Washing device

Abstract

To provide a cleaning device capable of suppressing fog from adhering to the ceiling of a cleaning room without providing an additional component below a chuck table.SOLUTION: A downflow is generated in a space (first space) located around a chuck table by operating a suction source that communicates with a cleaning chamber via a communication member having a tip portion that opens downward at the same position as or below the holding surface of the chuck table. Thereby, it is possible to suppress adhesion of fog to the ceiling of the cleaning chamber without providing additional components below the chuck table.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a cleaning device for cleaning a workpiece.

Background Art

[0002] Chips of devices such as ICs (Integrated Circuits) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, in the following order.

[0003] First, a plurality of devices are formed by performing photolithography or the like to form a large number of elements on the surface of a workpiece such as a wafer. Next, the back side of the workpiece is ground to thin the workpiece. Next, the workpiece is cut along the boundaries of the plurality of devices to divide the workpiece into a plurality of chips.

[0004] Also, before and after these processes, the workpiece is often cleaned to remove processing debris or the like adhering to the workpiece. This cleaning is generally performed in a cleaning device including a chuck table capable of holding a workpiece placed on a holding surface and a cleaning unit having a cleaning nozzle that injects a cleaning liquid (for example, water or the like) toward the workpiece held by the chuck table.

[0005] The chuck table is rotatable about a straight line passing through the center of the holding surface as a rotation axis. In this cleaning device, the workpiece is cleaned by injecting the cleaning liquid from the cleaning nozzle toward the workpiece while the chuck table holding the workpiece on the holding surface is rotating.

[0006] Furthermore, when a workpiece is cleaned in this manner, mist containing processing debris often spreads around the chuck table. For this reason, cleaning devices are generally provided with a cleaning chamber cover that defines the cleaning chamber where the chuck table and cleaning nozzles are located (see, for example, Patent Document 1). In this cleaning device, cleaning the workpiece within the cleaning chamber prevents the mist from spreading outside the cleaning chamber.

[0007] However, when workpieces are cleaned in the washing chamber, mist may accumulate on the ceiling (the top of the washing chamber cover). If a large amount of mist accumulates on the ceiling, large water droplets may form, and these droplets may drip onto the workpiece held on the chuck table. In this case, there is a risk that processing debris may re-adhere to the workpiece.

[0008] In light of this, a cleaning device has been proposed that can generate a downflow into the cleaning chamber in order to suppress the adhesion of mist to the ceiling of the cleaning chamber (see, for example, Patent Document 2). Specifically, in this cleaning device, a downflow generating member having multiple blades is provided on the underside of the chuck table, and a downflow is generated into the cleaning chamber by rotating this downflow generating member. [Prior art documents] [Patent Documents]

[0009] [Patent Document 1] Japanese Patent Publication No. 2009-260094 [Patent Document 2] Japanese Patent Publication No. 2012-94659 [Overview of the Initiative] [Problems that the invention aims to solve]

[0010] However, the underside of the chuck table is generally equipped with a rotation mechanism for rotating the chuck table (e.g., a motor) and a mechanism for disposing of the cleaning fluid (e.g., a drain pipe). Therefore, it is not easy to secure space on the underside of the chuck table for additional components such as downflow generating members.

[0011] In view of this, an object of the present invention is to provide a cleaning device that can suppress the adhesion of mist to the ceiling of the cleaning chamber without providing additional components on the underside of the chuck table. [Means for solving the problem]

[0012] According to the present invention, a cleaning apparatus for cleaning a workpiece comprises: a chuck table that holds the workpiece placed on a holding surface and is rotatable about a straight line passing through the center of the holding surface as an axis of rotation; a cleaning unit having a cleaning nozzle that sprays cleaning fluid toward the workpiece while the chuck table holding the workpiece on the holding surface is rotating; a cleaning chamber cover that defines a cleaning chamber in which the chuck table and the cleaning nozzle are located; and a suction unit that sucks the fluid in the cleaning chamber, wherein the cleaning chamber is located around the chuck table. A cleaning device is provided that includes a first space and a second space located outside the first space and below the holding surface, wherein the suction unit has a suction source and a communicating member that connects the suction source and the cleaning chamber, the communicating member having a base end connected to the suction source and a tip end that opens downward at a position outside the first space and at the same position as or below the holding surface, and when the suction source communicating with the cleaning chamber via the communicating member operates, a downflow occurs in the first space and an upflow occurs in the second space.

