Armature, drive unit

Abstract

To provide an armature and a linear motor that are suitable for use in vacuum environment.SOLUTION: An armature 2 of a linear motor comprises: multiple coils 4 for generating a driving power corresponding to a flowing electric current; and a film 41 for coating the multiple coils 4 from outside, insulating each of the multiple coils 4, and reducing outgassing to the outer vacuum environment. The film 41 includes: an inorganic material such as glass and ceramics coated on the surfaces of the multiple coils 4; and / or an organic material such as fluororesin and polyimide coated on the surfaces of the multiple coils 4.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present invention relates to an armature and a drive device suitable for use in a vacuum environment. [Background technology]

[0002] Patent Document 1 discloses an armature of a linear motor having coil arrays on both sides of a plate-shaped cooling unit, while Patent Document 2 discloses a drive device that uses a linear motor to drive a stage in the X-axis and Y-axis directions that are orthogonal to each other. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2021-164193 [Patent Document 2] Japanese Patent Application Publication No. 5-57558 Summary of the Invention [Problem to be solved by the invention]

[0004] When the linear motors and drive units described above are applied to semiconductor manufacturing equipment and other devices that perform fine processing or treatment in a vacuum environment, outgassing from the insulating coating that prevents short circuits in the coil itself or between adjacent coils can cause contamination of the vacuum environment inside the vacuum chamber. In such cases, the device must be immediately shut down, all semiconductor wafers being processed must be discarded, and the vacuum environment of the vacuum chamber must be reset, which requires time and effort, resulting in significant economic losses.

[0005] The present invention has been made in view of the above circumstances, and its object is to provide an armature and the like that are suitable for use in a vacuum environment. [Means for solving the problem]

[0006] In order to solve the above problems, an armature according to one embodiment of the present invention includes a plurality of coils that generate power in response to a current flowing therethrough, and a covering member that covers the plurality of coils from the outside, insulating the plurality of coils from each other and suppressing outgassing to the outside.

[0007] In this embodiment, outgassing from the covering member itself and the coil covered by the covering member is suppressed, so that contamination or fouling due to outgassing when used in a vacuum environment can be effectively prevented.

[0008] Another aspect of the present invention is a drive device that includes a plurality of coils that generate power in response to a current flowing through them, a covering member that covers the plurality of coils from the outside, insulating the plurality of coils from each other and suppressing outgassing to the outside, and a vacuum chamber that houses the plurality of coils and the covering member inside in a vacuum state.

[0009] Any combination of the above components, and any transformation of the present invention into a method, device, system, recording medium, computer program, etc., are also valid aspects of the present invention. [Effects of the Invention]

[0010] According to the present invention, an armature or the like suitable for use in a vacuum environment can be provided. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 2 is a perspective view schematically showing a stage driving device. [Figure 2] FIG. 1 is a perspective view showing a linear motor. [Figure 3] FIG. [Figure 4] FIG. [Figure 5] FIG. 4 is a side view of the flat plate cooling section as seen from the first flat plate member side. [Figure 6] 6 is a cross-sectional view taken along the line AA in FIG. 5. [Figure 7] FIG. 7 is a cross-sectional view of FIG. 6 taken along line B-B. [Figure 8] FIG. 2 is a perspective view of the armature according to the first embodiment. [Figure 9] 9 is a cross-sectional view taken along CC in FIG. 8. [Figure 10] FIG. 10 is an exploded perspective view of an armature according to a second embodiment. [Figure 11] FIG. 10 is a cross-sectional view of an armature according to a second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the description or drawings, identical or equivalent components, parts, and processes are designated by the same reference numerals, and redundant explanations will be omitted. The scale and shape of each part shown in the drawings are set for convenience to facilitate explanation, and should not be interpreted as limiting unless otherwise specified. The embodiments are merely examples and do not limit the scope of the present invention in any way. All features and combinations thereof described in the embodiments are not necessarily essential to the invention.

[0013] FIG. 1 is a perspective view schematically illustrating a stage driving device 100 as a driving device to which the armature and motor according to the present invention can be applied. The stage driving device 100 includes a base plate 102, a vibration isolation table 104 supporting the base plate 102 from below, a vibration isolation device 106, a table 200 as a driven body on which a processing object such as a semiconductor wafer is placed, one X-axis actuator 120 extending along the X-axis, and two Y-axis actuators 130A and 130B extending along the Y-axis (hereinafter collectively referred to as Y-axis actuators 130). The X-axis actuator 120 and the Y-axis actuators 130A and 130B form an H-shape in top view. The vibration isolation device 106 absorbs forces resulting from the operation of the X-axis actuator 120 and the Y-axis actuators 130A and 130B as well as vibrations from the floor, thereby suppressing vibrations of the base plate 102.

