Synchrotron radiation generator

Abstract

To provide a radiation light source generator with excellent performance capable of achieving a high output function by applying a plurality of linear accelerators and reducing power consumption.SOLUTION: A synchrotron radiation source generating apparatus for emitting synchrotron radiation by accelerating an electron beam, comprising: an electron gun for emitting an electron beam; acceleration means arranged in parallel for continuously accelerating the electron beam emitted from the electron gun; a storage ring for storing the electron beam accelerated through the acceleration means; and an undulator for emitting synchrotron radiation from the electron beam stored in the storage ring.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a radiation source generating device, and more particularly, to a radiation source generating device that applies a plurality of linear accelerators to achieve a high output function and has excellent performance capable of reducing power consumption.

Background Art

[0002] Extreme ultraviolet lithography (EUVL) is considered to be the most feasible and cost-effective next-generation lithography for sub-22nm HP (sub-7nm technology node) for high-volume manufacturing of semiconductor devices. EUVL is based on reflective optical components for both projection optics and masks.

[0003] The large step from state-of-the-art 193nm (ArF (argon fluoride)) optical lithography to 13.5nm EUV lithography was triggered by the availability of optical elements for the EUV wavelength range. Only reflective optical systems can be used for the EUV range compared to the 193nm range where refractive optical systems are used for photon beam manipulation. The Mo-Si coating with 70% reflectivity and 2% BW at 13.5nm wavelength is the technology adopted for both mirrors and masks. Such multilayers add other complexities to the process. There are strict requirements for the flatness of the optical system and the mask.

[0004] The EUV mask is composed of a substrate, a multilayer coating on the substrate, and a patterned absorption structure (e.g., TaN) on the multilayer. All of these layers may have some defects that need to be detected and characterized in order to repair isolated defects before use in a scanner or to discard the mask.

[0005] <00oooo20>Therefore, EUV mask inspection tools are a crucial element, particularly for detecting phase errors caused by distortions located deep within multilayer mirrors. Mask inspection is required on the blank multilayer and via the pellicle on the patterned mask and the final mask.

[0006] While other measurement methods such as UV microscopy, AFM, and SEM are used for this purpose, chemical beam masking, i.e., measurement using EUV light, has proven to be an indispensable method. Only EUV light penetrates deeply into the resonant multilayer structure.

[0007] The latest technology, the SEMATECH Actinic Inspection Tool (manufactured by SHARP), is a high-resolution EUV Fresnel zone plate microscope specifically designed for photomask research.

[0008] Therefore, in this industry, one of the main challenges of EUV measurement is, above all, finding EUV sources with high brightness and high stability. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] Korean Registered Patent Publication No. 10-2038510 [Patent Document 2] U.S. Patent No. 8941336 [Overview of the project] [Problems that the invention aims to solve]

[0010] To solve the above-mentioned problems, the object of the present invention is to provide a synchrotron radiation source generator that can emit high-power synchrotron radiation while minimizing power consumption by designing a combination of accelerators that accelerate the electron beam and a magnetic unit that controls the direction of the electron beam.

[0011] Another object of the present invention is to provide a radiation source generating device having the structure according to the present invention that can be installed and operated in a relatively narrow space while minimizing spatial constraints.

[0012] In particular, the present invention provides a synchrotron radiation source generator that generates EUV light used in semiconductor manufacturing processes.

[0013] Furthermore, yet another object of the present invention is to provide a synchrotron radiation generator that can be improved upon or replaced by existing EUV synchrotron radiation generators. [Means for solving the problem]

[0014] To achieve the above objectives, the present invention provides a synchrotron radiation source generator that accelerates an electron beam and emits synchrotron radiation, comprising: an electron gun that emits an electron beam; acceleration means arranged in parallel to continuously accelerate the electron beam emitted from the electron gun; a storage ring that stores the electron beam accelerated via the acceleration means; and an undulator that emits synchrotron radiation from the electron beam stored in the storage ring.

