Slot die coating method

Abstract

To provide a slot die coating device, and a coating method of the same.SOLUTION: A flow channel of a slot die coating device 1 is divided into a first flow channel and a second flow channel by a sim group. The first flow channel is used for coating from an intermediate part of a coating nozzle, and the second flow channel is used for coating from two side parts of the coating nozzle. A nozzle lip in the two side parts of the slot die coating device extends so as to approach a base material 72, so as to prevent hitting an obstacle 73 in the base material during coating. The height of the coating of the slot die coating device is controllable so as to achieve optimized coating.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a die coating apparatus, and more particularly to a die coating apparatus having two flow paths and two outlets having different heights, and a related coating method.

Background Art

[0002] To coat a substrate to be coated, a slot coating head is used to distribute a slurry through a slot nozzle of slot die coating. Due to its wider width, the slot nozzle is very suitable for a wide range of coatings. The slot nozzle can be used together with a roller or a conveyor to achieve a continuous coating.

[0003] However, when components such as semiconductor components are present on the substrate, the components on the substrate form three-dimensional obstacles during the slot coating process. For example, when a frame-shaped coating is performed around a component, due to the presence of the obstacle, the frame-shaped coating cannot be completed in a single process. However, slot coating is still considered an efficient process to use. Therefore, the conventional method first coats two corresponding sides of the frame, then rotates the substrate 90 degrees, and coats another set of two opposite sides. Thus, the overall process steps are complex and time-consuming, and it is also difficult to achieve continuous mass production.

[0004] Furthermore, when the thickness of the components on the substrate is relatively large, when the coating head passes through the components, the bottom slot nozzle may collide with the components and scratch the surface of the components. Therefore, in this case, the frame-shaped coating has to be performed for each of the four sides. The complexity and time cost of the overall process are significantly increased.

[0005] Therefore, the present invention provides a slot die coating apparatus and a coating method thereof in order to mitigate or eliminate the above-mentioned problems. [Overview of the project] [Problems that the invention aims to solve]

[0006] The object of the present invention is to provide a novel slot die coating apparatus and coating method thereof, which, by utilizing a group of shims, can achieve a single process for forming a frame-shaped coating on a substrate with obstacles without significantly altering the structure of the slot coating head device. Therefore, process complexity and manufacturing costs are significantly reduced.

[0007] Another object of the present invention is to provide a slot die coating apparatus and a coating method thereof. The flow path of the slot die coating apparatus is divided into a first flow path and a second flow path for coating the lateral and longitudinal sides of a frame-shaped coating, respectively. Thus, a frame-shaped coating around a component is achieved by a single slot die coating apparatus through a single process.

[0008] Another object of the present invention is to provide a slot die coating apparatus and a coating method thereof. The shim group forms a lower nozzle lip on the two sides and a higher nozzle lip in the middle portion of the die body. Furthermore, the height of the slot die coating apparatus is adjustable to avoid collisions between the slot die coating apparatus and components on the substrate, thereby optimizing the coating quality. [Means for solving the problem]

[0009] To carry out the above, the present invention discloses a slot die coating apparatus including a die body and a shim group. The die body has a flow channel and a coating nozzle that receives slurry from the flow channel and distributes the slurry for coating. A shim group is disposed within the die body and divides the flow channel into a first flow channel and a second flow channel. Slurry passing through the first flow channel is distributed from the middle portion of the coating nozzle, and slurry passing through the second flow channel is distributed from two sides of the coating nozzle. The shim group corresponds to the second flow channel and includes two die lips that extend and protrude outward from the die body. The distance between the first outlet of the first flow channel and the substrate is greater than the distance between the second outlet of the second flow channel and the substrate. The slurry is controlled to be distributed from the first flow channel to the front and rear of the substrate obstruction to form lateral sides, and the slurry is controlled to be distributed from the second flow channel to both sides of the substrate obstruction to form elongated sides on the substrate. Thus, a frame-shaped coating around the components is achieved through a single process. Collisions between the slot die coating apparatus and the components on the substrate are avoided.

