Piezoelectric element

Abstract

Provided is a piezoelectric element comprising a laminate of a plurality of piezoelectric films, the piezoelectric element preventing generation of wrinkles. The piezoelectric element has a configuration in which a plurality of layers of piezoelectric films are laminated, each piezoelectric film comprising a piezoelectric body layer sandwiched between electrode layers, the piezoelectric body layer including, in a matrix containing a polymer material, piezoelectric body particles, and the piezoelectric film having a protection layer laminated on a surface of the electrode layer which is not in contact with the piezoelectric body layer, the adjacent piezoelectric films being affixed together by means of an affixing layer, wherein the difference between a maximum height of the piezoelectric films in a thickness direction in a region thereof from an end face to 43 μm on the inside and a height in the thickness direction at the position 43 μm on the inside from the end face is less than or equal to 4.2 μm.

Description

[Technical Field]

[0001] The present invention relates to a piezoelectric element. [Background technology]

[0002] Piezoelectric elements are used for various purposes as so-called exciters, which are attached to various objects in contact with them to vibrate them and produce sound. For example, by attaching an exciter to an image display panel, screen, etc. and vibrating them, sound can be produced in place of a speaker.

[0003] Incidentally, when an exciter is attached to a flexible image display device, a rollable screen, or the like, the exciter itself must be flexible (rollable) at least when not in use.

[0004] As a flexible piezoelectric element, a piezoelectric film in which a piezoelectric layer is sandwiched between an electrode layer and a protective layer has been proposed. For example, Patent Document 1 describes an electroacoustic converter film having a piezoelectric laminate including a polymer composite piezoelectric body formed by dispersing piezoelectric particles in a viscoelastic matrix made of a polymer material that has viscoelasticity at room temperature, an upper thin-film electrode formed on one side of the polymer composite piezoelectric body and having an area equal to or smaller than the polymer composite piezoelectric body, an upper protective layer formed on the surface of the upper thin-film electrode and having an area equal to or larger than the upper thin-film electrode, a lower thin-film electrode formed on the opposite side of the upper thin-film electrode of the polymer composite piezoelectric body and having an area equal to or smaller than the polymer composite piezoelectric body, and a lower protective layer formed on the surface of the lower thin-film electrode and having an area equal to or larger than the lower thin-film electrode, a metal foil for leading out the upper electrode laminated on a part of the upper thin-film electrode, at least a part of which is located outside the surface of the polymer composite piezoelectric body in the planar direction, and a metal foil for leading out the lower electrode laminated on a part of the lower thin-film electrode, at least a part of which is located outside the surface of the polymer composite piezoelectric body in the planar direction.

[0005] Since such piezoelectric films are in film form and have a limited spring constant, they tend to lack sufficient output when used as an exciter. Therefore, stacking piezoelectric films can be considered as an approach to increase the spring constant and therefore the output. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2014-209724 Summary of the Invention [Problem to be solved by the invention]

[0007] However, according to the investigations of the present inventors, it has been found that when a plurality of piezoelectric films are stacked, wrinkles may occur, resulting in poor appearance.

[0008] An object of the present invention is to solve the problems of the prior art, and to provide a piezoelectric element that can prevent the occurrence of wrinkles in a piezoelectric element formed by laminating a plurality of piezoelectric films. [Means for solving the problem]

[0009] In order to solve the above-mentioned problems, the present invention has the following configuration. [1] A piezoelectric element having a structure in which a piezoelectric layer containing piezoelectric particles in a matrix containing a polymer material is sandwiched between electrode layers, and a protective layer is laminated on the side of the electrode layer that is not in contact with the piezoelectric layer, and adjacent piezoelectric films are laminated with an adhesive layer, The piezoelectric film is a piezoelectric element in which the difference between the maximum height in the thickness direction in the region 43 μm inward from the end face and the height in the thickness direction at a position 43 μm inward from the end face is 4.2 μm or less. [2] The piezoelectric element according to [1], wherein the difference between the maximum height in the thickness direction of the piezoelectric film in the region extending from the end face to the inside by 43 μm and the height in the thickness direction at a position 43 μm inside from the end face is 1.4 μm or less. [3] A piezoelectric element according to [1] or [2], wherein the difference between the maximum height in the thickness direction of the piezoelectric film in the region extending from the end face to the inside by 43 μm and the height in the thickness direction at a position 43 μm inside from the end face is 0.3 μm or more. [4] The piezoelectric element according to any one of [1 to 3], wherein the thickness of the piezoelectric film is 20 μm to 80 μm. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a piezoelectric element that can prevent the occurrence of wrinkles in a piezoelectric element formed by laminating a plurality of piezoelectric films. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram schematically illustrating an example of a piezoelectric element of the present invention. [Figure 2] FIG. 2 is a cross-sectional view conceptually illustrating an example of a piezoelectric film included in a piezoelectric element. [Figure 3] FIG. 2 is a partially enlarged view of the vicinity of an end surface of the piezoelectric film. [Figure 4] FIG. 2 is a diagram schematically illustrating another example of the piezoelectric element of the present invention. [Figure 5] FIG. 2 is a diagram schematically illustrating another example of the piezoelectric element of the present invention. [Figure 6] 1A to 1C are conceptual diagrams for explaining an example of a method for producing a piezoelectric film. [Figure 7] 1A to 1C are conceptual diagrams for explaining an example of a method for producing a piezoelectric film. [Figure 8] 1A to 1C are conceptual diagrams for explaining an example of a method for producing a piezoelectric film. [Figure 9] FIG. 2 is a side view conceptually showing a cutting device used in the examples. [Figure 10] FIG. 10 is a front view of FIG. 9. [Figure 11] 10 is a diagram for explaining the amount of meshing between the upper blade and the lower blade of the cutting device of FIG. 9. FIG. [Figure 12] FIG. 2 is a side view conceptually showing a cutting device used in the examples. [Figure 13]FIG. 13 is a front view of FIG. 12. [Figure 14] 13 is a diagram for explaining the amount of meshing between the upper blade and the lower blade of the cutting device of FIG. 12. FIG. [Figure 15] FIG. 1 is a perspective view conceptually showing a cutting device used in the examples. [Figure 16] FIG. 1 is a perspective view conceptually showing a cutting device used in the examples. [Figure 17] 17 is a top view conceptually showing a punching blade of the cutting device of FIG. 16. FIG. [Figure 18] FIG. 18 is a side view of FIG. [Figure 19] FIG. 1 is a perspective view conceptually showing a cutting device used in the examples. [Figure 20] 20 is a side view conceptually showing a blade of the cutting device of FIG. 19. FIG. [Figure 21] FIG. 10 is a front view conceptually showing the shape of the blade used in the comparative example. [Figure 22] FIG. 22 is a perspective view of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The piezoelectric element of the present invention will now be described in detail with reference to preferred embodiments shown in the accompanying drawings.

[0013] The following description of the components may be based on typical embodiments of the present invention, but the present invention is not limited to such embodiments. In this specification, a numerical range expressed using "to" means a range that includes the numerical values ​​before and after "to" as the lower and upper limits.

[0014] [Piezoelectric element] The piezoelectric element of the present invention comprises: A piezoelectric element having a configuration in which a piezoelectric layer containing piezoelectric particles in a matrix containing a polymer material is sandwiched between electrode layers, and a protective layer is laminated on the surface of the electrode layer that is not in contact with the piezoelectric layer, and adjacent piezoelectric films are laminated with an adhesive layer, The piezoelectric film is a piezoelectric element in which the difference between the maximum height in the thickness direction in a region 43 μm inward from the end face and the height in the thickness direction at a position 43 μm inward from the end face is 4.2 μm or less.

[0015] FIG. 1 is a plan view showing a schematic example of a piezoelectric element of the present invention.

[0016] The piezoelectric element 50 shown in FIG. 1 is formed by laminating a plurality of piezoelectric films 10. In the example shown in FIG. 1, three piezoelectric films 10 are laminated. Adjacent piezoelectric films 10 are attached to each other by an adhesive layer 19. In the example shown in FIG. 1, the piezoelectric element 50 is attached to a diaphragm 12 by an adhesive layer 16, forming an electro-acoustic transducer 70. A power source PS is connected to each piezoelectric film 10 for applying a drive voltage. Note that, although the protective layer of each piezoelectric film is not shown in the example shown in FIG. 1, each piezoelectric film has a protective layer as shown in FIG. 2.

[0017] In such an electroacoustic transducer 70, when a drive voltage is applied to the piezoelectric film 10 of the piezoelectric element 50, the piezoelectric film 10 expands and contracts in the planar direction, and this expansion and contraction of the piezoelectric film 10 causes the piezoelectric element 14 to expand and contract in the planar direction. The expansion and contraction of the piezoelectric element 14 in the planar direction causes the diaphragm 12 to bend, and as a result, the diaphragm 12 vibrates in the thickness direction. This vibration in the thickness direction causes the diaphragm 12 to generate sound. The diaphragm 12 vibrates in accordance with the magnitude of the drive voltage applied to the piezoelectric film 10, and generates sound in accordance with the drive voltage applied to the piezoelectric film 10. That is, the electroacoustic transducer 70 can be used as a speaker using the piezoelectric element 50 as an exciter.

[0018] 1 is formed by laminating three layers of piezoelectric film 10, but the present invention is not limited to this. That is, as long as the piezoelectric element is formed by laminating multiple layers of piezoelectric film 10, the number of laminated layers of piezoelectric film 10 may be two, or four or more. In this respect, the same applies to piezoelectric element 56 shown in FIG. 4 and piezoelectric element 60 shown in FIG. 5, which will be described later.

