Processing device

Abstract

To provide a processing device capable of efficiently confirming and setting a function to be executed on the basis of a processing condition from among a plurality of functions that can be executed.SOLUTION: A processing device includes a holding table that holds a workpiece, a machining unit 20 that process the workpiece held on the holding table, a control unit 40 that drives the processing unit 20, and a display unit 31 that displays information on the processing, the control unit 40 includes a processing condition storage unit 411 that stores processing condition data 500 of the processing device, and a display control unit 421 that displays a processing condition screen related to the processing condition data 500 on the display unit 31, and the display control unit 421 causes the processing condition screen to display a function object capable of identifying a function to be executed by the processing device on the basis of the processing condition data 500.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a processing apparatus.

Background Art

[0002] In processing apparatuses such as semiconductor processing apparatuses, the functions that each unit can perform differ depending on the apparatus. When the device to be processed changes, the operations and order of each unit performed during processing also change. For example, Patent Document 1 discloses that a series of operation items that require an operator's setting operation from the start to the end of processing of a workpiece are classified by category, and are tabulated and displayed in chronological order in the order in which the setting operations are required.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In conventional processing apparatuses, since there are a plurality of screens for setting the functions that each unit can perform, it is difficult for an operator to confirm the functions installed in the processing apparatus being operated. In addition, since the screens for setting processing conditions are also complex and span a plurality of screens, it is difficult to imagine whether the processing apparatus performs processing in the correct operation and order under the set processing conditions.

[0005] The present invention has been made in view of the above, and an object thereof is to provide a processing apparatus capable of efficiently confirming and setting functions to be implemented based on processing conditions among a plurality of implementable functions.

Means for Solving the Problems

[0006] In order to solve the above-described problems and achieve the object, a processing apparatus according to the present invention includes a holding table for holding a workpiece, a processing unit for processing the workpiece held by the holding table, a control unit for driving the processing unit, and a display unit for displaying information related to processing. The control unit includes a processing condition storage unit that stores processing condition data, and a display control unit that causes the display unit to display a processing condition screen related to the processing condition data. The display control unit is characterized in that it causes the processing condition screen to display a function object that can identify a function to be executed by the processing apparatus based on the processing condition data. associated with the order in which a function, which is set to be performed or not performed from the start of processing to the end of processing, is performed The processing condition data is a plurality of stored and, among the plurality of machining condition data, at least some of the machining condition data are set to perform functions that are different from each other in a processing condition storage unit, and causes the display unit to display a processing condition screen related to the processing condition data. system It is provided with a display control unit, this system and the display control unit causes the processing condition screen to display a function object that can identify a function to be executed by the processing apparatus based on the processing condition data. from the start of processing to the end of processing for each of the plurality of machining condition data The function object is all of characterized in that it is displayed on the processing condition screen.

[0007] In the processing apparatus, this system the display control unit may display on the processing condition screen the function object of the function to be executed by the processing apparatus based on the processing condition data and a second function object of a function not to be executed in different display modes.

[0008] In the processing apparatus, this system the display control unit may display on the processing condition screen the function objects representing the functions to be executed by the processing apparatus based on the processing condition data arranged in the order of execution.

[0009] In the processing apparatus, the processing condition screen includes a screen on which the functions to be executed and the order of execution of the functions can be changed. In the processing condition screen, when the second function object of the function not to be executed is moved adjacent to the function object to be executed, the processing condition screen may further include a changing unit that changes the function not to be executed to a function to be executed. In the processing apparatus, when the function object is selected, the control unit may cause the display unit to display a detailed setting screen showing detailed conditions corresponding to the selected function object.

Advantages of the Invention

[0010] The processing apparatus of the present application has an effect that among a plurality of executable functions, the functions to be executed based on the processing conditions can be efficiently confirmed and set.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

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Figure 8

Figure 9

Modes for Carrying Out the Invention

[0012] Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. In addition, the constituent elements described below include those that can be easily assumed by those skilled in the art and substantially the same ones. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention. In the following embodiments, the same parts are denoted by the same reference numerals, and duplicate explanations are omitted.

[0013] In the embodiments described below, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. One direction in the horizontal plane is defined as the X-axis direction, a direction orthogonal to the X-axis direction in the horizontal plane is defined as the Y-axis direction, and a direction orthogonal to each of the X-axis direction and the Y-axis direction is defined as the Z-axis direction. The XY plane including the X-axis and the Y-axis is parallel to the horizontal plane. The Z-axis direction orthogonal to the XY plane is the vertical direction.

[0014] 〔Embodiment〕 A processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the processing apparatus according to the embodiment. FIG. 2 is a diagram schematically showing an example of the functional configuration of the processing apparatus according to the embodiment.

[0015] As shown in FIG. 1, the processing apparatus 1 according to the embodiment includes a main body 2 which is a box-shaped housing. The processing apparatus 1 includes a holding table 10, a processing unit 20, a touch panel 30, and a control unit 40. The control unit 40 is electrically connected to the holding table 10, the processing unit 20, and the touch panel 30.

[0016] The workpiece 100 to be processed by the processing apparatus 1 is, for example, a disk-shaped semiconductor wafer or an optical device wafer having a substrate 101 made of silicon, sapphire, gallium arsenide, etc. The workpiece 100 is configured by supporting the substrate 101 in the opening of an annular frame 102 via an adhesive tape 103.

