Fluid Control Valve

Abstract

To provide a fluid control valve capable of coping with a variation in the size of a valve seat in an opening and closing direction of a valve body.SOLUTION: A fluid control valve includes a spring 52 for applying energizing force to a valve body 32 in a closing direction. A servo motor 6 includes a driving shaft 62 for operating the valve body 32. The fluid control valve has a position control mode for controlling the driving shaft 62 so that the driving shaft 62 moves to a target position, and a thrust control mode for controlling the driving shaft 62 so that the driving shaft 62 obtains a target thrust. The fluid control valve includes a control program for controlling the servo motor 6 from a valve opening position to a predetermined position before the valve body 32 reaches a valve closing position by the position control mode when the valve body 32 is operated from the valve opening position to the valve closing position, for, from the predetermined position, switching the control of the servo motor 6 from the position control mode to the thrust control mode with the target thrust as zero, and causing the valve body 32 to reach the valve closing position by energizing force only.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a fluid control valve that includes a motor, a valve element, a valve seat, and a flow path, and controls a control fluid flowing through the flow path by moving the valve element by the motor between a valve open position where it is separated from the valve seat and a valve closed position where it is in contact with the valve seat. [Background technology]

[0002] Multiple types of process gases are used in film formation processes in semiconductor manufacturing processes. Fluid control valves are used to control the flow rates of these process gases. For example, the fluid control valve disclosed in Patent Document 1 is known as a fluid control valve. The fluid control valve disclosed in Patent Document 1 is an air-operated on-off valve that uses an air cylinder to control the contact and separation movement of a valve body (diaphragm) and a valve seat, thereby controlling the flow rate of the process gas.

[0003] Furthermore, the fluid control valve disclosed in Patent Document 1 is an air-operated on-off valve using an air cylinder as the drive device, but it may also be an electrically driven valve using a linear servo motor as the drive device. When a linear servo motor is used as the drive source, for example, the position where the valve disc and valve seat abut is set as the origin position of the servo motor, and the valve opening degree is adjusted by the relative position from the origin position. Then, when the valve is to be closed, the valve is returned to the origin so that the valve disc abuts against the valve seat. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2017-223318 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the above-mentioned fluid control valve using a linear type servo motor has the following problems.

[0006] Typically, the user of a fluid control valve sets the home position under room temperature. However, the process gas being controlled is extremely hot, e.g., at 200°C. The valve seat, typically made of a resin such as PFA, expands when heated by the control fluid. This expansion can cause the valve seat's thickness in the opening and closing direction of the valve disc to increase compared to its size at room temperature. If the valve seat becomes too thick, when attempting to close the valve from an open state, the valve disc and the valve seat may come into contact before the servomotor reaches the home position. However, even after the valve disc and the valve seat come into contact, the servomotor attempts to return to the home position, resulting in strong interference between the valve disc and the valve seat and placing a heavy load on the servomotor. Fluid control valves used in semiconductor manufacturing processes to control the flow rate of process gases require highly accurate valve opening control, so high-resolution servomotors are used. Therefore, even a valve seat expansion of just a few microns places a very high load on the servomotor. If a high load continues to be applied to the servo motor, it may cause the motor coil to burn out or other problems that could lead to the servo motor failing.

[0007] Furthermore, if the valve seat wears due to repeated contact and separation between the valve disc and the valve seat, the thickness of the valve seat may become smaller than its initial state. If the thickness of the valve seat becomes smaller, when attempting to close the valve from an open state, the valve disc and the valve seat may not come into contact even when the servo motor reaches the home position. If the valve disc and the valve seat do not come into contact, there is a risk of fluid leakage due to poor sealing.

[0008] The present invention has been made in view of the above problems, and has an object to provide a fluid control valve that can accommodate dimensional fluctuations of the valve seat in the opening and closing direction of the valve body. [Means for solving the problem]

[0009] In order to solve the above problems, a fluid control valve according to one aspect of the present invention has the following configuration.

[0010] (1) A fluid control valve includes a motor, a valve element, a valve seat, and a flow path, and the motor controls a control fluid flowing through the flow path by moving the valve element between a valve open position where the valve element is separated from the valve seat and a valve closed position where the valve element is in contact with the valve seat. The fluid control valve includes an elastic member that applies a biasing force to the valve element in a closing direction, the motor includes a drive shaft that operates the valve element, and a position control mode that controls the drive shaft to move to a target position, and a thrust control mode that controls the drive shaft to obtain a target thrust. a position of the drive shaft corresponding to the valve closed position at room temperature is set as an origin position; The valve body of From the valve open position to the valve closed position Movement Made by to make When, In the position control mode, the drive shaft is accelerated in the closing direction by a thrust force, and is controlled so as to move from a position corresponding to the valve open position toward the origin position, and the drive shaft is moved to the origin position reaches a predetermined position before reaching When I did, The control of the motor is switched from the position control mode to the thrust control mode in which the target thrust is set to zero, and the valve body 、 The biasing force alone By moving it, the movement speed will be reduced, The valve is characterized by having a control program for reaching the valve closed position.

