Lamp unit with excimer lamp, ultraviolet irradiation device, ozone generating device, ozone processing device, and lamp unit replacement method

Abstract

To remove or reduce an impurity gas and impurities effectively when an excimer lamp is installed at an ultraviolet light radiation device and an ozone generator.SOLUTION: An ultraviolet light radiation device 1000 includes a jacket pipe 20. An excimer lamp 60 is coaxially connected to a holding member 30 integrally provided with an impurity gas adsorption agent 40. The holding member 30 is removably attached from the opening part 20T side of the jacket pipe 20. The impurity gas adsorption agent 40 is installed within the jacket pipe 20 in time with attachment of the excimer lamp 60. The impurity gas adsorption agent 40 is replaced concurrently with lamp replacement.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an ultraviolet irradiation device equipped with an excimer lamp, an ultraviolet treatment device, an ozone generation device, an ozone treatment device, and the like. [Background technology]

[0002] Excimer lamps are used as light sources for ultraviolet irradiation devices, ultraviolet treatment devices for sterilization and deodorization, and ultraviolet irradiation ozone generators. In excimer lamps, a discharge is formed by applying a high-frequency voltage (several kV) to a discharge space containing a rare gas, and excimer light is emitted as ultraviolet light.

[0003] Gases (hereinafter referred to as impure gases) adsorbed to the arc tube and other components are re-emitted due to heating and other factors during the manufacturing process (sealing process) of excimer lamps. To remove such impure gases, a member that adsorbs impure gases (such as a getter) is provided. For example, a getter that adsorbs barium, zirconium, and the like is provided between the discharge tube (arc tube) of an excimer lamp and the outer tube that covers the discharge tube (see Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 5074248 Summary of the Invention [Problem to be solved by the invention]

[0005] In ultraviolet irradiation devices, ozone generators, etc., excimer lamps may need to be replaced due to deterioration over time or malfunctions. Furthermore, impure gases or impurities remaining in the jacket tube or container in which the excimer lamp is installed may cause a decrease in the transmittance or deterioration of the discharge tube.

[0006] Therefore, when installing an excimer lamp in an ultraviolet irradiation device, an ozone generating device, or the like, it is necessary to effectively remove or suppress impure gases and impurities. [Means for solving the problem]

[0007] One aspect of the present invention is a lamp unit comprising an excimer lamp removably mounted in a lamp housing that irradiates ultraviolet light, and a removal unit capable of removing at least impure gases from the impurities and impurities within the lamp housing. The lamp unit is applicable to, for example, ultraviolet processing devices such as ultraviolet irradiation devices and UV sterilization devices, ozone generators, ozone processing devices such as ozonizers, and the excimer lamp can be removably mounted in the lamp housing within the device. The removal unit can be configured to absorb, adsorb, or extract impurity gases, etc., and includes configurations that not only completely remove impurity gases, etc., but also remove impurity gases to a degree that minimizes their impact on the device, the excimer lamp, etc. For example, the removal unit can be configured with an adsorbent, filter, etc.

[0008] The absorbing portion of the present invention is removed integrally with the excimer lamp when the excimer lamp is removed from the lamp housing. Here, "removed integrally" means that the absorbing portion can be removed from the lamp housing together with the excimer lamp, and includes a configuration in which the removing portion is attached to the excimer lamp or a configuration in which the removing portion is attached to a member connected to the excimer lamp. For example, the removing portion can be provided on the excimer lamp or a member connected to the excimer lamp so as to be exposed inside the lamp housing.

[0009] The lamp unit can be configured to include a holding member that holds the excimer lamp in the lamp housing and is removable together with the excimer lamp. In this case, the removal section can be provided on the holding member. The shape and structure of the holding member can vary depending on the configuration of the device. For example, the holding member can be configured to cantilever the excimer lamp. The location of the removal section can also vary, and it can be located in the lamp housing at a position away from the end of the discharge tube of the excimer lamp along the lamp axis.

[0010] The lamp housing may have a variety of shapes and structures depending on the device configuration described above. For example, the lamp housing may have an opening for mounting the excimer lamp. In this case, the holding member may be configured to close or cover the opening when the excimer lamp is mounted in the lamp housing, thereby sealing the lamp housing. Here, "sealed" refers not only to the sealing required to maintain a vacuum state or to the sealing required to form a discharge space, but also to the sealing required to prevent re-intrusion of impurity gases and the sealing required to prevent changes in the gas concentration (e.g., oxygen concentration) within the lamp housing.