[0015] Furthermore, the acceleration means accelerates the electron beam emitted from the electron gun by passing it through each of the multiple acceleration means only once.

[0016] Furthermore, the acceleration means comprises a plurality of linear accelerators arranged so as to be aligned vertically in a plan view.

[0017] Furthermore, the acceleration means further comprises a magnetic section for switching and transmitting the direction of the electron beam from one linear accelerator to the next.

[0018] Furthermore, the acceleration means is configured such that each of the linear accelerators and the magnetic section is connected in a one-way manner, and the electron beam emitted from the electron gun is supplied to the storage ring.

[0019] Furthermore, the linear accelerator comprises a first-1 linear accelerator that initially receives and accelerates the electron beam emitted from the electron gun; a first-2 linear accelerator positioned opposite the first-1 linear accelerator and receiving the electron beam; a second-1 linear accelerator positioned outward from the first-1 linear accelerator and receiving the electron beam from the first-2 linear accelerator; a second-2 linear accelerator positioned outward from the first-2 linear accelerator and receiving the electron beam from the second-1 linear accelerator; a third-1 linear accelerator positioned outward from the second-1 linear accelerator and receiving the electron beam from the second-2 linear accelerator; and a third-2 linear accelerator positioned outward from the second-2 linear accelerator and receiving the electron beam from the third-1 linear accelerator.

[0020] Furthermore, the magnetic part includes a first magnetic part that transmits an electron beam from the electron gun to one side of the first linear accelerator, a first sub - magnetic part (2 - 1 - 1) that transmits an electron beam emitted from the other side of the first linear accelerator to the other side of the second linear accelerator, a second sub - magnetic part (2 - 2 - 1) that transmits an electron beam emitted from one side of the second linear accelerator to one side of the third linear accelerator, a second sub - magnetic part (2 - 1 - 2) that transmits an electron beam emitted from the other side of the third linear accelerator to the other side of the fourth linear accelerator, a second sub - magnetic part (2 - 2 - 2) that transmits an electron beam emitted from one side of the fourth linear accelerator to one side of the fifth linear accelerator, a second sub - magnetic part (2 - 1 - 3) that transmits an electron beam emitted from the other side of the fifth linear accelerator to the other side of the sixth linear accelerator, and a third magnetic part that transmits an electron beam emitted from one side of the sixth linear accelerator to the storage ring.

[0021] Furthermore, the magnetic part includes a first magnetic part that preferentially transmits an electron beam emitted from the electron gun to the linear accelerator, a plurality of second magnetic parts that transmit an electron beam from one linear accelerator to the next linear accelerator, and a third magnetic part that emits an electron beam from the last linear accelerator to the storage ring.

[0022] Furthermore, the magnetic part is composed of a combination of a dipole magnet and a quadrupole magnet to transmit an electron beam that has passed through one of the linear accelerators to the next linear accelerator.

[0023] Furthermore, the dipole magnet and the quadrupole magnet provide a magnetic field with a permanent magnet as to provide.

[0024] Furthermore, the acceleration means is configured to be located inside the storage ring.

[0025] Furthermore, the magnetic section is combined in the order of quadrupole magnet, quadrupole magnet, dipole magnet, quadrupole magnet, dipole magnet, quadrupole magnet, and quadrupole magnet to transmit the next linear accelerator electron beam from a certain linear accelerator.

[0026] Furthermore, the accelerating means has a plurality of linear accelerators arranged in a stacked structure in a plan view.

[0027] Furthermore, the dipole magnet is configured with a control coil so that the minute intensity of the magnetic field can be controlled by supplying current.

[0028] Furthermore, the control coil controls the magnetic field strength around 5% of the magnetic field strength.

[0029] Furthermore, the dipole magnet and the quadrupole magnet are configured so that the minute intensity of the magnetic field can be adjusted by controlling a drive motor.

[0030] In addition to these, the undulator emits EUV light.

