, a gas thruster, a gas suction valve, or the position and / or velocity of the FI robot 120 (or a combination of the position, velocity, and direction of the movement of the robot). For example, the controller 150 can receive feedback or otherwise detect a combination of the position, velocity, and / or direction of the movement of the FI robot 120. The controller 150 can then activate a set of gas injectors 213 according to a predetermined algorithm and modify the gas curtain generated by the FI robot 120 while it is moving in a way that counteracts the particle agitation (or liberation) caused by the movement of the FI robot 120, which, for example, minimizes the disruption of the gas and fine particles due to the horizontal movement of the FI robot 120.

[0029] In at least some embodiments, also referring subsequently to FIG. 2A, the FI robot assembly 101 further includes a duct 204 that can be attached between the track plenum and a set of return ducts 114 (FIGS. 1A-1C). There may be ducts 204 attached in generally horizontal and / or vertical positions to coincide with at least one of the set of return ducts 114. The individual ducts 204 can include a filter 206, which in some embodiments can also include a fan for filtering out contaminants locally generated within the track plenum 202.

[0030] In various embodiments, the FI 100 includes an ionization device that generates positive and negative ions disposed near or adjacent to the track 130, and these ions can each discharge charged particles to remove the ability of charged particles to adhere to a surface such as a substrate. This ionization device can optionally be attached to the track 130 or can be disposed adjacent to (or integrated within) one or more gas lines 212. In some embodiments, the ionization device is disposed between 4 and 12 inches above the track 130. The ionization device is typically used at the substrate transfer level, but by disposing the ionization device on or near the track 130, it is possible to promote the inactivation of any particles that may not be filtered out and render them inert.

[0031] Figure 3 is a side view of the factory interface 100 that matches the FOUP 301 at the load port 110, showing a general gas flow according to an embodiment. In various embodiments, the factory interface 100 includes a pressurized plenum 118 at the top and return ducts 114A and 114B of a set of ducts 114 respectively arranged at the corners along the height of the FI housing between the load ports 110, including the gas recirculation system already considered. The large arrows indicate the general movement of the forced gas within the FI 100, including a return gas path through a set of ducts 114 that carry the forced gas back to the pressurized plenum 118. Not all possible return path flows are shown, but only exemplary return gas paths from the side view. In some embodiments, the gas recirculation system also includes a heater, for example within the plenum 118, to further dry the gas and facilitate the rapid filter removal of particles and chemicals. The heater can reduce the humidity within the small environment of the FI 100 after a maintenance event.

[0032] In at least some embodiments, the gas recirculation system further includes a gas filter 312 including at least a top filter 312A and a bottom filter 312B disposed between the plenum 118 and the interior of the FI 100 where the robot 120 moves and operates. The gas filter 312 can filter out various contaminants from the recirculated gas, such as ambient air, CDA, nitrogen, or other inert gases forced from a gas source within the pressurized plenum 118, such as a fan or a gas source unit. For example, the top filter 312A may be a chemical filter for filtering out AMC and VOC. Further, the bottom filter 312B may be a particle filter for filtering out, for example, chemicals or physical particles that are not organic in nature. In some embodiments, the top filter 312A and the bottom filter 312B can be selectively retractable so that only one or both can be used at a time.

[0033] In some embodiments, the controller 150 can selectively disable the return duct and selectively open the plenum 118 and the floor vents to operate in ambient mode instead of recirculation mode. Functioning in ambient mode may be preferred in some substrate processes, and thus the gas recirculation system can be adapted to be selectively switched between recirculation mode and ambient mode.

[0034] FIG. 4 is a top view of an electronics manufacturing system 400 including a factory interface 100 attached to a load lock 402, according to an embodiment. The electronics manufacturing system 400 can further include a transfer chamber 405 attached to the load lock 402 and one or more processing chambers 408 attached to a facet of the transfer chamber 405. The factory interface 100 includes a set of load ports 110, for example a load port chamber including at least six load ports as already discussed. In some embodiments, at least one of the set of load ports 110 is adapted to be a side storage pod (SSP) integrated within the FI 100 and adapted to store substrates. For example, in one embodiment, each of the outermost load ports 110 can be adapted to be an SSP instead.

[0035] It can be understood that the six substrates 401 shown in front of the FI 100 represent six potential FOUPs that can supply and receive substrates when the substrates are processed. A set of additional substrates 411 can represent a substrate storage location, for example where processed substrates can be degassed (e.g., using chlorine or bromine, etc.), cooled, and await transfer back to the FI 100 via the load lock 402. All wafers in a particular storage station can be returned to a particular FOUP. The FI robot is not shown in FIG. 4 for simplicity of illustration.