[0011] According to the fluid control valve described in (1), when the valve disc moves from the valve open position to the valve closed position, the motor is controlled in position control mode until the valve disc reaches a predetermined position before the valve closed position. At the predetermined position, the motor control is switched from position control mode to thrust control mode with a target thrust of zero, and the valve disc is controlled to reach the valve closed position using only the biasing force of the elastic member. In other words, because the valve disc is driven from the predetermined position to the valve closed position using only the biasing force of the elastic member, even if the valve seat expands and the valve disc comes into contact with the valve seat before the motor reaches the home position, the motor will not attempt to return to the home position. This prevents a high load from being placed on the motor, preventing motor failure such as motor coil burnout.

[0012] Furthermore, even if the valve seat wears down and becomes smaller, so that the valve disc does not come into contact with the valve seat when the motor reaches the home position, the valve disc is driven from a predetermined position by the biasing force of the elastic member alone, so it will not stop at the home position but will be reliably driven to the valve closed position where it comes into contact with the valve seat, thereby preventing fluid leakage due to poor sealing.

[0013] (2) In the fluid control valve described in (1), it is desirable that the control program maintains the valve element in the valve closed position after the valve element reaches the valve closed position by using the thrust control mode in which the target thrust is set to zero.

[0014] According to the fluid control valve described in (2), when the valve closed state is maintained, i.e., when the valve disc is in the valve closed position, the state is maintained in a thrust control mode in which the target thrust is set to zero. In other words, no load is applied to the motor, and the valve closed state is maintained only by the biasing force of the elastic member. This reduces the load on the motor and extends its lifespan. Furthermore, for example, even if the fluid control valve breaks down or the power supply to the fluid control valve is cut off due to a power outage or the like, the valve closed state is maintained only by the biasing force of the elastic member, providing high safety from a fail-safe perspective.

[0015] (3) In the fluid control valve described in (1) or (2), it is desirable that the predetermined position be determined based on the amount of thermal expansion of the valve seat in the opening and closing direction of the valve body.

[0016] To improve responsiveness when driving the disc from the open position to the closed position, it is desirable to set the predetermined position as close as possible to the valve seat and to narrow the range between the open and closed positions where only the biasing force of the elastic member is relied upon. Therefore, the predetermined position is determined based on the amount of thermal expansion of the valve seat in the opening and closing direction of the disc. Specifically, if the amount of thermal expansion of the valve seat is Δt, for example, the predetermined position is set to a position Δt + several μm before the motor's origin position. This position corresponds to the position where the disc has advanced 90-95% from the open position in the closing direction during the stroke of the disc from the open position to the closed position. By setting the predetermined position in this way, the disc is driven by the motor's position control mode to a position just before it contacts the expanded valve seat, thereby achieving highly responsive valve closing. [Effects of the Invention]

[0017] The fluid control valve of the present invention can accommodate variations in the size of the valve seat in the opening and closing direction of the valve body. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 2 is a schematic cross-sectional view of a fluid control valve. [Figure 2] FIG. 2 is a partial enlarged view of the X portion of FIG. [Figure 3] FIG. 2 is a block diagram of a control system of the fluid control valve. [Figure 4] 4 is a flow chart of an initial setting program for a fluid control valve. [Figure 5] 4 is a flow chart of a control program for a fluid control valve. [Figure 6] (a) is a diagram showing the state of the servo motor control mode when the valve disc moves from the valve open position to the valve closed position. (b) is a graph showing the position of the valve disc when it moves from the valve open position to the valve closed position. (c) is a graph showing the thrust value of the drive shaft when the valve disc moves from the valve open position to the valve closed position. DETAILED DESCRIPTION OF THE INVENTION

[0019] An embodiment of a fluid control valve according to the present invention will be described in detail with reference to the drawings.

[0020] (Configuration of fluid control valve) The configuration of a fluid control valve 1 according to this embodiment will be described with reference to FIG. 1. FIG. 1 is a schematic cross-sectional view of the fluid control valve 1. The fluid control valve 1 is an electrically operated gas valve disposed in a gas supply system of a semiconductor manufacturing device, and is made up of a drive unit 2 and a valve unit 3. The drive unit 2 further comprises an actuator unit 4 and a spring unit 5.

