Ozone supply device and method of operating the ozone supply device

The sharing of oxygen recycling equipment among ozone generators in ozone supply systems addresses inefficiencies by improving energy savings and reducing costs and space requirements, enhancing the overall efficiency and economic viability of ozone supply systems.

JP7858854B2Active Publication Date: 2026-05-14MITSUBISHI ELECTRIC CORP
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Patent Information

Application Number
JP2025016516
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2025-02-04
Publication Date
2026-05-14
Estimated Expiration
2044-07-09

AI Technical Summary

Technical Problem

Conventional ozone supply systems with oxygen recycling technology face low operational load and utilization rates, especially in pumping stations with fluctuating water treatment volumes, leading to increased installation space, maintenance costs, and energy inefficiencies.

Method used

A system configuration that shares oxygen recycling equipment among multiple ozone generators, allowing for increased load and operating rates, simplifies the ozone supply system, and reduces installation and maintenance costs by standardizing equipment.

Benefits of technology

Improves energy savings through oxygen recovery, reduces equipment installation costs, maintenance costs, and installation space, and enhances the return on investment by optimizing oxygen recycling equipment utilization.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide an ozone supply device improved in energy saving, and an operation method of the ozone supply device.SOLUTION: A plurality of ozone generators (3a, 3b, 3c) configured to generate ozone from the supplied ozone; the ozone is supplied from the ozone generators (3a, 3b, 3c); An adsorption unit (41a, 41b) configured to adsorb ozone from a gas mixture composed of air and ozone to separate air from the gas mixture, an air transfer unit (42) configured to transfer air separated from the gas mixture by the adsorption unit (41a, 41b) to an ozone generator (3a, 3b, 3c), and a first common pipe (10a) configured to commonly connect an outlet side of the air transfer unit (42) and an inlet side of the ozone generator; And a second common pipe (41a) commonly connecting an inlet side of the adsorption device (10b, 41b) and an outlet side of the ozone generator.SELECTED DRAWING: Figure 2
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Description

Technical Field

[0001] The present disclosure relates to an ozone supply device and an operation method of the ozone supply device.

[0002] The ozone injection amount for ozone treatment in a water purification plant or the like is calculated by the product of the ozone injection rate and the water treatment amount. For example, when reducing precursors such as trihalomethane (THM) in a water purification plant is the target of ozone treatment, these show high concentrations in summer, so a high ozone injection rate is required, and moreover, the water treatment amount in summer is generally large. Therefore, the maximum ozone injection amount, which is the design value for determining the capacity and number of ozone generators, is set by adding the daily water volume fluctuation range and the margin rate to the product of the water treatment amount and the ozone injection rate based on summer.

[0003] On the other hand, in actual operation other than in summer, a low ozone injection amount is sufficient, so it is common to operate at a low load and with a small number of ozone generators with respect to the equipment capacity of the entire series of ozone supply devices composed of multiple units. Also, in an ozone supply device applying the conventional oxygen recycling technology, the oxygen recycling equipment capacity and the number of units are the same as those of the ozone generator.

[0004] Also, conventionally, as an ozone supply device equipped with related equipment, there is one related to Patent Document 1. That is, an ozone generator that generates ozone, an adsorption / desorption tower that adsorbs and desorbs the ozone, an ozone gas transfer circuit for transferring the ozone gas generated by the ozone generator to the adsorption / desorption tower, a pressurization mechanism for introducing a pressurized carrier gas into the adsorption / desorption tower, or a decompression mechanism for decompressing the adsorption / desorption tower, an ozone buffer device that contains an adsorbent for adsorbing the ozone and suppresses fluctuations in the concentration of the introduced ozone, and a desorbed gas transfer circuit for transferring the ozone desorbed from the adsorption / desorption tower to the ozone buffer device and then supplying it to the supply target. An ozone supply device equipped with these is known (for example, see Patent Document 1).