[0036] FIG. 5 is a flowchart of a method 500 for operating a robot-track assembly according to various embodiments. Method 500 can be implemented by processing logic that can include hardware (e.g., a processing device, circuitry, dedicated logic, programmable logic, microcode, the hardware of a device, an integrated circuit, etc.), software (e.g., instructions that run or execute on a processing device), or a combination thereof. In some embodiments, method 500 is implemented by the controller 150 of FIG. 1A (or a similar processing device). Although a particular sequence or order is shown, the order of the processes can be modified as long as it is not specifically stated otherwise. Accordingly, the illustrated embodiments should be understood as merely examples, and the illustrated processes can be performed in different orders and some processes can be performed simultaneously. Additionally, in various embodiments, one or more processes can be omitted. Thus, not all processes are necessarily required in all embodiments. Other process flows are possible.

[0037] At operation 510, the processing logic receives a command to identify a front-opening unified pod (FOUP) attached to a first load port among a plurality of load ports of a factory interface as a destination.

[0038] In operation 520, the processing logic causes the robot to horizontally move along the track to a position where the end effector attached to the arm can reach one of a plurality of positions where the robot's arm should reach the FOUP along the track. In some embodiments, causing the robot to move horizontally along the track includes controlling a ball screw assembly operatively coupled between a slide table attached to the robot and an electric motor controlled according to the horizontal destination of the robot. In at least some embodiments, the track extends along a subset of a plurality of load ports excluding at least the outermost load port of the plurality of load ports. Thus, in at least some embodiments, causing the robot to move horizontally includes causing the robot to move to the outermost load port of the subset of the plurality of load ports before causing the end effector on the robot's arm to reach into one of the outermost load ports of the plurality of load ports.

[0039] In operation 530, the processing logic orients the robot's arm so that the end effector reaches into the FOUP through the first load port.

[0040] In operation 540, the processing logic causes the robot's arm to either pick up a substrate from the FOUP or place the substrate in the FOUP.

[0041] The above description has shown many specific details, such as examples of specific systems, components, methods, etc., in order to provide a good understanding of some embodiments of the present disclosure. However, it will be apparent to those skilled in the art that at least some embodiments of the present disclosure can be practiced without these specific details. In other instances, well-known components or methods are not described in detail or are presented in a simple block diagram format in order to avoid unnecessarily obscuring the present disclosure. Therefore, the specific details shown are merely exemplary. Specific implementations may vary from these exemplary details but are still intended to be within the scope of the present disclosure.

[0042] Throughout this specification, references to "one embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the term "or" is intended to mean an inclusive "or" rather than an exclusive "or". When the terms "about" or "substantially" are used in this specification, it is intended that their use means that the presented nominal value is accurate within ±10%.

[0043] The operations of the methods described in this specification are shown and described in a particular order, but the order of the operations of each individual method can be changed, and thus the specific operations can be performed in the reverse order so that at least some of the specific operations can be performed simultaneously with other operations. In another embodiment, it is also possible to perform the instructions or sub-operations of completely different operations in an intermittent and / or alternating manner.

[0044] It is understood that the above description is intended as illustrative and not as restrictive. Many other embodiments will be apparent to those skilled in the art upon reading and understanding the above description. Accordingly, the scope of the present disclosure is to be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Claims

1. A factory interface, comprising a housing, a front surface of the housing having a plurality of load ports, wherein the plurality of load ports comprises at least six load ports, a robot having an arm and an end effector, a track mounted on a floor within the housing, the robot being adapted to move horizontally along the track to a plurality of positions, the arm being able to reach the end effector of the robot from the plurality of positions into a front-opening unified pod attached to any one of the plurality of load ports, the plurality of positions excluding at least the two outermost load ports of the at least six load ports, and the track comprising a factory interface.

2. The factory interface according to claim 1, wherein the track extends along a subset of the plurality of load ports excluding at least the two outermost load ports of the plurality of load ports.

3. The factory interface according to claim 1, wherein the front surface comprises a pair of removable posts, and the robot and the track can be removed through a space in the housing opened by removing the pair of posts.

4. A gas recirculation system, a track plenum surrounding the track, and a duct attached between the track plenum and a return duct of the gas recirculation system further comprising the factory interface according to claim 1.

5. The factory interface according to claim 4, further comprising at least one of a fan or a filter integrated in the duct for filtering out contaminants locally generated with respect to the track plenum.