[0017] The holding table 10 holds the workpiece 100 on the holding surface 11. The holding table 10 communicates with a suction source (not shown), and sucks and holds the workpiece 100 by the negative pressure supplied from the suction source. The holding table 10 is movable along the X-axis direction by an X-axis moving means 22 (to be described later) and is rotatable about the Z-axis by a rotation driving source (not shown). The holding table 10 is, for example, a chuck table.

[0018] In this embodiment, as shown in FIG. 2, the processing apparatus 1 further includes an imaging unit 12, a driving means 14, and a Z-axis moving means 15. The control unit 40 is electrically connected to the imaging unit 12, the driving means 14, and the Z-axis moving means 15.

[0019] As shown in FIGS. 1 and 2, the imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 images the surface of the workpiece 100 held on the holding surface of the holding table 10. The imaging unit 12 is integrated by being attached and supported to a part of the housing for the processing unit 20, and is provided so as to be movable in the Z-axis direction by the Z-axis moving means 15 including a ball screw, a nut, a pulse motor, etc. The imaging unit 12 may include, for example, a light source that irradiates illumination light onto the surface of the workpiece 100 held on the holding surface of the holding table 10.

[0020] The processing unit 20 processes the workpiece 100 held on the holding table 10. The processing unit 20 is, for example, a pair of cutting means, each having a cutting blade. The cutting blades of each of the pair of cutting means face each other in the Y-axis direction and both rotate around the Y-axis. The processing unit 20 performs cutting processing on the workpiece 100 with the rotating cutting blades. The processing unit 20 is movable along the Y-axis direction by the Y-axis moving means 27 and is movable along the Z-axis direction by the Z-axis moving means 15. The Y-axis moving means 27 that relatively moves the imaging unit 12 and the processing unit 20 in the Y-axis direction with respect to the holding surface of the holding table 10 is composed of a ball screw, a nut, a pulse motor, etc., and constitutes the driving means 14 together with the X-axis moving means 22.

[0021] The processing apparatus 1 processes the workpiece 100 held on the holding table 10 by relatively moving the holding table 10 and the processing unit 20 by the X-axis moving means 22, the Y-axis moving means 27, and the Z-axis moving means 15.

[0022] Note that the processing unit 20 included in the processing apparatus 1 is not limited to a cutting unit that cuts a workpiece 100 with a cutting blade. Alternatively, the processing unit 20 may be, for example, a grinding unit that grinds a similar workpiece 100 with a grinding wheel or the like, a polishing unit that polishes a similar workpiece 100 with a polishing pad or the like, a laser processing unit that irradiates a similar workpiece 100 with a laser beam for laser processing, or the like.

[0023] As shown in FIG. 1, the touch panel 30 is installed on the main body 2 with the display surface facing outward. The touch panel 30 is disposed at a location on the main body 2 of the processing apparatus 1 that is easy to view and operate. The touch panel 30 displays an image of the surface of the workpiece 100 captured by the imaging unit 12 and various types of information necessary for the processing operation under the control of the control unit 40, and accepts input operations and the like necessary for the processing operation from the operator. In the present embodiment, the touch panel 30 is an example of a display unit. A panel of an information terminal such as a wearable device, a smartphone, a tablet terminal, or a computer that is connected to the processing apparatus 1 by wire or wirelessly may function as the touch panel 30.

[0024] As shown in FIG. 2, the touch panel 30 includes a display unit 31 that displays various types of information related to the processing apparatus 1, and an input unit 32 that accepts various types of operation inputs related to the processing apparatus 1, such as setting inputs for processing conditions, from the operator. The display unit 31 includes a display device such as a liquid crystal display or an organic EL display. The input unit 32 includes, for example, a touch screen that designates the contact position and coordinates of an object on the display surface of the display device.

[0025] In the present embodiment, a case where the touch panel 30 is an example of an output unit that outputs various types of information will be described, but the present invention is not limited thereto. For example, the output unit of the processing apparatus 1 may be realized by an electronic device such as a speaker or a communication device.

[0026] The control unit 40 includes a storage unit 41 and a control unit 42. In the present embodiment, the case where the control unit 40 is a unit including the storage unit 41 and the control unit 42 will be described, but it is not limited thereto. For example, the control unit 40 may be configured to include only the control unit 42 and not include the storage unit 41. In this case, the control unit 40 may be configured to be electrically connected to a storage device corresponding to the storage unit 41. The storage device includes, for example, a computer and electronic devices external to the processing device 1, and a storage device accessible by the processing device 1 such as another processing device 1.

[0027] The storage unit 41 stores a program for realizing functions such as various processes executed by the control unit 40, and data used for processes by such a program. The storage unit 41 is electrically connected to the control unit 40. The storage unit 41 can be realized by, for example, an HDD (Hard Disk Drive) or a semiconductor memory. The storage unit 41 may also be used as a temporary work area when the control unit 42 included in the control unit 40 executes instructions described in the control program. The storage unit 41 can be a storage device accessible by the control units 40 of computers and electronic devices external to the processing device 1, and other processing devices 1 such as another processing device 1.