[0021] First, a description will be given of the actuator section 4. The actuator section 4 includes a direct acting servo motor 6 (an example of a motor) and a connection bracket 7 for connecting the servo motor 6 and the spring section 5.

[0022] The servo motor 6 includes a rectangular parallelepiped case 61 and a cylindrical drive shaft 62 inserted through the center of the case 61. The case 61 includes linear bearings 63 at both the end on the connection bracket 7 side (the lower end in the figure) and the end on the opposite side from the connection bracket 7 (the upper end in the figure). The linear bearings 63 support the drive shaft 62 so that it can move back and forth in the axial direction of the drive shaft 62. The axial direction of the drive shaft 62 is the up-down direction in FIG. 1, which coincides with the opening and closing direction of the valve body 32 described below. The upper side in the figure corresponds to the open direction, and the lower side corresponds to the closed direction.

[0023] The drive shaft 62 is provided with a magnet 621 on the outer periphery of the portion that is inserted into the case 61. The case 61 also has a coil 64 positioned so as to surround the magnet 621 of the drive shaft 62. The magnet 621 is moved in the opening and closing direction depending on the magnitude of the voltage and current passed through the coil 64. As a result, the drive shaft 62, which is coupled to the magnet 621, is driven in the opening and closing direction.

[0024] The drive shaft 62 is provided with a linear scale 622 at the end opposite the connecting bracket 7 side (the upper end in the drawing). The servo motor 6 is also provided with a linear encoder 65 at the upper end of the case 61, which detects the displacement of the vertical position of the linear scale 622. The linear encoder 65 detects the displacement of the vertical position of the linear scale 622, making it possible to detect the position of the drive shaft 62 in the opening / closing direction.

[0025] The end of the drive shaft 62 on the connection bracket 7 side (the lower end in the figure) protrudes from the case 61 and is connected to a cylindrical rod 9 within the connection bracket 7 by a coupling 8. The rod 9 is inserted through the spring portion 5 and extends from within the connection bracket 7 to the valve portion 3.

[0026] Next, the spring portion 5 will be described. The spring portion 5 includes a housing 51 and a spring 52 (an example of an elastic member). The housing 51 is hollow, and the rod 9 is inserted through the center thereof. The spring 52 is positioned coaxially with the rod 9. The spring 52 is a compression coil spring, and its end portion on the valve portion 3 side (the lower end portion in the drawing) abuts against the end face of the valve element 32 (described later) on the spring portion 5 side (the upper end face in the drawing), thereby constantly biasing the valve element 32 in the closing direction (downward in the drawing).

[0027] Next, we will explain the valve portion 3. The valve portion 3 includes a body 31 and a valve element 32. The body 31 includes a cylindrical portion 315 that connects to the spring portion 5. Furthermore, the body 31 has a valve chamber 311 drilled inside the cylindrical portion 315.

[0028] The valve chamber 311 communicates at its center with an input flow path 313 via a valve port 312. This input flow path 313 is used to input a process gas into the valve chamber 311. Furthermore, an annular valve seat 33 is provided on the bottom surface of the valve chamber 311, coaxially with the valve port 312, around the outer periphery of the valve port 312. Furthermore, the valve chamber 311 communicates with an output flow path 314 radially outward of the valve seat 33. This output flow path 314 is used to output the process gas from the valve chamber 311. In other words, the input flow path 313, the valve chamber 311, and the output flow path 314 form a series of flow paths through which the process gas flows.

[0029] The valve seat 33 is made of, for example, a heat-resistant material such as PI (polyimide) or PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer). The end face of the valve seat 33 facing the valve element 32 is the contact surface 331 (see FIG. 2) with which the valve element 32 contacts.

[0030] 2 is the position at room temperature. Because the process gas flowing through the fluid control valve 1 is at a very high temperature, for example, 200°C, the valve seat 33 is heated by the process gas and expands. The position of the abutment surface 331 in the opening and closing direction after this expansion is the position shown as position Y12. For example, if the material of the valve seat 33 is PFA and the dimension (thickness dimension) of the valve seat 33 in the opening and closing direction is approximately 1.5 mm, the amount of expansion Δt11 will be 20 to 30 μm.

[0031] On the other hand, repeated contact and separation between the valve disc 32 and the valve seat 33 may cause the valve seat 33 to wear or may be deformed due to creep, etc. Due to wear or creep, the position of the contact surface 331 in the opening and closing direction is indicated as position Y13. The difference between position Y11 and position Y13 at this time is defined as the contraction amount Δt12.