[0013] Furthermore, in the present invention, it is preferable that a ring-shaped dividing plate is provided so as to surround the chuck table, and that the dividing plate includes a main body portion having a plurality of through holes and a plurality of adjustment portions, each capable of covering at least one of the plurality of through holes.

[0014] Alternatively, in the present invention, a ring-shaped dividing plate is provided so as to surround the chuck table, and a plurality of through holes are formed in the dividing plate, and it is preferable that the plurality of through holes include a first through hole and a second through hole that is closer to the communicating member than the first through hole and has a smaller cross-section than the first through hole. [Effects of the Invention]

[0015] In this invention, a suction source communicating with the cleaning chamber is operated via a communicating member having a downward-opening tip at the same position as or below the holding surface of the chuck table, thereby creating a downflow in the space surrounding the chuck table (first space). As a result, in this invention, it is possible to suppress the adhesion of mist to the ceiling of the cleaning chamber without providing additional components below the chuck table. [Brief explanation of the drawing]

[0016] [Figure 1] Figure 1 is a schematic, partially broken perspective view showing an example of a cleaning device. [Figure 2] Figure 2 is a schematic partial cross-sectional side view showing an example of a cleaning apparatus. [Figure 3] Figure 3 is a schematic partial cross-sectional side view showing another example of a cleaning device. [Figure 4] Figure 4 is an exploded perspective view schematically showing the dividing plate provided in the cleaning device. [Figure 5] Figures 5(A), 5(B), and 5(C) are schematic top views showing the relative positions of the main body and the adjustment unit. [Figure 6] Figure 6 is a schematic perspective view showing another example of a divided plate. [Modes for carrying out the invention]

[0017] Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a partially broken perspective view schematically showing an example of a cleaning device, and FIG. 2 is a partially sectional side view schematically showing an example of the cleaning device. The cleaning device 2 shown in FIGS. 1 and 2 cleans a workpiece 13 included in a frame unit 11, for example. [[ID=...]]

[0018] This workpiece 13 has a circular front surface 13a and a back surface 13b, and is, for example, a wafer made of a semiconductor material such as silicon (Si). Further, the workpiece 13 is partitioned into a plurality of regions by a plurality of division planned lines 15 set in a grid pattern, and devices 17 such as ICs are formed in each region.

[0019] Furthermore, the back surface 13b of the workpiece 13 is attached to the central region of a disk-shaped tape 19 whose diameter is longer than the diameter of the workpiece 13. This tape 19 has, for example, a flexible film-like base material layer and an adhesive layer (paste layer) provided on one surface of the base material layer (the surface on the side of the workpiece 13).

[0020] Specifically, this base material layer is made of polyolefin (PO), polypropylene (PP), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), or the like. Also, this adhesive layer is made of an ultraviolet curable silicone rubber, an acrylic-based material, an epoxy-based material, or the like.

[0021] Also, an annular frame 21 in which a circular opening 21a having a diameter larger than that of the workpiece 13 is formed is attached to the outer peripheral region of the tape 19. This frame 21 is made of a metal material such as aluminum or stainless steel, for example.

[0022] When cleaning the workpiece 13 in the cleaning device 2, the workpiece 13 is placed on the chuck table 4 via the tape​​​In other words, in the chuck table 4, the upper surface of the porous plate 4a serves as a holding surface for the workpiece 13 via the tape 19. A cleaning unit 6 and a drying unit 8 are provided around the chuck table 4. Each of the cleaning unit 6 and the drying unit 8 has support shafts 6a and 8a, respectively.

[0024] Each support shaft 6a, 8a is a pipe-shaped member extending vertically. A rotational drive source (not shown), such as a motor, for rotating the support shafts 6a, 8a is connected to the lower end of each support shaft 6a, 8a. The base ends of arms 6b, 8b are connected to the upper ends of each support shaft 6a, 8a.

[0025] Each arm 6b, 8b is a pipe-shaped member that extends in a direction perpendicular to the vertical, with a length corresponding to the distance from the upper ends of the support shafts 6a, 8a to the center of the chuck table 4 in a plan view. Each arm 6b, 8b is provided with downward-facing nozzles 6c, 8c at its tip.