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Patent No. 7292554 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] However, in ozone supply systems that utilize conventional oxygen recycling technology, the oxygen recycling equipment capacity and number of units are equivalent to those of the ozone generator. This results in low operational load and utilization rates relative to the overall equipment capacity of the system, especially in pumping stations with large fluctuations in the concentration of the substances being treated and the volume of treated water. This also presents economic challenges, such as low energy-saving effects from oxygen recovery relative to the cost of introducing the oxygen recycling equipment.

[0007] Furthermore, in the past, ozone generators and oxygen recycling equipment were often installed in a one-to-one correspondence. Therefore, even if the oxygen recycling equipment failed, backup operation was possible using another ozone generator and oxygen recycling equipment. However, in such cases, the installation of multiple oxygen recycling equipment units increased the installation space required for the ozone supply system, or led to higher maintenance costs due to the increased complexity of the equipment. On the other hand, when oxygen recycling equipment was shared among multiple ozone generators, problems arose such as the difficulty of backup operation if the oxygen recycling equipment failed.

[0008] This disclosure provides technology to solve the above-mentioned problems. By creating a system configuration that allows for the sharing of equipment for separating and transferring oxygen, the aim is to improve energy savings through oxygen recovery by increasing the load or operating rate of the oxygen recycling equipment even when operating with a small amount of ozone injection. Furthermore, by standardizing the oxygen recycling equipment, the aim is to simplify the ozone supply system, thereby reducing equipment installation costs, maintenance costs, and installation space, and improving the return on investment. [Means for solving the problem]

[0009] The ozone supply device of this disclosure is Multiple ozone generators that produce ozone from oxygen, The oxygen contained in the mixed gas is separated by adsorbing the ozone from the mixed gas, which is composed of oxygen and the ozone supplied from the ozone generator. , shared for multiple ozone generators Adsorption device and The oxygen separated from the mixed gas by the adsorption device is transferred to the ozone generator. , shared for multiple ozone generators Oxygen transfer device, A first shared piping connects the outlet side of the oxygen transport device from which oxygen is discharged and the inlet side of the ozone generator from which oxygen is supplied, A second shared pipe connects the inlet side of the adsorption device to which the mixed gas is supplied and the outlet side of the ozone generator from which the mixed gas is discharged, It is characterized by having the following features. [Effects of the Invention]

[0010] According to the ozone supply system disclosed herein, by using a system configuration that allows for the sharing of equipment for separating and transferring oxygen, the load on the oxygen recycling equipment or its operating rate can be increased even when operating with a small amount of ozone injection, thereby improving energy savings through oxygen recovery. Furthermore, by standardizing the oxygen recycling equipment, the ozone supply system can be simplified, reducing equipment installation costs, maintenance costs, and installation space, thereby improving the return on investment. [Brief explanation of the drawing]

[0011] [Figure 1] This is a system diagram showing an example of an ozone supply device according to Embodiment 1. [Figure 2] This is a system diagram showing in detail the main parts of the ozone supply device according to Embodiment 1. [Figure 3] This diagram systematically illustrates an example of ozone adsorption in an ozone supply device according to Embodiment 1. [Figure 4] This is a diagram for systematically explaining an example of ozone desorption in the ozone supply device according to Embodiment 1. [Figure 5] This is a systematic diagram showing an example of the ozone supply device according to Embodiment 2. [Figure 6] This is a flowchart showing the operation method of the ozone supply device according to Embodiment 2. [Figure 7] This is a systematic diagram showing an example of the ozone supply device according to Embodiment 3. [Figure 8] This is a flowchart showing the operation method of the ozone supply device according to Embodiment 3.

Mode for Carrying Out the Invention

[0012] The present disclosure relates to an ozone supply device with an added oxygen recycling facility that selectively adsorbs ozone from oxygen gas containing ozone output from a plurality of ozone generators using an adsorbent in public sewage and private drainage treatment plants for the purpose of ozone treatment, and reuses the oxygen separated without being adsorbed as a raw material for the ozone generator, and an operation method of the ozone supply device.

