Ionizer emitter nozzle

Abstract

An exemplary charge neutralization device includes an emitter nozzle comprising an emitter and a housing configured to hold the emitter, the housing comprising a plurality of cams on an outer surface of the housing; and a nozzle receptacle configured to allow insertion and removal of the emitter nozzle and to hold the emitter nozzle in place during operation of the emitter nozzle, the nozzle receptacle comprising a plurality of threads corresponding to the plurality of cams on the emitter nozzle, the plurality of threads having a first flank angle, and a plurality of shelves located at a distal end of each of the plurality of threads, the plurality of shelves having a second flank angle less than the first flank angle.

Description

[Technical Field]

[0001] This disclosure relates generally to ionization, and more particularly to ionizer emitter nozzles. [Background technology]

[0002] The ion emitter of the charge neutralization device generates and supplies both positive and negative ions into the surrounding air or gaseous medium. To generate the gaseous ions, the amplitude of the applied voltage must be high enough to induce a corona discharge between at least two electrodes arranged as an ionization cell. In the ionization cell, at least one electrode is the ion emitter and another electrode can be a reference electrode. Summary of the Invention

[0003] A method and apparatus for adaptive charge neutralization is disclosed, as more fully set forth in the claims, substantially as shown in and described in connection with at least one of the drawings.

[0004] These and other features, aspects, and advantages of the present disclosure will be better understood when the following detailed description is read in conjunction with the accompanying drawings, in which like reference characters represent like parts throughout. [Brief explanation of the drawings]

[0005] [Figure 1] FIG. 1 illustrates an example AC charge neutralization system configured to control ionization output based on balance voltage feedback, according to an aspect of the present disclosure. [Figure 2] FIG. 2 is an exploded view of the exemplary emitter assembly of FIG. 1. [Figure 3] FIG. 3 is a perspective view of the exemplary nozzle receptacle of FIG. 2. [Figure 4] FIG. 3 is a cross-sectional view of the example nozzle receptacle of FIG. 2. [Figure 5]FIG. 3 is a more detailed perspective view of the threads and ledge of the example nozzle receptacle of FIG. 2. [Figure 6] 3 is a cross-sectional view of the example emitter assembly of FIG. 2 in an installed configuration. [Figure 7] 3 is a cross-sectional view of another exemplary embodiment of the nozzle receptacle of FIG. 2, including a protrusion between the threads and the ledge. [Figure 8] FIG. 3 is a cross-sectional view of another exemplary embodiment of the nozzle receptacle of FIG. 2, wherein the shelf has a negative flank angle. DETAILED DESCRIPTION OF THE INVENTION

[0006] The drawings are not necessarily to scale. Where appropriate, like or identical reference numbers are used to refer to like or identical components.

[0007] Ionizers, or charge neutralization devices, emit positive and / or negative ions to discharge static electricity that may be present on surfaces or substrates in manufacturing facilities, etc. The disclosed exemplary charge neutralization methods and devices can be used in Class 1 cleanroom production environments and are particularly useful in semiconductor chip manufacturing.

[0008] Conventional ion emitters are installed into a housing via a receptacle. Due to pressurization within the housing, the ion emitter and / or the emitter nozzle holding the emitter are subjected to forces that resist installation and / or promote ejection from the housing. Due to frictional forces associated with the sealing elements during installation, installation and replacement of the emitter nozzle, which involves multiple rotations of a conventional ion emitter, can be tiring for an operator. Some other conventional ion emitter nozzles are installed using a bayonet-style fitting. However, the bayonet fitting requires a large insertion force to overcome the resistance from the sealing elements.

[0009] In contrast to conventional ion emitter nozzle assemblies, the disclosed ion emitter nozzle and receptacle have a threaded connection in which the threads have multiple sections. In some such examples, the nozzle receptacle is double-threaded, and the emitter housing includes a cam configured to threadably engage the two threads. A first section of each thread has a first flank angle (e.g., an angle defined by the pitch relative to a vertical circumference line), and each thread terminates into a second section having a lower flank angle. In some such examples, the second section has a pitch angle of zero. The lower flank angle improves locking of the emitter nozzle in an installed position, improving ease of installation while reducing the likelihood of the emitter nozzle unintentionally loosening or being ejected.

[0010] The terms "ionization" and "charge neutralization" are used interchangeably herein.