[0010] The present invention relates to a slot die coating method, The step of providing a substrate with obstacles and a slot die coating apparatus, wherein the slot die coating apparatus is A die body having a flow channel and a coating nozzle that receives slurry from the flow channel and distributes the slurry for coating, A shim group disposed within the die body, which divides the flow path into a first flow path and a second flow path, wherein the slurry passing through the first flow path is distributed from the middle portion of the coating nozzle, and the slurry passing through the second flow path is distributed from the two sides of the coating nozzle, and the shim group Equipped with, The shim group includes two die lips corresponding to the second flow path and extending and protruding outward from the die body, wherein the distance between the first outlet of the first flow path and the substrate is greater than the distance between the second outlet of the second flow path and the substrate, providing the step of, The steps include distributing the slurry from the first outlet to the front of the obstacle in the substrate, thereby forming the first lateral side portion, The steps include closing the distribution from the first outlet, moving the slot die coating apparatus far away from the substrate, and preventing the slot die coating apparatus from colliding with an obstacle, The steps include distributing the slurry from the second outlet onto both sides of the obstacle on the substrate, thereby forming two elongated sides on the substrate, The steps include closing the distribution from the second outlet and moving the slot die coating apparatus downward to its original height relative to the substrate, The steps include distributing the slurry from the first outlet to the rear of the obstacle in the substrate, thereby forming a second lateral side, A slot die coating method, including the above, is further disclosed.

[0011] Further scope of the applicability of the present invention will become apparent from the detailed description given below herein. However, it should be understood that the detailed description and specific examples, while illustrating preferred embodiments of the present invention, are given solely as examples, as various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.

[0012] The present invention will be better understood from the detailed description provided below herein, which is solely illustrative and therefore does not limit the invention. [Brief explanation of the drawing]

[0013] [Figure 1] This is a schematic diagram of an embodiment of the slot die coating apparatus of the present invention. [Figure 2] This is an exploded view of an embodiment of the slot die coating apparatus of the present invention. [Figure 3] This is a schematic diagram of an embodiment of the slot die coating apparatus of the present invention, showing the coating state. [Figure 4A] This is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 4B]It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 4C] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 4D] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 5A] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 5B] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 6A] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 6B] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 7A] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 7B] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 8A] It is a schematic diagram of an embodiment of the slot die coating method of the present invention. [Figure 8B] It is a schematic diagram of an embodiment of the slot die coating method of the present invention.

Embodiments for Carrying Out the Invention

[0014] The present invention is described with respect to specific embodiments and with reference to certain specific drawings, but the present invention is not limited thereto and is limited only by the claims. Any reference signs in the claims shall not be construed as limiting the scope. The drawings described are merely schematic and non-limiting. In the drawings, the sizes of some of the elements may be exaggerated for illustrative purposes and may not be to scale.

[0015] The technical terms used herein are intended to describe only specific embodiments and are not intended to limit the overall concept of the invention. Where used herein, the singular forms "a," "an," and "the" are intended to include the plural form unless otherwise specified by context. Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art to which the exemplary embodiments belong. Terms as defined in commonly used dictionaries should be interpreted as having the meaning consistent with their meaning in the context of the relevant art, and should not be interpreted in an ideal or overly formal sense unless explicitly defined herein.

[0016] Throughout this specification, any reference to “one embodiment” means that a particular feature, structure, or characteristic described in relation to that embodiment is included in at least one embodiment of the present invention. Therefore, the occurrence of the phrase “in one embodiment” in various places throughout this specification does not necessarily refer to the same embodiment. Furthermore, certain features, structures, or characteristics can be combined in any suitable manner in one or more embodiments, as will be apparent to those skilled in the art from this disclosure.

[0017] In the description of this invention, the terms “installed,” “connected,” and “displaced” should be understood broadly and should be noted that they may be fixed or detachable, and may be connected directly or indirectly through an intermediate medium, which may be an internal connection between two components, for example, mechanical or electrical. The specific meanings of the above terms in this invention will be understood by those skilled in the art in specific contexts.

[0018] The present invention discloses a slot die coating apparatus. Referring to Figures 1 and 2, the slot die coating apparatus 1 includes a die body and a coating nozzle located at the bottom of the die body. Slurry is driven into the die body via external equipment such as a pump and then distributed through the coating nozzle. Details of the external equipment such as the pump are the same as those of a conventional slot coating head. Therefore, the external pump is ignored in the figures. The figures mainly show the slot die coating apparatus 1, which is a feature of the present invention.