[0013] Here, particularly, in an ozone supply device with an added oxygen recycling facility that reuses the unadsorbed oxygen as a raw material for the ozone generator, the ozone supply device is characterized by a configuration in which the above oxygen recycling facility is shared for the entire ozone supply device composed of a plurality of ozone generators.

[0014] Embodiment 1. An example of the ozone supply device according to Embodiment 1 will be described below using the block diagrams of FIGS. 1 and 2.

[0015] Figure 1 shows an example of an ozone supply device according to Embodiment 1 as a processing system diagram. The ozone supply device of this disclosure supplies compressed air from multiple compressed air supply devices 1a, 1b, and 1c (hereinafter also referred to as compressed air supply devices 1a to 1c) to a compressed air header pipe 11a (hereinafter also referred to as the third shared pipe 11a) shared by these multiple compressed air supply devices, and supplies it to multiple oxygen supply devices 2a, 2b, and 2c via this compressed air header pipe 11a. The oxygen supplied from these multiple oxygen supply devices 2a to 2c is supplied to multiple ozone generators 3a, 3b, and 3c (hereinafter also referred to as ozone generators 3a to 3c) via an oxygen header pipe 10a (hereinafter also referred to as the first shared pipe 10a) shared by these multiple oxygen supply devices 2a to 2c. Next, these ozone generators 3a to 3c generate ozone from the supplied oxygen, and together with the excess oxygen, the mixed gas is transferred to the ozonated oxygen header pipe 10b shared by the ozone generators 3a to 3c. This mixed gas contains at least the generated ozone and the excess oxygen. Subsequently, this ozone and oxygen are sent to the oxygen recycling facility 4 via the ozonated oxygen header pipe 10b. In the oxygen recycling facility 4, of the ozone and oxygen, the ozone is adsorbed, and only the oxygen is returned to the oxygen header pipe 10a for recycling. Furthermore, the ozone generators 3a to 3c are equipped with a power supply device (a combination of an inverter and a step-up transformer; not shown) that supplies power to electrodes housed inside. By changing the voltage and frequency of this power supply device, the power injected into the electrodes can be adjusted, thereby increasing or decreasing the generated ozone concentration. In addition, the first shared piping 10a is shared and connected between multiple ozone generators, connecting the outlet side of the oxygen transport device, where oxygen is discharged from the oxygen transport device, and the inlet side of the ozone generator, where oxygen is supplied to the ozone generator.

[0016] On the one hand, the compressed air supplied from a plurality of compressed air supply facilities 1a to 1c is sent to the oxygen recycling facility 4 and used to desorb the ozone adsorbed in the oxygen recycling facility 4. After that, the desorbed ozone and compressed air pass through the supply ozone header pipe 11b (hereinafter, also referred to as the fourth common pipe 11b) and are supplied to a plurality of air diffusers 51a, 51b, 51c, and 51d provided in the ozone contact tank 5 in which the treated water 50 is stored. The supply ozone header pipe 11b is shared by the air diffusers 51a to 51d.

[0017] Here, the functions of the four types of header pipes (in FIG. 1, in order from the left, the compressed air header pipe 11a, the oxygen header pipe 10a, the ozone-oxygen header pipe 10b, and the supply ozone header pipe 11b) will be described in detail below.

[0018] First, the compressed air header pipe 11a serves as a circuit for supplying compressed air from the compressed air supply facility to the oxygen supply facility and supplying compressed air to the adsorption device to desorb the ozone adsorbed by the adsorption tower (hereinafter, also referred to as the adsorption device) of the oxygen recycling facility. In addition, the oxygen header pipe serves as a circuit for supplying oxygen from the oxygen supply facility to the ozone generator and returning the oxygen recovered by the oxygen recycling facility to the inlet of the ozone generator. In addition, the ozone-oxygen header pipe serves as a circuit for supplying ozone-oxygen (ozone and oxygen) from each ozone generator to the shared (common) oxygen recycling facility. Finally, the supply ozone header pipe serves as a circuit for supplying the desorbed ozone-containing air (ozone and compressed air) from the oxygen recycling facility to the ozone contact tank.

