quantum computer

Abstract

To provide a technique that can suppress rise of temperatures due to power consumptions in a quantum semiconductor and in a control wire.SOLUTION: A quantum calculation device includes: a first freezing tube for cooling a metal body; a freezing machine housing for storing a metal body and the freezing tube in the inside; a quantum bit array chip having a plurality of silicon-type quantum bits; and a plurality of control wires for driving the quantum bit array chip. The quantum bit array chip is arranged in the metal body and is formed independently from a plurality of regions which perform a quantum operation. The control wires are connected to the regions as a plurality of control wire groups. The control wires are arranged across the first freezing tube.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a quantum computer, and more particularly to a method for mounting a quantum semiconductor chip provided in a quantum computer in a dilution refrigerator housing.

Background Art

[0002] There is great interest in constructing a quantum computer that can be executed in a high-speed and cost-effective manner. A quantum computer uses superconducting logic-based devices and is typically cooled to an extremely low temperature to function in a superconducting state. Japanese Patent Application Publication No. 2021-523572 discloses a system including at least two sets of superconducting logic devices, a cooling device adapted to cool the logic devices to a first operating temperature, and an interconnect for coupling the superconducting logic devices.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Conventionally, quantum semiconductors have demonstrated quantum operations at the 1-100 qubit level in an absolute zero atmosphere realized using a dilution refrigerator or the like. However, in a system with a medium number of qubits, it is not sufficient as a computer resource for analyzing complex phenomena. On the other hand, when attempting to secure sufficient computer resources by increasing the number of qubits to a larger capacity, there is a problem that the temperature of the absolute zero atmosphere, which is a necessary condition for quantum operations, rises due to an increase in the consumption current of the semiconductor chip and its control wiring associated with the quantum operation of the quantum semiconductor.

[0005] Japanese Patent Publication No. 2021-523572 describes a cryostat that maintains the operating temperature by enclosing a superconducting logic device, but it does not disclose a method for cooling the superconducting logic device inside the cryostat.

[0006] The object of the present invention is to provide a technology that can suppress the temperature rise caused by current consumption in quantum semiconductors and control wiring. [Means for solving the problem]

[0007] Specifically, the following methods are used to suppress the temperature rise of the quantum semiconductor qubit array chip and control wiring.

[0008] A quantum computer according to one aspect of the present disclosure comprises a first refrigeration tube for cooling a metal body, a refrigerator housing that houses the metal body and the refrigeration tube, a qubit array chip having a plurality of silicon-type qubits, and a plurality of control wirings for driving the qubit array chip. The qubit array chip is arranged on the metal body and consists of a plurality of independently quantum-operating regions, and the plurality of control wirings are connected to each of the plurality of regions as a plurality of control wiring groups. The plurality of control wirings are installed on either side of the first refrigeration tube. The quantum computer further includes a first metal plate, which is housed in the refrigerator housing and, in plan view, is disk-shaped, and a substrate on which the qubit array chip is mounted. The first refrigeration tube is located in the center of the first metal plate in top view, and the plurality of control wirings include a plurality of first control wirings and a plurality of second control wirings. The plurality of first control wirings and the plurality of second control wirings are located on the first metal plate in top view, facing each other with the first refrigeration tube in between. The metal body includes a first cooling plate thermally connected to the first metal plate, a second cooling plate electrically and thermally connected to the back surface of the qubit array chip and the substrate via a plurality of through holes, and a plurality of metal pins having a spring structure provided between the first cooling plate and the second cooling plate. [Effects of the Invention]

[0009] By operating large-capacity quantum semiconductors at quantum speeds, it is possible to maintain temperatures very close to absolute zero, thereby providing quantum computers with high quantum fidelity. [Brief explanation of the drawing]

[0010] [Figure 1] This diagram shows the wiring layout inside a dilution refrigerator according to an example. [Figure 2] This figure shows the spatial arrangement of wiring on the cooling plate inside the dilution refrigerator according to the embodiment. [Figure 3] This is a plan view of the substrate mounting of a quantum semiconductor according to the embodiment. [Figure 4]This is a cross-sectional view of a quantum semiconductor substrate mounting according to an embodiment. [Figure 5A] This figure shows the layout of the quantum semiconductor according to the embodiment. [Figure 5B] Figure 5A is an enlarged view of the array region AR. [Figure 6] This figure shows the layout of the cooling wiring within the quantum semiconductor chip according to the embodiment. [Figure 7] This is a cross-sectional view of a quantum semiconductor chip according to an embodiment. [Figure 8] This figure shows the driving sequence of a quantum semiconductor chip according to an embodiment. [Modes for carrying out the invention]

[0011] In the following embodiments, the description will be divided into multiple sections or embodiments where necessary for convenience. Unless otherwise specified, these are not unrelated, and one may be a modification, detail, or supplementary explanation of part or all of the other. Furthermore, in the following embodiments, when referring to the number of elements (including number, numerical value, quantity, range, etc.), unless otherwise specified or clearly limited to a specific number in principle, it is not limited to that specific number and may be greater than or less than the number of characteristics.