[0019] In a preferred embodiment of the piezoelectric element 50 shown in FIG. 1, the polarization directions of adjacent piezoelectric films 10 are opposite to each other. Therefore, the lower electrode layers 24 and upper electrode layers 26 of adjacent piezoelectric films 10 face each other. Therefore, whether the power source PS is an AC power source or a DC power source, it always supplies power of the same polarity to facing electrodes. For example, in the piezoelectric element 50 shown in FIG. 1, the upper electrode layer 26 of the bottommost piezoelectric film 10 and the upper electrode layer 26 of the second (middle) piezoelectric film 10 are always supplied with power of the same polarity, and the lower electrode layer 24 of the second piezoelectric film 10 and the lower electrode layer 24 of the topmost piezoelectric film 10 are always supplied with power of the same polarity. Therefore, in the piezoelectric element 50, even if the electrodes of adjacent piezoelectric films 10 come into contact with each other, there is no risk of a short circuit.

[0020] In the piezoelectric element 50, the polarization direction of the piezoelectric film 10 may be detected by a d33 meter or the like. Alternatively, the polarization direction of the piezoelectric film 10 may be determined from the polarization processing conditions described below.

[0021] FIG. 2 shows an example of the piezoelectric film 10. 2 includes a piezoelectric layer 20, which is a sheet-like material having piezoelectric properties, a lower electrode layer 24 laminated on one side of the piezoelectric layer 20, a lower protective layer 28 laminated on the side of the lower electrode layer 24 opposite the piezoelectric layer 20, an upper electrode layer 26 laminated on the other side of the piezoelectric layer 20, and an upper protective layer 30 laminated on the side of the upper electrode layer 26 opposite the piezoelectric layer 20. In other words, the piezoelectric film 10 has a configuration in which the piezoelectric layer 20 is sandwiched between electrode layers, and a protective layer is laminated on the side of the electrode layer that is not in contact with the piezoelectric layer.

[0022] The piezoelectric layer 20 contains piezoelectric particles 36 in a matrix 34 containing a polymer material. The lower electrode layer 24 and the upper electrode layer 26 are electrode layers in the present invention. The lower protective layer 28 and the upper protective layer 30 are protective layers in the present invention. As will be described later, the piezoelectric film 10 (piezoelectric layer 20) is preferably polarized in the thickness direction.

[0023] In the present invention, the difference between the maximum height in the thickness direction of the piezoelectric film 10 in a region 43 μm inward from the end face and the height in the thickness direction at a position 43 μm inward from the end face is 4.2 μm or less. This point will be explained with reference to FIG. 3.

[0024] FIG. 3 is a partially enlarged view showing the vicinity of an end face of the piezoelectric film 10. As shown in FIG. As shown in FIG. 3, the difference between the maximum height at a position 43 μm inward from the end face (side face) of the piezoelectric film 10 and the maximum height in the region 43 μm inward from the end face is defined as H 43 Then, H 43 is 4.2 μm or less.

[0025] As mentioned above, when a piezoelectric film in which a piezoelectric layer is sandwiched between electrode layers and protective layers is used as an exciter, stacking multiple piezoelectric films is considered to compensate for insufficient output. However, because the piezoelectric film in which a piezoelectric layer is sandwiched between electrode layers and protective layers is very thin, stacking multiple piezoelectric films can cause wrinkles, resulting in poor appearance.

[0026] The inventors investigated the occurrence of such wrinkles and found that when a piezoelectric film is cut, a burr-like protrusion may form on the edge, and if this protrusion is large, excessive stress is applied to the piezoelectric film when multiple piezoelectric films are stacked, causing wrinkles.

[0027] In contrast, in the piezoelectric element of the present invention, the difference H between the position 43 μm inward from the end face (side face) of the piezoelectric film and the maximum height in the region 43 μm inward from the end face 43 This means that the height of the protrusions formed on the end portions of the piezoelectric film 10 is 4.2 μm or less.

[0028] By setting the height of the convex portion formed at the end of the piezoelectric film 10 to 4.2 μm or less in this manner, it is possible to suppress the application of excessive stress to the piezoelectric film when multiple layers of the piezoelectric film are stacked, thereby preventing wrinkles from occurring.

[0029] To prevent wrinkles, the difference H between the position 43 μm inward from the edge of the piezoelectric film and the maximum height in the region 43 μm inward from the edge 43 is preferably 1.4 μm or less, more preferably 1.0 μm or less.

[0030] On the other hand, from the viewpoint of cost and productivity, 43 is preferably 0.3 μm or more, more preferably 0.5 μm or more.

[0031] The difference H between the position 43 μm inward from the edge of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 is measured as follows: The piezoelectric film is placed on a flat table and scanned from the surface side using a confocal laser scanning microscope to measure the surface profile. The difference between the height at a position 43 μm inward from the edge and the maximum height in the area 43 μm inward from the edge is calculated from the surface profile. This measurement is repeated at 77 points on each side, and the average value is calculated as H 43 Such measurements are carried out on both main surfaces.

[0032] The difference H between the position 43 μm inward from the edge of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43A piezoelectric film having a thickness within the above range can be achieved by appropriately setting the cutting conditions, such as the type of cutting device, the type of blade, the blade pressure, and the cutting speed, when cutting the piezoelectric film. Even under the same cutting conditions, the height of the convex portions formed when cutting the piezoelectric film varies depending on the condition of the blade. For example, when cutting piezoelectric films continuously using the same blade, the height of the convex portions formed when cutting the piezoelectric film initially varies depending on the condition of the blade. 43 The value of H in the piezoelectric film cut after multiple cuttings is 43 Therefore, it is preferable to cut with the blade in good condition.

[0033] In addition, by subjecting the cut piezoelectric film to pressure treatment with a roller, heat treatment, and laser processing of the convex parts, the H of the piezoelectric film can be reduced. 43 The value may be set to 4.2 μm or less.

[0034] In the present invention, the height difference H is set to 0.05 mm on the surface of the piezoelectric film of the piezoelectric element that faces another piezoelectric film. 43 is 4.2 μm or less.

[0035] As mentioned above, the thinner the piezoelectric film, the more likely it is that wrinkles will form when the piezoelectric film is laminated. However, the piezoelectric element of the present invention can effectively suppress the occurrence of wrinkles, allowing the use of a thin piezoelectric film. The thickness of the piezoelectric film is preferably 20 μm to 80 μm, more preferably 20 μm to 60 μm, and even more preferably 20 μm to 50 μm. As will be described in detail later, the electrode layer and protective layer of the piezoelectric film are preferably thin in order not to restrict the expansion and contraction of the piezoelectric layer. On the other hand, the thinner the piezoelectric layer, the smaller the voltage (potential difference) required to expand and contract the piezoelectric layer by the same amount is, so it is preferable that the piezoelectric film is thin. In other words, from the viewpoint of achieving large expansion and contraction with a small voltage, a thin piezoelectric film is preferable.

[0036] 1, adjacent piezoelectric films are configured to have opposite polarization directions, but the present invention is not limited to this. As in the piezoelectric element 60 shown in FIG. 4, the polarization directions of the piezoelectric layers 20 may all be the same.

[0037] In the example shown in FIG. 1, a plurality of piezoelectric films 10 are laminated, but the present invention is not limited to this.

[0038] Another example of a piezoelectric element is shown in Fig. 5. Note that a piezoelectric element 56 shown in Fig. 5 uses a plurality of the same components as the piezoelectric element 50 described above, so the same components are given the same reference numerals, and the following description will mainly focus on the different parts.

[0039] 5 is formed by folding a long piezoelectric film 10L in the longitudinal direction at least once, preferably multiple times, to form multiple layers of piezoelectric films. The piezoelectric element 56 has the folded piezoelectric film 10L bonded to the laminate by an adhesive layer 19. By folding back and stacking a single long piezoelectric film 10L polarized in the thickness direction, the polarization directions of adjacent (facing) piezoelectric films in the stacking direction become opposite directions, as shown by the arrows in Figure 5.

[0040] According to this configuration, the piezoelectric element 56 can be configured using only one long piezoelectric film 10L, only one power supply PS is required to apply the drive voltage, and the electrodes need only be drawn out from the piezoelectric film 10L at one location. Therefore, according to the piezoelectric element 56 shown in FIG. 5, the number of parts can be reduced, the configuration can be simplified, the reliability of the piezoelectric element (module) can be improved, and further, costs can be reduced.

[0041] In a piezoelectric element 56 formed by folding back a long piezoelectric film 10L, such as the piezoelectric element 56 shown in FIG. 5, it is preferable to insert a core rod 58 into the folded portion of the piezoelectric film 10L in contact with the piezoelectric film 10L. The lower electrode layer 24 and the upper electrode layer 26 of the piezoelectric film 10L are formed of a metal vapor deposition film or the like. When a metal vapor deposition film is bent at an acute angle, cracks or the like are likely to occur, which may result in disconnection of the electrodes. That is, in the piezoelectric element 56 shown in FIG. 5, cracks or the like are likely to occur in the electrodes on the inside of the bent portion. In contrast, in a piezoelectric element 56 formed by folding a long piezoelectric film 10L, by inserting a core rod 58 into the folded portion of the piezoelectric film 10L, the lower electrode layer 24 and the upper electrode layer 26 can be prevented from being folded, and breakage can be suitably prevented.