[0019] Each header pipe such as the oxygen header pipe is connected in parallel to a plurality of facilities of the same name, but the pressure difference between the facilities of the same name is averaged, and the time required for this averaging is negligible in the present disclosure.

[0020] Furthermore, an ozone contact tank is a tank in which ozone gas and treated water are brought into contact and reacted. The ozone generator is also equipped with a power supply, and the ozone generation concentration can be adjusted using the inverter of this power supply. In addition, the adsorption performance is monitored by the oxygen concentration at the outlet of the adsorption tower. For example, if the oxygen concentration decreases, it is judged that there is a "possible malfunction." Furthermore, a detection device for preventing gas leaks is installed.

[0021] Next, the oxygen recycling facility 4 described above will be explained in more detail using Figure 2. Figure 2 provides a detailed view of the internal configuration of the oxygen recycling equipment 4 in the processing system diagram of the ozone supply device according to Embodiment 1 shown in Figure 1.

[0022] As shown within the dotted frame in Figure 2, the oxygen recycling facility 4 consists of a NOx removal device 40, multiple adsorption towers 41a and 41b having ozone adsorption and ozone desorption functions, an oxygen transfer device 42 to which oxygen is transferred from these adsorption towers 41a and 41b, a cooler 45 to remove the heat of compression of oxygen gas whose temperature has risen due to adiabatic compression, a depressurization mechanism 43 (specifically, a vacuum blower, for example) for depressurizing and transferring the compressed air and ozone transferred to the adsorption towers 41a and 41b and the ozone desorbed in the adsorption towers 41a and 41b to the ozone contact tank 5 via the supply ozone header pipe 11b, and an ozone buffer device 44, etc.

[0023] Here, ozone and oxygen transferred from the ozone generator via the ozonated oxygen header pipe 10b are supplied separately to the adsorption tower 41a and adsorption tower 41b, respectively. After the ozone is adsorbed by the ozone adsorbent installed inside each tower, the separated oxygen is transferred to the oxygen transfer device 42. The ozone buffer device 44 has the function of suppressing fluctuations in the ozone concentration supplied to the ozone contact tank.

[0024] In Figure 2, the ozone adsorbent installed inside the adsorption tower 41a or adsorption tower 41b completely separates the ozone and oxygen, so the oxygen separated in the adsorption tower 41a or adsorption tower 41b is entirely recycled as a raw material for the ozone generator.

[0025] Furthermore, in Figure 2, the basic role of cooler 45 is to prevent the thermal decomposition of ozone in the ozone generator due to the temperature of the oxygen gas being handled rising to approximately 100 degrees Celsius. It cools the gas, which has reached a higher temperature, down to about 40 degrees Celsius to prevent thermal decomposition. Without this cooler 45, high-temperature oxygen gas would be supplied to the ozone generator, raising concerns that the generated ozone would be thermally decomposed.

[0026] Next, the gas transfer during ozone adsorption in the oxygen recycling facility 4 described above will be explained systematically and in detail using Figure 3, and the gas transfer during ozone desorption in the oxygen recycling facility 4 will be explained systematically and in detail using Figure 4.

[0027] First, the gas transfer during ozone adsorption in the oxygen recycling facility 4 will be explained using Figure 3. In Figure 3, the area enclosed by the dashed line corresponds to the oxygen recycling facility 4 described above. The ozone and oxygen emitted from the ozonated oxygen header pipe 10b are transferred from the NOx removal device 40 to the adsorption tower 41a or adsorption tower 41b for ozone adsorption. After the ozone is adsorbed in these adsorption devices, the separated oxygen passes through the oxygen transfer device 42 and the cooler 45, and then is supplied to the ozone generators 3a to 3c via the oxygen header pipe 10a, respectively, for recycling.

