Sealing system for gas analyzer components

Abstract

The sealing system includes a first seal, a second seal spaced apart from the first seal, and a sealing chamber defined between the first seal and the second seal. The sealing chamber is fluidly connected to a vacuum source. During operation, the sealing chamber is maintained at a pressure less than atmospheric pressure. Contaminants that disrupt one of the first seal and the second seal are drawn into the sealing chamber and removed by the vacuum source.

Description

Technical Field

[0001] Cross - reference to Related Applications / Priority Claims This application is related to and claims priority from co - owned Provisional Patent Application No. 63 / 172,338, filed on April 8, 2021. The entire content of the said application is incorporated herein by reference.

[0002] This disclosure generally relates to a sealing system for components attached to a vacuum chamber.

Background Art

[0003] Gas analyzer systems are used to sample and analyze gases released during manufacturing processes in various industries. For example, a gas analyzer can be used to analyze gases generated during a semiconductor manufacturing process. Many gas analyzers operate under low - pressure or vacuum conditions and require a vacuum seal around valves and sensors. These seals are prone to leakage due to defects in the sealing surface, defects in sealing components such as gaskets, improper installation, and gas permeation when non - metallic seals are used. Also, leakage may occur over time as a result of degradation of the sealing components due to mechanical stress and / or interaction with process chemicals. Inlet components are particularly vulnerable to leakage because they connect to the device or process tool being tested. These leaks interfere with the samples collected by the gas analyzer and the ultimate monitoring of the semiconductor manufacturing process.

[0004] In some gas analyzers, a vacuum seal is welded to create a robust seal or a metal seal, such as conflat seals, and is used to achieve the vacuum conditions required for the gas analyzer. These types of seals are more expensive and add extra weight to the gas analyzer system.

[0005] These are just a few of the problems associated with the sealing systems currently used in gas analyzers. [Overview of the project]

[0006] In one embodiment, the sealing system may include an inner seal surrounding a conduit or connection of a component to a vacuum chamber. An outer seal is positioned around the inner seal, spaced apart from it and having a defined internal volume or volume such as a pump chamber between them. The pump chamber can be evacuated or depressurized to a pressure significantly lower than atmospheric pressure. If there is a leak in the inner seal, gas will leak only from the volume between the seals, which is maintained at a low pressure, and not from a high pressure (e.g., 1 atm). This reduces the amount of gas leaking into the system by orders of magnitude. As a result, leaks that would normally be significant become very small here, not affecting the performance of the equipment and not adversely impacting the equipment being tested by the gas analyzer. Furthermore, if there is a leak in the inner seal, all toxic gases or other volatile gases are vented through the pump chamber and are not released into the external environment.

[0007] In one embodiment, the pump chamber is connected to a double-sealed turbomolecular (turbo) pump. A vacuum manifold holding a sensor (most commonly a mass spectrometer) is fitted with a sampling connection and may have a machined channel connecting the pumping volume to the lower stage of the turbo. In one embodiment, the pump chamber may be coupled to the turbo via one or more vacuum conduits integrated into the vacuum manifold. In another embodiment, the pump chamber may be coupled to the turbo via one or more vacuum conduits located outside the vacuum manifold. In yet another embodiment, the pump chamber may be coupled to a separate vacuum pump located outside the system or vacuum manifold, which may evacuate it.

[0008] In one embodiment, a sealing system for a gas analyzer component comprises an inner sealing member, an outer sealing member spaced apart from the inner sealing member, a sealing chamber defined between the inner and outer sealing members, and one or more conduits configured to fluidly connect the sealing chamber to a vacuum source. During operation, the sealing chamber is maintained at a pressure lower than atmospheric pressure. Contaminants that would damage either the inner or outer sealing member are drawn into the sealing chamber and removed via the one or more conduits.