[0012] Furthermore, in the following embodiments, it goes without saying that the constituent elements (including element steps, etc.) are not necessarily essential unless specifically stated or considered to be clearly essential in principle. Similarly, in the following embodiments, when referring to the shape, positional relationship, etc., of constituent elements, etc., it shall include those that substantially approximate or resemble such shapes, etc., unless specifically stated or considered to be not in principle. The same applies to the numerical values ​​and ranges mentioned above. [Examples]

[0013] The quantum semiconductor and its mounting method in this embodiment will be described with reference to FIGS. 1 to 8. FIG. 1 is a diagram showing the layout wiring inside a dilution refrigerator according to an embodiment. FIG. 1 shows the layout wiring inside the dilution refrigerator 10 for mounting the quantum semiconductor QBA of this embodiment and the quantum semiconductor QBA.

[0014] The quantum computer QCAL is composed of a quantum semiconductor QBA provided inside the dilution refrigerator 10. The quantum semiconductor QBA can be described as a silicon quantum bit chip or a qubit array chip having a plurality of silicon-based qubits (elements qbit that perform quantum operations).

[0015] The dilution refrigerator 10 is separated by a housing Frame and a room temperature plate RT-PL in order to separate the external atmospheric atmosphere of the dilution refrigerator 10 and the internal vacuum atmosphere of the dilution refrigerator 10. The degree of vacuum inside the housing Frame of the dilution refrigerator 10 is controlled by discharging air through a vacuum tube VC using a pump device installed outside the refrigerator 10. Also, the temperature control inside the dilution refrigerator 10 is realized by circulating diluted liquid helium through the pulse tube PulseTube shown in FIG. 1. FIG. 1 shows an example of connecting two pulse tubes PulseTube. Diluted liquid helium is a mixture obtained by liquefying two isotopes of helium, 3 He and 4 He respectively, and pouring the 3 He phase into the 4 He phase for dilution.

[0016] In the example of the dilution refrigerator 10 in FIG. 1, a plurality of metal (mainly oxygen-free copper) plates (50K-PL (cooled to -223°C), 4K-PL (cooled to -269°C), PLA, PLB, mKPL (approximately -273°C)) are installed and stored inside the housing Frame of the dilution refrigerator 10. The metal plates PLA and PLB are controlled at a temperature between 4K (-269°C) and mK (approximately -273°C). The temperature control is configured to control and maintain a thermal equilibrium state using a temperature control heater (not shown) mounted on each plate (50K-PL, 4K-PL, PLA, PLB, mKPL) and a temperature controller (not shown) installed outside the dilution refrigerator 10 that controls the power input to the temperature control heater. In the example of FIG. 1, diluted liquid helium is circulated from the pulse tube PulseTube to the heat sink Heatsink. As a result, the metal plate 4K-PL to which the heat sink Heatsink is connected and the metal plate mKPL are cooled to an extremely low temperature through the heat sink Heatsink through which the diluted liquid helium circulates. Therefore, the metal plate 4K-PL and the metal plate mKPL can be realized in an extremely low temperature atmosphere of 10mK to 100mK. The heat sink Heatsink can be called the first refrigeration tube, and the pulse tube PulseTube can be called the second refrigeration tube. Also, the metal plate mKPL can be called the first metal plate, and the metal plate 4K-PL can be called the second metal plate.

[0017] The quantum semiconductor QBA is mounted on the first cooling plate FGNDPLT of the quantum semiconductor QBA disposed below the metal plate mKPL. The cooling plate FGNDPLT is thermally connected to the metal plate mKPL through cooling rods C0 to C3 (even-numbered sides C0 and C2 are not shown). That is, the heat sink Heatsink is a refrigeration tube that cools the cooling plate FGNDPLT, which is a metal body, using diluted liquid helium. The cooling plate FGNDPLT, which is a metal body, is thermally connected to the metal plate mKPL through the cooling rods C0 to C3.