[0028] Next, the gas transfer during ozone desorption in the oxygen recycling facility 4 will be systematically explained using Figure 4. In Figure 4, the area enclosed by the dashed-dotted line corresponds to the oxygen recycling facility 4 described above. Compressed air supplied from multiple compressed air supply facilities is collected in the compressed air header pipe 11a and then passes through the adsorption tower 41a or adsorption tower 41b via the decompression mechanism 43. Meanwhile, the ozone adsorbed in the adsorption tower 41a or adsorption tower 41b is desorbed and, together with the compressed air, passes from the adsorption tower 41a or adsorption tower 41b through the decompression mechanism 43 (which is a vacuum blower) and the ozone buffer device 44, before being transferred to the ozone contact tank 5 via the supply ozone header pipe.

[0029] As described above, the ozone supply device of Embodiment 1, by configuring the device so that the equipment for separating or transferring oxygen can be shared, can increase the load or operating rate of the oxygen recycling equipment even when operating with a low ozone injection amount, thereby improving energy saving through oxygen recovery. In addition, by standardizing the oxygen recycling equipment, the ozone supply device can be simplified, making it possible to reduce equipment introduction costs, maintenance costs, and installation space, thereby improving the return on investment.

[0030] Furthermore, in large-scale water treatment plants where multiple high-capacity ozone generators of 10 kg / h or more each are installed, it is possible to reduce costs or equipment space by about 30%.

[0031] Embodiment 2. The ozone supply device according to Embodiment 2 will be described below with reference to Figures 5 and 6. The ozone supply device according to Embodiment 2 differs from the ozone supply device according to Embodiment 1 in that the oxygen recycling equipment 4 includes a control device for controlling a plurality of components arranged inside and outside the equipment, and signal lines connecting the control device and each component (signal lines for sending signals from the control device to each component, and signal lines for sending signals from each component to the control device).

[0032] Furthermore, in addition to the piping that connects multiple pieces of equipment for separating and transferring oxygen to one another, there is a piping that branches off from the ozonated oxygen header pipe 10b and connects directly to the supply ozone header pipe 11b (hereinafter referred to as the bypass piping), and a bypass valve 31 for controlling (opening and closing) the gas flow is provided in the middle of this bypass piping 30. In addition, there is an adsorption tower inlet valve 21 for controlling (opening and closing) the gas flow in the piping that connects the ozonated oxygen header pipe 10b (hereinafter also referred to as the second shared piping 10b) to the adsorption tower 41a and the adsorption tower 41b, and an ozone concentration meter 46a, 46b, and 46c are installed correspondingly on the outlet side of each ozone generator (see Figure 5). Here, the second shared pipe 10b described above connects the inlet side of the adsorption device, which supplies the mixed gas to the adsorption device, and the outlet side of the ozone generator, which discharges the mixed gas from the ozone generator, to multiple ozone generators.

[0033] Next, we will explain in more detail, using Figure 5, the device configuration of the ozone supply device according to Embodiment 2, focusing on the control device 6, which is a difference from the ozone supply device according to Embodiment 1 described above.

[0034] As shown in Figure 5, the control device 6 is an element of the oxygen recycling equipment 4. This control device 6 receives signals from the oxygen transfer device 42, which is another component of the equipment, via signal line 61d, and from the pressure reduction mechanism 43 via signal line 61e. It also receives signals from the ozone concentration meters 46a to 46c installed on the outlet side of the ozone generators 3a to 3c, which are components of the ozone supply equipment other than the oxygen recycling equipment 4, via signal lines 61a, 61b, and 61c corresponding to each concentration meter.

[0035] Meanwhile, the control device 6 transmits signals to the adsorption tower inlet valve 21 via signal line 60g and to the bypass valve 31 via signal line 60h. Furthermore, signals are transmitted to the oxygen supply equipment 2a to 2c via signal lines 60d to 60f, respectively, and to the ozone generators 3a to 3c via signal lines 60a to 60c, respectively.