[0011] An ultraviolet irradiation device according to one aspect of the present invention includes the lamp unit described above, and a lamp housing portion forms an enclosed space when the excimer lamp is attached to the lamp housing portion. For example, the lamp housing portion can be configured as a jacket tube in which the excimer lamp is coaxially arranged. The lamp housing portion can also be configured as an apparatus casing having an ultraviolet irradiation window formed therein.

[0012] The removal section can reduce the concentration of oxygen as an impurity gas in the lamp housing section to a range of 0.001 to 10%. For example, the removal section can be configured as an organic oxygen adsorbent.

[0013] An ultraviolet treatment device according to one aspect of the present invention comprises the lamp unit described above, wherein the lamp housing has an inlet and an outlet for the fluid to be irradiated with ultraviolet rays, and the removal section is provided in the lamp housing upstream of the discharge tube of the excimer lamp and is exposed to the flow path of the fluid to remove oxygen from the fluid, which is air.

[0014] An ozone generating device according to one aspect of the present invention includes the lamp unit described above, wherein the lamp housing has an inlet and an outlet for a fluid to be irradiated with ultraviolet rays, and the removal unit is provided in the lamp housing upstream of the discharge tube of the excimer lamp and is exposed to the flow path of the fluid, removing moisture as an impurity from the fluid, which is air.

[0015] An ozone treatment device according to one aspect of the present invention includes the lamp unit described above, wherein the lamp housing has an inlet and an outlet for a fluid to be irradiated with ultraviolet rays, and the removal unit is provided in the lamp housing downstream of the discharge tube of the excimer lamp and is exposed to the flow path of the fluid, and removes ozone generated by ultraviolet irradiation of the fluid, which is air, as an impure gas.

[0016] One aspect of the present invention is a method for installing and replacing an excimer lamp in a lamp housing portion that is irradiated with ultraviolet rays in the ultraviolet irradiation device described above, in which a removal portion that removes at least impure gases from within the lamp housing portion is attached integrally to the excimer lamp or a holding member for the excimer lamp so as to be exposed in the lamp housing portion, the excimer lamp is installed in the lamp housing portion, and when replacing the lamp, the excimer lamp is removed from the lamp housing portion together with the removal portion. [Effects of the Invention]

[0017] According to the present invention, when an excimer lamp is installed in an ultraviolet irradiation device, an ozone generating device, or the like, it is possible to effectively remove or suppress impure gases, impurities, and the like. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a schematic cross-sectional view of the ultraviolet irradiation device of the first embodiment, seen from the lamp side. [Figure 2] FIG. 10 is a schematic cross-sectional view of the ultraviolet irradiation device according to the second embodiment, as viewed from the lamp side. [Figure 3] FIG. 10 is a schematic cross-sectional view of an ultraviolet treatment device according to a third embodiment, seen from the lamp side. [Figure 4] FIG. 10 is a schematic cross-sectional view of the ozone generation device according to the fourth embodiment, seen from the lamp side. [Figure 5] FIG. 10 is a schematic cross-sectional view of an ozone treatment device according to a fifth embodiment, seen from the lamp side. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0020] FIG. 1 is a schematic cross-sectional view of the ultraviolet irradiation device according to the first embodiment, as viewed from the lamp side.

[0021] The ultraviolet irradiation device 1000 includes a lamp unit 10 including an excimer lamp 60 and a jacket tube 20 that houses the lamp unit 10, and irradiates ultraviolet rays onto an ultraviolet irradiation target (including air, etc.) around the lamp unit 10. The jacket tube 20 functions as a lamp housing section and an ultraviolet irradiation container, and transmits ultraviolet rays.

[0022] The jacket tube 20 here has a substantially circular cross section, a hemispherical bullet-shaped tip, and an opening 20T at the rear end. The excimer lamp 60 is coaxially arranged within the jacket tube 20 by a holding member 30. The excimer lamp 60 is attached to the jacket tube 20 in a removable and replaceable manner.