[0009] In one embodiment, the inner sealing member surrounds a passage between two parts of the gas analyzer. In one embodiment, at least one of the inner sealing member and the outer sealing member is made of an elastomer material. In one embodiment, at least one of the inner sealing member and the outer sealing member is made of a polymer material. In one embodiment, the outer sealing member is at least partially positioned within a groove defined on the surface of the gas analyzer. In a further embodiment, one or more conduits are formed as part of the gas analyzer.

[0010] Another embodiment of the sealing system comprises a first seal, a seal spaced apart from the first seal, and a sealing chamber defined between the first and second seals. The sealing chamber is fluidly connected to a vacuum source and, during operation, is maintained at a pressure lower than atmospheric pressure. Contaminants that would rupture either the first or second seal are drawn into the sealing chamber and removed by the vacuum source.

[0011] In one embodiment, the first seal is configured to surround a passage between two components of the gas analyzer. In one embodiment, at least one of the first seal and the second seal is made of an elastomer material. In one embodiment, at least one of the first seal and the second seal is made of a polymer material. In a further embodiment, the second seal is at least partially located in a groove defined on the surface of the gas analyzer. In one embodiment, the sealing chamber is fluidly coupled to a vacuum source using one or more conduits formed as part of the gas analyzer. In one embodiment, the vacuum source is located away from the gas analyzer. In one embodiment, the vacuum source is a system vacuum pump for the gas analyzer.

[0012] Embodiments for sealing joints between components of a gas analyzer include the step of constructing a sealing system between components comprising a first seal, a seal spaced apart from the first seal, and a sealing chamber defined between the first and second seals. The sealing chamber is fluidly connected to a vacuum source that, when in operation, maintains the sealing chamber at a pressure lower than atmospheric pressure. Contaminants that break the first seal and one of the second seals and are drawn into the sealing chamber are removed using the vacuum source.

[0013] The sealing systems and methods disclosed herein can be used to replace heavier and more expensive metal sealing technologies (e.g., Conflat flanges) because they are easier to use, lighter, and less expensive than elastomer or polymer seals. These sealing systems can also provide robust ultra-high vacuum seals against leaks. While the examples of sealing systems disclosed herein focus on valve and inlet components, embodiments of the sealing systems can also be used with any interchangeable components mounted in the vacuum chamber of a gas analyzer, such as gauges and sensors. [Brief explanation of the drawing]

[0014] A more detailed description of the present invention, which has been briefly outlined above, can be obtained by referring in part to embodiments illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings illustrate only typical embodiments of the present invention and therefore should not be considered limiting in scope, as the present invention may permit other equally effective embodiments. Accordingly, the following detailed description can be referred to in conjunction with the drawings for a further understanding of the nature and purpose of the present invention.

[0015] [Figure 1A] A schematic cross-sectional view of one embodiment of a gas analyzer equipped with a sealing system is shown. [Figure 1B] Figure 1A shows an enlarged view of an embodiment of the sealing system. [Figure 2] This shows a schematic, enlarged view of the opening of a valve that is sealed by one embodiment of the sealing system. [Figure 3] A schematic cross-sectional view of some embodiments of a gas analyzer with another embodiment of the sealing system is shown. [Figure 4A] This shows an enlarged schematic diagram of the double opening of a valve sealed by one embodiment of a sealing system. [Figure 4B] A schematic cross-sectional view along AA of the embodiment in Figure 4A is shown. [Figure 5] A schematic cross-sectional view of a partial, alternative embodiment of a gas analyzer with another embodiment of the sealing system is shown. [Figure 6] Figure 5 shows an enlarged view of an embodiment of the sealing system. [Figure 7A] Figure 6 shows an enlarged schematic cross-sectional view of an embodiment of the sealing system, illustrating examples of airflow at the valve connection and within the pump chamber. [Figure 7B] Figure 6 shows an enlarged schematic cross-sectional view of an embodiment of the sealing system, illustrating another example of airflow in the valve connection and within the pump chamber. [Figure 8]A schematic cross-sectional view of some embodiments of a gas analyzer with another embodiment of a sealing system is shown. [Figure 9A] A schematic cross-sectional view of some embodiments of a gas analyzer with another embodiment of a sealing system is shown. [Figure 9B] A schematic cross-sectional view of some embodiments of a gas analyzer with another embodiment of a sealing system is shown. [Figure 10A] A schematic cross-sectional view of some embodiments of a gas analyzer with another embodiment of a sealing system is shown. [Figure 10B] An enlarged view of a part of the embodiment of FIG. 10A is shown. [Figure 11] A schematic cross-sectional view of some embodiments of a gas analyzer with another embodiment of a sealing system is shown. [Figure 12A] A perspective view of an embodiment of a turbo vacuum pump is shown. [Figure 12B] A top perspective view of an embodiment of a turbo vacuum pump is shown.