[0036] In the event of a malfunction in the oxygen separation and transfer equipment, the ozone generator will be operated at a reduced airflow rate below its rated capacity (where the rated airflow rate is defined as the rated ozone output of one ozone generator divided by the rated ozone concentration). This amount can be adjusted using an inverter or similar device. The detection of abnormalities is performed by the oxygen transfer device and decompression mechanism described above. Each of these mechanisms is equipped with an inverter, which makes judgments based on the speed, current, torque, and power consumption of the motor driving it.

[0037] Furthermore, the rated airflow of the ozone generator is adjusted by controlling the number of oxygen supply units, or by adjusting the amount of oxygen supplied to the ozone generator through the operation of the oxygen supply unit using an inverter.

[0038] Next, we will specifically explain, using Figure 6 below, how the oxygen supply equipment adjusts the amount of oxygen supplied to the ozone generator when an abnormality occurs, based on the adjustment method and adjustment amount.

[0039] Figure 6 is a flowchart illustrating the operation (operating method) of the ozone supply device when the control device receives a fault signal via a signal line from the oxygen transfer device 42 or the depressurization mechanism 43, which are facilities for separating and transferring oxygen.

[0040] First, when the control device 6 receives a fault signal from the oxygen transfer device 42 via signal line 61d or from the decompression mechanism 43 via signal line 61e (step S1), the control device 6 sends a close signal to the adsorption tower inlet valve 21 and an open signal to the bypass valve 31 (step S2; see Figure 5).

[0041] Next, an output increase signal is transmitted from the control device 6 to the ozone generator via the signal lines 60a, 60b, and 60c (step S3. See FIG. 5). At this time, the amount to be increased is given as a command value, and that value is given by the rated ozone concentration × z. Here, z is the output increase ratio with respect to the rated concentration of the ozone generator, and the value of z is usually determined within the range of 1 < z ≦ 1.5, and is determined to be an appropriate value according to the abnormal situation of the corresponding device. Note that the upper limit value of z is determined from the ozone concentration that the ozone generator can output.

[0042] Finally, an output reduction signal is oscillated from the control device 6 to the oxygen supply facilities 2a, 2b, and 2c via the signal lines 60d, 60e, and 60f, respectively (step S4. See FIG. 5). At this time, the amount to be increased is given as a command value, and that value is given by the rated ozone concentration ÷ z. Here, z is the same as that described above (detailed description is omitted here).

[0043] As described above, according to the ozone supply device of Embodiment 2, even when the shared facility for separating or transferring oxygen fails, by adopting a device configuration that allows the facility to be operated in a bypass mode, it is possible to prevent the ozone supply to the ozone contact tank from stopping, and to improve the reliability of the ozone supply device or to stabilize the treated water quality.

[0044] Also, during normal operation, since oxygen can be reused, it is not necessary to supply an oxygen flow rate corresponding to the rated air volume of the ozone generator from the oxygen supply facility. Also, when the facility for separating or transferring oxygen fails, oxygen cannot be reused, so it is necessary to supply an oxygen flow rate corresponding to the rated air volume of the ozone generator from the oxygen supply facility. Conventionally, as a backup during a failure, the oxygen supply facility has been provided with a facility capacity corresponding to the rated air volume of the ozone generator. In contrast, according to the ozone supply device of Embodiment 2 of the present invention, it is possible to operate at an air volume lower than the rated air volume of the ozone generator during a failure, and it is possible to expect a reduction in the introduction cost of the oxygen supply facility or energy savings during a failure operation.

[0045] Furthermore, in the event of a malfunction in the oxygen separation or transfer equipment, the oxygen supply equipment capacity can be reduced by operating at a higher ozone concentration than the rated ozone concentration. For example, as mentioned above, since the maximum value of z is 1.5 (which indicates that in the event of a malfunction, the generated ozone concentration can be increased to 1.5 times the rated generated ozone concentration), it can be seen that in the event of a malfunction, the oxygen airflow supplied from the oxygen supply equipment to the ozone generator can be reduced to approximately 0.67 times the rated airflow. In other words, a reduction of more than 30% in oxygen supply equipment capacity can be expected. However, it is important to note that the power consumption of the ozone generator will also increase as the generated ozone concentration increases.