[0042] Each component of the piezoelectric element of the present invention will now be described.

[0043] <Piezoelectric film> As described above, the piezoelectric film 10 has a piezoelectric layer 20, a lower electrode layer 24 laminated on one side of the piezoelectric layer 20, a lower protective layer 28 laminated on the side of the lower electrode layer 24 opposite the piezoelectric layer 20, an upper electrode layer 26 laminated on the other side of the piezoelectric layer 20, and an upper protective layer 30 laminated on the side of the upper electrode layer 26 opposite the piezoelectric layer 20.

[0044] [Piezoelectric Layer] The piezoelectric layer 20 may be a layer made of a known piezoelectric material. In the present invention, the piezoelectric layer 20 is preferably a polymer composite piezoelectric material containing piezoelectric particles 36 in a matrix 34 containing a polymer material.

[0045] It is preferable to use a polymer material that has viscoelasticity at room temperature as the material for the matrix 34 (which also serves as a matrix and binder) of the polymer composite piezoelectric that constitutes the piezoelectric layer 20. In this specification, "room temperature" refers to a temperature range of about 0 to 50°C.

[0046] Here, the polymer composite piezoelectric material (piezoelectric material layer 20) preferably satisfies the following requirements. (i) Flexibility For example, when a portable piezoelectric material is held loosely bent like a newspaper or magazine, it is constantly subjected to relatively slow, large bending deformation from the outside at frequencies below a few Hz. If the polymer composite piezoelectric material is too hard, a correspondingly large bending stress will be generated, which can lead to cracks at the interface between the polymer matrix and the piezoelectric particles, eventually leading to fracture. Therefore, polymer composite piezoelectric materials must be moderately flexible. Furthermore, if the strain energy can be diffused to the outside as heat, stress can be alleviated. Therefore, the loss tangent of the polymer composite piezoelectric material must be moderately large.

[0047] In summary, the flexible polymer composite piezoelectric material used as an exciter must be rigid for vibrations between 20 Hz and 20 kHz, and flexible for vibrations below a few Hz. The loss tangent of the polymer composite must also be appropriately large for vibrations of all frequencies below 20 kHz. Furthermore, it is preferable that the spring constant can be easily adjusted by laminating the material according to the rigidity (hardness, stiffness, spring constant) of the material to be attached (diaphragm), and in this case, the thinner the adhesive layer 16, the higher the energy efficiency can be.

[0048] In general, polymer solids have a viscoelastic relaxation mechanism, and large-scale molecular motion is observed as a decrease (relaxation) in the storage modulus (Young's modulus) or a maximum (absorption) in the loss modulus with increasing temperature or decreasing frequency. Among these, relaxation caused by the micro-Brownian motion of molecular chains in the amorphous region is called primary dispersion, and a very large relaxation phenomenon is observed. The temperature at which this primary dispersion occurs is the glass transition point (Tg), where the viscoelastic relaxation mechanism is most prominent. In the polymer composite piezoelectric body (piezoelectric layer 20), by using a polymer material whose glass transition point is at room temperature, in other words, a polymer material that has viscoelasticity at room temperature, as the matrix, a polymer composite piezoelectric body that behaves hard to vibrations of 20 Hz to 20 kHz and soft to slow vibrations of a few Hz or less is realized. In particular, in order to favorably exhibit this behavior, it is preferable to use a polymer material whose glass transition point at a frequency of 1 Hz is at room temperature, i.e., 0 to 50°C, as the matrix of the polymer composite piezoelectric body.

[0049] As the polymer material having viscoelasticity at room temperature, various known materials can be used. Preferably, a polymer material is used that has a maximum value of loss tangent Tanδ of 0.5 or more at a frequency of 1 Hz in a dynamic viscoelasticity test at room temperature, i.e., 0 to 50°C. This reduces stress concentration at the interface between the polymer matrix and the piezoelectric particles at the maximum bending moment when the polymer composite piezoelectric body is slowly bent by an external force, and high flexibility can be expected.

[0050] Furthermore, the polymeric material having viscoelasticity at room temperature preferably has a storage modulus (E') at a frequency of 1 Hz measured by dynamic viscoelasticity measurement of 100 MPa or more at 0°C and 10 MPa or less at 50°C. This reduces the bending moment that occurs when the polymer composite piezoelectric body is slowly bent by an external force, and at the same time, allows the body to behave rigidly against acoustic vibrations of 20 Hz to 20 kHz.

[0051] Furthermore, it is more preferable for the polymer material that has viscoelasticity at room temperature to have a relative dielectric constant of 10 or more at 25°C. This means that when a voltage is applied to the polymer composite piezoelectric material, a higher electric field is applied to the piezoelectric particles in the matrix, and a large amount of deformation can be expected. However, on the other hand, in order to ensure good moisture resistance, it is also preferable that the polymer material has a relative dielectric constant of 10 or less at 25°C.

[0052] Examples of polymeric materials that satisfy these conditions and have viscoelasticity at room temperature include cyanoethylated polyvinyl alcohol (cyanoethylated PVA), polyvinyl acetate, polyvinylidene chloride-co-acrylonitrile, polystyrene-vinyl polyisoprene block copolymer, polyvinyl methyl ketone, and polybutyl methacrylate. Commercially available products such as Hybrar 5127 (manufactured by Kuraray Co., Ltd.) can also be suitably used as these polymeric materials. Of these, it is preferable to use a material having a cyanoethyl group as the polymeric material, and it is particularly preferable to use cyanoethylated PVA. These polymer materials may be used alone or in combination (mixture) of two or more kinds.

[0053] The matrix 34 using such a polymeric material having viscoelasticity at room temperature may use a plurality of polymeric materials in combination as required. That is, in addition to a viscoelastic material such as cyanoethylated PVA, other dielectric polymer materials may be added to the matrix 34 as needed for the purpose of adjusting the dielectric properties and mechanical properties.

[0054] Examples of the dielectric polymer material that can be added include fluorine-based polymers such as polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer, vinylidene fluoride-trifluoroethylene copolymer, polyvinylidene fluoride-trifluoroethylene copolymer, and polyvinylidene fluoride-tetrafluoroethylene copolymer, vinylidene cyanide-vinyl acetate copolymer, cyanoethyl cellulose, cyanoethyl hydroxysucrose, cyanoethyl hydroxycellulose, cyanoethyl hydroxypullulan, cyanoethyl methacrylate, cyanoethyl acrylate, Examples include polymers having a cyano group or a cyanoethyl group, such as cyanoethyl hydroxyethyl cellulose, cyanoethyl amylose, cyanoethyl hydroxypropyl cellulose, cyanoethyl dihydroxypropyl cellulose, cyanoethyl hydroxypropyl amylose, cyanoethyl polyacrylamide, cyanoethyl polyacrylate, cyanoethyl pullulan, cyanoethyl polyhydroxymethylene, cyanoethyl glycidol pullulan, cyanoethyl sucrose, and cyanoethyl sorbitol, as well as synthetic rubbers such as nitrile rubber and chloroprene rubber. Among these, polymeric materials having a cyanoethyl group are preferably used. Furthermore, the dielectric polymer added to the matrix 34 of the piezoelectric layer 20 in addition to the material having viscoelasticity at room temperature, such as cyanoethylated PVA, is not limited to one type, and multiple types may be added.

[0055] In addition to the dielectric polymer, the matrix 34 may contain thermoplastic resins such as vinyl chloride resin, polyethylene, polystyrene, methacrylic resin, polybutene, and isobutylene, as well as thermosetting resins such as phenolic resin, urea resin, melamine resin, alkyd resin, and mica, in order to adjust the glass transition temperature Tg. Furthermore, for the purpose of improving adhesiveness, a tackifier such as rosin ester, rosin, terpene, terpene phenol, or petroleum resin may be added.

[0056] When adding a material other than a viscoelastic polymer material such as cyanoethylated PVA to the matrix 34 of the piezoelectric layer 20, there is no particular limitation on the amount of the material added, but it is preferable that the amount be 30 mass % or less in terms of the proportion of the matrix 34. This allows the properties of the added polymer material to be expressed without impairing the viscoelastic relaxation mechanism in the matrix 34, thereby achieving favorable results in terms of increasing the dielectric constant, improving heat resistance, and improving adhesion with the piezoelectric particles 36 and the electrode layer.

[0057] The piezoelectric layer 20 is a polymer composite piezoelectric material that contains piezoelectric particles 36 in such a matrix 34 . The piezoelectric particles 36 are made of ceramic particles having a perovskite or wurtzite crystal structure. Examples of ceramic particles that make up the piezoelectric particles 36 include lead zirconate titanate (PZT), lead lanthanum zirconate titanate (PLZT), barium titanate (BaTiO3), zinc oxide (ZnO), and a solid solution of barium titanate and bismuth ferrite (BiFe3) (BFBT).

[0058] There is no limitation on the particle size of the piezoelectric particles 36, and it may be selected appropriately depending on the size of the piezoelectric film 10 and the intended use of the piezoelectric element 50. The particle size of the piezoelectric particles 36 is preferably 1 to 10 μm. By setting the particle size of the piezoelectric particles 36 within this range, it is possible to obtain favorable results in that the piezoelectric film 10 can achieve both high piezoelectric properties and flexibility.