[0011] An exemplary charge neutralization device is disclosed that includes an emitter nozzle comprising an emitter and a housing configured to hold the emitter, the housing comprising a plurality of cams on an outer surface of the housing; and a nozzle receptacle configured to allow insertion and removal of the emitter nozzle and to hold the emitter nozzle in place during operation of the emitter nozzle, the nozzle receptacle comprising a plurality of threads corresponding to the plurality of cams on the emitter nozzle, the plurality of threads having a first flank angle; and a plurality of ledges located at a distal end of each of the plurality of threads, the plurality of ledges having a second flank angle less than the first flank angle.

[0012] Some exemplary devices further include a power source, and the nozzle receptacle is configured to conduct power from the power source to the emitter nozzle when the emitter nozzle is placed in the nozzle receptacle. In some exemplary devices, the emitter nozzle housing includes two cams, and the nozzle receptacle includes a dual thread.

[0013] In some exemplary devices, the plurality of threads includes between 1 / 2 turn and 1 full turn for seating the emitter nozzle within the nozzle receptacle. In some exemplary devices, the nozzle receptacle includes a seat configured to provide a seal against an outer surface of the emitter nozzle housing, and the emitter nozzle includes a seal on the outer surface of the housing, the seal adapted to abut the seat. Some such exemplary devices further include an ionizer housing having a plurality of nozzle receptacles. In some exemplary devices, the inner surface of the ionizer housing is pressurized with air, and the seat is configured to seal against air pressure. In some exemplary devices, the ledge is configured to prevent air pressure from loosening the emitter nozzle from the nozzle receptacle.

[0014] In some exemplary devices, the nozzle receptacle is injection molded. In some exemplary devices, at least one of the ledges has a second flank angle of 0 degrees. In some exemplary devices, at least one of the ledges has a protrusion between the thread and the ledge such that one of the cams must pass over the protrusion to reach the corresponding ledge from the thread and to reach the corresponding thread from the ledge. In some exemplary devices, at least one of the ledges has a second flank angle less than 0 degrees.

[0015] 1 illustrates an example AC charge neutralization system 100 configured to control ionization output based on balance voltage feedback. The example AC charge neutralization system 100 outputs positive and negative ions 102 to neutralize charge on a target device or substrate 104.

[0016] To generate the ions 102, the example system 100 includes one or more ion emitter nozzles 106 coupled to one or more power supplies that provide a high-voltage, high-frequency AC signal for generating the ions 102. The system 100 can include any number of emitter nozzles 106 to distribute the ions 102 over a desired area or size of the target device or substrate 104. By alternately generating positive and negative ions, the example system 100 effectively neutralizes any static charge present on the target device or substrate 104 while reducing or avoiding charging of the target device or substrate 104 by the ions 102.

[0017] The system 100 of FIG. 1 alternates between positive and negative ions by controlling the output voltage of the nozzle 106 to output successive pulses of positive ions and successive pulses of negative ions. The duration of each of the successive positive and negative ion pulses can be controlled based on the desired balance. In contrast to conventional charge neutralization systems, the exemplary system 100 achieves a balance voltage within ±5 V by measuring the balance voltage via the antenna 108 and adjusting the ion balance based on the measurement. For example, the system 100 can adjust the relative number or duration of successive positive and negative ion pulses to adjust the output balance. The antenna 108 can be positioned near the target 104 so that the antenna 108 measures the balance voltage, which is indicative of the output of the system 100. Using feedback from the antenna 108, the system 100 repeatedly (e.g., continuously) adjusts the balance between positive and negative ions.

[0018] The exemplary system 100 includes a housing 110 that houses a power supply and a nozzle 106, as well as any other components in the system. The nozzle 106 can be installed and uninstalled from the system 100 to facilitate replacement of the nozzle 106 due to wear, contamination, and / or damage.

[0019] Figure 2 is an exploded view of an exemplary emitter assembly 200 that can be used to implement the nozzle 106 of Figure 1. In operation, the emitter assembly 200 receives a high voltage, high frequency signal from the power supply of the system 100 and outputs positive and negative ions based on the received voltage.

[0020] The emitter assembly 200 includes an emitter nozzle 202 configured to be installed within a nozzle receptacle 204. The nozzle receptacle 204 may be integral with the housing 110 of the system 100, and the emitter nozzle 202 may be installed and uninstalled from the nozzle receptacle 204. The example nozzle receptacle 204 may also facilitate the conduction of electrical signals to and / or from the emitter nozzle 202.

[0021] The emitter nozzle 202 includes an emitter 206 and an emitter housing 208. The example emitter 206 is removably mounted within the emitter housing 208, which positions the emitter 206 for proper mounting within the nozzle receptacle 204. The emitter housing 208 and / or the nozzle receptacle 204 may include one or more O-rings, gaskets, and / or other seals to prevent gas leakage between the emitter housing 208 and the nozzle receptacle 204.