[0023] The excimer lamp 60 comprises a cylindrical discharge tube (light emitting tube) 62 with a substantially circular cross section and a substantially cylindrical dielectric 64. The discharge tube 62 is made of a dielectric material such as quartz glass and is transparent to ultraviolet light. The dielectric 64 has a width along the lamp radial direction and covers a foil electrode (hereinafter referred to as the inner electrode) 66 that extends in a strip shape. The foil electrode 66 may also be configured to be embedded in the dielectric 64.

[0024] The dielectric 64 is disposed coaxially with the discharge tube 62. The dielectric 64 is also partially welded to one end of the discharge tube 62 and protrudes from the discharge tube 62 along the lamp axis C. An electrode (hereinafter referred to as the outer electrode) 68 is disposed on the outer surface of the discharge tube 62. In this example, the outer electrode 68 is configured such that a linear electrode portion made of a conductive metal is wound around the outer surface of the discharge tube 62, and is wound in a spiral shape along the lamp axis C.

[0025] A power supply line 69 connected to an end of the inner electrode 66 is connected to an externally installed power supply unit (not shown), and power is supplied to the excimer lamp 60 via the power supply line 69. When a high voltage (for example, in the range of several kV to several tens of kV) at a high frequency (for example, in the range of several kHz to several tens of MHz) is applied to the inner electrode 66 and the outer electrode 68, ultraviolet rays (excimer light) are emitted from the discharge space S1. Here, a rare gas or a mixed gas containing a rare gas is sealed in the discharge space S1 so that ultraviolet rays having a peak wavelength of 200 nm or less (for example, 172 nm) are emitted from the discharge tube 62.

[0026] The holding member 30 supports the excimer lamp 60 in a cantilevered manner by holding the dielectric 64 of the excimer lamp 60. The excimer lamp 60 is attached to a hollow portion formed in the holding member 30 so that it can be removed from the holding member 30. The holding member 30 employs a nozzle structure here, and is fitted into a holding member (not shown) that is integrally provided on the jacket tube 20 side, and is fixed by gripping (screwing) it with, for example, screws.

[0027] In this way, the holding member 30 is removably fitted to the jacket tube 20 and closes the opening 20T of the jacket tube 20. As a result, the space S2 formed between the jacket tube 20 and the excimer lamp 60 (hereinafter referred to as the internal space of the container) is formed as an airtight space. The holding member 30 is made of an insulating material that is resistant to ultraviolet rays and gases sealed (generated) in the internal space of the container, and can be made of a material such as Teflon (registered trademark).

[0028] An impure gas adsorbent 40 is provided in the container space S2. The impure gas adsorbent 40 is exposed to the container space S2 and adsorbs and removes impure gases in the jacket tube 20. In this example, the impure gas adsorbent 40 is configured as an oxygen adsorbent. For example, an organic oxygen adsorbent that adsorbs oxygen by oxidizing an organic substance such as a vitamin can be used as the impure gas adsorbent 40.

[0029] The impurity gas adsorbent 40 is placed on and integrally attached to the surface of the holding member 30. The impurity gas adsorbent 40 is exposed to the space S2 within the container, but is located a predetermined distance along the lamp axis C from the end of the discharge tube 62 of the excimer lamp 60 toward the opening 20T of the jacket tube 20, and is outside the ultraviolet ray irradiation area along the radial direction of the excimer lamp 60. Therefore, the impurity gas adsorbent 40 is located at a position that does not substantially block the ultraviolet ray irradiation area.

[0030] As described above, the excimer lamp 60, which is integrally connected to the holding member 30, is detachable from the jacket tube 20 and can be replaced as needed. When the holding member 30, which supports the excimer lamp 60 in a cantilevered manner, is removed from a holding member (not shown) that is integral with the jacket tube 20 by releasing the fastening (screwed engagement) by screws or the like, the excimer lamp 60 and impurity gas adsorbent 40 are simultaneously removed from the jacket tube 20. Then, a new excimer lamp 60 with the same configuration is attached to the jacket tube 20. When the lamp is replaced, the inside of the jacket tube 20 is opened to the atmosphere.