[0059] In FIG. 2, the piezoelectric particles 36 in the piezoelectric layer 20 are dispersed uniformly and regularly in the matrix 34, but the present invention is not limited to this. That is, the piezoelectric particles 36 in the piezoelectric layer 20 may be dispersed irregularly in the matrix 34, as long as they are preferably dispersed uniformly.

[0060] In the piezoelectric film 10, there is no restriction on the quantitative ratio of the matrix 34 to the piezoelectric particles 36 in the piezoelectric layer 20, and it may be set appropriately depending on the size and thickness in the plane direction of the piezoelectric film 10, the use of the piezoelectric element 50, and the properties required of the piezoelectric element 50. The volume fraction of the piezoelectric particles 36 in the piezoelectric layer 20 is preferably 30 to 80%, more preferably 50% or more, and therefore, is even more preferably 50 to 80%. By setting the ratio of the matrix 34 to the piezoelectric particles 36 within the above range, favorable results can be obtained in terms of achieving both high piezoelectric properties and flexibility.

[0061] In the piezoelectric film 10, the thickness of the piezoelectric layer 20 is not particularly limited, and may be set appropriately depending on the application of the piezoelectric element 50, the number of piezoelectric films stacked in the piezoelectric element 50, the characteristics required of the piezoelectric film 10, etc. The thicker the piezoelectric layer 20, the more advantageous it is in terms of stiffness, such as the stiffness of the sheet-like material, but the voltage (potential difference) required to expand and contract the piezoelectric film 10 by the same amount becomes larger. The thickness of the piezoelectric layer 20 is preferably 10 to 300 μm, more preferably 20 to 200 μm, and even more preferably 30 to 150 μm. By setting the thickness of the piezoelectric layer 20 within the above range, it is possible to obtain favorable results in terms of ensuring both rigidity and appropriate flexibility.

[0062] [Electrode layer and protective layer] 2, the piezoelectric film 10 has a configuration in which a lower electrode layer 24 is provided on one surface of the piezoelectric layer 20, a lower protective layer 28 is provided thereon, and an upper electrode layer 26 is provided on the other surface of the piezoelectric layer 20, and an upper protective layer 30 is provided thereon. Here, the upper electrode layer 26 and the lower electrode layer 24 form an electrode pair.

[0063] That is, the piezoelectric film 10 has a configuration in which both sides of the piezoelectric layer 20 are sandwiched between an electrode pair, i.e., a lower electrode layer 24 and an upper electrode layer 26, and this laminate is sandwiched between a lower protective layer 28 and an upper protective layer 30. In this way, the region of the piezoelectric film 10 sandwiched between the lower electrode layer 24 and the upper electrode layer 26 expands and contracts in response to the applied voltage. The lower electrode layer 24, the lower protective layer 28, and the upper electrode layer 26, and the upper protective layer 30 are named according to the polarization direction of the piezoelectric layer 20. Therefore, the lower electrode layer 24, the upper electrode layer 26, and the lower protective layer 28, and the upper protective layer 30 basically have the same configuration.

[0064] In the piezoelectric film 10, the lower protective layer 28 and the upper protective layer 30 cover the upper electrode layer 26 and the lower electrode layer 24, and also serve to provide the piezoelectric layer 20 with appropriate rigidity and mechanical strength. That is, in the piezoelectric film 10, the piezoelectric layer 20, which is made up of the matrix 34 and the piezoelectric particles 36, exhibits excellent flexibility with respect to slow bending deformation, but may lack rigidity and mechanical strength depending on the application. To compensate for this, the lower protective layer 28 and the upper protective layer 30 are provided in the piezoelectric film 10.

[0065] There are no limitations on the lower protective layer 28 and the upper protective layer 30, and various sheet-like materials can be used, and suitable examples include various resin films. Among these, resin films made of polyethylene terephthalate (PET), polypropylene (PP), polystyrene (PS), polycarbonate (PC), polyphenylene sulfite (PPS), polymethyl methacrylate (PMMA), polyetherimide (PEI), polyimide (PI), polyethylene naphthalate (PEN), triacetyl cellulose (TAC), and cyclic olefin resins are preferably used because of their excellent mechanical properties and heat resistance.

[0066] There is no limitation on the thickness of the lower protective layer 28 and the upper protective layer 30. The thicknesses of the lower protective layer 28 and the upper protective layer 30 are basically the same, but may be different. Here, if the rigidity of the lower protective layer 28 and the upper protective layer 30 is too high, not only will the expansion and contraction of the piezoelectric layer 20 be restricted, but the flexibility will also be impaired. Therefore, except in cases where mechanical strength or good handleability as a sheet-like material is required, it is advantageous for the lower protective layer 28 and the upper protective layer 30 to be as thin as possible.

[0067] In the piezoelectric film 10, if the thickness of the lower protective layer 28 and the upper protective layer 30 is not more than twice the thickness of the piezoelectric layer 20, favorable results can be obtained in terms of ensuring both rigidity and appropriate flexibility. For example, if the thickness of the piezoelectric layer 20 is 50 μm and the lower protective layer 28 and the upper protective layer 30 are made of PET, the thickness of the lower protective layer 28 and the upper protective layer 30 is preferably 100 μm or less, more preferably 50 μm or less, and even more preferably 25 μm or less.

[0068] In the piezoelectric film 10, a lower electrode layer 24 is formed between the piezoelectric layer 20 and the lower protective layer 28, and an upper electrode layer 26 is formed between the piezoelectric layer 20 and the upper protective layer 30. The lower electrode layer 24 and the upper electrode layer 26 are provided to apply a voltage to the piezoelectric layer 20 (piezoelectric film 10).

[0069] In the present invention, there are no limitations on the materials for forming the lower electrode layer 24 and the upper electrode layer 26, and various conductors can be used. Specific examples include metals such as carbon, palladium, iron, tin, aluminum, nickel, platinum, gold, silver, copper, titanium, chromium, and molybdenum, alloys thereof, laminates and composites of these metals and alloys, and indium tin oxide. Among these, copper, aluminum, gold, silver, platinum, and indium tin oxide are preferred examples for the lower electrode layer 24 and the upper electrode layer 26.

[0070] There are also no limitations on the method for forming the lower electrode layer 24 and the upper electrode layer 26, and various known methods can be used, such as vapor phase deposition methods (vacuum film formation methods) such as vacuum deposition and sputtering, film formation by plating, and methods of adhering foils formed from the above materials.

[0071] Among these, thin films of copper, aluminum, or the like formed by vacuum deposition are particularly suitable for use as the lower electrode layer 24 and the upper electrode layer 26, because they can ensure the flexibility of the piezoelectric film 10. Among these, thin films of copper formed by vacuum deposition are particularly suitable. There is no limitation on the thickness of the lower electrode layer 24 and the upper electrode layer 26. Furthermore, the thickness of the lower electrode layer 24 and the upper electrode layer 26 is basically the same, but may be different.

[0072] Here, similar to the lower protective layer 28 and upper protective layer 30 described above, if the lower electrode layer 24 and the upper electrode layer 26 have too high rigidity, not only will they restrict the expansion and contraction of the piezoelectric layer 20, but they will also impair flexibility. Therefore, it is more advantageous for the lower electrode layer 24 and the upper electrode layer 26 to be as thin as possible, as long as the electrical resistance does not become too high.

[0073] In the piezoelectric film 10, it is preferable that the product of the thickness and Young's modulus of the lower electrode layer 24 and the upper electrode layer 26 is less than the product of the thickness and Young's modulus of the lower protective layer 28 and the upper protective layer 30, since this does not significantly impair flexibility. For example, in the case of a combination in which the lower protective layer 28 and the upper protective layer 30 are made of PET (Young's modulus: approximately 6.2 GPa) and the lower electrode layer 24 and the upper electrode layer 26 are made of copper (Young's modulus: approximately 130 GPa), if the thickness of the lower protective layer 28 and the upper protective layer 30 is 25 μm, the thickness of the lower electrode layer 24 and the upper electrode layer 26 is preferably 1.2 μm or less, more preferably 0.3 μm or less, and most preferably 0.1 μm or less.

[0074] As described above, the piezoelectric film 10 has a structure in which a piezoelectric layer 20, which is formed by dispersing piezoelectric particles 36 in a matrix 34 containing a polymer material, is sandwiched between a lower electrode layer 24 and an upper electrode layer 26, and this laminate is further sandwiched between a lower protective layer 28 and an upper protective layer 30. In such a piezoelectric film 10, the loss tangent (Tan δ) at a frequency of 1 Hz measured by dynamic viscoelasticity measurement preferably has a maximum value at room temperature, and more preferably has a maximum value of 0.1 or more at room temperature. This allows the strain energy to be effectively diffused to the outside as heat, even if the piezoelectric film 10 is subjected to a relatively slow, large bending deformation of a few Hz or less from the outside, thereby preventing cracks from occurring at the interface between the polymer matrix and the piezoelectric particles.

[0075] The piezoelectric film 10 preferably has a storage modulus (E') at a frequency of 1 Hz, as measured by dynamic viscoelasticity measurement, of 10 to 30 GPa at 0° C. and 1 to 10 GPa at 50° C. The same conditions apply to the piezoelectric layer 20. This allows the piezoelectric film 10 to have a large frequency dispersion in the storage modulus (E') at room temperature, i.e., it behaves hard against vibrations of 20 Hz to 20 kHz, but soft against vibrations of several Hz or less.