[0019] As shown in Figures 1 and 2, the die body consists of an upper mold 11 having a trapezoidal cross-section and a lower mold 12 having a trapezoidal cross-section. The upper mold 11 includes a first slurry storage slot 112, and the lower mold 12 includes a second slurry storage slot 122. The upper mold 11 and the lower mold 12 also include an upper inlet 111 and a lower inlet 121. The upper inlet 111 is connected to the first slurry storage slot 112, and the lower inlet 121 is connected to the second slurry storage slot 122. In conventional structures, the upper mold 11 and the lower mold 12 are directly connected to each other. The first slurry storage slot 112 and the second slurry storage slot 122 are assembled to form a single flow path. Coating nozzles formed at the ends in the two trapezoidal inclined planes discharge the slurry for coating. However, in this invention, a group of shims is positioned and sandwiched between the upper mold 11 and the lower mold 12 in order to completely separate the first slurry storage slot 112 and the second slurry storage slot 122. Thus, a first flow path and a second flow path that are not connected to each other are formed.

[0020] The shim group is sandwiched between the upper mold 11 and the lower mold 12 and includes a central shim plate 14, an upper shim plate 13, a first lower shim plate 16, and a second lower shim plate 15. The central shim plate 14 is U-shaped and includes a central shim plate body 141 and two extensions 142 positioned at the ends of the two sides of the central shim plate body 141 and extending toward the coating nozzle. The central shim plate body 141 has no holes or slots in the positions corresponding to the first slurry storage slot 112 and the second slurry storage slot 122. Thus, the first slurry storage slot 112 and the second slurry storage slot 122 are completely separated to form a first and second flow path that are not connected to each other. The width of the first notch 143 formed by the two extensions 142 of the central shim plate body 141 is T1. The first notch 143 is flush with the coating nozzle, i.e., at the ends of the two trapezoidal inclined planes of the first mold 11 and the second mold 12. The upper shim plate 13 is U-shaped and includes an upper shim plate body 132 and two extensions 133 extending from the two side edges of the upper shim plate body 132 toward the coating nozzle. Thus, a second notch 131 is formed in the middle portion. The width of the second notch 131 is T2, where T2 > T1. The upper shim plate 13 is disposed flat on one side of the central shim plate 14. The second notch 131 connects to most of the first slurry storage slot 112, shielding only two edges of the first slurry storage slot 112. Slurry from the first slurry storage slot 112 is blocked by the central shim plate 14 and exposed through the second notch 131 to form a first flow path, which distributes the slurry from the middle portion of the coating nozzle.

[0021] The first lower shim plate 16 and the second lower shim plate 15 are continuously sandwiched between the central shim plate 14 and the lower mold 12. The first lower shim plate 16 shields the portion of the second slurry storage slot 122 of the lower mold 12 and has two through holes 161 corresponding to the two sides of the second slurry storage slot 122. The second lower shim plate 15 has two flow path slots 151 corresponding to the through holes 161. Slurry from the second slurry storage slot 122 is distributed from both sides of the coating nozzle through the through holes 161 and the flow path slots 151. The first lower shim plate 16 and the second lower shim plate 15 are also U-shaped. The first lower shim plate 16 includes a first lower shim plate body 163 and two extensions 164 positioned at the ends of the two sides of the first lower shim plate body 163 and extending toward the coating nozzle. A third notch 162 is formed between two extensions 164. The second lower shim plate 15 includes a second lower shim plate body 153 and two extensions 154 positioned at the ends of the two sides of the second lower shim plate body 153 and extending toward the coating nozzle. A fourth notch 152 is formed between the two extensions 154. The width of the third notch 162 is T3, and the width of the fourth notch 152 is T4. Widths T3 and T4 are substantially equal to the width T1 of the first notch 143. Thus, the flow path slot 151 of the second lower shim plate 15 is sandwiched between the first lower shim plate 16 and the central shim plate 14, maintaining the stability of distribution from the second flow path.

[0022] The separation of the central shim plate 14 ensures that the first and second flow paths, formed by the first slurry storage slot 112 and the second slurry storage slot 122, are completely separated and not connected to each other. Therefore, by determining which slurry enters the upper inlet 111 or the lower inlet 121, the distribution of slurry from one of the flow paths, i.e., the first or second flow path, is controlled. Whether the slurry is distributed from the middle portion of the coating nozzle, i.e., the first flow path, or from the two sides, i.e., the second flow path, is selectable or adjustable. Thus, coating in both the longitudinal and lateral directions is performed to achieve flame-type coating using a single process on a single coating head. In other words, the object being coated is kept driven in only one direction without rotation or other movement, and flame-type coating can be achieved through the slot die coating apparatus 1 of the present invention. A more detailed explanation is provided below.