[0026] The nozzle (cleaning nozzle) 6c is connected to a cleaning fluid supply source (not shown) that supplies a cleaning fluid such as pure water via the arm 6b and support shaft 6a, etc. The nozzle (drying nozzle) 8c is connected to a gas supply source (not shown) that supplies a gas such as air, oxygen, nitrogen, or argon via the arm 8b and support shaft 8a, etc.

[0027] In the cleaning device 2, the workpiece 13 is cleaned in a space (cleaning chamber) where the chuck table 4 and nozzles 6c and 8c are located. This cleaning chamber is defined by a cleaning chamber cover 10. The cleaning chamber cover 10 has a lower part 12 provided around the chuck table 4 and nozzles 6c and 8c, and an upper part 14 connected to the lower part 12 in a separable manner.

[0028] The lower part 12 of the washing chamber cover 10 has a cylindrical outer peripheral wall 12a, an annular bottom wall 12b extending radially inward from the lower end of the outer peripheral wall 12a, and a cylindrical inner peripheral wall 12c erected from the inner end of the bottom wall 12b. The support shaft 6a of the washing unit 6 and the support shaft 8a of the drying unit 8 are each provided to pass through this bottom wall 12b.

[0029] The upper part 14 of the washing chamber cover 10 has a disc-shaped top wall 14a whose diameter is approximately equal to the outer diameter of the bottom wall 12b, and cylindrical side walls 14b that are suspended from the outer circumference of the top wall 14a. The top wall 14a and / or side walls 14b may also have through holes to allow gas to flow into the washing chamber.

[0030] Furthermore, a suction unit 16 for sucking fluid from inside the cleaning chamber is connected to the outer peripheral wall 12a of the lower part 12. Specifically, the suction unit 16 has a communicating member 16a that penetrates the outer peripheral wall 12a so that its tip is located inside the cleaning chamber.

[0031] This connecting member 16a is a pipe-shaped member, and its tip is positioned outside the chuck table 4. Furthermore, the tip of the connecting member 16a opens downward at the same position as or below the holding surface of the chuck table 4.

[0032] Furthermore, the base end of the connecting member 16a is connected to a suction source (not shown), such as a vacuum pump. When this suction source operates, the fluid present in the space below the tip of the connecting member 16a (the second space) is drawn in through the connecting member 16a.

[0033] Furthermore, when the fluid present in the second space is drawn in, the fluid in the space outside the chuck table 4 (the first space) flows downward and into the second space. In other words, in this case, a downflow occurs in the first space and an upflow occurs in the second space.

[0034] Furthermore, a drain port 18 is formed in the bottom wall 12b, and a drain pipe (not shown) extending downward is connected to this drain port 18. In addition, multiple (for example, two) support legs 20 are fixed to the lower surface of the bottom wall 12b. The multiple support legs 20 are provided along the circumferential direction of the bottom wall 12b at intervals of approximately equal angles and support the lower part 12 of the washing chamber cover 10.

[0035] Furthermore, a spindle 22 is passed vertically through a cylindrical space located inside the inner circumferential wall 12c. The upper end of this spindle 22 is connected to the chuck table 4 so as to support the chuck table 4. A rotational drive source, such as a motor, is connected to the lower end of the spindle 22, and this rotational drive source is housed in the housing 24.

[0036] When this rotational drive source is activated, the spindle 22 and the chuck table 4 rotate around a straight line passing through the center of the holding surface of the chuck table 4 and aligned vertically as the axis of rotation. The housing 24 is supported by a support mechanism 26 in a manner that allows it to be raised and lowered.

[0037] This support mechanism 26 has, for example, a plurality (e.g., three) of air cylinders 28 attached to the housing 24, with support legs 30 connected to the lower part of each air cylinder 28. When the plurality of air cylinders 28 are operated simultaneously, the housing 24, spindle 22, and chuck table 4 move up and down.

[0038] For example, when loading the frame unit 11 onto or unloading it from the chuck table 4, the support mechanism 26 is operated to position the chuck table 4 at a higher position (loading / unloading position). Also, when cleaning the workpiece 13 contained in the frame unit 11, the support mechanism 26 is operated to position the chuck table 4 at a lower position (cleaning position).