Advantages of the Invention

[0031] The present invention configured and operated as described above has the advantage that it can preferentially and stably generate a high-output radiation source using only a plurality of linear accelerators.

[0032] In addition, the present invention realizes a magnetic section for controlling the direction of an electron beam using only a permanent magnet while applying a plurality of linear accelerators, and does not use a booster ring, which is a conventional technology to which an electromagnet is applied. Therefore, there is an advantage that a radiation source can be realized while minimizing power consumption.

[0033] Furthermore, the radiation source device according to the present invention is designed to minimize the installation space in order to solve the drawbacks of the radiation source device based on the existing accelerator where space constraints have been regarded as a problem.

Brief Description of the Drawings

[0034] [Figure 1] Overall configuration diagram of the radiation source generation device according to the present invention. [Figure 2] Detailed diagram of the acceleration means in the radiation source generator according to the present invention. [Figure 3] Detailed diagram of the linear accelerator in the synchrotron radiation source generator according to the present invention. [Figure 4] A diagram illustrating the configuration of the magnetic section in the radiation source generation device according to the present invention. [Figure 5] Detailed configuration diagram of the magnetic section in the radiation source generator according to the present invention. [Figure 6] A diagram illustrating the configuration of the storage ring in the radiation source generator according to the present invention. [Figure 7] A diagram showing another embodiment of the magnetic part according to the present invention. [Modes for carrying out the invention]

[0035] The following is a detailed description of the radiation source generating device according to the present invention, based on the attached drawings.

[0036] The synchrotron radiation source generator according to the present invention is a synchrotron radiation source generator that accelerates an electron beam and emits synchrotron radiation, comprising: an electron gun that emits an electron beam; acceleration means arranged in parallel to continuously accelerate the electron beam emitted from the electron gun; a storage ring that stores the electron beam accelerated via the acceleration means; and an undulator that emits synchrotron radiation from the electron beam stored in the storage ring.

[0037] The synchrotron radiation source generator according to the present invention has the main technical feature of accelerating an electron beam by applying multiple linear accelerators, and applying a magnetic section based on permanent magnets to connect the multiple linear accelerators to each other, thereby eliminating the power consumption caused by the use of electromagnets applied to existing synchrotron radiation source generators, and constructing a synchrotron radiation source generator in which the magnetic section can be made up solely of permanent magnets.

[0038] Figure 1 is an overall configuration diagram of the radiation source generation device according to the present invention.

[0039] The synchrotron radiation source generator 10 according to the present invention comprises an electron gun 100 that emits an electron beam, an acceleration means 200 that accelerates the electron beam emitted from the electron gun 100 to generate an electron beam having a desired energy, a storage ring 300 that stores the electron beam accelerated by the acceleration means 200, and an undulator 400 that emits synchrotron radiation from the electron beam stored in the storage ring.

[0040] Preferably, the synchrotron radiation source generator 10 according to the present invention corresponds to a synchrotron radiation source device that generates EUV light, and the EUV light generated therein is preferably applied to semiconductor processes.

[0041] Figure 2 is a detailed diagram of the acceleration means of the synchrotron radiation source generator according to the present invention.

[0042] The acceleration means 200 according to the present invention is broadly composed of a plurality of linear accelerators 210 and a plurality of magnetic units 220 for connecting and transmitting electron beams accelerated in the plurality of linear accelerators 210.

[0043] In other words, the electron beam initially emitted from the electron gun 100 passes through one linear accelerator and is then transmitted to the next linear accelerator via one of the magnetic units 220. The electron beam, having passed through another linear accelerator, is then transmitted to the next linear accelerator via a magnetic unit.

[0044] In this invention, a structure is provided in which multiple linear accelerators are arranged in a parallel configuration, and on both sides of the parallel linear accelerators, there is a structure for transmitting electron beams via multiple magnetic sections 220. Such a structure allows for efficient acceleration of electron beams via multiple linear accelerators within a limited space.