[0022] As disclosed in more detail below, the example emitter nozzle 202 is threaded into a nozzle receptacle 204, which includes internal threads and a ledge to prevent unintentional unthreading of the emitter nozzle 202 from the receptacle 204. The emitter housing 208 includes two cams 210 that threadably engage the internal threads of the receptacle 204. In contrast to conventional emitter nozzles, the example emitter nozzle 202 and receptacle 204 resist unintentional unthreading due to gas pressure exerted on the emitter nozzle 202 from inside the housing 110.

[0023] Figure 3 is a perspective view of the example nozzle receptacle 204 of Figure 2. Figure 4 is a cross-sectional view of the example nozzle receptacle of Figure 2. The nozzle receptacle 204 is threaded to allow for threading of the emitter housing 208 via the cam 210. In the example of Figures 3 and 4, the nozzle receptacle 204 is double threaded. The threads 302a, 302b have a first flank angle, which can be selected to allow for installation of the emitter nozzle 202 into the receptacle 204 1 / 4 turn, 1 / 2 turn, 3 / 4 turn, full turn, and / or any other number of turns.

[0024] At the distal end of each of the threads 302a, 302b, the threads 302a, 302b include ledges 304a, 304b with reduced flank angles. Figure 5 is a more detailed perspective view of the threads 302a, 302b and ledges 304b of the example nozzle receptacle 204 of Figure 2. In the example of Figures 3 and 4, the flank angle is reduced to zero at the ledges 304a, 304b. During installation, any outward pressure exerted by the nozzle receptacle 204 on the emitter housing 208 is not translated into an unscrewing force, even when combined with vibration or other influences that could cause unseating.

[0025] Figure 6 is a cross-sectional view of the example emitter assembly 200 of Figure 2 in an installed configuration. As shown in Figure 6, the cam 210 is positioned against the ledges 304a, 304b of the threads 302a, 302b. In the installed position, the emitter 206 passes through the nozzle receptacle 204 to make electrical contact with the power source.

[0026] 6 also shows example seals 602, 604 positioned on the exterior surface of the emitter housing 208. The seals 602, 604 abut against a seat 606 of the nozzle receptacle 204 and / or elsewhere within the interior of the nozzle receptacle. The seals 602, 604 reduce gas leakage around the exterior surface of the emitter housing 208.

[0027] Figure 7 is a cross-sectional view of another example nozzle receptacle 700 that can be used to implement the nozzle receptacle 204 of Figure 2. Similar to the nozzle receptacle 204 of Figure 2, the nozzle receptacle 700 includes threads 302a, 302b with ledges 304a, 304b. The example nozzle receptacle 700 further includes a protrusion 702 between a first portion of the threads 302b and the ledge 304b. One or both of the threads 302a, 302b can include the protrusion.

[0028] The example protrusion 702 further increases the movement and / or energy required for the cam 210 to move from the ledge 304b onto the threads 302b, thereby further reducing the likelihood of unintentional unscrewing of the emitter nozzle 202 from the socket 204 without substantially increasing the difficulty of installation and uninstallation.

[0029] FIG. 8 is a cross-sectional view of another example nozzle receptacle 800 that can be used to implement the nozzle receptacle 204 of FIG. 2. Similar to the nozzle receptacle 204 of FIG. 2, the nozzle receptacle 700 includes threads 302a, 302b with ledges 304a, 304b. In the example receptacle 800, the ledge 304b has a negative flank angle, where the ledge 304a reverses the direction of the threads. The example ledge 304b with a negative flank angle can have a similar effect to the protrusion 702 of FIG. 7, which is to further increase the movement and / or energy required for the cam 210 to move from the ledge 304b onto the threads 302b. As such, the ledge 304b further reduces the likelihood of unintentional unscrewing of the emitter nozzle 202 from the receptacle 204 without substantially increasing the difficulty of installation and uninstallation.

[0030] 8, both shelves 304a, 304b have negative flank angles for alignment of emitter 206. Shelves 304a, 304b can have negative flank angles for part or all of the length of shelves 304a, 304b.

[0031] Any of the example nozzle receptacles 204, 700, 800 of the depicted examples may be constructed using any suitable technique. Example construction or manufacturing techniques may include, but are not limited to, injection molding and / or additive manufacturing.