[0023] Referring to Figure 3, the slot die coating apparatus 1 of the present invention is adapted for coating on a substrate 72 with an obstacle 73 so as to form a frame-shaped coating around the obstacle 73. The obstacle 73 may be a semiconductor chip disposed on the substrate 72, or any other component protruding from the surface of the substrate 72. The frame includes a first lateral side portion 31 and a second lateral side portion 33, which are lateral sides near the front and rear ends of the obstacle 73, and a first elongated side portion 321 and a second elongated side portion 322, which are elongated sides near the two sides of the obstacle 73. As shown in the figure, if the substrate 72 is thinner or more flexible, rollers 71 can be used to drive the substrate 72 and move it relative to the slot die coating apparatus 1. A slurry is also distributed by the slot die coating apparatus 1 to coat the surface of the substrate 72. However, the roller 71 is for illustrative purposes only, and the present invention is not limited to using the roller 71 exclusively to move the substrate 72 toward the slot die coating apparatus 1 and to coating the surface of the substrate 72. Other methods, such as a conveyor or any other means, can be used. Furthermore, for the integrity of the frame, the first lateral side 31 and the second lateral side 33 must be connected to the first elongated side 321 and the second elongated side 322. Thus, the width T2 of the second notch 131 of the upper shim plate 13 must extend and overlap the portion of the flow path slot 151 of the second lower shim plate 15. The flow path slot 151 is located at the two ends of the second notch 131, respectively. The flow path slot 151 partially overlaps the second notch 131. See Figures 1 and 2. In other words, the width of the second notch 131 is T2. The distance between the inner side walls of the two flow path slots 151 is T6. The length of the lateral side of the obstacle 73 is T5. The relationship between these sizes is T2 > T6 > T5.

[0024] Furthermore, the obstacle 73 is a component that is pre-formed on the surface of the substrate 72 before the frame is coated. The component is a so-called obstacle 73 due to having a certain height. The type of component is not limited. When coating the first elongated side 321 and the second elongated side 322 on both sides of the obstacle 73, the slot die coating apparatus 1 passes through the obstacle 73 in a single coating process. Considering that the obstacle 73 has a certain height, the slot die coating apparatus 1 is controlled to move further away from the surface of the substrate 72 while coating the first elongated side 321 and the second elongated side 322 compared to coating the first lateral side 31 and the second lateral side 33 in order to prevent scratching the surface of the component. Therefore, the second outlet 22 used to coat the first elongated side 321 and the second elongated side 322 must be closer to the substrate 72 in order to achieve a better coating. Referring to Figures 1 and 2, in this invention, the two sides of the shim group used to form the second outlet 22 extend downward. The central shim plate 14, the upper shim plate 13, the first lower shim plate 16, and the second lower shim plate 15 form the first die lip 101 and the second die lip 102, corresponding to the flow path slot 151 of the second flow path and extending to the outside of the bottom of the upper mold 11 and the lower mold 12. Thus, the second outlet 22 extends to the first die lip 101 and the second die lip 102. Slurry from the second slurry storage slot 122 passes through the through hole 161 of the first lower shim plate 16 and the flow path slot 151 of the second lower shim plate 15, which is blocked by the central shim plate 14, in order to be distributed from the second outlet 22. The first outlet 21 of the first flow path in the intermediate section is located on a third die lip 103 that is higher than the second outlet 22. Slurry from the first slurry storage slot 112 is blocked by a central shim plate 14 and exposed through a second notch 131 in the upper shim plate 13 in order to be distributed from the first outlet 21.

[0025] With such a structure, the slot die coating apparatus 1 is controlled to be close to the substrate 72 while coating the first lateral side portion 31 and the second lateral side portion 33 at the front and rear ends of the obstacle 73. While coating the first elongated side portion 321 and the second elongated side portion 322 on both sides of the obstacle 73, the slot die coating apparatus 1 is controlled to be slightly away from the substrate 72 to avoid collision with the obstacle 73 by the intermediate portion that does not have the first die lip 101 and the second die lip 102. The first die lip 101 and the second die lip 102 on both sides extend downward so that the second outlet 22 of the second flow path is closer to the substrate 72 in order to obtain a better coating. A more detailed description of the process is given below.