[0076] The piezoelectric film 10 has a thickness multiplied by a storage modulus (E') at a frequency of 1 Hz measured by dynamic viscoelasticity measurement of 1.0×10 5 ~2.0×10 6 N / m, 1.0 x 10 at 50°C 5 ~1.0×10 6 It is preferable that the piezoelectric layer 20 has a resistance of 0.1 N / m. This allows the piezoelectric film 10 to have appropriate rigidity and mechanical strength without impairing its flexibility and acoustic properties.

[0077] Furthermore, the piezoelectric film 10 preferably has a loss tangent (Tan δ) of 0.05 or more at 25° C. and a frequency of 1 kHz in a master curve obtained from dynamic viscoelasticity measurement. This condition also applies to the piezoelectric layer 20. This makes it possible to smooth the frequency characteristics of a speaker using the piezoelectric film 10, and to reduce the amount of change in sound quality when the minimum resonance frequency f0 changes in accordance with a change in the curvature of the speaker.

[0078] In the present invention, the storage modulus (Young's modulus) and loss tangent of the piezoelectric film 10, the piezoelectric layer 20, etc. may be measured by a known method, such as a dynamic viscoelasticity measuring device DMS6100 manufactured by SII NanoTechnology Inc. Examples of measurement conditions include a measurement frequency of 0.1 Hz to 20 Hz (0.1 Hz, 0.2 Hz, 0.5 Hz, 1 Hz, 2 Hz, 5 Hz, 10 Hz, and 20 Hz), a measurement temperature of -50 to 150°C, a temperature rise rate of 2°C / min (in a nitrogen atmosphere), a sample size of 40 mm x 10 mm (including the clamping area), and a chuck distance of 20 mm.

[0079] As shown in FIG. 1, in the piezoelectric element 50, the lower electrode layer 24 and the upper electrode layer 26 of each piezoelectric film 10 are connected to a power source PS that applies a drive voltage, ie, supplies drive power, that causes the piezoelectric film 10 to expand and contract. There are no limitations on the power source PS, and it may be a DC or AC power source. The drive voltage may be set appropriately depending on the thickness and material of the piezoelectric layer 20 of the piezoelectric film 10 so that the piezoelectric film 10 can be driven appropriately.

[0080] There are no limitations on the method for drawing out the electrodes from the lower electrode layer 24 and the upper electrode layer 26, and various known methods can be used. Examples include a method of connecting a conductor such as copper foil to the lower electrode layer 24 and the upper electrode layer 26 to extend the electrodes to the outside, and a method of forming through holes in the lower protective layer 28 and the upper protective layer 30 using a laser or the like, filling the through holes with a conductive material, and extending the electrodes to the outside. Suitable electrode extraction methods include the methods described in JP-A-2014-209724 and JP-A-2016-015354.

[0081] <Adhesive layer> In the piezoelectric element, the piezoelectric film is attached by an adhesive layer 19 . The adhesive layer 19 may be any of various known materials as long as it can adhere adjacent piezoelectric films 10 to each other. Therefore, the adhesive layer 19 may be a layer made of an adhesive that has fluidity when bonded and then becomes solid, a layer made of a pressure-sensitive adhesive that is a soft gel-like (rubber-like) solid when bonded and does not change to a gel-like state thereafter, or a layer made of a material that has the characteristics of both an adhesive and a pressure-sensitive adhesive.

[0082] Here, the piezoelectric element 50 vibrates the diaphragm 12 by expanding and contracting the stacked piezoelectric films 10, thereby generating sound. Therefore, it is preferable that the expansion and contraction of each piezoelectric film 10 is directly transmitted to the piezoelectric element 50. If a viscous substance that reduces vibration is present between the piezoelectric films 10, the transmission efficiency of the expansion and contraction energy of the piezoelectric films 10 will be reduced, and the driving efficiency of the piezoelectric element 50 will be reduced. Considering this point, it is preferable that the adhesive layer 19 is an adhesive layer made of an adhesive, which provides a solid and hard adhesive layer 19, rather than an adhesive layer made of a pressure-sensitive adhesive. Specific examples of more preferable adhesive layer 19 include adhesive layers made of thermoplastic adhesives such as polyester adhesives and styrene-butadiene rubber (SBR) adhesives. Unlike adhesives, adhesion is useful when high adhesion temperatures are required. Thermoplastic adhesives are suitable because they combine relatively low temperatures, short times, and strong adhesion.

[0083] There is no limitation on the thickness of the adhesive layer 19, and it may be set appropriately depending on the material from which the adhesive layer 19 is formed so as to have a thickness that can provide sufficient adhesive strength. 1, a thinner adhesive layer 19 can improve the transmission effect of the expansion and contraction energy of the piezoelectric film 10 and increase energy efficiency. Also, if the adhesive layer 19 is thick and has high rigidity, it may restrict the expansion and contraction of the piezoelectric film 10. Considering this, it is preferable that the adhesive layer 19 is thinner than the piezoelectric layer 20. That is, it is preferable that the adhesive layer 19 is hard and thin in the piezoelectric element 50. Specifically, the thickness of the adhesive layer 19 after application is preferably 0.1 to 50 μm, more preferably 0.1 to 30 μm, and even more preferably 0.1 to 10 μm. In the piezoelectric element 50 shown in FIG. 1, the polarization directions of adjacent piezoelectric films are opposite to each other, and there is no risk of adjacent piezoelectric films 10 shorting out, so the adhesive layer 19 can be made thin.

[0084] In a piezoelectric element, if the spring constant (thickness × Young's modulus) of the adhesive layer 19 is high, it may restrict the expansion and contraction of the piezoelectric film 10. Therefore, it is preferable that the spring constant of the adhesive layer 19 is equal to or less than the spring constant of the piezoelectric film 10. Specifically, the product of the thickness of the adhesive layer 19 and the storage modulus (E') at a frequency of 1 Hz in dynamic viscoelasticity measurement is 2.0 × 10 6 N / m or less, 1.0 x 10 at 50°C 6 It is preferable that the resistance is N / m or less. Furthermore, it is preferable that the internal loss at a frequency of 1 Hz in dynamic viscoelasticity measurement of the adhesive layer is 1.0 or less at 25°C in the case of an adhesive layer 19 made of a pressure-sensitive adhesive, and 0.1 or less at 25°C in the case of an adhesive layer 19 made of an adhesive.

[0085] <Vibration plate> In the electroacoustic transducer 70 having the above-described piezoelectric element 50, the diaphragm 12 preferably has flexibility. In the present invention, "having flexibility" has the same meaning as "having flexibility" in the general sense, and indicates that it can be bent and flexed, specifically, that it can be bent and stretched without breaking or being damaged. The diaphragm 12 is not limited as long as it is preferably flexible, and various types of sheet-like materials (plate-like materials, films) can be used. Examples include resin films made from polyethylene terephthalate (PET), polypropylene (PP), polystyrene (PS), polycarbonate (PC), polyphenylene sulfite (PPS), polymethyl methacrylate (PMMA), polyetherimide (PEI), polyimide (PI), polyethylene naphthalate (PEN), triacetyl cellulose (TAC), and cyclic olefin resins, etc., foamed plastics made from expanded polystyrene, expanded styrene, and expanded polyethylene, etc., and various types of corrugated cardboard made by gluing other paperboard to one or both sides of a corrugated paperboard. In addition, in the electroacoustic transducer 70, display devices such as an organic electroluminescence (OLED (Organic Light Emitting Diode)) display, a liquid crystal display, a micro LED (Light Emitting Diode) display, and an inorganic electroluminescence display can also be suitably used as the diaphragm 12, as long as they are flexible.

[0086] <Adhesive layer> In the electroacoustic transducer 70 shown in FIG. 1, in a preferred embodiment, the diaphragm 12 and the piezoelectric element 50 are bonded together by an adhesive layer 16 .

[0087] The adhesive layer 16 may be made of any of various known materials as long as it can adhere the diaphragm 12 and the piezoelectric element 50 to each other. Therefore, the adhesive layer 16 may be a layer made of an adhesive that has fluidity when bonded and then becomes solid, a layer made of a pressure-sensitive adhesive that is a soft gel-like (rubber-like) solid when bonded and does not change to a gel-like state thereafter, or a layer made of a material that has the characteristics of both an adhesive and a pressure-sensitive adhesive.

[0088] Here, in the electro-acoustic transducer 70, sound is generated by expanding and contracting the piezoelectric element 50, which deflects and vibrates the diaphragm 12. Therefore, in the electro-acoustic transducer 70, it is preferable that the expansion and contraction of the piezoelectric element 50 be directly transmitted to the diaphragm 12. If a viscous substance that reduces vibration exists between the diaphragm 12 and the piezoelectric element 50, the efficiency of transmission of the expansion and contraction energy of the piezoelectric element 50 to the diaphragm 12 decreases, and the driving efficiency of the electro-acoustic transducer 70 decreases. Considering this point, it is preferable that the adhesive layer 16 is an adhesive layer made of an adhesive, which provides a solid and hard adhesive layer 16, rather than an adhesive layer made of a pressure-sensitive adhesive. Specific examples of more preferable adhesive layers 16 include adhesive layers made of thermoplastic adhesives such as polyester adhesives and styrene-butadiene rubber (SBR) adhesives. Unlike adhesives, adhesion is useful when high adhesion temperatures are required. Thermoplastic adhesives are suitable because they combine relatively low temperatures, short times, and strong adhesion.