[0032] The valve element 32 includes a main body 321 and a diaphragm 322. The main body 321 is made of, for example, stainless steel. The main body 321 is connected at its upper end to the rod 9, and moves in the opening and closing direction (the up and down direction in the drawing) as the drive shaft 62 moves back and forth. The lower end surface of the main body 321 is the contact surface that contacts the valve seat 33.

[0033] The diaphragm 322 is a disk-shaped thin film member made of a Ni alloy. The main body 321 and the diaphragm 322 are joined by, for example, laser welding. Furthermore, the outer periphery of the diaphragm 322 is fixed to the housing 51. As a result, the diaphragm 322 divides the interior of the cylindrical portion 315 of the body 31 into the valve chamber 311 and an upper portion thereof, and is adapted to repeatedly elastically deform as the main body 321 moves in the opening and closing directions (the up and down directions in the drawing).

[0034] (Regarding the control system of the fluid control valve) The control system of the fluid control valve 1 will be described with reference to Fig. 3. Fig. 3 is a block diagram of the control system of the fluid control valve 1. The driver 10 that controls the servo motor 6 includes a position controller 101, a thrust controller 102, a position loop controller 103, a speed loop controller 104, a current loop controller 105, converters 106, 107, 108, and a control selector switch 109. The servo motor 6 has a position control mode that controls the drive shaft 62 so that the drive shaft 62 moves to a target position, and a thrust control mode that controls the drive shaft 62 so that the drive shaft 62 obtains a target thrust, and the control selector switch 109 makes it possible to switch between the position control mode and the thrust control mode.

[0035] Control in the position control mode is performed as follows: First, the position controller 101 outputs a position command to the position loop controller 103 based on the target position of the drive shaft 62 .

[0036] The position loop controller 103 then performs, for example, PD control and calculates a speed command based on the position command and the current position of the drive shaft 62 fed back from the linear encoder 65. The current position of the drive shaft 62 fed back from the linear encoder 65 is a signal output by the converter 107 based on the number of pulses output by the linear encoder 65.

[0037] The speed loop controller 104 then calculates a torque command by performing, for example, PID control based on the speed command calculated by the position loop controller 103 and the current speed of the drive shaft 62 fed back from the linear encoder 65. The current speed of the drive shaft 62 fed back from the linear encoder 65 is a signal output by the converter 108 based on the number of pulses output by the linear encoder 65.

[0038] Then, the current loop controller 105 outputs a current command based on the torque command calculated by the speed loop controller 104. Based on this current command, the converter 106 supplies the required current to the servo motor 6, thereby controlling the position of the drive shaft 62 of the servo motor 6.

[0039] Control in the thrust control mode is performed as follows: First, the thrust controller 102 outputs a thrust command to the current loop controller 105 based on the target thrust of the drive shaft 62. Then, the current loop controller 105 outputs a current command based on the thrust command output from the thrust controller 102. Based on this current command, the converter 106 supplies the required current to the servo motor 6, thereby controlling the thrust of the drive shaft 62 of the motor 2.

[0040] (Operation of fluid control valve) In the control system described above, the fluid control valve 1 is operated as follows. Fig. 4 is a flow chart of an initial setting program for the fluid control valve 1. Fig. 5 is a flow chart of a control program for the fluid control valve 1. Fig. 6(a) is a diagram showing the state of the control mode of the servo motor 6 when the valve disc 32 moves from the valve open position to the valve closed position. Fig. 6(b) is a graph showing the position of the valve disc 32 when the valve disc 32 moves from the valve open position to the valve closed position. Fig. 6(c) is a graph showing the thrust value of the drive shaft 62 when the valve disc 32 moves from the valve open position to the valve closed position.

[0041] Before starting to use the fluid control valve 1, an initial setting program is used to initialize the parameters (items shown in S11-S17 in FIG. 4) required for controlling the fluid control valve 1. This will be explained in detail below.

[0042] First, the origin position of the servo motor 6 is set (S11 in FIG. 4). Specifically, the valve element 32 is brought into contact with the valve seat 33 at room temperature. That is, the valve element 32 is positioned in the valve closed position. The position of the drive shaft 62 in this state is set as the origin position. At this time, the position of the contact surface 331 of the valve element 32, which the valve element 32 contacts, in the opening / closing direction is position Y11.