[0028] The storage unit 41 has a processing condition storage unit 411. The processing condition storage unit 411 stores a plurality of processing condition data 500 of the processing device 1 and the like. The processing condition data 500 includes, for example, data indicating processing conditions of various workpieces 100, machine settings, and the like. The processing condition data 500 includes, for example, data indicating processing conditions input and set by an operator. The processing condition storage unit 411 can store the processing condition data 500 corresponding from the start of processing preparation to the end of processing in association with the order of execution. The processing condition data 500 includes data such as detailed conditions of functions, and is configured such that it is possible to set whether to execute a function according to the detailed conditions. The processing condition data 500 is stored in the processing condition storage unit 411 so as to be able to identify the relative order between a function and other functions.

[0029] The control unit 42 controls each mechanism (X-axis moving means 22, Y-axis moving means 27, Z-axis moving means 15) that drives the processing device 1. The control unit 42 controls each part of the processing device 1 to realize the processing operation by the processing device 1. The control unit 42 controls each part of the processing device 1 including the holding table 10 and the processing unit 20 according to the processing conditions input and set by, for example, an operator, and realizes the processing operation of the workpiece 100.

[0030] The control unit 42 includes an arithmetic processing device such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The control unit 42 is a computer capable of executing a control program or the like for controlling each of the above-described components according to a series of processing steps performed by the processing device 1 using such devices.

[0031] The control unit 42 controls the overall operation of the processing device 1 based on the processing condition data 500 stored in the processing condition storage unit 411. The control unit 42 controls the operation of the processing device 1 by implementing the functions of the processing conditions indicated by the processing condition data 500. The control unit 42 controls the operation of the processing device 1 from processing preparation to processing completion by sequentially implementing a plurality of functions based on the processing conditions.

[0032] The control unit 42 has the functions of a display control unit 421 and a change unit 422. The control unit 42 realizes the functions, actions, etc. of each part by executing a program.

[0033] The display control unit 421 causes the display unit 31 to display a processing condition screen related to the processing condition data 500. The processing condition screen is, for example, a screen capable of identifying the function to be performed among a plurality of functions that the processing apparatus 1 can perform. The display control unit 421 controls the display unit 31 to display a function object capable of identifying the function that the processing apparatus 1 performs based on the processing condition data 500 on the processing condition screen. The display control unit 421 causes the function object of the function that the processing apparatus 1 performs based on the processing condition data 500 and the second function object of the function that is not performed to be displayed on the processing condition screen in different display modes. The function object and the second function object to be displayed on the processing condition screen include, for example, buttons that can be selected by an operator or the like, display areas on the processing condition screen, graphics, character strings, and the like. The display control unit 421 has a function of creating data of the processing condition screen for displaying the function object based on the setting content of the processing condition data 500. The display control unit 421 has a function of causing the display unit 31 to display an order change screen in which the order of the functions to be performed can be changed. The order change screen is a screen related to the processing condition data 500, similar to the processing condition screen. The order change screen is, for example, a screen that enables changes based on the function object shown on the processing condition screen. That is, the order change screen has the same configuration as the processing condition screen in that it can identify the order of the functions to be performed, and is included in the processing condition screen.

[0034] When the second function object of the function not to be executed is moved adjacent to the function object to be executed on the order change screen (processing condition screen), the change unit 422 changes the function not to be executed to a function to be executed. The change unit 422 changes, according to the operator's operation, the function not to be executed by the processing device 1 to a function to be executed. For example, when the second function object of the function not to be executed is moved between adjacent function objects, the change unit 422 may change the function not to be executed to a function to be executed. When the change unit 422 changes the function not to be executed to a function to be executed, the change unit 422 changes the processing conditions of the processing condition data 500 corresponding to the changed function. The change unit 422 refers to change data, a database, etc. corresponding to the processing conditions to be changed, and changes the processing conditions so that the processing device 1 executes the function. For example, the change unit 422 changes so that the setting of the processing conditions for the processing device 1 to execute the function becomes valid.

[0035] The configuration example of the processing device 1 according to the present embodiment has been described above. Note that the above configuration described with reference to FIGS. 1 and 2 is merely an example, and the configuration of the processing device 1 according to the present embodiment is not limited to such an example. The functional configuration of the processing device 1 according to the present embodiment can be flexibly deformed according to specifications and operations.

[0036] (An example of the processing condition screen) FIG. 3 is a diagram showing an example of a machining condition screen displayed by the machining apparatus 1 according to the embodiment. As shown in FIG. 3, the machining condition screen 600 has a machining condition area 601 and a flow area 602. In the machining condition area 601, information that can identify the machining conditions is displayed. In the flow area 602, information indicating the function object 610 and the arrow object 611 is displayed. The function object 610 is information indicating the function performed by the machining apparatus 1. The function object 610 is displayed when the machining conditions performed by the machining apparatus 1 are set with the machining condition data 500. The arrow object 611 is information indicating the next function object 610 of the function object 610. The arrow object 611 is displayed between adjacent function objects 610. By displaying a plurality of machining conditions and flows by the function object 610, the machining conditions can be easily grasped on the machining condition screen 600.

[0037] In the present embodiment, in the flow area 602, information indicating the second function object 620 is further displayed. The second function object 620 is information indicating a function not performed by the machining apparatus 1 with the machining condition data 500. The second function object 620 is displayed when machining conditions not performed by the machining apparatus 1 are set with the machining condition data 500.