[0039] Figure 1 schematically shows the cleaning device 2 with the chuck table 4 in the loading / unloading position. Figure 2 schematically shows the cleaning device 2 with the chuck table 4 in the cleaning position.

[0040] Furthermore, a case 32 is provided around the spindle 22. This case 32 has a cylindrical shape with an outer diameter smaller than the inner diameter of the inner circumferential wall 12c, and is fixed to the housing 24 via a connecting member (not shown). A bearing 34 is also provided on the inner circumferential surface of the upper part of the case 32.

[0041] The bearing 34 has an inner ring that contacts the spindle 22, supporting the spindle 22 so that it can rotate. The case 32 is provided with three through holes that pass through the case 32 radially, arranged vertically. A pipe-shaped open tube 36 is connected to the through hole closest to the bearing 34.

[0042] This open pipe 36 connects the annular space (open section) A between the case 32 and the spindle 22 to the space outside the case 32. However, the open pipe 36 is not required. That is, the open section A may communicate with the space outside the case 32 via a through-hole that penetrates the case 32.

[0043] The remaining two through-holes are connected to pipe-shaped negative pressure supply pipes 38 and positive pressure supply pipes 40, respectively. The negative pressure supply pipe 38 connects the annular space (pressure variable section) B, located between the case 32 and the spindle 22 and further from the bearing 34 than the open section A, to a negative pressure supply source including an ejector, etc. The positive pressure supply pipe 40 connects the pressure variable section B to a positive pressure supply source including an air cylinder, etc.

[0044] Furthermore, annular oil seals 42a and 42b are provided at the boundary between the open section A and the pressure variable section B, and at the boundary between the external space below the pressure variable section B and the pressure variable section B, respectively. The pressure variable section B can also communicate with a negative or positive pressure supply pipe 22a formed inside the spindle 22. The negative or positive pressure supply pipe 22a communicates with the space on the holding surface of the chuck table 4 via a flow path (not shown) formed inside the chuck table 4.

[0045] Furthermore, a cover member 44 is fixed to the upper end of the case 32. This cover member 44 has an annular top wall 44a and a cylindrical side wall 44b extending downward from the outer end of the top wall 44a. The inner diameter of the top wall 44a is larger than the inner diameter of the bearing 34. Also, the outer diameter of the top wall 44a and the inner diameter of the side wall 44b are larger than the outer diameter of the inner circumferential wall 12c.

[0046] The upper end of the spindle 22, which protrudes from the case 32, is inserted into the inside of the top wall 44a. In other words, the cover member 44 has a through hole into which the upper end of the spindle 22 is inserted. An oil seal 46 is also provided between the cover member 44 and the upper end of the spindle 22 to block communication between the space between the case 32 and the spindle 22 (for example, the open section A and the pressure variable section B) and the cleaning chamber.

[0047] The cleaning of the workpiece 13 in the cleaning device 2 is performed, for example, in the following order. First, with the upper part 14 of the cleaning chamber cover 10 separated from the lower part 12 and the chuck table 4 positioned in the loading / unloading position, the frame unit 11 is loaded into the cleaning device 2 so that the workpiece 13 is placed on the chuck table 4 via the tape 19.

[0048] Next, the negative pressure supply source, which is in communication with the pressure variable unit B and the negative or positive pressure supply pipe 22a, is activated. As a result, the workpiece 13 is held by the chuck table 4 through suction. Next, the air cylinder 28 is activated to move the chuck table 4 to the cleaning position. Then, the upper part 14 is connected to the lower part 12 so that the cleaning chamber is defined by the cleaning chamber cover 10.

[0049] Next, the rotary drive source connected to the support shaft 6a of the cleaning unit 6 is operated to position the nozzle 6c above the workpiece 13. Then, the suction source communicating with the cleaning chamber via the communicating member 16a is operated.

[0050] As a result, a downflow occurs in the first space located around the chuck table 4 of the washing chamber, and an upflow occurs in the second space located outside the first space and below the holding surface of the chuck table 4.

[0051] Next, while the suction source is operating, the rotary drive source housed in the housing 24 is operated to rotate the chuck table 4, and the cleaning fluid supply source, which communicates with the nozzle 6c via the support shaft 6a and arm 6b, is operated to spray cleaning fluid toward the surface 13a of the workpiece 13.