[0045] Figure 3 is a detailed diagram of the linear accelerator of the synchrotron radiation source generator according to the present invention.

[0046] Figure 3 shows in detail a parallel-structured linear accelerator, which corresponds to the main technical essence of the present invention.

[0047] The linear accelerator 210, according to one embodiment of the present invention, has a structure in which, in a plan view, three linear accelerators are arranged in parallel on the lower side and three linear accelerators are arranged in parallel on the upper side.

[0048] Here, specifically, there is a first-first linear accelerator 211 that first receives and accelerates the electron beam emitted from the electron gun, a first-second linear accelerator 212 positioned opposite the first-first linear accelerator 211 and receiving the electron beam, a second-first linear accelerator 213 positioned outward from the first-first linear accelerator 211 and receiving the electron beam from the first-second linear accelerator 212, and outward from the first-second linear accelerator It consists of a second-second linear accelerator 214, which is arranged in a line with the second-first linear accelerator 213 and receives an electron beam from it; a third-first linear accelerator 215, which is arranged outward from the second-first linear accelerator and receives an electron beam from it; and a third-second linear accelerator 216, which is arranged outward from the second-second linear accelerator 214 and receives an electron beam from it.

[0049] At both ends of the multiple linear accelerators 210 arranged in parallel in this manner, the electron beam accelerated by the coupling of the magnetic section is transmitted to the next linear accelerator. The electron beam emitted from the electron gun passes through multiple acceleration means, each consisting of a linear accelerator and a magnetic section, only once to be accelerated before being stored in a storage ring.

[0050] In other words, the acceleration means 200 connects each of the linear accelerators 210 and the magnetic unit 220 in a one-way configuration to supply the electron beam emitted from the electron gun to the storage ring.

[0051] Figure 4 is a diagram showing the configuration of the magnetic section in the synchrotron radiation source generator according to the present invention.

[0052] As described above, the magnetic unit 220 connects the linear accelerators to each other and transmits the electron beam.

[0053] First, there is a first magnetic unit 221 that transmits an electron beam from the electron gun 100 to one side of the first-1 linear accelerator, a second-1-1 magnetic unit 222 that transmits an electron beam emitted from the other side of the first-1 linear accelerator to the other side of the first-2 linear accelerator, a second-2-1 magnetic unit 223 that transmits an electron beam emitted from one side of the first-2 linear accelerator to one side of the second-1 linear accelerator, and an electron beam emitted from the other side of the second-1 linear accelerator to the second-2 linear accelerator It consists of a second-1-2 magnetic unit 224 that transmits to the other side of the linear accelerator, a second-2-2 magnetic unit 225 that transmits the electron beam emitted from one side of the second-2 linear accelerator to one side of the third-1 linear accelerator, a second-1-3 magnetic unit 226 that transmits the electron beam emitted from the other side of the third-1 linear accelerator to the other side of the third-2 linear accelerator, and a third magnetic unit 227 that transmits the electron beam emitted from one side of the third-2 linear accelerator to the storage ring.

[0054] Figure 5 is a detailed diagram of the magnetic section in the synchrotron radiation source generator according to the present invention.

[0055] The present invention constructs a single magnetic section 220 by combining a quadrupole magnet 230 and a dipole magnet 231. A single magnetic section 222, 224, 226 according to the present invention is composed of a combination of a quadrupole magnet and a dipole magnet. Specifically, the single magnetic section is composed of an achromatic bend by combining quadrupole magnets, quadrupole magnets, dipole magnets, quadrupole magnets, dipole magnets, quadrupole magnets, and quadrupole magnets in that order.

[0056] In this invention, depending on the purpose, the magnetic field can be constructed solely from permanent magnets, without using an electromagnet-type magnetic section or a booster ring, thereby minimizing power consumption for the entire synchrotron radiation source generator.