[0038] In an example shown in FIG. 3, the function object 610 and the second function object 620 indicate functions that the processing apparatus 1 such as ALI, SETUP, CUT, ABC, NSD, PB, CLEAN, CCS, AE, KerfCheck, etc. can perform under processing conditions. ALI is a function of alignment, that is, the processing apparatus 1 images the workpiece 100 held on the holding table 10 and detects the division planned line. SETUP is a function in which the processing apparatus 1 inserts a cutting blade between a light projecting unit having a light emitting element and a light receiving unit having a light receiving element, and measures the wear amount of the cutting blade based on the change in the amount of light received by the light receiving element. CUT is a function in which the processing apparatus 1 performs cutting processing. ABC is a function related to an auto blade changer, a detaching arm for attaching and detaching a blade, and a conveying unit for conveying. NSD is a function of measuring the thickness of the workpiece 100 held on the holding table 10 by a back pressure sensor, and is a function used in precision cutting processing for measuring a plurality of points before processing and determining the cutting amount based on the measurement results. PB is a function of pre-cut, that is, cutting a pre-cut board before cutting the workpiece to make the blade stand out. CLEAN is a function of cleaning the workpiece 100 after processing or cleaning the workpiece 100 before processing. CCS is a function of imaging the cutting marks formed by cutting into a dummy wafer and accurately measuring the outer diameter of the blade of the processing apparatus 1 from the imaged image. AE is a function of measuring vibration by an AE sensor mounted on a mount for fixing the cutting blade of the processing apparatus 1 to a spindle. KerfCheck is a function of imaging the cutting groove of the workpiece 100 and checking the quality and position.

[0039] In an example shown in FIG. 3, the processing condition screen 600 displays information based on the processing condition data 500 corresponding to each of "001", "002", "003", and "004" displayed in the processing condition area 601. The processing condition screen 600 displays information related to the processing condition data 500, for example, in the order in which the processing apparatus 1 uses the processing conditions, the order in which the processing conditions are created, the order specified by the operator, and the like.

[0040] When the processing condition area 601 of the processing condition screen 600 is the processing condition of "001", the flow area 602 indicates that functions such as "ALI", "CUT", "KerfCheck", "SETUP", "CLEAN", "ABC", "NSD", "PB", "CCS", and "AE" can be implemented by the processing apparatus 1. In this case, the processing condition screen 600 displays, in the flow area 602, function objects 610 of "ALI", "CUT", "KerfCheck", "SETUP", and "CLEAN", arrow objects 611 indicating the order of the function objects 610, and second function objects 620 of "ABC", "NSD", "PB", "CCS", and "AE". The processing condition screen 600 displays the function objects 610 and the second function objects 620 in a first display mode and a second display mode different from the first display mode, respectively. The processing condition screen 600 divides the function objects 610 and the second function objects 620 into different display areas and displays them in the flow area 602.

[0041] When the processing condition is "001", the processing apparatus 1 can let the operator recognize that the functions of "ALI", "CUT", "KerfCheck", "SETUP", and "CLEAN" are set to be implemented by the processing condition data 500, and the processing apparatus 1 implements the functions in the order of "ALI", "CUT", "KerfCheck", "SETUP", and "CLEAN". The processing apparatus 1 can let the operator recognize that, among the functions that can be implemented by the processing apparatus 1, the functions of "ABC", "NSD", "PB", "CCS", and "AE" are in processing conditions where the processing apparatus 1 does not implement them.

[0042] Similarly, when the processing condition area 601 of the processing condition screen 600 has a processing condition of "002", the flow area 602 indicates that functions such as "PB", "ALI", "SETUP", "CUT", "KerfCheck", "CLEAN", "NSD", "ABC", "AE", and "CCS" can be implemented. In this case, the processing condition screen 600 displays, in the flow area 602, function objects 610 for "PB", "ALI", "SETUP", "CUT", "KerfCheck", and "CLEAN", arrow objects 611 indicating the order of the function objects 610, and second function objects 620 for "NSD", "ABC", "AE", and "CCS". The processing condition screen 600 displays the function objects 610 in a first display mode and the second function objects 620 in a second display mode, respectively. The processing condition screen 600 separates the function objects 610 and the second function objects 620 into different display areas and displays them in the flow area 602. In an example shown in FIG. 3, the processing condition screen 600 omits the illustration for "003" and "004" in the processing condition area 601.

[0043] In this embodiment, the case where the processing condition screen 600 displays the function objects 610, the arrow objects 611, and the second function objects 620 in the flow area 602 will be described, but it is not limited thereto. For example, the processing condition screen 600 may be configured to display the function objects 610 and the arrow objects 611 without displaying the second function objects 620. For example, the processing condition screen 600 may set the order in which the function objects 610 are arranged, without displaying the arrow objects 611, as the order in which the processing device 1 implements the functions. For example, the processing condition screen 600 may display the function objects 610 and the second function objects 620 arranged in the order in which the processing device 1 can implement them.

[0044] (An example of processing condition data) FIG. 4 is a diagram showing an example of the processing condition data 500 used by the processing apparatus 1 according to the embodiment. As shown in FIG. 4, the processing condition data 500 has a plurality of detailed condition data 510. The detailed condition data 510 is data indicating the detailed conditions of one of the plurality of functions corresponding to the processing conditions. The detailed condition data 510 has, for example, a plurality of setting items and setting fields corresponding to the setting items. The plurality of detailed condition data 510 may be arranged in the order of performing the functions, or may be arranged regardless of the order of performing the functions.