[0052] At this time, if necessary, the rotary drive source connected to the support shaft 6a may be operated so that the nozzle 6c rotates above the workpiece 13. This cleans the surface 13a of the workpiece 13.

[0053] Furthermore, during this cleaning process, mist containing processing debris may spread into the first space located around the chuck table 4. However, a downflow occurs in this first space. Therefore, the adhesion of mist to the ceiling of the cleaning chamber (specifically, the lower surface of the top wall 14a of the upper part 14 of the cleaning chamber cover 10) is suppressed.

[0054] Next, while the suction source is still operating, the rotary drive source connected to the support shaft 6a of the cleaning unit 6 is operated to retract the nozzle 6c from above the workpiece 13, and the rotary drive source connected to the support shaft 8a of the drying unit 8 is operated to position the nozzle 8c above the workpiece 13.

[0055] Next, while the suction source is operating, the rotary drive source housed in the housing 24 is operated to rotate the chuck table 4, and the gas supply source, which communicates with the nozzle 8c via the support shaft 8a and arm 8b, is operated to inject gas toward the surface 13a of the workpiece 13.

[0056] At this time, if necessary, the rotary drive source connected to the support shaft 8a may be operated so that the nozzle 8c rotates above the workpiece 13. This removes the cleaning solution adhering to the surface 13a of the workpiece 13 and dries the surface 13a.

[0057] Furthermore, during this drying process, mist containing processing debris may spread into the first space located around the chuck table 4. However, a downflow occurs in this first space. Therefore, the adhesion of mist to the ceiling of the washing chamber (specifically, the lower surface of the top wall 14a of the upper part 14 of the washing chamber cover 10) is suppressed.

[0058] Next, the rotary drive source connected to the support shaft 8a of the drying unit 8 is operated to retract the nozzle 8c from above the workpiece 13. Then, the upper part 14 of the washing chamber cover 10 is separated from the lower part 12 to open the washing chamber. Next, the air cylinder 28 is operated to move the chuck table 4 to the loading / unloading position.

[0059] Next, the operation of the negative pressure supply source communicating with the pressure variable unit B and the negative or positive pressure supply pipe 22a is stopped, and the positive pressure supply source communicating with them is started. This stops the suction of the workpiece 13 by the chuck table 4. Next, the frame unit 11 is removed from the chuck table 42. With this, the cleaning of the workpiece 13 is completed.

[0060] In the cleaning device 2, a suction source communicating with the cleaning chamber is operated via a communicating member 16a having a downward-opening tip at the same position as or below the holding surface, thereby creating a downflow in the first space located around the chuck table 4. As a result, the cleaning device 2 can suppress the adhesion of mist to the ceiling of the cleaning chamber without providing additional components below the chuck table 4.

[0061] It should be noted that the above description represents only one aspect of the present invention, and the present invention is not limited to the above description. For example, in the cleaning apparatus of the present invention, a dividing plate that divides the cleaning chamber may be provided in the cleaning chamber. Figure 3 is a schematic partial cross-sectional side view showing an example of a cleaning apparatus in which such a dividing plate is provided in the cleaning chamber.

[0062] In the cleaning apparatus 48 shown in Figure 3, a ring-shaped dividing plate 50 is provided so as to surround the chuck table 4. Figure 4 is a schematic exploded perspective view showing the dividing plate 50 provided in the cleaning apparatus 48. This dividing plate 50 has a ring-shaped main body portion 52 whose outer circumference is fixed to the outer peripheral wall 12a of the lower part 12 of the cleaning chamber cover 10.

[0063] The main body 52 is made of a metal material such as aluminum or stainless steel, and has an upper and lower surface that are parallel to each other. The main body 52 also has a notch 52a that fits into the tip of the communicating member 16a of the suction unit 16, and two through holes 52b through which the support shaft 6a of the cleaning unit 6 or the support shaft 8a of the drying unit 8 passes.

[0064] Furthermore, the main body portion 52 has a plurality of through holes 52c formed therein, each extending along the radial direction of the main body portion 52 and having a substantially equal cross-sectional shape. In addition, the upper surface of the main body portion 52 has a plurality of screw holes 52d formed along the circumferential direction of the main body portion 52 at substantially equal angular intervals.