[0057] For each magnetic section, the two dipole magnets 231 each deflect the electron beam trajectory by 90°, while the central quadrupole magnet 230 is configured to correct the horizontal dispersion (η) that may occur due to the difference in the angle at which electrons with different kinetic energies in the electron beam are deflected by the dipole magnets.

[0058]

number

[0059] △x: Beam spread in the horizontal direction, △E: Beam energy spread, η: dispersion (correlation coefficient between beam energy and beam spread)

[0060] The four outer quadrupole magnets are magnets used to adjust the lateral beta function of the electron beam. The beta function describes the size of the beam, and the horizontal beta function...

[0061]

number

[0062] Figure 6 is a diagram showing the configuration of a storage ring in a synchrotron radiation source generator according to the present invention. The storage ring 300 applied to the present invention is where the electron beam emitted from the electron gun is injected after being accelerated through a plurality of linear accelerators and finally emitted, but the storage ring is located at the outermost edge of the overall synchrotron radiation source system. The electron beam accelerated in the accelerator passes through a storage ring accelerating tube 410 and a storage ring injection kicker 420 located in the storage ring and is stored in the storage ring.

[0063] Figure 7 is a configuration diagram showing another embodiment of the magnetic part according to the present invention.

[0064] The magnetic section of the present invention is configured to control the direction of the accelerated electron beam by applying a permanent magnet, but it may also include control coils for precisely controlling the trajectory of the electron beam in order to design the entire synchrotron radiation source device, or for precisely controlling the magnetic field so as to accurately control the phenomenon in which electrons with different kinetic energies in the electron beam are deflected by a dipole magnet.

[0065] In this case, the two-pole magnet 231 configured in the magnetic section is equipped with a control coil 250 so that it can supply current to control the minute strength of the magnetic field, and the control coil 250 controls the magnetic field strength at around 5% of the magnetic field strength.

[0066] In addition, in the present invention, a separate drive motor 260 can be applied to the two-pole magnet and the quadruple magnet to move the position of a part of the yoke of the permanent magnet and finely control the magnetic field strength.

[0067] The present invention, configured in this manner, has the advantage of being able to stably generate high-power synchrotron radiation sources using only a plurality of linear accelerators as a preference.

[0068] Furthermore, this invention has the advantage of minimizing power consumption while realizing a synchrotron radiation source because it uses only permanent magnets to control the direction of the electron beam while applying multiple linear accelerators, and does not use a booster ring, which is a conventional technology that uses electromagnets.

[0069] Furthermore, the synchrotron radiation source device according to the present invention was designed to minimize the installation space required in order to overcome the shortcomings of existing synchrotron radiation source devices based on accelerators, which were plagued by spatial constraints.

[0070] Although the principles of the present invention have been described and illustrated in conjunction with preferred embodiments to illustrate them, the present invention is not limited in any way to the configuration and operation as so illustrated and described. Rather, it should be readily apparent to those skilled in the art that numerous changes and modifications to the present invention are possible without departing from the spirit and scope of the appended claims. Accordingly, all such appropriate changes and modifications and their equivalents should also be considered to fall within the scope of the present invention. [Explanation of Symbols]

[0071] 10: Synchrotron radiation generator 100: Electron gun 200: Acceleration means 210: Linear accelerator 220: Magnetic part 260: Drive motor 300: Storage Ring 400: Undulator