[0014] Of the components of the stage drive device 100, at least the table 200, the X-axis actuator 120, and the Y-axis actuator 130 are housed in a vacuum chamber the inside of which is kept in a vacuum state. In this specification, "vacuum" refers to the state of a space filled with gas at a pressure lower than normal atmospheric pressure. Depending on the pressure range, vacuum can be classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), high vacuum (0.1 Pa to 10 -5 Pa), ultra-high vacuum (10 -5 Pa~10 -8 Pa), extremely high vacuum (10 -8 The stage drive device 100 of this embodiment may be used in any of the above vacuum environments. However, since the linear motor described below can effectively prevent contamination of the vacuum environment due to outgassing, this embodiment is suitable for a stage drive device 100 that operates in a vacuum environment of a low pressure range (for example, a pressure range below high vacuum) where a high level of cleanliness is required for the vacuum chamber.

[0015] X-axis actuator 120 and Y-axis actuators 130A and 130B are each provided with a linear motor (described later). The linear power generated by each linear motor in the X-axis or Y-axis direction linearly drives table 200, which serves as a driven body, in the X-axis or Y-axis direction. X-axis actuator 120 includes a square shaft or X-axis guide 122 extending in the X-axis direction and an X-axis slider 124 that can move in the X-axis direction along X-axis guide 122. Similarly, Y-axis actuator 130 includes a square shaft or Y-axis guide 132 extending in the Y-axis direction and a Y-axis slider 134 that can move in the Y-axis direction along Y-axis guide 132. Note that gas such as pressurized air may be supplied between the outer circumferential surface of X-axis guide 122 and the inner circumferential surface of X-axis slider 124 to allow X-axis slider 124, which floats above X-axis guide 122, to move smoothly and precisely with extremely low friction. In this case, to prevent the supplied pressurized air, etc. from leaking into the vacuum environment inside the vacuum chamber, it is preferable to provide an exhaust port or exhaust groove connected to an exhaust device such as a vacuum pump that exhausts the pressurized air, etc., between the outer circumferential surface of X-axis guide 122 and the inner circumferential surface of X-axis slider 124. Similarly, these gas supply units and exhaust units may be provided between the outer circumferential surface of Y-axis guide 132 and the inner circumferential surface of Y-axis slider 134.

[0016] Both ends of the X-axis guide 122 are fixed to Y-axis sliders 134 of the Y-axis actuators 130A and 130B. When the linear motors of the Y-axis actuators 130A and 130B synchronously drive the Y-axis slider 134 in the Y-axis direction, the X-axis actuator 120 moves in the Y-axis direction together with the X-axis guide 122 fixed to the Y-axis slider 134. Because the table 200 is fixed to the X-axis slider 124 of the X-axis actuator 120, the table 200 as the driven body is driven in the Y-axis direction by the linear motor of the Y-axis actuator 130. Furthermore, the linear motor of the X-axis actuator 120 drives the X-axis slider 124 together with the table 200 in the X-axis direction. In this way, the stage driving device 100 drives the table 200 as the driven body within the XY plane by the linear motors of the X-axis actuator 120 and the Y-axis actuator 130.

[0017] Position sensor 140 measures the position of table 200 in the X-axis direction, and position sensor 142 measures the position of table 200 in the Y-axis direction. By differentiating the measured positions in the X-axis and Y-axis directions with respect to time, the velocities in the X-axis and Y-axis directions can be obtained. Furthermore, by differentiating the velocities in the X-axis and Y-axis directions with respect to time, the accelerations in the X-axis and Y-axis directions can be obtained. Table 200, as the driven body, is driven with high precision by feedback control based on this measurement data of position, velocity, and acceleration.

[0018] The stage driving device 100 of this embodiment, which can achieve high-precision driving in a vacuum environment as described above, is suitable for use in applications where the driven body is a table 200 on which a semiconductor wafer or the like to be processed is placed, in semiconductor manufacturing equipment such as an exposure device, ion implantation device, heat treatment device, ashing device, sputtering device, dicing device, inspection device, cleaning device, or FPD (Flat Panel Display) manufacturing equipment.