[0032] The methods and systems can be implemented in hardware, software, and / or a combination of hardware and software. The methods and / or systems can be implemented centrally in at least one computing system, or distributed, with different elements distributed across several interconnected computing systems. Any kind of computing system or other apparatus adapted to perform the methods described herein is suitable. A typical combination of hardware and software can include a general-purpose computing system, along with a program or other code that, when loaded and executed, controls the computing system to perform the methods described herein. Another typical embodiment can include an application-specific integrated circuit or chip. Some embodiments can include a non-transitory machine-readable (e.g., computer-readable) medium (e.g., a flash drive, optical disk, magnetic storage disk, etc.) that stores one or more lines of code executable by a machine, thereby causing the machine to perform a process as described herein. As used herein, the term "non-transitory machine-readable medium" is defined to include all types of machine-readable storage media and to exclude propagating signals.

[0033] As used herein, the terms "circuit" and "circuitry" refer to physical electronic components (i.e., hardware) and any software and / or firmware ("code") that can comprise, be executed by, and / or otherwise be associated with hardware. As used herein, for example, a particular processor and memory can include a first "circuit" when executing a first one or more lines of code, and a second "circuit" when executing a second one or more lines of code. As used herein, "and / or" means any one or more of the items in the list linked by "and / or." As an example, "x and / or y" means any element of the triplet {(x), (y), (x, y)}. In other words, "x and / or y" means "one or both of x and y." As another example, "x, y, and / or z" means any element of the seven-element set {(x), (y), (z), (x,y), (x,z), (y,z), (x,y,z)}. In other words, "x, y, and / or z" means "one or more of x, y, and z." As used herein, the term "exemplary" means serving as a non-limiting example, instance, or illustration. As used herein, the term "for example" begins a list of one or more non-limiting examples, instances, or illustrations. As used herein, circuitry is "operable" to perform a function whenever it includes the necessary hardware and code (if either is necessary) to perform that function, regardless of whether implementation of that function is disabled or enabled (e.g., by a user-configurable setting, factory trim, etc.).

[0034] Although the present method and / or system has been described with reference to certain specific embodiments, those skilled in the art will recognize that various modifications and equivalent substitutions may be made without departing from the scope of the present method and / or system. For example, blocks and / or components of the disclosed examples may be combined, divided, rearranged, and / or otherwise modified. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the present disclosure without departing from the scope of the present disclosure. Therefore, the present method and / or system is not limited to the particular embodiments disclosed. Instead, the present method and / or system includes all embodiments falling within the scope of the appended claims, both literally and under the doctrine of equivalents.

Claims

1. 1. A charge neutralization device comprising: An emitter nozzle, The emitter and a housing configured to hold the emitter, the housing comprising a plurality of cams on an exterior surface of the housing; an emitter nozzle comprising: a nozzle receptacle configured to allow insertion and removal of the emitter nozzle and to hold the emitter nozzle in place during operation of the emitter nozzle; a plurality of threads on the emitter nozzle corresponding to the plurality of cams, the plurality of threads having a first flank angle; a plurality of shelves located at a distal end of each of the plurality of threads, the plurality of shelves having a second flank angle less than the first flank angle; a nozzle receptacle, An apparatus comprising:

2. 10. The apparatus of claim 1, further comprising a power source, the nozzle receptacle configured to conduct power from the power source to the emitter nozzle when the emitter nozzle is placed within the nozzle receptacle.

3. 10. The apparatus of claim 1, wherein the housing of the emitter nozzle includes two cams and the nozzle receptacle includes a double thread.

4. The apparatus of claim 1 , wherein the plurality of threads comprises between ½ turn and 1 full turn for seating the emitter nozzle within the nozzle receptacle.

5. 2. The apparatus of claim 1, wherein the nozzle receptacle comprises a seat configured to provide a seal against an exterior surface of the housing of the emitter nozzle, the emitter nozzle comprising a seal on the exterior surface of the housing, the seal adapted to abut against the seat.

6. 6. The apparatus of claim 5, further comprising an ionizer housing having a plurality of nozzle receptacles.

7. 7. The apparatus of claim 6, wherein the inner surface of the ionizer housing is pressurized with air, and the seat is configured to seal against air pressure.

8. The apparatus of claim 6 , wherein the ledge is configured to prevent air pressure from loosening the emitter nozzle from the nozzle receptacle.

9. The apparatus of claim 1 , wherein the nozzle receptacle is injection molded.

10. The apparatus of claim 1 , wherein at least one of the ledges has a second flank angle of 0 degrees.

11. 11. The device of claim 10, wherein at least one of the ledges has a protrusion between the thread and the ledge such that one of the cams must pass over the protrusion to reach the corresponding ledge from the thread and to reach the corresponding thread from the ledge.

12. The apparatus of claim 1 , wherein at least one of the ledges has a second flank angle that is less than 0 degrees.

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