[0026] The present invention discloses a slot die coating method. Please refer to Figure 4A. The slot die coating apparatus 1 of the present invention is used to coat a substrate 72 with obstacles 73. A slurry is distributed around the obstacles 73 on the substrate 72 to form a frame. As stated above, the feeder of the slot die coating apparatus 1, the drive system for the substrate 72, etc., are not the main features of the present invention. Therefore, these devices or equipment are not shown in the following figures, including this figure. Also, in the figures, only one obstacle 73 is shown for illustrative purposes. When mass production is considered, the obstacles 73 on the substrate 72 may also be designed to be arranged in multiple or periodic configurations. The first and second flow paths may be switched during a predetermined time or progression for control. Furthermore, as shown in Figure 4B, a sensor 50 can be used to detect the relative position of the obstacles 73 on the substrate 72 with respect to the slot die coating apparatus 1 for more accurate coating. The following description is presented in the case where the sensor 50 is present.

[0027] Referring to Figure 4B, a substrate 72 with an obstacle 73 and a slot die coating apparatus 1 are provided. The structure of the slot die coating apparatus 1 is as described above and shown in Figure 1, and it can be switched to distribute the slurry from the middle portion from the first outlet 21 of the first flow path and / or from both sides from the second outlet 22 of the second flow path. It is also considered that the obstacle 73 has a certain thickness. The position of the first outlet 21 of the first flow path is higher than the position of the second outlet 22 of the second flow path, i.e., the second outlet 22 is closer to the substrate 72 than the first outlet 21. That is, the slot die coating apparatus 1 has a first die lip 101 and a second die lip 102 extending to both sides. The first die lip 101 and the second die lip 102 are closer to the surface of the substrate 72. Referring to Figures 4C to 4D, the first flow path of the slot die coating apparatus 1 is used to distribute the slurry in front of the obstacle 73 of the substrate 72 to form the first lateral side portion 31. Referring to Figure 2, this means that the slurry is fed from the upper inlet 111. The slurry flows through the first slurry storage slot 112 to be distributed from the first outlet 21 and is exposed from the second notch 131 of the upper shim plate 13.

[0028] Referring to Figure 5A, when the sensor 50 detects that it is close to the obstacle 73, the distribution from the first flow path is closed. The slot die coating apparatus 1 is also moved away from the substrate 72. As shown in the figure, the direction of movement A of the slot die coating apparatus 1 is upward. In other words, the slot die coating apparatus 1 is moved upward along the Z-axis direction of the plane in which the substrate 72 is positioned. Therefore, the first outlet 21 of the first flow path is moved upward to prevent it from colliding with the obstacle 73. The height to which the slot die coating apparatus 1 is lifted varies depending on the thickness of the obstacle 73 and the original height of the slot die coating apparatus 1. The first outlet 21 of the first flow path is positioned in the middle of the slot die coating apparatus 1, and as a result of the height of the slot die coating apparatus 1 being lifted, the obstacle 73 passes between the first die lip 101 and the second die lip 102. This prevents the first outlet 21 of the slot die coating apparatus 1 from colliding with the obstacle 73, and consequently prevents damage or scratches to the first outlet 21 or the obstacle 73.