[0031] The impurity gas adsorbent 40 adsorbs oxygen immediately after the lamp is replaced, and the oxygen concentration in the container space S2 quickly reaches a predetermined concentration range. Here, the impurity gas adsorbent 40 does not completely remove oxygen, but functions to keep the oxygen concentration in the container space S2 within a range of 0.001 to 10%. Preferably, the impurity gas adsorbent 40 is configured to keep the oxygen concentration within a range of 0.001 to 1.0%.

[0032] After lamp replacement by exposure to the atmosphere, ozone is generated due to the presence of oxygen contained in the atmosphere remaining in the container space S2 as ultraviolet light is irradiated by the ultraviolet irradiation device 1000. As a result, impure gases and impurities remaining in the jacket tube 20 after lamp replacement are decomposed and removed by the ozone. On the other hand, because the impure gas adsorbent 40 keeps the oxygen concentration within the above range, high concentrations of ozone are not generated and attenuation of ultraviolet light due to oxygen is also suppressed.

[0033] Because the impure gas adsorbent 40 is made of an organic oxygen adsorbent, even if a portion of it leaks into the jacket tube 20, unlike iron-based oxygen adsorbents, no abnormal discharge occurs due to high frequency and high voltage. Furthermore, even if organic molecules are generated and dispersed in the air due to high temperature conditions, they can be decomposed and removed by ozone. Therefore, by installing the impure gas adsorbent 40 inside the jacket tube 20, it is possible to prevent malfunctions.

[0034] As described above, according to the ultraviolet irradiation device 1000 of this embodiment, the excimer lamp 60 is coaxially connected to the holding member 30 integrally provided with the impurity gas adsorbent 40, and the holding member 30 is removably attached from the opening 20T side of the jacket tube 20. Then, the impurity gas adsorbent 40 is installed in the jacket tube 20 in conjunction with the attachment of the excimer lamp 60, and the impurity gas adsorbent 40 is replaced at the same time as the lamp is replaced.

[0035] Since the impurity gas adsorbent 40 is replaced at the same time as the lamp is replaced, the impurity gas adsorbent 40 has sufficient performance at the time of lamp replacement, and can reliably remove impurity gases at the same time as the lamp is replaced. In particular, by releasing the atmosphere so that the concentration of oxygen remaining in the jacket tube 20 falls within the above-mentioned predetermined range immediately after the lamp is replaced, the ozone concentration generated by ultraviolet irradiation is suppressed and the ozone concentration becomes sufficient to decompose and remove impurities that have entered the jacket tube 20.

[0036] Therefore, there is no ozone-induced deterioration of the components constituting the ultraviolet irradiation device 1000, such as a decrease in the transmittance of the jacket tube 20 and the discharge tube 62, or damage to the holding member 30, and impurities that have become mixed into the jacket tube 20 during lamp replacement are decomposed and removed. In other words, the inside of the jacket tube 20 can be made into a state suitable for the lamp immediately after lighting after lamp replacement.

[0037] The impurity gas adsorbent 40 is disposed at a predetermined distance from the excimer lamp 60 along the lamp axis C, and at a predetermined distance in the radial direction from the dielectric 64 extending from the discharge tube 62, and is disposed at a position substantially outside the ultraviolet ray irradiation area. Therefore, the ultraviolet ray emitted from the excimer lamp 60 is not blocked by the impurity gas adsorbent 40, and the impurity gas adsorbent 40 can be prevented from being affected (for example, deteriorated or altered) by the ultraviolet ray irradiation.

[0038] The excimer lamp 60 is cantilevered by the holding member 30, which has a base structure that matches the shape and size of the jacket tube 20 and is configured to be detachably attached to the jacket tube 20. Therefore, when the holding member 30 is removed from the jacket tube 20 and replaced, the excimer lamp 60 and the impure gas adsorbent 40 are simultaneously removed and replaced, making the replacement work easy.

[0039] In particular, when the gap between the jacket tube 20 and the excimer lamp 60 is narrow, lamp damage such as the excimer lamp 60 coming into contact with the jacket tube 20 can be prevented by performing the lamp replacement work while aligning the holding member 30, which is coaxially connected to the excimer lamp 60, with the position of the opening 20T of the jacket tube 20.