[0065] A bolt 54 is screwed into each screw hole 52d. The bolt 54 has a cylindrical shaft portion that extends vertically and a hexagonal prism-shaped head portion that is larger in diameter than the shaft portion and shorter in length along the vertical direction. Furthermore, the shaft portion has a lower part (threaded portion) in which threads are formed and an upper part (cylindrical portion) in which no threads are formed. The threaded portion of the bolt 54 is screwed into the screw holes 52d formed on the upper surface of the main body portion 52.

[0066] Furthermore, an arc-shaped adjustment portion 56 is provided between the main body portion 52 and the heads of each of the multiple bolts 54. Specifically, a through hole 56a extending along the circumferential direction of the main body portion 52 is formed at the end of this adjustment portion 56, and the cylindrical portion of the bolt 54 is passed through this through hole 56a.

[0067] The adjustment section 56 is made of a metal material such as aluminum or stainless steel and has an upper surface and a lower surface that are parallel to each other. The adjustment section 56 has a radial width that is approximately equal to that of the main body 52, and its curvature is also approximately equal to that of the main body 52. ​​The adjustment section 56 also has a plurality of through holes 56b, each extending along the radial direction of the main body 52, and the shape of its cross-section is approximately equal to that of the through holes 52c formed in the main body 52.

[0068] Furthermore, the through hole 56a formed at the end of the adjustment part 56 is such that the radial width of the main body 52 is smaller than the width of the bolt 54 head. Also, the bolt 54 head and the adjustment part 56 are spaced apart. Therefore, the adjustment part 56 can slide along the circumferential direction of the main body 52 within the range where the cylindrical portion of the bolt 54 is located through hole 56a.

[0069] Figures 5(A), 5(B), and 5(C) are schematic top views showing the relative positions of the main body 52 and the adjustment part 56. Specifically, Figure 5(A) shows the state in which the cylindrical part of the bolt 54 is positioned at one end of the through hole 56a, Figure 5(B) shows the state in which the cylindrical part of the bolt 54 is positioned in the center of the through hole 56a, and Figure 5(C) shows the state in which the cylindrical part of the bolt 54 is positioned at the other end of the through hole 56a.

[0070] Then, when the adjustment part 56 is slid so that the cylindrical portion of the bolt 54 is positioned at one end of the through hole 56a (see Figure 5(A)), the through hole 52c formed in the main body 52 and the through hole 56b formed in the adjustment part 56 roughly overlap. Therefore, in this case, communication between the upper and lower parts of the cleaning chamber, which are divided by the dividing plate 50, is made smooth.

[0071] Furthermore, when the adjustment part 56 is slid so that the cylindrical portion of the bolt 54 is positioned in the center of the through hole 56a (see Figure 5(B)), the through hole 52c formed in the main body 52 and the through hole 56b formed in the adjustment part 56 partially overlap, that is, a part of the through hole 52c is partially covered by the adjustment part 56. Therefore, in this case, although communication between the upper and lower parts of the cleaning chamber, which are divided by the dividing plate 50, is possible, it is hindered.

[0072] Furthermore, when the adjustment part 56 is slid so that the cylindrical portion of the bolt 54 is positioned at the other end of the through hole 56a (see Figure 5(C)), the through hole 52c formed in the main body 52 and the through hole 56b formed in the adjustment part 56 hardly overlap, that is, almost the entire through hole 52c is covered by the adjustment part 56. Therefore, in this case, communication between the upper and lower parts of the cleaning chamber, which are divided by the dividing plate 50, becomes impossible or difficult.

[0073] In the cleaning device 48, for example, each of the multiple adjustment parts 56 is slid so that communication between the upper and lower parts of the cleaning chamber becomes more difficult as it approaches the communicating member 16a of the suction unit 16, that is, so that the proportion of the through-hole 52c covered by the adjustment part 56 increases. This makes it possible to generate a uniform downflow in the first space located around the chuck table 4 of the cleaning chamber, regardless of the distance from the communicating member 16a.