[0043] Next, a target position is set (S12 in FIG. 4). This target position is the amount of movement of the drive shaft 62 from the origin position in the opening direction, and in the position control mode, the position control controller 101 (see FIG. 3) outputs a position command based on this target position. Since the valve element 32 moves from the valve closed position in the opening direction by the amount of movement of the drive shaft 62 from the origin position in the opening direction, setting the target position is equivalent to setting the stroke of the valve element 32 from the valve closed position to the valve open position. This target position is determined appropriately based on factors such as the flow rate of the process gas required in the film formation process of the semiconductor manufacturing process. For example, in this embodiment, it is approximately 1 mm.

[0044] Next, a switching position (an example of a predetermined position) for the control of the servo motor 6 is set (S13 in FIG. 4). Specifically, when the valve element 32 is moved from the valve open position to the valve closed position, a position between the valve open position and the valve closed position at which the control of the servo motor 6 is switched from the position control mode to the thrust control mode is set.

[0045] The switching position is determined based on the amount of thermal expansion Δt11 of the valve seat 33 in the opening / closing direction of the valve element 32. Specifically, for example, if the amount of thermal expansion of the valve seat 33 is Δt11, the switching position is set to a position that is the amount of thermal expansion Δt11+several μm before the origin position of the servo motor 6. This position is a position where the valve element 32 has advanced 90-95% in the closing direction from the valve open position during the stroke (for example, 1 mm) of the valve element 32 from the valve open position to the valve closed position.

[0046] Next, the acceleration / deceleration time of the servo motor 6 is set (S14 in FIG. 4). This sets the time it takes for the drive shaft 62 to move from the origin position to the target position. This is equivalent to setting the time it takes for the valve disc 32 to move between the valve open position and the valve closed position.

[0047] Next, the stopping time of the servo motor 6 at the valve open position is set (S15 in FIG. 4). This is to set the time for which the valve element 32 is maintained in the valve open position after being moved to the valve open position.

[0048] Next, the time for which the servo motor 6 is stopped in the valve closed position is set (S16 in FIG. 4). This sets the time for which the valve element 32 is maintained in the valve closed position after being moved to the valve closed position. The times set in S14-S16 in FIG. 4 are appropriately set according to the cycle time of the opening and closing operations required in the film formation process of the semiconductor manufacturing process.

[0049] Next, a target thrust is set (S17 in FIG. 4). This sets the thrust to drive the drive shaft 62 when controlling the servo motor 6 in the thrust control mode. Here, the target thrust is set to zero. Once the setting of the target thrust is complete, the initial setting of the parameters is also completed. Note that the order in which the parameters (S11-17 in FIG. 4) are set is not limited to the above. Also, S17 in FIG. 4 may be omitted and the target thrust may be set to zero in advance.

[0050] The opening and closing operations of the fluid control valve 1 are performed by a control program described below.

[0051] First, when the operation of the fluid control valve 1 is started, the linear encoder 65 detects the current position of the drive shaft 62 (S21 in FIG. 5). The current position of the drive shaft 62 is the current position of the valve element 32. The valve element 32 is always biased in the closing direction by the spring 52, so it is in the valve closed position when the operation of the fluid control valve 1 starts. Therefore, it is detected here as being in the origin position.

[0052] Next, the valve opening operation is performed (S22 in FIG. 5). That is, the valve element 32 is driven toward the valve open position. This is performed in position control mode, based on the target position set in the initial setting (see S12 in FIG. 4). In this embodiment, the stroke is set to 1 mm, so the valve element 32 moves 1 mm in the opening direction from the origin position. The moving speed at this time is based on the acceleration / deceleration time of the servo motor 6 set in the initial setting (see S14 in FIG. 4).

[0053] Time t0 in Figure 6 is the time when the valve disc 32 reaches the valve open position. As shown in Figure 6(a), at time t0, the control mode of the servo motor 6 is the position control mode. As shown in Figure 6(b), the valve disc 32 is located at the valve open position. The thrust of the drive shaft 62 indicates a value (F11) greater than zero. The thrust is generated in the drive shaft 62 because the position of the drive shaft 62 is maintained at the valve open position against the biasing force of the spring 52. Whether the valve disc 32 has reached the valve open position is determined by monitoring whether the amount of change in the current position of the drive shaft 62 falls within a given error pulse range. When the amount of change falls within the range, it is determined that the valve disc 32 has reached the valve open position.

[0054] Next, the valve element 32 moves to the valve open position and is then held at the valve open position (S23 in FIG. 5). The time for which this is held is based on the time for which the servo motor 6 is stopped at the valve open position, which is set in the initial setting (see S15 in FIG. 4).