[0089] There is no limitation on the thickness of the adhesive layer 16, and it may be set appropriately depending on the material of the adhesive layer 16 so that a sufficient adhesive strength (adhesion strength, cohesion strength) can be obtained. Here, in the electroacoustic transducer 70, a thinner adhesive layer 16 can improve the transmission effect of the expansion and contraction energy (vibration energy) of the piezoelectric element 50 transmitted to the diaphragm 12, thereby increasing energy efficiency. Also, if the adhesive layer 16 is thick and has high rigidity, it may restrict the expansion and contraction of the piezoelectric element 50. Considering this point, it is preferable to have a thin adhesive layer 16. Specifically, the thickness of the adhesive layer 16 after application is preferably 0.1 to 50 μm, more preferably 0.1 to 30 μm, and even more preferably 0.1 to 10 μm.

[0090] In the electro-acoustic transducer 70, the adhesive layer 16 is provided as a preferred embodiment, but is not an essential component. Therefore, the electro-acoustic transducer 70 may not have the adhesive layer 16, and the diaphragm 12 and the piezoelectric element 50 may be fixed together using known pressure-bonding means, fastening means, fixing means, etc. For example, if the shape of the piezoelectric element 50 in a plan view is rectangular, the electro-acoustic transducer may be configured by fastening the four corners with members such as bolts and nuts, or by fastening the four corners and the center with members such as bolts and nuts.

[0091] However, in this case, when a drive voltage is applied from the power supply PS, the piezoelectric element 50 expands and contracts independently of the diaphragm 12, and in some cases, only the piezoelectric element 50 bends, and the expansion and contraction of the piezoelectric element 50 is not transmitted to the diaphragm 12. When the piezoelectric element 50 expands and contracts independently of the diaphragm 12 in this way, the vibration efficiency of the diaphragm 12 caused by the piezoelectric element 50 decreases, and there is a possibility that the diaphragm 12 will not be able to vibrate sufficiently. Considering this point, it is preferable that the diaphragm 12 and the piezoelectric element 50 are attached to each other with an adhesive layer 16 as shown in FIG.

[0092] As described above, the piezoelectric layer 20 contains piezoelectric particles 36 in a matrix 34. A lower electrode layer 24 and an upper electrode layer 26 are provided to sandwich the piezoelectric layer 20 in the thickness direction. When a voltage is applied to the lower electrode layer 24 and upper electrode layer 26 of the piezoelectric film 10 having such a piezoelectric layer 20, the piezoelectric particles 36 expand and contract in the polarization direction in response to the applied voltage. As a result, the piezoelectric film 10 (piezoelectric layer 20) contracts in the thickness direction. At the same time, due to the Poisson's ratio, the piezoelectric film 10 also expands and contracts in the in-plane direction. This expansion and contraction is approximately 0.01 to 0.1%.

[0093] As described above, the thickness of the piezoelectric layer 20 is preferably about 10 to 300 μm, and therefore the expansion and contraction in the thickness direction is extremely small, at a maximum of about 0.3 μm. In contrast, the piezoelectric film 10, i.e., the piezoelectric layer 20, has a size in the planar direction that is much larger than its thickness. Therefore, for example, if the length of the piezoelectric film 10 is 20 cm, the piezoelectric film 10 will expand and contract by a maximum of about 0.2 mm when a voltage is applied.

[0094] The diaphragm 12 is attached to the piezoelectric film 10 by an adhesive layer 16. Therefore, the diaphragm 12 is bent by the expansion and contraction of the piezoelectric film 10, and as a result, the diaphragm 12 vibrates in the thickness direction. This vibration in the thickness direction causes the diaphragm 12 to generate sound. That is, the diaphragm 12 vibrates in accordance with the magnitude of the voltage (drive voltage) applied to the piezoelectric film 10, and generates sound in accordance with the drive voltage applied to the piezoelectric film 10.

[0095] A typical piezoelectric film made of a polymer material such as PVDF has in-plane anisotropy in its piezoelectric properties, and there is anisotropy in the amount of expansion and contraction in the plane direction when a voltage is applied. In contrast, in the piezoelectric element 50 shown in Fig. 1, the piezoelectric film 10 has no in-plane anisotropy in its piezoelectric properties and expands and contracts isotropically in all in-plane directions. That is, in the piezoelectric element 50 shown in Fig. 1, the piezoelectric film 10 expands and contracts isotropically in two dimensions. Such a piezoelectric film 10 that expands and contracts isotropically in two dimensions can vibrate the diaphragm 12 with greater force than when a general piezoelectric film such as PVDF that expands and contracts significantly in only one direction is laminated, thereby generating a louder and more beautiful sound.

[0096] 1, the size of the piezoelectric element 50 in the planar direction and the size of the diaphragm 12 in the planar direction are approximately the same, but this is not limited to this. For example, the size of the piezoelectric film 50 in the planar direction may be smaller than the size of the diaphragm 12 in the planar direction.

[0097] An example of a method for manufacturing the piezoelectric film 10 will now be described with reference to FIGS.

[0098] 6, a sheet-like material 10a is prepared in which a lower electrode layer 24 is formed on a lower protective layer 28. This sheet-like material 10a may be produced by forming a copper thin film or the like as the lower electrode layer 24 on the surface of the lower protective layer 28 by vacuum deposition, sputtering, plating, or the like. If the lower protective layer 28 is very thin and difficult to handle, a separator (temporary support) may be used for the lower protective layer 28, as needed. The separator may be made of PET or the like having a thickness of 25 μm to 100 μm. The separator may be removed after the upper electrode layer 26 and the upper protective layer 30 are thermocompression bonded together, and before any other member is laminated on the lower protective layer 28.

[0099] On the other hand, a polymer material that will be the matrix material is dissolved in an organic solvent, and piezoelectric particles 36 such as PZT particles are further added and stirred to prepare a coating material that is dispersed. There are no limitations on the organic solvent other than the above substances, and various organic solvents can be used.

[0100] After preparing the sheet material 10a and preparing the coating material, the coating material is cast (applied) onto the sheet material 10a, and the organic solvent is evaporated and dried. As a result, as shown in Fig. 5, a laminate 10b is produced, which has a lower electrode layer 24 on a lower protective layer 28 and a piezoelectric layer 20 formed on the lower electrode layer 24. Note that the lower electrode layer 24 refers to the electrode on the substrate side when applying the piezoelectric layer 20, and does not indicate a vertical positional relationship in the laminate.

[0101] There is no limitation on the method for casting this coating material, and all known methods (coating devices) such as a slide coater and a doctor knife can be used.

[0102] As described above, in the piezoelectric film 10, a dielectric polymer material may be added to the matrix 34 in addition to the viscoelastic material such as cyanoethylated PVA. When adding these polymeric materials to the matrix 34, the polymeric materials to be added may be dissolved in the paint described above.

[0103] After fabricating the laminate 10b having the lower electrode layer 24 on the lower protective layer 28 and the piezoelectric layer 20 on the lower electrode layer 24, the piezoelectric layer 20 is preferably subjected to a polarization treatment (poling).

[0104] There is no limitation on the method for polarization of the piezoelectric layer 20, and any known method can be used. Before the polarization treatment, the surface of the piezoelectric layer 20 may be smoothed by a calender treatment using a heated roller or the like. By performing the calender treatment, the thermocompression bonding step described below can be carried out smoothly.

[0105] While the piezoelectric layer 20 of the laminate 10b is polarized in this manner, a sheet-like material 10c is prepared in which an upper electrode layer 26 is formed on the upper protective layer 30. The sheet-like material 10c may be produced by forming a copper thin film or the like as the upper electrode layer 26 on the surface of the upper protective layer 30 by vacuum deposition, sputtering, plating, or the like.

[0106] Next, as shown in FIG. 8, the sheet-like material 10c is laminated on the laminate 10b whose piezoelectric layer 20 has been subjected to polarization treatment, with the upper electrode layer 26 facing the piezoelectric layer 20. Furthermore, the laminate of the laminate 10b and the sheet-like material 10c is thermocompressed with a heat press device or a pair of heat rollers so that the upper protective layer 30 and the lower protective layer 28 are sandwiched between them.

[0107] Through the above steps, a laminate in which electrode layers and protective layers are laminated on both sides of the piezoelectric layer 20 is produced. Such a laminate may be produced using a cut sheet material, or may be produced by roll-to-roll (hereinafter also referred to as RtoR).

[0108] The produced laminate is cut into a desired shape according to various applications to obtain a piezoelectric film. When cutting the piezoelectric film, as described above, by appropriately setting cutting conditions such as the type of cutting device, the type of blade, the blade pressure, and the cutting speed, the difference H between the maximum height at a position 43 μm inward from the end face of the piezoelectric film and the maximum height in the region 43 μm inward from the end face can be determined. 43 is set to be within the above range.

[0109] A plurality of the obtained piezoelectric films are laminated together with adhesive layers interposed therebetween to produce a piezoelectric element.

[0110] The piezoelectric element of the present invention has been described in detail above, but the present invention is not limited to the above examples, and various improvements and modifications may be made within the scope of the gist of the present invention. [Example]

[0111] The present invention will be described in more detail below with reference to specific examples of the present invention. However, the present invention is not limited to these examples, and the materials, amounts used, ratios, processing details, processing procedures, etc. shown in the following examples can be changed as appropriate without departing from the spirit of the present invention.