[0019] FIG. 2 is a perspective view showing an armature of a linear motor provided in each of the X-axis actuator 120 and the Y-axis actuator 130. The linear motor includes a field (not shown) formed of a permanent magnet or an electromagnet, and an armature 2 formed of a plurality of coils 4 or electromagnets. The armature 2 (or a cooling unit 10 described later) is a long, substantially rectangular plate, and coil arrays each consisting of a plurality of coils 4 are formed on both a first surface side and a second surface side thereof. Each coil array includes a plurality of coils 4 arranged at substantially equal intervals with almost no gaps along the longitudinal direction (substantially the left-right direction in FIG. 2) of the armature 2 (or the cooling unit 10 described later). In the example of FIG. 2, each coil array includes 12 coils 4, and therefore, when a three-phase AC is applied to each coil array, the 12 coils 4 are divided into four sets of three-phase coils.

[0020] A linear force is exerted on the field magnet (not shown), which includes a permanent magnet or electromagnet facing each coil group, and / or each coil group itself, by the magnetic field generated by the coil group when a driving current such as three-phase AC is passed through the coil group. The direction of this linear force is approximately the same as the arrangement direction of each coil group (i.e., the longitudinal direction of the armature 2 or the approximately left-right direction in FIG. 2), and the field magnet and armature 2 move linearly relative to each other in this direction. Either the field magnet or the armature 2 may be the mover or the stator. That is, the field magnet may be the mover and the armature 2 may be the stator, or the field magnet may be the stator and the armature 2 may be the mover, or both the field magnet and the armature 2 may be movers.

[0021] Furthermore, the field magnets facing the coil arrays on the first and second surfaces of the armature 2 may be connected to each other or formed integrally, so that the field magnets on both surfaces are driven integrally by the coil arrays on both surfaces of the armature 2. In this case, approximately the same drive current is applied to each coil 4 on the first surface of the armature 2 and each coil 4 on the second surface located behind it. Alternatively, different drive currents may be applied to the coil arrays on the first and second surfaces of the armature 2, so that the field magnets on the first surface and the second surface are driven independently of each other.

[0022] A cooling unit 10 that cools the multiple coils 4 of the armature 2 is interposed between the coil array on the first surface side and the coil array on the second surface side of the armature 2. The cooling unit 10 is in the form of a long, approximately rectangular plate, and is arranged so that one end face or the inner end face of each of the coil arrays contacts both the first surface and the second surface. The cooling unit 10 includes a flat-plate cooling section 12 in the form of an approximately rectangular plate that supports each of the coil arrays on each surface (the first surface and the second surface), an inlet section 14 provided at one end of the flat-plate cooling section 12 in the arrangement direction of the coils 4, and an outlet section 16 provided at the other end of the flat-plate cooling section 12 in the arrangement direction of the coils 4.

[0023] The inlet section 14 is provided at a position deviating from the arrangement direction of the coils 4, specifically above the coil 4 at one end of the coil array (the left end in FIG. 2 ). In this specification, terms such as “upper” and “lower” are used to conveniently indicate the relative positional relationship between the coil array or coil 4 and the inlet section 14, etc., in accordance with the drawings, and do not refer to upper or lower positions along the vertical or gravitational direction. Unless otherwise specified, directional terms such as “upper,” “lower,” “left,” and “right” refer to relative directions based on the coil array or coil 4 shown in each drawing. An inlet 14a is provided above the inlet section 14, through which a refrigerant such as cooling water flows in to cool the multiple coils 4. As will be described later, a flow path is formed inside the flat plate cooling section 12, allowing the refrigerant flowing in from the inlet 14a to flow from one end of the coil array to the other end. Like the inlet section 14, the outlet section 16 is provided at a position deviating from the arrangement direction of the coils 4, specifically above the coil 4 at the other end of the coil array (the right end in FIG. 2 ). An outlet 16a is provided at the top of the outflow section 16, through which the refrigerant that has flowed in from the inlet 14a and passed through the flow path in the flat plate cooling section 12 flows out.

[0024] As described above, the refrigerant flowing through the flow paths in the flat plate cooling section 12 simultaneously cools two coil arrays arranged so as to be in contact with both sides of the flat plate cooling section 12. Note that a coil array may be provided on only one side of the flat plate cooling section 12. In this case, the refrigerant flowing through the flow paths in the flat plate cooling section 12 cools one coil array arranged so as to be in contact with one side of the flat plate cooling section 12.