[0055] The stop time corresponds to the period from time t0 to time t1 in Figure 6. Between time t0 and time t1, the valve element 32 is maintained in the valve open position in the position control mode (see Figures 6(a) and 6(b)). The thrust force acting on the drive shaft 62 is also constant between time t0 and time t1 (see Figure 6(c)).

[0056] After the stop time has elapsed, the valve is closed (S24 in FIG. 5). This is performed in position control mode, and the drive shaft 62 of the servo motor 6 is controlled to move toward the origin position, thereby driving the valve element 32 toward the valve closed position. The movement speed at this time is based on the acceleration / deceleration time of the servo motor 6 set in the initial setting (see S14 in FIG. 4).

[0057] Note that time t1 in Figure 6 is the time when the valve closing operation starts. From time t1, the valve element 32 starts moving toward the valve closing position while maintaining the position control mode (see Figures 6(a) and 6(b)). The thrust of the drive shaft 62 reaches a maximum value (F12) immediately after the start of the valve closing operation. This is because the drive shaft 62 is rapidly accelerated in the closing direction at the start of the operation. As the valve element 32 approaches the valve closing position, a thrust is applied in the opening direction to brake the drive shaft 62, and so the thrust decreases to a negative value (F13) in Figure 6(c).

[0058] Next, when the valve closing operation is started, it is monitored whether or not the drive shaft 62 has reached a control switching position for the servo motor 6 (S25 in FIG. 5). The control switching position for the servo motor 6 is a position, set in the initial setting, at which the control of the servo motor 6 is switched from the position control mode to the thrust control mode (see S13 in FIG. 4). Until the switching position is reached, the drive shaft 62 of the servo motor 6 continues to be controlled to move toward the home position in the position control mode (S25: NO). Then, when the drive shaft 62 reaches the switching position (S25: YES), the mode is switched to the thrust control mode (S26 in FIG. 5). This is performed by switching the control selector switch 109 (see FIG. 3).

[0059] When the mode is switched to the thrust control mode, the servo motor 6 is controlled based on a target thrust. The target thrust is a parameter that is set in the initial setting (see S17 in FIG. 4), and in this case, the target thrust is set to zero. Therefore, no current is supplied from the converter 106 (see FIG. 3) to the servo motor 6, and the valve disc 32 is moved to a position where the valve disc 32 abuts against the valve seat 33 (valve closed position) by the biasing force of the spring 52 alone.

[0060] At room temperature, the origin position of the servo motor 6 is the valve closed position. However, if the valve seat 33 expands, the valve closed position will shift toward the opening position by the amount of thermal expansion Δt11 (see Figure 2). In other words, the valve disc 32 and the valve seat 33 will come into contact before the servo motor 6 reaches the origin position. However, because the valve disc 32 is driven from the switching position solely by the biasing force of the spring 52, even if the valve seat 33 expands and the valve disc 32 and the valve seat 33 come into contact before the servo motor 6 reaches the origin position, the servo motor 6 will not subsequently attempt to return to the origin. Therefore, the servo motor 6 will not be subjected to a high load, and breakdowns of the servo motor 6, such as burnout of the coil 64, can be prevented.

[0061] Furthermore, the switching position from the position control mode to the thrust control mode is set at a position where the valve disc 32 has advanced 90-95% in the closing direction from the valve open position during the stroke of the valve disc 32 from the valve open position to the valve closed position, thereby improving responsiveness when driving the valve disc 32 from the valve open position to the valve closed position. Because the fluid control valve 1 installed in the gas supply system of a semiconductor manufacturing device is compact, the biasing force of the spring 52 is weaker than that of a typical air-operated valve. Therefore, to improve responsiveness, it is desirable to position the switching position as close as possible to the valve seat 33 and narrow the range between the valve open position and the valve closed position that relies solely on the biasing force of the spring 52 as much as possible. By setting the switching position as described above, the valve disc 32 is driven by the servo motor 6 in the position control mode up to a position just before it abuts the expanded valve seat 33, thereby enabling the valve to be closed with high responsiveness.

[0062] On the other hand, if the valve seat 33 wears or creeps, causing the position of the abutment surface 331 to drop, the valve closed position will shift toward the closing direction from the original position by the amount of contraction Δt12 (see FIG. 2). In other words, even if the servo motor 6 reaches the original position, the valve disc 32 will not abut against the valve seat 33. However, because the valve disc 32 is driven only by the biasing force of the spring 52 from the switching position, even if the servo motor 6 reaches the original position, it will not stop at the original position but will be reliably driven to the valve closed position where it abuts against the valve seat 33. This makes it possible to prevent fluid leakage due to poor sealing.