[0046] Embodiment 3. The ozone supply device according to Embodiment 3 will be described below with reference to Figures 7 and 8. The ozone supply device according to Embodiment 3 differs from the ozone supply device according to Embodiment 2 in that it is further equipped with an oxygen concentration meter 47 (hereinafter also simply referred to as the concentration meter 47) (see Figure 7). This oxygen concentration meter 47 is provided to measure the oxygen concentration at the outlet position of the adsorption device, and if there is an abnormality in the oxygen concentration, an abnormality signal is transmitted to the control device 6 via the signal line 61f.

[0047] Next, we will explain the operation (operating method) of the ozone supply device in the event of a malfunction or abnormality in the ozone supply device according to Embodiment 3, using the flowchart shown in Figure 8.

[0048] First, when the control device 6 receives a fault signal from the oxygen transfer device 42 via signal line 61d or from the decompression mechanism 43 via signal line 61e, or receives an abnormal oxygen concentration signal at the adsorption tower outlet from the oxygen concentration meter 47 via signal line 61f (step S5), the control device 6 sends a close signal to the adsorption tower inlet valve 21 and an open signal to the bypass valve 31 (step S2; see Figure 6). Furthermore, the operations following the above steps (steps S3 and S4) and the value of z in the figure are the same as those described in the explanation of the operation of the ozone supply device according to Embodiment 2 described above, so the explanation is omitted here. In addition, since only ozone is used in the reaction in the ozone contact tank, there is no problem even if the ozone contains oxygen.

[0049] As described above, the ozone supply device of Embodiment 3 can detect not only malfunction signals from shared equipment for separating or transferring oxygen, but also abnormalities in the adsorption device, which is equipment for separating oxygen, based on the oxygen concentration.

[0050] Although this application describes various exemplary embodiments and examples, the various features, aspects, and functions described in one or more embodiments are not limited to the application of a particular embodiment, but can be applied individually or in various combinations to the embodiments. Accordingly, countless variations not illustrated are conceivable within the scope of the technology disclosed herein. These include, for example, modifications, additions, or omissions of at least one component, as well as the extraction of at least one component and its combination with components of other embodiments. Specifically, in the above explanation, the signals exchanged with the control device were described using different codes for transmission and reception, assuming that these functions differed. However, this is not the only explanation; if the components of the ozone supply device that the control device transmits to and receives from are identical, the signal line can be physically identical and perform both transmission and reception functions, so the same code may be used. Furthermore, while the explanation assumed the signal line was wired, it is not limited to this; it may also be wireless. [Explanation of Symbols]

[0051] 1a, 1b, 1c Compressed air supply equipment, 2a, 2b, 2c Oxygen supply equipment, 3a, 3b, 3c Ozone generator, 4 Oxygen recycling equipment, 5 Ozone contact tank, 10a First shared piping (oxygen header pipe), 10b Second shared piping (ozonated oxygen header pipe), 11a Third shared piping (compressed air header pipe), 11b Fourth shared piping (supply ozone header pipe), 21 Adsorption tower inlet valve, 30 Bypass piping, 31 Bypass valve, 40 NOx removal device, 41a, 41b Adsorption tower (adsorption device), 42 Oxygen transfer device (blower), 43 Pressure reducing mechanism (vacuum blower), 44 Ozone buffer device, 45 Cooler, 46a, 46b, 46c Ozone concentration meter, 47 Oxygen concentration meter, 50 Treated water, 51a~51d Aeration device, 60a~60h Signal line (transmitting signal line from control device), 61a~61e Signal line (receiving signal line from control device)