[0029] Next, the second flow path of the slot die coating apparatus is used to coat both sides of the obstacle 73 on the substrate 72, forming the first elongated side portion 321 and the second elongated side portion 322. See Figure 5B. The second outlet 22 of the second flow path continues to be used for coating until the first elongated side portion 321 and the second elongated side portion 322, located on both sides of the obstacle 73, as shown in Figures 6A and 6B, are completed. The position of the second outlet 22 of the second flow path is lower, i.e., closer to the surface of the substrate 72. Even when the slot die coating apparatus 1 is lifted far away from the substrate 72, the second outlet 22 is still relatively close to the substrate 72. Therefore, good coating can still be achieved. Referring to Figures 7A and 7B, the distribution from the second flow path is closed when the detection unit passes the obstacle 73. The slot die coating apparatus 1 is then moved downward to its original height relative to the substrate 72. As shown in the figure, the direction of movement B of the slot die coating apparatus 1 is downward. In other words, the slot die coating apparatus 1 is moved downward along the Z-axis direction of the plane in which the substrate 72 is positioned. The first outlet 21 of the first flow path is used to distribute the slurry behind the obstacle 73 on the substrate 72 to form the second lateral side portion 33. Referring to Figures 8A to 8B, the coating of the second lateral side portion 33 is the same as the coating of the first lateral side portion 31 described above. Therefore, repeated explanations are omitted. Thus, the coating of the frame around the obstacle 73 is completed. Only one slot die coating apparatus 1 is used in a single process without changing the direction in which the substrate 72 is driven, as in conventional coatings. The slot die coating apparatus 1 also has a first die lip 101 and a second die lip 102 extending and protruding from two side ends to optimize the coating of the entire frame without colliding with the obstacle 73 on the substrate 72.

[0030] From the manufacturing process described above for coating the entire frame, it can be seen that the substrate 72 moves only along a single axis (horizontal in the figure) relative to the slot die coating apparatus 1, and the slot die coating apparatus 1 moves only along the Z axis (perpendicular to the surface of the substrate 72) relative to the substrate 72. Unlike conventional coatings, the substrate needs to rotate relative to the coating head device to complete the overall frame coating. Therefore, the present invention can achieve highly efficient and continuous production by using rollers or conveyors to transport the substrate 72.

[0031] Accordingly, the present invention provides a slot die coating apparatus and a coating method thereof, which, by utilizing a group of shims, can achieve a single process for forming a frame-shaped coating on a substrate with obstacles without significantly altering the structure of the slot coating head device. Thus, process complexity and manufacturing costs are significantly reduced. Furthermore, the flow path of the slot die coating apparatus is divided into a first flow path and a second flow path for coating the lateral and elongated sides of the frame-shaped coating, respectively. Thus, a frame-shaped coating around a component is achieved by a single slot die coating apparatus through a single process. In addition, the group of shims extends and protrudes from the die body to form a die lip. The die lip is higher in the middle section, i.e., further from the substrate, and lower on both sides, i.e., closer to the substrate. Furthermore, the height of the slot die coating apparatus is adjustable to avoid collisions between the slot die coating apparatus and the component on the substrate, thereby optimizing coating quality.

[0032] Although the present invention has been described in this manner, it is obvious that the invention may be modified in many ways. Such modifications should not be considered departures from the spirit and scope of the invention, and all such modifications are obvious to those skilled in the art and are therefore intended to be included within the scope of the appended claims.

Claims

1. A slot die coating method, A step of providing a substrate with obstacles and a slot die coating apparatus, wherein the slot die coating apparatus is A die body having a flow channel and a coating nozzle that receives slurry from the flow channel and distributes the slurry for coating, A shim group disposed within the die body, which divides the flow path into a first flow path and a second flow path, wherein the slurry passing through the first flow path is distributed from the middle portion of the coating nozzle, and the slurry passing through the second flow path is distributed from the two sides of the coating nozzle, Equipped with, The shim group includes two die lips corresponding to the second flow path and extending and protruding outward from the die body, wherein the distance between the first outlet of the first flow path and the substrate is greater than the distance between the second outlet of the second flow path and the substrate, providing the step of The steps include distributing the slurry from the first outlet to the front of the obstacle on the substrate, thereby forming the first lateral side portion, The steps include closing the distribution from the first outlet and moving the slot die coating apparatus far away from the substrate to prevent the slot die coating apparatus from colliding with the obstacle, The steps include distributing the slurry from the second outlet onto both sides of the obstacle on the substrate, thereby forming two elongated sides on the substrate, The steps include closing the distribution from the second outlet and moving the slot die coating apparatus downward to its original height relative to the substrate, The steps include distributing the slurry from the first outlet to the rear of the obstacle on the substrate, thereby forming a second lateral side portion, A slot die coating method, including the above.

2. The slot die coating method according to claim 1, wherein the substrate with the aforementioned obstacles is transported by rollers or a conveyor and moves along only a single axis relative to the slot die coating apparatus.

3. The slot die coating method according to claim 2, wherein the slot die coating apparatus moves only in a direction perpendicular to the surface of the substrate with the obstacle.

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