[0018] In this embodiment, the reason why the quantum semiconductor QBA is not directly mounted on the metal plate mKPL but placed below the metal plate mKPL is to enable quantum operation of the quantum semiconductor QBA while applying a static magnetic field. Due to space constraints for placing the magnet MAGNET, which generates the static magnetic field, at the bottom layer of the dilution refrigerator 10, the quantum semiconductor QBA is arranged as shown in Figure 1 in the configuration example of the dilution refrigerator 10 in this embodiment. The electrical signals necessary to enable quantum operation of the quantum semiconductor QBA are output from a control device (not shown) installed outside the dilution refrigerator 10. The control signals are electrically connected to the quantum semiconductor QBA via coaxial wiring CXE and CXO, and the power supply voltage and power supply current are electrically connected to the quantum semiconductor QBA via DC twisted wiring TWE and TWO.

[0019] Figure 2 shows the spatial arrangement of wiring on the cooling plate mKPL inside the dilution refrigerator 10. The shape of the cryogenic plate (cooling plate), the metal plate mKPL, is disc-shaped in plan view, as shown in Figure 2. The heatsink for cooling the metal plate mKPL to the order of mK is positioned in the center of the metal plate mKPL.

[0020] In this embodiment, the control wiring, coaxial wiring CXE and CXO, are positioned opposite each other with a heatsink in between. Similarly, the power supply twisted wiring TWE and TWO are also positioned opposite each other with a heatsink in between. Twisted wiring TWE or twisted wiring TWO is positioned between coaxial wiring CXE and coaxial wiring CXO. Coaxial wiring CXE can be described as multiple first control wirings, coaxial wiring CXO as multiple second control wirings, twisted wiring TWE as multiple first power supply wirings, and twisted wiring TWO as multiple second power supply wirings.

[0021] As will be explained later in Figure 8, in this embodiment of the quantum semiconductor QBA, these wiring groups (CXE and CXO, TWE and TWO) are divided into even and odd units, and the desired electrical signals, voltages, and currents are controlled to pass through in a time-division manner, such as even followed by odd. For example, when a control signal and power supply current flow through the even-numbered coaxial wiring CXE and twisted wiring TWE, power attenuation in the coaxial wiring CXE and losses due to wiring resistance on the twisted wiring TWE occur on the coaxial wiring CXE and twisted wiring TWE. Since the inside of the dilution refrigerator 10 is under high vacuum, the temperature rise ΔT due to losses is dissipated from the heatsink via each wiring (CXE, TWE). The same applies to the odd-numbered coaxial wiring CXO and twisted wiring TWO as described above for the even-numbered coaxial wiring CXE and twisted wiring TWE. When control signals and power supply current flow through the odd-numbered coaxial wiring CXO and twisted wiring TWO, power attenuation occurs in the coaxial wiring CXO and losses occur in the twisted wiring TWO due to wiring resistance. Since the inside of the dilution refrigerator 10 is under high vacuum, the temperature rise ΔT due to losses is dissipated by the heatsink via the respective wirings (CXO, TWO).

[0022] The distance between the even-numbered wiring group CXE and the odd-numbered wiring group CXO is greater than the distance between the even-numbered wiring group CXE and the heatsink. Therefore, the heat generated by the even-numbered wiring group CXE is efficiently absorbed by the heatsink, making it possible to keep the temperature rise of the odd-numbered wiring group CXO, based on the heat generated by the even-numbered wiring group CXE, sufficiently low. Similarly, the heat generated by the odd-numbered wiring group CXO is efficiently absorbed by the heatsink, making it possible to keep the temperature rise of the even-numbered wiring group CXE, based on the heat generated by the odd-numbered wiring group CXO, sufficiently low. The same effect can be obtained for twisted wiring (TWE, TWO) (those skilled in the art will easily understand this from the above explanation of coaxial wiring CXE and CXO, so a detailed explanation of twisted wiring TWE and TWO is omitted). By combining this arrangement and wiring with a time-division drive sequence (see Figure 8), the metal plate mKPL can be controlled and maintained in an atmosphere close to absolute zero without disrupting the thermal equilibrium state inside the dilution refrigerator 10.