[0016] The accompanying drawings are for illustrative purposes and are not necessarily to scale.

Best Mode for Carrying Out the Invention

[0017] The following description relates to various embodiments of a sealing system for components coupled to a gas analyzer. The modifications described herein will be understood to be examples that specifically express a particular inventive concept, as detailed herein. For this purpose, other modifications and alterations will be readily apparent to those skilled in the art. In addition, certain terms are used throughout this description in order to provide a proper view with respect to the accompanying drawings. These terms, such as “upper,” “lower,” “front,” “rear,” “internal,” “external,” “front,” “rear,” “upper end,” “bottom,” “inside,” “outside,” “first,” and “second,” are not intended to limit these concepts unless specifically indicated so. Where used herein, the terms “about,” “approximately,” or “substantially” may refer to a range of 80% to 125% of the claimed or disclosed values, unless otherwise stated. With respect to the drawings, their purpose is to depict notable features of the sealing system for components coupled to a gas analyzer and are not provided in particular to scale.

[0018] Parts of the gas analyzer 10 are shown in Figures 1A and 2. The gas analyzer 10 generally comprises a valve 20 coupled to a housing 40 surrounding a vacuum chamber 30. The valve 20 comprises an inlet 23 and an outlet 24. One or more internal conduits 26 are fluidly connected to the inlet 23 and outlet 24, and the outlet 24 is fluidly connected to the vacuum chamber 30. As shown in Figure 1A, the inlet 23 may be fluidly connected to an additional external or supplemental inlet channel 22. A sensor 70 may be coupled to the vacuum chamber housing 40 and configured to detect gas in the vacuum chamber 30. In one embodiment, the sensor 70 may be a mass spectrometer. A system vacuum pump 50 is surrounded by a vacuum manifold 60 and is configured to reduce the pressure of the vacuum chamber 30 to a desired pressure level. As shown, a sealing system 100 is used to seal the connection between the valve 20 and the vacuum chamber 30 to prevent leaks that would impair the function of the valve 20 and / or the monitoring process.

[0019] Referring to Figures 1B and 2, the sealing system 100 comprises a first seal and a second seal. As shown, the sealing system has an inner seal 112 or inner sealing member defining an opening 119 configured to receive or enclose a channel or conduit, and is positioned around the outer circumference of the channel or conduit, such as an inlet 23 or outlet 24 of a valve 20. The outer seal 114 or outer sealing member is positioned around the inner seal 112, away from it, so that an inner volume or seal chamber 118 is defined between the inner seal 112 and the outer seal 114. In some embodiments, including those shown in Figures 1A, 1B, 5-7B, 9A, 10A, and 10B, the outer seal 114 may be at least partially positioned in a groove 116 formed in the housing 40 of the valve 20 or vacuum chamber 30. In some embodiments, the outer seal 114 may be an O-ring made of an elastomer or polymer material. In the embodiments schematically shown in Figures 1B and 2, the seal chamber 118 is fluidly connected to the system vacuum pump 50 using one or more vacuum conduits 115. However, in some embodiments, such as those shown in Figures 1A and 3, the seal chamber 118 is instead fluidly connected to the vacuum chamber 30 and is depressurized when the vacuum chamber 30 is depressurized.