[0025] 3 to 6 show the flat plate cooling section 12. FIG. 3 is a perspective view of the flat plate cooling section 12. FIG. 4 is an exploded perspective view of the flat plate cooling section 12. FIG. 5 is a side view of the flat plate cooling section 12 as seen from the first flat plate member 20 side. FIG. 6 is a cross-sectional view taken along line AA in FIG. 5. The flat plate cooling section 12 comprises a first flat plate member 20, a second flat plate member 22, and a frame member 24. The first flat plate member 20, the second flat plate member 22, and the frame member 24 are formed from a metal material such as SUS (stainless steel).

[0026] The first flat plate member 20 is a substantially rectangular flat plate. The second flat plate member 22 is a substantially rectangular flat plate of substantially the same size and shape as the first flat plate member 20. The frame member 24 is a frame-shaped member having a peripheral shape substantially the same as the first flat plate member 20 and the second flat plate member 22. The frame member 24 can also be considered a flat plate member having a single large opening 24a defined by a frame. The first flat plate member 20, the frame member 24, and the second flat plate member 22 are stacked in this order and joined around the entire periphery. As shown in FIG. 4, a flow path 30 (FIG. 6) is formed in the flat plate cooling section 12. The flow path 30 is defined by the inner surface 20a (FIG. 6) of the first flat plate member 20 facing the second flat plate member 22, the inner surface 22a of the second flat plate member 22 facing the first flat plate member 20, and the inner peripheral surface 24b of the opening 24a of the frame member 24.

[0027] As shown in FIG. 5, a substantially circular inlet 20b is formed at one end in the longitudinal direction (the left end in FIG. 5) and one end in the lateral direction (the upper end in FIG. 5) of the first flat plate member 20, penetrating the first flat plate member 20 in a direction perpendicular to the paper surface (a direction perpendicular to both the longitudinal and lateral directions of the first flat plate member 20). Furthermore, a substantially circular outlet 20c is formed at the other end in the longitudinal direction (the right end in FIG. 5) and one end in the lateral direction of the first flat plate member 20, penetrating the first flat plate member 20 in a direction perpendicular to the paper surface. As shown in FIG. 4, the inlet 20b and the outlet 20c are located inside the opening 24a of the frame member 24 in a side view. Therefore, the inlet 20b and the outlet 20c are connected to the flow path 30 in the frame member 24 or the flat plate cooling unit 12. The inlet and the outlet may be formed in the second flat plate member 22.

[0028] As shown in FIG. 6, the inner surface 20a of the first flat plate member 20 has a plurality of protrusions 20d and 20e formed thereon, protruding toward the second flat plate member 22 (left side in FIG. 6) inside the opening 24a (FIG. 4). Similarly, as shown in FIGS. 4 and 6, the inner surface 22a of the second flat plate member 22 has a plurality of protrusions 22d and 22e formed thereon, protruding toward the first flat plate member 20 (right side in FIG. 6) inside the opening 24a. The plurality of protrusions 20d and 20e and the plurality of protrusions 22d and 22e are formed in substantially the same positions and with substantially the same shape in a side view, and their respective protrusion amounts are also substantially equal. As shown in FIG. 6, the plurality of protrusions 20d, 20e, 22d, and 22e enter the opening 24a of the frame member 24, and the tips of the corresponding (opposing) protrusions are joined together. The plurality of protrusions 20d, 20e, 22d, and 22e are formed, for example, by drawing. In this case, recesses are formed on the backside of each of the protrusions 20d, 20e, 22d, and 22e due to the drawing process.

[0029] The plurality of linear protrusions 20d, 22d provided at approximately the center in the vertical direction of the first flat plate member 20 and the second flat plate member 22 (or the opening 24a of the frame member 24) are aligned in approximately a straight line along the longitudinal direction of the flat plate cooling section 12. As shown in FIG. 6, the linear protrusions 20d, 22d divide the flow path 30 in the flat plate cooling section 12 into an upper first divided flow path 32a and a second divided flow path 32b. Here, the linear protrusions 20d, 22d form a partition wall 36 that divides the flow path 30 into upper and lower divided flow paths 32a, 32b. The flow path 30 in the flat plate cooling section 12 may be divided into three or more divided flow paths.