[0023] Figure 3 is a plan view of the substrate mounting of the quantum semiconductor QBA according to the embodiment described in Figures 1 and 2. Figure 4 is a cross-sectional view of the substrate mounting of the quantum semiconductor QBA according to the embodiment described in Figures 1 and 2. The quantum semiconductor QBA as a semiconductor chip is mounted on a cooling plate FGNDPLT. The cooling plate FGNDPLT is thermally connected to a metal plate mKPL via four cooling rods C1 to C3. The printed circuit board QFRP on the cooling plate FGNDPLT is fixed to the cooling plate FGNDPLT using, for example, non-magnetic screws SCR0 to SCR3. Connectors CNCXE, CNCXO, CNTWE, and CNTWO for connecting coaxial wiring CXE, CXO and twisted wiring TWE, TWO are electrically connected to the printed circuit board QFRP using solder material or the like. Electrical signals input to multiple pins within connectors CNCXE, CNCXO, CNTWE, and CNTWO are routed through multiple metal wiring patterns (Cu patterns), such as copper (Cu), formed within the multilayer substrate of the QFRP printed circuit board, to the die bond area near the chip of the quantum semiconductor QBA. Each of the multiple pins within connectors CNCXE, CNCXO, CNTWE, and CNTWO is connected to one of the multiple metal wiring patterns. Connectors CNCXE, CNCXO, CNTWE, and CNTWO are referred to as the first connector, the second connector CNCXO, the third connector CNTWE, and the fourth connector CNTWO.

[0024] In this embodiment, assuming the application of a high-frequency signal of GHz or higher to control the quantum semiconductor QBA, a configuration example is shown in which high-frequency wiring coaxial connectors CNS0, CNS1, CNS2, and CNS3 are individually mounted on the printed circuit board QFRP. Each pin of the high-frequency wiring coaxial connectors CNS0, CNS1, CNS2, and CNS3 is connected to a metal wiring pattern formed in the multilayer substrate within the printed circuit board QFRP, similar to the above.

[0025] Connectors CNCXE and CNCXO are positioned opposite each other on the QFRP printed circuit board, with the quantum semiconductor QBA in between, when viewed from above. Similarly, connectors CNTWE and CNTWO are positioned opposite each other on the QFRP printed circuit board, with the quantum semiconductor QBA in between, when viewed from above. Connectors CNS0 and CNS1 are positioned between connectors CNCXE and CNTWO on the QFRP printed circuit board, and connectors CNS2 and CNS3 are positioned between connectors CNCTE and CNCXO on the QFRP printed circuit board.

[0026] The coaxial wiring CXE is connected to the array of the even-side array QBA-even of the quantum semiconductor QBA, which will be described later, and includes control wiring for multiple inputs, wiring for high-frequency signal inputs, wiring for output of quantum operation results, and wiring for high-frequency signal output. In the coaxial wiring CXE, the high-frequency signal input wiring is connected to the high-frequency wiring coaxial connector CNS0, and the high-frequency signal output wiring is connected to the high-frequency wiring coaxial connector CNS2.

[0027] Similarly, the coaxial wiring CX0 is connected to the array of the odd-side array QBA-odd of the quantum semiconductor QBA, described later, and includes control wiring for multiple inputs, wiring for high-frequency signal inputs, wiring for output of quantum operation results, and wiring for high-frequency signal output. In the coaxial wiring CXO, the high-frequency signal input wiring is connected to the high-frequency wiring coaxial connector CNS1, and the high-frequency signal output wiring is connected to the high-frequency wiring coaxial connector CNS2.

[0028] The quantum semiconductor (QBA) chip is bonded to a die bond area inside a QFRP printed circuit board (QFRP) by applying solder material or silver paste to the back surface of the chip and using a reflow soldering machine. The metal pads (also called aluminum pads) on the QBA chip and the Cu patterns on the QFRP printed circuit board are electrically and thermally connected using metal lead frames (hereinafter referred to as metal leads) LDs created on the QFRP printed circuit board side. The cooling pad FGND on the QBA chip and the cooling plate QBAPLT made of metal (mainly oxygen-free copper) are electrically and thermally connected using metal leads LDs. Ground potential is applied to the cooling pad FGND. These metal leads LDs are electrically and thermally connected to the aluminum pads formed on the QBA chip by applying a predetermined torque to non-magnetic screws SCRW0~SCRW3. In addition, the QFRP printed circuit board in the back surface region of the QBA chip forms multiple through holes (through vias). In this way, the ground potential on the back surface of the quantum semiconductor QBA chip is electrically and thermally connected to the cooling plate (second cooling plate) QBAPLT via through-through vias.

[0029] Furthermore, when the metal plate mKPL is exposed to an extremely low-temperature atmosphere, the resin layers of metal plates such as the cooling plate (first cooling plate) FGNDPLT and the cooling plate QBAPLT, as well as the printed circuit board QFRP, shrink at a certain rate. Because the temperature dependence of the shrinkage rate differs depending on the material, in some cases the metal lead LD and the aluminum pad PAD of the quantum semiconductor QBA chip may physically separate, potentially leading to a loss of electrical and thermal connection.