Claims

1. In a synchrotron radiation source generator that accelerates an electron beam to emit synchrotron radiation, An electron gun that emits an electron beam, Acceleration means arranged in parallel to continuously accelerate the electron beam emitted from the electron gun, A storage ring for storing the electron beam accelerated via the aforementioned acceleration means, An undulator that emits synchrotron radiation from an electron beam stored in the aforementioned storage ring, It is equipped with, The acceleration means is When the electron beam emitted from the electron gun passes through multiple acceleration means, the electron beam is accelerated by passing through each acceleration means only once. It further includes a magnetic section to switch and transmit the direction of the electron beam from one linear accelerator to the next. Each of the linear accelerators and the magnetic section is connected in a one-way manner, and the electron beam emitted from the electron gun is supplied to the storage ring. The magnetic part is, A combination of a bipolar magnet and a quadrupole magnet is used to transmit an electron beam that has passed through one linear accelerator to the next linear accelerator. The aforementioned bipolar and quadrupole magnets provide a magnetic field as a permanent magnet. To transmit the electron beam from one linear accelerator to the next, a combination of quadrupoles, quadrupoles, dipole magnets, quadrupoles, dipole magnets, quadrupoles, and quadrupoles is arranged in an achromatic bend. Synchrotron radiation light generator.

2. The acceleration means is The synchrotron radiation source generator according to claim 1, comprising a plurality of linear accelerators arranged vertically in a plan view to accelerate an electron beam.

3. The aforementioned linear accelerator is A first-first linear accelerator that initially receives and accelerates the electron beam emitted from the electron gun, and a first-second linear accelerator positioned opposite the first-first linear accelerator to receive the electron beam, A linear accelerator 2-1 is positioned to be adjacent to the 1-1 linear accelerator and receives an electron beam from the 1-2 linear accelerator, and a linear accelerator 2-2 is positioned to be adjacent to the 1-2 linear accelerator and receives an electron beam from the 2-1 linear accelerator, A linear accelerator 3-1 is positioned to be adjacent to the linear accelerator 2-1 and receives an electron beam from the linear accelerator 2-2, and a linear accelerator 3-2 is positioned to be adjacent to the linear accelerator 2-2 and receives an electron beam from the linear accelerator 3-1, A radiation source generating device according to claim 2, comprising:

4. The magnetic part is, The synchrotron radiation source generator according to claim 3, comprising: a first magnetic unit that prioritizes transmitting the electron beam emitted from the electron gun to a linear accelerator; a plurality of second magnetic units that transmit the electron beam from one linear accelerator to the next; and a third magnetic unit that emits the electron beam from the final linear accelerator to a storage ring.

5. The magnetic part is, A first magnetic unit that transmits an electron beam from the electron gun to one side of the first-1 linear accelerator, A magnetic section 2-1-1 transmits an electron beam emitted from the other side of the linear accelerator 1-1 to the other side of the linear accelerator 1-2, A magnetic section 2-2-1 transmits an electron beam emitted from one side of the linear accelerator 1-2 to one side of the linear accelerator 2-1, A magnetic section 2-1-2 transmits an electron beam emitted from the other side of the linear accelerator 2-1 to the other side of the linear accelerator 2-2, A magnetic section 2-2-2 transmits an electron beam emitted from one side of the linear accelerator 2-2 to one side of the linear accelerator 3-1, A magnetic section 2-1-3 transmits the electron beam emitted from the other side of the linear accelerator 3-1 to the other side of the linear accelerator 3-2, A third magnetic unit that transmits the electron beam emitted from one side of the linear accelerator 3-2 to the storage ring, A radiation source generating device according to claim 4, comprising the following:

6. The acceleration means is The radiation source generating device according to claim 1 or 2, configured to be located inside the storage ring.

7. The acceleration means is The synchrotron radiation source generator according to claim 2, wherein multiple linear accelerators are arranged in a stacked structure in a plan view.

8. The aforementioned two-pole magnet and four-pole magnet are, The radiation source generator according to claim 1, wherein a control coil is configured to control minute magnetic field strength by supplying electric current.

9. The control coil is The synchrotron radiation source generator according to claim 8, wherein the magnetic field strength is controlled at approximately 5% of the magnetic field strength.

10. The aforementioned two-pole magnet and four-pole magnet are, The radiation source generating device according to claim 1, configured to allow adjustment of minute magnetic field strength by controlling a drive motor.

11. The aforementioned undulator is, A radiation source generating device according to claim 1, which emits extreme ultraviolet (EUV) light.

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