[0045] In the example shown in FIG. 4, the processing condition data 500 indicates the processing conditions that can perform the functions of "ALI", "CUT", "KerfCheck", "SETUP", "CLEAN", and "PB" described above. In this case, the processing condition data 500 has the detailed condition data 510 in the order of alignment data, cut data, kerf check data, setup data, cleaning data, pre-cut data, etc. The processing condition data 500 is set such that, for example, the functions of alignment data, cut data, kerf check data, setup data, and cleaning data are valid and the function of pre-cut data is invalid. In this case, the processing apparatus 1 displays the function object 610 of "ALI", "CUT", "KerfCheck", "SETUP", and "CLEAN", the arrow object 611, and the second function object 620 of "PB" on the processing condition screen 600 based on the processing condition data 500.

[0046] In the present embodiment, the case where the processing condition data 500 has a plurality of detailed condition data 510 will be described, but the present invention is not limited thereto. For example, the processing condition data 500 may be configured such that the plurality of detailed condition data 510 is one data.

[0047] (Example of display control of processing condition screen in processing apparatus) Next, an example of the display control of the processing condition screen 600 executed by the processing apparatus 1 according to the embodiment will be described. FIG. 5 is a flowchart showing an example of a processing procedure related to the display control of the processing apparatus 1 according to the embodiment. FIG. 6 is a diagram showing an example of a detailed setting screen 700 of the processing apparatus 1 according to the embodiment. The processing procedure shown in FIG. 5 is realized by the control unit 42 of the processing apparatus 1 executing a program. The processing procedure shown in FIG. 5 is executed by the control unit 42, for example, when the processing condition screen 600 is to be displayed.

[0048] In the processing procedure shown in FIG. 5, the control unit 42 of the processing apparatus 1 causes the display unit 31 to display the processing condition screen 600 based on the processing condition data 500 (step 1101). For example, the control unit 42 acquires the processing condition data 500 in the storage unit 41, and creates screen data for displaying function objects 610, arrow objects 611, second function objects 620, etc. based on the processing condition data 500 on the processing condition screen 600. Then, the control unit 42 causes the display unit 31 to display the created screen data. As a result, the display unit 31 is in a state of displaying the processing condition screen 600 based on the processing condition data 500. When the processing in step 1101 is completed, the control unit 42 advances the processing to step 1102.

[0049] The control unit 42 determines whether a processing condition has been selected (step 1102). For example, the control unit 42 determines that a processing condition has been selected when it detects a selection operation on the processing condition area 601 in the processing condition screen 600 via the input unit 32. When the control unit 42 determines that a processing condition has been selected (Yes in step 1102), the processing advances to step 1103.

[0050] The control unit 42 causes the display unit 31 to display a detailed setting screen 700 showing the detailed conditions at the beginning of the selected processing conditions (step 1103). For example, the control unit 42 acquires the detailed condition data 510 at the beginning of the processing condition data 500, and creates screen data for displaying the detailed setting screen 700 based on the detailed condition data 510. Then, the control unit 42 causes the display unit 31 to display the screen data. As a result, the display unit 31 is in a state of displaying the detailed setting screen 700 based on the detailed condition data 510.

[0051] For example, as shown in FIG. 6, the detailed setting screen 700 is a screen on which it is possible to confirm and change the setting of detailed conditions corresponding to the functions of the processing conditions. The detailed setting screen 700 has input fields corresponding to the setting items of the detailed conditions. The detailed setting screen 700 has an ENTER button 711 and an EXIT button 712. The ENTER button 711 is a button for registering the data set on the detailed setting screen 700. The EXIT button 712 is a button for ending the display without registering the changed contents of the detailed setting screen 700. The detailed setting screen 700 can allow the operator to change the displayed detailed conditions.

[0052] Returning to FIG. 5, when the process of step 1103 is completed, the control unit 42 advances the process to step 1106, which will be described later.

[0053] Also, when the control unit 42 determines that no processing conditions are selected (No in step 1102), the process advances to step 1104. The control unit 42 determines whether or not the function object 610 is selected (step 1104). For example, the control unit 42 determines that the function object 610 is selected when it detects a selection operation on the function object 610 in the processing condition screen 600 via the input unit 32. When the control unit 42 determines that the function object 610 is not selected (No in step 1104), the process advances to step 1109, which will be described later.

[0054] Also, when the control unit 42 determines that the function object 610 has been selected (Yes in step 1104), the process proceeds to step 1105. The control unit 42 causes the display unit 31 to display a detailed setting screen 700 showing the detailed conditions corresponding to the selected function object 610 (step 1105). For example, the control unit 42 acquires the detailed condition data 510 corresponding to the selected function object 610 from among the plurality of detailed condition data 510 of the processing condition data 500. Then, the control unit 42 creates screen data for displaying the detailed setting screen 700 based on the detailed condition data 510, and causes the display unit 31 to display the screen data. As a result, the display unit 31 is in a state of displaying the detailed setting screen 700 based on the detailed condition data 510 corresponding to the function object 610. When the processing in step 1105 is completed, the control unit 42 proceeds to step 1106.

[0055] The control unit 42 executes the processing while the detailed setting screen 700 is being displayed (step 1106). For example, the processing while being displayed includes, for example, a process of accepting a change operation for the processing condition screen 600, a process of updating the display on the display unit 31 for the changed processing condition screen 600, a process of changing and ending the detailed condition data 510 in response to an operation of the ENTER button 711, a process of ending without changing the detailed condition data 510 in response to an operation of the EXIT button 712, and the like. When the processing while being displayed is completed, the control unit 42 proceeds to step 1107.