[0030] To prevent such a situation, in this embodiment, a metal pin SPR having a spring structure is placed between the cooling plate QBAPLT and the cooling plate FGNDPLT. In addition, an alignment plate ALIPLT is provided to adjust the positions of the cooling plates QBAPLT and FGNDPLT, so as to surround the outer circumference of the cooling plate QBAPLT. Note that the alignment plate ALIPLT is omitted from the plan view of Figure 3 to avoid complexity in the figures. With this structure, when the metal plate mKPL is cooled from room temperature to cryogenic temperatures, if the distance between the cooling plate QBAPLT and the cooling plate FGNDPLT increases, the metal pin SPR extends, reducing the distance so that contact between the metal lead LD and the aluminum pad PAD is not lost. With this configuration, it is possible to efficiently cool the quantum semiconductor QBA chip from the chip surface.

[0031] Although the explanation is omitted, the quantum semiconductor QBA chip is formed using silicon semiconductor. It is known that silicon has a much lower thermal conductivity than metals at extremely low temperatures. Therefore, it may be difficult to dissipate heat from the back surface (Si sub) of the quantum semiconductor QBA chip. Even in such cases, the structure of this embodiment allows for heat dissipation paths from both the front and back surfaces of the quantum semiconductor QBA chip, thus maintaining the extremely low temperature state necessary for quantum operation.

[0032] Figure 5A shows the layout of the quantum semiconductor QBA chip in this embodiment. Figure 5B is an enlarged view of the array region AR in Figure 5A. The layout configuration of the core array region AR is complex, so it is shown in an enlarged view in Figure 5B. The core of the quantum semiconductor QBA chip includes two array regions AR, each array region AR consisting of a group of quantum-operating elements sqba, a driver circuit drv that drives them, a readout signal amplifier amp, a control circuit xp, a row decoder rowdec, a column decoder coldec, a control circuit group ctl, etc. In addition, multiple aluminum pads PAD (FGND, G0, G1, G2, G3, S0, S1, S2, S3, etc.) are arranged on the outermost edge of the quantum semiconductor QBA chip.

[0033] Control signals, voltages, and currents input from an external measuring device of the dilution refrigerator 10 are transmitted from the aluminum pad PAD to each control circuit of the core part of the quantum semiconductor QBA chip via coaxial wiring (CXE, CXO), twisted wiring (TWE, TWO) and their connectors (CNCXE, CNCXO, CNTWE, CNTWO, CNS0, CNS1, CNS2, CNS3), and Cu wiring patterns in the printed circuit board QFRP.

[0034] A quantum semiconductor QBA chip is placed on a metallic FGNDPLT and consists of multiple regions that operate quantum independently. In this example, the quantum semiconductor QBA chip is logically divided into two regions: the first region of the even-side array QBA-even and the second region of the odd-side array QBA-odd. These two regions operate quantum independently in a time-division multiplexing manner. In other words, the core of the quantum semiconductor QBA chip is logically divided into two regions: the even-side array QBA-even (corresponding to the upper array region AR in Figure 5A) and the odd-side array QBA-odd (corresponding to the lower array region AR in Figure 5A). In this sense, the quantum semiconductor QBA chip is called a quantum bit array chip.

[0035] When performing quantum operations on a quantum semiconductor QBA, the quantum operation may be carried out by electromagnetic waves generated by inputting a high-frequency signal. The high-frequency signal is passed in opposite directions through multiple independently operating regions within the quantum semiconductor QBA (odd-side array QBA-odd, even-side array QBA-even).

[0036] For example, when a high-frequency signal from the even-side array QBA-even is input to the signal aluminum pad S0 (S0 is connected to the high-frequency signal input wiring of the high-frequency wiring coaxial connector CNS01), since there are multiple corresponding element groups sqba that perform quantum operation using the high-frequency signal (in the case of Figure 5A, each region AR has four regions AR1, AR2, AR3, and AR4), the high-frequency signal from S0 is branched into four by the even-side control wiring group 4LSE, which consists of four control wires, corresponding to regions AR1, AR2, AR3, and AR4, and passes from the signal aluminum pad S0 on the left side of Figure 5A to the signal aluminum pad S2 on the right side (S2 is connected to the high-frequency signal output wiring of the high-frequency wiring coaxial connector CNS21). In other words, in Figure 5A, the even-side array QBA-even passes the high-frequency signal from left to right to perform quantum operation.