[0112] [Example 1] [Preparation of piezoelectric film] A piezoelectric film as shown in FIG. 2 was produced by the method shown in FIGS. First, cyanoethylated PVA (CR-V, manufactured by Shin-Etsu Chemical Co., Ltd.) was dissolved in methyl ethyl ketone (MEK) at the following composition ratio: Then, PZT particles were added to this solution at the following composition ratio and dispersed using a propeller mixer (rotation speed: 2000 rpm) to prepare a coating material for forming a piezoelectric layer. ·PZT particles 1000 parts by mass Cyanoethylated PVA 100 parts by mass ·MEK····················600 parts by mass The PZT particles used were prepared by sintering commercially available PZT raw material powder at 1000 to 1200° C., followed by crushing and classifying the sintered powder to an average particle size of 3.5 μm.

[0113] On the other hand, a sheet-like object was prepared by vacuum-depositing a 0.1 μm-thick copper thin film onto a long PET film 23 cm wide and 4 μm thick, as shown in Figure 6. In this example, the lower electrode layer and upper electrode layer were 0.1 μm-thick deposited copper thin films, and the lower protective layer and upper protective layer were 4 μm-thick PET films. To ensure good handling during the process, a 50 μm thick separator (PET temporary support) was attached to the PET film, and the separator for each protective layer was removed after thermocompression bonding of the thin-film electrode and protective layer.

[0114] The coating material for forming the piezoelectric layer prepared above was applied onto the lower electrode layer (copper vapor-deposited thin film) of this sheet-like material using a slide coater so that the coating film would have a thickness of 40 μm after drying. The sheet-like material with the coating was then heated and dried in an oven at 120°C to evaporate the MEK, resulting in a laminate as shown in Figure 7, which had a copper lower electrode layer on a PET lower protective layer, and a 40 μm-thick piezoelectric layer formed on top of that.

[0115] The piezoelectric layers of this laminate were subjected to polarization treatment by a known method, with the polarization direction being the thickness direction of the piezoelectric layers.

[0116] On the laminate that had been subjected to the polarization treatment, the same sheet-like material made by vacuum-depositing a copper thin film on a PET film was laminated as shown in FIG. Next, the laminate of the laminate and the sheet-like material was thermocompressed at 120°C using a laminator device to bond the piezoelectric layer to the lower electrode layer and the upper electrode layer, sandwiching the piezoelectric layer between the lower electrode layer and the upper electrode layer, and sandwiching this laminate between the lower protective layer and the upper protective layer to produce a piezoelectric film as shown in Figure 2.

[0117] Next, this piezoelectric film was cut into a rectangle having a planar shape of 25×20 cm using a cutting device 100a as shown in FIGS.

[0118] Fig. 9 is a side view conceptually showing the cutting device 100a, and Fig. 10 is a front view of Fig. 9. The cutting device 100a shown in FIGS. 9 and 10 uses a Goebel round blade and includes an upper blade 102a and a lower blade 104a, each of which has a blade on the circumferential surface of a cylindrical drum. The upper blade 102a has a blade 103a that protrudes radially from the circumferential surface of the drum. The lower blade 104a has a groove formed in the circumferential surface of the drum, with a blade 105a provided at the corner of the groove. The upper blade 102a and the lower blade 104a are positioned so that their blades mesh with each other. The piezoelectric film 10 is cut by inserting it between the upper blade 102a and the lower blade 104a. As shown in FIG. 11, the meshing distance between the upper blade 102a and the lower blade 104a is 0.5 mm. The diameter of the cutting edge of the upper blade 102a is 65 mm. The diameter of the cutting edge of the lower blade 104a is 50 mm.

[0119] The shape of the blade 103a of the upper blade 102a and the shape of the blade 105a of the lower blade 104a are as shown in FIG.

[0120] The shaft of the upper blade 102a and the shaft of the lower blade 104a are connected by a belt, so that when one is rotated, the other also rotates.

[0121] The piezoelectric film 10 was inserted between the upper blade 102a and the lower blade 104a of the cutting device 100a, and the axis of the lower blade 104a was rotated by hand to cut the piezoelectric film 10, thereby obtaining a piezoelectric film 10 measuring 25 cm x 20 cm.

[0122] The difference H between the position 43 μm inward from the edge (side) of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 was measured by the method described above. As a result of the measurement, H on the surface 43 is 0.3μm, H on the back side 43was 0.3 μm. The surface facing the upper blade 102a when cutting the piezoelectric film was referred to as the front surface, and the surface facing the lower blade 104a was referred to as the back surface.

[0123] This piezoelectric film was folded back four times at 5 cm intervals in a 25 cm direction. In the area where the piezoelectric films were stacked, adjacent piezoelectric films were attached with an adhesive layer. Toyochem Co., Ltd.'s LIOELM TSU0041SI adhesive layer was used. The thickness of the adhesive layer after curing was 25 μm. This resulted in the creation of a rectangular piezoelectric element with a planar shape of 5 x 20 cm, in which five layers of piezoelectric film were folded over.

[0124] [Example 2] A piezoelectric element was produced in the same manner as in Example 1, except that a cutting device 100b as shown in FIGS. 12 and 13 was used as the cutting device for cutting the piezoelectric film.

[0125] Fig. 12 is a side view conceptually showing the cutting device 100b, and Fig. 13 is a front view of Fig. 12. The cutting device 100b shown in FIGS. 12 and 13 uses a straight circular blade and includes an upper blade 102b and a lower blade 104b, each of which has a blade on the circumferential surface of a cylindrical drum. The upper blade 102b has a blade 103b that protrudes radially from the circumferential surface of the drum. The lower blade 104b has a groove formed in the circumferential surface of the drum, with a blade 105b provided at the corner of the groove. The upper blade 102b and the lower blade 104b are positioned so that their blades intermesh with each other. The piezoelectric film 10 is cut by inserting it between the upper blade 102b and the lower blade 104b. As shown in FIG. 14, the meshing distance between the upper blade 102b and the lower blade 104b is 0.7 mm. The diameter of the cutting edge of the upper blade 102b is 150 mm. The diameter of the cutting edge of the lower blade 104b is 135 mm.

[0126] The shape of the blade 103b of the upper blade 102b and the shape of the blade 105b of the lower blade 104b are as shown in FIG.

[0127] The shaft of the upper blade 102b and the shaft of the lower blade 104b are connected by a belt, so that when one is rotated, the other also rotates.

[0128] The piezoelectric film 10 was inserted between the upper blade 102b and the lower blade 104b of the cutting device 100b, and the axis of the lower blade 104b was rotated by hand to cut the piezoelectric film 10, thereby obtaining a piezoelectric film 10 measuring 25 cm x 20 cm.

[0129] The difference H between the position 43 μm inward from the edge (side) of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 was measured by the method described above. As a result of the measurement, H 43 is 0.6 μm, H on the back side 43 was 1.4 μm.

[0130] This piezoelectric film was folded back four times at 5 cm intervals in a 25 cm direction. In the area where the piezoelectric films were stacked, adjacent piezoelectric films were attached with an adhesive layer. Toyochem Co., Ltd.'s LIOELM TSU0041SI adhesive layer was used. The thickness of the adhesive layer after curing was 25 μm. This resulted in the creation of a rectangular piezoelectric element with a planar shape of 5 x 20 cm, in which five layers of piezoelectric film were folded over.

[0131] [Example 3] A piezoelectric element was produced in the same manner as in Example 1, except that a cutting device 100c as shown in FIG. 15 was used as the cutting device for cutting the piezoelectric film.

[0132] FIG. 15 is a perspective view conceptually showing the cutting device 100c. The cutting device 100c used was a cutting plotter, model FC-4200-60 manufactured by Graphtec. The cutting device 100c has a table 106 on which the material to be cut is placed, two guide units 108 arranged along two opposing sides of the table 106, an arm unit 110, and a head 112.

[0133] The arm portion 110 extends from one guide portion 108 to the other guide portion 108, is engaged with the two guide portions 108, and is configured to be movable above the table 106, parallel to the table 106, in the extension direction of the guide portions 108, guided by the two guide portions 108.

[0134] The head 112 is engaged with the arm portion 110 and is configured to be movable in the extension direction of the arm portion 110 while being guided by the arm portion 110. The head 112 also holds a blade 113, the tip of which comes into contact with the material to be cut (piezoelectric film 10) placed on the table 106.

[0135] The cutting device 100c moves the arm unit 110 and the head 112 to move the blade 113 above the piezoelectric film 10 placed on the table 106, thereby cutting the piezoelectric film 10.

[0136] CB15UA (manufactured by Graphtec Corporation) was used as the blade 113. The shape of the blade 113 is as shown in FIG.

[0137] The piezoelectric film 10 was cut using the cutting device 100c to obtain a piezoelectric film 10 measuring 25 cm x 20 cm.

[0138] The difference H between the position 43 μm inward from the edge (side) of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 was measured by the method described above. As a result of the measurement, H 43 is 1.4μm, H on the back side 43 was 0 μm. When cutting the piezoelectric film, the surface facing the blade 113 was defined as the front surface, and the surface facing the table 106 was defined as the back surface.

[0139] This piezoelectric film was folded back four times at 5 cm intervals in a 25 cm direction. In the area where the piezoelectric films were stacked, adjacent piezoelectric films were attached with an adhesive layer. Toyochem Co., Ltd.'s LIOELM TSU0041SI adhesive layer was used. The thickness of the adhesive layer after curing was 25 μm. This resulted in the creation of a rectangular piezoelectric element with a planar shape of 5 x 20 cm, in which five layers of piezoelectric film were folded over.

[0140] [Example 4] A piezoelectric element was produced in the same manner as in Example 1, except that a cutting device 100d as shown in FIG. 16 was used as the cutting device for cutting the piezoelectric film.