[0056] The control unit 42 determines whether the processing condition data 500 has been changed (step 1107). For example, the control unit 42 determines that the processing condition data 500 having the detailed condition data 510 has been changed when it detects a change in the detailed condition data 510 to a function to be executed or a function not to be executed. When the control unit 42 determines that the processing condition data 500 has not been changed (No in step 1107), the process proceeds to step 1109 described later.

[0057] Also, when the control unit 42 determines that the processing condition data 500 has been changed (Yes in step 1107), the process proceeds to step 1108. The control unit 42 causes the display unit 31 to display a processing condition screen 600 based on the changed processing condition data 500 (step 1108). For example, the control unit 42 creates screen data for displaying a function object 610, an arrow object 611, a second function object 620, etc. based on the changed processing condition data 500 on the processing condition screen 600. Then, the control unit 42 causes the display unit 31 to display the created screen data. As a result, the display unit 31 is in a state of displaying the processing condition screen 600 based on the changed processing condition data 500. When the process of step 1108 is completed, the control unit 42 proceeds to step 1109.

[0058] The control unit 42 determines whether to end the display of the processing condition screen 600 (step 1109). For example, the control unit 42 determines to end the display of the processing condition screen 600 when it detects an end operation of the display via the input unit 32 or receives an end instruction of the display. When the control unit 42 determines not to end the display of the processing condition screen 600 (No in step 1109), the process returns to step 1102 which has been described above, and the process continues. Also, when the control unit 42 determines to end the display of the processing condition screen 600 (Yes in step 1109), the process proceeds to step 1110.

[0059] The control unit 42 ends the display of the processing condition screen 600 (step 1110). For example, the control unit 42 controls the display unit 31 to end the display of the processing condition screen 600 being displayed by the display unit 31. When the process of step 1110 is completed, the control unit 42 ends the processing procedure shown in FIG. 5.

[0060] As described above, the processing device 1 can display a function object 610 that can identify the functions to be executed based on the processing condition data 500 on the processing condition screen 600. Thereby, since the processing device 1 can cause the function object 610 to be recognized, it is possible to suppress the situation where, when setting the processing conditions, one searches for processing conditions to set a function that the processing device 1 does not have, or forgets to set a function that should be executed. As a result, by displaying the processing condition screen 600, the processing device 1 can efficiently confirm and set the functions to be executed based on the processing conditions among the plurality of functions that the processing device 1 can execute.

[0061] Further, the processing device 1 can display the function object 610 of the function to be executed based on the processing condition data 500 and the second function object 620 of the function not to be executed on the processing condition screen 600 in different display modes. Thereby, the processing device 1 can display the functions to be executed and the functions not to be executed in a distinguishable manner on the processing condition screen 600. As a result, by displaying the processing condition screen 600, the processing device 1 can intuitively confirm whether the function to be executed is enabled or whether the function not to be executed is disabled.

[0062] Further, the processing device 1 can display the function objects 610 representing the functions to be executed based on the processing condition data 500 in the order of execution on the processing condition screen 600. Thereby, on the processing condition screen 600, the processing device 1 can cause the order in which the function objects 610 are displayed to be recognized as the order in which the processing device 1 executes the functions. As a result, by referring to the order in which the function objects 610 are displayed, the processing device 1 can easily confirm whether the functions are executed in the intended order.

[0063] (Example of changing the function order in the processing device) Next, an example of changing the order of the processing conditions executed by the processing device 1 according to the embodiment will be described. FIG. 7 is a diagram for explaining the order change of the processing device 1 according to the embodiment. FIG. 8 is a diagram for explaining the continuation of the order change shown in FIG. 7.

[0064] As shown in the upper diagram of FIG. 7, the processing device 1 causes the display unit 31 to display an order change screen 800 that can change the order of the functions of the processing conditions. The processing device 1 causes the display unit 31 to display the order change screen 800, for example, in response to an instruction from an operator. The order change screen 800 has a first display area 810 and a second display area 820. The first display area 810 is, for example, an area showing the flow of functions to be performed from the start of processing preparation to the end of processing. The first display area 810 is an area where the function object 610 and the arrow object 611 of the functions performed by the processing device 1 are displayed so as to be movable. The second display area 820 is an area showing disabled functions. The second display area 820 is an area where a second function object 620 showing functions not performed by the processing device 1 under the processing conditions is displayed so as to be movable. The order change screen 800 is a screen that can change the function flow shown by the processing condition screen 600.

[0065] In an example shown in the upper diagram of FIG. 7, based on the processing condition data 500 to be changed, the processing device 1 arranges and displays the function objects 610 in the order of "ALI", "CUT", "KerfCheck", and "CLEAN" as the flow of functions to be performed from the start of processing preparation to the end of processing in the first display area 810. Based on the processing condition data 500 to be changed, the processing device 1 displays the second function objects 620 of two "SETUP", "PB", "NSD", and "AE" as disabled functions in the second display area 820. The function of "SETUP" is, for example, a function that can be performed at any time such as before processing, during processing, and after processing. Therefore, the processing device 1 displays the second function objects 620 in the second display area 820 in a number corresponding to the number of timings at which it can be performed in the flow based on the detailed condition data 510. By displaying a plurality of the second function objects 620 of the disabled functions, the processing device 1 can make the operator recognize that the function can be added a plurality of times during the flow.