[0020] Figures 3–4B show a portion of a gas analyzer 10A with an embodiment of a sealing system 200, which comprises at least one inner seal 212 or sealing member and an outer seal 214 or sealing member not located in a groove or channel formed in the housing 40 of the valve 20 or vacuum chamber 30. Alternatively, the outer seal 214 may be located at the connection portion of the valve and in the housing 40 of the vacuum chamber 30. The outer seal 214 may be separated from one or more inner seals 212, or they may be formed as a single part, such as in the embodiment shown in Figure 4A. At least one inner seal 212 defines an opening 219 configured to receive or otherwise enclose a channel or conduit, such as an inlet 23 or outlet 24 of the valve 20. The outer seal 214 is located between the valve 20 and the housing 40 of the vacuum chamber 30. Both the outer seal 214 and the at least one inner seal 212 may be made of the same material, such as an elastomer or polymer material, or they may be made of different materials. Many embodiments of the outer seals and inner seals, as well as the conduits, are shown to be elliptical (such as circular) or oval, but those skilled in the art will understand that other shapes are possible for these components. Figure 4B is a schematic cross-sectional view shown along line AA in Figure 4A. As shown, two or more openings 213 defined between one or more inner seals 212 and the outer seal 214 define a seal chamber 218 extending between the outer seal 214 and one or more inner seals 212. One or more vacuum conduits 215 fluidly connect the seal chamber 218 to the vacuum chamber 30, as in the sealing system 100.

[0021] Figures 5–7B show a portion of a gas analyzer 10A equipped with a sealing system 300 having an outer seal 314 similar to that in Figures 1A and 1B. In this embodiment, the outer seal 314 is located in a groove or channel 316 formed in the housing 40 of the valve 20 and / or vacuum chamber 30. A seal chamber 318 is formed between the outer seal 314 and one or more inner seals 312. In this embodiment, the seal chamber 318 is fluidly connected to a vacuum conduit 315 that is integrated with or formed within the housing 40 of the vacuum chamber 30. The vacuum conduit 315 is then fluidly connected to a supplemental vacuum conduit 317 located outside the vacuum chamber housing 40 and / or gas analyzer 10A. As shown in Figures 5–7B, the supplemental vacuum conduit 317 is fluidly connected to a secondary vacuum pump 80 which may be located outside the gas analyzer 10A. This secondary vacuum pump 80 is separate from the system vacuum 50 which is configured to individually reduce the pressure of the vacuum chamber 30. Therefore, the environment of the seal chamber 318 can be controlled independently of the environment of the vacuum chamber 30.

[0022] Figures 7A and 7B show examples of airflow patterns through the sealing system 300. In the case of an air leak in the outer seal 314, schematically shown as multiple arrows in Figure 7A, the air leak enters the pump chamber 318 and is exhausted by the secondary vacuum pump 80 through the vacuum conduit 315 (and supplemental vacuum conduit 317). Alternatively, if a leak occurs in one or more inner seals 312, as schematically shown as multiple arrows in Figure 7B, any leaked gas enters the pump chamber 318 and is exhausted through the vacuum conduit 315 (and supplemental vacuum conduit 317). In this way, toxic gases or other volatile gases do not leak into the ambient environment. As shown in Figure 8, part of the gas analyzer 10A is shown with a sealing system 400 that seals the valve 20 to the housing 40 of the vacuum chamber 30. In this embodiment, the outer seal 414 and one or more inner seals 412 are similar to those in Figures 3 and / or 4B. The sealing chamber 418 is formed between the outer seal 414 and one or more inner seals 412. The seal chamber 418 is integrated with the housing 40 of the vacuum chamber 30 or coupled to a vacuum conduit 415 formed therein. The vacuum conduit 415 is fluidly connected to a supplemental vacuum conduit 417 which may be outside the vacuum chamber housing 40 and / or the gas analyzer 10A. As shown in Figure 8, the supplemental vacuum conduit 417 is fluidly connected to a secondary vacuum pump 80 which may be outside the gas analyzer 10A. This secondary vacuum pump 80 is separate from the system vacuum pump 50 which is configured to reduce the pressure in the vacuum chamber 30, and can therefore be controlled independently of the system vacuum pump 50.