[0074] Furthermore, in the cleaning apparatus of the present invention, a dividing plate without an adjustment section may be provided in the cleaning chamber. Figure 6 is a schematic perspective view showing an example of such a dividing plate. The dividing plate 58 shown in Figure 6 has a ring shape, and for example, its outer periphery is fixed to the outer peripheral wall 12a of the lower part 12 of the cleaning chamber cover 10 so as to surround the chuck table 4.

[0075] Furthermore, the divided plate 58 is made of a metal material such as aluminum or stainless steel, and has an upper surface and a lower surface that are parallel to each other. The divided plate 58 also has a notch 58a that fits into the tip of the communicating member 16a of the suction unit 16, and two through holes 58b through which the support shaft 6a of the washing unit 6 or the support shaft 8a of the drying unit 8 passes.

[0076] Furthermore, the divided plate 58 has multiple through holes 58c formed along its circumferential direction at approximately equal angular intervals, except near the notch 58a. The width of the through holes 58c in the radial direction of the divided plate 58 decreases, for example, as it approaches the notch 58a.

[0077] In other words, the multiple through holes 58c include through holes (first through holes) formed at a position relatively far from the communication member 16a, and through holes (second through holes) that are closer to the communication member 16a than the first through holes and have a smaller cross-section than the first through holes. This makes it possible to generate a uniform downflow in the first space located around the chuck table 4 of the washing chamber, regardless of the distance from the communication member 16a.

[0078] Furthermore, the structures and methods of the embodiments described above can be modified as appropriate without departing from the scope of the present invention. [Explanation of Symbols]

[0079] 2: Cleaning device 4: Chuck table (4a: Porous plate) 6: Cleaning unit (6a: support shaft, 6b: arm, 6c: nozzle (cleaning nozzle)) 8: Drying unit (8a: support shaft, 8b: arm, 8c: nozzle (drying nozzle)) 10: Washing room cover 11: Frame Unit 12: Lower part (12a: outer wall, 12b: bottom wall, 12c: inner wall) 13: Workpiece (13a: front side, 13b: back side) 14: Upper section (14a: Top wall, 14b: Side walls) 15: Planned division line 16: Suction unit (16a: Connecting member) 17: Device 18: Drain port 19: Tape 20: Support leg 21: Frame (21a: Opening) 22: Spindle 24: Housing 26:Support mechanism 28: Air Cylinder 30: Support leg 32: Case 34: Bearings 36:Open pipe 38: Negative pressure supply pipe 40: Positive pressure supply pipe 42a, 42b: Oil seals 44: Cover component 46: Oil seal 48: Washing equipment 50: Split plate 52: Main body (52a: Notch, 52b, 52c: Through hole, 52d: Screw hole) 54: Bolt 56: Adjustment part (56a, 56b: Through hole) 58: Divided plate (58a: Notch, 58b, 58c: Through hole)

Claims

1. A cleaning device for cleaning a workpiece, A chuck table that holds the workpiece placed on the holding surface and is rotatable around a straight line passing through the center of the holding surface as the axis of rotation, A cleaning unit having a cleaning nozzle that sprays cleaning fluid toward the workpiece while the chuck table, which holds the workpiece on the holding surface, is rotating, A cleaning chamber cover that defines the cleaning chamber where the chuck table and the cleaning nozzle are located, The system includes a suction unit for sucking up the fluid inside the cleaning chamber, The cleaning chamber includes a first space located around the chuck table and a second space located outside the first space and below the holding surface. The suction unit comprises a suction source and a connecting member that connects the suction source and the cleaning chamber. The connecting member has a base end connected to the suction source and a tip end that opens downward at a position outside the first space and at the same position as or below the holding surface, A cleaning device in which, when the suction source communicating with the cleaning chamber via the connecting member is operated, a downflow occurs in the first space and an upflow occurs in the second space.

2. A ring-shaped dividing plate is provided to surround the chuck table. The divided plate is, The main body has multiple through holes, The cleaning apparatus according to claim 1, comprising a plurality of adjustment parts, each capable of covering at least one of the plurality of through holes.

3. A ring-shaped dividing plate is provided to surround the chuck table. Multiple through holes are formed in the divided plate. The cleaning apparatus according to claim 1, wherein the plurality of through holes include a first through hole and a second through hole that is closer to the communicating member than the first through hole and has a smaller cross-section than the first through hole.

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