[0066] The detailed condition data 510 shown in the lower figure of FIG. 7 indicates the detailed conditions of the second function object 620 of "SETUP". The detailed condition data 510 has setup item 511 for auto setup. Although the setup item 511 for auto setup is set to be automatically set up during cutting, since the execution interval is "0.000", the auto setup function is disabled.

[0067] In the upper figure of FIG. 7, the operator moves the second function object 620 of "SETUP" between the function object 610 of "ALI" and the function object 610 of "CUT" in the first display area 810 in order to enable the disabled setup function. For example, the operator is performing a drag & drop operation on the object to be changed.

[0068] The processing device 1 detects an operation of moving the second function object 620 of "SETUP" to the first display area 810 via the input unit 32. As shown in the upper figure of FIG. 8, the processing device 1 arranges the second function object 620 of "SETUP" between the function object 610 of "ALI" and the function object 610 of "CUT" in the first display area 810 and changes the display of the order change screen 800 to delete it from the second display area 820. The detailed condition data 510 has, for example, change data such as the timing when the function can be implemented, or the change data is associated. The change data has, for example, data such as the method of changing the detailed conditions from valid to invalid, settings. When the second function object 620 is moved to a position where the flow can be added based on the detailed condition data 510, the processing device 1 executes a process for enabling the disabled function.

[0069] The processing device 1 changes the detailed condition data 510 corresponding to the setup function so as to enable the setup function. For example, as shown in the lower figure of FIG. 8, the processing device 1 enables the setup function by changing the timing of performing auto setup to "before cutting" in the auto setup item 511 of the detailed condition data 510.

[0070] As described above, the processing device 1 allows the operator to confirm, via the order change screen 800, the flow of functions to be performed from before processing to the end of processing, and can add functions not to be performed to the flow. As a result, when a desired function is invalid, the processing device 1 can easily enable the function with a simple operation.

[0071] When the processing device 1 detects a predetermined operation on the function object 610 or the second function object 620, it may display, on the display unit 31, a screen showing the detailed condition data 510 of the corresponding function. The processing device 1 allows the operator to confirm the detailed conditions of the function, and when the detailed conditions are modified so that the function becomes valid, it may change the function from invalid to valid and change the display content of the order change screen 800.

[0072] In the present embodiment, the processing device 1 has been described as adding an invalid function to the flow and enabling the function on the order change screen 800, but it is not limited to this. For example, on the order change screen 800, when the function object 610 of the valid function displayed in the first display area 810 is moved to the second display area 820, the processing device 1 can change the function from valid to invalid. In this case, the processing device 1 changes the detailed condition data so that the function becomes invalid. Further, the processing device 1 may replace the order change screen 800 with the above-described processing condition screen 600, and may be configured to add an invalid function to the flow and enable the function on the processing condition screen 600.

[0073] (Example of Display Control of Order Change Screen in Processing Device) Next, an example of the display control of the order change screen 800 executed by the processing device 1 according to the embodiment will be described. FIG. 9 is a flowchart showing an example of the processing procedure related to the display control of the order change screen 800 of the processing device 1 according to the embodiment. The processing procedure shown in FIG. 9 is realized by the control unit 42 of the processing device 1 executing a program. The processing procedure shown in FIG. 9 is executed by the control unit 42, for example, when the order change screen 800 is to be displayed.

[0074] In the processing procedure shown in FIG. 9, the control unit 42 of the processing apparatus 1 causes the display unit 31 to display an order change screen 800 based on the processing condition data 500 (step 1201). For example, the control unit 42 acquires the processing condition data 500 instructed by the operator from the storage unit 41, and creates screen data for displaying a function object 610, an arrow object 611, a second function object 620, etc. based on the processing condition data 500 on the order change screen 800. The screen data is data for displaying the function object 610 and the arrow object 611 in the first display area 810 and the second function object 620 in the second display area 820. Then, the control unit 42 causes the display unit 31 to display the created screen data. As a result, the display unit 31 is in a state of displaying the order change screen 800 based on the processing condition data 500. When the processing of step 1201 is completed, the control unit 42 advances the processing to step 1202.

[0075] The control unit 42 determines whether or not a drag operation on the object has been detected (step 1202). For example, when the control unit 42 detects a drag operation on the second function object 620 or the function object 610 in the order change screen 800 via the input unit 32, it determines that a drag operation on the object has been detected. When the control unit 42 determines that no drag operation on the object has been detected (No in step 1202), it advances the processing to step 1207 described later. When the control unit 42 determines that a drag operation on the object has been detected (Yes in step 1202), it advances the processing to step 1203.

[0076] The control unit 42 controls the display unit 31 so that the object is at the position following the drag operation on the order change screen 800 (step 1203). For example, the control unit 42 changes the display of the order change screen 800 so that the target object is at the position of the contact object detected via the input unit 32. When the processing of step 1203 is completed, the control unit 42 advances the processing to step 1204.

[0077] The control unit 42 determines whether a change operation has been detected (step 1204). For example, when the control unit 42 detects a change operation on the second function object 620 in the order change screen 800 or a change operation on the function object 610 via the input unit 32, it determines that a change operation has been detected. The change operation includes, for example, a drag & drop operation on the object to be changed in order to change the validity of the function. If the control unit 42 determines that no change operation has been detected (No in step 1204), it returns the process to step 1203 which has been already described and continues the process. Also, if the control unit 42 determines that a change operation has been detected (Yes in step 1204), it advances the process to step 1205.