[0040] The structure in which the excimer lamp 60 is cantilevered by the holding member 30 facilitates lamp replacement and reduces the opening of the jacket tube 20. The oxygen concentration remaining in the jacket tube 20 may be in the range of 0.001 to 10%, but the cantilevered support structure makes it difficult for impurities to be mixed in during lamp replacement, allowing the upper limit of the oxygen concentration to be reduced to 1.0% or less. As a result, it becomes possible to decompose and remove impure gases and impurities with almost no attenuation of ultraviolet light due to oxygen.

[0041] Furthermore, since the excimer lamp 60 has a cantilever support structure coaxially supported by the holding member 30, it is possible to replace only the excimer lamp 60 or only the impure gas adsorbent 40 as required.

[0042] Next, an ultraviolet irradiation device according to a second embodiment will be described with reference to Fig. 2. In the second embodiment, an excimer lamp is removably attached to a casing of the ultraviolet irradiation device.

[0043] 2 is a schematic cross-sectional view of an ultraviolet irradiation device according to a second embodiment, seen from the lamp side. The ultraviolet irradiation device 1000' includes a casing 120 configured as a lamp housing, and a lamp unit 100 including an excimer lamp 60 is detachably attached to the casing 120. The ultraviolet light emitted from the excimer lamp 60 is irradiated onto an object to be ultraviolet-irradiated through an ultraviolet irradiation window 120S.

[0044] In this embodiment, the casing 120 has a substantially circular cross section, and the holding member 130 and the opening 120T are shaped to match the casing 120. By attaching the lamp unit 100 to the casing 120, the space S2 inside the casing 120 is formed as an enclosed space. The casing 120 may also have a rectangular cross section, in which case the shape of the holding member 130 need only be formed to match the shape of the opening 120T rather than to match the shape of the casing 120. The holding member 130 has the same nozzle die structure as in the first embodiment. The impurity gas adsorbent 140 is capable of adsorbing oxygen as well as impurity gases other than oxygen.

[0045] In the second embodiment, when replacing the lamp, gas replacement with nitrogen gas is performed after opening to the atmosphere, and the inside of the casing 120 is purged. At this time, impure gases contained in the remaining atmosphere or nitrogen gas are absorbed by the impure gas adsorbent 140 and removed from the inside of the casing 120. Note that the inside of the casing 120 may be configured to be purged with an inert gas other than nitrogen gas. In this case, the impure gas adsorbent 140 may be configured to adsorb impure gases contained in the remaining atmosphere or inert gas.

[0046] In the first and second embodiments, the impure gas adsorbent is provided on the opening side of the jacket tube and casing, but the impure gas adsorbent may be provided on the opposite side (tip side). In this case, a member for installing the impure gas adsorbent may be attached to the tip side of the excimer lamp.

[0047] Next, an ultraviolet treatment device according to a third embodiment will be described with reference to Fig. 3. In the third embodiment, gas or the like to be irradiated with ultraviolet rays is passed through a casing, and sterilization treatment or the like is performed by irradiating the gas or the like with ultraviolet rays within the casing.

[0048] FIG. 3 is a schematic cross-sectional view of the ultraviolet treatment device according to the third embodiment, seen from the lamp side.

[0049] In the ultraviolet treatment device 2000, a lamp unit 200 equipped with an excimer lamp 60 is detachably attached to a casing 220 configured as a lamp housing section. The casing 220 has an inlet 230B on the opening 220T side and an outlet 230A on the opposite side (tip side). Air to be irradiated with ultraviolet rays flows in through the inlet 230B, passes through the container interior space S2, and flows out from the outlet 230A.

[0050] A filter 240 capable of adsorbing impure gases and removing impurities is integrally provided on the holding member 230. The filter 240, which is provided on the upstream side within the casing 220, is configured to adsorb impure gases including oxygen and to adsorb impurities such as dust and dirt when air to be irradiated with ultraviolet rays passes through it.

[0051] Here, filter 240 is annular and contacts holding member 230 and casing 220 so as to fill the gap between them. As a result, the air that flows in passes through filter 240 and flows around excimer lamp 60. Filter 240 is attached integrally to holding member 230 so as to be removable.