[0063] Time t2 in FIG. 6 is the time when the valve disc 32 reaches the switching position, and is the time when control of the servo motor 6 is switched from the position control mode to the thrust control mode. When the mode is switched to the thrust control mode, the thrust of the drive shaft 62 becomes zero based on the set target thrust. Then, from time t2 when the mode is switched to the thrust control mode, the movement speed of the valve disc 32 decreases (the slope of the graph in FIG. 6(b) becomes gentler). This is because the valve disc 32 is moved only by the biasing force of the spring 52. Time t3 in FIG. 6 is the time when the valve disc 32 reaches the valve closed position. Whether the valve disc 32 has reached the valve closed position is determined by monitoring whether the amount of change in the current position of the drive shaft 62 falls within a given error pulse range. When the amount of change falls within this range, it is determined that the valve disc 32 has reached the valve closed position.

[0064] Next, when the valve-closed position is reached, the valve element 32 is maintained in the valve-closed position (S27 in FIG. 5). The duration of this maintenance is based on the stop time of the servo motor 6 at the valve-closed position, which is set in the initial setting (see S16 in FIG. 4). While the valve-closed position is maintained, the servo motor 6 is controlled in a thrust control mode in which the target thrust is set to zero. In other words, no load is applied to the servo motor 6, and the valve-closed state is maintained only by the biasing force of the spring 52. This reduces the load on the servo motor 6 and extends its lifespan. Furthermore, for example, even if the fluid control valve 1 breaks down or the power supply to the fluid control valve 1 is cut off due to a power outage or the like, the valve-closed state is maintained only by the biasing force of the spring 52, providing high safety from a fail-safe perspective.

[0065] When the above-mentioned stop time has elapsed, the mode is switched to the position control mode (S28 in FIG. 5), and then the valve closing operation is performed in the position control mode (S24 in FIG. 5). As described above, the opening and closing operation of the fluid control valve 1 is performed by repeating the processes of S22 to S28 in FIG. 5.

[0066] As described above, the fluid control valve 1 according to this embodiment has the following features: (1) A fluid control valve 1 includes a motor (e.g., a servo motor 6), a valve element 32, a valve seat 33, and a flow path (a series of flow paths formed by an input flow path 313, a valve chamber 311, and an output flow path 314), and the motor (servo motor 6) moves the valve element 32 between a valve open position where the valve element 32 is separated from the valve seat 33 and a valve closed position where the valve element 32 abuts against the valve seat 33, thereby controlling a control fluid (e.g., a process gas) flowing through the flow path. The fluid control valve 1 includes an elastic member (e.g., a spring 52) that applies a biasing force to the valve element 32 in a closing direction, the motor (servo motor 6) includes a drive shaft 62 that operates the valve element 32, and a drive shaft 62 that drives the drive shaft 62 to move to a target position. The control system is characterized by having a position control mode for controlling the drive shaft 62 and a thrust control mode for controlling the drive shaft 62 so that the drive shaft 62 obtains a target thrust, and a control program (S21-S28 in FIG. 5) for controlling the motor (servo motor 6) in the position control mode when the valve element 32 moves from the valve open position to the valve closed position until the valve element 32 reaches a predetermined position (switching position) before reaching the valve closed position, and switching the control of the motor (servo motor 6) from the position control mode to the thrust control mode with the target thrust set to zero from the predetermined position (switching position), and causing the valve element 32 to reach the valve closed position using only the biasing force.

[0067] According to the fluid control valve 1 described in (1), when the valve element 32 moves from the valve open position to the valve closed position, the motor (servo motor 6) is controlled in position control mode until the valve element 32 reaches a predetermined position before the valve closed position. At the predetermined position, the control of the motor (servo motor 6) is switched from the position control mode to a thrust control mode in which the target thrust is set to zero, and the valve element is controlled to reach the valve closed position solely by the biasing force of the elastic member. In other words, since the valve element 32 is driven solely by the biasing force of the elastic member (spring 52) from the predetermined position (switching position) to the valve closed position, even if the valve seat 33 expands and the valve element 32 abuts against the valve seat 33 before the motor (servo motor 6) reaches the home position, the motor (servo motor 6) does not subsequently attempt to return to the home position. This prevents a high load from being applied to the motor (servo motor 6), preventing motor (servo motor 6) failure, such as burnout of the motor coil 64.

[0068] Furthermore, even if the valve seat 33 wears down and becomes smaller, so that the valve element 32 does not come into contact with the valve seat 33 even when the motor (servo motor 6) reaches the home position, the valve element 32 is driven from a predetermined position (switching position) only by the biasing force of the elastic member (spring 52), and is therefore reliably driven to the valve closed position where it comes into contact with the valve seat 33 without stopping at the home position. This makes it possible to prevent fluid leakage due to poor sealing.