[0023] Figure 9A shows a portion of a gas analyzer 10B with an embodiment of the sealing system 300 of Figures 5-7B, which is not connected to a secondary vacuum pump 80. Here, a supplemental vacuum conduit 317 of the sealing system 300 connects the vacuum conduit 315, and therefore the pump chamber 318, to a system vacuum pump 50 via one or more system channels 62 formed in the vacuum manifold 60. Thus, the system vacuum pump 50 can be used to depressurize or evacuate the vacuum chamber 30 and the pump chamber 318. The supplemental vacuum conduit 317 may be removable so that it can be used to fluidize the system vacuum pump 50 or a secondary vacuum pump 80 as in Figures 5-7B. When the supplemental vacuum conduit 317 is fluidized to the secondary vacuum pump 80, one or more system channels 62 may be blocked or otherwise isolated from external contamination.

[0024] Figure 9B shows a portion of a gas analyzer 10B with one embodiment of a sealing system 400 that seals a valve 20 to the housing 40 of the vacuum chamber 30. In this embodiment, one or more inner seals 412 and an outer seal 416 are similar to those in Figures 3 and / or 4B. Thus, a seal chamber 418 is formed between the outer seal 414 and one or more inner seals 412. The seal chamber 418 is integrated with the housing 40 of the vacuum chamber 30 or coupled to a vacuum conduit 415 formed therein. The vacuum conduit 415 can then be fluidly connected to a supplemental vacuum conduit 417 which may be outside the vacuum chamber housing 40 and / or the gas analyzer 10A. As shown in Figure 8, the supplemental vacuum conduit 417 is fluidly connected to a secondary vacuum pump 80 which may be outside the gas analyzer 10B. This secondary vacuum pump 80 is isolated from the system vacuum pump 50 which is configured to reduce the pressure of the vacuum chamber 30, and can therefore be controlled independently of the system vacuum pump 50.

[0025] Embodiments shown in Figures 10A and 10B show a portion of a gas analyzer 10C with another embodiment of the sealing system 500, where the outer seal 514 is similar to the outer seal 114 described in Figures 1A-2. The outer seal 514 may be at least partially located within a groove or channel 516 formed as part of the housing 40 of the valve 20 or vacuum chamber 30. The sealing chamber 518 is defined between the outer seal 514 and at least one inner seal 512. The sealing chamber 518 is integrated with the housing 40 of the vacuum chamber 30 or coupled to a vacuum conduit 515 formed therein. In particular, as shown in Figure 10A, the vacuum conduit 515 is formed within a vacuum manifold 60 coupled to a system vacuum pump 50 or coupled to one or more system conduits 562, 564 integrated therewith. The diameters of the system conduits 562, 564 may be varied depending on the desired vacuum characteristics or gas analyzer design. For example, portions of the system conduits 561, 563 located near the vacuum chamber 30 or the vacuum chamber housing 40 may have a larger diameter than the rest of the system conduits 562, 564 that extend to the system vacuum pump 50. Thus, this embodiment of the gas analyzer 10C has a sealing system 500 comprising a sealing chamber 518 which is integrated with the vacuum manifold 60 and the housing 40 of the vacuum chamber 30, or coupled to the system vacuum pump 50 via conduits formed together with it.