[0030] Within the flow path 30 (in the first divided flow path 32a in the illustrated example), a plurality of point-like protrusions 20e, 22e are provided at approximately regular intervals along the longitudinal direction of the flat plate cooling section 12. By joining the protrusions 20e and 22e, the joining strength between the first flat plate member 20 and the second flat plate member 22 can be increased. Therefore, deformation of the first flat plate member 20 and the second flat plate member 22 due to the pressure of the refrigerant flowing within the flow path 30 between the first flat plate member 20 and the second flat plate member 22 can be prevented.

[0031] 7 is a cross-sectional view taken along the line B-B of FIG. 6, showing a side cross section of the flow path 30 in the flat plate cooling section 12. The multiple protrusions 20d, 20e, 22d, 22e are arranged in an island-like manner isolated from one another. The linear protrusions 20d, 22d that make up the partition wall 36 are also arranged in an island-like or discontinuous manner, so that the partition wall 36 is formed discontinuously or intermittently along the longitudinal direction of the flat plate cooling section 12.

[0032] 2, the inlet 14a of the inlet section 14 communicates with the inlet 20b of the first flat plate member 20. Therefore, the refrigerant that flows in from the inlet 14a flows into the flow passage 30 in the flat plate cooling section 12 through the inlet 20b. Similarly, the outlet 16a of the outlet section 16 communicates with the outlet 20c of the first flat plate member 20. Therefore, the refrigerant that has passed through the flow passage 30 flows out of the outlet 16a through the outlet 20c.

[0033] 8 and 9 show a first embodiment in which the armature 2 or linear motor shown in FIGS. 2 to 7 has been improved for use in a vacuum environment (inside a vacuum chamber whose interior is kept vacuum) as shown in FIG. 1. FIG. 8 is a perspective view of the armature 2 according to the first embodiment. FIG. 9 is a cross-sectional view taken along CC in FIG. 8. The armature 2, which includes coil arrays formed on both sides of the flat cooling section 12, is attached to a holder 50 in the form of a substantially rectangular parallelepiped block made of a metal such as aluminum and having substantially the same longitudinal dimension as the armature 2. Upward protrusions corresponding to the inlet section 14 and outlet section 16 in FIG. 2 are provided at both ends of the flat cooling section 12, and slits 51 are also provided at both ends of the holder 50 to allow the protrusions to pass upward. As shown schematically in FIG. 9, a recess 52 is formed in the lower surface of the holder 50, into which the upper ends of the coils 4 (and the coating 41, described later) are fitted and held.

[0034] As shown in Fig. 9, the multiple coils 4 constituting the coil arrays on the first surface side (e.g., right surface side) and second surface side (e.g., left surface side) of the armature 2 or the flat plate cooling portion 12 are externally covered with a coating 41 as a covering member. The coating 41 is formed by coating the entire end surfaces or outer peripheral surfaces of the multiple coils 4 with an inorganic and / or organic material. The inorganic and / or organic material constituting the coating 41 is selected for the purposes of insulating the multiple coils 4 from each other and suppressing outgassing into the vacuum environment outside the coating 41.

[0035] When a driving current such as three-phase AC is applied to each coil 4 to drive a field (not shown) facing the outer end face of each coil 4 (the right end face of the right-side coil 4 and the left end face of the left-side coil 4 in FIG. 9 ), a large potential difference may occur between adjacent coils 4 on either side of the flat cooling section 12, and / or between adjacent coils 4 in each coil array aligned perpendicular to the plane of FIG. 9 (the longitudinal direction of the armature 2 or the flat cooling section 12), resulting in a current flow (discharge). In particular, discharge between adjacent coils 4 may be more likely to occur in a vacuum environment than in a non-vacuum environment. Furthermore, discharge may cause the constituent materials of the coils 4 and the flat cooling section 12 to scatter, potentially contaminating the vacuum environment. To effectively prevent discharge between adjacent coils 4, an insulating coating 41 is applied to the surfaces of the multiple coils 4.