[0069] (2) In the fluid control valve 1 described in (1), it is desirable that the control program (S21-S28 in FIG. 5) maintains the valve element 32 in the valve closed position after the valve element 32 reaches the valve closed position by using a thrust control mode in which the target thrust is set to zero.

[0070] According to the fluid control valve 1 described in (2), when the valve closed state is maintained, that is, when the valve element 32 is in the valve closed position, the state is maintained in a thrust control mode in which the target thrust is set to zero. In other words, no load is applied to the motor (servomotor 6), and the valve closed state is maintained only by the biasing force of the elastic member (spring 52). This reduces the load on the motor (servomotor 6) and enables a longer lifespan. Furthermore, for example, even if the fluid control valve 1 breaks down or the power supply to the fluid control valve 1 is cut off due to a power outage or the like, the valve closed state is maintained only by the biasing force of the elastic member (spring 52), providing high safety from a fail-safe perspective.

[0071] (3) In the fluid control valve 1 described in (1) or (2), it is desirable that the predetermined position (switching position) is determined based on the amount of thermal expansion Δt11 of the valve seat 33 in the opening and closing direction of the valve element 32.

[0072] To improve responsiveness when driving the valve disc 32 from the valve open position to the valve closed position, it is desirable to position the predetermined position (switching position) as close as possible to the valve seat 33 and to narrow the range between the valve open position and the valve closed position that relies solely on the biasing force of the elastic member (spring 52). Therefore, the predetermined position (switching position) is determined based on the amount of thermal expansion Δt11 of the valve seat 33 in the opening and closing direction of the valve disc 32. Specifically, for example, the predetermined position is set to a position Δt11 + several μm before the origin position of the motor (servomotor 6). This position is a position where the valve disc 32 has advanced 90-95% in the closing direction from the valve open position during the stroke of the valve disc 32 from the valve open position to the valve closed position. By setting the predetermined position (switching position) in this way, the valve disc 32 is driven by the position control mode of the motor (servomotor 6) to a position immediately before contacting the expanded valve seat 33, thereby enabling highly responsive valve closing.

[0073] It should be noted that the above-described embodiment is merely illustrative and does not limit the present invention in any way. Therefore, the present invention can naturally be improved and modified in various ways without departing from the spirit and scope of the present invention. For example, the opening and closing operation of the fluid control valve 1 according to this embodiment is performed by the lower end surface of the main body 321 of the valve element 32 coming into contact with and separating from the valve seat 33. However, as in the fluid control valve disclosed in Japanese Patent Application Laid-Open No. 2017-223318, the opening and closing operation may be performed by the diaphragm coming into contact with and separating from the valve seat. [Explanation of symbols]

[0074] 1. Fluid control valve 6 Servo motor (example of a motor) 32 Valve body 33 Valve seat 52 Spring (an example of an elastic member) 62 Drive shaft

Claims

1. The valve includes a motor, a valve body, a valve seat, and a flow path, a motor that moves the valve element between a valve open position where the valve element is separated from the valve seat and a valve closed position where the valve element is in contact with the valve seat, thereby controlling a control fluid flowing through the flow path; an elastic member that applies a biasing force in a closing direction to the valve body; The motor a drive shaft for operating the valve body; a position control mode in which the drive shaft is controlled so as to move to a target position; a thrust control mode in which the drive shaft is controlled so as to obtain a target thrust; Equipped with a position of the drive shaft corresponding to the valve closed position at room temperature is set as an origin position; a control program for controlling the drive shaft to accelerate in the closing direction by thrust in the position control mode when the valve element is moved from the valve open position to the valve closed position, and to move from a position corresponding to the valve open position to the origin position, and when the drive shaft reaches a predetermined position before reaching the origin position, switching control of the motor from the position control mode to the thrust control mode in which the target thrust is set to zero, and moving the valve element only by the biasing force, thereby reducing the moving speed and causing the valve element to reach the valve closed position; A fluid control valve comprising:

2. 2. The fluid control valve according to claim 1, The control program After the valve element reaches the valve closed position, the state of the valve element at the valve closed position is maintained in the thrust control mode in which the target thrust is set to zero. A fluid control valve comprising:

3. 3. The fluid control valve according to claim 1, the predetermined position is determined based on the amount of thermal expansion of the valve seat in the opening and closing direction of the valve body; A fluid control valve comprising:

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