[0026] Another embodiment of the sealing system 600 is shown in Figure 11. In this embodiment, the outer seal 614 is similar to the outer seal 214 described in Figures 3 and 4A-4B. The outer seal 614 is located between the valve 20 and the housing 40 of the vacuum chamber 30, or at their interface. At least one inner seal 612 is located inside the outer seal 614 and defines at least one opening configured to receive, or otherwise enclose, a channel or conduit, such as an inlet 23 or outlet 24 of the valve 20. The sealing chamber 618 is defined between the outer seal 614 and at least one inner seal 612. The sealing chamber 618 is integrated with the housing 40 of the vacuum chamber 30 or is fluidly connected to a vacuum conduit 615 formed therein. The vacuum conduit 615 may be fluidly connected to one or more system conduits 662, 664 formed within or integrated with the vacuum manifold 60, which is fluidly connected to the system vacuum pump 50. The diameters of the system conduits 662, 664 may be varied depending on the desired vacuum characteristics or the design of the gas analyzer. For example, some of the system conduits 661, 663 located near the vacuum chamber 30 or the vacuum chamber housing 40 may have a larger diameter than the rest of the system conduits 662, 664 that extend to the system vacuum pump 50. Thus, this embodiment of the gas analyzer 10C also has a sealing system 600 comprising a sealing chamber 618 which is fluidly connected to the system vacuum pump 50 via conduits that are integrated with or formed together with the vacuum manifold 60 and the housing 40 of the vacuum chamber 30.

[0027] The one or more inner and outer seals described above may be made of an elastomer material such as rubber. The pump chamber can be depressurized to a level much lower than 1 atm or 760 Torre. In one embodiment, the pressure in the pump chamber can be depressurized to less than 1 Torre and maintained at less than 1 Torre. In another embodiment, the pressure in the pump chamber can be depressurized to less than 0.5 Torre and maintained at less than 0.5 Torre. Embodiments of sealing systems 100, 200, 300, 400, 500, and 600 have been described with respect to valve 20, and such embodiments of the sealing system can be used to seal any surface-mount components to the vacuum chamber of a gas analyzer such as a sensor 70.

[0028] The vacuum pump used in the embodiments described may be any known vacuum pump. In one embodiment, the system vacuum pump 50 or secondary vacuum pump 80 may be used in combination with getter material located within the pump chamber. In another embodiment described with reference to Figures 12A and 12B, the system pump 50 may be a turbopump having a plurality of blades 51 configured to rotate within a blade chamber 53 and operably coupled to an actuator. An inner seal 52 is positioned around the opening of the blade chamber 53 to seal the blade chamber against the housing 40 of the vacuum manifold 60 or vacuum chamber 30. An outer seal 54 is positioned outside the inner seal 52 and surrounds the inner seal 52. The volume 55 defined between the seals 52, 54 can be reduced to a level much lower than 1 atm or 760 tor via one or more pump conduits 56. When a turbopump, such as that shown in Figures 12A and 12B, is used as the system vacuum pump 50, one or more pump conduits 56 may be coupled to the pump chamber of the sealing system to reduce the pressure in the pump chamber. For example, one or more pump conduits 56 may be connected to the pump chambers via internal or integrated vacuum conduits 515, 615 and system conduits 562, 564, 662, 664, such that the sealing chambers 518, 618, vacuum conduits 515, 615, system conduits 562, 564, 662, 664, and system vacuum pump 50 of the sealing systems 500, 600 are all located within the manifold 60 or housing 40 of the gas analyzer 10C.

[0029] While the present invention has been specifically illustrated and described with reference to certain exemplary embodiments, it will be understood by those skilled in the art that various modifications can be made to the invention in detail without departing from the spirit and scope of the invention as supported by the description and drawings. Furthermore, if an exemplary embodiment is described with reference to a certain number of elements, it will be understood that the exemplary embodiment can be implemented using fewer or more elements than that certain number.