[0037] After the quantum operation of the corresponding element group sqba in the even-side array QBA-even is completed, the high-frequency signal input from the signal aluminum pad PAD S1 (S1 is connected to the high-frequency signal input wiring of the high-frequency wiring coaxial connector CNS1) of the odd-side array QBA-odd is branched into four by the odd-side control wiring group 4LSO, which consists of four control wires, corresponding to regions AR1, AR2, AR3, and AR4, and transmitted to the signal aluminum pad PAD S3 (S3 is connected to the high-frequency signal output wiring of the high-frequency wiring coaxial connector CNS31), thereby causing the corresponding element group sqba in the odd-side array QBA-odd to perform quantum operation. In other words, in Figure 5A, in the odd-side array QBA-odd, the high-frequency signal is passed from right to left in the opposite direction to the high-frequency signal direction of the even-side array QBA-even, to perform quantum operation.

[0038] By controlling it in this way, the QBA chip arrays, which are divided into two parts, the even-side array QBA-even and the odd-side array QBA-odd, heat up alternately. As a result, the element group sqba of the even-side array QBA-even and the element group sqba of the odd-side array QBA-odd are less likely to be affected by each other's heat generation, thus suppressing the temperature rise. In Figure 5A, the aluminum pads G0, G1, G2, and G3 are supplied with ground potential to shield each high-frequency signal.

[0039] The above explanation shows the case where a high-frequency signal is input to the signal aluminum pads S0 and S1. Similarly, multiple control wires of coaxial wiring CXE are connected to the element groups sqba of regions AR1, AR2, AR3, and AR4 of the even-side array QBA-even via aluminum pads by an even-side control wire group consisting of four control wires. Similarly, multiple control wires of coaxial wiring CXO are connected to the element groups sqba of regions AR1, AR2, AR3, and AR4 of the odd-side array QBA-odd via aluminum pads by an odd-side control wire group consisting of four control wires.

[0040] Figure 6 shows the layout of cooling wiring within the quantum semiconductor QBA chip. The cooling pad FGND is thermally connected to the cooling plate QBAPLT. As shown in Figure 6, the cooling pad FGND is connected from the top layer of aluminum wiring in the wiring structure of the quantum semiconductor QBA chip to the lower layer metal (e.g., Cu) wiring, namely the first metal wiring M1 and the second metal wiring M2, via contact vias and other means. The first metal wiring M1 and the second metal wiring M2 can be considered as dedicated wiring for cooling multiple qubits within the quantum semiconductor QBA.

[0041] The first metal wiring M1 and the second metal wiring M2 are arranged and wired in a mesh structure inside the quantum semiconductor QBA chip. At this time, the mesh structure wiring of the first metal wiring M1 and the second metal wiring M2 should be arranged and wired so as to be thermally separated between the even-side array QBA-even and the odd-side array QBA-odd of the quantum semiconductor QBA chip. In other words, inside the quantum semiconductor QBA chip, there are first dedicated wirings (M1, M2) for cooling silicon-type qubits individually provided in the even-side array QBA-even, and second dedicated wirings (M1, M2) for cooling silicon-type qubits individually provided in the odd-side array QBA-odd, and the first dedicated wirings (M1, M2) and the second dedicated wirings (M1, M2) are thermally separated.

[0042] This has the effect of suppressing the transfer of heat generated by the element group sqba of the even-side array QBA-even to the element group sqba of the odd-side array QBA-odd via metal wiring M1 and M2. As the heat generated by the even-side array QBA-even is less likely to be transferred to the odd-side array QBA-odd, the temperature rise of the element group sqba of the odd-side array QBA-odd is suppressed, making it possible to continue stable quantum operation in time division. Similarly, as the heat generated by the odd-side array QBA-odd is less likely to be transferred to the even-side array QBA-even, the temperature rise of the element group sqba of the even-side array QBA-even is suppressed, making it possible to continue stable quantum operation in time division.