[0052] In the third embodiment, a rare gas or a mixed gas containing a rare gas is sealed in the discharge space S1 of the excimer lamp 60 so as to irradiate ultraviolet light having a peak wavelength of 200 nm or more. Air passing around the excimer lamp 60 is sterilized by irradiating it with the ultraviolet light. The sterilized air flows out of the ultraviolet treatment device 2000, thereby purifying the air.

[0053] As described above, in the third embodiment, the lamp unit 200 is detachably attached to the ultraviolet treatment device 2000 in which an air flow path is formed. This allows the excimer lamp 60 and the filter 240 to be replaced simultaneously. It is also possible to replace only the filter 240 and then reattach the lamp unit 200 to the casing 220. Note that gases or liquids other than air may also be configured to be irradiated with ultraviolet light.

[0054] Next, an ozone generator according to a fourth embodiment will be described with reference to Fig. 4. The fourth embodiment is configured as an ozone generator that generates ozone by irradiating ultraviolet light onto air passing through a casing.

[0055] FIG. 4 is a schematic cross-sectional view of the ozone generating device according to the fourth embodiment, seen from the lamp side.

[0056] In the ozone generator 3000, a lamp unit 300 including an excimer lamp 60 is detachably attached to a casing 320 configured as a lamp housing section. As in the third embodiment, the casing 320 is formed with an air inlet 330B on the opening 320T side and an air outlet 330A on the opposite side (tip side).

[0057] The filter 340, which is provided upstream of the excimer lamp 60 inside the casing 320, is annular as in the third embodiment, and is removably attached to the holding member 330 so as to fill the gap between the holding member 330 and the casing 320. As in the first embodiment, the excimer lamp 60 emits ultraviolet light having a peak wavelength of 200 nm or less.

[0058] Filter 340 adsorbs impure gases and impurities contained in the air flowing into casing 320 and dehumidifies the air passing through filter 340. For example, filter 340 can be made of a material with a dehumidifying effect, such as silica gel.

[0059] Ozone is generated by ultraviolet irradiation as the purified air passes around the excimer lamp 60. The gas containing ozone flows out from the outlet 330A and is used for sterilization, deodorization, and other purposes.

[0060] As described above, in the fourth embodiment, the lamp unit 300 is detachably attached to the ozone generator 3000. This allows the excimer lamp 60 and the filter 340 to be replaced simultaneously. It is also possible to replace only the filter 340 and then reattach the lamp unit 300 to the casing 320.

[0061] Next, an ozone treatment device according to a fifth embodiment will be described with reference to Fig. 5. In the fifth embodiment, the device is configured as an ozone treatment device (which can also be considered as an ultraviolet and ozone treatment device) that performs sterilization treatment using ultraviolet rays as well as sterilization treatment using ozone by irradiating ultraviolet rays onto air passing through a casing.

[0062] FIG. 5 is a schematic cross-sectional view of an ozone processing apparatus according to the fifth embodiment, seen from the lamp side.

[0063] In the ozone processing device 4000, a lamp unit 400 including an excimer lamp 60 is detachably attached to a casing 420 configured as a lamp housing section. Unlike the fourth embodiment, the casing 420 is formed with an air outlet 430B on the opening 420T side and an air inlet 430A on the opposite side (tip side).

[0064] The filter 440, which is provided downstream of the excimer lamp 60 inside the casing 420, is annular as in the third embodiment, and is removably attached to the holding member 430 so as to fill the gap between the holding member 430 and the casing 420. As in the fourth embodiment, ultraviolet light having a peak wavelength of 200 nm or less is emitted from the excimer lamp 60.

[0065] The air flowing in from inlet 430A is irradiated with ultraviolet light to sterilize it, and ozone is generated by irradiating the air with ultraviolet light. As a result, the air passing around excimer lamp 60 is sterilized by the ozone.

[0066] Filter 440 adsorbs ozone as the generated ozone-containing gas passes through it. As a result, the gas from which ozone has been removed flows out from outlet 430B of casing 420. Filter 440 may be made of a material capable of adsorbing ozone, such as activated carbon. Note that, as in the fourth embodiment, a filter such as a dehumidifying filter may be provided upstream of excimer lamp 60 to purify the air.

[0067] As described above, in the fifth embodiment, the lamp unit 400 is detachably attached to the ozone processing device 4000. This allows the replacement of the excimer lamp 60 and the filter 440 to be performed simultaneously. It is also possible to replace only the filter 440 and then reattach the lamp unit 400 to the casing 420.