Claims

1. Multiple ozone generators that produce ozone from oxygen, An adsorption device shared by multiple ozone generators separates oxygen contained in a mixed gas by adsorbing ozone from a mixed gas supplied from an ozone generator, which is composed of oxygen and the ozone, An oxygen transfer device shared by multiple ozone generators transfers oxygen separated from the mixed gas by the adsorption device to the ozone generator, A first shared piping connects the outlet side of the oxygen transport device from which oxygen is discharged and the inlet side of the ozone generator from which oxygen is supplied, A second shared pipe connects the inlet side of the adsorption device to which the mixed gas is supplied and the outlet side of the ozone generator from which the mixed gas is discharged, An ozone supply device characterized by being equipped with the following features.

2. The ozone contact tank, to which the ozone and compressed air are supplied and to which the stored treated water and the ozone are brought into contact, is connected via a shared pipe separate from the first and second shared pipes, and a bypass pipe branched from the second shared pipe, An adsorption tower inlet valve is installed in the path of the piping connected to the second shared piping and located on the inlet side of the adsorption device, A bypass valve installed within the path of the bypass piping, A control device having signal lines individually connected to the adsorption device and the oxygen transfer device, and which opens and closes the adsorption tower inlet valve and the bypass valve based on signals transmitted from the adsorption device and the oxygen transfer device via each signal line, Equipped with, The ozone supply device according to feature 1.

3. A cooler for cooling the gas passing through the piping is provided in the path of the piping installed to transfer the separated oxygen from the adsorption device to the first shared piping. The ozone supply device according to feature 1.

4. A cooler for cooling the gas passing through the piping is provided in the path of the piping installed to transfer the separated oxygen from the adsorption device to the first shared piping. The ozone supply device according to claim 2, characterized in that it is the same as described in claim 2.

5. A concentration meter for measuring oxygen concentration is provided in the path of the piping connected to the outlet of the adsorption device, and a control device is provided for detecting an abnormality of the adsorption device based on the oxygen concentration measured by the concentration meter. The ozone supply device according to claim 2, characterized in that it is the same as described in claim 2.

6. Multiple ozone generators that produce ozone from oxygen, An adsorption device that separates oxygen contained in a mixed gas by adsorbing ozone from a mixed gas supplied from an ozone generator, which is composed of oxygen and the ozone, An oxygen transfer device that transfers oxygen separated from the mixed gas by the adsorption device to the ozone generator, A first shared piping connects the outlet side of the oxygen transport device from which oxygen is discharged and the inlet side of the ozone generator from which oxygen is supplied, A second shared pipe connects the inlet side of the adsorption device to which the mixed gas is supplied and the outlet side of the ozone generator from which the mixed gas is discharged, An ozone contact tank, to which the ozone and compressed air are supplied and which is brought into contact with the stored treated water to react, is connected via a shared pipe separate from the first and second shared pipes, and is a bypass pipe branched from the second shared pipe, An adsorption tower inlet valve is installed in the path of the piping connected to the second shared piping and located on the inlet side of the adsorption device, A bypass valve installed within the path of the bypass piping, A control device having signal lines individually connected to the adsorption device and the oxygen transfer device, and which opens and closes the adsorption tower inlet valve and the bypass valve based on signals transmitted from the adsorption device and the oxygen transfer device via each signal line, A method for operating an ozone supply device equipped with, When an abnormality occurs in the adsorption device or the oxygen transfer device, the output of the oxygen supply equipment that supplies oxygen to the ozone generator is reduced to a level lower than the rated airflow of the ozone generator, which is determined by the ratio of the rated ozone generation amount of the ozone generator to the rated ozone concentration of the ozone generator. The mixed gas is supplied directly from the ozone generator to the ozone contact tank via the bypass piping, without going through the adsorption device or the oxygen transfer device. A method for operating an ozone supply device, characterized by the following features.

7. The ozone generator is operated at an ozone concentration higher than its rated ozone concentration. The method for operating the ozone supply apparatus according to feature 6.