[0043] Figure 7 is a cross-sectional view of the quantum semiconductor QBA chip of this embodiment. It is a so-called fully depleted silicon CMOS process semiconductor in which an oxide film layer BOX is formed on top of the silicon substrate Si sub, and an activation layer p-well for forming quantum-operating elements qbit is formed further above. The transistor for quantum operation of the quantum-operating elements qbit consists of polysilicon pSi-1 and the gate insulating film Tox directly beneath it in the figure. Other symbols are the high-concentration diffusion layer region N+, interlayer films CAP1 and CAP2, SiN, SiO2, control polysilicon wiring layers pSi-2 and pSi-3, and metal wiring layer M1. When quantum operation occurs, current and voltage are applied to the various polysilicon wiring layers pSi-2 and pSi-3, causing losses due to the polysilicon wiring resistance, and the quantum-operating elements qbit generate heat. In the structure of this embodiment, the sufficiently cooled metal wiring M1 is positioned and wired close to the polysilicon wiring layers pSi-2 and pSi-3, so the generated losses (heat) can be efficiently dissipated to the outside of the quantum semiconductor QBA chip.

[0044] Figure 8 shows the driving sequence of the quantum semiconductor QBA chip. As explained above, the quantum semiconductor QBA chip is divided into two arrays: the even-side array QBA-even and the odd-side array QBA-odd. The even-side array QBA-even is operated quantum first, and after its operation is complete, the odd-side array QBA-odd is operated quantum. In other words, in this example, the multiple regions, the even-side array QBA-even and the odd-side array QBA-odd, are operated alternately in a time-division multiplexed operation.

[0045] In this example, the even-side array QBA-even operates quantum based on control signals from coaxial wiring CXE and power supply currents from twisted wiring TWE during periods #0, #1 and #6, #7 of the clock CK. Similarly, the odd-side array QBA-odd operates quantum based on control signals from coaxial wiring CX0 and power supply currents from twisted wiring TWO during periods #3, #4 and #9, #10 of the clock CK. By controlling in this way, as shown in Figure 8, the coaxial wirings CXE and CXO, which are arranged and wired within the dilution refrigerator 10, are also driven in a time-division manner. As a result, it becomes possible to efficiently discharge the losses (heat) generated within the dilution refrigerator 10 to the outside of the dilution refrigerator 10. Furthermore, by aligning the placement and wiring within the refrigerator 10 with the partitioned layout of the circuit blocks inside the quantum semiconductor QBA chip (even-side array QBA-even, odd-side array QBA-odd: see Figures 5A and 5B), and the placement of the associated connectors (CNCXE, CNCXO, CNTWE, CNTWO: see Figure 3), the placement and wiring (CXE, CXO, TWE, TWO) can be made to the minimum length without crossing, thereby minimizing the losses incurred in the wiring (CXE, CXO, TWE, TWO).

[0046] As described above, by using the configuration described in the above embodiment, it is possible to maintain a temperature very close to absolute zero when a large-capacity quantum semiconductor is operated quantum mechanically, thereby providing a quantum computing system with high quantum fidelity.

[0047] Although the present invention has been specifically described above based on embodiments, it goes without saying that the present invention is not limited to the above embodiments and can be modified in various ways without departing from its essence.

[0048] The embodiments described above are explained in detail for the purpose of clearly illustrating the present invention, and are not necessarily limited to those comprising all the configurations described. Furthermore, it is possible to add, delete, or replace some of the configurations in the embodiments with other configurations.

[0049] Furthermore, although the above embodiment described an example using a silicon quantum semiconductor, the present invention is not limited to this and can also be applied to superconducting quantum semiconductors and the like. [Explanation of Symbols]

[0050] QCAL: Quantum computer, 10: Dilution refrigerator, QBA: Quantum semiconductor QBA, qbit: Quantum-operating element, Frame: Enclosure, RT-PL: Room temperature plate, VC: Vacuum tube, PulseTube: Pulse tube, 50K-PL, 4K-PL, PLA, PLB, mKPL: Metal plate, FGNDPLT: First cooling plate (metal body), Heatsink: Heat sink (first cooling tube), MAGNET: Magnet, CXE, CXO: Coaxial wiring, TWE, TWO: Twisted wiring, C1~C3: Cooling rod, QFRP: Printed circuit board, CNCXE, C NCXO, CNTWE, CNTWO: Connectors; CNS0, CNS1, CNS2, CNS3: Coaxial connectors for high-frequency wiring; QBA-even: Even-side array; QBA-odd: Odd-side array; QBAPLT: Second cooling plate; LD: Metal lead; PAD: Aluminum pad; ALIPLT: Alignment plate; SPR: Metal pin; sqba: Element group; drv: Driver circuit section; amp: Readout signal amplifier section; xp: Control circuit section; rowdec: Row decoder; coldec: Column decoder; ctl: Control circuit group; M1, M2: Metal wiring