[0068] Impurity gases and impurities may be removed by a component other than an impurity gas adsorbent or filter (for example, a getter). Furthermore, the jacket tube or casing need not necessarily house the entire excimer lamp, but may house at least a portion of it. In this case, the impurity gas adsorbent, filter, etc. may be exposed to the interior space of the container when replacing or installing the lamp. [Explanation of symbols]

[0069] 10 Lamp unit 30 Retaining member 40 Impure gas adsorbent 60 Excimer Lamp 1000 UV irradiation device 2000 UV treatment equipment 3000 Ozone Generator 4000 Ozone Treatment Device

Claims

1. an excimer lamp that is detachably installed in a lamp housing portion that irradiates ultraviolet light; a removal unit capable of removing at least the impure gas from among the impurities and impurities in the lamp housing unit; The lamp unit is characterized in that the removal portion is removed integrally with the excimer lamp when the excimer lamp is removed from the lamp housing portion.

2. The lamp housing further includes a holding member that holds the excimer lamp and is detachable together with the excimer lamp, 2. The lamp unit according to claim 1, wherein the removal portion is provided on the holding member.

3. the lamp housing portion has an opening formed in the lamp housing portion for mounting the excimer lamp, 3. The lamp unit according to claim 2, wherein the holding member closes or covers the opening when the excimer lamp is attached to the lamp housing portion, thereby sealing the lamp housing portion.

4. 2. The lamp unit according to claim 1, wherein the removed portion is provided in the lamp housing portion at a position spaced apart from an end of a discharge tube of the excimer lamp along the lamp axis direction.

5. An ultraviolet irradiation device comprising the lamp unit according to any one of claims 1 to 4, 10. An ultraviolet irradiation device, wherein the lamp housing portion forms an enclosed space when the excimer lamp is attached to the lamp housing portion.

6. 6. The ultraviolet irradiation device according to claim 5, wherein the removal section reduces the concentration of oxygen as an impurity gas in the lamp housing section to a range of 0.001 to 10%.

7. 7. The ultraviolet irradiation device according to claim 6, wherein the removal section is made of an organic oxygen adsorbent.

8. 6. The ultraviolet irradiation device according to claim 5, wherein the lamp housing portion is configured as a jacket tube in which the excimer lamp is coaxially disposed.

9. 6. The ultraviolet irradiation device according to claim 5, wherein the lamp housing portion is configured as a device casing having an ultraviolet irradiation window formed therein.

10. An ultraviolet treatment device comprising the lamp unit according to any one of claims 1 to 4, the lamp housing has an inlet and an outlet for a fluid to be irradiated with ultraviolet rays; The ultraviolet treatment device is characterized in that the removal unit is provided in the lamp accommodating unit upstream of the discharge tube of the excimer lamp, is exposed to the fluid flow path, and removes oxygen from the fluid, which is air.

11. An ozone generating device comprising the lamp unit according to any one of claims 1 to 4, the lamp housing has an inlet and an outlet for a fluid to be irradiated with ultraviolet rays; The removal unit is provided in the lamp housing unit upstream of the discharge tube of the excimer lamp, is exposed to a flow path of the fluid, and removes moisture as an impurity from the fluid, which is air.

12. 5. An ozone processing apparatus comprising the lamp unit according to claim 1, the lamp housing has an inlet and an outlet for a fluid to be irradiated with ultraviolet rays; The ozone treatment device is characterized in that the removal unit is provided in the lamp accommodating unit downstream of the discharge tube of the excimer lamp, is exposed to the flow path of the fluid, and removes ozone generated by ultraviolet irradiation of the fluid, which is air, as an impure gas.

13. A method for installing and replacing an excimer lamp in a lamp housing that irradiates ultraviolet light, comprising: a removal section for removing at least the impure gas from the lamp housing section, the removal section being integrally attached to the excimer lamp or a holding member for the excimer lamp so as to be exposed in the lamp housing section; The excimer lamp is mounted in the lamp housing portion, A method for mounting and replacing an excimer lamp, comprising the steps of: removing the excimer lamp together with the removal portion from the lamp housing portion when replacing the lamp.

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