[0036] Furthermore, the coating 41 preferably suppresses outgassing into the vacuum environment. Outgassing refers to gases such as water, oxygen, and hydrocarbons, or gaseous particles that can be dispersed, released from the constituent materials (including the adhesives for both) of the coil 4 and the flat plate cooling part 12 covered by the coating 41. If released into the vacuum environment outside the coating 41, these gases can cause serious contamination. To suppress outgassing into the vacuum environment, the coating 41 is preferably made of a material that can trap gases and particles released from the internal coil 4 and flat plate cooling part 12 within the coating 41, and that does not substantially release gases or particles that contaminate the vacuum environment. Note that, similar to the way the refrigerant in the flat plate cooling part 12 is extracted from the outlet 16 (FIG. 2), a gas release path may be provided in, for example, the flat plate cooling part 12, for releasing gases and particles trapped in the internal space of the coating 41 to the outside without contaminating the vacuum environment.

[0037] The coating 41, which has both the insulating properties and the outgassing suppression function as described above, is formed from inorganic materials such as glass and ceramics (formed by electroceramic coating (ECC) or the like) and / or organic materials such as fluororesin (polytetrafluoroethylene (PTFE) or perfluoroalkoxy fluororesin (PFA)) and polyimide. The inorganic materials described above have high insulating properties and outgassing suppression function (the inorganic materials themselves have low outgassing), and are characterized by being resistant to deformation even when heated by the coil 4 or the like. The organic materials described above also have high insulating properties and outgassing suppression function (the organic materials themselves have low outgassing). The coating 41 made of these organic materials is formed by baking, UV curing, or the like.

[0038] 10 and 11 show a second embodiment in which the armature 2 or linear motor shown in FIGS. 2 to 7 has been improved for use in a vacuum environment (inside a vacuum chamber the interior of which is kept in a vacuum state) as shown in FIG. 1. FIG. 10 is an exploded perspective view of the armature 2 according to the second embodiment. FIG. 11 is a cross-sectional view of the armature 2 according to the second embodiment, similar to FIG. 9. In FIG. 10, the armature 2 is upside down compared to FIGS. 8 and 11 in order to clearly show the components of the armature 2. Components similar to those of the first embodiment in FIGS. 8 and 9 are designated by the same reference numerals, and redundant explanations will be omitted.

[0039] The coils 4 constituting the coil arrays on the first and second surfaces of the armature 2 or the flat plate cooling unit 12 are externally covered by an insulating member 42 (not shown in FIG. 10 ) as a covering member and a metal case 43 as a metal member. As shown in FIG. 11 , the insulating member 42 is provided on the outside of the coils 4 to insulate the coils 4 from one another. Specifically, the insulating member 42 is a molded article or a molding that is filled or injected into the space between the outer circumferential surfaces of the coils 4 and the inner circumferential surface of the metal case 43. The insulating member 42 is made of an insulating resin material such as epoxy resin. The metal case 43 is a metal member that covers the insulating member 42 from the outside and is made of a metal material such as SUS (stainless steel), and houses the coils 4 (and the flat plate cooling unit 12) and the insulating member 42 inside.

[0040] The armature 2 as described above is assembled, for example, by the following procedure. First, the flat-plate cooling section 12, on both sides of which coil arrays are formed, is attached to the holder 50 so that the protruding portions at both ends of the flat-plate cooling section 12 in the longitudinal direction (the direction perpendicular to the paper surface in FIG. 11 ) pass through the slits 51 and the upper end of each coil 4 ( FIG. 11 ) fits into the recess 52. Next, a metal case 43, which is open at the top in FIG. 11 (the bottom in FIG. 10 ), is inserted from below so as to house the multiple coils 4 therein, and its upper end is fixed to the bottom surface of the holder 50 by welding or the like. In this state, an insulating material such as epoxy resin is injected into the space between the outer peripheral surfaces of the multiple coils 4 and the inner peripheral surface of the metal case 43 through a mold injection port (not shown) to form the insulating member 42.

[0041] 8 and 9, the inorganic and / or organic materials constituting the coatings 41 of the multiple coils 4 were selected for the purposes of insulating the multiple coils 4 from one another and suppressing outgassing into the vacuum environment outside the coatings 41, but in the second embodiment, the insulating member 42 insulates the multiple coils 4 from one another, and the metal case 43 suppresses outgassing into the vacuum environment outside. For this reason, in the second embodiment, an insulating material such as epoxy resin that is suitable for ensuring insulation can be used for the insulating member 42, and a metal material such as SUS that is suitable for suppressing outgassing can be used for the metal case 43.