6. a pressure sensor for measuring the pressure inside the track plenum, a controller coupled to the robot, the plurality of load ports, and the pressure sensor, and further comprising, the controller using the pressure sensor to detect that the pressure in the track plenum does not meet a threshold pressure, and deactivating the robot and the plurality of load ports in response to the detection of the pressure, The factory interface according to claim 4.

7. A set of gas injectors arranged adjacent to the robot, A controller coupled to the robot and the set of gas injectors further comprising, wherein the controller detects a combination of the position, speed, and direction of movement of the robot along the track, operates the set of gas injectors to modify a gas curtain generated by the robot during operation in a manner that counteracts particle agitation due to the movement of the robot. The factory interface according to claim 1.

8. A pressurized plenum including a forced gas source disposed at the top of the housing for forcing gas downward through the housing, the forced gas being clean dry air, an inert gas, or a combination thereof, and A set of return ducts disposed at corners along the height of the housing between the plurality of load ports for carrying the forced gas back to the pressurized plenum The factory interface according to claim 1, further comprising a gas recirculation system.

9. A first door attached to a side of the housing for selectively covering the pressurized plenum, and A second door attached to the side of the housing for selectively covering the space occupied by the robot and the track The factory interface according to claim 8, further comprising.

10. An assembly comprising A robot having an arm and an end effector, A track that can be attached to a floor within a factory interface, the robot being slidably attached to the track to move horizontally along the track to a plurality of positions, the arm being able to reach the end effector of the robot from the plurality of positions into a front-opening unified pod attached to any one of at least six load ports of the factory interface, the plurality of positions excluding at least the outermost two of the at least six load ports, and A ball screw assembly comprising A ball screw shaft coupled to an electric motor via a timing belt, and A nut operatively coupled between the ball screw shaft and the robot A ball screw assembly that includes and horizontally moves the robot along the track An assembly that includes.

11. A pair of linear guide rails attached to the floor of the track, A slide table that includes a plurality of sliders attached to the pair of linear guide rails and adapted to slide along the pair of linear guide rails, and the nut is attached to the slide table The assembly according to claim 10, further comprising.

12. The electric motor, A drive box that includes a link cable that moves an electric cable attached to the electric motor together with the electric motor and the nut The assembly according to claim 10, further comprising.

13. The assembly according to claim 10, wherein the robot further includes a chemical substance and a particle filter at an outlet of a fan of the robot.

14. A track plenum that surrounds and pressurizes the track, A duct that can be attached between the track plenum and a return duct of a gas recirculation system The assembly according to claim 10, further comprising.

15. The assembly according to claim 14, further comprising at least one of a fan or a filter integrated in the duct to filter out contaminants locally generated with respect to the track plenum.

16. A pressure sensor for measuring the pressure inside the track plenum, A controller coupled to the robot, the plurality of load ports, and the pressure sensor Further comprising, wherein the controller Uses the pressure sensor to detect that the pressure in the track plenum does not meet a threshold pressure, In response to the detection of the pressure, deactivates the robot and the plurality of load ports The assembly according to claim 14.

17. A set of gas injectors arranged adjacent to the robot, A controller coupled to the robot and the set of gas injectors Further comprising, wherein the controller Detects a combination of the position, speed, and direction of the movement of the robot along the track, Operates the set of gas injectors to correct a gas curtain generated by the robot during operation in a manner that counteracts particle agitation due to the movement of the robot. The assembly according to claim 10. **Claim 18** A method of operating an assembly comprising a robot slidably attached to a track mounted on a floor of a factory interface, the method comprising: Receiving a command identifying, as a destination, a front-opening unified pod (FOUP) attached to a first load port of at least six of a plurality of load ports of the factory interface; Moving the robot horizontally along the track to one of a plurality of positions, such that an arm of the robot reaches, from the position, into the FOUP, an end effector attached to the arm, and the track extends along a subset of the plurality of load ports excluding at least the two outermost load ports of the plurality of load ports; Reaching the end effector of the robot's arm into the FOUP through the first load port; Causing the robot's arm to either pick up a substrate from the FOUP or place the substrate in the FOUP. A method comprising the above. **Claim 19** The method according to claim 18, wherein moving the robot horizontally along the track comprises controlling a ball screw assembly operatively coupled between a slide table attached to the robot and a motor controlled according to a horizontal destination of the robot. **Claim 20** The method according to claim 18, wherein moving the robot horizontally comprises moving the robot to the outermost load port of the subset of the plurality of load ports before reaching the end effector of the robot's arm into one of the at least two outermost load ports of the plurality of load ports.

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