[0141] FIG. 16 is a perspective view conceptually showing the cutting device 100d. A cutting device 100d shown in FIG. 16 is a cutting device that uses a punching blade (Thomson blade). FIG. 17 shows a top view of the punching blade 122, and FIG. 18 shows a side view of FIG. The cutting device 100d has a punching blade 122 having a rectangular planar shape, and cuts out the piezoelectric film 10 into a rectangular shape by pressing the punching blade 122 against the piezoelectric film 10 placed on a table 120 of the cutting device 100d.

[0142] The shape of the punching blade 122 is as shown in FIG.

[0143] The piezoelectric film 10 was cut using the cutting device 100d to obtain a piezoelectric film 10 measuring 25 cm x 20 cm.

[0144] The difference H between the position 43 μm inward from the edge (side) of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 was measured by the method described above. As a result of the measurement, H 43 is 0.5μm, H on the back side 43 was 4.2 μm.

[0145] This piezoelectric film was folded back four times at 5 cm intervals in a 25 cm direction. In the area where the piezoelectric films were stacked, adjacent piezoelectric films were attached with an adhesive layer. Toyochem Co., Ltd.'s LIOELM TSU0041SI adhesive layer was used. The thickness of the adhesive layer after curing was 25 μm. This resulted in the creation of a rectangular piezoelectric element with a planar shape of 5 x 20 cm, in which five layers of piezoelectric film were folded over.

[0146] [Comparative Example 1] A piezoelectric element was produced in the same manner as in Example 1, except that a cutting device 100e as shown in FIG. 19 was used as the cutting device for cutting the piezoelectric film.

[0147] FIG. 19 is a perspective view conceptually showing the cutting device 100e. The cutting device 100e is a DN-T61 manufactured by Kokuyo, which uses a rotary cutter. The cutting device 100e has a table 130, a guide section 132 that extends in one direction parallel to the table 130 above the table 130, and a head 134 that is engaged with the guide section 132 and is movable in the direction in which the guide section 132 extends. The head 134 has a circular blade 135 as shown in FIG. 20, and the circular blade 135 rotates as the head 134 moves, cutting the material to be cut (piezoelectric film 10) placed on the table 130. The blade used was an RB45-1 manufactured by Olfa.

[0148] The piezoelectric film 10 was cut using the cutting device 100e to obtain a piezoelectric film 10 measuring 25 cm×20 cm.

[0149] The difference H between the position 43 μm inward from the edge (side) of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 was measured by the method described above. As a result of the measurement, H 43 is 1.9 μm, and H on the back side 43 was 8.5 μm.

[0150] This piezoelectric film was folded back four times at 5 cm intervals in a 25 cm direction. In the area where the piezoelectric films were stacked, adjacent piezoelectric films were attached with an adhesive layer. Toyochem Co., Ltd.'s LIOELM TSU0041SI adhesive layer was used. The thickness of the adhesive layer after curing was 25 μm. This resulted in the creation of a rectangular piezoelectric element with a planar shape of 5 x 20 cm, in which five layers of piezoelectric film were folded over.

[0151] Comparative Example 2 A piezoelectric element was produced in the same manner as in Example 1, except that a cutter knife was used as the cutting device for cutting the piezoelectric film. The cutter knife used was an XA-1 manufactured by Olfa, and the blade used was an SB50K manufactured by Olfa.

[0152] FIG. 21 shows a cross-sectional view of the cutter knife blade 140, and FIG. 22 shows a perspective view of the cutter knife blade 140.

[0153] The piezoelectric film 10 was cut using such a cutter knife to obtain a piezoelectric film 10 measuring 25 cm x 20 cm.

[0154] The difference H between the position 43 μm inward from the edge (side) of the piezoelectric film and the maximum height in the area 43 μm inward from the edge 43 was measured by the method described above. As a result of the measurement, H 43 is 2.8μm, H on the back side 43 was 8.7 μm.

[0155] This piezoelectric film was folded back four times at 5 cm intervals in a 25 cm direction. In the area where the piezoelectric films were stacked, adjacent piezoelectric films were attached with an adhesive layer. Toyochem Co., Ltd.'s LIOELM TSU0041SI adhesive layer was used. The thickness of the adhesive layer after curing was 25 μm. This resulted in the creation of a rectangular piezoelectric element with a planar shape of 5 x 20 cm, in which five layers of piezoelectric film were folded over.

[0156] [evaluation] The front and back surfaces of the piezoelectric elements of each of the examples and comparative examples were visually inspected, and the presence or absence of wrinkles was evaluated according to the following criteria. A: No wrinkles or streaks are visible. B: Lines are visible along the edges, but no wrinkles are visible. C: Wrinkles are seen going inward from the edge toward the surface. The results are shown in Table 1.

[0157] [Table 1]

[0158] From Table 1, it can be seen that no wrinkles were generated in any of the examples of the present invention. 43 It can be seen that in Comparative Examples 1 and 2, where the thickness exceeds 4.2 μm, wrinkles occur at the edge of the laminated piezoelectric film.

[0159] Furthermore, by comparing Examples 1 to 3 with Example 4, H 43 It is clear that it is preferable to set the thickness to 1.4 μm or less.

[0160] [Example 5] Using the same cutting device 100a as in Example 1, the piezoelectric film was cut into five rectangular pieces each having a planar shape of 5×20 cm, and the five piezoelectric films were laminated with an adhesive layer to produce a piezoelectric element.

[0161] The difference H between the position 43 μm inward from the end face (side face) of each piezoelectric film and the maximum height in the area 43 μm inward from the end face 43 was measured by the method described above. As a result of the measurement, H on the front side of the first sheet 43 is 0.3μm, H on the back side 43 is 0.3 μm, H on the surface of the second sheet 43 is 0.3μm, H on the back side 43 is 0.3 μm, H on the surface of the third sheet 43 is 0.3μm, H on the back side 43 The thickness of the fourth sheet was 0.3 μm. 43 is 0.3μm, H on the back side 43The thickness of the fifth sheet was 0.3 μm. 43 is 0.3μm, H on the back side 43 was 0.3 μm. The order of the piezoelectric films was such that one side when stacked was the first film, followed by the second, third, etc. When cutting the piezoelectric films, the surface facing the upper blade 102a was the front surface, and the surface facing the lower blade 104a was the back surface.

[0162] When the front and back surfaces of the fabricated piezoelectric element were visually inspected, no wrinkles or streaks were found. From the above, the effects of the present invention are clear. [Industrial Applicability]

[0163] The piezoelectric element of the present invention can be suitably used as, for example, various sensors such as sonic sensors, ultrasonic sensors, pressure sensors, tactile sensors, strain sensors, and vibration sensors (particularly useful for infrastructure inspections such as detecting cracks and manufacturing site inspections such as detecting the presence of foreign matter), acoustic devices such as microphones, pickups, speakers, and exciters (specific applications include noise cancellers (used in cars, trains, airplanes, robots, etc.), artificial vocal cords, buzzers to prevent the intrusion of pests and vermin, furniture, wallpaper, photographs, helmets, goggles, headrests, signage, and robots), haptics used in automobiles, smartphones, smart watches, games, etc., ultrasonic transducers such as ultrasonic probes and hydrophones, actuators used to prevent water droplet adhesion, transport, mixing, dispersion, polishing, etc., vibration-damping materials (dampers) used in containers, vehicles, buildings, and sporting equipment such as skis and rackets, and vibration-powered generators used in roads, floors, mattresses, chairs, shoes, tires, wheels, computer keyboards, etc. [Explanation of symbols]

[0164] 10, 10L piezoelectric film 10a, 10c Sheet-like object 10b Laminate 12 Diaphragm 16, 19 Adhesive layer 20 Piezoelectric layer 24 Lower electrode layer 26 Upper electrode layer 28 Lower protective layer 30 Upper protective layer 34 Matrix 36 Piezoelectric particles 50, 56, 60 Piezoelectric element 58 Core rod 70 Electroacoustic Transducer 100a~100e Cutting device 102a, 102b upper blade 103a, 103b, 105a, 105b, 113, 140 blades 104a, 104b lower blade Tables 106, 120, and 130 108, 132 Guide section 110 Arm section 112, 134 head 122 Unsheathed Blade 135 round blade

Claims

1. A piezoelectric element having a structure in which a piezoelectric layer containing piezoelectric particles in a matrix containing a polymer material is sandwiched between electrode layers, a protective layer is laminated on the surface of the electrode layer that is not in contact with the piezoelectric layer, and a plurality of cut piezoelectric films are laminated and adjacent piezoelectric films are adhered with an adhesive layer, A piezoelectric element in which the difference between the maximum height in the thickness direction in the region 43 μm inward from the end face and the height in the thickness direction at a position 43 μm inward from the end face is 4.2 μm or less.

2. The piezoelectric element according to claim 1, wherein the difference between the maximum height in the thickness direction of the piezoelectric film in a region extending from the end face to 43 μm inward and the height in the thickness direction at a position 43 μm inward from the end face is 1.4 μm or less.

3. The piezoelectric element according to claim 1 or 2, wherein the difference between the maximum height in the thickness direction of the piezoelectric film in a region extending from the end face to 43 μm inward and the height in the thickness direction at a position 43 μm inward from the end face is 0.3 μm or more.

4. 4. The piezoelectric element according to claim 1, wherein the thickness of the piezoelectric film is 20 μm to 60 μm.

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