Claims

1. A sealing system for a gas analyzer, An inner sealing member disposed at the connection between the valve and the housing of the vacuum chamber, wherein the valve has an inlet and an outlet, and the inner sealing member surrounds the inlet and outlet of the valve, An outer sealing member is positioned at a distance from the inner sealing member and is located at the connection between the valve and the housing of the vacuum chamber, A sealing chamber defined between the inner sealing member and the outer sealing member, One or more conduits configured to fluidly connect the sealing chamber to the vacuum chamber, Equipped with, During operation, the sealing chamber is maintained at a pressure lower than atmospheric pressure. A sealing system in which contaminants that damage one of the inner sealing member and the outer sealing member are drawn into the sealing chamber and removed into the vacuum chamber via one or more conduits.

2. The sealing system according to claim 1, wherein the inner sealing member and the outer sealing member are formed as a single component.

3. The sealing system according to claim 1, wherein at least one of the inner sealing member and the outer sealing member is made of an elastomer material.

4. The sealing system according to claim 1, wherein at least one of the inner sealing member and the outer sealing member is made of a polymer material.

5. The sealing system according to claim 1, wherein the outer sealing member is at least partially disposed within a groove defined on the surface of the vacuum chamber.

6. The sealing system according to claim 1, wherein the one or more conduits are formed as part of the gas analyzer.

7. A sealing system for sealing the connection between a valve and a vacuum chamber of a gas analyzer, wherein the sealing system comprises: The first sticker and A second seal is positioned at a distance from the first seal, the valve has an inlet and an outlet, and the second seal surrounds the inlet and outlet of the valve, A sealing chamber defined between the first seal and the second seal, A sealing system comprising, The sealing chamber is fluidly connected to the vacuum chamber. During operation, the sealing chamber is maintained at a pressure lower than atmospheric pressure. A sealing system in which contaminants that would destroy one of the first seal and the second seal are drawn into a sealing chamber and removed by the vacuum chamber.

8. The sealing system according to claim 7, wherein the first seal and the second seal are formed as a single component.

9. The sealing system according to claim 7, wherein at least one of the first seal and the second seal is made of an elastomer material.

10. The sealing system according to claim 7, wherein at least one of the first seal and the second seal is made of a polymer material.

11. The sealing system according to claim 7, wherein the second seal is at least partially positioned in a groove defined on the surface of the gas analyzer.

12. The sealing system according to claim 7, wherein the sealing chamber is fluidly coupled to the vacuum chamber using one or more conduits formed as part of a gas analyzer.

13. The sealing system according to claim 7, wherein the vacuum source is located away from the gas analyzer.

14. The sealing system according to claim 7, wherein the vacuum source is a system vacuum pump for a gas analyzer.

15. A method for sealing the joint between a valve and a vacuum chamber of a gas analyzer, wherein the method is: The sealing system A first seal is disposed at the connection between the valve and the housing of the vacuum chamber, A second seal is positioned at a distance from the first seal and located at the connection between the valve and the housing of the vacuum chamber, wherein the valve has an inlet and an outlet, and the second seal surrounds the inlet and outlet of the valve. A sealing chamber defined between the first seal and the second seal, Steps to build to include, The steps include: fluidly connecting the sealing chamber to the vacuum chamber; If in operation, the sealing chamber is maintained at a pressure lower than atmospheric pressure, The steps include destroying one of the first seal and the second seal, and using the vacuum chamber to remove contaminants drawn into the sealing chamber, Methods that include...

16. The method according to claim 15, further comprising the step of constructing at least one of the first seal and the second seal to include an elastomer material.

17. The method of claim 15, further comprising the step of positioning the second seal at least partially in a groove defined on the surface of the valve or on the surface of the vacuum chamber.

18. The method according to claim 15, wherein the step of fluidly connecting the sealing chamber to the vacuum chamber includes one or more conduits formed as part of a gas analyzer.

19. The method according to claim 15, wherein the vacuum source is located away from the gas analyzer.

20. The method according to claim 15, wherein the vacuum source is a system vacuum pump for a gas analyzer.

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