Claims

1. A first refrigeration tube for cooling the metal body, The metal body and the refrigerator housing that houses the first refrigeration tube inside, A qubit array chip having multiple silicon-type qubits, The qubit array chip comprises a plurality of control lines for driving the qubit array chip, The aforementioned qubit array chip is arranged on the metal body and consists of multiple regions that operate independently in quantum mode. The aforementioned multiple control wires are connected to the aforementioned multiple regions as multiple control wire groups, The aforementioned plurality of control wires are installed on either side of the first refrigeration pipe, moreover, Housed within the aforementioned refrigerator housing, in plan view, it comprises a disc-shaped first metal plate and The substrate on which the qubit array chip is mounted includes, The first refrigeration tube is positioned in the center of the first metal plate when viewed from above. The plurality of control wirings include a plurality of first control wirings and a plurality of second control wirings, The plurality of first control wirings and the plurality of second control wirings are arranged in a top view on the first metal plate at positions facing each other with the first refrigeration pipe in between. The aforementioned metal body is A first cooling plate thermally connected to the first metal plate, A second cooling plate is electrically and thermally connected to the back surface of the qubit array chip and the substrate via a plurality of through holes provided in the substrate. A quantum computer characterized by having a plurality of metal pins having a spring structure provided between the first cooling plate and the second cooling plate.

2. In claim 1, further, Each of the aforementioned multiple regions includes a plurality of first power supply wirings and a plurality of second power supply wirings that supply power supply voltages, A quantum computer characterized in that the plurality of first power supply wirings and the plurality of second power supply wirings are arranged in a top view on the first metal plate at positions opposite each other with the first refrigeration pipe in between.

3. In claim 2, A second refrigeration tube through which diluted liquid helium is circulated, The refrigerator housing includes a second metal plate which is housed in the refrigerator housing and cooled by the second refrigeration tube, A quantum computer characterized in that the first refrigeration tube is provided between the second metal plate and the first metal plate, and liquid helium is circulated to cool the first metal plate to an extremely low temperature.

4. In claim 2, further, It is arranged on the substrate and has multiple connection connectors to which the multiple control wirings are connected, The plurality of connection connectors are arranged on the substrate in the same number as the plurality of regions. A quantum computer characterized in that the plurality of connection connectors are arranged in a plan view at positions facing each other with the qubit array chip in between.

5. In claim 4, The plurality of connection connectors include a first connector to which the plurality of first control wirings are connected, and a second connector to which the plurality of second control wirings are connected. Furthermore, a third connector is placed on the substrate and to which the plurality of first power supply wirings are connected, The system includes a fourth connector, which is placed on the aforementioned substrate and to which the plurality of second power supply wirings are connected, The first connector and the second connector are positioned on the substrate opposite each other, with the qubit array chip in between. A quantum computer characterized in that the third connector and the fourth connector are arranged on the substrate at positions opposite each other, with the qubit array chip in between.

6. In claim 5, The substrate includes a multilayer metal wiring pattern, Each of the multilayer metal wiring patterns is connected to a plurality of pins of the first connector and the second connector, The substrate further includes a plurality of metal frames bonded to the multilayer metal wiring pattern of the substrate, A quantum computer characterized in that a plurality of metal pads of the qubit array chip are electrically connected to a plurality of metal frames.

7. In claim 5 The substrate and the qubit array chip are thermally connected via a metal frame bonded to the substrate and a metal pad on the qubit array chip. A quantum computer characterized in that the thermally connected metal pad has dedicated wiring for cooling the silicon-type qubits, which are individually provided in each of the plurality of regions of the qubit array chip.

8. In claim 1, The aforementioned metal body further, A quantum computer characterized by having an alignment plate provided so as to cover the periphery of the second cooling plate in order to adjust the positions of the first cooling plate and the second cooling plate.

9. In claim 1, further, A quantum computer characterized by having a plurality of cooling rods that thermally connect the first metal plate and the first cooling plate.

10. In claim 8, further, A quantum computer characterized by having a magnet housed in the refrigerator casing for performing quantum operations while applying a static magnetic field to the qubit array chip.

11. In claim 1, The plurality of control lines include a plurality of high-frequency lines for inputting high-frequency signals to the qubit array chip, When performing quantum operations on the aforementioned qubit array chip, the quantum operation is carried out by electromagnetic waves generated by inputting the high-frequency signal. A quantum computer characterized in that the high-frequency signal is passed in opposite directions through the plurality of independently operating regions within the qubit array chip.

12. In claim 1 The quantum computer is characterized in that the qubit array chip alternately operates the plurality of regions in a time-division multiplexing manner.

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