[0042] Here, the insulating material constituting the insulating member 42 can be a source of outgassing, but the metal case 43, which has a high outgassing suppression function, covers the insulating member 42 from the outside, thereby effectively suppressing the release of outgassing into the vacuum environment. Note that the metal member covering the insulating member 42 from the outside is not limited to the metal case 43 shown in FIGS. 10 and 11 , but may be a metal coating containing a metal material such as nickel that is coated by plating or the like on the surface of a pre-formed insulating member 42. Furthermore, the inorganic and / or organic coating exemplified in the first embodiment of FIGS. 8 and 9 may be formed to cover the pre-formed insulating member 42 from the outside, instead of or in addition to the metal member (metal case 43 or metal coating).

[0043] In the second embodiment described above, the multiple coils 4 and the flat plate cooling portion 12 are covered with the insulating member 42, so even if the temperature and pressure of the refrigerant inside the flat plate cooling portion 12 are significantly different from those in the external vacuum environment, deformation of the flat plate cooling portion 12 can be suppressed. This allows the flow rate of the refrigerant flowing through the flat plate cooling portion 12 to be increased and / or the temperature to be lowered, improving the cooling efficiency of the cooling unit 10 and ultimately the operating efficiency of the armature 2 or the linear motor.

[0044] The present invention has been described above based on the embodiments. The embodiments are merely examples, and it will be understood by those skilled in the art that various modifications are possible in the combination of the respective components and treatment processes, and that such modifications are also within the scope of the present invention.

[0045] The functional configuration of each device described in the embodiments can be realized by hardware resources, software resources, or a combination of hardware and software resources. Examples of hardware resources include processors, ROMs, RAMs, and other LSIs. Examples of software resources include operating systems, applications, and other programs. [Explanation of symbols]

[0046] 2 armature, 4 coil, 10 cooling unit, 12 flat plate cooling section, 30 flow path, 41 coating, 42 insulating member, 43 metal case, 50 holder, 100 stage drive device, 120 X-axis actuator, 130 Y-axis actuator, 200 table.

Claims

1. A plurality of coils that generate power in response to a current flowing through them; a covering member that covers the plurality of coils from the outside, the covering member insulating the plurality of coils from each other and suppressing outgassing to the outside; a cooling unit that cools the plurality of coils; Equipped with the covering member includes an insulating member provided outside the plurality of coils to insulate the plurality of coils from one another, and a metal member covering the insulating member from the outside, the cooling unit is plate-shaped and has a first surface and a second surface; the plurality of coils are provided on both the first surface side and the second surface side of the cooling unit, The insulating member covers both the coils on the first surface side and the coils on the second surface side and a portion of the cooling unit from the outside, and the metal member covers the entire insulating member from the outside, thereby suppressing outgassing from both coils, the cooling unit, and the insulating member.

2. The armature according to claim 1 , wherein the covering member comprises a coating containing an inorganic material coated on a surface of the plurality of coils or the insulating member.

3. The armature according to claim 2 , wherein the inorganic material includes at least one of glass and ceramics.

4. The armature according to claim 1 , wherein the covering member comprises a coating containing an organic material coated on a surface of the plurality of coils or the insulating member.

5. The armature according to claim 4 , wherein the organic material includes at least one of a fluororesin and a polyimide.

6. 6. The armature according to claim 1, wherein the metal member is a metal case that houses the plurality of coils and the insulating member therein.

7. 6. The armature according to claim 1, wherein the metal member is a coating containing a metallic material coated on the surface of the insulating member.

8. the cooling unit is provided on one end surface of the plurality of coils, the covering member covers the other end surfaces of the plurality of coils; An armature according to any one of claims 1 to 7.

9. A plurality of coils that generate power in response to a current flowing through them; a covering member that covers the plurality of coils from the outside, the covering member insulating the plurality of coils from each other and suppressing outgassing to the outside; a cooling unit that cools the plurality of coils; a vacuum chamber that accommodates the plurality of coils, the covering member, and the cooling unit in a vacuum state; Equipped with the covering member includes an insulating member provided outside the plurality of coils to insulate the plurality of coils from one another, and a metal member covering the insulating member from the outside, the cooling unit is plate-shaped and has a first surface and a second surface; the plurality of coils are provided on both the first surface side and the second surface side of the cooling unit, The insulating member covers both the coils on the first surface side and the coils on the second surface side and a portion of the cooling unit from the outside, and the metal member covers the entire insulating member from the outside, thereby suppressing outgassing from both coils, the cooling unit, and the insulating member.

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