[0078] The control unit 42 executes a change process according to the change operation (step 1205). The change process includes, for example, a process of changing the display position of the object to be changed in the order change screen 800, a process of changing the detailed condition data 510 of the function corresponding to the object to be changed, a process of changing the processing condition data 500 based on the changed detailed condition data, etc. When the change process in step 1205 is completed, the control unit 42 advances the process to step 1206.

[0079] The control unit 42 causes the display unit 31 to display the order change screen 800 based on the changed processing condition data 500 (step 1206). For example, the control unit 42 creates screen data for displaying the function object 610, the arrow object 611, the second function object 620, etc. in the order change screen 800 based on the changed processing condition data 500. Then, the control unit 42 causes the display unit 31 to display the created screen data. As a result, the display unit 31 is in a state of displaying the order change screen 800 based on the changed processing condition data 500. When the process in step 1206 is completed, the control unit 42 advances the process to step 1207.

[0080] The control unit 42 determines whether to end the display of the order change screen 800 (step 1207). For example, when the control unit 42 detects an end operation of the display via the input unit 32 or receives an end instruction of the display, it determines to end the display of the order change screen 800. When the control unit 42 determines not to end the display of the order change screen 800 (No in step 1207), it returns the process to step 1202 which has been described above and continues the process. Also, when the control unit 42 determines to end the display of the order change screen 800 (Yes in step 1207), it advances the process to step 1208.

[0081] The control unit 42 ends the display of the order change screen 800 (step 1208). For example, the control unit 42 controls the display unit 31 so as to end the display of the order change screen 800 being displayed by the display unit 31. When the process of step 1208 is completed, the control unit 42 ends the processing procedure shown in FIG. 9.

[0082] [Other Embodiments] Note that the processing apparatus 1 according to the present invention is not limited to the above-described embodiment, and can be variously modified and implemented without departing from the gist of the present invention. For example, the processing apparatus 1 may be a grinding apparatus or a laser processing apparatus other than a cutting apparatus.

[0083] For example, when the processing apparatus is a laser processing apparatus, the processing apparatus can implement functions such as output check and spot shape at any timing before processing, during processing, after processing, etc. The function of the output check is a function of irradiating a laser beam to an output measuring instrument which is a setup unit of the cutting apparatus to check whether the output is a predetermined value. The function of the spot shape check is a function of installing a dummy plate-like object on a second holding table adjacent to the holding table, performing laser irradiation to form a spot shape, imaging the spot, and comparing it with a reference spot shape to determine whether the spot shape is correct.

[0084] In addition, each component of the processing apparatus 1 described in the above embodiment is conceptually functional, and does not necessarily have to be physically configured as shown in the drawings. That is, the specific form of the dispersion / integration of the processing apparatus 1 is not limited to that shown in the drawings, and all or part of it can be functionally or physically dispersed / integrated in any unit according to various loads, usage situations, etc. For example, in the processing apparatus 1, the display control unit 421 and the change unit 422 may be functionally integrated or combined.

Explanation of Signs

[0085] 1 Processing apparatus 10 Holding table 12 Imaging unit 20 Processing unit 30 Touch panel 31 Display unit 32 Input unit 40 Control unit 41 Storage unit 42 Control section 411 Processing condition storage unit 421 Display control unit 422 Change unit 100 Workpiece 500 Processing condition data 510 Detailed condition data 600 Processing condition screen 610 Function object 611 Arrow object 620 Second function object 700 Detailed setting screen 800 Order change screen 810 First display area 820 Second display area

Claims

1. A holding table for holding a workpiece, a processing unit for processing the workpiece held by the holding table, a control unit for driving the processing unit, a display unit for displaying information related to processing, A processing apparatus comprising: The control unit: Stores a plurality of pieces of processing condition data associated with the order in which functions that are set to be performed or not performed from the start of processing preparation to the end of processing of the processing apparatus are carried out, and a processing condition storage unit in which at least some of the plurality of pieces of processing condition data have functions that are set to be different from each other, A control unit for causing the display unit to display a processing condition screen related to the processing condition data, Comprising: The control unit causes all function objects that can identify functions to be performed from the start of processing preparation to the end of processing for each of the plurality of pieces of processing condition data based on the processing condition data of the processing apparatus to be displayed on the processing condition screen. A processing apparatus characterized by this.

2. The control unit causes the function object of the function to be performed by the processing apparatus based on the processing condition data and the second function object of the function not to be performed to be displayed on the processing condition screen in different display modes. The processing apparatus according to claim 1, characterized by this.

3. The control unit causes the function objects representing the functions to be performed by the processing apparatus based on the processing condition data to be arranged in the order of performance and displayed on the processing condition screen. The processing apparatus according to claim 1 or 2, characterized by this.

4. The processing condition screen includes a screen on which the functions to be performed and the order of the functions to be performed can be changed. On the processing condition screen, when the second function object of the function not to be performed is moved adjacent to the function object to be performed, it further comprises a changing unit for changing the function not to be performed to a function to be performed. The processing apparatus according to claim 2. The processing apparatus according to claim 2.

5. When the function object is selected, the control unit causes the display unit to display a detailed setting screen showing detailed conditions corresponding to the selected function object. The processing apparatus according to any one of claims 1 to 4. The processing apparatus according to any one of claims 1 to 4.

Images